WO2021182058A1 - 元素分析装置 - Google Patents

元素分析装置 Download PDF

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Publication number
WO2021182058A1
WO2021182058A1 PCT/JP2021/006092 JP2021006092W WO2021182058A1 WO 2021182058 A1 WO2021182058 A1 WO 2021182058A1 JP 2021006092 W JP2021006092 W JP 2021006092W WO 2021182058 A1 WO2021182058 A1 WO 2021182058A1
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WIPO (PCT)
Prior art keywords
electrode
furnace
port
heating furnace
working fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/006092
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English (en)
French (fr)
Japanese (ja)
Inventor
井上　貴仁
内原　博
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Horiba Ltd
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Horiba Ltd
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Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP2022505878A priority Critical patent/JP7556018B2/ja
Publication of WO2021182058A1 publication Critical patent/WO2021182058A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/06—Crucible or pot furnaces heated electrically, e.g. induction crucible furnaces with or without any other source of heat
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G01N31/12—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using combustion

Definitions

  • the present invention relates to an elemental analyzer that analyzes elements contained in a sample based on a sample gas generated by heating the sample.
  • An elemental analyzer is used to quantify elements such as nitrogen (N), hydrogen (H), and oxygen (O) contained in the sample.
  • a graphite crucible containing a sample is sandwiched between an upper electrode and a lower electrode in a heating furnace, and an electric current is directly applied to the crucible to heat the crucible and the sample.
  • the mixed gas composed of the sample gas and the carry gas generated by heating is passed through a dust filter to filter dust such as soot.
  • the concentration of various components contained in the mixed gas after filtration is measured by an analytical mechanism consisting of NDIR (Non Dispersive Infrared: non-dispersive infrared gas analyzer), TCD (Thermal Conductivity Detector), etc. NS.
  • the dust adhering to the upper electrode and the lower electrode is scattered.
  • the inside of the heating furnace may become dirty.
  • the present invention has been made in view of the above-mentioned problems, and provides an elemental analyzer capable of sucking the inside of the heating furnace and preventing dust from being scattered when the heating furnace is opened by a simple mechanism.
  • the purpose is.
  • the element analyzer according to the present invention is an element analyzer provided with a heating furnace in which a sample placed in a crucible is heated to generate a sample gas from the sample, and the heating furnace serves as a first electrode.
  • a second electrode configured to be movable between a furnace closing position for sandwiching the crucible with the first electrode and a furnace opening position separated from the furnace closing position by a predetermined distance, and the second electrode.
  • An ejector including a suction port connected to the side, a discharge port connected to the discharge side on the dust suction flow path, and a drive port to which a working fluid is supplied is provided, and the drive mechanism is the first.
  • the working fluid is configured to flow into the drive port of the ejector.
  • the ejector can exert a suction action as the second electrode moves from the furnace closed position to the furnace open position.
  • the dust scattered as the heating furnace is opened can be recovered from the dust suction port in the heating furnace through the dust suction flow path by the suction action of the ejector.
  • the drive mechanism is a first port through which the working fluid flows in or out.
  • the first port is a fluid pressure cylinder configured to be configured so that the piston rod is pulled in and the second electrode moves to the furnace open position side when the working fluid flows in from the first port.
  • the working fluid may also flow into the ejector from the drive port.
  • a first supply line connecting the working fluid supply source and the first port, and the first supply Any drive line that branches off from the line and is connected to the drive port may be further provided.
  • the fluid pressure cylinder is used. It is provided with a second port through which the working fluid flows in or out, and when the working fluid flows in from the second port, the piston rod is pushed out and the second electrode is configured to move to the furnace closed position side. Anything is fine.
  • the fluid pressure cylinder is an air cylinder.
  • the working fluid may be compressed air.
  • An example is one in which the dust suction flow path is formed inside, a support for supporting the second electrode is further provided, and the piston rod of the fluid pressure cylinder is connected to the support.
  • the dust suction flow path may be provided with a plurality of dust suction ports that open on the surface of the support.
  • a cleaning mechanism configured to move between the first electrode and the second electrode to remove dust from the first electrode or the second electrode is further provided, and the cleaning mechanism is the first electrode.
  • the dust dropped from the second electrode may be configured to be recovered from the inside of the heating furnace via the dust suction flow path.
  • the elemental analyzer As described above, in the elemental analyzer according to the present invention, when the second electrode moves to the furnace open position, the working fluid is supplied to the ejector to exert a suction action. Therefore, the dust scattered as the heating furnace is opened can be recovered by the dust suction flow path. With such a simple configuration, it is possible to prevent the heating furnace from being polluted with dust during opening.
  • the schematic diagram which shows the whole structure of the elemental analyzer in one Embodiment of this invention The schematic diagram which shows the structure of a heating furnace and its surroundings in the same embodiment.
  • FIG. 1 shows an outline of the elemental analyzer 100 of the present embodiment.
  • the elemental analyzer 100 heats and dissolves, for example, a metal sample, a ceramics sample, or the like (hereinafter, simply referred to as a sample) housed in the graphite pot MP, and analyzes the sample gas generated at that time in the sample. It measures the amount of elements contained.
  • O oxygen
  • H hydrogen
  • N nitrogen
  • the elemental analyzer 100 includes a heating furnace 3 in which a sample housed in a crucible MP is heated, an introduction flow path L1 for introducing a carrier gas into the heating furnace 3, and an introduction flow path L1. It is provided with a lead-out flow path L2 from which a mixed gas of a carrier gas and a sample gas is derived from the heating furnace 3. More specifically, the elemental analyzer 100 controls the heating furnace 3, each device provided in the introduction flow path L1 or the lead-out flow path L2, control of each device, and control of arithmetic processing such as measured concentration. It is composed of a calculation mechanism COM.
  • the control calculation mechanism COM is, for example, a so-called computer equipped with a CPU, a memory, an A / D converter, a D / A converter, and various input / output means, and a program stored in the memory is executed and various devices cooperate with each other. Therefore, the functions as the measurement value calculation unit C1 and the mode setter C2, which will be described later, are exhibited. Further, the control calculation mechanism COM displays the concentrations of various elements contained in the sample based on the outputs of, for example, CO detection unit 5, CO 2 detection unit 7, H 2 O detection unit 8, and N 2 detection unit 11, which will be described later. It also functions as a display unit (not shown).
  • a gas cylinder which is a carrier gas supply source 1, is connected to the base end of the introduction flow path L1.
  • He helium
  • a purifier 2 is provided on the introduction flow path L1 to remove a minute amount of hydrocarbons contained in the carrier gas to increase the purity of the carrier gas.
  • the refiner 2 is made of a material having a property of physically adsorbing hydrocarbons contained in the carrier gas and substantially not adsorbing the carrier gas itself.
  • the material forming the refiner 2 does not chemically react with the carrier gas or hydrocarbon. That is, this refiner 2 is also used in, for example, a gas chromatograph, and for example, a zeolite-based molecular sieve can be used as a material for forming the refiner 2. Further, the material for forming the refiner 2 may be silica gel, activated carbon, ascarite or the like.
  • the purifier 2 can desorb the adsorbed molecules by heating, for example, and regenerate the adsorbing ability.
  • hydrocarbons or substances in which hydrocarbons have been chemically changed do not flow to the downstream side of the refiner 2, for example, CO 2 or H 2 O is introduced between the refiner 2 and the heating furnace 3 in the introduction flow path L1. No reagent is provided for removal.
  • a pressure regulating valve (not shown) is provided between the refiner 2 and the heating furnace 3 so that the pressure of the carrier gas in the heating furnace 3 is kept constant at a predetermined value.
  • the heating furnace 3 is configured to sandwich the graphite crucible MP containing the sample between the first electrode and the second electrode, which are a pair of electrodes, and directly apply an electric current to the crucible MP to heat the crucible MP and the sample. ing.
  • the heating furnace 3 has an upper electrode 31 which is a cylindrical first electrode in which an internal space is formed and an upper electrode 31 which is inserted into the internal space to provide a crucible MP. It is provided with a lower electrode 32 which is a columnar second electrode sandwiched between the two.
  • the upper electrode 31 is formed with through holes in the vertical direction for supplying the carrier gas supplied from the introduction flow path L1 to the internal space. Further, the mixed gas of the sample gas and the carrier gas generated from the sample flows out into the lead-out flow path L2 through the through hole formed on the side surface of the upper electrode 31.
  • the lower electrode 32 is configured to advance and retreat in the vertical direction by an air cylinder 34, which is a linear fluid pressure cylinder corresponding to a drive mechanism. That is, specifically, when the sample in the crucible MP is heated, the lower electrode 32 is moved upward by the air cylinder 34 and inserted into the internal space of the upper electrode 31. In this state, the crucible MP is sandwiched between the upper electrode 31 and the lower electrode 32. Further, the lower electrode 32 airtightly closes the lower opening of the upper electrode 31 by a seal portion provided on the side surface so as to project toward the outer peripheral side. As a result, the mixed gas in which the sample gas and the carrier gas generated by heating the sample are mixed flows out from the side surface side of the upper electrode 31 to the lead-out flow path L2.
  • an air cylinder 34 which is a linear fluid pressure cylinder corresponding to a drive mechanism. That is, specifically, when the sample in the crucible MP is heated, the lower electrode 32 is moved upward by the air cylinder 34 and inserted into the internal space of the upper
  • the lower electrode 32 has a furnace closed position for sandwiching the crucible with the upper electrode 31 as shown in FIG. 2 (a) and a furnace separated from the furnace closed position by a predetermined distance as shown in FIG. 2 (b). It is configured to be movable between and from the open position.
  • the furnace closing position is arranged below the furnace opening position.
  • a door (not shown) is closed in the heating furnace 3 so that the sample gas generated inside does not leak to the outside.
  • a door is opened for replacement of the crucible MP or for cleaning and maintenance of the inside of the heating furnace 3.
  • the inside of the heating furnace 3 is automatically sucked, and soot or the like adhering to the upper electrode 31 and the lower electrode 32 or the like is formed. It is configured to collect dust.
  • the lower electrode 32 is supported by a support 33 having a bottom surface formed in a substantially flat rectangular parallelepiped shape.
  • the piston rod 35 of the air cylinder 34 is connected to the outside of the support 33, and by moving the support 33 in the vertical direction by the air cylinder 34, the lower electrode 32 is placed between the furnace closed position and the furnace open position. Move with.
  • a first port SP1 and a second port SP2 into which compressed air, which is a working fluid, flows in or out, are opened on the side surface of the cylinder 36.
  • compressed air flows into the first port SP1
  • the piston rod 35 is drawn into the cylinder 36.
  • compressed air flows into the second port SP2
  • the piston rod 35 is pushed out of the cylinder 36. That is, in the cylinder 36, the first chamber communicating with the first port SP1 and the second chamber communicating with the second port SP2 are separated by the piston rod 35, and the first chamber and the second chamber are separated by the inflow and outflow of compressed air.
  • the compressed air supply source and the first port SP1 are connected by the first supply line SL1, and the supply source and the second port SP2 are connected by the second supply line SL2. There is. Whether the compressed air is supplied from the supply source to the first port SP1 or the second port SP2, and the amount of the compressed air to be supplied are controlled by the compressed air control mechanism provided in the supply source.
  • the compressed air control mechanism is configured to perform a predetermined operation in response to, for example, a furnace opening command of the heating furnace 3 input from the mode setter C2 or a furnace closing command.
  • a plurality of dust suction ports DP for sucking dust are opened on the inner surface of the furnace on the bottom surface of the support 33.
  • the lower electrode 32 is supported in the center of the bottom surface of the support 33, and the dust suction ports DP are opened at each of the four corners.
  • a dust suction flow path DL having the above-mentioned dust suction port DP is formed inside the support 33.
  • the ejector 37 is provided so that the inside side of the heating furnace 3 and the suction port VP are connected in the dust suction flow path DL formed in the support 33. Further, the drive port AP of the ejector 37 and the first supply line SL1 are connected by a drive line AL branching from the first supply line SL1. That is, when the compressed air is supplied from the compressed air supply source to the first port SP1 of the air cylinder 34, the compressed air is also supplied to the drive port AP of the ejector 37 in parallel. ..
  • the discharge port EP of the ejector 37 is connected to the exhaust side where, for example, a dust box is located in the dust suction flow path DL.
  • the ejector 37 of the present embodiment will be described in detail.
  • the ejector 37 has a substantially cylindrical shape, a suction port VP is formed on one end face, and a discharge port EP is formed on the other end face. Is formed.
  • a drive port AP into which compressed air, which is a working fluid, flows in is formed on the side surface of the ejector 37.
  • the drive port AP communicates with a nozzle (not shown) formed inside the ejector 37, and the depressurization of the air generated by the compressed air passing through the nozzle causes a gas from the suction port VP as shown in FIG. 4 (a). Is inhaled.
  • the compressed air flowing in from the drive port AP and the gas sucked in from the suction port VP are discharged to the outside from the discharge port EP in a mixed state.
  • the flow rate discharged from the discharge port EP is, for example, about 3 to 4 times the flow rate of the compressed air flowing in from the drive port AP. That is, the flow rate of the gas sucked from the suction port VP is about 2 to 3 times that of the compressed air flowing into the drive port AP.
  • the ejector 37 generates a suction force in the suction port VP by inflowing the compressed air into the drive port AP, and sucks the dust in the heating furnace 3 from the dust suction port DP.
  • the analysis mechanism AM is a CO detection unit 5, an oxidizer 6, a CO 2 detection unit 7, an H 2 O detection unit 8, a removal mechanism 9, a mass flow controller 10, and an N 2 detection unit which is a thermal conductivity analysis unit. It is composed of 11, and each device is provided side by side in this order from the upstream side in the lead-out flow path L3.
  • the dust filter 4 filters out dust such as soot contained in the mixed gas and removes the dust.
  • the CO detection unit 5 detects CO (carbon monoxide) contained in the mixed gas that has passed through the dust filter 4 and measures the concentration thereof, and is composed of an NDIR (non-dispersive infrared gas analyzer). There is.
  • the CO detection unit 5 operates effectively when the oxygen contained in the sample is high in concentration due to its measurement accuracy. Specifically, it is preferable to measure CO of 150 ppm or more.
  • the oxidizer 6 oxidizes CO and CO 2 contained in the mixed gas that has passed through the CO detection unit 5, and oxidizes H 2 to H 2 O (water) to generate water vapor.
  • Copper oxide is used as the oxidizer 6 in the first embodiment, and its temperature is maintained at 450 ° C. or lower by a heat generating resistor provided in the surroundings.
  • the CO 2 detection unit 7 is an NDIR that detects CO 2 in the mixed gas that has passed through the oxidizer 6 and measures the concentration thereof.
  • the CO 2 detection unit 7 operates effectively when the oxygen contained in the sample is low (for example, less than 150 ppm) from the viewpoint of measurement accuracy.
  • the H 2 O detection unit 8 is an NDIR that detects H 2 O in the mixed gas that has passed through the CO 2 detection unit 7 and measures the concentration thereof.
  • the flow path from the oxidizer 6 to the H 2 O detection unit 8 is configured such that the temperature of the mixed gas is maintained at 100 ° C. or higher and the H 2 O is maintained in a water vapor state. In this way, measurement errors due to condensation is prevented generated in H 2 O detection unit 8.
  • the removal mechanism 9 adsorbs and removes CO 2 and H 2 O contained in the mixed gas.
  • the removing mechanism 9 is composed of an adsorbent, and for example, the same one as the purifier 2 provided in the introduction flow path L1 described above is used. Therefore, for example, a zeolite-based molecular sieve can be used as the adsorbent constituting the removal mechanism 9. Further, the material forming the removal mechanism 9 may be silica gel, activated carbon, ascarite or the like.
  • the purifier 2 can desorb the adsorbed molecules by heating, for example, and regenerate the adsorbing ability.
  • the mass flow controller 10 is a flow rate control device in which a flow rate sensor, a control valve, and a flow rate controller (not shown) are packaged in one package.
  • the mass flow controller 10 supplies a mixed gas kept constant at a set flow rate to the N 2 detection unit 11 on the downstream side. That is, even if a pressure fluctuation occurs in the mixed gas due to the removal of CO 2 and H 2 O by the removal mechanism 9, the mass flow controller automatically reflects the fluctuation and is supplied to the N 2 detection unit 11. Keep the gas flow rate constant. Therefore, even if the pressure of the mixed gas fluctuates due to the removal mechanism 9, the pressure of the mixed gas in the N 2 detection unit 11 can be maintained at a value suitable for measurement. Further, the mass flow controller 10 is of a low differential pressure type, and is configured to operate at a pressure lower than 60 kPa so that the pressure in the heating furnace 3 can be maintained at 60 kPa.
  • N 2 detector 11 a TCD (thermal conductivity detector), and the change in thermal conductivity of the mixed gas, a predetermined component contained in the mixed gas from the flow rate of the mixed gas supplied N 2 Measure the concentration of. That is, since the mixed gas supplied to the N 2 detection unit 11 is composed almost exclusively of the carrier gas and N 2 , the concentration of N 2 contained in the mixed gas corresponds to the change in the measured thermal conductivity. It becomes a value. Further, in the first embodiment, the flow meter is not provided on the downstream side of the N 2 detection unit 11, and the downstream side of the N 2 detection unit 11 is directly connected to the exhaust port of the outlet flow path L2.
  • the heating furnace 3 a current is directly passed through the crucible MP containing the sample to energize and heat the crucible MP.
  • the carrier gas is continuously supplied from the introduction flow path L1 so that the inside of the heating furnace 3 is maintained at 60 kPa or less.
  • the sample gas generated by thermal decomposition reduction in the heating furnace 3 is led out to the lead-out flow path L2 by the carrier gas.
  • the mixed gas composed of the carrier gas and the sample gas led out from the heating furnace 3 is guided to the CO detection unit 5 after passing through the dust filter 4.
  • the components that may be contained in the sample gas introduced into the CO detection unit 5 are CO, H 2 , and N 2 .
  • the CO concentration is measured in the CO detection unit 5.
  • the mixed gas that has passed through the CO detection unit 5 is guided to the oxidizer 6.
  • CO contained in the mixed gas is oxidized to CO 2
  • H 2 is oxidized to H 2 O. Therefore, the components that may be contained in the sample gas that has passed through the oxidizer 6 are CO 2 , H 2 O, and N 2 .
  • the mixed gas that has passed through the oxidizer 6 is guided to the CO 2 detection unit 7.
  • the CO 2 detection unit 7 measures the concentration of CO 2 contained in the mixed gas.
  • the mixed gas that has passed through the CO 2 detection unit 7 is guided to the H 2 O detection unit 8, and the concentration of H 2 O contained in the mixed gas is measured.
  • H 2 O detection unit 8 Mixed gas passing through of H 2 O detection unit 8 is guided to the removal mechanism 9. Since CO 2 and H 2 O are adsorbed and removed in the removal mechanism 9, the only component that may be contained in the sample gas that has passed through the removal mechanism 9 is N 2.
  • the mixed gas that has passed through the removal mechanism 9 is guided to the N 2 detection unit 11 in a state of being maintained at a constant flow rate at a set flow rate by the mass flow controller 10.
  • the N 2 detection unit 11 measures the concentration of N 2.
  • the measurement signal indicating the concentration of each component obtained by each detection unit is input to the measurement value calculation unit C1.
  • the measured value calculation unit C1 calculates the concentrations of O, H, and N contained in the sample based on each measurement signal.
  • the measured value calculation unit C1 outputs the oxygen concentration obtained by the CO detection unit 5 when the oxygen concentration inside the sample is equal to or higher than a predetermined threshold (150 ppm). If it is less than the threshold value, the oxygen concentration obtained by the CO 2 detection unit 7 is used as the output value.
  • the elemental analyzer 100 configured in this way, when compressed air is supplied to the first port SP1 of the air cylinder 34 in order to move the lower electrode 32 to the furnace open position as shown in FIG. 2 (b), Compressed air is also supplied to the drive port AP of the ejector 37. Therefore, for example, dust in the heating furnace 3 can be sucked from the dust suction port DP at the same time while the heating furnace 3 is opened without operating a vacuum cleaner or the like separately. Therefore, it is possible to prevent the inside of the heating furnace 3 from becoming dirty with dust due to the opening operation.
  • the pump when a vacuum cleaner is provided in the dust suction flow path as in the conventional case, the pump must be arranged at a position away from the heating furnace, and the pressure loss in the dust suction flow path becomes large, so that the heating furnace is efficiently used. It was difficult to efficiently suck the dust in 3.
  • the elemental analyzer 100 of the present embodiment since a small ejector 37 is provided in the dust suction flow path DL for the pump, the ejector 37 is arranged immediately near the heating furnace 3 to cause pressure loss. It can be less likely to occur. As a result, the dust suction efficiency can be made higher than before.
  • the ejector 37 is provided on the dust suction flow path DL, and the heating furnace 3 is simply connected by the drive line AL between the first supply line SL1 for operating the air cylinder 34 and the drive port AP of the ejector 37.
  • the inside of the heating furnace 3 can be sucked in conjunction with the opening operation. Therefore, it is not necessary to use advanced control equipment to link the opening / closing operation and the suction in the heating furnace 3.
  • the power source for operating the air cylinder 34 and the power source for operating the ejector 37 can be shared, the dust in the heating furnace 3 can be recovered with a simple configuration.
  • the ejector 37 since the ejector 37 is used, it is possible to exert a sufficient suction force for sucking dust into the heating furnace 3 without increasing the flow rate of the compressed air supplied to the drive port AP so much. ..
  • the mechanism 38 may be further provided.
  • the cleaning mechanism 38 includes an upper brush 38A that contacts the upper electrode 31, a lower brush 38B that contacts the lower electrode 32, and an actuator 38C that rotates the upper brush 38A and the lower brush 38B while being arranged in the heating furnace 3.
  • a dust container 38D that receives dust dropped from the upper electrode 31 or the lower electrode 32 and is arranged so as to communicate with each dust suction port DP.
  • the ejector 37 is not limited to the one described in the above embodiment.
  • a suction port VP is formed on the side surface of the substantially cylindrical ejector 37
  • a drive port AP is formed on one end face
  • a discharge port EP communicating with the nozzle NZ is formed on the other end face. It may be formed.
  • a suction port VP formed on the side surface of the ejector 37 is connected to the dust suction flow path DL so as to communicate with the heating furnace 3 side.
  • a drive line AL branching from the first supply line SL1 may be connected so that compressed air, which is a working fluid, flows into the drive port AP formed on one end face.
  • the drive line connected to the drive port of the ejector is not limited to the one branched from the first supply line, and may be directly connected to the compressed air supply source.
  • the supply source should be configured so that the working fluid is supplied to the drive port of the ejector in synchronization with the supply of the working fluid to the first port of the hydraulic cylinder. Just do it.
  • the air cylinder is not limited to a double-acting type having two ports as in the above embodiment, and may be a single-acting type. That is, the air cylinder may be provided with only the first port, and one of the air cylinders may be operated by the repulsive force of the spring provided inside. If the present invention is applied, when compressed air is supplied from the first port, the piston rod is pulled in so that the lower electrode moves to the open position of the furnace, and the piston rod is pushed out by the repulsive force of the spring. The lower electrode may be extruded.
  • the actuator for operating the lower electrode is not limited to the air cylinder, and may be a hydraulic cylinder such as a hydraulic cylinder or a hydraulic cylinder using another working fluid such as water or oil.
  • the lower electrode, which is the second electrode is not limited to the fluid pressure cylinder, and may be, for example, a linear motor, a servomotor, a drive mechanism including a ball screw, or the like.
  • the control system may be configured so that the working fluid flows in conjunction with the drive port of the ejector.
  • the dust suction flow path is not limited to that formed in the support body, and may be formed by various pipes or hoses.
  • the first electrode is the upper electrode and the second electrode is the lower electrode, but this relationship may be reversed.
  • the moving direction of the second electrode is not limited to the vertical direction, and may be, for example, the horizontal direction. That is, the furnace closing position and the furnace opening position are not limited to those separated in the vertical direction, and may be set in the horizontal direction or other directions.
  • the shape may be different from the shape of each electrode shown in the embodiment.
  • the refiner is composed of heated copper oxide / reduced copper, and a CO 2 / H 2 O agent is provided between the refiner and the heating furnace in the introduction flow path on the downstream side thereof. May be good. Further, not limited to the removal of CO 2 and H 2 O adsorption also removal mechanism may be one for removing CO 2 and H 2 O by chemical reaction with the reagent.
  • the elemental analyzer is not limited to those in which O (oxygen), H (hydrogen), and N (nitrogen) are measured as elements. That is, the analytical mechanism may measure only H (hydrogen). More specifically, the elemental analyzer uses Ar as the carrier gas, and on the lead-out flow path, there is a dust filter, an oxidizer, a removal mechanism, a separation column, a mass flow controller, and a thermal conductivity analyzer H. 2
  • the detection units may be provided side by side in this order from the upstream side.
  • the oxidizer may be a room temperature oxidant
  • the removal mechanism may be one that removes only CO 2 with an adsorbent.
  • the analysis mechanism is not limited to the above-described embodiment.
  • a needle valve may be provided instead of the mass flow controller to maintain a constant opening.
  • the analysis mechanism may detect a plurality of components or may detect a single component.
  • an elemental analyzer capable of sucking the inside of the heating furnace and preventing dust from being scattered when the heating furnace is opened by a simple mechanism.

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  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
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  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
PCT/JP2021/006092 2020-03-11 2021-02-18 元素分析装置 Ceased WO2021182058A1 (ja)

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Citations (9)

* Cited by examiner, † Cited by third party
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US4234541A (en) * 1979-03-02 1980-11-18 Leco Corporation Combustion chamber cleaning apparatus
JPH0295863U (https=) * 1989-01-14 1990-07-31
JPH0533056U (ja) * 1991-10-10 1993-04-30 株式会社堀場製作所 金属分析装置
JPH0738963U (ja) * 1993-12-25 1995-07-14 株式会社堀場製作所 燃焼炉用オートクリーニング装置
JP2010008233A (ja) * 2008-06-26 2010-01-14 Horiba Ltd 元素分析装置
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JP2012047737A (ja) * 2010-08-12 2012-03-08 Leco Corp 燃焼炉自動清掃機
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Publication number Priority date Publication date Assignee Title
US4234541A (en) * 1979-03-02 1980-11-18 Leco Corporation Combustion chamber cleaning apparatus
JPH0295863U (https=) * 1989-01-14 1990-07-31
JPH0533056U (ja) * 1991-10-10 1993-04-30 株式会社堀場製作所 金属分析装置
JPH0738963U (ja) * 1993-12-25 1995-07-14 株式会社堀場製作所 燃焼炉用オートクリーニング装置
JP2010008233A (ja) * 2008-06-26 2010-01-14 Horiba Ltd 元素分析装置
JP2010008229A (ja) * 2008-06-26 2010-01-14 Horiba Ltd 元素分析装置
JP2012047737A (ja) * 2010-08-12 2012-03-08 Leco Corp 燃焼炉自動清掃機
US20120213244A1 (en) * 2011-02-18 2012-08-23 Leco Corporation Vacuum cleaning structure for electrode furnace
WO2017099120A1 (ja) * 2015-12-07 2017-06-15 株式会社堀場製作所 分析装置

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