WO2022007101A1

WO2022007101A1 - Mems gyroscope and electronic product

Info

Publication number: WO2022007101A1
Application number: PCT/CN2020/108373
Authority: WO
Inventors: 马昭; 占瞻; 杨珊; 李杨; 谭秋喻; 洪燕; 黎家健; 张睿
Original assignee: 瑞声声学科技(深圳)有限公司; 瑞声科技（南京）有限公司
Priority date: 2020-07-09
Filing date: 2020-08-11
Publication date: 2022-01-13
Also published as: CN214149332U

Abstract

Disclosed are an MEMS gyroscope (1) and an electronic product. The gyroscope (1) comprises: a base (10); a first annular member (11) suspended on the base (10); a second annular member (12) sleeved over the outer side of the first annular member (11) and arranged spaced apart from the first annular member (11); a first connecting member (13) for connecting the first annular member (11) to the second annular member (12); a fixing member (14); a second connecting member (15) for connecting the second annular member (12) to the fixing member (14); and an electrode assembly (16) forming a capacitance with the first annular member (11) and the second annular member (12). In the gyroscope (1), the characteristic of the geometric structure of a star-shaped gyroscope being highly symmetrical is used, and a capacitance is formed by the electrode assembly (16) and at least one of the first annular member (11) and the second annular member (12), such that the capacitance of the gyroscope (1) is improved and the sensitivity is improved; in addition, the characteristic of a star-shaped gyroscope being easily deformed is used, and the thermal elasticity loss is small during vibration, such that the quality factor of the gyroscope (1) is improved.

Description

MEMS gyroscopes and electronics

technical field

The invention relates to the technical field of gyroscopes, in particular to a MEMS gyroscope and electronic products.

Background technique

Micro mechanical gyroscope, namely MEMS (Micro Electron Mechanical systems) gyroscope, which is a typical angular velocity microsensor, has a very wide range of applications in the consumer electronics market due to its advantages of small size, low power consumption and convenient processing. In recent years, with the gradual improvement of the performance of MEMS gyroscopes, they are widely used in automotive, industrial, virtual reality and other fields.

The geometric structure of the ring gyroscope is highly symmetrical, the driving/detecting modes of the gyroscope are exactly the same, the sensitivity is high, and the structure is simple. However, the existing ring gyroscope is limited in structure and space layout, and the capacitance that can be accommodated is small, and there are application limitations.

Therefore, it is necessary to provide a new MEMS gyroscope to solve the above problems.

technical problem

The invention mainly provides a MEMS gyroscope and an electronic product, which can improve the capacitance of the gyroscope and improve the sensitivity and quality factor.

technical solutions

In order to solve the above technical problems, a technical solution adopted by the present invention is to provide a MEMS gyroscope, the MEMS gyroscope comprises: a base; a first annular member is in the shape of a positive 8N-pointed star and is suspended on the base, N is a positive integer; the second ring member, in the shape of a positive 8N-pointed star, is sleeved on the outside of the first ring member and is spaced from the first ring member, and is suspended on the base; the first connecting member , respectively connecting the first ring member and the second ring member; a fixing member, fixedly connected to the base, sleeved on the outside of the second ring member and spaced from the second ring member; the second ring member a connecting piece, which is respectively connected to the second annular piece and the fixing piece; an electrode assembly, which is fixedly connected to the base, and used to form a capacitor with at least one of the first annular piece and the second annular piece, To drive the first ring member and the second ring member to vibrate along the first and second directions perpendicular to each other, and detect the first ring member and the second ring member along the first direction and the second ring member. The included angle is 45 degrees or the vibration displacement in the direction of 135 degrees with the first direction.

In a specific embodiment, the electrode assembly includes a first electrode group and a second electrode group, the first electrode group includes a first driving electrode and a first detection electrode, the first driving electrode and the first The ring members are arranged at intervals to form a first capacitor, and the first capacitor is used to drive the first ring member to vibrate along the first direction and the second direction to form a first vibration mode; the second electrode group It includes a second drive electrode and a second detection electrode, the second drive electrode and the second ring member are spaced apart to form a third capacitor, and the third capacitor is used to drive the second ring member along the first direction and The second direction vibrates to form a second vibration mode; the first vibration mode and the second vibration mode vibrate asynchronously.

In a specific embodiment, the first detection electrode and the first ring member are spaced apart to form a second capacitor, and the second capacitor is used to detect the first ring member along the 45-degree direction or the Vibration displacement in the direction of 135 degrees, the second detection electrode is spaced from the second ring member to form a fourth capacitor, and the fourth capacitor is used to detect the second ring member along the 45 degree direction or the 135 degree Vibration displacement in the direction.

In a specific embodiment, the first electrode group is annularly arranged on the inner side of the first annular member, and the second electrode group is annularly arranged on the outer side of the second annular member.

In a specific embodiment, the number of the first electrode group and the second electrode group are both two, and the two first electrode groups are annularly arranged on the inner side and the outer side of the first annular member, respectively, The two second electrode groups are annularly arranged on the inner side and the outer side of the second annular member, respectively.

In a specific embodiment, the first connecting member and the second connecting member are both elastic connecting members.

In a specific embodiment, the number of the first connector and the second connector are multiple, and the plurality of first connectors and the plurality of second connectors are arranged in a circular array.

In a specific embodiment, the electrode assembly has a positive 8N star shape.

In a specific embodiment, at least one of the first electrode group and the second electrode group further includes functional electrodes, and the functional electrodes include a plurality of electrodes for frequency modulation or elimination of quadrature errors.

In order to solve the above technical problem, a technical solution adopted by the present invention is to provide an electronic product, and the electronic product includes the above-mentioned MEMS gyroscope.

beneficial effect

The beneficial effects of the present invention are: different from the situation in the prior art, the MEMS gyroscope provided by the present invention includes a base; the first annular member is in the shape of a positive 8N star and is suspended on the base; the second annular member is in the form of a positive 8N angle The star shape is sleeved on the outside of the first ring member and is spaced from the first ring member, and is suspended on the base; the first connecting member is respectively connected to the first ring member and the second ring member; the fixing member is fixed to the base connection, sleeved on the outside of the second ring member and spaced from the second ring member; the second connection member is respectively connected with the second ring member and the fixing member; the electrode assembly is fixedly connected with the base and used for connecting with the first ring member and the fixing member. At least one of the second ring members forms a capacitor, so as to drive the first ring member and the second ring member to vibrate in the first and second directions that are perpendicular to each other, and detect that the first ring member and the second ring member are parallel to the first ring member and the second ring member. The angle of the direction is 45 degrees or the vibration displacement of the first direction is 135 degrees. On the one hand, the geometric structure of the star-shaped gyroscope is highly symmetrical, and through the first ring member and the second ring member. At least one of them forms a capacitor with the electrode assembly, which improves the capacitance of the gyroscope and improves the sensitivity. On the other hand, the use of the star-shaped easy-to-deform characteristic reduces the thermal elastic loss during vibration and improves the quality factor of the gyroscope.

Description of drawings

In order to illustrate the technical solutions in the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without any creative effort, among which.

FIG. 1 is a schematic structural diagram of a MEMS gyroscope 1 provided by the present invention.

FIG. 2 is a schematic three-dimensional structural diagram of the MEMS gyroscope 1 shown in FIG. 1 with the substrate removed.

FIG. 3 is a schematic front view of the three-dimensional structure shown in FIG. 2 .

FIG. 4 is a schematic diagram of a driving mode simulation of the MEMS gyroscope 1 in FIG. 1 .

FIG. 5 is a schematic diagram of a detection mode simulation of the MEMS gyroscope 1 in FIG. 1 .

FIG. 6 is an enlarged schematic view of part A in FIG. 3 .

FIG. 7 is an enlarged schematic view of part B in FIG. 3 .

Embodiments of the present invention

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relationship between various components under a certain posture (as shown in the accompanying drawings). The relative positional relationship, the movement situation, etc., if the specific posture changes, the directional indication also changes accordingly.

It will also be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.

In addition, the descriptions involving "first", "second", etc. in the present invention are only for descriptive purposes, and should not be understood as indicating or implying their relative importance or implying the number of indicated technical features. Thus, a feature delimited with "first", "second" may expressly or implicitly include at least one of that feature. In addition, the technical solutions between the various embodiments can be combined with each other, but must be based on the realization by those of ordinary skill in the art. When the combination of technical solutions is contradictory or cannot be realized, it should be considered that the combination of such technical solutions does not exist. , is not within the scope of protection required by the present invention.

Please refer to FIG. 1 , FIG. 2 and FIG. 3 , the MEMS gyroscope 1 in this embodiment includes a substrate 10 , a first annular member 11 , a second annular member 12 , a first connecting member 13 , a fixing member 14 , and a second connecting member 15 and electrode assembly 16.

Among them, the base 10 is used to provide fixed support.

The first annular member 11 is a positive 8N-pointed star, and N is a positive integer. For example, in this embodiment, the first annular member 11 is a positive 16-pointed star.

Wherein, the first annular member 11 is suspended on the base 10 .

The second ring member 12 is sleeved on the outer side of the first ring member 11 and is spaced from the first ring member 11, and is suspended on the base 10, that is, the first ring member 11 is located inside the second ring member 12 and is adjacent to the first ring member 11. The two ring members 12 are arranged at intervals.

The second annular member 12 is in the shape of a positive 8N-pointed star, and N is a positive integer. For example, in this embodiment, the second annular member 12 is a positive 16-pointed star.

The first connecting member 13 is respectively connected to the first annular member 11 and the second annular member 12, that is, the first connecting member 13 is disposed between the first annular member 11 and the second annular member 12, and one end of the first connecting member 13 is connected to The first ring member 11 is connected to the second ring member 12 at the other end.

The number of the first connecting pieces 13 is plural, and the plural first connecting pieces 13 are arranged in a circular array. The circumferential direction of 11 is arranged in a circular array.

Optionally, the number of the first connectors 13 is 4M, and M is a positive integer. For example, in this embodiment, the number of the first connectors 13 is 8.

Further, in this embodiment, the first connecting member 13 is an elastic connecting member, for example, a coil spring.

The fixing member 14 is fixedly connected with the base 10 to provide fixed support, the base 10 and the fixing member 14 are fixedly connected by gluing, or, the two are integrally formed, and the outer contour of the fixing member 14 can be a circle or a regular polygonal star, In this embodiment, a regular polygonal star is used as an example.

The fixing member 14 is sleeved on the outer side of the second ring member 12 and is spaced from the second ring member 12 .

The second connecting member 15 is respectively connected to the second annular member 12 and the fixing member 14 , that is, the second connecting member 15 is disposed between the second annular member 12 and the fixing member 14 , and one end of the second connecting member 15 is connected to the second annular member 12, the other end is connected to the fixing piece 14.

Wherein, the number of the second connecting members 15 is multiple, and the multiple second connecting members 15 are arranged in a circular array. Circular array arrangement.

Optionally, the number of second connectors 15 is 4M, and M is a positive integer. For example, in this embodiment, the number of second connectors 15 is 8.

Further, in this embodiment, the second connecting member 15 is an elastic connecting member, for example, a spring.

The electrode assembly 16 is fixedly connected to the base 10 for forming a capacitance with at least one of the first annular member 11 and the second annular member 12, so as to drive the first annular member 11 and the second annular member 12 along a first direction perpendicular to each other Vibrate in and the second direction, and detect the vibration displacement of the first ring member 11 and the second ring member 12 along a direction of 45 degrees with the first direction or a direction of 135 degrees with the first direction.

In this embodiment, as shown in FIG. 3 , the X-axis direction is the first direction and the Y-axis direction is the second direction. However, the first direction is not limited to the X-axis direction only, and the second direction is only the X-axis direction. Y-axis direction.

Referring to FIGS. 4 to 7 together, the electrode assembly 16 includes a first electrode group 161 and a second electrode group 162 .

The first electrode group 161 includes a first driving electrode 1611 and a first detection electrode 1612 . The first driving electrode 1611 is spaced apart from the first annular member 11 to form a first capacitor 1601 . During operation, an alternating current is applied to the first driving electrode 1611, so that the first capacitor 1601 generates a driving force to drive the first ring member 11 to vibrate along the first direction X and the second direction Y to form the first vibration mode S1. The first detection electrode 1612 is spaced apart from the first annular member 11 to form a second capacitor 1602 . The second electrode group 162 includes a second driving electrode 1621 and a second detection electrode 1622 . The second driving electrode 1621 and the second ring member 12 are spaced apart to form a third capacitor 1603. During operation, an alternating current is input to the third capacitor 1603, so that the third capacitor 1603 drives the second ring member 12 along the first direction X and the second ring member 12. Two-direction Y vibration forms a second vibration form S2, and the first vibration form S1 and the second vibration form S2 vibrate asynchronously. The second detection electrode 1622 is spaced apart from the second annular member 12 to form a fourth capacitor 1604 .

Specifically, the gyroscope 1 is generally used in electronic products. When the electronic product is not rotated, the first annular member 11 is driven by the driving force generated by the first capacitor 1601 along the first direction X and the second Vibrating in the direction Y, the second annular member 12 vibrates along the first direction X and the second direction Y under the driving action of the driving force generated by the third capacitor 1063, forming a vibration mode as shown in FIG. 4 .

The above-mentioned asynchronous vibration means that when the first ring member 11 and the second ring member 12 vibrate, the vibration directions are opposite, and the vibration phases differ by 180°. For example, as shown in FIG. 4 , in the X direction, the first ring member When the 11 vibrates outward, the second ring member 12 vibrates inward, and in the Y direction, the first ring member 11 vibrates inward, and the second ring member 12 vibrates outward.

When the electronic product rotates, according to the Coriolis principle, the angular velocity of the electronic product rotation generates the first Coriolis force F3 of the first ring member 11 along the 45-degree direction D and the 135-degree direction M, and the second ring member 12 along the 45-degree direction M. The second Coriolis force F4 in the direction D and the 135-degree direction M, the first Coriolis force F3 and the second Coriolis force F4 force the first ring member 11 and the second ring member 12 along the 45-degree directions D and F4 respectively. The 135-degree direction M vibrates to form the detection mode as shown in Figure 5. The second capacitor 1602 is used to detect the vibration displacement of the first ring member 11 along the 45-degree direction D or the 135-degree direction M, that is, the vibration is calculated according to the change in capacitance. Displacement; the fourth capacitor 1604 is used to detect the vibration displacement of the second ring member 12 along the 45-degree direction D or the 135-degree direction M, that is, the vibration displacement is calculated according to the change in capacitance, and the angular velocity of the electronic product can be obtained through arithmetic processing. .

Wherein, when the first ring member 11 and the second ring member 12 vibrate as described above, deformation will occur. In this embodiment, since the first connecting member 13 and the second connecting member 15 are both elastic connecting members, therefore , when the first ring member 11 and the second ring member 12 are deformed, the first connecting member 13 and the second connecting member 15 are also deformed, so that the gyroscope 10 in this embodiment has greater rigidity , the higher the modal frequency, the better anti-vibration characteristics.

It can be understood that in this embodiment, the first ring member 11 is driven to vibrate by the first driving electrode 1611, the vibration displacement is detected by the first detection electrode 1612, the second ring member 12 is driven to vibrate by the second driving electrode 1621, and the vibration displacement is detected by the first detection electrode 1612. The second detection electrode 1622 detects the vibration displacement of the second ring member 12. In other embodiments, the first ring member 11 and the second ring member 12 may be driven to vibrate by only one driving electrode. The first capacitor 1602 formed by the first ring member 11 or the third capacitor 1603 formed by the second driving electrode 1621 and the second ring member 12 drives the first ring member 11 and the second ring member 12 to vibrate in the first and second directions , the vibration displacement of the first ring member 11 and the second ring member 12 can also be detected by only one detection electrode, for example, the third capacitor 1603 formed by the first detection electrode 1612 and the first ring member 11 or the second drive electrode 1622 and the The fourth capacitor 1604 formed by the second annular member 12 detects the vibration displacement of the first annular member 11 and the second annular member 12 along the 45-degree direction or the 135-degree direction, and finally obtains the magnitude of the angular velocity of the rotation of the electronic product. The principle is the same as the above The description is the same and will not be repeated here.

Further, at least one of the first electrode assembly 161 and the second electrode assembly 162 in this embodiment further includes a functional electrode 1613, and the functional electrode 1613 includes a plurality of electrodes that can be respectively used for frequency modulation or elimination of quadrature errors. In this embodiment, In this manner, both the first electrode assembly 161 and the second electrode assembly 162 include a plurality of functional electrodes 1613 .

Optionally, in this embodiment, the first electrode group 161 is annularly arranged on the inner side of the first annular member 11 , and the second electrode group 162 is annularly arranged on the outer side of the second annular member 12 . Of course, in other embodiments, such as , the arrangement of the first electrode group 161 and the second electrode group 162 is not limited to this. For example, the number of the first electrode group 161 and the second electrode group 162 is two, and the two first electrode groups 161 are respectively arranged in a ring shape. On the inner and outer sides of the first annular member 11 , the two second electrode groups 162 are annularly arranged on the inner and outer sides of the second annular member 12 , respectively.

Optionally, the electrode assembly 16 is in the shape of a positive 8N-pointed star, and N is a positive integer. For example, in this embodiment, the electrode assembly 16 is in the shape of a positive 16-pointed star.

This embodiment also provides an electronic product, and the electronic product includes the MEMS gyroscope 1 in the above embodiment.

Different from the prior art, the MEMS gyroscope provided by the present invention includes a base; a first annular member is in the shape of a positive 8N star and is suspended on the base; the second annular member is in the shape of a positive 8N star and is sleeved on the first annular The outer side of the component is spaced from the first annular component and suspended on the base; the first connecting component is connected to the first annular component and the second annular component respectively; the fixing component is fixedly connected to the base and sleeved on the second annular component The outer side is arranged at intervals from the second annular member; the second connecting member is respectively connected to the second annular member and the fixing member; the electrode assembly is fixedly connected to the base and used to form with at least one of the first annular member and the second annular member Capacitance to drive the first ring member and the second ring member to vibrate in the first and second directions perpendicular to each other, and detect that the first ring member and the second ring member are 45 degrees or 45 degrees from the first direction. The vibration displacement in the 135-degree direction with the included angle of the first direction, on the one hand, utilizes the highly symmetrical feature of the star-shaped gyroscope geometric structure, and forms a capacitance with the electrode assembly through at least one of the first ring member and the second ring member, The capacitance of the gyroscope is increased, and the sensitivity is improved. On the other hand, the use of the star-shaped easy-to-deform property reduces the thermoelastic loss during vibration and improves the quality factor of the gyroscope.

The above descriptions are only the embodiments of the present invention, and are not intended to limit the scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the description and drawings of the present invention, or directly or indirectly applied to other related technologies Fields are similarly included in the scope of patent protection of the present invention.

Claims

A MEMS gyroscope, characterized in that the MEMS gyroscope comprises:

base;

The first annular member is in the shape of a positive 8N-pointed star and is suspended on the base, and N is a positive integer;

A second ring member, in the shape of a positive 8N star, is sleeved on the outside of the first ring member and is spaced from the first ring member, and is suspended on the base;

a first connecting piece, respectively connecting the first annular piece and the second annular piece;

a fixing piece, fixedly connected with the base, sleeved on the outside of the second annular piece and arranged at an interval from the second annular piece;

a second connecting piece, respectively connecting the second annular piece and the fixing piece;

The electrode assembly is fixedly connected with the base, and is used to form a capacitance with at least one of the first annular member and the second annular member, so as to drive the first annular member and the second annular member along the mutual Vibrate vertically in the first direction and the second direction, and detect the first ring member and the second ring member along the direction of 45 degrees with the first direction or the included angle with the first direction Vibration displacement in the direction of 135 degrees.
The MEMS gyroscope according to claim 1, wherein the electrode assembly includes a first electrode group and a second electrode group, the first electrode group includes a first driving electrode and a first detection electrode, and the first electrode group includes a first driving electrode and a first detecting electrode. A driving electrode is spaced from the first ring member to form a first capacitor, and the first capacitor is used to drive the first ring member to vibrate along the first direction and the second direction to form a first vibration mode state;

The second electrode group includes a second drive electrode and a second detection electrode, the second drive electrode and the second ring member are spaced apart to form a third capacitor, and the third capacitor is used to drive the second ring member along the edge. The first direction and the second direction vibrate to form a second vibration mode;

The first vibration mode vibrates asynchronously with the second vibration mode.
The MEMS gyroscope according to claim 2, wherein the first detection electrode is spaced from the first ring member to form a second capacitor, and the second capacitor is used to detect the edge of the first ring member. Vibration displacement in the 45-degree direction or the 135-degree direction, the second detection electrode and the second ring member are spaced apart to form a fourth capacitor, and the fourth capacitor is used to detect the direction of the second ring member along the Vibration displacement in the 45 degree direction or the 135 degree direction.
The MEMS gyroscope according to claim 2, wherein the first electrode group is annularly arranged on the inner side of the first annular member, and the second electrode group is annularly arranged on the outer side of the second annular member .
The MEMS gyroscope according to claim 2, wherein the number of the first electrode group and the second electrode group is two, and the two first electrode groups are annularly arranged on the first electrode group respectively. Inside and outside of an annular member, the two second electrode groups are annularly arranged on the inside and outside of the second annular member, respectively.
The MEMS gyroscope according to claim 2, wherein the first connector and the second connector are elastic connectors.
The MEMS gyroscope according to claim 1, wherein the number of the first connector and the second connector are multiple, and the first connector and the second connector The connecting pieces are arranged in a circular array.
The MEMS gyroscope according to claim 1, wherein the electrode assembly is in a positive 8N star shape.
The MEMS gyroscope according to claim 2, wherein at least one of the first electrode group and the second electrode group further includes a functional electrode, and the functional electrode includes a function for frequency modulation or elimination of quadrature error. of multiple electrodes.
An electronic product, characterized in that, the electronic product comprises the MEMS gyroscope of any one of claims 1 to 9.