CN110039330A - A kind of high thrust enclosed gas-static turntable - Google Patents
A kind of high thrust enclosed gas-static turntable Download PDFInfo
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- CN110039330A CN110039330A CN201910442417.6A CN201910442417A CN110039330A CN 110039330 A CN110039330 A CN 110039330A CN 201910442417 A CN201910442417 A CN 201910442417A CN 110039330 A CN110039330 A CN 110039330A
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- 238000007789 sealing Methods 0.000 claims abstract description 4
- 238000005259 measurement Methods 0.000 claims description 15
- 238000013016 damping Methods 0.000 claims description 11
- 238000005495 investment casting Methods 0.000 abstract description 2
- 238000007667 floating Methods 0.000 description 20
- 230000003068 static effect Effects 0.000 description 14
- 230000002706 hydrostatic effect Effects 0.000 description 6
- 238000003754 machining Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 244000145845 chattering Species 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention belongs to super hot investment casting apparatus fields, combine enclosed gas-static turntable more particularly to a kind of radial thrust, more particularly to a kind of high thrust enclosed gas-static turntable, upper end inside the shell is fixedly connected with including air-bearing stator, upper thrust plate, Work piece rotary disc, transverse bearing, shell, lower thrust plate, rotor shaft, seal base, damper, flow controller I and flow controller II, the air-bearing stator；The lower end fixed connection and sealing bottom plate of the shell；The transverse bearing interference fit is connected in air-bearing stator；The upper and lower ends of the transverse bearing are fixedly connected with upper thrust plate and lower thrust plate respectively；The upper end of the upper thrust plate is fixedly connected with Work piece rotary disc；The lower end of the lower thrust plate is fixedly connected with rotor shaft；The present invention while improving gas-static turntable bearing capacity and can guarantee certain rigidity, meet the requirement of high-bearing capacity precision manufactureing equipment.
Description
Technical field
The invention belongs to super hot investment casting apparatus fields, and in particular to a kind of radial thrust joint enclosed gas-static turn
Platform, more particularly to a kind of high thrust enclosed gas-static turntable.
Background technique
In Ultra-precision Turning field, measuring instrument is particularly important.Aerostatic bearing is because of its high-precision, free of contamination feature
And it is widely used on measuring circurmarotate.But due to the compressibility of gas, the bearing capacity and rigidity of aerostatic bearing are lower
It is not able to satisfy High-accuracy heavy-load application so as to cause turntable performance.
Aerostatic bearing in the prior art has the following problems:
(1) problem of bearing capacity deficiency improves supply gas pressure and Pneumatic hammer is easy to cause to vibrate and loss of stability；
(2) greater stiffness can be lost when improving the bearing capacity of aerostatic bearing, so that the precision of turntable can be reduced
Problem.
Problem above results in existing aerostatic bearing technology and is not met by high-bearing capacity precision manufactureing equipment, example
Such as space flight simulation test equipment, the requirement of roundness measuring equipment.
Summary of the invention
The object of the present invention is to provide a kind of high thrust enclosed gas-static turntables, can effectively solve in the prior art
Problem while improving gas-static turntable bearing capacity and can guarantee certain rigidity, meet high-bearing capacity precision manufactureing
The requirement of equipment.
The purpose of the present invention is achieved through the following technical solutions:
A kind of high thrust enclosed gas-static turntable, including air-bearing stator, upper thrust plate, Work piece rotary disc, radial axle
It holds, shell, lower thrust plate, rotor shaft, seal base, damper, flow controller I and flow controller II, the air-bearing stator
It is fixedly connected with upper end inside the shell；The lower end fixed connection and sealing bottom plate of the shell；The transverse bearing interference fit
It is connected in air-bearing stator；The upper and lower ends of the transverse bearing are fixedly connected with upper thrust plate and lower thrust plate respectively；
The upper end of the upper thrust plate is fixedly connected with Work piece rotary disc；The lower end of the lower thrust plate is fixedly connected with rotor shaft；
The air-bearing stator, upper thrust plate, lower thrust plate, transverse bearing, rotor shaft are annulus shape, workpiece
Turntable is circle；Upper thrust plate, transverse bearing are fixedly connected with lower thrust plate, are guaranteed while three's centerline height is overlapped also
The axial distance for adjusting thrust plate and lower thrust plate adjusts axial distance in assembly, thrust plate, radial axle in adjustment
It holds and is fixedly connected again after lower thrust plate.Work piece rotary disc upper surface and upper thrust plate central axis, rotor shaft are set
It sets at the center of lower thrust plate and the two center line is overlapped.
The upper surface of the air-bearing stator is distributed uniformly and circumferentially multiple throttle orifices and multiple damping holes, damping
Hole is located at the outside of throttle orifice；It is respectively fixedly connected in multiple throttle orifices between flow controller an I, multiple flow controller I and passes through gas
Floating bearing stator upper surface along the circumferential direction mills out the minute groove I connection come；One is respectively fixedly connected in multiple damping holes
A damper, between multiple dampers by air-bearing stator upper surface along the circumferential direction mill out come minute groove II connect
It is logical；Between the flow controller I and damper of same radial direction by air-bearing stator upper surface radially mill out come
Minute groove III connection；The inner ring surface of the air-bearing stator is equipped with the multiple radially installed holes of two rows, Duo Gejing
A flow controller II is respectively fixedly connected with into mounting hole.
Pressed gas enters upper thrust plate and air-bearing by the flow controller I and damper of air-bearing stator upper surface
The gap of stator upper surface forms floating aerostatic bearing thrust air film, by upper thrust plate, air-bearing stator upper surface and
The flow controller I and damper of air-bearing stator upper surface form floating gas static pressure thrust bearing.
Pressed gas from flow controller II enter between transverse bearing and air-bearing stator inner loop face formed radial gas it is quiet
Last item holds air film.Radial gas hydrostatic bearing is formed by transverse bearing, air-bearing stator inner loop face and flow controller II.In addition,
Pressed gas from air-bearing stator upper surface and upper thrust sheet separation, from air-bearing stator inner loop face and transverse bearing gap
It is formed into air-bearing stator lower surface and lower thrust plate gap and floats downward gas-static thrust air film.By under air-bearing stator
Surface and lower thrust plate composition float downward gas static pressure thrust bearing.By floating gas static pressure thrust bearing and floats downward gas-static and stop
Thrust bearing forms enclosed gas static pressure thrust bearing.
A kind of high thrust enclosed gas-static turntable further includes drive module and measurement module；The drive module
Be sequentially connected rotor shaft；The measurement module is fixedly connected with lower end inside the shell, and rotor shaft is located at measurement module
Inside.
The center line coincidence of the air-bearing stator, upper thrust plate, transverse bearing, lower thrust plate, rotor shaft.
The central axis of the upper surface of the Work piece rotary disc and upper thrust plate is arranged.
The diameter of the upper thrust plate is greater than the diameter of lower thrust plate.
The drive module uses torque motor.
The measurement module uses Circular gratings component.
The flow controller I is arranged along the axial direction of air-bearing stator.
The flow controller II is arranged along the radial direction of air-bearing stator.
The invention has the benefit that a kind of high thrust enclosed gas-static turntable of the invention, can effectively solve existing
There is the problems in technology, while improving gas-static turntable bearing capacity and can guarantee certain rigidity, meet high-mechanic
The requirement of power precision manufactureing equipment.
Compared with prior art, the beneficial effects of the present invention are:
1) using the lower thrust plate of larger-diameter upper thrust plate and small diameter, be conducive to raising enclosed gas-static and stop
The bearing capacity of thrust bearing is provided simultaneously with certain rigidity to guarantee the precision of turntable.
2) using radial thrust joint enclosed aerostatic bearing structure, (i.e. radial cylindrical bearing and upper and lower two planes are stopped
Thrust bearing combines), be conducive to improve machining accuracy and then improve the precision and rotating accuracy of turntable.
3) throttle orifice is not opened up, by floating gas static pressure thrust bearing air film and radial direction using air-bearing stator lower surface
Aerostatic bearing air film is the organization plan for floating downward gas static pressure thrust bearing gas supply, can be further improved the carrying of turntable
Ability, while gas consumption can also be greatly lowered.
4) small groove is opened up uniformly to expand floating aerostatic bearing thrust gas in air-bearing stator upper surface
The high-pressure area of film, and then the bearing capacity and rigidity of floating gas static pressure thrust bearing are improved, it is quiet to be finally reached raising gas
Pressure turntable bearing capacity and the purpose for guaranteeing certain rigidity.
5) damping hole is set in air-bearing stator upper surface, it is possible to prevente effectively from " pneumatic hammer " chattering goes out
It is existing, improve the stability of aerostatic bearing.
To sum up, the present invention can satisfy the high-bearing capacity precision manufactureing equipment of measurement large-mass workpiece, such as space flight simulation
The requirement performance requirement of test equipment, roundness measuring equipment etc..
Detailed description of the invention
Fig. 1 is overall structure main view of the invention；
Fig. 2 is local structure top view of the invention.
In figure: air-bearing stator 1；Minute groove I1-1；Minute groove II1-2；Minute groove III1-3；Throttle orifice 1-
4；Damping hole 1-5；Upper thrust plate 2；Work piece rotary disc 3；Transverse bearing 4；Shell 5；Lower thrust plate 6；Rotor shaft 7；Seal base
8。
Specific embodiment
Invention is further described in detail by 1-2 with reference to the accompanying drawing.
Specific embodiment 1:
As shown in Figs. 1-2, a kind of high thrust enclosed gas-static turntable, including air-bearing stator 1, upper thrust plate 2, work
Part turntable 3, transverse bearing 4, shell 5, lower thrust plate 6, rotor shaft 7, seal base 8, damper, flow controller I and flow controller
II, the air-bearing stator 1 are fixedly connected on the upper end of 5 inside of shell；The lower end fixed connection and sealing bottom plate of the shell 5
8；The interference fit of transverse bearing 4 is connected in air-bearing stator 1；The upper and lower ends of the transverse bearing 4 respectively with it is upper
Thrust plate 2 is fixedly connected with lower thrust plate 6, guarantees what transverse bearing 4, upper thrust plate 2 and 6 centerline height of lower thrust plate were overlapped
The axial distance of thrust plate 2 Yu lower thrust plate 4 is also adjusted simultaneously, it is this compact-sized, be conducive to reduce structure size
Machining accuracy is improved, which refers to the height of transverse bearing, floating aerostatic bearing thrust air film and float downward gas
The sum of the thickness of static thrust air film, floating gas-static thrust air film and float downward gas-static thrust air film gap by adjusting
The axial distance of upper thrust plate 2 and lower thrust plate 6 is realized.The upper end of the upper thrust plate 2 is fixedly connected with Work piece rotary disc 3；Institute
The lower end for stating lower thrust plate 6 is fixedly connected with rotor shaft 7；The upper surface of the air-bearing stator 1 is along the circumferential direction uniformly divided
The multiple throttle orifice 1-4 of cloth and multiple damping hole 1-5, damping hole 1-5 are located at the outside of throttle orifice 1-4；Divide in multiple throttle orifice 1-4
It is not fixedly connected between flow controller an I, multiple flow controller I and is connected by the minute groove I1-1 of 1 upper surface of air-bearing stator
It is logical；It is respectively fixedly connected with a damper in multiple damping hole 1-5, passes through table on air-bearing stator 1 between multiple dampers
The minute groove II1-2 in face is connected to；Pass through table on air-bearing stator 1 between the flow controller I and damper of same radial direction
The minute groove III1-3 in face is connected to；The structure setting of minute groove I1-1, minute groove II1-2 and minute groove III1-3,
Be conducive to improve the pressure distribution of aerostatic bearing air film, and then achieve the purpose that improve gas-static turntable performance.It is described
The inner ring surface of air-bearing stator 1 is equipped with the multiple radially installed holes of two rows, fixed respectively in multiple radially installed holes to connect
A flow controller II is met, is conducive to improve rotating accuracy and angular rigidity of the invention.Multiple flow controller II, multiple flow controller I and
Connected between multiple dampers by the same gas circuit that minute groove I1-1, minute groove II1-2 and minute groove III1-3 are constituted
It connects, conducive to guaranteeing supply gas pressure equalization to improve angular rigidity and stability of the invention.
Compressed air enters upper thrust plate 2 and air-bearing shafts by the flow controller I and damper of 1 upper surface of air-bearing stator
The gap for holding 1 upper surface of stator forms floating aerostatic bearing thrust air film, by table on upper thrust plate 2, air-bearing stator 1
The flow controller I and damper of 1 upper surface of face and air-bearing stator form floating gas static pressure thrust bearing.
Compressed air enters between 1 inner ring surface of transverse bearing 4 and air-bearing stator from flow controller II forms radial gas
Hydrostatic bearing air film.Radial gas hydrostatic bearing is formed by transverse bearing 4,1 inner ring surface of air-bearing stator and flow controller II.This
Outside, pressed gas from 1 upper surface of air-bearing stator and upper 2 gap of thrust plate, from 1 inner ring surface of air-bearing stator and radial axle
It holds 4 gaps and enters 1 lower surface of air-bearing stator and 6 gap of lower thrust plate and formed and float downward gas-static thrust air film.By air bearing
1 lower surface of bearing stator and the composition of lower thrust plate 6 float downward gas static pressure thrust bearing.By floating gas static pressure thrust bearing under
Floating gas static pressure thrust bearing forms enclosed gas static pressure thrust bearing.
When work, compressed air enters the flow controller I and damper of the upper surface of air-bearing stator 1 by gas circuit,
Floating aerostatic bearing air film is formed between upper thrust plate 2 and the upper surface of air-bearing stator 1, on air-bearing stator 1
The structure setting of the minute groove I1-1 on surface, minute groove II1-2 and minute groove III1-3 are conducive to improve floating gas
The pressure of hydrostatic bearing air film is distributed, and then the pressure integral for improving air film is bearing capacity；Compressed gas is set into radial simultaneously
The flow controller II set forms radial gas hydrostatic bearing gas in the inner ring surface of air-bearing stator 1 and the outer ring surface of transverse bearing 4
Film.It is formed between air-bearing stator 1 and lower thrust plate 6 and floats downward aerostatic bearing air film, since this floats downward gas-static
The gas source of bearing air film supplies without throttle orifice in upper thrust air film and transverse bearing air film, therefore floats downward gas-static axis
The pressure integral for holding air film is smaller, this is conducive to the bearing capacity for improving entire enclosed aerostatic bearing.In addition, lower thrust plate 6
Diameter be less than upper thrust plate 2 diameter, further increase the bearing capacity of entire enclosed aerostatic bearing, and then improve gas
The bearing capacity of body static pressure turntable.
Specific embodiment 2:
As shown in Figs. 1-2, a kind of high thrust enclosed gas-static turntable further includes drive module and measurement module；
The drive module transmission connection rotor shaft 7；The measurement module is fixedly connected on the lower end of 5 inside of shell, rotor shaft 7
Positioned at the inside of measurement module.The driving and measurement of a kind of high thrust enclosed gas-static turntable are with drive module and survey
Module is measured come what is completed, the contents of the section is regular content, rather than main contents of the invention, so only briefly introduce.
Specific embodiment 3:
As shown in Figs. 1-2, the air-bearing stator 1, upper thrust plate 2, transverse bearing 4, lower thrust plate 6, rotor shaft 7
Center line be overlapped, it is compact-sized, be conducive to reduce structure size improve machining accuracy.
Specific embodiment 4:
As shown in Figs. 1-2, the central axis of the upper surface of the Work piece rotary disc 3 and upper thrust plate 2 is arranged, Work piece rotary disc
3 upper surfaces and the installation of upper 2 central axis of thrust plate can guarantee measurement accuracy.
Specific embodiment 5:
As shown in Figs. 1-2, the diameter of the upper thrust plate 2 is greater than the diameter of lower thrust plate 6.
Specific embodiment 6:
As shown in Figs. 1-2, the drive module uses torque motor, flexible clutch can also be used, with general motor
Driving, depends on actual need to select.
Specific embodiment 7:
As shown in Figs. 1-2, the measurement module uses Circular gratings component 9.
Specific embodiment 8:
As shown in Figs. 1-2, the flow controller I is arranged along the axial direction of air-bearing stator 1.
Specific embodiment 9:
As shown in Figs. 1-2, the flow controller II is arranged along the radial direction of air-bearing stator 1.
The operation principle of the present invention is that: when work, compressed air enters the upper surface of air-bearing stator 1 by gas circuit
Flow controller I and damper form floating aerostatic bearing gas between upper thrust plate 2 and the upper surface of air-bearing stator 1
Film, the structure setting of the minute groove I1-1 of 1 upper surface of air-bearing stator, minute groove II1-2 and minute groove III1-3,
Be conducive to improve the pressure distribution of floating aerostatic bearing air film, and then the pressure integral for improving air film is bearing capacity；Compression
Gas enters the flow controller II being arranged radially simultaneously, is formed in the inner ring surface of air-bearing stator 1 and the outer ring surface of transverse bearing 4
Radial gas hydrostatic bearing air film.It is formed between air-bearing stator 1 and lower thrust plate 6 and floats downward aerostatic bearing air film,
Since the gas source for floating downward aerostatic bearing air film is in upper thrust air film and transverse bearing air film, supplied without throttle orifice
Gas, therefore the pressure integral for floating downward aerostatic bearing air film is smaller, this is conducive to improve holding for entire enclosed aerostatic bearing
Carry power.In addition, the diameter of lower thrust plate 6 is less than the diameter of upper thrust plate 2, entire enclosed aerostatic bearing is further increased
Bearing capacity, and then improve the bearing capacity of gas-static turntable.
Certainly, above description is not limitation of the present invention, and the present invention is also not limited to the example above, the art
The variations, modifications, additions or substitutions that those of ordinary skill is made within the essential scope of the present invention also belong to guarantor of the invention
Protect range.
Claims (9)
1. a kind of high thrust enclosed gas-static turntable, including air-bearing stator (1), upper thrust plate (2), Work piece rotary disc (3),
Transverse bearing (4), shell (5), lower thrust plate (6), rotor shaft (7), seal base (8), damper, flow controller I and throttling
Device II, it is characterised in that: the air-bearing stator (1) is fixedly connected on the upper end on the inside of shell (5)；The shell (5)
Lower end fixed connection and sealing bottom plate (8)；Transverse bearing (4) interference fit is connected in air-bearing stator (1)；The diameter
It is fixedly connected respectively with upper thrust plate (2) and lower thrust plate (6) to the upper and lower ends of bearing (4)；The upper thrust plate (2) it is upper
End is fixedly connected with Work piece rotary disc (3)；The lower end of the lower thrust plate (6) is fixedly connected with rotor shaft (7)；The air-bearing is fixed
The upper surface of sub (1) is distributed uniformly and circumferentially multiple throttle orifices (1-4) and multiple damping holes (1-5), the position damping hole (1-5)
In the outside of throttle orifice (1-4)；It is respectively fixedly connected between flow controller an I, multiple flow controller I in multiple throttle orifices (1-4)
It is connected to by the minute groove I (1-1) of air-bearing stator (1) upper surface；One is respectively fixedly connected in multiple damping holes (1-5)
A damper is connected between multiple dampers by the minute groove II (1-2) of air-bearing stator (1) upper surface；Same half
It is connected between the flow controller I and damper in diameter direction by the minute groove III (1-3) of air-bearing stator (1) upper surface；Institute
The inner ring surface for stating air-bearing stator (1) is equipped with the multiple radially installed holes of two rows, consolidates respectively in multiple radially installed holes
Surely a flow controller II is connected.
2. a kind of high thrust enclosed gas-static turntable according to claim 1, it is characterised in that: described a kind of high to push away
Power enclosed gas-static turntable further includes drive module and measurement module；The drive module is sequentially connected rotor shaft (7)；Institute
The lower end that measurement module is fixedly connected on the inside of shell (5) is stated, rotor shaft (7) is located at the inside of measurement module.
3. a kind of high thrust enclosed gas-static turntable according to claim 1, it is characterised in that: the air-bearing is fixed
The center line coincidence of sub (1), upper thrust plate (2), transverse bearing (4), lower thrust plate (6), rotor shaft (7).
4. a kind of high thrust enclosed gas-static turntable according to claim 1, it is characterised in that: the Work piece rotary disc
(3) central axis of upper surface and upper thrust plate (2) is arranged.
5. a kind of high thrust enclosed gas-static turntable according to claim 1, it is characterised in that: the upper thrust plate
(2) diameter is greater than the diameter of lower thrust plate (6).
6. a kind of high thrust enclosed gas-static turntable according to claim 1, it is characterised in that: the drive module is adopted
Use torque motor.
7. a kind of high thrust enclosed gas-static turntable according to claim 1, it is characterised in that: the measurement module is adopted
With Circular gratings component (9).
8. a kind of high thrust enclosed gas-static turntable according to claim 1, it is characterised in that: the edge the flow controller I
The axial direction of air-bearing stator (1) is arranged.
9. a kind of high thrust enclosed gas-static turntable according to claim 1, it is characterised in that: the edge the flow controller II
The radial direction of air-bearing stator (1) is arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910442417.6A CN110039330B (en) | 2019-05-25 | 2019-05-25 | High-thrust closed gas static pressure rotary table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910442417.6A CN110039330B (en) | 2019-05-25 | 2019-05-25 | High-thrust closed gas static pressure rotary table |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110039330A true CN110039330A (en) | 2019-07-23 |
| CN110039330B CN110039330B (en) | 2020-03-10 |
Family
ID=67283589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910442417.6A Expired - Fee Related CN110039330B (en) | 2019-05-25 | 2019-05-25 | High-thrust closed gas static pressure rotary table |
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| Country | Link |
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| CN (1) | CN110039330B (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110449921A (en) * | 2019-08-20 | 2019-11-15 | 江苏集萃精凯高端装备技术有限公司 | A kind of gas-static turntable and its starting protection, locking method |
| CN111421412A (en) * | 2020-05-20 | 2020-07-17 | 清华大学 | Grinding workbench and wafer thinning equipment |
| CN112692795A (en) * | 2020-12-28 | 2021-04-23 | 江苏集萃精凯高端装备技术有限公司 | Precise air-flotation rotary table with high-vacuum-degree suction disc |
| CN113124057A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Static pressure air-float thrust bearing based on multi-ring belt exhaust |
| CN113635084A (en) * | 2021-08-25 | 2021-11-12 | 中国工程物理研究院机械制造工艺研究所 | Air-float rotary table |
| CN113894300A (en) * | 2021-10-26 | 2022-01-07 | 中国工程物理研究院机械制造工艺研究所 | Porous and micropore combined throttling gas static pressure turning electric spindle |
| CN114393560A (en) * | 2021-12-14 | 2022-04-26 | 四川航天计量测试研究所 | Full-automatic aligning and leveling device based on air-floating rotary table and attitude adjusting method thereof |
| CN114406730A (en) * | 2022-02-17 | 2022-04-29 | 江苏恒望机械科技有限公司 | Numerical control rotary worktable |
| CN114523453A (en) * | 2022-03-15 | 2022-05-24 | 合肥御微半导体技术有限公司 | Precise air-floating rotary table |
| CN115596767A (en) * | 2022-09-30 | 2023-01-13 | 哈尔滨工业大学（Cn） | Gas static pressure turntable with magnetic fluid damper |
| CN115839644A (en) * | 2023-02-15 | 2023-03-24 | 广东优社动力科技有限公司 | Circumference pulsation measuring instrument |
| CN115890275A (en) * | 2023-02-20 | 2023-04-04 | 中国机械总院集团宁波智能机床研究院有限公司 | Static pressure composite rotary table and protection method thereof |
| CN116717541A (en) * | 2023-07-20 | 2023-09-08 | 通用技术集团机床工程研究院有限公司 | Aerostatic bearing and aerostatic turntable |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1347186A1 (en) * | 2002-03-08 | 2003-09-24 | Fanuc Ltd | Aerostatic bearing |
| CN1654840A (en) * | 2005-02-17 | 2005-08-17 | 哈尔滨工业大学 | Composite throttling pressurized air thrust bearing |
| CN102128206A (en) * | 2011-03-15 | 2011-07-20 | 中国科学院光电技术研究所 | Air static-pressure thrust bearing |
| CN103111855A (en) * | 2013-02-18 | 2013-05-22 | 哈尔滨工业大学 | Large-diameter-height-ratio ultra-precision hydrostatic pressure rotary table |
| CN103801944A (en) * | 2014-03-10 | 2014-05-21 | 北京微纳精密机械有限公司 | Large-diameter aerostatic turntable structure |
| CN206845691U (en) * | 2017-07-12 | 2018-01-05 | 哈尔滨工业大学 | A kind of plane air-bearing with air drain |
| CN207377968U (en) * | 2017-09-30 | 2018-05-18 | 中国工程物理研究院机械制造工艺研究所 | A kind of air-float turntable |
-
2019
- 2019-05-25 CN CN201910442417.6A patent/CN110039330B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1347186A1 (en) * | 2002-03-08 | 2003-09-24 | Fanuc Ltd | Aerostatic bearing |
| CN1654840A (en) * | 2005-02-17 | 2005-08-17 | 哈尔滨工业大学 | Composite throttling pressurized air thrust bearing |
| CN102128206A (en) * | 2011-03-15 | 2011-07-20 | 中国科学院光电技术研究所 | Air static-pressure thrust bearing |
| CN103111855A (en) * | 2013-02-18 | 2013-05-22 | 哈尔滨工业大学 | Large-diameter-height-ratio ultra-precision hydrostatic pressure rotary table |
| CN103801944A (en) * | 2014-03-10 | 2014-05-21 | 北京微纳精密机械有限公司 | Large-diameter aerostatic turntable structure |
| CN206845691U (en) * | 2017-07-12 | 2018-01-05 | 哈尔滨工业大学 | A kind of plane air-bearing with air drain |
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