CN213090780U - MEMS gyroscope and electronic product - Google Patents
MEMS gyroscope and electronic product Download PDFInfo
- Publication number
- CN213090780U CN213090780U CN202021346697.5U CN202021346697U CN213090780U CN 213090780 U CN213090780 U CN 213090780U CN 202021346697 U CN202021346697 U CN 202021346697U CN 213090780 U CN213090780 U CN 213090780U
- Authority
- CN
- China
- Prior art keywords
- annular piece
- annular
- ring
- piece
- mems gyroscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
Abstract
The utility model provides a MEMS gyroscope and electronic product, which comprises a base, a fixed part, first loop forming element, first spoke, the second loop forming element, coupling assembling and electrode subassembly, vibrate along mutually perpendicular's first direction and second direction through first loop forming element of electrode subassembly drive and second loop forming element, and detect first loop forming element and second loop forming element along the contained angle with first direction and be 45 degrees directions or be 135 degrees vibration displacement of direction with the contained angle of first direction, utilize the characteristic of annular gyroscope geometry high symmetry, improve the sensitivity of gyroscope, have bigger rigidity simultaneously, higher modal frequency, improve the anti-vibration characteristic.
Description
Technical Field
The utility model relates to a gyroscope technical field especially relates to a MEMS gyroscope and electronic product.
Background
A micro Mechanical gyroscope, i.e., a mems (micro Electro Mechanical systems) gyroscope, is a typical angular velocity microsensor, and has a very wide application in the consumer electronics market due to its advantages of small size, low power consumption, and convenient processing. With the gradual improvement of the performance of the MEMS gyroscope in recent years, the MEMS gyroscope is widely applied to the fields of automobiles, industry, virtual reality and the like.
The geometric structure of the annular gyroscope is highly symmetrical, the driving/detecting modes of the gyroscope are completely the same, the sensitivity is high, the structure is simple, and the annular gyroscope gradually becomes a practical and wide high-performance gyroscope. However, the conventional ring gyroscope is limited in structure and has poor anti-vibration characteristics when deformed in the drive/detection mode.
Therefore, there is a need to provide a new MEMS gyroscope to solve the above problems.
SUMMERY OF THE UTILITY MODEL
The utility model mainly provides a MEMS gyroscope and electronic product can improve the sensitivity and the anti-vibration characteristic of gyroscope.
In order to solve the technical problem, the utility model discloses a technical scheme be: providing a MEMS gyroscope, the MEMS gyroscope comprising: a substrate; the fixing piece is fixedly connected with the substrate; the first annular piece is sleeved on the outer side of the fixing piece, arranged at an interval with the fixing piece and suspended on the substrate; the first spoke is respectively connected with the fixed piece and the first annular piece; the second annular piece is sleeved outside the first annular piece, arranged at an interval with the first annular piece and suspended on the substrate; the connecting assembly is arranged between the first annular piece and the second annular piece and comprises a third annular piece and a plurality of second spokes, the third annular piece is sleeved outside the first annular piece, is respectively arranged at intervals with the first annular piece and the second annular piece and is suspended on the substrate, and the second spokes are respectively connected with the first annular piece and the third annular piece and the second annular piece and the third annular piece; and the electrode assembly is used for forming a capacitor with at least one of the first annular piece, the second annular piece and the third annular piece so as to drive the first annular piece and the second annular piece to vibrate along a first direction and a second direction which are perpendicular to each other, and detecting the vibration displacement of the first annular piece and the second annular piece along a direction which forms an included angle of 45 degrees with the first direction or a direction which forms an included angle of 135 degrees with the first direction.
In a specific embodiment, the electrode assembly is annularly arranged outside the second annular member.
In one embodiment, the electrode assembly includes a drive electrode and a sense electrode; the driving electrode and the second annular part are arranged at intervals to form a first capacitor, the first capacitor is used for driving the first annular part to vibrate along the first direction and the second direction to form a first vibration mode, and driving the second annular part to vibrate along the first direction and the second direction to form a second vibration mode, and the first vibration mode and the second vibration mode vibrate asynchronously; the detection electrode and a second annular member are arranged at intervals to form a second capacitor, and the second capacitor is used for detecting the vibration displacement of the first annular member and the second annular member along the 45-degree direction or the 135-degree direction.
In a specific embodiment, at least one of the first ring member, the second ring member, and the third ring member is plural in number, the plural first ring members and/or the plural second ring members and/or the plural third ring members are spaced apart from each other, and the gyroscope further includes a third spoke connecting the plural first ring members and/or the plural second ring members and/or the plural third ring members.
In one embodiment, the outer contours of the first ring member, the second ring member, and the third ring member are respectively a positive 8M star, a positive 8N star, and a positive 8L star, wherein M, N, L is a positive integer.
In one embodiment, the star angle numbers of the first ring piece, the second ring piece and the third ring piece satisfy N ≧ L ≧ M.
In a specific embodiment, the number of the first spokes is 4M, and the 4M first spokes are arranged along the circumferential array of the fixing member.
In a specific embodiment, the electrode assembly further comprises a functional electrode comprising a plurality of electrodes for applying force, detecting, frequency modulating or eliminating quadrature error.
In order to solve the technical problem, the utility model discloses a technical scheme be: an electronic product is provided, which comprises the MEMS gyroscope.
The utility model has the advantages that: unlike the prior art, the MEMS gyroscope provided by the present invention includes a substrate; the fixing piece is fixedly connected with the substrate; the first annular piece is sleeved outside the fixing piece, arranged at an interval with the fixing piece and suspended on the substrate; the first spoke is respectively connected with the fixing piece and the first annular piece; the second annular piece is sleeved outside the first annular piece, arranged at an interval with the first annular piece and suspended on the substrate; the connecting assembly is arranged between the first annular piece and the second annular piece and comprises a third annular piece and a plurality of second spokes, the third annular piece is sleeved outside the first annular piece, is respectively arranged at intervals with the first annular piece and the second annular piece and is suspended on the substrate, and the second spokes are respectively connected with the first annular piece and the third annular piece as well as the second annular piece and the third annular piece; and the electrode assembly is used for forming a capacitor with at least one of the first annular piece, the second annular piece and the third annular piece so as to drive the first annular piece and the second annular piece to vibrate along a first direction and a second direction which are mutually perpendicular, and detecting the vibration displacement of the first annular piece and the second annular piece along a direction which forms a 45-degree included angle with the first direction or a 135-degree included angle with the first direction.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained without inventive work, wherein:
fig. 1 is a schematic structural diagram of a MEMS gyroscope provided by the present invention;
FIG. 2 is a schematic perspective view of the MEMS gyroscope shown in FIG. 1 with the substrate removed;
FIG. 3 is a schematic front view of the three-dimensional structure shown in FIG. 2;
FIG. 4 is an enlarged schematic view of portion A of FIG. 3;
FIG. 5 is a schematic diagram of a simulation of the drive mode of the MEMS gyroscope of FIG. 1;
fig. 6 is a schematic diagram of a simulation of the detection mode of the MEMS gyroscope of fig. 1.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
It should be noted that all the directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.
It will also be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
In addition, the descriptions related to "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit ly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
Referring to fig. 1, 2, 3 and 4, the MEMS gyroscope 1 of the present embodiment includes a substrate 10, a fixed member 11, a first ring member 12, a first spoke 13, a second ring member 14, a connecting member 15 and an electrode assembly 16.
Wherein, the base 10 is used for providing a fixed support, the fixing member 11 is fixedly connected with the base 10, and the outer contour of the fixing member 11 can be a circle or a regular polygon star, which is taken as an example in the figure of the present embodiment. The base 10 and the fixing member 11 are fixedly connected by gluing, or, they are integrally formed.
The first ring member 12 is sleeved outside the fixing member 11 and spaced apart from the fixing member 11, and is suspended on the substrate 10, that is, the fixing member 11 is located inside the first ring member 12 and spaced apart from the first ring member 12.
The outer contour of the first annular member 12 is a positive 8M star, and M is a positive integer, for example, in the illustration of the embodiment, the outer contour of the first annular member 12 is a positive sixteen star.
Further, the first ring member 12 is made of a conductive material.
The first spokes 13 are disposed between the fixing member 11 and the first ring member 12 to connect the fixing member 11 and the first ring member 12, and in the present embodiment, the first spokes 13 connect the fixing member 11 and the first ring member 12 at the outer side of the star of the fixing member 11 and the inner side of the star of the first ring member 12.
Optionally, the number of the first spokes 13 is 4M, and the 4M first spokes 13 are arranged in a circumferential array of the fixing member, for example, in the embodiment, the number of the first spokes 13 is eight.
The second ring member 14 is sleeved outside the first ring member 12 and spaced apart from the first ring member 12.
The outer contour of the second annular element 14 is a positive 8N star, and N is a positive integer, for example, in the illustration of the present embodiment, the outer contour of the second annular element 14 is a positive sixteen star.
Further, second annular member 14 is made of a conductive material.
The connecting assembly 15 is disposed between the first ring member 12 and the second ring member 14 and includes a third ring member 151 and a plurality of second spokes 152, the third ring member 151 is sleeved on the first ring member 12 and is disposed at intervals with the first ring member 12 and the second ring member 14, the plurality of second spokes 152 are disposed between the first ring member 12 and the third ring member 151 and between the second ring member 14 and the third ring member 151, respectively, so as to connect the first ring member 12 and the third ring member 151, and the second ring member 14 and the third ring member 151, respectively.
The outer contour of the third ring member 151 is a positive 8L star, and L is a positive integer, for example, in the illustration of the present embodiment, the outer contour of the third ring member 151 is a positive sixteen star.
Alternatively, in the present embodiment, the star angle numbers of the first ring member 12, the second ring member 14, and the third ring member 151 satisfy N ≧ L ≧ M.
Optionally, at least one of the first ring member 12, the second ring member 14, and the third ring member 151 is provided in plural, and the plural first ring members 12 and/or the plural second ring members 14 and/or the plural third ring members 151 are provided at intervals from each other, in this embodiment, the plural first ring members 12, the plural second ring members 14, and the plural third ring members 151 are provided in plural, the plural first ring members 12 are sequentially and alternately sleeved outside the fixing member 11, the plural third ring members 151 are sequentially and alternately sleeved outside the first ring members 12, and the plural second ring members 14 are sequentially and alternately sleeved outside the third ring members 151.
Further, the MEM gyroscope 1 in this embodiment further includes a third spoke 17, where the third spoke 17 connects a plurality of first ring segments 12 and/or a plurality of second ring segments 14 and/or a plurality of third ring segments 151, and in this embodiment, the number of the third spoke 17 is plural, and the plurality of third spoke 17 connects the plurality of first ring segments 12, the plurality of second ring segments 15 and the plurality of third ring segments 151.
The electrode assembly 16 is configured to form a capacitance with at least one of the first ring member 12, the second ring member 14, and the third ring member 151, so as to drive the first ring member 12 and the second ring member 14 to vibrate in a first direction and a second direction perpendicular to each other, and detect a vibrational displacement of the first ring member 12 and the second ring member 14 in a direction forming an angle of 45 degrees with the first direction or a direction forming an angle of 135 degrees with the first direction.
In the present embodiment, the X-axis direction is taken as the first direction and the Y-axis direction is taken as the second direction as shown in fig. 3 as an example, but the first direction is not limited to the X-axis direction only and the second direction is taken as the Y-axis direction only.
In this embodiment, the electrode assembly 16 is annularly arranged outside the second ring 14, and forms a capacitance with the second ring 14, so as to drive the first ring 12 and the second ring 14 to vibrate and detect the vibration displacement of the first ring 12 and the second ring 14, but the electrode assembly 16 may be arranged in other ways in other embodiments, and is not limited herein.
Referring to fig. 5 and 6, the electrode assembly 16 includes a driving electrode 161 and a detecting electrode 162, the driving electrode 161 and the second annular element 12 are spaced apart from each other to form a first capacitor 1602, and in operation, an alternating current is applied to the first driving electrode 161, so that the first capacitor 1601 generates a driving force to drive the first annular element 12 to vibrate along the first direction and the second direction to form a first vibration mode S1, and drive the second annular element 14 to vibrate along the first direction and the second direction to form a second vibration mode, where the first vibration mode S1 and the second vibration mode S2 vibrate asynchronously; sensing electrode 162 is spaced apart from second ring 12 to form a second capacitor 1602.
Specifically, the MEMS gyroscope 1 is generally applied to an electronic product, and when the electronic product is not rotated during use, the first ring 12 and the second ring 14 vibrate in the first direction X and the second direction Y under the driving action of the driving force generated by the first capacitor 1601, so as to form a vibration mode as shown in fig. 5.
When the electronic product rotates, according to the coriolis principle, the rotational angular velocity of the electronic product generates a first coriolis force resultant force F3 of the first ring 12 in the 45 degree direction D and the 135 degree direction M and a second coriolis force resultant force F4 of the second ring 14 in the 45 degree direction D and the 135 degree direction M, the first coriolis force resultant force F3 and the second coriolis force resultant force F4 respectively force the first ring 12 and the second ring 14 to vibrate in the 45 degree direction D and the 135 degree direction M, so as to form a detection mode as shown in fig. 6, the second capacitor 1602 is used for the vibration displacement of the first ring 12 and the second ring 14 in the 45 degree direction D and the 135 degree direction M in the detection mode, that is, the vibration displacement is calculated according to the change of the capacitor, and the magnitude of the rotational angular velocity of the electronic product can be obtained through the calculation processing.
When the first annular element 12 and the second annular element 14 vibrate as described above, deformation occurs, and the third annular element 151 located between the first annular element 12 and the second annular element 14 also deforms, so that the gyroscope 10 in this embodiment has greater rigidity and higher modal frequency, i.e., better vibration resistance, and meanwhile, because the outer contours of the first annular element, the second annular element 14, and the third annular element 151 in this embodiment are all right-angled stars, the difficulty in deformation is reduced, the thermoelastic loss is small, and the quality factor of the MEMS gyroscope is improved.
It is understood that in this embodiment, the electrode assembly 16 and the second annular element form a capacitance to drive the first annular element 12 and the second annular element 14 to vibrate in the first direction and the second direction, and detect the vibrational displacement of the first annular element 12 and the second annular element 14 in the 45-degree direction or the 135-degree direction included angle with the first direction, in other embodiments, the electrode assembly 16 may also form a capacitance with the first annular element 12 or the third annular element 151, and the principle is the same as that described above, and will not be described again.
Further, the electrode assembly 16 in this embodiment further includes a functional electrode 163, and the functional electrode 163 includes a plurality of electrodes that can be used for applying force/detecting, frequency-adjusting, or eliminating quadrature errors, respectively.
The present embodiment also provides an electronic product including the MEMS gyroscope 1 in the above embodiment.
Unlike the prior art, the MEMS gyroscope provided in this embodiment includes a substrate; the fixing piece is fixedly connected with the substrate; the first annular piece is sleeved outside the fixing piece, arranged at an interval with the fixing piece and suspended on the substrate; the first spoke is respectively connected with the fixing piece and the first annular piece; the second annular piece is sleeved outside the first annular piece, arranged at an interval with the first annular piece and suspended on the substrate; the connecting assembly is arranged between the first annular piece and the second annular piece and comprises a third annular piece and a plurality of second spokes, the third annular piece is sleeved outside the first annular piece, is respectively arranged at intervals with the first annular piece and the second annular piece and is suspended on the substrate, and the second spokes are respectively connected with the first annular piece and the third annular piece as well as the second annular piece and the third annular piece; and the electrode assembly is used for forming a capacitor with at least one of the first annular piece, the second annular piece and the third annular piece so as to drive the first annular piece and the second annular piece to vibrate along a first direction and a second direction which are mutually perpendicular, and detecting the vibration displacement of the first annular piece and the second annular piece along a direction which forms a 45-degree included angle with the first direction or a 135-degree included angle with the first direction.
The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.
Claims (9)
1. A MEMS gyroscope, comprising:
a substrate;
the fixing piece is fixedly connected with the substrate;
the first annular piece is sleeved on the outer side of the fixing piece, arranged at an interval with the fixing piece and suspended on the substrate;
the first spoke is respectively connected with the fixed piece and the first annular piece;
the second annular piece is sleeved outside the first annular piece, arranged at an interval with the first annular piece and suspended on the substrate;
the connecting assembly is arranged between the first annular piece and the second annular piece and comprises a third annular piece and a plurality of second spokes, the third annular piece is sleeved outside the first annular piece, is respectively arranged at intervals with the first annular piece and the second annular piece and is suspended on the substrate, and the second spokes are respectively connected with the first annular piece and the third annular piece and the second annular piece and the third annular piece;
and the electrode assembly is used for forming a capacitor with at least one of the first annular piece, the second annular piece and the third annular piece so as to drive the first annular piece and the second annular piece to vibrate along a first direction and a second direction which are perpendicular to each other, and detecting the vibration displacement of the first annular piece and the second annular piece along a direction which forms an included angle of 45 degrees with the first direction or a direction which forms an included angle of 135 degrees with the first direction.
2. The MEMS gyroscope of claim 1, wherein the electrode assemblies are arranged annularly outside the second ring.
3. The MEMS gyroscope of claim 2, wherein the electrode assembly comprises a drive electrode and a sense electrode;
the driving electrode and the second annular part are arranged at intervals to form a first capacitor, the first capacitor is used for driving the first annular part to vibrate along the first direction and the second direction to form a first vibration mode, and driving the second annular part to vibrate along the first direction and the second direction to form a second vibration mode, and the first vibration mode and the second vibration mode vibrate asynchronously;
the detection electrode and a second annular member are arranged at intervals to form a second capacitor, and the second capacitor is used for detecting the vibration displacement of the first annular member and the second annular member along the 45-degree direction or the 135-degree direction.
4. The MEMS gyroscope of claim 1, wherein at least one of the first ring-shaped member, the second ring-shaped member, and the third ring-shaped member is plural in number, the plurality of first ring-shaped members and/or the plurality of second ring-shaped members and/or the plurality of third ring-shaped members are spaced apart from one another, the gyroscope further comprising a third spoke connecting the plurality of first ring-shaped members and/or the plurality of second ring-shaped members and/or the plurality of third ring-shaped members.
5. The MEMS gyroscope of claim 1, wherein the first, second, and third ring segments have outer contours that are positive 8M, positive 8N, and positive 8L, respectively, wherein M, N, L is a positive integer.
6. The MEMS gyroscope of claim 5, wherein the star angle numbers of the first ring member, the second ring member, and the third ring member satisfy N ≧ L ≧ M.
7. The MEMS gyroscope of claim 5, wherein the number of the first spokes is 4M, and the 4M first spokes are arranged along the circumferential array of the fixing member.
8. The MEMS gyroscope of claim 3, wherein the electrode assembly further comprises a functional electrode comprising a plurality of electrodes for applying force, detecting, frequency modulating, or eliminating quadrature errors.
9. An electronic product, characterized in that it comprises a MEMS gyroscope according to any of claims 1 to 8.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021346697.5U CN213090780U (en) | 2020-07-09 | 2020-07-09 | MEMS gyroscope and electronic product |
| PCT/CN2020/107692 WO2022007091A1 (en) | 2020-07-09 | 2020-08-07 | Mems gyroscope and electronic product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021346697.5U CN213090780U (en) | 2020-07-09 | 2020-07-09 | MEMS gyroscope and electronic product |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213090780U true CN213090780U (en) | 2021-04-30 |
Family
ID=75623964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021346697.5U Active CN213090780U (en) | 2020-07-09 | 2020-07-09 | MEMS gyroscope and electronic product |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN213090780U (en) |
| WO (1) | WO2022007091A1 (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11304494A (en) * | 1998-04-22 | 1999-11-05 | Meidensha Corp | Vibration gyro and method of its use |
| US10502568B2 (en) * | 2015-04-29 | 2019-12-10 | General Electric Company | Inertial sensing systems and methods of manufacturing the same |
| CN109916386B (en) * | 2019-03-13 | 2023-01-31 | 东南大学 | Ring gyroscope shakes with restrain high post-overload oscillation process function |
| CN111156981A (en) * | 2019-12-31 | 2020-05-15 | 瑞声科技（南京）有限公司 | MEMS gyroscope |
| CN111156982A (en) * | 2019-12-31 | 2020-05-15 | 瑞声科技（南京）有限公司 | MEMS gyroscope |
| CN111156980A (en) * | 2019-12-31 | 2020-05-15 | 瑞声科技（南京）有限公司 | MEMS gyroscope |
-
2020
- 2020-07-09 CN CN202021346697.5U patent/CN213090780U/en active Active
- 2020-08-07 WO PCT/CN2020/107692 patent/WO2022007091A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022007091A1 (en) | 2022-01-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111156981A (en) | MEMS gyroscope | |
| CN111156980A (en) | MEMS gyroscope | |
| JP2014178317A (en) | Angular velocity sensor having multiaxial detection capability | |
| CN111156982A (en) | MEMS gyroscope | |
| CN104931031A (en) | Outer edge fixed type electrostatic driving multi-ring gyroscope and preparation method thereof | |
| US6901799B2 (en) | Vibratory double-axially sensing micro-gyroscope | |
| CN104931030A (en) | Internal and external ring fixed piezoelectric-drive multi-ring gyroscope and preparation method for same | |
| CN104897145A (en) | Piezoelectric driving multi-ring gyroscope with fixed outer edge and preparation method of piezoelectric driving multi-ring gyroscope | |
| CN105043369A (en) | Outer edge fixed type multi-ring gyroscope subjected to laser processing and piezoelectric actuation | |
| CN214149332U (en) | MEMS gyroscope and electronic product | |
| CN213090780U (en) | MEMS gyroscope and electronic product | |
| CN213120570U (en) | MEMS gyroscope and electronic product | |
| CN114096802B (en) | Gyroscope and inertial sensor | |
| CN214149333U (en) | MEMS gyroscope and electronic product | |
| CN213090781U (en) | MEMS gyroscope and electronic product | |
| CN213120571U (en) | Gyroscope | |
| CN112710293B (en) | MEMS gyroscope | |
| CN212567415U (en) | Gyroscope | |
| CN213985134U (en) | MEMS gyroscope and electronic product | |
| CN113418517A (en) | Gyroscope | |
| US11585659B2 (en) | MEMS wave gyroscope | |
| WO2021134675A1 (en) | Mems gyroscope | |
| CN114459451B (en) | Fluctuating gyroscope structure | |
| CN114485600B (en) | Integrated gyro with multi-anchor-point high-strength multi-fluctuation annular structure | |
| US11662206B2 (en) | Micromachined gyroscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |