CN213985134U - MEMS gyroscope and electronic product - Google Patents
MEMS gyroscope and electronic product Download PDFInfo
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- CN213985134U CN213985134U CN202021346590.0U CN202021346590U CN213985134U CN 213985134 U CN213985134 U CN 213985134U CN 202021346590 U CN202021346590 U CN 202021346590U CN 213985134 U CN213985134 U CN 213985134U
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
Abstract
The utility model provides a MEMS gyroscope and electronic product, the MEMS gyroscope includes the basement, a fixed part, loop forming element and electrode subassembly, drive the loop forming element through the electrode subassembly and vibrate along mutually perpendicular's first direction and second direction, and detect the vibration displacement of loop forming element along the third direction that is 45 or 135 degrees contained angle with the first direction, utilize the highly symmetrical characteristic of loop forming element geometry on the one hand, improve the sensitivity of gyroscope, wavy loop forming element on the other hand reduces the degree of difficulty of warping, improve the quality factor of gyroscope, and the annular fluting can release the active structure loop forming element, and form the clearance between loop forming element and the electrode subassembly, thereby form the electric capacity, and then improve the sensitivity of MEMS gyroscope, simultaneously, compare in the hemisphere gyroscope among the prior art, have higher space utilization, have less sculpture degree in the axial, the process difficulty is reduced.
Description
Technical Field
The utility model relates to a gyroscope technical field especially relates to a MEMS gyroscope and electronic product.
Background
A micro Mechanical gyroscope, i.e., a mems (micro Electro Mechanical systems) gyroscope, is a typical angular velocity microsensor, and has a very wide application in the consumer electronics market due to its advantages of small size, low power consumption, and convenient processing. With the gradual improvement of the performance of the MEMS gyroscope in recent years, the MEMS gyroscope is widely applied to the fields of automobiles, industry, virtual reality and the like.
The hemispherical gyroscope has the advantages of highly symmetrical geometric structure, completely same driving/detecting modes, high sensitivity and simple structure, and gradually becomes a practical and relatively wide high-performance gyroscope. However, the hemispherical gyroscope has a low space utilization rate, a large etching depth in the axial direction, and high process difficulty.
Therefore, there is a need to provide a new MEMS gyroscope to solve the above problems.
SUMMERY OF THE UTILITY MODEL
The utility model mainly provides a MEMS gyroscope and electronic product can improve the quality factor of gyroscope, reduces the technology degree of difficulty.
In order to solve the technical problem, the utility model discloses a technical scheme be: providing a MEMS gyroscope, the MEMS gyroscope comprising: a substrate; the fixing piece is fixedly connected with the substrate; the annular piece is sleeved on the outer side of the fixing piece, connected with the fixing piece and suspended on the substrate, the section of the annular piece in the radial direction is wavy, the projection of the annular piece on the substrate is annular, and annular grooves are formed in the wave crests and/or the wave troughs of the annular piece, so that the annular piece is divided into a plurality of annular parts which are spaced from each other and connecting parts for connecting the annular parts; and the electrode assembly is fixedly connected with the substrate and is used for forming capacitance with the annular piece so as to drive the annular piece to vibrate along a first direction and a second direction which are perpendicular to each other and detecting the vibration displacement of the annular piece along a third direction forming an included angle of 45 degrees or 135 degrees with the first direction.
In a specific embodiment, the electrode assembly comprises at least one driving electrode and at least one detecting electrode, the driving electrode and the detecting electrode respectively form capacitance with the annular member, and the included angle between the driving electrode and the detecting electrode is 45 degrees or 135 degrees; the drive electrode drives the ring member to vibrate in the first direction and the second direction, and the detection electrode detects vibrational displacement of the ring member in the third direction.
In a specific embodiment, the ring member includes an upper surface remote from the base, a lower surface opposite to the upper surface, and a side surface connecting the upper surface and the lower surface and on a side remote from the fixing member, and the electrode assembly is disposed opposite to at least one of the upper surface, the lower surface, and the side surface to form a capacitor.
In a specific embodiment, the ring member includes at least two valley structures connected in sequence and a peak connecting two adjacent valley structures, the valley structures include a first arm extending obliquely from the fixing member toward the base, a valley extending from the first arm toward the far away from the fixing member and parallel to the base, and a second arm extending obliquely from the valley toward the far away from the base, the adjacent first and second arms are connected by the peak, each of the peak and the valley includes a plurality of annular slots and the connecting portion located between two adjacent annular slots, and the peak is parallel to the base and the perpendicular distance from the peak to the base is greater than the perpendicular distance from the valley to the base.
In one embodiment, the electrode assembly includes a plurality of first electrodes arranged in parallel and equidistantly spaced apart and disposed opposite the side surface and a plurality of second electrodes arranged in parallel and equidistantly spaced apart and disposed opposite the top surface; the first electrode and the second electrode are the driving electrode and/or the detecting electrode.
In a specific embodiment, the plurality of second electrodes are disposed opposite an upper surface of the first wave arm and an upper surface of the second wave arm.
In a specific embodiment, the plurality of annular portions include a first annular portion, a second annular portion, … …, an n-1 annular portion, and an nth annular portion, where n is a natural number greater than or equal to 2; the driving electrode is used for driving n annular parts of the first annular part to the n annular part to vibrate along the first direction and the second direction respectively, so that the first annular part has a first vibration mode, the second annular part has a second vibration mode, … …, the n-1 annular part has an n-1 vibration mode and the n annular part has an n vibration mode; the detection electrode is configured to detect a vibrational displacement of n annular portions of the first to nth annular portions in the third direction.
In a specific embodiment, the first vibration mode, the second vibration mode, … …, the n-1 vibration mode, and the nth vibration mode are divided into k groups, any two groups have a phase difference, and k is a natural number greater than or equal to 2 and less than or equal to n.
In one embodiment, k is equal to 2.
In a specific embodiment, said n is equal to 2.
In a specific embodiment, there is no phase difference between any two of the first vibration mode, the second vibration mode, … …, the n-1 vibration mode, and the nth vibration mode.
In a specific embodiment, the electrode assembly further includes a functional electrode for frequency modulation or eliminating quadrature error, and the first electrode and the second electrode are the driving electrode and/or the detecting electrode and/or the functional electrode.
In order to solve the above technical problem, another technical solution adopted by the present application is: an electronic product is provided, which comprises the MEMS gyroscope.
The utility model has the advantages that: unlike the prior art, the MEMS gyroscope provided by the present invention includes a substrate; the fixing piece is fixedly connected with the substrate; the annular piece is sleeved on the outer side of the fixing piece, connected with the fixing piece and suspended on the substrate, the section of the annular piece in the radial direction is wavy, the projection of the annular piece on the substrate is annular, and annular grooves are formed in the wave crests and/or the wave troughs of the annular piece, so that the annular piece is divided into a plurality of annular parts which are spaced from each other and connecting parts for connecting the annular parts; the electrode assembly is fixedly connected with the substrate and used for forming capacitance with the annular piece, so that the annular piece can vibrate along a first direction and a second direction which are perpendicular to each other, and the annular piece can be detected to vibrate along a third direction which forms an included angle of 45 degrees or 135 degrees with the first direction, on one hand, the sensitivity of the gyroscope is improved by utilizing the characteristic of high symmetry of the geometric structure of the annular gyroscope, on the other hand, the wavy annular piece reduces the deformation difficulty and improves the quality factor of the gyroscope, the annular groove can release the annular piece with a movable structure, and a gap between the annular piece and the electrode assembly is formed, so that the capacitance is formed, and the sensitivity of the MEMS gyroscope is improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained without inventive work, wherein:
fig. 1 is a schematic structural diagram of a MEMS gyroscope provided by the present invention.
FIG. 2 is a schematic perspective view of the MEMS gyroscope shown in FIG. 1 with the substrate removed;
FIG. 3 is a schematic front view of the three-dimensional structure shown in FIG. 2;
FIG. 4 is a schematic cross-sectional view of the structure shown in FIG. 3, taken along A-A;
FIG. 5 is a schematic cross-sectional view of the structure shown in FIG. 3, taken in the direction B-B;
FIG. 6 is a schematic diagram of a simulation of a drive mode of an embodiment of the MEMS gyroscope of FIG. 1;
FIG. 7 is a schematic diagram of a simulation of a detection mode of an embodiment of the MEMS gyroscope of FIG. 1;
FIG. 8 is a driving mode simulation schematic diagram of another embodiment of the MEMS gyroscope of FIG. 1;
fig. 9 is a schematic diagram of a simulation of a detection mode of another embodiment of the MEMS gyroscope of fig. 1.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
It should be noted that all the directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.
It will also be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
In addition, the descriptions related to "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit ly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
Referring to fig. 1 to 5, a MEMS gyroscope 1 according to the present embodiment includes a substrate 10, a fixed member 11, a ring member 12, and an electrode assembly 13.
Wherein, the base 10 is used for providing a fixed support, the fixing member 11 is fixedly connected with the base 10, the outer contour of the fixing member 11 can be a circle or a regular polygon star, and the circle is taken as an example in the figure of the present embodiment. The base 10 and the fixing member 11 are fixedly connected by gluing, or, they are integrally formed.
Optionally, the fixing member 11 is made of a semiconductor material, such as monocrystalline silicon or polycrystalline silicon.
The ring member 12 is sleeved outside the fixing member 11, connected to the fixing member 11, and suspended on the base 10.
The ring 12 has a wavy cross section in the radial direction and a circular projection on the substrate 10, and the ring 12 is provided with an annular groove 120 at a peak and/or a trough, so that the ring 12 is divided into a plurality of spaced annular portions 1201 and a connecting portion 1202 connecting the plurality of annular portions 1201.
Specifically, the ring member 12 includes at least two valley structures 121 connected in sequence and a peak 122 connecting two adjacent valley structures 121, the valley structure 121 includes a first wave arm 1211 extending obliquely from the fixing member 11 toward the base 10, a valley 1212 extending from the first wave arm 1211 toward the far away from the fixing member 11 and parallel to the base 10, and a second wave arm 1213 extending obliquely from the valley 1212 toward the far away from the base 10, the adjacent first wave arm 1211 and the second wave arm 1213 are connected by the peak 122, the peak 122 is parallel to the base 10, and a vertical distance from the peak 122 to the base 10 is greater than a vertical distance from the valley 121 to the base 10.
Wherein the wave crests 122 and the wave troughs 1212 include a plurality of annular slots 120 and a connecting portion 1202 between two adjacent annular slots 120.
Further, the ring-shaped member 12 includes an upper surface 12a away from the base 10, a lower surface 12b opposite to the upper surface 12a, and a side surface 12c connecting the upper surface 12a and the lower surface 12b and on a side away from the fixing member 11.
Further, in the present embodiment, the material of the ring 12 is a semiconductor material, and the semiconductor material may be monocrystalline silicon, polycrystalline silicon, or a piezoelectric material, or may be other materials, which is not limited herein.
The electrode assembly 13 is fixedly connected to the base 10 for forming capacitance with the ring 12 to drive the ring 12 to vibrate in a first direction and a second direction perpendicular to each other, and to detect vibrational displacement of the ring 12 in a third direction at an angle of 45 ° or 135 ° to the first direction.
In the present embodiment, the X-axis direction is taken as the first direction and the Y-axis direction is taken as the second direction as shown in fig. 3 as an example, but the first direction is not limited to the X-axis direction only and the second direction is taken as the Y-axis direction only.
Specifically, the electrode assembly 13 includes at least one driving electrode 131 and at least one detecting electrode 132, the driving electrode 131 and the detecting electrode 132 respectively form capacitance with the ring 12, and in operation, an alternating current is applied to the driving electrode 131, so that the driving electrode 131 drives the ring 12 to vibrate along the first direction X and the second direction Y, and the detecting electrode 132 detects the vibrational displacement of the ring 12 along the third direction.
Wherein the electrode assembly 13 is disposed opposite to at least one of the upper surface 12a, the lower surface 12b, and the side surface 12c of the ring 12 to form a capacitor.
Specifically, the electrode assembly 13 includes a plurality of first electrodes 13a arranged in parallel and at equal intervals and disposed opposite to the side surface 12c, and a plurality of second electrodes 13b arranged in parallel and at equal intervals and disposed opposite to the upper surface 12a, and the first electrodes 13a and the second electrodes 13b are driving electrodes 131 and/or detecting electrodes 132.
In the present embodiment, the plurality of second electrodes 13b are provided so as to face the upper surface 12a of the first wave arm 1211 and the upper surface 12a of the second wave arm 1213.
It is understood that, in other embodiments, the electrode assembly 13 may also have an arrangement manner, which is not limited to this, and by this way of arranging the electrode assembly 13 on multiple surfaces, the detection capacitance can be effectively improved, and thus the sensitivity of the MEMS gyroscope 1 can be improved.
Referring to fig. 6 and 7 together, fig. 6 is a simulation diagram of a driving mode of the embodiment of the MEMS gyroscope 1 in fig. 1, fig. 7 is a simulation diagram of a detecting mode of the embodiment of the MEMS gyroscope 1 in fig. 1, the gyroscope 1 is generally applied to an electronic product, and when the electronic product is not rotated during use, the ring 12 vibrates in the first direction X and the second direction Y under the driving force generated by the driving electrodes 131, so as to form a vibration mode S1 shown in fig. 6.
When the electronic product rotates, according to the coriolis principle, the rotational angular velocity of the electronic product generates a coriolis force resultant force F2 in the third direction D or the third direction M of the ring 12, the coriolis force resultant force F2 forces the ring 12 to vibrate in the third direction D or the third direction M, a detection mode as shown in fig. 7 is formed, the detection electrode 132 detects the vibration displacement of the ring 12 in the third direction D or the third direction M, that is, the vibration displacement is calculated according to the change of the capacitance, and the magnitude of the rotational angular velocity of the electronic product can be obtained through operation processing.
In the present embodiment, since the section of the ring-shaped member 12 in the radial direction is wavy, the deformation difficulty is reduced, the thermoelastic loss is small, the quality factor of the MEMS gyroscope 1 is improved, and the ring-shaped member 12 is provided with the annular notch 120 at the peak and/or the valley, the ring-shaped member 12 with the movable structure can be released, and a gap between the ring-shaped member 12 and the electrode assembly 13 is formed, thereby forming a capacitor, and further improving the sensitivity of the MEMS gyroscope 1.
Further, the electrode assembly 13 in this embodiment further includes a functional electrode 133 for frequency modulation or eliminating quadrature error, and the first electrode 13a and the second electrode 13b are the driving electrode 131 and/or the detecting electrode 132 and/or the functional electrode 133.
Further, in another embodiment, the plurality of rings 1201 includes a first ring, a second ring, … …, an n-1 ring, an nth ring.
Where n is a natural number equal to or greater than 2, the driving electrode 131 is configured to drive the first to nth ring members to vibrate in the first direction X and the second direction Y, such that the first ring member has a first vibration mode, the second ring member has a second vibration mode, … …, the n-1 st ring member has an n-1 th vibration mode, and the detection electrode 132 is configured to detect a vibration displacement of the first to nth ring members in the third direction.
For example, as shown in fig. 4, n is equal to 2, the plurality of rings 1201 includes a first ring 121a and a second ring 121b, the driving electrode 131 is configured to drive the first ring 121a and the second ring 121b to vibrate along the first direction X and the second direction Y, so that the first ring 121a has a first vibration mode, the second ring 121b has a second vibration mode, and the detecting electrode 132 is configured to detect a vibration displacement of the first ring 121a and the second ring 121b along the third direction; for another example, as shown in fig. 5, n is equal to 4, the plurality of rings 1201 includes a first ring 121c, a second ring 121d, a third ring 121e and a fourth ring 121f, the driving electrode 131 is used for driving the first ring 121c, the second ring 121d, the third ring 121e and the fourth ring 121f to vibrate along the first direction X and the second direction Y, such that the first annular portion 121c has a first vibrational mode, the second annular portion 121d has a second vibrational mode, the third annular portion 121e has a third vibrational mode, and the fourth annular portion 121f has a fourth vibrational mode, it will be appreciated that, in another embodiment, n may be another natural number, the driving electrode 131 drives the plurality of loops 1201 of another natural number to have the vibration mode of another natural number, and the detection electrode 132 detects the vibration displacement of the plurality of loops 1201 of another natural number in the third direction.
In an alternative embodiment, there is no phase difference between any two of the first vibration mode, the second vibration mode, … …, the (n-1) th vibration mode, and the nth vibration mode, in this case, the driving electrode 131 drives the plurality of annular portions 1201 to vibrate along the first direction X and the second direction Y, and the principle that the detecting electrode 132 detects the vibration displacement of the plurality of annular portions 1201 along the third direction is the same as the principle shown in fig. 6 and 7, and is not described herein again.
Further, in another alternative embodiment, the first vibration mode, the second vibration mode, … …, the (n-1) th vibration mode and the nth vibration mode are divided into k groups, any two groups have a phase difference, k is a natural number greater than or equal to 2 and less than or equal to n, for example, as shown in fig. 4, the ring member has two trough structures, and when the ring member is provided with the ring groove only at the peak position, the ring member is divided into two ring parts, namely, a first ring part 121a and a second ring part 121b, k is equal to 2, and the first ring part 121a has the first vibration mode as the group k1And the second annular part 121b has the second vibration mode as group k2The first ring part 121a and the second ring part 121b may be synchronously vibrated without a phase difference to realize a single 2 θ vibration mode, and the first ring part 121a and the second ring part 121b may be asynchronously vibrated with a phase difference to realize a double 2 θ vibration mode. As shown in fig. 5, the ring member is provided with ring-shaped slots at both the peak position and the valley position, and then the ring member is divided into 4 ring portions, i.e., a first ring portion 121c, a second ring portion 121d, a third ring portion 121e, and a fourth ring portion 121 f. k may be equal to 2, and any two of the first, second, third and fourth annular portions 121c, 121d, 121e and 121f may be grouped together, for example, the first and second annular portions 121c and 121d may be vibrated synchronously without phase difference, and the group k may be a group of the first and second annular portions 121c and 121d1And the third and fourth annular portions 121e and 121f are devoid ofSynchronous oscillation of phase difference, as group k2Wherein group k1And group k2Have a phase difference. k may be equal to 3, where two rings are grouped together and two rings are grouped together, e.g., the first ring 121c and the second ring 121d vibrate synchronously in group k without phase differenceaAnd the third ring part 121e has the third vibration mode of the group kbThe fourth vibration mode of the fourth annular portion 121f is a group kcGroup kaGroup kbAnd group kcHave a phase difference. k may also be equal to 4, i.e., asynchronous vibrations with phase differences in each of the first, second, third and fourth annular portions 121c, 121d, 121e and 121 f. It will be appreciated that when the annular member has more than two valley structures, there are many alternative combinations of annular slots, and that different annular slots result in different n, and in other alternative embodiments, k may be other natural numbers, without limitation.
For convenience of description, in the present embodiment, as shown in fig. 4, n is equal to 2, that is, the first vibration mode of the first annular portion 121a and the second vibration mode of the second annular portion 121b have a phase difference of 180 °.
Specifically, when the electronic product is not rotated during use, the first and second annular portions 121a and 121b vibrate in the first and second directions X and Y under the driving force generated by the driving electrode 131, so as to form the vibration modes shown in fig. 8, that is, the first annular portion 121a forms the first vibration mode S1, and the second annular portion 121b forms the second vibration mode S2.
When the electronic product rotates, according to the coriolis principle, the angular velocity of the rotation of the electronic product generates a first coriolis force resultant force F3 of the first annular portion 121a along the third direction D or the third angular direction M and a second coriolis force resultant force F4 of the second annular portion 121b along the third direction D or the third direction M, the first coriolis force resultant force F3 and the second coriolis force resultant force F4 respectively force the first annular portion 121a and the second annular portion 121b to vibrate along the third direction D or the third direction M, so as to form a detection mode as shown in fig. 9, the detection electrode 132 detects the vibration displacement of the first annular portion 121a and the second annular portion 121b along the third direction D or the third direction M in the detection mode, that is, calculates the vibration displacement according to the change of the capacitance, and obtains the angular velocity of the rotation of the electronic product through an operation process. Through the above description, the MEMS gyroscope 1 of the present invention can not only realize the single 2 θ vibration and detection mode as shown in fig. 6 and fig. 7, but also realize the double 2 θ vibration and detection mode as shown in fig. 8 and fig. 9, and because the section of the ring member 12 in the radial direction is wavy, compared with the conventional hemispherical 2 θ mode gyroscope, the MEMS gyroscope has greater rigidity and higher modal frequency, i.e. has better anti-vibration characteristics.
It will be appreciated that, by the same principle as described above, in other embodiments, other 2 θ -rich vibration and detection modes can be implemented, depending on the values of n and k, that is, depending on the ring-shaped member being divided into several ring-shaped portions, the n ring-shaped portions being divided into several groups of vibration and detection modes with different phases, for example, when k is 3, the n ring-shaped portions are divided into 3 groups, and each group has 3 vibration and detection modes with different phases, and when the driving signals with phase differences are accessed, three 2 θ vibration and detection modes can be implemented accordingly.
The present embodiment also provides an electronic product including the MEMS gyroscope 1 in the above embodiment.
Unlike the case of the prior art, the MEMS gyroscope of the present embodiment includes a substrate; the fixing piece is fixedly connected with the substrate; the annular piece is sleeved on the outer side of the fixing piece, connected with the fixing piece and suspended on the substrate, the section of the annular piece in the radial direction is wavy, the projection of the annular piece on the substrate is annular, and annular grooves are formed in the wave crests and/or the wave troughs of the annular piece, so that the annular piece is divided into a plurality of annular parts which are spaced from each other and connecting parts for connecting the annular parts; the electrode assembly is fixedly connected with the substrate and used for forming a capacitor with the annular piece so as to drive the annular piece to vibrate along a first direction and a second direction which are perpendicular to each other and detect the vibration displacement of the annular piece along a third direction which forms an included angle of 45 degrees or 135 degrees with the first direction, on one hand, the sensitivity of the gyroscope is improved by utilizing the characteristic of high symmetry of the geometric structure of the annular gyroscope, on the other hand, the sensitivity of the MEMS gyroscope is improved by utilizing the characteristic of high degree of symmetry of the geometric structure of the annular gyroscope, and on the other hand, the wavy annular piece reduces the deformation difficulty and improves the quality factor of the gyroscope; furthermore, the annular member is provided with an annular groove at the wave crest and/or the wave trough, so that the annular member is divided into a plurality of annular parts which are spaced from each other, and the annular parts can independently vibrate in the first direction and the second direction at different phases, so that the gyroscope can realize a single 2 theta vibration and detection mode, a double 2 theta vibration and detection mode and even a multiple 2 theta vibration and detection mode.
The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.
Claims (13)
1. A MEMS gyroscope, comprising:
a substrate;
the fixing piece is fixedly connected with the substrate;
the annular piece is sleeved on the outer side of the fixing piece, connected with the fixing piece and suspended on the substrate, the section of the annular piece in the radial direction is wavy, the projection of the annular piece on the substrate is annular, and annular grooves are formed in the wave crests and/or the wave troughs of the annular piece, so that the annular piece is divided into a plurality of annular parts which are spaced from each other and connecting parts for connecting the annular parts;
and the electrode assembly is fixedly connected with the substrate and is used for forming capacitance with the annular piece so as to drive the annular piece to vibrate along a first direction and a second direction which are perpendicular to each other and detecting the vibration displacement of the annular piece along a third direction forming an included angle of 45 degrees or 135 degrees with the first direction.
2. A MEMS gyroscope according to claim 1, wherein the electrode assembly comprises at least one drive electrode and at least one sense electrode, the drive and sense electrodes forming capacitances with the ring respectively, the drive and sense electrodes being angled at 45 ° or 135 °; the drive electrode drives the ring member to vibrate in the first direction and the second direction, and the detection electrode detects vibrational displacement of the ring member in the third direction.
3. The MEMS gyroscope of claim 2, wherein the ring member includes an upper surface remote from the substrate, a lower surface opposite the upper surface, and a side surface connecting the upper surface and the lower surface and on a side remote from the fixed member, the electrode assembly being disposed opposite at least one of the upper surface, the lower surface, and the side surface to form a capacitance.
4. A MEMS gyroscope according to claim 3 wherein the ring comprises at least two successive valley structures and a peak connecting two adjacent valley structures, the valley structures comprising a first arm extending obliquely from the fixed member towards the base, a valley extending from the first arm towards the base and parallel to the base, and a second arm extending obliquely from the valley towards the base, adjacent first and second arms being connected by the peak, the peak and/or the valley comprising a plurality of annular slots and the connecting portion between two adjacent annular slots, the peak being parallel to the base and the peak being at a greater perpendicular distance to the base than the valley to the base.
5. The MEMS gyroscope of claim 4, wherein the electrode assembly includes a plurality of first electrodes arranged in parallel and equidistantly spaced apart and disposed opposite the side surfaces and a plurality of second electrodes arranged in parallel and equidistantly spaced apart and disposed opposite the top surface; the first electrode and the second electrode are the driving electrode and/or the detecting electrode.
6. The MEMS gyroscope of claim 5, wherein the plurality of second electrodes are disposed opposite an upper surface of the first wave arm and an upper surface of the second wave arm.
7. The MEMS gyroscope of claim 2, wherein the plurality of rings includes a first ring, a second ring, … …, an n-1 ring, and an nth ring, where n is a natural number greater than or equal to 2;
the driving electrode is used for driving n annular parts of the first annular part to the n annular part to vibrate along the first direction and the second direction respectively, so that the first annular part has a first vibration mode, the second annular part has a second vibration mode, … …, the n-1 annular part has an n-1 vibration mode and the n annular part has an n vibration mode;
the detection electrode is configured to detect a vibrational displacement of n annular portions of the first to nth annular portions in the third direction.
8. The MEMS gyroscope of claim 7, wherein the first vibration mode, the second vibration mode, … …, the n-1 vibration mode, and the nth vibration mode are divided into k groups, any two groups having a phase difference, and k is a natural number equal to or greater than 2 and equal to or less than n.
9. The MEMS gyroscope of claim 8, wherein k is equal to 2.
10. The MEMS gyroscope of claim 9, wherein n is equal to 2.
11. The MEMS gyroscope of claim 7, wherein there is no phase difference between any two of the first vibrational mode, the second vibrational mode, … …, the n-1 vibrational mode, and the n vibrational mode.
12. The MEMS gyroscope of claim 5, wherein the electrode assembly further comprises a functional electrode for frequency modulation or quadrature error elimination, the first and second electrodes being the drive electrode and/or the detection electrode and/or the functional electrode.
13. An electronic product, characterized in that it comprises a MEMS gyroscope according to any of claims 1 to 12.
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| CN202021346590.0U CN213985134U (en) | 2020-07-09 | 2020-07-09 | MEMS gyroscope and electronic product |
| PCT/CN2020/108375 WO2022007103A1 (en) | 2020-07-09 | 2020-08-11 | Mems gyroscope and electronic product |
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| GB2338781B (en) * | 1998-03-14 | 2002-04-03 | British Aerospace | A gyroscope |
| US10746548B2 (en) * | 2014-11-04 | 2020-08-18 | Analog Devices, Inc. | Ring gyroscope structural features |
| CN104613952B (en) * | 2015-02-12 | 2017-09-19 | 东南大学 | Three axle single-chip integration full decoupling angular oscillation ring type silicon gyros and its processing method |
| CN106629576A (en) * | 2016-12-29 | 2017-05-10 | 北京时代民芯科技有限公司 | Silicon-based MEMS dish top |
| CN110672081A (en) * | 2019-08-30 | 2020-01-10 | 北京时代民芯科技有限公司 | Large-capacitance annular resonant micromechanical gyroscope |
| CN111156980A (en) * | 2019-12-31 | 2020-05-15 | 瑞声科技（南京）有限公司 | MEMS gyroscope |
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