WO2021136395A1 - Operation method for resistive storage array - Google Patents

Operation method for resistive storage array Download PDF

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Publication number
WO2021136395A1
WO2021136395A1 PCT/CN2020/141479 CN2020141479W WO2021136395A1 WO 2021136395 A1 WO2021136395 A1 WO 2021136395A1 CN 2020141479 W CN2020141479 W CN 2020141479W WO 2021136395 A1 WO2021136395 A1 WO 2021136395A1
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Prior art keywords
initialization
voltage
switching device
memory cell
circuits
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PCT/CN2020/141479
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French (fr)
Chinese (zh)
Inventor
潘立阳
孙婧瑶
吴华强
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清华大学
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Publication of WO2021136395A1 publication Critical patent/WO2021136395A1/en

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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021Auxiliary circuits
    • G11C13/0023Address circuits or decoders
    • G11C13/0026Bit-line or column circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021Auxiliary circuits
    • G11C13/0023Address circuits or decoders
    • G11C13/0028Word-line or row circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021Auxiliary circuits
    • G11C13/004Reading or sensing circuits or methods
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021Auxiliary circuits
    • G11C13/0097Erasing, e.g. resetting, circuits or methods
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C7/00Arrangements for writing information into, or reading information out from, a digital store
    • G11C7/20Memory cell initialisation circuits, e.g. when powering up or down, memory clear, latent image memory

Definitions

  • the embodiment of the present disclosure relates to an operation method of a resistive memory array.
  • Resistance changeable memory is a memory that uses the characteristics of the change in conductivity of the thin film resistive medium material under the action of an external electric field to realize the high-low conversion of the resistance value.
  • the resistive random access memory has the advantages of simple structure, fast working speed, low power consumption, stable information, non-volatile, etc., and has huge development and application prospects.
  • At least one embodiment of the present disclosure provides a resistive memory array, which includes a plurality of memory cells, a plurality of bit lines, a plurality of word lines, a plurality of block selection circuits, and a plurality of initialization circuits.
  • the plurality of memory cells are arranged in a plurality of memory cell rows and a plurality of memory cell columns along a first direction and a second direction, each memory cell includes a resistive switching device and a switching device, and the resistive switching device includes a first electrode and The second electrode, and the first electrode of the resistive switching device is electrically connected to the switching device.
  • the plurality of bit lines extend along the second direction and are connected to the plurality of memory cell columns in a one-to-one correspondence, wherein each of the plurality of bit lines is connected to a corresponding memory cell column
  • the second electrode of the resistive switching device is electrically connected.
  • the plurality of word lines extend along the first direction and are connected to the plurality of memory cell rows in a one-to-one correspondence, wherein each of the plurality of word lines corresponds to a memory cell of a memory cell row
  • the switching devices are electrically connected.
  • the plurality of block selection circuits are respectively electrically connected to the plurality of bit lines in a one-to-one correspondence; the plurality of initialization circuits are respectively electrically connected to the plurality of bit lines in a one-to-one correspondence.
  • Each block selection circuit includes a control terminal, a first terminal, and a second terminal.
  • the control terminal of the block selection circuit is configured to receive a block selection voltage
  • the first terminal of the block selection circuit is configured to receive a read and write operation voltage.
  • the second end of the block selection circuit is electrically connected to a bit line corresponding to the block selection circuit, and the block selection circuit is configured to write the read and write operation voltage to the correspondingly connected bit line in response to the block selection voltage.
  • each initialization circuit includes a control terminal, a first terminal and a second terminal, the control terminal of the initialization circuit is configured to receive the initialization control voltage, the first terminal of the initialization circuit is configured to receive the initialization operation voltage, the The second end of the initialization circuit is electrically connected to a bit line corresponding to the initialization circuit, and the initialization circuit is configured to write the initialization operation voltage to the correspondingly connected bit line in response to the initialization control voltage.
  • each of the plurality of initialization circuits includes a switching transistor, and the gate, the first pole, and the second pole of the switching transistor are the control terminal, the first terminal, and the second terminal of the initialization circuit, respectively. End;
  • the switching transistor is a P-type transistor.
  • the switching device includes a control terminal, a first terminal, and a second terminal, and each word line is electrically connected to a control terminal of a switching device of a memory cell of a corresponding memory cell row;
  • the variable memory array also includes a plurality of source lines extending along the second direction, the plurality of source lines are electrically connected to the plurality of memory cell columns in a one-to-one correspondence, and each of the plurality of source lines is connected to the The second end of the switching device of the memory cell of a corresponding memory cell column is electrically connected.
  • the resistive memory array further includes a plurality of global bit lines extending along the second direction and electrically connected to the plurality of block selection circuits in a one-to-one correspondence, each One global bit line is electrically connected to the first end of the correspondingly connected block selection circuit.
  • the resistive memory array further includes an initialization operation line extending along the first direction and electrically connected to the first ends of the plurality of initialization circuits to provide the initialization operation Voltage.
  • At least one embodiment of the present disclosure also provides a resistive random access memory circuit, including the above-mentioned resistive random access memory array.
  • the resistive random access memory circuit further includes an initialization control circuit configured to be electrically connected to the plurality of initialization circuits to provide the initialization operation voltage and the initialization control voltage.
  • the resistive memory circuit further includes a column selection circuit configured to be connected to the plurality of block selection circuits to provide the read and write operation voltage to the resistive memory array.
  • the resistive memory circuit further includes a program control circuit and a read control circuit, and the read and write operation voltages include a program operation voltage and a read operation voltage.
  • the programming control circuit is connected to the column selection circuit and is configured to provide the programming operation voltage to the resistive memory array through the column selection circuit; the read control circuit is connected to the column selection circuit, And configured to provide the read operation voltage to the resistive memory array through the column selection circuit.
  • At least one embodiment of the present disclosure further provides an operating method for operating the above-mentioned resistive random access memory array.
  • the operating method includes: in an initialization operation phase, turning off the plurality of block selection circuits, and performing the initialization through the plurality of block selection circuits.
  • the circuit and the plurality of bit lines apply the initialization operation voltage to the memory cells of the selected at least one memory cell row.
  • At least one embodiment of the present disclosure also provides an operating method of a resistive random access memory array, the resistive random access memory array including a plurality of memory cells, a plurality of bit lines, a plurality of word lines, a plurality of block selection circuits, and a plurality of initialization circuits .
  • the plurality of memory cells are arranged in a plurality of memory cell rows and a plurality of memory cell columns along a first direction and a second direction, each memory cell includes a resistive switching device and a switching device, and the resistive switching device includes a first electrode and The second electrode, and the first electrode of the resistive switching device is electrically connected to the switching device.
  • the plurality of bit lines extend along the second direction and are respectively connected to the plurality of columns, wherein each of the plurality of bit lines corresponds to the resistance of a memory cell of a corresponding memory cell column
  • the second electrode of the device is electrically connected.
  • the plurality of word lines extend along the first direction and are respectively connected to the plurality of rows, and each of the plurality of word lines is electrically connected to a switching device of a memory cell of a corresponding memory cell row. connection.
  • the plurality of block selection circuits are respectively electrically connected to the plurality of bit lines in a one-to-one correspondence.
  • the plurality of initialization circuits are respectively electrically connected with the plurality of bit lines in a one-to-one correspondence.
  • the operation method includes: turning off the plurality of block selection circuits, and performing a first initialization operation and a second initialization operation on the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines.
  • the first initialization operation includes: applying a first initialization operation voltage V F 1 to the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines.
  • the second initialization operation includes: applying a second initialization operation voltage V F 2 to the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines.
  • the first initialization operation voltage V F 1 is greater than the second initialization operation voltage V F 2.
  • each initialization circuit includes a control terminal, a first terminal, and a second terminal, and the second terminal of each initialization circuit is electrically connected to a bit line corresponding to the initialization circuit;
  • the first initialization operation further includes : Applying a first initialization control voltage V FC 1 to the control terminals of the plurality of initialization circuits to turn on the plurality of initialization circuits, and the second initialization operation further includes: applying a second initialization control voltage to the plurality of initialization control circuits
  • the initialization control voltage V FC 2 is used to turn on the plurality of initialization circuits.
  • each of the plurality of initialization circuits includes a switching transistor, and the gate, the first pole, and the second pole of the switching transistor are the control terminal, the first terminal, and the second terminal of the initialization circuit, respectively.
  • the switching transistor is a P-type transistor, the first initialization control voltage V FC 1 is less than the first initialization operation voltage V F 1, and the second initialization control voltage V FC 2 is less than the second initialization operation Voltage V F 2.
  • is smaller than the difference between the second initialization operation voltage and the second initialization control voltage
  • the time of the first initialization operation is greater than the time of the second initialization operation.
  • the operation method further includes: after the second initialization operation, performing a first operation on the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines.
  • the third initialization operation includes: applying a third initialization operation voltage V F 3 to the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines.
  • the magnitudes of the first initialization operation voltage V F 1, the second initialization operation voltage V F 2, and the third initialization operation voltage V F 3 decrease in order.
  • the operation time of the first initialization operation, the second initialization operation, and the third initialization operation are sequentially reduced.
  • each initialization circuit includes a control terminal, a first terminal, and a second terminal, and the second terminal of each initialization circuit is electrically connected to a bit line corresponding to the initialization circuit; the first initialization operation further includes : Apply a first initialization control voltage V FC 1 to the control terminals of the plurality of initialization circuits to turn on the plurality of initialization circuits.
  • the second initialization operation further includes: applying a second initialization control voltage V FC 2 to the plurality of initialization control circuits to turn on the plurality of initialization circuits;
  • the third initialization operation further includes: applying a second initialization control voltage V FC 2 to the plurality of initialization control circuits;
  • the initialization control circuit applies a second initialization control voltage V FC 2 to turn on the plurality of initialization circuits, the difference between the first initialization operation voltage and the first initialization control voltage
  • At least one embodiment of the present disclosure also provides a resistive memory array, which includes a plurality of memory cells, a plurality of bit lines, a plurality of word lines, and a plurality of block selection circuits.
  • the plurality of memory cells are arranged into a plurality of memory cell rows and a plurality of memory cell columns along the first direction and the second direction, wherein each memory cell includes a resistive switching device and a switching device, and the resistive switching device includes a first An electrode and a second electrode.
  • the switching device includes a control terminal, a first terminal, and a second terminal.
  • the first electrode of the resistive switching device is electrically connected to the first terminal of the switching device.
  • the plurality of bit lines extend along the second direction and are respectively connected to the plurality of memory cell columns in a one-to-one correspondence, and each of the plurality of bit lines corresponds to a memory cell of a corresponding memory cell column
  • the second electrode of the resistive switching device is electrically connected.
  • the plurality of word lines extend along the first direction and are respectively connected to the plurality of memory cell rows in a one-to-one correspondence, and each of the plurality of word lines corresponds to a memory cell of a corresponding memory cell row
  • the control terminal of the switching device is electrically connected.
  • the plurality of block selection circuits are electrically connected to the plurality of bit lines in a one-to-one correspondence, and each block selection circuit includes a control terminal, a first terminal, and a second terminal.
  • the control terminal of the block selection circuit is configured to receive the first terminal.
  • a control signal the first end of the block selection circuit is configured to receive a read and write operation voltage
  • the second end of the block selection circuit is electrically connected to a bit line corresponding to the block selection circuit
  • the block selection circuit is configured In response to the first control signal, the read and write operation voltage is written to the correspondingly connected bit line.
  • the second ends of the switching devices of the memory cells of each memory cell row are electrically connected to each other.
  • the resistive memory array further includes a plurality of source lines extending along the first direction and correspondingly connected to the plurality of memory cell rows.
  • the second ends of the switching devices of the memory cells of each memory cell row are electrically connected to each other through a corresponding source line.
  • the resistive memory array further includes a global source line, and the multiple source lines are electrically connected to the global source line, so that the global source line connects the memory cells of the multiple memory cell rows.
  • the second ends of the switching devices are electrically connected to each other.
  • the second ends of the switching devices of the memory cells of each memory cell row are all grounded.
  • the resistive random access memory array further includes a plurality of initialization circuits, the plurality of initialization circuits are respectively electrically connected to the plurality of bit lines in a one-to-one correspondence, and each initialization circuit includes a control terminal, a first terminal, and At the second end, the control end of the initialization circuit is configured to receive an initialization control voltage, the first end of the initialization circuit is configured to receive an initialization operation voltage, and the second end of the initialization circuit is connected to the bit corresponding to the initialization circuit.
  • the line is electrically connected, and the initialization circuit is configured to write the initialization operation voltage to the correspondingly connected bit line in response to the initialization control voltage.
  • At least one embodiment of the present disclosure also provides a resistive random access memory circuit, including the above-mentioned resistive random access memory array.
  • the resistive random access memory circuit further includes a source line control circuit configured to be electrically connected to the second end of the switching device of the memory cell of the one or more memory cell rows to provide Source line voltage.
  • the resistive memory circuit further includes a column selection circuit, a program and erase control circuit, and a read control circuit.
  • the read-write operation voltage includes a program operation voltage, an erase operation voltage, and a read operation voltage;
  • the column selection circuit is connected to the plurality of block selection circuits, and is configured to be connected to the plurality of block selection circuits to The resistive memory array provides the operating voltage;
  • the program and erase control circuit is connected to the column selection circuit and is configured to provide the resistive memory array with the program operating voltage through the column selection circuit And the erase operation voltage;
  • the read control circuit is connected to the column selection circuit and is configured to provide the read operation voltage to the resistive memory array through the column selection circuit.
  • At least one embodiment of the present disclosure further provides a driving method for driving the above-mentioned resistive random access memory array.
  • the driving method includes: applying a word line voltage through the plurality of word lines to select a row of memory cells, and A source line voltage is applied to the second end of the switching device of a row of memory cells to turn on the switching device and transfer the source line voltage to the first electrode of the resistive switching device of the selected row of memory cells, and through the multiple At least one of the bit lines applies an operating voltage to the second electrode of the resistive switching device of at least one memory cell in the selected row of memory cells.
  • the operating voltage includes the reading and writing operating voltage and the initializing operating voltage.
  • the source line voltage is a ground voltage.
  • Fig. 1A is a schematic diagram of a structure of a resistive switching device
  • Figure 1B is a graph of voltage-current characteristics of a resistive switching device
  • FIG. 2A is a schematic diagram of a structure of a resistive switching memory cell
  • FIG. 2B is a schematic diagram of the structure of a resistive random access memory array
  • 2C is a schematic diagram of the structure of a resistive random access memory circuit
  • FIG. 3 is a schematic structural diagram of a resistive memory array provided by at least one embodiment of the present disclosure
  • FIG. 4 is a schematic diagram of signal waveforms of a method for operating a resistive memory array provided by at least one embodiment of the present disclosure
  • FIG. 5 is a flowchart of a method for operating a resistive memory array provided by at least one embodiment of the present disclosure
  • FIG. 6 is a schematic structural diagram of a resistive random access memory circuit provided by at least one embodiment of the present disclosure
  • FIG. 7A is a schematic structural diagram of another resistive memory array provided by at least one embodiment of the present disclosure.
  • FIG. 7B is a schematic structural diagram of still another resistive memory array provided by at least one embodiment of the present disclosure.
  • FIG. 8 is a schematic structural diagram of another resistive random access memory circuit provided by at least one embodiment.
  • the memory device used in the resistive random access memory (referred to as a resistive random access device or RRAM device) is, for example, a flat capacitor shape, including a metal-insulator-metal (MIM) structure.
  • Fig. 1A shows a schematic structural diagram of a resistive switching device
  • Fig. 1B shows a current-voltage (I-V) characteristic curve of the resistive switching device.
  • the resistive switching device 10 includes a first electrode 11, a second electrode 12, and a resistive switching medium layer 13 located between the first electrode 11 and the second electrode 12.
  • the first electrode 11 is The bottom electrode of the resistive switching device 10
  • the second electrode 12 is the top electrode of the resistive switching device.
  • the first electrode 11 and the second electrode 12 may include metal materials such as aluminum, silver, copper, platinum, titanium, or composite metal materials, or include semiconductor materials such as polysilicon.
  • the resistive dielectric layer 13 may include one or more composite dielectric layers; for example, the resistive dielectric layer 13 may include metal oxide materials such as hafnium oxide, copper oxide, titanium oxide, tantalum oxide, or other materials with resistive characteristics. Medium material.
  • the IV characteristic curve of the resistive switching device 10 has hysteresis characteristics, and the curve is divided into 4 regions: high resistance state (HRS), low resistance state (LRS) and two regions. A transition zone.
  • HRS high resistance state
  • LRS low resistance state
  • a transition zone When the voltage amplitude exceeds a certain threshold, the resistance of the resistive switching device can be changed, so that the newest resistive switching device 10 can be rewritten (including a programming operation and an erasing operation).
  • a forward voltage (V Set ) is applied to both ends of the resistive switching device 10 to change the resistance value from a high-resistance state to a low-resistance state, which is called Set operation, also called write operation or programming.
  • Set operation also called write operation or programming.
  • the voltage amplitude for realizing the programming operation and erasing operation is generally between 1.2V-3V.
  • the resistive switching device is generally in a high resistance state after the preparation is completed, and a higher initialization operating voltage (for example, higher than 3V) is required to initialize the resistive switching device.
  • a higher initialization operating voltage for example, higher than 3V
  • the resistive switching device can be reduced Complete the programming operation or erase operation under the voltage.
  • This initialization operation is also called the Forming operation.
  • a higher voltage soft breakdown (Soft Breakdown) initialization operation needs to be added.
  • the initialization operation voltage required for the initialization operation is higher than the voltage required for the Set/Reset operation, and the operation time is longer.
  • the initial operation voltage V F is between 2V-6V.
  • the resistive switching device is usually electrically connected (for example, in series) with a switching device to form a basic memory cell.
  • the switching device may be a two-terminal element (for example, a diode) or a three-terminal element (for example, a transistor).
  • FIG. 2A shows a schematic structural diagram of a memory cell.
  • the memory cell 30 includes a resistive switching device 10 and a switching device 20.
  • the switching device 20 is a three-terminal element including a control terminal 21, a first terminal 22 and a second terminal 23, and the first terminal 22 of the switching device 20 is electrically connected to the first electrode 11 of the resistive switching device 10.
  • the first electrode 11 is the negative electrode of the resistive switching device 10
  • the second electrode 12 is the positive electrode of the resistive switching device 10.
  • the resistive switching device is forward biased; when the voltage on the first electrode 11 is greater than the voltage on the second electrode 12, the resistive switching device is reverse biased.
  • the switching device 20 can also be connected to the second electrode (positive electrode) of the resistive switching device, and the magnitude relationship of the input signal is adjusted accordingly during operation to achieve the same function.
  • the switching device includes a diode or a triode to form a 1D1R or 1T1R memory cell structure.
  • the switching device includes a first transistor T1, including a Metal-Oxide-Semiconductor Field-Effect-Transistor (MOSFET), so that the 1T1R memory cell has a good performance with the existing CMOS integrated circuit.
  • MOSFET Metal-Oxide-Semiconductor Field-Effect-Transistor
  • the gate, the first pole and the second pole of the first transistor T1 serve as the control terminal, the first terminal and the second terminal of the switching device, respectively.
  • the storage unit 30 When the switching device 20 is turned on, the storage unit 30 is selected for reading and writing operations of the RRAM device, etc.; when the switching device 20 is turned off, the storage unit 30 is not selected.
  • the transistors used in the embodiments of the present disclosure may be field-effect transistors, thin-film transistors, or other switching devices with the same characteristics.
  • field-effect transistors are used as examples for description.
  • the source and drain of the transistor used here can be symmetrical in structure, so the source and drain of the transistor can be structurally indistinguishable.
  • one pole in order to distinguish the two poles of the transistor other than the gate, for example, one pole can be directly described as the first pole and the other pole is the second pole.
  • a plurality of resistive memory cells can be integrated into an RRAM storage array in a crosswise manner, and the storage device can include one or more of the storage arrays.
  • FIG. 2B shows a schematic diagram of a resistive random access memory array structure.
  • the resistive random access memory array 40 includes an array of m columns and n rows (m, n is greater than or equal to 2) of memory cells 30, and multiple bit lines.
  • BL(BL ⁇ 0>-BL ⁇ m-1>) multiple word lines WL(WL ⁇ 0>-WL ⁇ n-1>) and multiple source lines SL(SL ⁇ 0>-SL ⁇ m-1>).
  • the second electrode 12 of the resistive switching device 10 in each memory cell 30 is connected to a bit line BL, and the control terminal 21 and the second terminal 23 of the switching device 20 are respectively connected to a word line WL and a source line SL.
  • the required memory cell 30 can be selected for the aforementioned initialization (Forming), programming (Set), erasing (Reset) and reading (Read) operating.
  • FIG. 2C shows a schematic structural diagram of a resistive random access memory circuit.
  • the resistive memory circuit includes one or more resistive memory arrays 40 and peripheral circuits.
  • the peripheral circuit includes a word line control circuit, a column selection circuit, an initialization control circuit, a programming control circuit, an erasing control circuit, a reading control circuit, etc.
  • the word line control circuit is connected to the word line WL.
  • a control voltage signal is applied to the word line WL in a row-by-row scanning manner, so that a row of memory cells 30 (that is, the storage connected to the same word line WL) is applied in each scanning period.
  • the switching device 20 in the cell performs control, so that a row of memory cells 30 can be selected.
  • the initialization control circuit generates an initialization operation voltage pulse V F and applies it to one or several bit lines BL through the column selection circuit to perform an initialization operation on the selected one or several memory cells 30.
  • the programming control circuit generates a programming operation voltage pulse (V Set ) and applies it to one or several bit lines BL through the column selection circuit to perform a programming operation on the selected one or several memory cells 30.
  • V Set a programming operation voltage pulse
  • the erase control circuit generates an erase operation voltage pulse (V RST ) and applies it to one or several source lines SL through a column selection circuit to perform an erase operation on the selected one or several memory cells 30.
  • V RST erase operation voltage pulse
  • the read control circuit generates a read operation voltage pulse V Read and applies it to one or several bit lines BL through the column selection circuit to perform a read operation on the selected one or several memory cells 30.
  • the column selection circuit may include an address decoder, and may be configured to receive an address signal.
  • the column selection circuit can receive the column address of the memory cell to be accessed, such as the bit line address, under the control of the controller, and decode the received bit line address.
  • the peripheral circuit that provides and transmits the initializing operation voltage and the resistive memory array 20 that receives the initializing operation voltage need to meet higher withstand voltage requirements.
  • the initialization control circuit since the initialization control circuit generates the initialization operating voltage and transmits it to the resistive memory array through the column selection circuit, the initialization control circuit, the column selection circuit, and the transistors in the resistive memory array need to have relatively high values.
  • a large size for example, the length and width of the channel region of the transistor is larger
  • to meet the higher withstand voltage requirements which not only increases the size and manufacturing cost of the circuit, but also reduces the read and write performance of the memory.
  • the initialization time required for different resistive switching devices to change the resistance value is different, and the resistance value after the initialization operation is also different.
  • This difference in resistance value will lead to the reliability of subsequent rewriting operations.
  • the performance deteriorates and the error rate of stored data increases.
  • At least one embodiment of the present disclosure provides a resistive random access memory array, including a plurality of block selection circuits and a plurality of initialization circuits, the plurality of block selection circuits are connected to a plurality of bit lines in a one-to-one correspondence, and the plurality of initialization circuits are also connected to the The multiple bit lines are electrically connected in a one-to-one correspondence.
  • the block selection circuit is configured to write the operation voltage to the correspondingly connected bit line in response to the block selection voltage; the initialization circuit is configured to write the initialization operation voltage to the correspondingly connected bit line in response to the initialization control voltage.
  • the transmission of the initialization circuit and the initialization operation voltage is separated from the transmission of other control circuits and the operation voltage, so that the initialization operation voltage is low Transmission may not go through the column selection circuit described above.
  • the block selection circuit can be controlled to be turned off to prevent the initialization operation voltage applied from the initialization circuit to the bit line from being applied to the column selection circuit, thereby reducing the withstand voltage requirements of the column selection circuit.
  • the resistive memory array provided by the embodiments of the present disclosure helps to reduce the circuit range involved in the higher initializing operation voltage, reduce the withstand voltage requirements of the circuit, and thereby help reduce the circuit size and manufacturing cost.
  • the entire row (one or more rows) of memory cells can be initialized at the same time, which significantly shortens the time of the initialization operation, improves the efficiency of the initialization test operation, and reduces the cost of the initialization test.
  • FIG. 3 is a schematic structural diagram of a resistive memory array 50 provided by at least one embodiment of the present disclosure.
  • the resistive memory array 50 includes a plurality of memory cells 30, a plurality of bit lines BL (BL ⁇ 0>-BL ⁇ m-1>), and a plurality of word lines WL (WL ⁇ 0>-WL). ⁇ n-1>), a plurality of block selection circuits 53 and a plurality of initialization circuits 54.
  • the plurality of memory cells 30 are arranged into n memory cell rows and m memory cell columns (m and n are greater than or equal to 2) along the first direction D1 and the second direction D2.
  • the first direction D1 and the second direction D2 are the row direction and the column direction of the array, respectively.
  • the plurality of bit lines BL extend along the second direction D2 and are connected to the plurality of memory cell columns in a one-to-one correspondence. Each of the plurality of bit lines BL is connected to each memory cell of a corresponding memory cell column.
  • the second electrode 12 of the resistive switching device 10 is electrically connected.
  • the plurality of word lines WL extend along the first direction D1 and are connected in a one-to-one correspondence with the plurality of memory cell rows. Each of the plurality of word lines WL corresponds to each memory cell of a corresponding memory cell row.
  • the switching device 20 is electrically connected. As shown in FIG. 3, each word line WL is electrically connected to the control terminal 21 of the correspondingly connected switching device 20 to provide a word line voltage V WL .
  • the plurality of block selection circuits 53 are respectively electrically connected to the plurality of bit lines BL in a one-to-one correspondence.
  • the plurality of block selection circuits 53 are arranged along the first direction D1 and located on the first side of the array formed by the plurality of memory cells.
  • the plurality of initialization circuits 54 are respectively electrically connected to the plurality of bit lines BL in a one-to-one correspondence.
  • the plurality of initialization circuits 54 are arranged along the first direction D1 and located on the second side of the array formed by the plurality of memory cells. The second side and the first side are opposite sides of the memory cell array in the second direction D2.
  • Each block selection circuit 53 includes a control terminal 530, a first terminal 531, and a second terminal 532.
  • the control terminal 530 of the block selection circuit 53 is configured to receive the block selection voltage V BS
  • the first terminal 531 of the block selection circuit 53 is configured
  • the second terminal 532 of the block selection circuit 53 is electrically connected to the bit line BL corresponding to the block selection circuit 53.
  • the block selection circuit 53 is configured to respond to the block selection voltage V BS to set the The read and write operation voltage is written to the bit line BL corresponding to the connection.
  • the read and write operation voltage includes the above-mentioned program operation voltage V Set and read operation voltage V Read .
  • the block selection circuit 53 includes a second transistor T2, and the gate, first pole, and second pole of the second transistor T2 serve as the control terminal 530, the first terminal 531, and the second terminal 532 of the block selection circuit, respectively.
  • Each initialization circuit 54 includes a control terminal 540, a first terminal 541, and a second terminal 542.
  • the control terminal 540 of the initialization circuit 54 is configured to receive the initialization control voltage V FC
  • the first terminal 541 of the initialization circuit 54 is configured to receive initialization.
  • Operating voltage V F the second terminal 542 of the initialization circuit 54 is electrically connected to the bit line BL corresponding to the initialization circuit 54
  • the block selection circuit is configured to respond to the initialization control voltage V FC , the initialization operation voltage V F Write the corresponding bit line BL connected.
  • the initialization circuit 54 includes a third transistor T3 (an example of the switching transistor in the embodiment of the present disclosure), and the gate, first electrode, and second electrode of the third transistor T3 are the control terminal 540 of the initialization circuit 54 respectively. , The first end 541 and the second end 542.
  • the resistive random access memory array 50 further includes a block selection line BSL, which extends along the first direction D1 and is connected to the control terminals of the plurality of block selection circuits to provide a block selection voltage V BS .
  • the resistive random access memory array 50 further includes a plurality of global bit lines GBL (GBL ⁇ 0>-GBL ⁇ m-1>), and the plurality of global bit lines GBL are along the first It extends in two directions D2 and is electrically connected to a plurality of block selection circuits 53 in a one-to-one correspondence.
  • Each global bit line GBL is electrically connected to the first end 531 of the correspondingly connected block selection circuit 53.
  • At least one embodiment of the present disclosure further provides a resistive random access memory array structure, including a plurality of the above-mentioned resistive random access memory arrays 50, the plurality of resistive random access memory arrays 50, for example, are arrayed along the first direction D1 and the second direction D2.
  • the upper-level array also includes multiple rows and multiple columns. For example, the memory cell columns of the resistive memory array in the same column in the upper-level array can be aligned with each other. Similarly, the memory of the resistive memory array in the same row The rows of cells can be aligned with each other.
  • the multiple global bit lines GBL correspond to the same column of memory cells of the multiple resistive memory arrays in the resistive memory array structure
  • each global bit line GBL corresponds to a plurality of memory cells in the resistive memory array structure.
  • the first terminals 531 of the block selection circuits 53 in the same column of the resistive memory array are connected correspondingly, that is, the first terminals 531 of the plurality of block selection circuits 53 in the same column in the plurality of resistive memory arrays are all connected to the same corresponding one.
  • the global bit line GBL is electrically connected.
  • the block selection voltage V BS can be applied to the resistive memory array 50 to be accessed to select the resistive memory array 50.
  • This block (division) operation can reduce the circuit load and improve the response speed of the circuit.
  • the resistive memory array 50 further includes a plurality of source lines SL (SL ⁇ 0>-SL ⁇ m-1>), and the plurality of source lines SL are along the second direction D2.
  • a plurality of source lines SL are electrically connected to a plurality of memory cell columns in a one-to-one correspondence, and each of the plurality of source lines SL is electrically connected to the second end 23 of the switching device 20 of the memory cell of a corresponding memory cell column.
  • the resistive memory array 50 further includes a plurality of initialization operation lines FL and a plurality of initialization control lines FCL, and the plurality of initialization operation lines FL and the plurality of initialization control lines FCL extend along the first direction D1.
  • the initialization operation line FL is connected to the first terminal of the initialization circuit 54 to provide the initialization operation voltage V F
  • the initialization control line FCL is connected to the control terminal of the initialization circuit 54 to provide the initialization control voltage V FC .
  • the first transistor T1, the second transistor T2, and the third transistor T3 are N-type transistors or P-type transistors.
  • the third transistor T3 is a P-type transistor
  • the threshold voltage of the P-type transistor is less than 0. Therefore, the voltage applied to the gate is
  • the initialization control voltage V FC can be less than the initialization operation voltage V F applied to the first pole, which further reduces the withstand voltage requirements of the circuit.
  • the embodiment of the present disclosure also provides an operating method for operating the resistive random access memory array 50 described above.
  • the operation method includes: in the initialization operation stage, turning off a plurality of block selection circuits, and applying an initialization operation voltage to the selected at least one row of memory cells through a plurality of initialization circuits and a plurality of bit lines to initialize the at least one row of memory cells.
  • the first transistor T1 and the second transistor T2 are both N-type transistors
  • the third transistor T3 is a P-type transistor.
  • the embodiments of the present disclosure do not limit the types of the first to third transistors. When the type changes, adjust the size relationship between the signals accordingly to make the circuit achieve the same function.
  • a positive word line voltage V WL is applied through a selected word line WL (for example, corresponding to one or more rows of memory cells) and a plurality of source lines SL are controlled to be grounded, so that The switching device 20 (first transistor T1) in the one or more rows of memory cells 30 is turned on, that is, the one or more rows of memory cells are selected.
  • the block selection circuit 53 is turned off by applying the block selection voltage V BS to the block selection circuit 53 through the block selection line BSL.
  • the control block selection line BSL is grounded so that the second transistor T2 is turned off.
  • the block selection circuit is turned off to separate the transmission of the initialization circuit and the initialization operation voltage from the transmission of other control circuits and the operation voltage, thereby reducing the amount involved in the initialization operation voltage.
  • the range of the circuit reduces the withstand voltage requirements and size of the circuit.
  • the initialization operation voltage V F is applied to the initialization operation line FL, and the initialization control voltage V FC is applied to the initialization control line FCL to turn on the third transistor T3, so that the initialization circuit is turned on, and the initialization operation voltage V F
  • the initialization circuit 54 and the plurality of bit lines BL are transferred to the second electrode 12 of the resistive switching device 10 of the selected at least one row of memory cells.
  • the first electrode 11 of the resistive switching device is grounded through the corresponding source line SL through the turned-on switching device 20, so a positive voltage difference V F is introduced at both ends of the resistive switching device, and the resistive switching device is softly broken down.
  • the initial high-impedance state is changed to the low-impedance state, so that at least one row of selected memory cells is simultaneously initialized (Forming).
  • the third transistor T3 is a P-type transistor.
  • the initialization operation voltage V F is applied to the initialization operation line FL
  • the initialization control voltage V FC is applied to the initialization control line FCL
  • the initialization operation voltage V F is higher than the initialization control voltage V FC , so that the third transistor T3 is turned on, and the initialization circuit 54 is turned on.
  • the initialization operation voltage V F is between 2V and 6V.
  • the initialization control voltage V FC of the pulse time (T F) in the range of 1 microsecond to 10 milliseconds.
  • FIG. 4 is a schematic waveform diagram of a process of simultaneous initialization operation of different memory cells in the initialization operation stage of the operation method provided by the embodiment of the disclosure.
  • FIG. 4 schematically shows the voltage and current waveforms of the resistive switching devices in three memory cells (R1, R2, R3) located in the same row but in different columns during the initialization operation.
  • the resistance value of the resistive switching device 10 in the selected memory cell is very high, the conduction current is very small, and the current flowing through the corresponding third transistor T3 is also very small.
  • the third transistor T3 Working in the linear region, the voltage difference between the first pole and the second pole of the third transistor T3 is very small, the initialization operation voltage V F can be regarded as all applied to the resistive switching device 10;
  • the resistance value of the resistance switching device 10 becomes lower, the conduction current increases, and the current flowing through the third transistor T3 also increases; when the current increases to the saturation of the third transistor T3
  • the current (I DS, Sat ) the third transistor T3 enters the saturation region, the voltage difference between the first pole and the second pole of the third transistor T3 increases, and the conduction current remains unchanged, and is transmitted to the resistive switching device 10
  • the voltage on the upper side also drops and eventually stops at the lowest threshold voltage (V Form, TH ) of the initialization operation.
  • the lowest threshold voltage is also the lowest transition voltage of the resistive switching device.
  • the resistance value of the resistive switching device is reduced; when the external voltage is lower than the minimum threshold voltage, the resistance value of the resistive switching device remains unchanged.
  • the lowest threshold voltage is an inherent property of the resistive switching device, for example, it is related to the material, process, and structure of the resistive switching device. After the above-mentioned initialization operation, the resistance value of the resistive switching device 10 is the ratio of the lowest threshold voltage to the saturation current V Form,TH / IDS,Sat .
  • the operating method provided by the embodiments of the present disclosure can limit the voltage and the maximum conduction current applied to the resistive switching device 10 in the selected memory cell, that is, limit the passage of the resistive switching device.
  • the resistance value after the initialization operation Therefore, although multiple memory cells located in one or more rows that are selected for initialization at the same time require different resistance values due to differences in structure, material, process, etc., they ultimately reach the same resistance value or Similar, the consistency and reliability of the storage unit have been significantly improved; compared to the operation one by one, the initialization operation time is greatly shortened.
  • the resistance switching time of memory cells R1, R2, R3 located in the same row but in different columns is increased (postponed) sequentially, but the resistance switching device 10 finally reaches the same resistance value V Form,TH / I DS, Sat , have consistency.
  • the saturation current IDS,Sat of the third transistor T3 can be set to set the resistance value of the resistive switching device after the initialization operation.
  • the initialization operation will have a great impact on the reliability of the subsequent Set/Reset operation. If the resistance value of the resistive switching device is too high after the initialization operation, the reliability of the subsequent Set operation will become worse; on the contrary, if the resistance after the initialization operation is The resistance value of the variable device is too low, and the reliability of the subsequent Reset operation deteriorates.
  • the above operation method can finely control the resistance value of the resistive switching device in the memory cell after the initialization operation, so that the resistance value of the resistive switching device after the initialization operation is in a proper range, thereby improving subsequent Set and Reset.
  • the reliability of the rewrite operation For example, the resistance value is located between the maximum resistance (corresponding to the high resistance state) and the minimum resistance (corresponding to the low resistance state) in the write operation after the initialization operation of the resistive switching device.
  • the resistive memory array and its operation method proposed by the embodiments of the present disclosure can realize one or more rows without sacrificing the consistency and reliability of the memory cells.
  • the storage unit performs the initialization operation at the same time, which significantly shortens the time of the initialization operation, improves the efficiency of the initialization test operation, and reduces the cost of the initialization test.
  • the memory array is subject to the voltage stress of the initialization operation to shorten the time, and the switching devices of the memory cell can be designed with low voltage MOSFET transistors with a withstand voltage below 3V, which greatly reduces the area and manufacturing cost of the memory array. .
  • the operation method further includes a programming operation stage and an erasing operation stage.
  • the programming operation stage the resistive switching device in the selected memory cell is applied with a forward voltage to realize the programming operation of the selected memory cell;
  • a reverse voltage is applied to the resistive switching device in the selected memory cell to realize the erasing operation of the selected memory cell.
  • the resistance of the resistive switching device changes from high to low after the programming operation, and changes from low to high after the erase operation.
  • the selected memory cell is a memory cell to be programmed in the programming operation stage, for example, one or more memory cells in a row.
  • the bit line voltage is applied to the second electrode (positive electrode) of the resistive switching device of the selected memory cell through the block selection tube and the bit line, and the resistance of the selected memory cell through the source line and the switching device is applied.
  • the first electrode (negative electrode) of the variable device is applied with a source line voltage.
  • the lower voltage of the bit line voltage and the source line voltage can be set as the ground voltage, that is, the corresponding signal line (bit line or source line) can be controlled to be grounded; accordingly, the higher The voltage (program operation voltage or erase operation voltage) is designed to be a positive voltage.
  • the bit line voltage is the programming operation voltage
  • the source line voltage is the erasing operation voltage
  • multiple initialization circuits are turned off, and the block selection circuit is turned on; at least one block selection circuit 53 and at least one bit line BL apply a positive programming operation voltage V Set to the selected memory cell, and The source line SL corresponding to the selected memory cell is controlled to be grounded, so that a forward voltage is applied to the resistive switching device to perform a programming operation on the memory cell.
  • the second transistor T2 is of an N-type
  • a positive block selection voltage V BS is applied to the block selection line of the selected resistive memory array
  • the program operation voltage V Set is applied to at least one global bit line GBL to reduce the corresponding at least A block selection circuit is turned on, and the programming operation voltage V Set is transferred to the corresponding bit line BL and applied to the second electrode 12 of the resistive switching device of the selected memory cell.
  • the word line voltage V WL is applied to the control terminal of the switching device 20 (first transistor T1) in a row of memory cells 30 through the selected word line WL (corresponding to the selected memory cell), and the source line voltage is applied to the selected The source line SL corresponding to the memory cell.
  • the first transistor T1 is an N-type transistor
  • the word line voltage V WL is a positive voltage
  • the source line SL is grounded, so that the switching device in the selected memory cell in the row of memory cells is turned on, and the resistive switching device The first electrode 11 is grounded.
  • the magnitude of the programming operation voltage V Set is between 1.2V and 3V, and the pulse time is between 1 nanosecond and 10 microseconds.
  • the operation method further includes: in the erasing operation phase, multiple initialization circuits are turned off, and the block selection circuit is turned on; applying a positive erase operation voltage V RST to the selected memory cell through the source line SL, and selecting at least one block
  • the circuit 53 controls the bit line BL corresponding to the selected memory cell to be grounded, thereby applying a reverse voltage to the resistive switching device to perform an erase operation on the memory cell.
  • the second transistor T2 is of an N-type, a positive block selection voltage V BS is applied to a block selection line of the resistive random access memory array, and at least one global bit line GBL is grounded to turn on the corresponding at least one block selection circuit , And ground the second electrode 12 of the resistive switching device of the selected memory cell.
  • the positive word line voltage V WL is applied to the control terminal of the switching device 20 (first transistor T1) in a row of memory cells 30 through the selected word line WL (corresponding to the selected memory cell), and the erase operation
  • the voltage V RST is applied to at least one source line SL to turn on the switching device of the selected memory cell, and the erase operation voltage V RST is transferred to the first electrode 11 of the resistive switching device of the selected memory cell.
  • the magnitude of the erase operation voltage V RST is between 1.2V and 3V, and the pulse time is between 1 nanosecond and 10 microseconds.
  • the operation method also includes a read operation phase. For example, during the read operation stage, multiple initialization circuits are turned off, and at least one block selection circuit (corresponding to the selected memory cell) is turned on, thereby performing a read operation on the selected memory cell.
  • the selected storage unit is the storage unit to be read.
  • the second transistor T2 is an N-type transistor, a positive block selection voltage V BS is applied to a block selection line BSL of a selected resistive memory array, and a read operation voltage V Read is applied to at least one block selection line BSL of the resistive random access memory array.
  • the global bit line GBL (corresponding to the selected memory cell), so that the at least one block selection circuit is turned on, and the read operation voltage V Read is transferred to the first resistive switching device of the selected memory cell through the corresponding bit line BL.
  • the positive word line voltage V WL is applied to the control terminal of the switching device 20 (first transistor T1) of a row of memory cells 30 through the selected word line WL (corresponding to the selected memory cell), and the multiple source lines SL Grounding, so that the switching device in the selected memory cell in the row of memory cells is turned on, and the first electrode 11 of the resistive switching device is grounded.
  • a positive V Read voltage difference is introduced across the electrodes of the resistive switching device of the selected memory cell, and a conduction read current (I Read ) is generated.
  • the resistance value of the resistance switching device is high, and the reading current is small; the resistance value is low, and the reading current is large.
  • the reading operation of the selected memory cell can be completed by detecting the reading current through the peripheral reading control circuit.
  • the read operation voltage V Read is between 0.1V and 1.2V
  • the pulse time (T Set ) is between 1 nanosecond and 10 microseconds.
  • At least one embodiment of the present disclosure also provides an operating method for operating the resistive random access memory array 50 described above.
  • the operation method includes performing the above-mentioned initialization operations on the resistive random access memory array multiple times during the initialization operation stage.
  • the number of initialization operation steps is between 2 and 100, or more.
  • the performance of the resistive switching device and the switching device in each memory cell are different.
  • the lowest threshold voltage (V Form, TH ) of each resistive switching device is different, and the saturation current (I DS, Sat ) of each switching device under the same voltage condition is different, so the final resistance value of the resistive switching device after the initial operation Different, there is a resistance distribution.
  • the resistance value of the entire row (one or more rows) of memory cells can be changed.
  • the resistance value of the device is successively reduced, and finally reaches the required target value.
  • the resistance value of the resistive switching device obtained by this method has better accuracy and consistency.
  • the resistance value distribution of the resistive switching device becomes narrower and the average value is lower.
  • the standard deviation of the resistance value distribution of the plurality of resistive switching devices is sequentially reduced, and the weighted average value of the resistance values is sequentially reduced.
  • the initialization operation voltage V F sequentially decreases with the time sequence of the initialization operation.
  • the saturation current increase effect caused by factors such as the short channel effect of the third transistor T3 can be alleviated, so that the standard deviation of the resistance value distribution of the resistive switching device after the initializing operation is reduced, thereby The resistance value distribution is narrower and more uniform.
  • V F- V FC increases sequentially with the time sequence of the initialization operation.
  • initialization operation time T F are sequentially initializing operation decreases with time sequence.
  • the initialization operation time of the multi-step initialization operation is sequentially reduced as the initialization operation progresses. Can save the power consumption of the circuit. For example, the time for the first step of the initialization operation can be set to the longest.
  • the operation method includes: turning off the plurality of block selection circuits, and performing a first initialization operation and a second initialization operation on the selected at least one row of memory cells through the plurality of initialization circuits and the plurality of bit lines.
  • the first initialization operation includes: applying a first initialization operation voltage V F 1 to the selected at least one row of memory cells through the plurality of initialization circuits and the plurality of bit lines;
  • the second initialization operation includes: The plurality of initialization circuits and the plurality of bit lines apply the second initialization operation voltage V F 2 to the selected at least one row of memory cells.
  • the first initialization operation precedes the second initialization operation.
  • the first initialization operation voltage V F 1 is different from the second initialization operation voltage V F 2.
  • the first initialization operation voltage and the second initialization operation voltage are both configured to be applied to the second electrode 12 (positive electrode) of the resistive switching device of the memory cell to make the resistive switching device forward bias.
  • the first initialization operation further includes: applying a positive word line voltage V WL through the selected word line WL (corresponding to connecting one or more rows of selected memory cells) and controlling the multiple source lines SL to be grounded, thereby making the selected row Or, the switching device 20 (the first transistor T1) in the memory cell 30 of the plurality of rows is turned on.
  • the second initialization operation further includes: applying a positive word line voltage V WL through the selected word line WL (corresponding to connecting one or more rows of selected memory cells) and controlling the multiple source lines SL to be grounded, thereby making the selected row Or, the switching device 20 (the first transistor T1) in the memory cell 30 of the plurality of rows is turned on.
  • the first initialization operation further includes: applying a first initialization control voltage V FC 1 to the control terminals of the plurality of initialization circuits to turn on the plurality of initialization circuits;
  • the second initialization operation further includes: The initialization control circuit applies a second initialization control voltage V FC 2 to turn on the plurality of initialization circuits.
  • the first initialization operation voltage V F 1 is greater than the second initialization operation voltage V F 2.
  • the saturation current increase effect caused by factors such as the short channel effect of the third transistor T3 can be alleviated, so that the standard deviation of the resistance value distribution of the resistive switching device after the initializing operation is reduced, thereby The resistance value distribution is narrower and more uniform.
  • is smaller than the difference between the second initialization operation voltage and the second initialization control voltage
  • the time of the first initialization operation is greater than the time of the second initialization operation.
  • may also be the difference between the second initialization operation voltage and the second initialization control voltage
  • the embodiments of the present disclosure do not limit the type of the third transistor T3.
  • the third transistor T3 may be P-type or N-type, and an appropriate initialization operation voltage and initialization control voltage are selected according to the corresponding transistor type to enable the initialization circuit to turn on.
  • the third transistor T3 is a P-type transistor, the first initialization control voltage V FC 1 is less than the first initialization operation voltage V F 1 to turn on the plurality of initialization circuits, and the second initialization control voltage V F 2 is less than the first initialization operation voltage V F 1. 2.
  • Initializing the operating voltage V FC 2 to turn on the plurality of initialization circuits.
  • the initialization control voltage V FC is less than the initialization operation voltage V F.
  • setting the third transistor T3 to P type can reduce the circuit The withstand voltage requirements.
  • the operation method further includes: after the second initialization operation, performing a third initialization operation on the selected at least one row of memory cells through the plurality of initialization circuits and the plurality of bit lines.
  • the third initialization operation includes: applying a third initialization operation voltage V F 3 to the selected at least one row of memory cells through the plurality of initialization circuits and the plurality of bit lines.
  • the magnitudes of the first initialization operation voltage V F 1, the second initialization operation voltage V F 2, and the third initialization operation voltage V F 3 decrease in order.
  • the third initialization operation further includes: applying a third initialization control voltage V FC 3 to the plurality of initialization control circuits to turn on the plurality of initialization circuits.
  • the first initializing operation voltage V F 1, the second initializing operating voltage V F 2, the third initializing operating voltage V F 3, the first initializing control voltage V FC 1, the second initializing control voltage V FC 2, the third The size of the initialization control voltage V FC 3 is between 2V and 6V.
  • the operation time of the first initialization operation, the second initialization operation, and the third initialization operation are sequentially reduced.
  • FIG. 5 shows a flowchart of a method for operating a resistive memory array provided by at least one embodiment of the present disclosure.
  • FIG. 5 shows an example of performing three initialization operations, but the embodiment of the present disclosure does not limit the number of initialization operation steps.
  • the operation method includes steps S1-S4.
  • Step S1 Turn off multiple block selection circuits.
  • applying the block selection voltage V BS to the block selection circuit 53 through the block selection line BSL turns the block selection circuit 53 off.
  • the second transistor T2 is an N-type transistor, and the block selection line BSL is grounded, that is, the block selection voltage V BS is zero.
  • the block selection circuit By setting the block selection circuit off to separate the transmission of the initialization circuit and the initialization operation voltage from the transmission of other control circuits and operation voltages, the range of the circuit involved in the initialization operation voltage is reduced, and the withstand voltage of the circuit is reduced. Requirements and dimensions.
  • the first transistor T1 is an N-type transistor, and the word line voltage V WL is applied through the selected word line WL (corresponding to the memory cells selected in one or more rows), and the multiple source lines SL are grounded, so that the one row or The switching device 20 (the first transistor T1) in the multiple rows of memory cells 30 is turned on, that is, the one or more rows of memory cells are selected.
  • the first electrode 21 of the switching device 20 is grounded.
  • Step S2 Perform a first initialization operation on the selected at least one row of memory cells through a plurality of initialization circuits and a plurality of bit lines.
  • the first initialization operation includes respectively applying a first initialization operation voltage V F 1 to the initialization operation line FL, and applying a second initialization control voltage V FC 2 to the initialization control line FCL so that the initialization circuit is turned on and the initialization operation voltage is applied.
  • V F 1 is transferred to the second electrode 22 of the switching device.
  • the third transistor T3 is a P-type transistor.
  • the first initialization operation voltage V F is greater than the first initialization control voltage V FC , so that the third transistor T3 is turned on, and the initialization circuit 54 Turn on.
  • the first initializing operation voltage V F 1 is between 2V and 6V.
  • the first initialization control voltage V FC 1 pulse time (T F) in the range of 1 microsecond to 10 milliseconds.
  • the plurality of resistive switching devices have a first resistance distribution and a first average resistance value (for example, a weighted average value) after the first initialization operation.
  • the standard deviation of the first resistance distribution is lower than the standard deviation of the initial resistance distribution, and the first average resistance is lower than the initial average resistance.
  • Step S3 Perform a second initialization operation on the selected at least one row of memory cells through a plurality of initialization circuits and a plurality of bit lines.
  • the second initialization operation includes: respectively applying the initialization operation voltage V F 2 to the initialization operation line FL, and the initialization control voltage V FC 2 to the initialization control line FCL so that the initialization circuit is turned on and the initialization operation voltage V F is applied. 2 is transferred to the second electrode 22 of the switching device. There is a positive voltage difference V F 2 at both ends of the resistive switching device 20, and its resistance value drops from the first resistance value to the second resistance value.
  • the third transistor T3 is a P-type transistor.
  • the second initializing operation voltage V F 2 is greater than the second initializing control voltage V FC 2, so that the third transistor T3 is turned on.
  • the circuit 54 is turned on.
  • the second initializing operation voltage V F 2 is between 2V and 6V.
  • the pulse time of the second initialization control voltage V FC 2 is in the range of 1 microsecond to 10 milliseconds.
  • the plurality of resistive switching devices have a second resistance distribution and a second average resistance value (for example, a weighted average value) after the second initialization operation.
  • the standard deviation of the second resistance distribution is smaller than the standard deviation of the first resistance distribution, that is, the resistance distribution is more convergent after the second initialization operation.
  • the second average resistance value is less than the first average resistance value.
  • Step S4 Perform a third initialization operation on the selected at least one row of memory cells through a plurality of initialization circuits and a plurality of bit lines.
  • the third initialization operation includes: respectively applying the initialization operation voltage V F 3 to the initialization operation line FL, and the initialization control voltage V FC 3 to the initialization control line FCL so that the initialization circuit is turned on and the initialization operation voltage V F is applied. 3 is transferred to the second electrode 22 of the switching device. There is a positive voltage difference V F 3 between the two ends of the resistive switching device 20, and the resistance value thereof drops from the second resistance value to the third resistance value.
  • the third transistor T3 is a P-type transistor.
  • the third initialization operation voltage V F 3 is greater than the third initialization control voltage V FC 3, so that the third transistor T3 is turned on, and the initialization The circuit 54 is turned on.
  • the third initializing operation voltage V F 3 is between 2V and 6V.
  • the pulse time of the third initialization control voltage V FC 3 is in the range of 1 microsecond to 10 milliseconds.
  • the plurality of resistive switching devices have a third resistance distribution and a third average resistance value (for example, a weighted average value) after the third initialization operation.
  • the standard deviation of the third resistance distribution is smaller than the standard deviation of the second resistance distribution, that is, the resistance distribution is more convergent after the third initialization operation.
  • the third average resistance value is less than the second average resistance value.
  • the magnitudes of the first initialization operation voltage V F 1, the second initialization operation voltage V F 2, and the third initialization operation voltage V F 3 decrease in order.
  • At least one embodiment of the present disclosure also provides a resistive random access memory circuit.
  • the resistive random access memory circuit includes the above-mentioned resistive random access memory array 50.
  • FIG. 6 is a schematic structural diagram of a resistive random access memory circuit 60 provided by at least one embodiment of the present disclosure.
  • the resistive random access memory circuit 60 further includes an initialization control circuit 61 configured to be electrically connected to the plurality of initialization circuits 54 to provide the initialization operation voltage V F and the initialization control voltage V FC .
  • the resistive random access memory circuit 60 further includes a column selection circuit 62 configured to provide the resistive random access memory array 50 with the read and write operation voltage.
  • the reading and writing operation voltage includes a programming operation voltage V Set , an erasing operation voltage V RST and a reading operation voltage V Read .
  • the program operation voltage V Set and the read operation voltage V Read are provided to the memory resistive array through the bit line BL, and the erase operation voltage V RST is provided to the memory resistive array through the source line SL.
  • the embodiment of the present disclosure does not limit this.
  • the program operation voltage V Set , the erase operation voltage V RST, and the read operation voltage V Read may all be provided to the memory resistive variable array through the bit line BL.
  • the column selection circuit 62 is electrically connected to a plurality of global bit lines GBL.
  • the resistive random access memory circuit 60 further includes a programming control circuit 63, an erasing control circuit 64 and a reading control circuit 65.
  • the programming control circuit 63 is connected to the column selection circuit 62 and is configured to provide the programming operation voltage V Set to the resistive memory array 60 through the column selection circuit 62.
  • the programming control circuit 63 applies the programming operation voltage V Set to the selected memory cell through the column selection circuit 62 and at least one bit line BL, thereby applying a forward voltage to the resistive switching device to the memory cell.
  • the unit is programmed.
  • the erasing control circuit 64 is connected to the column selection circuit 62 and is configured to provide the erasing operation voltage V RST to the resistive memory array 60 through the column selection circuit 62. For example, in the erasing operation stage, the erasing control circuit 64 applies an erasing operation voltage V RST to the selected memory cell through the column selection circuit 62 and at least one source line SL to apply a reverse voltage to the resistive switching device. Perform an erase operation on the memory cell.
  • the read control circuit 65 is connected to the column selection circuit 62 and is configured to provide a read operation voltage V Read to the resistive memory array 60 through the column selection circuit 62.
  • the read control circuit 65 applies the read operation voltage V Read to the selected memory cell through the column selection circuit 62 and at least one bit line BL to apply a forward voltage to the resistive switching device. Perform a read operation.
  • the resistive random access memory circuit 60 further includes a block selection control circuit 66 and a word line control circuit 67.
  • the block selection control circuit 66 is configured to be connected to the block selection line BSL to provide the block selection voltage V BS to the resistive random access memory array 50.
  • the word line control circuit 67 is configured to provide the word line voltage V WL to the resistive memory array 50.
  • the word line control circuit 67 is electrically connected to a plurality of word lines WL.
  • the embodiments of the present disclosure also provide a resistive random access memory array, and the second ends of the switching devices of the memory cells of each memory cell row are electrically connected to each other.
  • FIG. 7A is a schematic diagram of a resistive memory array 70 provided by at least another embodiment of the present disclosure.
  • the resistive memory array 70 includes a plurality of memory cells 30, a plurality of bit lines BL, a plurality of word lines WL, and a plurality of block selection circuits 53.
  • the plurality of memory cells 30 are arranged into n memory cell rows and m memory cell columns (m and n are greater than or equal to 2) along the first direction D1 and the second direction D2, and each memory cell 30 includes a resistive switching device 10 and a switch The device 20; the resistive switching device 10 includes a first electrode 11 and a second electrode 12, the switching device 20 includes a control terminal 21, a first terminal 22, and a second terminal 23; the first electrode 11 of the resistive switching device 10 and the The first terminal 22 of the switching device 20 is electrically connected.
  • the second ends 23 of the switching devices 20 in the memory cells 30 of each memory cell row along the first direction D1 are electrically connected to each other.
  • the plurality of bit lines BL extend along the second direction D2 and are connected to the plurality of columns of memory cells 30 in a one-to-one correspondence. Each of the plurality of bit lines BL is connected to the second row of the resistive switching device 10 in the corresponding column of memory cells 30.
  • the electrode 12 is electrically connected.
  • the plurality of word lines WL extend along the first direction D1 and are connected to the plurality of rows of memory cells 30 in a one-to-one correspondence. Each of the plurality of word lines WL is connected to the switching device 20 of the memory cell in the corresponding row of memory cells 30.
  • the control terminal 21 is electrically connected.
  • the plurality of block selection circuits 53 are electrically connected to a plurality of bit lines BL in a one-to-one correspondence.
  • Each block selection circuit 53 includes a control terminal 530, a first terminal 531, and a second terminal 532.
  • the control terminal 530 of the block selection circuit 53 is configured To receive the block selection voltage V BS
  • the first terminal 531 of the block selection circuit 53 is configured to receive read and write operation voltages
  • the second terminal 532 of the block selection circuit 53 is electrically connected to the bit line BL corresponding to the block selection circuit 53.
  • the block selection circuit is configured to, in response to the block selection voltage V BS , write the read and write operation voltage to the correspondingly connected bit line BL.
  • the reading and writing operation voltage includes a programming operation voltage V Set , an erasing operation voltage V RST and a reading operation voltage V Read .
  • the second terminals 23 of the switching devices 20 in each row of memory cells 30 are directly and electrically connected to each other at the same potential, and it is not necessary to provide a second end 23 for matching a row of memory cells in the second direction D2.
  • the potential of the second terminal 23 of each switching device in the source line is selected. This arrangement helps to reduce the density of the traces along the second direction, simplify the manufacturing process and improve the yield.
  • the resistive memory array may further include a plurality of source lines SL (SL ⁇ 0>-SL ⁇ n/2-1>), and the plurality of source lines SL extend along the first direction D1, That is, it is parallel to the plurality of word lines WL.
  • the multiple source lines SL are correspondingly connected to multiple memory cell rows, and the second ends of the switching devices of the memory cells of each memory cell row are electrically connected to each other through a corresponding source line SL.
  • the multiple source lines SL are connected to the multiple memory cell rows in a one-to-one correspondence.
  • the second end 23 of the switching device 20 of the memory cell 30 of each memory cell row is electrically connected to a corresponding source line SL, and is electrically connected to each other through the source line SL.
  • the source lines SL may be insulated from each other, or may be electrically connected to each other.
  • the embodiment of the present disclosure does not limit this.
  • every two adjacent rows of memory cells share one source line SL.
  • the second ends of the switching devices of every two adjacent rows of memory cells are electrically connected to the same source line SL. In this way, the trace density can be reduced, and the process cost can be reduced.
  • the resistive memory array 60 further includes a global source line GSL, and the second ends of the switching devices in each memory cell row are electrically connected to the global source line GSL, that is, ,
  • the global source line electrically connects the second ends of the multiple switching devices in the resistive memory array 60 to each other.
  • the global source line GSL is used to connect the second ends of the multiple switching devices to a peripheral circuit (such as the source line control circuit in FIG. 8) to provide source line voltages to the multiple memory cells.
  • the global source line GSL can also be directly grounded.
  • the global source line GSL extends along the second direction D2.
  • the number of the global source lines GSL is two, and the two global source lines GSL are respectively located on opposite sides of a memory cell array formed by a plurality of memory cells 30 in the first direction D1.
  • the multiple source lines SL are electrically connected to two global source GSL lines located on both sides.
  • the second ends 23 of the multiple switching devices 20 located in the same memory cell row are connected to the surrounding global source line GSL through a corresponding source line SL.
  • the global source line GSL is grounded, thereby grounding the second end 23 of the switching device 20 of the switching devices in the plurality of memory cells 30.
  • the resistive memory array 70 further includes a plurality of initialization circuits 54 which are respectively electrically connected to the plurality of bit lines in a one-to-one correspondence.
  • Each initialization circuit includes a control terminal, a first terminal, and a second terminal.
  • the control terminal of the initialization circuit is configured to receive an initialization control voltage
  • the first terminal of the initialization circuit is configured to receive an initialization operation voltage.
  • the second end is electrically connected to a bit line corresponding to the initialization circuit, and the initialization circuit is configured to write the initialization operation voltage to the corresponding bit line in response to the initialization control voltage.
  • the main difference between the resistive random access memory array 70 provided in this embodiment and the resistive random access memory array 50 in the foregoing embodiment described with reference to FIG. 3 is that the source lines are arranged in a different manner.
  • resistive random access memory Description of array 50. I won't repeat them here.
  • the embodiment of the present disclosure also provides an operating method for operating the resistive random access memory array 70 described above.
  • the operation method includes: applying a word line voltage through the plurality of word lines to select a row of memory cells, and applying a source line voltage to a second end of a switching device of the selected row of memory cells so that the switching device is turned on and all
  • the source line voltage is transferred to the first electrode of the resistive switching device of the selected row of memory cells, and the resistive switching device of at least one of the selected row of memory cells is transmitted through at least one of the plurality of bit lines
  • the second electrode applies a read-write operation voltage or an initialization operation voltage.
  • the read and write operation voltage includes at least one of a program operation voltage, an erase operation voltage, and a read operation voltage.
  • the potential of the first electrode 11 directly connected to the resistive switching device and the switching device 20 can be used as a reference potential for various operations. For example, during initialization operation, programming operation, erasing operation, and reading operation, the corresponding initialization operation voltage, programming operation voltage, and erasing operation voltage are respectively applied to the second electrode 12 of the resistive switching device 10 of the selected memory cell through the bit line. And read the operating voltage.
  • the source line voltage is the ground voltage.
  • a positive voltage can be applied to the bit line to perform initialization, programming, and reading operations, and a negative voltage can be applied to erase. This helps to reduce the voltage amplitude requirements, thereby reducing the circuit's withstand voltage requirements.
  • the operation method includes, for example, an initialization operation phase, a programming operation phase, an erasing operation phase, and a reading operation phase.
  • the first transistor T1 and the second transistor T2 are both N-type transistors; the third transistor T3 is a P-type transistor.
  • the embodiments of the present disclosure do not limit the types of the first to third transistors. When the types of the transistors are changed, the magnitude relationship between the signals is adjusted accordingly to make the circuit achieve the same function.
  • the word line voltage V WL is applied to the selected word line WL (corresponding to the selected memory cell connected to one or more rows), and the global source line GSL is controlled to be grounded, thereby storing the selected one or more rows
  • the switching device 20 (first transistor T1) of the cell 30 is turned on.
  • applying the block selection voltage V BS to the block selection circuit 53 through the block selection line BSL turns the block selection circuit 53 off.
  • the control block selection line BSL is grounded so that the second transistor T2 is turned off.
  • the block selection circuit is turned off to separate the transmission of the initialization circuit and the initialization operation voltage from the transmission of other control circuits and the operation voltage, thereby reducing the amount involved in the initialization operation voltage.
  • the range of the circuit reduces the withstand voltage requirements and size of the circuit.
  • the initialization operation voltage V F is applied to the initialization operation line FL
  • the initialization control voltage V FC is applied to the initialization control line FCL so that the third transistor T3 is turned on and the initialization circuit is turned on.
  • the third transistor T3 is a P-type transistor.
  • the initialization operation voltage V F is applied to the initialization operation line FL
  • the initialization control voltage V FC is applied to the initialization control line FCL
  • the initialization operation voltage V F is higher than the initialization control voltage V FC , so that the third transistor T3 is turned on, and the initialization circuit 54 is turned on.
  • the initialization operation voltage V F is between 2V and 6V.
  • the initialization control voltage V FC of the pulse time (T F) in the range of 1 microsecond to 10 milliseconds.
  • the initializing operation voltage V F is applied to the second electrode 12 of the resistive switching device 10 of the selected at least one row of memory cells through the initializing circuit 54 and a plurality of bit lines BL; the first electrode 11 of the resistive switching device passes through the The switch device 20 that is turned on is grounded, so a voltage difference V F is introduced at both ends of the resistive switching device.
  • the resistive switching device is broken down to change from an initial high-resistance state to a low-resistance state, thereby changing at least one row of selected memory cells
  • the initialization (Forming) operation is carried out.
  • multiple initialization circuits are turned off, and the block selection circuit is turned on; at least one block selection circuit 53 and at least one bit line BL apply a positive programming operation voltage V Set to the selected memory cell, and control the global source line
  • the GSL is grounded, so that a forward voltage is applied to the resistive switching device to perform a programming operation on the memory cell.
  • the positive word line voltage V WL is applied to the control terminal of the switching device 20 (first transistor T1) in a row of memory cells 30 through the selected word line WL (corresponding to the selected memory cell), so that the row of memory cells
  • the switching device in the selected memory cell in is turned on, and the first electrode 11 of the resistive switching device is grounded.
  • the magnitude of the programming operation voltage V Set is between 1.2V and 3V, and the pulse time is between 1 nanosecond and 10 microseconds.
  • multiple initialization circuits are turned off, and the block selection circuit is turned on; at least one block selection circuit 53 and at least one bit line BL apply a negative erase operation voltage V RST to the selected memory cell, and control the global The source line GSL is grounded, so that a reverse voltage is applied to the resistive switching device to perform an erase operation on the memory cell.
  • a positive block selection voltage V BS to the block selection line of the selected resistive random access memory array
  • the erase operation voltage V RST to at least one global bit line GBL to turn on the corresponding at least one block selection circuit
  • the negative erase operation voltage V RST is transferred to the corresponding bit line BL and applied to the second electrode 12 of the resistive switching device of the selected memory cell.
  • the positive word line voltage V WL is applied to the control terminal of the switching device 20 in a row of memory cells 30 through the selected word line WL (corresponding to the selected memory cell), so that the selected memory cell in the row of memory cells
  • the switching device in is turned on, and the first electrode 11 of the resistive switching device is grounded.
  • the magnitude of the erase operation voltage V RST is between -1.2V and -3V, and the pulse time is between 1 nanosecond and 10 microseconds.
  • the operation method also includes a read operation phase. For example, during the read operation stage, multiple initialization circuits are turned off, and at least one block selection circuit (corresponding to the selected memory cell) is turned on, thereby performing a read operation on the selected memory cell.
  • a positive block selection voltage V BS is applied to a block selection line of a selected resistive memory array, and a read operation voltage V Read is applied to at least one global bit line GBL (corresponding to the selected memory Cell), so that the at least one block selection circuit is turned on, and the read operation voltage V Read is transferred to the second electrode 12 of the resistive switching device of the selected memory cell through the corresponding bit line BL.
  • a positive word line voltage V WL is applied to the control terminal of the switching device 20 (first transistor T1) of a row of memory cells 30 through the selected word line WL (corresponding to the selected memory cell), and the global source line GSL is grounded Therefore, the switching device in the selected memory cell in the row of memory cells is turned on, and the first electrode 11 of the resistive switching device is grounded.
  • a positive V Read voltage difference is introduced across the electrodes of the resistive switching device of the selected memory cell, and a conduction read current (IRead) is generated.
  • the resistance value of the resistance switching device is high, and the reading current is small; the resistance value is low, and the reading current is large.
  • the reading operation of the selected memory cell can be completed by detecting the reading current through the peripheral reading control circuit.
  • the read operation voltage V Read is between 0.1V and 1.2V, and the pulse time is between 1 nanosecond and 10 microseconds.
  • the operation method may include a multi-step initialization operation.
  • the operation method provided by the embodiment shown in FIG. 5 is also applicable to the resistive random access memory array 70, which will not be repeated here.
  • the embodiment of the present disclosure also provides a resistive random access memory circuit 80, which includes the above-mentioned resistive random access memory circuit 70.
  • FIG. 8 is a schematic structural diagram of a resistive random access memory circuit 80 provided by at least one embodiment of the present disclosure. As shown in FIG. 8, the resistive random access memory circuit 80 further includes a source line control circuit 81 configured to be electrically connected to the second end of the switching device of the memory cell of one or more memory cell rows to provide a source Line voltage.
  • a source line control circuit 81 configured to be electrically connected to the second end of the switching device of the memory cell of one or more memory cell rows to provide a source Line voltage.
  • the source line control circuit 81 may be connected to a plurality of source lines SL to respectively provide source line voltages for a plurality of memory cell rows.
  • the source line voltages received by the memory cell row may be the same or different.
  • the source line control circuit 81 can also be electrically connected to the global source line GSL to provide a source line voltage to the resistive memory array 70.
  • the global source line GSL may be directly grounded, and in this case, the source line control circuit 81 may also be omitted.
  • the resistive random access memory circuit 80 further includes an initialization control circuit 82 configured to be electrically connected to the plurality of initialization circuits 54 to provide the initialization operation voltage VF and the initialization control voltage V FC .
  • the resistive random access memory circuit 80 further includes a column selection circuit 83 configured to be connected to a plurality of block selection circuits 53 to provide read and write operation voltages to the resistive random access memory array 70.
  • the reading and writing operation voltage includes a programming operation voltage V Set , an erasing operation voltage V RST and a reading operation voltage V Read .
  • the column selection circuit 83 is electrically connected to a plurality of global bit lines GBL.
  • the resistive random access memory circuit 80 further includes a programming and erasing control circuit 84 and a reading control circuit 85.
  • the program and erase control circuit 84 is connected to the column selection circuit 83 and is configured to provide the program operation voltage V Set and the erase operation voltage V RST to the resistive memory array 70 through the column selection circuit 83.
  • the program and erase control circuit 84 applies a positive program operation voltage V Set to the selected memory cell through the column selection circuit 83 and at least one bit line BL, thereby applying a positive direction to the resistive switching device.
  • V Set a positive program operation voltage
  • the voltage is used to program the memory cell.
  • the program and erasing control circuit 84 applies a negative erasing operation voltage V RST to the selected memory cell through the column selection circuit 83 and at least one bit line BL, thereby applying a negative erase operation voltage V RST to the resistive switching device
  • the reverse voltage is used to erase the memory cell.
  • the programming control circuit and the erasing control circuit can be integrated into the same circuit module.
  • the program and erase control circuit 84 includes a positive voltage generating circuit and a negative voltage generating circuit to generate a positive program operation voltage during the program operation phase and a negative erase operation voltage during the erase operation phase, respectively.
  • the read control circuit 85 is connected to the column selection circuit 83 and is configured to provide the read operation voltage V Read to the resistive memory array 70 through the column selection circuit 83.
  • the read control circuit 85 applies the read operation voltage V Read to the selected memory cell through the column selection circuit 83 and at least one bit line BL, thereby applying a forward voltage to the resistive switching device. Perform a read operation on the memory cell.
  • the resistive random access memory circuit 80 further includes a block selection control circuit 86 and a word line control circuit 87.
  • the block selection control circuit 86 is configured to be connected to the block selection line BSL to provide the block selection voltage V BS to the resistive random access memory array 70.
  • the word line control circuit 87 is configured to provide the word line voltage V WL to the resistive memory array 70.
  • the word line control circuit 87 is electrically connected to a plurality of word lines WL.
  • At least one embodiment of the present disclosure also provides an electronic device that includes the resistive random access memory circuit of any of the above embodiments.
  • the electronic device may be a storage device, a hard disk, a mobile device, a mobile phone, a notebook computer, or a desktop. Computer, etc.

Abstract

An operation method for a resistive storage array (50). The resistive storage array (50) comprises a plurality of storage units (30), a plurality of bit lines (BLs), a plurality of word lines (WLs), a plurality of block selection circuits (53), and a plurality of initialization circuits (54). Each storage unit (30) comprises a resistive device (10) and a switch device (20). The plurality of storage units (30) is arranged as a plurality of storage unit rows and a plurality of storage unit columns along a first direction (D1) and a second direction (D2). The plurality of BLs is connected to the plurality of storage unit columns in a one-to-one correspondence manner. The operation method comprises: switching off the plurality of block selection circuits (53), and performing a first initialization operation and a second initialization operation on the selected storage unit (30) in at least one storage unit row by means of the plurality of initialization circuits (54) and the plurality of BLs. The resistance value of the resistive device obtained by the operation method has better accuracy and consistency.

Description

阻变存储阵列的操作方法Operation method of resistive storage array
本申请要求于2019年12月31日递交的中国专利申请第201911409107.0号的优先权,在此全文引用上述中国专利申请公开的内容以作为本申请的一部分。This application claims the priority of the Chinese patent application No. 201911409107.0 filed on December 31, 2019, and the contents of the above-mentioned Chinese patent application are quoted here in full as a part of this application.
技术领域Technical field
本公开的实施例涉及一种阻变存储阵列的操作方法。The embodiment of the present disclosure relates to an operation method of a resistive memory array.
背景技术Background technique
阻变存储器(RRAM,Resistance changeable Random Access Memory)是一种利用薄膜阻变介质材料在外加电场下的作用下导电性能发生改变的特点来实现电阻值的高低转换的存储器。阻变存储器具有结构简单、工作速度快、功耗低、信息保持稳定、非挥发性等优点,具有巨大的发展应用前景。Resistance changeable memory (RRAM, Resistance Changeable Random Access Memory) is a memory that uses the characteristics of the change in conductivity of the thin film resistive medium material under the action of an external electric field to realize the high-low conversion of the resistance value. The resistive random access memory has the advantages of simple structure, fast working speed, low power consumption, stable information, non-volatile, etc., and has huge development and application prospects.
发明内容Summary of the invention
本公开至少一实施例提供一种阻变存储阵列,包括多个存储单元、多条位线、多条字线、多个块选择电路及多个初始化电路。所述多个存储单元沿第一方向和第二方向排列为多个存储单元行和多个存储单元列,每个存储单元包括阻变器件和开关器件,所述阻变器件包括第一电极和第二电极,所述阻变器件的第一电极与所述开关器件电连接。所述多条位线,沿所述第二方向延伸,且与所述多个存储单元列一一对应连接,其中,所述多条位线中的每条与所对应的一个存储单元列的阻变器件的第二电极电连接。所述多条字线沿所述第一方向延伸,且与所述多个存储单元行一一对应连接,其中,所述多条字线中的每条与所对应一个存储单元行的存储单元的开关器件电连接。所述多个块选择电路分别与所述多条位线一一对应电连接;所述多个初始化电路分别与所述多条位线一一对应电连接。每个块选择电路包括控制端、第一端和第二端,所述块选择电路的控制端配置为接收块选择电压,所述块选择电路的第一端配置为接收读写操作电压,所述块选择电路的第二端与所述块选择电路对应连接的位线电连接,所述块选择电路配置为响应于所述块选择电压,将所述读写操作电压写入所对应连接的位线;每个初始化电 路包括控制端、第一端和第二端,所述初始化电路的控制端配置为接收初始化控制电压,所述初始化电路的第一端配置为接收初始化操作电压,所述初始化电路的第二端与所述初始化电路对应连接的位线电连接,所述初始化电路配置为响应于所述初始化控制电压,将所述初始化操作电压写入所对应连接的位线。At least one embodiment of the present disclosure provides a resistive memory array, which includes a plurality of memory cells, a plurality of bit lines, a plurality of word lines, a plurality of block selection circuits, and a plurality of initialization circuits. The plurality of memory cells are arranged in a plurality of memory cell rows and a plurality of memory cell columns along a first direction and a second direction, each memory cell includes a resistive switching device and a switching device, and the resistive switching device includes a first electrode and The second electrode, and the first electrode of the resistive switching device is electrically connected to the switching device. The plurality of bit lines extend along the second direction and are connected to the plurality of memory cell columns in a one-to-one correspondence, wherein each of the plurality of bit lines is connected to a corresponding memory cell column The second electrode of the resistive switching device is electrically connected. The plurality of word lines extend along the first direction and are connected to the plurality of memory cell rows in a one-to-one correspondence, wherein each of the plurality of word lines corresponds to a memory cell of a memory cell row The switching devices are electrically connected. The plurality of block selection circuits are respectively electrically connected to the plurality of bit lines in a one-to-one correspondence; the plurality of initialization circuits are respectively electrically connected to the plurality of bit lines in a one-to-one correspondence. Each block selection circuit includes a control terminal, a first terminal, and a second terminal. The control terminal of the block selection circuit is configured to receive a block selection voltage, and the first terminal of the block selection circuit is configured to receive a read and write operation voltage. The second end of the block selection circuit is electrically connected to a bit line corresponding to the block selection circuit, and the block selection circuit is configured to write the read and write operation voltage to the correspondingly connected bit line in response to the block selection voltage. Bit line; each initialization circuit includes a control terminal, a first terminal and a second terminal, the control terminal of the initialization circuit is configured to receive the initialization control voltage, the first terminal of the initialization circuit is configured to receive the initialization operation voltage, the The second end of the initialization circuit is electrically connected to a bit line corresponding to the initialization circuit, and the initialization circuit is configured to write the initialization operation voltage to the correspondingly connected bit line in response to the initialization control voltage.
在一些示例中,所述多个初始化电路中的每个包括开关晶体管,所述开关晶体管的栅极、第一极和第二极分别为所述初始化电路的控制端、第一端和第二端;所述开关晶体管为P型晶体管。In some examples, each of the plurality of initialization circuits includes a switching transistor, and the gate, the first pole, and the second pole of the switching transistor are the control terminal, the first terminal, and the second terminal of the initialization circuit, respectively. End; The switching transistor is a P-type transistor.
在一些示例中,所述开关器件包括控制端、第一端和第二端,所述每条字线与所对应的一个存储单元行的存储单元的开关器件的控制端电连接;所述阻变存储阵列还包括沿所述第二方向延伸的多条源线,所述多条源线与所述多个存储单元列一一对应电连接,所述多条源线中的每条与所对应的一个存储单元列的存储单元的开关器件的第二端电连接。In some examples, the switching device includes a control terminal, a first terminal, and a second terminal, and each word line is electrically connected to a control terminal of a switching device of a memory cell of a corresponding memory cell row; the resistor The variable memory array also includes a plurality of source lines extending along the second direction, the plurality of source lines are electrically connected to the plurality of memory cell columns in a one-to-one correspondence, and each of the plurality of source lines is connected to the The second end of the switching device of the memory cell of a corresponding memory cell column is electrically connected.
在一些示例中,所述阻变存储阵列还包括多条全局位线,所述多条全局位线沿所述第二方向延伸,并与所述多个块选择电路一一对应电连接,每条全局位线与对应连接的块选择电路的第一端电连接。In some examples, the resistive memory array further includes a plurality of global bit lines extending along the second direction and electrically connected to the plurality of block selection circuits in a one-to-one correspondence, each One global bit line is electrically connected to the first end of the correspondingly connected block selection circuit.
在一些示例中,所述阻变存储阵列还包括初始化操作线,所述初始化操作线沿所述第一方向延伸,并与所述多个初始化电路的第一端电连接以提供所述初始化操作电压。In some examples, the resistive memory array further includes an initialization operation line extending along the first direction and electrically connected to the first ends of the plurality of initialization circuits to provide the initialization operation Voltage.
本公开至少一实施例还提供一种阻变存储器电路,包括上述阻变存储阵列。At least one embodiment of the present disclosure also provides a resistive random access memory circuit, including the above-mentioned resistive random access memory array.
在一些示例中,所述阻变存储器电路还包括初始化控制电路,所述初始化控制电路配置为与所述多个初始化电路电连接以提供所述初始化操作电压和所述初始化控制电压。In some examples, the resistive random access memory circuit further includes an initialization control circuit configured to be electrically connected to the plurality of initialization circuits to provide the initialization operation voltage and the initialization control voltage.
在一些示例中,所述阻变存储器电路还包括列选择电路,所述列选择电路配置为与所述多个块选择电路连接以向所述阻变存储阵列提供所述读写操作电压。In some examples, the resistive memory circuit further includes a column selection circuit configured to be connected to the plurality of block selection circuits to provide the read and write operation voltage to the resistive memory array.
在一些示例中,所述阻变存储器电路还包括编程控制电路和读取控制电路,所述读写操作电压包括编程操作电压和读取操作电压。所述编程控制电路与所述列选择电路连接,并配置为通过所述列选择电路向所述阻变存储阵列提供所述编程操作电压;所述读取控制电路与所述列选择电路连接,并配 置为通过所述列选择电路向所述阻变存储阵列提供所述读取操作电压。In some examples, the resistive memory circuit further includes a program control circuit and a read control circuit, and the read and write operation voltages include a program operation voltage and a read operation voltage. The programming control circuit is connected to the column selection circuit and is configured to provide the programming operation voltage to the resistive memory array through the column selection circuit; the read control circuit is connected to the column selection circuit, And configured to provide the read operation voltage to the resistive memory array through the column selection circuit.
本公开至少一实施例还提供一种操作方法,用于操作上述阻变存储阵列,所述操作方法包括:在初始化操作阶段,将所述多个块选择电路关闭,并通过所述多个初始化电路及所述多条位线向选中的至少一个存储单元行的存储单元施加所述初始化操作电压。At least one embodiment of the present disclosure further provides an operating method for operating the above-mentioned resistive random access memory array. The operating method includes: in an initialization operation phase, turning off the plurality of block selection circuits, and performing the initialization through the plurality of block selection circuits. The circuit and the plurality of bit lines apply the initialization operation voltage to the memory cells of the selected at least one memory cell row.
本公开至少一实施例还提供一种阻变存储阵列的操作方法,所述阻变存储阵列包括多个存储单元、多条位线、多条字线、多个块选择电路和多个初始化电路。所述多个存储单元沿第一方向和第二方向排列为多个存储单元行和多个存储单元列,每个存储单元包括阻变器件和开关器件,所述阻变器件包括第一电极和第二电极,所述阻变器件的第一电极与所述开关器件电连接。所述多条位线沿所述第二方向延伸,且分别与所述多列对应连接,其中,所述多条位线中的每条与所对应的一个存储单元列的存储单元的阻变器件的第二电极电连接。所述多条字线沿所述第一方向延伸,且分别与所述多行对应连接,,所述多条字线中的每条与所对应的一个存储单元行的存储单元的开关器件电连接。所述多个块选择电路分别与所述多条位线一一对应电连接。所述多个初始化电路分别与所述多条位线一一对应电连接。所述操作方法包括:将所述多个块选择电路关闭,并通过所述多个初始化电路及所述多条位线对选中的至少一个存储单元行的存储单元进行第一初始化操作和第二初始化操作,所述第一初始化操作先于所述第二初始化操作。所述第一初始化操作包括:通过所述多个初始化电路及所述多条位线向选中的至少一个存储单元行的存储单元施加第一初始化操作电压V F1。所述第二初始化操作包括:通过所述多个初始化电路及所述多条位线向所述选中的至少一个存储单元行的存储单元施加第二初始化操作电压V F2。 At least one embodiment of the present disclosure also provides an operating method of a resistive random access memory array, the resistive random access memory array including a plurality of memory cells, a plurality of bit lines, a plurality of word lines, a plurality of block selection circuits, and a plurality of initialization circuits . The plurality of memory cells are arranged in a plurality of memory cell rows and a plurality of memory cell columns along a first direction and a second direction, each memory cell includes a resistive switching device and a switching device, and the resistive switching device includes a first electrode and The second electrode, and the first electrode of the resistive switching device is electrically connected to the switching device. The plurality of bit lines extend along the second direction and are respectively connected to the plurality of columns, wherein each of the plurality of bit lines corresponds to the resistance of a memory cell of a corresponding memory cell column The second electrode of the device is electrically connected. The plurality of word lines extend along the first direction and are respectively connected to the plurality of rows, and each of the plurality of word lines is electrically connected to a switching device of a memory cell of a corresponding memory cell row. connection. The plurality of block selection circuits are respectively electrically connected to the plurality of bit lines in a one-to-one correspondence. The plurality of initialization circuits are respectively electrically connected with the plurality of bit lines in a one-to-one correspondence. The operation method includes: turning off the plurality of block selection circuits, and performing a first initialization operation and a second initialization operation on the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines. An initialization operation, the first initialization operation precedes the second initialization operation. The first initialization operation includes: applying a first initialization operation voltage V F 1 to the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines. The second initialization operation includes: applying a second initialization operation voltage V F 2 to the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines.
在一些示例中,所述第一初始化操作电压V F1大于所述第二初始化操作电压V F2。 In some examples, the first initialization operation voltage V F 1 is greater than the second initialization operation voltage V F 2.
在一些示例中,每个初始化电路包括控制端、第一端和第二端,每个初始化电路的第二端与所述初始化电路对应连接的位线电连接;所述第一初始化操作还包括:向所述多个初始化电路的控制端施加第一初始化控制电压V FC1以将所述多个初始化电路开启,所述第二初始化操作还包括:向所述多个初始化控制电路施加第二初始化控制电压V FC2以将所述多个初始化电路开启。 In some examples, each initialization circuit includes a control terminal, a first terminal, and a second terminal, and the second terminal of each initialization circuit is electrically connected to a bit line corresponding to the initialization circuit; the first initialization operation further includes : Applying a first initialization control voltage V FC 1 to the control terminals of the plurality of initialization circuits to turn on the plurality of initialization circuits, and the second initialization operation further includes: applying a second initialization control voltage to the plurality of initialization control circuits The initialization control voltage V FC 2 is used to turn on the plurality of initialization circuits.
在一些示例中,所述多个初始化电路中的每个包括开关晶体管,所述开关晶体管的栅极、第一极和第二极分别为所述初始化电路的控制端、第一端和第二端;所述开关晶体管为P型晶体管,所述第一初始化控制电压V FC1小于所述第一初始化操作电压V F1,所述第二初始化控制电压V FC2小于所述第二初始化操作电压V F2。 In some examples, each of the plurality of initialization circuits includes a switching transistor, and the gate, the first pole, and the second pole of the switching transistor are the control terminal, the first terminal, and the second terminal of the initialization circuit, respectively. The switching transistor is a P-type transistor, the first initialization control voltage V FC 1 is less than the first initialization operation voltage V F 1, and the second initialization control voltage V FC 2 is less than the second initialization operation Voltage V F 2.
在一些示例中,所述第一初始化操作电压与所述第一初始化控制电压之差|V F1-V FC1|小于所述第二初始化操作电压与所述第二初始化控制电压之差|V F2-V FC2|。 In some examples, the difference between the first initialization operation voltage and the first initialization control voltage |V F 1-V FC 1 | is smaller than the difference between the second initialization operation voltage and the second initialization control voltage| V F 2-V FC 2|.
在一些示例中,所述第一初始化操作的时间大于所述第二初始化操作的时间。In some examples, the time of the first initialization operation is greater than the time of the second initialization operation.
在一些示例中,所述操作方法还包括:在所述第二初始化操作后,通过所述多个初始化电路及所述多条位线对所述选中的至少一个存储单元行的存储单元进行第三初始化操作,所述第三初始化操作包括:通过所述多个初始化电路及所述多条位线向所述选中的至少一个存储单元行的存储单元施加第三初始化操作电压V F3。 In some examples, the operation method further includes: after the second initialization operation, performing a first operation on the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines. Three initialization operations, the third initialization operation includes: applying a third initialization operation voltage V F 3 to the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines.
在一些示例中,所述第一初始化操作电压V F1、所述第二初始化操作电压V F2、所述第三初始化操作电压V F3的大小依次减小。 In some examples, the magnitudes of the first initialization operation voltage V F 1, the second initialization operation voltage V F 2, and the third initialization operation voltage V F 3 decrease in order.
在一些示例中,所述第一初始化操作、所述第二初始化操作、所述第三初始化操作的操作时间依次减小。In some examples, the operation time of the first initialization operation, the second initialization operation, and the third initialization operation are sequentially reduced.
在一些示例中,每个初始化电路包括控制端、第一端和第二端,每个初始化电路的第二端与所述初始化电路对应连接的位线电连接;所述第一初始化操作还包括:向所述多个初始化电路的控制端施加第一初始化控制电压V FC1以将所述多个初始化电路开启。所述第二初始化操作还包括:向所述多个初始化控制电路施加第二初始化控制电压V FC2以将所述多个初始化电路开启;所述第三初始化操作还包括:向所述多个初始化控制电路施加第二初始化控制电压V FC2以将所述多个初始化电路开启,所述第一初始化操作电压与所述第一初始化控制电压之差|V F1-V FC1|、所述第二初始化操作电压与所述第二初始化控制电压之差|V F2-V FC2|、所述第三初始化操作电压与所述第三初始化控制电压之差|V F3-V FC3|依次增大。 In some examples, each initialization circuit includes a control terminal, a first terminal, and a second terminal, and the second terminal of each initialization circuit is electrically connected to a bit line corresponding to the initialization circuit; the first initialization operation further includes : Apply a first initialization control voltage V FC 1 to the control terminals of the plurality of initialization circuits to turn on the plurality of initialization circuits. The second initialization operation further includes: applying a second initialization control voltage V FC 2 to the plurality of initialization control circuits to turn on the plurality of initialization circuits; the third initialization operation further includes: applying a second initialization control voltage V FC 2 to the plurality of initialization control circuits; The initialization control circuit applies a second initialization control voltage V FC 2 to turn on the plurality of initialization circuits, the difference between the first initialization operation voltage and the first initialization control voltage |V F 1-V FC 1|, so The difference between the second initialization operation voltage and the second initialization control voltage |V F 2-V FC 2 |, the difference between the third initialization operation voltage and the third initialization control voltage |V F 3-V FC 3|Increase sequentially.
本公开至少一实施例还提供一种阻变存储阵列,包括多个存储单元、多条位线、多条字线和多个块选择电路。所述多个存储单元沿第一方向和第二 方向排列为多个存储单元行和多个存储单元列,其中,每个存储单元包括阻变器件和开关器件,所述阻变器件包括第一电极和第二电极,所述开关器件包括控制端、第一端和第二端,所述阻变器件的第一电极与所述开关器件的第一端电连接。所述多条位线沿所述第二方向延伸,且分别与所述多个存储单元列一一对应连接,所述多条位线中的每条与所对应的一个存储单元列的存储单元的阻变器件的第二电极电连接。所述多条字线沿所述第一方向延伸,且分别与所述多个存储单元行一一对应连接,所述多条字线中的每条与所对应的一个存储单元行的存储单元的开关器件的控制端电连接。所述多个块选择电路分别与所述多条位线一一对应电连接,每个块选择电路包括控制端、第一端和第二端,所述块选择电路的控制端配置为接收第一控制信号,所述块选择电路的第一端配置为接收读写操作电压,所述块选择电路的第二端与所述块选择电路对应连接的位线电连接,所述块选择电路配置为响应于所述第一控制信号,将所述读写操作电压写入所对应连接的位线。每个存储单元行的存储单元的开关器件的第二端彼此电连接。At least one embodiment of the present disclosure also provides a resistive memory array, which includes a plurality of memory cells, a plurality of bit lines, a plurality of word lines, and a plurality of block selection circuits. The plurality of memory cells are arranged into a plurality of memory cell rows and a plurality of memory cell columns along the first direction and the second direction, wherein each memory cell includes a resistive switching device and a switching device, and the resistive switching device includes a first An electrode and a second electrode. The switching device includes a control terminal, a first terminal, and a second terminal. The first electrode of the resistive switching device is electrically connected to the first terminal of the switching device. The plurality of bit lines extend along the second direction and are respectively connected to the plurality of memory cell columns in a one-to-one correspondence, and each of the plurality of bit lines corresponds to a memory cell of a corresponding memory cell column The second electrode of the resistive switching device is electrically connected. The plurality of word lines extend along the first direction and are respectively connected to the plurality of memory cell rows in a one-to-one correspondence, and each of the plurality of word lines corresponds to a memory cell of a corresponding memory cell row The control terminal of the switching device is electrically connected. The plurality of block selection circuits are electrically connected to the plurality of bit lines in a one-to-one correspondence, and each block selection circuit includes a control terminal, a first terminal, and a second terminal. The control terminal of the block selection circuit is configured to receive the first terminal. A control signal, the first end of the block selection circuit is configured to receive a read and write operation voltage, the second end of the block selection circuit is electrically connected to a bit line corresponding to the block selection circuit, and the block selection circuit is configured In response to the first control signal, the read and write operation voltage is written to the correspondingly connected bit line. The second ends of the switching devices of the memory cells of each memory cell row are electrically connected to each other.
在一些示例中,所述阻变存储阵列还包括多条源线,沿所述第一方向延伸,且与所述多个存储单元行对应连接。每个存储单元行的存储单元的开关器件的第二端通过所对应的一条源线彼此电连接。In some examples, the resistive memory array further includes a plurality of source lines extending along the first direction and correspondingly connected to the plurality of memory cell rows. The second ends of the switching devices of the memory cells of each memory cell row are electrically connected to each other through a corresponding source line.
在一些示例中,所述阻变存储阵列还包括全局源线,所述多条源线均与所述全局源线电连接,从而所述全局源线将所述多个存储单元行的存储单元的开关器件的第二端彼此电连接。In some examples, the resistive memory array further includes a global source line, and the multiple source lines are electrically connected to the global source line, so that the global source line connects the memory cells of the multiple memory cell rows. The second ends of the switching devices are electrically connected to each other.
在一些示例中,每个存储单元行的存储单元的开关器件的第二端均接地。In some examples, the second ends of the switching devices of the memory cells of each memory cell row are all grounded.
在一些示例中,所述阻变存储阵列还包括多个初始化电路,所述多个初始化电路分别与所述多条位线一一对应电连接,每个初始化电路包括控制端、第一端和第二端,所述初始化电路的控制端配置为接收初始化控制电压,所述初始化电路的第一端配置为接收初始化操作电压,所述初始化电路的第二端与所述初始化电路对应连接的位线电连接,所述初始化电路配置为响应于所述初始化控制电压,将所述初始化操作电压写入所对应连接的位线。In some examples, the resistive random access memory array further includes a plurality of initialization circuits, the plurality of initialization circuits are respectively electrically connected to the plurality of bit lines in a one-to-one correspondence, and each initialization circuit includes a control terminal, a first terminal, and At the second end, the control end of the initialization circuit is configured to receive an initialization control voltage, the first end of the initialization circuit is configured to receive an initialization operation voltage, and the second end of the initialization circuit is connected to the bit corresponding to the initialization circuit. The line is electrically connected, and the initialization circuit is configured to write the initialization operation voltage to the correspondingly connected bit line in response to the initialization control voltage.
本公开至少一实施例还提供一种阻变存储器电路,包括上述阻变存储阵列。At least one embodiment of the present disclosure also provides a resistive random access memory circuit, including the above-mentioned resistive random access memory array.
在一些示例中,所述阻变存储器电路还包括源线控制电路,所述源线控 制电路配置为与所述一个或多个存储单元行的存储单元的开关器件的第二端电连接以提供源线电压。In some examples, the resistive random access memory circuit further includes a source line control circuit configured to be electrically connected to the second end of the switching device of the memory cell of the one or more memory cell rows to provide Source line voltage.
在一些示例中,所述阻变存储器电路还包括列选择电路、编程和擦除控制电路以及读取控制电路。所述读写操作电压包括编程操作电压、擦除操作电压和读取操作电压;所述列选择电路与所述多个块选择电路连接,并且配置为与所述多个块选择电路连接以向所述阻变存储阵列提供所述操作电压;所述编程和擦除控制电路与所述列选择电路连接,并配置为通过所述列选择电路向所述阻变存储阵列提供所述编程操作电压和所述擦除操作电压;所述读取控制电路与所述列选择电路连接,并配置为通过所述列选择电路向所述阻变存储阵列提供所述读取操作电压。In some examples, the resistive memory circuit further includes a column selection circuit, a program and erase control circuit, and a read control circuit. The read-write operation voltage includes a program operation voltage, an erase operation voltage, and a read operation voltage; the column selection circuit is connected to the plurality of block selection circuits, and is configured to be connected to the plurality of block selection circuits to The resistive memory array provides the operating voltage; the program and erase control circuit is connected to the column selection circuit and is configured to provide the resistive memory array with the program operating voltage through the column selection circuit And the erase operation voltage; the read control circuit is connected to the column selection circuit and is configured to provide the read operation voltage to the resistive memory array through the column selection circuit.
本公开至少一实施例还提供一种驱动方法,用于驱动上述阻变存储阵列,所述驱动方法包括:通过所述多条字线施加字线电压以选中一行存储单元,向所述选中的一行存储单元的开关器件的第二端施加源线电压使得所述开关器件开启并将所述源线电压传递至所述选中的一行存储单元的阻变器件的第一电极,以及通过所述多条位线中的至少一条向所述选中的一行存储单元中的至少一个存储单元的阻变器件的第二电极施加操作电压。所述操作电压包括所述读写操作电压和初始化操作电压。At least one embodiment of the present disclosure further provides a driving method for driving the above-mentioned resistive random access memory array. The driving method includes: applying a word line voltage through the plurality of word lines to select a row of memory cells, and A source line voltage is applied to the second end of the switching device of a row of memory cells to turn on the switching device and transfer the source line voltage to the first electrode of the resistive switching device of the selected row of memory cells, and through the multiple At least one of the bit lines applies an operating voltage to the second electrode of the resistive switching device of at least one memory cell in the selected row of memory cells. The operating voltage includes the reading and writing operating voltage and the initializing operating voltage.
在一些示例中,所述源线电压为接地电压。In some examples, the source line voltage is a ground voltage.
附图说明Description of the drawings
为了更清楚地说明本公开实施例的技术方案,下面将对实施例的附图作简单地介绍,显而易见地,下面描述中的附图仅仅涉及本公开的一些实施例,而非对本公开的限制。In order to explain the technical solutions of the embodiments of the present disclosure more clearly, the following will briefly introduce the drawings of the embodiments. Obviously, the drawings in the following description only refer to some embodiments of the present disclosure, rather than limiting the present disclosure. .
图1A为一种阻变器件的结构示意图;Fig. 1A is a schematic diagram of a structure of a resistive switching device;
图1B为一种阻变器件的电压-电流特性曲线图;Figure 1B is a graph of voltage-current characteristics of a resistive switching device;
图2A为一种阻变存储单元的结构示意图;FIG. 2A is a schematic diagram of a structure of a resistive switching memory cell;
图2B为一种阻变存储阵列的结构示意图;FIG. 2B is a schematic diagram of the structure of a resistive random access memory array;
图2C为一种阻变存储器电路的结构示意图;2C is a schematic diagram of the structure of a resistive random access memory circuit;
图3为本公开至少一实施例提供的一种阻变存储阵列的结构示意图;3 is a schematic structural diagram of a resistive memory array provided by at least one embodiment of the present disclosure;
图4为本公开至少一实施例提供的一种阻变存储阵列的操作方法的信号波形示意图;4 is a schematic diagram of signal waveforms of a method for operating a resistive memory array provided by at least one embodiment of the present disclosure;
图5为本公开至少一实施例提供的一种阻变存储阵列的操作方法的流程图;5 is a flowchart of a method for operating a resistive memory array provided by at least one embodiment of the present disclosure;
图6为本公开至少一实施例提供的阻变存储器电路的结构示意图;6 is a schematic structural diagram of a resistive random access memory circuit provided by at least one embodiment of the present disclosure;
图7A为本公开至少一实施例提供的另一种阻变存储阵列的结构示意图;7A is a schematic structural diagram of another resistive memory array provided by at least one embodiment of the present disclosure;
图7B为本公开至少一实施例提供的又一种阻变存储阵列的结构示意图;以及FIG. 7B is a schematic structural diagram of still another resistive memory array provided by at least one embodiment of the present disclosure; and
图8为开至少一实施例提供的另一种阻变存储器电路的结构示意图。FIG. 8 is a schematic structural diagram of another resistive random access memory circuit provided by at least one embodiment.
具体实施方式Detailed ways
为使本公开实施例的目的、技术方案和优点更加清楚,下面将结合本公开实施例的附图,对本公开实施例的技术方案进行清楚、完整地描述。显然,所描述的实施例是本公开的一部分实施例,而不是全部的实施例。基于所描述的本公开的实施例,本领域普通技术人员在无需创造性劳动的前提下所获得的所有其他实施例,都属于本公开保护的范围。In order to make the objectives, technical solutions, and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be described clearly and completely in conjunction with the accompanying drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by a person of ordinary skill in the art without creative labor are within the protection scope of the present disclosure.
除非另外定义,本公开使用的技术术语或者科学术语应当为本公开所属领域内具有一般技能的人士所理解的通常意义。本公开中使用的“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性,而只是用来区分不同的组成部分。同样,“一个”、“一”或者“该”等类似词语也不表示数量限制,而是表示存在至少一个。“包括”或者“包含”等类似的词语意指出现该词前面的元件或者物件涵盖出现在该词后面列举的元件或者物件及其等同,而不排除其他元件或者物件。“连接”或者“相连”等类似的词语并非限定于物理的或者机械的连接,而是可以包括电性的连接,不管是直接的还是间接的。“上”、“下”、“左”、“右”等仅用于表示相对位置关系,当被描述对象的绝对位置改变后,则该相对位置关系也可能相应地改变。Unless otherwise defined, the technical terms or scientific terms used in the present disclosure shall have the usual meanings understood by those with ordinary skills in the field to which this disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity, or importance, but are only used to distinguish different components. Likewise, similar words such as "a", "one" or "the" do not mean a quantity limit, but mean that there is at least one. "Include" or "include" and other similar words mean that the elements or items appearing before the word cover the elements or items listed after the word and their equivalents, but do not exclude other elements or items. Similar words such as "connected" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "Down", "Left", "Right", etc. are only used to indicate the relative position relationship. When the absolute position of the described object changes, the relative position relationship may also change accordingly.
阻变存储器所使用的存储器件(称为阻变器件或RRAM器件)例如为平板电容状,包括金属-绝缘层-金属(Metal-Insulator-Metal,MIM)结构。图1A示出了一种阻变器件的结构示意图,图1B示出了该阻变器件的电流-电压(I-V)特性曲线。The memory device used in the resistive random access memory (referred to as a resistive random access device or RRAM device) is, for example, a flat capacitor shape, including a metal-insulator-metal (MIM) structure. Fig. 1A shows a schematic structural diagram of a resistive switching device, and Fig. 1B shows a current-voltage (I-V) characteristic curve of the resistive switching device.
如图1A所示,该阻变器件10包括第一电极11、第二电极12和位于该第一电极11和该第二电极12之间的阻变介质层13,例如该第一电极11为 该阻变器件10的下电极(bottom electrode),该第二电极12位该阻变器件的上电极(top electrode)。As shown in FIG. 1A, the resistive switching device 10 includes a first electrode 11, a second electrode 12, and a resistive switching medium layer 13 located between the first electrode 11 and the second electrode 12. For example, the first electrode 11 is The bottom electrode of the resistive switching device 10, and the second electrode 12 is the top electrode of the resistive switching device.
例如,该第一电极11和第二电极12可以包括铝、银、铜、铂、钛等金属材料或复合金属材料,或者包括多晶硅等半导体材料。例如,阻变介质层13可以包括一层或多层复合介质层;例如,阻变介质层13可以包括氧化铪、氧化铜、氧化钛、氧化钽等金属氧化物材料或其他具有阻变特性的介质材料。For example, the first electrode 11 and the second electrode 12 may include metal materials such as aluminum, silver, copper, platinum, titanium, or composite metal materials, or include semiconductor materials such as polysilicon. For example, the resistive dielectric layer 13 may include one or more composite dielectric layers; for example, the resistive dielectric layer 13 may include metal oxide materials such as hafnium oxide, copper oxide, titanium oxide, tantalum oxide, or other materials with resistive characteristics. Medium material.
如图1B所示,该阻变器件10的I-V特性曲线具有回滞特性,该曲线分成4个区域:高阻态(High Resistance State,HRS)、低阻态(Low Resistance State,LRS)和两个转变区。当电压幅度超过一定阈值时可以使得该阻变器件的电阻发生改变,从而可以对该阻变最新器件10进行改写操作(包括编程操作和擦除操作)。As shown in FIG. 1B, the IV characteristic curve of the resistive switching device 10 has hysteresis characteristics, and the curve is divided into 4 regions: high resistance state (HRS), low resistance state (LRS) and two regions. A transition zone. When the voltage amplitude exceeds a certain threshold, the resistance of the resistive switching device can be changed, so that the newest resistive switching device 10 can be rewritten (including a programming operation and an erasing operation).
如图1B所示,在阻变器件10的两端施加正向电压(V Set),使电阻值由高阻态向低阻态的转变过程被称为Set操作,也称为写操作或编程操作;在阻变器件10的两端施加反向电压(V RST),使电阻值由低阻态向高阻态的转变过程被称为Reset操作,也称为擦除操作。例如,实现该编程操作及擦除操作的电压幅值一般在1.2V-3V之间。为了防止阻变器件在操作过程中突然产生较大电流而被击穿,需要设置一个限制电流(compliance current,CC)对器件进行保护。 As shown in FIG. 1B, a forward voltage (V Set ) is applied to both ends of the resistive switching device 10 to change the resistance value from a high-resistance state to a low-resistance state, which is called Set operation, also called write operation or programming. Operation; Applying a reverse voltage (V RST ) across the resistive switching device 10 to change the resistance value from a low-resistance state to a high-resistance state is called a Reset operation, which is also called an erasing operation. For example, the voltage amplitude for realizing the programming operation and erasing operation is generally between 1.2V-3V. In order to prevent the resistive switching device from suddenly generating a large current during operation and being broken down, it is necessary to set a compliance current (CC) to protect the device.
阻变器件在制备完成后一般处于高阻状态,需要采用一个较高的初始化操作电压(例如高于3V)对该阻变器件进行初始化操作,在初始化操作之后,该阻变器件才可以在降低的电压下完成编程操作或擦除操作。该初始化操作也称作Forming操作。例如,需要增加一个采用更高电压的软击穿(Soft Breakdown)的初始化操作。例如,初始化操作所需的初始化操作电压较Set/Reset操作所需的电压更高,操作时间也更长。该初始化操作电压V F在2V-6V之间。 The resistive switching device is generally in a high resistance state after the preparation is completed, and a higher initialization operating voltage (for example, higher than 3V) is required to initialize the resistive switching device. After the initialization operation, the resistive switching device can be reduced Complete the programming operation or erase operation under the voltage. This initialization operation is also called the Forming operation. For example, a higher voltage soft breakdown (Soft Breakdown) initialization operation needs to be added. For example, the initialization operation voltage required for the initialization operation is higher than the voltage required for the Set/Reset operation, and the operation time is longer. The initial operation voltage V F is between 2V-6V.
阻变器件通常与一个开关器件电连接(例如串联)构成一个基本的存储单元。该开关器件可以为两端元件(例如二极管)或三端元件(例如晶体管)。图2A示出了一种存储单元的结构示意图,如图2A所示,存储单元30包括阻变器件10和开关器件20。例如,该开关器件20为三端元件,包括控制端21、第一端22和第二端23,该开关器件20的第一端22与该阻变器件10的第一电极11电连接。The resistive switching device is usually electrically connected (for example, in series) with a switching device to form a basic memory cell. The switching device may be a two-terminal element (for example, a diode) or a three-terminal element (for example, a transistor). FIG. 2A shows a schematic structural diagram of a memory cell. As shown in FIG. 2A, the memory cell 30 includes a resistive switching device 10 and a switching device 20. For example, the switching device 20 is a three-terminal element including a control terminal 21, a first terminal 22 and a second terminal 23, and the first terminal 22 of the switching device 20 is electrically connected to the first electrode 11 of the resistive switching device 10.
例如,该第一电极11为该阻变器件10的负电极,该第二电极12为该阻变器件10的正电极,当该第一电极11上的电压小于该第二电极12上的电压,该阻变器件为正向偏置;当该第一电极11上的电压大于该第二电极12上的电压,该阻变器件为反向偏置。本公开以下实施例均以此为例进行说明,然而本公开实施例并不限于此。本领域技术人员容易理解,开关器件20也可以与阻变器件的第二电极(正电极)连接,在操作过程中相应地调整输入信号的大小关系而实现相同的功能。For example, the first electrode 11 is the negative electrode of the resistive switching device 10, and the second electrode 12 is the positive electrode of the resistive switching device 10. When the voltage on the first electrode 11 is lower than the voltage on the second electrode 12 The resistive switching device is forward biased; when the voltage on the first electrode 11 is greater than the voltage on the second electrode 12, the resistive switching device is reverse biased. The following embodiments of the present disclosure are all described by taking this as an example, but the embodiments of the present disclosure are not limited thereto. Those skilled in the art can easily understand that the switching device 20 can also be connected to the second electrode (positive electrode) of the resistive switching device, and the magnitude relationship of the input signal is adjusted accordingly during operation to achieve the same function.
例如,该开关器件包括二极管或三极管由此构成1D1R或1T1R的存储单元结构。例如,该开关器件包括第一晶体管T1,包括金属-氧化物-半导体场效应晶体管(Metal-Oxide-Semiconductor Field-Effect-Transistor,MOSFET),从而使得该1T1R存储单元与现有CMOS集成电路具有良好兼容特性。For example, the switching device includes a diode or a triode to form a 1D1R or 1T1R memory cell structure. For example, the switching device includes a first transistor T1, including a Metal-Oxide-Semiconductor Field-Effect-Transistor (MOSFET), so that the 1T1R memory cell has a good performance with the existing CMOS integrated circuit. Compatible features.
该第一晶体管T1的栅极、第一极和第二极分别作为该开关器件的控制端、第一端和第二端。当开关器件20开启时,存储单元30被选中进行RRAM器件的读写操作等;当开关器件20关断时,存储单元30不被选中。The gate, the first pole and the second pole of the first transistor T1 serve as the control terminal, the first terminal and the second terminal of the switching device, respectively. When the switching device 20 is turned on, the storage unit 30 is selected for reading and writing operations of the RRAM device, etc.; when the switching device 20 is turned off, the storage unit 30 is not selected.
需要说明的是,本公开实施例中采用的晶体管均可以为场效应晶体管、薄膜晶体管或其他特性相同的开关器件,本公开的实施例中均以场效应晶体管为例进行说明。这里采用的晶体管的源极、漏极在结构上可以是对称的,所以其源极、漏极在结构上可以是没有区别的。在本公开的实施例中,为了区分晶体管除栅极之外的两极,例如,可直接描述了其中一极为第一极,另一极为第二极。It should be noted that the transistors used in the embodiments of the present disclosure may be field-effect transistors, thin-film transistors, or other switching devices with the same characteristics. In the embodiments of the present disclosure, field-effect transistors are used as examples for description. The source and drain of the transistor used here can be symmetrical in structure, so the source and drain of the transistor can be structurally indistinguishable. In the embodiments of the present disclosure, in order to distinguish the two poles of the transistor other than the gate, for example, one pole can be directly described as the first pole and the other pole is the second pole.
多个阻变存储单元可通过纵横交叉的方式集成拓扑为一个RRAM存储阵列,存储装置可以包括一个或多个该存储阵列。A plurality of resistive memory cells can be integrated into an RRAM storage array in a crosswise manner, and the storage device can include one or more of the storage arrays.
图2B示出了一种阻变存储阵列结构的示意图,该阻变存储阵列40包括m列和n行(m、n大于等于2)存储单元30构成的阵列、多条位线(bit line)BL(BL<0>-BL<m-1>)、多条字线(word line)WL(WL<0>-WL<n-1>)和多条源线(source line)SL(SL<0>-SL<m-1>)。每个存储单元30中的阻变器件10的第二电极12与一条位线BL连接,开关器件20的控制端21和第二端23分别与一条字线WL和一条源线SL连接。通过在位线BL、字线WL和源线SL上施加合适的电压,即可选中需要的存储单元30进行前述初始化(Forming)、编程(Set)、擦除(Reset)和读取(Read)操作。FIG. 2B shows a schematic diagram of a resistive random access memory array structure. The resistive random access memory array 40 includes an array of m columns and n rows (m, n is greater than or equal to 2) of memory cells 30, and multiple bit lines. BL(BL<0>-BL<m-1>), multiple word lines WL(WL<0>-WL<n-1>) and multiple source lines SL(SL< 0>-SL<m-1>). The second electrode 12 of the resistive switching device 10 in each memory cell 30 is connected to a bit line BL, and the control terminal 21 and the second terminal 23 of the switching device 20 are respectively connected to a word line WL and a source line SL. By applying appropriate voltages on the bit line BL, the word line WL and the source line SL, the required memory cell 30 can be selected for the aforementioned initialization (Forming), programming (Set), erasing (Reset) and reading (Read) operating.
图2C示出了一种阻变存储器电路的结构示意图。如图2C所示,该阻变存储器电路包括一个或多个阻变存储阵列40及外围电路。该外围电路包括字线控制电路、列选择电路、初始化控制电路、编程控制电路、擦除控制电路、读取控制电路等。FIG. 2C shows a schematic structural diagram of a resistive random access memory circuit. As shown in FIG. 2C, the resistive memory circuit includes one or more resistive memory arrays 40 and peripheral circuits. The peripheral circuit includes a word line control circuit, a column selection circuit, an initialization control circuit, a programming control circuit, an erasing control circuit, a reading control circuit, etc.
该字线控制电路与字线WL连接,例如采用逐行扫描的方式在字线WL施加控制电压信号,以在每个扫描周期中对一行存储单元30(即与同一条字线WL连接的存储单元)中的开关器件20进行控制,从而可以选中一行存储单元30。The word line control circuit is connected to the word line WL. For example, a control voltage signal is applied to the word line WL in a row-by-row scanning manner, so that a row of memory cells 30 (that is, the storage connected to the same word line WL) is applied in each scanning period. The switching device 20 in the cell) performs control, so that a row of memory cells 30 can be selected.
该初始化控制电路产生初始化操作电压脉冲V F并通过列选择电路施加到一条或若干条位线BL,以对选中的一个或若干个存储单元30进行初始化操作。 The initialization control circuit generates an initialization operation voltage pulse V F and applies it to one or several bit lines BL through the column selection circuit to perform an initialization operation on the selected one or several memory cells 30.
该编程控制电路产生编程操作电压脉冲(V Set)并通过列选择电路施加到一条或若干条位线BL,以对选中的一个或若干个存储单元30进行编程操作。 The programming control circuit generates a programming operation voltage pulse (V Set ) and applies it to one or several bit lines BL through the column selection circuit to perform a programming operation on the selected one or several memory cells 30.
该擦除控制电路产生擦除操作电压脉冲(V RST)并通过列选择电路施加到一条或若干条源线SL,以对选中的一个或若干个存储单元30进行擦除操作。 The erase control circuit generates an erase operation voltage pulse (V RST ) and applies it to one or several source lines SL through a column selection circuit to perform an erase operation on the selected one or several memory cells 30.
该读取控制电路产生读取操作电压脉冲V Read并通过列选择电路施加到一条或若干条位线BL,以对选中的一个或若干个存储单元30进行读取操作。 The read control circuit generates a read operation voltage pulse V Read and applies it to one or several bit lines BL through the column selection circuit to perform a read operation on the selected one or several memory cells 30.
例如,该列选择电路可以包括地址解码器,并且可以被配置为接收地址信号。该列选择电路可以通过控制器的控制接收要访问的存储单元的列地址例如位线地址,并且对接收到的位线地址进行解码。For example, the column selection circuit may include an address decoder, and may be configured to receive an address signal. The column selection circuit can receive the column address of the memory cell to be accessed, such as the bit line address, under the control of the controller, and decode the received bit line address.
一方面,由于初始化操作电压较高(例如高于6V),因此提供和传输该初始化操作电压的外围电路以及接收该初始化操作电压的阻变存储阵列20需要满足较高的耐压要求。例如,如图2C所示,由于初始化控制电路产生该初始化操作电压并通过列选择电路传输至该阻变存储阵列,因此该初始化控制电路、列选择电路以及阻变存储阵列中的晶体管需要具有较大的尺寸(例如晶体管的沟道区的长度和宽度较大)以满足较高的耐压要求,这不仅提高了电路的尺寸及制作成本,还降低了存储器的读写性能。On the one hand, since the initializing operation voltage is relatively high (for example, higher than 6V), the peripheral circuit that provides and transmits the initializing operation voltage and the resistive memory array 20 that receives the initializing operation voltage need to meet higher withstand voltage requirements. For example, as shown in FIG. 2C, since the initialization control circuit generates the initialization operating voltage and transmits it to the resistive memory array through the column selection circuit, the initialization control circuit, the column selection circuit, and the transistors in the resistive memory array need to have relatively high values. A large size (for example, the length and width of the channel region of the transistor is larger) to meet the higher withstand voltage requirements, which not only increases the size and manufacturing cost of the circuit, but also reduces the read and write performance of the memory.
另一方面,由于阻变器件的差异性,不同阻变器件发生阻值变化所需的初始化时间不同,初始化操作后的电阻值也不同,这种电阻值的差异性将导 致后续改写操作的可靠性变差,存储数据错误率增大。为改善阻变器件后续改写操作的可靠性,需要对该阻变存储阵列中m*n容量的存储单元逐一选择进行初始化操作,通过对初始化操作的电压V F及初始化操作时间(脉冲时间)T F进行精细的控制,从而使得每个阻变器件在初始化操作后的电阻值处于合适的范围。这需要消耗大量的初始化操作时间,并导致测试成本增大。 On the other hand, due to the difference of resistive switching devices, the initialization time required for different resistive switching devices to change the resistance value is different, and the resistance value after the initialization operation is also different. This difference in resistance value will lead to the reliability of subsequent rewriting operations. The performance deteriorates and the error rate of stored data increases. In order to improve the reliability of the subsequent rewriting operation of the resistive switching device, it is necessary to select the memory cells of m*n capacity in the resistive switching memory array one by one to perform the initialization operation, through the initialization operation voltage V F and the initialization operation time (pulse time) T F performs fine control, so that the resistance value of each resistive switching device after the initialization operation is in a proper range. This requires a lot of initialization operation time and leads to increased testing costs.
本公开至少一实施例提供一种阻变存储阵列,包括多个块选择电路和多个初始化电路,该多个块选择电路与多条位线一一对应连接,该多个初始化电路也与该多条位线一一对应电连接。该块选择电路配置为响应于块选择电压,将操作电压写入所对应连接的位线;该初始化电路配置为响应于初始化控制电压,将初始化操作电压写入对应连接的位线。At least one embodiment of the present disclosure provides a resistive random access memory array, including a plurality of block selection circuits and a plurality of initialization circuits, the plurality of block selection circuits are connected to a plurality of bit lines in a one-to-one correspondence, and the plurality of initialization circuits are also connected to the The multiple bit lines are electrically connected in a one-to-one correspondence. The block selection circuit is configured to write the operation voltage to the correspondingly connected bit line in response to the block selection voltage; the initialization circuit is configured to write the initialization operation voltage to the correspondingly connected bit line in response to the initialization control voltage.
本公开上述实施例提供的阻变存储阵列,通过分别设置上述块选择电路和初始化电路,将初始化电路及初始化操作电压的传输与其它控制电路及操作电压的传输进行分离,使得该初始化操作电压的传输可以不经过上述列选择电路。例如,在初始化操作过程中,可以通过控制该块选择电路关闭,避免从该初始化电路施加至该位线上的初始化操作电压施加到该列选择电路,从而可以降低该列选择电路的耐压要求。因此,本公开实施例提供的阻变存储阵列有助于缩小该较高的初始化操作电压所涉及的电路范围,降低电路的耐压要求,从而有助于降低电路尺寸及制作成本。此外,通过设置该初始化电路,可以实现整行(一行或多行)存储单元同时进行初始化操作,显著缩短了初始化操作的时间,提高了初始化测试操作的效率,降低了初始化测试成本。In the resistive random access memory array provided by the above-mentioned embodiments of the present disclosure, by separately setting the above-mentioned block selection circuit and the initialization circuit, the transmission of the initialization circuit and the initialization operation voltage is separated from the transmission of other control circuits and the operation voltage, so that the initialization operation voltage is low Transmission may not go through the column selection circuit described above. For example, during the initialization operation, the block selection circuit can be controlled to be turned off to prevent the initialization operation voltage applied from the initialization circuit to the bit line from being applied to the column selection circuit, thereby reducing the withstand voltage requirements of the column selection circuit. . Therefore, the resistive memory array provided by the embodiments of the present disclosure helps to reduce the circuit range involved in the higher initializing operation voltage, reduce the withstand voltage requirements of the circuit, and thereby help reduce the circuit size and manufacturing cost. In addition, by setting the initialization circuit, the entire row (one or more rows) of memory cells can be initialized at the same time, which significantly shortens the time of the initialization operation, improves the efficiency of the initialization test operation, and reduces the cost of the initialization test.
图3为本公开至少一实施例提供的阻变存储阵列50的结构示意图。如图3所示,该阻变存储阵列50包括多个存储单元30、多条位线BL(BL<0>-BL<m-1>)、多条字线WL(WL<0>-WL<n-1>)、多个块选择电路53和多个初始化电路54。该多个存储单元30沿第一方向D1和第二方向D2排列为n个存储单元行和m个存储单元列(m、n大于等于2)。例如,该第一方向D1和第二方向D2分别为该阵列的行方向和列方向。FIG. 3 is a schematic structural diagram of a resistive memory array 50 provided by at least one embodiment of the present disclosure. As shown in FIG. 3, the resistive memory array 50 includes a plurality of memory cells 30, a plurality of bit lines BL (BL<0>-BL<m-1>), and a plurality of word lines WL (WL<0>-WL). <n-1>), a plurality of block selection circuits 53 and a plurality of initialization circuits 54. The plurality of memory cells 30 are arranged into n memory cell rows and m memory cell columns (m and n are greater than or equal to 2) along the first direction D1 and the second direction D2. For example, the first direction D1 and the second direction D2 are the row direction and the column direction of the array, respectively.
该多条位线BL沿该第二方向D2延伸,且与该多个存储单元列一一对应连接,该多条位线BL中的每条与所对应的一个存储单元列的每个存储单元中的阻变器件10的第二电极12电连接。The plurality of bit lines BL extend along the second direction D2 and are connected to the plurality of memory cell columns in a one-to-one correspondence. Each of the plurality of bit lines BL is connected to each memory cell of a corresponding memory cell column. The second electrode 12 of the resistive switching device 10 is electrically connected.
该多条字线WL沿该第一方向D1延伸,且与该多个存储单元行一一对 应连接,该多条字线WL中的每条与所对应的一个存储单元行的每个存储单元的开关器件20电连接。如图3所示,每条字线WL与对应连接的开关器件20的控制端21电连接以提供字线电压V WLThe plurality of word lines WL extend along the first direction D1 and are connected in a one-to-one correspondence with the plurality of memory cell rows. Each of the plurality of word lines WL corresponds to each memory cell of a corresponding memory cell row. The switching device 20 is electrically connected. As shown in FIG. 3, each word line WL is electrically connected to the control terminal 21 of the correspondingly connected switching device 20 to provide a word line voltage V WL .
该多个块选择电路53分别与该多条位线BL一一对应电连接。例如,该多个块选择电路53沿第一方向D1排列,并位于该多个存储单元构成的阵列的第一侧。The plurality of block selection circuits 53 are respectively electrically connected to the plurality of bit lines BL in a one-to-one correspondence. For example, the plurality of block selection circuits 53 are arranged along the first direction D1 and located on the first side of the array formed by the plurality of memory cells.
该多个初始化电路54分别与该多条位线BL一一对应电连接。例如,该多个初始化电路54沿第一方向D1排列,并位于该多个存储单元构成的阵列的第二侧。该第二侧与该第一侧为该存储单元阵列在第二方向D2上的相对两侧。The plurality of initialization circuits 54 are respectively electrically connected to the plurality of bit lines BL in a one-to-one correspondence. For example, the plurality of initialization circuits 54 are arranged along the first direction D1 and located on the second side of the array formed by the plurality of memory cells. The second side and the first side are opposite sides of the memory cell array in the second direction D2.
每个块选择电路53包括控制端530、第一端531和第二端532,该块选择电路53的控制端530配置为接收块选择电压V BS,该块选择电路53的第一端531配置为接收读写操作电压,该块选择电路53的第二端532与该块选择电路53对应连接的位线BL电连接,该块选择电路53配置为响应于该块选择电压V BS,将该读写操作电压写入所对应连接的位线BL。例如,该读写操作电压包括上述的编程操作电压V Set和读取操作电压V ReadEach block selection circuit 53 includes a control terminal 530, a first terminal 531, and a second terminal 532. The control terminal 530 of the block selection circuit 53 is configured to receive the block selection voltage V BS , and the first terminal 531 of the block selection circuit 53 is configured In order to receive the read and write operation voltage, the second terminal 532 of the block selection circuit 53 is electrically connected to the bit line BL corresponding to the block selection circuit 53. The block selection circuit 53 is configured to respond to the block selection voltage V BS to set the The read and write operation voltage is written to the bit line BL corresponding to the connection. For example, the read and write operation voltage includes the above-mentioned program operation voltage V Set and read operation voltage V Read .
例如,该块选择电路53包括第二晶体管T2,该第二晶体管T2的栅极、第一极和第二极分别作为该块选择电路的控制端530、第一端531和第二端532。For example, the block selection circuit 53 includes a second transistor T2, and the gate, first pole, and second pole of the second transistor T2 serve as the control terminal 530, the first terminal 531, and the second terminal 532 of the block selection circuit, respectively.
每个初始化电路54包括控制端540、第一端541和第二端542,该初始化电路54的控制端540配置为接收初始化控制电压V FC,该初始化电路54的第一端541配置为接收初始化操作电压V F,该初始化电路54的第二端542与该初始化电路54对应连接的位线BL电连接,该块选择电路配置为响应于该初始化控制电压V FC,将该初始化操作电压V F写入所对应连接的位线BL。 Each initialization circuit 54 includes a control terminal 540, a first terminal 541, and a second terminal 542. The control terminal 540 of the initialization circuit 54 is configured to receive the initialization control voltage V FC , and the first terminal 541 of the initialization circuit 54 is configured to receive initialization. Operating voltage V F , the second terminal 542 of the initialization circuit 54 is electrically connected to the bit line BL corresponding to the initialization circuit 54, and the block selection circuit is configured to respond to the initialization control voltage V FC , the initialization operation voltage V F Write the corresponding bit line BL connected.
例如,该初始化电路54包括第三晶体管T3(本公开实施例的开关晶体管的一个示例),该第三晶体管T3的栅极、第一极和第二极分别为该初始化电路54的控制端540、第一端541和第二端542。For example, the initialization circuit 54 includes a third transistor T3 (an example of the switching transistor in the embodiment of the present disclosure), and the gate, first electrode, and second electrode of the third transistor T3 are the control terminal 540 of the initialization circuit 54 respectively. , The first end 541 and the second end 542.
例如,如图3所示,该阻变存储阵列50还包括块选择线BSL,该块选线BSL沿第一方向D1延伸,并与该多个块选择电路的控制端连接以提供块选择电压V BSFor example, as shown in FIG. 3, the resistive random access memory array 50 further includes a block selection line BSL, which extends along the first direction D1 and is connected to the control terminals of the plurality of block selection circuits to provide a block selection voltage V BS .
例如,如图3所示,该阻变存储阵列50还包括多条全局位线(global bit  line)GBL(GBL<0>-GBL<m-1>),该多条全局位线GBL沿第二方向D2延伸,并与多个块选择电路53一一对应电连接,每条全局位线GBL与对应连接的块选择电路53的第一端531电连接。For example, as shown in FIG. 3, the resistive random access memory array 50 further includes a plurality of global bit lines GBL (GBL<0>-GBL<m-1>), and the plurality of global bit lines GBL are along the first It extends in two directions D2 and is electrically connected to a plurality of block selection circuits 53 in a one-to-one correspondence. Each global bit line GBL is electrically connected to the first end 531 of the correspondingly connected block selection circuit 53.
本公开至少一实施例还提供一种阻变存储阵列结构,包括多个上述阻变存储阵列50,该多个阻变存储阵列50例如沿该第一方向D1和该第二方向D2阵列排布以构成上级阵列,该上级阵列也包括多行多列,例如,位于上级阵列中同一列中的阻变存储阵列的存储单元列可以彼此对齐,同样,位于同一行中的阻变存储阵列的存储单元行可以彼此对齐。例如,该多条全局位线GBL与该阻变存储阵列结构中的多个阻变存储阵列的同一列存储单元一一对应,每条全局位线GBL与该阻变存储阵列结构中的多个阻变存储阵列在同一列中块选择电路53的第一端531对应连接,也即多个阻变存储阵列中位于同一列的多个块选择电路53的第一端531均与对应的同一条全局位线GBL电连接。At least one embodiment of the present disclosure further provides a resistive random access memory array structure, including a plurality of the above-mentioned resistive random access memory arrays 50, the plurality of resistive random access memory arrays 50, for example, are arrayed along the first direction D1 and the second direction D2. To form an upper-level array, the upper-level array also includes multiple rows and multiple columns. For example, the memory cell columns of the resistive memory array in the same column in the upper-level array can be aligned with each other. Similarly, the memory of the resistive memory array in the same row The rows of cells can be aligned with each other. For example, the multiple global bit lines GBL correspond to the same column of memory cells of the multiple resistive memory arrays in the resistive memory array structure, and each global bit line GBL corresponds to a plurality of memory cells in the resistive memory array structure. The first terminals 531 of the block selection circuits 53 in the same column of the resistive memory array are connected correspondingly, that is, the first terminals 531 of the plurality of block selection circuits 53 in the same column in the plurality of resistive memory arrays are all connected to the same corresponding one. The global bit line GBL is electrically connected.
例如,可以对要访问的阻变存储阵列50施加该块选择电压V BS以对该阻变存储阵列50进行选择。这种分块(分区)操作可以降低电路负载,提高电路的响应速度。 For example, the block selection voltage V BS can be applied to the resistive memory array 50 to be accessed to select the resistive memory array 50. This block (division) operation can reduce the circuit load and improve the response speed of the circuit.
例如,如图3所示,该阻变存储阵列50还包括多条源线(source line)SL(SL<0>-SL<m-1>),该多条源线SL沿第二方向D2延伸,多条源线SL与多个存储单元列一一对应电连接,多条源线SL中的每条与所对应的一个存储单元列的存储单元的开关器件20的第二端23电连接。For example, as shown in FIG. 3, the resistive memory array 50 further includes a plurality of source lines SL (SL<0>-SL<m-1>), and the plurality of source lines SL are along the second direction D2. Extend, a plurality of source lines SL are electrically connected to a plurality of memory cell columns in a one-to-one correspondence, and each of the plurality of source lines SL is electrically connected to the second end 23 of the switching device 20 of the memory cell of a corresponding memory cell column. .
例如,如图3所示,该阻变存储阵列50还包括多条初始化操作线FL和多条初始化控制线FCL,该多条初始化操作线FL和多条初始化控制线FCL沿第一方向D1延伸。该初始化操作线FL与初始化电路54的第一端连接以提供该初始化操作电压V F,该初始化控制线FCL与初始化电路54的控制端连接以提供该初始化控制电压V FCFor example, as shown in FIG. 3, the resistive memory array 50 further includes a plurality of initialization operation lines FL and a plurality of initialization control lines FCL, and the plurality of initialization operation lines FL and the plurality of initialization control lines FCL extend along the first direction D1. . The initialization operation line FL is connected to the first terminal of the initialization circuit 54 to provide the initialization operation voltage V F , and the initialization control line FCL is connected to the control terminal of the initialization circuit 54 to provide the initialization control voltage V FC .
例如,该第一晶体管T1、第二晶体管T2和第三晶体管T3为N型晶体管或P型晶体管。For example, the first transistor T1, the second transistor T2, and the third transistor T3 are N-type transistors or P-type transistors.
例如,当该第三晶体管T3为P型晶体管的情形,由于P型晶体管的阈值电压小于0,在栅极和源极电压差Vgs小于0的情形下导通,因此,施加至该栅极的初始化控制电压V FC可以小于施加至该第一极的初始化操作电压V F,进一步降低了电路的耐压要求。 For example, when the third transistor T3 is a P-type transistor, since the threshold voltage of the P-type transistor is less than 0, it is turned on when the gate and source voltage difference Vgs is less than 0. Therefore, the voltage applied to the gate is The initialization control voltage V FC can be less than the initialization operation voltage V F applied to the first pole, which further reduces the withstand voltage requirements of the circuit.
本公开实施例还提供一种操作方法,用于操作上述阻变存储阵列50。该操作方法包括:在初始化操作阶段,将多个块选择电路关闭,并通过多个初始化电路及多条位线向选中的至少一行存储单元施加初始化操作电压,以将该至少一行存储单元初始化。The embodiment of the present disclosure also provides an operating method for operating the resistive random access memory array 50 described above. The operation method includes: in the initialization operation stage, turning off a plurality of block selection circuits, and applying an initialization operation voltage to the selected at least one row of memory cells through a plurality of initialization circuits and a plurality of bit lines to initialize the at least one row of memory cells.
以下以该第一晶体管T1和第二晶体管T2均为N型晶体管、第三晶体管T3为P型晶体管进行说明,然而本公开实施例对于该第一至第三晶体管的类型不作限制,当晶体管的类型发生改变时,相应地调节信号之间的大小关系以使得电路实现相同的功能。The following description assumes that the first transistor T1 and the second transistor T2 are both N-type transistors, and the third transistor T3 is a P-type transistor. However, the embodiments of the present disclosure do not limit the types of the first to third transistors. When the type changes, adjust the size relationship between the signals accordingly to make the circuit achieve the same function.
例如,结合参考图3,在该初始化操作阶段,通过选中的字线WL(例如,对应连接一行或多行存储单元)施加正的字线电压V WL并控制多条源线SL接地,从而使得该一行或多行存储单元30中的开关器件20(第一晶体管T1)开启,也即该一行或多行存储单元被选中。 For example, referring to FIG. 3 in combination, in the initialization operation stage, a positive word line voltage V WL is applied through a selected word line WL (for example, corresponding to one or more rows of memory cells) and a plurality of source lines SL are controlled to be grounded, so that The switching device 20 (first transistor T1) in the one or more rows of memory cells 30 is turned on, that is, the one or more rows of memory cells are selected.
例如,在该初始化操作阶段,通过该块选择线BSL向该块选择电路53施加块选择电压V BS将该块选择电路53关闭。例如,控制块选择线BSL接地从而使得该第二晶体管T2关闭。这样,在该初始化操作阶段的初始化操作过程中,该块选择电路关闭以将该初始化电路及初始化操作电压的传输与其它控制电路及操作电压的传输进行分离,从而缩小了该初始化操作电压所涉及的电路范围,降低了该电路的耐压要求和尺寸。 For example, in the initialization operation stage, the block selection circuit 53 is turned off by applying the block selection voltage V BS to the block selection circuit 53 through the block selection line BSL. For example, the control block selection line BSL is grounded so that the second transistor T2 is turned off. In this way, during the initialization operation of the initialization operation stage, the block selection circuit is turned off to separate the transmission of the initialization circuit and the initialization operation voltage from the transmission of other control circuits and the operation voltage, thereby reducing the amount involved in the initialization operation voltage. The range of the circuit reduces the withstand voltage requirements and size of the circuit.
例如,分别对该初始化操作线FL施加初始化操作电压V F,对该初始化控制线FCL施加初始化控制电压V FC使得第三晶体管T3导通,从而使得初始化电路开启,并将该初始化操作电压V F通过该初始化电路54和多条位线BL传递至该选中的至少一行存储单元的阻变器件10的第二电极12。同时,该阻变器件的第一电极11通过该开启的开关器件20经对应源线SL接地,因此在阻变器件的两端引入了正向的电压差V F,阻变器件被软击穿从而由从初始的高阻态转变为低阻态,从而将选中的至少一行存储单元同时进行初始化(Forming)操作。 For example, the initialization operation voltage V F is applied to the initialization operation line FL, and the initialization control voltage V FC is applied to the initialization control line FCL to turn on the third transistor T3, so that the initialization circuit is turned on, and the initialization operation voltage V F The initialization circuit 54 and the plurality of bit lines BL are transferred to the second electrode 12 of the resistive switching device 10 of the selected at least one row of memory cells. At the same time, the first electrode 11 of the resistive switching device is grounded through the corresponding source line SL through the turned-on switching device 20, so a positive voltage difference V F is introduced at both ends of the resistive switching device, and the resistive switching device is softly broken down. As a result, the initial high-impedance state is changed to the low-impedance state, so that at least one row of selected memory cells is simultaneously initialized (Forming).
例如,该第三晶体管T3为P型晶体管,在该初始化操作阶段,对该初始化操作线FL施加初始化操作电压V F,对该初始化控制线FCL施加初始化控制电压V FC,并使得该初始化操作电压V F高于该初始化控制电压V FC,从而使得该第三晶体管T3导通,该初始化电路54开启。例如,该初始化操作电压V F在2V至6V之间。例如,该初始化控制电压V FC的脉冲时间(T F) 在1微秒至10毫秒范围。 For example, the third transistor T3 is a P-type transistor. During the initialization operation phase, the initialization operation voltage V F is applied to the initialization operation line FL, the initialization control voltage V FC is applied to the initialization control line FCL, and the initialization operation voltage V F is higher than the initialization control voltage V FC , so that the third transistor T3 is turned on, and the initialization circuit 54 is turned on. For example, the initialization operation voltage V F is between 2V and 6V. For example, the initialization control voltage V FC of the pulse time (T F) in the range of 1 microsecond to 10 milliseconds.
图4所示为本公开实施例提供的操作方法中初始化操作阶段中不同存储单元同时进行初始化操作过程的波形示意图。FIG. 4 is a schematic waveform diagram of a process of simultaneous initialization operation of different memory cells in the initialization operation stage of the operation method provided by the embodiment of the disclosure.
图4示意性地示出了三个位于同一行但不同列中的存储单元(R1、R2、R3)中的阻变器件在初始化操作过程中的电压和电流的波形示意图。在初始化操作阶段的初期,被选中的存储单元中的阻变器件10电阻值很高,导通电流很小,流过对应的第三晶体管T3的电流也就很小,这时第三晶体管T3工作在线性区,第三晶体管T3的第一极和第二极之间的电压差很小,该初始化操作电压V F可以看作全部施加到该阻变器件10上;随着该初始化操作的进行,在阻变时间(T t),阻变器件10的电阻值变低,导通电流增大,流过第三晶体管T3的电流也增大;当电流增大到第三晶体管T3的饱和电流(I DS,Sat)时,第三晶体管T3进入饱和区,第三晶体管T3的第一极和第二极之间的电压差增大而导通电流维持不变,传递到阻变器件10上的电压也随之下降并最终停止在初始化操作的最低临界电压(V Form,TH),该最低临界电压也即该阻变器件的最低转变电压,当外界电压高于该最低临界电压时,该阻变器件的阻值降低;当外界电压低于该最低临界电压时,该阻变器件的阻值保持不变。该最低临界电压为该阻变器件的固有性质,例如与该阻变器件的材料、工艺、结构等有关。经过上述初始化操作后,该阻变器件10的阻值为该最低临界电压与该饱和电流的比值V Form,TH/I DS,SatFIG. 4 schematically shows the voltage and current waveforms of the resistive switching devices in three memory cells (R1, R2, R3) located in the same row but in different columns during the initialization operation. In the initial stage of the initialization operation, the resistance value of the resistive switching device 10 in the selected memory cell is very high, the conduction current is very small, and the current flowing through the corresponding third transistor T3 is also very small. At this time, the third transistor T3 Working in the linear region, the voltage difference between the first pole and the second pole of the third transistor T3 is very small, the initialization operation voltage V F can be regarded as all applied to the resistive switching device 10; During the resistance switching time (T t ), the resistance value of the resistance switching device 10 becomes lower, the conduction current increases, and the current flowing through the third transistor T3 also increases; when the current increases to the saturation of the third transistor T3 When the current (I DS, Sat ), the third transistor T3 enters the saturation region, the voltage difference between the first pole and the second pole of the third transistor T3 increases, and the conduction current remains unchanged, and is transmitted to the resistive switching device 10 The voltage on the upper side also drops and eventually stops at the lowest threshold voltage (V Form, TH ) of the initialization operation. The lowest threshold voltage is also the lowest transition voltage of the resistive switching device. When the external voltage is higher than the lowest threshold voltage, The resistance value of the resistive switching device is reduced; when the external voltage is lower than the minimum threshold voltage, the resistance value of the resistive switching device remains unchanged. The lowest threshold voltage is an inherent property of the resistive switching device, for example, it is related to the material, process, and structure of the resistive switching device. After the above-mentioned initialization operation, the resistance value of the resistive switching device 10 is the ratio of the lowest threshold voltage to the saturation current V Form,TH / IDS,Sat .
由此可见,本公开实施例提供的操作方法通过引入初始化电路,可以限制施加在被选中的存储单元中的阻变器件10两端的电压和最大导通电流,也即限定该阻变器件的经过初始化操作后的阻值。因此,尽管同时选中进行初始化操作的位于一行或多行中的多个存储单元由于结构、材料、工艺等的差异而导致发生阻值变化所需要的时间不同,然而它们最终达到的电阻值相同或相近,存储单元的一致性和可靠性得到明显改善;相对于逐个操作,初始化操作时间大大缩短。It can be seen that, by introducing an initialization circuit, the operating method provided by the embodiments of the present disclosure can limit the voltage and the maximum conduction current applied to the resistive switching device 10 in the selected memory cell, that is, limit the passage of the resistive switching device. The resistance value after the initialization operation. Therefore, although multiple memory cells located in one or more rows that are selected for initialization at the same time require different resistance values due to differences in structure, material, process, etc., they ultimately reach the same resistance value or Similar, the consistency and reliability of the storage unit have been significantly improved; compared to the operation one by one, the initialization operation time is greatly shortened.
例如,如图4所示,位于同一行但不同列中的存储单元R1、R2、R3的阻变时间依次增大(推迟),但阻变器件10最终达到相同的阻值V Form,TH/I DS,Sat,具有一致性。 For example, as shown in FIG. 4, the resistance switching time of memory cells R1, R2, R3 located in the same row but in different columns is increased (postponed) sequentially, but the resistance switching device 10 finally reaches the same resistance value V Form,TH / I DS, Sat , have consistency.
例如,通过上述操作方法,可以通过对该第三晶体管T3的饱和电流I DS,Sat进行设置,从而设置该阻变器件经该初始化操作后的阻值。例如,初始化操 作对后续Set/Reset操作的可靠性会带来造成很大影响,如果初始化操作后阻变器件电阻值太高,后续Set操作的可靠性会变差;反之,如果初始化操作后阻变器件电阻值太低,后续Reset操作的可靠性变差。因此,上述操作方法可以对存储单元中的阻变器件经该初始化操作后的阻值进行精细地控制,使得该阻变器件在初始化操作后的电阻值处于合适的范围,从而改善后续Set及Reset改写操作的可靠性。例如,该阻值位于该阻变器件初始化操作后的写操作中的最大电阻(对应高阻态)与最小电阻(对应低阻态)之间。 For example, through the above operation method, the saturation current IDS,Sat of the third transistor T3 can be set to set the resistance value of the resistive switching device after the initialization operation. For example, the initialization operation will have a great impact on the reliability of the subsequent Set/Reset operation. If the resistance value of the resistive switching device is too high after the initialization operation, the reliability of the subsequent Set operation will become worse; on the contrary, if the resistance after the initialization operation is The resistance value of the variable device is too low, and the reliability of the subsequent Reset operation deteriorates. Therefore, the above operation method can finely control the resistance value of the resistive switching device in the memory cell after the initialization operation, so that the resistance value of the resistive switching device after the initialization operation is in a proper range, thereby improving subsequent Set and Reset. The reliability of the rewrite operation. For example, the resistance value is located between the maximum resistance (corresponding to the high resistance state) and the minimum resistance (corresponding to the low resistance state) in the write operation after the initialization operation of the resistive switching device.
与传统的逐位进行初始化操作的技术相比,本公开实施例提出的阻变存储阵列及其操作方法,可以在不牺牲存储单元一致性和可靠性的情况下,实现一整行或多行存储单元同时进行初始化操作,显著缩短了初始化操作的时间,提高了初始化测试操作的效率,降低了初始化测试成本。Compared with the traditional bit-by-bit initialization operation technology, the resistive memory array and its operation method proposed by the embodiments of the present disclosure can realize one or more rows without sacrificing the consistency and reliability of the memory cells. The storage unit performs the initialization operation at the same time, which significantly shortens the time of the initialization operation, improves the efficiency of the initialization test operation, and reduces the cost of the initialization test.
此外,由于初始化操作时间变短,存储阵列受初始化操作电压应力时间变短,存储单元的开关器件可以采用耐压要求在3V以下的低压MOSFET晶体管进行设计,大大降低了存储阵列的面积和制造成本。In addition, due to the shorter initialization operation time, the memory array is subject to the voltage stress of the initialization operation to shorten the time, and the switching devices of the memory cell can be designed with low voltage MOSFET transistors with a withstand voltage below 3V, which greatly reduces the area and manufacturing cost of the memory array. .
例如,该操作方法还包括编程操作阶段和擦除操作阶段,在该编程操作阶段,选中的存储单元中的阻变器件被施加正向电压从而实现对该选中的存储单元的编程操作;在该擦除操作阶段,选中的存储单元中的阻变器件被施加反向电压从而实现对该选中的存储单元的擦除操作。该阻变器件经过该编程操作阻值由高变低,经过该擦除操作阻值由低变高。For example, the operation method further includes a programming operation stage and an erasing operation stage. In the programming operation stage, the resistive switching device in the selected memory cell is applied with a forward voltage to realize the programming operation of the selected memory cell; In the erasing operation stage, a reverse voltage is applied to the resistive switching device in the selected memory cell to realize the erasing operation of the selected memory cell. The resistance of the resistive switching device changes from high to low after the programming operation, and changes from low to high after the erase operation.
例如,该选中的存储单元为该编程操作阶段中要进行编程操作的存储单元,例如为一行存储单元中的一个或多个。For example, the selected memory cell is a memory cell to be programmed in the programming operation stage, for example, one or more memory cells in a row.
例如,结合参考图3,通过块选择管和位线向选中的存储单元的阻变器件的第二电极(正电极)施加位线电压,并通过源线和开关器件向选中的存储单元的阻变器件的第一电极(负电极)施加源线电压,通过控制位线电压和源线电压的大小,将该阻变器件进行正偏或反偏,从而对选中的存储单元进行编程操作或擦除操作。For example, referring to FIG. 3, the bit line voltage is applied to the second electrode (positive electrode) of the resistive switching device of the selected memory cell through the block selection tube and the bit line, and the resistance of the selected memory cell through the source line and the switching device is applied. The first electrode (negative electrode) of the variable device is applied with a source line voltage. By controlling the size of the bit line voltage and the source line voltage, the resistive switching device is forward or reverse biased, so as to program or erase the selected memory cell. In addition to operations.
例如,为了简化电路,可以将该位线电压和源线电压中较低的电压设置为接地电压,也即控制相应的信号线(位线或源线)接地;相应地,将该较高的电压(编程操作电压或擦除操作电压)设计为正电压。For example, in order to simplify the circuit, the lower voltage of the bit line voltage and the source line voltage can be set as the ground voltage, that is, the corresponding signal line (bit line or source line) can be controlled to be grounded; accordingly, the higher The voltage (program operation voltage or erase operation voltage) is designed to be a positive voltage.
例如,在该编程操作阶段,该位线电压为该编程操作电压;在该擦除操作阶段,该源线电压为该擦除操作电压。For example, in the programming operation stage, the bit line voltage is the programming operation voltage; in the erasing operation stage, the source line voltage is the erasing operation voltage.
以下结合图3对本公开实施例提供的操作方法进行示例性说明。The operation method provided by the embodiment of the present disclosure will be exemplarily described below in conjunction with FIG. 3.
结合参考图3,在编程操作阶段,多个初始化电路关闭,块选择电路开启;通过至少一个块选择电路53和至少一条位线BL向选中的存储单元施加正的编程操作电压V Set,并将选中的存储单元对应的源线SL控制为接地,从而对该阻变器件施加正向电压以对该存储单元进行编程操作。 3, in the programming operation stage, multiple initialization circuits are turned off, and the block selection circuit is turned on; at least one block selection circuit 53 and at least one bit line BL apply a positive programming operation voltage V Set to the selected memory cell, and The source line SL corresponding to the selected memory cell is controlled to be grounded, so that a forward voltage is applied to the resistive switching device to perform a programming operation on the memory cell.
例如,第二晶体管T2为N型,将正的块选择电压V BS施加到选中的阻变存储阵列的块选择线,将编程操作电压V Set施加到至少一条全局位线GBL从而将对应的至少一个块选择电路开启,并将该编程操作电压V Set传递至对应的位线BL并施加至选中的存储单元的阻变器件的第二电极12。 For example, the second transistor T2 is of an N-type, a positive block selection voltage V BS is applied to the block selection line of the selected resistive memory array, and the program operation voltage V Set is applied to at least one global bit line GBL to reduce the corresponding at least A block selection circuit is turned on, and the programming operation voltage V Set is transferred to the corresponding bit line BL and applied to the second electrode 12 of the resistive switching device of the selected memory cell.
例如,将字线电压V WL通过选中字线WL(对应连接选中的存储单元)施加到一行存储单元30中的开关器件20(第一晶体管T1)的控制端,并将源线电压施加到选中的存储单元所对应的源线SL。例如,该第一晶体管T1为N型晶体管,该字线电压V WL为正电压,该源线SL接地,从而将该行存储单元中的选中的存储单元中的开关器件开启,该阻变器件的第一电极11接地。 For example, the word line voltage V WL is applied to the control terminal of the switching device 20 (first transistor T1) in a row of memory cells 30 through the selected word line WL (corresponding to the selected memory cell), and the source line voltage is applied to the selected The source line SL corresponding to the memory cell. For example, the first transistor T1 is an N-type transistor, the word line voltage V WL is a positive voltage, and the source line SL is grounded, so that the switching device in the selected memory cell in the row of memory cells is turned on, and the resistive switching device The first electrode 11 is grounded.
例如,该编程操作电压V Set的大小在1.2V-3V之间,脉冲时间在1纳秒至10微秒之间。 For example, the magnitude of the programming operation voltage V Set is between 1.2V and 3V, and the pulse time is between 1 nanosecond and 10 microseconds.
例如,该操作方法还包括:在擦除操作阶段,多个初始化电路关闭,块选择电路开启;通过源线SL向选中的存储单元施加正的擦除操作电压V RST,并通过至少一个块选择电路53控制选中的存储单元所对应的位线BL接地,从而对该阻变器件施加反向电压以对该存储单元进行擦除操作。 For example, the operation method further includes: in the erasing operation phase, multiple initialization circuits are turned off, and the block selection circuit is turned on; applying a positive erase operation voltage V RST to the selected memory cell through the source line SL, and selecting at least one block The circuit 53 controls the bit line BL corresponding to the selected memory cell to be grounded, thereby applying a reverse voltage to the resistive switching device to perform an erase operation on the memory cell.
例如,第二晶体管T2为N型,将正的块选择电压V BS施加到一个选中阻变存储阵列的块选择线,并将至少一条全局位线GBL接地从而将对应的至少一个块选择电路开启,并将该选中的存储单元的阻变器件的第二电极12接地。 For example, the second transistor T2 is of an N-type, a positive block selection voltage V BS is applied to a block selection line of the resistive random access memory array, and at least one global bit line GBL is grounded to turn on the corresponding at least one block selection circuit , And ground the second electrode 12 of the resistive switching device of the selected memory cell.
例如,将正的字线电压V WL通过选中字线WL(对应连接选中的存储单元)施加到一行存储单元30中的开关器件20(第一晶体管T1)的控制端,并将该擦除操作电压V RST施加到至少一条源线SL从而将选中的存储单元的开关器件开启,该擦除操作电压V RST传递至该选中的存储单元的阻变器件的第一电极11。 For example, the positive word line voltage V WL is applied to the control terminal of the switching device 20 (first transistor T1) in a row of memory cells 30 through the selected word line WL (corresponding to the selected memory cell), and the erase operation The voltage V RST is applied to at least one source line SL to turn on the switching device of the selected memory cell, and the erase operation voltage V RST is transferred to the first electrode 11 of the resistive switching device of the selected memory cell.
例如,该擦除操作电压V RST的大小在1.2V-3V之间,脉冲时间在1纳秒 至10微秒之间。 For example, the magnitude of the erase operation voltage V RST is between 1.2V and 3V, and the pulse time is between 1 nanosecond and 10 microseconds.
例如,该操作方法还包括读取操作阶段。例如在该读取操作阶段,多个初始化电路关闭,至少一个块选择电路(对应连接选中的存储单元)开启,从而对选中的存储单元进行读取操作。For example, the operation method also includes a read operation phase. For example, during the read operation stage, multiple initialization circuits are turned off, and at least one block selection circuit (corresponding to the selected memory cell) is turned on, thereby performing a read operation on the selected memory cell.
例如,该选中的存储单元为要进行读取操作的存储单元。For example, the selected storage unit is the storage unit to be read.
结合参考图3,例如,第二晶体管T2为N型晶体管,将正的块选择电压V BS施加到一个选中阻变存储阵列的块选择线BSL,并将读取操作电压V Read施加至至少一条全局位线GBL(对应连接选中的存储单元),从而将该至少一个块选择电路开启,并将该读取操作电压V Read通过相应的位线BL传递至选中的存储单元的阻变器件的第二电极12。 With reference to FIG. 3, for example, the second transistor T2 is an N-type transistor, a positive block selection voltage V BS is applied to a block selection line BSL of a selected resistive memory array, and a read operation voltage V Read is applied to at least one block selection line BSL of the resistive random access memory array. The global bit line GBL (corresponding to the selected memory cell), so that the at least one block selection circuit is turned on, and the read operation voltage V Read is transferred to the first resistive switching device of the selected memory cell through the corresponding bit line BL. Two electrodes 12.
例如,将正的字线电压V WL通过选中字线WL(对应连接选中的存储单元)施加到一行存储单元30的开关器件20(第一晶体管T1)的控制端,并将多条源线SL接地,从而将该行存储单元中的选中的存储单元中的开关器件开启,该阻变器件的第一电极11接地。 For example, the positive word line voltage V WL is applied to the control terminal of the switching device 20 (first transistor T1) of a row of memory cells 30 through the selected word line WL (corresponding to the selected memory cell), and the multiple source lines SL Grounding, so that the switching device in the selected memory cell in the row of memory cells is turned on, and the first electrode 11 of the resistive switching device is grounded.
在选中的存储单元的阻变器件的电极两端引入了正向的V Read电压差,并产生导通读取电流(I Read)。阻变器件的电阻值高,读取电流小;电阻值低,读取电流大。通过外围读取控制电路检测该读取电流即可完成选中存储单元的读取操作。 A positive V Read voltage difference is introduced across the electrodes of the resistive switching device of the selected memory cell, and a conduction read current (I Read ) is generated. The resistance value of the resistance switching device is high, and the reading current is small; the resistance value is low, and the reading current is large. The reading operation of the selected memory cell can be completed by detecting the reading current through the peripheral reading control circuit.
例如,该读取操作电压V Read在0.1V至1.2V之间,脉冲时间(T Set)在1纳秒至10微秒范围。 For example, the read operation voltage V Read is between 0.1V and 1.2V, and the pulse time (T Set ) is between 1 nanosecond and 10 microseconds.
本公开至少一实施例还提供一种操作方法,用于操作上述阻变存储阵列50。该操作方法包括在初始化操作阶段,对该阻变存储阵列进行多次上述初始化操作。例如,所述初始化操作步骤数目在2至100之间,或更多。例如,由于各存储单元的结构、材料及工艺的差异,各存储单元中的阻变器件及开关器件的性能存在差异。例如,各阻变器件的最低临界电压(V Form,TH)不同,在相同电压条件下各开关器件的饱和电流(I DS,Sat)不同,因此阻变器件在初始化操作后达到的最终阻值不同,存在一个阻值分布。 At least one embodiment of the present disclosure also provides an operating method for operating the resistive random access memory array 50 described above. The operation method includes performing the above-mentioned initialization operations on the resistive random access memory array multiple times during the initialization operation stage. For example, the number of initialization operation steps is between 2 and 100, or more. For example, due to differences in the structure, materials, and processes of each memory cell, the performance of the resistive switching device and the switching device in each memory cell are different. For example, the lowest threshold voltage (V Form, TH ) of each resistive switching device is different, and the saturation current (I DS, Sat ) of each switching device under the same voltage condition is different, so the final resistance value of the resistive switching device after the initial operation Different, there is a resistance distribution.
通过多步骤初始化操作方法,可以通过依次调节每步初始化操作的初始化操作电压(V F)及所述初始化控制电压(V FC),让整行(一行或多行)操作的存储单元的阻变器件的电阻值依次降低,最终达到所需要的目标值。采用该方法获得的阻变器件的电阻值具有更好的精确度和一致性。 Through the multi-step initialization operation method, by sequentially adjusting the initialization operation voltage (V F ) and the initialization control voltage (V FC ) of each initialization operation, the resistance of the entire row (one or more rows) of memory cells can be changed. The resistance value of the device is successively reduced, and finally reaches the required target value. The resistance value of the resistive switching device obtained by this method has better accuracy and consistency.
例如,每次初始化操作后阻变器件的电阻值分布变得更窄,均值更低。例如,每次初始化操作后多个阻变器件的电阻值分布的标准差依次降低,电阻值的加权平均值依次降低。For example, after each initialization operation, the resistance value distribution of the resistive switching device becomes narrower and the average value is lower. For example, after each initialization operation, the standard deviation of the resistance value distribution of the plurality of resistive switching devices is sequentially reduced, and the weighted average value of the resistance values is sequentially reduced.
例如,对于该多步初始化操作,初始化操作电压V F随初始化操作时间顺序依次减小。 For example, for this multi-step initialization operation, the initialization operation voltage V F sequentially decreases with the time sequence of the initialization operation.
通过控制初始化操作电压V F依次减小,可以缓解由于第三晶体管T3的短沟道效应等因素造成的饱和电流增大效应,使得经过初始化操作后阻变器件电阻值分布的标准差降低,从而电阻值分布更窄,更均一。 By controlling the initializing operation voltage V F to decrease sequentially, the saturation current increase effect caused by factors such as the short channel effect of the third transistor T3 can be alleviated, so that the standard deviation of the resistance value distribution of the resistive switching device after the initializing operation is reduced, thereby The resistance value distribution is narrower and more uniform.
例如,对于该多步初始化操作,初始化操作电压与初始化控制电压之差|V F-V FC|随初始化操作时间顺序依次增大。 For example, for this multi-step initialization operation, the difference between the initialization operation voltage and the initialization control voltage |V F- V FC | increases sequentially with the time sequence of the initialization operation.
第三晶体管T3的饱和电流为I ds,sat=α(Vgs-Vth) 2,其中α由该第三晶体管T3的材料及尺寸等参数有关。由于初始化操作电压与初始化控制电压之差(也即Vgs)决定了第三晶体管T3的饱和电流的大小,这种设置可以使得每次初始化操作中的饱和电流I ds,sat依次增大,进而让整行(一行或多行)操作的存储单元的阻变器件的电阻值均值(例如加权平均值)依次降低。 The saturation current of the third transistor T3 is I ds,sat =α(Vgs-Vth) 2 , where α is related to the material and size of the third transistor T3. Since the difference between the initialization operation voltage and the initialization control voltage (that is, Vgs) determines the magnitude of the saturation current of the third transistor T3, this setting can make the saturation current I ds,sat in each initialization operation increase in turn, thereby allowing The average value (for example, weighted average value) of the resistance value of the resistive switching device of the memory cell operating in the entire row (one or more rows) is sequentially decreased.
例如,对于该多步初始化操作,初始化操作的时间T F随初始化操作时间顺序依次减小。 For example, the multi-step initialization operation, initialization operation time T F are sequentially initializing operation decreases with time sequence.
由于阻变器件的电阻值随着初始化操作的进行逐步减小,发生阻值变化所需的初始化时间逐步减小,因此随着初始化操作的进行将多步初始化操作的初始化操作时间依次减小,可以节省电路的功耗。例如,可以将第一步初始化操作的时间设置为最长。Since the resistance value of the resistive switching device gradually decreases as the initialization operation progresses, and the initialization time required to change the resistance value gradually decreases, the initialization operation time of the multi-step initialization operation is sequentially reduced as the initialization operation progresses. Can save the power consumption of the circuit. For example, the time for the first step of the initialization operation can be set to the longest.
例如,该操作方法包括:将所述多个块选择电路关闭,并通过所述多个初始化电路及所述多条位线对选中的至少一行存储单元进行第一初始化操作和第二初始化操作。所述第一初始化操作包括:通过所述多个初始化电路及所述多条位线向选中的至少一行存储单元施加第一初始化操作电压V F1;所述第二初始化操作包括:通过所述多个初始化电路及所述多条位线向选中的至少一行存储单元施加第二初始化操作电压V F2。第一初始化操作先于第二初始化操作。 For example, the operation method includes: turning off the plurality of block selection circuits, and performing a first initialization operation and a second initialization operation on the selected at least one row of memory cells through the plurality of initialization circuits and the plurality of bit lines. The first initialization operation includes: applying a first initialization operation voltage V F 1 to the selected at least one row of memory cells through the plurality of initialization circuits and the plurality of bit lines; the second initialization operation includes: The plurality of initialization circuits and the plurality of bit lines apply the second initialization operation voltage V F 2 to the selected at least one row of memory cells. The first initialization operation precedes the second initialization operation.
例如,所述第一初始化操作电压V F1与所述第二初始化操作电压V F2不同。 For example, the first initialization operation voltage V F 1 is different from the second initialization operation voltage V F 2.
例如,结合参考图3,该第一初始化操作电压和该第二初始化操作电压 均配置为施加至该存储单元的阻变器件的第二电极12(正电极)使得该阻变器件正偏。For example, referring to FIG. 3 in conjunction, the first initialization operation voltage and the second initialization operation voltage are both configured to be applied to the second electrode 12 (positive electrode) of the resistive switching device of the memory cell to make the resistive switching device forward bias.
例如,该第一初始化操作还包括:通过选中的字线WL(对应连接一行或多行选中的存储单元)施加正的字线电压V WL并控制多条源线SL接地,从而使选中的一行或多行存储单元30中的开关器件20(第一晶体管T1)开启。 For example, the first initialization operation further includes: applying a positive word line voltage V WL through the selected word line WL (corresponding to connecting one or more rows of selected memory cells) and controlling the multiple source lines SL to be grounded, thereby making the selected row Or, the switching device 20 (the first transistor T1) in the memory cell 30 of the plurality of rows is turned on.
例如,该第二初始化操作还包括:通过选中的字线WL(对应连接一行或多行选中的存储单元)施加正的字线电压V WL并控制多条源线SL接地,从而使选中的一行或多行存储单元30中的开关器件20(第一晶体管T1)开启。 For example, the second initialization operation further includes: applying a positive word line voltage V WL through the selected word line WL (corresponding to connecting one or more rows of selected memory cells) and controlling the multiple source lines SL to be grounded, thereby making the selected row Or, the switching device 20 (the first transistor T1) in the memory cell 30 of the plurality of rows is turned on.
例如,该第一初始化操作还包括:向该多个初始化电路的控制端施加第一初始化控制电压V FC1以将所述多个初始化电路开启;该第二初始化操作还包括:向该多个初始化控制电路施加第二初始化控制电压V FC2以将所述多个初始化电路开启。 For example, the first initialization operation further includes: applying a first initialization control voltage V FC 1 to the control terminals of the plurality of initialization circuits to turn on the plurality of initialization circuits; the second initialization operation further includes: The initialization control circuit applies a second initialization control voltage V FC 2 to turn on the plurality of initialization circuits.
例如,第一初始化操作电压V F1大于第二初始化操作电压V F2。通过控制初始化操作电压V F依次减小,可以缓解由于第三晶体管T3的短沟道效应等因素造成的饱和电流增大效应,使得经过初始化操作后阻变器件电阻值分布的标准差降低,从而电阻值分布更窄,更均一。 For example, the first initialization operation voltage V F 1 is greater than the second initialization operation voltage V F 2. By controlling the initializing operation voltage V F to decrease sequentially, the saturation current increase effect caused by factors such as the short channel effect of the third transistor T3 can be alleviated, so that the standard deviation of the resistance value distribution of the resistive switching device after the initializing operation is reduced, thereby The resistance value distribution is narrower and more uniform.
例如,第一初始化操作电压述第一初始化控制电压之差|V F1-V FC1|(绝对值)小于第二初始化操作电压与第二初始化控制电压之差|V F2-V FC2|(绝对值)。 For example, the difference between the first initialization operation voltage and the first initialization control voltage |V F 1-V FC 1 | (absolute value) is smaller than the difference between the second initialization operation voltage and the second initialization control voltage |V F 2-V FC 2 | (Absolute value).
第三晶体管T3的饱和电流为I ds,sat=α(Vgs-Vth) 2,其中α由该第三晶体管T3的材料及尺寸等参数有关。由于初始化操作电压与初始化控制电压之差(也即Vgs)决定了第三晶体管T3的饱和电流的大小,这种设置可以使得每次初始化操作中的饱和电流I ds,sat依次增大,进而让整行(一行或多行)操作的存储单元的阻变器件的电阻值均值依次降低。 The saturation current of the third transistor T3 is I ds,sat =α(Vgs-Vth) 2 , where α is related to the material and size of the third transistor T3. Since the difference between the initialization operation voltage and the initialization control voltage (that is, Vgs) determines the magnitude of the saturation current of the third transistor T3, this setting can make the saturation current I ds,sat in each initialization operation increase in turn, thereby allowing The average resistance values of the resistive switching devices of the memory cells operating in a whole row (one or more rows) decrease in order.
例如,第一初始化操作的时间大于第二初始化操作的时间。For example, the time of the first initialization operation is greater than the time of the second initialization operation.
在另一些示例中,第一初始化操作电压述第一初始化控制电压之差|V F1-V FC1|(绝对值)也可以与第二初始化操作电压与第二初始化控制电压之差|V F2-V FC2|(绝对值)相同。 In other examples, the difference between the first initialization operation voltage and the first initialization control voltage |V F 1-V FC 1| (absolute value) may also be the difference between the second initialization operation voltage and the second initialization control voltage |V F 2-V FC 2| (absolute value) are the same.
本公开实施例对于第三晶体管T3的类型不作限制,该第三晶体管T3 可以是P型或N型,根据相应的晶体管类型选择适当的初始化操作电压与初始化控制电压使得初始化电路开启。例如,第三晶体管T3为P型晶体管,第一初始化控制电压V FC1小于第一初始化操作电压V F1以将所述多个初始化电路开启,第二初始化控制电压V F2小于所述第二初始化操作电压V FC2以将所述多个初始化电路开启。 The embodiments of the present disclosure do not limit the type of the third transistor T3. The third transistor T3 may be P-type or N-type, and an appropriate initialization operation voltage and initialization control voltage are selected according to the corresponding transistor type to enable the initialization circuit to turn on. For example, the third transistor T3 is a P-type transistor, the first initialization control voltage V FC 1 is less than the first initialization operation voltage V F 1 to turn on the plurality of initialization circuits, and the second initialization control voltage V F 2 is less than the first initialization operation voltage V F 1. 2. Initializing the operating voltage V FC 2 to turn on the plurality of initialization circuits.
当第三晶体管T3为P型的情形,初始化控制电压V FC小于初始化操作电压V F,当选择一定的初始化操作电压对存储单元进行初始化操作时,将第三晶体管T3设置为P型可以降低电路的耐压要求。 When the third transistor T3 is P-type, the initialization control voltage V FC is less than the initialization operation voltage V F. When a certain initialization operation voltage is selected to initialize the memory cell, setting the third transistor T3 to P type can reduce the circuit The withstand voltage requirements.
例如,该操作方法还包括:在该第二初始化操作后,通过所述多个初始化电路及所述多条位线对选中的至少一行存储单元进行第三初始化操作。该第三初始化操作包括:通过所述多个初始化电路及所述多条位线向选中的至少一行存储单元施加第三初始化操作电压V F3。 For example, the operation method further includes: after the second initialization operation, performing a third initialization operation on the selected at least one row of memory cells through the plurality of initialization circuits and the plurality of bit lines. The third initialization operation includes: applying a third initialization operation voltage V F 3 to the selected at least one row of memory cells through the plurality of initialization circuits and the plurality of bit lines.
例如,第一初始化操作电压V F1、第二初始化操作电压V F2、第三初始化操作电压V F3的大小依次减小。 For example, the magnitudes of the first initialization operation voltage V F 1, the second initialization operation voltage V F 2, and the third initialization operation voltage V F 3 decrease in order.
例如,该第三初始化操作还包括:向该多个初始化控制电路施加第三初始化控制电压V FC3以将所述多个初始化电路开启。 For example, the third initialization operation further includes: applying a third initialization control voltage V FC 3 to the plurality of initialization control circuits to turn on the plurality of initialization circuits.
例如,该第一初始化操作电压V F1、第二初始化操作电压V F2、第三初始化操作电压V F3、第一初始化控制电压V FC1、第二初始化控制电压V FC2、第三初始化控制电压V FC3的大小均在2V到6V之间。 For example, the first initializing operation voltage V F 1, the second initializing operating voltage V F 2, the third initializing operating voltage V F 3, the first initializing control voltage V FC 1, the second initializing control voltage V FC 2, the third The size of the initialization control voltage V FC 3 is between 2V and 6V.
例如,第一初始化操作、第二初始化操作、第三初始化操作的操作时间依次减小。For example, the operation time of the first initialization operation, the second initialization operation, and the third initialization operation are sequentially reduced.
图5示出了本公开至少一实施例提供的一种阻变存储阵列的操作方法的流程图。图5示出了进行三次初始化操作的示例,然而本公开实施例对与初始化操作步骤的次数不作限制。FIG. 5 shows a flowchart of a method for operating a resistive memory array provided by at least one embodiment of the present disclosure. FIG. 5 shows an example of performing three initialization operations, but the embodiment of the present disclosure does not limit the number of initialization operation steps.
结合参考图3和图5,该操作方法包括步骤S1-S4。With reference to FIG. 3 and FIG. 5 in combination, the operation method includes steps S1-S4.
步骤S1:将多个块选择电路关闭。Step S1: Turn off multiple block selection circuits.
例如,通过该块选择线BSL向该块选择电路53施加块选择电压V BS将该块选择电路53关闭。例如,该第二晶体管T2为N型晶体管,将该块选择线BSL接地,也即该块选择电压V BS为0。 For example, applying the block selection voltage V BS to the block selection circuit 53 through the block selection line BSL turns the block selection circuit 53 off. For example, the second transistor T2 is an N-type transistor, and the block selection line BSL is grounded, that is, the block selection voltage V BS is zero.
通过设置该块选择电路关闭以将该初始化电路及初始化操作电压的传输与其它控制电路及操作电压的传输进行分离,从而缩小了该初始化操作电 压所涉及的电路范围,降低了该电路的耐压要求和尺寸。By setting the block selection circuit off to separate the transmission of the initialization circuit and the initialization operation voltage from the transmission of other control circuits and operation voltages, the range of the circuit involved in the initialization operation voltage is reduced, and the withstand voltage of the circuit is reduced. Requirements and dimensions.
例如,第一晶体管T1为N型晶体管,通过选中的字线WL(对应连接一行或多行选中的存储单元)施加字线电压V WL,并将多条源线SL接地,从而将该一行或多行存储单元30中的开关器件20(第一晶体管T1)开启,也即将该一行或多行存储单元选中。该开关器件20的第一电极21接地。 For example, the first transistor T1 is an N-type transistor, and the word line voltage V WL is applied through the selected word line WL (corresponding to the memory cells selected in one or more rows), and the multiple source lines SL are grounded, so that the one row or The switching device 20 (the first transistor T1) in the multiple rows of memory cells 30 is turned on, that is, the one or more rows of memory cells are selected. The first electrode 21 of the switching device 20 is grounded.
步骤S2:通过多个初始化电路及多条位线对选中的至少一行存储单元进行第一次初始化操作。Step S2: Perform a first initialization operation on the selected at least one row of memory cells through a plurality of initialization circuits and a plurality of bit lines.
例如,该第一初始化操作包括分别对该初始化操作线FL施加第一初始化操作电压V F1,对该初始化控制线FCL施加第二初始化控制电压V FC2使得初始化电路开启并将该初始化操作电压V F1传递至该开关器件的第二电极22。该阻变器件20的两端存在正向的电压差V F1,其电阻值从初始值下降至第一阻值。 For example, the first initialization operation includes respectively applying a first initialization operation voltage V F 1 to the initialization operation line FL, and applying a second initialization control voltage V FC 2 to the initialization control line FCL so that the initialization circuit is turned on and the initialization operation voltage is applied. V F 1 is transferred to the second electrode 22 of the switching device. There is a positive voltage difference V F 1 at both ends of the resistive switching device 20, and its resistance value drops from the initial value to the first resistance value.
例如,该第三晶体管T3为P型晶体管,在该初始化操作阶段,该第一初始化操作电压V F大于该第一初始化控制电压V FC,从而使得该第三晶体管T3导通,该初始化电路54开启。例如,该第一初始化操作电压V F1在2V至6V之间。例如,该第一初始化控制电压V FC1的脉冲时间(T F)在1微秒至10毫秒范围。 For example, the third transistor T3 is a P-type transistor. During the initialization operation phase, the first initialization operation voltage V F is greater than the first initialization control voltage V FC , so that the third transistor T3 is turned on, and the initialization circuit 54 Turn on. For example, the first initializing operation voltage V F 1 is between 2V and 6V. For example, the first initialization control voltage V FC 1 pulse time (T F) in the range of 1 microsecond to 10 milliseconds.
例如,该多个阻变器件在第一次初始化操作后具有第一阻值分布以及第一平均阻值(例如为加权平均值)。该第一阻值分布的标准差相较于初始阻值分布的标准差降低,且该第一平均阻值相较于初始平均阻值降低。For example, the plurality of resistive switching devices have a first resistance distribution and a first average resistance value (for example, a weighted average value) after the first initialization operation. The standard deviation of the first resistance distribution is lower than the standard deviation of the initial resistance distribution, and the first average resistance is lower than the initial average resistance.
步骤S3:通过多个初始化电路及多条位线对选中的至少一行存储单元进行第二次初始化操作。Step S3: Perform a second initialization operation on the selected at least one row of memory cells through a plurality of initialization circuits and a plurality of bit lines.
例如,该第二次初始化操作包括:分别对该初始化操作线FL施加初始化操作电压V F2,对该初始化控制线FCL施加初始化控制电压V FC2使得初始化电路开启并将该初始化操作电压V F2传递至该开关器件的第二电极22。该阻变器件20的两端存在正向的电压差V F2,其电阻值从第一阻值下降至第二阻值。 For example, the second initialization operation includes: respectively applying the initialization operation voltage V F 2 to the initialization operation line FL, and the initialization control voltage V FC 2 to the initialization control line FCL so that the initialization circuit is turned on and the initialization operation voltage V F is applied. 2 is transferred to the second electrode 22 of the switching device. There is a positive voltage difference V F 2 at both ends of the resistive switching device 20, and its resistance value drops from the first resistance value to the second resistance value.
例如,该第三晶体管T3为P型晶体管,在该初始化操作阶段,该第二初始化操作电压V F2大于该第二初始化控制电压V FC2,从而使得该第三晶体管T3导通,该初始化电路54开启。例如,该第二初始化操作电压V F2在2V至6V之间。例如,该第二初始化控制电压V FC2的脉冲时间在1微秒 至10毫秒范围。 For example, the third transistor T3 is a P-type transistor. During the initializing operation phase, the second initializing operation voltage V F 2 is greater than the second initializing control voltage V FC 2, so that the third transistor T3 is turned on. The circuit 54 is turned on. For example, the second initializing operation voltage V F 2 is between 2V and 6V. For example, the pulse time of the second initialization control voltage V FC 2 is in the range of 1 microsecond to 10 milliseconds.
例如,该多个阻变器件在第二次初始化操作后具有第二阻值分布以及第二平均阻值(例如为加权平均值)。该第二阻值分布的标准差小于该第一阻值分布的标准差,也即经过第二次初始化操作该阻值分布更加收敛。例如,该第二平均阻值小于该第一平均阻值。For example, the plurality of resistive switching devices have a second resistance distribution and a second average resistance value (for example, a weighted average value) after the second initialization operation. The standard deviation of the second resistance distribution is smaller than the standard deviation of the first resistance distribution, that is, the resistance distribution is more convergent after the second initialization operation. For example, the second average resistance value is less than the first average resistance value.
步骤S4:通过多个初始化电路及多条位线对选中的至少一行存储单元进行第三次初始化操作。Step S4: Perform a third initialization operation on the selected at least one row of memory cells through a plurality of initialization circuits and a plurality of bit lines.
例如,该第三次初始化操作包括:分别对该初始化操作线FL施加初始化操作电压V F3,对该初始化控制线FCL施加初始化控制电压V FC3使得初始化电路开启并将该初始化操作电压V F3传递至该开关器件的第二电极22。该阻变器件20的两端存在正向的电压差V F3,其电阻值从第二阻值下降至第三阻值。 For example, the third initialization operation includes: respectively applying the initialization operation voltage V F 3 to the initialization operation line FL, and the initialization control voltage V FC 3 to the initialization control line FCL so that the initialization circuit is turned on and the initialization operation voltage V F is applied. 3 is transferred to the second electrode 22 of the switching device. There is a positive voltage difference V F 3 between the two ends of the resistive switching device 20, and the resistance value thereof drops from the second resistance value to the third resistance value.
例如,该第三晶体管T3为P型晶体管,在该初始化操作阶段,该第三初始化操作电压V F3大于该第三初始化控制电压V FC3,从而使得该第三晶体管T3导通,该初始化电路54开启。例如,该第三初始化操作电压V F3在2V至6V之间。例如,该第三初始化控制电压V FC3的脉冲时间在1微秒至10毫秒范围。 For example, the third transistor T3 is a P-type transistor. During the initialization operation phase, the third initialization operation voltage V F 3 is greater than the third initialization control voltage V FC 3, so that the third transistor T3 is turned on, and the initialization The circuit 54 is turned on. For example, the third initializing operation voltage V F 3 is between 2V and 6V. For example, the pulse time of the third initialization control voltage V FC 3 is in the range of 1 microsecond to 10 milliseconds.
例如,该多个阻变器件在第三次初始化操作后具有第三阻值分布以及第三平均阻值(例如为加权平均值)。该第三阻值分布的标准差小于该第二阻值分布的标准差,也即经过第三次初始化操作该阻值分布更加收敛。该第三平均阻值小于该第二平均阻值。For example, the plurality of resistive switching devices have a third resistance distribution and a third average resistance value (for example, a weighted average value) after the third initialization operation. The standard deviation of the third resistance distribution is smaller than the standard deviation of the second resistance distribution, that is, the resistance distribution is more convergent after the third initialization operation. The third average resistance value is less than the second average resistance value.
例如,第一初始化操作电压V F1、第二初始化操作电压V F2、第三初始化操作电压V F3的大小依次减小。 For example, the magnitudes of the first initialization operation voltage V F 1, the second initialization operation voltage V F 2, and the third initialization operation voltage V F 3 decrease in order.
本公开至少一实施例还提供一种阻变存储器电路,该阻变存储器电路包括上述阻变存储阵列50。图6为本公开至少一实施例提供的阻变存储器电路60的结构示意图。At least one embodiment of the present disclosure also provides a resistive random access memory circuit. The resistive random access memory circuit includes the above-mentioned resistive random access memory array 50. FIG. 6 is a schematic structural diagram of a resistive random access memory circuit 60 provided by at least one embodiment of the present disclosure.
例如,该阻变存储器电路60还包括初始化控制电路61,该初始化控制电路61配置为与该多个初始化电路54电连接以提供该初始化操作电压V F和该初始化控制电压V FCFor example, the resistive random access memory circuit 60 further includes an initialization control circuit 61 configured to be electrically connected to the plurality of initialization circuits 54 to provide the initialization operation voltage V F and the initialization control voltage V FC .
例如,如图6所示,该阻变存储器电路60还包括列选择电路62,该列选择电路62配置为向该阻变存储阵列50提供该读写操作电压。例如,该读 写操作电压包括编程操作电压V Set、擦除操作电压V RST和读取操作电压V ReadFor example, as shown in FIG. 6, the resistive random access memory circuit 60 further includes a column selection circuit 62 configured to provide the resistive random access memory array 50 with the read and write operation voltage. For example, the reading and writing operation voltage includes a programming operation voltage V Set , an erasing operation voltage V RST and a reading operation voltage V Read .
例如,该编程操作电压V Set和读取操作电压V Read通过位线BL提供给该存储阻变阵列,该擦除操作电压V RST通过源线SL提供给该存储阻变阵列。然而本公开实施例对此不作限制。在另一些示例中,例如,该编程操作电压V Set、擦除操作电压V RST和读取操作电压V Read可以均通过位线BL提供给该存储阻变阵列。 For example, the program operation voltage V Set and the read operation voltage V Read are provided to the memory resistive array through the bit line BL, and the erase operation voltage V RST is provided to the memory resistive array through the source line SL. However, the embodiment of the present disclosure does not limit this. In other examples, for example, the program operation voltage V Set , the erase operation voltage V RST, and the read operation voltage V Read may all be provided to the memory resistive variable array through the bit line BL.
例如,该列选择电路62与多条全局位线GBL电连接。For example, the column selection circuit 62 is electrically connected to a plurality of global bit lines GBL.
例如,如图6所示,该阻变存储器电路60还包括编程控制电路63、擦除控制电路64和读取控制电路65。For example, as shown in FIG. 6, the resistive random access memory circuit 60 further includes a programming control circuit 63, an erasing control circuit 64 and a reading control circuit 65.
例如,该编程控制电路63与该列选择电路62连接,并配置为通过该列选择电路62向该阻变存储阵列60提供该编程操作电压V Set。例如,在编程操作阶段,该编程控制电路63通过该列选择电路62和至少一条位线BL向选中的存储单元施加编程操作电压V Set,从而对该阻变器件施加正向电压以对该存储单元进行编程操作。 For example, the programming control circuit 63 is connected to the column selection circuit 62 and is configured to provide the programming operation voltage V Set to the resistive memory array 60 through the column selection circuit 62. For example, in the programming operation stage, the programming control circuit 63 applies the programming operation voltage V Set to the selected memory cell through the column selection circuit 62 and at least one bit line BL, thereby applying a forward voltage to the resistive switching device to the memory cell. The unit is programmed.
例如,该擦除控制电路64与该列选择电路62连接,并配置为通过该列选择电路62向该阻变存储阵列60提供该擦除操作电压V RST。例如,在擦除操作阶段,该擦除控制电路64通过该列选择电路62和至少一条源线SL向选中的存储单元施加擦除操作电压V RST,以对该阻变器件施加反向电压以对该存储单元进行擦除操作。 For example, the erasing control circuit 64 is connected to the column selection circuit 62 and is configured to provide the erasing operation voltage V RST to the resistive memory array 60 through the column selection circuit 62. For example, in the erasing operation stage, the erasing control circuit 64 applies an erasing operation voltage V RST to the selected memory cell through the column selection circuit 62 and at least one source line SL to apply a reverse voltage to the resistive switching device. Perform an erase operation on the memory cell.
例如,该读取控制电路65与该列选择电路62连接,并配置为通过所述列选择电路62向阻变存储阵列60提供读取操作电压V Read。例如,在读取操作阶段,该读取控制电路65通过该列选择电路62和至少一条位线BL向选中的存储单元施加读取操作电压V Read,以对该阻变器件施加正向电压以进行读取操作。 For example, the read control circuit 65 is connected to the column selection circuit 62 and is configured to provide a read operation voltage V Read to the resistive memory array 60 through the column selection circuit 62. For example, in the read operation stage, the read control circuit 65 applies the read operation voltage V Read to the selected memory cell through the column selection circuit 62 and at least one bit line BL to apply a forward voltage to the resistive switching device. Perform a read operation.
例如,如图6所示,该阻变存储器电路60还包括块选择控制电路66和字线控制电路67。For example, as shown in FIG. 6, the resistive random access memory circuit 60 further includes a block selection control circuit 66 and a word line control circuit 67.
例如,该块选择控制电路66配置为与该块选择线BSL连接以向该阻变存储阵列50提供该块选择电压V BSFor example, the block selection control circuit 66 is configured to be connected to the block selection line BSL to provide the block selection voltage V BS to the resistive random access memory array 50.
例如,该字线控制电路67配置为向该阻变存储阵列50提供该字线电压V WL。例如,该字线控制电路67与多条字线WL电连接。 For example, the word line control circuit 67 is configured to provide the word line voltage V WL to the resistive memory array 50. For example, the word line control circuit 67 is electrically connected to a plurality of word lines WL.
更多细节可以参考前述关于操作方法实施例的描述,此处不再赘述。For more details, please refer to the foregoing description of the operation method embodiment, which will not be repeated here.
本公开实施例还提供一种阻变存储阵列,每个存储单元行的存储单元的开关器件的第二端彼此电连接。The embodiments of the present disclosure also provide a resistive random access memory array, and the second ends of the switching devices of the memory cells of each memory cell row are electrically connected to each other.
图7A为本公开至少另一实施例提供的阻变存储阵列70的示意图。如图7A所示,该阻变存储阵列70包括多个存储单元30、多条位线BL、多条字线WL以及多个块选择电路53。FIG. 7A is a schematic diagram of a resistive memory array 70 provided by at least another embodiment of the present disclosure. As shown in FIG. 7A, the resistive memory array 70 includes a plurality of memory cells 30, a plurality of bit lines BL, a plurality of word lines WL, and a plurality of block selection circuits 53.
该多个存储单元30沿第一方向D1和第二方向D2排列为n个存储单元行和m个存储单元列(m、n大于等于2),每个存储单元30包括阻变器件10和开关器件20;该阻变器件10包括第一电极11和第二电极12,该开关器件20包括控制端21、第一端22和第二端23;该阻变器件10的第一电极11与该开关器件20的第一端22电连接。沿第一方向D1的每个存储单元行的存储单元30中的开关器件20的第二端23彼此电连接。The plurality of memory cells 30 are arranged into n memory cell rows and m memory cell columns (m and n are greater than or equal to 2) along the first direction D1 and the second direction D2, and each memory cell 30 includes a resistive switching device 10 and a switch The device 20; the resistive switching device 10 includes a first electrode 11 and a second electrode 12, the switching device 20 includes a control terminal 21, a first terminal 22, and a second terminal 23; the first electrode 11 of the resistive switching device 10 and the The first terminal 22 of the switching device 20 is electrically connected. The second ends 23 of the switching devices 20 in the memory cells 30 of each memory cell row along the first direction D1 are electrically connected to each other.
该多条位线BL沿第二方向D2延伸,且与多列存储单元30一一对应连接,多条位线BL中的每条与所对应的一列存储单元30中阻变器件10的第二电极12电连接。The plurality of bit lines BL extend along the second direction D2 and are connected to the plurality of columns of memory cells 30 in a one-to-one correspondence. Each of the plurality of bit lines BL is connected to the second row of the resistive switching device 10 in the corresponding column of memory cells 30. The electrode 12 is electrically connected.
该多条字线WL沿第一方向D1延伸,且与多行存储单元30一一对应连接,多条字线WL中的每条与所对应的一行存储单元30中的存储单元的开关器件20的控制端21电连接。The plurality of word lines WL extend along the first direction D1 and are connected to the plurality of rows of memory cells 30 in a one-to-one correspondence. Each of the plurality of word lines WL is connected to the switching device 20 of the memory cell in the corresponding row of memory cells 30. The control terminal 21 is electrically connected.
该多个块选择电路53分别与多条位线BL一一对应电连接,每个块选择电路53包括控制端530、第一端531和第二端532,块选择电路53的控制端530配置为接收块选择电压V BS,块选择电路53的第一端531配置为接收读写操作电压,块选择电路53的第二端532与该块选择电路53对应连接的位线BL电连接,该块选择电路配置为响应于该块选择电压V BS,将该读写操作电压写入所对应连接的位线BL。例如,该读写操作电压包括编程操作电压V Set、擦除操作电压V RST和读取操作电压V ReadThe plurality of block selection circuits 53 are electrically connected to a plurality of bit lines BL in a one-to-one correspondence. Each block selection circuit 53 includes a control terminal 530, a first terminal 531, and a second terminal 532. The control terminal 530 of the block selection circuit 53 is configured To receive the block selection voltage V BS , the first terminal 531 of the block selection circuit 53 is configured to receive read and write operation voltages, and the second terminal 532 of the block selection circuit 53 is electrically connected to the bit line BL corresponding to the block selection circuit 53. The block selection circuit is configured to, in response to the block selection voltage V BS , write the read and write operation voltage to the correspondingly connected bit line BL. For example, the reading and writing operation voltage includes a programming operation voltage V Set , an erasing operation voltage V RST and a reading operation voltage V Read .
如图7A所示,在第一方向D1上每行存储单元30中的开关器件20的第二端23彼此直接电连接为同一电位,而不必在第二方向D2上设置用于对一行存储单元中的各开关器件的第二端23的电位进行选择的源线。这种设置有助于降低沿第二方向的走线的密度,简化制作工艺并提高良率。As shown in FIG. 7A, in the first direction D1, the second terminals 23 of the switching devices 20 in each row of memory cells 30 are directly and electrically connected to each other at the same potential, and it is not necessary to provide a second end 23 for matching a row of memory cells in the second direction D2. The potential of the second terminal 23 of each switching device in the source line is selected. This arrangement helps to reduce the density of the traces along the second direction, simplify the manufacturing process and improve the yield.
例如,如图7A所示,该阻变存储阵列还可以包括多条源线SL(SL<0>-SL<n/2-1>),该多条源线SL沿第一方向D1延伸,也即与该多条 字线WL平行。该多条源线SL与多个存储单元行对应连接,每个存储单元行的存储单元的开关器件的第二端均通过对应的一条源线SL彼此电连接连接。For example, as shown in FIG. 7A, the resistive memory array may further include a plurality of source lines SL (SL<0>-SL<n/2-1>), and the plurality of source lines SL extend along the first direction D1, That is, it is parallel to the plurality of word lines WL. The multiple source lines SL are correspondingly connected to multiple memory cell rows, and the second ends of the switching devices of the memory cells of each memory cell row are electrically connected to each other through a corresponding source line SL.
例如,该多条源线SL与该多个存储单元行一一对应连接。各存储单元行的存储单元30的开关器件20的第二端23与对应的一条源线SL电连接,通过该源线SL彼此电连接。For example, the multiple source lines SL are connected to the multiple memory cell rows in a one-to-one correspondence. The second end 23 of the switching device 20 of the memory cell 30 of each memory cell row is electrically connected to a corresponding source line SL, and is electrically connected to each other through the source line SL.
例如,各条源线SL可以彼此绝缘,也可以彼此电连接。本公开实施例对此不作限制。For example, the source lines SL may be insulated from each other, or may be electrically connected to each other. The embodiment of the present disclosure does not limit this.
例如,如图7A所示,每相邻两行存储单元共用一条源线SL。每相邻两行存储单元的开关器件的第二端与同一源线SL电连接。这样可以减小走线密度,降低工艺成本。For example, as shown in FIG. 7A, every two adjacent rows of memory cells share one source line SL. The second ends of the switching devices of every two adjacent rows of memory cells are electrically connected to the same source line SL. In this way, the trace density can be reduced, and the process cost can be reduced.
例如,如图7B所示,该阻变存储阵列60还包括全局源线(global source line)GSL,各存储单元行中的开关器件的第二端均与该全局源线GSL电连接,也即,该全局源线将该阻变存储阵列60中的多个开关器件的第二端都彼此电连接。该全局源线GSL用于将该多个开关器件的第二端连接至外围电路(如图8中的源线控制电路)以向该多个存储单元提供源线电压。该全局源线GSL也可以直接接地。For example, as shown in FIG. 7B, the resistive memory array 60 further includes a global source line GSL, and the second ends of the switching devices in each memory cell row are electrically connected to the global source line GSL, that is, , The global source line electrically connects the second ends of the multiple switching devices in the resistive memory array 60 to each other. The global source line GSL is used to connect the second ends of the multiple switching devices to a peripheral circuit (such as the source line control circuit in FIG. 8) to provide source line voltages to the multiple memory cells. The global source line GSL can also be directly grounded.
例如,如图7B所示,该全局源线GSL沿第二方向D2延伸。For example, as shown in FIG. 7B, the global source line GSL extends along the second direction D2.
例如,如图7B所示,该全局源线GSL的数目为两条,该两条全局源线GSL分别位于多个存储单元30构成的存储单元阵列在该第一方向D1上的相对两侧。For example, as shown in FIG. 7B, the number of the global source lines GSL is two, and the two global source lines GSL are respectively located on opposite sides of a memory cell array formed by a plurality of memory cells 30 in the first direction D1.
例如,该多条源线SL均与位于两侧的两条全局源GSL线电连接。For example, the multiple source lines SL are electrically connected to two global source GSL lines located on both sides.
例如,位于同一存储单元行中的多个开关器件20的第二端23通过所对应的一条源线SL连接至周边的全局源线GSL。For example, the second ends 23 of the multiple switching devices 20 located in the same memory cell row are connected to the surrounding global source line GSL through a corresponding source line SL.
例如,该全局源线GSL接地,从而将多个存储单元30中的开关器件的开关器件20的第二端23接地。For example, the global source line GSL is grounded, thereby grounding the second end 23 of the switching device 20 of the switching devices in the plurality of memory cells 30.
例如,如图7A和图7B所示,该阻变存储阵列70还包括多个初始化电路54,分别与所述多条位线一一对应电连接。每个初始化电路包括控制端、第一端和第二端,所述初始化电路的控制端配置为接收初始化控制电压,所述初始化电路的第一端配置为接收初始化操作电压,所述初始化电路的第二端与所述初始化电路对应连接的位线电连接,所述初始化电路配置为响应于 所述初始化控制电压,将所述初始化操作电压写入所对应连接的位线。For example, as shown in FIGS. 7A and 7B, the resistive memory array 70 further includes a plurality of initialization circuits 54 which are respectively electrically connected to the plurality of bit lines in a one-to-one correspondence. Each initialization circuit includes a control terminal, a first terminal, and a second terminal. The control terminal of the initialization circuit is configured to receive an initialization control voltage, and the first terminal of the initialization circuit is configured to receive an initialization operation voltage. The second end is electrically connected to a bit line corresponding to the initialization circuit, and the initialization circuit is configured to write the initialization operation voltage to the corresponding bit line in response to the initialization control voltage.
本实施例提供的阻变存储阵列70与前述参照图3描述的实施例中的阻变存储阵列50的主要区别在于源线的设置方式不同,对于其它结构,可以参考前述实施例关于阻变存储阵列50的描述。此处不再赘述。The main difference between the resistive random access memory array 70 provided in this embodiment and the resistive random access memory array 50 in the foregoing embodiment described with reference to FIG. 3 is that the source lines are arranged in a different manner. For other structures, you can refer to the foregoing embodiment regarding resistive random access memory. Description of array 50. I won't repeat them here.
本公开实施例还提供一种操作方法,用于操作上述阻变存储阵列70。该操作方法包括:通过所述多条字线施加字线电压以选中一行存储单元,向所述选中的一行存储单元的开关器件的第二端施加源线电压使得所述开关器件开启并将所述源线电压传递至所述选中的一行存储单元的阻变器件的第一电极,以及通过所述多条位线中的至少一条向所述选中的一行存储单元中的至少一个的阻变器件的第二电极施加读写操作电压或初始化操作电压。该读写操作电压包括编程操作电压、擦除操作电压和读取操作电压中的至少之一。The embodiment of the present disclosure also provides an operating method for operating the resistive random access memory array 70 described above. The operation method includes: applying a word line voltage through the plurality of word lines to select a row of memory cells, and applying a source line voltage to a second end of a switching device of the selected row of memory cells so that the switching device is turned on and all The source line voltage is transferred to the first electrode of the resistive switching device of the selected row of memory cells, and the resistive switching device of at least one of the selected row of memory cells is transmitted through at least one of the plurality of bit lines The second electrode applies a read-write operation voltage or an initialization operation voltage. The read and write operation voltage includes at least one of a program operation voltage, an erase operation voltage, and a read operation voltage.
由于每行存储单元的开关器件20的第二端23彼此连接为同一电位,因此可将与该阻变器件与该开关器件20直接连接的第一电极11的电位作为参考电位进行各种操作,如初始化操作、编程操作、擦除操作、读取操作时,分别通过位线向选中的存储单元的阻变器件10的第二电极12施加相应的初始化操作电压、编程操作电压、擦除操作电压和读取操作电压即可。Since the second terminals 23 of the switching devices 20 of each row of memory cells are connected to each other at the same potential, the potential of the first electrode 11 directly connected to the resistive switching device and the switching device 20 can be used as a reference potential for various operations. For example, during initialization operation, programming operation, erasing operation, and reading operation, the corresponding initialization operation voltage, programming operation voltage, and erasing operation voltage are respectively applied to the second electrode 12 of the resistive switching device 10 of the selected memory cell through the bit line. And read the operating voltage.
例如,该源线电压为接地电压。这样,可以通过位线施加正电压进行初始化操作、编程操作和读取操作,施加负电压进行擦除操作。这样有助于降低电压的幅值需求,从而降低电路的耐压要求。For example, the source line voltage is the ground voltage. In this way, a positive voltage can be applied to the bit line to perform initialization, programming, and reading operations, and a negative voltage can be applied to erase. This helps to reduce the voltage amplitude requirements, thereby reducing the circuit's withstand voltage requirements.
以下结合图7B对本公开实施例提供的操作方法进行示例性说明。该操作方法例如包括初始化操作阶段、编程操作阶段、擦除操作阶段和读取操作阶段。例如,该第一晶体管T1和第二晶体管T2均为N型晶体管;第三晶体管T3为P型晶体管。然而本公开实施例对于该第一至第三晶体管的类型不作限制,当晶体管的类型发生改变时,相应地调节信号之间的大小关系以使得电路实现相同的功能。The operation method provided by the embodiment of the present disclosure will be exemplarily described below in conjunction with FIG. 7B. The operation method includes, for example, an initialization operation phase, a programming operation phase, an erasing operation phase, and a reading operation phase. For example, the first transistor T1 and the second transistor T2 are both N-type transistors; the third transistor T3 is a P-type transistor. However, the embodiments of the present disclosure do not limit the types of the first to third transistors. When the types of the transistors are changed, the magnitude relationship between the signals is adjusted accordingly to make the circuit achieve the same function.
例如,在初始化操作阶段,通过选中的字线WL(对应连接一行或多行选中的存储单元)施加字线电压V WL开启,并控制全局源线GSL接地,从而将选中的一行或多行存储单元30的开关器件20(第一晶体管T1)开启。 For example, in the initialization phase, the word line voltage V WL is applied to the selected word line WL (corresponding to the selected memory cell connected to one or more rows), and the global source line GSL is controlled to be grounded, thereby storing the selected one or more rows The switching device 20 (first transistor T1) of the cell 30 is turned on.
例如,通过该块选择线BSL向该块选择电路53施加块选择电压V BS将该块选择电路53关闭。例如,控制块选择线BSL接地从而使得该第二晶体 管T2关闭。这样,在该初始化操作阶段的初始化操作过程中,该块选择电路关闭以将该初始化电路及初始化操作电压的传输与其它控制电路及操作电压的传输进行分离,从而缩小了该初始化操作电压所涉及的电路范围,降低了该电路的耐压要求和尺寸。 For example, applying the block selection voltage V BS to the block selection circuit 53 through the block selection line BSL turns the block selection circuit 53 off. For example, the control block selection line BSL is grounded so that the second transistor T2 is turned off. In this way, during the initialization operation of the initialization operation stage, the block selection circuit is turned off to separate the transmission of the initialization circuit and the initialization operation voltage from the transmission of other control circuits and the operation voltage, thereby reducing the amount involved in the initialization operation voltage. The range of the circuit reduces the withstand voltage requirements and size of the circuit.
例如,分别对该初始化操作线FL施加初始化操作电压V F,对该初始化控制线FCL施加初始化控制电压V FC使得第三晶体管T3导通从而使得初始化电路开启。 For example, the initialization operation voltage V F is applied to the initialization operation line FL, and the initialization control voltage V FC is applied to the initialization control line FCL so that the third transistor T3 is turned on and the initialization circuit is turned on.
例如,该第三晶体管T3为P型晶体管,在该初始化操作阶段,对该初始化操作线FL施加初始化操作电压V F,对该初始化控制线FCL施加初始化控制电压V FC,并使得该初始化操作电压V F高于该初始化控制电压V FC,从而使得该第三晶体管T3导通,该初始化电路54开启。例如,该初始化操作电压V F在2V至6V之间。例如,该初始化控制电压V FC的脉冲时间(T F)在1微秒至10毫秒范围。 For example, the third transistor T3 is a P-type transistor. During the initialization operation phase, the initialization operation voltage V F is applied to the initialization operation line FL, the initialization control voltage V FC is applied to the initialization control line FCL, and the initialization operation voltage V F is higher than the initialization control voltage V FC , so that the third transistor T3 is turned on, and the initialization circuit 54 is turned on. For example, the initialization operation voltage V F is between 2V and 6V. For example, the initialization control voltage V FC of the pulse time (T F) in the range of 1 microsecond to 10 milliseconds.
例如,通过该初始化电路54和多条位线BL将该初始化操作电压V F施加到选中的至少一行存储单元的阻变器件10的第二电极12;该阻变器件的第一电极11通过该开启的开关器件20接地,因此在阻变器件的两端引入了电压差V F,阻变器件被击穿从而由从初始的高阻态转变为低阻态,从而将选中的至少一行存储单元同时进行初始化(Forming)操作。 For example, the initializing operation voltage V F is applied to the second electrode 12 of the resistive switching device 10 of the selected at least one row of memory cells through the initializing circuit 54 and a plurality of bit lines BL; the first electrode 11 of the resistive switching device passes through the The switch device 20 that is turned on is grounded, so a voltage difference V F is introduced at both ends of the resistive switching device. The resistive switching device is broken down to change from an initial high-resistance state to a low-resistance state, thereby changing at least one row of selected memory cells At the same time, the initialization (Forming) operation is carried out.
例如,在编程操作阶段,多个初始化电路关闭,块选择电路开启;通过至少一个块选择电路53和至少一条位线BL向选中的存储单元施加正的编程操作电压V Set,并控制全局源线GSL接地,从而对该阻变器件施加正向电压以对该存储单元进行编程操作。 For example, in the programming operation stage, multiple initialization circuits are turned off, and the block selection circuit is turned on; at least one block selection circuit 53 and at least one bit line BL apply a positive programming operation voltage V Set to the selected memory cell, and control the global source line The GSL is grounded, so that a forward voltage is applied to the resistive switching device to perform a programming operation on the memory cell.
例如,将正的块选择电压V BS施加到选中的阻变存储阵列的块选择线,并将编程操作电压V Set施加到至少一条全局位线GBL从而将对应的至少一个块选择电路开启,并将该编程操作电压传递至对应的位线BL并施加至选中的存储单元的阻变器件的第二电极12。 For example, applying a positive block selection voltage V BS to the block selection line of the selected resistive random access memory array, and applying the programming operation voltage V Set to at least one global bit line GBL to turn on the corresponding at least one block selection circuit, and The programming operation voltage is transferred to the corresponding bit line BL and applied to the second electrode 12 of the resistive switching device of the selected memory cell.
例如,将正的字线电压V WL通过选中字线WL(对应连接选中的存储单元)施加到一行存储单元30中的开关器件20(第一晶体管T1)的控制端,从而将该行存储单元中的选中的存储单元中的开关器件开启,该阻变器件的第一电极11接地。 For example, the positive word line voltage V WL is applied to the control terminal of the switching device 20 (first transistor T1) in a row of memory cells 30 through the selected word line WL (corresponding to the selected memory cell), so that the row of memory cells The switching device in the selected memory cell in is turned on, and the first electrode 11 of the resistive switching device is grounded.
例如,该编程操作电压V Set的大小在1.2V-3V之间,脉冲时间在1纳秒 至10微秒之间。 For example, the magnitude of the programming operation voltage V Set is between 1.2V and 3V, and the pulse time is between 1 nanosecond and 10 microseconds.
例如,在擦除操作阶段,多个初始化电路关闭,块选择电路开启;通过至少一个块选择电路53和至少一条位线BL向选中的存储单元施加负的擦除操作电压V RST,并控制全局源线GSL接地,从而对该阻变器件施加反向电压以对该存储单元进行擦除操作。 For example, in the erasing operation phase, multiple initialization circuits are turned off, and the block selection circuit is turned on; at least one block selection circuit 53 and at least one bit line BL apply a negative erase operation voltage V RST to the selected memory cell, and control the global The source line GSL is grounded, so that a reverse voltage is applied to the resistive switching device to perform an erase operation on the memory cell.
例如,将正的块选择电压V BS施加到选中的阻变存储阵列的块选择线,并将擦除操作电压V RST施加到至少一条全局位线GBL从而将对应的至少一个块选择电路开启,并将该负的擦除操作电压V RST传递至对应的位线BL并施加至选中的存储单元的阻变器件的第二电极12。 For example, applying a positive block selection voltage V BS to the block selection line of the selected resistive random access memory array, and applying the erase operation voltage V RST to at least one global bit line GBL to turn on the corresponding at least one block selection circuit, The negative erase operation voltage V RST is transferred to the corresponding bit line BL and applied to the second electrode 12 of the resistive switching device of the selected memory cell.
例如,将正的字线电压V WL通过选中字线WL(对应连接选中的存储单元)施加到一行存储单元30中的开关器件20的控制端,从而将该行存储单元中的选中的存储单元中的开关器件开启,该阻变器件的第一电极11接地。 For example, the positive word line voltage V WL is applied to the control terminal of the switching device 20 in a row of memory cells 30 through the selected word line WL (corresponding to the selected memory cell), so that the selected memory cell in the row of memory cells The switching device in is turned on, and the first electrode 11 of the resistive switching device is grounded.
例如,该擦除操作电压V RST的大小在-1.2V至-3V之间,脉冲时间在1纳秒至10微秒之间。 For example, the magnitude of the erase operation voltage V RST is between -1.2V and -3V, and the pulse time is between 1 nanosecond and 10 microseconds.
例如,该操作方法还包括读取操作阶段。例如在该读取操作阶段,多个初始化电路关闭,至少一个块选择电路(对应连接选中的存储单元)开启,从而对选中的存储单元进行读取操作。For example, the operation method also includes a read operation phase. For example, during the read operation stage, multiple initialization circuits are turned off, and at least one block selection circuit (corresponding to the selected memory cell) is turned on, thereby performing a read operation on the selected memory cell.
例如,结合参考图7B,将正的块选择电压V BS施加到一个选中阻变存储阵列的块选择线,并将读取操作电压V Read施加至至少一条全局位线GBL(对应连接选中的存储单元),从而将该至少一个块选择电路开启,并将该读取操作电压V Read通过相应的位线BL传递至选中的存储单元的阻变器件的第二电极12。 For example, with reference to FIG. 7B, a positive block selection voltage V BS is applied to a block selection line of a selected resistive memory array, and a read operation voltage V Read is applied to at least one global bit line GBL (corresponding to the selected memory Cell), so that the at least one block selection circuit is turned on, and the read operation voltage V Read is transferred to the second electrode 12 of the resistive switching device of the selected memory cell through the corresponding bit line BL.
例如,将正的字线电压V WL通过选中字线WL(对应连接选中的存储单元)施加到一行存储单元30的开关器件20(第一晶体管T1)的控制端,并将全局源线GSL接地,从而将该行存储单元中的选中的存储单元中的开关器件开启,该阻变器件的第一电极11接地。 For example, a positive word line voltage V WL is applied to the control terminal of the switching device 20 (first transistor T1) of a row of memory cells 30 through the selected word line WL (corresponding to the selected memory cell), and the global source line GSL is grounded Therefore, the switching device in the selected memory cell in the row of memory cells is turned on, and the first electrode 11 of the resistive switching device is grounded.
在选中的存储单元的阻变器件的电极两端引入了正向的V Read电压差,并产生导通读取电流(IRead)。阻变器件的电阻值高,读取电流小;电阻值低,读取电流大。通过外围读取控制电路检测该读取电流即可完成选中存储单元的读取操作。 A positive V Read voltage difference is introduced across the electrodes of the resistive switching device of the selected memory cell, and a conduction read current (IRead) is generated. The resistance value of the resistance switching device is high, and the reading current is small; the resistance value is low, and the reading current is large. The reading operation of the selected memory cell can be completed by detecting the reading current through the peripheral reading control circuit.
例如,该读取操作电压V Read在0.1V至1.2V之间,脉冲时间在1纳秒 至10微秒范围。 For example, the read operation voltage V Read is between 0.1V and 1.2V, and the pulse time is between 1 nanosecond and 10 microseconds.
例如,该操作方法可以包括多步初始化操作。例如,图5所示实施例提供的操作方法同样适用于该阻变存储阵列70,此处不再赘述。For example, the operation method may include a multi-step initialization operation. For example, the operation method provided by the embodiment shown in FIG. 5 is also applicable to the resistive random access memory array 70, which will not be repeated here.
本公开实施例还提供一种阻变存储器电路80,包括上述阻变存储电路70。The embodiment of the present disclosure also provides a resistive random access memory circuit 80, which includes the above-mentioned resistive random access memory circuit 70.
图8为本公开至少一实施例提供的阻变存储器电路80的结构示意图。如图8所示,该阻变存储器电路80还包括源线控制电路81,该源线控制电路配置为与一个或多个存储单元行的存储单元的开关器件的第二端电连接以提供源线电压。FIG. 8 is a schematic structural diagram of a resistive random access memory circuit 80 provided by at least one embodiment of the present disclosure. As shown in FIG. 8, the resistive random access memory circuit 80 further includes a source line control circuit 81 configured to be electrically connected to the second end of the switching device of the memory cell of one or more memory cell rows to provide a source Line voltage.
例如,该源线控制电路81可以与多条源线SL连接以分别为多个存储单元行提供源线电压。该存储单元行所接收的源线电压可以相同或不同。For example, the source line control circuit 81 may be connected to a plurality of source lines SL to respectively provide source line voltages for a plurality of memory cell rows. The source line voltages received by the memory cell row may be the same or different.
例如,该源线控制电路81也可以与该全局源线GSL电连接以向该阻变存储阵列70提供源线电压。For example, the source line control circuit 81 can also be electrically connected to the global source line GSL to provide a source line voltage to the resistive memory array 70.
例如,该全局源线GSL可以直接接地,此时该源线控制电路81也可以省略。For example, the global source line GSL may be directly grounded, and in this case, the source line control circuit 81 may also be omitted.
例如,该阻变存储器电路80还包括初始化控制电路82,该初始化控制电路82配置为与该多个初始化电路54电连接以提供该初始化操作电压 VF和该初始化控制电压V FCFor example, the resistive random access memory circuit 80 further includes an initialization control circuit 82 configured to be electrically connected to the plurality of initialization circuits 54 to provide the initialization operation voltage VF and the initialization control voltage V FC .
例如,如图8所示,该阻变存储器电路80还包括列选择电路83,该列选择电路83配置为与多个块选择电路53连接以向阻变存储阵列70提供读写操作电压。例如,该读写操作电压包括编程操作电压V Set、擦除操作电压V RST和读取操作电压V ReadFor example, as shown in FIG. 8, the resistive random access memory circuit 80 further includes a column selection circuit 83 configured to be connected to a plurality of block selection circuits 53 to provide read and write operation voltages to the resistive random access memory array 70. For example, the reading and writing operation voltage includes a programming operation voltage V Set , an erasing operation voltage V RST and a reading operation voltage V Read .
例如,该列选择电路83与多条全局位线GBL电连接。For example, the column selection circuit 83 is electrically connected to a plurality of global bit lines GBL.
例如,该阻变存储器电路80还包括编程和擦除控制电路84以及读取控制电路85。For example, the resistive random access memory circuit 80 further includes a programming and erasing control circuit 84 and a reading control circuit 85.
例如,该编程和擦除控制电路84与该列选择电路83连接,并配置为通过该列选择电路83向该阻变存储阵列70提供该编程操作电压V Set和该擦除操作电压V RSTFor example, the program and erase control circuit 84 is connected to the column selection circuit 83 and is configured to provide the program operation voltage V Set and the erase operation voltage V RST to the resistive memory array 70 through the column selection circuit 83.
例如,在编程操作阶段,该编程和擦除控制电路84通过该列选择电路83和至少一条位线BL向选中的存储单元施加正的编程操作电压V Set,从而对该阻变器件施加正向电压以对该存储单元进行编程操作。 For example, in the program operation stage, the program and erase control circuit 84 applies a positive program operation voltage V Set to the selected memory cell through the column selection circuit 83 and at least one bit line BL, thereby applying a positive direction to the resistive switching device. The voltage is used to program the memory cell.
例如,在擦除操作阶段,该编程和擦除控制电路84通过该列选择电路83和至少一条位线BL向选中的存储单元施加负的擦除操作电压V RST,从而对该阻变器件施加反向电压以对该存储单元进行擦除操作。 For example, in the erasing operation stage, the program and erasing control circuit 84 applies a negative erasing operation voltage V RST to the selected memory cell through the column selection circuit 83 and at least one bit line BL, thereby applying a negative erase operation voltage V RST to the resistive switching device The reverse voltage is used to erase the memory cell.
由于该编程操作电压和擦除操作电压都是通过该位线施加至存储单元,因此该编程控制电路和擦除控制电路可以集成为同一个电路模块。例如,该编程和擦除控制电路84包括正压产生电路和负压产生电路,以分别在该编程操作阶段产生正的编程操作电压以及在该擦除操作阶段产生负的擦除操作电压。Since the programming operation voltage and the erasing operation voltage are both applied to the memory cell through the bit line, the programming control circuit and the erasing control circuit can be integrated into the same circuit module. For example, the program and erase control circuit 84 includes a positive voltage generating circuit and a negative voltage generating circuit to generate a positive program operation voltage during the program operation phase and a negative erase operation voltage during the erase operation phase, respectively.
例如,该读取控制电路85与该列选择电路83连接,并配置为通过该列选择电路83向该阻变存储阵列70提供该读取操作电压V Read。例如,在读取操作阶段,该读取控制电路85通过该列选择电路83和至少一条位线BL向选中的存储单元施加读取操作电压V Read,从而对该阻变器件施加正向电压以对该存储单元进行读取操作。 For example, the read control circuit 85 is connected to the column selection circuit 83 and is configured to provide the read operation voltage V Read to the resistive memory array 70 through the column selection circuit 83. For example, in the read operation stage, the read control circuit 85 applies the read operation voltage V Read to the selected memory cell through the column selection circuit 83 and at least one bit line BL, thereby applying a forward voltage to the resistive switching device. Perform a read operation on the memory cell.
例如,如图8所示,该阻变存储器电路80还包括块选择控制电路86和字线控制电路87。For example, as shown in FIG. 8, the resistive random access memory circuit 80 further includes a block selection control circuit 86 and a word line control circuit 87.
例如,该块选择控制电路86配置为与该块选择线BSL连接以向该阻变存储阵列70提供该块选择电压V BSFor example, the block selection control circuit 86 is configured to be connected to the block selection line BSL to provide the block selection voltage V BS to the resistive random access memory array 70.
例如,该字线控制电路87配置为向该阻变存储阵列70提供该字线电压V WL。例如,该字线控制电路87与多条字线WL电连接。 For example, the word line control circuit 87 is configured to provide the word line voltage V WL to the resistive memory array 70. For example, the word line control circuit 87 is electrically connected to a plurality of word lines WL.
更多细节可以参考前述关于操作方法实施例的描述,此处不再赘述。For more details, please refer to the foregoing description of the operation method embodiment, which will not be repeated here.
本公开的至少一个实施例还提供了一种电子装置,该电子装置包括上述任一实施例的阻变存储器电路,该电子装置可以为存储装置、硬盘、移动设备、移动电话、笔记本电脑、桌面电脑等。At least one embodiment of the present disclosure also provides an electronic device that includes the resistive random access memory circuit of any of the above embodiments. The electronic device may be a storage device, a hard disk, a mobile device, a mobile phone, a notebook computer, or a desktop. Computer, etc.
以上所述仅是本公开的示范性实施方式,而非用于限制本公开的保护范围,本公开的保护范围由所附的权利要求确定。The above are only exemplary implementations of the present disclosure, and are not used to limit the protection scope of the present disclosure, which is determined by the appended claims.

Claims (10)

  1. 一种阻变存储阵列的操作方法,所述阻变存储阵列包括:A method for operating a resistive memory array, the resistive memory array comprising:
    多个存储单元,沿第一方向和第二方向排列为多个存储单元行和多个存储单元列,其中,每个存储单元包括阻变器件和开关器件,所述阻变器件包括第一电极和第二电极,所述阻变器件的第一电极与所述开关器件电连接;A plurality of memory cells are arranged in a first direction and a second direction into a plurality of memory cell rows and a plurality of memory cell columns, wherein each memory cell includes a resistive switching device and a switching device, and the resistive switching device includes a first electrode And a second electrode, the first electrode of the resistive switching device is electrically connected to the switching device;
    多条位线,沿所述第二方向延伸,且分别与所述多列对应连接,其中,所述多条位线中的每条与所对应的一个存储单元列的存储单元的阻变器件的第二电极电连接;A plurality of bit lines extend along the second direction and are respectively connected to the plurality of columns, wherein each of the plurality of bit lines corresponds to a resistive switching device of a memory cell of a memory cell column The second electrode is electrically connected;
    多条字线,沿所述第一方向延伸,且分别与所述多行对应连接,其中,所述多条字线中的每条与所对应的一个存储单元行的存储单元的开关器件电连接;A plurality of word lines extend along the first direction and are respectively connected to the plurality of rows, wherein each of the plurality of word lines is electrically connected to a switching device of a memory cell of a corresponding memory cell row connection;
    多个块选择电路,分别与所述多条位线一一对应电连接;以及A plurality of block selection circuits are respectively electrically connected to the plurality of bit lines in a one-to-one correspondence; and
    多个初始化电路,分别与所述多条位线一一对应电连接;A plurality of initialization circuits are respectively electrically connected to the plurality of bit lines in a one-to-one correspondence;
    所述操作方法包括:The operation method includes:
    将所述多个块选择电路关闭,并通过所述多个初始化电路及所述多条位线对选中的至少一个存储单元行的存储单元进行第一初始化操作和第二初始化操作,所述第一初始化操作先于所述第二初始化操作;Turn off the plurality of block selection circuits, and perform a first initialization operation and a second initialization operation on the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines. An initialization operation precedes the second initialization operation;
    其中,所述第一初始化操作包括:通过所述多个初始化电路及所述多条位线向选中的至少一个存储单元行的存储单元施加第一初始化操作电压V F1; Wherein, the first initialization operation includes: applying a first initialization operation voltage V F 1 to the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines;
    所述第二初始化操作包括:通过所述多个初始化电路及所述多条位线向所述选中的至少一个存储单元行的存储单元施加第二初始化操作电压V F2。 The second initialization operation includes: applying a second initialization operation voltage V F 2 to the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines.
  2. 如权利要求1所述的操作方法,其中,所述第一初始化操作电压V F1大于所述第二初始化操作电压V F2。 The operation method of claim 1, wherein the first initialization operation voltage V F 1 is greater than the second initialization operation voltage V F 2.
  3. 如权利要求1或2所述的操作方法,其中,每个初始化电路包括控制端、第一端和第二端,每个初始化电路的第二端与所述初始化电路对应连接的位线电连接;The operation method of claim 1 or 2, wherein each initialization circuit includes a control terminal, a first terminal, and a second terminal, and the second terminal of each initialization circuit is electrically connected to a bit line corresponding to the initialization circuit. ;
    所述第一初始化操作还包括:向所述多个初始化电路的控制端施加第一初始化控制电压V FC1以将所述多个初始化电路开启, The first initialization operation further includes: applying a first initialization control voltage V FC 1 to the control terminals of the plurality of initialization circuits to turn on the plurality of initialization circuits,
    所述第二初始化操作还包括:向所述多个初始化控制电路施加第二初始化控制电压V FC2以将所述多个初始化电路开启。 The second initialization operation further includes: applying a second initialization control voltage V FC 2 to the plurality of initialization control circuits to turn on the plurality of initialization circuits.
  4. 如权利要求3所述的操作方法,其中,所述多个初始化电路中的每个包括开关晶体管,所述开关晶体管的栅极、第一极和第二极分别为所述初始化电路的控制端、第一端和第二端;所述开关晶体管为P型晶体管,The operation method of claim 3, wherein each of the plurality of initialization circuits includes a switching transistor, and the gate, first electrode, and second electrode of the switching transistor are the control terminals of the initialization circuit, respectively , The first terminal and the second terminal; the switch transistor is a P-type transistor,
    所述第一初始化控制电压V FC1小于所述第一初始化操作电压V F1,所述第二初始化控制电压V FC2小于所述第二初始化操作电压V F2。 The first initialization control voltage V FC 1 is less than the first initialization operation voltage V F 1, and the second initialization control voltage V FC 2 is less than the second initialization operation voltage V F 2.
  5. 如权利要求3或4所述的操作方法,其中,所述第一初始化操作电压与所述第一初始化控制电压之差|V F1-V FC1|小于所述第二初始化操作电压与所述第二初始化控制电压之差|V F2-V FC2|。 The operation method of claim 3 or 4, wherein the difference between the first initialization operation voltage and the first initialization control voltage |V F 1-V FC 1 | The difference between the second initialization control voltage |V F 2-V FC 2|.
  6. 如权利要求1-5任一所述的操作方法,其中,所述第一初始化操作的时间大于所述第二初始化操作的时间。5. The operation method according to any one of claims 1 to 5, wherein the time of the first initialization operation is greater than the time of the second initialization operation.
  7. 如权利要求1-6任一所述的操作方法,还包括:The operation method according to any one of claims 1-6, further comprising:
    在所述第二初始化操作后,通过所述多个初始化电路及所述多条位线对所述选中的至少一个存储单元行的存储单元进行第三初始化操作,After the second initialization operation, a third initialization operation is performed on the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines,
    其中,所述第三初始化操作包括:通过所述多个初始化电路及所述多条位线向所述选中的至少一个存储单元行的存储单元施加第三初始化操作电压V F3。 Wherein, the third initialization operation includes: applying a third initialization operation voltage V F 3 to the memory cells of the selected at least one memory cell row through the plurality of initialization circuits and the plurality of bit lines.
  8. 如权利要求7所述的操作方法,其中,所述第一初始化操作电压V F1、所述第二初始化操作电压V F2、所述第三初始化操作电压V F3的大小依次减小。 The operation method according to claim 7, wherein the magnitudes of the first initialization operation voltage V F 1, the second initialization operation voltage V F 2, and the third initialization operation voltage V F 3 decrease in order.
  9. 如权利要求7或8所述的操作方法,其中,所述第一初始化操作、所述第二初始化操作、所述第三初始化操作的操作时间依次减小。The operation method according to claim 7 or 8, wherein the operation time of the first initialization operation, the second initialization operation, and the third initialization operation are sequentially reduced.
  10. 如权利要求7-9任一所述的操作方法,其中,每个初始化电路包括控制端、第一端和第二端,每个初始化电路的第二端与所述初始化电路对应连接的位线电连接;The operation method according to any one of claims 7-9, wherein each initialization circuit includes a control terminal, a first terminal, and a second terminal, and the second terminal of each initialization circuit corresponds to a bit line connected to the initialization circuit Electrical connection
    所述第一初始化操作还包括:向所述多个初始化电路的控制端施加第一初始化控制电压V FC1以将所述多个初始化电路开启; The first initialization operation further includes: applying a first initialization control voltage V FC 1 to the control terminals of the plurality of initialization circuits to turn on the plurality of initialization circuits;
    所述第二初始化操作还包括:向所述多个初始化控制电路施加第二初始化控制电压V FC2以将所述多个初始化电路开启; The second initialization operation further includes: applying a second initialization control voltage V FC 2 to the plurality of initialization control circuits to turn on the plurality of initialization circuits;
    所述第三初始化操作还包括:向所述多个初始化控制电路施加第二初始化控制电压V FC2以将所述多个初始化电路开启, The third initialization operation further includes: applying a second initialization control voltage V FC 2 to the plurality of initialization control circuits to turn on the plurality of initialization circuits,
    所述第一初始化操作电压与所述第一初始化控制电压之差|V F1-V FC1|、 所述第二初始化操作电压与所述第二初始化控制电压之差|V F2-V FC2|、所述第三初始化操作电压与所述第三初始化控制电压之差|V F3-V FC3|依次增大。 The difference between the first initialization operation voltage and the first initialization control voltage |V F 1-V FC 1|, the difference between the second initialization operation voltage and the second initialization control voltage |V F 2-V FC 2|, the difference between the third initialization operation voltage and the third initialization control voltage |V F 3-V FC 3| increases in sequence.
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Publication number Priority date Publication date Assignee Title
CN111179991B (en) * 2019-12-31 2022-06-03 清华大学 Resistive random access memory array, operation method thereof and resistive random access memory circuit
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CN112017715B (en) * 2020-08-24 2022-12-06 厦门半导体工业技术研发有限公司 Resistive random access memory and protection circuit thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102456398A (en) * 2010-10-26 2012-05-16 三星电子株式会社 Resistive memory devices, initialization methods, and electronic devices incorporating same
US20150085561A1 (en) * 2013-09-25 2015-03-26 Micron Technology, Inc. Semiconductor device and write method
CN110088836A (en) * 2016-09-21 2019-08-02 合肥睿科微电子有限公司 For initializing the technology of resistive memory device
CN111091858A (en) * 2019-12-31 2020-05-01 清华大学 Operation method of resistive random access memory array
CN111145811A (en) * 2019-12-31 2020-05-12 清华大学 Resistive random access memory array, operation method thereof and resistive random access memory circuit
CN111179991A (en) * 2019-12-31 2020-05-19 清华大学 Resistive random access memory array, operation method thereof and resistive random access memory circuit

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4701862B2 (en) * 2005-06-22 2011-06-15 ソニー株式会社 Storage device initialization method
CN105097021B (en) * 2014-05-22 2017-11-10 华邦电子股份有限公司 The formation of resistance-type memory and method of testing
KR20170097811A (en) * 2016-02-18 2017-08-29 에스케이하이닉스 주식회사 Resistive Memory Apparatus and Voltage Generating Circuit
CN109741773B (en) * 2018-09-21 2020-03-17 浙江大学 NAND type storage array based on accumulation mode resistance change field effect transistor
CN109273044B (en) * 2018-11-30 2020-10-13 清华大学 Resistive random access memory testing method and testing device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102456398A (en) * 2010-10-26 2012-05-16 三星电子株式会社 Resistive memory devices, initialization methods, and electronic devices incorporating same
US20150085561A1 (en) * 2013-09-25 2015-03-26 Micron Technology, Inc. Semiconductor device and write method
CN110088836A (en) * 2016-09-21 2019-08-02 合肥睿科微电子有限公司 For initializing the technology of resistive memory device
CN111091858A (en) * 2019-12-31 2020-05-01 清华大学 Operation method of resistive random access memory array
CN111145811A (en) * 2019-12-31 2020-05-12 清华大学 Resistive random access memory array, operation method thereof and resistive random access memory circuit
CN111179991A (en) * 2019-12-31 2020-05-19 清华大学 Resistive random access memory array, operation method thereof and resistive random access memory circuit

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