WO2022068182A1 - 一种高精度闪测仪 - Google Patents

一种高精度闪测仪 Download PDF

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Publication number
WO2022068182A1
WO2022068182A1 PCT/CN2021/088150 CN2021088150W WO2022068182A1 WO 2022068182 A1 WO2022068182 A1 WO 2022068182A1 CN 2021088150 W CN2021088150 W CN 2021088150W WO 2022068182 A1 WO2022068182 A1 WO 2022068182A1
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WIPO (PCT)
Prior art keywords
module
axis
precision
measurement
lifting
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PCT/CN2021/088150
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English (en)
French (fr)
Inventor
徐爱文
张和君
陈源
王世良
陈世超
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深圳市中图仪器股份有限公司
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Publication of WO2022068182A1 publication Critical patent/WO2022068182A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Definitions

  • the utility model relates to a flash measuring instrument, in particular to a high-precision flash measuring instrument.
  • ROI has developed an optical image probe, which can replace the contact probe on the coordinate measuring machine for non-contact measurement. Since then, this optical accessory has become one of the basic components of the imaging equipment.
  • image measuring instruments with higher magnification microscope eyepieces appeared on the market.
  • the utility model provides a high-precision flash measuring instrument.
  • the utility model provides a high-precision flash measuring instrument, comprising a frame base module, an electric high-precision two-dimensional stage module, a ring-shaped lighting module, a Z-axis vision measurement module, and a coaxial lighting module, which are used for measuring the thickness of workpieces.
  • the height measurement module and image display module wherein the electric high-precision two-dimensional stage mold is fixed on the frame base module, and the Z-axis vision measurement module is installed on the rear bottom plate of the frame base module
  • the height measurement module is installed on the Z-axis vision measurement module
  • the Z-axis vision measurement module includes a Z-axis lift module
  • the annular lighting module and the coaxial lighting module are respectively installed on the Z-axis lift
  • the image display module is installed on the Z-axis visual measurement module
  • the Z-axis lifting module is suspended above the electric high-precision two-dimensional stage module
  • the movement axis of the Z-axis lifting module perpendicular to the motorized high-precision two-dimensional stage module.
  • the electric high-precision two-dimensional stage module is fixedly connected to the frame base module through the stage mounting seat.
  • the image display module is connected to the front and outer sides of the Z-axis vision measurement module through a pitch rotation mechanism.
  • the rack base module includes a base plate, the base plate is a main mounting plate, a regulator for adjusting the horizontal state of the instrument is installed below the base plate, and a load is installed above the base plate A stage mounting seat, a telecentric parallel transmission light source is installed inside the object stage mounting seat, and the electric high-precision two-dimensional object stage module is installed on the object stage mounting seat.
  • a control handwheel is installed on the bottom plate, and the control handwheel is electrically connected to the Z-axis lifting module.
  • the annular lighting module includes an anti-collision block, an annular zero-degree light source and an automatic lifting module, the annular zero-degree light source is installed on the lower end of the push rod of the automatic lifting module, and the anti-collision block
  • the push rod of the automatic lift module is connected with the push rod of the automatic lift module through a spring, and the push rod of the automatic lift module is connected with a travel switch matched with the anti-collision block.
  • the coaxial lighting module includes a coaxial light source, a rotating fixing base, and a rotating fixing rod, the coaxial light source is connected to the rotating fixing rod, and the rotating fixing rod is connected to the rotating fixing rod.
  • the coaxial light source forms a rotating pair with the rotating fixing base through the rotating fixing rod.
  • the Z-axis visual measurement module includes a Z-axis column, the Z-axis column is fixed on the frame base module, and the Z-axis lifting module is connected with an image acquisition module.
  • the Z-axis lifting module includes a fixed part and a Z-axis lifting slide
  • the image acquisition module is mounted on the Z-axis lifting slide
  • the Z-axis lifting slide is connected to the Z-axis column or the Z-axis lifting slide.
  • a Z-axis anti-skid module is connected between the fixed parts of the shaft lifting module, and the Z-axis anti-skid module includes two left and right tension springs for tightening the Z-axis lifting slide.
  • a heat dissipation module is provided at the rear of the Z-axis vision measurement module, and the heat dissipation module is installed above the fixed part of the Z-axis lift module.
  • a temperature sensing module for measuring its temperature is installed on the side of the image acquisition module.
  • FIG. 1 is an exploded view of a high-precision flash tester of the present invention.
  • FIG. 2 is a schematic diagram of a frame base module of a high-precision flash tester of the present invention.
  • FIG. 3 is a schematic diagram of the annular lighting control module of a high-precision flash tester of the present invention.
  • FIG. 4 is a schematic diagram of a coaxial lighting module of a high-precision flash tester of the present invention.
  • FIG. 5 is a schematic diagram of a Z-axis visual measurement module of a high-precision flash tester of the present invention.
  • FIG. 6 is a schematic diagram of the Z-axis visual measurement module of a high-precision flash tester of the present invention after the casing is removed.
  • FIG. 7 is a schematic diagram of a height measurement module of a high-precision flash tester of the present invention.
  • FIG. 8 is a schematic diagram of an image display module of a high-precision flash tester of the present invention.
  • a high-precision flash tester is mainly composed of a frame base module 1, an electric high-precision two-dimensional stage module 2, an annular lighting control module 3, a coaxial lighting module 5, Z It is composed of seven structural modules, including axis vision measurement module 4, height measurement module 6, and image display module 7.
  • the frame base module 1 is mainly composed of a dust cover 8 , a telecentric parallel transmission light source 9 , a carrier mount 10 , a casing 11 , a print button 12 , a measurement button 13 , a power button 14 , and an instrument
  • the regulator 15, the control hand wheel 16, and the bottom plate 34 are composed.
  • the bottom plate 34 is the main mounting plate of the module, and six instrument regulators 15 are installed below the bottom plate 34, three of which are main regulators, and the others are auxiliary regulators.
  • the system is an important component that provides a good measurement environment for the whole machine; the casing 11 and the dust cover 8 are installed around the bottom plate 34.
  • the button 13 is an external execution button of the one-key operation of the instrument, through which a quick flash measurement operation can be performed on the workpiece; the top of the base plate 34 is equipped with a control handwheel 16, which is an auxiliary part, and the operator can measure according to the specific situation. Determine whether it is manual focusing or automatic focusing. If manual focusing is required, the Z-axis lifting module 22 can be manually controlled to move up and down and position automatically by rotating the handwheel to reach a suitable focus position, so as to reach the image acquisition module 19 The clearest image state can be achieved when capturing images.
  • the telecentric parallel transmission light source 9 and the stage mounting base 10 are designed and installed, and the flatness requirements of the stage mounting base 10 are guaranteed structurally, which is the installation of the electric high-precision two-dimensional stage module 2 Provide a platform.
  • the annular lighting control module 36 is mainly composed of an annular zero-degree light source 25 , an anti-collision block 26 , an automatic lifting module 27 , and a travel switch 35 .
  • the annular zero-degree light source 25 is installed on the lower end of the push rod of the automatic lifting module 27, and is in a floating state after installation.
  • the automatic lifting module 27 drives the annular zero-degree light source 25 to descend, it may collide with other workpieces.
  • the anti-collision block 26 rises and communicates with the travel switch 35 to sense the movement to stop the movement, so as to achieve the purpose of protecting the workpiece and the light source.
  • the inside of the ring-shaped zero-degree light source 25 is composed of a four-segmented ring-shaped shadowless light source and a zero-degree light source capable of zero-degree illumination.
  • the zero-degree light source is located at the bottom and the ring-shaped shadowless light source is located at the top.
  • the movement axes of the automatic lifting module 27 and the Z-axis lifting module 22 are basically kept in a parallel state; the design allows the ring-shaped light source 25 to be in a free up and down state to avoid misoperation of the instrument, so as to achieve the purpose of protecting the workpiece and the light source; automatic lifting
  • the module 27 adopts a large lead screw drive structure, the motor speed is reduced, the motion noise is reduced, the lifting speed is accelerated, and the overall measurement efficiency is improved.
  • the coaxial lighting module 5 is mainly composed of a coaxial light source 28 , a rotating fixing base 29 and a rotating fixing rod 39 .
  • the coaxial light source 28 forms a rotating pair with the rotating fixing base 29 through the rotating fixing rod 39 .
  • the sensing element is in contact, and the coaxial light source 28 is on the left side of the instrument, which is in a non-working state.
  • the annular lighting module 3 can rise and fall freely;
  • the front sensing element is in contact, and the coaxial light source is in the working state directly below the Z-axis vision measurement module 4.
  • the automatic lifting module 27 of the annular lighting module 3 controls the annular zero-degree light source 25 to move to the top and cannot descend.
  • the optical axis of the coaxial light source 28 and the glass surface of the electric high-precision two-dimensional stage 2 should be kept in a substantially vertical state, and the rotating auxiliary structure should be reliable.
  • the Z-axis visual measurement module 4 is mainly composed of a head casing 18 , an image acquisition module 19 , a Z-axis anti-skid module 20 , a heat dissipation module 21 , a Z-axis lifting module 22 , a temperature sensing module 23 , and a power supply connector.
  • the module 24 and the Z-axis column 32 are composed.
  • the Z-axis column 32 is the base of the module, which carries the installation of all other parts;
  • the power patch panel module 24 is installed inside the rear of the Z-axis column 32, as the coaxial light source module 5 , the height measurement module 6 and the power supply module of the whole machine;
  • the head shell 18 is installed above the Z-axis column 32 as a decorative protective shell for the entire module;
  • the Z-axis lifting module 22 is fixed on the top surface of the Z-axis column 32, the image
  • the acquisition module 19 is installed on the horizontal slide plate that can move up and down the Z-axis lifting module 22.
  • the central axis of the image acquisition module 19 is basically parallel to the movement axis of the Z-axis lifting module 22.
  • the image acquisition module 19 mainly includes double telecentric double magnification.
  • the precision lens and two high-resolution industrial cameras are the core modules of the whole machine; the Z-axis anti-skid module 20 is installed above the Z-axis lifting module 22.
  • This module mainly uses two left and right tension springs to tighten the Z-axis lifting module 22.
  • the movable part prevents the image acquisition module 19 from descending by itself when the instrument is powered off.
  • the Z-axis anti-skid module 20 can reduce the Z-axis motion load due to the upward pulling force; when the image acquisition module 19 moves downward with the Z-axis lifting module 22, It will reduce the movement continuity of the Z-axis, and at the same time, the Z-axis anti-skid module 20 can eliminate the movement gap of the Z-axis, so the design of the Z-axis anti-skid module 20 is also beneficial to the control effect of the Z-axis lifting and lowering of the height measurement module 6. Measurement accuracy is also beneficial.
  • the heat dissipation module 21 is installed above the fixed end of the Z-axis lift module 22 , mainly to dissipate heat inside the entire module and keep the internal temperature basically stable.
  • a temperature sensing module 23 is installed on the right side of the image acquisition module 19 for measuring the temperature of the image acquisition module 19 for the measurement of the whole machine.
  • the inside of the Z-axis lifting module 22 is equipped with standard components such as a precision grating ruler, a precision guide rail, a precision lead screw, and a stepping motor, which is a precision lead screw transmission mechanism.
  • the movement accuracy of the Z-axis lifting module 22 is ensured, so that the movement axis of the Z-axis and the optical axis of the image acquisition module are basically parallel; the movement axis of the Z-axis and the bottom surface of the Z-axis column are basically vertical.
  • the image acquisition module is also a replaceable module. For different measurement requirements, only need to replace different types of core modules to meet different measurement requirements.
  • the height measurement module 6 is mainly composed of a height probe 30 and a probe base 31 .
  • the main component is the height measuring head 30, and the height measuring head 30 is fixed in the hole of the measuring head seat 31.
  • This module is an essential part for measuring thickness, and can also be replaced with different types.
  • the height measurement module is installed on the whole machine.
  • the structure ensures that the axis of the height measuring head 30 and the movement axis of the Z-axis lifting module 22 are substantially parallel.
  • the image display module 7 is mainly composed of an LCD display 36 , a standard rotating shaft 37 and a fixing base 38 .
  • the image display module 7 its main components are the LCD display 36 and the standard rotating shaft 37, and the standard rotating shaft 36 is connected between the LCD display 36 and the fixed seat 38 to form a rotatable and have a larger damping rotation fulcrum,
  • the operator can adjust the pitch angle of the LCD display 36 within a certain range according to the needs of the visual angle, so as to better observe the image.
  • the standard rotating shaft is used as the rotating fulcrum of the LCD display 36, the structure is reliable, and it will not shake when used for a long time.
  • the rack base module 1 is the stable frame of the whole machine, and the other modules use the rack base module 1 as the installation base, which is an indispensable module in the whole machine; electric high-precision
  • the two-dimensional stage module 2 is connected and fixed with the frame base module 1 through the stage mounting seat 10;
  • the Z-axis vision measurement module 4 is installed on the rear bottom plate of the frame base module 1;
  • the annular lighting module 3 is installed on the Z-axis
  • the coaxial lighting module 5 is installed at the lower left side of the Z-axis lifting module 22 inside the Z-axis vision measurement module 4;
  • the height measurement module 6 is installed in the Z-axis Outside the right side of the axis vision measurement module 4;
  • the coaxial lighting module 5 and the annular lighting module 3 can follow the Z-axis lifting module 22 to move up and down and position;
  • the image display module 7 is installed in front of the Z-axis vision measurement module 4 On the non-mov
  • the rack base module 1 is the installation cornerstone of the whole machine structure, wherein the upper surface of the carrier mount 10 of the rack base module 1 is the upper surface of the electric high-precision two-dimensional stage module 2
  • the rack base module 1 is the installation cornerstone of the whole machine structure, wherein the upper surface of the carrier mount 10 of the rack base module 1 is the upper surface of the electric high-precision two-dimensional stage module 2
  • the movement accuracy of the two-dimensional stage module 2 is affected; when the telecentric parallel transmission light source 9 is installed at the same time, ensure that its optical axis and the glass surface of the motorized high-precision two-dimensional stage module 2 are basically vertical; Z-axis vision In the measurement module 4, it is necessary to ensure that the movement axis of the Z-axis lifting module 22 is perpendicular to the glass surface of the electric high-precision two-dimensional stage module 2, and at the same time, the optical axis of the lens in the image acquisition module 19 and the electric high-precision two-dimensional stage The glass surface of the module 2 is vertical, which also makes the optical axis of the coaxial lighting module 5 and the glass surface of the electric high-precision two-dimensional stage module 2 substantially vertical.
  • the movement axis of the Z-axis lifting module 22 is basically kept parallel; the central axis of the surface glass of the electric high-precision two-dimensional stage module 2 is kept parallel to the telecentric transmission light source 9, the double telecentric lens of the image acquisition module 19, the annular zero-degree
  • the axis of the light source 25 is substantially coaxial.
  • a high-precision flash measuring instrument provided by the utility model has the following advantages: 1) Taking the movable Z-axis vision measurement module as the fulcrum, the annular lighting module equipped with automatic lifting and the coaxial lighting module that can be rotated are designed to ensure that the movement axis of the Z-axis and the automatic lifting movement axis of the annular lighting module are basically parallel. At the same time, it provides a variety of different forms of controllable lighting systems for the whole machine.
  • the vertical installation of double telecentric high-resolution optical lenses and high-resolution industrial cameras are designed as the core components of the whole machine for image size measurement.
  • the shape lighting module, the high-precision telecentric transmission lighting system, and the coaxial lighting module are in a substantially coaxial state and structure.
  • the automatic lifting module in the Z-axis vision measurement module drives the vertically installed bi-telecentric high-resolution optical lens and high-resolution industrial camera to move, its optical axis is always in line with the glass surface of a new type of high-precision stage. Maintain vertical position and motion structure.
  • Both the coaxial lighting module and the annular lighting module adopt the anti-collision structure and anti-collision protection function, which effectively avoids the malfunction of the Z-axis lifting module during autofocus, and improves the safety of the instrument.

Abstract

本实用新型提供了一种高精度闪测仪，包括机架底座模块、电动高精度二维载物台模块、环状照明模块、Z轴视觉测量模块、同轴照明模块、用来测量工件厚度的高度测量模块、图像显示模块，其中，所述电动高精度二维载物台模固定在所述机架底座模块上，所述Z轴视觉测量模块安装在所述机架底座模块的后方底板上，所述高度测量模块安装在所述Z轴视觉测量模块上，所述Z轴视觉测量模块包括Z轴升降模块，所述环状照明模块、同轴照明模块分别安装在所述Z轴升降模块上，所述图像显示模块安装在所述Z轴视觉测量模块上。本实用新型的有益效果是：实现了复杂产品几何图形的视觉测量检测，提高了精度。

Description

一种高精度闪测仪 技术领域
本实用新型涉及闪测仪，尤其涉及一种高精度闪测仪。
 背景技术
从20世纪70年代后期,计算机视觉图像处理技术和图像传感器获得了快速发展，随着坐标测量技术的日趋发展与成熟, 在以光学比较为基础的光学测量领域里, 坐标测量方法的发展应用有了更进一步的实质性进展。美国View Engineering 公司发明了世界上第一台由电机驱动XYZ轴影像测量系统, 它是一台控制终端整合了视频检测和软件测量的自动影像测量仪。MechanicalTechnology 公司的Boice Vista 系统则充分借鉴了坐标测量机的优势, 在坐标测量机的测头上集成了一个视频图像测量系统, 该系统可以将测量数据与预先编制好的标称尺寸和公差进行比较。这两台仪器通过不同途径借鉴了坐标测量机的坐标测量原理, 将被测量物体的图像投影到坐标系中。其测量平台继承了坐标测量机的形式, 但其测头与光学投影仪相似。这些仪器的出现开辟了一个重要的测量仪器行业, 即影像测量仪行业。
上世纪80年代初, 影像测量技术有了重要的发展。ROI公司开发出光学影像探针, 可以替代坐标测量机上的接触式探针进行非接触式测量, 从此这个光学配件就成了影像设备的基础部件之一。在80年代中期, 市场上又出现了更高放大倍率显微镜目镜的影像测量仪。
进入上世纪90年代, 随着CCD技术、计算机技术、数字图像处理技术、LED照明技术、直流/交流伺服驱动技术的发展, 影像测量仪产品获得了巨大的发展。更多的厂商进入到影像测量仪产品市场, 共同推进了影像测量仪产品的发展。
2000 年以后, 我国在该领域的技术水平不断提高, 国内企业( 如天准、智泰、怡信、新天等公司) 所开发的影像测量仪在生产规模、品种和质量上也不断有所提升和发展。但随着工业4.0时代到来，精密加工制造技术的不断高速发展，越来越多的产品对精度的要求也日趋严格，对产品的测量要求越来越多样化，对产品的测量效率要求也越来越高，很多产品不仅仅只要求测量简单的二维尺寸，同时需要快速高效率测量产品的轮廓度、同轴度、位置度、圆度、角度、厚度等形位公差和三维尺寸要求，以满足日益飞速变化产品需求，所以传统的测量方式及工具，比如：直尺、卡尺、千分尺、千分表等测量工具，甚至传统的影像仪、轮廓仪，测量范围及方式有限，对很多产品可能无法测量，测量速度低，测量效率也跟不上，已经达不到产品精度和形位公差快速测量的要求。
因此，为了解决对一些复杂产品几何图形的检测，如何提供一种更高精度的测量工具，是本领域技术人员所亟待解决的技术问题。
 技术问题
为了解决现有技术中的问题，本实用新型提供了一种高精度闪测仪。
 技术解决方案
本实用新型提供了一种高精度闪测仪，包括机架底座模块、电动高精度二维载物台模块、环状照明模块、Z轴视觉测量模块、同轴照明模块、用来测量工件厚度的高度测量模块、图像显示模块，其中，所述电动高精度二维载物台模固定在所述机架底座模块上，所述Z轴视觉测量模块安装在所述机架底座模块的后方底板上，所述高度测量模块安装在所述Z轴视觉测量模块上，所述Z轴视觉测量模块包括Z轴升降模块，所述环状照明模块、同轴照明模块分别安装在所述Z轴升降模块上，所述图像显示模块安装在所述Z轴视觉测量模块上，所述Z轴升降模块悬于所述电动高精度二维载物台模块的上方，所述Z轴升降模块的运动轴线垂直于所述电动高精度二维载物台模块。
作为本实用新型的进一步改进，所述电动高精度二维载物台模块通过载物台安装座与所述机架底座模块固定连接。
作为本实用新型的进一步改进，所述图像显示模块通过俯仰旋转机构与所述Z轴视觉测量模块的前方外侧连接。
作为本实用新型的进一步改进，所述机架底座模块包括底板，所述底板为主安装板，所述底板的下方安装有调节仪器的水平状态的调节器，所述底板的上方安装有载物台安装座，所述载物台安装座的内部安装有远心平行透射光源，所述电动高精度二维载物台模块安装在所述载物台安装座上。
作为本实用新型的进一步改进，所述底板安装有控制手轮，所述控制手轮与所述Z轴升降模块通过电连接。
作为本实用新型的进一步改进，所述环状照明模块包括防撞块、环形零度光源和自动升降模块，所述环形零度光源安装在所述自动升降模块的推杆的下端，所述防撞块通过弹簧与所述自动升降模块的推杆连接，所述自动升降模块的推杆连接有与所述防撞块配合的行程开关。
作为本实用新型的进一步改进，所述同轴照明模块包括同轴光源、旋转固定座、旋转固定杆，所述同轴光源与所述旋转固定杆连接，所述旋转固定杆与所述旋转固定座连接，所述同轴光源通过旋转固定杆与旋转固定座形成一个转动副。
作为本实用新型的进一步改进，所述Z轴视觉测量模块包括Z轴立柱，所述Z轴立柱固定在所述机架底座模块上，所述Z轴升降模块连接有图像采集模块。
作为本实用新型的进一步改进，所述Z轴升降模块包括固定部分和Z轴升降滑板，所述图像采集模块安装在所述Z轴升降滑板上，所述Z轴升降滑板与Z轴立柱或者Z轴升降模块的固定部分之间连接有Z轴防滑模块，所述Z轴防滑模块包括左右两条拉紧Z轴升降滑板的拉簧。
作为本实用新型的进一步改进，所述Z轴视觉测量模块的内部后方设有散热模块，所述散热模块安装在所述Z轴升降模块的固定部分的上方。
作为本实用新型的进一步改进，所述图像采集模块的侧边安装有测量其温度的温度感应模块。
 有益效果
本实用新型的有益效果是：通过上述方案，实现了复杂产品几何图形的视觉测量检测，提高了精度。
 附图说明
图1是本实用新型一种高精度闪测仪的分解图。
图2是本实用新型一种高精度闪测仪的机架底座模块的示意图。
图3是本实用新型一种高精度闪测仪的环状照明控制模块的示意图。
图4是本实用新型一种高精度闪测仪的同轴照明模块的示意图。
图5是本实用新型一种高精度闪测仪的Z轴视觉测量模块的示意图。
图6是本实用新型一种高精度闪测仪的Z轴视觉测量模块去掉外壳后的示意图。
图7是本实用新型一种高精度闪测仪的高度测量模块的示意图。
图8是本实用新型一种高精度闪测仪的图像显示模块的示意图。
 本发明的实施方式
下面结合附图说明及具体实施方式对本实用新型作进一步说明。
如图1至图8所示，一种高精度闪测仪，主要由机架底座模块1、电动高精度二维载物台模块2、环状照明控制模块3、同轴照明模块5、Z轴视觉测量模块4、高度测量模块6、图像显示模块7等七大结构模块组成。
如图2所示，所述的机架底座模块1主要由防尘罩8、远心平行透射光源9、载物安装座10、外壳11、打印按钮12、测量按钮13、电源按钮14、仪器调节器15、控制手轮16、底板34组成。
所述的机架底座模块1的组成中，底板34为模块的主安装板，底板34的下方安装有六个仪器的调节器15，其中三个主要调节器，其它为辅助调节器,调节器主要用来调节仪器的水平状态；底板34的上方安装有载物台安装座10，载物台安装座10的内部装有远心平行透射光源9，远心平行透射光源为整机的主要照明系统，为整机提供良好的测量环境的重要部件；底板34的周围安装有外壳11和防尘罩8，在外壳11的前端，设计安装有打印按钮12、测量按钮13、电源按钮15，测量按钮13为仪器的一键式操作的外部执行按钮，通过它可对工件执行快速闪测操作；底板34 的上面装有控制手轮16，此部件为辅助部件，操作员可根据具体的测量状况确定是手动调焦还是自动调焦，如需手动调焦，则通过旋转手轮，便可以手动控制Z轴升降模块22自动的上下移动和定位，到达合适的聚焦位置，以达到图像采集模块19在采集图像时能达到最清淅的图像状态。
通过以底板34为基石，设计安装远心平行透射光源9和载物台安装座10，结构上保证载物台安装座10的平面度要求，为电动高精度二维载物台模块2的安装提供平台。
如图3所示，所述的环状照明控制模块36主要由环形零度光源25、防撞块26、自动升降模块27、行程开关35组成。
所述环状照明模块3的组成中，环形零度光源25安装在自动升降模块27的推杆下端，安装后处于浮动状态，当自动升降模块27带动环形零度光源25下降时，如碰撞到其它工件，则防撞块26上升与行程开关35连通感应以停止运动，达到保护工件和光源的目的。环形零度光源25内部分别由四分割的环形无影光源和可以零度照明的零度光源组合而成，零度光源位于下方，环形无影光源位于上方。
保证自动升降模块27和Z轴升降模块22的运动轴线基本保持平行状态；设计使环形零件度光源25可以处于自由上下浮动状态，避免误操作仪器时，以达到保护工件和光源的目的；自动升降模块27采用了大导程的丝杠传动结构，电机速度降低，使运动噪音降低，升降速度加快，提高了整体的测量效率。
如图4所示，所述的同轴照明模块5主要由同轴光源28、旋转固定座29、旋转固定杆39组成。
所述同轴照明模块5组成中，同轴光源28通过旋转固定杆39与旋转固定座29形成一个转动副，当旋转固定杆39向后旋转到指定位置时，与旋转固定座29内部的后方感应元件接触，同轴光源28处于仪器的左侧，为非工作状态，此时环状照明模块3可自由升降；当旋转固定杆39向前旋转到指定位置时，与旋转固定座29内部的前方感应元件接触，同轴光源处于Z轴视觉测量模块4的正下方为工作状态，此时环状照明模块3的自动升降模块27控制环形零度光源25位移至最上方，且不能下降。
结构上需使同轴光源28的光轴与电动高精度二维载物台2的玻璃表面基本保持垂直状态，且转动副结构可靠。
如图5所示，所述Z轴视觉测量模块4主要由头部外壳18、图像采集模块19、Z轴防滑模块20、散热模块21、Z轴升降模块22、温度感应模块23、电源接插模块24、Z轴立柱32组成。
所述Z轴视觉测量模块4组成中，Z轴立柱32为此模块的基座，承载其它所有零件的安装；电源接插板模块24安装Z轴立柱32的后方内部，作为同轴光源模块5、高度测量模块6和整机的供电模块；头部外壳18安装在Z轴立柱32的上方，作为整个模块的装饰保护壳；Z轴升降模块22固定在Z轴立柱32的上方顶面，图像采集模块19安装在Z轴升降模块22的可上下移动水平滑板上，图像采集模块19的中轴线与Z轴升降模块22的运动轴线基本保持平行状态，图像采集模块19主要包括双远心双倍率精密镜头和两个高分辨率工业相机作为整机的核心模块；在Z轴升降模块22的固定上方安装Z轴防滑模块20，此模块主要采用左右两条拉簧拉紧Z轴升降模块22的可移动部件，防止仪器断电时图像采集模块19自行下降。
当图像采集模块19随着Z轴升降模块22向上移动时，Z轴防滑模块20由于向上的拉力可使Z轴运动负载减轻；当图像采集模块19随着Z轴升降模块22向下移动时，会减小Z轴的运动贯性，同时Z轴防滑模块20能消除Z轴的运动间隙，所以Z轴防滑模块20的设计对Z轴升降的控制效果也是有益处的，对高度测量模块6的测量精度也是有益处的。
在Z轴视觉测量模块4的内部后方，散热模块21安装在Z轴升降模块22的固定端的上方，主要为整个模块内部散热，使内部温度保持基本稳定。在图像采集模块19的右侧装有温度感应模块23，用来测量图像采集模块19的温度，供整机测量使用。
Z轴升降模块22的的内部装有精密光栅尺、精密导轨、精密丝杠、步进电机等标准零部件，是一种精密丝杠传动机构。
结构上保证Z轴升降模块22的运动精度，使Z轴的运动轴线和图像采集模块的光轴基本保持平行；Z轴的运动轴线和Z轴立柱的底面基本保持垂直。图像采集模块作为核心模块，同时也是可更换的模块，对于不同的测量需求，只需更换不同类型的核心模块，便可以满足不同的测量需求。
如图6所示，所述的高度测量模块6主要由高度测头30、测头座31组成。
所述高度测量模块6的组成中，主要部件为高度测头30，高度测头30固定在测头座31的孔内，此模块为测量厚度的必备部件，同时也可更换不同类形的高度测量模块安装在整机上使用。
结构上保证高度测头30的轴线和Z轴升降模块22的运动轴线基本平行。
如图7所示，所述的图像显示模块7主要由LCD显示器36、标准转轴37、固定座38组成。
所述图像显示模块7的组成中，其主要部件为LCD显示器36和标准转轴37，在LCD显示器36和固定座38之间通过标准转轴36连接成可旋转的并具有较大阻尼的旋转支点，操作人员可根据视觉角度的需要，在一定范围内对LCD显示器36进行俯仰角度的调整，以便更好的观测图像。
采用标准的转轴作为LCD显示器36的旋转支点，结构可靠，长时间使用，不会晃动。
如图1至图8所示，机架底座模块1为整机的稳定机架，其它模块均以机架底座模块1为安装基座，是整机中不可或缺的一个模块；电动高精度二维载物台模块2通过载物台安装座10与机架底座模块1连接固定；Z轴视觉测量模块4安装在机架底座模块1的后方底板上；环状照明模块3安装在Z轴视觉测量模块4的内部的Z轴升降模块22右侧内部；同轴照明模块5则安装在Z轴视觉测量模块4的内部的Z轴升降模块22的左侧下部；高度测量模块6安装在Z轴视觉测量模块4的右侧面外部；同轴照明模块5和环状照明模块3都可以跟随Z轴升降模块22进行上下移动和定位；图像显示模块7安装在Z轴视觉测量模块4的前方外侧的非运动部件上，此模块不是固定不动的，操作人员可根据视觉角度的需要，在一定范围内对LCD显示器36进行俯仰角度的调整，以便更好的观测图像。
如图1至图8所示，通过机架底座模块1为整机结构的安装基石，其中机架底座模块1的载物安装座10的上表面为电动高精度二维载物台模块2的安装基准面，需保证安装基准面的平面度要求，同时也需保证电动高精度二维载物台模块2的底板底面的平面度要求，才能保证两个模块连接固定时，不会对电动高精度二维载物台模块2的运动精度带来影响；同时安装远心平行透射光源9时，保证它的光轴和电动高精度二维载物台模块2的玻璃表面基本垂直；Z轴视觉测量模块4中需保证Z轴升降模块22的运动轴线和电动高精度二维载物台模块2的玻璃表面垂直，同时使图像采集模块19中的镜头光轴和电动高精度二维载物台模块2的玻璃表面垂直，也使同轴照明模块5的光轴和电动高精度二维载物台模块2的玻璃表面基本垂直，同时环状照明模块3中的自动升降模块27的运动轴线和Z轴升降模块22的运动轴线基本保持平行的状态；电动高精度二维载物台模块2表面玻璃的中心轴线保持和远心平行透射光源9、图像采集模块19的双远心镜头、环形零度光源25的轴线基本处于同轴状态。
本实用新型提供的一种高精度闪测仪，具有以下优点：1）      以可移动的Z轴视觉测量模块为支点，设计搭载自动升降的环状照明模块和可旋转使用的同轴照明模块，保证了Z轴的运动轴线和环状照明模块自动升降的运动轴线基本平行的结构要求，同时为整机提供多种不同形式的可控照明系统。
2）      以机架底座模块为固定点，安装高精度远心透射照明系统和一种电动新型高精度二维载物台为自动测量平台，同时保证一种电动新型高精度二维载物台玻璃表面和高精度远心透射照明系统的光轴始终保持垂直状态，同时实现当下日益繁多的产品测量需求。
3）      以可移动的Z轴视觉测量模块为支点，可分别安装不同类型的高度测量模块，扩展了整机的测量功能。
4）      以Z轴视觉测量模块中的自动升降模块为可移动支点，设计竖直安装双远心高分辨率光学镜头和高分辨率工业相机作为整机实施图像尺寸测量的核心部件，并和环状照明模块、高精度远心透射照明系统、同轴照明模块处于基本同轴的状态及结构。
5）      Z轴视觉测量模块中的自动升降模块带动竖直安装的双远心高分辨率光学镜头和高分辨率工业相机移动时，其光轴始终和一种新型高精度载物台的玻璃表面保持垂直状态及运动结构。
6）      同轴照明模块和环状照明模块均采用了防撞结构和防撞保护功能，有效的避免了Z轴升降模块在自动对焦时产生的误动作，提高了仪器使用的安全性。
以上内容是结合具体的优选实施方式对本实用新型所作的进一步详细说明，不能认定本实用新型的具体实施只局限于这些说明。对于本实用新型所属技术领域的普通技术人员来说，在不脱离本实用新型构思的前提下，还可以做出若干简单推演或替换，都应当视为属于本实用新型的保护范围。

Claims (10)

  1. 一种高精度闪测仪，其特征在于：包括机架底座模块、电动高精度二维载物台模块、环状照明模块、Z轴视觉测量模块、同轴照明模块、用来测量工件厚度的高度测量模块、图像显示模块，其中，所述电动高精度二维载物台模固定在所述机架底座模块上，所述Z轴视觉测量模块安装在所述机架底座模块的后方底板上，所述高度测量模块安装在所述Z轴视觉测量模块上，所述Z轴视觉测量模块包括Z轴升降模块，所述环状照明模块、同轴照明模块分别安装在所述Z轴升降模块上，所述图像显示模块安装在所述Z轴视觉测量模块上，所述Z轴升降模块悬于所述电动高精度二维载物台模块的上方，所述Z轴升降模块的运动轴线垂直于所述电动高精度二维载物台模块。
  2. 根据权利要求1所述的高精度闪测仪，其特征在于：所述电动高精度二维载物台模块通过载物台安装座与所述机架底座模块固定连接。
  3. 根据权利要求1所述的高精度闪测仪，其特征在于：所述图像显示模块通过俯仰旋转机构与所述Z轴视觉测量模块的前方外侧连接。
  4. 根据权利要求1所述的高精度闪测仪，其特征在于：所述机架底座模块包括底板，所述底板为主安装板，所述底板的下方安装有调节仪器的水平状态的调节器，所述底板的上方安装有载物台安装座，所述载物台安装座的内部安装有远心平行透射光源，所述电动高精度二维载物台模块安装在所述载物台安装座上。
  5. 根据权利要求4所述的高精度闪测仪，其特征在于：所述底板安装有控制手轮，所述控制手轮与所述Z轴升降模块通过电连接。
  6. 根据权利要求1所述的高精度闪测仪，其特征在于：所述环状照明模块包括防撞块、环形零度光源和自动升降模块，所述环形零度光源安装在所述自动升降模块的推杆的下端，所述防撞块通过弹簧与所述自动升降模块的推杆连接，所述自动升降模块的推杆连接有与所述防撞块配合的行程开关。
  7. 根据权利要求1所述的高精度闪测仪，其特征在于：所述Z轴视觉测量模块包括Z轴立柱，所述Z轴立柱固定在所述机架底座模块上，所述Z轴升降模块连接有图像采集模块。
  8. 根据权利要求7所述的高精度闪测仪，其特征在于：所述Z轴升降模块包括固定部分和Z轴升降滑板，所述图像采集模块安装在所述Z轴升降滑板上，所述Z轴升降滑板与Z轴立柱或者Z轴升降模块的固定部分之间连接有Z轴防滑模块，所述Z轴防滑模块包括左右两条拉紧Z轴升降滑板的拉簧。
  9. 根据权利要求8所述的高精度闪测仪，其特征在于：所述Z轴视觉测量模块的内部后方设有散热模块，所述散热模块安装在所述Z轴升降模块的固定部分的上方，所述图像采集模块的侧边安装有测量其温度的温度感应模块。
  10. 根据权利要求1所述的高精度闪测仪，其特征在于：所述同轴照明模块包括同轴光源、旋转固定座、旋转固定杆，所述同轴光源与所述旋转固定杆连接，所述旋转固定杆与所述旋转固定座连接，所述同轴光源通过旋转固定杆与旋转固定座形成一个转动副。
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102538669A (zh) * 2010-10-13 2012-07-04 株式会社三丰 精密阻焊剂配准检查方法
CN210774035U (zh) * 2019-12-13 2020-06-16 珠海博明视觉科技有限公司 一种五金拼接光学影像测量仪
CN210773903U (zh) * 2019-12-13 2020-06-16 珠海博明视觉科技有限公司 一种铸件桌面式光学闪测仪
CN212931323U (zh) * 2020-09-29 2021-04-09 深圳市中图仪器股份有限公司 一种高精度闪测仪

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102538669A (zh) * 2010-10-13 2012-07-04 株式会社三丰 精密阻焊剂配准检查方法
CN210774035U (zh) * 2019-12-13 2020-06-16 珠海博明视觉科技有限公司 一种五金拼接光学影像测量仪
CN210773903U (zh) * 2019-12-13 2020-06-16 珠海博明视觉科技有限公司 一种铸件桌面式光学闪测仪
CN212931323U (zh) * 2020-09-29 2021-04-09 深圳市中图仪器股份有限公司 一种高精度闪测仪

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