WO2021203764A1

WO2021203764A1 - Gas delivery device of powder surface covering machine, and powder surface covering machine

Info

Publication number: WO2021203764A1
Application number: PCT/CN2021/000063
Authority: WO
Inventors: 刘彦峰; 王桐; 王韫宇
Original assignee: 厦门韫茂科技有限公司
Priority date: 2020-04-08
Filing date: 2021-04-08
Publication date: 2021-10-14
Also published as: JP3241165U; CN212189040U

Abstract

A gas delivery device of a powder surface covering machine, configured to connect an inner barrel (7) of a reaction device (10) and a driving device (12), and communicate a reaction chamber (9) of the inner barrel (7) and a gas supply device (13). The gas delivery device comprises: a rotating shaft (1) connected to the inner barrel (7) and the driving device (12), a sleeve (3) sleeved on the rotating shaft (1), and a pair of sealing members (2) configured between the rotating shaft (1) and the sleeve (3). The rotating shaft (1) is provided, along the axis, with a first gas passage (4) in communication with the reaction chamber (9), and is provided with gas holes (5) for communicating the first gas passage (4) with the outside of the rotating shaft (1). The sleeve (3) is provided with a second gas passage (6) through which the rotating shaft (1) passes, the second gas passage (6) is in communication with the gas supply device (13), and the gas holes (5) are located in the second gas passage (6). The sealing members (2) are configured to seal the second gas passage (6).

Description

Gas conveying device of powder surface coating machine and powder surface coating machine

Technical field

The utility model relates to the field of powder surface coating, in particular to a gas conveying device of a powder surface coating machine and a powder surface coating machine.

Background technique

The powder surface coating is realized by surface chemical reaction, generally there are three methods: mechanical stirring and fusion method, chemical solution reaction method, and gas phase reaction method. The gas phase reaction methods mainly include atomic layer deposition (ALD), chemical vapor deposition (CVD), and molecular layer deposition (MLD). The powder surface coating machine is a common equipment to realize the powder surface coating by the gas phase reaction method. At present, the surface coating machine generally uses a fixed outer support barrel and a rotating inner reaction barrel as the reaction device, and the gas supply device and the air suction device are connected to the inner cavity of the outer support barrel to transport the gas used for reaction. Such a connection structure causes the gas to enter the inner cavity of the outer support barrel, but cannot quickly enter the inner reaction barrel, resulting in uneven quality of the final product. Especially when the reaction gas is a gas with a low vapor pressure, it cannot even enter the reaction barrel. Understandably, in addition to the powder body, the surface coating machine can also be applied to other "parts to be coated", such as parts, bearings, screws and other workpieces, or pharmaceutical particles, or other 3D objects. In view of this, the inventor specially submits this application after studying the existing technology.

Summary of the invention

technical problem

The utility model provides a gas conveying device of a powder surface coating machine, which aims to improve the problem that the gas supply device cannot directly input the reaction gas into the reaction inner barrel.

In order to solve the above technical problems, the present utility model provides a gas delivery device of a powder surface coating machine, which is used to connect the inner barrel of the reaction device and the driving device, and connect the reaction chamber of the inner barrel and the gas supply device. The gas delivery device includes: a rotating shaft connected to the inner barrel and the driving device, the rotating shaft is provided with a first air passage communicating with the reaction chamber along an axis, and is provided with a first air passage communicating with the first air passage and The air hole on the outside of the rotating shaft; a sleeve, which is sleeved on the rotating shaft, the sleeve is provided with a second air passage for the rotating shaft to pass through, and the second air passage is connected to the air supply device , And the air hole is located in the second airway; a pair of seals are arranged between the rotating shaft and the sleeve to seal the second airway; the rotating shaft can be relative to the The sleeve rotates and drives the inner barrel to rotate; the gas of the gas supply device can enter the first gas passage from the second gas passage through the gas hole and enter the reaction chamber.

As a further optimization, the rotating shaft has a plurality of the air holes, and the size of the air holes is 1-10 mm.

As a further optimization, the size of the first airway is 1-10 mm.

As a further optimization, the air holes are arranged along the radial direction of the rotating shaft.

As a further optimization, the first airway does not penetrate the rotating shaft.

As a further optimization, the diameter of the second airway is 10-50 mm.

As a further optimization, the materials of the rotating shaft and the sleeve are respectively one of aluminum, stainless steel, copper, nickel, aluminum oxide, and zirconia ceramics.

As a further optimization, the pair of seals is one of a rubber seal ring, a metal seal ring, a plastic seal ring, a ceramic seal ring, a rubber metal seal ring, or a plastic metal seal ring.

As a further optimization, the coupling is a magnetic coupling or a magnetic fluid coupling.

The present application also provides a powder surface coating machine, which includes a reaction device, a driving device, a gas supply device, an inner barrel and a driving device for connecting the reaction device, and the gas delivery of the reaction chamber of the inner barrel and the gas supply device at the same time. Device, the gas supply device is the gas delivery device described in any of the above paragraphs.

By adopting the above technical solution, the present utility model can achieve the following technical effects.

The gas delivery device of the utility model can not only connect the driving device and the inner barrel of the reaction device, but also transmit the power of the driving device to the inner barrel to rotate the inner barrel. Moreover, the gas supply device can be connected, so that the reaction gas and the precursor gas of the gas supply device can directly enter the reaction chamber inside the inner barrel, ensuring that the reaction gas can fully react on the surface of the powder, and good practical effects are achieved. Using the powder surface coating machine of the gas conveying device of the present invention, the reaction gas and precursor gas of the gas supply device can directly enter the reaction chamber inside the inner barrel to ensure that the reaction gas can fully react on the surface of the powder. The actual effect has very good practical significance.

The solution to the problem

Technical solutions

Type a paragraph describing the technical solution here.

The beneficial effects of the invention

Beneficial effect

Type a paragraph describing the beneficial effect here.

Brief description of the drawings

Description of the drawings

In order to explain the technical solutions of the embodiments of the present utility model more clearly, the following will briefly introduce the drawings that need to be used in the embodiments. It should be understood that the following drawings only show certain embodiments of the present utility model. Therefore, it should not be regarded as a limitation of the scope. For those of ordinary skill in the art, without creative work, other related drawings can be obtained based on these drawings.

Fig. 1 is a schematic diagram of the structure connection of a gas conveying device in a powder surface coating machine in an embodiment of the present invention.

Figure 2 is an exploded view (half-sectioned state) of a gas delivery device according to an embodiment of the present invention.

Fig. 3 is a schematic diagram of the structure of a powder surface coating machine in an embodiment of the present invention.

Marks in the picture: 1- shaft; 2- seal; 3- sleeve; 4- first air passage; 5- air hole; 6- second air passage; 7- inner barrel; 8- coupling; 9- reaction chamber 10-Reaction device; 11-Gas delivery device; 12-Drive device; 13-Gas supply device.

Description of the drawings

Type the description of the figure description here.

The best embodiment for implementing the invention

The best mode of the present invention

Type here a paragraph describing the best mode of the present invention.

Invention embodiment

Detailed ways

In order to make the purpose, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be described clearly and completely in conjunction with the drawings in the embodiments of the present utility model. Obviously, the description The embodiments of the utility model are part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the scope of protection of the present utility model. Therefore, the following detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the claimed present utility model, but merely represents selected embodiments of the present utility model. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the scope of protection of the present utility model.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise" and other directions indicated Or the positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and Operation, therefore cannot be understood as a limitation of the present utility model.

In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, "multiple" means two or more than two, unless otherwise specifically defined.

In the present invention, unless otherwise clearly defined and defined, the terms "installation", "connected", "connected", "fixed" and other terms should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediary, and it can be a connection between two elements or an interaction relationship between two elements. For those of ordinary skill in the art, the specific meaning of the above-mentioned terms in the present utility model can be understood according to specific circumstances.

In the present invention, unless otherwise clearly defined and defined, the "on" or "under" of the first feature of the second feature may include the first and second features in direct contact, or may include the first and second features. The features are not in direct contact but through other features between them. Moreover, the "above", "above" and "above" of the first feature on the second feature include the first feature directly above and obliquely above the second feature, or it simply means that the first feature is higher in level than the second feature. The “below”, “below” and “below” of the second feature of the first feature include the first feature directly below and obliquely below the second feature, or it simply means that the level of the first feature is smaller than the second feature.

The present utility model will be further described in detail below in conjunction with the drawings and specific embodiments.

As shown in Figures 1, 2, and 3, in this embodiment, a gas delivery device 11 of a powder surface coating machine is used to connect the inner barrel 7 of the reaction device 10 and the driving device 12, and to communicate with the inner barrel 7 The reaction chamber 9 and the gas supply device 13. The gas delivery device 11 includes a rotating shaft 1, which is connected to the inner barrel 7 and the driving device 12. The rotating shaft 1 is provided with a first air passage 4 connected to the reaction chamber 9 along the axis, and is provided with a first air passage 4 and a rotating shaft 1 The outer air hole 5; the sleeve 3, which is sleeved on the shaft 1, the sleeve 3 is provided with a second air passage 6 for the shaft 1 to pass through, the second air passage 6 is connected to the air supply device 13, and the air hole 5 is located Inside the second air passage 6; a pair of seals 2 arranged between the rotating shaft 1 and the sleeve 3 to seal the second air passage 6; specifically, the two ends of the rotating shaft 1 are respectively connected to the inner barrel 7 and the driving device 12, and can rotate relative to the sleeve 3 to transmit the power of the driving device 12 to the inner tub 7 to make the inner tub 7 rotate. Moreover, the gas supply device 13 can also be connected, so that the reaction gas and the precursor gas of the gas supply device 13 enter the first gas passage 4 from the second gas passage 6 through the gas hole 5 and enter the reaction chamber 9. The reaction gas is allowed to directly enter the reaction chamber 9 inside the inner barrel 7 to ensure that the reaction gas can fully react on the surface of the powder body and achieve good practical effects. In this embodiment, the first air passage 4 does not penetrate the rotating shaft 1. In other embodiments, the first air passage 4 may penetrate the rotating shaft 1 for the convenience of processing. 4 The opening on the side close to the driving device 12 is sealed to prevent the leakage of reaction gas. The gas delivery device can be applied to powder surface coating machines, especially ALD (Atomic Layer Deposition) powder coating equipment. It can not only effectively transmit the power of the driving device 12 to the inner barrel 7, but also efficiently transfer the precursors. It is of great practical significance to transport directly into the reaction chamber 9.

As shown in FIG. 2, in this embodiment, the rotating shaft 1 has a plurality of air holes 5 arranged along the radial direction of the rotating shaft 1, and the size of the air holes 5 is 1-100 mm, preferably 1-10 mm, and more preferably 5 mm. The size of the first airway 4 is 1-100 mm, preferably 1-10 mm, and more preferably 10 mm. The diameter of the second airway 6 is 10-200, preferably 10-50 mm. Specifically, the material of the rotating shaft 1 and the sleeve 3 is one of aluminum, stainless steel, copper, nickel, alumina, and zirconia ceramics. The sealing member 2 is one of a rubber sealing ring, a metal sealing ring, a plastic sealing ring, a ceramic sealing ring, a rubber metal sealing ring, or a plastic metal sealing ring.

As shown in FIGS. 1 and 3, in this embodiment, the rotating shaft 1 is connected to the coupling 8 of the driving device 12, and the coupling 8 is a magnetic coupling or a magnetic fluid coupling 8. In addition, there is a detachable connection between the inner barrel 7 and the rotating shaft 1, preferably a threaded connection, so that the inner barrel 7 can be quickly installed on the rotating shaft 1. Specifically, the control driving device 12 drives the rotating shaft 1 to rotate at a low speed, and the inner tub 7 is facing the rotating shaft 1 and leaning toward the rotating shaft 1, so that the thread is screwed into the inner tub 7. During the installation process, no manual rotation is required. Practical meaning.

The present application also provides a powder surface coating machine, which includes a reaction device 10, a driving device 12, an air supply device 13, an inner barrel 7 for connecting the reaction device 10 and a driving device 12 simultaneously connected to the reaction chamber of the inner barrel 7 9 and the gas delivery device 11 of the gas supply device 13, and the gas supply device is the gas delivery device 11 described in any of the above paragraphs. Specifically, using the powder surface coating machine of the gas conveying device of the present invention, the reaction gas and precursor gas of the gas supply device can directly enter the reaction chamber inside the inner barrel to ensure that the reaction gas can fully react on the surface of the powder. Achieving good practical results has very good practical significance.

The above descriptions are only the preferred embodiments of the present utility model, and are not used to limit the present utility model. For those skilled in the art, the present utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Embodiments of the present invention

Type here a paragraph describing the embodiment of the present invention.

Industrial applicability

Type a paragraph describing industrial applicability here.

Sequence Listing Free Content

Type here the free content description paragraph of the sequence listing.

Claims

A gas delivery device of a powder surface coating machine is used to connect the inner barrel (7) of the reaction device (10) and the driving device (12), and connect the reaction chamber (9) of the inner barrel (7) and the gas supply The device (13) is characterized in that the gas delivery device comprises: a rotating shaft (1) connected to the inner barrel (7) and the driving device (12), and the rotating shaft (1) is provided along an axis with The first air passage (4) connected to the reaction chamber (9), and is provided with an air hole (5) connecting the first air passage (4) and the outside of the rotating shaft (1); a sleeve (3) , It is sleeved on the rotating shaft (1), the sleeve (3) is provided with a second airway (6) for the rotating shaft (1) to pass through, and the second airway (6) is connected In the air supply device (13); the air hole (5) is located in the second air passage (6); a pair of seals (2), which are arranged on the rotating shaft (1) and the sleeve (3) to seal the second airway (6); the rotating shaft (1) can rotate relative to the sleeve (3) and drive the inner barrel (7) to rotate; the supply The gas of the gas device (13) can enter the first gas passage (4) from the second gas passage (6) through the gas hole (5) and enter the reaction chamber (9).
The gas delivery device of a powder surface coating machine according to claim 1, wherein the rotating shaft (1) has a plurality of the air holes (5), and the size of the air holes (5) is 1- 10mm.
The gas delivery device of a powder surface coating machine according to claim 2, wherein the size of the first air passage (4) is 1-10 mm.
The gas conveying device of a powder surface coating machine according to claim 2, wherein the air holes (5) are arranged along the radial direction of the rotating shaft (1).
The gas delivery device of a powder surface coating machine according to claim 3, wherein the first air passage (4) does not penetrate the rotating shaft (1).
The gas delivery device of a powder surface coating machine according to claim 1, wherein the diameter of the second air passage (6) is 10-50 mm.
The gas delivery device of a powder surface coating machine according to any one of claims 1-6, wherein the materials of the rotating shaft (1) and the sleeve (3) are aluminum and stainless steel, respectively. , Copper, nickel, alumina, zirconia ceramics.
The gas conveying device of a powder surface coating machine according to any one of claims 1-6, wherein a pair of the seals (2) are rubber seals, metal seals, and plastic seals. , Ceramic sealing ring, rubber metal sealing ring, or plastic metal sealing ring.
The gas delivery device of a powder surface coating machine according to any one of claims 1-6, wherein the shaft (1) is connected to the coupling (8) of the driving device (12). ), the coupling (8) is a magnetic coupling or a magnetic fluid coupling (8).
A powder surface coating machine, comprising a reaction device (10), a driving device (12), an air supply device (13), an inner barrel (7) for connecting the reaction device (10), and a driving device (12) connected at the same time The reaction chamber (9) of the inner barrel (7) and the gas delivery device (11) of the gas supply device (13), characterized in that the gas supply device is the gas according to any one of claims 1 to 9 Conveying device (11).