CN212102999U - Wall structure of gas phase reaction powder surface coating machine - Google Patents
Wall structure of gas phase reaction powder surface coating machine Download PDFInfo
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- CN212102999U CN212102999U CN202020517437.3U CN202020517437U CN212102999U CN 212102999 U CN212102999 U CN 212102999U CN 202020517437 U CN202020517437 U CN 202020517437U CN 212102999 U CN212102999 U CN 212102999U
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- Chemical Kinetics & Catalysis (AREA)
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- Materials Engineering (AREA)
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- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
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Abstract
The utility model provides a wall structure of gaseous phase reaction powder surface coating machine relates to powder surface coating technical field. The chamber wall structure is used for accomodating the interior bucket that can hold the powder, and communicates in air feeder and air exhaust device, still connects in being used for driving interior bucket pivoted drive arrangement, and it contains: an inner wall having a cavity for receiving the inner barrel; the outer wall is arranged on the outer side of the inner wall and used for wrapping the inner wall; a heating element disposed on the inner wall for heating the substance in the chamber; an air inlet pipeline which is arranged on the inner wall and is used for communicating the cavity with the air supply device; an air pumping pipeline arranged on the inner wall and used for communicating the cavity and the air pumping device. The reaction gas output by the gas supply device can enter the cavity through the gas inlet pipeline and react on the surface of the powder, and the gas exhaust device can exhaust the reaction gas from the cavity through the gas exhaust pipeline and enable the cavity to form vacuum.
Description
Technical Field
The utility model relates to a powder surface cladding field particularly, relates to a cavity wall structure of gaseous phase reaction powder surface cladding machine.
Background
The powder surface coating is realized by surface chemical reaction, and generally comprises three methods, namely a mechanical stirring fusion method, a chemical solution reaction method and a gas phase reaction method. The vapor phase reaction method mainly includes Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), and Molecular Layer Deposition (MLD). The powder surface coating machine is a common device for realizing powder surface coating by a gas phase reaction method. At present, the surface coating machine generally adopts a fixed cavity wall structure and a rotatable inner barrel arranged inside the cavity wall structure as a reaction device, and communicates a gas supply device and an air exhaust device with the cavity of the cavity wall structure to convey and exhaust reaction gas, and the gas enters an inner cavity and then is freely diffused into the reaction cavity of the inner barrel to react on the surface of powder to form a coating layer. However, the existing cavity wall structure is generally single in structure, is not beneficial to equipment upgrading, and cannot well guarantee the powder surface coating effect. It will be appreciated that the surface coating machine may be applied to other 'parts to be coated', such as parts, bearings, screws, etc., or medicament particles, or other 3D objects, in addition to powder. In view of the above, the inventors of the present invention have made a study of the prior art and then have made the present application.
SUMMERY OF THE UTILITY MODEL
The utility model provides a wall structure of gaseous phase reaction powder surface coating machine aims at improving the function on current chamber wall comparatively simple, the problem of assurance powder surface coating effect that can not be fine.
In order to solve the technical problem, the utility model provides a wall structure of gaseous phase reaction powder surface coating machine, it is used for accomodating the interior bucket that can hold the powder, and communicates in air feeder and air exhaust device, still connects in being used for the drive interior bucket pivoted drive arrangement, it contains:
an inner wall having a cavity for receiving the inner barrel;
the outer wall is arranged outside the inner wall and used for wrapping the inner wall;
a heating member disposed on the inner wall for controlling a temperature of the chamber;
the air inlet pipeline is arranged on the inner wall and is used for communicating the cavity with the air supply device;
an air pumping pipeline arranged on the inner wall and used for communicating the cavity with the air pumping device
The reaction gas output by the gas supply device can enter the cavity through the gas inlet pipeline and react on the surface of the powder, and the gas extraction device can extract the reaction gas from the cavity through the gas extraction pipeline and enable the cavity to be vacuum.
As a further optimization, the air inlet pipeline and the air pumping pipeline are arranged between the inner wall and the outer wall or on the inner surface of the inner wall.
As a further optimization, a vacuum layer for thermal insulation is arranged between the outer wall and the inner wall.
As a further optimization, when the air inlet pipeline and the air exhaust pipeline are arranged between the inner wall and the outer wall, the air inlet pipeline and the air exhaust pipeline are located in the vacuum layer, one end of the air inlet pipeline penetrates through the inner wall and is communicated with the cavity, and the other end of the air inlet pipeline penetrates through the outer wall and is respectively communicated with the air supply device and the air exhaust device.
As a further optimization, valves are respectively arranged at one ends of the air inlet pipeline and the air suction pipeline, which penetrate through the outer wall.
Preferably, the heating element is a resistance wire heater or an infrared heater and is arranged on the inner surface of the inner wall.
Preferably, the driving device comprises a rotating shaft provided with a first air passage along an axis, the cavity wall structure comprises a sleeve which is arranged on the inner wall and the outer wall and is sleeved on the rotating shaft, and a sealing element which is arranged between the rotating shaft and the sleeve; the sleeve pipe is provided with and is used for the cover to put the second air flue of pivot, the pivot is provided with and is used for the intercommunication first air flue with the gas pocket of second air flue.
Preferably, the air inlet pipeline is disposed between the inner wall and the outer wall, and has one end connected to the air supply device and the other end connected to the second air passage.
Preferably, the inner wall and the outer wall are provided with openings at corresponding positions for taking and placing the inner barrel, and the cavity wall structure further comprises a door panel arranged at the openings and used for sealing the openings.
Preferably, the material of the inner wall (5) and the outer wall (4) is one of stainless steel, nickel, aluminum, tungsten, molybdenum, silicon carbide and aluminum oxide.
By adopting the technical scheme, the utility model discloses can gain following technological effect:
the utility model discloses a cavity wall structure adopts double-deck cavity wall structure, the air inlet pipeline both can install between inner wall and outer wall, also can install at the inner wall inboardly, can be fine guarantee the inside clean and tidy of cavity, the installation and the maintenance of powder surface cladding machine have been made things convenient for greatly, it sets up to the heat preservation to embed vacuum layer or skin simultaneously, can be fine prevent the inside outside transmission of temperature of cavity wall structure, also make the control of the inside temperature of cavity wall structure more accurate when having reduced calorific loss, the effect of powder surface cladding has been improved greatly, fine practical meaning has.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic view of a chamber wall structure in cooperation with an external device according to an embodiment of the present invention;
fig. 2 is a schematic view of a chamber wall structure according to an embodiment of the present invention (the air inlet pipeline and the air exhaust pipeline are disposed on the inner surface of the inner wall);
fig. 3 is a schematic view of a chamber wall structure according to an embodiment of the present invention (the air inlet pipeline and the air exhaust pipeline are disposed between the inner wall and the outer wall);
fig. 4 is a schematic view of a chamber wall structure according to an embodiment of the present invention (the air inlet pipeline is disposed between the inner wall and the outer wall and is communicated with the first air passage in the rotating shaft).
The labels in the figure are: 1-an air extraction pipeline; 2-an air extraction device; 3-a valve; 4-outer wall; 5-inner wall; 6-vacuum layer; 7-a heating element; 8, a cavity; 9-inner barrel; 10-a drive device; 11-an air intake line; 12-a gas supply device; 13-a sleeve; 14-a first airway; 15-pores; 16-a second airway; 17-a seal; 18-rotating shaft.
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined to clearly and completely describe the technical solutions of the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The invention will be described in further detail with reference to the following detailed description and accompanying drawings:
as shown in fig. 1 to 4, in the present embodiment, a chamber wall structure of a gas-phase reaction powder surface coating machine is used for accommodating an inner barrel 9 containing powder, and is connected to a gas supply device 12 and an air extraction device 2, and further connected to a driving device 10 for driving the inner barrel 9 to rotate. Wherein the drive assembly 10 includes a shaft 18 disposed on the wall structure and a drive assembly disposed outside the wall structure for driving rotation of the shaft 18. The shaft 18 extends from the interior of the chamber wall structure and is rotatably disposed on the chamber wall of the chamber wall structure. The inner tub 9 is disposed at an end of the rotation shaft 18 and is arranged coaxially with the rotation shaft 18.
As shown in fig. 1 to fig. 2, in the present embodiment, the cavity wall structure includes:
the air-extracting device comprises an inner wall 5 provided with a cavity 8, an outer wall 4 arranged outside the inner wall 5 and used for wrapping the inner wall 5, a heating element 7 arranged on the inner wall 5 and used for controlling the temperature in the cavity 8, an air inlet pipeline 11 arranged on the inner wall 5 and used for communicating the cavity 8 with an air supply device 12, and an air extracting pipeline 1 arranged on the inner wall 5 and used for communicating the cavity 8 with an air extracting device 2. Wherein the material of the inner wall 5 is one of stainless steel, nickel, aluminum, tungsten, molybdenum, silicon carbide and alumina. The cavity 8 is used for accommodating the inner barrel 9, a space which can be used for carrying out powder surface coating process is created for the inner barrel 9, the rotating shaft 18 penetrates through the inner wall 5 and the outer wall 4 from the outside of the cavity wall structure and extends into the cavity 8, and the inner barrel 9 is coaxially arranged at the end part of the rotating shaft 18 and rotates along with the rotating shaft 18.
Specifically, the gas supply device 12 outputs a first reactive gas, and the first reactive gas is input into the cavity 8 through the gas inlet pipeline 11 and chemically adsorbed or reacted on the surface of the powder. Then the second gas supply device 12 outputs inert gas to exhaust the first middle reaction gas and the first reaction byproduct out of the chamber 8 through the gas exhaust pipeline 1, and/or the gas exhaust device 2 is used to exhaust the first middle reaction gas and the first reaction byproduct out of the chamber 8 through the gas exhaust pipeline 1 and to make the chamber 8 have a certain vacuum degree. Then the gas supply device 12 outputs the second reaction gas, the second reaction gas is input into the cavity 8 through the gas inlet pipeline 11 and reacts with the first reaction gas on the surface of the powder to form a coating layer, finally the second reaction gas and the second reaction by-product are pumped out of the cavity 8, the rotating shaft 18 drives the inner barrel 9 to rotate in the process so as to disperse the powder, and the surfaces of all the powder can be ensured to contact with the two reaction gases, so that the coating layer is uniform and stable. Meanwhile, the heating element 7 can well control the temperature in the cavity 8, so that the first reaction gas and the second reaction gas react at the most appropriate temperature, and the reaction efficiency and the reaction quality are greatly improved. In other embodiments, the first reactive gas and the second reactive gas may also be liquid vapors.
As shown in fig. 2, in the present embodiment, both the air supply duct and the air exhaust duct are disposed on the inner surface of the inner wall 5. In another embodiment, as shown in figure 3, both the supply air duct and the extraction air duct are arranged between the inner wall 5 and the outer wall 4. One end of the air inlet pipeline 11 and one end of the air suction pipeline 1 penetrate through the inner wall 5 and are communicated with the cavity 8, the other end of the air inlet pipeline penetrates through the outer wall 4 and is respectively communicated with the air supply device 12 and the air suction device 2, and valves 3 are respectively arranged at one end penetrating through the outer wall 4. The cavity wall structure adopts a double-layer cavity wall mechanism, the air inlet pipeline 11 can be arranged between the inner wall 5 and the outer wall 4 and also can be arranged at the inner side of the inner wall 5, the cleanness of the inner part of the cavity 8 can be well ensured, the installation and the maintenance of the powder surface coating machine are greatly facilitated,
in a further embodiment, as shown in fig. 4, the driving device 10 comprises a rotating shaft 18 provided with the first air passage 14 along the axis, the chamber wall structure comprises a sleeve 13 disposed on the inner wall 5 and the outer wall 4 and sleeved on the rotating shaft 18, and a sealing member 17 disposed between the rotating shaft 18 and the sleeve 13; the sleeve 13 is provided with a second air passage 16 for sleeving a rotating shaft 18, and the rotating shaft 18 is provided with an air hole 15 for communicating the first air passage 14 and the second air passage 16. The air intake duct 11 is disposed between the inner wall 5 and the outer wall 4, and has one end connected to the air supply device 12 and the other end connected to the second air duct 16. When the air inlet pipeline 11 is communicated with the reaction cavity in the inner barrel 9, the cleanness of the interior of the cavity 8 is ensured, the inner barrel 9 is greatly convenient to disassemble and assemble during use, and the device has good practical significance.
In the present embodiment, the material of the outer wall 4 is one of stainless steel, nickel, aluminum, tungsten, molybdenum, silicon carbide, and alumina, and a vacuum layer 6 for thermal insulation is provided between the outer wall 4 and the inner wall 5. The vacuum layer 6 is used for meeting the process requirement and realizing the heat insulation effect. The design of the double-layer cavity wall can reduce the outward heat transfer of the cavity wall structure, thereby not only saving energy, but also ensuring that the heating element 7 can more accurately control the temperature in the cavity 8. In another embodiment, no vacuum layer 6 is provided between the inner wall 5 and the outer wall 4, and the material of the outer wall 4 is an insulating material. Specifically, the heating member 7 is a resistance wire heater or an infrared heater, and when the heating member 7 is an infrared heater, it is disposed on the inner surface of the inner wall 5. When the heating member 7 is a resistance wire, it may be disposed on the inner surface of the inner wall 5, on the outer surface of the inner wall 5, or in the middle of the inner wall 5.
In this embodiment, the inner wall 5 and the outer wall 4 are provided with openings at corresponding positions for taking and placing the inner barrel 9, and the cavity wall structure further includes a door panel disposed at the openings for sealing the openings.
The person skilled in the art generally refers to a vapor of a solid, a reaction gas or a vapor of a reaction liquid as a precursor.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The utility model provides a wall structure of gaseous phase reaction powder surface coating machine for accomodate interior bucket (9) that can hold the powder, and communicate in air feeder (12) and air exhaust device (2), still connect in being used for driving interior bucket (9) pivoted drive arrangement (10), its characterized in that contains:
an inner wall (5) having a cavity (8) to receive the inner barrel (9);
an outer wall (4) arranged outside the inner wall (5) to wrap the inner wall (5);
a heating element (7) disposed on the inner wall (5) for controlling the temperature of the chamber (8);
an air inlet pipe (11) arranged on the inner wall (5) and used for communicating the cavity (8) and the air supply device (12);
an air extraction pipeline (1) which is arranged on the inner wall (5) and is used for communicating the cavity (8) and the air extraction device (2);
the reaction gas output by the gas supply device (12) can pass through the gas inlet pipeline (11) and enter the cavity (8) to react on the surface of the powder, and the gas extraction device (2) can extract the reaction gas from the cavity (8) through the gas extraction pipeline (1) so as to form vacuum in the cavity (8).
2. The cavity wall structure of the gas-phase reaction powder surface coating machine according to claim 1, wherein the air inlet pipeline (11) and the air suction pipeline (1) are arranged between the inner wall (5) and the outer wall (4) or on the inner surface of the inner wall (5).
3. The wall structure of a gas-phase reaction powder surface coating machine as claimed in claim 2, wherein a vacuum layer (6) for heat insulation is arranged between the outer wall (4) and the inner wall (5).
4. The cavity wall structure of the gas-phase reaction powder surface coating machine according to claim 3, wherein the gas inlet pipeline (11) and the gas extraction pipeline (1) are arranged between the inner wall (5) and the outer wall (4) and are located in the vacuum layer (6), one end of the gas inlet pipeline penetrates through the inner wall (5) and is communicated with the cavity (8), and the other end of the gas inlet pipeline penetrates through the outer wall (4) and is respectively communicated with the gas supply device (12) and the gas extraction device (2).
5. The wall structure of the gas-phase reaction powder surface coating machine according to claim 4, wherein one end of the air inlet pipeline (11) and one end of the air suction pipeline (1) penetrating through the outer wall (4) are respectively provided with a valve (3).
6. The cavity wall structure of the gas-phase reaction powder surface coating machine as claimed in claim 1, wherein the heating element (7) is a resistance wire heater or an infrared heater and is disposed on the inner surface of the inner wall (5).
7. The wall structure of a gas phase reaction powder surface coating machine according to claim 1, wherein the driving device (10) comprises a rotating shaft (18) provided with a first air passage (14) along an axis, the wall structure comprises a sleeve (13) arranged on the inner wall (5) and the outer wall (4) and sleeved on the rotating shaft (18), and a sealing element (17) arranged between the rotating shaft (18) and the sleeve (13); the sleeve (13) is provided with a second air passage (16) used for sleeving the rotating shaft (18), and the rotating shaft (18) is provided with an air hole (15) used for communicating the first air passage (14) with the second air passage (16).
8. The wall structure of claim 7, wherein the air inlet pipeline (11) is disposed between the inner wall (5) and the outer wall (4), and has one end connected to the air supply device (12) and the other end connected to the second air passage (16).
9. The wall structure of claim 1, wherein the inner wall (5) and the outer wall (4) are provided with openings at corresponding positions for accessing the inner barrel (9), and the wall structure further comprises a door plate disposed at the openings for sealing the openings.
10. The wall structure of a gas phase reaction powder surface coating machine according to any one of claims 1 to 9, wherein the material of the inner wall (5) and the outer wall (4) is one of stainless steel, nickel, aluminum, tungsten, molybdenum, silicon carbide and aluminum oxide.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020517437.3U CN212102999U (en) | 2020-04-08 | 2020-04-08 | Wall structure of gas phase reaction powder surface coating machine |
| JP2022600146U JP3241201U (en) | 2020-04-08 | 2021-04-08 | Cavity wall structure of gas-phase reaction powder surface coating machine |
| PCT/CN2021/000064 WO2021203765A1 (en) | 2020-04-08 | 2021-04-08 | Cavity wall structure for gas-phase reaction-based powder surface coating machine |
| US17/962,499 US20230037732A1 (en) | 2020-04-08 | 2022-10-08 | Powder coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020517437.3U CN212102999U (en) | 2020-04-08 | 2020-04-08 | Wall structure of gas phase reaction powder surface coating machine |
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| CN212102999U true CN212102999U (en) | 2020-12-08 |
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| CN202020517437.3U Active CN212102999U (en) | 2020-04-08 | 2020-04-08 | Wall structure of gas phase reaction powder surface coating machine |
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| Country | Link |
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| JP (1) | JP3241201U (en) |
| CN (1) | CN212102999U (en) |
| WO (1) | WO2021203765A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021203764A1 (en) * | 2020-04-08 | 2021-10-14 | 厦门韫茂科技有限公司 | Gas delivery device of powder surface covering machine, and powder surface covering machine |
| WO2021203765A1 (en) * | 2020-04-08 | 2021-10-14 | 厦门韫茂科技有限公司 | Cavity wall structure for gas-phase reaction-based powder surface coating machine |
| WO2023124270A1 (en) * | 2021-12-31 | 2023-07-06 | 中微半导体设备(上海)股份有限公司 | Chemical vapor deposition device and method therefor |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114990521A (en) * | 2022-06-22 | 2022-09-02 | 湖南九华碳素高科有限公司 | Horizontal furnace-charging deposition furnace |
| CN115505896A (en) * | 2022-10-11 | 2022-12-23 | 江苏鹏举半导体设备技术有限公司 | Rotary inner wall film coating device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000252273A (en) * | 1999-03-03 | 2000-09-14 | Kokusai Electric Co Ltd | Semiconductor manufacturing equipment |
| US7221860B2 (en) * | 2005-04-22 | 2007-05-22 | Momentive Performance Materials Inc. | Vacuum insulated heater assembly |
| CN204058588U (en) * | 2014-06-06 | 2014-12-31 | 华中科技大学 | A kind of device for micro-nano granules finishing |
| CN104046958B (en) * | 2014-06-06 | 2016-08-17 | 华中科技大学 | A kind of apparatus and method modified for micro-nano granules surface |
| CN204676149U (en) * | 2015-02-16 | 2015-09-30 | 中微半导体设备(上海)有限公司 | A kind of being used for carries out pretreated reactor to MOCVD gas spray |
| US11365481B2 (en) * | 2015-10-06 | 2022-06-21 | City University Of Hong Kong | Homogeneous and transparent protective coatings for precious metals and copper alloys |
| CN212102999U (en) * | 2020-04-08 | 2020-12-08 | 厦门韫茂科技有限公司 | Wall structure of gas phase reaction powder surface coating machine |
| CN212348679U (en) * | 2020-04-08 | 2021-01-15 | 厦门韫茂科技有限公司 | Powder containing mechanism of powder surface coating machine and powder surface coating machine |
| CN212189040U (en) * | 2020-04-08 | 2020-12-22 | 厦门韫茂科技有限公司 | Gas conveying device of powder surface coating machine and powder surface coating machine |
-
2020
- 2020-04-08 CN CN202020517437.3U patent/CN212102999U/en active Active
-
2021
- 2021-04-08 JP JP2022600146U patent/JP3241201U/en active Active
- 2021-04-08 WO PCT/CN2021/000064 patent/WO2021203765A1/en active Application Filing
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021203764A1 (en) * | 2020-04-08 | 2021-10-14 | 厦门韫茂科技有限公司 | Gas delivery device of powder surface covering machine, and powder surface covering machine |
| WO2021203765A1 (en) * | 2020-04-08 | 2021-10-14 | 厦门韫茂科技有限公司 | Cavity wall structure for gas-phase reaction-based powder surface coating machine |
| WO2023124270A1 (en) * | 2021-12-31 | 2023-07-06 | 中微半导体设备(上海)股份有限公司 | Chemical vapor deposition device and method therefor |
Also Published As
| Publication number | Publication date |
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| JP3241201U (en) | 2023-03-13 |
| WO2021203765A1 (en) | 2021-10-14 |
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