CN111720443A - Composite variable throttling static pressure gas bearing with non-uniform elastic bearing structure - Google Patents
Composite variable throttling static pressure gas bearing with non-uniform elastic bearing structure Download PDFInfo
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- CN111720443A CN111720443A CN202010612958.1A CN202010612958A CN111720443A CN 111720443 A CN111720443 A CN 111720443A CN 202010612958 A CN202010612958 A CN 202010612958A CN 111720443 A CN111720443 A CN 111720443A
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- bearing
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- static pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2300/00—Application independent of particular apparatuses
- F16C2300/02—General use or purpose, i.e. no use, purpose, special adaptation or modification indicated or a wide variety of uses mentioned
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention relates to a novel composite variable throttling static pressure gas bearing with a non-uniform elastic supporting structure. The invention adds a layer of non-uniform elastic bearing structure on the bearing surface of the static pressure gas bearing, and forms a new composite variable throttling static pressure gas bearing structure with a variable throttling gas cavity, a variable bearing gas cavity and a rigid bearing surface by means of the non-uniform bearing structure and the gas cavity of the static pressure gas bearing body. Through the composite bearing effect of the novel bearing, the problems of low bearing capacity and poor rigidity of the traditional static pressure gas bearing can be effectively solved.
Description
Technical Field
The invention belongs to the technical field of mechanical engineering, and particularly relates to a composite variable throttling static pressure gas bearing with a non-uniform elastic bearing structure.
Background
The static pressure gas bearing is a bearing element which adopts an external gas supply mode, depends on gas as a lubricating medium and works under sliding friction, has the advantages of small friction resistance, high and low temperature resistance, strong adaptability, high cleanliness and no environmental pollution, and is often used as a core part in the fields of advanced optical manufacturing equipment, ultra-precision machining equipment and aviation full-physical experiment simulation.
The static pressure gas bearing has the problems of small bearing capacity, low rigidity, poor stability and the like generally due to the fact that the viscosity of gas is extremely small and the compressibility of the gas is strong, so that the development of the static pressure gas bearing technology and related fields is severely restricted.
In the prior art, a static pressure gas bearing is usually designed in an inherent hole throttling mode, and most of the inherent hole throttling modes adopt modes such as a throttling plunger, a pressure equalizing groove and the like.
The static pressure gas bearing taking the traditional orifice throttling mode as an example, the plunger of the orifice throttling enters the bearing body through the clamp, the lower end face of the common throttling plunger has a certain gap from the bearing surface, the height of the gap is about 2mm, therefore, a fixed-volume air cavity is arranged between the bearing and the bearing surface, in the bearing process, the volume of the fixed air cavity is not changed, the bearing performance of the bearing is changed only by the change of the air film pressure of the static pressure gas bearing, and the changes of the throttling hole throttling performance and other performances caused by the structural change of the static pressure gas bearing body are ignored.
Disclosure of Invention
The invention aims to solve the problems of low bearing capacity, poor rigidity, low stability and the like of the traditional static pressure gas bearing. A composite variable throttle hydrostatic gas bearing with a non-uniform elastomeric load bearing structure is provided.
In order to solve the problems, the technical scheme of the invention is as follows: the utility model provides a compound variable throttle hydrostatic gas bearing of inhomogeneous elasticity load-carrying members which characterized in that: the hydrostatic bearing comprises a circular hydrostatic bearing body and a circular non-uniform bearing structure which are integrally arranged from top to bottom, wherein a concentric annular gas circuit and a circular hole are arranged on the lower end surface of the hydrostatic bearing body, a gas supply channel communicated with the annular gas circuit is also arranged in the hydrostatic bearing body, and the gas supply channel is externally connected with a gas source;
the non-uniform bearing structure is provided with at least 8 throttling holes, the area of the annular gas path on the static pressure gas bearing body, which is mapped on the non-uniform bearing structure, is a variable throttling gas cavity, the area of the circular hole on the static pressure gas bearing body, which is mapped on the non-uniform bearing structure, is a variable bearing gas cavity, and the bearing surfaces of the variable throttling gas cavity and the non-uniform bearing structure outside the variable bearing gas cavity are rigid bearing surfaces.
Furthermore, the non-uniform bearing structure is characterized in that the bottom surface of the non-uniform bearing structure is provided with a plurality of concave arcs and concave surfaces, and the maximum depth of the arc surfaces is 1/3-1/2 of the height of the non-uniform bearing structure.
Furthermore, the orifices are uniformly distributed above the variable throttling air cavity of the non-uniform bearing structure, and the diameters of the orifices are less than 0.2 mm.
Further, the circular hole is arranged in the center of the static pressure gas bearing body, and the diameter of the circular hole does not exceed the boundary of the annular gas path.
Further, the width of the annular air passage is 8-10 times of that of the throttle hole.
Further, the hydrostatic bearing body is the same diameter as the non-uniform load bearing structure.
Compared with the prior art, the invention has the following advantages:
1) the invention adopts a non-uniform elastic supporting structure, the structure increases a variable throttling air cavity and a variable bearing air cavity on the basis of a rigid bearing surface, the change of the variable throttling air cavity dynamically adjusts the throttling performance of a throttling hole in the bearing process, and the variable bearing air cavity reduces the impact in the bearing process of the bearing and enhances the bearing stability through the change of the volume.
2) The invention simultaneously cooperates with the rigid bearing surface to jointly exert a composite action to improve the bearing capacity, rigidity and stability of the static pressure gas bearing.
3) The invention has compact structure.
Drawings
FIG. 1 is a front view of the present invention
FIG. 2 is a top sectional view A-A of FIG. 1;
FIG. 3 is a left sectional view B-B of FIG. 1;
FIG. 4 is a cross-sectional view C-C of FIG. 2;
FIG. 5 is an enlarged view of a portion of FIG. 2I;
FIG. 6 is an enlarged view of a non-uniform resilient load bearing structure;
in the figure, 1-static pressure gas bearing body, 2-gas supply channel, 3-annular gas circuit, 4-circular hole, 5-nonuniform elastic bearing structure, 6-orifice, 7-variable throttle gas cavity, 8-variable bearing gas cavity and 9-rigid bearing surface.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.
The embodiment provides a composite variable throttling static pressure gas bearing with a non-uniform elastic bearing structure, which comprises a circular static pressure bearing body 1 and a circular non-uniform bearing structure 5 which are integrally arranged from top to bottom, wherein the lower end surface of the static pressure bearing body 1 is provided with a concentric annular gas circuit 3 and a circular hole 4, a gas supply channel 2 communicated with the annular gas circuit 3 is also arranged in the static pressure bearing body 6, and the gas supply channel 2 is externally connected with a gas source;
the non-uniform bearing structure 5 is arranged on the lower end face of the static pressure gas bearing body 1, 8 throttling holes are formed in the non-uniform bearing structure, the area, mapped to the non-uniform bearing structure 5, of the annular gas circuit 3 on the static pressure gas bearing body 1 is a variable throttling gas cavity 7, the area, mapped to the non-uniform bearing structure 5, of the circular hole 4 on the static pressure gas bearing body 1 is a variable bearing gas cavity 8, and the bearing surfaces of the variable throttling gas cavity 7 and the non-uniform bearing structure 5 outside the area of the variable bearing gas cavity 8 are rigid bearing surfaces 9.
The non-uniform bearing structure 5 is provided with a plurality of concave hemispherical surfaces on the bottom surface, and the maximum depth of the hemispherical surfaces is 1/3-1/2 of the height of the non-uniform bearing structure.
The non-uniform bearing structure is a sheet-shaped mechanism, the thickness of the non-uniform bearing structure is 0.3-0.5mm, and the thickness of the bearing body is not less than 200 times of that of the non-uniform bearing structure.
The orifices 6 are uniformly distributed above the variable orifice air cavity 7 of the non-uniform bearing structure, the number of the orifices is 8, and the diameter of the orifices is less than 0.2 mm.
The center of static pressure gas bearing body 1 is arranged in to circular port 4, and the diameter of circular port is no longer than the boundary of annular gas circuit, and the circular port is inside to be encapsulated situation, and inside pressure is standard atmospheric pressure.
The width of the annular air passage is 8-10 times of that of the throttle hole.
The application process of the invention patent is as follows:
when the static pressure bearing works, high-pressure gas with the pressure of 0.4MPa to 0.6MPa is connected into a gas supply channel 2 of a static pressure bearing body 1 through a gas pipe, the gas is filled in the whole static pressure bearing body 1 through an annular gas path 3, and the pressure at the moment is gas supply pressure p 1;
then, the high-pressure gas p1 passes through the throttling hole 6, passes through the throttling action of the throttling hole 6, and leads the gas with certain pressure to the working surface of the static-pressure gas bearing non-uniform bearing structure 5, and the pressure on the working surface is reduced to p 2;
the pressure difference in the area of the variable throttling air cavity is p1-p2, the cross section of the air cavity in the variable throttling area deforms, the throttling performance of the throttling hole 6 is changed, meanwhile, the area of the variable bearing air cavity is influenced by the bearing surface pressure p2 and the initial pressure p0 in the variable bearing air cavity, the pressure difference is p2-p0, and under the action of the pressure difference, the cross section of the variable bearing air cavity becomes larger, so that the pressure gathering effect of the area is increased;
and finally, redundant gas flows into the external environment through the edge of the static pressure gas bearing, so that friction-free bearing of the static pressure gas bearing is realized.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included in the scope of the present invention.
Claims (6)
1. The utility model provides a compound variable throttle hydrostatic gas bearing of inhomogeneous elasticity load-carrying members which characterized in that: the bearing comprises a circular hydrostatic bearing body (1) and a circular non-uniform bearing structure (5) which are integrally arranged from top to bottom, wherein a concentric annular gas circuit (3) and a circular hole (4) are arranged on the lower end face of the hydrostatic bearing body (1), a gas supply channel (2) communicated with the annular gas circuit (3) is also arranged in the hydrostatic bearing body (1), and the gas supply channel (2) is externally connected with a gas source;
at least 8 throttle holes (6) are arranged on the non-uniform bearing structure (5), the area of the annular gas circuit (3) on the static pressure gas bearing body (1) mapped on the non-uniform bearing structure (5) is a variable throttle gas cavity (7), the area of the circular hole (4) on the static pressure gas bearing body (1) mapped on the non-uniform bearing structure (5) is a variable bearing gas cavity (8), and the bearing surfaces of the non-uniform bearing structure (5) outside the areas of the variable throttle gas cavity (7) and the variable bearing gas cavity (8) are rigid bearing surfaces (9).
2. A composite variable restrictor hydrostatic gas bearing of a non-uniform resilient load bearing structure as claimed in claim 1 wherein: the non-uniform bearing structure (5) is characterized in that the bottom surface is provided with a plurality of concave arcs and concave surfaces, and the maximum depth of the arc surfaces is 1/3-1/2 of the height of the non-uniform bearing structure (5).
3. A composite variable restrictor hydrostatic gas bearing of a non-uniform resilient load-bearing structure as claimed in claims 1 and 2, characterized in that: the orifices (6) are uniformly distributed above the variable orifice air cavity (7) of the non-uniform bearing structure (5), and the diameter of each orifice is less than 0.2 mm.
4. A composite variable restrictor hydrostatic gas bearing of a non-uniform resilient load bearing structure as claimed in claim 3 wherein: the circular hole (4) is arranged in the center of the static pressure gas bearing body (1), and the diameter of the circular hole (4) does not exceed the boundary of the annular gas path (3).
5. A composite variable restrictor hydrostatic gas bearing of a non-uniform resilient load-bearing structure as claimed in claim 4, wherein: the width of the annular air passage (3) is 8-10 times of that of the throttle hole (6).
6. A composite variable restrictor hydrostatic gas bearing of a non-uniform resilient load-bearing structure as claimed in claim 5, wherein: the diameter of the hydrostatic bearing body (1) is the same as that of the non-uniform bearing structure (5).
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CN202010612958.1A CN111720443A (en) | 2020-06-30 | 2020-06-30 | Composite variable throttling static pressure gas bearing with non-uniform elastic bearing structure |
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CN202010612958.1A CN111720443A (en) | 2020-06-30 | 2020-06-30 | Composite variable throttling static pressure gas bearing with non-uniform elastic bearing structure |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113124057A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Static pressure air-float thrust bearing based on multi-ring belt exhaust |
CN114427572A (en) * | 2021-12-20 | 2022-05-03 | 机械科学研究总院海西(福建)分院有限公司 | Flow control method of high-precision high-rigidity hydrostatic pressure device |
CN115163667A (en) * | 2022-07-27 | 2022-10-11 | 合肥工业大学 | Vortex type air outlet plane static pressure air bearing |
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2020
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113124057A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Static pressure air-float thrust bearing based on multi-ring belt exhaust |
CN113124057B (en) * | 2021-04-27 | 2022-07-22 | 北京工业大学 | Static pressure air-float thrust bearing based on multi-ring belt exhaust |
CN114427572A (en) * | 2021-12-20 | 2022-05-03 | 机械科学研究总院海西(福建)分院有限公司 | Flow control method of high-precision high-rigidity hydrostatic pressure device |
CN114427572B (en) * | 2021-12-20 | 2023-02-28 | 机械科学研究总院海西(福建)分院有限公司 | Flow control method of high-precision high-rigidity hydrostatic pressure device |
CN115163667A (en) * | 2022-07-27 | 2022-10-11 | 合肥工业大学 | Vortex type air outlet plane static pressure air bearing |
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Application publication date: 20200929 |
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