WO2022034709A1 - Procédé pour soulever un film optique en feuille, et dispositif pour celui-ci - Google Patents

Procédé pour soulever un film optique en feuille, et dispositif pour celui-ci Download PDF

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Publication number
WO2022034709A1
WO2022034709A1 PCT/JP2021/008889 JP2021008889W WO2022034709A1 WO 2022034709 A1 WO2022034709 A1 WO 2022034709A1 JP 2021008889 W JP2021008889 W JP 2021008889W WO 2022034709 A1 WO2022034709 A1 WO 2022034709A1
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WO
WIPO (PCT)
Prior art keywords
optical film
suction
wafer optical
wafer
suction portion
Prior art date
Application number
PCT/JP2021/008889
Other languages
English (en)
Japanese (ja)
Inventor
裕司 山下
祥司 芝田
Original Assignee
日東電工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日東電工株式会社 filed Critical 日東電工株式会社
Priority to JP2022542574A priority Critical patent/JPWO2022034709A1/ja
Priority to CN202180056205.XA priority patent/CN116018312A/zh
Priority to KR1020237000928A priority patent/KR20230048297A/ko
Publication of WO2022034709A1 publication Critical patent/WO2022034709A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00—Separating articles from piles
    • B65H3/08—Separating articles from piles using pneumatic force
    • B65H3/0808—Suction grippers
    • B65H3/0816—Suction grippers separating from the top of pile
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00—Separating articles from piles
    • B65H3/08—Separating articles from piles using pneumatic force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00—Separating articles from piles
    • B65H3/08—Separating articles from piles using pneumatic force
    • B65H3/0808—Suction grippers
    • B65H3/0883—Construction of suction grippers or their holding devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H5/00—Feeding articles separated from piles; Feeding articles to machines
    • B65H5/22—Feeding articles separated from piles; Feeding articles to machines by air-blast or suction device
    • B65H5/222—Feeding articles separated from piles; Feeding articles to machines by air-blast or suction device by suction devices
    • B65H5/224—Feeding articles separated from piles; Feeding articles to machines by air-blast or suction device by suction devices by suction belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/40—Type of handling process
    • B65H2301/42—Piling, depiling, handling piles
    • B65H2301/423—Depiling; Separating articles from a pile
    • B65H2301/4232—Depiling; Separating articles from a pile of horizontal or inclined articles, i.e. wherein articles support fully or in part the mass of other articles in the piles
    • B65H2301/42324—Depiling; Separating articles from a pile of horizontal or inclined articles, i.e. wherein articles support fully or in part the mass of other articles in the piles from top of the pile
    • B65H2301/423245—Depiling; Separating articles from a pile of horizontal or inclined articles, i.e. wherein articles support fully or in part the mass of other articles in the piles from top of the pile the pile lying on a stationary support, i.e. the separator moving according to the decreasing height of the pile
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2403/00—Power transmission; Driving means
    • B65H2403/50—Driving mechanisms
    • B65H2403/51—Cam mechanisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/30—Suction means
    • B65H2406/34—Suction grippers
    • B65H2406/342—Suction grippers being reciprocated in a rectilinear path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/17—Nature of material
    • B65H2701/175—Plastic
    • B65H2701/1752—Polymer film

Definitions

  • the present invention relates to a method and an apparatus thereof for separating a single-wafer optical film one by one from an aggregate having a plurality of stacked single-wafer optical films.
  • an optical film has been used in an image display device such as a liquid crystal display device or an organic EL display device.
  • the optical film include a polarizing film containing a polarizing element, a retardation film, and a light diffusing film.
  • the polarizing film and the like are also used for applications other than image display devices such as polarized sunglasses and dimming windows.
  • Such an optical film is formed into a predetermined plan view shape that matches the screen or the like in order to incorporate it into the screen or the like of the image display device.
  • an optical film formed into a predetermined shape is referred to as a "single-leaf optical film".
  • a plurality of single-wafer optical films are continuously produced, for example, by cutting out an optical film original fabric (a long strip-shaped optical film or a large-sized optical film) with a cutting blade.
  • the manufactured multiple sheet-fed optical films are stacked and stored one above the other.
  • a stack of a plurality of sheet-fed optical films is referred to as an "aggregate".
  • Patent Document 1 discloses a film separation device 2 in which suction trays 12 that are moved up and down by a spring pulling device 5 are arranged on both sides of a suction hole zone 7 in the width direction (however, Patent Document 1). Incorporate the code attached to 1).
  • the film separation device 2 operates as follows, and can take out the films one by one from the pile of the films. That is, the suction dish 12 is lowered by the spring pulling device 5, the uppermost film is sucked by the suction dish 12, the suction dish 12 is raised by the spring pulling device 5, the film is lifted, and the film is lifted by the perforated band 7. Is adsorbed, and the perforated zone 7 is driven to convey the film, so that one film is taken out from the stacked piles.
  • Patent Document 1 Although the apparatus of Patent Document 1 can be applied to a general-purpose film, there is a problem in applying it to a single-wafer optical film that requires high precision. Specifically, the device of Patent Document 1 repeats a vertical movement in which the suction plate 12 is raised from the lowest lowered position to the highest raised position by the spring pulling device 5 and lowered from the highest raised position to the lowest lowered position. When the suction plate 12 is lowered by the spring pulling device 5, the tip of the suction plate 12 strongly pushes the upper surface of the film, which may cause a scratch on the upper surface of the film. If the single-wafer optical film, which requires high precision, is scratched as described above, the single-wafer optical film loses its commercial value.
  • the tip of the suction dish 12 may stop at a position slightly away from the upper surface of the film, and the suction dish 12 may not suck the film. Even if the tip of the suction dish 12 stops at a position away from the film, the film can be sucked by increasing the suction force of the suction dish 12. However, if the suction force of the suction dish 12 is increased, a suction mark may be formed on the upper surface of the film. If the single-wafer optical film, which requires high precision, is scratched by the adsorption marks, the single-wafer optical film loses its commercial value.
  • An object of the present invention is to provide a method for lifting a single-wafer optical film and a device for lifting the single-wafer optical film, which are resistant to scratches and can stably separate the single-wafer optical film one by one from an aggregate. Is.
  • the present inventors have diligently studied the above-mentioned problems of the conventional lifting device, and the cause is that the positioning accuracy of the lowest position of the suction plate 12 (corresponding to the suction portion of the present invention) is poor. I found. Then, by moving the suction portion up and down so that the positioning accuracy of the lowest lowering position of the suction portion is within the range of ⁇ 0.10 mm, the single-wafer optical film can be stably separated from the aggregate one by one. Moreover, it was found that the single-wafer optical film can be prevented from being scratched.
  • the method of the present invention is a method of lifting the uppermost single-wafer optical film from an aggregate having a plurality of stacked single-wafer optical films by an adsorption portion, and lowers the adsorption portion to the lowest position.
  • the upper surface of the uppermost single-wafer optical film is adsorbed by the adsorption portion, and the adsorption portion that adsorbs the single-wafer optical film is raised to separate the uppermost single-wafer optical film from the aggregate. It has a step, and the suction portion is moved up and down so that the positioning accuracy of the lowest position of the suction portion is within the range of ⁇ 0.10 mm.
  • the suction portion is moved up and down by a cam mechanism.
  • the vertical movement cycle time of the suction portion is 0.10 seconds or more, and the distance from the lowest lowering position to the highest rising position of the suction portion is 30 mm or less.
  • the single-wafer optical film is lifted by the suction portion so that both side regions in the width direction of the single-wafer optical film hang downward.
  • the adsorption portions are arranged in pairs at intervals in the width direction of the single-wafer optical film, and the distance between the pair of adsorption portions is the length in the width direction of the single-wafer optical film.
  • the intermediate point of the pair of adsorption portions and the intermediate point in the width direction of the single-wafer optical film substantially coincide with each other.
  • the adsorption portions are arranged in pairs at intervals in the width direction of the single-wafer optical film, and the uppermost stage lifted by the adsorption portions between the pair of adsorption portions.
  • a transport belt for sucking and transporting the single-wafer optical film of No. 1 is arranged, and the first suction portion does not contact the first side edge in the width direction of the transport belt when moving up and down, and the first side edge.
  • the second suction portion is arranged within 25 mm from the second side edge without contacting the second side edge in the width direction of the transport belt during vertical movement.
  • a lifting device for a single-wafer optical film includes a vertically movable suction unit that lifts the uppermost single-wafer optical film from an aggregate having a plurality of stacked single-wafer optical films, and a lifting unit that moves the suction unit up and down.
  • a vertically movable suction unit that lifts the uppermost single-wafer optical film from an aggregate having a plurality of stacked single-wafer optical films
  • a lifting unit that moves the suction unit up and down.
  • the elevating part moves the suction part up and down by a cam mechanism.
  • the suction portion is arranged with respect to the single-wafer optical film so that both side regions in the width direction of the lifted single-wafer optical film hang downward.
  • the adsorption portions are arranged in pairs at intervals in the width direction of the single-wafer optical film, and the distance between the pair of adsorption portions is the length in the width direction of the single-wafer optical film.
  • a preferred apparatus of the present invention has a piston rod whose elevating portion moves up and down by a cam mechanism and an arm extending inward from the piston rod, and the suction portion is provided on the arm.
  • the single-wafer optical film can be separated and taken out one by one from the aggregate while preventing the single-wafer optical film from being scratched.
  • FIG. 1 Top view of the single-wafer optical film of the present invention.
  • the schematic side view which shows the layer structure of the sheet-fed optical film which concerns on one example.
  • the schematic side view which shows the layer structure of the sheet-fed optical film which concerns on another example.
  • Front view of the lifting device. A side view of a single-wafer optical film lifting device when the suction portion is in the highest position.
  • Front view of the lifting device. A reference plan view for explaining the positional relationship between the suction portion, the transport belt, and the uppermost single-wafer optical film.
  • the reference front view for demonstrating the most descending position and the most ascending position of a suction part.
  • Reference front view of the first elevating part that raises and lowers the suction part Reference front view of the second elevating part that raises and lowers the suction part.
  • a side view of a lifting device showing the process of transporting a single-wafer optical film with a transport belt.
  • planar view refers to viewing from a vertical direction with respect to the surface of an object
  • planear view and “planar view” are viewed from a vertical direction with respect to a surface of an object.
  • the expression “abbreviation” means to include a range permitted in the technical field of the present invention.
  • the numerical range represented by "lower limit value X to upper limit value Y” means a lower limit value X or more and an upper limit value Y or less.
  • FIG. 1 is a plan view of a single-wafer optical film.
  • the single-wafer optical film has a single-wafer shape, and its plan-view shape is not particularly limited.
  • the plan view shape of the single-wafer optical film is, for example, a substantially rectangular shape, a substantially square shape, a substantially trapezoidal shape, a substantially triangular shape, or a substantially polygonal shape; a substantially circular shape; a substantially elliptical shape; and other irregular shapes. And so on.
  • the "abbreviation" of the substantially polygonal shape such as the substantially rectangular shape includes, for example, a shape in which the corners are chamfered, a shape in which a part of the side is slightly bulged or recessed, a shape in which the side is slightly curved, and the like. included.
  • the "abbreviation" of the substantially circular shape and the substantially elliptical shape includes, for example, a shape in which a part of the circumference is slightly bulged or recessed, a shape in which a part of the circumference is slightly straight or diagonal, and the like.
  • the single-wafer optical film of the illustrated example has a substantially rectangular shape having a major axis in the width direction and a minor axis in the length direction. The length direction is orthogonal to the width direction.
  • the single-wafer optical film includes an optical film.
  • the single-wafer optical film may be composed of only the optical film, or may have components other than the optical film and the optical film.
  • 2 and 3 illustrate the layer structure of a single-wafer optical film.
  • the single-wafer optical film 1 has an optical film 11, a separator film 13, and an adhesive layer 12 that is interposed between the optical film 11 and the separator film 13 to bond both films 11 and 13.
  • the pressure-sensitive adhesive layer 12 is firmly adhered to the optical film 11 and is detachably adhered to the separator film 13.
  • the separator film 13 can be peeled off at the interface with the pressure-sensitive adhesive layer 12.
  • a single-wafer optical film that does not have the pressure-sensitive adhesive layer 12 and the separator film 13 may be used (not shown).
  • the optical film 11 includes an optical functional film.
  • the optical functional film include a splitter, a retardation film, a light diffusing film, a brightness improving film, an antiglare film, and a light reflecting film.
  • the splitter is a film having a property of transmitting light (polarized light) vibrating in a specific direction and blocking light vibrating in the other direction.
  • the retardation film is a film exhibiting optical anisotropy, and examples thereof include stretched films such as acrylic resins, cycloolefin resins, and cellulosic resins.
  • the optical film 11 may include a protective film.
  • the protective film is laminated for the purpose of protecting the optical functional film. As the protective film, a colorless and transparent film is typically used.
  • the optical film 11 has a first protective film 111, a polarizing element 112, and a second protective film 113 in this order from the bottom of the drawing.
  • One laminated film is formed by adhering the films 111 to 113 to each other.
  • the first protective film 111 and the polarizing element 112, and the polarizing element 112 and the second protective film 113 are directly adhered to each other, but if necessary, between these films.
  • An adhesive layer (or an adhesive layer) may be interposed and the films may be bonded via the adhesive layer (or an adhesive layer) (not shown).
  • the surface protective film 14 is laminated on the surface of the optical film 11 (the surface of the second protective film 113) via the pressure-sensitive adhesive layer 15.
  • the surface protective film 14 can be peeled off from the surface of the optical film 11 with the pressure-sensitive adhesive layer 15, for example. Since the surface protective film 14 and the pressure-sensitive adhesive layer 15 are provided as needed, a single-wafer optical film that does not have the surface protection film 14 and the pressure-sensitive adhesive layer 15 may be used.
  • the optical film 11 has a retardation film 115.
  • the surface protective film 16 is laminated on the surface of the optical film 11 (the surface of the retardation film 115) via the pressure-sensitive adhesive layer 17.
  • the surface protective film 16 can be peeled off from the surface of the optical film 11 (phase difference film 115), for example, with the pressure-sensitive adhesive layer 17. Since the surface protective film 16 and the pressure-sensitive adhesive layer 17 are provided as needed, a single-wafer optical film that does not have the surface protection film 16 and the pressure-sensitive adhesive layer 17 may be used.
  • the pressure-sensitive adhesive layers 12, 15, and 17 provided on the optical film 11 have adhesiveness at room temperature, and the adhesiveness is maintained even after peeling and can be reattached.
  • the pressure-sensitive adhesive layers 12, 15 and 17 are composed of known pressure-sensitive adhesives. Examples of the adhesive include a colorless and transparent acrylic adhesive, a rubber adhesive, a silicone adhesive, a urethane adhesive, a vinyl alkyl ether adhesive, a polyvinylpyrrolidone adhesive, a polyacrylamide adhesive, and a cellulose adhesive. Adhesives and the like can be mentioned.
  • the thicknesses of the pressure-sensitive adhesive layers 12, 15 and 17 are not particularly limited, but are, for example, 0.1 ⁇ m to 50 ⁇ m, preferably 1 ⁇ m to 30 ⁇ m.
  • the separator film 13 is not particularly limited, but a film that does not contain an optical functional film is usually used.
  • the separator film 13 has a release surface having excellent peelability with respect to the pressure-sensitive adhesive layer 12.
  • Examples of the separator film 13 include resin films such as polyethylene, polypropylene, polyethylene terephthalate, and polyester film; paper; porous films such as woven fabrics, non-woven fabrics, and net cloths; foamed resin films; and the like.
  • the separator film 13 is preferably a resin film because it has excellent surface smoothness.
  • the resin film examples include polyethylene terephthalate film, polybutylene terephthalate film, polyethylene film, polypropylene film, polybutene film, polybutadiene film, polymethylpentene film, polyvinyl chloride film, vinyl chloride copolymer film, polyurethane film, and ethylene.
  • the thickness of the separator film 13 is not particularly limited, and is, for example, 5 ⁇ m to 200 ⁇ m, preferably 10 ⁇ m to 100 ⁇ m.
  • the optical film 11 is not limited to the layer structure of FIGS. 2 and 3, and can be variously changed.
  • the optical film may include two or more layers of the optical functional film, or may be composed of only one layer of the optical functional film.
  • the single-wafer optical film 1 shown in FIGS. 2 and 3 has a separator film 13 and an adhesive layer 12, but may be a single-wafer optical film without these.
  • the single-wafer optical film 1 can be manufactured by a conventionally known method.
  • the single-wafer optical film can be obtained by cutting out the original optical film (long strip-shaped optical film or large-sized optical film) by a cutting means.
  • a plurality of single-wafer optical films are continuously manufactured by continuously performing a process of cutting out the original optical film into a predetermined shape, and the single-wafer optical films are sequentially stacked and integrated. Make it a thing.
  • the single-wafer optical film is taken out one by one from the aggregate by a lifting device described later.
  • FIG. 4 is a side view of the lifting device 2 when the suction portion 3 is located at the lowest position
  • FIG. 5 is a front view of the lifting device 2 of FIG. 4 (device 2 of FIG. 4 is viewed from the right side of the paper). It is a figure seen toward the left side).
  • FIG. 6 is a side view of the lifting device 2 when the suction portion 3 is located at the highest position
  • FIG. 7 is a front view of the lifting device 2 of FIG. 6 (device 2 of FIG. 6 is viewed from the right side of the paper). It is a figure seen toward the left side).
  • the belt conveyor shown in each side view is omitted.
  • the white arrows indicate the moving directions (upward and downward) of the suction unit 3.
  • the lifting device 2 is lifted by a suction unit 3 that sucks and lifts the single-wafer optical film 1, a lifting unit 4 that moves the suction unit 3 up and down, and the suction unit 3. It has a transport belt 5 for adsorbing and transporting the single-wafer optical film 1.
  • An aggregate 10 is arranged below the lifting device 2. If necessary, a belt conveyor 6 is arranged to convey the single-wafer optical film 1 separated from the aggregate 10 by the lifting device 2 to another place.
  • the aggregate 10 has a plurality of stacked single-wafer optical films 1.
  • the aggregate 10 is mounted on a pedestal 71.
  • the pedestal 71 is provided with an elevating device 72.
  • a sensor (not shown) monitors the position of the upper surface of the uppermost single-wafer optical film 1 of the aggregate 10 mounted on the pedestal 71.
  • the elevating device 72 the upper surface of the single-wafer optical film 1 on the uppermost stage of the aggregate 10 is constant from the reference surface (the reference surface is, for example, an immovable surface such as the bottom surface or the floor surface of the container 73) according to the information of the sensor.
  • the aggregate 10 including the pedestal 71 is moved up and down so as to be at the height of.
  • the aggregate 10 including the pedestal 71 is housed in, for example, a container 73 so that the aggregate 10 can be easily stored and transported.
  • the aggregate 10 is set on the lower side of the adsorption portion 3.
  • the suction portions 3 are arranged in pairs at intervals in the width direction of the single-wafer optical film 1 (accumulation 10).
  • one suction portion 3 may be referred to as a “first suction portion 31”
  • the other suction portion 3 may be referred to as a “second suction portion 32”.
  • the suction unit 3 can move up and down in the vertical direction with respect to the upper surface of the single-wafer optical film 1 on the uppermost stage of the aggregate 10 by the elevating unit 4. Due to the action of the elevating unit 4, the suction unit 3 repeats a vertical movement from the lowest descending position to the highest ascending position and from the highest ascending position to the lowest descending position. As shown in FIGS.
  • the adsorption portion 3 that has reached the lowest descending position adsorbs the upper surface of the uppermost single-wafer optical film 1 from the aggregate 10.
  • the one uppermost single-wafer optical film 1 is lifted and separated from the aggregate 10.
  • the transport belt 5 adsorbs the single-wafer optical film 1 and then the single-wafer optical film 1. Transport in the length direction.
  • the suction unit 3 is moved up and down so that the positioning accuracy of the lowest lowering position of the suction unit 3 (the first suction unit 31 and the second suction unit 32) is within the range of ⁇ 0.10 mm. Let me. Since the positioning accuracy of the lowest lowered position is within the range of 0 to 0.10 mm, when the suction portion 3 is lowered to the lowest lowered position, the suction portion 3 excessively covers the upper surface of the uppermost single-wafer optical film 1. The suction unit 3 stably sucks the upper surface of the single-wafer optical film 1 without being pushed into.
  • the suction unit 3 enables stable suction of the upper surface of the single-wafer optical film 1.
  • the positioning accuracy of the lowest lowered position of the suction unit 3 refers to the variation in the lowest lowered position when the tip 3a of the suction unit 3 moves to the lowest lowered position.
  • the positioning accuracy of the lowermost position of the suction portion 3 is preferably in the range of ⁇ 0.07 mm, more preferably in the range of ⁇ 0.05 mm.
  • the lowest position of the suction portion 3 and the position of the upper surface of the single-wafer optical film 1 at the uppermost stage of the above-mentioned aggregate 10 are set to the same height position by design. Further, the designmost descending position of the first suction portion 31 and the second suction portion 32 is the same height position.
  • the suction unit 3 is moved up and down so that the positioning accuracy of the highest rising position of the suction unit 3 (the first suction unit 31 and the second suction unit 32) is within the range of ⁇ 0.10 mm. Since the positioning accuracy of the highest rising position is within the range of ⁇ 0.10 mm, the single-wafer optical film 1 can be smoothly sucked onto the transport belt 5 when the suction portion 3 rises to the highest rising position. ..
  • the positioning accuracy of the highest rising position of the suction portion 3 is preferably in the range of ⁇ 0.07 mm, more preferably in the range of ⁇ 0.05 mm.
  • the positioning accuracy of the highest rising position of the suction unit 3 refers to the variation in the highest rising position when the tip 3a of the suction unit 3 moves to the highest rising position.
  • the highest position of the suction portion 3 and the position of the lower surface of the transport belt 5 are set to the same height position by design. Further, the designly highest rising position of the first suction portion 31 and the second suction portion 32 is the same height position.
  • the adsorption method of the single-wafer optical film 1 of the adsorption unit 3 is not particularly limited.
  • the air suction method is preferable because the single-wafer optical film 1 can be easily adsorbed and released.
  • the suction portion 3 is provided at the end of the connecting portion 36 which is fixedly connected to the piston rod 35 of the elevating portion 4.
  • a tube 37 connected to a suction device (not shown) is inserted inside the connecting portion 36.
  • the suction portion 3 is formed in a hollow tubular shape, and the end portion of the tube 37 is connected to the hollow portion of the suction portion 3. By operating the suction device, air is sucked from the tip 3a of the suction portion 3 via the tube 37.
  • the suction force (suction force by suction) of the suction unit 3 of the air suction method is not particularly limited, but if it is too low, the sheet-fed optical film 1 may fall during lifting, and if it is too high, the sheet-fed optical film 1 may fall. There is a risk of sticking marks on the surface. From this point of view, the suction force of the suction unit 3 is, for example, 10 kPa to 90 kPa.
  • the shape of the suction portion 3 is not particularly limited, but in the illustrated example, the suction portion 3 is formed in a hollow substantially truncated cone shape. Therefore, the tip 3a of the suction portion 3 is formed in a substantially circular shape in a plan view.
  • the tip 3a of the suction portion 3 is not limited to a substantially circular shape in a plan view, and may be a substantially quadrangular shape, a substantially triangular shape, or the like.
  • the adsorption portion 3 may be formed of a relatively hard material such as a metal or a hard synthetic resin, but is preferably formed of a relatively soft material from the viewpoint of preventing scratches on the single-wafer optical film 1. ..
  • the adsorption portion 3 is formed of a flexible synthetic resin, rubber, elastomer, or the like.
  • the transport belt 5 is arranged between the pair of suction portions 3.
  • the transport belt 5 sucks and transports the uppermost single-wafer optical film 1 lifted by the suction portion 3.
  • the transport belt 5 has a strip shape having a predetermined width in the front view shown in FIGS. 5 and 7, and is an endless ring spanned over a plurality of rollers 51 in the side view shown in FIGS. 4 and 6.
  • the transport belt 5 rotates according to the rotation of the roller 51, and transports the single-wafer optical film 1 in the length direction.
  • the rotating shaft 52 of each roller 51 is rotatably supported by a bearing (not shown).
  • the bearing is fixed to a frame (not shown) of the device or the like.
  • a plurality of holes 5a are formed in the surface of the transport belt 5.
  • the hole 5a is penetrated in the thickness direction of the transport belt 5.
  • the suction device 53 is arranged on the side opposite to the lower surface of the conveyor belt 5. By operating the suction device 53, air on the lower surface side of the transport belt 5 is sucked from the hole 5a.
  • the single-wafer optical film 1 is adsorbed on the lower surface of the transport belt 5 by suctioning air.
  • the suction force (suction force) of the air suction type transport belt 5 is not particularly limited, but if it is too low, the sheet-fed optical film 1 may fall during transport, and if it is too high, the sheet-fed optical film 1 may fall. There is a risk of sticking marks on the surface.
  • the suction force of the transport belt 5 is, for example, 5 kPa to 90 kPa.
  • the transport belt 5 is made of a flexible material, for example, a flexible synthetic resin, rubber, elastomer, or the like.
  • the length of the transport belt 5 in the width direction is not particularly limited, but if it is too small, the adsorbed single-wafer optical film 1 may not be stably transported. From this point of view, the length A in the width direction of the transport belt 5 is, for example, 20 mm or more, preferably 30 mm or more.
  • the upper limit of the width direction length A of the transport belt 5 is not particularly limited, and can be appropriately set according to the width direction length of the single-wafer optical film 1.
  • the length of the transport belt 5 in the width direction is 80 mm or less, preferably 60 mm or less.
  • Reference numeral A indicating the length of the transport belt 5 in the width direction is attached to FIG.
  • FIG. 8 is a plan view showing the positional relationship between the single-wafer optical film 1 on the uppermost stage, the pair of suction portions 3, and the transport belt 5.
  • the tip 3a of the suction portion 3 is represented by a circle, and the center B of the tip 3a of the suction portion 3 is represented by x. Further, in FIG. 8, a part of the transport belt 5 is omitted.
  • the pair of suction portions 3 are arranged so that the intermediate point C between the pair of suction portions 3 substantially coincides with the widthwise intermediate point D of the single-wafer optical film 1. Further, the pair of suction portions 3 are arranged so that the intermediate point C of the pair of suction portions 3 substantially coincides with the intermediate point E in the width direction of the transport belt 5. Therefore, the intermediate point C between the pair of suction portions 3, the widthwise intermediate point E of the transport belt 5, and the widthwise intermediate point D of the single-wafer optical film 1 are substantially the same.
  • the intermediate points C, D, and E in the width direction refer to positions halved of the respective lengths in the width direction.
  • the pair of suction portions 3 are arranged symmetrically with respect to the intermediate point E of the transport belt 5.
  • the single-wafer optical film 1 can be stably lifted.
  • the pair of suction portions 3 are arranged apart from the transport belt 5 so as not to come into contact with the transport belt 5. However, if they are too far apart, when the single-wafer optical film 1 is lifted by the pair of suction portions 3, the corresponding single-wafer optical film 1 may slightly hang between the pair of suction portions 3. If the central region of the single-wafer optical film 1 hangs down during lifting in this way, it becomes difficult for the transport belt 5 to adsorb the single-wafer optical film 1. For this reason, it is preferable that the first suction portion 31 does not come into contact with the first side edge 5c in the width direction of the transport belt 5 during vertical movement and is arranged within 25 mm from the first side edge 5c.
  • the second suction portion 32 does not come into contact with the widthwise second side edge 5d of the transport belt 5 during vertical movement and is arranged within 25 mm from the second side edge 5d. It is more preferably arranged within 15 mm from the second side edge 5d, and even more preferably within 10 mm from the second side edge 5d.
  • the distance H between the first suction portion 31 and the second suction portion 32 with the widthwise side edges 5c and 5d of the transport belt 5 is based on the center B of the suction portion 3.
  • the size (area) of the tip 3a of the suction portion 3 is not particularly limited, but if it is too small, the suction force for the single-wafer optical film 1 becomes small, and if it is too large, the device becomes large. From this point of view, the size of the tip 3a of the suction portion 3 is 5 mm to 30 mm in diameter, preferably 8 mm to 20 mm in diameter, based on the case where the tip is substantially circular. The size of the tip 3a of the suction portion 3 when the shape is not substantially circular in a plan view is a diameter equivalent to a circle.
  • the distance between the pair of suction portions 3 is not particularly limited. From the viewpoint of lifting the single-wafer optical film 1 in a state of being curved upwardly, the distance F (distance between the centers B of the suction portions 3) of the pair of suction portions 3 is the same as that of the single-wafer optical film 1. It is preferably 1 ⁇ 2 or less of the length G in the width direction.
  • the state of being curved in the upward convex shape means a state in which both side regions in the width direction of the single-wafer optical film 1 hang down as described later.
  • the first suction portion 31 is separated from the first side edge 1c in the width direction of the single-wafer optical film 1 by 15 mm or more. It is preferably arranged at a location, more preferably 40 mm or more away from the first side edge 1c in the width direction of the single-wafer optical film 1, and more preferably 45 mm or more away. It is more preferable to have.
  • the second suction portion 32 is preferably arranged at a position separated from the second side edge 1d in the width direction of the single-wafer optical film 1 by 15 mm or more, and further, the second in the width direction of the single-wafer optical film 1.
  • the two side edges are arranged at a distance of 40 mm or more, and even more preferably 45 mm or more.
  • the distance I between the first suction portion 31 and the second suction portion 32 with the side edges 1c and 1d of the single-wafer optical film 1 is based on the center B of the suction portion 3.
  • the adsorption portion 3 is the first in the length direction so as not to protrude from the first side edge in the length direction of the single-wafer optical film 1. It is arranged in the vicinity of the side edge 1e.
  • the first and second suction portions 31, 32 do not protrude from the first side edge 1e in the length direction of the single-wafer optical film 1 and leave a small distance J from the first side edge 1e in the length direction. Is arranged.
  • the first side edge 1e in the length direction of the single-wafer optical film 1 does not come into contact with the upper part of the container 73, and the single-wafer optical film is formed by the transport belt 5. 1 can be transported.
  • the specific dimensions of the distance J may be appropriately set so that the first side portion of the single-wafer optical film 1 in the length direction does not hang down when the film 1 is lifted.
  • the distance J is the length between the center B of the first suction portion 31 and the second suction portion 32 and the side edge 5e in the length direction of the single-wafer optical film 1.
  • FIG. 9 is a reference front view showing the time when the suction portion 3 is in the lowest position and the time when the suction portion 3 is in the highest position in one figure.
  • the suction portion 3 and the single-wafer optical film 1 at the highest rising position are represented by a alternate long and short dash line.
  • the suction unit 3 repeats a vertical movement cycle by the elevating unit 4.
  • the vertical movement cycle refers to the process of reaching the lowest descending position after reaching the highest descending position.
  • the vertical movement cycle time of the suction unit 3 is not particularly limited, but if it is too short, the single-wafer optical film 1 may not be stably adsorbed or the single-wafer optical film 1 may fall during lifting.
  • the vertical movement cycle time of the suction unit 3 is preferably 0.10 seconds or longer, more preferably 0.15 seconds or longer, still more preferably 0.18 seconds or longer.
  • the vertical movement cycle time of the suction unit 3 is preferably 1 second or less, more preferably 0.5 seconds or less. ..
  • the distance (vertical movement distance) from the lowest lowering position to the highest rising position of the suction portion 3 is not particularly limited, but if it is too long, the single-wafer optical film 1 may fall while the single-wafer optical film 1 is being lifted. There is.
  • the distance K from the lowest descending position to the highest rising position of the suction portion 3 is preferably 30 mm or less, more preferably 25 mm or less, still more preferably 20 mm or less.
  • the lower limit of the distance K from the lowest descending position to the highest rising position is not particularly limited, but is, for example, 5 mm or more.
  • the elevating part 4 has a piston rod 35 that moves up and down.
  • the elevating portion 4 is fixed to a frame (not shown) of the device via a support member 41 so as not to move up, down, left and right.
  • the suction unit 3 is fixedly connected to the piston rod 35, and therefore the suction unit 3 can move up and down by driving the elevating unit 4.
  • the suction portion 3 may be provided directly below the piston rod 35, or may be provided so as to be displaced from the axis of the piston rod 35. From the viewpoint of making it easy to lift the single-wafer optical film in a state of being curved upwardly, the suction portion 3 is provided so as to be displaced inward from the axis of the piston rod 35 with reference to the axis. It is preferable to have.
  • the elevating portion 4 has a piston rod 35 that moves up and down, and an arm 38 that extends inward from the piston rod 35.
  • the suction portion 3 is provided on the arm 38.
  • One end of the arm 38 is fixedly provided at the lower end of the piston rod 35, and the opposite end of the arm 38 extends toward the transport belt 5.
  • a suction portion 3 is fixedly provided at the opposite end of the arm 38 via the connecting portion 36.
  • the drive method of the elevating unit 4 is not particularly limited as long as the suction unit 3 can be moved up and down with the above positioning accuracy. Since the positioning accuracy of the suction unit 3 is improved, it is preferable that the elevating unit 4 moves the suction unit 3 up and down by a cam mechanism.
  • the cam mechanism can easily set the vertical movement cycle time and vertical movement distance of the suction unit 3 by designing the shape and rotation speed of the cam, and further, the lowest position and the highest rise of the suction unit 3. The stop time of the position can be easily set.
  • the cam mechanism is a mechanism that changes a rotary motion into a linear reciprocating motion.
  • a cam using various mechanical elements such as a plate cam, a front cam (groove cam), a cylindrical cam, a spherical cam, an inclined cam, and an end face cam, and a cam having an electronic element such as an electronic cam are used.
  • the crankshaft mechanism used in the engine of an automobile can also change the rotational motion into a linear reciprocating motion by a mechanical element, and such a crankshaft mechanism is also included in the cam mechanism referred to in the present invention.
  • FIG. 10 shows an example of the first elevating part 4 using the cylindrical cam 811.
  • the first elevating portion 4 has a cylindrical cam 811 having a groove 812 formed on its peripheral surface, a driven node 814 having a pin portion 813 to be fitted into the groove 812, and a case 815 containing these.
  • the rotation axis 816 of the cylindrical cam 811 is in the vertical direction, so that the cylindrical cam 811 rotates around the vertical direction. Further, the lower end portion of the driven node 814 is fixed to the piston rod 35.
  • FIG. 3A shows the time when the suction portion 3 reaches the lowest position
  • FIG. 3B shows the case where the suction portion 3 is in the intermediate position.
  • FIG. 11 shows an example of the second elevating part 4 using the flat plate cam 821.
  • the second elevating portion 4 has, for example, an oval-shaped flat plate cam 821, a driven node 823 having an upper end portion 822 in contact with the peripheral end surface of the flat plate cam 821, and a piston rod 35 toward the flat plate cam. It has an urging means 824 (for example, a spring) for urging and a case 825 for accommodating them.
  • the rotation axis 826 of the flat plate cam 821 is in a direction orthogonal to the vertical direction, and therefore the flat plate cam 821 rotates in a direction orthogonal to the vertical direction. Further, the lower end portion of the driven node 823 is fixed to the piston rod 35.
  • FIG. 3A shows the time when the suction portion 3 reaches the lowest position
  • FIG. 3B shows the case where the suction portion 3 is in the intermediate position.
  • FIG. 12 shows an example of the third elevating part 4 using the crankshaft 831.
  • the third elevating part 4 has, for example, a crankshaft 831, a connecting rod 832 connected to the crankshaft 831, and a case 833 containing them.
  • the rotation axis 834 of the crankshaft 831 is in a direction orthogonal to the vertical direction, and therefore the crankshaft 831 rotates in a direction orthogonal to the vertical direction.
  • the upper end portion 835 of the connecting rod 832 is rotatably connected to the crankshaft 831
  • the lower end portion 836 of the connecting rod 832 is rotatably connected to the piston rod 35.
  • FIG. 3A shows the time when the suction portion 3 reaches the lowest position
  • FIG. 3B shows the case where the suction portion 3 is in the intermediate position.
  • the lifting device 2 having the suction portion 3 the uppermost single-wafer optical film 1 in the aggregate 10 is lifted and separated from the aggregate 10.
  • the single-wafer optical film 1 is lifted by the suction portion 3 so that the regions on both sides in the width direction of the single-wafer optical film 1 hang downward.
  • the suction portion 3 is lowered to the lowest lowering position by the elevating portion 4, and the single-wafer optical film 1 on the uppermost stage is lowered by the tip 3a of the suction portion 3 of the air suction method.
  • the single-wafer optical film 1 on the uppermost stage can be lifted from the aggregate 10 by the suction portion 3.
  • the single-wafer optical film 1 is lifted by the suction portion 3 so that both side regions in the width direction of the single-wafer optical film 1 hang downward.
  • the single-wafer optical film 1 is curved upwardly and lifted in this way, only the uppermost single-wafer optical film 1 can be separated from the aggregate 10 without the two or more single-wafer optical films 1 following. ..
  • the single-wafer optics can be adjusted by the weight of the single-wafer optical film 1.
  • the single-wafer optical film 1 can be lifted with the regions on both sides in the width direction of the film 1 hanging downward.
  • the single-wafer optical film 1 is sucked by the transport belt 5.
  • the air suction of the suction unit 3 is stopped, and the suction of the single-wafer optical film 1 by the suction unit 3 is released.
  • the transport belt 5 attracts the single-wafer optical film 1
  • the transport belt 5 is rotated to convey the single-wafer optical film 1 by the transport belt 5, as shown in FIG.
  • the single-wafer optical film 1 is conveyed onto the belt conveyor 6, the adsorption of the conveyor belt 5 is released.
  • the single-wafer optical film 1 is conveyed to the next processing (for example, inspection processing) by the belt conveyor 6.
  • the elevating device 72 operates to raise the aggregate 10 by the thickness corresponding to the thickness of one single-wafer optical film 1.
  • the upper surface of the single-wafer optical film 1 at the uppermost stage of the aggregate 10 is held at a constant height.
  • the suction portion 3 moves up and down so that the positioning accuracy of the lowest descending position is within the range of ⁇ 0.10 mm, so that the suction portion 3 is the uppermost single-wafer optical film 1.
  • the upper surface of the single-wafer optical film 1 can be stably adsorbed without pushing the upper surface. Therefore, the single-wafer optical film 1 can be taken out one by one from the aggregate 10 while preventing the single-wafer optical film 1 from being scratched.
  • Example 1 As shown in FIGS. 4 and 5, a device having an elevating part, a pair of suction parts, and a transport belt, and an aggregate in which 500 or more sheet-fed optical films were stacked were prepared.
  • a cam mechanism having a cylindrical cam was used to move the piston rod up and down.
  • An arm extends inward (toward the transport belt) at the lower end of the piston rod, and the suction portion is fixed to the tip of the arm via a connecting portion.
  • the vertical movement cycle time of this elevating part was 0.20 seconds, and the vertical movement distance thereof was 20 mm.
  • the vertical movement cycle time of the suction portion is 0.20 seconds, and the distance K from the lowest lowering position to the highest rising position of the suction portion is 20 mm (see FIG. 9 for reference numeral K).
  • the suction portion a flexible silicone resin having a circular tip having a diameter of 10 mm was used.
  • the suction method of the suction part was an air suction method using a suction device (model ZK2A07 manufactured by SMC Corporation), and the suction force of the suction part was about 20 kPa.
  • As the transport belt a flexible polyurethane resin belt in which a plurality of holes are formed at regular intervals was used.
  • the suction method of the transport belt is an air suction method using a suction device (model HRB100 manufactured by HWANGHAE ELECTRIC), and the suction force of the transport belt is about 10 kPa.
  • the width A of the transport belt was 40 mm (see FIG. 8 for reference numeral A).
  • a single-wafer optical film including a polarizing film was used, and the thickness of the single-wafer optical film was 200 ⁇ m.
  • the length G in the width direction of the single-wafer optical film was 150 mm, and the length in the length direction thereof was 70 mm (see FIG. 8 for reference numeral G).
  • the widthwise intermediate point D of the single-wafer optical film coincides with the intermediate point C between the pair of suction portions 3 and the widthwise intermediate point E of the transport belt 5, so that the suction portion 3 and the transport portion 3 are transported.
  • the belt 5 was placed. Further, the distance I between the first suction portion 31 and the first side edge 1c in the width direction of the single-wafer optical film 1 and the distance between the second suction portion 32 and the second side edge 1d in the width direction of the single-wafer optical film 1.
  • a pair of suction portions were arranged so that I would be 40 mm in each case.
  • the distance H between the first suction portion 31 and the first side edge 5c in the width direction of the transport belt 5 and the distance H between the second suction portion 32 and the second side edge 5d in the width direction of the transport belt 5 will be any longer. Is also 15 mm.
  • a pair of suction portions were arranged so that J was 10 mm in size.
  • the aggregate was set in the container so that the upper surface of the single-wafer optical film was at the lowest position in the design of the adsorption portion.
  • the conveyor belt was arranged so that the lower surface of the conveyor belt 5 was at the highest position in the design of the suction portion.
  • the designmost lowering position and the highest rising position of the suction portion can be determined from the structure of the elevating portion (cylindrical cam) which is a mechanical drive method.
  • the uppermost single-wafer optical film was adsorbed and lifted by the suction portion, and the lifted single-wafer optical film was adsorbed and conveyed by the transport belt for 500 cycles. That is, the work of taking out the uppermost single-wafer optical film from the accumulated material was performed 500 sheets.
  • the positioning accuracy of the highest position of the suction part and the positioning accuracy of the lowest position were measured.
  • a distance sensor laser rangefinder; product name “Sensor Head IL-030” manufactured by Keyence Co., Ltd.
  • the laser beam was irradiated downward (vertically with respect to the upper surface of the arm 38), and the distance to the upper surface of the arm 38 was measured.
  • the distance sensor was used to measure the actual position when the suction portion was in the highest position and the actual position when the suction portion was in the lowest position for 100 cycles.
  • Positioning accuracy of the lowest lowered position of the suction part ⁇ (maximum value when in the lowest lowered position-minimum value when in the lowest lowered position) / 2. Since the vertical length from the upper surface of the arm 38 to the lower surface of the suction unit 3 does not change even if the suction unit 3 moves up and down, the fluctuation of the measured value up to the upper surface of the arm 38 is the change of the suction unit 3. Equal to the variation in the measured value on the bottom surface. Therefore, the positioning accuracy of the suction portion can be evaluated by measuring the distance to the upper surface of the arm 38.
  • the number of sheets of sheet-fed optical film lifted by the suction part dropped on the way was measured. As a result, the number of drops was zero out of 500.
  • the number of times the single-wafer optical film underneath it was also lifted was measured. As a result, the number of times the two single-wafer optical films were lifted by the suction portion was zero during 500 cycles. Both sides of the 500 single-wafer optical films separated from the aggregate and taken out were visually observed to confirm the presence or absence of defects such as scratches and air bubbles. As a result, the number of defective products was zero out of 500.
  • Example 2 In Example 1, the single-wafer optical film was lifted by the suction portion and conveyed by the conveying belt for 500 cycles in the same manner as in Example 1 except that the rotation speed of the cylindrical cam was increased. In Example 2 in which the rotation speed of the cylindrical cam was increased, the vertical movement cycle time of the suction portion was 0.14 seconds. In the second embodiment as well, in the same manner as in the first embodiment, the positioning accuracy of the highest position and the lowest position of the suction portion is measured, and the number of drops, the number of times the two single-wafer optical films are lifted, and the number of times the sheet-fed optical film is lifted are not. The number of non-defective products was measured. The results are shown in Table 1.
  • Example 3 The distance I between the first suction portion 31 and the first side edge 1c in the width direction of the single-wafer optical film 1 and the distance I between the second suction portion 32 and the second side edge 1d in the width direction of the single-wafer optical film 1
  • the single-wafer optical film was lifted by the suction part and conveyed by the transport belt for 500 cycles, except that the pair of suction portions were arranged so as to be 10 mm in each case.
  • the positioning accuracy of the highest position and the lowest position of the suction portion is measured, and the number of drops, the number of times the two single-wafer optical films are lifted, and the number of times the single-wafer optical film is lifted are not.
  • the number of non-defective products was measured. The results are shown in Table 1.
  • Comparative Example 1 In the same manner as in Example 1, the single-wafer optical film was lifted by the suction part and conveyed by the transfer belt for 500 cycles, except that the elevating part of the air cylinder type was used instead of the cylindrical cam.
  • Comparative Example 1 in the same manner as in Example 1, the positioning accuracy of the highest position and the lowest position of the suction portion is measured, the number of drops, the number of times the two single-wafer optical films are lifted, and the number of non-defective ones. The number of non-defective products was measured. The results are shown in Table 1.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention concerne un procédé pour soulever la feuille la plus haute d'un film optique (1) à partir d'une accumulation (10) comprenant une pluralité de feuilles empilées du film optique (1) au moyen d'une unité d'aspiration (3), ledit procédé comprenant une étape de levage dans laquelle l'unité d'aspiration (3) est abaissée jusqu'à la position la plus basse pour aspirer la surface supérieure de la feuille la plus haute du film optique (1), et l'unité d'aspiration (3) avec le film optique en feuille (1) aspiré vers celle-ci est élevée, séparant ainsi la feuille la plus haute du film optique (1) de l'accumulation (10). L'unité d'aspiration (3) est déplacée verticalement de telle sorte que la précision de positionnement de la position la plus basse de l'unité d'aspiration (3) est comprise dans la plage de ± 0,10 mm.
PCT/JP2021/008889 2020-08-11 2021-03-08 Procédé pour soulever un film optique en feuille, et dispositif pour celui-ci WO2022034709A1 (fr)

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JP2022542574A JPWO2022034709A1 (fr) 2020-08-11 2021-03-08
CN202180056205.XA CN116018312A (zh) 2020-08-11 2021-03-08 单片光学膜的提起方法及其装置
KR1020237000928A KR20230048297A (ko) 2020-08-11 2021-03-08 매엽 광학 필름의 들어올림 방법 및 그 장치

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JP (1) JPWO2022034709A1 (fr)
KR (1) KR20230048297A (fr)
CN (1) CN116018312A (fr)
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WO (1) WO2022034709A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0753072A (ja) * 1993-07-16 1995-02-28 Franz Gremser Kg 平面状物体分離装置
JP2000118736A (ja) * 1998-10-09 2000-04-25 Canon Inc シート供給装置及び該装置を備えた画像形成装置
JP2000343471A (ja) * 1999-03-26 2000-12-12 Rigaku Industrial Co 真空吸着装置およびこれを備えた吸着搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0753072A (ja) * 1993-07-16 1995-02-28 Franz Gremser Kg 平面状物体分離装置
JP2000118736A (ja) * 1998-10-09 2000-04-25 Canon Inc シート供給装置及び該装置を備えた画像形成装置
JP2000343471A (ja) * 1999-03-26 2000-12-12 Rigaku Industrial Co 真空吸着装置およびこれを備えた吸着搬送装置

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TW202207502A (zh) 2022-02-16
KR20230048297A (ko) 2023-04-11
JPWO2022034709A1 (fr) 2022-02-17

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