CN116237780A - Internal feedback static pressure oil film thickness control method based on PM flow controller - Google Patents

Internal feedback static pressure oil film thickness control method based on PM flow controller Download PDF

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CN116237780A
CN116237780A CN202310230977.1A CN202310230977A CN116237780A CN 116237780 A CN116237780 A CN 116237780A CN 202310230977 A CN202310230977 A CN 202310230977A CN 116237780 A CN116237780 A CN 116237780A
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oil
static pressure
flow controller
pressure
cavity
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CN202310230977.1A
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刘志峰
苏哲
杨聪彬
程艳红
张涛
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Beijing University of Technology
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Beijing University of Technology
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Abstract

The invention discloses an internal feedback static pressure oil film thickness control method based on a PM flow controller, and a device forming the method comprises the following steps: the device comprises a first oil tank, a second oil tank, a coarse oil filter, an oil pump, a servo motor, a fine oil filter, a one-way valve, a pilot electromagnetic overflow valve, a PM flow controller, a guide rail, a first restrictor, a second restrictor, an upper static pressure oil pad, a radial static pressure oil pad, a lower static pressure oil pad and a static pressure workbench; by utilizing the advantages of the PM flow controller, when the load is increased, the pressure of the oil cavity is increased, and the flow is also increased through control; conversely, when the load decreases, the oil chamber pressure decreases and the flow decreases. The PM flow controller is used for controlling the flow by only enabling the metal film to generate corresponding deformation by means of pressure difference, external energy input or electronic control is not needed, the fact that an oil film can be kept constant for a long time under the working condition of a static pressure system can be guaranteed, the static pressure turntable is stable and reliable in working, and efficient, stable and long-time operation of the static pressure turntable is guaranteed.

Description

Internal feedback static pressure oil film thickness control method based on PM flow controller
Technical Field
The invention belongs to the field of hydrostatic bearing, and particularly relates to an internal feedback hydrostatic oil film thickness control method based on a PM flow controller.
Background
The static pressure bearing has the characteristics of small friction force, long service life, good vibration resistance, high rotation precision and the like, and is widely used on machine tools and other mechanical equipment. However, with the development of industrial technology, especially the development of national defense industry and aviation industry, the requirements on the rotation precision of the static pressure bearing and the rigidity under the action of load are higher and higher, and when the load or working condition of a machine tool is changed, the thickness of a static pressure oil film is unstable, so that the machining precision and the machining efficiency can be influenced. As described in the publication No. CN103341781B, CN107642545A, CN106094736a, the static pressure oil film thickness control is related to controlling the rotation speed of the servo motor by a feedback signal to adjust the oil film thickness of the static pressure supporting table, changing the passive control oil film thickness into an active control oil film thickness adjusting mode of the servo motor, the servo motor converts the signal into a torque and rotation speed to adjust the oil supply amount of the oil pump, so as to realize active and accurate control of the oil film thickness, but the sensor needs to be calibrated regularly in the use process and the sensor cannot guarantee long-term stability, so that the long-term stable operation of the static pressure supporting table has problems. The control of the oil film thickness also relates to a hydraulic control system, and the existing hydrostatic bearing hydraulic control system is used for realizing the automatic adjustment of the floating amount of the hydrostatic workbench under the condition of large bearing range, as disclosed in the patent of publication No. CN102975031B, CN201534283U, CN201891698U, but the system adopts the hydrostatic bearing of the traditional throttle, the bearing clearance is reduced along with the increase of the applied load when the applied load acts, the oil film rigidity is low, each oil path corresponds to the independent hydrostatic bearing, feedback is not generated between each oil path and each oil path, the axial position is difficult to adjust when the rotary workbench is assembled, the pressures between the upper and lower radially symmetrical hydrostatic cavities are inconsistent when the workbench rotates, the workpiece is easy to overturn, the precision of a guide rail is influenced, and the service life of the workbench is short. In summary, the automatic adjustment of the lifting amount of the workbench under the condition of large bearing and temperature variation range is realized in the working process of the static pressure turntable, and the existing method mostly combines a static pressure supporting hydraulic control system in a signal active adjustment mode to control the oil supply flow so as to realize constant thickness of the oil film. The invention provides an internal feedback static pressure oil film thickness control method based on a PM flow controller, which utilizes the advantages of the PM flow controller to realize that when the load is increased, the pressure of an oil cavity is increased along with the increase of the load, and the flow is also increased through control; conversely, when the load decreases, the oil chamber pressure decreases and the flow decreases. And the PM flow controller controls the flow by only enabling the metal film to generate corresponding deformation by means of pressure difference, does not need external energy input or electronic control, can ensure that an oil film can be kept constant for a long time under the working condition of a static pressure system, works stably and reliably, and ensures that the static pressure turntable operates efficiently and stably for a long time.
Disclosure of Invention
The invention aims to solve the technical problem of designing a method for controlling the thickness of an oil film of a closed static pressure turntable.
The technical scheme adopted for solving the technical problems is as follows:
the device for realizing the closed static pressure turntable oil film thickness control method comprises the following components: the device comprises a first oil tank, a second oil tank, a coarse oil filter, an oil pump, a servo motor, a fine oil filter, a one-way valve, a pilot electromagnetic overflow valve, a PM flow controller, a guide rail, a first restrictor, a second restrictor, an upper static pressure oil pad, a radial static pressure oil pad, a lower static pressure oil pad and a static pressure workbench;
the PM flow controller includes: the device comprises a body, a capillary groove, a throttling port, a shell, an adjusting chamber, a film, a pressure stabilizing chamber and a throttling table; the PM flow controllers include a first PM flow controller and a second PM flow controller.
Connection between the parts constituting the device:
the guide rail is arranged at the middle position of the static pressure rotary table, the right side of the guide rail is stabilized through the support of the rotary table base, an upper static pressure oil pad is arranged above the left side of the guide rail, a lower static pressure oil pad is arranged below the left side of the guide rail, a radial static pressure oil pad is radially arranged, and the three oil pads realize the static pressure support of the static pressure workbench through oil supply.
The first oil tank is characterized in that a servo motor controls an oil pump to pump hydraulic oil through a coarse oil filter, and the hydraulic oil reaches an oil distributing port through a fine oil filter, a pilot electromagnetic overflow valve and a one-way valve; the flow is divided into two paths through the oil dividing port and respectively flows through the first PM flow controller and the second PM flow controller;
the hydraulic oil flowing into the first PM flow controller and the second PM flow controller is divided into two oil flows after reaching an oil inlet at the bottom of the body, wherein one oil flow enters a pressure regulating chamber above the film after passing through a capillary groove and a throttling orifice at the side surface of the body, and the other oil flow is divided into two parts after passing through two annular rectangular grooves in the body, wherein one part enters a pressure stabilizing chamber below the film through an axial hole, then flows out of an oil outlet after passing through an annular throttling table, and the other part meets the part of the oil flow passing through the annular throttling table and flows out of an outlet together after passing through the two annular capillary grooves;
the hydraulic oil flowing out of the first PM flow controller is divided into two paths again to supply oil for the upper static pressure oil cavity and the lower static pressure oil cavity respectively;
when the oil cavity pressure is 0, the inner film of the PM flow controller bends downwards under the action of the precompression of the upper cavity, the gap between the film and the throttling table is minimum, the liquid resistance is maximum, and the flow flowing out through the oil outlet is minimum. The pressure of the oil cavity is increased, the film is bent and deformed upwards, so that the gap between the film and the throttle table is increased, the oil outlet resistance is reduced, the flow entering the oil cavity through the gap is increased, and the thickness change of the oil film supported by the static pressure turntable is small;
after the three paths of static pressure oil cavities are filled with hydraulic oil, when the guide rail surface is provided with enough liquid pressure to balance the weight of the load part, the supporting part is floated, at the moment, the static pressure oil flows out of the oil cavities through the gaps of the upper guide rail, the lower guide rail and the radial oil sealing surface, the pressure outside the cavities is reduced to be almost zero, and when the floating amount is larger than the surface unevenness of the upper plane, the lower plane and the radial plane of the guide rail, the pure liquid friction is formed;
one path of hydraulic oil with constant pressure is throttled by a first throttle arranged in the upper oil cavity and then is introduced into the lower oil cavity, and the other path of hydraulic oil is throttled by a throttle arranged in the lower oil cavity and then is introduced into the upper oil cavity, so that an axial closed static pressure structure is formed;
when the guide rail is acted on by downward force F, delta h clearance change is generated, and on the one hand, the upper static pressure oil cushion oil cavity is enlarged due to clearance (increased to h 0 +Δh) reduction of the seal side hydraulic resistance reduces the oil chamber pressure, while a restrictor for controlling the upper oil chamber disposed in the lower hydrostatic pad oil chamber becomes smaller due to the clearance (reduced to h 0 Δh), the liquid resistance of the throttling edge is increased, the pressure lost by the liquid resistance on throttling can be increased, so that the pressure introduced into the upper static pressure oil cushion oil cavity becomes smaller, a feedback effect is achieved, and the first PM flow controller is used for assisting in controlling the pressure of the upper static pressure oil cushion oil cavity and the pressure of the lower static pressure oil cushion oil cavity while achieving precise control through feedback control.
The pilot electromagnetic relief valve is connected with the second oil tank.
Compared with the prior art, the invention has the following advantages:
(1) The PM flow controller has a characteristic that the flow rate increases as the oil chamber pressure increases, as a pressure compensating element in the hydrostatic bearing. Because the PM flow controller does not have sliding motion, the PM flow controller has no abrasion and no hysteresis, and the metal elastic film in the PM flow controller has small mass, large regulating force, quick response and good dynamic characteristics, the problem that the oil supply pressure of a far-end branch oil path is insufficient due to the distance problem after the oil supply of a main oil path is solved well, and the change amount of the oil film thickness due to the load is small, so that the rigidity of the hydrostatic bearing is greatly improved.
(2) The combined action of the upper oil cavity and the lower oil cavity (namely a closed static pressure structure) and the feedback action of the feedback type restrictor lead the internal feedback closed static pressure bearing to have higher oil film rigidity and stability than the traditional fixed throttling constant pressure and constant flow static pressure bearing, and the oil film thickness has smaller change along with different loads and better precision retention.
(3) When the system does not need unloading, the electromagnetic valve closes the parallel oil through tank port, the pilot valve is mainly used for realizing the load verification operation, and when an emergency occurs, the electromagnetic valve starts to work, the system rapidly unloads and returns to a safe state, and the safe operation of the static pressure turntable is ensured.
Drawings
FIG. 1 is a cross-sectional view of the overall structure of a hydrostatic turntable;
FIG. 2 is a schematic diagram of an anti-feed static pressure oil circuit in a PM flow controller;
FIG. 3 is a schematic diagram of a PM flow controller;
FIG. 4 control hydraulic resistance diagram;
Detailed Description
The invention will be further described with reference to the accompanying drawings, in which:
a static pressure turntable integral structure for realizing a closed static pressure turntable oil film thickness control method is shown in figure 1. The apparatus constituting the method, as shown in fig. 2, comprises: the device comprises a first oil tank 1-1, a second oil tank 1-2, a coarse oil filter 2, an oil pump 3, a servo motor 4, a fine oil filter 5, a one-way valve 6, a pilot electromagnetic relief valve 7, a first PM flow controller 8-1, a second PM flow controller 8-2, a guide rail 9, a first throttle 10-1, a second throttle 10-2, a static pressure workbench 11, an upper static pressure oil pad 12, a radial static pressure oil pad 13 and a lower static pressure oil pad 14. The PM flow controller is schematically shown in fig. 3, which includes a body 15, a capillary groove 16, a housing 17, a throttle orifice 18, a regulating chamber 19, a membrane 20, a pressure stabilizing chamber 21, and a throttle table 22. The hydraulic resistance diagram of the oil circuit control is shown in fig. 4.
Connection between the parts constituting the device:
the guide rail 9 is arranged at the middle position of the static pressure turntable, the right side of the guide rail is supported by the turntable base to realize the stability of the guide rail, the upper static pressure oil pad 12 is arranged at the upper part of the left side, the lower static pressure oil pad 14 is arranged at the lower part of the left side, the radial static pressure oil pad 14 is arranged in the radial direction, and the static pressure support of the static pressure workbench 11 is realized by oil supply;
in the first oil tank 1-1, a servo motor 4 controls an oil pump 3 to pump hydraulic oil through a coarse oil filter 2, and the hydraulic oil reaches an oil distributing port through a fine oil filter 5, a pilot electromagnetic overflow valve 7 and a one-way valve 6;
the oil is divided into two paths through an oil dividing port, and flows through a first PM flow controller 8-1 and a second PM flow controller 8-2 respectively;
the hydraulic oil flowing into the first PM flow controller 8-1 and the second PM flow controller 8-2 is divided into two oil flows after reaching the oil inlet at the bottom of the body, wherein one oil flow enters a pressure regulating chamber 19 above a film 20 after passing through a capillary groove 16 and a throttle 18 at the side surface of the body 15, and the other oil flow is divided into two parts by two annular rectangular grooves inside the body 15, wherein one part enters a pressure regulating chamber 21 below the film 20 through an axial hole, flows out of an oil outlet after passing through an annular throttle table 22, and the other part flows out of an outlet after passing through the two annular capillary grooves together with the part of the oil flow passing through the annular throttle table 22;
the hydraulic oil flowing out of the first PM flow controller 8-1 is divided into two paths again to supply oil to the upper static pressure oil pad 12 and the lower static pressure oil pad 14 respectively;
the hydraulic oil flowing out of the second PM flow controller 8-2 directly supplies oil to the radial oil pad 13, when the oil cavity pressure is 0, the film bends downwards under the action of the precompression of the upper cavity due to the precompression adjusting function of the PM flow controller, the gap between the film and the throttling table is minimum, the liquid resistance is maximum, and the flow flowing out through the oil outlet is minimum at the moment. The pressure of the oil cavity is increased, the film is bent and deformed upwards, so that the gap between the film and the throttle table is increased, the oil outlet resistance is reduced, the flow entering the oil cavity through the gap is increased, and the thickness change of the oil film supported by the static pressure turntable is small;
after the three paths of static pressure oil cavities are filled with hydraulic oil, when the guide rail surface is provided with enough liquid pressure to balance the weight of the load part, the supporting part is floated, at the moment, the static pressure oil flows out of the oil cavities through the gaps of the upper guide rail, the lower guide rail and the radial oil sealing surface, the pressure outside the cavities is reduced to be almost zero, and when the floating amount is larger than the surface unevenness of the upper plane, the lower plane and the radial plane of the guide rail, the pure liquid friction is formed;
one path of hydraulic oil with constant pressure is throttled by a first throttle 10-1 arranged on an upper static pressure oil pad 12 and then is introduced into a lower static pressure oil pad 14, and the other path of hydraulic oil is throttled by a second throttle 10-2 arranged on the lower static pressure oil pad 14 and then is introduced into the upper static pressure oil pad 12, so that an axial closed static pressure structure is formed;
when the guide rail is acted on by downward force F, delta h clearance change is generated, and on one hand, the upper static pressure oil cushion 12 oil cavity is due toThe gap becomes larger (increase to h) 0 +Δh) edge sealing liquid resistance R C The reduction reduces the oil chamber pressure while a restrictor for controlling the upper oil chamber, which is disposed in the oil chamber of the lower hydrostatic pad 14, is reduced due to the clearance (reduced to h 0 - Δh) throttling edge liquid resistance R H The pressure of the liquid resistance loss on the throttling is increased, so that the pressure of the oil cavity of the upper static pressure oil pad is smaller, the feedback effect is achieved, and the pre-pressure P of the upper cavity is achieved through the pre-pressure regulation effect of the PM flow controller when the feedback control is performed s2 Is bent downwards under the action of the air conditioner, the clearance between the film and the throttling table is minimum, and the liquid resistance R of the rectangular groove 1 、R 2 Maximum flow q flowing out through outlet Pr 0 Is also minimal; along with the increase of external load, the pressure Pr led to the static pressure oil cavity through the controller is also increased, so that the original stress balance state of the metal film is destroyed, the film is deformed and bent upwards, the annular gap between the film and the throttling table is increased, and hydraulic oil is led to the liquid resistance R of the static pressure oil cavity through the throttling table of the controller 5 The liquid resistance R of the annular rectangular groove is reduced by the combination result of the deformation of the film and the change of the pressure difference 1 、R 2 Annular capillary groove liquid resistance R 3 、R 4 The flow entering the static pressure oil cavity through the controller is increased, the first PM flow controller 8-1 is used for assisting in controlling the oil cavity pressure of the upper static pressure oil pad 12 and the lower static pressure oil pad 14, and the two are matched to realize precise control.
In the description of the invention, it should be understood that the terms "upper," "lower," "radial," and the like, as used herein, refer to an orientation or positional relationship based on that shown in the drawings, for convenience in describing the invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation configuration and operation, and therefore should not be construed as limiting the invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated.
In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.

Claims (5)

1. An internal feedback static pressure oil film thickness control device based on a PM flow controller is characterized in that: comprising the following steps: the device comprises a first oil tank, a second oil tank, a coarse oil filter, an oil pump, a servo motor, a fine oil filter, a one-way valve, a pilot electromagnetic overflow valve, a PM flow controller, a guide rail, an upper static pressure oil pad, a radial static pressure oil pad, a lower static pressure oil pad and a static pressure workbench; the PM flow controller includes: the device comprises a body, a capillary groove, a throttle orifice, a film, a pressure stabilizing chamber and a throttle table; the PM flow controllers include a first PM flow controller and a second PM flow controller;
the guide rail is arranged at the middle position of the static pressure turntable, the right side of the guide rail is stabilized through the support of the turntable base, an upper static pressure oil pad is arranged above the left side of the guide rail, a lower static pressure oil pad is arranged below the left side of the guide rail, a radial static pressure oil pad is radially arranged, and the three oil pads realize the static pressure support of the static pressure workbench through oil supply;
the first oil tank is characterized in that a servo motor controls an oil pump to pump hydraulic oil through a coarse oil filter, and the hydraulic oil reaches an oil distributing port through a fine oil filter, a pilot electromagnetic overflow valve and a one-way valve; the flow is divided into two paths through the oil dividing port and respectively flows through the first PM flow controller and the second PM flow controller; the pilot electromagnetic overflow valve is connected with the second oil tank;
the hydraulic oil flowing into the first PM flow controller and the second PM flow controller is divided into two oil flows after reaching an oil inlet at the bottom of the body, wherein one oil flow enters a pressure regulating chamber above the film after passing through a capillary groove and a throttling orifice at the side face of the body, and the other oil flow is divided into two parts after passing through two annular rectangular grooves in the body, wherein one part enters a pressure stabilizing chamber below the film through an axial hole and then flows out of an oil outlet after passing through an annular throttling table, and the other part meets the part of the oil flow passing through the annular throttling table and flows out of an outlet together after passing through the two annular capillary grooves.
2. The method for controlling the thickness of the internal feedback static pressure oil film based on the PM flow controller by using the device of claim 1 is characterized in that: the hydraulic oil flowing out of the first PM flow controller is divided into two paths again to supply oil for the upper static pressure oil cavity and the lower static pressure oil cavity respectively; when the oil cavity pressure is 0, the inner film of the PM flow controller bends downwards under the action of the precompression of the upper cavity, the gap between the film and the throttling table is minimum, the liquid resistance is maximum, and the flow flowing out through the oil outlet is minimum; the pressure of the oil cavity is increased, the film is bent upwards to deform, so that the gap between the film and the throttle table is increased, the oil outlet resistance is reduced, the flow entering the oil cavity through the gap is increased, and the thickness change of the oil film supported by the static pressure turntable is small.
3. The internal feedback static pressure oil film thickness control method based on the PM flow controller according to claim 2, which is characterized in that: after the three paths of static pressure oil cavities are filled with hydraulic oil, when the guide rail surface is provided with enough liquid pressure to balance the weight of the load part, the supporting part is floated, at the moment, the static pressure oil flows out of the oil cavities through the gaps of the upper guide rail, the lower guide rail and the radial oil sealing surface, the pressure outside the cavities is reduced to zero, and when the floating amount is larger than the surface unevenness of the upper plane, the lower plane and the radial plane of the guide rail, the pure liquid friction is formed.
4. The internal feedback static pressure oil film thickness control method based on the PM flow controller according to claim 2, which is characterized in that: one path of hydraulic oil with constant pressure is throttled by a first throttle arranged in the upper oil cavity and then is introduced into the lower oil cavity, and the other path of hydraulic oil is throttled by a throttle arranged in the lower oil cavity and then is introduced into the upper oil cavity, so that an axial closed static pressure structure is formed.
5. The internal feedback static pressure oil film thickness control method based on the PM flow controller according to claim 2, which is characterized in that: when the guide rail is acted by downward force F, delta h clearance change can be generated, on one hand, the upper static pressure oil cushion oil cavity reduces oil cavity pressure due to the fact that clearance is increased, oil sealing edge liquid resistance is reduced, meanwhile, a restrictor which is arranged in the lower static pressure oil cushion oil cavity and used for controlling the upper oil cavity increases due to the fact that clearance is reduced, the pressure which is lost due to liquid resistance on the restrictor can be increased, the pressure which is led into the upper static pressure oil cushion oil cavity becomes smaller, feedback effect is achieved, and the first PM flow controller assists in controlling the pressure of the upper static pressure oil cushion oil cavity and the pressure of the lower static pressure oil cushion oil cavity through feedback control, and precise control is achieved through cooperation of the upper static pressure oil cushion oil cavity and the lower static pressure oil cushion oil cavity.
CN202310230977.1A 2023-03-12 2023-03-12 Internal feedback static pressure oil film thickness control method based on PM flow controller Pending CN116237780A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117484215A (en) * 2024-01-02 2024-02-02 中国机械总院集团宁波智能机床研究院有限公司 Control method and device of aerostatic turntable and aerostatic turntable

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117484215A (en) * 2024-01-02 2024-02-02 中国机械总院集团宁波智能机床研究院有限公司 Control method and device of aerostatic turntable and aerostatic turntable
CN117484215B (en) * 2024-01-02 2024-04-26 中国机械总院集团宁波智能机床研究院有限公司 Control method and device of aerostatic turntable and aerostatic turntable

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