CN102128206B - Air static-pressure thrust bearing - Google Patents
Air static-pressure thrust bearing Download PDFInfo
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- CN102128206B CN102128206B CN 201110064971 CN201110064971A CN102128206B CN 102128206 B CN102128206 B CN 102128206B CN 201110064971 CN201110064971 CN 201110064971 CN 201110064971 A CN201110064971 A CN 201110064971A CN 102128206 B CN102128206 B CN 102128206B
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- bearing
- bearing body
- air
- working face
- thrust bearing
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Abstract
The invention discloses an air static-pressure thrust bearing. A bearing body is provided with an air inlet, an annular slot, a plurality of throttling holes, a plurality of air cavities, an air storage cavity, a plurality of damping holes, a bearing working face and an upper plane; the bearing body is provided with the annular slot on a position of the upper plane vertical towards the interior and a position on the inner side end of the air inlet, and one side wall of the annular slot is provided with a through hole which is connected and communicated with the inner side end of the air inlet; the bearing body is arranged between a supported member and a smooth plane, the upper plane of the bearing body and the bearing working face are respectively and mutually parallel to the inner plane of the supported member and the smooth plane; the bearing working face vertical towards the interior of the bearing body is respectively provided with the throttling hole, the air cavities and the damping holes, two ports of each throttling hole are respectively connected and communicated with the annular slot and the air cavities, and the inflow port of each damping hole is located below the air storage cavity; the air cavities and the outflow ports of the damping holes are located on the bearing working face; and the central position of the bearing body is provided with the air storage cavity communicated with the bearing working face through the damping holes.
Description
Technical field
The present invention relates to a kind of Aerostatic thrust bearing, be mainly used in the design of moving element in the equipment such as lithography machine, three coordinate measuring machine, belong to ultraprecise motion, ultra precise measurement technical field.
Background technique
Aerostatic thrust bearing have without wearing and tearing, little, the low speed of friction without creep, the series of advantages such as kinematic accuracy height, therefore be widely used in ultraprecise motion, precision measuremnt field, rigidity is low, bearing capacity is little, the shortcoming of poor stability but also exist simultaneously.
Increase supply gas pressure, change the air cavity shape, add bearing capacity and rigidity that the means such as vacuum or electromagnetism preload can the Effective Raise pneumatic bearing, but to the raising effect of bearing stability and not obvious.This is because in the existing Aerostatic thrust bearing structure, pressurized gas enter air cavity through the orifice restriction device, enter the bearing play by the air cavity edge again; The air cavity internal pressure reduces gradually along the bearing play, reduces to external pressure to bearing edge pressure, and system damping mainly comes from the viscous friction that throttle orifice and bearing working gap location gas molecule are subject to, and its damping value is very little.When bearing was vibrated or impact, damping is little just to cause decay time long, and system is difficult to stablize; In addition, unstable little vibration that also can cause bearing of gas source feed affects the Static and dynamic performance of bearing.
Along with the development of ultraprecise motion, ultra precise measurement technology, its system accuracy has reached nanometer and even Subnano-class, and the microvibration of system all can produce and have a strong impact on location, measurement result this moment; The pneumatic bearing system is widely used in ultraprecise motion, ultra precise measurement field, has Great significance therefore improve its stability.
Summary of the invention
Little in order to overcome existing Aerostatic thrust bearing damping, the shortcoming of poor stability the objective of the invention is to improve the damping capacity of Aerostatic thrust bearing.
To achieve these goals, the invention provides the technological scheme that Aerostatic thrust bearing technical solution problem adopts as follows: contain supported, bearing body and smooth flat; Contain suction port, annular groove, a plurality of throttle orifice, a plurality of air cavity, air storing cavity, a plurality of damping hole and bearing working face at bearing body; Bearing body also has plane on; Along the outer rim of bearing body with suction port radially is set; Vertically to the position of inside and be provided with annular groove in the position of suction port medial extremity, have an open-work at a sidewall of annular groove on the plane of bearing body, closely be connected between the medial extremity of described open-work and suction port and communicate; Bearing body is between supported and smooth flat, and the upper plane of bearing body and bearing working face are parallel to each other with supported inner plane and smooth flat respectively; Bearing working face at bearing body vertically arranges respectively a plurality of throttle orifices, a plurality of air cavity and a plurality of damping hole to the position of bearing body inside, the two ends of each throttle orifice respectively with annular groove be connected air cavity and be connected and communicate, the influent stream port of each damping hole be positioned at air storing cavity below; The flow port that goes out of each air cavity and each damping hole is positioned on the bearing working face; Pressurized air enters annular groove by suction port, enters air cavity through throttle orifice again; Center upper portion position at bearing body is provided with air storing cavity, and air storing cavity communicates with bearing working face through damping hole.
The invention has the beneficial effects as follows: bearing is provided with the large as far as possible air storing cavity of volume and a plurality of damping hole, when Aerostatic thrust bearing is impacted or produce vibration because source of the gas is unstable, gas enters air storing cavity by damping hole in the bearing working gap, this moment the gas storage intracavity gas the squeeze film effect played the effect of pneumatic spring can damping, add the frictional damping of a plurality of damping holes, effectively promoted the damping capacity of Aerostatic thrust bearing, Aerostatic thrust bearing can be stablized rapidly, overcome the conventional air static pressure thrust bearing long to vibration or impact-attenuating time, system is difficult to stable shortcoming.Damping hole is got 0.1-0.3mm, then loses too greatly the frictional damping to gas, too little then processing difficulties and damping hole easily occurs stop up, and its processing can be adopted processing technology identical with throttle orifice.
Description of drawings
Fig. 1 is the main sectional view of Aerostatic thrust bearing provided by the invention.
Fig. 2 is the worm's eye view (single row of holes is uniform) of thrust bearing among Fig. 1.
Fig. 3 is the worm's eye view (many rounds radial equipartition) of thrust bearing among Fig. 1.
Fig. 4 is the worm's eye view (many rounds radially are uniform staggered with) of thrust bearing among Fig. 1
Fig. 5 is the specific embodiment of Fig. 1 Air static pressure thrust bearing.
Part description among the figure,
Embodiment
Below in conjunction with accompanying drawing working principle of the present invention, structure and embodiment are further specified.
The structure of Aerostatic thrust bearing provided by the invention is shown such as Fig. 1, Fig. 2 and Fig. 5, and this bearing contains supported 1, bearing body 2, smooth flat 3.Contain suction port 4, annular groove 5, a plurality of throttle orifice 6, a plurality of air cavity 7, air storing cavity 8, a plurality of damping hole 9, bearing working face 10 at bearing body 2; Bearing body 2 also has plane 12 on; Along the outer rim of bearing body 2 with suction port 4 radially is set; Vertically to the position of inside and be provided with annular groove 5 in the position of suction port 4 medial extremitys, have an open-work 11 at a sidewall of annular groove 5 on the upper plane of bearing body 2, closely be connected between the medial extremity of described open-work 11 and suction port 4 and communicate; Bearing body 2 is between supported 1 and smooth flat 3, and the upper plane 12 of bearing body 2 and bearing working face 10 are parallel to each other with supported 1 inner plane and smooth flat 3 respectively; Bearing working face 10 at bearing body 2 vertically arranges respectively a plurality of air cavitys 7, a plurality of throttle orifice 6 and a plurality of damping hole 9 to the position of bearing body 2 inside, the two ends of each throttle orifice 6 respectively with annular groove 5 be connected air cavity 7 and be connected and communicate, the influent stream port of each damping hole 9 be positioned at air storing cavity 8 below; The flow port that goes out of each air cavity 7 and damping hole 9 is positioned on the bearing working face 10; Pressurized air enters annular groove 5 by suction port 4, enters air cavity 7 through throttle orifice 6 again; 12 middle positions are provided with air storing cavity 8 on the upper plane of bearing body 2, and air storing cavity 8 communicates with bearing working face 10 through damping hole 9.Symmetrical placement centered by between described annular groove 5, throttle orifice 6 and the air cavity 7.Described a plurality of throttle orifice 6 distributes along the radial symmetric of bearing body 2; Described damping hole 9 diameters are got 0.1mm-0.3mm; Adopt the sealing of O type circle between described supported 1 and the bearing body 2, and pass through screw fastening.Illustrate such as Fig. 2 and Fig. 3, described a plurality of damping holes 9 radially evenly distribute on bearing working face 10; Illustrate such as Fig. 4, described damping hole 9 single row or multiple rows on bearing working face 10 are arranged, and along bearing body 2 radially side by side or be interspersed.
When Aerostatic thrust bearing of the present invention passes into superheated steam, superheated steam enters annular groove 5 through suction port 4, enter air cavity 7 through throttle orifice 6 again, and radially reduce along Aerostatic thrust bearing, utilize working gas between bearing working face 10 and the smooth surface 3 and the pressure difference of ambient atmosphere to support Aerostatic thrust bearing; Part gas enters air storing cavity by damping hole 9, when Aerostatic thrust bearing is impacted or produce vibration because source of the gas is unstable, gas enters air storing cavity 8 by damping hole 9 in the Aerostatic thrust bearing working clearance, the squeeze film effect of air storing cavity 8 interior gases has played the effect of pneumatic spring at this moment, add the frictional damping of a plurality of damping holes 9, effectively promoted the damping capacity of Aerostatic thrust bearing, it is long to vibration or impact-attenuating time to be that the frictional damping acting in conjunction of the pneumatic spring effect of air storing cavity 8 and damping hole 9 has overcome the conventional air static pressure thrust bearing, and system vibration is difficult to stable shortcoming.
The above; only be the embodiment among the present invention, but protection scope of the present invention is not limited to this, anyly is familiar with the people of this technology in the disclosed technical scope of the present invention; conversion or the replacement expected can be understood, all of the present invention comprising within the scope should be encompassed in.
Claims (7)
1. Aerostatic thrust bearing, it is characterized in that: described Aerostatic thrust bearing contains supported (1), bearing body (2) and smooth flat (3); Contain suction port (4), annular groove (5), a plurality of throttle orifice (6), a plurality of air cavity (7), air storing cavity (8), a plurality of damping hole (9) and bearing working face (10) at bearing body (2); Bearing body (2) also has plane on (12); From the outer rim of bearing body (2) along bearing body suction port (4) is set radially; Vertical position to inside reaches and is provided with annular groove (5) in the position of suction port (4) medial extremity on the upper plane (12) of bearing body (2), sidewall at annular groove (5) has an open-work (11), closely is connected between the medial extremity of described open-work (11) and suction port (4) and communicates; Bearing body (2) is positioned between supported (1) and the smooth flat (3), and the upper plane (12) of bearing body (2) and bearing working face (10) are parallel to each other with inner plane and the smooth flat (3) of supported (1) respectively; Bearing working face (10) in bearing body (2) vertically arranges respectively a plurality of throttle orifices (6), a plurality of air cavity (7) and a plurality of damping hole (9) to the inner position of bearing body (2), the two ends of each throttle orifice (6) respectively with annular groove (5) be connected air cavity (7) and be connected and communicate, the influent stream port of each damping hole (9) be positioned at air storing cavity (8) below; The flow port that goes out of each air cavity (7) and each damping hole (9) is positioned on the bearing working face (10); Pressurized air enters annular groove (5) by suction port (4), enters air cavity (7) through throttle orifice (6) again; Be provided with air storing cavity (8) in the center upper portion position of bearing body (2), air storing cavity (8) communicates with bearing working face (10) through damping hole (9).
2. Aerostatic thrust bearing according to claim 1 is characterized in that, between described annular groove (5), throttle orifice (6) and the air cavity (7) centered by symmetrical placement.
3. Aerostatic thrust bearing according to claim 1 is characterized in that, a plurality of throttle orifices (6) distribute along the radial symmetric of bearing body (2).
4. Aerostatic thrust bearing according to claim 1 is characterized in that: a plurality of damping holes (9) distribute along the radial symmetric of bearing body (2).
5. Aerostatic thrust bearing according to claim 1, it is characterized in that: described damping hole (9) diameter is got 0.1mm-0.3mm.
6. Aerostatic thrust bearing according to claim 1 is characterized in that, adopts the sealing of O type circle between supported (1) and the bearing body (2), and passes through screw fastening.
7. Aerostatic thrust bearing according to claim 1 is characterized in that: described damping hole (9) is arranged in the upper single row or multiple rows of bearing working face (10), and along bearing body (2) radially side by side or be interspersed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110064971 CN102128206B (en) | 2011-03-15 | 2011-03-15 | Air static-pressure thrust bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110064971 CN102128206B (en) | 2011-03-15 | 2011-03-15 | Air static-pressure thrust bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102128206A CN102128206A (en) | 2011-07-20 |
| CN102128206B true CN102128206B (en) | 2013-02-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110064971 Expired - Fee Related CN102128206B (en) | 2011-03-15 | 2011-03-15 | Air static-pressure thrust bearing |
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| CN (1) | CN102128206B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105202028A (en) * | 2015-10-16 | 2015-12-30 | 西安工业大学 | Pressure-feed air bearing provided with elastic damping air chambers |
| CN105443579B (en) * | 2016-01-25 | 2016-11-16 | 武汉科技大学 | A kind of high pressure Circular Thrust gas bearing using disymmetry contraction section to supply and method for designing |
| CN106394946B (en) * | 2016-10-21 | 2019-08-23 | 哈尔滨工业大学 | Multi-turn independent gas supply crosses the enhanced gas foot of seam ability |
| CN106438701B (en) * | 2016-10-21 | 2018-09-07 | 哈尔滨工业大学 | More piece discharge orifice is knockdown to cross the enhanced gas foot of seam ability |
| CN109185339B (en) * | 2018-09-06 | 2020-03-17 | 西安交通大学 | Distributed multi-watershed aerostatic thrust bearing |
| CN110039330B (en) * | 2019-05-25 | 2020-03-10 | 哈尔滨工业大学 | High-thrust closed gas static pressure rotary table |
| CN110645272B (en) * | 2019-09-19 | 2021-06-29 | 上海卫星工程研究所 | Aerostatic bearing based on additional mass motion driven vibration energy consumption |
| CN110645271B (en) * | 2019-09-19 | 2020-12-01 | 上海卫星工程研究所 | Damping vibration absorption aerostatic bearing |
| CN110848259A (en) * | 2019-12-17 | 2020-02-28 | 中国工程物理研究院机械制造工艺研究所 | Static pressure gas thrust bearing with adjustable throttling effect |
| CN110906893B (en) * | 2019-12-19 | 2022-01-04 | 宁波江丰电子材料股份有限公司 | Ring piece three-coordinate detection tool and measurement method and application using same |
| CN111120513B (en) * | 2020-01-18 | 2022-01-28 | 湖南大学 | Static pressure gas thrust bearing |
| CN114060409A (en) * | 2020-07-29 | 2022-02-18 | 青岛海尔智能技术研发有限公司 | Gas bearing, compressor and air conditioning system |
| CN114251360A (en) * | 2020-09-24 | 2022-03-29 | 武汉科技大学 | Micro-nano porous throttling static pressure air-float thrust bearing |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0065337A1 (en) * | 1981-05-11 | 1982-11-24 | Koninklijke Philips Electronics N.V. | Aerostatic axial thrust bearing |
| DE3441426A1 (en) * | 1984-02-13 | 1985-08-14 | Viln Exni I Metal | Coordinate measuring machine |
| CN2261529Y (en) * | 1995-08-25 | 1997-09-03 | 西安交通大学 | High toughness static pressure gas thrust bearings |
| DE10062106A1 (en) * | 2000-12-13 | 2002-06-20 | Rieter Ingolstadt Spinnerei | Aerostatic thrust bearing, for the free end of an open-end spinning rotor shaft with an air gap, has a choke in the air feed to the gap formed by structured micro-pore holes |
| CN201013752Y (en) * | 2007-03-03 | 2008-01-30 | 大连海事大学 | Conical gradually expansion type air-intake static pressure air-float antithrust bearing |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2750636B2 (en) * | 1990-10-08 | 1998-05-13 | キヤノン株式会社 | Hydrostatic bearing |
-
2011
- 2011-03-15 CN CN 201110064971 patent/CN102128206B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0065337A1 (en) * | 1981-05-11 | 1982-11-24 | Koninklijke Philips Electronics N.V. | Aerostatic axial thrust bearing |
| DE3441426A1 (en) * | 1984-02-13 | 1985-08-14 | Viln Exni I Metal | Coordinate measuring machine |
| CN2261529Y (en) * | 1995-08-25 | 1997-09-03 | 西安交通大学 | High toughness static pressure gas thrust bearings |
| DE10062106A1 (en) * | 2000-12-13 | 2002-06-20 | Rieter Ingolstadt Spinnerei | Aerostatic thrust bearing, for the free end of an open-end spinning rotor shaft with an air gap, has a choke in the air feed to the gap formed by structured micro-pore holes |
| CN201013752Y (en) * | 2007-03-03 | 2008-01-30 | 大连海事大学 | Conical gradually expansion type air-intake static pressure air-float antithrust bearing |
Non-Patent Citations (1)
| Title |
|---|
| JP平4－145218A 1992.05.19 |
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| CN102128206A (en) | 2011-07-20 |
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