CN102128206A - Air static pressure thrust bearing - Google Patents
Air static pressure thrust bearing Download PDFInfo
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- CN102128206A CN102128206A CN2011100649719A CN201110064971A CN102128206A CN 102128206 A CN102128206 A CN 102128206A CN 2011100649719 A CN2011100649719 A CN 2011100649719A CN 201110064971 A CN201110064971 A CN 201110064971A CN 102128206 A CN102128206 A CN 102128206A
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- 230000003068 static effect Effects 0.000 title claims abstract description 32
- 238000013016 damping Methods 0.000 claims abstract description 47
- 238000007789 sealing Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 6
- 210000003414 extremity Anatomy 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
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Abstract
The invention relates to an air static pressure thrust bearing.A bearing body is provided with an air inlet, a ring groove, a plurality of throttling holes, a plurality of air cavities, an air storage cavity, a plurality of damping holes, a bearing working surface and an upper plane; the bearing comprises a bearing body, wherein annular grooves are arranged at the positions, vertically inwards, of the upper plane of the bearing body and at the position of the inner side end of an air inlet, a through hole is formed in one side wall of each annular groove, and the through holes are connected and communicated with the inner side end of the air inlet; the bearing body is positioned between the supported piece and the smooth plane, and the upper plane and the bearing working plane of the bearing body are respectively parallel to the inner plane and the smooth plane of the supported piece; a throttling hole, an air cavity and damping holes are respectively arranged in the bearing working face vertically towards the interior of the bearing body, two ports of the throttling hole are respectively connected and communicated with the annular groove and the air cavity, and an inflow port of each damping hole is positioned below the air storage cavity; the air cavity and the outflow port of the damping hole are positioned on the bearing working surface; the central position of the bearing body is provided with an air storage cavity which is communicated with the bearing working surface through a damping hole.
Description
Technical field
The present invention relates to a kind of static air pressure thrust bearing, be mainly used in the design of moving element in the equipment such as lithography machine, three coordinate measuring machine, belong to ultraprecise motion, ultra precise measurement technical field.
Background technique
The static air pressure thrust bearing has and does not have wearing and tearing, friction is little, low speed do not have creep, series of advantages such as kinematic accuracy height, so be widely used in ultraprecise motion, precision measuremnt field, rigidity is low, bearing capacity is little, the shortcoming of poor stability but the while also exists.
Increase supply gas pressure, change the air cavity shape, add bearing capacity and rigidity that means such as vacuum or electromagnetism preload can effectively improve pneumatic bearing, but also not obvious to the raising effect of bearing stability.This is because in the existing static air pressure thrust bearing structure, pressurized gas enter air cavity through the orifice restriction device, enter the bearing play by the air cavity edge again; The air cavity internal pressure reduces gradually along the bearing play, reduces to external pressure to bearing edge pressure, and system damping mainly comes from the viscous friction that throttle orifice and bearing working gap location gas molecule are subjected to, and its damping value is very little.When bearing was vibrated or impact, damping is little just to cause decay time long, and system is difficult to stablize; In addition, the instability of source of the gas air feed also can cause little vibration of bearing, influences the static state and the dynamic performance of bearing.
Along with the development of ultraprecise motion, ultra precise measurement technology, its system accuracy has reached nanometer and even Subnano-class, and the microvibration of system all can produce and have a strong impact on location, measurement result this moment; The pneumatic bearing system is widely used in ultraprecise motion, ultra precise measurement field, has great realistic meaning so improve its stability.
Summary of the invention
Little in order to overcome existing static air pressure thrust bearing damping, the shortcoming of poor stability the objective of the invention is to improve the damping capacity of static air pressure thrust bearing.
To achieve these goals, it is as follows to the invention provides the technological scheme that static air pressure thrust bearing technical solution problem adopts: contain supported, bearing body and smooth flat; On bearing body, contain suction port, annular groove, a plurality of throttle orifice, a plurality of air cavity, air storing cavity, a plurality of damping hole and bearing working face; Bearing body also has plane on; Along the outer rim of bearing body with suction port radially is set; Vertically to the position of inside and be provided with annular groove, on a sidewall of annular groove, have an open-work on the plane of bearing body, closely be connected between the medial extremity of described open-work and suction port and communicate in the position of suction port medial extremity; Bearing body is between supported and smooth flat, and the last plane of bearing body and bearing working face are parallel to each other with supported inner plane and smooth flat respectively; Bearing working face at bearing body vertically is provided with a plurality of throttle orifices, a plurality of air cavity and a plurality of damping hole respectively to the position of bearing body inside, the two ends of each throttle orifice are connected with each air cavity with annular groove respectively and communicate, the influent stream port of each damping hole be positioned at air storing cavity below; The flow port that goes out of each air cavity and each damping hole all is positioned on the bearing working face; Pressurized air enters annular groove by suction port, enters air cavity through throttle orifice again; Center upper portion position at bearing body is provided with air storing cavity, and air storing cavity communicates with bearing working face through damping hole.
The invention has the beneficial effects as follows: bearing is provided with the big as far as possible air storing cavity of volume and a plurality of damping hole, when the static air pressure thrust bearing is impacted or produces because of source of the gas is unstable when vibrating, gas enters air storing cavity by damping hole in the bearing working gap, this moment the gas storage intracavity gas the squeeze film effect played the effect of pneumatic spring can damping, add the frictional damping of a plurality of damping holes, effectively promoted the damping capacity of static air pressure thrust bearing, the static air pressure thrust bearing can be stablized rapidly, it is long to vibration or impact-attenuating time to have overcome the conventional air static pressure thrust bearing, and system is difficult to stable shortcoming.Damping hole is got 0.1-0.3mm, then loses the frictional damping to gas too greatly, too little then processing difficulties and damping hole easily takes place stop up, and its processing can be adopted identical processing technology with throttle orifice.
Description of drawings
Fig. 1 is the main sectional view of static air pressure thrust bearing provided by the invention.
Fig. 2 is the worm's eye view (single row of holes is uniform) of thrust bearing among Fig. 1.
Fig. 3 is the worm's eye view (many rounds radial equipartition) of thrust bearing among Fig. 1.
Fig. 4 is the worm's eye view (many rounds are radially staggered uniform) of thrust bearing among Fig. 1
Fig. 5 is the specific embodiment of air static pressure thrust bearing among Fig. 1.
Part description among the figure,
Embodiment
Below in conjunction with accompanying drawing working principle of the present invention, structure and embodiment are further specified.
As Fig. 1, Fig. 2 and Fig. 5 the structure of static air pressure thrust bearing provided by the invention is shown, this bearing contains supported 1, bearing body 2, smooth flat 3.On bearing body 2, contain suction port 4, annular groove 5, a plurality of throttle orifice 6, a plurality of air cavity 7, air storing cavity 8, a plurality of damping hole 9, bearing working face 10; Bearing body 2 also has plane 12 on; Along the outer rim of bearing body 2 with suction port 4 radially is set; The plane has an open-work 11 vertically to the position of inside and be provided with annular groove 5 in the position of suction port 4 medial extremitys on a sidewall of annular groove 5 on bearing body 2, closely is connected between the medial extremity of described open-work 11 and suction port 4 and communicates; Bearing body 2 is between supported 1 and smooth flat 3, and the last plane 12 of bearing body 2 and bearing working face 10 are parallel to each other with supported 1 inner plane and smooth flat 3 respectively; Bearing working face 10 at bearing body 2 vertically is provided with a plurality of air cavitys 7, a plurality of throttle orifice 6 and a plurality of damping hole 9 respectively to the position of bearing body 2 inside, the two ends of each throttle orifice 6 are connected with each air cavity 7 with annular groove 5 respectively and communicate, the influent stream port of each damping hole 9 be positioned at air storing cavity 8 below; The flow port that goes out of each air cavity 7 and damping hole 9 all is positioned on the bearing working face 10; Pressurized air enters annular groove 5 by suction port 4, enters air cavity 7 through throttle orifice 6 again; Plane 12 middle positions are provided with air storing cavity 8 on bearing body 2, and air storing cavity 8 communicates with bearing working face 10 through damping hole 9.Be the center symmetrical placement between described annular groove 5, throttle orifice 6 and the air cavity 7.Described a plurality of throttle orifice 6 distributes along the radial symmetric of bearing body 2; Described damping hole 9 diameters are got 0.1mm-0.3mm; Adopt the sealing of O type circle between described supported 1 and the bearing body 2, and fastening by screw.Illustrate as Fig. 2 and Fig. 3, described a plurality of damping holes 9 radially evenly distribute on bearing working face 10; Illustrate as Fig. 4, described damping hole 9 single row or multiple rows on bearing working face 10 are arranged, and along bearing body 2 radially side by side or be interspersed.
When static air pressure thrust bearing of the present invention feeds superheated steam, superheated steam enters annular groove 5 through suction port 4, enter air cavity 7 through throttle orifice 6 again, and radially reduce along the static air pressure thrust bearing, utilize the working gas between bearing working face 10 and the smooth surface 3 and the pressure difference of ambient atmosphere to support the static air pressure thrust bearing; Part gas enters air storing cavity by damping hole 9, when the static air pressure thrust bearing is impacted or produces because of source of the gas is unstable when vibrating, gas enters air storing cavity 8 by damping hole 9 in the static air pressure thrust bearing working clearance, the squeeze film effect of air storing cavity 8 interior gases has played the effect of pneumatic spring at this moment, add the frictional damping of a plurality of damping holes 9, effectively promoted the damping capacity of static air pressure thrust bearing, it is long to vibration or impact-attenuating time to be that the frictional damping acting in conjunction of the pneumatic spring effect of air storing cavity 8 and damping hole 9 has overcome the conventional air static pressure thrust bearing, and system vibration is difficult to stable shortcoming.
The above; only be the embodiment among the present invention, but protection scope of the present invention is not limited thereto, anyly is familiar with the people of this technology in the disclosed technical scope of the present invention; conversion or the replacement expected can be understood, all of the present invention comprising within the scope should be encompassed in.
Claims (7)
1. static air pressure thrust bearing, it is characterized in that: described static air pressure thrust bearing contains supported (1), bearing body (2) and smooth flat (3); On bearing body (2), contain suction port (4), annular groove (5), a plurality of throttle orifice (6), a plurality of air cavity (7), air storing cavity (8), a plurality of damping hole (9) and bearing working face (10); Bearing body (2) also has plane on (12); Along the outer rim of bearing body (2) with suction port (4) radially is set; On the plane of bearing body (2) vertically to the position of inside and be provided with annular groove (5) in the position of suction port (4) medial extremity, on a sidewall of annular groove (5), have an open-work (11), closely be connected between the medial extremity of described open-work (11) and suction port (4) and communicate; Bearing body (2) is positioned between supported (1) and the smooth flat (3), and the last plane (12) of bearing body (2) and bearing working face (10) are parallel to each other with the inner plane and the smooth flat (3) of supported (1) respectively; Bearing working face (10) in bearing body (2) vertically is provided with a plurality of throttle orifices (6), a plurality of air cavity (7) and a plurality of damping hole (9) respectively to the inner position of bearing body (2), the two ends of each throttle orifice (6) are connected with each air cavity (7) with annular groove (5) respectively and communicate, the influent stream port of each damping hole (9) be positioned at air storing cavity (8) below; The flow port that goes out of each air cavity (7) and each damping hole (9) all is positioned on the bearing working face (10); Pressurized air enters annular groove (5) by suction port (4), enters air cavity (7) through throttle orifice (6) again; Be provided with air storing cavity (8) in the center upper portion position of bearing body (2), air storing cavity (8) communicates with bearing working face (10) through damping hole (9).
2. static air pressure thrust bearing according to claim 1 is characterized in that, is the center symmetrical placement between described annular groove (5), throttle orifice (6) and the air cavity (7).
3. static air pressure thrust bearing according to claim 1 is characterized in that, a plurality of throttle orifices (6) distribute along the radial symmetric of bearing body (2).
4. static air pressure thrust bearing according to claim 1 is characterized in that: a plurality of damping holes (9) distribute along the radial symmetric of bearing body (2).
5. static air pressure thrust bearing according to claim 1 is characterized in that: described damping hole (9) diameter is got 0.1mm-0.3mm.
6. static air pressure thrust bearing according to claim 1 is characterized in that, adopts the sealing of O type circle between supported (1) and the bearing body (2), and fastening by screw.
7. static air pressure thrust bearing according to claim 1 is characterized in that: described damping hole (9) is gone up single row or multiple rows at bearing working face (10) and is arranged, and along bearing body (2) radially side by side or be interspersed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110064971 CN102128206B (en) | 2011-03-15 | 2011-03-15 | Air static pressure thrust bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110064971 CN102128206B (en) | 2011-03-15 | 2011-03-15 | Air static pressure thrust bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102128206A true CN102128206A (en) | 2011-07-20 |
| CN102128206B CN102128206B (en) | 2013-02-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110064971 Expired - Fee Related CN102128206B (en) | 2011-03-15 | 2011-03-15 | Air static pressure thrust bearing |
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| Country | Link |
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| CN (1) | CN102128206B (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105202028A (en) * | 2015-10-16 | 2015-12-30 | 西安工业大学 | Pressure-feed air bearing provided with elastic damping air chambers |
| CN105443579A (en) * | 2016-01-25 | 2016-03-30 | 武汉科技大学 | High-pressure disc thrust gas bearing adopting double symmetrical contraction sections for gas supply and design method |
| CN106394946A (en) * | 2016-10-21 | 2017-02-15 | 哈尔滨工业大学 | Gap passing capacity improved air foot capable of realizing multi-circle independent air supply |
| CN106438701A (en) * | 2016-10-21 | 2017-02-22 | 哈尔滨工业大学 | Multi-orifice-combined gap passing capacity enhanced air foot |
| CN109185339A (en) * | 2018-09-06 | 2019-01-11 | 西安交通大学 | A kind of distribution more piece basin gas static pressure thrust bearing |
| CN110039330A (en) * | 2019-05-25 | 2019-07-23 | 哈尔滨工业大学 | A kind of high thrust enclosed gas-static turntable |
| CN110645271A (en) * | 2019-09-19 | 2020-01-03 | 上海卫星工程研究所 | Damping vibration absorption aerostatic bearing |
| CN110645272A (en) * | 2019-09-19 | 2020-01-03 | 上海卫星工程研究所 | Aerostatic bearing based on additional mass motion driven vibration energy consumption |
| CN110848259A (en) * | 2019-12-17 | 2020-02-28 | 中国工程物理研究院机械制造工艺研究所 | Static pressure gas thrust bearing with adjustable throttling effect |
| CN110906893A (en) * | 2019-12-19 | 2020-03-24 | 宁波江丰电子材料股份有限公司 | Ring piece three-coordinate detection tool and measurement method and application using same |
| CN110939656A (en) * | 2019-12-06 | 2020-03-31 | 天津航天机电设备研究所 | Inclined throttling type static pressure air bearing |
| CN111120513A (en) * | 2020-01-18 | 2020-05-08 | 湖南大学 | Static pressure gas thrust bearing |
| WO2022022100A1 (en) * | 2020-07-29 | 2022-02-03 | 青岛海尔智能技术研发有限公司 | Gas bearing, compressor, and air conditioner system |
| CN114251360A (en) * | 2020-09-24 | 2022-03-29 | 武汉科技大学 | Micro-nano porous throttling static pressure air-float thrust bearing |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0065337A1 (en) * | 1981-05-11 | 1982-11-24 | Koninklijke Philips Electronics N.V. | Aerostatic axial thrust bearing |
| DE3441426A1 (en) * | 1984-02-13 | 1985-08-14 | Viln Exni I Metal | Coordinate measuring machine |
| JPH04145218A (en) * | 1990-10-08 | 1992-05-19 | Canon Inc | Static-pressure bearing |
| CN2261529Y (en) * | 1995-08-25 | 1997-09-03 | 西安交通大学 | High-rigidity static pressure gas thrust bearing |
| DE10062106A1 (en) * | 2000-12-13 | 2002-06-20 | Rieter Ingolstadt Spinnerei | Aerostatic thrust bearing, for the free end of an open-end spinning rotor shaft with an air gap, has a choke in the air feed to the gap formed by structured micro-pore holes |
| CN201013752Y (en) * | 2007-03-03 | 2008-01-30 | 大连海事大学 | Conical gradually expansion type air-intake static pressure air-float antithrust bearing |
-
2011
- 2011-03-15 CN CN 201110064971 patent/CN102128206B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0065337A1 (en) * | 1981-05-11 | 1982-11-24 | Koninklijke Philips Electronics N.V. | Aerostatic axial thrust bearing |
| DE3441426A1 (en) * | 1984-02-13 | 1985-08-14 | Viln Exni I Metal | Coordinate measuring machine |
| JPH04145218A (en) * | 1990-10-08 | 1992-05-19 | Canon Inc | Static-pressure bearing |
| CN2261529Y (en) * | 1995-08-25 | 1997-09-03 | 西安交通大学 | High-rigidity static pressure gas thrust bearing |
| DE10062106A1 (en) * | 2000-12-13 | 2002-06-20 | Rieter Ingolstadt Spinnerei | Aerostatic thrust bearing, for the free end of an open-end spinning rotor shaft with an air gap, has a choke in the air feed to the gap formed by structured micro-pore holes |
| CN201013752Y (en) * | 2007-03-03 | 2008-01-30 | 大连海事大学 | Conical gradually expansion type air-intake static pressure air-float antithrust bearing |
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105202028A (en) * | 2015-10-16 | 2015-12-30 | 西安工业大学 | Pressure-feed air bearing provided with elastic damping air chambers |
| CN105443579A (en) * | 2016-01-25 | 2016-03-30 | 武汉科技大学 | High-pressure disc thrust gas bearing adopting double symmetrical contraction sections for gas supply and design method |
| CN105443579B (en) * | 2016-01-25 | 2016-11-16 | 武汉科技大学 | A kind of high pressure Circular Thrust gas bearing using disymmetry contraction section to supply and method for designing |
| CN106394946A (en) * | 2016-10-21 | 2017-02-15 | 哈尔滨工业大学 | Gap passing capacity improved air foot capable of realizing multi-circle independent air supply |
| CN106438701A (en) * | 2016-10-21 | 2017-02-22 | 哈尔滨工业大学 | Multi-orifice-combined gap passing capacity enhanced air foot |
| CN106438701B (en) * | 2016-10-21 | 2018-09-07 | 哈尔滨工业大学 | More piece discharge orifice is knockdown to cross the enhanced gas foot of seam ability |
| CN106394946B (en) * | 2016-10-21 | 2019-08-23 | 哈尔滨工业大学 | Multi-turn independent gas supply crosses the enhanced gas foot of seam ability |
| CN109185339A (en) * | 2018-09-06 | 2019-01-11 | 西安交通大学 | A kind of distribution more piece basin gas static pressure thrust bearing |
| CN110039330A (en) * | 2019-05-25 | 2019-07-23 | 哈尔滨工业大学 | A kind of high thrust enclosed gas-static turntable |
| CN110645272A (en) * | 2019-09-19 | 2020-01-03 | 上海卫星工程研究所 | Aerostatic bearing based on additional mass motion driven vibration energy consumption |
| CN110645271A (en) * | 2019-09-19 | 2020-01-03 | 上海卫星工程研究所 | Damping vibration absorption aerostatic bearing |
| CN110645272B (en) * | 2019-09-19 | 2021-06-29 | 上海卫星工程研究所 | Aerostatic bearing based on additional mass motion driven vibration energy consumption |
| CN110939656A (en) * | 2019-12-06 | 2020-03-31 | 天津航天机电设备研究所 | Inclined throttling type static pressure air bearing |
| CN110848259A (en) * | 2019-12-17 | 2020-02-28 | 中国工程物理研究院机械制造工艺研究所 | Static pressure gas thrust bearing with adjustable throttling effect |
| CN110906893A (en) * | 2019-12-19 | 2020-03-24 | 宁波江丰电子材料股份有限公司 | Ring piece three-coordinate detection tool and measurement method and application using same |
| CN110906893B (en) * | 2019-12-19 | 2022-01-04 | 宁波江丰电子材料股份有限公司 | Ring piece three-coordinate detection tool and measurement method and application using same |
| CN111120513A (en) * | 2020-01-18 | 2020-05-08 | 湖南大学 | Static pressure gas thrust bearing |
| CN111120513B (en) * | 2020-01-18 | 2022-01-28 | 湖南大学 | Static pressure gas thrust bearing |
| WO2022022100A1 (en) * | 2020-07-29 | 2022-02-03 | 青岛海尔智能技术研发有限公司 | Gas bearing, compressor, and air conditioner system |
| CN114251360A (en) * | 2020-09-24 | 2022-03-29 | 武汉科技大学 | Micro-nano porous throttling static pressure air-float thrust bearing |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102128206B (en) | 2013-02-06 |
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