WO2022070239A1 - 流量測定装置 - Google Patents
流量測定装置 Download PDFInfo
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- WO2022070239A1 WO2022070239A1 PCT/JP2020/036832 JP2020036832W WO2022070239A1 WO 2022070239 A1 WO2022070239 A1 WO 2022070239A1 JP 2020036832 W JP2020036832 W JP 2020036832W WO 2022070239 A1 WO2022070239 A1 WO 2022070239A1
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- 238000005259 measurement Methods 0.000 title abstract description 10
- 239000012530 fluid Substances 0.000 claims abstract description 68
- 238000012937 correction Methods 0.000 claims description 20
- 238000001514 detection method Methods 0.000 claims description 15
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- 229920011301 perfluoro alkoxyl alkane Polymers 0.000 description 10
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- 239000002253 acid Substances 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
- G01F1/32—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow using swirl flowmeters
- G01F1/3209—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow using swirl flowmeters using Karman vortices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
- G01F1/32—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow using swirl flowmeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
- G01F1/32—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow using swirl flowmeters
- G01F1/325—Means for detecting quantities used as proxy variables for swirl
- G01F1/3287—Means for detecting quantities used as proxy variables for swirl circuits therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
- G01F15/022—Compensating or correcting for variations in pressure, density or temperature using electrical means
- G01F15/024—Compensating or correcting for variations in pressure, density or temperature using electrical means involving digital counting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/08—Protective devices, e.g. casings
Definitions
- the present invention relates to a flow rate measuring device.
- a general vortex flow meter processes a vortex generator 3 that generates a Karman vortex 2 in a flow 1 in a pipe, a detection element 4 that detects a vortex, and a signal detected by the detection element 4. It consists of a converter that does.
- a Karman vortex is generated downstream of the vortex generator 3 placed in the direction perpendicular to the flow path. It is known that the frequency at which this Karman vortex is generated is proportional to the speed (flow velocity) of the fluid, and the relational expression thereof is as shown in the following equation (1).
- f St (v / d) (1)
- f the vortex frequency (1 / sec)
- v the average flow velocity of the fluid (m / sec)
- d the width of the vortex generator (m)
- St is a constant called the Strouhal number.
- the Reynolds number is a function of the kinematic viscosity coefficient, and since the kinematic viscosity coefficient changes depending on the temperature of the fluid, an error may occur in the measured flow rate depending on the actual temperature of the fluid. Therefore, in the method of measuring the flow rate using the Karman vortex, it is necessary to correct the measured flow rate.
- Patent Document 1 discloses a temperature sensor integrated vortex flow meter 11 as shown in FIG.
- the temperature sensor integrated vortex fluid meter 11 includes a measuring tube 12, a vortex generator 13, and a vortex detection sensor 15 having a built-in temperature sensor 14, and the vortex generator 13 has a measuring chamber 16 having one end open.
- the measurement chamber 16 is formed with a pressure guiding hole 17 penetrating in a direction orthogonal to the flow of the fluid to be measured, and the vortex detection sensor 15 includes a vibration tube 18 and a vortex detection unit 19, and is a vibration tube.
- Reference numeral 18 has a movable tube portion 20 inserted into the measuring chamber 16 and a pressure receiving plate 21 coupled to one end of the movable tube portion 20, and the fluid to be measured flows in the flow path 22 of the measuring tube 12, and a Karman vortex is generated. Then, the vortex detection unit 19 converts the pressure fluctuation due to the Karman vortex received by the vibration tube 18 into an electric signal and outputs it to the mass converter, and corrects the indicated temperature of the temperature sensor 14 by the temperature compensating means in the mass converter. It is described that the mass flow rate is calculated.
- Patent Document 1 discloses a vortex flow meter integrated with a temperature sensor, but it merely includes a temperature compensating means, and the specific configuration of the temperature compensating means is unknown. It is difficult to correct the flow rate error due to temperature.
- the present invention has been made in view of the problems of the prior art, and an object of the present invention is to provide a flow rate measuring device capable of reliably correcting a flow rate error due to the temperature of the fluid to be measured. It is in.
- the flow measuring device of the present invention detects changes in the vortex generator inserted in the fluid flow and the Kalman vortex generated on the downstream side of the vortex generator as changes in the electric signal.
- a temperature sensor is arranged after the detection element in a flow rate measuring device provided with a detection element to be used, an electric circuit for converting the electric signal into a vortex frequency, and an arithmetic circuit for calculating the flow rate of a fluid based on the vortex frequency.
- the temperature of the fluid measured by the temperature sensor is t
- the vortex frequency converted from the electric signal detected by the detection element is f.
- the temperature t and the vortex frequency f match the temperature and the vortex frequency of the correction table, the flow rate at the matched vortex frequency is output as the corrected flow rate.
- the temperature t corresponds to any of the temperatures t 0 , t 1 , t 2 , ..., Or t n of the correction table, but when the correction table does not have the vortex frequency f, the vortex frequency It is estimated that the amount of change and the amount of change in the flow rate are in a linear relationship, and the flow rate at the vortex frequency f calculated by the above calculation circuit is output as the corrected flow rate.
- the temperature t does not correspond to any of the temperatures of the correction table, and the temperature t is any of the temperatures t 0 , t 1 , t 2 , ..., Or t n , whichever is adjacent to the two temperatures t ⁇ and t.
- the vortex frequency at the temperature t is calculated by the above calculation circuit, and the amount of change in vortex frequency and the flow rate. It is characterized in that the amount of change in Q is estimated to have a linear relationship and the flow rate at the vortex frequency f calculated by the above calculation circuit is output as the corrected flow rate.
- FIG. 3 is a schematic structural diagram of an embodiment embodying the flow rate measuring device of the present invention.
- 31 is a flow path in the measuring tube 30, and the fluid flows in the direction of the arrow.
- the vortex generator 32 is arranged in the flow path 31. When the fluid flowing through the flow path 31 in the measuring tube 30 comes into contact with the vortex generator 32, a Karman vortex is generated on the downstream side of the vortex generator 32.
- Reference numeral 33 is a Karman vortex detector installed on the downstream side of the vortex generator 32, which holds a columnar element having a piezoelectric element 35 (a detection element that detects a change in Karman vortex as a change in an electric signal) and a temperature sensor 36. It has a part 34. 37a and 37b are lead wires.
- the vortex generator 32 vibrates.
- the vibration is detected by the piezoelectric element 35 and converted into an electric signal.
- the temperature sensor is arranged on the upstream side of the vortex generator 32, an obstacle will be arranged in front of the vortex generator 32, which may affect the generation of the vortex. Therefore, the temperature sensor 36 is located downstream of the piezoelectric element 35. It is placed on the side. Therefore, the flow rate of the fluid can be corrected based on the amount of change in the vortex frequency due to the temperature of the fluid measured by the temperature sensor 36.
- the fluid to be measured also contains a corrosive chemical solution used as a cleaning solution for industrial equipment.
- the constituent material of the flow rate measuring device needs to be composed of a material that can withstand the corrosive chemical solution. Therefore, it is preferable that the temperature sensor 36 is protected by a chemical resistant material (a material that can withstand a corrosive chemical solution). Further, it is more preferable that the material constituting the flow path 31 through which the fluid flows, the vortex generator 32 for generating Karman vortices, and the piezoelectric element 35 are protected by a chemical resistant material.
- fluororesins such as PFA (perfluoroalkoxyalkane) and PTFE (polytetrafluoroethylene), which are excellent in acid resistance, alkali resistance and organic solvent resistance, are preferable.
- the vortex generator 32 according to the embodiment of the present invention is made of PFA.
- the linear expansion coefficient of the constituent material of the flow path is small.
- the coefficient of linear expansion of PFA and PTFE is 12.4 ⁇ 10-5 / ° C near 20 to 100 ° C, and the coefficient of linear expansion of borosilicate glass, which has excellent acid resistance and alkali resistance, is 0 to 350 ° C. It is 3.2 ⁇ 10 -6 / ° C, which is more than an order of magnitude smaller than PFA and PTFE, and is more preferable as a constituent material for the flow path. Since the coefficient of linear expansion is 0.52 ⁇ 10 -6 / ° C., which is two orders of magnitude smaller than that of PFA or PTFE, it is more preferable as a constituent material for the flow path.
- the temperature sensor 36 and the piezoelectric element 35 are protected by PFA or PTFE other than the constituent materials of the flow path, a measurement error due to a change in cross-sectional area due to a temperature rise does not occur. Therefore, when the measurement target is a corrosive chemical solution, it is preferable to cover the temperature sensor 36 and the piezoelectric element 35 with PFA or PTFE. It is more preferable to mix PFA or PTFE with a filler such as glass fiber or carbon graphite in an amount of about 20 to 25% by weight because the coefficient of linear expansion can be reduced by about 20 to 40%.
- the element holding portion 34 and the measuring tube 30 of the present embodiment are made of PFA.
- an obstacle is inserted into the fluid flow to generate a Karman vortex on the downstream side thereof, and a temperature sensor is arranged after the detection element that detects the change of the vortex as the change of the electric signal.
- the flow rate of the fluid can be reliably corrected based on the amount of change in the vortex frequency due to the temperature of the fluid measured by the temperature sensor.
- FIG. 1 is a schematic structural diagram of the main components of a general vortex flowmeter.
- FIG. 2 is a schematic cross-sectional view of a conventional vortex flow meter.
- FIG. 3 is a schematic structural diagram of an embodiment embodying the flow rate measuring device of the present invention.
- FIG. 4 is a schematic block configuration diagram of an electric circuit including a CPU having an arithmetic circuit provided in the flow rate measuring device of the present invention.
- FIG. 5 is a diagram comparing the accuracy when the flow rate measured by the flow rate measuring device of the present invention is temperature-corrected and the accuracy when the temperature is not corrected.
- a temperature sensor is arranged after the piezoelectric element that detects a change in Karman vortex as a change in an electric signal, and the flow rate is corrected based on the amount of change in vortex frequency due to the temperature of the fluid measured by the temperature sensor.
- a specific correction procedure will be described below.
- the temperature data measured by the temperature sensor 36 arranged at the rear stage of the piezoelectric element 35 in the element holding portion 34 of the Kalman vortex detector 33 passes through the lead wire 37b and is an electric circuit surrounded by a one-point chain wire in FIG. It is transferred to the temperature sensor circuit of the unit and the CPU. Then, the flow value calculated in the arithmetic circuit included in the CPU based on the vortex frequency converted from the electric signal of the piezoelectric element 35 is the amount of change in the vortex frequency due to the temperature of the fluid included in the CPU. It is output after temperature correction is performed based on the correction data in the correction table (pulse and current).
- the vortex frequency 839.0 when the flow rate is 100% and the temperature is 25 ° C changes to 880.4 at 5 ° C. Even if the actual flow rate is constant, the vortex frequency changes depending on the temperature of the fluid as described above, so that the output flow rate calculated based on the vortex frequency differs.
- the vortex frequency caused by the Karman vortex largely depends on the shape of the vortex generator and the shape of the flow path. By stabilizing the vortex generator and the shape of the flow path by molding, the rate of change of the vortex frequency by each product of each flow rate measuring device can be made uniform.
- the flow rate of the fluid can be corrected based on the temperature information of the fluid from the temperature sensor by acquiring the change data as shown in Table 1 above for various fluids other than water. It is possible to do.
- Table 3 For each product of the flow rate measuring device, measure only the vortex frequency at 25 ° C with a flow rate of 100%, and multiply that value by Table 2. For example, assuming that there is a product individual having a flow rate of 100% and a vortex frequency of 25 ° C. of 850 (1 / sec), Table 3 is created by multiplying this 850 by the numerical values in Table 2. Table 3 shows the correction table of the individual product, and the correction table is provided in the calculation circuit of the CPU shown in FIG.
- Table 3 shows the temperature. Does not exist when the temperature is 25 ° C. and the vortex frequency is 440 (1 / sec). According to Table 3, the flow rate is 1.2 (liter / min) when the temperature is 25 ° C. and the vortex frequency is 428.5 (1 / sec), and the vortex frequency is 498.9 (1 / sec) when the temperature is 25 ° C.
- the temperature shown in Table 3 is shown in Table 3. Does not exist when the temperature is 12 ° C. and the vortex frequency is 600 (1 / sec). According to Table 3, the vortex frequency is 255.8 (1 / sec) when the temperature is 5 ° C and the flow rate is 0.3 (liter / min), and the temperature is 15 ° C and the flow rate is 0.3 (liter). The vortex frequency at / min) is 233.6 (1 / sec), and it is estimated that the amount of change in temperature and the amount of change in vortex frequency are in a linear relationship by looking at the specific values in Table 3.
- Table 4 shows the vortex frequency (1 / sec) when the temperature stored in the storage device in the CPU is 0.3 to 3.0 (liter / min) when the temperature is 12 ° C.
- the flow rate is 1.8 (liter / min) when the temperature is 12 ° C. and the vortex frequency is 591.7 (1 / sec), and the vortex frequency is 662.1 (liter / min) when the temperature is 12 ° C.
- the flow rate in the case of 1 / sec) is 2.1 (liter / min), and it is estimated that the amount of change in vortex frequency and the amount of change in flow rate are in a linear relationship by looking at the specific values in Table 3. be able to. Therefore, when the temperature is 12 ° C. and the vortex frequency is 600 (1 / sec), the corrected flow rate can be obtained as follows.
- Tables 5 to 10 compare the accuracy of the temperature and flow rate of the fluid (water) fixed by a reference device and the output flow rate of the flow rate measuring device at that time when the temperature is corrected and when the temperature is not corrected. Is. As shown in Tables 5 to 10, the numerical value indicating the accuracy when the temperature is corrected is extremely small as compared with the case where the temperature is not corrected.
- FIG. 5 is a diagram showing the accuracy when the temperature is not corrected by a broken line (the numerical value is the fluid temperature) and the accuracy when the temperature is corrected by a solid line. As is clear from FIG. 5, the accuracy is improved by performing the temperature correction, and it can be seen that the flow rate measuring device of the present invention can accurately measure the flow rate of the fluid without depending on the actual temperature of the fluid.
- the flow rate measuring device is provided with a means by which the user can correct the flow rate. That is, based on the relationship between the measured actual fluid temperature and the fluid flow rate Q2 measured at a temperature different from the reference temperature with respect to the reference temperature for the fluid flow rate Q1 measured by the user who purchased the flow rate measuring device. Therefore, it is preferable that the flow rate measuring device has a function that allows the user to correct the flow rate of the fluid at the actual measured temperature.
- the flow rate measuring device of the present invention is useful in various industrial fields where flow rate measurement is required as a flow rate measuring device capable of reliably correcting a measurement error due to the temperature of the fluid to be measured.
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Abstract
Description
f=St(v/d) (1)
ここで、fは渦周波数(1/秒)、vは流体の平均流速(m/秒)、dは渦発生体の幅(m)、Stはストローハル数と呼ばれる定数である。
Q=v×S (2)
(1)式より、v=(f×d)/Stを(2)式に代入すれば、次式(3)が得られる。
Q=(f×d)×(S/St) (3)
Q=f×k (4)
従って、渦周波数fを検出することによって流量Qを求めることができる。
Re=(ρv2)/(μv/D)
=v×D/ν (5)
ここで、ρは流体の密度(kg/m3)、vは流体の平均流速(m/秒)、μは流体の粘性係数(kg/m・秒)、Dは流路の幅(m)、νは動粘性係数(m2/秒)である。
上記温度tと渦周波数fが、上記補正テーブルが有する温度と渦周波数に合致する場合、当該合致した渦周波数における流量を補正後の流量として出力し、
上記温度tは上記補正テーブルが有する温度t0、t1、t2、・・・、又はtnのいずれかに該当するが、上記渦周波数fを上記補正テーブルが有しない場合、渦周波数の変化量と流量の変化量は線形の関係にあると推定して上記演算回路により演算した渦周波数fにおける流量を補正後の流量として出力し、
上記温度tは上記補正テーブルが有する温度のいずれかに該当せず、温度tは温度t0、t1、t2、・・・、又はtnのいずれか隣接する2つの温度tαとtβのあいだに含まれる場合、温度の変化量と渦周波数の変化量は線形の関係にあると推定して上記演算回路により当該温度tにおける渦周波数を演算し、且つ渦周波数の変化量と流量Qの変化量は線形の関係にあると推定して上記演算回路により演算した渦周波数fにおける流量を補正後の流量として出力することを特徴としている。
1.2(liter/min)+(1.5-1.2)×(440-428.5)/(498.9-428.5)=1.249(liter/min)
この計算を図4に示すCPUが備えている演算回路が演算して、温度が25℃で渦周波数が440(1/秒)であるとき、1.249(liter/min)が補正後の流量として図4に示すCPUから出力される。
233.6+(255.8-233.6)×(15-12)/(15-5)=240.3
同様にして、温度が12℃で流量が0.6、0.9、1.2、1.5、1.8、2.1、2.4、2.7、3.0(liter/min)のときの渦周波数(1/秒)を求めることができる。
この計算を図4に示すCPUが備えている演算回路が演算して、CPU内の記憶装置に記憶される。
1.8(liter/min)+(2.1-1.8)×(600-591.7)/(662.1-591.7)=1.835(liter/min)
この計算を図4に示すCPUが備えている演算回路が演算して、温度が12℃で渦周波数が600(1/秒)であるとき、1.835(liter/min)が補正後の流量として図4に示すCPUから出力される。
31 流路
32 渦発生体
33 カルマン渦検出器
34 素子保持部
35 圧電素子
36 温度センサ
37a、37b リード線
Claims (3)
- 流体の流れの中に挿入した渦発生体と、当該渦発生体の下流側に発生したカルマン渦の変化を電気信号の変化として検出する検出素子と、上記電気信号を渦周波数に変換する電気回路と、上記渦周波数に基づいて流体の流量を演算する演算回路とを備えた流量測定装置において、検出素子の後段に温度センサを配置し、あらかじめ当該流体について求めた温度t0、t1、t2、・・・、tn(t0<t1<t2<・・・<tn)と渦周波数と流量との関係を示す補正テーブルを上記演算回路に備え、上記温度センサで測定した当該流体の温度をtとし、上記検出素子で検出した電気信号から変換した渦周波数をfとした場合、
上記温度tと渦周波数fが、上記補正テーブルが有する温度と渦周波数に合致する場合、当該合致した渦周波数における流量を補正後の流量として出力し、
上記温度tは上記補正テーブルが有する温度t0、t1、t2、・・・、又はtnのいずれかに該当するが、上記渦周波数fを上記補正テーブルが有しない場合、渦周波数の変化量と流量の変化量は線形の関係にあると推定して上記演算回路により演算した渦周波数fにおける流量を補正後の流量として出力し、
上記温度tは上記補正テーブルが有する温度のいずれかに該当せず、温度tは温度t0、t1、t2、・・・、又はtnのいずれか隣接する2つの温度tαとtβのあいだに含まれる場合、温度の変化量と渦周波数の変化量は線形の関係にあると推定して上記演算回路により当該温度tにおける渦周波数を演算し、且つ渦周波数の変化量と流量Qの変化量は線形の関係にあると推定して上記演算回路により演算した渦周波数fにおける流量を補正後の流量として出力することを特徴とする流量測定装置。 - 温度センサが耐薬品性素材で保護されていることを特徴とする請求項1に記載の流量測定装置。
- 流体の流れの中に障害物を挿入してその下流側にカルマン渦を発生させ、渦の変化を電気信号の変化として検出して流体の流量を測定する流量測定装置において、流体の温度と、基準温度で測定された流体の流量Q1に対する基準温度とは異なる温度で測定された流体の流量Q2との関係に基づいて、当該温度で測定された流体の流量を補正することを特徴とする流量測定装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US18/027,423 US20240011806A1 (en) | 2020-09-29 | 2020-09-29 | Flow measurement device |
JP2021503073A JPWO2022070239A1 (ja) | 2020-09-29 | 2020-09-29 | |
KR1020237009906A KR20230053687A (ko) | 2020-09-29 | 2020-09-29 | 유량 측정 장치 |
CN202080103845.7A CN116209881A (zh) | 2020-09-29 | 2020-09-29 | 流量测量装置 |
PCT/JP2020/036832 WO2022070239A1 (ja) | 2020-09-29 | 2020-09-29 | 流量測定装置 |
TW110113083A TWI802865B (zh) | 2020-09-29 | 2021-04-12 | 流量測定裝置 |
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US (1) | US20240011806A1 (ja) |
JP (1) | JPWO2022070239A1 (ja) |
KR (1) | KR20230053687A (ja) |
CN (1) | CN116209881A (ja) |
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CN118032066B (zh) * | 2024-04-12 | 2024-06-25 | 珠海吉泰克物理科技有限公司 | 流量传感器组件、流量传感器及其制造方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5411766A (en) * | 1977-06-28 | 1979-01-29 | Kawasaki Steel Co | Vortex flowmeter |
JPS58208622A (ja) * | 1982-05-28 | 1983-12-05 | Mazda Motor Corp | エンジンの吸入空気量検出装置 |
JPS63201528A (ja) * | 1987-02-18 | 1988-08-19 | Mitsubishi Motors Corp | 体積流量計測装置 |
JPH07209043A (ja) * | 1994-01-17 | 1995-08-11 | Yokogawa Electric Corp | 振動型流量計 |
JP2000193529A (ja) * | 1998-12-28 | 2000-07-14 | Fuyo Sangyo Kk | 配管内温度測定用センサ並びに配管手段を具えた配管内温度測定用センサ |
JP2009288153A (ja) * | 2008-05-30 | 2009-12-10 | Denso Corp | 空気流量測定装置、空気流量補正方法、および、プログラム |
Family Cites Families (2)
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JP3964416B2 (ja) | 2004-09-14 | 2007-08-22 | 株式会社オーバル | 温度センサ一体型渦流量計 |
JP6703969B2 (ja) * | 2017-09-25 | 2020-06-03 | Ckd株式会社 | 渦流量計 |
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2020
- 2020-09-29 JP JP2021503073A patent/JPWO2022070239A1/ja active Pending
- 2020-09-29 WO PCT/JP2020/036832 patent/WO2022070239A1/ja active Application Filing
- 2020-09-29 US US18/027,423 patent/US20240011806A1/en active Pending
- 2020-09-29 KR KR1020237009906A patent/KR20230053687A/ko unknown
- 2020-09-29 CN CN202080103845.7A patent/CN116209881A/zh active Pending
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2021
- 2021-04-12 TW TW110113083A patent/TWI802865B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5411766A (en) * | 1977-06-28 | 1979-01-29 | Kawasaki Steel Co | Vortex flowmeter |
JPS58208622A (ja) * | 1982-05-28 | 1983-12-05 | Mazda Motor Corp | エンジンの吸入空気量検出装置 |
JPS63201528A (ja) * | 1987-02-18 | 1988-08-19 | Mitsubishi Motors Corp | 体積流量計測装置 |
JPH07209043A (ja) * | 1994-01-17 | 1995-08-11 | Yokogawa Electric Corp | 振動型流量計 |
JP2000193529A (ja) * | 1998-12-28 | 2000-07-14 | Fuyo Sangyo Kk | 配管内温度測定用センサ並びに配管手段を具えた配管内温度測定用センサ |
JP2009288153A (ja) * | 2008-05-30 | 2009-12-10 | Denso Corp | 空気流量測定装置、空気流量補正方法、および、プログラム |
Also Published As
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TWI802865B (zh) | 2023-05-21 |
CN116209881A (zh) | 2023-06-02 |
KR20230053687A (ko) | 2023-04-21 |
JPWO2022070239A1 (ja) | 2022-04-07 |
US20240011806A1 (en) | 2024-01-11 |
TW202212781A (zh) | 2022-04-01 |
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