WO2022018829A1 - Air intake port joint for dry vacuum pump - Google Patents

Air intake port joint for dry vacuum pump Download PDF

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Publication number
WO2022018829A1
WO2022018829A1 PCT/JP2020/028313 JP2020028313W WO2022018829A1 WO 2022018829 A1 WO2022018829 A1 WO 2022018829A1 JP 2020028313 W JP2020028313 W JP 2020028313W WO 2022018829 A1 WO2022018829 A1 WO 2022018829A1
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WIPO (PCT)
Prior art keywords
pipe
intake port
vacuum pump
dry vacuum
outer pipe
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PCT/JP2020/028313
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French (fr)
Japanese (ja)
Inventor
拓也 榊原
治 武井
学志 内藤
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樫山工業株式会社
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Application filed by 樫山工業株式会社 filed Critical 樫山工業株式会社
Priority to JP2022538532A priority Critical patent/JP7323239B2/en
Priority to PCT/JP2020/028313 priority patent/WO2022018829A1/en
Publication of WO2022018829A1 publication Critical patent/WO2022018829A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space

Definitions

  • the present invention relates to an intake port joint for connecting an external pipe to the intake port of the dry vacuum pump, and a dry vacuum pump provided with the intake port joint. More specifically, an intake port joint having a product recovery function for recovering products such as powdery products and liquefied products that enter the pump through an intake port from an external pipe, and the intake port joint. Regarding the dry vacuum pump equipped.
  • a dry vacuum pump is used to evacuate a reaction chamber or the like.
  • the exhaust sucked by the dry vacuum pump contains products such as powdery products and liquefied products. Even if such a product is sucked into a dry vacuum pump in small amounts, there is no problem in driving the pump. However, if a large amount of product enters the dry vacuum pump at one time, the pump may be overloaded and unable to start.
  • Patent Document 1 proposes an external pump-type product recovery device, in which a centrifuge cylinder for trapping powder is attached between a pump intake port and an external pipe.
  • Patent Document 2 proposes a product recovery device having a built-in pump, in which a trap for product recovery is arranged in an intake passage communicating with an intake port inside a casing of a vacuum pump.
  • the conventional external product recovery device has the following problems. That is, in order to connect the intake port of the dry vacuum pump to the external pipe, an intake port joint is attached to the intake port. Instead of the existing intake port joint, a product recovery device such as an h-shaped pipe or a powder trap, which is larger in size and requires more installation space, is attached to the intake port. It is necessary to change the layout of the external piping in order to secure a large installation space where the product recovery device can be installed between the intake port and the external piping.
  • an object of the present invention is to provide a product recovery function as a product recovery device that is excellent in maintainability and can be externally attached to the intake port of a dry vacuum pump without requiring a large installation space.
  • the purpose is to provide an air intake joint provided.
  • the present invention focuses on the intake port joint attached to the intake port of the dry vacuum pump, and by incorporating the product recovery mechanism in the intake port joint itself, the intake air of the dry vacuum pump is taken in without increasing the installation base.
  • a product recovery device that can be externally attached to the mouth and has excellent maintainability.
  • the product that enters the intake port of the dry vacuum pump can be recovered from the external piping without the need to change the layout of the external piping (the piping on the equipment side above the pump).
  • the present invention is an intake port joint having a product recovery function that can be handled as a pump accessory attached to the intake port of a dry vacuum pump.
  • An outer pipe that extends in the vertical direction, A lower flange formed at the lower end of the outer pipe and fastened and fixed to the dry vacuum pump, The upper flange formed on the upper end of the outer pipe and An inner pipe that is coaxially arranged inside the outer pipe, has a lower end opening that can communicate with the intake port through the central opening of the lower flange, and has an upper end opening that is closed.
  • An exhaust inlet that penetrates the outer peripheral wall of the inner pipe in the radial direction, An annular product recovery recess formed between the outer tube and the inner tube, the upper end opening upward and the lower end sealed by the lower flange. It is characterized by having.
  • a product recovery recess is formed inside the intake port joint attached to the intake port of the dry vacuum pump.
  • the external pipe is connected to the upper flange of the outer pipe of the intake port joint. If there is a difference in pipe diameter between the pipe and the external pipe, a reducer is attached to the upper flange, and the external pipe is connected via the reducer.
  • the intake port joint of the present invention is provided with a reducer as a component thereof.
  • the exhaust that is vacuum-sucked from the upper equipment side via the external pipe flows into the product recovery recess that surrounds the outer circumference of the inner pipe whose upper end surface is closed inside the intake port joint, and flows into the outer peripheral wall of the inner pipe. It flows into the inside of the inner pipe from the exhaust introduction port that opens in the portion, flows inside the inner pipe, and is sucked into the inside of the pump from the intake port.
  • Products such as powdery products and liquefied products that fall into the intake joint from the side of the external piping when the dry vacuum pump is started or restarted are the bottom of the product recovery recess due to their own weight. It falls and accumulates.
  • the product that flows into the intake joint together with the exhaust is also shaken off from the exhaust and collected at the bottom of the product recovery recess.
  • the exhaust after flowing into the product recovery recess flows into the inside of the inner pipe through the exhaust introduction port opened in the outer peripheral wall portion of the inner pipe, and is sucked into the pump from the intake port through the inner pipe.
  • the portion of the outer pipe provided with the upper and lower flanges is configured in the same manner as the existing intake port joint.
  • the installation and removal work can be performed in the same way as the normal pipe connection / removal work, and no special work is required.
  • the work of collecting the products accumulated inside can be easily performed by simply removing the external pipe from the intake port joint, and the maintenance is excellent.
  • the exhaust speed (gas emission amount per unit time), which is the performance of the dry vacuum pump, depends on the conductance of the upper piping.
  • the exhaust inlet formed in the inner pipe may be placed at a position higher than the upper end opening of the outer pipe.
  • the inner pipe is made longer than the outer pipe, the upper end portion thereof is projected upward from the upper end opening of the outer pipe, and the exhaust introduction port is formed at a position higher than the upper end of the outer pipe.
  • an inner pipe having a different length and an exhaust inlet having a different opening area may be prepared so that the inner pipe can be replaced with an inner pipe having a required length and an opening area. ..
  • An overflow hole may be formed in the outer peripheral wall portion of the inner pipe so that the product can be prevented from coming into contact with the sealing material and corroding the sealing material. This hole communicates between the product recovery recess and the inside of the inner tube at a position below the upper end opening of the upper flange of the outer tube. Through this hole, the product accumulated in the product recovery recess can be guided into the inner pipe and dropped to the side of the intake port.
  • FIG. 1A is an explanatory view showing a dry vacuum pump provided with an intake port joint according to the first embodiment.
  • the dry vacuum pump 1 is in the form of an exhaust device unit, and includes two dry vacuum pumps connected in series inside a rectangular parallelepiped device housing 2.
  • the dry vacuum pump 1 includes a mechanical booster pump 3 in the front stage and a dry vacuum pump 4 in the rear stage.
  • various dry vacuum pumps such as a screw type vacuum pump, a roots type, a claw type, and a scroll type can be used as the dry vacuum pump.
  • the intake port 6 of the dry vacuum pump 1 opens upward in the horizontal housing upper surface 2a of the device housing 2.
  • the portion of the upper surface 2a of the housing that surrounds the intake port 6 is a flange mounting portion 2b.
  • the intake port joint 10 for connecting the external pipe is vertically attached.
  • the intake port joint 10 is connected to the external pipe 7 on the upstream side shown by the imaginary line in FIG. 1A by the coupling 40.
  • the intake port joint 10 is provided with a product recovery function for recovering products such as powdery products and liquefaction products that invade from the side of the external pipe 7.
  • FIG. 1B is a vertical sectional view showing an intake port joint 10.
  • the intake port joint 10 is integrally integrated with the cylindrical outer pipe 21 extending in the vertical direction, the lower flange 22 coaxially fixed to the lower end portion 21a of the outer pipe 21, and the upper end portion 21b of the outer pipe 21. It is provided with a formed upper flange 23.
  • the lower flange 22 has a disk shape having a diameter larger than that of the outer pipe 21, and a circular opening 22a having a diameter smaller than that of the outer pipe 21 is formed in the central portion thereof.
  • the lower flange 22 is fastened and fixed to the flange mounting portion 2b of the upper surface 2a of the housing by a fastening bolt 24 or the like via a sealing material such as a gasket (not shown).
  • the upper flange 23 is a ring-shaped portion protruding outward from the outer peripheral surface of the upper end portion 21b of the outer pipe 21.
  • the intake port joint 10 includes a cylindrical inner pipe 26 arranged coaxially inside the outer pipe 21.
  • the inner pipe 26 is a cylinder having substantially the same diameter as the circular opening 22a of the lower flange 22, and the lower end portion 26a of the inner pipe 26 is coaxially fixed to the inner peripheral surface of the circular opening 22a of the lower flange 22.
  • the lower end opening 26b of the inner pipe 26 communicates with the lower intake port 6 via the circular opening 22a of the lower flange 22.
  • the length of the inner pipe 26 is longer than that of the outer pipe 21, and the upper end side portion 26c of the inner pipe 26 projects upward from the upper end opening 21c of the outer pipe 21.
  • the upper end opening of the inner tube 26 is closed by a horizontal circular end plate 27.
  • An exhaust introduction port 26d is formed on the outer peripheral wall portion of the upper end side portion 26c of the inner pipe 26.
  • the exhaust introduction port 26d penetrates the outer peripheral wall portion in the radial direction and is located at a position higher than the upper end opening 21c of the outer pipe 21.
  • the exhaust introduction port 26d is an opening having the same shape formed at equal intervals along the circumferential direction.
  • the lower end of the gap in the annular cross section formed between the outer pipe 21 and the inner pipe 26 is closed by the lower flange 22.
  • An annular product recovery recess 28 is partitioned by the inner peripheral surface of the outer pipe 21, the outer peripheral surface of the inner pipe 26, and the upper end surface 22b of the lower flange 22. The upper end of the product recovery recess 28 is open upward.
  • an overflow hole 26e is formed below the exhaust introduction port 26d.
  • the hole 26e is located below the upper end surface of the upper flange 23 of the outer pipe 21.
  • a sealing material such as a gasket is sandwiched between the upper flange 23 of the outer pipe 21 of the intake port joint 10 having this configuration, and the lower flange 7a of the external pipe 7 is coaxially connected and fixed.
  • the upper end side portion of the inner pipe 26 is in a state of plunging into the external pipe 7.
  • the opening area of the exhaust introduction port 26d formed in the upper end side portion 26c of the inner pipe 26 is equal to or larger than the effective opening area of the external pipe 7.
  • the exhaust from the side of the external pipe 7 flows into the product recovery recess 28 between the outer pipe 21 and the inner pipe 26 of the intake port joint 10 as shown by an arrow in FIG. 1B. .. Since the upper end of the inner pipe 26 is closed, the exhaust gas flows toward the bottom surface of the product recovery recess 28. After that, it flows into the inside of the inner pipe 26 from the exhaust introduction port 26d opened in the outer peripheral wall surface portion of the inner pipe 26, passes through the inside of the inner pipe 26, and is sucked into the inside of the dry vacuum pump 1 from the intake port 6. To.
  • Products such as powdery products and liquefaction products carried by exhaust, or products that fall from the external pipe 7 to the intake port joint 10 do not directly enter the pump and are recovered. It collects at the bottom of the recess 28. Further, at the time of maintenance of the semiconductor manufacturing apparatus or the like, a large amount of powder may be discharged in a lump state from the side of the external pipe 7. Even in this case, a large amount of powder lumps are once collected in the product recovery recess 28. A part of the product such as powder collected in the product recovery recess 28 is sucked into the dry vacuum pump 1 on the exhaust flow. If it is a small amount of product, there is no problem in practical use even if it is sucked into the inside of the dry vacuum pump 1.
  • the liquefied product may fall from the side of the external pipe 7 toward the intake port 6.
  • the liquefied product temporarily accumulates at the bottom of the product recovery recess 28 and does not enter the inside of the dry vacuum pump 1 from the intake port 6.
  • the liquefied product accumulated in the product recovery recess 28 may be vacuum dried during the operation of the dry vacuum pump 1. Therefore, it is unlikely that the accumulated liquefied product will cause adverse effects such as corrosion of the inside of the intake port joint 10.
  • an overflow hole 26e is provided at a position lower than the position where the sealing material is arranged (a position lower than the upper end surface of the upper flange 23) in the upper end side portion of the inner pipe 26.
  • the exhaust introduction port 26d can be provided with an overflow function.
  • the position of one of the exhaust introduction ports 26d may be changed so that the product can overflow from the product recovery recess 28 into the inner pipe 26 through the exhaust introduction port 26d.
  • a part of the exhaust introduction port 26d may be extended downward to serve as an overflow hole portion.
  • the intake port joint 10 for connecting the external pipe 7 to the intake port 6 is provided with a product recovery function.
  • the intake port joint 10 having the product recovery function can be attached and detached by normal pipe connection work and pipe removal work. Therefore, the work of collecting the products accumulated inside can be easily and efficiently performed, and the maintainability is excellent. Further, it is sufficient that an installation space similar to that of the existing intake port joint can be secured between the intake port 6 and the external pipe 7. Therefore, unlike the conventional case, it is not necessary to secure a large installation space for mounting a product recovery device having a large size, and it is not necessary to change the layout of external piping or the like.
  • FIG. 2A is an explanatory view showing a dry vacuum pump provided with an intake port joint according to the second embodiment. Since the dry vacuum pump 100 has the same structure as the dry vacuum pump 1 of the first embodiment, the description thereof is omitted, and the corresponding portions in FIG. 2A are designated by the same reference numerals. Of course, the dry vacuum pump 100 may have a configuration different from that of the dry vacuum pump 1.
  • the intake port 6 of the dry vacuum pump 100 opens upward in the horizontal housing upper surface 2a of the device housing 2.
  • the portion of the upper surface 2a of the housing that surrounds the intake port 6 is a flange mounting portion 2b.
  • the intake port joint 110 for connecting the external pipe is vertically attached.
  • the intake port 6 is connected to the external pipe 107 on the upstream side shown by the imaginary line in FIG. 2A via the intake port joint 110.
  • the intake port joint 110 of this example includes a pipe joint 120 attached to the intake port 6 and a reducer 130 that connects the pipe joint 120 and an external pipe 107 having a different pipe diameter.
  • the pipe joint 120 and the reducer 130 are coaxially connected by a coupling 140.
  • the pipe joint 120 of the intake port joint 110 is provided with a product recovery function for recovering products such as powdery products and liquefied products that invade from the side of the external pipe 107.
  • FIG. 2B is a perspective sectional view showing the intake port joint 110, and the coupling 140 is omitted.
  • the pipe joint 120 of the intake port joint 110 has the same configuration as the intake port joint 10 of the first embodiment. Therefore, the description of the pipe joint 120 is omitted, and in FIG. 2B, the parts corresponding to the respective parts of the intake port joint 10 are designated by the same reference numerals.
  • the reducer 130 coaxially connected and fixed to the pipe joint 120 has a general shape, and has a small diameter pipe portion 131 opening at the upper end and a large diameter pipe portion 132 opening at the lower end. It is provided with a truncated cone-shaped pipe portion 133 that connects between the small diameter pipe portion 131 and the large diameter pipe portion 132.
  • An annular upper end opening flange 134 is formed so as to surround the upper end edge of the small diameter tube portion 131, and an annular lower end opening flange 135 is formed so as to surround the lower end edge of the large diameter tube portion 132. ..
  • External pipes 107 having different pipe diameters are connected to the pipe joint 120 via the reducer 130.
  • the lower end opening flange 135 on the large diameter side of the reducer 130 sandwiches the gasket 125 and is coaxially connected to the upper flange 23 of the pipe joint 120.
  • An external pipe 107 is coaxially connected to the upper end opening flange 134 on the small diameter side of the reducer 130.
  • the upper end side portion 26c of the inner pipe 26 of the pipe joint 120 projects upward from the upper end opening of the outer pipe 21 and is located inside the large diameter pipe portion 132 of the reducer 130.
  • the opening area of the exhaust introduction port 26d formed in the upper end side portion 26c of the inner pipe 26 is the same as or larger than the effective opening area of the small diameter pipe portion 131 of the reducer 130, and therefore the effective opening area of the external pipe 107. ..
  • the intake port joint 110 for connecting the external pipe 107 to the intake port 6 is provided with a product recovery function.
  • the intake port joint 110 having the product recovery function can be attached and detached by normal pipe connection work and pipe removal work. Therefore, the work of collecting the products accumulated inside can be easily and efficiently performed, and the maintainability is excellent. Further, it is sufficient that an installation space similar to that of the existing intake port joint can be secured between the intake port 6 and the external pipe 107. Therefore, unlike the conventional case, it is not necessary to secure a large installation space for mounting a product recovery device having a large size, and it is not necessary to change the layout of external piping or the like.
  • a reducer having a different shape can be used as the reducer 130.
  • the reducer 230 having the shape shown in FIG. 3A and the reducer 330 having the shape shown in FIG. 3B can be used.
  • the reducer 230 of the intake port joint 210 shown in FIG. 3A has a shape in which the small diameter pipe portion 232 is coaxially attached to the upper end of the large diameter pipe portion 231.
  • a lower end opening flange 233 connected to the upper flange 23 of the pipe joint 120 is formed at the lower end opening of the large diameter pipe portion 231.
  • the upper end opening flange 234 connected to the external pipe 107 is formed in the upper end opening of the small diameter pipe portion 232.
  • the reducer 330 of the intake port joint 310 shown in FIG. 3B has a lower end opening flange 331 connected to the upper flange 23 of the pipe joint 120, a small diameter pipe portion 332 extending vertically upward from the lower end opening flange 331, and a small diameter. It is provided with an upper end opening flange 333 formed in the upper end opening of the pipe portion 332.
  • the external pipe 107 is connected to the upper end opening flange 333.
  • the pipe joint 120 is provided with an outer pipe 21 longer than the inner pipe 26, and the entire inner pipe 26 is inside the outer pipe 21. Is stored.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

An air intake port joint (10) of a dry vacuum pump (1) is provided with an outer pipe (21) provided with an upper flange (23) and a lower flange (22) at upper/lower ends. A product recovery concavity (28) that opens upward is formed on the inside of the outer pipe (21), between the outer pipe (21) and an inner pipe (26). The air intake port joint (10) provided with a product recovery function can be mounted on an air intake port (6), in a manner similar to work to mount an existing pipe joint. Unlike external mounting of a product recovery device that has large dimensions, there is no need to ensure an extensive installation space, so there is no need to make changes to the layout or the like for external piping (7) connected to the air intake port (6). The invention has excellent maintenance properties and makes it easy to recover product that has accumulated in the interior simply by taking the external piping off of the air intake port joint.

Description

ドライ真空ポンプの吸気口ジョイントDry vacuum pump intake joint
　本発明は、ドライ真空ポンプの吸気口に外部配管を接続するための吸気口ジョイント、および当該吸気口ジョイントを備えたドライ真空ポンプに関する。さらに詳しくは、外部配管から吸気口を介してポンプ内に侵入する粉体状生成物、液化生成物等の生成物を回収する生成物回収機能を備えた吸気口ジョイント、および当該吸気口ジョイントを備えたドライ真空ポンプに関する。 The present invention relates to an intake port joint for connecting an external pipe to the intake port of the dry vacuum pump, and a dry vacuum pump provided with the intake port joint. More specifically, an intake port joint having a product recovery function for recovering products such as powdery products and liquefied products that enter the pump through an intake port from an external pipe, and the intake port joint. Regarding the dry vacuum pump equipped.
　半導体製造プロセス、例えばＣＶＤやエッチャー工程のようなプロセスにおいては、ドライ真空ポンプを用いて反応室等の真空引きが行われる。ドライ真空ポンプによって吸引される排気には、粉体状生成物、液化生成物等の生成物が含まれている。このような生成物は少量ずつであれば、ドライ真空ポンプに吸い込まれても、当該ポンプの駆動に問題になることはない。しかし、一度に大量の生成物がドライ真空ポンプに侵入すると、ポンプが過負荷状態に陥り、起動不可になることがある。 In a semiconductor manufacturing process, for example, a process such as CVD or an etcher process, a dry vacuum pump is used to evacuate a reaction chamber or the like. The exhaust sucked by the dry vacuum pump contains products such as powdery products and liquefied products. Even if such a product is sucked into a dry vacuum pump in small amounts, there is no problem in driving the pump. However, if a large amount of product enters the dry vacuum pump at one time, the pump may be overloaded and unable to start.
　このような弊害を防止するために、ドライ真空ポンプの前段に、粉体を捕捉して溜めるためのｈ型配管、粉体トラップ等の生成物回収装置を設置するのが一般的である。例えば、特許文献１には、ポンプ外付け型の生成物回収装置が提案されており、粉体をトラップするための遠心分離筒がポンプ吸気口と外部配管との間に取り付けられている。一方、特許文献２には、ポンプ内蔵型の生成物回収装置が提案されており、真空ポンプのケーシングの内部において、吸気口に連通する吸気通路に生成物回収用のトラップが配置されている。 In order to prevent such adverse effects, it is common to install a product recovery device such as an h-type pipe or powder trap for capturing and storing powder in front of the dry vacuum pump. For example, Patent Document 1 proposes an external pump-type product recovery device, in which a centrifuge cylinder for trapping powder is attached between a pump intake port and an external pipe. On the other hand, Patent Document 2 proposes a product recovery device having a built-in pump, in which a trap for product recovery is arranged in an intake passage communicating with an intake port inside a casing of a vacuum pump.
特開２００７－２０５２８７号公報Japanese Unexamined Patent Publication No. 2007-205287 特開平５－３３２２８５号公報Japanese Unexamined Patent Publication No. 5-332285
　ポンプ内蔵型の生成物回収装置の場合には、溜まった生成物の回収等を行うためにはポンプケーシングの分解作業が必要である。これに対して、外付け型の生成物回収装置の場合にはポンプ本体から簡単に取り外すことができるので、メンテナンス性に優れている。 In the case of a product recovery device with a built-in pump, it is necessary to disassemble the pump casing in order to recover the accumulated product. On the other hand, in the case of an external product recovery device, it can be easily removed from the pump body, so that it is excellent in maintainability.
　しかしながら、従来の外付け型の生成物回収装置には次のような課題がある。すなわち、ドライ真空ポンプの吸気口を外部配管と接続するために、吸気口には吸気口ジョイントが取り付けられている。既設の吸気口ジョイントの代わりに、これよりも寸法が大きく設置スペースを多く必要とするｈ型配管、粉体トラップなどの生成物回収装置が、吸気口に取り付けられる。吸気口と外部配管との間に、生成物回収装置を取り付け可能な広い設置スペースを確保するために、外部配管のレイアウト変更等が必要である。 However, the conventional external product recovery device has the following problems. That is, in order to connect the intake port of the dry vacuum pump to the external pipe, an intake port joint is attached to the intake port. Instead of the existing intake port joint, a product recovery device such as an h-shaped pipe or a powder trap, which is larger in size and requires more installation space, is attached to the intake port. It is necessary to change the layout of the external piping in order to secure a large installation space where the product recovery device can be installed between the intake port and the external piping.
　本発明の目的は、このような点に鑑みて、メンテナンス性に優れ、広い設置スペースを必要とすることなくドライ真空ポンプの吸気口に外付け可能な生成物回収装置として、生成物回収機能を備えた吸気口ジョイントを提供することにある。 In view of these points, an object of the present invention is to provide a product recovery function as a product recovery device that is excellent in maintainability and can be externally attached to the intake port of a dry vacuum pump without requiring a large installation space. The purpose is to provide an air intake joint provided.
　本発明は、ドライ真空ポンプの吸気口に取り付けられている吸気口ジョイントに着目し、吸気口ジョイント自体に生成物回収機構を組み込むことで、設置スベースの増加を招くことなく、ドライ真空ポンプの吸気口に外付け可能なメンテナンス性に優れた生成物回収装置を実現している。これにより、外部配管（ポンプ上位の設備側の配管）のレイアウト変更を必要とすることなく、当該外部配管からドライ真空ポンプの吸気口に侵入する生成物を回収できる。 The present invention focuses on the intake port joint attached to the intake port of the dry vacuum pump, and by incorporating the product recovery mechanism in the intake port joint itself, the intake air of the dry vacuum pump is taken in without increasing the installation base. We have realized a product recovery device that can be externally attached to the mouth and has excellent maintainability. As a result, the product that enters the intake port of the dry vacuum pump can be recovered from the external piping without the need to change the layout of the external piping (the piping on the equipment side above the pump).
　すなわち、本発明は、ドライ真空ポンプの吸気口に取り付けたポンプ付属品として取り扱うことのできる生成物回収機能を備えた吸気口ジョイントであって、
　上下方向に延びる外管と、
　前記外管の下端に形成され、前記ドライ真空ポンプに締結固定される下フランジと、
　前記外管の上端に形成された上フランジと、
　前記外管の内部に同軸に配置され、下端開口が前記下フランジの中心開口部を介して前記吸気口に連通可能であり、上端開口が封鎖されている内管と、
　前記内管の外周壁部分を半径方向に貫通している排気導入口と、
　前記外管と前記内管との間に形成され、上端が上方に開口し、下端が前記下フランジによって封鎖されている環状の生成物回収凹部と、
を備えていることを特徴としている。 That is, the present invention is an intake port joint having a product recovery function that can be handled as a pump accessory attached to the intake port of a dry vacuum pump.
An outer pipe that extends in the vertical direction,
A lower flange formed at the lower end of the outer pipe and fastened and fixed to the dry vacuum pump,
The upper flange formed on the upper end of the outer pipe and
An inner pipe that is coaxially arranged inside the outer pipe, has a lower end opening that can communicate with the intake port through the central opening of the lower flange, and has an upper end opening that is closed.
An exhaust inlet that penetrates the outer peripheral wall of the inner pipe in the radial direction,
An annular product recovery recess formed between the outer tube and the inner tube, the upper end opening upward and the lower end sealed by the lower flange.
It is characterized by having.
　本発明の吸気口ジョイントでは、ドライ真空ポンプの吸気口に取り付けられている吸気口ジョイントの内部に生成物回収凹部が形成されている。吸気口ジョイントの外管の上フランジに、既存の吸気口ジョイントと同様に、外部配管が接続される。外部配管との間に管径の違いがある場合には、上フランジにレデューサを取り付け、レデューサを介して外部配管が接続される。この場合には、本願発明の吸気口ジョイントは、その構成部品としてレデューサが備わっている。吸気口ジョイントに外部配管が接続されると、外部配管から、レデューサ、生成物回収凹部、内管の外周壁部分に形成した排気導入口、および内管内を順次に経由して、ドライ真空ポンプの吸気口に至る排気通路が形成される。 In the intake port joint of the present invention, a product recovery recess is formed inside the intake port joint attached to the intake port of the dry vacuum pump. Similar to the existing intake port joint, the external pipe is connected to the upper flange of the outer pipe of the intake port joint. If there is a difference in pipe diameter between the pipe and the external pipe, a reducer is attached to the upper flange, and the external pipe is connected via the reducer. In this case, the intake port joint of the present invention is provided with a reducer as a component thereof. When the external pipe is connected to the intake port joint, the dry vacuum pump is sequentially passed from the external pipe through the reducer, the product collection recess, the exhaust inlet formed on the outer peripheral wall of the inner pipe, and the inner pipe. An exhaust passage leading to the intake port is formed.
　上位の設備側から外部配管を介して真空吸引される排気は、吸気口ジョイントの内部において、上端面が封鎖されている内管の外周を取り囲む生成物回収凹部に流入し、内管の外周壁部分に開口する排気導入口から内管内部に流入し、内管内部を流れて吸気口からポンプ内部に吸引される。ドライ真空ポンプの起動時、再起動時等おいて、外部配管の側から吸気口ジョイント内に落下する粉体状生成物、液化生成物等の生成物は、自重により、生成物回収凹部の底に落下して溜まる。同様に、排気と共に吸気口ジョイント内に流れ込む生成物も排気から振り落とされて、生成物回収凹部の底に溜まる。生成物回収凹部に流入した後の排気は、内管の外周壁部分に開口する排気導入口を通って、内管の内部に流れ込み、内管を通って吸気口からポンプ内に吸引される。 The exhaust that is vacuum-sucked from the upper equipment side via the external pipe flows into the product recovery recess that surrounds the outer circumference of the inner pipe whose upper end surface is closed inside the intake port joint, and flows into the outer peripheral wall of the inner pipe. It flows into the inside of the inner pipe from the exhaust introduction port that opens in the portion, flows inside the inner pipe, and is sucked into the inside of the pump from the intake port. Products such as powdery products and liquefied products that fall into the intake joint from the side of the external piping when the dry vacuum pump is started or restarted are the bottom of the product recovery recess due to their own weight. It falls and accumulates. Similarly, the product that flows into the intake joint together with the exhaust is also shaken off from the exhaust and collected at the bottom of the product recovery recess. The exhaust after flowing into the product recovery recess flows into the inside of the inner pipe through the exhaust introduction port opened in the outer peripheral wall portion of the inner pipe, and is sucked into the pump from the intake port through the inner pipe.
　本発明の吸気口ジョイントにおいて、上下のフランジを備えた外管の部分は、既存の吸気口ジョイントと同様に構成されている。その取り付け、取り外し作業は、通常の配管接続・取り外し作業と同様に行うことができ、特殊な作業は不要である。内部に溜まった生成物の回収作業を、吸気口ジョイントから外部配管を取り外すだけで、簡単に行うことができ、メンテナンス性に優れている。また、既存の吸気口ジョイントと同様の設置スペースを確保できればよい。よって、寸法の大きな生成物回収装置を外付けする場合のように、広い設置スペースを確保するために、ドライ真空ポンプの吸気口に接続される外部配管（上位の設備側配管）のレイアウト変更を行う必要性も無くなる。 In the intake port joint of the present invention, the portion of the outer pipe provided with the upper and lower flanges is configured in the same manner as the existing intake port joint. The installation and removal work can be performed in the same way as the normal pipe connection / removal work, and no special work is required. The work of collecting the products accumulated inside can be easily performed by simply removing the external pipe from the intake port joint, and the maintenance is excellent. In addition, it is sufficient if the same installation space as the existing intake port joint can be secured. Therefore, in order to secure a large installation space, such as when installing a large-sized product recovery device externally, the layout of the external piping (upper equipment side piping) connected to the intake port of the dry vacuum pump should be changed. There is no need to do it.
　ここで、ドライ真空ポンプの性能である排気速度（単位時間あたりの気体排出量）は、上位配管のコンダクタンスにも左右される。排気速度の低下を防ぐためには、吸気口ジョイントの内部に配置した内管の上端部分に形成する排気導入口の開口面積として、上位配管径と同等以上の開口面積を確保することが望ましい。すなわち、吸気口ジョイントの内管の排気導入口の開口面積を、接続対象の外部配管の有効開口面積と同一あるいはそれよりも大きくしておくことが望ましい。 Here, the exhaust speed (gas emission amount per unit time), which is the performance of the dry vacuum pump, depends on the conductance of the upper piping. In order to prevent a decrease in the exhaust speed, it is desirable to secure an opening area equal to or larger than the diameter of the upper pipe as the opening area of the exhaust introduction port formed at the upper end portion of the inner pipe arranged inside the intake port joint. That is, it is desirable that the opening area of the exhaust introduction port of the inner pipe of the intake port joint is equal to or larger than the effective opening area of the external pipe to be connected.
　内管に形成される排気導入口を、外管の上端開口よりも高い位置に配置する場合がある。この場合には、例えば、内管を外管よりも長い管とし、その上端部分を、外管の上端開口から上方に突出させ、外管の上端よりも高い位置に排気導入口を形成する。 The exhaust inlet formed in the inner pipe may be placed at a position higher than the upper end opening of the outer pipe. In this case, for example, the inner pipe is made longer than the outer pipe, the upper end portion thereof is projected upward from the upper end opening of the outer pipe, and the exhaust introduction port is formed at a position higher than the upper end of the outer pipe.
　内管を、下フランジに対して着脱可能に取り付けることも可能である。例えば、異なる長さの内管、異なる開口面積の排気導入口を備えた内管を用意しておき、必要とされる長さ、および開口面積を備えた内管に交換できるようにしてもよい。 It is also possible to attach the inner pipe to the lower flange so that it can be attached and detached. For example, an inner pipe having a different length and an exhaust inlet having a different opening area may be prepared so that the inner pipe can be replaced with an inner pipe having a required length and an opening area. ..
　ドライ真空ポンプの運転中において、吸気口ジョイントの生成物回収凹部に生成物が蒸発せずに溜まり続けると、外管の上フランジと、接続対象の配管との間に配置されるシール材等が腐食することが懸念される。生成物がシール材に接触等してシール材が腐食してしまうことを回避できるように、内管の外周壁部分にオーバーフロー用の穴を形成しておけばよい。この穴は、外管の上フランジの上端開口よりも下側の位置において、生成物回収凹部と内管の内部との間を連通している。この穴を介して、生成物回収凹部に溜まった生成物を内管内に導き、吸気口の側に落下させることができる。 During the operation of the dry vacuum pump, if the product continues to accumulate in the product collection recess of the intake port joint without evaporating, the sealing material etc. placed between the upper flange of the outer pipe and the pipe to be connected will be formed. There is concern that it will corrode. An overflow hole may be formed in the outer peripheral wall portion of the inner pipe so that the product can be prevented from coming into contact with the sealing material and corroding the sealing material. This hole communicates between the product recovery recess and the inside of the inner tube at a position below the upper end opening of the upper flange of the outer tube. Through this hole, the product accumulated in the product recovery recess can be guided into the inner pipe and dropped to the side of the intake port.
本発明の実施の形態１に係る吸気口ジョイントを備えた排気装置を示す説明図である。It is explanatory drawing which shows the exhaust device provided with the intake port joint which concerns on Embodiment 1 of this invention. 図１Ａの吸気口ジョイントを示す縦断面図である。It is a vertical sectional view which shows the intake port joint of FIG. 1A. 本発明の実施の形態２に係る吸気口ジョイントを備えた排気装置を示す説明図である。It is explanatory drawing which shows the exhaust device provided with the intake port joint which concerns on Embodiment 2 of this invention. 図２Ａの吸気口ジョイントを示す縦断面図である。It is a vertical sectional view which shows the intake port joint of FIG. 2A. 本発明を適用した吸気口ジョイントの別の例を示す縦断面図である。It is a vertical sectional view which shows another example of the intake port joint to which this invention is applied. 本発明を適用した吸気口ジョイントの更に別の例を示す縦断面図である。It is a vertical sectional view which shows still another example of the intake port joint to which this invention is applied.
　以下に、図面を参照して、本発明を適用した吸気口ジョイントを備えたドライ真空ポンプの実施の形態を説明する。 Hereinafter, an embodiment of a dry vacuum pump provided with an intake port joint to which the present invention is applied will be described with reference to the drawings.
（実施の形態１）
　図１Ａは、実施の形態１に係る吸気口ジョイントを備えたドライ真空ポンプを示す説明図である。ドライ真空ポンプ１は、排気装置ユニットの形態をしており、直方体形状の装置筐体２の内部に、直列に接続した２台のドライ真空ポンプを備えている。例えば、ドライ真空ポンプ１は、前段のメカニカルブースターポンプ３と後段のドライ真空ポンプ４を備えている。ドライ真空ポンプにはスクリュー式真空ポンプ、ルーツ式、クロー式、スクロール式等の各種のドライ真空ポンプを用いることができることは勿論である。 (Embodiment 1)
FIG. 1A is an explanatory view showing a dry vacuum pump provided with an intake port joint according to the first embodiment. The dry vacuum pump 1 is in the form of an exhaust device unit, and includes two dry vacuum pumps connected in series inside a rectangular parallelepiped device housing 2. For example, the dry vacuum pump 1 includes a mechanical booster pump 3 in the front stage and a dry vacuum pump 4 in the rear stage. It goes without saying that various dry vacuum pumps such as a screw type vacuum pump, a roots type, a claw type, and a scroll type can be used as the dry vacuum pump.
　ドライ真空ポンプ１の吸気口６は、装置筐体２の水平な筐体上面２ａにおいて、上方に開口している。筐体上面２ａにおける吸気口６を取り囲む部位はフランジ取付け部２ｂとなっている。ここに、外部配管接続用の吸気口ジョイント１０が垂直に取り付けられている。吸気口ジョイント１０は、カップリング４０によって、図１Ａにおいて想像線で示す上流側の外部配管７に接続される。吸気口ジョイント１０には、外部配管７の側から侵入する粉体状生成物、液化生成物等の生成物を回収する生成物回収機能が備わっている。 The intake port 6 of the dry vacuum pump 1 opens upward in the horizontal housing upper surface 2a of the device housing 2. The portion of the upper surface 2a of the housing that surrounds the intake port 6 is a flange mounting portion 2b. Here, the intake port joint 10 for connecting the external pipe is vertically attached. The intake port joint 10 is connected to the external pipe 7 on the upstream side shown by the imaginary line in FIG. 1A by the coupling 40. The intake port joint 10 is provided with a product recovery function for recovering products such as powdery products and liquefaction products that invade from the side of the external pipe 7.
　図１Ｂは、吸気口ジョイント１０を示す縦断面図である。吸気口ジョイント１０は、上下方向に延びる円筒形状の外管２１と、この外管２１の下端部２１ａに同軸状態で固定された下フランジ２２と、外管２１の上端部２１ｂに同軸状態で一体形成された上フランジ２３とを備えている。 FIG. 1B is a vertical sectional view showing an intake port joint 10. The intake port joint 10 is integrally integrated with the cylindrical outer pipe 21 extending in the vertical direction, the lower flange 22 coaxially fixed to the lower end portion 21a of the outer pipe 21, and the upper end portion 21b of the outer pipe 21. It is provided with a formed upper flange 23.
　下フランジ２２は、外管２１よりも大径の円盤形状をしており、その中心部分には、外管２１よりも小径の円形開口部２２ａが形成されている。下フランジ２２は、不図示のガスケット等のシール材を介して、筐体上面２ａのフランジ取付け部２ｂに締結ボルト２４等によって締結固定されている。上フランジ２３は、外管２１の上端部２１ｂの外周面から外方に突出している円環形状の部分である。 The lower flange 22 has a disk shape having a diameter larger than that of the outer pipe 21, and a circular opening 22a having a diameter smaller than that of the outer pipe 21 is formed in the central portion thereof. The lower flange 22 is fastened and fixed to the flange mounting portion 2b of the upper surface 2a of the housing by a fastening bolt 24 or the like via a sealing material such as a gasket (not shown). The upper flange 23 is a ring-shaped portion protruding outward from the outer peripheral surface of the upper end portion 21b of the outer pipe 21.
　また、吸気口ジョイント１０は、外管２１の内側において同軸に配置された円筒形状の内管２６を備えている。内管２６は、下フランジ２２の円形開口部２２ａとほぼ同一径の円筒であり、内管２６の下端部２６ａが下フランジ２２の円形開口部２２ａの内周面に同軸に固定されている。これにより、内管２６の下端開口部２６ｂは下フランジ２２の円形開口部２２ａを介して、下側の吸気口６に連通している。 Further, the intake port joint 10 includes a cylindrical inner pipe 26 arranged coaxially inside the outer pipe 21. The inner pipe 26 is a cylinder having substantially the same diameter as the circular opening 22a of the lower flange 22, and the lower end portion 26a of the inner pipe 26 is coaxially fixed to the inner peripheral surface of the circular opening 22a of the lower flange 22. As a result, the lower end opening 26b of the inner pipe 26 communicates with the lower intake port 6 via the circular opening 22a of the lower flange 22.
　内管２６の管長は外管２１よりも長く、内管２６の上端側部分２６ｃは、外管２１の上端開口部２１ｃから上方に突出している。内管２６の上端開口部は、水平な円形端板２７によって封鎖されている。内管２６の上端側部分２６ｃの外周壁部分には、排気導入口２６ｄが形成されている。排気導入口２６ｄは、外周壁部分を半径方向に貫通しており、外管２１の上端開口部２１ｃよりも高い位置にある。例えば、排気導入口２６ｄは、円周方向に沿って、等角度間隔に形成された同一形状の開口部である。 The length of the inner pipe 26 is longer than that of the outer pipe 21, and the upper end side portion 26c of the inner pipe 26 projects upward from the upper end opening 21c of the outer pipe 21. The upper end opening of the inner tube 26 is closed by a horizontal circular end plate 27. An exhaust introduction port 26d is formed on the outer peripheral wall portion of the upper end side portion 26c of the inner pipe 26. The exhaust introduction port 26d penetrates the outer peripheral wall portion in the radial direction and is located at a position higher than the upper end opening 21c of the outer pipe 21. For example, the exhaust introduction port 26d is an opening having the same shape formed at equal intervals along the circumferential direction.
　外管２１と内管２６との間に形成される円環状断面の隙間は、下端が下フランジ２２によって封鎖されている。これら外管２１の内周面、内管２６の外周面および下フランジ２２の上端面２２ｂによって、円環状の生成物回収凹部２８が区画形成されている。生成物回収凹部２８の上端は上方に開口している。 The lower end of the gap in the annular cross section formed between the outer pipe 21 and the inner pipe 26 is closed by the lower flange 22. An annular product recovery recess 28 is partitioned by the inner peripheral surface of the outer pipe 21, the outer peripheral surface of the inner pipe 26, and the upper end surface 22b of the lower flange 22. The upper end of the product recovery recess 28 is open upward.
　ここで、内管２６の外周壁部分には、排気導入口２６ｄの下側に、オーバーフロー用の穴２６ｅが形成されている。穴２６ｅは、外管２１の上フランジ２３の上端面よりも下側に位置している。生成物回収凹部２８において生成物が外管２１の上フランジ２３に達するまで溜まると、生成物は穴２６ｅから内管２６にオーバーフローして吸気口６の側に落下するようになっている。 Here, on the outer peripheral wall portion of the inner pipe 26, an overflow hole 26e is formed below the exhaust introduction port 26d. The hole 26e is located below the upper end surface of the upper flange 23 of the outer pipe 21. When the product accumulates in the product recovery recess 28 until it reaches the upper flange 23 of the outer pipe 21, the product overflows from the hole 26e into the inner pipe 26 and falls to the side of the intake port 6.
　この構成の吸気口ジョイント１０の外管２１の上フランジ２３に、ガスケット等のシール材（図示せず）を挟み、同軸に、外部配管７の下フランジ７ａが連結固定される。外部配管７を連結すると、内管２６の上端側部分は外部配管７に突入した状態になる。内管２６の上端側部分２６ｃに形成した排気導入口２６ｄの開口面積は、外部配管７の有効開口面積と同一あるいはそれ以上とされている。 A sealing material (not shown) such as a gasket is sandwiched between the upper flange 23 of the outer pipe 21 of the intake port joint 10 having this configuration, and the lower flange 7a of the external pipe 7 is coaxially connected and fixed. When the external pipe 7 is connected, the upper end side portion of the inner pipe 26 is in a state of plunging into the external pipe 7. The opening area of the exhaust introduction port 26d formed in the upper end side portion 26c of the inner pipe 26 is equal to or larger than the effective opening area of the external pipe 7.
　ドライ真空ポンプ１の真空引きにより、外部配管７の側からの排気は、図１Ｂにおいて矢印で示すように、吸気口ジョイント１０の外管２１と内管２６の間の生成物回収凹部２８に流れ込む。内管２６の上端は封鎖されているので、排気は生成物回収凹部２８の底面に向かって流れる。この後は、内管２６の外周壁面部分に開口している排気導入口２６ｄから内管２６の内側に流れ込み、内管２６の内部を通って吸気口６からドライ真空ポンプ１の内部に吸引される。 Due to the evacuation of the dry vacuum pump 1, the exhaust from the side of the external pipe 7 flows into the product recovery recess 28 between the outer pipe 21 and the inner pipe 26 of the intake port joint 10 as shown by an arrow in FIG. 1B. .. Since the upper end of the inner pipe 26 is closed, the exhaust gas flows toward the bottom surface of the product recovery recess 28. After that, it flows into the inside of the inner pipe 26 from the exhaust introduction port 26d opened in the outer peripheral wall surface portion of the inner pipe 26, passes through the inside of the inner pipe 26, and is sucked into the inside of the dry vacuum pump 1 from the intake port 6. To.
　排気によって運ばれる粉体状生成物、液化生成物等の生成物、あるいは、外部配管７から吸気口ジョイント１０に落下する生成物は、直接に、ポンプ内に侵入することはなく、生成物回収凹部２８の底に溜まる。また、半導体製造装置のメンテナンス時等において、外部配管７の側から大量の粉体が塊の状態で排出される場合がある。この場合においても、大量の粉体の塊は、生成物回収凹部２８に一旦、溜まる。生成物回収凹部２８に溜まった粉体等の生成物の一部は、排気流に乗ってドライ真空ポンプ１に吸引される。少量の生成物であれば、ドライ真空ポンプ１の内部に吸引されても実用上において問題は発生しない。 Products such as powdery products and liquefaction products carried by exhaust, or products that fall from the external pipe 7 to the intake port joint 10 do not directly enter the pump and are recovered. It collects at the bottom of the recess 28. Further, at the time of maintenance of the semiconductor manufacturing apparatus or the like, a large amount of powder may be discharged in a lump state from the side of the external pipe 7. Even in this case, a large amount of powder lumps are once collected in the product recovery recess 28. A part of the product such as powder collected in the product recovery recess 28 is sucked into the dry vacuum pump 1 on the exhaust flow. If it is a small amount of product, there is no problem in practical use even if it is sucked into the inside of the dry vacuum pump 1.
　また、外部配管７の側から液化生成物が吸気口６に向けて落下することもある。液化生成物も粉体状生成物と同様に、生成物回収凹部２８の底に一時的に溜まり、吸気口６からドライ真空ポンプ１の内部に侵入することがない。生成物回収凹部２８に溜まった液化生成物は、ドライ真空ポンプ１の運転中に真空乾燥される場合がある。よって、溜まった液化生成物によって、吸気口ジョイント１０の内部が腐食するなどの弊害が発生する可能性も低い。 In addition, the liquefied product may fall from the side of the external pipe 7 toward the intake port 6. Like the powdery product, the liquefied product temporarily accumulates at the bottom of the product recovery recess 28 and does not enter the inside of the dry vacuum pump 1 from the intake port 6. The liquefied product accumulated in the product recovery recess 28 may be vacuum dried during the operation of the dry vacuum pump 1. Therefore, it is unlikely that the accumulated liquefied product will cause adverse effects such as corrosion of the inside of the intake port joint 10.
　また、生成物が一度に大量に進入した場合等は、生成物回収凹部が生成物で満杯になり、外管２１と外部配管７との間の接合部分に配置したシール材（図示せず）が腐食することが懸念される。本例では、内管２６の上端側部分において、シール材の配置位置よりも低い位置（上フランジ２３の上端面よりも低い位置）に、オーバーフロー用の穴２６ｅを設けてある。生成物回収凹部２８に溜まり続けた生成物が穴２６ｅの位置に到達すると、穴２６ｅから内管２６の内部にオーバーフローして吸気口６の側に落下する。よって、生成物がシール材に接触等してシール材が腐食してしまうことを回避できる。 Further, when a large amount of product enters at one time, the product recovery recess becomes full of the product, and the sealing material placed at the joint portion between the outer pipe 21 and the outer pipe 7 (not shown). Is concerned about corrosion. In this example, an overflow hole 26e is provided at a position lower than the position where the sealing material is arranged (a position lower than the upper end surface of the upper flange 23) in the upper end side portion of the inner pipe 26. When the product that has continued to accumulate in the product recovery recess 28 reaches the position of the hole 26e, it overflows from the hole 26e into the inner pipe 26 and falls to the side of the intake port 6. Therefore, it is possible to prevent the product from coming into contact with the sealing material and corroding the sealing material.
　なお、オーバーフロー用の穴２６ｅを設ける代わりに、排気導入口２６ｄにオーバーフロー機能をもたせることもできる。例えば、排気導入口２６ｄの一つの位置を変更して、排気導入口２６ｄを介して、生成物を生成物回収凹部２８から内管２６の内部にオーバーフローさせることができるようにしてもよい。また、排気導入口２６ｄの一部を下方に延長してオーバーフロー用の穴部分としてもよい。 Instead of providing the overflow hole 26e, the exhaust introduction port 26d can be provided with an overflow function. For example, the position of one of the exhaust introduction ports 26d may be changed so that the product can overflow from the product recovery recess 28 into the inner pipe 26 through the exhaust introduction port 26d. Further, a part of the exhaust introduction port 26d may be extended downward to serve as an overflow hole portion.
　以上説明したように、本例のドライ真空ポンプ１においては、吸気口６に外部配管７を接続するための吸気口ジョイント１０に生成物回収機能を持たせている。生成物回収装置を別途、取り付ける場合とは異なり、通常の配管接続作業、配管取り外し作業により、生成物回収機能を備えた吸気口ジョイント１０の取り付け、取り外しを行うことができる。よって、内部に溜まった生成物の回収作業等を簡単かつ効率良く行うことができ、メンテナンス性に優れている。また、吸気口６と外部配管７との間には、既存の吸気口ジョイントと同様の設置スペースを確保できればよい。よって、従来とは異なり、寸法の大きな生成物回収装置を取り付けるための広い設置スペースを確保する必要がなく、外部配管等のレイアウト変更も不要である。 As described above, in the dry vacuum pump 1 of this example, the intake port joint 10 for connecting the external pipe 7 to the intake port 6 is provided with a product recovery function. Unlike the case where the product recovery device is separately attached, the intake port joint 10 having the product recovery function can be attached and detached by normal pipe connection work and pipe removal work. Therefore, the work of collecting the products accumulated inside can be easily and efficiently performed, and the maintainability is excellent. Further, it is sufficient that an installation space similar to that of the existing intake port joint can be secured between the intake port 6 and the external pipe 7. Therefore, unlike the conventional case, it is not necessary to secure a large installation space for mounting a product recovery device having a large size, and it is not necessary to change the layout of external piping or the like.
（実施の形態２）
　図２Ａは、実施の形態２に係る吸気口ジョイントを備えたドライ真空ポンプを示す説明図である。ドライ真空ポンプ１００は実施の形態１のドライ真空ポンプ１と同一構造であるので、その説明を省略し、図２Ａにおいて対応する部位には同一の符号を付してある。ドライ真空ポンプ１００をドライ真空ポンプ１とは異なる構成としてもよいことは勿論である。ドライ真空ポンプ１００の吸気口６は、装置筐体２の水平な筐体上面２ａにおいて、上方に開口している。筐体上面２ａにおける吸気口６を取り囲む部位はフランジ取付け部２ｂとなっている。ここに、外部配管接続用の吸気口ジョイント１１０が垂直に取り付けられている。 (Embodiment 2)
FIG. 2A is an explanatory view showing a dry vacuum pump provided with an intake port joint according to the second embodiment. Since the dry vacuum pump 100 has the same structure as the dry vacuum pump 1 of the first embodiment, the description thereof is omitted, and the corresponding portions in FIG. 2A are designated by the same reference numerals. Of course, the dry vacuum pump 100 may have a configuration different from that of the dry vacuum pump 1. The intake port 6 of the dry vacuum pump 100 opens upward in the horizontal housing upper surface 2a of the device housing 2. The portion of the upper surface 2a of the housing that surrounds the intake port 6 is a flange mounting portion 2b. Here, the intake port joint 110 for connecting the external pipe is vertically attached.
　吸気口ジョイント１１０を介して、吸気口６が図２Ａにおいて想像線で示す上流側の外部配管１０７に接続される。本例の吸気口ジョイント１１０は、吸気口６に取り付けたパイプジョイント１２０と、パイプジョイント１２０と管径の異なる外部配管１０７との間を接続するレデューサ１３０とを備えている。パイプジョイント１２０とレデューサ１３０とはカップリング１４０によって同軸に連結されている。吸気口ジョイント１１０のパイプジョイント１２０には、外部配管１０７の側から侵入する粉体状生成物、液化生成物等の生成物を回収する生成物回収機能が備わっている。 The intake port 6 is connected to the external pipe 107 on the upstream side shown by the imaginary line in FIG. 2A via the intake port joint 110. The intake port joint 110 of this example includes a pipe joint 120 attached to the intake port 6 and a reducer 130 that connects the pipe joint 120 and an external pipe 107 having a different pipe diameter. The pipe joint 120 and the reducer 130 are coaxially connected by a coupling 140. The pipe joint 120 of the intake port joint 110 is provided with a product recovery function for recovering products such as powdery products and liquefied products that invade from the side of the external pipe 107.
　図２Ｂは、吸気口ジョイント１１０を示す斜視断面図であり、カップリング１４０を省略してある。この図から分かるように、吸気口ジョイント１１０のパイプジョイント１２０は、実施の形態１の吸気口ジョイント１０と同一構成である。したがって、パイプジョイント１２０の説明を省略し、図２Ｂにおいて、吸気口ジョイント１０の各部分に対応する部位には同一の符号を付してある。 FIG. 2B is a perspective sectional view showing the intake port joint 110, and the coupling 140 is omitted. As can be seen from this figure, the pipe joint 120 of the intake port joint 110 has the same configuration as the intake port joint 10 of the first embodiment. Therefore, the description of the pipe joint 120 is omitted, and in FIG. 2B, the parts corresponding to the respective parts of the intake port joint 10 are designated by the same reference numerals.
　吸気口ジョイント１１０において、パイプジョイント１２０に同軸に連結固定されているレデューサ１３０は、一般的な形状のものであり、上端に開口する小径管部分１３１と、下端に開口する大径管部分１３２と、小径管部分１３１と大径管部分１３２の間をつなぐ円錐台状の管部分１３３とを備えている。小径管部分１３１の上端縁を取り囲む状態に円環状の上端開口部フランジ１３４が形成されており、大径管部分１３２の下端縁を取り囲む状態に円環状の下端開口部フランジ１３５が形成されている。レデューサ１３０を介して、管径の異なる外部配管１０７がパイプジョイント１２０に接続される。 In the intake port joint 110, the reducer 130 coaxially connected and fixed to the pipe joint 120 has a general shape, and has a small diameter pipe portion 131 opening at the upper end and a large diameter pipe portion 132 opening at the lower end. It is provided with a truncated cone-shaped pipe portion 133 that connects between the small diameter pipe portion 131 and the large diameter pipe portion 132. An annular upper end opening flange 134 is formed so as to surround the upper end edge of the small diameter tube portion 131, and an annular lower end opening flange 135 is formed so as to surround the lower end edge of the large diameter tube portion 132. .. External pipes 107 having different pipe diameters are connected to the pipe joint 120 via the reducer 130.
　レデューサ１３０の大径側の下端開口部フランジ１３５は、ガスケット１２５を挟み、同軸に、パイプジョイント１２０の上フランジ２３に連結されている。レデューサ１３０の小径側の上端開口部フランジ１３４には、外部配管１０７が同軸に接続される。 The lower end opening flange 135 on the large diameter side of the reducer 130 sandwiches the gasket 125 and is coaxially connected to the upper flange 23 of the pipe joint 120. An external pipe 107 is coaxially connected to the upper end opening flange 134 on the small diameter side of the reducer 130.
　パイプジョイント１２０の内管２６の上端側部分２６ｃは、外管２１の上端開口から上方に突出して、レデューサ１３０の大径管部分１３２の内部に位置している。内管２６の上端側部分２６ｃに形成した排気導入口２６ｄの開口面積は、レデューサ１３０の小径管部分１３１の有効開口面積、したがって、外部配管１０７の有効開口面積と同一あるいはそれ以上とされている。 The upper end side portion 26c of the inner pipe 26 of the pipe joint 120 projects upward from the upper end opening of the outer pipe 21 and is located inside the large diameter pipe portion 132 of the reducer 130. The opening area of the exhaust introduction port 26d formed in the upper end side portion 26c of the inner pipe 26 is the same as or larger than the effective opening area of the small diameter pipe portion 131 of the reducer 130, and therefore the effective opening area of the external pipe 107. ..
　このように、ドライ真空ポンプ１００においても、吸気口６に外部配管１０７を接続するための吸気口ジョイント１１０に生成物回収機能を持たせている。生成物回収装置を別途、取り付ける場合とは異なり、通常の配管接続作業、配管取り外し作業により、生成物回収機能を備えた吸気口ジョイント１１０の取り付け、取り外しを行うことができる。よって、内部に溜まった生成物の回収作業等を簡単かつ効率良く行うことができ、メンテナンス性に優れている。また、吸気口６と外部配管１０７との間には、既存の吸気口ジョイントと同様の設置スペースを確保できればよい。よって、従来とは異なり、寸法の大きな生成物回収装置を取り付けるための広い設置スペースを確保する必要がなく、外部配管等のレイアウト変更も不要である。 As described above, also in the dry vacuum pump 100, the intake port joint 110 for connecting the external pipe 107 to the intake port 6 is provided with a product recovery function. Unlike the case where the product recovery device is separately attached, the intake port joint 110 having the product recovery function can be attached and detached by normal pipe connection work and pipe removal work. Therefore, the work of collecting the products accumulated inside can be easily and efficiently performed, and the maintainability is excellent. Further, it is sufficient that an installation space similar to that of the existing intake port joint can be secured between the intake port 6 and the external pipe 107. Therefore, unlike the conventional case, it is not necessary to secure a large installation space for mounting a product recovery device having a large size, and it is not necessary to change the layout of external piping or the like.
（レデューサの別の例）
　上記の吸気口ジョイント１１０において、レデューサ１３０として、別の形状のレデューサを用いることができる。例えば、図３Ａに示す形状のレデューサ２３０、図３Ｂに示す形状のレデューサ３３０を用いることができる。 (Another example of a reducer)
In the intake port joint 110 described above, a reducer having a different shape can be used as the reducer 130. For example, the reducer 230 having the shape shown in FIG. 3A and the reducer 330 having the shape shown in FIG. 3B can be used.
　図３Ａに示す吸気口ジョイント２１０のレデューサ２３０は、大径管部分２３１の上端に小径管部分２３２が同軸に取り付けられた形状をしている。大径管部分２３１の下端開口部にはパイプジョイント１２０の上フランジ２３に接続される下端開口部フランジ２３３が形成されている。小径管部分２３２の上端開口部には、外部配管１０７に接続される上端開口部フランジ２３４が形成されている。 The reducer 230 of the intake port joint 210 shown in FIG. 3A has a shape in which the small diameter pipe portion 232 is coaxially attached to the upper end of the large diameter pipe portion 231. A lower end opening flange 233 connected to the upper flange 23 of the pipe joint 120 is formed at the lower end opening of the large diameter pipe portion 231. The upper end opening flange 234 connected to the external pipe 107 is formed in the upper end opening of the small diameter pipe portion 232.
　図３Ｂに示す吸気口ジョイント３１０のレデューサ３３０は、パイプジョイント１２０の上フランジ２３に接続される下端開口部フランジ３３１と、この下端開口部フランジ３３１から上方に垂直に延びる小径管部分３３２と、小径管部分３３２の上端開口部に形成した上端開口部フランジ３３３とを備えている。上端開口部フランジ３３３に外部配管１０７が接続される。 The reducer 330 of the intake port joint 310 shown in FIG. 3B has a lower end opening flange 331 connected to the upper flange 23 of the pipe joint 120, a small diameter pipe portion 332 extending vertically upward from the lower end opening flange 331, and a small diameter. It is provided with an upper end opening flange 333 formed in the upper end opening of the pipe portion 332. The external pipe 107 is connected to the upper end opening flange 333.
　なお、この形状のレデューサ３３０を備えた吸気口ジョイント３１０において、そのパイプジョイント１２０には、外管２１として内管２６よりも長いものが備わっており、外管２１の内部に内管２６の全体が収納される。 In the intake port joint 310 provided with the reducer 330 having this shape, the pipe joint 120 is provided with an outer pipe 21 longer than the inner pipe 26, and the entire inner pipe 26 is inside the outer pipe 21. Is stored.
　このような吸気口ジョイント２１０、３１０を用いた場合においても、上記の吸気口ジョイント１１０を用いた場合と同様な作用効果が得られる。 Even when such intake port joints 210 and 310 are used, the same action and effect as when the above intake port joint 110 is used can be obtained.

Claims (10)

  1. 　外部配管を、ドライ真空ポンプにおける上方に開口する吸気口に接続するために用いるドライ真空ポンプの吸気口ジョイントであって、
    　上下方向に延びる外管と、
    　前記外管の下端に形成され、前記ドライ真空ポンプに締結固定される下フランジと、
    　前記外管の上端に形成された上フランジと、
    　前記外管の内部に同軸に配置され、下端開口が前記下フランジの中心開口部を介して前記吸気口に連通可能であり、上端開口が封鎖されている内管と、
    　前記内管の外周壁部分を半径方向に貫通している排気導入口と、
    　前記外管と前記内管との間に形成され、上端が上方に開口し、下端が前記下フランジによって封鎖されている環状の生成物回収凹部と、
    を備えているドライ真空ポンプの吸気口ジョイント。     An intake port joint of a dry vacuum pump used to connect an external pipe to an intake port that opens upward in the dry vacuum pump.
    An outer pipe that extends in the vertical direction,
    A lower flange formed at the lower end of the outer pipe and fastened and fixed to the dry vacuum pump,
    The upper flange formed on the upper end of the outer pipe and
    An inner pipe that is coaxially arranged inside the outer pipe, has a lower end opening that can communicate with the intake port through the central opening of the lower flange, and has an upper end opening that is closed.
    An exhaust inlet that penetrates the outer peripheral wall of the inner pipe in the radial direction,
    An annular product recovery recess formed between the outer tube and the inner tube, the upper end opening upward and the lower end sealed by the lower flange.
    The intake port joint of the dry vacuum pump equipped with.
  2. 　請求項１に記載のドライ真空ポンプの吸気口ジョイントにおいて、
    　前記排気導入口の開口面積は、接続対象の前記外部配管の有効開口面積と同一あるいはそれよりも大きいドライ真空ポンプの吸気口ジョイント。     In the intake port joint of the dry vacuum pump according to claim 1,
    The intake port joint of the dry vacuum pump whose opening area of the exhaust introduction port is equal to or larger than the effective opening area of the external pipe to be connected.
  3. 　請求項１に記載のドライ真空ポンプの吸気口ジョイントにおいて、
    　前記内管の前記外周壁部分を貫通しているオーバーフロー用の穴を備えており、
    　前記穴は、前記外管の前記上フランジの前記上端開口よりも下側の位置において、前記生成物回収凹部と前記内管の内部との間を連通しているドライ真空ポンプの吸気口ジョイント。     In the intake port joint of the dry vacuum pump according to claim 1,
    It is provided with a hole for overflow that penetrates the outer peripheral wall portion of the inner pipe.
    The hole is an intake port joint of a dry vacuum pump that communicates between the product recovery recess and the inside of the inner pipe at a position below the upper end opening of the upper flange of the outer pipe.
  4. 　請求項１に記載のドライ真空ポンプの吸気口ジョイントにおいて、
    　前記内管の上端側部分は前記外管の上端開口から上方に突出しており、
    　前記排気導入口は、前記外管の前記上端開口よりも高い位置に形成されているドライ真空ポンプの吸気口ジョイント。     In the intake port joint of the dry vacuum pump according to claim 1,
    The upper end side portion of the inner pipe projects upward from the upper end opening of the outer pipe.
    The exhaust introduction port is an intake port joint of a dry vacuum pump formed at a position higher than the upper end opening of the outer pipe.
  5. 　請求項１に記載のドライ真空ポンプの吸気口ジョイントにおいて、
    　前記内管は、前記下フランジに対して取り外し可能な状態で取り付けられているドライ真空ポンプの吸気口ジョイント。     In the intake port joint of the dry vacuum pump according to claim 1,
    The inner pipe is an intake port joint of a dry vacuum pump that is detachably attached to the lower flange.
  6. 　請求項１に記載のドライ真空ポンプの吸気口ジョイントにおいて、
    　前記外管に、当該外管よりも小径の外部配管を接続するために用いるレデューサを備えており、
    　前記レデューサは、
    　上端に開口する小径管部分と、
    　下端に開口する大径管部分と、
    　前記外管の上フランジに同軸に連結固定されている前記大径管部分の下端開口部フランジと、
    　前記外部配管に接続される前記小径管部分の上端開口部フランジと
    を備えているドライ真空ポンプの吸気口ジョイント。     In the intake port joint of the dry vacuum pump according to claim 1,
    The outer pipe is equipped with a reducer used for connecting an external pipe having a diameter smaller than that of the outer pipe.
    The reducer is
    The small diameter tube part that opens at the upper end and
    The large diameter tube part that opens at the lower end and
    The lower end opening flange of the large diameter pipe portion coaxially connected and fixed to the upper flange of the outer pipe,
    An intake joint for a dry vacuum pump comprising an upper end opening flange of the small diameter tube portion connected to the external pipe.
  7. 　請求項６に記載のドライ真空ポンプの吸気口ジョイントにおいて、
    　前記内管の上端側部分は前記外管の上端開口から上方に突出して、前記レデューサの前記大径管部分の内部に位置しており、
    　前記排気導入口は、前記外管の前記上端開口よりも高い位置に形成されており、
    　前記内管の前記排気導入口の開口面積は、前記レデューサの前記小径管部分の有効開口面積と同一あるいはそれよりも大きいドライ真空ポンプの吸気口ジョイント。     In the intake port joint of the dry vacuum pump according to claim 6.
    The upper end side portion of the inner pipe projects upward from the upper end opening of the outer pipe and is located inside the large diameter pipe portion of the reducer.
    The exhaust introduction port is formed at a position higher than the upper end opening of the outer pipe.
    The intake port joint of the dry vacuum pump in which the opening area of the exhaust inlet of the inner pipe is equal to or larger than the effective opening area of the small diameter pipe portion of the reducer.
  8. 　外部配管を、上方に開口する吸気口に接続する吸気口ジョイントを備えたドライ真空ポンプにおいて、
    　前記吸気口ジョイントは、
    　上下方向に延びる外管と、
    　前記外管の下端に形成され、前記吸気口が形成されているポンプ筐体のフランジ取付け部に締結固定される下フランジと、
    　前記外管の上端に形成された上フランジと、
    　前記外管の内部に同軸に配置され、下端開口が前記下フランジの中心開口部を介して前記吸気口に連通し、上端開口が封鎖されている内管と、
    　前記内管の外周壁部分を半径方向に貫通している排気導入口と、
    　前記外管と前記内管との間に形成され、上端が上方に開口し、下端が前記下フランジによって封鎖されている環状の生成物回収凹部と、
    を備えているドライ真空ポンプ。     In a dry vacuum pump equipped with an intake port joint that connects the external piping to the intake port that opens upward.
    The intake port joint is
    An outer pipe that extends in the vertical direction,
    A lower flange formed at the lower end of the outer pipe and fastened and fixed to a flange mounting portion of the pump housing in which the intake port is formed,
    The upper flange formed on the upper end of the outer pipe and
    An inner pipe that is coaxially arranged inside the outer pipe, the lower end opening communicates with the intake port through the central opening of the lower flange, and the upper end opening is closed.
    An exhaust inlet that penetrates the outer peripheral wall of the inner pipe in the radial direction,
    An annular product recovery recess formed between the outer tube and the inner tube, the upper end opening upward and the lower end sealed by the lower flange.
    Equipped with a dry vacuum pump.
  9. 　請求項８に記載のドライ真空ポンプにおいて、
    　前記吸気口ジョイントは、前記外管に、当該外管よりも小径の外部配管を接続するために用いるレデューサを備えており、
    　前記レデューサは、
    　上端に開口する小径管部分と、
    　下端に開口する大径管部分と、
    　前記外管の上フランジに同軸に連結固定されている前記大径管部分の下端開口部フランジと、
    　前記外部配管に接続される前記小径管部分の上端開口部フランジと
    を備えているドライ真空ポンプ。     In the dry vacuum pump according to claim 8,
    The intake port joint includes a reducer used to connect an external pipe having a diameter smaller than that of the outer pipe to the outer pipe.
    The reducer is
    The small diameter tube part that opens at the upper end and
    The large diameter tube part that opens at the lower end and
    The lower end opening flange of the large diameter pipe portion coaxially connected and fixed to the upper flange of the outer pipe,
    A dry vacuum pump comprising an upper end opening flange of the small diameter pipe portion connected to the external pipe.
  10. 　請求項９に記載のドライ真空ポンプにおいて、
    　前記内管の上端側部分は前記外管の上端開口から上方に突出して、前記レデューサの前記大径管部分の内部に位置しており、
    　前記排気導入口は、前記外管の前記上端開口よりも高い位置に形成されており、
    　前記内管の前記排気導入口の開口面積は、前記レデューサの前記小径管部分の有効開口面積と同一あるいはそれよりも大きいドライ真空ポンプ。     In the dry vacuum pump according to claim 9.
    The upper end side portion of the inner pipe projects upward from the upper end opening of the outer pipe and is located inside the large diameter pipe portion of the reducer.
    The exhaust introduction port is formed at a position higher than the upper end opening of the outer pipe.
    A dry vacuum pump in which the opening area of the exhaust inlet of the inner pipe is equal to or larger than the effective opening area of the small diameter pipe portion of the reducer.
PCT/JP2020/028313 2020-07-21 2020-07-21 Air intake port joint for dry vacuum pump WO2022018829A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0544644A (en) * 1991-08-13 1993-02-23 Shimadzu Corp Bulb evacuating device
JPH05209594A (en) * 1992-01-31 1993-08-20 Hitachi Ltd Screw vacuum pump
JP2007205287A (en) * 2006-02-02 2007-08-16 Toyota Industries Corp Dry vacuum pump
WO2019130514A1 (en) * 2017-12-27 2019-07-04 樫山工業株式会社 Method of reducing powder load of dry vacuum pump and powder load reducer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5209594B2 (en) 2009-12-15 2013-06-12 日本特殊陶業株式会社 Temperature sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0544644A (en) * 1991-08-13 1993-02-23 Shimadzu Corp Bulb evacuating device
JPH05209594A (en) * 1992-01-31 1993-08-20 Hitachi Ltd Screw vacuum pump
JP2007205287A (en) * 2006-02-02 2007-08-16 Toyota Industries Corp Dry vacuum pump
WO2019130514A1 (en) * 2017-12-27 2019-07-04 樫山工業株式会社 Method of reducing powder load of dry vacuum pump and powder load reducer

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