JP4224106B2 - Coating liquid supply device - Google Patents

Description

  The present invention relates to a coating liquid supply apparatus.

  A die coater is widely used as a coating machine for applying a coating solution such as a paste, a resist solution, and a phosphor paste for a color filter to the surface of a plate-like processed product such as a glass substrate or a film. Conventionally, as a coating liquid supply device that supplies a coating liquid from a coating liquid tank to a die coater, Patent Document 1 discloses an apparatus in which a flow path switching mechanism is integrated with a head of a syringe pump 2.

  However, in the coating liquid supply device disclosed in Patent Document 1, an air cylinder is connected to a switching rod through a coupling, and a valve plate provided on the switching rod and a cylinder head are pneumatically connected to the switching rod. Since the seal is maintained and the valve head is rotated, the space between the cylinder head and the cylinder head is opened. Therefore, the seal on the sliding surface between the cylinder head and the valve plate is not stable, and liquid leakage may occur. is there. Further, in this coating solution supply apparatus, since there is one supply port for introducing the coating solution from the coating solution tank into the cylinder, it takes a long time to suck the coating solution.

JP 2002-200452 A

  An object of the present invention is to improve the stability of a seal, shorten the suction time, and reduce the size of the apparatus in a coating liquid supply apparatus.

The present invention includes a piston that moves forward and backward in a cylinder, a cylinder head that is disposed at one end of the cylinder so that an inner surface faces the piston, and a suction port that is provided in the cylinder head and connected to a coating liquid tank A discharge port provided in the cylinder head and connected to the coating machine, a supply port that opens to the inner surface of the cylinder head and communicates with the suction port, an opening that opens to the inner surface of the cylinder, A discharge port that communicates with the discharge port and is disposed on the same first circle as the supply port, and passes through the cylinder head, the axis passes through the center of the first circle, and the inner surface of the cylinder A switching rod provided with a valve plate at one end located on the side, a through hole provided on the valve plate and disposed on a second circle concentric with and having the same diameter as the first circle, and the switching rod An actuator for Kijiku lines around the rotary drive, in the direction in which the valve plate is pressed against the inner surface of the cylinder head, e Bei a spring that biases the switching rod resiliently pressing force by the spring, There is provided a coating liquid supply apparatus which is set so that a film of the coating liquid functioning as a seal film and a lubricating film is formed between the valve body and the cylinder head .

  When sucking the coating liquid from the coating liquid tank, the switching rod is driven to rotate by the actuator, so that the valve plate is at an angular position where the through hole coincides with the supply port. The piston moves in the direction of increasing the volume in the cylinder, and the coating liquid from the coating liquid tank is sucked into the cylinder from the supply port via the suction port. On the other hand, when the coating liquid is discharged to the coating machine, the switching rod is rotationally driven by the actuator, so that the valve plate is at an angular position where the through hole coincides with the discharge port. The piston moves in the direction of decreasing the volume in the cylinder, and the coating liquid in the cylinder is discharged from the discharge port to the coating machine via the discharge port.

The valve plate is always pressed against the inner surface of the cylinder head by a spring. Specifically, when the valve plate rotates from the angular position where the through hole coincides with the supply port to the angular position where the through hole coincides with the discharge port, the valve plate rotates in the opposite direction. The plate is kept pressed against the inner surface of the cylinder head. Therefore, the switching rod is connected to the air cylinder via the coupling, and when the valve plate is rotated, a space is opened between the valve plate and the cylinder head, and the cylinder is compared with the case where the seal is maintained by air pressure. The stability of the seal on the sliding surface between the inner surface of the head and the valve plate is greatly improved, and leakage of the coating liquid can be reliably prevented. Further, since an air cylinder and a coupling for moving the switching rod back and forth become unnecessary, the apparatus can be downsized and simplified. Furthermore, the force for pressing the valve plate against the inner surface of the cylinder head can be adjusted simply by adjusting the urging force by the spring, and the operability of the apparatus is improved. When the valve body rotates, the coating liquid can be supplied over a wide range to the sliding surface between the inner surface of the cylinder head and the valve plate. The entire surface of the sliding surface is lubricated with the coating liquid that functions as a seal film and a lubricating film. A film is formed.

  Preferably, there are a plurality of the supply ports and the same number of the through holes as the supply ports.

  Since the total cross-sectional area of the supply port can be increased, the time required for suction of the coating liquid from the coating liquid tank can be shortened. Moreover, the cross-sectional area of each supply port can be reduced while ensuring the total cross-sectional area required for sucking the coating liquid at an appropriate flow rate. By reducing the cross-sectional area of each supply port, the size of the valve plate can be reduced. Furthermore, by reducing the cross-sectional area of each supply port, the range of angles between the supply port and the discharge port is ensured while ensuring the creepage distance between the supply port and the discharge port necessary for reliable sealing. Can be narrowed. As a result, the rotation angle of the valve plate necessary for switching between suction and discharge can be reduced, and the sliding area and sliding distance of the sliding surface can be reduced.

  More preferably, the supply port is arranged point-symmetrically with respect to the center of the first circle.

  The pressure from the coating liquid tank acts uniformly at a plurality of locations on the valve plate. As a result, the stability of the seal on the sliding surface between the inner surface of the cylinder head and the valve plate is further improved.

  For example, there are two supply ports, and these two supply ports are arranged at an angular interval of 180 ° around the center of the first circle.

  Between the inner surface of the cylinder head and the valve plate, a wear-resistant fixed plate fixed to the cylinder head or the valve plate may be interposed.

  In the coating liquid supply apparatus of the present invention, the switching rod is elastically biased in the direction in which the valve plate is pressed against the inner surface of the cylinder head by the spring, so that the sliding surface between the inner surface of the cylinder head and the valve plate is The stability of the seal can be improved, and the apparatus can be reduced in size and simplified. Also, by providing a plurality of supply ports, the stability of the sliding surface seal is improved, the suction time is shortened, the valve plate size is reduced, and the sliding surface sliding area and sliding distance are reduced. realizable. Furthermore, the stability of the seal of the sliding surface between the inner surface of the cylinder head and the valve plate can be further improved by arranging the supply ports in point symmetry.

  Next, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  Referring to FIG. 1, the coating liquid supply device 1 includes a syringe pump 2, a switching device 3, and a controller 4.

  The syringe pump 2 includes a cylinder 6, a piston 8 that is driven by a direct-acting actuator 7, and moves forward and backward in the cylinder 6, and a cylinder head 9 that is fixed to one end of the cylinder 6 so that an inner surface 9 a faces the piston 8. .

  Referring to FIGS. 2 to 4 together, the cylinder head 9 in the present embodiment has a generally flat cylindrical shape, and a suction port 11 and a discharge port 12 are provided on the outer periphery. The suction port 11 is connected to a coating liquid tank 16 by a pipe 13, and the discharge port 12 is connected to a die coater (coating machine) 17 by a pipe 14. A concave portion 9 c having a circular cross section is provided on the inner surface 9 a of the cylinder head 9. Two supply ports 18a and 18b and one discharge port 19 are opened inside the cylinder 6 in a portion (the recess bottom portion 9e) constituting the bottom portion of the recess 9c in the inner surface 9a. The supply ports 18 a and 18 b communicate with the suction port 11 via supply flow paths 21 a and 21 b formed in the cylinder head 9. The discharge port 19 communicates with the discharge port 12 via a discharge flow path 22 formed in the cylinder head 9. In the present embodiment, the cross-sectional shapes of the supply ports 18a and 18b and the discharge port 19 are all circular.

  As shown in FIG. 3, the supply ports 18a and 18b and the discharge port 19 are arranged on the circumference of a virtual circle C1 on the inner surface 9a. Specifically, the two supply ports 18a and 18b are arranged point-symmetrically at an angular interval of 180 ° around the center CT1 of the circle C1. Further, the discharge ports 19 are arranged at an angular interval of 90 ° around the center CT1 of the circle C1 with respect to the individual supply ports 18a and 18b. The cylinder head 9 is provided with an insertion hole 9d having a circular cross section concentric with the circle C1 so as to penetrate in the thickness direction.

  The switching device 3 includes a rotary actuator 23 and a switching rod 24 that is driven to rotate about its own axis S by the rotary actuator 23.

  Referring to FIGS. 1, 2 and 5, the switching rod 24 passes through the cylinder head 9 by being inserted into the insertion hole 9d, and the supply line 18a, 18b and the discharge port 19 are arranged on the axis S. It passes through the center CT1 of the circle C1. A disc-shaped valve plate 26 is integrally provided at one end of the switching rod 24 located in the cylinder 6 (on the inner surface 9a side of the cylinder head 9). The valve plate 26 is provided with two through holes 27a and 27b. These through holes 27a and 27b are arranged on the circumference of a virtual circle C2 that is concentric and has the same diameter as the circle C1 in which the supply ports 18a and 18b and the discharge port 19 are arranged. Specifically, the two through holes 27a and 27b are arranged point-symmetrically around the center CT2 of the circle C2 with an angular interval of 180 °. The cross-sectional shapes of the through holes 27 a and 27 b are circular with the same diameter as the supply ports 18 a and 18 b and the discharge port 19.

  As shown most clearly in FIG. 2, a wear plate, which is made of a wear resistant material and has a disk shape, is fixed to the surface of the valve plate 26 facing the cylinder head 9. ing. The fixing plate 28 is provided with two through holes 29a and 29b penetrating in the thickness direction. Specifically, these through holes 29a, 29b are arranged point-symmetrically at an angular interval of 180 ° with respect to the center CT3 on the circumference of a virtual circle C3 having the same diameter as the circles C1, C2. . The cross-sectional shapes of the through holes 29a and 29b are circular with the same diameter as the supply ports 18a and 18b, the discharge port 19, and the through holes 27a and 27b. An insertion hole 31 is provided at the center of the fixed plate 28, and the switching rod 24 is inserted into the insertion hole 31. The fixing plate 28 is fixed to the valve plate 26 by pins (not shown) inserted into the pair of pin holes 32a and 32b.

  A male screw portion 33 is provided at the other end of the switching rod 24. Further, as shown in FIG. 5, flat surfaces 34 a and 34 b parallel to each other are formed from the portion of the switching rod 24 inserted through the rotary actuator 23 to the male screw portion 33. The cross-sectional shape of the other part of the switching rod 24 is circular. Three bushes 36a, 36b, 36c and an O-ring 37 are mounted in the insertion hole 9d of the cylinder head 9, and these are held by a holding part 38 bolted to the outer surface 9b of the cylinder head 9. . The O-ring 37 seals the gap between the hole wall of the insertion hole 9d and the outer peripheral surface of the switching rod 24.

  A bracket 39 is bolted to the outer surface of the cylinder head 9, and a casing 41 of the rotary actuator 23 is fixed to the bracket 39. Referring to FIG. 6, two cylinder chambers 42 a and 42 b are provided in parallel in the casing 41 of the rotary actuator 23. Second cylinders 43a and 43b are accommodated in the individual cylinder chambers 42a and 42b, respectively. One cylinder chamber 42a includes a first chamber 42c on the left side and a second chamber 42d on the right side in the drawing partitioned by the second piston 43a. Similarly, the other cylinder chamber 42b includes a first chamber 42e on the left side and a second chamber 42f on the right side in the drawing partitioned by the second piston 43b. The first chamber 42c of the cylinder chamber 42a and the second chamber 42f of the cylinder chamber 42b communicate with each other via a flow path (not shown). Similarly, the second chamber 42d of the cylinder chamber 42a and the first chamber 42e of the cylinder chamber 42b are also in communication with each other via a channel (not shown). A rack 44 is provided on one side of each of the second pistons 43a and 43b. A pinion 46 that meshes with the rack 44 of the second pistons 43a and 43b is rotatably supported in the casing 41. As described above, the pinion 46 is provided with the insertion hole 46a having a cross-sectional shape corresponding to the cross-sectional shape of the switching rod 24 having the flat surfaces 34a and 34b so as to penetrate in the thickness direction. The switching rod 24 is inserted through the insertion hole 46a. The rotation of the pinion 46 is transmitted to the switching rod 24, but the pinion 46 does not prevent the advancement and retraction in the direction of the axis S of the switching rod 24.

  When air is supplied into the first chamber 42c of the cylinder chamber 42a and the second chamber 42f of the cylinder chamber 42b, the second piston 43a moves to the right in FIG. 6, while the second piston 43b moves to the left. As a result, the pinion 46 driven by the rack 44 rotates counterclockwise in FIG. When air is supplied into the second chamber 42d of the cylinder chamber 42a and the first chamber 42e of the cylinder chamber 42b, the second piston 43a moves to the left in FIG. 6, while the second piston 43b moves to the right in the rack. The pinion 46 driven at 44 rotates clockwise in FIG. The switching rod 24 rotates around the axis S together with the pinion 46, and as a result, the valve plate 26 rotates around the center CT2 of the circle C2.

  Referring to FIGS. 1 and 5, a bearing member 47 is fixed to a portion of the casing 41 of the rotary actuator 23 that is opposite to the portion attached to the bracket 39. The other end side of the switching rod 24 is inserted into an insertion hole 47a that penetrates the bearing member 47 in the thickness direction. The male thread portion 33 of the switching rod 24 protrudes outside the bearing member 47. The insertion hole 47a includes a bearing portion 47b, a first enlarged diameter portion 47c, and a second enlarged diameter portion 47d larger in diameter than the first enlarged diameter portion 47c from the side close to the rotary actuator 23. The bearing portion 47 b functions as a radial bearing for the switching rod 24. A stepped portion at a connection portion between the first enlarged diameter portion 47c and the second enlarged diameter portion 47d functions as a spring seat 47e. The coil spring 48 is accommodated in the second enlarged diameter portion 47d, and one end of the coil spring 48 (the end on the rotary actuator 23 side) is supported by the spring seat 47e. Further, a flange 49a of a cylindrical spring retainer 49 is slidably accommodated in the second enlarged diameter portion 47d, and the other end (the end opposite to the rotary actuator 23) of the coil spring 48 is a spring. It is in contact with the presser 49.

  The switching rod 24 penetrates the coil spring 48 and the spring retainer 49, and the male screw portion 33 protrudes from the cylindrical portion 47 f of the bearing member 47 to the outside. The inner diameters of the coil spring 48 and the spring retainer 49 are set to be sufficiently larger than the outer dimension of the switching rod 24 so as not to restrain the forward and backward movement of the switching rod 24 in the axis S direction. An end portion of the spring retainer 49 opposite to the flange portion 49 a also protrudes outward from the cylindrical portion 47 f of the bearing member 47.

  A nut 51 is screwed into the male thread portion 33 of the switching rod 24. By tightening the nut 51, the switching rod 24 is elastically biased by the coil spring 48 in the direction indicated by the arrow A in FIG. ing. Specifically, when the nut 51 is tightened, the spring retainer 49 pressed by the nut 51 compresses the coil spring 48 toward the spring seat 47e. Accordingly, the force that the compressed coil spring 48 attempts to return to the natural length is transmitted to the nut 51 via the spring retainer 49, and the switching rod 24 is urged in the direction of arrow A. Due to the urging force of the coil spring 48 in the direction of arrow A, the valve plate 26 of the switching rod 24 is always elastically pressed against the inner surface 9a (recessed bottom 9e) of the cylinder head 9 via the fixed plate 28.

  The controller 4 controls the actuator 7 that advances and retracts the piston 8 of the syringe pump 2 and the rotary actuator 23 that rotationally drives the switching rod 24 to operate in synchronization.

  Next, operation | movement of the coating liquid supply apparatus 1 of this embodiment is demonstrated.

When the application liquid is sucked from the application liquid tank 16, the switching rod 24 is rotationally driven by the rotary actuator 23, so that the valve plate 26 has individual through holes 27a and 27b as shown in FIG. Becomes an angular position that coincides with each of the supply ports 18a and 18b through the through holes 29a and 29b of the fixing plate 28. At this angular position, the discharge port 19 is closed at a portion where the through holes 29a and 29b of the fixing plate 28 are not present. After the valve plate 26 are out of the angular position, the piston 8 of the syringe pump 2 is moved (Oite rightward in FIG. 1) direction of increasing the volume of the cylinder 6 by the actuator 7. As a result, due to the pressure (static pressure) of the coating liquid stored in the coating liquid tank 16, the pipe 13, the suction port 11, the supply flow paths 21a and 21b, the supply ports 18a and 18b, and the through hole 29a from the coating liquid tank 16. , 29b and the through holes 27a, 27b, the coating liquid is sucked into the cylinder 6.

  Next, when the coating liquid is discharged to the die coater 17, the switching rod 24 is rotationally driven by the rotary actuator 23, so that the valve plate 26 is rotated around the center CT1 as shown in FIG. 7B. It rotates 90 ° in the clockwise direction, and one through hole 27 b is at an angular position that coincides with the discharge port 19 through the through hole 29 b of the fixed plate 28. At this angular position, the supply ports 18a and 18b are closed at portions where the through holes 29a and 29b of the fixing plate 28 are not provided, and the other through holes 27a and 29a are supplied from the recess bottom portion 9e of the inner surface 9a of the cylinder head 9. It is closed at a site where neither the ports 18a, 18b nor the discharge port 19 exist. After the valve plate 26 reaches this angular position, the actuator 7 causes the piston 8 of the syringe pump 2 to move in the direction of decreasing the volume in the cylinder 6 (leftward in FIG. 1). As a result, the coating liquid in the cylinder 6 pressurized by the piston 8 is discharged to the die coater 17 through the through hole 27b, the through hole 29b, the discharge port 19, the discharge flow path 22, the discharge port 12, and the pipe 14. The

  When the application liquid is again sucked from the application liquid tank 16 after the application liquid is discharged to the die coater 17, the valve plate 26 is rotated 90 ° counterclockwise in the drawing around the center CT1 from the angular position shown in FIG. After the rotation and the through holes 27a and 27b and the through holes 29a and 29b coincide with the supply ports 18a and 18b, the piston 8 moves in the direction in which the volume in the cylinder 6 increases. As described above, the coating liquid in the coating liquid tank 16 can be continuously supplied to the die coater 17 by repeating the rotation of the valve plate 26 and the forward and backward movement of the piston 8 in synchronization therewith.

  The coating liquid supply apparatus 1 of this embodiment has the following characteristics.

  The valve plate 26 and the fixed plate 28 are always pressed against the concave bottom 9e of the inner surface 9a of the cylinder head 9 by a coil spring 48. Specifically, from the angular position where the through holes 27a and 27b and the through holes 29a and 29b coincide with the supply ports 18a and 18b (FIG. 7A), the angular position where the through hole 27b and the through holes 29b coincide with the discharge port 19. (FIG. 7B) The valve plate 26 and the fixed plate 28 are located at the bottom of the concave portion of the inner surface 9a of the cylinder head 9 both when the valve plate 26 rotates and when the valve plate 26 rotates in the opposite direction. The state pressed by 9e is maintained. Therefore, compared with the case where the switching rod is connected to the air cylinder via the coupling and the seal is maintained by air pressure, the sliding surface between the concave bottom portion 9e of the inner surface 9a of the cylinder head 9 and the fixed plate 28 is reduced. The stability of the seal is greatly improved, and the leakage of the coating liquid can be reliably prevented. Further, since an air cylinder and coupling for moving the switching rod 24 back and forth are unnecessary, the apparatus can be reduced in size and simplified. Further, by simply adjusting the urging force by the coil spring 48, the force for pressing the valve plate 26 and the fixed plate 28 against the recess bottom portion 9e of the inner surface 9a of the cylinder head 9 can be adjusted, and the operability of the apparatus is improved. In this embodiment, if the tightening amount of the nut 51 is increased, the biasing force of the coil spring 48 is increased, and if the tightening amount is decreased, the biasing force of the coil spring 48 is decreased.

  Since a plurality of (two in this embodiment) supply ports 18a and 18b are provided, and the same number of through holes 27a and 27b and through holes 29a and 29b are provided, the cylinder head 9 is rotated by the valve plate 26 rotating. The coating liquid enters a wide range of the sliding surface between the concave bottom 9e of the inner surface 9a and the fixed plate 28, and the coating liquid film functions as a sealing film and a lubricating film. Symbols θ1 and θ2 in FIG. 7B indicate an angle range in which the coating liquid is supplied to the sliding surface by one rotation of the valve plate 26. As the rotation is repeated, a sealing film / lubricating film is formed on the entire sliding surface by the coating liquid, and liquid leakage and wear on the sliding surface between the recess bottom portion 9e of the inner surface 9a of the cylinder head 9 and the fixed plate 28 occur. Can be prevented.

  By providing the plurality of supply ports 18a and 18b, the total cross-sectional area of the supply port can be increased, so that the time required for suction of the coating solution from the coating solution tank 16 can be shortened. Further, it is possible to reduce the cross-sectional areas of the individual supply ports 18a and 18b while ensuring the total cross-sectional area necessary for sucking the coating liquid at an appropriate flow rate. By reducing the cross-sectional areas of the individual supply ports 18a and 18b, the size of the valve plate 26 can be reduced. Furthermore, by reducing the cross-sectional area of each of the supply ports 18a and 18b, the creepage distance between the supply ports 18a and 18b and the discharge port 19 necessary for reliable sealing (reference L in FIG. 7B). The angle range between the supply ports 18a and 18b and the discharge port 19 can be narrowed (90 ° in this embodiment). As a result, the rotation angle of the valve plate 26 necessary for switching between suction and discharge is reduced, and the sliding area and sliding surface of the sliding surface between the concave bottom 9e of the inner surface 9a of the cylinder head 9 and the fixed plate 28 are reduced. The moving distance can be reduced.

  In addition, a plurality (two in this embodiment) of the supply ports 18a and 18b are arranged symmetrically with respect to the center CT1 of the circle C1 (in this embodiment, an angular interval of 180 ° around the center CT1). The pressure from the coating liquid tank 16 during suction of the coating liquid acts uniformly at a plurality of locations (two locations in the present embodiment) of the valve plate 26. As a result, the stability of the seal on the sliding surface between the concave bottom 9e of the inner surface 9a of the cylinder head 9 and the fixed plate 28 is further improved.

  FIG. 8 shows an alternative of the supply port and the suction port on the inner surface of the cylinder head 9, and FIG. 9 shows the corresponding valve plate 26.

  Referring to FIG. 8, four supply ports 18a to 18d and four discharge ports 19a to 19d are arranged in a pair at an angular interval of 60 ° around the center CT1 of the virtual circle C1. Further, the supply ports 18a to 18d and the discharge ports 19a to 19d constituting one pair are arranged at an angular interval of 30 ° around the center CT1. On the other hand, referring to FIG. 9, four through holes 27a to 27d are arranged in the valve plate 26 around the center CT2 of the virtual circle C2 at an angular interval of 90 °. The fixed plate 28 is provided with four through holes 29a to 29d communicating with the through holes 27a to 27d of the valve plate 26.

  As shown in FIG. 10 (A), the valve plate 26 and the fixed plate 28 in the intermediate positions where the through holes 27a to 27d and 29a to 29d do not coincide with any of the supply ports 18a to 18d and the discharge ports 19a to 19d are counterclockwise. Then, as shown in FIG. 10B, the through holes 27a to 27d and 29a to 29d are aligned with the supply ports 18a to 18d and become an angular position where the coating liquid can be sucked. Conversely, when the valve plate 26 and the fixed plate 28 are rotated 30 ° clockwise from the intermediate position in FIG. 10A, as shown in FIG. 10C, the through holes 27a to 27d and 29a to 29d are discharged from the discharge port. An angular position at which the coating liquid can be discharged coincides with 19a to 19d.

  As in this alternative, the sliding area and sliding distance of the sliding surface can be reduced by increasing the number of supply holes and through holes in the valve plate.

  The present invention is not limited to the above-described embodiment, and various modifications can be made. For example, the pinion of the rotary actuator and the switching rod may be connected with a structure that does not restrain the forward / backward movement of the switching rod. For example, keying can be employed. Further, the rotary actuator may have a configuration other than that of the embodiment as long as the switching rod can be rotated without restricting the advancement / retraction of the switching rod. Unless the rotation of the switching rod is constrained, the configuration for elastically urging the switching rod may be other than the combination of the coil spring, the spring retainer, the male screw portion, and the nut of the embodiment. Further, the valve plate need not be integral with the switching rod, and a separate valve plate may be fixed to the switching rod.

The longitudinal cross-sectional view which shows the coating liquid supply apparatus which concerns on embodiment of this invention. The partial exploded perspective view which shows a cylinder head, a valve plate, and a fixed plate. The front view seen from the cylinder inside of a cylinder head. Sectional drawing in the IV-IV line of FIG. The partial exploded perspective view which shows a rotary actuator and a switching rod. The typical longitudinal section showing a rotary actuator. (A) is a front view which shows the cylinder head and valve plate at the time of suction, (B) is a front view which shows the cylinder head and valve plate at the time of discharge. Schematic front view showing an alternative cylinder head The typical front view which shows the valve plate of an alternative. (A) is a schematic front view showing an alternative cylinder head and valve plate at an intermediate position, (B) is a schematic front view showing an alternative cylinder head and valve plate at a suction position, and (C) is The typical front view which shows the alternative cylinder head and valve plate in a discharge position.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Coating liquid supply apparatus 2 Syringe pump 3 Switching apparatus 4 Controller 6 Cylinder 7 Actuator 8 Piston 9 Cylinder head 9a Inner surface 9b Outer surface 9c Concave 9d Insertion hole 9e Concave bottom 11 Suction port 12 Discharge port 13,14 Piping 16 Coating liquid tank 17 Die coater 18a, 18b, 18c, 18d Supply port 19, 19a, 19b, 19c, 19d Discharge port 21a, 21b Supply channel 22 Discharge channel 23 Rotary actuator 24 Switching rod 26 Valve plate 27a, 27b, 27c, 27d Through hole 28 Fixing plate 29a, 29b, 29c, 29d Through hole 31 Insertion hole 32a, 32b Pin hole 33 Male thread 34a, 34b Flat surface 36a, 36b, 36c Bushing 37 O-ring 38 Holding parts 39 Bracket 41 Casing 42a 42b Cylinder chamber 42c, 42e 1st chamber 42d, 42f 2nd chamber 43a, 43b 2nd piston 44 Rack 46 Pinion 46a Insertion hole 47 Bearing member 47a Insertion hole 47b Bearing part 47c 1st enlarged diameter part 47d 2nd enlarged diameter Part 47e Spring seat 47f Cylindrical part 48 Coil spring 49 Spring retainer 49a Collar part 51 Nut C1, C2, C3 Circle CT1, CT2, CT3 Center S Axis θ1, θ2 Angular range L Creeping distance

Claims (5)

A piston that moves forward and backward in the cylinder;
A cylinder head disposed at one end of the cylinder such that an inner surface faces the piston;
A suction port provided in the cylinder head and connected to the coating liquid tank;
A discharge port provided in the cylinder head and connected to a coating machine;
A supply port that opens to the inner surface of the cylinder head and communicates with the suction port;
A discharge port that opens on the inner surface of the cylinder, communicates with the discharge port, and is disposed on the same first circle as the supply port;
A switching rod that passes through the cylinder head, the axis passes through the center of the first circle, and includes a valve plate at one end located on the inner surface side of the cylinder;
A through hole provided in the valve plate and disposed on a second circle concentric with and having the same diameter as the first circle;
An actuator that rotationally drives the switching rod about the axis;
In a direction of the valve plate is pressed against the inner surface of the cylinder head, e Bei a spring that biases the switching rod elastically,
The application liquid supply apparatus , wherein the pressing force by the spring is set so that a film of the application liquid that functions as a seal film and a lubricating film is formed between the valve body and the cylinder head .   The coating liquid supply apparatus according to claim 1, wherein there are a plurality of the supply ports and the same number of the through holes as the supply ports.   The coating liquid supply apparatus according to claim 2, wherein the supply port is arranged point-symmetrically with respect to the center of the first circle.   The coating liquid supply apparatus according to claim 3, wherein there are two supply ports, and the two supply ports are arranged at an angular interval of 180 ° around the center of the first circle.   5. The wear-resistant fixing plate fixed to the cylinder head or the valve plate is interposed between the inner surface of the cylinder head and the valve plate. The coating liquid supply apparatus according to item.

Images