WO2021190102A1 - 镀膜组件及镀膜装置和镀膜方法 - Google Patents

镀膜组件及镀膜装置和镀膜方法 Download PDF

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Publication number
WO2021190102A1
WO2021190102A1 PCT/CN2021/071677 CN2021071677W WO2021190102A1 WO 2021190102 A1 WO2021190102 A1 WO 2021190102A1 CN 2021071677 W CN2021071677 W CN 2021071677W WO 2021190102 A1 WO2021190102 A1 WO 2021190102A1
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Prior art keywords
film material
roller
coating
film
cooling
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PCT/CN2021/071677
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English (en)
French (fr)
Inventor
吴婷婷
冯俊敏
张万财
Original Assignee
深圳市海瀚新能源技术有限公司
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Priority claimed from CN202010221984.1A external-priority patent/CN113981376A/zh
Priority claimed from CN202020393121.8U external-priority patent/CN212404258U/zh
Application filed by 深圳市海瀚新能源技术有限公司 filed Critical 深圳市海瀚新能源技术有限公司
Publication of WO2021190102A1 publication Critical patent/WO2021190102A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Definitions

  • the present disclosure relates to the field of coating technology, and in particular to coating components, coating devices and coating methods.
  • the stick-roll type evaporation equipment has the problems of wrinkles and empty lines on the substrate, and the suspension evaporation equipment has the problems of poor heat transfer and low deposition efficiency.
  • the purpose of the present disclosure is to provide a coating component, a coating device, and a coating method, so as to improve the technical problems of the existing coating equipment, such as empty lines, poor heat transfer, and low deposition efficiency.
  • the present disclosure may adopt the following technical solutions:
  • a first aspect of the present disclosure includes providing a coating assembly, which includes a first roller, a first cooling roller, and an evaporation mechanism.
  • the first cooling roller is arranged downstream of the first roller along the conveying path of the film material, the first cooling roller is arranged above the film material, and the film material between the first roller and the first cooling roller is defined as a suspended film material.
  • the evaporation mechanism is arranged under the suspension film material and the first cooling roller, and is configured to be able to simultaneously coat at least part of the suspension film material and part of the film material attached to the first cooling roller.
  • the coating component makes the film material deposited and coated, part of the film material is in a suspended state, and part of the film material is in the state of sticking to the drum.
  • the temperature of the material can avoid thermal damage to the film material, and at the same time can improve the heat transfer efficiency of the coated film material and increase the deposition efficiency.
  • the wrap angle of the first cooling roll is 30-330 degrees, and optionally, the wrap angle of the first cooling roll is 120-270 degrees.
  • a part of the vapor-deposited film material is in a suspended state, and a part is in a state of sticking to the drum, so that the film material is tightly attached to the first cooling roll, and the cooling effect is improved.
  • the wrap angle of the first cooling roll is 30-330 degrees, the wrap angle range can cool the film material better.
  • the first roll is a flattening roll or a cooling roll, and the wrap angle of the first roll is 30-180 degrees; optionally, the wrap angle of the first roll is 40-130 degrees.
  • the wrap angle range helps the first roller to have a better flattening or cooling effect, and at the same time to make the first roller and the first cooling roller have a better coordination effect.
  • the suspended film material is arranged obliquely with respect to the horizontal plane, and the height of the end of the suspended film material close to the first roller is higher than the height of the end of the suspended film material close to the first cooling roller.
  • This structure makes the distance between the evaporation mechanism and the first evaporation zone larger than the distance between the evaporation mechanism and the second evaporation zone.
  • the heat is less, the coating layer formed is thinner, and the film material with poor heat resistance can be vapor-deposited.
  • the distance between the membrane material and the evaporation mechanism gradually decreases, and the thickness of the coating layer gradually increases to a certain thickness without affecting the evaporation effect.
  • the inclined angle of the suspended membrane material relative to the horizontal plane is 5-60 degrees.
  • This inclination angle range can reduce the heat absorbed by the film material in the early stage of vapor deposition and reduce the probability of the film material being thermally damaged.
  • the length of the film between the first roller and the first cooling roller is 200-2000 mm.
  • the length of the film between the first roll and the first cooling roll is 300-900 mm.
  • the length of the vapor-deposited film between the two rollers in the existing suspension vapor deposition equipment is generally 600-1500 mm, and the free film length is relatively long, which is prone to problems such as wrinkles. Moreover, the length is much larger than the evaporation length of the evaporation mechanism.
  • structures such as a cover plate are generally provided, which results in a complex structure of the equipment and cumbersome operation.
  • the structure of the coating assembly of the present disclosure does not need to consider the influence on the film materials on both sides of the vapor deposition area, and can shorten the length of the film materials between the first roll and the first cooling roll to a length of 200-2000 mm. This structure can simplify the structure of the evaporation mechanism, avoid the wrinkle problem caused by the long free film length, and help improve the evaporation effect and flattening of the film material.
  • a second cooling roller is further included.
  • the first roller is a flattening roller, and the first roller, the second cooling roller, and the first cooling roller are arranged in sequence along the conveying path.
  • the structure can flatten and cool the film material before evaporation, so that the film material has better flatness, and can absorb more heat during the film coating process without thermal damage.
  • the second aspect of the present disclosure includes providing a coating device, which includes a vacuum chamber, an unwinding mechanism, a winding mechanism, and the above-mentioned coating assembly.
  • the unwinding mechanism, the coating assembly, and the winding mechanism are sequentially arranged in the vacuum chamber along the conveying path. internal.
  • the coating device includes a coating component, which can improve the heat transfer efficiency of the coated film material, export more heat, and improve the deposition efficiency. Lowering the temperature of the suspended film material can increase the amount of coating and increase the thickness of the coating.
  • a third aspect of the present disclosure includes providing a coating method, which uses the above-mentioned coating assembly to coat a film material, including: the film material is conveyed from a first roller to a first cooling roller along a conveying path; Coating with the film material partially attached to the first cooling roll.
  • the coating method can simultaneously coat the suspended film material and the film material attached to the first cooling roller, so that the heat absorbed by the film material during the coating process is quickly discharged from the first cooling roller, which helps to reduce the temperature of the film material. Avoid thermal damage to the film material and improve deposition efficiency.
  • the coating includes the following steps: transport the film material from the first roller to the first cooling roller along the conveying path, and when the film material is conveyed to the top of the evaporation mechanism, the evaporation mechanism evaporates the suspended film material.
  • the film is subjected to the heat radiation of the evaporation mechanism to continue to evaporate and coat, and the film entering the first cooling roller is attached to the surface of the first cooling roller for cooling to reduce the film material Of thermal damage.
  • the suspended film material includes a first coating area, the area where the evaporation mechanism acts on the film material attached to the first cooling roller is the second coating area, and the second coating area is connected to the first coating area. connect;
  • the suspended film material also includes an uncoated film.
  • the evaporation mechanism performs the first coating area on the suspended film material. Evaporation coating.
  • the ratio of the sum of the length of the film material in the first coating area and the length of the film material in the second coating area to the length of the film material in the uncoated area is 1:9-3:7.
  • the length of the preheated film in the uncoated area, the length of the vapor-deposited film in the first coating area, and the vapor-deposited and cooled film length in the second-coated area will all affect the vapor deposition of the film. Effect.
  • the length ratio range can make the preheating stage, vapor deposition stage, vapor deposition and cooling stage of the film material suitable, so that the film material has a better vapor deposition effect.
  • the ratio of the length of the film material in the first coating zone to the length of the film material in the second coating zone is 1:2-2:1.
  • This structure makes the heat absorbed by the membrane material and the heat exported by cooling suitable, and on the basis of a better vapor deposition quality, the probability of thermal damage of the membrane material is reduced to a greater extent.
  • the film material includes any one of plastic flexible film, composite film, paper and cloth;
  • the plastic flexible film includes any one of a flexible conductive material and a flexible polymer film;
  • the material of the plastic flexible film is PET, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyimide (PI), polypropylene (PP), Any one or more of polyethylene (PE) and polyphenylene sulfide (PPS).
  • PET polyethylene terephthalate
  • PEN polyethylene naphthalate
  • PI polyimide
  • PP polypropylene
  • PE polyethylene
  • PPS polyphenylene sulfide
  • the fourth aspect of the present disclosure includes providing a coating assembly, the coating assembly includes
  • the first roller, the first cooling roller and the evaporation mechanism is arranged downstream of the first roller along the conveying path of the film material, and the first cooling roller is arranged above the film material, so that the film material is suspended in the first A first state between the roller and the first cooling roll and a second state close to the first cooling roll;
  • the evaporation mechanism is arranged below the suspended film material and the first cooling roller, and is configured to be able to simultaneously coat the film material that is at least partially in the first state and partially in the second state.
  • the wrap angle of the first roller is 30-180 degrees, and the wrap angle of the first cooling roller is 30-330 degrees;
  • the wrap angle of the first roller is 40-130 degrees, and the wrap angle of the first cooling roller is 120-270 degrees;
  • the suspended film material is arranged obliquely with respect to the horizontal plane, and the height of the end of the suspended film material close to the first roller is higher than the height of the end of the suspended film material close to the first cooling roller;
  • the inclined angle of the suspended membrane material relative to the horizontal plane is 5-60 degrees.
  • the length of the film between the first roller and the first cooling roller is 200-2000 mm;
  • the length of the film between the first roll and the first cooling roll is 300-900 mm.
  • the fifth aspect of the present disclosure includes providing a coating device, which includes a vacuum chamber, an unwinding mechanism, a winding mechanism, and the above-mentioned coating assembly.
  • the unwinding mechanism, the coating assembly, and the winding mechanism are sequentially arranged along the conveying path The inside of the vacuum chamber.
  • the sixth aspect of the present disclosure includes providing a coating method, using the above-mentioned coating assembly to coat a film material, including: the film material is conveyed from a first roller to a first cooling roller along a conveying path, and the evaporation mechanism is at least partially The film material in the first state and part of the second state is coated.
  • the film material is conveyed from the first roller to the first cooling roller along the conveying path, and when the film material is conveyed above the evaporation mechanism, the evaporation mechanism evaporates and coats the film material in the first state,
  • the film material in the second state is subjected to the heat radiation of the evaporation mechanism to continue to evaporate and coat, and the film material entering the first cooling roller is attached to the surface of the first cooling roller for cooling to avoid film The material is thermally damaged.
  • the present disclosure provides a coating assembly including a first roller, a first cooling roller and an evaporation mechanism.
  • the first cooling roller is arranged downstream of the first roller along the conveying path of the film material, the first cooling roller is arranged above the film material, and the film material between the first roller and the first cooling roller is defined as a suspended film material.
  • the evaporation mechanism is arranged under the suspension film material and the first cooling roller, and is configured to be able to simultaneously coat at least part of the suspension film material and part of the film material attached to the first cooling roller.
  • the coating component makes the film material deposited and coated, part of the film material is in a suspended state, and part of the film material is in the state of sticking to the drum. The temperature of the material to avoid thermal damage to the film material.
  • the coating assembly adjusts the coating method and uses an evaporation mechanism to simultaneously evaporate the suspended film material and the film material attached to the cooling roller, which not only solves the problem of wrinkles and plating lines in the film material , It also improves the heat transfer of the membrane material and improves the deposition efficiency.
  • FIG. 1 is a schematic diagram of the first structure of a coating assembly provided by an embodiment of the disclosure
  • FIG. 2 is a schematic diagram of a second structure of a coating assembly provided by an embodiment of the disclosure.
  • FIG. 3 is a schematic diagram of a third structure of a coating assembly provided by an embodiment of the disclosure.
  • FIG. 4 is a schematic diagram of a fourth structure of a coating assembly provided by an embodiment of the disclosure.
  • Icon 100-coating component; 101-film material; 110-first roll; 120-first cooling roll; 130-evaporation mechanism; 140-second cooling roll; 150-passing roll.
  • orientation or positional relationship indicated by the terms “upper”, “lower”, “horizontal”, “inner”, “outer”, etc. are based on the orientation or positional relationship shown in the drawings.
  • the orientation or positional relationship that the application product is usually placed in use is only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation and be constructed in a specific orientation And operation, therefore cannot be understood as a limitation of the present disclosure.
  • the terms “first”, “second”, etc. are only used for distinguishing description, and cannot be understood as indicating or implying relative importance, as well as indicating position or order.
  • the two common existing coating equipments are the stick-roll type evaporation equipment and the suspension type evaporation equipment.
  • the film coating process the backside of the substrate is adhered to the large low-temperature roller for cooling by stick-roll evaporation equipment.
  • This coating method has the problem that the substrate is not fully expanded or not tightly attached before entering the cooling roll, causing the substrate to enter the cooling roll The post-cooling effect is poor, and the appearance of wrinkles and plating voids is abnormal when heated during vapor deposition.
  • the suspension type evaporation equipment the substrate is in a suspended state during the coating process. Cooling after the coating is completed can solve the problem of the plating line.
  • the substrate when the substrate is subjected to an increase in evaporation deposition rate or a low speed, it is prone to thermal film breakage In addition, the film surface of the suspension coating equipment is prone to perforation. At the same time, the heat of the film surface of the suspension coating equipment cannot be transferred in time, and the deposition efficiency is low.
  • the inventor of the present disclosure uses an evaporation mechanism to simultaneously evaporate the suspended film material and the film material attached to the cooling roller, which not only solves the problem of wrinkles and plating lines in the film material, but also improves The heat transfer of the membrane material improves the deposition efficiency.
  • FIG. 1 to FIG. 3 are schematic diagrams of the three types of coating assemblies 100 provided in this embodiment.
  • This embodiment provides a coating assembly 100 for vapor deposition of the membrane material 101.
  • the film material 101 may be a plastic flexible film, a composite film, paper, cloth, etc.
  • the material of the plastic flexible film may be PET, polyethylene terephthalate (PET), polyethylene naphthalate Alcohol ester (PEN), polyimide (PI), polypropylene (PP), polyethylene (PE), polyphenylene sulfide (PPS), etc.
  • PET polyethylene terephthalate
  • PEN polyethylene naphthalate Alcohol ester
  • PI polyimide
  • PP polypropylene
  • PE polyethylene
  • PPS polyphenylene sulfide
  • the plastic flexible film can be a flexible conductive material, a flexible polymer film, and the like.
  • the coating assembly 100 includes a first roller 110, a first cooling roller 120 and an evaporation mechanism 130.
  • the first roller 110 and the first cooling roller 120 are sequentially arranged along the conveying path, that is, the first cooling roller 120 is arranged downstream of the first roller 110 along the conveying path of the film 101. Since the evaporation mechanism 130 is arranged below the film material 101, in order to avoid the influence of the body of the first cooling roll 120 on the evaporation, the first cooling roll 120 is arranged above the film material 101. In this embodiment, the first roller 110 is also disposed above the film material 101. In other embodiments of the present disclosure, the first roller 110 may be disposed below the film material 101.
  • the film material 101 between the first roller 110 and the first cooling roller 120 is defined as a suspended film material 101, that is, the film material 101 moving between the first roller 110 and the first cooling roller 120 is in a suspended state.
  • the evaporation mechanism 130 in the present disclosure may be an evaporation boat, a crucible, or an electron gun.
  • the number of evaporation boats and crucibles can be adjusted according to the width of the substrate, such as one or 50.
  • the evaporation mechanism 130 in the embodiment of the present disclosure is arranged below the suspended film material 101 and the first cooling roller 120, and is configured to be able to simultaneously attach at least part of the suspended film material 101 and part to the first cooling roller.
  • the film material 101 on the cooling roll 120 is coated.
  • the suspended film material 101 includes an uncoated area and a first coated area, that is, the front section of the suspended film material 101 is the uncoated area, and the back section is the first coated area.
  • the film material 101 attached to the first cooling roller 120 includes a second coating area, and the second coating area is connected to the first coating area.
  • This structure makes the film 101 move from the first roller 110 to the first cooling roller 120, the film 101 in the uncoated area is preheated by the radiant heat of the evaporation mechanism 130, and the film 101 has a better flattening after preheating. The effect helps to improve the flatness of the film material 101 and facilitates vapor deposition.
  • the preheated film material 101 moves above the evaporation mechanism 130, and the evaporation mechanism 130 vaporizes the film material 101 in the first coating zone. During the evaporation process, the film material 101 is heated, and a coating layer is formed on the surface. The film material 101 continues to move to the first cooling roller 120.
  • the film material 101 When it enters the first cooling roller 120, the film material 101 is still vapor-deposited, so that the film material 101 continues to be heated and the temperature rises, and at the same time enters the film material of the first cooling roller 120 101 is attached to the surface of the first cooling roller 120 for cooling, and derives the heat of the film material 101, which helps to reduce the temperature of the film material 101 and avoid thermal damage to the film material 101.
  • the coating assembly 100 enables the membrane material 101 to absorb more heat, which helps to increase the thickness of the coating layer of the membrane material 101 and improve the deposition efficiency.
  • this structure reduces the wrap angle of the film material 101 on the first cooling roll 120.
  • pressure The tension/forced area received by the film 101 makes the film 101 and the first cooling roller 120 fit tighter, which improves the cooling effect, thereby increasing the thermal conductivity and heat dissipation effect, and helps to increase the absorption of the film 101. Heat, improve deposition efficiency.
  • the wrap angle of the first cooling roll 120 is 30-330 degrees.
  • the wrap angle of the first cooling roll is 120-270 degrees. Better cooling.
  • the wrap angle of the first cooling roller 120 may be 30 degrees, 60 degrees, 90 degrees, 120 degrees, 150 degrees, 160 degrees, 180 degrees, 200 degrees, 220 degrees, 250 degrees, or 270 degrees.
  • the length of the preheated film 101 in the uncoated area, the length of the vapor-deposited film 101 in the first coating area, and the vapor-deposited and cooled film 101 length in the second coating area will all affect the film material. 101's evaporation effect.
  • the film material 101 in the first coating zone The ratio of the sum of the length and the length of the film material 101 in the second coating area to the length of the film material 101 in the uncoated area is 1:9-3:7.
  • the ratio of the sum of the length of the film material 101 in the first coating zone and the length of the film material 101 in the second coating zone to the length of the film material 101 in the uncoated zone is 1:9, 2:9, 1:8 , 1:4 or 3:7.
  • the ratio of the length of the film material 101 in the first coating zone to the length of the film material 101 in the second coating zone is 1:2-2:1.
  • This structure makes the heat absorbed by the membrane 101 and the heat exported by cooling suitable, and on the basis of having a better vapor deposition quality, the probability of thermal damage of the membrane 101 is reduced to a greater extent.
  • the ratio of the length of the film material 101 in the first coating zone to the length of the film material 101 in the second coating zone is 1:2, 2:3, 1:1, 3:2, or 2:1. That is, the area of the film material 101 in the first coating zone can be greater than, equal to, or smaller than the area of the film material 101 in the second coating zone, and the specific setting method can be adjusted according to actual needs.
  • the length of the vapor-deposited film between the two rollers in the existing suspension vapor deposition equipment is generally 600-1500 mm, and the free film length is relatively long, which is prone to problems such as wrinkles. Moreover, the length is much larger than the evaporation length of the evaporation mechanism 130.
  • structures such as a cover plate are generally provided, which results in a complex structure of the equipment and cumbersome operation.
  • the structure of the coating assembly 100 of the present disclosure does not need to consider the influence of the film material 101 on both sides of the evaporation area, so the length of the film material 101 between the first roller 110 and the first cooling roller 120 can be shortened, and the structure of the evaporation mechanism 130 can be simplified , To avoid the wrinkle problem caused by the long free film length, and help to improve the vapor deposition effect and flattening of the film material 101.
  • the length of the film 101 between the first roller 110 and the first cooling roller 120 is 200-2000 mm. Further, the length of the film 101 between the first roller 110 and the first cooling roller 120 is 300-900 mm.
  • the length of the film 101 between the first roller 110 and the first cooling roller 120 is 200 mm, 300 mm, 500 mm, 600 mm, 800 mm, 900 mm, 1000 mm, 1500 mm, or 2000 mm.
  • the suspended film material 101 is the first coating zone, that is, the evaporation mechanism 130 vaporizes the suspended film material 101, and is attached to the film material 101 on the first cooling roller 120 It includes a second coating area, and the second coating area is connected to the first coating area.
  • the film material 101 attached to the first roller 110 is an uncoated area or no uncoated area is provided.
  • This structure helps to shorten the length of the film material 101 between the first roll 110 and the first cooling roll 120, the length of the film material 101 in the first coating zone and the length of the film material 101 in the second coating zone in this structure
  • the ratio is 1:2-2:1.
  • the ratio of the length of the film material 101 in the first coating zone to the length of the film material 101 in the second coating zone is 1:2, 2:3, 1:1, 3:2, or 2:1.
  • the vapor-deposited film material 101 in the existing suspension coating equipment is all arranged horizontally. This arrangement helps to improve the heat uniformity of the vapor-deposited film material 101 and ensure the vapor-deposition effect to a greater extent.
  • the suspended film material 101 in the embodiment of the present disclosure can be arranged horizontally, but the distance between the horizontally arranged suspended film material 101 and the evaporation mechanism is the same, so that in the initial stage of evaporation, the film acts on the film
  • the amount of steam of the material 101 is large, so that the film material 101 absorbs more heat in a short time, which is not conducive to the vapor deposition of the film material 101 with poor heat resistance.
  • FIG. 3 is a schematic diagram of a third structure of the coating assembly 100 provided by an embodiment of the present disclosure. Due to the different evaporation methods of the present disclosure, the suspended film material 101 in the embodiments of the present disclosure can be arranged obliquely with respect to the horizontal plane, and the height of the end of the suspended film material 101 close to the first roll 110 is higher than that of the suspended film material 101 close to the first cooling roll The height of one end of 120.
  • This structure makes the distance between the evaporation mechanism 130 and the first evaporation zone greater than the distance between the evaporation mechanism 130 and the second evaporation zone. Less, less heat absorbed, thinner plating layer formed, and film material 101 with poor heat resistance can be vapor-deposited.
  • the distance between the film material 101 and the evaporation mechanism 130 gradually decreases, and the thickness of the coating layer gradually increases to a certain thickness without affecting the evaporation effect.
  • the film material 101 is set obliquely to the horizontal plane, when the film material 101 descends from the first roll 110 to the first cooling roll 120, the uncoated area and the first coated area of the film surface can gradually change the heat of the film surface, and the heat will gradually increase from small. It does not endure a large amount of coating heat at once, so that the quality of the coating surface is better.
  • the inclined angle ⁇ of the suspended film material 101 relative to the horizontal plane is 5-60 degrees, that is, the angle between the suspended film material 101 and the evaporation source is 5-60 degrees.
  • the angle ⁇ at which the suspended membrane material 101 is inclined relative to the horizontal plane is 10 degrees, 20 degrees, 30 degrees, 45 degrees, 50 degrees, or 60 degrees.
  • the source base distance (the distance between the film material 101 and the evaporation source) in the embodiment of the present disclosure is within the conventional range in the technical field. Among them, the minimum source base distance (the minimum distance between the film material 101 and the evaporation source) may be 150-200 mm.
  • the first roller 110 may be a flattening roller or a cooling roller.
  • the flattening roller is used to flatten the film 101 before evaporation, so that the film 101 is evaporated in a flat state. Plating to ensure the evaporation effect.
  • the cooling roller is used to cool the film material 101 before vapor deposition, reduce the temperature of the film material 101, so that the film material 101 can absorb more heat.
  • the first roller The wrap angle of 110 is 30-180 degrees.
  • the wrap angle of the first roller is 40-130 degrees.
  • the wrap angle of the first roller 110 may be 30 degrees, 40 degrees, 45 degrees, 60 degrees, 80 degrees, 90 degrees, 100 degrees, 120 degrees, or 130 degrees. It should be noted that the roll diameters of the first roll 110 and the first cooling roll 120 in the embodiment of the present disclosure may be the same or different.
  • FIG. 4 is a schematic diagram of a fourth structure of the coating assembly 100 provided by an embodiment of the present disclosure.
  • the coating assembly 100 further includes a second cooling roll 140 and a passing roll 150, the first roll 110 is a flattening roll, the first roll 110, the second cooling roll 140, the first cooling roll 120 and The passing rollers 150 are sequentially arranged along the conveying path.
  • This structure can flatten and cool the film material 101 before evaporation, so that the film material 101 has better flatness, and can absorb more heat during the film coating process without thermal damage.
  • This coating method makes the film material 101 deposited and coated, part of the film material 101 is in the suspended state, and the other is in the drum state, which improves
  • the heat transfer efficiency of the plated film material 101 reduces the temperature of the film material 101 in a suspended state, which in turn can increase the amount of the plated film and increase the thickness of the plated layer.
  • the structure reduces the wrap angle of the film on the first cold roll, makes the film and the cold roll more tightly bonded, has a better cooling effect, derives more heat, and improves deposition efficiency.
  • the deposition efficiency of the coating device provided by the present disclosure can be increased by 5-20%.
  • the embodiment of the present disclosure also provides a coating device (not shown), including a vacuum chamber, an unwinding mechanism, a winding mechanism, and a coating assembly 100.
  • the unwinding mechanism, the coating assembly 100 and the winding mechanism are transported along the film 101 The paths are sequentially arranged inside the vacuum chamber.
  • the film material 101 is rolled up in the unwinding mechanism, and is discharged by the unwinding mechanism, and is vapor-deposited through the film-coating assembly 100, and the film material 101 after vapor-deposition moves to the winding mechanism for winding.
  • the unwinding mechanism and the winding mechanism in the present disclosure are common components in the technical field, and other components with unwinding and winding functions may also be used, which is not limited by the present disclosure.
  • the present disclosure provides a coating assembly including a first roller, a first cooling roller and an evaporation mechanism.
  • the first cooling roller is arranged downstream of the first roller along the conveying path of the film material, the first cooling roller is arranged above the film material, and the film material between the first roller and the first cooling roller is defined as a suspended film material.
  • the evaporation mechanism is arranged under the suspension film material and the first cooling roller, and is configured to be able to simultaneously coat at least part of the suspension film material and part of the film material attached to the first cooling roller.
  • the coating component makes the film material deposited and coated, part of the film material is in a suspended state, and part of the film material is in the state of sticking to the drum.
  • the temperature of the material can avoid thermal damage to the film material, and at the same time can improve the heat transfer efficiency of the coated film material and increase the deposition efficiency.

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Abstract

镀膜组件（100）及镀膜装置和镀膜方法，涉及镀膜技术领域，一种镀膜组件（100），包括第一辊（110）、第一冷却辊（120）和蒸发机构（130）；第一冷却辊（120）沿膜材（101）的传送路径设置于第一辊（110）的下游，第一冷却辊（120）设置于膜材（101）的上方，第一辊（110）与第一冷却辊（120）之间的膜材（101）限定为悬浮膜材（101）；蒸发机构（130）设置于悬浮膜材（101）和第一冷却辊（120）的下方，且被配置为能够同时对至少部分悬浮膜材（101）和部分贴合于第一冷却辊（120）上的膜材（101）进行镀膜；该镀膜组件（100）使得沉积镀膜的膜材（101）中，一部分膜材（101）为悬浮状态，一部分为贴鼓状态，贴合于第一冷却辊（120）上的膜材（101）能够进行冷却，导出膜材（101）的热量，有助于降低膜材（101）的温度，避免膜材（101）出现热损伤，提高了膜材（101）的热量传递和沉积效率。

Description

镀膜组件及镀膜装置和镀膜方法
相关申请的交叉引用
本申请要求于2020年03月25日提交中国专利局的申请号为2020102219841、名称为“镀膜组件及镀膜装置和镀膜方法”和申请号为2020203931218、名称为“镀膜组件及镀膜装置”的中国专利申请的优先权，其全部内容通过引用结合在本公开中。
技术领域
本公开涉及镀膜技术领域，具体而言，涉及镀膜组件及镀膜装置和镀膜方法。
背景技术
随着真空镀膜技术的发展，柔性导电材料的生产工艺由真空镀膜逐步取代了传统的电镀、涂覆和化学处理方法，减少了传统工艺方法产生的污染，且拥有镀层纯度高、结合力好、均匀性好的优点。
市面上有两种类型的镀膜设备，一种是贴辊式蒸镀设备，另一种是悬浮式蒸镀设备。贴辊式蒸镀设备存在基材出现褶皱和镀空线的问题，悬浮式蒸镀设备存在传热差、沉积效率低的问题。
发明内容
本公开的目的在于提供镀膜组件及镀膜装置和镀膜方法，以改善现有镀膜设备存在镀空线或传热差、沉积效率低的技术问题。
为实现本公开的上述目的中的至少一个目的，本公开可采用以下技术方案：
本公开的第一方面包括提供了一种镀膜组件，镀膜组件包括第一辊、第一冷却辊和蒸发机构。第一冷却辊沿膜材的传送路径设置于第一辊的下游，第一冷却辊设置于膜材的上方，第一辊与第一冷却辊之间的膜材限定为悬浮膜材。蒸发机构设置于悬浮膜材和第一冷却辊的下方，且被配置为能够同时对至少部分悬浮膜材和部分贴合于第一冷却辊上的膜材进行镀膜。
该镀膜组件使得沉积镀膜的膜材中，一部分膜材为悬浮状态，一部分为贴鼓状态，贴合于第一冷却辊上的膜材能够进行冷却，导出膜材的热量，有助于降低膜材的温度，避免膜材出现热损伤，同时能够提高镀膜的膜材的传热效率，提高沉积效率。
在一种可能的实现方式中，第一冷却辊的包角为30-330度，可选地，第一冷却辊的包角为120-270度。
蒸镀的膜材一部分为悬浮状态，一部分为贴鼓状态，使得膜材与第一冷却辊贴合的更紧，提高冷却效果。当第一冷却辊的包角为30-330度，该包角范围能够对膜材进行较好的冷却。
在一种可能的实现方式中，第一辊为展平辊或冷却辊，第一辊的包角为30-180度；可选地，第一辊的包角为40-130度。
该包角范围有助于第一辊具有较好的展平或冷却效果，同时为了使得第一辊与第一冷却辊之间具有较优的配合作用。
在一种可能的实现方式中，悬浮膜材相对水平面倾斜设置，悬浮膜材靠近第一辊的一端的高度高于悬浮膜材靠近第一冷却辊的一端的高度。
该结构使得蒸发机构与第一蒸镀区的距离大于蒸发机构与第二蒸镀区的距离，即镀膜初始阶段的膜材与蒸发机构的距离较远，使得受到的蒸汽量较少，吸收的热量较少，形成的镀层较薄，能够蒸镀耐热性较差的膜材。随着膜材的运动，膜材与蒸发机构的距离逐渐减小，镀层的厚度逐渐增加至达到一定厚度，不会影响蒸镀效果。
在一种可能的实现方式中，悬浮膜材相对水平面倾斜的角度为5-60度。
该倾斜角度范围能够减少膜材在蒸镀前期吸收的热量，降低膜材受到热损伤的概率。
在一种可能的实现方式中，第一辊与第一冷却辊之间的膜材的长度为200-2000mm。可选地，第一辊与第一冷却辊之间的膜材的长度为300-900mm。
现有的悬浮式蒸镀设备中的两辊之间的蒸镀膜的长度一般为600-1500mm，自由膜长度较长，易出现褶皱等问题。并且该长度远大于蒸发机构的蒸镀长度，为了避免蒸发机构对非蒸镀部分的作用，一般设置盖板等结构，造成设备结构复杂，操作繁琐。本公开的镀膜组件的结构不需要考虑对蒸镀区域两侧膜材的影响，能够缩短第一辊与第一冷却辊之间的膜材的长度，使其长度为200-2000mm。该结构能够简化蒸发机构结构，避免自由膜长度较长而产生的褶皱问题，有助于提高膜材的蒸镀效果和展平。
在一种可能的实现方式中，还包括第二冷却辊，第一辊为展平辊，第一辊、第二冷却辊以及第一冷却辊沿传送路径依次设置。
该结构能够对蒸镀前的膜材进行展平和冷却，使得膜材具有较好的平整性，在镀膜的过程中能够吸收较多的热量而不出现热损伤。
本公开的第二方面包括提供了一种镀膜装置，镀膜装置包括真空室、放卷机构、收卷机构以及上述镀膜组件，放卷机构、镀膜组件以及收卷机构沿传送路径依次设置于真空室的内部。
该镀膜装置包括镀膜组件，能够提高镀膜的膜材的传热效率，导出更多的热量，提高沉积效率。降低悬浮状态的膜材的温度，进而能够提高镀膜的量，增大镀层的厚度。
本公开的第三方面包括提供了一种镀膜方法，采用上述镀膜组件对膜材进行镀膜，包括：膜材沿传送路径由第一辊传送至第一冷却辊，蒸发机构对至少部分悬浮膜材和部分贴合于第一冷却辊上的膜材进行镀膜。
该镀膜方法能够同时对悬浮膜材和贴合于第一冷却辊上的膜材进行镀膜，使得镀膜过程中膜材吸收的热量快速从第一冷却辊导出，有助于降低膜材的温度，避免膜材出现热损伤，提高沉积效率。
在一种可能的实现方式中，镀膜包括以下步骤：将膜材沿传送路径由第一辊传送至第一冷却辊，膜材传送至蒸发机构的上方时，蒸发机构对悬浮膜材进行蒸发镀膜，膜材继续传送至第一冷却辊时，膜材受到蒸发机构的热辐射继续进行蒸发镀膜，同时进入第一冷却辊的膜材贴合在第一冷却辊的表面进行冷却以减少对膜材的热损伤。
在一种可能的实现方式中，悬浮膜材包括第一镀膜区，蒸发机构作用于贴合于第一冷却辊上的膜材的区域为第二镀膜区，第二镀膜区与第一镀膜区连接；
可选地，悬浮膜材还包括未镀膜，未镀膜区的膜材受到蒸发机构的热辐射预热后，膜材传送至蒸发机构的上方时，蒸发机构对悬浮膜材的第一镀膜区进行蒸发镀膜。
在一种可能的实现方式中，第一镀膜区的膜材的长度和第二镀膜区的膜材的长度之和与未镀膜区的膜材长度的比值为1:9-3:7。
在镀膜过程中，未镀膜区的预热的膜材长度、第一镀膜区的仅蒸镀的膜材长度以及第二镀膜区的蒸镀、冷却的膜材长度均会影响膜材的蒸镀效果。该长度比值范围能够使得膜材的预热阶段、蒸镀阶段和蒸镀、冷却阶段适宜，使得膜材的蒸镀效果较佳。
在一种可能的实现方式中，第一镀膜区的膜材的长度与第二镀膜区的膜材的长度的比值为1:2-2:1。
该结构使得膜材吸收的热量和冷却导出的热量适宜，在具有较好的蒸镀质量的基础上，较大程度的减少膜材的热损伤概率。
在一种可能的实现方式中，膜材包括塑料柔性薄膜、复合薄膜、纸张和布料中的任意一种；
可选地，塑料柔性薄膜包括柔性导电材料和柔性聚合物膜的任意一种；
可选地，塑料柔性薄膜的材质为PET聚对苯二甲酸乙二酯(PET)、聚萘5二甲酸乙二醇酯(PEN)、聚酰亚胺(PI)、聚丙烯(PP)、聚乙烯(PE)，聚苯硫醚(PPS)中的任意一种或者几种。
本公开的第四方面包括提供了一种镀膜组件，镀膜组件包括
第一辊、第一冷却辊和蒸发机构，第一冷却辊沿膜材的传送路径设置于第一辊的下游，且第一冷却辊设置于膜材的上方，使得膜材具有悬浮在第一辊与第一冷却辊之间的第一状 态和紧贴在第一冷却辊上的第二状态；以及
蒸发机构，蒸发机构设置于悬浮膜材和第一冷却辊的下方，且被配置为能够同时对至少部分处于第一状态和部分处于第二状态的膜材进行镀膜。
在一种可能的实现方式中，第一辊的包角为30-180度，第一冷却辊的包角为30-330度；
可选地，第一辊的包角为40-130度，第一冷却辊的包角为120-270度；
在一种可能的实现方式中，悬浮膜材相对水平面倾斜设置，悬浮膜材靠近第一辊的一端的高度高于悬浮膜材靠近第一冷却辊的一端的高度；
可选地，悬浮膜材相对水平面倾斜的角度为5-60度。
在一种可能的实现方式中，第一辊与第一冷却辊之间的膜材的长度为200-2000mm；
可选地，第一辊与第一冷却辊之间的膜材的长度为300-900mm。
本公开的第五方面包括提供了一种镀膜装置，镀膜装置包括真空室、放卷机构、收卷机构以及如上述的镀膜组件，放卷机构、镀膜组件以及收卷机构沿传送路径依次设置于真空室的内部。
本公开的第六方面包括提供了一种镀膜方法，采用上述的镀膜组件对膜材进行镀膜，包括：膜材沿传送路径由第一辊传送至第一冷却辊，蒸发机构同时对至少部分处于第一状态和部分处于第二状态的膜材进行镀膜。
在一种可能的实现方式中，将膜材沿传送路径由第一辊传送至第一冷却辊，膜材传送至蒸发机构的上方时，蒸发机构对处于第一状态的膜材进行蒸发镀膜，膜材继续传送至第一冷却辊时，处于第二状态的膜材受到蒸发机构的热辐射继续进行蒸发镀膜，同时进入第一冷却辊的膜材贴合在第一冷却辊表面进行冷却以免膜材出现热损伤。
本公开的作用与效果包括：
本公开提供一种镀膜组件，包括第一辊、第一冷却辊和蒸发机构。第一冷却辊沿膜材的传送路径设置于第一辊的下游，第一冷却辊设置于膜材的上方，第一辊与第一冷却辊之间的膜材限定为悬浮膜材。蒸发机构设置于悬浮膜材和第一冷却辊的下方，且被配置为能够同时对至少部分悬浮膜材和部分贴合于第一冷却辊上的膜材进行镀膜。该镀膜组件使得沉积镀膜的膜材中，一部分膜材为悬浮状态，一部分为贴鼓状态，贴合于第一冷却辊上的膜材能够进行冷却，导出膜材的热量，有助于降低膜材的温度，避免膜材出现热损伤。
因此，本公开提供的镀膜组件通过对镀膜方式调整，采用蒸镀机构同时对悬浮的膜材和贴合于冷却辊的膜材进行蒸镀，既解决了膜材出现褶皱和镀空线的问题，又提高了膜材的热量传递，提高了沉积效率。
附图说明
为了更清楚地说明本公开实施例的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，应当理解，以下附图仅示出了本公开的某些实施例，因此不应被看作是对范围的限定，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他相关的附图。
图1为本公开实施例提供的镀膜组件的第一种结构示意图；
图2为本公开实施例提供的镀膜组件的第二种结构示意图；
图3为本公开实施例提供的镀膜组件的第三种结构示意图；
图4为本公开实施例提供的镀膜组件的第四种结构示意图。
图标：100-镀膜组件；101-膜材；110-第一辊；120-第一冷却辊；130-蒸发机构；140-第二冷却辊；150-过辊。
具体实施方式
为使本公开实施例的目的、技术方案和优点更加清楚，下面将结合本公开实施例中的附图，对本公开实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本公开一部分实施例，而不是全部的实施例。通常在此处附图中描述和示出的本公开实施例的组件可以以各种不同的配置来布置和设计。因此，以下对在附图中提供的本公开的实施例的详细描述并非旨在限制要求保护的本公开的范围，而是仅仅表示本公开的选定实施例。基于本公开中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本公开保护的范围。
在本公开的描述中，需要说明的是，术语“上”、“下”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，或者是该申请产品使用时惯常摆放的方位或位置关系，仅是为了便于描述本公开和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本公开的限制。此外，术语“第一”、“第二”等仅用于区分描述，而不能理解为指示或暗示相对重要性，以及指示位置或次序。
现有的常见的两种镀膜设备为贴辊式蒸镀设备和悬浮式蒸镀设备。贴辊式蒸镀设备在镀膜过程中基材的背面与低温的大辊贴紧进行冷却，该镀膜方式存在基材在进入冷却辊前未充分展开或贴合不紧，造成基材进入冷却辊后冷却效果差，蒸镀时受热出现褶皱和镀空线的外观异常。悬浮式蒸镀设备在镀膜过程中基材呈悬空状态，在镀膜完成后进行冷却，可以解决镀空线的问题，但在基材承受蒸发沉积速率增大或速度较低时容易出现受热断膜的情况，且悬浮式镀膜设备膜面容易出现穿孔，同时悬浮镀膜设备膜面热量不能及时传递，沉积效率低。
本公开发明人通过对镀膜方式调整，采用蒸镀机构同时对悬浮的膜材和贴合于冷却辊的膜材进行蒸镀，既解决了膜材出现褶皱和镀空线的问题，又提高了膜材的热量传递，提高了沉积效率。下面结合附图，对本公开的一些实施方式作详细说明。
请参照图1、图2和图3，图1-图3为本实施例提供的三种镀膜组件100的结构示意图。本实施例提供一种镀膜组件100，用于对膜材101进行蒸镀。在本公开实施例中，膜材101可以为塑料柔性薄膜、复合薄膜、纸张、布料等，塑料柔性薄膜的材质可以为PET聚对苯二甲酸乙二酯(PET)、聚萘二甲酸乙二醇酯(PEN)、聚酰亚胺(PI)、聚丙烯(PP)、聚乙烯(PE)，聚苯硫醚(PPS)等，塑料柔性薄膜可以为柔性导电材料、柔性聚合物膜等。
镀膜组件100包括第一辊110、第一冷却辊120和蒸发机构130。第一辊110和第一冷却辊120沿传送路径依次设置，即第一冷却辊120沿膜材101的传送路径设置于第一辊110的下游。由于蒸发机构130设置于膜材101的下方，为了避免第一冷却辊120本体对蒸镀的影响，第一冷却辊120设置于膜材101的上方。在本实施例中，第一辊110也设置于膜材101的上方，在本公开的其他实施例中，第一辊110可以设置于膜材101的下方。第一辊110与第一冷却辊120之间的膜材101限定为悬浮膜材101，即运动至第一辊110与第一冷却辊120之间的膜材101为悬浮状态。请参照图1和图2，本公开中的蒸发机构130可以为蒸发舟、坩埚或电子枪等，蒸发舟、坩埚的设置个数可以根据基材幅宽的需要进行调整，如一个或50个。
与现有技术不同，本公开实施例中的蒸发机构130设置于悬浮膜材101和第一冷却辊120的下方，且被配置为能够同时对至少部分悬浮膜材101和部分贴合于第一冷却辊120上的膜材101进行镀膜。请参照图1，在一种可能实现的方式中，悬浮膜材101包括未镀膜区和第一镀膜区，即悬浮膜材101的前段为未镀膜区，后段为第一镀膜区。贴合于第一冷却辊120上的膜材101包括第二镀膜区，第二镀膜区与第一镀膜区连接。
该结构使得膜材101从第一辊110向第一冷却辊120运动时，未镀膜区的膜材101受到蒸发机构130的辐射热进行预热，膜材101预热后具有较好的展平效果，有助于提高膜材101的平整性，有利于进行蒸镀。预热后的膜材101运动至蒸发机构130的上方，蒸发机构130对第一镀膜区的膜材101进行蒸镀。蒸镀过程中，膜材101受热，表面生成镀层。膜材101继续运动至第一冷却辊120，刚进入第一冷却辊120时，膜材101仍然进行蒸镀，使得膜材101持续受热、温度升高，同时进入第一冷却辊120的膜材101贴合在第一冷却辊120表面进行冷却，导出膜材101的热量，有助于降低膜材101的温度，避免膜材101出现热损伤。该镀膜组件100使得膜材101能够吸较多的热量，有助于提高膜材101的镀层的厚度，提高沉积效率。
相比贴辊式蒸镀设备，该结构减少了膜材101在第一冷却辊120上的包角，在膜材101 受到的拉力不变的情况下，膜材101的压强增大(压强＝膜材101受到的张力/受力面积)，使得膜材101与第一冷却辊120贴合的更紧，提高冷却效果，进而提高导热量、提高散热效果，有助于提高膜材101的吸热量，提高沉积效率。在本公开的部分实施例中，第一冷却辊120的包角为30-330度，可选地，第一冷却辊的包角为120-270度，该包角范围能够对膜材101进行较好的冷却。其中，第一冷却辊120的包角可以为30度、60度、90度、120度、150度、160度、180度、200度、220度、250度或270度。
在镀膜过程中，未镀膜区的预热的膜材101长度、第一镀膜区的仅蒸镀的膜材101长度以及第二镀膜区的蒸镀、冷却的膜材101长度均会影响膜材101的蒸镀效果。为了使得膜材101的预热阶段、蒸镀阶段和蒸镀、冷却阶段适宜，使得膜材101的蒸镀效果较佳，在本公开的部分实施例中，第一镀膜区的膜材101的长度和第二镀膜区的膜材101的长度之和与未镀膜区的膜材101长度的比值为1:9-3:7。可选的，第一镀膜区的膜材101的长度和第二镀膜区的膜材101的长度之和与未镀膜区的膜材101长度的比值为1:9、2:9、1:8、1:4或3:7。
进一步地，在本公开的部分实施例中，第一镀膜区的膜材101的长度与第二镀膜区的膜材101的长度的比值为1:2-2:1。该结构使得膜材101吸收的热量和冷却导出的热量适宜，在具有较好的蒸镀质量的基础上，较大程度的减少膜材101的热损伤概率。可选的，第一镀膜区的膜材101的长度与第二镀膜区的膜材101的长度的比值为1:2、2:3、1:1、3:2或2:1。即第一镀膜区的膜材101的面积可以大于、等于或小于第二镀膜区的膜材101的面积，具体的设置方式可以根据实际需要进行调整。
现有的悬浮式蒸镀设备中的两辊之间的蒸镀膜的长度一般为600-1500mm，自由膜长度较长，易出现褶皱等问题。并且该长度远大于蒸发机构130的蒸镀长度，为了避免蒸发机构130对非蒸镀部分的作用，一般设置盖板等结构，造成设备结构复杂，操作繁琐。本公开的镀膜组件100的结构不需要考虑对蒸镀区域两侧膜材101的影响，因此能够缩短第一辊110与第一冷却辊120之间的膜材101的长度，简化蒸发机构130结构，避免自由膜长度较长而产生的褶皱问题，有助于提高膜材101的蒸镀效果和展平。在本公开的部分实施例中，第一辊110与第一冷却辊120之间的膜材101的长度为200-2000mm。进一步地，第一辊110与第一冷却辊120之间的膜材101的长度为300-900mm。可选的，第一辊110与第一冷却辊120之间的膜材101的长度为200mm、300mm、500mm、600mm、800mm、900mm、1000mm、1500mm或2000mm。
请参照图2，在一种可能实现的方式中，悬浮膜材101为第一镀膜区，即蒸发机构130对悬浮膜材101进行蒸镀，贴合于第一冷却辊120上的膜材101包括第二镀膜区，第二镀膜区与第一镀膜区连接。贴合于第一辊110上的膜材101为未镀膜区或不设置未镀膜区。 该结构有助于缩短第一辊110与第一冷却辊120之间的膜材101的长度，该结构中的第一镀膜区的膜材101的长度与第二镀膜区的膜材101的长度的比值为1:2-2:1。可选的，第一镀膜区的膜材101的长度与第二镀膜区的膜材101的长度的比值为1:2、2:3、1:1、3:2或2:1。
现有的悬浮式镀膜设备中的蒸镀膜材101均为水平设置，该设置方式有助于提高蒸镀的膜材101的受热均匀性，较大程度保证蒸镀效果。请参照图1和图2，本公开实施例中的悬浮膜材101可以水平设置，但由于水平设置的悬浮膜材101与蒸镀机构的距离一致，使得在蒸镀的初始阶段，作用于膜材101的蒸汽量较多，使得膜材101在短时间内吸收较多的热量，不利于蒸镀耐热性较差的膜材101。
请参照图3，图3为本公开实施例提供的镀膜组件100的第三种结构示意图。由于本公开蒸镀方式的不同，本公开实施例中的悬浮膜材101可以相对水平面倾斜设置，且悬浮膜材101靠近第一辊110的一端的高度高于悬浮膜材101靠近第一冷却辊120的一端的高度。该结构使得蒸发机构130与第一蒸镀区的距离大于蒸发机构130与第二蒸镀区的距离，即镀膜初始阶段的膜材101与蒸发机构130的距离较远，使得受到的蒸汽量较少，吸收的热量较少，形成的镀层较薄，能够蒸镀耐热性较差的膜材101。随着膜材101的运动，膜材101与蒸发机构130的距离逐渐减小，镀层的厚度逐渐增加至达到一定厚度，不会影响蒸镀效果。相对水平面倾斜设置时，膜材101自第一辊110至第一冷却辊120下降的过程中，膜面未镀膜区和第一镀膜区膜面受热可逐步变化，热量由小逐渐增大，而不是一下就承受很大的镀膜热量，使镀膜时膜面质量更佳。
请参照图3，在本公开的部分实施例中，悬浮膜材101相对水平面倾斜的角度α为5-60度，即悬浮膜材101与蒸发源的夹角为5-60度。可选的，悬浮膜材101相对水平面倾斜的角度α为10度、20度、30度、45度、50度或60度。本公开实施例中的源基距(膜材101与蒸发源之间的距离)在本技术领域的常规范围内。其中，最小源基距(膜材101与蒸发源的最小距离)可以为150-200mm。
在本公开的部分实施例中，第一辊110可以为展平辊或冷却辊，展平辊用于对蒸镀前的膜材101进行展平，使得膜材101在展平状态下进行蒸镀，保证蒸镀效果。冷却辊用于对蒸镀前的膜材101进行冷却，降低膜材101的温度，使得膜材101能够吸收较多的热量。为了使得第一辊110具有较好的展平或冷却效果，同时为了使得第一辊110与第一冷却辊120之间具有较优的配合作用，在本公开的部分实施例中，第一辊110的包角为30-180度。可选地，第一辊的包角为40-130度。其中，第一辊110的包角可以为30度、40度、45度、60度、80度、90度、100度、120度或130度。需要说明的是，本公开实施例中第一辊110和第一冷却辊120的辊径可以相同也可以不相同。
请参照图4，图4为本公开实施例提供的镀膜组件100的第四种结构示意图。在一种可能实现的方式中，镀膜组件100还包括第二冷却辊140和过辊150，第一辊110为展平辊，第一辊110、第二冷却辊140、第一冷却辊120和过辊150沿传送路径依次设置。该结构能够对蒸镀前的膜材101进行展平和冷却，使得膜材101具有较好的平整性，在镀膜的过程中能够吸收较多的热量而不出现热损伤。
工作原理：膜材101从放卷机构放出后，经过展平辊展开，运动至第二冷却辊140，膜材101贴合在第二冷却辊140上进行第一次冷却。继续运动经过蒸发机构130上方进行镀膜。由于有预冷的处理，膜材101在镀膜的过程中可以吸收更多的热量而不至于出现热损伤。膜材101运动至第一冷却辊120，贴合于第一冷却辊120的膜材101进行第二次冷却。同时，蒸发机构130对部分贴合在第一冷却辊120上的膜材101进行镀膜，该镀膜方式使得沉积镀膜的膜材101中，一部分膜材101为悬空状态，一部分为贴鼓状态，提高镀膜的膜材101的传热效率，降低悬浮状态的膜材101的温度，进而能够提高镀膜的量，增大镀层的厚度。同时该结构减少了薄膜在第一冷辊上的包角，使薄膜与冷辊贴合效果更紧，冷却效果更佳，导出更多的热量，提高沉积效率。与现有的悬浮式镀膜设备相比，本公开提供的镀膜装置的沉积效率能够提高5-20％。
本公开实施例还提供了一种镀膜装置(图未示)，包括真空室、放卷机构、收卷机构以及镀膜组件100，放卷机构、镀膜组件100以及收卷机构沿膜材101的传送路径依次设置于真空室的内部。膜材101卷设于放卷机构，由放卷机构放出，经过镀膜组件100进行蒸镀，蒸镀后的膜材101运动至收卷机构进行收卷。本公开中的放卷机构和收卷机构为本技术领域的常用部件，也可以采用其他具有放卷和收卷功能的组件，本公开对其不做限定。
以上所述仅为本公开的优选实施例而已，并不用于限制本公开，对于本领域的技术人员来说，本公开可以有各种更改和变化。凡在本公开的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本公开的保护范围之内。
工业实用性
本公开提供了种镀膜组件，包括第一辊、第一冷却辊和蒸发机构。第一冷却辊沿膜材的传送路径设置于第一辊的下游，第一冷却辊设置于膜材的上方，第一辊与第一冷却辊之间的膜材限定为悬浮膜材。蒸发机构设置于悬浮膜材和第一冷却辊的下方，且被配置为能够同时对至少部分悬浮膜材和部分贴合于第一冷却辊上的膜材进行镀膜。该镀膜组件使得沉积镀膜的膜材中，一部分膜材为悬浮状态，一部分为贴鼓状态，贴合于第一冷却辊上的膜材能够进行冷却，导出膜材的热量，有助于降低膜材的温度，避免膜材出现热损伤，同时能够提高镀膜的膜材的传热效率，提高沉积效率。

Claims (20)

  1. 一种镀膜组件，其特征在于，包括
    第一辊；
    第一冷却辊，所述第一冷却辊沿膜材的传送路径设置于所述第一辊的下游，所述第一冷却辊设置于膜材的上方，所述第一辊与所述第一冷却辊之间的膜材限定为悬浮膜材；以及
    蒸发机构，所述蒸发机构设置于所述悬浮膜材和所述第一冷却辊的下方，且被配置为能够同时对至少部分所述悬浮膜材和部分贴合于所述第一冷却辊上的膜材进行镀膜。
  2. 根据权利要求1所述的镀膜组件，其特征在于，所述第一冷却辊的包角为30-330度，可选地，所述第一冷却辊的包角为120-270度。
  3. 根据权利要求1或2所述的镀膜组件，其特征在于，所述第一辊为展平辊或冷却辊，所述第一辊的包角为30-180度；可选地，所述第一辊的包角为40-130度。
  4. 根据权利要求1所述的镀膜组件，其特征在于，所述悬浮膜材相对水平面倾斜设置，所述悬浮膜材靠近所述第一辊的一端的高度高于所述悬浮膜材靠近所述第一冷却辊的一端的高度。
  5. 根据权利要求4所述的镀膜组件，其特征在于，所述悬浮膜材相对水平面倾斜的角度为5-60度。
  6. 根据权利要求1所述的镀膜组件，其特征在于，所述第一辊与所述第一冷却辊之间的膜材的长度为200-2000mm；可选地，所述第一辊与所述第一冷却辊之间的膜材的长度为300-900mm。
  7. 根据权利要求1或6所述的镀膜组件，其特征在于，还包括第二冷却辊，所述第一辊为展平辊，所述第一辊、所述第二冷却辊以及所述第一冷却辊沿所述传送路径依次设置。
  8. 一种镀膜装置，其特征在于，包括真空室、放卷机构、收卷机构以及如权利要求1至7任一项所述的镀膜组件，所述放卷机构、所述镀膜组件以及收卷机构沿所述传送路径依次设置于所述真空室的内部。
  9. 一种镀膜方法，其特征在于，采用如权利要求1至8任一项所述的镀膜组件对膜材进行镀膜，包括：所述膜材沿所述传送路径由所述第一辊传送至所述第一冷却辊，所述蒸发机构对至少部分所述悬浮膜材和部分贴合于所述第一冷却辊上的膜材进行镀膜。
  10. 根据权利要求9所述的镀膜方法，其特征在于，包括以下步骤：将所述膜材沿所述传送路径由所述第一辊传送至所述第一冷却辊，所述膜材传送至所述蒸发机构的上方时， 所述蒸发机构对所述悬浮膜材进行蒸发镀膜，所述膜材继续传送至所述第一冷却辊时，所述膜材受到蒸发机构的热辐射继续进行蒸发镀膜，同时进入所述第一冷却辊的所述膜材贴合在所述第一冷却辊的表面进行冷却以减少对所述膜材的热损伤。
  11. 根据权利要求9所述的镀膜方法，其特征在于，所述悬浮膜材包括第一镀膜区，所述蒸发机构作用于贴合于所述第一冷却辊上的膜材的区域为第二镀膜区，所述第二镀膜区与所述第一镀膜区连接；
    可选地，所述悬浮膜材还包括未镀膜，所述未镀膜区的膜材受到蒸发机构的热辐射预热后，所述膜材传送至所述蒸发机构的上方时，所述蒸发机构对所述悬浮膜材的第一镀膜区进行蒸发镀膜。
  12. 根据权利要求11所述的镀膜方法，其特征在于，所述第一镀膜区的膜材的长度和所述第二镀膜区的膜材的长度之和与所述未镀膜区的膜材长度的比值为1:9-3:7；
    可选地，所述第一镀膜区的膜材的长度与所述第二镀膜区的膜材的长度的比值为1:2-2:1。
  13. 根据权利要求9-12中任一项所述的镀膜方法，其特征在于，所述膜材包括塑料柔性薄膜、复合薄膜、纸张和布料中的任意一种；
    可选地，所述塑料柔性薄膜包括柔性导电材料和柔性聚合物膜的任意一种；
    可选地，所述塑料柔性薄膜的材质为PET聚对苯二甲酸乙二酯(PET)、聚萘二甲酸乙二醇酯(PEN)、聚酰亚胺(PI)、聚丙烯(PP)、聚乙烯(PE)，聚苯硫醚(PPS)中的任意一种或者几种。
  14. 一种镀膜组件，其特征在于，包括
    第一辊；
    第一冷却辊，所述第一冷却辊沿膜材的传送路径设置于所述第一辊的下游，且所述第一冷却辊设置于膜材的上方，使得所述膜材具有悬浮在所述第一辊与所述第一冷却辊之间的第一状态和紧贴在所述第一冷却辊上的第二状态；以及
    蒸发机构，所述蒸发机构设置于所述悬浮膜材和所述第一冷却辊的下方，且被配置为能够同时对至少部分处于第一状态和部分处于第二状态的膜材进行镀膜。
  15. 根据权利要求14所述的镀膜组件，其特征在于，所述第一辊的包角为30-180度，所述第一冷却辊的包角为30-330度；
    可选地，所述第一辊的包角为40-130度，所述第一冷却辊的包角为120-270度。
  16. 根据权利要求14所述的镀膜组件，其特征在于，所述悬浮膜材相对水平面倾斜设置，所述悬浮膜材靠近所述第一辊的一端的高度高于所述悬浮膜材靠近所述第一冷却辊的 一端的高度；
    可选地，所述悬浮膜材相对水平面倾斜的角度为5-60度。
  17. 根据权利要求14所述的镀膜组件，其特征在于，所述第一辊与所述第一冷却辊之间的膜材的长度为200-2000mm；
    可选地，所述第一辊与所述第一冷却辊之间的膜材的长度为300-900mm。
  18. 一种镀膜装置，其特征在于，包括真空室、放卷机构、收卷机构以及如权利要求14-17任一项所述的镀膜组件，所述放卷机构、所述镀膜组件以及收卷机构沿所述传送路径依次设置于所述真空室的内部。
  19. 一种镀膜方法，其特征在于，采用如权利要求14-17中任一项所述的镀膜组件对膜材进行镀膜，包括：所述膜材沿所述传送路径由所述第一辊传送至所述第一冷却辊，所述蒸发机构同时对至少部分处于第一状态和部分处于第二状态的膜材进行镀膜。
  20. 根据权利要求19所述的镀膜方法，其特征在于，将所述膜材沿所述传送路径由所述第一辊传送至所述第一冷却辊，所述膜材传送至所述蒸发机构的上方时，所述蒸发机构对处于第一状态的所述膜材进行蒸发镀膜，所述膜材继续传送至所述第一冷却辊时，处于第二状态的所述膜材受到蒸发机构的热辐射继续进行蒸发镀膜，同时进入所述第一冷却辊的所述膜材贴合在所述第一冷却辊表面进行冷却以免所述膜材出现热损伤。
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