WO2022027740A1 - Thin vapor chamber - Google Patents

Thin vapor chamber Download PDF

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Publication number
WO2022027740A1
WO2022027740A1 PCT/CN2020/111172 CN2020111172W WO2022027740A1 WO 2022027740 A1 WO2022027740 A1 WO 2022027740A1 CN 2020111172 W CN2020111172 W CN 2020111172W WO 2022027740 A1 WO2022027740 A1 WO 2022027740A1
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WO
WIPO (PCT)
Prior art keywords
cover plate
capillary
upper cover
lower cover
cavity
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PCT/CN2020/111172
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French (fr)
Chinese (zh)
Inventor
张于光
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昆山联德电子科技有限公司
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Publication of WO2022027740A1 publication Critical patent/WO2022027740A1/en

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/08Constructions of heat-exchange apparatus characterised by the selection of particular materials of metal

Definitions

  • the utility model belongs to the technical field of temperature uniformity plates, in particular to a thin temperature uniformity plate.
  • Vapor chambers have gradually replaced traditional heat sinks.
  • the vapor chamber has the ability of rapid surface heat conduction and high-density heat conduction, and has the characteristics of lightness and thinness.
  • the vacuum chamber is not cleanly degassed.
  • the residual gas including hydrogen cannot be condensed above 0 °C, resulting in performance degradation or failure.
  • Iron or iron alloy undergoes electrochemical corrosion reaction in the presence of medium water or water vapor, and redox releases iron oxide and hydrogen (hydrogen evolution reaction), even if iron or iron alloy has better anti-corrosion and anti-oxidation treatment A slower hydrogen evolution reaction will still occur, and the reaction will speed up as the temperature increases;
  • the vaporizing plate products with hydrogen absorbing function are all placed in the cavity with an independent hydrogen absorbing device, which occupies the heat conduction space of the vaporizing plate, and is easy to form a blind area of uniform temperature.
  • the position of the hydrogen absorbing device has a large temperature difference and is limited In view of the possibility that the thickness of the vapor chamber will continue to decrease, it is difficult to achieve a thickness of 0.3mm, which becomes the bottleneck of the structural design of ultra-thin products; and additional placement and fixing operations are required in the production and manufacturing, and the processing efficiency and cost are both high for consumer products. Great constraints on production capacity and cost.
  • the purpose of the present utility model is to provide a thin temperature equalizing plate, which can effectively remove a variety of condensed gases that cannot be above 0°C, including hydrogen, in the chamber of the temperature equalizing plate, Improve and maintain the good low temperature difference uniform temperature performance of the vapor chamber.
  • a thin temperature equalizing plate comprising an upper cover plate and a lower cover plate, the upper cover plate and the lower cover plate are opposite to each other and a cavity is formed between them, and a capillary is arranged in the cavity and on the side close to the upper cover plate Liquid suction structure, a working phase change fluid medium is enclosed in the cavity, a plurality of supporting structures and/or capillary supporting composite structures are selectively arranged between the upper cover plate and the lower cover plate, and the lower cover plate and/or the support structure and/or
  • the capillary support composite structure supports the upper cover plate, and several metal plating layers are respectively arranged on the upper cover plate, the lower cover plate, the capillary liquid absorption structure, the support structure and the capillary support composite structure.
  • front and back sides of the upper cover plate, the lower cover plate, the capillary liquid absorption structure, the support structure and the capillary support composite structure faces all of the one side inside the cavity, and the front side or the back side faces the inside of the cavity.
  • a number of layers of metal plating layers are respectively provided on one side.
  • two metal plating layers are respectively provided on the upper cover plate, the lower cover plate, the capillary liquid absorption structure, the support structure and the capillary support composite structure.
  • the thickness of the first metal plating layer is 1 ⁇ m ⁇ 50 ⁇ m, and the thickness of the second metal plating layer is 0.01 ⁇ m ⁇ 10 ⁇ m.
  • the cavity between the upper cover plate and the lower cover plate is filled with gas adsorption particles with a particle size of 5um to 500um.
  • the lower cover is in a concave-convex structure
  • the capillary liquid absorption structure is connected with the concave portion on the top of the lower cover
  • the upper cover and the bottom convex portion of the lower cover are face-to-face and form several cavities.
  • both the support structure and the capillary support composite structure are in the form of a network, and the capillary support composite structure is coated with copper powder.
  • the capillary liquid-absorbing structure is a network capillary network formed by weaving.
  • a seal is provided in the middle of one side of the temperature equalizing plate, and a working phase change fluid medium is injected into the cavity through the seal.
  • the metal plating layer adopts any one of titanium-based substances, calcium-based substances, palladium-based substances, vanadium-based substances, and platinum-based substances.
  • a cavity is formed between the upper cover and the lower cover, and several support structures and/or capillary support composite structures are selectively arranged between the upper cover and the lower cover.
  • the capillary support composite structure supports the upper cover plate, and the liquid fluid medium flows along the capillary liquid absorption structure by the surface tension tensile stress of the material, with strong capillary ability and high structural stability;
  • the upper cover, the lower cover, the support structure, the capillary liquid absorption structure and the capillary support composite structure are given the function of absorbing and storing various gases that cannot be condensed above 0°C, including hydrogen, which greatly simplifies the temperature uniformity plate.
  • the assembly and manufacturing process is convenient for automated production and manufacturing, which improves efficiency and reduces manufacturing costs;
  • Fig. 1 is the front view of the uniform temperature plate of Embodiment 1 of the present utility model
  • Fig. 2 is A-A sectional view in Fig. 1 of the utility model
  • Fig. 3 is the partial enlarged view of I in Fig. 2 of the utility model
  • Fig. 4 is the structural representation of the capillary liquid absorbing structure of the present invention.
  • Fig. 8 is A-A sectional view in Fig. 7 of the utility model
  • Fig. 11 is A-A sectional view in Fig. 10 of the utility model
  • Fig. 12 is the temperature difference curve diagram of the aging test after the soaking plate of the utility model is coated
  • FIG. 13 is a temperature difference curve diagram of the aging test of the uncoated layer of the vapor chamber of the present invention.
  • a thin-type temperature equalizing plate has a seal 1 on one side of the uniform temperature plate.
  • the temperature equalizing plate includes an upper cover plate 2 and a lower cover plate 3, and the upper cover plate 2 and the lower cover plate 3 are face-to-face. And a cavity is formed between the two. Specifically, the upper cover plate 2 and the lower cover plate 3 are in contact with the head and tail surfaces and form a cavity in the middle position. The side of the cavity close to the upper cover plate 2 is provided with capillary suction. Liquid structure 5, the working phase change fluid medium is injected into the cavity through the seal 1 and vacuumed for sealing.
  • the working phase change fluid medium changes from a liquid fluid medium to a gaseous fluid medium after being heated at the heat source, and moves to the non-gaseous fluid medium by the expansion force.
  • the heat source condenses and changes back to the liquid fluid medium and releases heat at the same time, and the liquid fluid medium flows back to the heat source along the capillary liquid absorbing structure 5 by the tensile stress of the surface tension of the material, and several supports are selectively arranged between the upper cover plate 2 and the lower cover plate 3
  • the structure 4 and several capillary support composite structures support the upper cover plate 2 through the lower cover plate 3 and/or the support structure 4 and/or the capillary support composite structure, and the lower cover plate 3, the support structure 4 and the capillary support composite structure can be selected.
  • One or several combinations of supporting the upper cover plate 2, the support structure 4 and the capillary support composite structure can be alternately arranged or not simultaneously arranged between the upper cover plate 2 and the lower cover plate 3, the support structure 4 and the capillary support composite structure Both are in the form of a network and have the same structure.
  • the capillary support composite structure can be obtained by coating copper powder on the support structure 4.
  • the lower cover plate 3 can be designed into a concave-convex structure or other structures to improve the support capacity, as shown in Figure 8. It is only necessary to ensure that there is a cavity between the lower cover 3 and the upper cover 2, and that the shape and structure of the upper cover 2, the lower cover 3, the support structure 4, the capillary suction structure 5 and the capillary support composite structure are all the same.
  • the upper cover plate 2, the lower cover plate 3, the support structure 4, the capillary liquid absorption structure 5 and the capillary support composite structure are respectively provided for absorbing, storing and removing several kinds of hydrogen, including hydrogen, which cannot be condensed above 0 °C.
  • the thickness of the first metal coating is 1 ⁇ m to 50 ⁇ m
  • the thickness of the second metal coating is 0.01 ⁇ m to 10 ⁇ m
  • the thickness of the Nth metal coating can be decreased according to actual needs.
  • the present invention does not limit the position of the metal coating on the surface of the upper cover plate 2, the lower cover plate 3, the support structure 4, the capillary liquid absorption structure 5 and the capillary support composite structure.
  • Parts, including edges, corners, middle parts or multiple parts, can also disperse gas adsorption particles with a particle size of 5 ⁇ m to 500 ⁇ m in the cavity to remove the gas in the cavity.
  • the temperature equalizing plate is made of one or more of copper, copper alloy, iron, stainless steel of various grades, titanium, titanium alloy, aluminum, aluminum alloy, magnesium, magnesium alloy nickel, nickel alloy, tin, and tin alloy.
  • the metal plating layer is made of a composite material alloy in which one or more of titanium-based substances, calcium-based substances, palladium-based substances, vanadium-based substances, and platinum-based substances are combined.
  • the capillary liquid-absorbing structure 5 is a network capillary network formed by weaving, or a network capillary network structure composed of powder sintering or weaving and powder sintering. There are several circular dimple structures on it, and the capillary capacity is high.
  • the utility model effectively removes a variety of condensed gases, including hydrogen, which cannot be above 0°C in the cavity of the temperature chamber, and improves and maintains the good low temperature difference average temperature and thermal conductivity of the temperature chamber; the temperature is within 400°C Absorb and store small molecular gases such as hydrogen, retain the working phase change fluid medium in the cavity and make the unique component ratio in the cavity higher, so as to achieve the purpose of improving and maintaining the uniform temperature performance of the vapor chamber; it can make a great breakthrough
  • the manufacturing limit of the thickness of the thin vapor chamber is currently at 0.18mm, which fully meets the conventional test requirements for thin vapor chambers.
  • all chambers with a thickness of ⁇ 0.1mm are applicable to the utility model; the manufacturing process of vapor chamber assembly is greatly simplified, and the automation is facilitated. Manufacturing, improves efficiency and reduces manufacturing costs; it can effectively improve the performance and manufacturing yield of the vapor chamber, maintain the excellent thermal conductivity of the vapor chamber for a long time, and can withstand long-term aging tests. It has a wide range of application prospects. It has low technological difficulty and is of great practical value in electronic products, electronic components, vehicle power systems, batteries and other products and industries.
  • a thin temperature uniform plate has a seal 1 on one side of the uniform temperature plate.
  • the uniform temperature plate includes an upper cover plate 2 and a lower cover plate 3.
  • the head and tail surfaces of the upper cover plate 2 and the lower cover plate 3 The surfaces are connected to each other and an internal cavity is formed in the middle position.
  • a capillary liquid absorbing structure 5 is arranged on the side close to the upper cover plate 2.
  • the sealing 1 injects the working phase change fluid medium into the cavity and vacuumizes the sealing.
  • Several supporting structures 4 are arranged in parallel between the upper cover 2 and the lower cover 3. At this time, there is no need to set up a capillary support composite structure.
  • the plate 3 and the support structure 4 support the upper cover plate 2, and the support structure 4 is a network structure formed by weaving or powder sintering or weaving and powder sintering.
  • the upper cover plate 2, the lower cover plate 3, the support Structure 4 and capillary liquid absorbing structure 5 are respectively provided with two layers of metal coatings for absorbing, storing and removing several kinds of gases including hydrogen that cannot be condensed above 0°C.
  • the thickness of the first metal coating is 10 ⁇ m
  • the thickness of the second metal coating is
  • the thickness of the metal plating layer is 5 ⁇ m.
  • a thin temperature uniform plate has a seal 1 on one side of the uniform temperature plate.
  • the uniform temperature plate includes an upper cover plate 2 and a lower cover plate 3.
  • the head and tail surfaces of the upper cover plate 2 and the lower cover plate 3 The surfaces are connected to each other and an internal cavity is formed in the middle position.
  • a capillary liquid suction structure 5 is arranged on the side close to the upper cover plate 2, and the working phase change fluid medium is injected into the cavity through the sealing 1, and the sealing is performed by vacuuming.
  • the difference between the second embodiment and the first embodiment is that the support structure 4 and the capillary support composite structure can be selectively arranged or not arranged between the upper cover plate 2 and the lower cover plate 3 of the second embodiment.
  • the capillary liquid absorbing structure 5 is connected to the upper cover plate 2, and the other side of the capillary liquid absorbing structure 5 is connected to the top recess of the concave-convex structure of the lower cover plate 3. Connection, a cavity is formed between the bottom protrusion of the concave-convex structure of the lower cover plate 3 and the upper cover plate 2, and the upper cover plate 2, the lower cover plate 3, and the capillary liquid absorbing structure 5 are respectively provided for absorbing, storing and removing.
  • the thickness of the first metal coating is 10 ⁇ m
  • the thickness of the second metal coating is 5 ⁇ m.
  • the support structure 4 and the capillary support composite structure can be selectively arranged or not arranged between the upper cover plate 2 and the lower cover plate 3 of the second embodiment.
  • Several circular or other arbitrary-shaped structures arranged in a row are arranged on the inner wall to improve the supporting capacity. At this time, there is still a cavity between the upper cover plate 2 and the lower cover plate 3, as shown in Figure 9-11.

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Abstract

Disclosed is a thin vapor chamber. An upper cover plate (2) and a lower cover plate (3) are opposite in a face-to-face manner, and a cavity is formed between the upper cover plate and the lower cover plate; a capillary liquid absorption structure (5) is arranged in the cavity and at a side close to the upper cover plate (2), and a working phase-change fluid medium is sealed in the cavity; a plurality of supporting structures (4) and/or capillary supporting composite structures are selectively arranged between the upper cover plate (2) and the lower cover plate (3); the upper cover plate (2) is supported by means of the lower cover plate (3) and/or the supporting structures (4) and/or the capillary supporting composite structures; and a plurality of metal coatings are respectively disposed on the upper cover plate (2), the lower cover plate (3), the capillary liquid absorption structure (5), the supporting structures (4) and the capillary supporting composite structures. The vapor chamber has the functions of absorbing and storing various gases which include hydrogen and which cannot be condensed at a temperature of 0ºC or higher, the performance and the manufacturing yield of the vapor chamber are effectively improved, the excellent heat conduction performance of the vapor chamber is maintained for a long time, and the vapor chamber can withstand a long-time aging test.

Description

一种薄型均温板A thin uniform temperature plate 技术领域technical field
本实用新型属于均温板技术领域,具体涉及一种薄型均温板。The utility model belongs to the technical field of temperature uniformity plates, in particular to a thin temperature uniformity plate.
背景技术Background technique
随着移动电脑、平板电脑、手机、穿戴设备等功能和外观的不断升级,功耗和轻薄化的体验要求也不断提高。均温板已经逐渐取代传统散热器。均温板具有快速面导热能力和对高密度热能传导能力,并具有轻薄特点。目前均温板在生产及使用中还存在以下不足:With the continuous upgrading of functions and appearances of mobile computers, tablet computers, mobile phones, and wearable devices, the requirements for power consumption and thinning experience are also increasing. Vapor chambers have gradually replaced traditional heat sinks. The vapor chamber has the ability of rapid surface heat conduction and high-density heat conduction, and has the characteristics of lightness and thinness. At present, there are still the following shortcomings in the production and use of the uniform temperature plate:
1、均温板制造中真空腔体内除气不净,残留的除0℃以上可凝性相变介质外包括氢气在内的多种不可0℃以上温度凝结气体,造成性能下降或失效。铁或铁合金在有介质水或水蒸气存在的情况下发生电化学腐蚀反应,氧化还原释产出铁的氧化物和氢气(析氢反应),即使铁或铁合金抗腐蚀和抗氧化处理做的较好依然会发生较缓慢的析氢反应,且随着温度的升高反应会加快;1. In the manufacture of the uniform temperature plate, the vacuum chamber is not cleanly degassed. In addition to the condensable phase change medium above 0 ℃, the residual gas including hydrogen cannot be condensed above 0 ℃, resulting in performance degradation or failure. Iron or iron alloy undergoes electrochemical corrosion reaction in the presence of medium water or water vapor, and redox releases iron oxide and hydrogen (hydrogen evolution reaction), even if iron or iron alloy has better anti-corrosion and anti-oxidation treatment A slower hydrogen evolution reaction will still occur, and the reaction will speed up as the temperature increases;
2、均温板制造完成后在其后寿命的全部时间段内会因为热管或均温板金属外壳材料或内部金属毛细结构材料与真空腔体内工作相变流体介质不断发生化学或电化学反应,产生包括氢气在内的不可0℃以上温度凝结多种气体,造成性能下降或失效;2. After the vapor chamber is manufactured, chemical or electrochemical reactions will occur continuously due to the heat pipe or vapor chamber metal shell material or internal metal capillary structure material and the working phase change fluid medium in the vacuum chamber during the whole period of its life. Produce a variety of gases, including hydrogen, that cannot be condensed at temperatures above 0 °C, resulting in performance degradation or failure;
3、均温板制造中添加的吸收包括氢气在内的不可0℃以上温度凝结多种气体的物质普遍存在需要单独存在放置、占用热管或均温板内空间,限制热管或均温板进一步减小厚度的可能,并且增加工艺步骤浪费成本;3. Substances added in the manufacture of vapor chambers that absorb various gases, including hydrogen, that cannot be condensed at temperatures above 0 °C are common and need to be placed separately, occupying the space inside the heat pipe or vapor chamber, and limiting further reductions in the heat pipe or vapor chamber. The possibility of small thickness, and increase the waste of process steps;
4、目前具有吸氢功能的均温板类产品都是在腔体内放置独立的吸氢装置,占用均温板热传导空间,容易形成均温盲区,有吸氢装置的位置温差较大,且限制了均温板厚度继续减小的可能,很难做到厚度0.3mm水平,成为超薄产品结构设计的瓶颈;并且生产制造中需要额外的放置和固定操作,加工效率和成本都对消费类产品产能和造价的极大限制。4. At present, the vaporizing plate products with hydrogen absorbing function are all placed in the cavity with an independent hydrogen absorbing device, which occupies the heat conduction space of the vaporizing plate, and is easy to form a blind area of uniform temperature. The position of the hydrogen absorbing device has a large temperature difference and is limited In view of the possibility that the thickness of the vapor chamber will continue to decrease, it is difficult to achieve a thickness of 0.3mm, which becomes the bottleneck of the structural design of ultra-thin products; and additional placement and fixing operations are required in the production and manufacturing, and the processing efficiency and cost are both high for consumer products. Great constraints on production capacity and cost.
因此,研究一种新型均温板以去除包括氢气在内的不可0℃以上温度凝结多种气体具有非常重要的现实意义。Therefore, it is of great practical significance to study a new type of vapor chamber to remove a variety of gases including hydrogen that cannot be condensed above 0 °C.
实用新型内容Utility model content
为解决现有技术中存在的技术问题,本实用新型的目的在于提供一种薄型均温板,对均温板空腔内包括氢气在内的多种不可0℃以上温度凝结气体进行有效去除,提升和维持 均温板良好的低温差均温性能。In order to solve the technical problems existing in the prior art, the purpose of the present utility model is to provide a thin temperature equalizing plate, which can effectively remove a variety of condensed gases that cannot be above 0°C, including hydrogen, in the chamber of the temperature equalizing plate, Improve and maintain the good low temperature difference uniform temperature performance of the vapor chamber.
为实现上述目的,达到上述技术效果,本实用新型采用的技术方案为:In order to achieve the above-mentioned purpose and achieve the above-mentioned technical effect, the technical scheme adopted by the present utility model is:
一种薄型均温板,包括上盖板和下盖板,所述上盖板与下盖板面面相对且二者之间形成空腔,空腔内、靠近上盖板的一侧设置毛细吸液结构,空腔内封入工作相变流体介质,上盖板与下盖板之间选择性设置若干个支撑结构和/或毛细支撑复合结构,通过下盖板和/或支撑结构和/或毛细支撑复合结构支撑上盖板,上盖板、下盖板、毛细吸液结构、支撑结构和毛细支撑复合结构上分别设置若干层金属镀层。A thin temperature equalizing plate, comprising an upper cover plate and a lower cover plate, the upper cover plate and the lower cover plate are opposite to each other and a cavity is formed between them, and a capillary is arranged in the cavity and on the side close to the upper cover plate Liquid suction structure, a working phase change fluid medium is enclosed in the cavity, a plurality of supporting structures and/or capillary supporting composite structures are selectively arranged between the upper cover plate and the lower cover plate, and the lower cover plate and/or the support structure and/or The capillary support composite structure supports the upper cover plate, and several metal plating layers are respectively arranged on the upper cover plate, the lower cover plate, the capillary liquid absorption structure, the support structure and the capillary support composite structure.
进一步的,所述上盖板、下盖板、毛细吸液结构、支撑结构和毛细支撑复合结构的正反两面、正面或背面面向空腔内部其中一侧的全部、正面或背面面向空腔内部其中一侧的局部分别设置若干层金属镀层。Further, the front and back sides of the upper cover plate, the lower cover plate, the capillary liquid absorption structure, the support structure and the capillary support composite structure, the front side or the back side faces all of the one side inside the cavity, and the front side or the back side faces the inside of the cavity. A number of layers of metal plating layers are respectively provided on one side.
进一步的,所述上盖板、下盖板、毛细吸液结构、支撑结构和毛细支撑复合结构上分别设置两层金属镀层。Further, two metal plating layers are respectively provided on the upper cover plate, the lower cover plate, the capillary liquid absorption structure, the support structure and the capillary support composite structure.
进一步的,第一层金属镀层的厚度为1μm~50μm,第二层金属镀层的厚度为0.01μm~10μm。Further, the thickness of the first metal plating layer is 1 μm˜50 μm, and the thickness of the second metal plating layer is 0.01 μm˜10 μm.
进一步的,所述上盖板与下盖板之间的空腔内装有粒径5um~500um的气体吸附颗粒。Further, the cavity between the upper cover plate and the lower cover plate is filled with gas adsorption particles with a particle size of 5um to 500um.
进一步的,所述下盖板呈凹凸结构,所述毛细吸液结构与下盖板顶部凹陷部连接,上盖板与下盖板底部凸起部之间面面相对并形成若干个空腔。Further, the lower cover is in a concave-convex structure, the capillary liquid absorption structure is connected with the concave portion on the top of the lower cover, and the upper cover and the bottom convex portion of the lower cover are face-to-face and form several cavities.
进一步的,所述支撑结构和毛细支撑复合结构均呈网络状,所述毛细支撑复合结构上涂覆铜粉末。Further, both the support structure and the capillary support composite structure are in the form of a network, and the capillary support composite structure is coated with copper powder.
进一步的,所述毛细吸液结构为编织形成的网络状毛细网。Further, the capillary liquid-absorbing structure is a network capillary network formed by weaving.
进一步的,所述均温板一侧中部开设封口,通过封口向空腔内注入工作相变流体介质。Further, a seal is provided in the middle of one side of the temperature equalizing plate, and a working phase change fluid medium is injected into the cavity through the seal.
进一步的,所述金属镀层采用钛系物质、钙系物质、钯系物质、钒系物质、铂系物质中的任一种。Further, the metal plating layer adopts any one of titanium-based substances, calcium-based substances, palladium-based substances, vanadium-based substances, and platinum-based substances.
与现有技术相比,本实用新型的有益效果为:Compared with the prior art, the beneficial effects of the present utility model are:
1、极大的突破现有薄型均温板的厚度制造极限,均温板在0.18mm试验完全满足薄型均温板常规测试要求,理论上≥0.1mm均温板均适用本申请;1. It greatly breaks through the manufacturing limit of the thickness of the existing thin vapor chambers. The vapor chambers in the 0.18mm test fully meet the conventional test requirements for thin vapor chambers. In theory, the application is applicable to the vapor chambers ≥ 0.1mm;
2、上盖板与下盖板之间形成空腔,上盖板与下盖板之间选择性设置若干个支撑结构和/或毛细支撑复合结构,通过下盖板和/或支撑结构和/或毛细支撑复合结构支撑上盖板,液态流体介质沿毛细吸液结构靠物质的表面张力拉应力流动,毛细能力强,结构稳定性高;2. A cavity is formed between the upper cover and the lower cover, and several support structures and/or capillary support composite structures are selectively arranged between the upper cover and the lower cover. Or the capillary support composite structure supports the upper cover plate, and the liquid fluid medium flows along the capillary liquid absorption structure by the surface tension tensile stress of the material, with strong capillary ability and high structural stability;
3、赋予上盖板、下盖板、支撑结构、毛细吸液结构和毛细支撑复合结构吸收和存储包括氢气在内的多种不可0℃以上温度凝结气体的功能,极大简化了均温板组装制造过程,便于自动化生产制造,提高了效率降低制造成本;3. The upper cover, the lower cover, the support structure, the capillary liquid absorption structure and the capillary support composite structure are given the function of absorbing and storing various gases that cannot be condensed above 0°C, including hydrogen, which greatly simplifies the temperature uniformity plate. The assembly and manufacturing process is convenient for automated production and manufacturing, which improves efficiency and reduces manufacturing costs;
4、能够对均温板空腔内包括氢气在内的多种不可0℃以上温度凝结气体进行有效去除,提升和维持均温板良好的低温差均温性能,能在400℃以内吸收和存储氢气等小分子气体,保留腔体内工作相变流体介质且使其在腔体内的唯一成分比例更高,达到提升和维持均温板均温性能的目的;4. It can effectively remove a variety of condensed gases, including hydrogen, which cannot be above 0 °C in the cavity of the temperature chamber, improve and maintain the good low temperature difference average temperature performance of the temperature chamber, and can absorb and store within 400°C. Hydrogen and other small molecular gases retain the working phase change fluid medium in the cavity and make the only component ratio in the cavity higher, so as to achieve the purpose of improving and maintaining the temperature uniformity of the temperature chamber;
5、能有效提升均温板的性能和制造良率,并长时间保持均温板优秀的导热性能,能经受较长时间的老化测试,应用前景广泛、工艺难度低,在电子产品、电子零部件、载具车辆动力系统、电池等产品及行业极具实用价值。5. It can effectively improve the performance and manufacturing yield of the uniform temperature plate, and maintain the excellent thermal conductivity of the uniform temperature plate for a long time. It can withstand a long time of aging test. It has wide application prospects and low process difficulty. Components, vehicle power systems, batteries and other products and industries are of great practical value.
附图说明Description of drawings
图1为本实用新型实施例1均温板的正视图;Fig. 1 is the front view of the uniform temperature plate of Embodiment 1 of the present utility model;
图2为本实用新型图1中A-A剖视图;Fig. 2 is A-A sectional view in Fig. 1 of the utility model;
图3为本实用新型图2中Ⅰ处的局部放大图;Fig. 3 is the partial enlarged view of I in Fig. 2 of the utility model;
图4为本实用新型的毛细吸液结构的结构示意图;Fig. 4 is the structural representation of the capillary liquid absorbing structure of the present invention;
图5-7分别为本实用新型实施例2均温板的结构示意图;5-7 are the schematic structural diagrams of the temperature equalizing plate in Embodiment 2 of the present utility model respectively;
图8为本实用新型图7中A-A剖视图;Fig. 8 is A-A sectional view in Fig. 7 of the utility model;
图9-10分别为本实用新型实施例3均温板的结构示意图;9-10 are respectively the structural schematic diagrams of the temperature equalizing plate in Embodiment 3 of the present invention;
图11为本实用新型图10中A-A剖视图;Fig. 11 is A-A sectional view in Fig. 10 of the utility model;
图12为本实用新型的均温板镀层后的老化测试温差曲线图;Fig. 12 is the temperature difference curve diagram of the aging test after the soaking plate of the utility model is coated;
图13为本实用新型的均温板未镀层的老化测试温差曲线图。FIG. 13 is a temperature difference curve diagram of the aging test of the uncoated layer of the vapor chamber of the present invention.
具体实施方式detailed description
下面结合附图对本实用新型的实施例进行详细阐述,以使本实用新型的优点和特征能更易于被本领域技术人员理解,从而对本实用新型的保护范围做出更为清楚明确的界定。The embodiments of the present utility model will be described in detail below in conjunction with the accompanying drawings, so that the advantages and features of the present utility model can be more easily understood by those skilled in the art, and the protection scope of the present utility model can be more clearly defined.
如图1-13所示,一种薄型均温板,均温板一侧开设封口1,均温板包括上盖板2和下盖板3,上盖板2与下盖板3面面相对且二者之间形成空腔,具体的,上盖板2与下盖板3头尾面面相接并在中部位置形成空腔,空腔内、靠近上盖板2的一侧设置毛细吸液结构5,通过封口1向空腔内注入工作相变流体介质并抽真空进行封口,工作相变流体介质在热源处受热后从液态流体介质变为气态流体介质,受膨胀作用力移动到非热源处冷凝变回 液态流体介质同时释放热量,液态流体介质沿毛细吸液结构5靠物质的表面张力拉应力流动回热源处,上盖板2与下盖板3之间选择性设置若干个支撑结构4和若干个毛细支撑复合结构,通过下盖板3和/或支撑结构4和/或毛细支撑复合结构支撑上盖板2,可选择下盖板3、支撑结构4、毛细支撑复合结构中的一种或几种的组合支撑上盖板2,支撑结构4和毛细支撑复合结构可交替布置或不同时布置于上盖板2与下盖板3之间,支撑结构4和毛细支撑复合结构均呈网络状且二者结构相同,在支撑结构4上涂覆铜粉末即可得到毛细支撑复合结构,下盖板3可设计成凹凸结构或其他结构以提高支撑能力,如图8所示,只需确保下盖板3与上盖板2之间留有空腔,上盖板2、下盖板3、支撑结构4、毛细吸液结构5和毛细支撑复合结构的形状、结构等均相适配,上盖板2、下盖板3、支撑结构4、毛细吸液结构5和毛细支撑复合结构上分别设置用于吸收、存储和去除包括氢气在内的若干种不可0℃以上温度凝结气体的若干层金属镀层,第一次金属镀层的厚度为1μm~50μm,第二金属镀层的厚度为0.01μm~10μm,第N层金属镀层的厚度可根据实际需求递减。As shown in Figure 1-13, a thin-type temperature equalizing plate has a seal 1 on one side of the uniform temperature plate. The temperature equalizing plate includes an upper cover plate 2 and a lower cover plate 3, and the upper cover plate 2 and the lower cover plate 3 are face-to-face. And a cavity is formed between the two. Specifically, the upper cover plate 2 and the lower cover plate 3 are in contact with the head and tail surfaces and form a cavity in the middle position. The side of the cavity close to the upper cover plate 2 is provided with capillary suction. Liquid structure 5, the working phase change fluid medium is injected into the cavity through the seal 1 and vacuumed for sealing. The working phase change fluid medium changes from a liquid fluid medium to a gaseous fluid medium after being heated at the heat source, and moves to the non-gaseous fluid medium by the expansion force. The heat source condenses and changes back to the liquid fluid medium and releases heat at the same time, and the liquid fluid medium flows back to the heat source along the capillary liquid absorbing structure 5 by the tensile stress of the surface tension of the material, and several supports are selectively arranged between the upper cover plate 2 and the lower cover plate 3 The structure 4 and several capillary support composite structures support the upper cover plate 2 through the lower cover plate 3 and/or the support structure 4 and/or the capillary support composite structure, and the lower cover plate 3, the support structure 4 and the capillary support composite structure can be selected. One or several combinations of supporting the upper cover plate 2, the support structure 4 and the capillary support composite structure can be alternately arranged or not simultaneously arranged between the upper cover plate 2 and the lower cover plate 3, the support structure 4 and the capillary support composite structure Both are in the form of a network and have the same structure. The capillary support composite structure can be obtained by coating copper powder on the support structure 4. The lower cover plate 3 can be designed into a concave-convex structure or other structures to improve the support capacity, as shown in Figure 8. It is only necessary to ensure that there is a cavity between the lower cover 3 and the upper cover 2, and that the shape and structure of the upper cover 2, the lower cover 3, the support structure 4, the capillary suction structure 5 and the capillary support composite structure are all the same. Adaptation, the upper cover plate 2, the lower cover plate 3, the support structure 4, the capillary liquid absorption structure 5 and the capillary support composite structure are respectively provided for absorbing, storing and removing several kinds of hydrogen, including hydrogen, which cannot be condensed above 0 °C. For several layers of metal coating of the gas, the thickness of the first metal coating is 1 μm to 50 μm, the thickness of the second metal coating is 0.01 μm to 10 μm, and the thickness of the Nth metal coating can be decreased according to actual needs.
本实用新型并不限定金属镀层在上盖板2、下盖板3、支撑结构4、毛细吸液结构5、毛细支撑复合结构表面的位置,也可根据实际需求镀在上盖板2、下盖板3、支撑结构4、毛细吸液结构5、毛细支撑复合结构的正反两面的全部、正面或背面面向空腔内部其中一侧的全部,或正面或背面面向空腔内部其中一侧的局部,包括边、角、中部或多处局部,也可在空腔内分散粒径5μm~500μm的气体吸附颗粒,去除空腔内气体。The present invention does not limit the position of the metal coating on the surface of the upper cover plate 2, the lower cover plate 3, the support structure 4, the capillary liquid absorption structure 5 and the capillary support composite structure. Cover plate 3, support structure 4, capillary absorbent structure 5, all of the front and back sides of the capillary support composite structure, the front or back facing all of one of the sides of the cavity, or the front or back facing one of the sides of the cavity. Parts, including edges, corners, middle parts or multiple parts, can also disperse gas adsorption particles with a particle size of 5 μm to 500 μm in the cavity to remove the gas in the cavity.
均温板采用铜、铜合金、铁、各标号不锈钢、钛、钛合金、铝、铝合金、镁、镁合金镍、镍合金、锡、锡合金中的一种或几种制成。The temperature equalizing plate is made of one or more of copper, copper alloy, iron, stainless steel of various grades, titanium, titanium alloy, aluminum, aluminum alloy, magnesium, magnesium alloy nickel, nickel alloy, tin, and tin alloy.
金属镀层采用钛系物质、钙系物质、钯系物质、钒系物质、铂系物质中的一种或多种组合的复合系物质合金制成。The metal plating layer is made of a composite material alloy in which one or more of titanium-based substances, calcium-based substances, palladium-based substances, vanadium-based substances, and platinum-based substances are combined.
毛细吸液结构5为编织形成的网络状毛细网,还可以是粉末烧结或编织与粉末烧结复合的网络状毛细网结构,其上有若干圆凹坑结构,毛细能力高。The capillary liquid-absorbing structure 5 is a network capillary network formed by weaving, or a network capillary network structure composed of powder sintering or weaving and powder sintering. There are several circular dimple structures on it, and the capillary capacity is high.
镀层前后的老化测试温差曲线图如图12-13所示,实验结果表明,金属镀层提高了本实用新型的均温板的抗老化性能。The temperature difference curves of the aging test before and after the coating are shown in Figures 12-13. The experimental results show that the metal coating improves the anti-aging performance of the vapor chamber of the present invention.
本实用新型对均温板空腔内包括氢气在内的多种不可0℃以上温度凝结气体进行有效去除,提升和维持均温板良好的低温差均温能力和导热性能;能在400℃以内吸收和存储氢气等小分子气体,保留空腔内工作相变流体介质且使其在空腔内的唯一成分比例更高,达到提升和维持均温板均温性能的目的;可以极大的突破薄型均温板厚度制造极限,目前 在0.18mm试验完全满足薄型均温板常规测试要求,理论上≥0.1mm均温板均适用本实用新型;极大简化了均温板组装制造过程,便于自动化生产制造,提高了效率,降低制造成本;能有效的提升均温板的性能和制造良率,并长时间保持均温板优秀的导热性能,能经受较长时间的老化测试,应用前景广泛,工艺难度低,在电子产品、电子零部件、载具车辆动力系统、电池等产品及行业极具实用价值。The utility model effectively removes a variety of condensed gases, including hydrogen, which cannot be above 0°C in the cavity of the temperature chamber, and improves and maintains the good low temperature difference average temperature and thermal conductivity of the temperature chamber; the temperature is within 400°C Absorb and store small molecular gases such as hydrogen, retain the working phase change fluid medium in the cavity and make the unique component ratio in the cavity higher, so as to achieve the purpose of improving and maintaining the uniform temperature performance of the vapor chamber; it can make a great breakthrough The manufacturing limit of the thickness of the thin vapor chamber is currently at 0.18mm, which fully meets the conventional test requirements for thin vapor chambers. In theory, all chambers with a thickness of ≥ 0.1mm are applicable to the utility model; the manufacturing process of vapor chamber assembly is greatly simplified, and the automation is facilitated. Manufacturing, improves efficiency and reduces manufacturing costs; it can effectively improve the performance and manufacturing yield of the vapor chamber, maintain the excellent thermal conductivity of the vapor chamber for a long time, and can withstand long-term aging tests. It has a wide range of application prospects. It has low technological difficulty and is of great practical value in electronic products, electronic components, vehicle power systems, batteries and other products and industries.
实施例1Example 1
如图1-4所示,一种薄型均温板,均温板一侧开设封口1,均温板包括上盖板2和下盖板3,上盖板2与下盖板3头尾面面相接并在中部位置形成内部空腔,空腔内、靠近上盖板2的一侧设置毛细吸液结构5,毛细吸液结构5为编织形成的网络状毛细网,具有毛细能力,通过封口1向空腔内注入工作相变流体介质并抽真空进行封口,上盖板2与下盖板3之间平行排布若干个支撑结构4,此时无需设置毛细支撑复合结构,通过下盖板3、支撑结构4支撑上盖板2,支撑结构4为编织或粉末烧结或编织与粉末烧结复合而成的网络状结构,如图3所示,上盖板2、下盖板3、支撑结构4、毛细吸液结构5上分别设置用于吸收、存储和去除包括氢气在内的若干种不可0℃以上温度凝结气体的两层金属镀层,第一次金属镀层的厚度为10μm,第二金属镀层的厚度为5μm。As shown in Figure 1-4, a thin temperature uniform plate has a seal 1 on one side of the uniform temperature plate. The uniform temperature plate includes an upper cover plate 2 and a lower cover plate 3. The head and tail surfaces of the upper cover plate 2 and the lower cover plate 3 The surfaces are connected to each other and an internal cavity is formed in the middle position. In the cavity, a capillary liquid absorbing structure 5 is arranged on the side close to the upper cover plate 2. The sealing 1 injects the working phase change fluid medium into the cavity and vacuumizes the sealing. Several supporting structures 4 are arranged in parallel between the upper cover 2 and the lower cover 3. At this time, there is no need to set up a capillary support composite structure. The plate 3 and the support structure 4 support the upper cover plate 2, and the support structure 4 is a network structure formed by weaving or powder sintering or weaving and powder sintering. As shown in FIG. 3, the upper cover plate 2, the lower cover plate 3, the support Structure 4 and capillary liquid absorbing structure 5 are respectively provided with two layers of metal coatings for absorbing, storing and removing several kinds of gases including hydrogen that cannot be condensed above 0°C. The thickness of the first metal coating is 10 μm, and the thickness of the second metal coating is The thickness of the metal plating layer is 5 μm.
实施例2Example 2
如图5-8所示,一种薄型均温板,均温板一侧开设封口1,均温板包括上盖板2和下盖板3,上盖板2与下盖板3头尾面面相接并在中部位置形成内部空腔,空腔内、靠近上盖板2的一侧设置毛细吸液结构5,通过封口1向空腔内注入工作相变流体介质并抽真空进行封口,本实施例2与实施例1的不同之处在于,本实施例2的上盖板2与下盖板3之间可选择性设置或不设置支撑结构4和毛细支撑复合结构,将下盖板3设计成凹凸结构以提高支撑能力,如图8所示,此时毛细吸液结构5一侧连接上盖板2,毛细吸液结构5另一侧与下盖板3凹凸结构的顶部凹陷部连接,下盖板3凹凸结构的底部凸起部与上盖板2之间形成空腔,上盖板2、下盖板3、毛细吸液结构5上分别设置用于吸收、存储和去除包括氢气在内的若干种不可0℃以上温度凝结气体的两层金属镀层,第一次金属镀层的厚度为10μm,第二金属镀层的厚度为5μm。As shown in Figure 5-8, a thin temperature uniform plate has a seal 1 on one side of the uniform temperature plate. The uniform temperature plate includes an upper cover plate 2 and a lower cover plate 3. The head and tail surfaces of the upper cover plate 2 and the lower cover plate 3 The surfaces are connected to each other and an internal cavity is formed in the middle position. In the cavity, a capillary liquid suction structure 5 is arranged on the side close to the upper cover plate 2, and the working phase change fluid medium is injected into the cavity through the sealing 1, and the sealing is performed by vacuuming. The difference between the second embodiment and the first embodiment is that the support structure 4 and the capillary support composite structure can be selectively arranged or not arranged between the upper cover plate 2 and the lower cover plate 3 of the second embodiment. 3 is designed as a concave-convex structure to improve the support capacity, as shown in Figure 8, at this time, one side of the capillary liquid absorbing structure 5 is connected to the upper cover plate 2, and the other side of the capillary liquid absorbing structure 5 is connected to the top recess of the concave-convex structure of the lower cover plate 3. Connection, a cavity is formed between the bottom protrusion of the concave-convex structure of the lower cover plate 3 and the upper cover plate 2, and the upper cover plate 2, the lower cover plate 3, and the capillary liquid absorbing structure 5 are respectively provided for absorbing, storing and removing. For several two-layer metal coatings that cannot condense gas at temperatures above 0°C, including hydrogen, the thickness of the first metal coating is 10 μm, and the thickness of the second metal coating is 5 μm.
余同实施例1。The same as in Example 1.
实施例3Example 3
本实施例2与实施例1的不同之处在于,本实施例2的上盖板2与下盖板3之间可选 择性设置或不设置支撑结构4和毛细支撑复合结构,在下盖板3内壁开设连续排列的若干个圆形或其他任意形状结构以提高支撑能力,此时上盖板2与下盖板3之间依旧留有空腔,如图9-11所示。The difference between the second embodiment and the first embodiment is that the support structure 4 and the capillary support composite structure can be selectively arranged or not arranged between the upper cover plate 2 and the lower cover plate 3 of the second embodiment. Several circular or other arbitrary-shaped structures arranged in a row are arranged on the inner wall to improve the supporting capacity. At this time, there is still a cavity between the upper cover plate 2 and the lower cover plate 3, as shown in Figure 9-11.
本实用新型未详细说明的部分采用现有技术即可实现,在此不做赘述。The parts of the present invention that are not described in detail can be realized by using the prior art, and will not be repeated here.
以上所述仅为本实用新型的实施例,并非因此限制本实用新型的专利范围,凡是利用本实用新型说明书及附图内容所作的等效结构或等效流程变换,或直接或间接运用在其他相关的技术领域,均同理包括在本实用新型的专利保护范围内。The above descriptions are only the embodiments of the present invention, and are not intended to limit the scope of the patent of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the description and drawings of the present invention, or directly or indirectly applied to other Relevant technical fields are similarly included in the scope of patent protection of the present invention.

Claims (9)

  1. 一种薄型均温板,其特征在于,包括上盖板和下盖板,所述上盖板与下盖板面面相对且二者之间形成空腔,空腔内、靠近上盖板的一侧设置毛细吸液结构,空腔内封入工作相变流体介质,上盖板与下盖板之间选择性设置若干个支撑结构和/或毛细支撑复合结构,通过下盖板和/或支撑结构和/或毛细支撑复合结构支撑上盖板,上盖板、下盖板、毛细吸液结构、支撑结构和毛细支撑复合结构上分别设置若干层金属镀层。A thin temperature equalizing plate is characterized in that it includes an upper cover plate and a lower cover plate, the upper cover plate and the lower cover plate are opposite to each other and a cavity is formed between the two, in the cavity, close to the upper cover plate A capillary liquid absorbing structure is arranged on one side, a working phase change fluid medium is enclosed in the cavity, and several supporting structures and/or capillary supporting composite structures are selectively arranged between the upper cover and the lower cover. The structure and/or the capillary support composite structure supports the upper cover plate, and several metal plating layers are respectively arranged on the upper cover plate, the lower cover plate, the capillary liquid absorption structure, the support structure and the capillary support composite structure.
  2. 根据权利要求1所述的一种薄型均温板,其特征在于,所述上盖板、下盖板、毛细吸液结构、支撑结构和毛细支撑复合结构的正反两面、正面或背面面向空腔内部其中一侧的全部、正面或背面面向空腔内部其中一侧的局部分别设置若干层金属镀层。The thin uniform temperature plate according to claim 1, wherein the front and back sides, the front side or the back side of the upper cover plate, the lower cover plate, the capillary liquid absorbing structure, the support structure and the capillary support composite structure are empty. Several layers of metal plating layers are respectively provided on the part of one side of the interior of the cavity, the front side or the back side facing one side of the interior of the cavity.
  3. 根据权利要求1或2所述的一种薄型均温板,其特征在于,所述上盖板、下盖板、毛细吸液结构、支撑结构和毛细支撑复合结构上分别设置两层金属镀层。A thin temperature equalizing plate according to claim 1 or 2, characterized in that, two metal plating layers are respectively provided on the upper cover plate, the lower cover plate, the capillary liquid absorption structure, the support structure and the capillary support composite structure.
  4. 根据权利要求3所述的一种薄型均温板,其特征在于,第一层金属镀层的厚度为1μm~50μm,第二层金属镀层的厚度为0.01μm~10μm。The thin vapor chamber according to claim 3, wherein the thickness of the first metal plating layer is 1 μm-50 μm, and the thickness of the second metal plating layer is 0.01 μm-10 μm.
  5. 根据权利要求1所述的一种薄型均温板,其特征在于,所述上盖板与下盖板之间的空腔内装有粒径5μm~500μm的气体吸附颗粒。The thin uniform temperature plate according to claim 1, wherein the cavity between the upper cover plate and the lower cover plate is filled with gas adsorption particles with a particle size of 5 μm to 500 μm.
  6. 根据权利要求1所述的一种薄型均温板,其特征在于,所述下盖板呈凹凸结构,所述毛细吸液结构与下盖板顶部凹陷部连接,上盖板与下盖板底部凸起部之间面面相对并形成若干个空腔。The thin temperature equalizing plate according to claim 1, wherein the lower cover plate is in a concave-convex structure, the capillary liquid absorption structure is connected to the concave part at the top of the lower cover plate, and the upper cover plate is connected to the bottom of the lower cover plate. The protruding parts face each other and form several cavities.
  7. 根据权利要求1所述的一种薄型均温板,其特征在于,所述支撑结构和毛细支撑复合结构均呈网络状,所述毛细支撑复合结构上涂覆铜粉末。The thin vapor chamber according to claim 1, wherein the support structure and the capillary support composite structure are in a network shape, and the capillary support composite structure is coated with copper powder.
  8. 根据权利要求1所述的一种薄型均温板,其特征在于,所述毛细吸液结构为编织形成的网络状毛细网。The thin uniform temperature plate according to claim 1, wherein the capillary liquid absorbing structure is a network capillary net formed by weaving.
  9. 根据权利要求1所述的一种薄型均温板,其特征在于,所述均温板一侧中部开设封口,通过封口向空腔内注入工作相变流体介质。The thin temperature equalizing plate according to claim 1, wherein a seal is provided in the middle of one side of the temperature equalizing plate, and a working phase change fluid medium is injected into the cavity through the seal.
PCT/CN2020/111172 2020-08-03 2020-08-26 Thin vapor chamber WO2022027740A1 (en)

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CN113347860A (en) * 2021-07-08 2021-09-03 东莞立讯技术有限公司 Thermal conduction device, manufacturing method thereof, electric connector and electronic device

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