WO2022007090A1

WO2022007090A1 - Gyroscope

Info

Publication number: WO2022007090A1
Application number: PCT/CN2020/107661
Authority: WO
Inventors: 占瞻; 马昭; 杨珊; 李杨; 谭秋喻; 洪燕; 黎家健; 张睿
Original assignee: 瑞声声学科技(深圳)有限公司; 瑞声科技（南京）有限公司
Priority date: 2020-07-09
Filing date: 2020-08-07
Publication date: 2022-01-13
Also published as: CN213120571U

Abstract

A gyroscope (100), comprising a base (1), a first annular piece (10), a fixing piece (20), a second annular piece (30), a first connecting piece (40), a second connecting piece (50), and an electrode assembly. The outline of the first annular piece (10) is a positive 8N angle star, N being a positive integer. The fixing piece (20) is arranged at the inner side of the first annular piece (10) and is spaced apart from the first annular piece (10). The second annular piece (30) is arranged at the outer side of the first annular piece (10) and is spaced apart from the first annular piece (10). The outline of the second annular piece (30) is a positive 8N angle star, N being an integer. The first connecting piece (40) connects the first annular piece (10) and the fixing piece (20). The second connecting piece (50) connects the first annular piece (10) and the second annular piece (30). The electrode assembly is used for forming a capacitor with at least one of the first annular piece (10) and the second annular piece (30), so as to drive the first annular piece (10) and the second annular piece (30) to vibrate along a first direction (X) and a second direction (Y) which are perpendicular to one another, and detect vibration displacement of the first annular piece (10) and the second annular piece (30) along the direction of a 45 degree angle with respect to the first direction (X) or the direction of a 135 degree angle with respect to the first direction (X).

Description

Gyro

technical field

The invention relates to the technical field of gyroscopes, in particular to a gyroscope.

Background technique

Micro mechanical gyroscope, namely MEMS (Micro Electron Mechanical systems) gyroscope, which is a typical angular velocity microsensor, has a very wide range of applications in the consumer electronics market due to its advantages of small size, low power consumption and convenient processing. In recent years, with the gradual improvement of the performance of gyroscopes, they are widely used in automotive, industrial, virtual reality and other fields.

The gyroscope can be divided into two types: linear vibration tuning fork gyroscope and disc gyroscope. Among them, the driving mode mode and detection mode mode of the disc gyroscope are degenerate, with high sensitivity and simple structure. Become a more widely used high-performance gyroscope. However, the disc-shaped gyroscope is limited in structure and space layout, resulting in a low quality factor and a small capacitance that can be accommodated in the structure, which has application limitations.

Therefore, it is necessary to provide a new gyroscope to solve the above problems.

technical problem

The purpose of the present invention is to disclose a gyroscope with a high quality factor.

technical solutions

The object of the present invention is achieved by the following technical solutions: a gyroscope, the gyroscope includes a base; a first annular member suspended on the base, the outer contour of the first annular member is a positive 8N star, N is a positive integer; the fixing member fixed on the base is arranged on the inner side of the first annular member and is spaced from the first annular member; the second annular member suspended on the base is set The outer contour of the second annular member is a positive 8N star, and N is an integer; the first connecting member is connected to the first annular member. and the fixing member; a second connecting member, connecting the first ring member and the second ring member; an electrode assembly, fixedly connected with the base, for connecting with the first ring member and the second ring member At least one of the two ring members forms a capacitor, so as to drive the first ring member and the second ring member to vibrate in a first direction and a second direction perpendicular to each other, and detect the first ring member and the second ring member. The vibration displacement of the two ring members along a direction with an included angle of 45 degrees with the first direction or a direction with an included angle of 135 degrees with the first direction.

Preferably, the electrode assembly includes: a first electrode, fixed on the base and located on the outer periphery of the first ring member, the first electrode and the first ring member form a capacitor; a second electrode, fixed on on the substrate and on the outer periphery of the second ring member, the second electrode and the second ring member form a capacitor; wherein, the first electrode is used to drive the first ring member to be perpendicular to each other vibrates in the first and second directions, and is used to detect the vibration of the first ring member along a direction of 45 degrees with the first direction or a direction of 135 degrees with the first direction, The second electrode is used to drive the second ring member to vibrate along the first direction and the second direction that are perpendicular to each other, the first ring member and the second ring member vibrate asynchronously, and the The second electrode is used to detect the vibration of the second ring member along a direction of 45 degrees with the first direction or a direction of 135 degrees with the first direction.

Preferably, the first connecting member includes a first elastic arm and a plurality of first elastic bodies having elastic hollow rings, and the first elastic arms are connected to the fixing member, the first elastic body and the first elastic body in sequence. the first ring.

Preferably, the plurality of hollow rings are arranged along the diagonal direction of the first annular member to form the first elastic body.

Preferably, the first elastic body includes a first hollow ring, a second hollow ring and a third hollow ring which are sequentially arranged along the diagonal direction of the first annular member.

Preferably, the cross-sectional dimensions of the first hollow ring, the second hollow ring and the third hollow ring gradually decrease in sequence.

Preferably, the second connecting member includes a second elastic arm and a plurality of second elastic bodies having elastic hollow rings, and the second elastic arms are sequentially connected to the first annular member and the second elastic body and the second ring.

Preferably, the plurality of hollow rings are arranged along the diagonal direction of the second annular member to form the second elastic body.

Preferably, the second elastic body includes a fourth hollow ring, a fifth hollow ring and a sixth hollow ring arranged in sequence along the diagonal direction of the second annular member.

Preferably, the cross-sectional dimensions of the fourth hollow ring, the fifth hollow ring and the sixth hollow ring are the same.

beneficial effect

Compared with the prior art, the present invention can realize the gyroscope by setting the outer contour of the first ring member and the second ring member to be a positive 8N star, using the features of easy deformation of the corner of the star and structural symmetry. The matching of the driving mode and the detection mode, on the other hand, the star-shaped structure can improve the quality factor of the gyroscope and improve the performance of the gyroscope. In addition, the first ring member and the second ring member vibrate asynchronously along the mutually perpendicular first and second directions under the interaction of the first electrode and the second electrode, respectively, so that the overall structure has greater rigidity and higher modal frequency for better anti-vibration characteristics.

Description of drawings

FIG. 1 is a schematic structural diagram of a gyroscope removing substrate provided by the present invention.

FIG. 2 is a schematic front view of the structure of the gyroscope removal substrate provided by the present invention.

FIG. 3 is a partial enlarged schematic diagram of the area A in FIG. 1 provided in the present application.

FIG. 4 is a schematic side view of the gyroscope provided by the present invention.

FIG. 5 is a schematic diagram of the gyroscope provided by the present invention in a vibration mode.

FIG. 6 is a schematic diagram of the gyroscope provided by the present invention in a detection mode.

Embodiments of the present invention

The present invention will be further described below with reference to the accompanying drawings and embodiments.

It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relationship between various components under a certain posture (as shown in the accompanying drawings). The relative positional relationship, the movement situation, etc., if the specific posture changes, the directional indication also changes accordingly.

It will also be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.

In addition, the descriptions involving "first", "second", etc. in the present invention are only for descriptive purposes, and should not be understood as indicating or implying their relative importance or implying the number of indicated technical features. Thus, a feature delimited with "first", "second" may expressly or implicitly include at least one of that feature. In addition, the technical solutions between the various embodiments can be combined with each other, but must be based on the realization by those of ordinary skill in the art. When the combination of technical solutions is contradictory or cannot be realized, it should be considered that the combination of such technical solutions does not exist. , is not within the scope of protection required by the present invention.

Please refer to FIGS. 1 to 4 , FIG. 1 is a schematic structural diagram of the gyroscope 100 provided by the present invention with the substrate removed, FIG. 2 is a front view structural schematic diagram of the gyroscope 100 provided by the present invention with the substrate removed, and FIG. 3 is the FIG. 1 provided by the present application A partial enlarged schematic diagram of the area A in the middle, and FIG. 4 is a schematic side view of the gyroscope 100 provided by the present invention.

The invention discloses a gyroscope 100, which is used in an electronic product to detect the angular velocity of the electronic product. The gyroscope 100 includes a base 1 , a first ring member 10 , a fixing member 20 , a second ring member 30 , a first connecting member 40 , a second connecting member 50 , a first electrode 60 and a second electrode 70 . The first ring member 10 and the second ring member 30 are respectively suspended on the base 1 , the fixing member 20 is arranged on the inner side of the first ring member 30 and is spaced apart from the first ring member 30 , and the second ring member 30 is arranged on the first ring member 30 . The outer side of the ring member 10 is spaced apart from the first ring member 10 . The electrode assembly is fixedly connected to the substrate 1, and is used to form a capacitance with at least one of the first annular member 10 and the second annular member 30, so as to drive the first annular member 10 and the second annular member 30 along the Vibrate in the first direction and the second direction perpendicular to each other, and detect the first ring member 10 and the second ring member 30 along the direction of 45 degrees with the first direction or the first direction The included angle is the vibration displacement in the direction of 135 degrees.

The outer contour of the first annular member 10 is a positive 8N star, N is an integer, and N≧1, for example, as shown in FIG. 1 , N is 2, and the outer contour of the first annular member 10 is a positive 16 star.

The fixing member 20 is arranged on the inner side of the first annular member 10 , and the gyroscope 100 is fixed by the fixing member 20 . The cross-sectional shape of the fixing member 20 may be a circle, and the cross-sectional shape of the fixing member 20 may also be a positive 8N star, that is, the same as the outer contour of the first ring member 10 .

The second annular member 30 is arranged on the outer side of the first annular member 10. The outer contour of the second annular member 30 is a positive 8N star, N is an integer, and N≥1. For example, as shown in FIG. 1, N is 2, and the second annular member The outer contour of the piece 30 is a positive 16-pointed star.

The first connecting member 40 connects the first annular member 10 and the fixing member 20 . The second connecting member 50 connects the first ring member 10 and the second ring member 30 .

In this embodiment, the electrode assembly includes a first electrode 60 and a second electrode 70 . The first electrode 60 is fixed on the substrate 1 and is located on the outer circumference of the first ring member 10 , and the second electrode 70 is fixed on the substrate 1 and located on the outer circumference of the second ring member 30 . The first electrode 60 forms a capacitor with the first annular member 10 , and the second electrode 70 forms a capacitor with the second annular member 30 . The first electrode 60 is spaced apart from the second ring member 30 . The first electrode 60 includes a first driving electrode 61 for driving the first ring member 10 to vibrate along a first direction X and a second direction Y that are perpendicular to each other, and a first driving electrode 61 for detecting the clamping of the first ring member 10 along the first direction X. The first detection electrode 62 vibrates in the direction M of 45 degrees or the included angle with the first direction X in the direction M of 135 degrees. The first ring member 10 and the first driving electrode 61 form a first capacitor 81 , and the first ring member 10 and the first detection electrode 62 form a second capacitor 82 .

The second electrode 70 is located on the outer periphery of the second ring member 30 . The second electrode 70 includes a second driving electrode 71 for driving the second ring member 30 to vibrate in the first direction X and the second direction Y which are perpendicular to each other, and a second driving electrode 71 for detecting the clamping of the second ring member 30 with the first direction X. The second detection electrode 72 vibrates in the direction M of 45 degrees or the included angle with the first direction X in the direction M of 135 degrees. The second annular member 30 and the second driving electrode 71 form a third capacitor 83 , and the second annular member 30 and the second detection electrode 72 form a fourth capacitor 84 .

The first ring member 10 and the second ring member 30 vibrate asynchronously.

Please refer to FIGS. 1 to 6 . FIG. 5 is a schematic diagram of the gyroscope 100 provided by the present invention in a vibration mode, and FIG. 6 is a schematic diagram of the gyroscope 100 provided by the present invention in a detection mode.

In this embodiment, when the gyroscope 100 is in use and the electronic product does not rotate, the first ring member 10 and the first driving electrode 61 form the first capacitor 81 . AC, so that the first capacitor 81 drives the first ring member 10 to vibrate along the first direction X and the second direction Y to form the first vibration form S1; the second ring member 30 and the second driving electrode 71 form a third capacitor 83, During operation, an alternating current is applied to the second driving electrode 71 , so that the third capacitor 83 drives the second ring member 30 to vibrate along the first direction X and the second direction Y to form the second vibration mode S2 . The first vibration form S1 and the second vibration form S2 are in an asynchronous state, that is, the phase difference is 180 degrees. It can be understood that, in other embodiments, only one driving electrode may be provided, and a capacitance is formed between the driving electrode and the first annular member or the second annular member, thereby driving the first annular member and the second annular member to vibrate asynchronously.

The first detection electrode 62 is spaced from the first ring member 10 to form a second capacitor 82 , and the second detection electrode 72 is spaced from the second ring member 30 to form a fourth capacitor 84 . When the electronic product rotates, according to the Coriolis principle, the angular velocity of the electronic product rotates to generate a first Coriolis force F3 along the 45-degree direction D or 135-degree direction M and a second Coriolis force F3 along the 45-degree direction D or 135-degree direction M The resultant Coriolis force F4, the resultant first Coriolis force F3 and the second resultant Coriolis force F4 respectively force the first annular member 10 and the second annular member 30 to vibrate along the 45-degree direction D or the 135-degree direction M, as shown in Figure 6 In the detection mode shown, the second capacitor 82 is used to detect the vibration displacement of the first ring member 10 along the 45-degree direction D or the 135-degree direction M, that is, the vibration displacement is calculated according to the change of capacitance; the fourth capacitor 84 is used to detect the first ring member 10. The vibration displacement of the second ring member 30 along the 45-degree direction D or the 135-degree direction M, that is, the vibration displacement is calculated according to the change of capacitance, and then the angular velocity of the electronic product can be obtained through arithmetic processing.

In the gyroscope 100 disclosed in this embodiment, by setting the outer contours of the first annular member 10 and the second annular member 30 to be a positive 8N star, and utilizing the characteristics of easy deformation of the corners of the star and structural symmetry, on the one hand, the The matching of the driving mode and the detection mode of the gyroscope 100 is achieved. On the other hand, the star-shaped structure can improve the quality factor of the gyroscope 100 and improve the performance of the gyroscope 100 . In addition, the first ring member 10 and the second ring member 30 vibrate asynchronously in the mutually perpendicular first and second directions under the interaction of the first electrode 60 and the second electrode 70, respectively, that is, the phase difference is 180 degrees, so that The overall structure has greater stiffness and higher modal frequency for better anti-vibration characteristics.

Optionally, there are 8N first electrodes 60 and each first electrode 60 is V-shaped, and each corner cover of the first ring member 10 is provided with a first electrode 60 . It should be noted that the first electrode 60 is spaced apart from the corners of the first annular member 10, and a capacitance is formed between the first electrode 60 and the corners. By adjusting the capacitance, the first annular member 10 can vibrate in the first direction X and the second direction Y. The required driving force, and the displacement of the first ring member 10 along the 45-degree direction D or the 135-degree direction M can be detected and converted by detecting the capacitance formed between the first electrode 60 and the corner.

There are 8N second electrodes 70 and each second electrode 70 is V-shaped, and each corner of the second ring member 30 is covered with a second electrode 70 . It should be noted that the second electrode 70 and the corners of the second annular member 30 are spaced apart, and a capacitance is formed between the second electrode 70 and the corners. By adjusting the capacitance, the second annular member 30 can be obtained in the first direction X and the second direction Y The driving force required for vibration, and the displacement of the second ring member 30 along the 45-degree direction D or the 135-degree direction D can be detected and converted by detecting the size of the capacitance formed between the second electrode 70 and the corner of the second ring member 30 .

Optionally, the first annular member 10 , the fixing member 20 , the second annular member 30 , the first connecting member 40 , the second connecting member 50 and the connecting member are integrally formed. Preferably, the first ring member 10 , the fixing member 20 , the second ring member 30 , the first connecting member 40 and the second connecting member 50 are integrally formed using a silicon wafer. The silicon wafer can be single crystal silicon or polycrystalline silicon.

Please continue to refer to FIG. 1 , the first connecting member 40 includes a first elastic arm 41 and a plurality of first elastic bodies 43 having elastic hollow rings, and the first elastic arms 41 are sequentially connected to the fixing member 20 , the first elastic body 43 and the The first ring 10 . A plurality of hollow rings can be connected to each other, and a plurality of hollow rings can also be connected together by the first elastic arm 41 .

A plurality of hollow rings can be arranged along the diagonal direction of the first ring member 10 to form the first elastic body 43 , so that the plurality of hollow rings are deformed along the stress concentration direction of the first ring member 10 .

It should be understood that, first of all, the first connecting member 40 adopts an elastic body (three in this embodiment) formed by arranging a plurality of hollow rings along the diagonal direction of the first ring member 10 , which is only an elastic body obtained under the concept of the present invention. a preferred embodiment. This embodiment can better facilitate the movement of the first ring member 10 in the first direction X, the second direction Y and the diagonal line, compared to only arranging the first connecting member 40 on the diagonal line. Secondly, the use of three hollow rings for the plurality of hollow rings of the first connector 40 shown in FIG. 1 is only a preferred embodiment of the present invention. In other embodiments, for example, four or two hollow rings are used. , even a hollow ring, etc., should all fall within the protection scope of the present invention. Finally, as for the shape of the hollow ring, it can be adaptively changed as required, and it can be a round, oval, track-shaped, or other smooth ring.

Specifically, the first elastic body 43 includes a first hollow ring 42 , a second hollow ring 44 and a third hollow ring 46 arranged in sequence along the diagonal direction of the first ring member 10 , and the shape, size and positional relationship are as follows: A better design made according to actual needs. In an optional embodiment, the first hollow ring 42 , the second hollow ring 44 and the third hollow ring 46 are arranged in order from the inside to the outside along the diagonal of the first annular member 10 . The first hollow ring 42 , the second hollow ring 42 , the second hollow ring 46 The cross-sectional dimensions of the ring 44 and the third hollow ring 46 gradually decrease in sequence. Because the first elastic body 43 is located between the fixing member 20 and the first annular member 10 , the space is relatively narrow compared to the second elastic body 53 , so when the cross sections of the first hollow ring 42 , the second hollow ring 44 and the third hollow ring 46 are The size gradually becomes smaller, which can maximize the use of space.

Finally, in order to obtain the best induction effect, the first connecting member 40 of each corner of the first ring member 10 in this embodiment adopts the same shape and structure, which should be understood as a best implementation, generally the same or For some specific needs, designing the connectors on each corner into different structures should also fall within the protection scope of the present invention.

The second connecting member 50 includes a second elastic arm 51 and a plurality of second elastic bodies 53 having elastic hollow rings. The second elastic arms 51 connect the first annular member 10 , the second elastic body 53 and the second annular member in sequence. 30. A plurality of hollow rings can be connected to each other, and a plurality of hollow rings can also be connected together by the second elastic arm 51 .

A plurality of hollow rings can be arranged along the diagonal direction of the second ring member 30 to form the second elastic body 53 , so that the plurality of hollow rings can be deformed along the stress concentration direction of the second ring member 30 .

It should be understood that, first of all, the second connecting member 50 adopts an elastic body (three in this embodiment) formed by arranging a plurality of hollow rings along the diagonal direction of the second ring member 30 , which is only an elastic body obtained under the concept of the present invention. a preferred embodiment. This embodiment can better facilitate the movement of the second ring member 30 in the first direction X, the second direction Y and the diagonal line, compared to only arranging the second connecting member 50 on the diagonal line. Secondly, the use of three hollow rings for the plurality of hollow rings of the second connector 50 shown in FIG. 1 is only a preferred embodiment of the present invention. In other embodiments, for example, four or two hollow rings are used , and even two hollow rings, etc., should all fall within the protection scope of the present invention. Finally, as for the shape of the hollow ring, it can be adaptively changed as required, and it can be a round, oval, track-shaped, or other smooth ring.

Specifically, the second elastic body 53 includes a fourth hollow ring 52 , a fifth hollow ring 54 and a sixth hollow ring 56 arranged in sequence along the diagonal direction of the second annular member 30 , and the shape, size and positional relationship are as follows: A better design made according to actual needs. In an optional embodiment, the fourth hollow ring 52 , the fifth hollow ring 54 and the sixth hollow ring 56 are arranged in sequence from the inside to the outside along the diagonal of the second annular member 30 , and the fourth hollow ring 52 , the fifth hollow ring 56 The cross-sectional dimensions of the ring 54 and the sixth hollow ring 56 are the same. Because the second elastic body 53 is located between the first annular member 10 and the second annular member 30, the space is relatively sufficient, so when the cross-sectional dimensions of the fourth hollow ring 52, the fifth hollow ring 54 and the sixth hollow ring 56 are the same, The fourth hollow ring 52 , the fifth hollow ring 54 and the sixth hollow ring 56 can be subjected to the same force.

Finally, in order to obtain the best induction effect, the shape and structure of the second connecting piece 50 at each corner of the second annular piece 30 in this embodiment are exactly the same, which should be understood as an optimal implementation, generally the same or Designing the elastic elements on each corner into different structures for some specific needs should also fall within the protection scope of the present invention.

The above are only the embodiments of the present invention. It should be pointed out that for those of ordinary skill in the art, improvements can be made without departing from the inventive concept of the present invention, but these belong to the protection of the present invention. Scope.

Claims

A gyroscope, characterized in that the gyroscope comprises

base;

A first annular member suspended on the base, the outer contour of the first annular member is a positive 8N star, and N is a positive integer;

a fixing member fixed on the base, arranged on the inner side of the first ring member and spaced from the first ring member;

The second ring member suspended on the base is arranged on the outer side of the first ring member and is spaced from the first ring member, and the outer contour of the second ring member is a positive 8N star, N is an integer;

a first connecting piece, connecting the first annular piece and the fixing piece;

a second connecting piece, connecting the first annular piece and the second annular piece;

The electrode assembly is fixedly connected with the base, and is used to form a capacitance with at least one of the first annular member and the second annular member, so as to drive the first annular member and the second annular member along the mutual Vibrate vertically in the first direction and the second direction, and detect the first ring member and the second ring member along the direction of 45 degrees with the first direction or the included angle with the first direction Vibration displacement in the direction of 135 degrees.
The gyroscope of claim 1, wherein the electrode assembly comprises:

a first electrode, fixed on the base and located on the outer periphery of the first annular member, the first electrode and the first annular member form a capacitor;

a second electrode, fixed on the base and located on the outer periphery of the second annular member, the second electrode and the second annular member form a capacitor;

Wherein, the first electrode is used to drive the first ring member to vibrate in a first direction and a second direction that are perpendicular to each other, and to detect that the angle between the first ring member and the first direction is 45° the vibration in the direction of 135 degrees or the included angle with the first direction is 135 degrees, the second electrode is used to drive the second ring member to vibrate in the first direction and the second direction that are perpendicular to each other, The first ring member and the second ring member vibrate asynchronously, and the second electrode is used to detect that the second ring member is at a 45-degree angle with the first direction or is parallel to the first direction. The included angle in one direction is vibration in the direction of 135 degrees.
The gyroscope according to claim 1, wherein,

The first connecting piece includes a first elastic arm and a plurality of first elastic bodies with elastic hollow rings, and the first elastic arms are connected to the fixing piece, the first elastic body and the first elastic body in sequence. Ring piece.
The gyroscope according to claim 3, wherein,

The plurality of hollow rings are arranged along the diagonal direction of the first annular member to form the first elastic body.
The gyroscope according to claim 3, wherein,

The first elastic body includes a first hollow ring, a second hollow ring and a third hollow ring which are sequentially arranged along the diagonal direction of the first annular member.
The gyroscope according to claim 5, wherein,

The cross-sectional dimensions of the first hollow ring, the second hollow ring and the third hollow ring gradually decrease in sequence.
The gyroscope according to claim 1, wherein the second connecting member comprises a second elastic arm and a plurality of second elastic bodies having elastic hollow rings, the second elastic arms are sequentially connected to the a first annular member, the second elastic body, and the second annular member.
The gyroscope according to claim 7, wherein,

The plurality of hollow rings are arranged along the diagonal direction of the second annular member to form the second elastic body.
The gyroscope according to claim 7, wherein,

The second elastic body includes a fourth hollow ring, a fifth hollow ring and a sixth hollow ring arranged in sequence along the diagonal direction of the second annular member.
The gyroscope according to claim 9, wherein,

The cross-sectional dimensions of the fourth hollow ring, the fifth hollow ring and the sixth hollow ring are the same.