WO2022007010A1 - 用于 mems 麦克风的振膜及 mems 麦克风 - Google Patents

用于 mems 麦克风的振膜及 mems 麦克风 Download PDF

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Publication number
WO2022007010A1
WO2022007010A1 PCT/CN2020/104034 CN2020104034W WO2022007010A1 WO 2022007010 A1 WO2022007010 A1 WO 2022007010A1 CN 2020104034 W CN2020104034 W CN 2020104034W WO 2022007010 A1 WO2022007010 A1 WO 2022007010A1
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Prior art keywords
main body
diaphragm
body portion
anchoring
connection
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PCT/CN2020/104034
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English (en)
French (fr)
Inventor
赵转转
但强
王凯杰
李杨
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瑞声声学科技(深圳)有限公司
瑞声科技（南京）有限公司
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Publication of WO2022007010A1 publication Critical patent/WO2022007010A1/zh

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones

Definitions

  • the present application relates to MEMS microphones, and in particular, to a diaphragm for a MEMS microphone and a MEMS microphone.
  • the existing capacitive MEMS microphone chip is mainly composed of a capacitor part and a base part, and specifically includes a base structure with a back cavity, a diaphragm and a fixed back plate structure on the upper part of the base.
  • the diaphragm and the fixed back plate structure form a capacitive system.
  • Sensitivity is one of the important indicators to measure the performance of a microphone. The higher the sensitivity, the higher the signal-to-noise ratio of the microphone. Microphones with high signal-to-noise ratio are the diligent pursuit of various microphone manufacturers in recent years.
  • the sensitivity of the microphone is related to many parameters of the diaphragm, such as the material, stiffness, structure of the diaphragm, and the capacitance between the diaphragm electrode and the back plate electrode.
  • Figure 1 shows the existing diaphragm structure. It uses four anchoring structures to fix the diaphragm, so that the diaphragm is surrounded by free structures. Compared with other microphone manufacturers, this design fixes the diaphragm. Around the membrane, it can improve the sensitivity of the diaphragm. However, the disadvantage of this design is that the edge area of the diaphragm is sacrificed, so that the capacitance between the diaphragm electrode and the back plate electrode is reduced, thereby reducing the sensitivity of the microphone to a certain extent. Therefore, it is necessary to provide a new technical solution to solve the above-mentioned defects.
  • the purpose of this application is to provide a diaphragm for a MEMS microphone and a MEMS microphone.
  • the present application provides a diaphragm for a MEMS microphone
  • the diaphragm includes a square main body part and a first anchoring part extending outward from the four corners of the main body part, the first anchoring part It comprises a connecting part extending outward from the main body part and a supporting part extending outward from the connecting part, the main body part extending outward to form an outer membrane, and the connection between the outer membrane and the connecting part forms a rounded corner.
  • the outer membrane includes a first side connected to the connecting portion and a second side connected to the first side and spaced from the main body portion, and the second side is a straight side.
  • the second side is relatively parallel to the main body portion.
  • connection between the first side and the connection portion forms a rounded corner greater than 90 degrees.
  • the outer membrane includes a first side connected to the connecting portion and a second side connected to the first side and spaced from the main body portion, and the second side is an arc side.
  • connection between the first side and the connection portion forms a rounded corner less than 90 degrees.
  • the adventitia between adjacent first anchoring portions is arc-shaped, and the arc-shaped adventitia is connected to the connecting portion.
  • the adventitia between adjacent first anchoring parts is provided with a second anchoring part.
  • the distances from the second anchoring parts to the adjacent first anchoring parts are equal.
  • the present application also provides a MEMS microphone, including a substrate, a back plate with a plurality of sound holes fixed on the substrate through a support end, and a diaphragm, the diaphragm includes a square main body and four corners of the main body.
  • An outwardly extending first anchoring portion the first anchoring portion comprising a connecting portion extending outwardly from the main body portion and a supporting portion extending outwardly from the connecting portion, the main body portion extending outwardly to form an adventitia, so
  • the connection between the outer membrane and the connecting portion forms a rounded corner, and the vibrating membrane is fixed on the back plate or the base plate through the first anchoring portion.
  • the beneficial effect of the present application is to provide a vibrating membrane for a MEMS microphone, the vibrating membrane comprising a square main body part and a first anchoring part extending outward from the four corners of the main body part, the first anchoring part It comprises a connecting part extending outward from the main body part and a supporting part extending outward from the connecting part, the main body part extending outward to form an outer membrane, and the connection between the outer membrane and the connecting part forms a rounded corner.
  • rounded corners are provided at the connection between the main body portion of the diaphragm and the first anchoring portion to increase the area of the diaphragm, thereby achieving the purpose of increasing the sensitivity of the MEMS microphone.
  • FIG. 1 is a schematic diagram of a diaphragm structure of an existing MEMS microphone
  • FIG. 2 is a schematic diagram of a first embodiment of a partial diaphragm structure of the application
  • FIG. 3 is a schematic diagram of a second embodiment of a partial diaphragm structure of the present application.
  • FIG. 4 is a schematic diagram of a third embodiment of a partial diaphragm structure of the present application.
  • FIG. 5 is a schematic diagram of a fourth embodiment of a partial diaphragm structure of the present application.
  • FIG. 6 is a schematic diagram of a fifth embodiment of a partial diaphragm structure of the present application.
  • FIG. 7 is a schematic diagram of a sixth embodiment of a partial diaphragm structure of the present application.
  • the diaphragm for a MEMS microphone provided in this application is applied to a MEMS chip of the MEMS microphone, where the MEMS chip includes a substrate, an insulating layer connected to the substrate, and a diaphragm located in the insulating layer.
  • the base of the silicon material is provided with a through hole for balancing the sound pressure
  • the upper part of the through hole is a back plate
  • the back plate is provided with an acoustic hole for conducting sound and balancing the sound pressure
  • the upper part of the back plate is opposite to the diaphragm
  • the back plate is required to have good electrical conductivity and is formed by a silicon etching process; the diaphragm and the back plate each form a small gap relative to each other to form an electric field.
  • the value of ⁇ 0 ⁇ r is also fixed, S is the area facing the two electric plates of the capacitor, and d is the distance between the two plates, so the sensitivity of the diaphragm is very important. important.
  • the present application provides a diaphragm for a MEMS microphone.
  • the diaphragm includes a square body portion 20 and a first anchor portion 30 extending outward from the four corners of the body portion 20 .
  • the first anchoring portion 30 includes a connecting portion 31 extending outward from the main body portion 20 and a supporting portion 32 extending further outward from the connecting portion 31 .
  • the main body portion 20 extends outward to form an outer membrane 40 , and the connection between the outer membrane 40 and the connecting portion 31 forms a fillet 41 .
  • the outer membrane 40 includes a first edge 42 connected to the connecting portion 31 and a first edge 42 connected to the first edge 42 and spaced from the main body portion 20 .
  • the second side 43 is a straight side, and further, the second side 43 is relatively parallel to the main body portion 20 .
  • connection between the first side 42 of the outer film 40 and the connecting portion 31 forms a rounded corner 41 with a degree greater than 90 degrees.
  • connection between the first side 42 of the outer film 40 and the connection portion 31 forms a rounded corner 41 with a degree of less than 90 degrees.
  • the outer membrane 40 includes a first edge 42 connected to the connecting portion 31 , and a first edge 42 connected to the first edge 42 and spaced from the main body portion 20 .
  • the second side 43 is provided, and the second side 43 is an arc side.
  • connection between the first side 42 and the connecting portion 31 forms a rounded corner 41 with a degree greater than 90 degrees.
  • connection between the first side 42 and the connection portion 31 forms a rounded corner 41 with a degree of less than 90 degrees.
  • rounded corners 41 are provided at the connection between the main body portion 20 of the diaphragm and the first anchor portion 30 to increase the area of the diaphragm, thereby achieving the purpose of increasing the sensitivity of the MEMS microphone.
  • the design of the rounded corners 41 can prevent the stress at the position of the rounded corners 41 from being too concentrated to affect the reliability of the MEMS microphone.
  • the arc edge is arc-shaped to form an arc-shaped outer membrane 40 , which is arranged on the adjacent first Between an anchoring portion 30 , the arcuate outer membrane 40 is connected to the connecting portion 31 to form a rounded corner 41 . As shown in FIGS. 6 to 7 , the rounded corners 41 are greater than 90 degrees.
  • the outer diaphragm 40 between the adjacent first anchoring parts 30 is provided with a second anchoring part. 50.
  • the design of the second anchoring part 50 can increase the rigidity of the diaphragm while increasing the area of the diaphragm, so that the frequency corresponding to the high-energy peak of the noise in the noise curve moves to the high-energy direction, thereby reducing noise and improving the performance of the MEMS microphone.
  • Signal-to-noise ratio Preferably, please refer to FIG. 7 again, the distances from the second anchoring portion 50 to the adjacent first anchoring portion 30 are the same.
  • FIG. 6 to FIG. 7 are only schematic diagrams of two of the embodiments. According to the actual situation, the number of the second anchoring parts 50 can be designed to be any integer greater than 1.
  • FIG. 2 to FIG. 7 are only schematic diagrams of the six embodiments, and the angle of the rounded corner 41 can be freely set according to the actual situation.
  • the present application also provides a MEMS microphone, which is mainly used in a mobile phone to receive sound and convert the sound into an electrical signal.
  • the MEMS microphone includes a substrate, a back with several sound holes fixed on the substrate through a support end. Plate and diaphragm.
  • the diaphragm includes a square main body portion 20 and a first anchor portion 30 extending outward from the four corners of the main body portion 20 .
  • the first anchor portion 30 includes A connecting portion 31 extending outward from the main body portion 20 and a supporting portion 32 extending outward from the connecting portion 31 .
  • the main body portion 20 extends outward to form an outer film 40 , the connection between the outer film 40 and the connecting portion 31 forms a fillet 41 , and the vibrating film is fixed on the back plate or the base plate through the first anchoring portion 30 . superior.
  • the present application provides a diaphragm for a MEMS microphone
  • the diaphragm includes a square main body part and a first anchoring part extending outwards from four corners of the main body part
  • the first anchoring part includes an outwardly extending part from the main body part
  • the extending connecting portion and the supporting portion extending outward from the connecting portion
  • the main body portion extends outward to form an outer membrane
  • the connection between the outer membrane and the connecting portion forms a rounded corner.
  • rounded corners are provided at the connection between the main body portion of the diaphragm and the first anchoring portion to increase the area of the diaphragm, thereby achieving the purpose of increasing the sensitivity of the MEMS microphone.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)

Abstract

本申请提供一种用于MEMS麦克风的振膜，所述振膜包括方型主体部和由主体部四角向外延伸的第一锚定部，所述第一锚定部包括由主体部向外延伸的连接部和从连接部向外延伸的支撑部，所述主体部向外延伸形成外膜，所述外膜与所述连接部的连接处形成圆角。本申请主要通过在振膜的主体部与第一锚定部的连接处设置圆角，以增大振膜的面积，从而达到增大MEMS麦克风灵敏度的目的。

Description

用于MEMS麦克风的振膜及MEMS麦克风 技术领域
本申请涉及MEMS麦克风，尤其涉及一种用于MEMS麦克风的振膜及MEMS麦克风。
 背景技术
现有电容式MEMS麦克风芯片主要由电容部分和基底部分构成，具体包括具有背腔的基底结构，以及位于基底上部的振膜和固定背板结构。振膜和固定背板结构组成了电容系统，当声压作用于振膜时，正对背板与背对背板的振膜两平面间存在压强差，使得振膜与背板间的距离发生相对变化，从而引起振膜电极与背板电极间的电容变化，进而实现声音信号到电信号的转换。灵敏度是衡量麦克风性能的重要指标之一，灵敏度越高，麦克风的信噪比越高，高信噪比的麦克风是近年来各个麦克风制造商孜孜不倦的追求。麦克风的灵敏度与振膜的很多参数有关，譬如振膜的材料，刚度、结构以及振膜电极与背板电极间的电容有关。
请参考图1，图1为现有振膜结构，它是通过采用4个锚定结构来固定振膜，以使得振膜的四周都是自由结构，这种设计相对于其他麦克风制造商固定振膜的四周，更能提高振膜的灵敏度。但是，这样设计的弊端是牺牲了振膜的边缘面积，使得振膜电极与背板电极间的电容减小，从而对麦克风的灵敏度造成一定的降低。因此，有必要提供一种新的技术方案以解决上述缺陷。
 技术问题
本申请的目的在于提供了一种用于MEMS麦克风的振膜及MEMS麦克风。
 技术解决方案
为达到上述目的，本申请提供了一种用于MEMS麦克风的振膜，所述振膜包括方型主体部和由主体部四角向外延伸的第一锚定部，所述第一锚定部包括由主体部向外延伸的连接部和从连接部向外延伸的支撑部，所述主体部向外延伸形成外膜，所述外膜与所述连接部的连接处形成圆角。
优选的，所述外膜包括与所述连接部连接的第一边以及与所述第一边连接并与所述主体部间隔设置的第二边，所述第二边为直边。
优选的，所述第二边与所述主体部相对平行设置。
优选的，所述第一边与所述连接部的连接处形成大于90度的圆角。
优选的，所述外膜包括与所述连接部连接的第一边以及与所述第一边连接并与所述主体部间隔设置的第二边，所述第二边为弧边。
优选的，所述第一边与所述连接部的连接处形成小于90度的圆角。
优选的，相邻的第一锚定部之间的外膜圆弧状，所述圆弧状的外膜与所述连接部连接。
优选的，相邻的第一锚定部之间的外膜设有第二锚定部。
优选的，所述第二锚定部到相邻的第一锚定部的距离相等。
本申请还提供了一种MEMS麦克风，包括基板、通过支撑端固定在所述基板上的带有数个声孔的背极板以及振膜，所述振膜包括方型主体部和由主体部四角向外延伸的第一锚定部，所述第一锚定部包括由主体部向外延伸的连接部和从连接部向外延伸的支撑部，所述主体部向外延伸形成外膜，所述外膜与所述连接部的连接处形成圆角，所述振膜通过第一锚定部固定在背极板或基板上。
 有益效果
本申请的有益效果在于：提供了一种用于MEMS麦克风的振膜，所述振膜包括方型主体部和由主体部四角向外延伸的第一锚定部，所述第一锚定部包括由主体部向外延伸的连接部和从连接部向外延伸的支撑部，所述主体部向外延伸形成外膜，所述外膜与所述连接部的连接处形成圆角。本申请主要通过在振膜的主体部与第一锚定部的连接处设置圆角，以增大振膜的面积，从而达到增大MEMS麦克风灵敏度的目的。
 附图说明
图1为现有的MEMS麦克风的振膜结构示意图；
图2为本申请的部分振膜结构第一实施例的示意图；
图3为本申请的部分振膜结构第二实施例的示意图；
图4为本申请的部分振膜结构第三实施例的示意图；
图5为本申请的部分振膜结构第四实施例的示意图；
图6为本申请的部分振膜结构第五实施例的示意图；
图7为本申请的部分振膜结构第六实施例的示意图。
 本发明的实施方式
下面结合附图和实施方式对本申请作进一步说明。
需要说明的是，本申请实施例中所有方向性指示（诸如上、下、左、右、前、后、内、外、顶部、底部……）仅用于解释在某一特定姿态（如附图所示）下各部件之间的相对位置关系等，如果该特定姿态发生改变时，则该方向性指示也相应地随之改变。
还需要说明的是，当元件被称为“固定于”或“设置于”另一个元件上时，该元件可以直接在另一个元件上或者可能同时存在居中元件。当一个元件被称为“连接”另一个元件，它可以是直接连接另一个元件或者可能同时存在居中元件。
本申请提供的用于MEMS麦克风的振膜，应用于MEMS麦克风的MEMS芯片上，所述MEMS芯片包括基底、与基底相连的绝缘层和位于该绝缘层内的振膜。通常情况下，硅材料的基底开设有平衡声压的贯穿孔，所述贯穿孔上部是背板，背板上开设有传导声音及平衡声压的声学孔，背板上部相对的是振膜，为了与振膜形成电容结构，背板要求具有良好的导电性，用硅腐蚀工艺形成；振膜与背板各自相对形成很小的间隙构成电场。在工作状态时，振膜在声压的作用下发生形变，振膜与背板之间电场的电容值发生变化，电容变化值反映出声压的大小，由于背板不会发生形变，所以振膜形变的大小直接影响电容值。电容值是这样计算的：电容值与振膜与背板之间的正对面积成正比，与振膜与背板之间的距离成反比，即C＝kε 0ε rS/d，k为常数，ε 0为常数，ε r为常数。当MEMS麦克风制作出来后，ε 0ε r的值也就固定了，S是电容两个电板之间正对的面积，d为两个电板之间的距离，所以振膜的灵敏度至关重要。
请参考图2至图5，本申请提供了一种用于MEMS麦克风的振膜，所述振膜包括方型的主体部20和由主体部20四角向外延伸的第一锚定部30，所述第一锚定部30包括由主体部20向外延伸的连接部31和从连接部31向外进一步延伸的支撑部32。所述主体部20向外延伸形成外膜40，所述外膜40与所述连接部31的连接处形成圆角41。
请参考图2至图3，一可选实施例中，所述外膜40包括与所述连接部31连接的第一边42以及与所述第一边42连接并与所述主体部20间隔设置的第二边43。优选的，所述第二边43为直边，进一步的，所述第二边43与所述主体部20相对平行设置。
一可选实施例中，请再参考图2，所述外膜40的第一边42与所述连接部31的连接处形成大于90度的圆角41。
另一可选实施例中，请再参考图3，所述外膜40的第一边42与所述连接部31的连接处形成小于90度的圆角41。
请参考图4至图5，一可选实施例中，所述外膜40包括与所述连接部31连接的第一边42以及与所述第一边42连接并与所述主体部20间隔设置的第二边43，所述第二边43为弧边。
一可选实施例中，请再参考图4，所述第一边42与所述连接部31的连接处形成大于90度的圆角41。
另一可选实施例中，请再参考图5，所述第一边42与所述连接部31的连接处形成小于90度的圆角41。
本申请主要通过在振膜的主体部20与第一锚定部30的连接处设置圆角41，以增大振膜的面积，从而达到增大MEMS麦克风灵敏度的目的。所述圆角41的设计可以使圆角41所在位置的应力不至于太过集中而影响MEMS麦克风的可靠性。
请参考图6至图7，一可选实施例中，在图4的基础上进一步发展，所述弧边为圆弧状，以形成圆弧状的外膜40，并设置在相邻的第一锚定部30之间，所述圆弧状的外膜40与所述连接部31连接，以形成圆角41。如图6至图7所示，所述圆角41大于90度。
进一步的，为避免振膜面积增加太多而引起振膜在声压作用时与基底部分接触而造成短路，相邻的第一锚定部30之间的外膜40设有第二锚定部50。所述第二锚定部50的设计，可以在增加振膜面积的同时，提高振膜的刚度，使得噪声曲线中噪声高能峰所对应的频率向高能方向移动，从而减少噪声，提高MEMS麦克风的信噪比。优选的，请再参考图7，所述第二锚定部50到相邻的第一锚定部30的距离相等。
可以理解的是，图6至图7只是其中两个实施例的示意图，根据实际情况，所述第二锚定部50的数量可以设计成大于1的任意整数。
可以理解的是，图2至图7只是其中六个实施例的示意图，根据实际情况，圆角41的角度可以自由设定。
本申请还提供了一种MEMS麦克风，主要用于手机上，接受声音并将声音转化为电信号，所述MEMS麦克风包括基板、通过支撑端固定在所述基板上的带有数个声孔的背极板以及振膜。
所述振膜如图2至图7所示，所述振膜包括方型的主体部20和由主体部20四角向外延伸的第一锚定部30，所述第一锚定部30包括由主体部20向外延伸的连接部31和从连接部31向外延伸的支撑部32。所述主体部20向外延伸形成外膜40，所述外膜40与所述连接部31的连接处形成圆角41，所述振膜通过第一锚定部30固定在背极板或基板上。
本申请提供一种用于MEMS麦克风的振膜，所述振膜包括方型主体部和由主体部四角向外延伸的第一锚定部，所述第一锚定部包括由主体部向外延伸的连接部和从连接部向外延伸的支撑部，所述主体部向外延伸形成外膜，所述外膜与所述连接部的连接处形成圆角。本申请主要通过在振膜的主体部与第一锚定部的连接处设置圆角，以增大振膜的面积，从而达到增大MEMS麦克风灵敏度的目的。
以上所述的仅是本申请的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本申请创造构思的前提下，还可以做出改进，但这些均属于本申请的保护范围。 

Claims (10)

1、一种用于MEMS麦克风的振膜，所述振膜包括方型主体部和由主体部四角向外延伸的第一锚定部，所述第一锚定部包括由主体部向外延伸的连接部和从连接部向外延伸的支撑部，其特征在于：所述主体部向外延伸形成外膜，所述外膜与所述连接部的连接处形成圆角。
2、根据权利要求1所述的振膜，其特征在于，所述外膜包括与所述连接部连接的第一边以及与所述第一边连接并与所述主体部间隔设置的第二边，所述第二边为直边。
3、根据权利要求2所述的振膜，其特征在于，所述第二边与所述主体部相对平行设置。
4、根据权利要求2所述的振膜，其特征在于，所述第一边与所述连接部的连接处形成大于90度的圆角。
5、根据权利要求1所述的振膜，其特征在于，所述外膜包括与所述连接部连接的第一边以及与所述第一边连接并与所述主体部间隔设置的第二边，所述第二边为弧边。
6、根据权利要求2或5所述的振膜，其特征在于，所述第一边与所述连接部的连接处形成小于90度的圆角。
7、根据权利要求1所述的振膜，其特征在于，相邻的第一锚定部之间的外膜圆弧状，所述圆弧状的外膜与所述连接部连接。
8、根据权利要求7所述的振膜，其特征在于，相邻的第一锚定部之间的外膜设有第二锚定部。
9、根据权利要求8所述的振膜，其特征在于，所述第二锚定部到相邻的第一锚定部的距离相等。
10、一种MEMS麦克风，包括基板、通过支撑端固定在所述基板上的带有数个声孔的背极板以及振膜，所述振膜包括方型主体部和由主体部四角向外延伸的第一锚定部，所述第一锚定部包括由主体部向外延伸的连接部和从连接部向外延伸的支撑部，其特征在于，所述主体部向外延伸形成外膜，所述外膜与所述连接部的连接处形成圆角，所述振膜通过第一锚定部固定在背极板或基板上。
 
PCT/CN2020/104034 2020-07-06 2020-07-24 用于 mems 麦克风的振膜及 mems 麦克风 WO2022007010A1 (zh)

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