WO2021237808A1 - 压电式mems麦克风 - Google Patents

压电式mems麦克风 Download PDF

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Publication number
WO2021237808A1
WO2021237808A1 PCT/CN2020/095622 CN2020095622W WO2021237808A1 WO 2021237808 A1 WO2021237808 A1 WO 2021237808A1 CN 2020095622 W CN2020095622 W CN 2020095622W WO 2021237808 A1 WO2021237808 A1 WO 2021237808A1
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Prior art keywords
diaphragm
mems microphone
piezoelectric mems
protective plate
reinforcing rib
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PCT/CN2020/095622
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English (en)
French (fr)
Inventor
段炼
张睿
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AAC Technologies Holdings Shenzhen Co Ltd
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AAC Acoustic Technologies Shenzhen Co Ltd
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Publication of WO2021237808A1 publication Critical patent/WO2021237808A1/zh
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms

Definitions

  • the utility model relates to the technical field of sound and electricity, in particular to a piezoelectric MEMS microphone.
  • piezoelectric MEMS microphones have many advantages over traditional capacitive MEMS microphones, including dust and water resistance, and higher maximum output sound pressure (AOP).
  • AOP maximum output sound pressure
  • many of the diaphragms of piezoelectric MEMS microphones are cantilever beam structures with one end fixed and one end free.
  • Figure 1 shows the design structure of a typical cantilever beam diaphragm of a piezoelectric microphone.
  • the diaphragm 2 itself is relatively fragile, it is easy to produce a larger impact when subjected to a large impact in a reliability test.
  • the protective plate 3 is mostly formed by a number of trusses 301 (straight beams) (as shown in FIG. 2) or perforated plates (circular or polygonal holes).
  • the cross section of the truss 301 of the protection plate 3 is mostly rectangular (as shown in FIG. 3), and the rectangular cross section is prone to deformation and fracture, and the strength is limited, and deformation is prone to occur.
  • the purpose of the utility model is to provide a piezoelectric MEMS microphone with higher structural strength.
  • a piezoelectric MEMS microphone includes a base, a vibrating membrane installed on the base, and a protective plate arranged at a distance from the vibrating membrane, and a reinforcing rib is arranged on the protective plate.
  • the reinforcing rib is located at least on any side of the protective plate facing or away from the diaphragm.
  • the reinforcing rib has a rectangular cross section, the rectangular cross section is parallel to the vibration direction of the diaphragm, and the reinforcing rib is only distributed in a partial area of the protective plate.
  • the reinforcing rib has a non-rectangular cross section, and the non-rectangular cross section is parallel to the vibration direction of the diaphragm.
  • the material of the reinforcing rib is silicon nitride.
  • the diaphragm includes a fixed end connected to the base and a suspended free end.
  • the protective plate includes a limiting portion for limiting the free end in the vibration direction of the diaphragm, and an edge fixing portion connected with the base, and the reinforcing ribs are distributed on the limiting portion.
  • the limiting portion is a hollow structure, the limiting portion is formed by a plurality of trusses, and the stiffeners are evenly distributed or randomly distributed along the trusses.
  • the limiting portion is a hollow structure, the limiting portion is formed by a perforated plate, and the reinforcing ribs are evenly distributed or randomly distributed along the perforated plate.
  • the reinforcing rib and the protective plate are integrally formed.
  • the utility model is provided with reinforcing ribs on the protective plate of the piezoelectric MEMS microphone, so that at least part of the area of the protective plate has a non-rectangular section in the direction parallel to the vibration of the diaphragm, which improves the structural strength of the protective plate.
  • the diaphragm is not prone to breakage under the impact.
  • Figure 1 is a schematic diagram of a partial structure of a piezoelectric MEMS microphone in the related art
  • FIG. 2 is a schematic diagram of another part of the structure of a piezoelectric MEMS microphone in the related art
  • Figure 3 is a cross-sectional view at A-A in Figure 2;
  • FIG. 5 is an exploded view of a part of the structure of the piezoelectric MEMS microphone provided by the embodiment of the utility model;
  • Figure 6 is a schematic diagram of the structure of the protective plate and reinforcing ribs provided by an embodiment of the utility model
  • Fig. 7 is a partial enlarged view of B in Fig. 6;
  • Figure 8 is a first cross-sectional schematic view of the protective plate and the reinforcing rib provided by the embodiment of the utility model;
  • Figure 9 is a second cross-sectional schematic view of the protective plate and the reinforcing rib provided by the embodiment of the present invention.
  • Figure 10 is a third cross-sectional schematic view of the protective plate and the reinforcing rib provided by the embodiment of the utility model;
  • FIG. 11 is a top view of a partial structure of a piezoelectric MEMS microphone provided by another embodiment of the present invention.
  • FIG. 12 is an exploded view of a part of the structure of a piezoelectric MEMS microphone provided by another embodiment of the present invention.
  • Fig. 13 is a partial enlarged view at C in Fig. 12.
  • a piezoelectric MEMS microphone includes a substrate 10, a diaphragm 20 mounted on the substrate 10, and a protection connected to the substrate 10 and spaced apart from the diaphragm 20
  • the plate 30 is provided with reinforcing ribs 40 on the protective plate 30.
  • the reinforcing rib 40 is arranged on the protective plate 30 of the piezoelectric MEMS microphone, so that the structural strength of the protective plate 30 is improved, and it is not easy to break under the impact of the diaphragm 20.
  • the reinforcing rib 40 is located at least on any side of the protective plate 30 facing or away from the diaphragm.
  • the reinforcing rib 40 has a rectangular cross section, the rectangular cross section is parallel to the vibration direction of the diaphragm 20, and the reinforcing ribs are only distributed in a partial area of the protective plate.
  • the reinforcing rib 40 has a non-rectangular cross-section, and the non-rectangular cross-section is parallel to the vibration direction of the diaphragm 20.
  • the cross-sectional shape of the reinforcing rib 40 may be triangular or T-shaped.
  • the reinforcing rib 40 on the protective plate 30 may have a single-shaped cross-sectional structure, or a combination of multiple different-shaped cross-sectional structures.
  • the material of the reinforcing rib 40 is silicon nitride.
  • Silicon nitride is generally formed by chemical weather deposition. By adjusting the deposition process parameters, the magnitude and direction of the stress inside the silicon nitride can be controlled.
  • adjusting the magnitude and direction of the stress existing in the diaphragm 20 can make the protective plate 30 in a "tight" state. With the reinforcement ribs 40, the stability and strength of the protective plate 30 can be further improved.
  • the protective plate 30 and the reinforcing rib 40 can be made of the same material or different materials, and the two can be integrally formed or formed separately during the processing.
  • the diaphragm 20 includes a fixed end 21 connected to the base 10 and a suspended free end 22.
  • the protective plate 30 includes a limiting portion 31 for limiting the free end 22 in the vibration direction of the diaphragm 20, and an edge fixing portion 32 connected to the base 10, and the reinforcing rib 40 Distributed in the limiting portion 31.
  • the limiting portion 31 is a hollow structure, the limiting portion 31 is formed by a plurality of trusses, and the reinforcing ribs 40 are evenly distributed or randomly distributed along the trusses.
  • each truss is provided with one or more reinforcement ribs 40, or part of the truss is provided with one or more reinforcement ribs 40.
  • the limiting portion 31 is a hollow structure, the limiting portion 31 is formed of a perforated plate, and the reinforcing ribs 40 are evenly distributed or randomly distributed along the perforated plate. Specifically, reinforcing ribs 40 are provided around each hole of the perforated plate, or reinforcement ribs 40 are provided around part of the holes of the perforated plate.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

本实用新型提供了一种压电式MEMS麦克风，包括基底，安装在所述基底上的振膜，以及与所述振膜间隔设置的保护平板，所述保护平板上设有加强筋。本实用新型通过在压电式MEMS麦克风的保护平板上设置加强筋，使得保护平板的至少部分区域在平行于振膜振动的方向上，具有非矩形的截面，提高了保护平板的结构强度，在振膜的冲击下不容易发生断裂。

Description

压电式MEMS麦克风 技术领域
本实用新型涉及声电技术领域，尤其涉及一种压电式MEMS麦克风。
 背景技术
目前，压电式MEMS麦克风相比于传统的电容式MEMS麦克风具有很多优势，包括防尘性和防水性，较高的最大输出声压（AOP）等。为了减小残余应力对振膜表面造成的形变，从而减小噪底和提升灵敏度，压电式MEMS麦克风的振膜很多都是一端固定一端自由的悬臂梁结构。图1所示的是一个典型的压电麦克风的悬臂梁振膜设计结构，在实际应用中，由于振膜2本身较为脆弱，在可靠性测试中，遭受大的冲击力时，容易产生较大形变，会出现振膜2断裂，破损等情况。因此，需要设计结构对振膜2进行保护。如图2所示，较为普遍的做法是在振膜2的上表面或者下表面，间隔一段距离的位置，添加一个保护的平板结构3，当振膜2受到冲击发生较大形变时进行保护，阻止振膜2进一步变形，防止振膜2断裂。
在之前的设计中，保护平板3多由若干桁架301(直梁)（如图2所示）或者穿孔板(圆形或者多边形孔)形成。这一保护平板3的桁架301的截面多为矩形（如图3所示），矩形的截面容易出现形变和断裂，强度有限，容易发生形变。
因此，有必要提供一种新的压电式MEMS麦克风，提高保护平板的结构强度。
 技术问题
本实用新型的目的在于提供一种结构强度更高的压电式MEMS麦克风。
 技术解决方案
本实用新型的技术方案如下：
一种压电式MEMS麦克风，包括基底，安装在所述基底上的振膜，以及与所述振膜间隔设置的保护平板，所述保护平板上设有加强筋。
其中，所述加强筋至少位于所述保护平板朝向或背离所述振膜的任意一侧。
其中，所述加强筋具有矩形截面，所述矩形截面平行于所述振膜振动方向，且所述加强筋仅分布于所述保护平板的部分区域。
其中，所述加强筋具有非矩形截面，所述非矩形截面平行于所述振膜振动方向。
其中，所述加强筋的材料为氮化硅。
其中，所述振膜包括连接于所述基底的固定端和悬置的自由端。
其中，所述保护平板包括对所述自由端在振膜振动方向上进行限位的限位部，以及与所述基底连接的边缘固定部，所述加强筋分布于所述限位部。
其中，所述限位部为镂空结构，所述限位部由若干桁架形成，所述加强筋沿桁架均匀分布或随机分布。
其中，所述限位部为镂空结构，所述限位部由穿孔板形成，所述加强筋沿穿孔板均匀分布或随机分布。
其中，所述加强筋和所述保护平板一体成型。
 有益效果
本实用新型的有益效果在于：
本实用新型通过在压电式MEMS麦克风的保护平板上设置加强筋，使得保护平板的至少部分区域在平行于振膜振动的方向上，具有非矩形的截面，提高了保护平板的结构强度，在振膜的冲击下不容易发生断裂。
 附图说明
图1为相关技术中压电式MEMS麦克风的部分结构示意图；
图2为相关技术中压电式MEMS麦克风的另一部分结构示意图；
图3为图2中A-A处的剖视图；
图4为本实用新型实施例提供的压电式MEMS麦克风部分机构的俯视图；
图5为本实用新型实施例提供的压电式MEMS麦克风部分结构的爆炸图；
图6为本实用新型实施例提供的保护平板和加强筋的结构示意图；
图7为图6中B处的局部放大图；
图8为本实用新型实施例提供的保护平板和加强筋的第一截面示意图；
图9为本实用新型实施例提供的保护平板和加强筋的第二截面示意图；
图10为本实用新型实施例提供的保护平板和加强筋的第三截面示意图；
图11为本实用新型另一实施例提供的压电式MEMS麦克风部分结构的俯视图；
图12为本实用新型另一实施例提供的压电式MEMS麦克风部分结构的爆炸图；
图13为图12中C处的局部放大图。
 本发明的实施方式
下面结合附图和实施方式对本实用新型作进一步说明。
请参考图4至图13，一种压电式MEMS麦克风，包括基底10，安装在所述基底10上的振膜20，以及连接于所述基底10并与所述振膜20间隔设置的保护平板30，所述保护平板30上设有加强筋40。
本实用新型的有益效果在于：
本实用新型通过在压电式MEMS麦克风的保护平板30上设置加强筋40，提高了保护平板30的结构强度，在振膜20的冲击下不容易发生断裂。
进一步的，所述加强筋40至少位于所述保护平板30朝向或背离所述振膜的任意一侧。
可选的，并参考图8，所述加强筋40具有矩形截面，所述矩形截面平行于所述振膜20振动方向，且所述加强筋仅分布于所述保护平板的部分区域。
可选的，并参考图9至图10，所述加强筋40具有非矩形截面，所述非矩形截面平行于所述振膜20振动方向。具体的，所述加强筋40的截面形状可以为三角形或T形。
在上述实施例中，所述保护平板30上的加强筋40可以为单一形状的截面结构，也可以由多种不同形状的截面结构组合而成。
可选的，所述加强筋40的材料为氮化硅。氮化硅一般通过化学气象沉积形成，通过调节沉积的工艺参数，可以对氮化硅内部的应力的大小与方向进行控制。对于保护平板30结构而言，调节振膜20内部存在的应力的大小和方向可以使得保护平板30处于“紧绷”的状态，配合加强筋40，可以进一步提升保护平板30的稳定性和强度。
需要说明的是，所述保护平板30和加强筋40可以为同一材料或不同材料构成，二者在加工过程中可一体成型或分别成型。
进一步的，所述振膜20包括连接于所述基底10的固定端21和悬置的自由端22。
更进一步的，所述保护平板30包括对所述自由端22在振膜20振动方向上进行限位的限位部31，以及与所述基底10连接的边缘固定部32，所述加强筋40分布于所述限位部31。
可选的，并参考图4至图7，所述限位部31为镂空结构，所述限位部31由若干桁架形成，所述加强筋40沿桁架均匀分布或随机分布。具体的，各桁架上均设有一个或多个加强筋40，或部分桁架上设有一个或多个加强筋40。
可选的，并参考图11至图13，所述限位部31为镂空结构，所述限位部31由穿孔板形成，所述加强筋40沿穿孔板均匀分布或随机分布。具体的，穿孔板的每个孔周围均设有加强筋40，或穿孔板的部分孔周围设有加强筋40。
以上所述的仅是本实用新型的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本实用新型创造构思的前提下，还可以做出改进，但这些均属于本实用新型的保护范围。

Claims (10)

  1. 一种压电式MEMS麦克风，其特征在于，包括基底，安装在所述基底上的振膜，以及与所述振膜间隔设置的保护平板，所述保护平板上设有加强筋。
  2. 根据权利要求1所述的压电式MEMS麦克风，其特征在于，所述加强筋至少位于所述保护平板朝向或背离所述振膜的任意一侧。
  3. 根据权利要求1所述的压电式MEMS麦克风，其特征在于，所述加强筋具有矩形截面，所述矩形截面平行于所述振膜振动方向，且所述加强筋仅分布于所述保护平板的部分区域。
  4. 根据权利要求1所述的压电式MEMS麦克风，其特征在于，所述加强筋具有非矩形截面，所述非矩形截面平行于所述振膜振动方向。
  5. 根据权利要求1至4任一项所述的压电式MEMS麦克风，其特征在于，所述加强筋的材料为氮化硅。
  6. 根据权利要求5所述的压电式MEMS麦克风，其特征在于，所述振膜包括连接于所述基底的固定端和悬置的自由端。
  7. 根据权利要求6所述的压电式MEMS麦克风，其特征在于，所述保护平板包括对所述自由端在振膜振动方向上进行限位的限位部，以及与所述基底连接的边缘固定部，所述加强筋分布于所述限位部。
  8. 根据权利要求7所述的压电式MEMS麦克风，其特征在于，所述限位部为镂空结构，所述限位部由若干桁架形成，所述加强筋沿桁架均匀分布或随机分布。
  9. 根据权利要求7所述的压电式MEMS麦克风，其特征在于，所述限位部为镂空结构，所述限位部由穿孔板形成，所述加强筋沿穿孔板均匀分布或随机分布。
  10. 根据权利要求1所述的压电式MEMS麦克风，其特征在于，所述加强筋和所述保护平板一体成型。
PCT/CN2020/095622 2020-05-25 2020-06-11 压电式mems麦克风 Ceased WO2021237808A1 (zh)

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US12269732B2 (en) * 2021-06-11 2025-04-08 Fortemedia, Inc. MEMS microphone
CN113727265B (zh) * 2021-07-28 2025-10-17 庄红红 一种电容式mems麦克风结构及其制造方法
CN117242793A (zh) * 2022-04-15 2023-12-15 深圳市韶音科技有限公司 驱动装置及包含该驱动装置的声学输出装置

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CN210183520U (zh) * 2019-06-18 2020-03-24 马力 扬声器
CN110545514A (zh) * 2019-08-16 2019-12-06 瑞声声学科技(深圳)有限公司 压电式mems麦克风

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