CN213120570U - MEMS gyroscope and electronic product - Google Patents
MEMS gyroscope and electronic product Download PDFInfo
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- CN213120570U CN213120570U CN202021346446.7U CN202021346446U CN213120570U CN 213120570 U CN213120570 U CN 213120570U CN 202021346446 U CN202021346446 U CN 202021346446U CN 213120570 U CN213120570 U CN 213120570U
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- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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Abstract
The utility model provides a MEMS gyroscope and electronic product, the MEMS gyroscope includes the basement, first loop forming element, the second loop forming element, coupling assembling, the mounting, second spoke and electrode subassembly, through first loop forming element of electrode subassembly drive and second loop forming element along mutually perpendicular's first direction and second direction vibration, and detect first loop forming element and second loop forming element along being 45 degrees directions or being 135 degrees directions's vibration displacement with the contained angle of first direction, utilize the characteristic of annular gyroscope geometry high symmetry, improve the sensitivity of gyroscope, have bigger rigidity simultaneously, higher modal frequency, improve anti-vibration characteristic.
Description
Technical Field
The utility model relates to a gyroscope technical field especially relates to a MEMS gyroscope and electronic product.
Background
A micro Mechanical gyroscope, i.e., a mems (micro Electro Mechanical systems) gyroscope, is a typical angular velocity microsensor, and has a very wide application in the consumer electronics market due to its advantages of small size, low power consumption, and convenient processing. With the gradual improvement of the performance of the MEMS gyroscope in recent years, the MEMS gyroscope is widely applied to the fields of automobiles, industry, virtual reality and the like.
The geometric structure of the annular gyroscope is highly symmetrical, the driving/detecting modes of the gyroscope are completely the same, the sensitivity is high, the structure is simple, and the annular gyroscope gradually becomes a practical and wide high-performance gyroscope. However, the conventional ring gyroscope is limited in structure and has poor anti-vibration characteristics when deformed in the drive/detection mode.
Therefore, there is a need to provide a new MEMS gyroscope to solve the above problems.
SUMMERY OF THE UTILITY MODEL
The utility model mainly provides a MEMS gyroscope and electronic product can improve the sensitivity and the anti-vibration characteristic of gyroscope.
In order to solve the technical problem, the utility model discloses a technical scheme be: providing a MEMS gyroscope, the MEMS gyroscope comprising: a substrate; a first ring member suspended from the base; the second annular piece is sleeved outside the first annular piece, arranged at an interval with the first annular piece and suspended on the substrate; the connecting assembly is arranged between the first annular piece and the second annular piece and comprises a third annular piece and a plurality of first spokes, the third annular piece is sleeved outside the first annular piece, is respectively arranged at intervals with the first annular piece and the second annular piece and is suspended on the substrate, and the first spokes are respectively connected with the first annular piece and the third annular piece and the second annular piece and the third annular piece; the fixing piece is fixedly connected with the substrate, sleeved outside the second annular piece and arranged at intervals with the second annular piece; a second spoke connecting the second ring member and the fixing member; and the electrode assembly is fixedly connected with the substrate and is used for forming a capacitor with at least one of the first annular piece, the second annular piece and the third annular piece so as to drive the first annular piece and the second annular piece to vibrate along a first direction and a second direction which are mutually perpendicular and detecting the vibration displacement of the first annular piece and the second annular piece along a direction which forms an included angle of 45 degrees with the first direction or a direction which forms an included angle of 135 degrees with the first direction.
In one embodiment, the electrode assembly includes a first electrode group and a second electrode group, the first electrode group includes a first driving electrode and a first detecting electrode, the first driving electrode is spaced apart from the first ring member to form a first capacitor, and the first capacitor is configured to drive the first ring member to vibrate in the first direction and the second direction to form a first vibration mode; the second electrode group comprises a second driving electrode and a second detection electrode, the second driving electrode and the second annular part are arranged at intervals to form a third capacitor, and the third capacitor is used for driving the second annular part to vibrate along the first direction and the second direction to form a second vibration mode; the first vibration form vibrates asynchronously with the second vibration form.
In a specific embodiment, the first detection electrode is spaced apart from the first ring member to form a second capacitor, the second capacitor is configured to detect the vibration displacement of the first ring member in the 45 degree direction or the 135 degree direction, the second detection electrode is spaced apart from the second ring member to form a fourth capacitor, and the fourth capacitor is configured to detect the vibration displacement of the second ring member in the 45 degree direction or the 135 degree direction.
In one embodiment, the first electrode group is annularly arranged on the inner side of the first ring-shaped member, and the second electrode group is annularly arranged on the outer side of the second ring-shaped member.
In a specific embodiment, at least one of the first ring member, the second ring member, and the third ring member is plural in number, the plural first ring members and/or the plural second ring members and/or the plural third ring members are spaced apart from each other, and the gyroscope further includes a third spoke connecting the plural first ring members and/or the plural second ring members and/or the plural third ring members.
In one embodiment, the outer contours of the first ring member, the second ring member, and the third ring member are respectively a positive 8M star, a positive 8N star, and a positive 8L star, wherein M, N, L is a positive integer.
In one embodiment, the star angle numbers of the first ring piece, the second ring piece and the third ring piece satisfy N ≧ L ≧ M.
In a specific embodiment, the number of the second spokes is 4N, and the 4N second spokes are arranged along the circumferential array of the second ring member.
In one embodiment, at least one of the first and second electrode sets further comprises a functional electrode comprising a plurality of electrodes for applying force, detecting, modulating frequency, or eliminating quadrature error.
In order to solve the technical problem, the utility model discloses a technical scheme be: an electronic product is provided, which comprises the MEMS gyroscope.
The utility model has the advantages that: unlike the prior art, the MEMS gyroscope provided by the present invention includes a substrate; a first ring member suspended from the base; the second annular piece is sleeved outside the first annular piece, arranged at an interval with the first annular piece and suspended on the substrate; the connecting assembly is arranged between the first annular piece and the second annular piece and comprises a third annular piece and a plurality of first spokes, the third annular piece is sleeved outside the first annular piece, is respectively arranged at intervals with the first annular piece and the second annular piece and is suspended on the substrate, and the first spokes are respectively connected with the first annular piece and the third annular piece as well as the second annular piece and the third annular piece; the fixing piece is fixedly connected with the substrate, sleeved outside the second annular piece and arranged at intervals with the second annular piece; the second spoke is connected with the second annular part and the fixing part; and the electrode assembly is fixedly connected with the substrate and used for forming a capacitor with at least one of the first annular piece, the second annular piece and the third annular piece so as to drive the first annular piece and the second annular piece to vibrate along a first direction and a second direction which are vertical to each other and detect the vibration displacement of the first annular piece and the second annular piece along a direction which forms a 45-degree angle with the first direction or a 135-degree angle with the first direction.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained without inventive work, wherein:
fig. 1 is a schematic structural diagram of a MEMS gyroscope 1 provided by the present invention;
fig. 2 is a schematic perspective view of the MEMS gyroscope 1 shown in fig. 1 with the substrate removed;
FIG. 3 is a schematic front view of the three-dimensional structure shown in FIG. 2;
FIG. 4 is an enlarged schematic view of portion A of FIG. 3;
FIG. 5 is an enlarged schematic view of portion B of FIG. 3;
fig. 6 is a schematic diagram showing a simulation of the driving mode of the MEMS gyroscope 10 in fig. 1;
fig. 7 is a schematic diagram of a simulation of the detection mode of the MEMS gyroscope 10 in fig. 1.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
It should be noted that all the directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.
It will also be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
In addition, the descriptions related to "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit ly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
Referring to fig. 1, 2, 3 and 4, a substrate 10 of a MEMS gyroscope 1 in this embodiment includes a first ring element 11, a second ring element 12, a connecting assembly 13, a fixing element 14, a second spoke 15 and an electrode assembly 16.
Wherein the substrate 10 is used to provide a fixed support.
The first ring member 11 is suspended on the substrate 10, and in the present embodiment, the outer contour of the first ring member 11 is a positive 8M star, and M is a positive integer, for example, in the present embodiment, the outer contour of the first ring member 11 is a positive sixteen star.
The second annular member 12 is sleeved outside the first annular member 11, spaced apart from the first annular member 11, and suspended on the substrate 10, that is, the first annular member 11 is disposed inside the second annular member 12 and spaced apart from the second annular member 12.
The outer contour of the second annular member 12 is a positive 8N star, and N is a positive integer, for example, in the embodiment, the outer contour of the second annular member 12 is a positive sixteen star.
The connecting assembly 13 is disposed between the first ring member 11 and the second ring member 12 and includes a third ring member 131 and a plurality of first spokes 132, the third ring member 131 is sleeved outside the first ring member 11 and is disposed at an interval from the first ring member 11 and the second ring member 12, and is suspended on the substrate 10, the plurality of first spokes 132 are disposed between the first ring member 11 and the third ring member 131 and between the second ring member 12 and the third ring member 131, respectively, so as to connect the first ring member 11 and the third ring member 131, and the second ring member 12 and the third ring member 131, respectively.
The outer contour of the third ring-shaped element 131 is a positive 8L star, and L is a positive integer, for example, in the illustration of the present embodiment, the outer contour of the third ring-shaped element 131 is a positive sixteen star.
Alternatively, in the present embodiment, the star angle numbers of the first annular member 11, the second annular member 12 and the third annular member 131 satisfy N ≧ L ≧ M.
Optionally, at least one of the first ring member 11, the second ring member 12, and the third ring member 131 is plural in number, and the plural first ring members 11 and/or the plural second ring members 12 and/or the plural third ring members 131 are arranged at intervals with each other, in this embodiment, the plural first ring members 11, the plural second ring members 12, and the plural third ring members 131 are all plural in number, the plural first ring members 11 are arranged at intervals in sequence, the plural third ring members 131 are arranged at intervals in sequence on the first ring members 11, and the plural second ring members 12 are arranged at intervals in sequence on the third ring members 131.
Further, the MEM gyroscope 1 in this embodiment further includes a third spoke 17, where the third spoke 17 connects a plurality of first ring members 11 and/or a plurality of second ring members 12 and/or a plurality of third ring members 131, and in this embodiment, the number of the third spoke 17 is plural, and the plurality of third spokes 17 connects the plurality of first ring members 11, the plurality of second ring members 12 and the plurality of third ring members 131.
The fixing member 14 is fixedly connected to the substrate 10, sleeved on the second annular member 12 and spaced apart from the second annular member 12, that is, the second annular member 12 is disposed inside the fixing member 14 and spaced apart from the fixing member 14.
The base 10 and the fixing member 14 are fixedly connected by gluing, or the two are integrally formed, and the outer contour of the fixing member 14 may be a circle or a regular polygon star, which is illustrated as a circle in the present embodiment.
The second spokes 15 are disposed between the second annular member 12 and the fixing member 14 to connect the second annular member 12 and the fixing member 14.
Optionally, the number of the second spokes 15 is 4N, and the 4N second spokes 15 are arranged along the circumferential array of the second ring member 12, for example, in the embodiment, the number of the second spokes 15 is eight.
The electrode assembly 16 is fixedly connected to the substrate 10, and configured to form a capacitor with at least one of the first annular member 11, the second annular member 12, and the third annular member 131, so as to drive the first annular member 11 and the second annular member 12 to vibrate in a first direction and a second direction perpendicular to each other, and detect a vibration displacement of the first annular member 11 and the second annular member 12 in a direction forming an angle of 45 degrees with the first direction or a direction forming an angle of 135 degrees with the first direction.
In the present embodiment, the X-axis direction is taken as the first direction and the Y-axis direction is taken as the second direction as shown in fig. 3 as an example, but the first direction is not limited to the X-axis direction only and the second direction is taken as the Y-axis direction only.
Referring to fig. 5, 6 and 7, the electrode assembly 16 includes a first electrode set 161 and a second electrode set 162.
The first electrode group 161 includes a first driving electrode 1611 and a first detecting electrode 1612. The first drive electrode 1611 is spaced from the first ring 11 to form a first capacitor 1601. In operation, an alternating current is applied to the first driving electrode 1611, so that the first capacitor 1601 generates a driving force to drive the first ring 11 to vibrate along the first direction X and the second direction Y, thereby forming a first vibration pattern S1. First sensing electrode 1612 is spaced apart from first ring 11 to form second capacitor 1602. The second electrode group 162 includes a second driving electrode 1621 and a second detecting electrode 1622. The second driving electrode 1621 and the second annular member 12 are spaced to form a third capacitor 1603, and during operation, alternating current is input to the third capacitor 1603 so that the third capacitor 1603 drives the second annular member 12 to vibrate along the first direction X and the second direction Y to form a second vibration mode S2, and the first vibration mode S1 and the second vibration mode S2 vibrate asynchronously. A second sensing electrode 1622 is spaced apart from the second ring 12 to form a fourth capacitor 1604. The first vibration pattern S1 and the second vibration pattern S2 are opposite vibrations.
Specifically, the gyroscope 1 is generally applied to an electronic product, and when the electronic product is not rotated during use, the first ring 11 vibrates in the first direction X and the second direction Y under the driving action of the driving force generated by the first capacitor 1601, and the second ring 12 vibrates in the first direction X and the second direction Y under the driving action of the driving force generated by the third capacitor 1063, so as to form a vibration mode as shown in fig. 5.
When the electronic product rotates, according to the coriolis principle, the rotational angular velocity of the electronic product generates a first coriolis force resultant force F3 of the first ring 11 in the 45 degree direction D and the 135 degree direction M and a second coriolis force resultant force F4 of the second ring 12 in the 45 degree direction D and the 135 degree direction M, the first coriolis force resultant force F3 and the second coriolis force resultant force F4 respectively force the first ring 11 and the second ring 12 to vibrate in the 45 degree direction D and the 135 degree direction M, so as to form a detection mode as shown in fig. 6, and the second capacitor 1602 is used for detecting the vibration displacement of the first ring 11 in the 45 degree direction D and the 135 degree direction M, that is, calculating the vibration displacement according to the change of the capacitor; the fourth capacitor 1604 is configured to detect vibration displacements of the second annular component 12 along the 45-degree direction D and the 135-degree direction M, that is, calculate the vibration displacement according to a change of the capacitor, and obtain an angular velocity of the rotation of the electronic product through calculation processing.
When the first annular element 11 and the second annular element 12 vibrate as described above, deformation occurs, and the third annular element 131 located between the first annular element 11 and the second annular element 12 also deforms, so that the gyroscope 1 in this embodiment has greater rigidity and higher modal frequency, i.e., better vibration resistance, and meanwhile, because the outer contours of the first annular element 11, the second annular element 12, and the third annular element 131 in this embodiment are all right-angled stars, the deformation difficulty is reduced, the thermoelastic loss is small, and the quality factor of the MEMS gyroscope is improved.
It is understood that, in this embodiment, the first ring 11 is driven to vibrate by the first driving electrode 1611, the vibrational displacement is detected by the first detecting electrode 1612, the second ring 12 is driven to vibrate by the second driving electrode 1621, and the vibrational displacement of the second ring 12 is detected by the second detecting electrode 1622, in other embodiments, the first ring 11 and the second ring 12 may be driven to vibrate by only one driving electrode, for example, the first capacitor 1602 formed by the first driving electrode 1611 and the first ring 11 or the third capacitor 1603 formed by the second driving electrode 1621 and the second ring 12 may drive the first ring 11 and the second ring 12 to vibrate in the first direction and the second direction, or the vibrational displacement of the first ring 11 and the second ring 12 may be detected by only one detecting electrode, for example, the third capacitor 1603 formed by the first detecting electrode 1612 and the first ring 11 or the fourth ring 1603 formed by the second driving electrode 1622 and the second ring 12 may be detected by only one detecting electrode The capacitor 1604 detects the vibration displacement of the first annular member 11 and the second annular member 12 along the 45 degree direction or the 135 degree direction, and finally obtains the angular velocity of the rotation of the electronic product, the principle of which is the same as that described above, and is not described herein again.
Further, in this embodiment, at least one of the first electrode assembly 161 and the second electrode assembly 162 further includes a functional electrode 1613, and the functional electrode 1613 includes a plurality of electrodes that can be used for applying force/detecting, tuning frequency, or eliminating quadrature error, respectively, in this embodiment, the first electrode assembly 161 and the second electrode assembly 162 each include a plurality of functional electrodes 1613.
Alternatively, in the present embodiment, the first electrode group 161 is annularly disposed on the inner side of the first annular member 11, and the second electrode group 162 is annularly disposed on the outer side of the second annular member 12, but in other embodiments, the arrangement of the first electrode group 161 and the second electrode group 162 is not limited thereto, for example, the number of the first electrode group 161 and the second electrode group 162 is two, two first electrode groups 161 are annularly disposed on the inner side and the outer side of the first annular member 11, and two second electrode groups 162 are annularly disposed on the inner side and the outer side of the second annular member 12.
The present embodiment also provides an electronic product including the MEMS gyroscope 1 in the above embodiment.
Unlike the prior art, the MEMS gyroscope provided in this embodiment includes a substrate; a first ring member suspended from the base; the second annular piece is sleeved outside the first annular piece, arranged at an interval with the first annular piece and suspended on the substrate; the connecting assembly is arranged between the first annular piece and the second annular piece and comprises a third annular piece and a plurality of first spokes, the third annular piece is sleeved outside the first annular piece, is respectively arranged at intervals with the first annular piece and the second annular piece and is suspended on the substrate, and the first spokes are respectively connected with the first annular piece and the third annular piece as well as the second annular piece and the third annular piece; the fixing piece is fixedly connected with the substrate, sleeved outside the second annular piece and arranged at intervals with the second annular piece; the second spoke is connected with the second annular part and the fixing part; and the electrode assembly is fixedly connected with the substrate and used for forming a capacitor with at least one of the first annular piece, the second annular piece and the third annular piece so as to drive the first annular piece and the second annular piece to vibrate along a first direction and a second direction which are vertical to each other and detect the vibration displacement of the first annular piece and the second annular piece along a direction which forms a 45-degree angle with the first direction or a 135-degree angle with the first direction.
The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.
Claims (10)
1. A MEMS gyroscope, comprising:
a substrate;
a first ring member suspended from the base;
the second annular piece is sleeved outside the first annular piece, arranged at an interval with the first annular piece and suspended on the substrate;
the connecting assembly is arranged between the first annular piece and the second annular piece and comprises a third annular piece and a plurality of first spokes, the third annular piece is sleeved outside the first annular piece, is respectively arranged at intervals with the first annular piece and the second annular piece and is suspended on the substrate, and the first spokes are respectively connected with the first annular piece and the third annular piece and the second annular piece and the third annular piece;
the fixing piece is fixedly connected with the substrate, sleeved outside the second annular piece and arranged at intervals with the second annular piece;
a second spoke connecting the second ring member and the fixing member;
and the electrode assembly is fixedly connected with the substrate and is used for forming a capacitor with at least one of the first annular piece, the second annular piece and the third annular piece so as to drive the first annular piece and the second annular piece to vibrate along a first direction and a second direction which are mutually perpendicular and detecting the vibration displacement of the first annular piece and the second annular piece along a direction which forms an included angle of 45 degrees with the first direction or a direction which forms an included angle of 135 degrees with the first direction.
2. The MEMS gyroscope of claim 1, wherein the electrode assembly comprises a first electrode group and a second electrode group, the first electrode group comprises a first driving electrode and a first detecting electrode, the first driving electrode is spaced apart from the first ring-shaped member to form a first capacitor, and the first capacitor is configured to drive the first ring-shaped member to vibrate in the first direction and the second direction to form a first vibration mode;
the second electrode group comprises a second driving electrode and a second detection electrode, the second driving electrode and the second annular part are arranged at intervals to form a third capacitor, and the third capacitor is used for driving the second annular part to vibrate along the first direction and the second direction to form a second vibration mode;
the first vibration form vibrates asynchronously with the second vibration form.
3. The MEMS gyroscope of claim 2, wherein the first sensing electrode is spaced apart from the first ring element to form a second capacitance for sensing vibrational displacement of the first ring element in the 45 degree direction or the 135 degree direction, and wherein the second sensing electrode is spaced apart from the second ring element to form a fourth capacitance for sensing vibrational displacement of the second ring element in the 45 degree direction or the 135 degree direction.
4. The MEMS gyroscope of claim 2, wherein the first set of electrodes is arranged annularly on an inner side of the first ring-shaped member and the second set of electrodes is arranged annularly on an outer side of the second ring-shaped member.
5. The MEMS gyroscope of claim 1, wherein at least one of the first ring-shaped member, the second ring-shaped member, and the third ring-shaped member is plural in number, the plurality of first ring-shaped members and/or the plurality of second ring-shaped members and/or the plurality of third ring-shaped members are spaced apart from one another, the gyroscope further comprising a third spoke connecting the plurality of first ring-shaped members and/or the plurality of second ring-shaped members and/or the plurality of third ring-shaped members.
6. The MEMS gyroscope of claim 1, wherein the first, second, and third ring segments have outer contours that are positive 8M, positive 8N, and positive 8L, respectively, wherein M, N, L is a positive integer.
7. The MEMS gyroscope of claim 6, wherein the star angle numbers of the first ring member, the second ring member, and the third ring member satisfy N ≧ L ≧ M.
8. The MEMS gyroscope of claim 6, wherein the number of the second spokes is 4N, and the 4N second spokes are arranged in a circumferential array along the second ring member.
9. The MEMS gyroscope of claim 2, wherein at least one of the first set of electrodes and the second set of electrodes further comprises a functional electrode comprising a plurality of electrodes for forcing, detecting, frequency modulating, or eliminating quadrature errors.
10. An electronic product, characterized in that it comprises a MEMS gyroscope according to any of claims 1 to 9.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021346446.7U CN213120570U (en) | 2020-07-09 | 2020-07-09 | MEMS gyroscope and electronic product |
| PCT/CN2020/107694 WO2022007092A1 (en) | 2020-07-09 | 2020-08-07 | Mems gyroscope and electronic product |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202021346446.7U CN213120570U (en) | 2020-07-09 | 2020-07-09 | MEMS gyroscope and electronic product |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US8158448B2 (en) * | 2009-04-27 | 2012-04-17 | The Boeing Company | Resonator and methods of making resonators |
| US9879997B1 (en) * | 2013-11-19 | 2018-01-30 | Hrl Laboratories, Llc | Quartz resonator with plasma etched tethers for stress isolation from the mounting contacts |
| US10746548B2 (en) * | 2014-11-04 | 2020-08-18 | Analog Devices, Inc. | Ring gyroscope structural features |
| CN108613669B (en) * | 2018-06-27 | 2022-02-22 | 苏州文智芯微系统技术有限公司 | Regular polygon disc-shaped MEMS (micro-electromechanical systems) resonance gyroscope |
| CN109186577A (en) * | 2018-10-29 | 2019-01-11 | 西北工业大学 | A kind of novel positive twelve edge annular resonance declines mechanical gyro |
| CN111156981A (en) * | 2019-12-31 | 2020-05-15 | 瑞声科技（南京）有限公司 | MEMS gyroscope |
| CN111156980A (en) * | 2019-12-31 | 2020-05-15 | 瑞声科技（南京）有限公司 | MEMS gyroscope |
| CN111156982A (en) * | 2019-12-31 | 2020-05-15 | 瑞声科技（南京）有限公司 | MEMS gyroscope |
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