WO2022067975A1 - Mems扬声器 - Google Patents

Mems扬声器 Download PDF

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Publication number
WO2022067975A1
WO2022067975A1 PCT/CN2020/127833 CN2020127833W WO2022067975A1 WO 2022067975 A1 WO2022067975 A1 WO 2022067975A1 CN 2020127833 W CN2020127833 W CN 2020127833W WO 2022067975 A1 WO2022067975 A1 WO 2022067975A1
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WIPO (PCT)
Prior art keywords
driver
cavity
substrate
vibrating membrane
sound
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Ceased
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PCT/CN2020/127833
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English (en)
French (fr)
Inventor
程诗阳
朱国
但强
李杨
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AAC Technologies Holdings Shenzhen Co Ltd
AAC Technologies Holdings Nanjing Co Ltd
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AAC Acoustic Technologies Shenzhen Co Ltd
AAC Technologies Holdings Nanjing Co Ltd
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Publication date
Application filed by AAC Acoustic Technologies Shenzhen Co Ltd, AAC Technologies Holdings Nanjing Co Ltd filed Critical AAC Acoustic Technologies Shenzhen Co Ltd
Publication of WO2022067975A1 publication Critical patent/WO2022067975A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/02—Loudspeakers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/22—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only 
    • H04R1/28—Transducer mountings or enclosures modified by provision of mechanical or acoustic impedances, e.g. resonator, damping means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H04R7/06—Plane diaphragms comprising a plurality of sections or layers
    • H04R7/08—Plane diaphragms comprising a plurality of sections or layers comprising superposed layers separated by air or other fluid

Definitions

  • the invention relates to the field of electro-acoustic conversion, in particular to a MEMS speaker used in portable electronic products.
  • speakers are mainly used to convert electrical signals into sound signals.
  • MEMS speakers Micro-Electro-Mechanical System
  • the driver is coupled with the vibration and sound-generating components, while the three-dimensional structure decouples the driver and the vibration-generating component through transmission parts such as mass blocks, mass frames, and connecting rods.
  • the vibration component in the planar structure restricts the deformation of the driver, so that the overall displacement amplitude is reduced, thereby affecting the audio output, and the acoustic performance is limited.
  • the three-dimensional structure decouples the driver and the vibration components, the overall stability is reduced due to the inclusion of transmission parts, and it is easy to introduce unstable modes to affect the sound effect, and is prone to fall failure, weak structural stability, and poor reliability.
  • the purpose of the present invention is to provide a MEMS speaker with stable structure, high reliability and good acoustic performance.
  • the present invention provides a MEMS speaker, which includes a MEMS sound-generating unit, and the MEMS sound-generating unit includes:
  • the substrate having a ring-like structure, which includes opposing top and bottom surfaces;
  • a vibration sounding assembly includes a vibrating membrane and a driver, and the vibrating membrane includes a first vibrating membrane fixed on the top surface and a first vibrating membrane fixed on the bottom surface and arranged parallel to the first vibrating membrane.
  • Two vibrating membranes, the first vibrating membrane, the second vibrating membrane and the substrate together form a closed substrate cavity;
  • the driver includes a fixed on the first vibrating membrane to drive the first vibrating membrane a first driver for vibrating the vibrating membrane to produce sound and a second driver fixed to the second vibrating membrane to drive the second vibrating membrane to vibrate and produce sound;
  • the first driver drives the acoustic wave in the substrate cavity and all the sound waves generated by the first vibrating membrane.
  • the sound waves in the substrate cavity generated by the second driver driving the second vibrating membrane are superimposed and then transmitted through the sound hole.
  • the first driver is attached to the side of the first vibrating membrane away from the substrate cavity
  • the second driver is attached to the side of the second vibrating membrane away from the substrate cavity. side.
  • the MEMS sound-generating unit further comprises a narrow space that simultaneously penetrates the first driver and the first diaphragm along the vibration direction, and/or penetrates the second driver and the second diaphragm simultaneously. sew.
  • both the vibrating membrane and the driver are rectangular, and at least two slits are formed on the first driver and the first vibrating membrane, and the two slits extend along the first
  • the two diagonal lines of the driver extend and intersect, and/or the second driver and the second diaphragm are provided with at least two slits, and the two slits are respectively along the corresponding Two diagonal lines of a driver and the corresponding second driver extend and cross each other.
  • the natural frequencies of at least two of the drivers are different.
  • the first driver includes at least two and is spaced apart from each other, the second driver includes one, and the plane dimension of the first driver is smaller than that of the second driver.
  • the substrate includes an upper substrate with the top surface and a lower substrate with the bottom surface, and an end of the upper substrate away from the top surface abuts against the lower substrate away from the bottom surface
  • the substrate further includes an extension wall formed by the inner side of the upper substrate extending toward the substrate cavity, and the extension wall is provided with at least two passages extending therethrough along the vibration direction. holes, each of the first drivers is respectively disposed opposite to one of the through holes.
  • the through holes include four and are arranged in a matrix
  • the first drivers include four and are arranged in a one-to-one correspondence with the four through holes.
  • the acoustic hole penetrates both the upper substrate and the lower substrate.
  • the MEMS speaker further includes a housing having a receiving space
  • the housing includes a ring-shaped side wall, an upper portion connected to opposite ends of the side wall and jointly enclosing the receiving space with the side wall.
  • a cover and a lower cover, and supporting walls located in the receiving space and connecting opposite sides of the side wall; the supporting walls divide the receiving space into a first cavity and a second cavity, and the upper end of the supporting wall and the lower end are respectively spaced from the upper cover and the lower cover to form an upper channel and a lower channel;
  • the MEMS sound-emitting unit is accommodated in the first cavity, and the side surfaces of the MEMS sound-emitting unit are respectively fixed on the sides.
  • the support wall and the support wall, and divide the first cavity into a first upper cavity and a first lower cavity, the first upper cavity communicates with the second cavity through the upper channel, the first lower cavity
  • the cavity communicates with the second cavity through the lower channel;
  • the support wall is further provided with a middle channel penetrating the upper channel, and the middle channel communicates the acoustic hole with the second cavity;
  • the side wall also A sound-outlet hole is provided therethrough, and the sound-outlet hole communicates the second cavity with the outside world.
  • the driver is a piezoelectric transducer, which includes a piezoelectric film and electrode plates attached to opposite sides of the piezoelectric membrane, wherein one of the electrode plates is attached to the vibrating membrane.
  • a first vibrating membrane and a second vibrating membrane are respectively arranged on the top surface and the bottom surface of the substrate to form a cavity of the substrate together, and are respectively attached to the first vibrating membrane.
  • the first driver and the second driver of the second vibrating membrane are both flat membrane structures, and directly drive the first vibrating membrane and the second vibrating membrane to vibrate and sound respectively, so that the overall structural stability is good , the problem of drop failure is effectively avoided, and the reliability is improved;
  • the above structure forms a dual-vibration membrane dual-drive structure, the first driver drives the sound wave generated by the first vibration membrane and the second driver drives the sound wave generated by the second vibration membrane.
  • the bottom cavity is superimposed and then transmitted through the sound hole, thereby effectively improving the driver's restriction on the amplitude of the diaphragm and the audio output, thereby making the acoustic performance better.
  • FIG. 1 is a schematic three-dimensional structure diagram of Embodiment 1 of the MEMS speaker of the present invention
  • Fig. 2 is the partial three-dimensional structure exploded schematic diagram of Fig. 1;
  • Fig. 3 is a sectional view along line A-A in Fig. 1;
  • FIG. 4 is a schematic structural diagram of a MEMS speaker package of the present invention.
  • FIG. 5 is a schematic diagram of the direction of sound waves in the structure of the MEMS speaker package of the present invention.
  • FIG. 6 is a schematic three-dimensional structure diagram of Embodiment 2 of the MEMS speaker according to the present invention.
  • FIG. 7 is a cross-sectional view of a second embodiment of the MEMS speaker of the present invention.
  • Embodiment 3 of the MEMS speaker of the present invention is a schematic structural diagram of Embodiment 3 of the MEMS speaker of the present invention.
  • FIG. 9 is a cross-sectional view of a third embodiment of the MEMS speaker of the present invention.
  • This embodiment provides a MEMS speaker 100 , which includes a MEMS sound-generating unit 10 .
  • the MEMS sound-generating unit 10 includes a substrate 1 , a vibration sound-generating component 2 , and a sound hole 3 .
  • the substrate 1 has an annular structure, which includes a top surface 11 and a bottom surface 12 opposite to each other.
  • the cross section of the substrate 1 may be circular, triangular or polygonal.
  • the vibrating and sounding assembly 2 includes a vibrating membrane 21 and a driver 22 that drives the vibrating membrane 21 to vibrate and emit sound.
  • the vibrating membrane 21 includes a first vibrating membrane 211 fixed to the top surface 11 and a second vibrating membrane 212 that is fixed to the bottom surface 12 and is spaced and parallel to the first vibrating membrane 211 .
  • the first vibrating film 211 , the second vibrating film 212 and the substrate 1 together form a closed substrate cavity 101 .
  • the driver 22 is a flat film structure, for example, the driver is a piezoelectric transducer, which includes a piezoelectric film and electrode plates attached to opposite sides of the piezoelectric film, one of which is The electrode plate is attached to the vibrating membrane 21 .
  • the driver 22 is not limited to this, and can also be an electrostatic transducer or an electromagnetic transducer, which is all feasible, and the principle is the same.
  • the shape of the driver 22 is not limited, and can be a circle, a triangle or a polygon, which preferably matches the shape of the substrate 1 .
  • the driver 22 includes a first driver 221 fixed on the first vibrating membrane 211 to drive the first vibrating membrane 211 to vibrate and emit sound, and a first driver 221 fixed on the second vibrating membrane 212 to drive the first vibrating membrane 211
  • the two diaphragms 212 vibrate the second driver 222 to generate sound.
  • the first driver 221 is attached to the side of the first vibrating film 211 away from the substrate cavity 101
  • the second driver 222 is attached to the second vibrating membrane 212 away from all sides.
  • One side of the substrate cavity 101 is placed to prevent the driver 22 from occupying the volume of the substrate cavity 101, so that the volume of the substrate cavity 101 is larger and the acoustic performance is better.
  • the acoustic hole 3 penetrates the substrate 1 and communicates the substrate cavity 101 with the outside world.
  • the acoustic holes 3 are disposed through the substrate 1 along the vibration direction perpendicular to the vibrating membrane 21 .
  • the sound wave generated by the first driver 221 driving the first vibrating membrane 211 and the sound wave generated by the second driver 222 driving the second vibrating membrane 212 are superimposed in the substrate cavity 101 and then pass through the sound wave. Hole 3 outgoing.
  • the first driver 221 and the second driver 222 directly drive the first vibrating membrane 211 and the second vibrating membrane 212 to vibrate and sound respectively, so that the overall structural stability is good, the problem of falling failure is effectively avoided, and the reliability is improved.
  • the above structure forms a double vibrating membrane double driving structure, the first driver 221 drives the acoustic wave generated by the first vibrating membrane 211 and the second driver 222 drives the acoustic wave generated by the second vibrating membrane 212 after superposition in the substrate cavity 101. Outgoing from the sound hole 3 enhances the final output audio signal, thereby effectively improving the restriction of the driver 22 on the amplitude of the diaphragm 21 and the audio output, thereby making the acoustic performance better.
  • the MEMS speaker unit 10 can be used alone, or can be used after being packaged. After sealing, as shown in FIGS. 4-5 , the MEMS speaker 100 further includes an accommodation space.
  • the casing 20 includes an annular side wall 201, an upper cover 202 and a lower cover 203 connected to opposite ends of the side wall 201 and together with the side wall 201 to enclose a receiving space,
  • the supporting walls 204 are located in the receiving space and are connected to opposite sides of the side wall 201 .
  • the support wall 204 divides the receiving space into a first cavity 102 and a second cavity 103 , and the upper end and the lower end of the support wall 204 are spaced apart from the upper cover 202 and the lower cover 203 respectively.
  • the upper end of the wall 204 and the upper cover 202 together form an upper channel 104
  • the lower end of the support wall 204 and the lower cover 203 together define a lower channel 105 .
  • the MEMS sounding unit 10 is accommodated in the first cavity 102 , and the side surfaces of the MEMS sounding unit 10 are respectively fixed to the side wall 201 and the support wall 204 , and the first cavity 102 is divided into The first upper cavity 1021 and the first lower cavity 1022.
  • the first upper cavity 1021 communicates with the second cavity 103 through the upper channel 104
  • the first lower cavity 1022 communicates with the second cavity 103 through the lower channel 105 .
  • the support wall 204 is further provided with a middle channel 2041 passing through it, and the middle channel 2041 communicates the acoustic hole 3 with the second cavity 103 .
  • the side wall 201 is further provided with a sound outlet hole 2011 extending therethrough, and the sound outlet hole 2011 communicates the second cavity 103 with the outside world.
  • the sound wave generated by the driver 22 driving the vibrating membrane 21 to vibrate is divided into two parts, as shown in FIG. 5:
  • the first part of the acoustic wave is directed into the substrate cavity 101, that is, the inward acoustic waves generated by the first driver 221 driving the first vibrating membrane 211 and the inward acoustic waves generated by the second driver 222 driving the second vibrating membrane 212 are in the substrate cavity. After being superimposed in the cavity 101, it is transmitted to the second cavity 103 through the acoustic hole 3 and the middle channel 2041 in sequence.
  • the second part of the sound wave is directed to the outside of the substrate cavity 101, that is, the outward sound waves generated by the first driver 221 driving the first vibrating membrane 211 are transmitted to the second cavity 103 through the first upper cavity 1021 and the upper channel 104 in turn;
  • the outward sound waves generated by the second driver 222 driving the second vibrating membrane 212 pass through the first lower cavity 1022 and the lower channel 105 in sequence and then transmit to the second cavity 103 .
  • the MEMS speaker 100 By reasonably designing the path difference between the first part of the sound wave and the second part of the sound wave so that the phases are the same when they are superimposed, the sound pressure on the inner and outer sides of the MEMS speaker 100 can be effectively utilized to further improve the audio output performance. That is, since the acoustic wave signals transmitted on the inner and outer sides of the diaphragm are 180° out of phase, preferably, the MEMS speaker 100 should reasonably set the path difference between the channel lengths on the inner and outer sides, for example, make the difference between the channel lengths on both sides equal to The odd multiple of the half-wavelength of the transmitted sound wave signal can make the phase of the two sound signals reach the sound hole 2011 the same, so that the original anti-phase sound wave signals will be in the same phase after being reversed when combined, which can produce a superposition effect and improve the system.
  • the vibration direction of the first vibrating membrane 211 is opposite to the vibration direction of the second vibrating membrane 212 .
  • the phase of the acoustic wave signal of the first vibrating membrane 211 outside the substrate cavity 101 is
  • the phase of the acoustic wave signal of the second vibrating membrane 212 outside the substrate cavity 101 is the same, while the acoustic wave signal of the first vibrating membrane 211 inside and outside the substrate cavity 101 is 180° out of phase, and the second vibrating membrane 212 is also in phase.
  • the length of the passage of the sound wave outside the substrate cavity 101 generated by the first vibrating membrane 211 to the sound outlet 2011 and the sound wave in the substrate cavity 101 passing through the acoustic hole 3 and the middle channel The length of the channel 2041 reaching the sound hole 2011 is an odd multiple of the half wavelength of the sound wave signal.
  • the structure of this embodiment is basically the same as that of the MEMS speaker of the above-mentioned first embodiment, the difference is:
  • the MEMS sound-emitting unit 510 further includes the first driver 5221 and the first diaphragm 5211 penetrating simultaneously along the vibration direction, and/or penetrating the second driver simultaneously 5222 and the slit 54 of the second diaphragm 5212. That is, the slit 54 communicates with the substrate cavity 5101 .
  • the diaphragm 521 and the driver 522 are both rectangular, and at least two slits 54 are formed on the first driver 5221 and the first diaphragm 5211, and the two slits 54 are respectively
  • the two diagonal lines of the first driver 5221 extend and intersect, and/or the second driver 5222 and the second diaphragm 5212 are provided with at least two slits 54, two of the slits 54.
  • the slits 54 respectively extend along two diagonal lines of the corresponding first driver 5221 or the corresponding second driver 5222 and cross each other.
  • the arrangement of the slits 54 greatly eliminates the limitation of the vibration freedom of the driver 522 and the vibrating membrane 521, increases the compliance of the vibration sounding assembly 52 and improves the vibration amplitude, thereby further improving the Sound pressure output of a MEMS speaker.
  • the structure of this embodiment is basically the same as that of the MEMS speaker of the above-mentioned first embodiment, the difference is:
  • At least two drivers 722 of the MEMS sound generating unit 710 have different natural frequencies, that is, at least two drivers 722 have different natural frequencies.
  • Each driver 722 drives the vibrating membrane 721 to generate different vibration frequencies, so that the sound communication in the full audible frequency band can be fully reconciled after superposition, and the acoustic performance is better.
  • the first driver 7221 includes at least two and are spaced apart from each other, the second driver 7222 includes one, and the plane size of the first driver 7221 is smaller than that of the second driver 7222 size.
  • the input audio signal can be divided into frequency first, and the high-frequency signal can be applied to the high-frequency driver group with a smaller plane size, namely the first driver 7221, and the low-frequency signal can be applied to the plane with a smaller size.
  • the large low-frequency driver group that is, the second driver 7222, makes it vibrate and sound corresponding to signals of different frequency bands respectively, and superimpose the generated sound waves and output them.
  • the drivers 722 with different natural frequencies correspond to high frequency, low frequency, and even high frequency, medium frequency, and low frequency in the audible frequency domain, so that the output of the MEMS speaker in the entire audible frequency domain has relatively uniform high-quality output.
  • the substrate 71 includes an upper substrate 701 having the top surface 711 and a lower substrate 702 having the bottom surface 712 , and the upper substrate 701 is far from the top surface 711 . One end abuts the end of the lower substrate 702 away from the bottom surface 712 .
  • the substrate 71 further includes an extension wall 703 extending from the inner side of the upper substrate 701 toward the substrate cavity 7101 , and the extension wall 703 is provided with at least two penetrating walls along the vibration direction. Through holes 704 , each of the first drivers 7221 is respectively disposed opposite to one of the through holes 704 .
  • the through holes 704 include four and are arranged in a matrix
  • the first drivers 7221 include four and are arranged in a one-to-one correspondence with the four through holes 704 .
  • the matrix arrangement is conducive to vibration balance and improves the stability of sound production.
  • the acoustic holes 73 penetrate through the upper substrate 701 and the lower substrate 702 at the same time.
  • the center position makes the sound waves generated by the first vibrating membrane 7211 and the second vibrating membrane 7212 have the same phase when they are combined and superimposed, which further improves the audio output performance of the MEMS speaker.
  • a first vibrating membrane and a second vibrating membrane are respectively arranged on the top surface and the bottom surface of the substrate to form a cavity of the substrate together, and are respectively attached to the first vibrating membrane.
  • the first driver and the second driver of the second vibrating membrane are both flat membrane structures, and directly drive the first vibrating membrane and the second vibrating membrane to vibrate and sound respectively, so that the overall structural stability is good , the problem of drop failure is effectively avoided, and the reliability is improved;
  • the above structure forms a dual-vibration membrane dual-drive structure, the first driver drives the sound wave generated by the first vibration membrane and the second driver drives the sound wave generated by the second vibration membrane.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

本发明提供了一种MEMS扬声器，包括MEMS发声单体，其包括：衬底，其包括相对的顶面和底面；振动发声组件，包括振动膜和驱动器，振动膜包括分别固定于顶面且相互间隔平行设置的第一振动膜与第二振动膜，第一振动膜、第二振动膜及衬底共同围成封闭的衬底空腔；驱动器包括贴合固定于第一振动膜以驱动第一振动膜振动发声的第一驱动器以及贴合固定于第二振动膜以驱动第二振动膜振动发声的第二驱动器；声孔，贯穿衬底，并将衬底空腔与外界连通；第一驱动器驱动第一振动膜产生的声波和第二驱动器驱动第二振动膜产生的声波在衬底空腔内叠加后经声孔传出。与相关技术相比，本发明的MEMS扬声器结构稳定、可靠性高且声学性能好。

Description

MEMS扬声器 技术领域
本发明涉及电声转换领域，尤其涉及一种运用于便携式电子产品的MEMS扬声器。
背景技术
扬声器作为手机等移动终端的主要元器件之一，其主要用于将电信号传换成声音信号。
MEMS扬声器 (Micro-Electro-Mechanical System)，即微机电系统扬声器，其相对于传统的音圈式扬声器具有一致性好、功耗低、尺寸小、价格低等优势，主要包括平面式和立体式结构。平面式架构中驱动器与振动发声组件耦合在一起，而立体式架构则通过质量块、质量框架、连杆等传动件将驱动器与振动发声组件去耦合。
然而，相关技术的MEMS扬声器中，平面式架构中振动组件会制约驱动器的变形，使其整体位移振幅降低从而影响音频输出，声学性能受限。而立体式架构虽然将驱动器和振动组件去耦合，但由于其包含传动件，使其整体稳定性降低，易引入失稳模态影响音效，且易发生跌落失效，结构稳定性弱，可靠性差。
因此，有必要提供一种新的MEMS扬声器解决上述技术问题。
 技术问题
本发明的目的在于提供一种结构稳定、可靠性高且声学性能好的MEMS扬声器。
 技术解决方案
为了达到上述目的，本发明提供了一种MEMS扬声器，其包括MEMS发声单体，所述MEMS发声单体包括：
衬底，所述衬底呈环状结构，其包括相对的顶面和底面；
振动发声组件，所述振动发声组件包括振动膜和驱动器，所述振动膜包括固定于所述顶面的第一振动膜和固定于所述底面并与所述第一振动膜间隔平行设置的第二振动膜，所述第一振动膜、所述第二振动膜及所述衬底共同围成封闭的衬底空腔；所述驱动器包括固定于所述第一振动膜以驱动所述第一振动膜振动发声的第一驱动器以及固定于所述第二振动膜以驱动所述第二振动膜振动发声的第二驱动器；以及，
声孔，所述声孔贯穿所述衬底并将所述衬底空腔与外界连通；所述第一驱动器驱动所述第一振动膜产生的在所述衬底空腔内的声波和所述第二驱动器驱动所述第二振动膜产生的在所述衬底空腔内的声波叠加后经所述声孔传出。
优选的，所述第一驱动器贴合于所述第一振动膜远离所述衬底空腔的一侧，所述第二驱动器贴合于所述第二振动膜远离所述衬底空腔的一侧。
优选的，所述MEMS发声单体还包括沿所述振动方向同时贯穿所述第一驱动器与所述第一振膜，和/或同时贯穿所述第二驱动器与所述第二振膜的狭缝。
优选的，所述振动膜和所述驱动器均呈矩形，所述第一驱动器与所述第一振膜上开设有至少两条所述狭缝，两条所述狭缝分别沿所述第一驱动器的两条对角线延伸并交叉，和/或所述第二驱动器与所述第二振膜上开设有至少两条所述狭缝，两条所述狭缝分别沿对应的所述第一驱动器和对应的所述第二驱动器的两条对角线延伸并相互交叉。
优选的，至少两个所述驱动器的固有频率相异。
优选的，所述第一驱动器包括至少两个且相互间隔设置，所述第二驱动器包括一个，且所述第一驱动器的平面尺寸小于所述第二驱动器的平面尺寸。
优选的，所述衬底包括具有所述顶面的上衬底和具有所述底面的下衬底，所述上衬底远离所述顶面的一端抵接于所述下衬底远离所述底面的一端，所述衬底还包括由所述上衬底的内侧朝向所述衬底空腔延伸形成的延伸壁，所述延伸壁设有沿所述振动方向贯穿其上的至少两个通孔，每一所述第一驱动器分别正对一所述通孔设置。
优选的，所述通孔包括四个且呈矩阵排布，所述第一驱动器包括四个且与四个所述通孔一一对应设置。
优选的，所述声孔同时贯穿所述上衬底和所述下衬底。
优选的，所述MEMS扬声器还包括具有收容空间的壳体，所述壳体包括呈环状的侧壁、连接于所述侧壁相对两端并与所述侧壁共同围成收容空间的上盖和下盖、位于所述收容空间内并连接所述侧壁相对两侧的支撑壁；所述支撑壁将所述收容空间分隔成第一腔和第二腔，且所述支撑壁的上端和下端分别与所述上盖及所述下盖间隔围成上通道和下通道；所述MEMS发声单体收容于所述第一腔内，所述MEMS发声单体的侧面分别固定于所侧壁和所述支撑壁，并将所述第一腔分隔成第一上腔和第一下腔，所述第一上腔通过所述上通道与所述第二腔连通，所述第一下腔通过所述下通道与所述第二腔连通；所述支撑壁还设有贯穿其上的中通道，所述中通道将所述声孔与所述第二腔连通；所述侧壁还设有贯穿其上的出音孔，所述出音孔将所述第二腔与外界连通。
优选的，所述驱动器为压电换能器，其包括压电膜和分别贴合于所述压电膜相对两侧的电极板，其中一所述电极板贴合于所述振动膜。
 有益效果
与相关技术相比，本发明的MEMS扬声器通过在衬底的顶面和底面分别设置第一振动膜和第二振动膜且共同围成衬底空腔，并设置分别贴合于第一振动膜的第一驱动器与第二振动膜的第二驱动器，第一驱动器和第二驱动器均为平面膜结构，且分别直接驱动第一振动膜和第二振动膜振动发声，从而使得整体结构稳定性好，有效避免了跌落失效的问题，提高了可靠性；上述结构形成了双振动膜双驱动结构，第一驱动器驱动第一振动膜产生的声波和第二驱动器驱动第二振动膜产生的声波在衬底空腔内叠加后经所述声孔传出，从而有效的改善了驱动器对振动膜的振幅和音频输出的制约，进而使得声学性能更优。
 附图说明
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其它的附图，其中：
图1为本发明MEMS扬声器实施例一的立体结构示意图；
图2为图1的部分立体结构分解示意图；
图3为图1中沿A-A线的剖示图；
图4为本发明MEMS扬声器封装的结构示意图；
图5为本发明MEMS扬声器封装的结构中声波方向示意图；
图6为本发明MEMS扬声器实施例二的立体构示意图；
图7为本发明MEMS扬声器实施例二的剖示图；
图8为本发明MEMS扬声器实施例三的结构示意图；
图9为本发明MEMS扬声器实施例三的剖示图。
 本发明的实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例，都属于本发明保护的范围。
实施方式一
请同时参阅图1-4，本实施例提供了一种MEMS扬声器100，其包括MEMS发声单体10，所述MEMS发声单体10包括：衬底1、振动发声组件2以及声孔3。
所述衬底1呈环状结构，其包括相对的顶面11和底面12。本实施方式中，所述衬底1的横截面呈圆形或三角形或多边形均可。
所述振动发声组件2包括振动膜21和驱动的振动膜21振动发声的驱动器22。
所述振动膜21包括固定于所述顶面11的第一振动膜211和固定于所述底面12并与所述第一振动膜211间隔平行设置的第二振动膜212。所述第一振动膜211、所述第二振动膜212及所述衬底1共同围成封闭的衬底空腔101。
本实施方式中，所述驱动器22为平面薄膜结构，比如所述驱动器为压电换能器，其包括压电膜和分别贴合于所述压电膜相对两侧的电极板，其中一所述电极板贴合于所述振动膜21。当然，所述驱动器22也不限于此，还可以是静电换能器或电磁换能器，这都是可行的，其原理一样。
所述驱动器22的形状不限，可为圆形或三角形或多边形，其与衬底1形状匹配为佳。
本实施方式中，所述驱动器22包括固定于所述第一振动膜211以驱动所述第一振动膜211振动发声的第一驱动器221以及固定于所述第二振动膜212以驱动所述第二振动膜212振动发声的第二驱动器222。
更优的，所述第一驱动器221贴合于所述第一振动膜211远离所述衬底空腔101的一侧，所述第二驱动器222贴合于所述第二振动膜212远离所述衬底空腔101的一侧，避免驱动器22占用衬底空腔101的体积，使得衬底空腔101的体积更大，声学性能更优。
所述声孔3贯穿所述衬底1，并将所述衬底空腔101与外界连通。本实施方式中，所述声孔3沿垂直于所述振动膜21的振动方向贯穿所述衬底1设置。
所述第一驱动器221驱动所述第一振动膜211产生的声波和所述第二驱动器222驱动所述第二振动膜212产生的声波在所述衬底空腔101内叠加后经所述声孔3传出。
上述结构中，第一驱动器221和第二驱动器222分别直接驱动第一振动膜211和第二振动膜212振动发声，从而使得整体结构稳定性好，有效避免了跌落失效的问题，提高了可靠性；上述结构形成了双振动膜双驱动结构，第一驱动器221驱动第一振动膜211产生的声波和第二驱动器222驱动第二振动膜212产生的声波在衬底空腔101内叠加后经所述声孔3传出，使得最终输出的音频信号加强，从而有效的改善了驱动器22对振动膜21的振幅和音频输出的制约，进而使得声学性能更优。
请一并结合图5所示，本实施方式中，所述MEMS扬声器单体10可单独使用，也可封装后使用，其封后如图4-5所示，MEMS扬声器100还包括具有收容空间的壳体20，所述壳体20包括呈环状的侧壁201、连接于所述侧壁201相对两端并与所述侧壁201共同围成收容空间的上盖202和下盖203、位于所述收容空间内并连接所述侧壁201相对两侧的支撑壁204。
所述支撑壁204将所述收容空间分隔成第一腔102和第二腔103，且所述支撑壁204的上端和下端分别与所述上盖202及所述下盖203间隔，所述支撑壁204的上端与所述上盖202共同围成上通道104，所述支撑壁204的下端与所述下盖203共同围成下通道105。
所述MEMS发声单体10收容于所述第一腔102内，所述MEMS发声单体10的侧面分别固定于所侧壁201和所述支撑壁204，并将所述第一腔102分隔成第一上腔1021和第一下腔1022。第一上腔1021通过所述上通道104与所述第二腔103连通，所述第一下腔1022通过所述下通道105与所述第二腔103连通。所述支撑壁204还设有贯穿其上的中通道2041，所述中通道2041将所述声孔3与所述第二腔103连通。所述侧壁201还设有贯穿其上的出音孔2011，所述出音孔2011将所述第二腔103与外界连通。
上述结构将MEMS发声单体10通过壳体20封装后，驱动器22驱动振动膜21振动产生的声波则分两部分，如图5所示：
第一部分声波分朝向衬底空腔101内，即第一驱动器221驱动第一振动膜211产生的向内的声波和第二驱动器222驱动第二振动膜212产生的向内的声波在衬底空腔101内叠加后依次经所述声孔3和所述中通道2041传至第二腔103内。
第二部分声波分朝向衬底空腔101外，即第一驱动器221驱动第一振动膜211产生的向外的声波依次经第一上腔1021和上通道104后传至第二腔103内；第二驱动器222驱动第二振动膜212产生的向外的声波依次经第一下腔1022和下通道105后传至第二腔103内。
上述两部分声波在第二腔103内叠加后经所述出音孔2011传出，有效的改善了声学性能。
通过合理设计第一部分声波和第二部分声波的路程差，使其叠加时相位相同，则可有效的利用MEMS扬声器100内外两侧的声压，进一步提升音频输出性能。即，由于振膜内外两侧传输的声波信号为180°反相，故优选的，MEMS扬声器100应合理设置其内外两侧通道长度的路程差，如，使两侧通道长度的差值等于所传输声波信号半波长的奇数倍，这样可使得两路声信号抵达出音孔2011时相位相同，让原本反相的声波信号合并时再反相之后变成同相，即可产生叠加效应，提升系统的声压输出。需要理解的是，MEMS扬声器100在工作时，第一振动膜211的振动方向与第二振动膜212的振动方向相反，此时第一振动膜211在衬底空腔101外的声波信号的相位与第二振动膜212在衬底空腔101外的声波信号的相位相同，而第一振动膜211在衬底空腔101内外两侧的声波信号为180°反相，第二振动膜212也是如此；以第一振动膜211为例，第一振动膜211产生的衬底空腔101外的声波抵达出音孔2011的通道长度与衬底空腔101内的声波经声孔3和中通道2041抵达出音孔2011的通道长度为声波信号半波长的奇数倍。
实施方式二
本实施方式与上述实施方式一的MEMS扬声器结构基本相同，不同的是：
请结合图6-7所示，所述MEMS发声单体510还包括沿所述振动方向同时贯穿所述第一驱动器5221与所述第一振膜5211，和/或同时贯穿所述第二驱动器5222与所述第二振膜5212的狭缝54。即狭缝54与衬底空腔5101连通。
比如，所述振动膜521和所述驱动器522均呈矩形，所述第一驱动器5221与所述第一振膜5211上开设有至少两条所述狭缝54，两条所述狭缝54分别沿所述第一驱动器5221的两条对角线延伸并交叉，和/或所述第二驱动器5222与所述第二振膜5212上开设有至少两条所述狭缝54，两条所述狭缝54分别沿对应的所述第一驱动器5221或对应的所述第二驱动器5222的两条对角线延伸并相互交叉。
本实施方式中，狭缝54的设置极大程度的消除了驱动器522与振动膜521振动自由度的限制，增加了所述振动发声组件52的顺性并提升了振动的振幅，从而进一步提升了MEMS扬声器的声压输出。
除上述区别外，本实施方式的MEMS扬声器的其它结构与实施方式一相同，在此不再赘述。
实施方式三
本实施方式与上述实施方式一的MEMS扬声器结构基本相同，不同的是：
请结合图8-9所示，本实施方式中，所述MEMS发声单体710的至少两个所述驱动器722的固有频率相异，即至少有两个驱动器722具有不同的固有频率。使得各驱动器722驱动振动膜721产生不同的振动频率，从而叠加后使全可听频段的声交得到全面的调和，声学性能更能。
比如，本实施方式中，所述第一驱动器7221包括至少两个且相互间隔设置，所述第二驱动器7222包括一个，且所述第一驱动器7221的平面尺寸小于所述第二驱动器7222的平面尺寸。采用不同尺寸的驱动器722进行组合，可先对输入的音频信号进行分频，将高频信号施加给平面尺寸较小的高频驱动器组，即第一驱动器7221，将低频信号施加给平面尺寸较大的低频驱动器组，即第二驱动器7222，使其分别对应不同频段信号振动发声，并将产生的声波叠加后输出。不仅可以提升MEMS扬声器的声压输出，还可以针对不同频段的声信号采用不同固有频率（f0）的驱动器进行发声，使全可听频段的声效得到全面的调和。比如，不同固有频率的驱动器722分别对应可听频域的高频、低频，甚至高频、中频、低频，使所述MEMS扬声器在整个可听频域的输出具有相对均匀的高品质输出。
本实施方式中，具体的，所述衬底71包括具有所述顶面711的上衬底701和具有所述底面712的下衬底702，所述上衬底701远离所述顶面711的一端抵接于所述下衬底702远离所述底面712的一端。所述衬底71还包括由所述上衬底701的内侧朝向所述衬底空腔7101延伸形成的延伸壁703，所述延伸壁703设有沿所述振动方向贯穿其上的至少两个通孔704，每一所述第一驱动器7221分别正对一所述通孔704设置。
本实施方式中，所述通孔704包括四个且呈矩阵排布，所述第一驱动器7221包括四个且与四个所述通孔704一一对应设置。矩阵排布的设置有利于振动平衡，提高发声的稳定性。
更优的，所述声孔73同时贯穿所述上衬底701和所述下衬底702。居中位置，使得第一振动膜7211与第二振动膜7212产生的声波汇合叠加时相位相同，进一步提升MEMS扬声器的音频输出性能。
除上述区别外，本实施方式的MEMS扬声器的其它结构与实施方式一相同，在此不再赘述。
与相关技术相比，本发明的MEMS扬声器通过在衬底的顶面和底面分别设置第一振动膜和第二振动膜且共同围成衬底空腔，并设置分别贴合于第一振动膜的第一驱动器与第二振动膜的第二驱动器，第一驱动器和第二驱动器均为平面膜结构，且分别直接驱动第一振动膜和第二振动膜振动发声，从而使得整体结构稳定性好，有效避免了跌落失效的问题，提高了可靠性；上述结构形成了双振动膜双驱动结构，第一驱动器驱动第一振动膜产生的声波和第二驱动器驱动第二振动膜产生的声波在衬底空腔内叠加后经所述声孔传出，从而有效的改善了驱动器对振动膜的振幅和音频输出的制约，进而使得声学性能更优；通过不同频率的驱动器设置，有效实现调和全可听波段的音频输出，声效优化效果更好。
以上所述的仅是本发明的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出改进，但这些均属于本发明的保护范围。

Claims (11)

  1. 一种MEMS扬声器，其特征在于，所述MEMS扬声器包括MEMS发声单体，所述MEMS发声单体包括：
    衬底，所述衬底呈环状结构，其包括相对的顶面和底面；
    振动发声组件，所述振动发声组件包括振动膜和驱动器，所述振动膜包括固定于所述顶面的第一振动膜和固定于所述底面并与所述第一振动膜间隔平行设置的第二振动膜，所述第一振动膜、所述第二振动膜及所述衬底共同围成封闭的衬底空腔；所述驱动器包括固定于所述第一振动膜以驱动所述第一振动膜振动发声的第一驱动器以及固定于所述第二振动膜以驱动所述第二振动膜振动发声的第二驱动器；以及，
    声孔，所述声孔贯穿所述衬底并将所述衬底空腔与外界连通；所述第一驱动器驱动所述第一振动膜产生的在所述衬底空腔内的声波和所述第二驱动器驱动所述第二振动膜产生的在所述衬底空腔内的声波叠加后经所述声孔传出。
  2. 根据权利要求1所述的MEMS扬声器，其特征在于，所述第一驱动器贴合于所述第一振动膜远离所述衬底空腔的一侧，所述第二驱动器贴合于所述第二振动膜远离所述衬底空腔的一侧。
  3. 根据权利要求1所述的MEMS扬声器，其特征在于，所述MEMS发声单体还包括沿所述振动方向同时贯穿所述第一驱动器与所述第一振膜，和/或同时贯穿所述第二驱动器与所述第二振膜的狭缝。
  4. 根据权利要求3所述的MEMS扬声器，其特征在于，所述振动膜和所述驱动器均呈矩形，所述第一驱动器与所述第一振膜上开设有至少两条所述狭缝，两条所述狭缝分别沿所述第一驱动器的两条对角线延伸并交叉，和/或所述第二驱动器与所述第二振膜上开设有至少两条所述狭缝，两条所述狭缝分别沿对应的所述第一驱动器或对应的所述第二驱动器的两条对角线延伸并相互交叉。
  5. 根据权利要求1所述的MEMS扬声器，其特征在于，至少两个所述驱动器的固有频率相异。
  6. 根据权利要求5所述的MEMS扬声器，其特征在于，所述第一驱动器包括至少两个且相互间隔设置，所述第二驱动器包括一个，且所述第一驱动器的平面尺寸小于所述第二驱动器的平面尺寸。
  7. 根据权利要求6所述的MEMS扬声器，其特征在于，所述衬底包括具有所述顶面的上衬底和具有所述底面的下衬底，所述上衬底远离所述顶面的一端抵接于所述下衬底远离所述底面的一端，所述衬底还包括由所述上衬底的内侧朝向所述衬底空腔延伸形成的延伸壁，所述延伸壁设有沿所述振动方向贯穿其上的至少两个通孔，每一所述第一驱动器分别正对一所述通孔设置。
  8. 根据权利要求7所述的MEMS扬声器，其特征在于，所述通孔包括四个且呈矩阵排布，所述第一驱动器包括四个且与四个所述通孔一一对应设置。
  9. 根据权利要求7所述的MEMS扬声器，其特征在于，所述声孔同时贯穿所述上衬底和所述下衬底。
  10. 根据权利要求1所述的MEMS扬声器，其特征在于，所述MEMS扬声器还包括具有收容空间的壳体，所述壳体包括呈环状的侧壁、连接于所述侧壁相对两端并与所述侧壁共同围成收容空间的上盖和下盖、位于所述收容空间内并连接所述侧壁相对两侧的支撑壁；所述支撑壁将所述收容空间分隔成第一腔和第二腔，且所述支撑壁的上端和下端分别与所述上盖及所述下盖间隔围成上通道和下通道；所述MEMS发声单体收容于所述第一腔内，所述MEMS发声单体的侧面分别固定于所侧壁和所述支撑壁，并将所述第一腔分隔成第一上腔和第一下腔，所述第一上腔通过所述上通道与所述第二腔连通，所述第一下腔通过所述下通道与所述第二腔连通；所述支撑壁还设有贯穿其上的中通道，所述中通道将所述声孔与所述第二腔连通；所述侧壁还设有贯穿其上的出音孔，所述出音孔将所述第二腔与外界连通。
  11. 根据权利要求1所述的MEMS扬声器，其特征在于，所述驱动器为压电换能器，其包括压电膜和分别贴合于所述压电膜相对两侧的电极板，其中一所述电极板贴合于所述振动膜。
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