CN114990521A - Horizontal furnace-charging deposition furnace - Google Patents
Horizontal furnace-charging deposition furnace Download PDFInfo
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- CN114990521A CN114990521A CN202210713756.5A CN202210713756A CN114990521A CN 114990521 A CN114990521 A CN 114990521A CN 202210713756 A CN202210713756 A CN 202210713756A CN 114990521 A CN114990521 A CN 114990521A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/71—Ceramic products containing macroscopic reinforcing agents
- C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
- C04B35/80—Fibres, filaments, whiskers, platelets, or the like
- C04B35/83—Carbon fibres in a carbon matrix
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Abstract
The invention relates to the technical field of deposition furnaces, in particular to a horizontal charging deposition furnace. The technical scheme comprises the following steps: the deposition furnace comprises a deposition furnace body, a door plate, a sealing cover, a sealing structure, a gas distributor and an air inlet pipe, wherein the door plate is arranged on the outer wall of one side of the deposition furnace body, the sealing cover is installed on one side of the outer wall of the lower end of the deposition furnace body in an inserting mode, the air inlet pipe is installed on one side of the outer wall of the lower end of the sealing cover in an inserting mode, the sealing structure is installed on one side of the lower end of the inner wall of the sealing cover, the effect of improving the machining quality of workpieces is achieved by arranging the door plate, the connecting cover and the baffle, the machining quality of the workpieces is guaranteed, the temperature of reaction gas is convenient to control, and the machining quality of the workpieces is improved.
Description
Technical Field
The invention relates to the technical field of deposition furnaces, in particular to a horizontal furnace charging deposition furnace.
Background
The vapor deposition furnace is a process method which is widely applied to producing carbon-carbon composite materials and is provided with a heating chamber, a water-cooled electrode and a temperature thermocouple which are core parts for processing workpieces in a deposition furnace main body. Most of the existing chemical vapor deposition furnaces or deposition systems introduce carbon source gas into the deposition furnace from the bottom of the deposition furnace through a multi-path gas inlet pipeline, the carbon source gas is directly introduced into the bottom of a deposition chamber in the furnace body at a certain flow and flow rate, and matrix carbon is formed after pyrolysis and deposited in the interior or on the surface of a blank product.
Through a mass search, a typical vapor deposition furnace disclosed by the publication number CN211595793U of a deposition furnace device in the prior art is found, and the problem that the deposition quality of the vapor deposition furnace at the present stage needs to be improved is solved. The key point of the technical scheme is that the vapor deposition furnace comprises a heating furnace body and a material rack; the heating furnace body is provided with a reaction cavity, the heating furnace body is internally provided with a gas distribution pipeline, the middle part of the gas distribution pipeline is also provided with a partition plate for partitioning a channel of the gas distribution pipeline, and both ends of the gas distribution pipeline are provided with gas inlet pipelines for supplying gas to the gas distribution pipeline; the two ends of the heating furnace body are provided with an exhaust pipeline communicated with the reaction cavity and an exhaust valve for controlling the opening and closing of the exhaust pipeline, and the vapor deposition furnace is also provided with a vacuum pump connected with the exhaust pipeline; the material rack comprises a rotating shaft and a rotating drum arranged on the rotating shaft; the heating furnace body is also provided with a driving motor for driving the rotary drum to rotate, the heating furnace body is also provided with a supporting component which is rotatably supported at two ends of the rotary shaft, and the reaction gas in the reaction cavity in the vapor deposition furnace in the reaction process is relatively uniform, so that the quality of the deposition layer on the surface of the fiber material is improved.
Current deposition furnace is in the use, because the sealing member of door plant can appear gap department after long-time the use, has leaded to the inside leakproofness of deposition furnace relatively poor, and current deposition furnace lacks leakproofness detection device, and is unfavorable for preheating gas, has leaded to gaseous temperature to be unfavorable for control, influences the processingquality to the work piece.
Disclosure of Invention
The invention aims to provide a horizontal charging deposition furnace to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a horizontal dress stove deposition furnace, includes deposition furnace body, door plant, sealed cowling, seal structure, branch gas ware and intake pipe, deposition furnace body one side outer wall is provided with the door plant, the sealed cowling is installed in the grafting of deposition furnace body lower extreme outer wall one side, the intake pipe is installed in the grafting of sealed cowling lower extreme outer wall one side, seal structure is installed to sealed cowling inner wall lower extreme one side.
Preferably, the deposition furnace body comprises a heating device body, a transmission roller, a conveying belt, a material plate and a workpiece body, the heating device body is embedded in the inner wall of the deposition furnace body, and the heating device body can improve the temperature inside the deposition furnace body;
the driving roller is rotatably arranged at the lower end of the inner wall of the deposition furnace body, the conveying belt is positioned on the outer wall of the driving roller, the conveying belt is designed by adopting a chain conveying net, and the driving roller can drive the conveying belt to rotate;
the flitch has been placed to conveyer belt upper end outer wall one side, and the work piece body has been placed to flitch upper end outer wall, the flitch can support the work piece body, and the flitch can be driven by the conveyer belt and remove.
Preferably, the deposition furnace body further comprises a communicating pipe, a filtering device body and an exhaust pipe, the communicating pipe is inserted and installed at the upper end of the inner wall of the deposition furnace body, and gas in the deposition furnace body can enter the filtering device body through the communicating pipe;
the filtering device body is arranged at the upper end of the deposition furnace body and is communicated with the communicating pipe, and the filtering device body can filter gas in the communicating pipe;
the exhaust pipe is inserted and installed on the outer wall of one side of the filtering device body, the exhaust pipe is located on the other side of the communicating pipe, and gas inside the filtering device body can be discharged through the exhaust pipe.
Preferably, the door plate comprises a connecting block and a clamping sleeve, and the connecting block is arranged on the outer wall of the upper end of the door plate;
the cutting ferrule is installed in deposition furnace body upper end one side, and the connecting block rotates and installs inside the cutting ferrule, and the cutting ferrule outer wall installs driving motor, and driving motor can drive the connecting block and take place the circular rotation in the cutting ferrule is inside.
Preferably, the door plate further comprises a first sealing gasket, a fixing plate, a connecting cover, a temperature sensor and a second sealing gasket, the first sealing gasket is attached to one side of the door plate, and the first sealing gasket ensures the sealing property between the door plate and the deposition furnace body;
the fixed plate is arranged on the outer wall of the door panel;
the connecting cover is arranged on the outer wall of the deposition furnace body, the second sealing gasket is attached and fixed on the outer wall of the connecting cover, and the second sealing gasket ensures the sealing property between the connecting cover and the fixing plate;
the temperature sensor is embedded in the inner wall of the connecting cover and can detect the temperature of the air in the connecting cover.
Preferably, a gas distributor is installed on one side of the upper end of the inner wall of the sealing cover, and the gas distributor can disperse gas to enable the gas to uniformly enter the deposition furnace body.
Preferably, the baffle is installed to sealed cowling inner wall one side, the inside embedding of baffle has equidistance parallel distribution's air pump body, the air pump body can make inside the gaseous entering of baffle lower extreme divides the gas ware.
Preferably, an air pressure sensor is embedded in one side of the inner wall of the sealing cover and can detect the air pressure in the sealing cover.
Preferably, the heating pipe of equidistance parallel distribution is installed in the grafting of sealed cowling inner wall one side, the heating pipe can preheat the inside gas of sealed cowling.
Preferably, the sealing structure comprises an electric push rod and a plug, the electric push rod is connected with the inner wall of the sealing cover, and the electric push rod corresponds to the air inlet pipe;
and one side of the outer wall of the lower end of the electric push rod is provided with a plug which can block the air inlet pipe.
Compared with the prior art, the invention has the beneficial effects that: the invention achieves the effect of improving the processing quality of workpieces by arranging the door plate, the connecting cover and the baffle plate, a worker places a workpiece body on the upper end of the material plate, and the worker can push the material plate to move on the upper end of the conveying belt, so that the workpiece body can be conveniently moved into the deposition furnace body, the external driving motor drives the connecting block and the door plate to rotate, thereby the first sealing gasket is contacted with the deposition furnace body, the temperature sensor can detect the temperature of the air in the connecting cover, the purpose of detecting whether the door plate and the deposition furnace body leak is achieved, the worker can conveniently maintain the equipment in time, and the electric push rod drives the plug to break away from the plug of the air inlet pipe, the reaction gas enters the shell through the air inlet pipe and is positioned at the lower end of the baffle plate, the air pressure sensor detects the air pressure intensity, when the requirement is met, the heating pipe carries out the waste heat on the reaction gas, when the requirement is met, inside the reaction gas of air pump body bleed baffle lower extreme got into the gas distributor, made reaction gas evenly got into inside the deposition furnace body, the heating device body improved the inside temperature of deposition furnace body, made reaction gas and work piece body take place the reaction, guaranteed the processingquality to the work piece body, guaranteed reaction gas's temperature and be convenient for control, improved the processingquality to the work piece body.
Drawings
FIG. 1 is a schematic cross-sectional view of the deposition furnace body structure of the present invention;
FIG. 2 is a schematic side sectional view of a deposition furnace body structure according to the present invention;
FIG. 3 is an enlarged view of the connecting cover structure of the present invention;
FIG. 4 is an enlarged schematic view of the seal structure of the present invention;
fig. 5 is a partially enlarged view of the door panel structure of fig. 1 according to the present invention.
In the figure: 1. a deposition furnace body; 11. a heating device body; 12. a communicating pipe; 13. a filter device body; 14. an exhaust pipe; 15. a driving roller; 16. a conveyor belt; 17. a material plate; 18. a workpiece body; 2. a door panel; 21. connecting blocks; 22. a ferrule; 23. a first gasket; 24. a fixing plate; 25. a connecting cover; 26. a temperature sensor; 27. a second gasket; 3. a sealing cover; 31. heating a tube; 32. a gas distributor; 33. a baffle plate; 34. an air pump body; 35. an air pressure sensor; 36. an air inlet pipe; 4. a sealing structure; 41. an electric push rod; 42. and (7) a plug.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, such as "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1 to 5, the present invention provides three embodiments:
the first embodiment is as follows: the utility model provides a horizontal dress stove deposition furnace, includes deposition furnace body 1, door plant 2, sealed cowling 3, seal structure 4, branch gas ware 32 and intake pipe 36, and 1 one side outer wall of deposition furnace body is provided with door plant 2, and 1 lower extreme outer wall one side of deposition furnace body is pegged graft and is installed sealed cowling 3, and the intake pipe 36 is installed in 3 lower extreme outer wall one sides of sealed cowling in a grafting way, and seal structure 4 is installed to 3 inner wall lower extreme one sides of sealed cowling.
The deposition furnace body 1 comprises a heating device body 11, a transmission roller 15, a conveying belt 16, a material plate 17 and a workpiece body 18, wherein the heating device body 11 is embedded in the inner wall of the deposition furnace body 1, and the heating device body 11 can improve the temperature inside the deposition furnace body 1;
the driving roller 15 is rotatably arranged at the lower end of the inner wall of the deposition furnace body 1, the conveying belt 16 is positioned on the outer wall of the driving roller 15, the conveying belt 16 is designed by adopting a chain conveying net, and the driving roller 15 can drive the conveying belt 16 to rotate;
The door plate 2 comprises a connecting block 21 and a clamping sleeve 22, and the connecting block 21 is arranged on the outer wall of the upper end of the door plate 2;
cutting ferrule 22 is installed in 1 upper end one side of deposition furnace body, and connecting block 21 rotates and installs inside cutting ferrule 22, and the cutting ferrule 22 outer wall installs driving motor, and driving motor can drive connecting block 21 and take place the circumferential rotation in cutting ferrule 22 is inside.
The door plate 2 further comprises a first sealing gasket 23, a fixing plate 24, a connecting cover 25, a temperature sensor 26 and a second sealing gasket 27, the first sealing gasket 23 is attached and fixed on one side of the door plate 2, and the first sealing gasket 23 ensures the sealing property between the door plate 2 and the deposition furnace body 1;
the fixing plate 24 is arranged on the outer wall of the door panel 2;
the connecting cover 25 is arranged on the outer wall of the deposition furnace body 1, the second sealing gasket 27 is attached and fixed on the outer wall of the connecting cover 25, and the second sealing gasket 27 ensures the sealing property between the connecting cover 25 and the fixing plate 24;
Example two: the utility model provides a horizontal charge deposition furnace, includes deposition furnace body 1, door plant 2, sealed cowling 3, seal structure 4, branch gas ware 32 and intake pipe 36, and 1 one side outer wall of deposition furnace body is provided with door plant 2, and sealed cowling 3 is installed in the grafting of 1 lower extreme outer wall one side of deposition furnace body, and the intake pipe 36 is installed in the grafting of 3 lower extreme outer wall one sides of sealed cowling, and seal structure 4 is installed to 3 inner wall lower extreme one sides of sealed cowling.
The deposition furnace body 1 further comprises a communicating pipe 12, a filtering device body 13 and an exhaust pipe 14, the communicating pipe 12 is inserted and installed at the upper end of the inner wall of the deposition furnace body 1, and gas in the deposition furnace body 1 can enter the filtering device body 13 through the communicating pipe 12;
the filtering device body 13 is arranged at the upper end of the deposition furnace body 1, the filtering device body 13 is communicated with the communicating pipe 12, and the filtering device body 13 can filter gas in the communicating pipe 12;
the exhaust pipe 14 is inserted and installed on the outer wall of one side of the filtering device body 13, the exhaust pipe 14 is located on the other side of the communicating pipe 12, gas inside the filtering device body 13 can be discharged through the exhaust pipe 14, the gas is filtered through the filtering device body 13, the emission quality of the gas is guaranteed, and the pollution to the environment is reduced.
The door plate 2 comprises a connecting block 21 and a clamping sleeve 22, and the connecting block 21 is arranged on the outer wall of the upper end of the door plate 2;
cutting ferrule 22 is installed in 1 upper end one side of sedimentation furnace body, and connecting block 21 rotates and installs inside cutting ferrule 22, and cutting ferrule 22 outer wall installs driving motor, and driving motor can drive connecting block 21 and take place the circumference rotation in cutting ferrule 22 is inside.
The door plate 2 further comprises a first sealing gasket 23, a fixing plate 24, a connecting cover 25, a temperature sensor 26 and a second sealing gasket 27, the first sealing gasket 23 is fixedly attached to one side of the door plate 2, the first sealing gasket 23 ensures the sealing performance between the door plate 2 and the deposition furnace body 1, and the temperature sensor 26 is a sensor capable of sensing temperature and converting the temperature into a usable output signal;
the fixing plate 24 is arranged on the outer wall of the door panel 2;
the connecting cover 25 is arranged on the outer wall of the deposition furnace body 1, the second sealing gasket 27 is attached and fixed on the outer wall of the connecting cover 25, and the second sealing gasket 27 ensures the sealing property between the connecting cover 25 and the fixing plate 24;
the temperature sensor 26 is fitted into the inner wall of the connection cover 25, and the temperature sensor 26 can detect the temperature of the air inside the connection cover 25.
Example three: the utility model provides a horizontal dress stove deposition furnace, includes deposition furnace body 1, door plant 2, sealed cowling 3, seal structure 4, branch gas ware 32 and intake pipe 36, and 1 one side outer wall of deposition furnace body is provided with door plant 2, and 1 lower extreme outer wall one side of deposition furnace body is pegged graft and is installed sealed cowling 3, and the intake pipe 36 is installed in 3 lower extreme outer wall one sides of sealed cowling in a grafting way, and seal structure 4 is installed to 3 inner wall lower extreme one sides of sealed cowling.
The deposition furnace body 1 comprises a heating device body 11, a transmission roller 15, a conveying belt 16, a material plate 17 and a workpiece body 18, wherein the heating device body 11 is embedded in the inner wall of the deposition furnace body 1, and the heating device body 11 can improve the temperature inside the deposition furnace body 1;
the driving roller 15 is rotatably arranged at the lower end of the inner wall of the deposition furnace body 1, the conveying belt 16 is positioned on the outer wall of the driving roller 15, the conveying belt 16 is designed by adopting a chain conveying net, and the driving roller 15 can drive the conveying belt 16 to rotate;
The door plate 2 comprises a connecting block 21 and a clamping sleeve 22, and the connecting block 21 is arranged on the outer wall of the upper end of the door plate 2;
cutting ferrule 22 is installed in 1 upper end one side of sedimentation furnace body, and connecting block 21 rotates and installs inside cutting ferrule 22, and cutting ferrule 22 outer wall installs driving motor, and driving motor can drive connecting block 21 and take place the circumference rotation in cutting ferrule 22 is inside.
The gas distributor 32 is installed on one side of the upper end of the inner wall of the sealing cover 3, and the gas distributor 32 can disperse gas, so that the gas can uniformly enter the deposition furnace body 1.
A baffle 33 is installed on one side of the inner wall of the sealing cover 3, an air pump body 34 which is distributed in parallel at equal intervals is embedded in the baffle 33, and air at the lower end of the baffle 33 can enter the air distributor 32 through the air pump body 34.
An air pressure sensor 35 is fitted into the inner wall of the sealing cover 3, and the air pressure sensor 35 can detect the air pressure inside the sealing cover 3.
The heating pipes 31 which are equidistantly and parallelly distributed are inserted and installed on one side of the inner wall of the sealing cover 3, and the heating pipes 31 can preheat the gas inside the sealing cover 3.
The sealing structure 4 comprises an electric push rod 41 and a plug 42, the electric push rod 41 is connected with the inner wall of the sealing cover 3, and the electric push rod 41 corresponds to the position of the air inlet pipe 36, as is well known to those skilled in the art, the massage device of the present invention further needs to be provided with the temperature sensor 26, the heating pipe 31, the air pressure sensor 35 and the electric push rod 41 so that the massage device can normally work, and as is well known to those skilled in the art, the temperature sensor 26, the heating pipe 31, the air pressure sensor 35 and the electric push rod 41 are provided in the common knowledge, which belong to the conventional means or the common knowledge, and are not described herein again, and those skilled in the art can make any choice according to their needs or convenience;
The working principle is as follows: the staff places work piece body 18 in flitch 17 upper end, and the staff can promote flitch 17 and remove at 16 upper ends of conveyer belt, and the work piece body 18 of being convenient for removes to inside the sedimentation furnace body 1, and external driving motor drives connecting block 21 and door plant 2 and takes place to rotate to make first sealed pad 23 contact with sedimentation furnace body 1, temperature sensor 26 can detect the temperature of the inside air of connecting cover 25.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (10)
1. The utility model provides a horizontal charge deposition furnace, includes deposition furnace body (1), door plant (2), sealed cowling (3), seal structure (4), gas distributor (32) and intake pipe (36), its characterized in that: the outer wall of one side of the deposition furnace body (1) is provided with a door plate (2), one side of the outer wall of the lower end of the deposition furnace body (1) is provided with a sealing cover (3) in an inserting mode, one side of the outer wall of the lower end of the sealing cover (3) is provided with an air inlet pipe (36) in an inserting mode, and one side of the lower end of the inner wall of the sealing cover (3) is provided with a sealing structure (4).
2. The horizontal charging deposition furnace of claim 1, wherein: the deposition furnace body (1) comprises a heating device body (11), a transmission roller (15), a conveying belt (16), a material plate (17) and a workpiece body (18), wherein the heating device body (11) is embedded in the inner wall of the deposition furnace body (1), and the heating device body (11) can improve the temperature inside the deposition furnace body (1);
the driving roller (15) is rotatably arranged at the lower end of the inner wall of the deposition furnace body (1), the conveying belt (16) is positioned on the outer wall of the driving roller (15), the conveying belt (16) is designed by adopting a chain conveying net, and the driving roller (15) can drive the conveying belt (16) to rotate;
flitch (17) have been placed to conveyer belt (16) upper end outer wall one side, and workpiece body (18) have been placed to flitch (17) upper end outer wall, flitch (17) can support workpiece body (18), and flitch (17) can be driven by conveyer belt (16) and remove.
3. The horizontal charging deposition furnace of claim 1, wherein: the deposition furnace body (1) further comprises a communicating pipe (12), a filtering device body (13) and an exhaust pipe (14), the communicating pipe (12) is installed at the upper end of the inner wall of the deposition furnace body (1) in an inserting mode, and gas in the deposition furnace body (1) can enter the filtering device body (13) through the communicating pipe (12);
the filtering device body (13) is arranged at the upper end of the deposition furnace body (1), the filtering device body (13) is communicated with the communicating pipe (12), and the filtering device body (13) can filter gas in the communicating pipe (12);
the exhaust pipe (14) is inserted and installed on the outer wall of one side of the filtering device body (13), the exhaust pipe (14) is located on the other side of the communicating pipe (12), and gas inside the filtering device body (13) can be discharged through the exhaust pipe (14).
4. The horizontal charging deposition furnace of claim 1, wherein: the door plate (2) comprises a connecting block (21) and a clamping sleeve (22), and the connecting block (21) is arranged on the outer wall of the upper end of the door plate (2);
cutting ferrule (22) are installed in deposition furnace body (1) upper end one side, and connecting block (21) rotate to be installed inside cutting ferrule (22), and cutting ferrule (22) outer wall installs driving motor, and driving motor can drive connecting block (21) and take place the circumference in cutting ferrule (22) inside and rotate.
5. The horizontal charging deposition furnace of claim 1, wherein: the door plate (2) further comprises a first sealing gasket (23), a fixing plate (24), a connecting cover (25), a temperature sensor (26) and a second sealing gasket (27), the first sealing gasket (23) is attached to and fixed on one side of the door plate (2), and the first sealing gasket (23) ensures the sealing property between the door plate (2) and the deposition furnace body (1);
the fixing plate (24) is arranged on the outer wall of the door panel (2);
the connecting cover (25) is arranged on the outer wall of the deposition furnace body (1), a second sealing gasket (27) is attached to and fixed on the outer wall of the connecting cover (25), and the second sealing gasket (27) ensures the sealing property between the connecting cover (25) and the fixing plate (24);
the temperature sensor (26) is embedded in the inner wall of the connecting cover (25), and the temperature sensor (26) can detect the temperature of the air in the connecting cover (25).
6. The horizontal charging deposition furnace of claim 1, wherein: gas distributor (32) are installed to sealed cowling (3) inner wall upper end one side, gas distributor (32) can the dispersed gas, make inside gaseous even entering deposition furnace body (1).
7. The horizontal charging deposition furnace of claim 1, wherein: baffle (33) are installed to sealed cowling (3) inner wall one side, baffle (33) inside embedding is installed equidistance parallel distribution's air pump body (34), inside air pump body (34) can make the gaseous entering of baffle (33) lower extreme divide gas ware (32).
8. The horizontal charging deposition furnace of claim 1, wherein: atmospheric pressure sensor (35) are installed to sealed cowling (3) inner wall one side embedding, atmospheric pressure sensor (35) can detect out the inside atmospheric pressure of sealed cowling (3).
9. The horizontal charging deposition furnace of claim 1, wherein: sealing boot (3) inner wall one side grafting is installed heating pipe (31) of equidistance parallel distribution, heating pipe (31) can preheat the inside gas of sealing boot (3).
10. The horizontal charging deposition furnace of claim 1, wherein: the sealing structure (4) comprises an electric push rod (41) and a plug (42), the electric push rod (41) is connected with the inner wall of the sealing cover (3), and the electric push rod (41) corresponds to the air inlet pipe (36);
a plug (42) is arranged on one side of the outer wall of the lower end of the electric push rod (41), and the air inlet pipe (36) can be plugged by the plug (42).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210713756.5A CN114990521A (en) | 2022-06-22 | 2022-06-22 | Horizontal furnace-charging deposition furnace |
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| CN202210713756.5A CN114990521A (en) | 2022-06-22 | 2022-06-22 | Horizontal furnace-charging deposition furnace |
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