CN205207844U - Piezoceramics driving thin film formula servovalve - Google Patents
Piezoceramics driving thin film formula servovalve Download PDFInfo
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- CN205207844U CN205207844U CN201521087117.4U CN201521087117U CN205207844U CN 205207844 U CN205207844 U CN 205207844U CN 201521087117 U CN201521087117 U CN 201521087117U CN 205207844 U CN205207844 U CN 205207844U
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- valve body
- film
- oil pocket
- piezoelectric constant
- diaphragm type
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Abstract
The utility model discloses a piezoceramics driving thin film formula servovalve, including last valve body and lower valve body, go up the valve body and be equipped with the film down between the valve body, go up and form the balanced oil pocket of columniform between valve body and the film, the film with form an annular section oil flow chamber down between the valve body, balanced oil pocket and festival oil flow chamber intercommunication, go up between valve body and the balanced oil pocket vertical have a perfect understanding have the ejector pin, the one end and the film interval of ejector pin set for apart from or contact, the other end is equipped with the piezoceramics who is used for promoting the ejector pin removal, the beneficial effects of the utility model are that: crossing accurate control throttle clearance, realizing the accurate active control of pressure and flow, establish to central island type through the center with the film, central island type is the rigidity, and the deformation range is the flexibility all around, has improved the dynamic frequency of film, has improved the control accuracy in throttle clearance simultaneously, whole device simple structure, reliable, the low in manufacturing cost of function.
Description
Technical field
The utility model relates to servovalve, is specifically related to a kind of Piezoelectric Ceramic diaphragm type servovalve.
Background technique
At present, the application of hydraulic servo control system is more and more wider, and this proposes high requirement to the performance of electrohydraulic control: high frequency sound, and highi degree of accuracy is simple and reliable etc.Traditional electromagnetic type servovalve can not meet the control overflow of high frequency sound, therefore researches and develops a kind of novel, that high frequency sound ACTIVE CONTROL servovalve becomes a hydraulic servocontrol field difficult problem.
In the driver development process of numerous novel micrometric displacement, high frequency sound, piezoceramic material, because have the advantages such as volume is little, energy density is high, resolution is high, frequency response is fast, has become driving element first-selected in Precision Position Location System.The shortcomings such as meanwhile, because piezoelectric constant output displacement is little, bearing capacity is limited, anti-shear ability difference limit its application in quick, high-accuracy navigation system.
Controlled servovalve mainly contains guiding valve and diaphragm type servovalve.Sliding valve structure is comparatively complicated, and required drive displacement is larger.The existing servo slide-valve design case controlled based on piezoelectric constant.And diaphragm type servovalve structure is relatively simple, upper and lower two oil pockets can be designed, realize Differential Control or feedback control.One of them oil pocket is used as throttling oil pocket, and another oil pocket is used as pressure balance oil pocket, passes into the hydraulic oil after throttling, greatly can reduce the pressure difference suffered by film both sides.
Existing diaphragm type throttle valve mainly contains two kinds.One is two oil pocket differential and double output forms, can be used for the opposed oil pocket of hydrostatic bearing, improves main shaft stability and bearing capacity; Another kind of single output form for band feedback oil pocket, can improve the stability of outlet pressure and flow.The diaphragm type throttle valve of above two types all can not realize active servo and control, cannot the pressure of active controlled restrictor valve outlet port and flow.
Existing Piezoelectric Ceramic servovalve majority employs the bidirectional-movement that disc spring elastomeric material ensures valve block (valve rod), thus increases the stressed of piezoelectric constant, and therefore need the piezoelectric material selecting large volume, cost of material is higher.
Through retrieval, there is no based on piezoelectric constant Direct driver, with the diaphragm type servovalve cases of design of pressure balance oil pocket.
Model utility content
The purpose of this utility model is the Piezoelectric Ceramic diaphragm type servovalve in order to provide a kind of high frequency sound, output flow controlled.
In order to reach above-mentioned purpose, the utility model adopts following technological scheme:
A kind of Piezoelectric Ceramic diaphragm type servovalve, comprise upper valve body and lower valve body, film is provided with between upper valve body and lower valve body, columniform balance oil pocket is formed between upper valve body and film, an annular throttling oil pocket is formed between film and lower valve body, gap between film and lower valve body is throttle clearance, balance oil pocket is communicated with throttling oil pocket, vertically push rod is through with between upper valve body and balance oil pocket, one end and the film interval setpoint distance of push rod or contact, the other end is provided with the piezoelectric constant for promoting push rod movement; Piezoelectric constant is connected with piezoelectric ceramic actuator, by the displacement of piezoelectric constant ACTIVE CONTROL push rod, and then controls film action, and film produces resiliently deformable and reduces throttle clearance, and rate of discharge is reduced; Push rod moves, increases throttle clearance, rate of discharge increases, and just can realize the object of Accurate Data Flow Control by accurately controlling piezoelectric constant, and structure is simple, but effect is better.
Further, film and upper valve body, between film and lower valve body, be equipped with adjustment pad, change height and the initial throttle clearance of adjustable of adjustment pad.
Further, push rod is located in the axle center hole of upper valve body, is sealed by seal ring, can move up and down.
Further, described upper valve body is provided with the piezoelectric constant pedestal enveloping described piezoelectric constant, bottom and the upper valve body of piezoelectric constant pedestal are fixed by screw.
Further, described piezoelectric constant pedestal is provided with the locking device for pushing down described piezoelectric constant.
Further, Metal Ball is provided with between described piezoelectric constant and described push rod.
Further, the two ends of described piezoelectric constant are equipped with pad, and Metal Ball is located in the groove of pad and push rod end face.
Further, described locking device is screw, is provided with top or Metal Ball between described piezoelectric constant and screw, and taper locating centre is located at the center of washer ends.
Further, symmetrically arranged multiple through hole with valve center line is provided with between described balance oil pocket and described throttling oil pocket.
Further, be provided with into oil pipe line in described lower valve body, the end entering oil pipe line is communicated with the center bottom described throttling oil pocket.
Further, the middle part of described film is Center Island shape, in rigidity, only produces displacement; The surrounding annulus of central authorities' island is very thin, in flexible, can produce resiliently deformable under the promotion of push rod.
Further, in described lower valve body, be provided with the outlet line communicated with described throttling oil pocket; Enter oil pipe line and outlet line all in L-type.
Working principle of the present utility model is: control piezoelectric constant by the driving voltage change controlling piezoelectric constant and elongate or shorten.When increasing driving voltage, piezoelectric constant extends, and promote push rod and press down film, film produces resiliently deformable, and servovalve rate of discharge is reduced; When reducing driving voltage, piezoelectric constant shortens, and the conjunction force pushing mandril that film is formed upwards due to self resiliently deformable and pressure difference moves upward, and increases throttle clearance, servovalve rate of discharge is increased.
The beneficial effects of the utility model are:
1) by using piezoelectric ceramic actuator, improve the response frequency of servovalve, can be used for high frequency and accurately control.
2) by accurately controlling throttle clearance, the accurate ACTIVE CONTROL of pressure and flow is realized.
3) by the center of film is set to central island, central island is rigidity, and surrounding texturing zone, in flexible, improve the dynamic frequency of film, improves the control accuracy of throttle clearance simultaneously.
4) by arranging balance oil pocket, the pressure difference suffered by film both sides is greatly reduced.Piezoelectric constant is stressed be less than under equal conditions without during balance oil pocket its stressed 1/4th.Therefore, the piezoelectric material of more small volume can be selected, reduce the cost of material more than 50 percent of servovalve.
5) the utility model is used for each oil pocket controlling hydrostatic bearing, the ACTIVE CONTROL of hydrostatic spindle movement locus can be realized.
6) whole apparatus structure simple, reliable in function, low cost of manufacture.
Accompanying drawing explanation
Fig. 1 is the structural drawing of the utility model Piezoelectric Ceramic diaphragm type servovalve;
Wherein: 1, lower valve body, 2, film, 3, adjustment pad, 4, upper valve body, 5, seal ring, 6, push rod, 7, Metal Ball, 8, piezoelectric constant pad I, 9, piezoelectric constant, 10, piezoelectric constant pad II, 11, lock screw, 12, piezoelectric constant pedestal, 13, for oil-in, 14, hydraulic oil outlet, 15, throttling oil pocket, 16, throttle clearance, 17, oil pocket intercommunicating pore, 18, balance oil pocket.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, clear, complete description is carried out to the technological scheme in the utility model embodiment.
Embodiment 1
A kind of Piezoelectric Ceramic diaphragm type servovalve, as shown in Figure 1, comprise a housing be made up of lower valve body 1, upper valve body 4 and piezoelectric constant pedestal 12, the center hole 13 of lower valve body 1 is hydraulic oil inlet, and the throttling oil pocket 15 of the annular of lower valve body 1 is connected to hydraulic oil outlet 14.There is circular pressure balance oil pocket 18 upper valve body 4 inside.It is the adjustment pad 3 of elastic metallic film 2 and both sides between upper valve body 4 and lower valve body 1.It is thick that film 2 is designed to middle throttling part, the island flexible hinge structure that the annular region of surrounding resiliently deformable is thin, is uniformly distributed the intercommunicating pore 17 that 4 are communicated with throttling oil pockets 15 and pressure balance oil pocket 18 in flexible hinge region.The central island of film 2 and the annular boss of lower valve body 1 central authorities form the controlled throttle clearance 16 in gap.Piezoelectric constant pedestal 12 inside is provided with drivable piezoelectric constant 9.Piezoelectric constant two ends bonding pad 10 and pad 8, pad 10 center is fixed by lock screw 11, and pad 8 is docked with push rod 6 by Metal Ball 7.Push rod 6 is arranged in the axle center hole of upper valve body 4, is sealed by seal ring 5, can move up and down.Push rod 6 lower end is against film 2 center.
Described pressure balance oil pocket 18 passes into the hydraulic oil after throttling, counteract most of pressure difference suffered on the downside of film 2, what thin flexible film deformation force and pressure difference were formed makes a concerted effort in the direct tolerance range of piezoelectric constant, effectively prevents piezoelectric constant from damaging because of overload.
There is taper locating centre at described pad 10 center, and there is the cone shape hole installing Metal Ball 7 at pad 8 center, to ensure that piezoelectric constant 9 only bears equally distributed axial force, effectively prevents piezoelectric constant 9 because damaging by shearing force.
Described diaphragm type servovalve working principle is that the driving voltage by controlling piezoelectric constant controls piezoelectric constant elongation displacement.When increasing driving voltage, piezoelectric constant 9 extends, and promote push rod 6 and press down film 2, film 2 produces resiliently deformable, reduces throttle clearance 16, servovalve rate of discharge is reduced; When reducing driving voltage, piezoelectric constant 9 shortens, and the conjunction force pushing mandril 6 that film 2 is formed upwards due to self elastic deformation force and pressure difference moves upward, and increases throttle clearance 16, servovalve rate of discharge is increased.Therefore, the throttle clearance that can be controlled servovalve by the driving voltage accurately controlling piezoelectric constant is changed according to provisioning request, to realize the object of Accurate Data Flow Control.
The above is only preferred implementation of the present utility model; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the utility model principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (10)
1. a Piezoelectric Ceramic diaphragm type servovalve, it is characterized in that, comprise upper valve body and lower valve body, be provided with film between upper valve body and lower valve body, between upper valve body and film, form columniform balance oil pocket, between film and lower valve body, form an annular throttling oil pocket, balance oil pocket is communicated with throttling oil pocket, vertically be through with push rod between upper valve body and balance oil pocket, one end and the film interval setpoint distance of push rod or contact, the other end is provided with the piezoelectric constant for promoting push rod movement.
2. diaphragm type servovalve as claimed in claim 1, is characterized in that, described upper valve body is provided with the piezoelectric constant pedestal enveloping described piezoelectric constant.
3. diaphragm type servovalve as claimed in claim 2, it is characterized in that, described piezoelectric constant pedestal is provided with the locking device for pushing down described piezoelectric constant.
4. the diaphragm type servovalve as described in claim 1 or 2 or 3, is characterized in that, be provided with Metal Ball between described piezoelectric constant and described push rod.
5. diaphragm type servovalve as claimed in claim 1, it is characterized in that, the two ends of described piezoelectric constant are equipped with pad.
6. diaphragm type servovalve as claimed in claim 3, it is characterized in that, described locking device is screw, is provided with top or Metal Ball between described piezoelectric constant and screw.
7. diaphragm type servovalve as claimed in claim 1, is characterized in that, be provided with valve center line symmetrically arranged multiple through hole between described balance oil pocket and described throttling oil pocket.
8. the diaphragm type servovalve as described in claim 1 or 2 or 3, is characterized in that, is provided with into oil pipe line in described lower valve body, and the end entering oil pipe line is communicated with the center bottom described throttling oil pocket.
9. the diaphragm type servovalve according to any one of claim 1-3 or 5-7, is characterized in that, the middle part of described film is Center Island shape.
10. the diaphragm type servovalve as described in claim 1 or 2 or 3, is characterized in that, is provided with the outlet line communicated with described throttling oil pocket in described lower valve body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521087117.4U CN205207844U (en) | 2015-12-23 | 2015-12-23 | Piezoceramics driving thin film formula servovalve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521087117.4U CN205207844U (en) | 2015-12-23 | 2015-12-23 | Piezoceramics driving thin film formula servovalve |
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| Publication Number | Publication Date |
|---|---|
| CN205207844U true CN205207844U (en) | 2016-05-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201521087117.4U Expired - Fee Related CN205207844U (en) | 2015-12-23 | 2015-12-23 | Piezoceramics driving thin film formula servovalve |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105370958A (en) * | 2015-12-23 | 2016-03-02 | 山东大学 | Membrane servo valve driven by piezoelectric ceramics |
-
2015
- 2015-12-23 CN CN201521087117.4U patent/CN205207844U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105370958A (en) * | 2015-12-23 | 2016-03-02 | 山东大学 | Membrane servo valve driven by piezoelectric ceramics |
| CN105370958B (en) * | 2015-12-23 | 2017-11-21 | 山东大学 | A kind of Piezoelectric Ceramic diaphragm type servo valve |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160504 Termination date: 20161223 |
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| CF01 | Termination of patent right due to non-payment of annual fee |