WO2022007103A1

WO2022007103A1 - Mems gyroscope and electronic product

Info

Publication number: WO2022007103A1
Application number: PCT/CN2020/108375
Authority: WO
Inventors: 马昭; 占瞻; 杨珊; 李杨; 谭秋喻; 洪燕; 黎家健; 张睿
Original assignee: 瑞声声学科技(深圳)有限公司; 瑞声科技（南京）有限公司
Priority date: 2020-07-09
Filing date: 2020-08-11
Publication date: 2022-01-13
Also published as: CN213985134U

Abstract

Provided are an MEMS gyroscope (1) and an electronic product. The MEMS gyroscope (1) comprises a substrate (10), a fixing member (11), an annular member (12) and an electrode assembly (13), wherein the annular member (12) is driven by the electrode assembly (13) to vibrate in a first direction and a second direction, which are perpendicular to each other; and the vibrational displacement of the annular member (12) in a third direction, which forms an included angle of 45 degrees or 135 degrees with the first direction, is detected. The sensitivity of the MEMS gyroscope (1) is improved by utilizing the characteristic of the geometric structure of a ring-shaped gyroscope (1) being highly symmetrical; in addition, the wave-shaped annular member (12) reduces the deformation difficulty and improves the quality factor of the MEMS gyroscope (1). An annular groove (120) can release the annular member (12) having a movable structure, and form a gap between the annular member (12) and the electrode assembly (13), so that a capacitance is formed, thereby improving the sensitivity of the MEMS gyroscope (1); moreover, compared with a hemispherical gyroscope in the prior art, the MEMS gyroscope has a higher space utilization rate, and has a smaller etching depth in an axial direction, such that the process difficulty is reduced.

Description

A MEMS gyroscope and electronic product

technical field

The invention relates to the technical field of gyroscopes, in particular to a MEMS gyroscope and electronic products.

Background technique

Micro mechanical gyroscope, namely MEMS (Micro Electron Mechanical systems) gyroscope, which is a typical angular velocity microsensor, has a very wide range of applications in the consumer electronics market due to its advantages of small size, low power consumption and convenient processing. In recent years, with the gradual improvement of the performance of MEMS gyroscopes, they are widely used in automotive, industrial, virtual reality and other fields.

The geometric structure of the hemispherical gyroscope is highly symmetrical, the driving/detecting modes of the gyroscope are exactly the same, the sensitivity is high, and the structure is simple. However, the space utilization rate of the hemispherical gyroscope is low, and the etching depth in the axial direction is large, and the process is difficult.

Therefore, it is necessary to provide a new MEMS gyroscope to solve the above problems.

technical problem

The invention mainly provides a MEMS gyroscope and an electronic product, which can improve the quality factor of the gyroscope and reduce the technological difficulty.

technical solutions

In order to solve the above technical problems, a technical solution adopted by the present invention is to provide a MEMS gyroscope, the MEMS gyroscope includes: a base; a fixing member fixedly connected to the base; a ring member sleeved on the fixing The outer side of the part is connected with the fixing part, and is suspended on the base; the cross-section of the annular part in the radial direction is wave-shaped and the projection on the base is a circular ring, and the annular part is at the crest of the wave. And/or an annular slot is provided at the trough, so that the annular member is divided to form a plurality of annular portions spaced apart from each other and a connecting portion connecting the plurality of annular portions; the electrode assembly is fixedly connected to the base for Capacitance is formed with the ring member to drive the ring member to vibrate along the first and second directions perpendicular to each other, and to detect the ring member along the first direction at an angle of 45° or 135°. Vibration displacement in three directions.

In a specific embodiment, the electrode assembly includes at least one driving electrode and at least one detection electrode, the driving electrode and the detection electrode respectively form a capacitance with the annular member, and the driving electrode and the detection electrode have a capacitance. The included angle is 45° or 135°; the driving electrode drives the ring member to vibrate along the first direction and the second direction, and the detection electrode detects the vibration displacement of the ring member along the third direction .

In a specific embodiment, the ring member includes an upper surface away from the base, a lower surface opposite the upper surface, and a side connecting the upper surface and the lower surface and away from the fixing member. surface, the electrode assembly is disposed opposite to at least one of the upper surface, the lower surface and the side surface to form a capacitor.

In a specific embodiment, the annular member includes at least two wave trough structures connected in sequence and a wave crest connecting two adjacent wave trough structures, and the wave trough structures include inclined extending from the fixing member toward the base. a first wave arm, a wave trough extending from the first wave arm away from the fixing member and parallel to the base, and a second wave arm extending obliquely away from the base from the wave trough, adjacent to the The first wave arm and the second wave arm are connected by the wave crest, and the wave crest and the wave trough both include a plurality of the annular grooves and the connecting portion located between two adjacent annular grooves , the wave crest is parallel to the base and the vertical distance from the wave crest to the base is greater than the vertical distance from the wave trough to the base.

In a specific embodiment, the electrode assembly includes a plurality of first electrodes arranged at equal intervals in parallel and opposite to the side surface, and a plurality of second electrodes arranged at equal intervals in parallel and opposite to the upper surface. electrodes; the first electrodes and the second electrodes are the driving electrodes and/or the detection electrodes.

In a specific embodiment, the plurality of second electrodes are disposed opposite to the upper surface of the first wave arm and the upper surface of the second wave arm.

In a specific embodiment, the plurality of annular portions include a first annular portion, a second annular portion, ..., an n-1 th annular portion and an n th annular portion, wherein n is a natural number greater than or equal to 2; The driving electrode is used to drive the n annular portions from the first annular portion to the n-th annular portion to vibrate along the first direction and the second direction respectively, so that the first annular portion has a first vibration mode , the second annular portion has a second vibration mode, ..., the n-1th annular portion has an n-1th vibration mode and the nth annular portion has an nth vibration mode; the detection The electrodes are used to detect vibration displacements of n annular portions from the first annular portion to the n-th annular portion along the third direction.

In a specific embodiment, the first vibration mode, the second vibration mode, ..., the n-1th vibration mode and the nth vibration mode are divided into k groups, any two The group has a phase difference, and k is a natural number of 2 or more and n or less.

In a specific embodiment, the k is equal to two.

In a specific embodiment, the n is equal to two.

In a specific embodiment, any two vibration modes of the first vibration mode, the second vibration mode, . . . , the n-1th vibration mode, and the nth vibration mode are There is no phase difference between them.

In a specific embodiment, the electrode assembly further includes functional electrodes for frequency modulation or elimination of quadrature errors, and the first electrode and the second electrode are the driving electrode and/or the detection electrode and/or the or the functional electrode.

In order to solve the above technical problem, another technical solution adopted in the present application is to provide an electronic product, and the electronic product includes the above-mentioned MEMS gyroscope.

beneficial effect

The beneficial effects of the present invention are: different from the situation in the prior art, the MEMS gyroscope provided by the present invention includes a base; a fixing part, which is fixedly connected to the base; Placed on the base, the cross-section of the annular member in the radial direction is wavy and the projection on the base is annular, and the annular member is provided with annular grooves at the crests and/or troughs of the waves, so that the annular member is divided into a plurality of The spaced annular portion and the connecting portion connecting the plurality of annular portions; the electrode assembly, fixedly connected with the base, and used for forming a capacitance with the annular member, so as to drive the annular member to vibrate along the mutually perpendicular first and second directions, and detect the annular The vibration displacement of the part along the third direction at an angle of 45° or 135° with the first direction, on the one hand, the high symmetry feature of the circular ring gyroscope geometry is used to improve the sensitivity of the gyroscope, on the other hand, the wavy ring shape It can reduce the difficulty of deformation and improve the quality factor of the gyroscope, and the annular slot can release the ring member of the movable structure, and form a gap between the ring member and the electrode assembly, thereby forming a capacitance, thereby improving the sensitivity of the MEMS gyroscope, and at the same time, Compared with the hemispherical gyroscope in the prior art, the utility model has higher space utilization rate and smaller etching depth in the axial direction, which reduces the difficulty of the process.

Description of drawings

In order to illustrate the technical solutions in the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without any creative effort, among which.

FIG. 1 is a schematic structural diagram of a MEMS gyroscope provided by the present invention.

FIG. 2 is a schematic three-dimensional structure diagram of the MEMS gyroscope shown in FIG. 1 with the substrate removed.

FIG. 3 is a schematic front view of the three-dimensional structure shown in FIG. 2 .

FIG. 4 is a schematic cross-sectional view of the structure shown in FIG. 3 in the direction A-A.

FIG. 5 is a schematic cross-sectional view of the structure shown in FIG. 3 in the direction B-B.

FIG. 6 is a schematic diagram of a driving mode simulation of an embodiment of the MEMS gyroscope in FIG. 1 .

FIG. 7 is a schematic diagram of a detection mode simulation of an embodiment of the MEMS gyroscope in FIG. 1 .

FIG. 8 is a schematic diagram of a driving mode simulation of another embodiment of the MEMS gyroscope in FIG. 1 .

FIG. 9 is a schematic diagram of a detection mode simulation of another embodiment of the MEMS gyroscope in FIG. 1 .

Embodiments of the present invention

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relationship between various components under a certain posture (as shown in the accompanying drawings). The relative positional relationship, the movement situation, etc., if the specific posture changes, the directional indication also changes accordingly.

It will also be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.

In addition, the descriptions involving "first", "second", etc. in the present invention are only for descriptive purposes, and should not be understood as indicating or implying their relative importance or implying the number of indicated technical features. Thus, a feature delimited with "first", "second" may expressly or implicitly include at least one of that feature. In addition, the technical solutions between the various embodiments can be combined with each other, but must be based on the realization by those of ordinary skill in the art. When the combination of technical solutions is contradictory or cannot be realized, it should be considered that the combination of such technical solutions does not exist. , is not within the scope of protection required by the present invention.

Please refer to FIG. 1 to FIG. 5 together. The MEMS gyroscope 1 in this embodiment includes a substrate 10 , a fixing member 11 , a ring member 12 and an electrode assembly 13 .

The base 10 is used to provide fixed support, and the fixing member 11 is fixedly connected to the base 10 . The outer contour of the fixing member 11 may be a circle or a regular polygonal star, and a circle is used as an example in the illustration in this embodiment. The base 10 and the fixing member 11 are fixedly connected by gluing, or the two are integrally formed.

Optionally, the material of the fixing member 11 is a semiconductor material, such as monocrystalline silicon or polycrystalline silicon.

The ring member 12 is sleeved on the outer side of the fixing member 11 and connected to the fixing member 11 , and is suspended on the base 10 .

The cross-section of the ring member 12 in the radial direction is wavy and the projection on the base 10 is a circular ring. The ring member 12 is provided with annular grooves 120 at the crests and/or troughs of the waves, so that the ring member 12 is divided into multiple There are two annular portions 1201 spaced apart from each other and a connecting portion 1202 connecting the plurality of annular portions 1201 .

Specifically, the annular member 12 includes at least two wave trough structures 121 connected in sequence and a wave crest 122 connecting two adjacent wave trough structures 121. The wave trough structure 121 includes a first wave arm 1211 extending obliquely from the fixing member 11 toward the base 10, The first wave arm 1211 is toward the wave trough 1212 extending away from the fixing member 11 and parallel to the base 10 , and the second wave arm 1213 extending obliquely from the wave trough 1212 toward the base 10 , the adjacent first wave arm 1211 and the second wave arm 1213 Connected by wave crests 122 , the wave crests 122 are parallel to the substrate 10 and the vertical distance of the wave crests 122 to the substrate 10 is greater than the vertical distance of the wave troughs 121 to the substrate 10 .

The wave crest 122 and the wave trough 1212 include a plurality of annular grooves 120 and a connecting portion 1202 located between two adjacent annular grooves 120 .

Further, the ring member 12 includes an upper surface 12 a away from the base 10 , a lower surface 12 b opposite to the upper surface 12 a , and a side surface 12 c connecting the upper surface 12 a and the lower surface 12 b and away from the fixing member 11 .

Further, in this embodiment, the material of the ring member 12 is a semiconductor material, and the semiconductor material may be monocrystalline silicon, polycrystalline silicon or piezoelectric material, and of course other materials, which are not limited herein.

The electrode assembly 13 is fixedly connected with the base 10, and is used to form a capacitance with the ring member 12, so as to drive the ring member 12 to vibrate along the first and second directions perpendicular to each other, and detect the ring member 12 along the first direction at 45° or Vibration displacement in the third direction at an included angle of 135°.

In this embodiment, as shown in FIG. 3 , the X-axis direction is the first direction and the Y-axis direction is the second direction. However, the first direction is not limited to the X-axis direction only, and the second direction is only the X-axis direction. Y-axis direction.

Specifically, the electrode assembly 13 includes at least one driving electrode 131 and at least one detection electrode 132. The driving electrode 131 and the detection electrode 132 respectively form capacitances with the ring member 12. During operation, an alternating current is applied to the driving electrode 131, so that the driving electrode 131 is 131 drives the ring member 12 to vibrate along the first direction X and the second direction Y, and the detection electrode 132 detects the vibration displacement of the ring member 12 along the third direction.

The electrode assembly 13 is disposed opposite to at least one of the upper surface 12 a , the lower surface 12 b and the side surface 12 c of the annular member 12 to form a capacitor.

Specifically, the electrode assembly 13 includes a plurality of first electrodes 13a arranged at equal intervals in parallel and opposite to the side surface 12c, and a plurality of second electrodes 13b arranged at equal intervals in parallel and opposite to the upper surface 12a. 13a and the second electrode 13b are the driving electrode 131 and/or the detection electrode 132.

Wherein, in this embodiment, the plurality of second electrodes 13b are disposed opposite to the upper surface 12a of the first wave arm 1211 and the upper surface 12a of the second wave arm 1213 .

It can be understood that in other embodiments, the electrode assembly 13 may also be arranged in a manner, which is not limited to this. By arranging the electrode assembly 13 on multiple surfaces, the detection capacitance can be effectively improved, thereby improving the MEMS gyroscope. 1 sensitivity.

Referring to FIG. 6 and FIG. 7 together, FIG. 6 is a schematic diagram of a driving mode simulation of an embodiment of the MEMS gyroscope 1 in FIG. 1 , FIG. 7 is a schematic diagram of a detection mode simulation of an embodiment of the MEMS gyroscope 1 in FIG. 1 , the gyroscope 1 is generally used in electronic products. When the electronic product is not rotated, the ring member 12 vibrates in the first direction X and the second direction Y under the driving force generated by the driving electrode 131. The vibration mode S1 shown.

When the electronic product rotates, according to the Coriolis principle, the angular velocity of the rotation of the electronic product generates the resultant Coriolis force F2 in the third direction D or the third direction M of the ring member 12, and the resultant Coriolis force F2 forces the ring member 12 along the third direction D or the third direction M vibrates to form a detection mode as shown in FIG. 7 , the detection electrode 132 detects the vibration displacement of the ring member 12 along the third direction D or the third direction M, that is, the vibration displacement is calculated according to the change of capacitance, The magnitude of the angular velocity of the rotation of the electronic product can be obtained by arithmetic processing.

Wherein, when the ring member 12 vibrates as described above, it will be deformed. In this embodiment, since the cross-section of the ring member 12 in the radial direction is wavy, the deformation difficulty is reduced, the thermoelastic loss is small, and the MEMS gyroscope is improved. The quality factor of 1, and the ring member 12 is provided with annular grooves 120 at the peaks and/or troughs of the waves, which can release the movable structure ring member 12 and form a gap between the ring member 12 and the electrode assembly 13, thereby forming capacitance, thereby improving The sensitivity of the MEMS gyroscope 1, at the same time, compared with the hemispherical gyroscope in the prior art, it has higher space utilization, and has a smaller etching depth in the axial direction, which reduces the difficulty of the process.

Further, the electrode assembly 13 in this embodiment also includes a functional electrode 133 for frequency modulation or elimination of quadrature errors, and the first electrode 13a and the second electrode 13b are the driving electrode 131 and/or the detection electrode 132 and /or the functional electrode 133 .

Further, in another embodiment, the plurality of annular portions 1201 include a first annular portion, a second annular portion, . . . , an n−1 th annular portion, and an n th annular portion.

Wherein, n is a natural number greater than or equal to 2, and the driving electrode 131 is used to drive the first ring part to the nth ring member to vibrate along the first direction X and the second direction Y, so that the first ring part has the first vibration mode, the The second annular portion has the second vibration mode, ..., the n-1 th annular portion has the n-1 th vibration mode, and the n th annular portion has the n th vibration mode, and the detection electrode 132 is used to detect the first annular portion to Vibration displacement of the nth annular portion in the third direction.

For example, as shown in FIG. 4, n is equal to 2, the plurality of annular portions 1201 include a first annular portion 121a and a second annular portion 121b, and the driving electrodes 131 are used to drive the first annular portion 121a and the second annular member 121b along the first annular portion 121a and the second annular member 121b. Vibrates in one direction X and the second direction Y, so that the first annular portion 121a has a first vibration mode, the second annular portion 121b has a second vibration mode, and the detection electrode 132 is used to detect the first annular portion 121a and the second annular portion 121a. The vibration displacement of the portion 121b along the third direction; for another example, as shown in FIG. 5, n is equal to 4, and the plurality of annular portions 1201 include a first annular portion 121c, a second annular portion 121d, a third annular portion 121e, and a fourth annular portion 121e. The annular portion 121f, the driving electrode 131 is used to drive the first annular portion 121c, the second annular portion 121d, the third annular portion 121e and the fourth annular portion 121f to vibrate in the first direction X and the second direction Y, so that the first annular portion 121c has a first vibration mode, the second annular portion 121d has a second vibration mode, the third annular portion 121e has a third vibration mode, and the fourth annular portion 121f has a fourth vibration mode. In the embodiment, n may also be other natural numbers, the driving electrode 131 drives the plurality of annular portions 1201 of other natural numbers to have vibration modes of other natural numbers, and the detection electrode 132 detects the vibration displacement of the plurality of annular portions 1201 of other natural numbers along the third direction. .

Wherein, in an optional embodiment, there is no phase difference between any two vibration modes of the first vibration mode, the second vibration mode, ..., the n-1th vibration mode, and the nth vibration mode In this case, the driving electrode 131 drives the plurality of annular portions 1201 to vibrate along the first direction X and the second direction Y, and the detection electrode 132 detects the vibration displacement of the plurality of annular portions 1201 along the third direction. The principle shown in FIG. 7 is the same and will not be repeated here.

Further, in another optional embodiment, the first vibration mode, the second vibration mode, ..., the n-1th vibration mode and the nth vibration mode are divided into k groups, and any two groups have Phase difference, k is a natural number greater than or equal to 2 and less than or equal to n. For example, as shown in Figure 4, the ring member has two trough structures. When only the ring groove is set at the peak position, the ring member is divided into two. The annular portions, namely the first annular portion 121a and the second annular portion 121b, k is equal to 2, the first annular portion 121a has a first vibration mode of group k ₁ and the second annular portion 121b has a second vibration mode of group k _{2. The} first annular portion 121a and the second annular portion 121b can vibrate synchronously without a phase difference to achieve a single 2θ vibration mode, and the first annular portion 121a and the second annular portion 121b can also vibrate asynchronously with a phase difference to achieve Vibrational modes of double 2θ. For another example, as shown in FIG. 5 , the annular member is provided with annular grooves at both the crest position and the wave trough position at the same time. At this time, the annular member is divided into four annular parts, namely the first annular part 121c, the second annular part 121d, the third annular part The annular portion 121e and the fourth annular portion 121f. k may be equal to 2, any two of the first annular portion 121c, the second annular portion 121d, the third annular portion 121e and the fourth annular portion 121f are in a group, for example, the first annular portion 121c and the second annular portion 121d have no phase The poor synchronous vibration is the synchronous vibration of the group k ₁ and the third annular portion 121e and the fourth annular portion 121 f without phase difference, and is the group k ₂ , wherein the vibration modes of the _{group k 1} and the group k _{2 have a phase difference.} k may be equal to 3, which is a set of two annular portions, each of the other two annular portions as a group, e.g., a first annular portion 121c and the second annular portion 121d is not synchronized vibration phase _A group k, the third annular portion 121e of the third vibration mode for the group k _b, the fourth annular portion 121f to fourth vibration modes set of k _c, k group _a, group _B and group k _c k vibration mode states have a phase difference. k may also be equal to 4, that is, the first annular portion 121c, the second annular portion 121d, the third annular portion 121e, and the fourth annular portion 121f all have asynchronous vibrations out of phase. It can be understood that when the annular member has more than two trough structures, there are also various optional combinations for the arrangement of the annular slot. Different arrangements of the annular slot lead to different n also. In other optional embodiments, k It can also be other natural numbers, which is not limited here.

For convenience of description, in this embodiment, n is equal to 2 in FIG. 4 as an example for description, that is, the first vibration mode of the first annular portion 121a and the second vibration mode of the second annular portion 121b have a phase difference, the phase difference between the two is 180°.

Specifically, when the electronic product is not rotated during use, the first annular portion 121a and the second annular portion 121b vibrate along the first direction X and the second direction Y under the driving force generated by the driving electrode 131 to form The vibration mode shown in FIG. 8 , that is, the first annular portion 121a forms the first vibration mode S1, and the second annular portion 121b forms the second vibration mode S2.

When the electronic product rotates, according to the Coriolis principle, the angular velocity of the electronic product rotates to generate the first Coriolis force F3 of the first annular portion 121a along the third direction D or the third direction M, and the second annular portion 121b along the third direction M. The second Coriolis force F4 in the third direction D or the third direction M, the first Coriolis force F3 and the second Coriolis force F4 respectively force the first annular portion 121a and the second annular portion 121b along the third direction D Or the third direction M vibrates to form a detection mode as shown in FIG. 9, and the detection electrode 132 detects the first annular portion 121a and the second annular portion 121b along the third direction D or the third direction M in this detection mode. The vibration displacement, that is, the vibration displacement is calculated according to the change of capacitance, and the angular velocity of the rotation of the electronic product can be obtained after calculation processing. Through the above description, the MEMS gyroscope 1 of the present invention can not only realize the single 2θ vibration and detection mode as shown in FIG. 6 and FIG. 7 , but also realize the double 2θ vibration and detection mode as shown in FIG. 8 and FIG. 9 . , and because the cross-section of the ring member 12 in the radial direction is wave-shaped, compared with the traditional hemispherical 2θ modal gyro, it has greater stiffness and higher modal frequency, that is, better anti-vibration characteristics.

It can be understood that, through the same principle as above, in other embodiments, other multiple 2θ vibration and detection modes can also be realized, which depends on the values of n and k, that is, depending on how many the annular member is divided into. The n annular parts are divided into several groups of vibration and detection modes of different phases. For example, when k is 3, the n annular parts are divided into 3 groups, which have 3 vibration and detection modes of different phases respectively. When a drive signal with a phase difference is connected, three 2θ vibration and detection modes can be correspondingly realized.

This embodiment also provides an electronic product, and the electronic product includes the MEMS gyroscope 1 in the above embodiment.

Different from the situation in the prior art, the MEMS gyroscope of this embodiment includes a base; a fixing member, which is fixedly connected to the base; The cross-section in the radial direction is wavy and the projection on the base is circular, and the annular member is provided with annular grooves at the crests and/or troughs of the wave, so that the annular member is divided to form a plurality of annular portions spaced from each other and connect multiple annular portions. The connecting part of the annular part; the electrode assembly is fixedly connected to the base and is used to form a capacitance with the annular part, so as to drive the annular part to vibrate in the first direction and the second direction perpendicular to each other, and detect the annular part along the first direction. The vibration displacement in the third direction with an included angle of 45° or 135°, on the one hand, uses the highly symmetrical feature of the ring-shaped gyroscope to improve the sensitivity of the gyroscope; The quality factor of the gyroscope, and the annular slot can release the ring member of the movable structure and form a gap between the ring member and the electrode assembly, thereby forming a capacitance, thereby improving the sensitivity of the MEMS gyroscope. The hemispherical gyroscope has a higher space utilization rate and a smaller etching depth in the axial direction, which reduces the difficulty of the process; The annular member is divided to form a plurality of annular parts spaced apart from each other, and these annular parts can vibrate in the first direction and the second direction independently with different phases, so that the gyroscope can realize both single 2θ vibration and detection mode, It is also possible to realize dual 2θ vibration and detection modes, and even multiple 2θ vibration and detection modes.

The above descriptions are only the embodiments of the present invention, and are not intended to limit the scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the description and drawings of the present invention, or directly or indirectly applied to other related technologies Fields are similarly included in the scope of patent protection of the present invention.

Claims

A MEMS gyroscope, characterized in that the MEMS gyroscope comprises:

base;

a fixing piece, fixedly connected with the base;

an annular piece, sleeved on the outside of the fixing piece and connected with the fixing piece, and suspended on the base, the cross-section of the annular piece in the radial direction is wavy and the projection on the base is a circle an annular shape, wherein the annular member is provided with annular grooves at the crests and/or troughs of the wave, so that the annular member is divided to form a plurality of annular portions spaced apart from each other and a connecting portion connecting the plurality of annular portions;

The electrode assembly is fixedly connected with the base, and is used for forming a capacitance with the ring member, so as to drive the ring member to vibrate along the first direction and the second direction perpendicular to each other, and detect the movement of the ring member along with the first direction and the second direction. Vibration displacement in the third direction with one direction at an included angle of 45° or 135°.
The MEMS gyroscope according to claim 1, wherein the electrode assembly comprises at least one driving electrode and at least one detecting electrode, the driving electrode and the detecting electrode respectively form a capacitance with the annular member, and the The included angle between the driving electrode and the detection electrode is 45° or 135°; the driving electrode drives the ring member to vibrate along the first direction and the second direction, and the detection electrode detects the ring member along the Vibration displacement in the third direction.
The MEMS gyroscope of claim 2, wherein the annular member includes an upper surface remote from the substrate, a lower surface opposite to the upper surface, and a lower surface connecting the upper surface and the lower surface away from the substrate On the side surface of one side of the fixing member, the electrode assembly is disposed opposite to at least one of the upper surface, the lower surface and the side surface to form a capacitor.
The MEMS gyroscope according to claim 3, wherein the annular member comprises at least two wave trough structures connected in sequence and a wave crest connecting two adjacent wave trough structures, and the wave trough structure comprises a self-aligning member from the fixing member a first wave arm extending obliquely toward the base, a wave trough extending away from the fixture and parallel to the base from the first wave arm, and a second wave extending obliquely away from the base from the wave trough The wave arms, the adjacent first wave arms and the second wave arms are connected by the wave crests, and the wave crests and/or the wave troughs include a plurality of the annular grooves and two adjacent annular grooves. In the connecting portion between the grooves, the wave crest is parallel to the base, and the vertical distance from the wave crest to the base is greater than the vertical distance from the wave trough to the base.
The MEMS gyroscope according to claim 4, wherein the electrode assembly comprises a plurality of first electrodes arranged at equal intervals in parallel and opposite to the side surface, and a plurality of first electrodes arranged at equal intervals in parallel and opposite to the side surface. The second electrode oppositely disposed on the upper surface; the first electrode and the second electrode are the driving electrode and/or the detection electrode. .
The MEMS gyroscope according to claim 5, wherein the plurality of second electrodes are disposed opposite to the upper surface of the first wave arm and the upper surface of the second wave arm.
The MEMS gyroscope of claim 2, wherein the plurality of annular portions include a first annular portion, a second annular portion, . . . , an n−1 th annular portion, and an n th annular portion, wherein n is a natural number greater than or equal to 2;

The driving electrode is used to drive the n annular parts from the first annular part to the n-th annular part to vibrate along the first direction and the second direction respectively, so that the first annular part has a first vibration mode state, the second annular portion has a second vibration mode, ..., the n-1th annular portion has an n-1th vibration mode, and the nth annular portion has an nth vibration mode;

The detection electrodes are used for detecting vibration displacements of n annular portions from the first annular portion to the n-th annular portion along the third direction.
The MEMS gyroscope according to claim 7, wherein the first vibration mode, the second vibration mode, ..., the n-1th vibration mode and the nth vibration mode The states are divided into k groups, any two groups have a phase difference, and k is a natural number greater than or equal to 2 and less than or equal to n.
The MEMS gyroscope of claim 8, wherein the k is equal to 2.
The MEMS gyroscope of claim 9, wherein the n is equal to 2.
The MEMS gyroscope according to claim 7, wherein the first vibration mode, the second vibration mode, ..., the n-1th vibration mode and the nth vibration mode There is no phase difference between any two vibrational modes of the state.
The MEMS gyroscope according to claim 5, wherein the electrode assembly further comprises functional electrodes for frequency modulation or elimination of quadrature errors, and the first electrode and the second electrode are the driving electrode and the second electrode. /or the detection electrode and/or the functional electrode.
An electronic product, characterized in that the electronic product comprises the MEMS gyroscope of any one of claims 1 to 12.