WO2021120458A1

WO2021120458A1 - Ring coordinate inspection tool, measuring method using same, and application thereof

Info

Publication number: WO2021120458A1
Application number: PCT/CN2020/084102
Authority: WO
Inventors: 姚力军; 潘杰; 边逸军; 王学泽; 陈文庆; 罗明浩
Original assignee: 宁波江丰电子材料股份有限公司
Priority date: 2019-12-19
Filing date: 2020-04-10
Publication date: 2021-06-24
Also published as: KR102492077B1; CN110906893B; CN110906893A; KR20210081305A

Abstract

A ring coordinate inspection tool. The inspection tool is provided with a circular concave cavity (2) matching a ring to be tested (100) on a base (1), and is provided with grooves (3) allowing styli of a coordinate measuring machine to extend along the periphery of the circular concave cavity (2). The inspection tool fixes said ring (100) by means of the circular concave cavity (2). The grooves (3) allow the styli of the coordinate measuring machine to extend so as to measure the bottom and the side of said ring (100). The inspection tool is simple in structure, and easy to process. When performing ring coordinate measuring using the inspection tool, said ring (100) can be effectively prevented from deforming during measurement, the testing accuracy and repeatability of said ring (100) are ensured, the testing efficiency is improved, and the inspection tool can be applied to the field of semiconductors or machining well.

Description

A three-coordinate measuring tool for ring parts and its measuring method and application

Technical field

This application relates to the technical field of component inspection, for example, to a three-coordinate inspection tool for ring parts and a measuring method and application using it.

Background technique

In the production process of semiconductor chips, both the 8-inch production line and the 12-inch production line will use rings in target sputtering, and the rings are also involved in sputtering. After the ring is installed on the sputtering machine table, the current is energized to generate a magnetic field around it, so that the atoms on the sputtering target can be uniformly attached to the wafer through the magnetic field. The ring is installed on the machine table at the opening position When energized, other areas must not be in contact with the machine, and there must be no conduction.

Therefore, it is necessary to strictly control the size of the ring. At present, the measurement of the ring mainly relies on calipers and micrometers to detect some simple dimensions such as height and wall thickness. Manual measurement methods are used, which is low in efficiency and cannot guarantee accuracy and repeatability. , And it is impossible to detect complex sizes.

In the field of machining, a coordinate measuring machine is often used to detect the size of parts, but when a three-dimensional coordinate measuring machine is used to detect parts, the shape of the ring itself must be kept unchanged. The ring used in the sputtering of the target is rolled from slats, and the ring contains openings, which are prone to large deformations during the inspection process. If the product deforms greatly, the stylus will miss the product during the inspection. Or hit the product, not only can not achieve accurate measurement, but also easy to scratch the ring.

CN206855298U discloses a three-coordinate measuring fixture. The fixture is provided with positioning points, but the fixture does not consider the problem of how to perform three-coordinate detection when parts are easily deformed.

CN208140064U discloses a three-coordinate measuring fixture with a rotating function, which can rotate during the measurement process, but cannot solve the problem of incapability of three-coordinate detection due to component deformation.

CN110160476A discloses a continuous automatic measurement system based on a three-coordinate measuring machine. The system includes a combined fixture, but the fixture also cannot realize three-coordinate detection of easily deformable parts.

In summary, none of the existing fixtures of the coordinate measuring machine are aware of solving the measurement problem of easily deformable parts. As a result, the current easily deformable rings are still manually measured, and the measurement efficiency is low and the accuracy and repeatability cannot be guaranteed.

Therefore, it is necessary to develop a measuring tool and method that is convenient for the three-coordinate measuring machine to measure the ring, so as to improve the detection efficiency and accuracy of the ring.

Summary of the invention

The following is an overview of the topics detailed in this article. This summary is not intended to limit the scope of protection of the claims.

The purpose of this application includes providing a three-coordinate inspection tool for ring parts, which can fix the ring parts by providing a circular cavity matching the ring parts to be tested on the base and prevent them from being generated during the inspection process. Deformation; along the outer circumference of the circular cavity, a groove for the stylus of the coordinate measuring machine to extend is provided, so that the bottom and side of the ring can be measured, and the detection size range is wide; the ring can be used for the three coordinate measurement of the ring It can ensure the detection accuracy and repeatability of the ring parts. When applied in the field of semiconductor or machining, it can improve the detection efficiency and ensure the accuracy of the product.

To achieve this goal, this application adopts the following technical solutions:

In the first aspect, the present application provides a three-coordinate inspection tool for ring parts. The inspection tool includes a base; a circular cavity matching the ring to be tested is provided on the base; The outer periphery of the shaped cavity is provided with a groove for the stylus of the coordinate measuring machine to extend.

The ring three-coordinate measuring tool provided in the present application is provided with a circular cavity matching the ring to be tested on the base, which can fix the ring and prevent it from being deformed during the detection process. The groove provided along the outer circumference of the circular cavity for the probe of the coordinate measuring machine can be used to measure the bottom and side of the ring, thereby being able to measure complex dimensions and improve the detection efficiency and accuracy.

Optionally, the depth of the circular cavity is 45-60mm, for example, it may be 45mm, 46mm, 47mm, 48mm, 49mm, 50mm, 51mm, 52mm, 53mm, 54mm, 55mm, 56mm, 57mm, 58mm, 59mm or 60mm, 48～55mm can be selected.

Optionally, the depth of the groove is smaller than the depth of the circular cavity.

In this application, a groove smaller than the depth of the circular cavity is provided to facilitate the stylus of the coordinate measuring machine to extend from the groove, so as to be able to measure complex dimensions and increase the range of measurable dimensions.

Optionally, the groove is 10-15mm smaller than the depth of the circular cavity, for example, it can be 10mm, 10.5mm, 11mm, 11.5mm, 12mm, 12.5mm, 13mm, 13.5mm, 14mm, 14.5mm or 15mm smaller.

Optionally, the grooves are distributed at equal angles along the outer circumference of the circular cavity.

The grooves on the circumference of the inspection tool provided in the present application are distributed at equal angles along the outer circumference of the circular cavity, which makes it easier for the stylus to extend from all directions to detect the bottom and sides of the ring.

Optionally, the number of the grooves is 2 to 4, for example, it can be 2, 3, or 4, and can be 3 optionally.

Optionally, the groove is an arc-shaped groove.

Optionally, the width of the arc-shaped groove is greater than 45mm, for example, it may be 46mm, 47mm, 48mm, 49mm, 50mm, 55mm, 58mm, 60mm, 70mm, 80mm or 90mm, and may be 50-80mm.

Optionally, the arc of the arc-shaped groove is 0.35-0.55, for example, 0.35, 0.36, 0.37, 0.38, 0.40, 0.41, 0.45, 0.46, 0.48, 0.50, 0.52, 0.53, or 0.55, and may be 0.40. ~0.50.

The curvature of the optional arc-shaped groove in this application is 0.35～0.55 to ensure that the probe can be inserted while ensuring the fixing effect of the circular cavity of the base on the ring, which can better prevent the ring from being deformed during the detection process .

Optionally, the height of the base is 90-110mm, for example, it can be 90mm, 91mm, 92mm, 94mm, 95mm, 96mm, 97mm, 98mm, 99mm, 100mm, 102mm, 104mm, 105mm, 108mm or 110mm. 95～105mm.

Optionally, the base is a circular base, a rectangular base or a triangular base, and may be a rectangular base.

The rectangular base can be selected in this application, which can better prevent the circular cavity from being deformed along with the ring during the detection process, and better guarantee the accuracy of the detection.

Optionally, the length of the rectangular base is 550-800mm, for example, 550mm, 560mm, 580mm, 600mm, 620mm, 650mm, 680mm, 700mm, 720mm, 750mm, 760mm, 780mm or 800mm, optionally 580-750mm .

Optionally, the width of the rectangular base is 550-800mm, for example, 550mm, 560mm, 580mm, 600mm, 620mm, 650mm, 680mm, 700mm, 720mm, 750mm, 760mm, 780mm or 800mm, optionally 580-750mm .

The length and width of the optional rectangular base in this application are both 550-800 mm, which can effectively save the material of the inspection tool and save operation space while ensuring that the bumps of the ring can be completely placed on the base.

Optionally, in the circular cavity of the base, a boss is provided along the inner circumference of the circular cavity.

In this application, you can choose to arrange a boss in the circular cavity of the base along the inner circumference of the circular cavity. The boss can place the bottom of the ring so that the bottom of the ring can be supported, so as to better realize the alignment. The fixing of the ring prevents deformation of the ring.

Optionally, the boss and the groove are staggered.

The convex platform and the groove of the present application are arranged staggered to prevent the convex platform from blocking the groove opening into which the stylus of the coordinate measuring machine extends.

Optionally, the height of the boss is 30-45mm, for example, it can be 30mm, 31mm, 32mm, 33mm, 34mm, 35mm, 36mm, 37mm, 38mm, 39mm, 40mm, 41mm, 42mm, 43mm, 44mm or 45mm, Optional 33～40mm.

The present application controls the height of the boss to be 30-45mm. On the one hand, it ensures that the bottom of the ring is located on the boss, and at the same time the boss of the ring can be located on the base around the circular cavity, so as to better prevent the ring from being deformed; On the one hand, the bottom part of the ring can be suspended, which is more conducive to the measurement of the bottom of the ring.

Optionally, the number of the bosses is 2-8, for example, it can be 2, 3, 4, 5, 6, 7, or 8, optionally 4-6.

Optionally, the boss is an arc-shaped boss.

Optionally, the width of the arc-shaped boss is 5-30mm, for example, it can be 5mm, 7mm, 8mm, 10mm, 12mm, 15mm, 16mm, 18mm, 20mm, 22mm, 25mm, 27mm, 29mm or 30mm, optional It is 10～15mm.

The width of the optional arc-shaped boss in this application is 5-30mm, which can save materials while ensuring the placement of the ring.

Optionally, the arc of the arc-shaped boss is 0.17 to 0.35, for example, it can be 0.17, 0.18, 0.19, 0.2, 0.21, 0.22, 0.24, 0.25, 0.28, 0.30, 0.32, or 0.35, and can be 0.20 to 0.30. .

This application can choose to use multiple bosses with a radian of 0.17～0.35. While ensuring the placement of the bottom of the ring, it can leave a space at the bottom of the ring, which is more convenient for the coordinate measuring machine to measure the size of the ring, and further improves the measurement. effectiveness.

This application has no special restrictions on the material of the inspection tool, and any material known to those skilled in the art that can be used for the inspection tool can be used, such as foam or rubber.

Optionally, the material of the inspection tool is foam.

The material of the optional inspection tool in this application is foam. This is because the foam has a certain elasticity and its hardness is low, so it will not scratch the ring.

Optionally, on the upper surface of the base, an adhesive tape layer is provided along the outer circumference of the circular cavity.

This application is provided with a tape layer along the outer circumference of the circular cavity. This is because the material of the inspection tool itself is difficult to clean and easily contaminates the ring. The tape layer can be directly wiped with a rag, which is convenient for operation and can effectively avoid the ring during the inspection process. Contaminated in.

Optionally, the width of the tape layer is 50-80mm, for example, it may be 50mm, 52mm, 55mm, 58mm, 60mm, 62mm, 65mm, 68mm, 70mm, 72mm, 75mm, 78mm or 80mm, and may be 55-70mm. .

The width of the optional tape layer in this application is 50-80 mm, which ensures that the contact area of the ring bump is covered with the tape layer while avoiding the waste of materials.

In a second aspect, the present application provides a ring three-coordinate measuring method, which uses the ring three-coordinate measuring tool described in the first aspect for measurement.

The ring three-coordinate measurement method provided in the second aspect of the application is carried out using the inspection tool described in the first aspect, which can ensure that the ring does not deform during the inspection process, realizes automatic detection, and ensures the accuracy and repetition of ring detection. Sex.

Optionally, the method includes: placing the ring to be tested in the circular cavity of the gage, placing the convex block of the ring to be tested on the base on the outer periphery of the circular cavity, and then using a three-coordinate measuring machine Measure the size of the ring to be tested.

The three-coordinate measuring method for ring parts provided in this application is able to test the ring by placing the ring to be tested in the circular cavity of the gage, and placing the convex block of the ring to be tested on the base on the outer periphery of the circular cavity. The ring parts are fixed during the process to prevent the ring parts from deforming and improve the accuracy and repeatability of the ring parts detection.

Optionally, the method includes: extending the stylus of the coordinate measuring machine into the groove, and detecting the side wall and/or the bottom of the ring to be measured.

In the third aspect, this application provides the use of the ring three-coordinate inspection tool described in the first aspect in the field of semiconductor and/or machining.

The three-coordinate inspection tool for ring parts provided in this application can ensure that the ring parts are not deformed during the inspection process, improve the inspection efficiency and accuracy of the easily deformable ring parts, and are applied in the field of semiconductor or machining, which can improve the inspection efficiency and guarantee the products Accuracy.

Compared with the prior art, this application has at least the following beneficial effects:

(1) The ring three-coordinate measuring tool provided in this application can effectively fix the ring to be tested and prevent it from being deformed during the detection process, so that the easily deformable ring can also be measured with a three-coordinate measuring machine;

(2) The ring three-coordinate inspection tool provided by this application has a simple structure and is easy to process;

(3) The three-coordinate measurement method for the ring provided by this application can automatically detect, has high detection efficiency, saves labor costs, and can ensure accuracy and repeatability. Among them, the measurement of each part of the 285mm and 379.53mm ring is 5 times The mean square error is less than or equal to 2.02E-2mm ² , and the relative error of the average value is less than or equal to 0.5640%.

After reading and understanding the detailed description and drawings, other aspects can be understood.

Description of the drawings

Fig. 1 is a top view of a ring three-coordinate measuring tool provided in Example 1 of the present application.

Fig. 2 is a left view of the ring three-coordinate measuring tool provided in Example 1 of the present application.

Fig. 3 is a cross-sectional view of the A-A section of the ring three-coordinate measuring tool provided in Embodiment 1 of the present application after the ring to be tested is placed.

In the picture: 1-base; 2-circular cavity; 3-arc groove; 4-arc boss; 100-ring A to be tested; 101-bump.

Detailed ways

The technical solutions of the present application will be further described below in conjunction with the drawings and specific implementations.

The application will be described in further detail below. However, the following examples are only simple examples of this application, and do not represent or limit the scope of protection of the rights of this application. The scope of protection of this application is subject to the claims.

Ring to be tested A: The ring includes a ring with a diameter of 379.53mm and a height of 50.8mm, and 7 cylindrical bumps arranged on the outer surface of the ring. The diameter of the cylindrical bumps is 20.3mm, The length is 23mm, and the wall thickness of the ring is 8mm.

Ring to be tested B: The ring includes a ring with a diameter of 285mm and a height of 70mm, and three equally angularly distributed bumps on the outer surface of the ring with a side length of 13mm. The wall of the ring The thickness is 5mm.

1. Example

Example 1

This embodiment provides a three-coordinate inspection tool for ring A to be tested. As shown in FIG. 1 and FIG. 2, the inspection tool includes a square base 1 with a side length of 600 mm, and the height of the base 1 is 100 mm;

A circular cavity 2 with a diameter of 379.55mm and a depth of 50mm is provided in the center of the base 1;

On the base 1, along the outer circumference of the circular cavity 2 are provided with three equally angularly distributed arc-shaped grooves 3 for the stylus of the coordinate measuring machine to extend, and the width of the arc-shaped grooves 3 is 50mm , The depth is 35mm, the arc is 0.4171, and the outer arc length is 100mm;

In the circular cavity 2 of the base 1, there are 6 arc-shaped bosses 4 staggered from the arc-shaped groove 3 along the inner circumference of the circular cavity 2 and the height of the arc-shaped bosses 4 is 34.75. mm, the width is 15mm, the arc is 0.2108, and the outer arc length is 40mm;

On the upper surface of the base 1, a tape layer with a width of 55 mm is provided along the outer circumference of the circular cavity 2.

As shown in Figure 3, the ring 100 to be tested is placed in the circular cavity 2 of the inspection tool as a whole, the bottom of the ring 100 to be tested is placed on the boss 4, and the bump 101 of the ring 100 to be tested is placed on the circle. -Shaped cavity 2 on the base 1 on the outer periphery.

Example 2

This embodiment provides a three-coordinate inspection tool for the ring B to be tested, the inspection tool includes a square base with a side length of 400mm, and the height of the base is 80mm;

A circular cavity with a diameter of 285.02mm and a depth of 40mm is provided in the center of the base;

On the base, along the outer circumference of the circular cavity, there are three arc-shaped grooves distributed at equal angles for the stylus of the coordinate measuring machine to penetrate. The arc-shaped grooves have a width of 65mm and a depth of 30mm. , The radian is 0.3855, and the outer arc length is 80mm;

In the circular cavity of the base, three arc-shaped bosses 4 are staggered from the arc-shaped groove along the inner circumference of the circular cavity. The arc-shaped boss 4 has a height of 11.5 mm and a width of 11.5 mm. 10mm, the arc is 0.1754, and the outer arc length is 25mm;

On the upper surface of the base, a tape layer with a width of 55 mm is arranged along the outer circumference of the circular cavity.

2. Testing methods and results

The application method of the ring three-coordinate measuring tool provided in the embodiment 1 and the embodiment 2 includes:

Place the ring to be tested in the circular cavity of the inspection tool, place the convex block of the ring to be tested on the base of the outer circumference of the circular cavity, and then use the coordinate measuring machine to measure the size of the ring to be tested; The stylus of the coordinate measuring machine extends from the groove to detect the side wall and/or bottom of the ring to be measured, so as to measure the wall thickness, height, and convex dimensions of the ring.

Use the above method to repeat the measurement for each size 5 times, and calculate the average value, mean square error, absolute error and relative error of the measurement method. The mean square error refers to the average of the sum of squares of the difference between the measured value and the true value.

The specific measurement results of Example 1 and Example 2 are shown in Table 1 and Table 2, respectively.

Table 1

Table 2

It can be seen from Table 1 that the ring inspection tool provided in Example 1 is used to carry out the ring three-coordinate inspection, and the repeatability of repeated measurements is high. The mean square error is less than or equal to 0.31E-2mm ² , and the ring diameter is 5 The mean square error of the measurements is only 0.03E-2mm ² , indicating that the results of the 5 measurements are all near the standard value, and the deviation is small; at the same time, the absolute error between the average value of the 5 measurements and the standard value is ≤3.34E-2mm, where the size The absolute error of the wall thickness, which is prone to measurement errors, is only 2.22E-2mm, and the relative error is only 0.2775%, which meets the accuracy requirements of ring measurement, indicating that the ring inspection tool provided in Example 1 is in the inspection process The ring can be well fixed through the circular cavity, effectively preventing the ring from being deformed during the measurement process, and improving the repeatability and accuracy of the detection.

It can be seen from Table 2 that the three-coordinate inspection of the ring is carried out with the ring inspection tool provided in Example 2, and the data of each measurement has a small deviation from the standard value. The average value of 5 measurements for each size of the ring is compared with The standard value gap is small, the absolute value of the absolute error of the average value is less than or equal to 5.90E-2mm, and the absolute value of the relative error is less than or equal to 0.5640%, which meets the accuracy requirements of ring detection, and the mean square error of 5 measurements for each size ≤2.02E-2mm ² , the repeatability effect is good, which shows that the ring inspection tool provided in Example 2 can effectively prevent the ring from being deformed during the measurement process and ensure the accuracy and accuracy of the ring’s three-coordinate measurement.

In summary, the ring inspection tool provided in this application can effectively prevent the ring from being deformed during the measurement process, and can realize three-coordinate automatic measurement for different parts of the ring of different sizes, and measure the mean square error and relative error of multiple times. The absolute error and absolute error are both small. The relative error is less than or equal to 0.5640%, and the mean square error is less than or equal to 2.02E-2mm ^2. It has the advantages of high precision, high accuracy and good repeatability; at the same time, the checking fixture provided by this application has a simple structure, It is easy to process; when the measuring tool is used for ring three-coordinate measurement, the detection efficiency can also be improved, and it can be well applied in the field of semiconductor or mechanical processing.

The applicant declares that this application uses the above-mentioned embodiments to illustrate the detailed structural features of this application, but this application is not limited to the above-mentioned detailed structural features, which does not mean that this application must rely on the above-mentioned detailed structural features to be implemented.

Claims

A three-coordinate inspection tool for ring parts, wherein the inspection tool includes a base;

The base is provided with a circular cavity matching the ring to be tested;

On the base, along the outer circumference of the circular cavity is provided a groove into which the stylus of the coordinate measuring machine extends.
The inspection tool according to claim 1, wherein the depth of the circular cavity is 45-60 mm, optionally 48-55 mm.
The inspection tool according to claim 1 or 2, wherein the depth of the groove is smaller than the depth of the circular cavity;

Optionally, the depth of the groove is 10-15 mm smaller than the depth of the circular cavity;

Optionally, the grooves are equiangularly distributed along the outer circumference of the circular cavity;

Optionally, the number of the grooves is 2 to 4, and optionally 3;

Optionally, the groove is an arc-shaped groove;

Optionally, the width of the arc-shaped groove is greater than 45 mm, and may be 50-80 mm;

Optionally, the arc of the arc-shaped groove is 0.35-0.55, optionally 0.40-0.55.
The inspection tool according to any one of claims 1 to 3, wherein the height of the base is 90-110mm, optionally 95-105mm;

Optionally, the base is a circular base, a rectangular base or a triangular base, and may be a rectangular base;

Optionally, the length of the rectangular base is 550-800mm, optionally 580-750mm;

Optionally, the width of the rectangular base is 550-800 mm, optionally 580-750 mm.
The inspection tool according to any one of claims 1 to 4, wherein in the circular cavity of the base, a boss is provided along the inner circumference of the circular cavity;

Optionally, the boss and the groove are staggered;

Optionally, the height of the boss is 30-45mm, optionally 33-40mm;

Optionally, the number of the bosses is 2-8, optionally 4-6;

Optionally, the boss is an arc-shaped boss;

Optionally, the width of the arc-shaped boss is 5-30 mm, optionally 10-15 mm;

Optionally, the arc of the arc-shaped boss is 0.17 to 0.35, and optionally 0.20 to 0.30.
The inspection tool according to any one of claims 1 to 5, wherein a tape layer is provided on the upper surface of the base along the outer circumference of the circular cavity;

Optionally, the width of the tape layer is 50-80 mm, optionally 55-70 mm.
A ring three-coordinate measuring method, wherein the ring three-coordinate measuring tool according to any one of claims 1 to 6 is used for measurement.
The method according to claim 7, wherein the method comprises: placing the ring to be tested in the circular cavity of the gage, and placing the protrusion of the ring to be tested on the base on the outer periphery of the circular cavity , And then use a coordinate measuring machine to measure the size of the ring to be tested.
The method according to claim 8, wherein the method comprises: extending the stylus of the coordinate measuring machine into the groove, and detecting the side wall and/or the bottom of the ring to be measured.
The use of the ring three-coordinate measuring tool according to any one of claims 1 to 6 in the field of semiconductor and/or machining.