WO2021120187A1 - 一种紧凑型传感器件 - Google Patents

一种紧凑型传感器件 Download PDF

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Publication number
WO2021120187A1
WO2021120187A1 PCT/CN2019/127077 CN2019127077W WO2021120187A1 WO 2021120187 A1 WO2021120187 A1 WO 2021120187A1 CN 2019127077 W CN2019127077 W CN 2019127077W WO 2021120187 A1 WO2021120187 A1 WO 2021120187A1
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WO
WIPO (PCT)
Prior art keywords
reflector
mirror
reflecting
input end
output end
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Application number
PCT/CN2019/127077
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English (en)
French (fr)
Inventor
陈波
温俊华
Original Assignee
徐州旭海光电科技有限公司
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Application filed by 徐州旭海光电科技有限公司 filed Critical 徐州旭海光电科技有限公司
Priority to PCT/CN2019/127077 priority Critical patent/WO2021120187A1/zh
Priority to CN201980003150.9A priority patent/CN111148986B/zh
Publication of WO2021120187A1 publication Critical patent/WO2021120187A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation

Definitions

  • This application relates to the field of optical sensing, in particular to a compact sensor device for gas optical sensing.
  • optical devices In a limited volume, multiple reflections of the light beam are realized, so that the light beam travels a relatively long optical path.
  • Such optical devices have important applications in the field of optical sensing, especially in the field of sensing and analysis of special gases.
  • TDLAS semiconductor tunable laser absorption spectroscopy
  • FTIR Fourier transform infrared spectroscopy
  • the former is mainly based on tunable laser spectroscopy analysis in the near-infrared band, and the latter
  • a broad-spectrum light source is used for spectral analysis in the mid- and far-infrared through Fourier transform.
  • both TDLAS and FTIR need a long optical path gas chamber, so that the beam can transmit enough optical path in the required analysis gas to enhance the absorption spectrum, in order to make the volume of the detection instrument acceptable Within the range, the long optical path gas chamber needs to adopt the form of optical path folding device to reflect the light beam as many times as possible in a limited volume to achieve a sufficient optical path.
  • the Herriot chamber 100 uses two concave mirrors 103 and 104 with the same focal length f to form a reflective cavity.
  • the input end 101 enters the beam
  • the incident direction and position of the two concave mirrors and the distance d along the z-direction of the two concave mirrors meet certain conditions (usually the defocus configuration of 0 ⁇ d ⁇ 2f or 2f ⁇ d ⁇ 4f)
  • the beam will go back and forth between the two concave mirrors Multiple reflections, and finally output from the output terminal 102.
  • FIG. 2 it is exemplarily shown that on two concave mirrors 203 and 204, the reflection points form a circular spot track 201 on the x-y plane.
  • the White Chamber 300 is composed of three concave mirrors with the same radius of curvature and focal length f.
  • the main mirror 301 is located on one side, and the two secondary mirrors 302, 303 are located on the main mirror. On the opposite side, the input beam 304 and the output beam 305 are located on both sides of the main mirror.
  • the two secondary mirrors have a certain inclination angle, and the distance between the main mirror and the two secondary mirrors is set to 2f, so that the beam is reflected back and forth on the main mirror and the two secondary mirrors for multiple reflections, and finally from the side of the main mirror Output.
  • the trajectory of the light spot on the main reflector is shown in FIG.
  • the input beam position 404 deviates from the axis 402 of the main reflector 401, so that the light spot is distributed on the two rows of trajectories 403, 406 to obtain the maximum number of reflections.
  • the output beam position 405 is usually on the other side of the trajectory 406 in the same row as the input beam.
  • a corner reflector is used to reflect the output beam and return it along the original path (a deviation from one Small angle), the optical path is doubled, but the input and output ends are too close, and more space is needed to separate the input and output beams; at the same time, the white room uses an angled secondary mirror. After the beam is reflected multiple times, the aberration affects the output The influence of the beam characteristics is greater.
  • the existing long optical path gas chamber has large volume, low optical path-volume ratio, difficulty in further expansion of optical path, difficulty in processing astigmatic lens, high cost, and application scenarios that require the maintenance of beam characteristics (beam radius, half-angle of divergence, etc.) Unable to apply and many other problems.
  • the first aspect of the embodiments of the present application provides a compact sensor device, including:
  • a first reflector the first reflector is a concave reflector and has a focal length f1;
  • the focal plane of the second reflector is parallel to the focal plane of the first reflector, and the focal plane of the second reflector is parallel to the focal plane of the first reflector.
  • the reflecting surfaces of the mirrors are arranged oppositely and the distance is f1+f2 ⁇ f, ⁇ f ⁇ 0; when the second reflecting mirror is a plane reflecting mirror, the reflecting surface of the second reflecting mirror is parallel to that of the first reflecting mirror.
  • One input terminal for inputting light is
  • One output terminal used to output light
  • the first reflecting mirror and the second reflecting mirror form a reflecting cavity
  • the reflecting cavity has a main optical axis
  • the intersection of the main optical axis and the reflecting surface of the first reflecting mirror is The origin of the first optical axis
  • the intersection of the main optical axis and the second reflector is the origin of the second optical axis
  • the light input from the input end is output from the output end after being reflected multiple times in the reflecting cavity
  • the light rays form a first elliptical locus centered on the origin of the first optical axis on the reflective surface of the first reflector, and form a first elliptical locus centered on the origin of the first optical axis on the reflective surface of the second reflector.
  • the second ellipse trajectory as the center.
  • the input end is arranged at the first mirror or the second mirror
  • the output end is arranged at the first reflecting mirror or the second reflecting mirror.
  • the input end and the output end are separately arranged at different positions of the first reflector
  • the distance between the input end and the origin of the first optical axis is L1, L1 ⁇ 0;
  • the distance between the output end and the origin of the first optical axis is L2, and L2 ⁇ 0;
  • the input end and the output end are separately arranged at different positions of the second reflector
  • the distance between the input end and the origin of the second optical axis is L1, L1 ⁇ 0;
  • the distance between the output end and the origin of the second optical axis is L2, and L2 ⁇ 0.
  • L1 and L2 are close to zero.
  • the input end is a collimated laser
  • the output end is a photodetector
  • the input end and the output end are arranged at the same position of the first reflector
  • the distance between the input end and the output end and the origin of the first optical axis is L3, L3 ⁇ 0;
  • the input end and the output end are arranged at the same position of the second reflector
  • the distance between the input end and the output end and the origin of the second optical axis is L3, L3 ⁇ 0.
  • L3 approaches zero.
  • the input end and the output end are double-tail fiber collimators, and the double-tail fiber collimator includes an input fiber for input light, an output fiber for output light, and a collimator.
  • Straight lens is used to align the double-tail fiber collimator.
  • a second aspect of the embodiments of the present application provides a compact sensor device, including:
  • a first reflector the first reflector is a concave reflector and has a focal length f1;
  • a second reflector with a focal length f2 the reflecting surface of the second reflector is arranged on the opposite side of the reflecting surface of the first reflector, and when the second reflector is a concave reflector, the first reflector
  • a first plane folding mirror The reflecting surface of the first plane folding mirror is opposite to the reflecting surface of the first reflecting mirror.
  • the second reflecting mirror is a concave reflecting mirror
  • the first plane The angle between the reflecting surface of the folding mirror and the focal plane of the second reflecting mirror is ⁇ 1;
  • the second reflecting mirror is a flat reflecting mirror, the reflecting surface of the first flat folding reflecting mirror is The angle between the reflecting surfaces of the second reflecting mirror is ⁇ 1, ⁇ 1 ⁇ 0;
  • a second plane folding mirror the reflecting surface of the second plane folding mirror is opposite to the reflecting surface of the second reflecting mirror and is parallel to the reflecting surface of the first plane folding mirror;
  • One input terminal for inputting light is
  • One output terminal used to output light
  • the first reflecting mirror, the second reflecting mirror, the first flat folding reflecting mirror and the second flat folding reflecting mirror form a reflecting cavity, and the light input from the input end is reflected in the reflecting cavity. After multiple reflections in the cavity, the light is output from the output end, and the light rays form a first ellipse trajectory on the reflection surface of the first mirror, and n second ellipses are formed on the reflection surface of the first plane folding mirror.
  • n third elliptical trajectories on the reflective surface of the second plane folding mirror forming a fourth elliptical trajectory on the reflective surface of the second mirror, n ⁇ 1 and an integer, the path of the light It is a sawtooth shape and the total path distance of the sawtooth path is f1+f2 ⁇ f, ⁇ f ⁇ 0.
  • the input end is arranged at the first mirror or the second mirror
  • the output end is arranged at the first reflecting mirror or the second reflecting mirror.
  • the input end and the output end are separately arranged at different positions of the first reflector
  • the distance between the input terminal and the center of the first ellipse trajectory is L1, L1 ⁇ 0;
  • the distance between the output terminal and the center of the first elliptical trajectory is L2, L2 ⁇ 0;
  • the input end and the output end are separately arranged at different positions of the second reflector
  • the distance between the input end and the center of the fourth elliptical trajectory is L1, L1 ⁇ 0;
  • the distance between the output terminal and the center of the fourth elliptical trajectory is L2, and L2 ⁇ 0.
  • L1 and L2 are close to zero.
  • the input end is a collimated laser
  • the output end is a photodetector
  • the input end and the output end are arranged at the same position of the first reflector
  • the distance between the input end and the output end and the center of the first elliptical trajectory is L3, L3 ⁇ 0;
  • the input end and the output end are arranged at the same position of the second reflector
  • the distance between the input end and the output end and the center of the fourth elliptical trajectory is L3, L3 ⁇ 0.
  • L3 approaches zero.
  • the input end and the output end are double-tail fiber collimators, and the double-tail fiber collimator includes an input fiber for input light, an output fiber for output light, and a collimator.
  • Straight lens is used to align the double-tail fiber collimator.
  • the compact sensor device made the trajectory of light on the reflective surface of each mirror an elliptical trajectory, which reduces the volume of the reflective cavity and has a high optical path-to-volume ratio; by using a concave mirror and a flat surface
  • the mirror or two concave mirrors constitute a two-mirror system, which has the advantages of simple system structure, low cost, and easy assembly.
  • the relative position and angle between the two mirrors are caused by factors such as temperature, vibration, and packaging mechanical stress changes
  • the spot position and angle of the output light change very little, and the system reliability and stability are high; by introducing two flat folding mirrors, the number of reflections of the light can be increased, thereby increasing the optical path.
  • Figure 1 is a schematic diagram of a Herriot chamber in the prior art
  • Fig. 2 is a diagram showing the trajectory of the reflection point of the Heriot chamber in the prior art
  • FIG. 3 is a schematic diagram of the structure of the White room in the prior art
  • Fig. 4 is a diagram of the light beam reflection point and spot track of the white chamber in the prior art
  • FIG. 5 and 6 are the first principle diagrams of the compact sensor device provided in the first embodiment of the present application.
  • FIG. 7 is a second schematic diagram of the compact sensor device provided by Embodiment 1 of the present application.
  • FIG. 8 is a third schematic diagram of the compact sensor device provided in the first embodiment of the present application.
  • FIG. 9 is a fourth principle diagram of the compact sensor device provided in the first embodiment of the present application.
  • FIG. 10 is a fifth schematic diagram of the compact sensor device provided in the first embodiment of the present application.
  • FIG. 11 is a sixth principle diagram of the compact sensor device provided in Embodiment 1 of the present application.
  • FIG. 12 is a first schematic diagram of the compact sensor device provided in the second embodiment of the present application.
  • FIG. 13 is a second principle diagram of the compact sensor device provided in the second embodiment of the present application.
  • Fig. 14 is a third principle diagram of the compact sensor device provided in the second embodiment of the present application.
  • an embodiment of the present application provides a compact sensor device, including:
  • a first reflector 501 is a concave reflector and has a focal length f1;
  • a second mirror 502 has a focal length f2.
  • the focal plane of the second mirror 502 is parallel to the focal plane of the first mirror 501 and is The reflecting surfaces of the first reflecting mirror 501 are arranged oppositely and the distance is f1+f2 ⁇ f, ⁇ f ⁇ 0;
  • the second reflecting mirror 502 is a plane reflecting mirror, the reflecting surface of the second reflecting mirror 502 is parallel to
  • the first reflecting mirror 501 and the second reflecting mirror 502 form a reflecting cavity
  • the reflecting cavity has a main optical axis
  • the main optical axis is connected to the reflecting surface of the first reflecting mirror 501
  • the intersection point of the first optical axis is the origin of the first optical axis
  • the intersection point of the main optical axis and the second reflector 502 is the origin of the second optical axis
  • the light input from the input end 503 is reflected in the reflection cavity from the
  • the output terminal 504 outputs, the light rays form a first elliptical trajectory centered on the origin of the first optical axis on the reflective surface of the first mirror 501, and form on the reflective surface of the second mirror 502 A second elliptical trajectory centered on the origin of the second optical axis.
  • the concave reflector can be set to a regular shape such as a cylinder or a rectangular body according to actual needs, and specifically can be a rectangular body.
  • the plane mirror may be a flat mirror.
  • the focal plane of the second reflector is parallel to the focal plane of the first reflector and is arranged opposite to the reflector surface of the first reflector.
  • the focal plane of the second reflector is the same as that of the first reflector.
  • the design value of the distance between the reflecting surfaces is f1+f2 ⁇ f and ⁇ f ⁇ 0.
  • ⁇ f can take a value of 10% (f1+f2), that is, the focal plane of the second mirror and the first reflection
  • the distance between the reflecting surfaces of the mirror ranges from 90% (f1+f2) to 110% (f1+f2); when the second reflecting mirror is a plane reflecting mirror, the reflecting surface of the second reflecting mirror is parallel to the first reflecting surface.
  • ⁇ f may take a value of 10% f1, that is, the range of the distance between the reflecting surface of the second reflecting mirror and the reflecting surface of the first reflecting mirror is 90% f1 to 110% f1.
  • the input end is arranged at the first mirror or the second mirror
  • the output end is arranged at the first reflecting mirror or the second reflecting mirror.
  • the relative positional relationship between the input terminal and the output terminal includes the following six situations:
  • Both the input end and the output end are arranged on the first reflector and they are separately arranged at different positions;
  • Both the input end and the output end are arranged on the first reflector and both are arranged at the same position;
  • Both the input end and the output end are arranged on the second reflector and they are separately arranged at different positions;
  • Both the input end and the output end are arranged on the second reflector and both are arranged at the same position;
  • the input end is arranged on the second reflecting mirror, and the output end is arranged on the first reflecting mirror.
  • the input end when the input end and the output end are set at different positions, the input end can be a through hole opened on the first reflector or the second reflector, or it can be embedded in the first reflector or the second reflector.
  • the collimating laser in the through hole opened on the reflector; the output end can be a through hole opened on the first reflector or the second reflector, or it can be embedded in the first reflector or the second reflector.
  • the input end and the output end When the input end and the output end are set at the same position, the input end and the output end can be through holes opened on the first reflector or the second reflector, or they can be embedded in the first reflector or the second reflector.
  • the double-tail fiber collimator in the through hole opened on the mirror, the double-tail fiber collimator includes an input fiber for inputting light, an output fiber for outputting light, and a collimating lens.
  • FIGS. 5 and 6 exemplarily show that the input terminal 503 and the output terminal 504 are jointly arranged at the same position of the first mirror 501, and the input terminal 503 and the output terminal 504 are through holes opened on the first mirror 501 Schematic diagram of the compact sensor device at the time.
  • FIG. 7 exemplarily shows that the input terminal 503 and the output terminal 504 are separately arranged at different positions of the first mirror 501, and the input terminal 503 is a through hole opened on the first mirror 501, and the output terminal 504 is in the first mirror 501.
  • FIG. 8 exemplarily shows that when the second mirror 502 is a plane mirror, the input terminal 503 and the output terminal 504 are jointly arranged at the same position of the first mirror 501, and the input terminal 503 and the output terminal 504 are embedded
  • FIG. 9 exemplarily shows that when the second mirror 502 is a plane mirror, the input terminal 503 and the output terminal 504 are separately arranged at different positions of the first mirror 501, and the input terminal 503 is embedded in the first mirror.
  • the principle diagram of a compact sensor device when the output end 504 of the collimated laser in the through hole opened on the first reflector 501 is a photodetector embedded in the through hole opened on the first reflector 501.
  • the input end and the output end are separately arranged at different positions of the first reflector
  • the distance between the input end and the origin of the first optical axis is L1, L1 ⁇ 0;
  • the distance between the output end and the origin of the first optical axis is L2, and L2 ⁇ 0;
  • the input end and the output end are separately arranged at different positions of the second reflector
  • the distance between the input end and the origin of the second optical axis is L1, L1 ⁇ 0;
  • the distance between the output end and the origin of the second optical axis is L2, and L2 ⁇ 0.
  • L1 and L2 are close to zero.
  • both the input end and the output end are preferably close to the origin of the first optical axis, and the input end and the output end are at a first distance from each other.
  • the major axis and minor axis of the second elliptical track are The larger the ratio, the closer the short axis of the second elliptical track is to the origin of the second optical axis, and the better the stability of the compact sensor device.
  • the ratio of the long axis to the short axis of the first elliptical track is ⁇ 1.5.
  • the input end and the output end are preferably close to the origin of the second optical axis, and the distance between the input end and the output end of the second optical axis origin is greater.
  • the ratio of the long axis to the short axis of the second elliptical track is greater than or equal to 1.5.
  • the ratio of the major axis to the minor axis of the first ellipse trajectory and the second ellipse trajectory is large, which not only increases the stability of the compact sensor device, but also greatly reduces the volume of the reflection cavity and increases the optical path volume of the compact sensor device ratio.
  • the input end and the output end are arranged at the same position of the first reflector
  • the distance between the input end and the output end and the origin of the first optical axis is L3, L3 ⁇ 0;
  • the input end and the output end are arranged at the same position of the second reflector
  • the distance between the input end and the output end and the origin of the second optical axis is L3, L3 ⁇ 0.
  • L3 approaches zero.
  • the input end and the output end are both set on the first mirror and they are both set at the same position, the input end and the output end are preferably close to the origin of the first optical axis, and the input end and the output end are far away from the first optical axis.
  • the ratio of the major axis to the minor axis of the second ellipse track The larger the value, the closer the short axis of the second ellipse track is to the origin of the second optical axis, and the better the stability of the compact sensor device.
  • the ratio of the long axis to the short axis of the first ellipse track is ⁇ 1.5.
  • the ratio of the long axis to the short axis of the second elliptical track is greater than or equal to 1.5.
  • the ratio of the major axis to the minor axis of the first ellipse trajectory and the second ellipse trajectory is large, which not only increases the stability of the compact sensor device, but also greatly reduces the volume of the reflection cavity and increases the optical path volume of the compact sensor device ratio.
  • the input terminal The path of the light during multiple reflections in the reflecting cavity will change slightly, but the position of the light output from the output end is unchanged, that is, the light output from the output end has a difference between the first reflector and the second reflector.
  • the position and angle deviation are not sensitive, and the compact sensor device has high stability.
  • Fig. 10 exemplarily shows the light paths 51 and 52 when the position and angle between the first mirror 501 and the second mirror 502 are not shifted and a small amount of shift is generated on the basis of Fig. 6; wherein , The light path 51 and the light path 52 do not completely overlap, but the output positions of the two at the output end 504 are overlapped.
  • Fig. 11 exemplarily shows the light paths 53 and 54 when the position and angle between the first mirror 501 and the second mirror 502 are not offset and a small amount of offset is generated on the basis of Fig. 7; wherein , The light path 53 and the light path 54 do not completely overlap, but the output positions of the two at the output end 504 are overlapped.
  • the compact sensor device provided in the first embodiment makes the trajectory of light on the reflective surface of each mirror an elliptical trajectory, which reduces the volume of the reflective cavity and has a high optical path-to-volume ratio; by using a concave mirror and a flat surface
  • the two-mirror system composed of reflectors or two concave reflectors form the two-mirror system, which has the advantages of simple system structure, low cost, and easy assembly.
  • FIG. 12 As shown in any one of Figures 12 to 14, another embodiment of the present application provides a compact sensor device, including:
  • a first reflector 601, the first reflector 601 is a concave reflector and has a focal length f1;
  • a second reflecting mirror 602 with a focal length f2 the reflecting surface of the second reflecting mirror 602 is arranged on the opposite side of the reflecting surface of the first reflecting mirror 601, when the second reflecting mirror 602 is a concave reflecting mirror
  • a first plane folding mirror 603. The reflecting surface of the first plane folding mirror is opposite to the reflecting surface of the first reflecting mirror.
  • the second reflecting mirror 602 is a concave reflecting mirror
  • the second reflecting mirror 602 is a concave reflecting mirror.
  • the angle between the reflecting surface of a flat folding mirror 603 and the focal plane of the second reflecting mirror 602 is ⁇ 1;
  • the first flat folding reflecting mirror The angle between the reflecting surface of 603 and the reflecting surface of the second reflecting mirror 602 is ⁇ 1, ⁇ 1 ⁇ 0;
  • a second flat folding mirror 604 the reflecting surface of the second flat folding mirror is opposite to the reflecting surface of the second reflecting mirror and parallel to the reflecting surface of the first flat folding mirror;
  • One input terminal 605 for inputting light is
  • the first reflecting mirror 601, the second reflecting mirror 602, the first flat folding reflecting mirror 603, and the second flat folding reflecting mirror 604 form a reflecting cavity
  • the input terminal 605 inputs
  • the light is output from the output terminal 606 after multiple reflections in the reflection cavity.
  • the light forms a first elliptical trajectory on the reflective surface of the first mirror 601, and is reflected by the first plane folding mirror 603.
  • n second elliptical trajectories n third elliptical trajectories are formed on the reflective surface of the second planar folding mirror 604, and a fourth elliptical trajectory is formed on the reflective surface of the second mirror 602, n ⁇ 1 And is an integer, the path of the light is zigzag, and the total optical path of the light is f1+f2 ⁇ f, ⁇ f ⁇ 0.
  • the concave reflector can be set to a regular shape such as a cylinder or a rectangular body according to actual needs, and specifically can be a rectangular body.
  • the plane mirror may be a flat mirror.
  • the first flat folding mirror and the second flat folding mirror may be flat-plate mirrors with exactly the same size.
  • the reflection surface of the first plane folding mirror is parallel to the reflection surface of the second plane folding mirror, and when the second mirror is a concave mirror, the reflection surface of the first plane folding mirror is the focal plane of the second mirror There is an angle of ⁇ 1 between them; when the second mirror is a flat mirror, there is an angle of ⁇ 1 between the reflecting surface of the first flat folding mirror and the reflecting surface of the second mirror, and ⁇ 1 can be Set to any smaller value not equal to 0 according to actual needs, for example, any value between 3° and 15°.
  • the number of the second elliptical trajectory formed by the reflecting surface of the first plane folding mirror and the third elliptical trajectory formed on the reflecting surface of the second plane folding mirror is the same as n, and the size of n is the same as that of the first elliptical trajectory.
  • the width of the flat folding mirror and the second flat folding mirror in the minor axis direction of the ellipse track is positively correlated.
  • the width of the first plane folding mirror and the second plane folding mirror in the minor axis direction of the ellipse track can be expanded to increase the reflection surface of the first plane folding mirror and the second plane folding mirror.
  • the number of reflections between and the number of the second elliptical trajectory formed by the reflecting surface of the first plane folding mirror and the third elliptical trajectory formed by the reflecting surface of the second plane folding mirror, thereby increasing the number of rays in the reflecting cavity The total optical path traveled in the body.
  • the path of light propagating in the reflecting cavity is zigzag and the design value of the total path distance of the zigzag path is f1+f2 ⁇ f and ⁇ f ⁇ 0.
  • ⁇ f can take a value of 10% (f1+f2), That is, the value range of the total path distance is 90% (f1+f2) ⁇ 110% (f1+f2). It should be understood that the total path distance is not equal to the total optical path.
  • the total path distance is equal to the optical path from the input end of the light to the first time it reaches the second reflector;
  • the total path distance is equal to the optical path of the light from the input end to when it first reaches the first reflector.
  • the input end is arranged at the first mirror or the second mirror
  • the output end is arranged at the first reflecting mirror or the second reflecting mirror.
  • the relative positional relationship between the input terminal and the output terminal includes the following six situations:
  • Both the input end and the output end are arranged on the first reflector and they are separately arranged at different positions;
  • Both the input end and the output end are arranged on the first reflector and both are arranged at the same position;
  • Both the input end and the output end are arranged on the second reflector and they are separately arranged at different positions;
  • Both the input end and the output end are arranged on the second reflector and both are arranged at the same position;
  • the input end is arranged on the second reflecting mirror, and the output end is arranged on the first reflecting mirror.
  • the input end when the input end and the output end are set at different positions, the input end can be a through hole opened on the first reflector or the second reflector, or it can be embedded in the first reflector or the second reflector.
  • the collimating laser in the through hole opened on the reflector; the output end can be a through hole opened on the first reflector or the second reflector, or it can be embedded in the first reflector or the second reflector.
  • the input end and the output end When the input end and the output end are set at the same position, the input end and the output end can be through holes opened on the first reflector or the second reflector, or they can be embedded in the first reflector or the second reflector.
  • the double-tail fiber collimator in the through hole opened on the mirror, the double-tail fiber collimator includes an input fiber for inputting light, an output fiber for outputting light, and a collimating lens.
  • FIG. 12 exemplarily shows that the input terminal 605 and the output terminal 606 are separately arranged at different positions of the first mirror 601.
  • the input terminal 605 is a through hole opened on the first mirror 601, and the output terminal 606 is in the first mirror 601.
  • the principle diagram of the compact sensor device when the through holes are opened on the reflector 601, and the number of the third ellipse track and the fourth ellipse track is 1, and the light path is Z-shaped.
  • FIG. 13 exemplarily shows that when the second mirror 602 is a plane mirror, the input terminal 605 and the output terminal 606 are jointly arranged at the same position of the first mirror 601, and the input terminal 605 and the output terminal 606 are in the first reflection mirror.
  • FIG. 14 exemplarily shows that when the second mirror 602 is a plane mirror, the input end 605 and the output end 606 are jointly arranged at the same position of the first mirror 601, and the input end 605 and the output end 606 are in the first reflector.
  • the input end and the output end are separately arranged at different positions of the first reflector
  • the distance between the input terminal and the center of the first ellipse trajectory is L1, L1 ⁇ 0;
  • the distance between the output terminal and the center of the first elliptical trajectory is L2, L2 ⁇ 0;
  • the input end and the output end are separately arranged at different positions of the second reflector
  • the distance between the input end and the center of the fourth elliptical trajectory is L1, L1 ⁇ 0;
  • the distance between the output terminal and the center of the fourth elliptical trajectory is L2, and L2 ⁇ 0.
  • L1 and L2 are close to zero.
  • both the input end and the output end are preferably close to the center position of the first elliptical trajectory, and the input end and the output end are separated from the first mirror.
  • the second ellipse trajectory ⁇ the fourth ellipse trajectory The greater the ratio of the long axis to the short axis of the ellipse, the closer the short axis of the second ellipse to the fourth ellipse trajectory is, and the better the stability of the compact sensor device. Specifically, the longer the first ellipse trajectory is.
  • the ratio of the shaft to the short shaft is ⁇ 1.5.
  • the input end and the output end are both arranged on the second mirror and they are separately arranged at different positions, the input end and the output end are preferably close to the center of the fourth elliptical track, and the input and output ends are away from the center of the fourth elliptical track The closer, the greater the ratio of the major axis to the minor axis of the fourth ellipse, and the closer the minor axis of the fourth ellipse is to the center of the fourth ellipse.
  • the sum of the major axes of the first ellipse to the third ellipse is The ratio of the minor axis is also larger, and the minor axis of the first ellipse to the third ellipse is closer to the origin of the first optical axis, and the stability of the compact sensor device is better.
  • the major axis of the fourth ellipse and the The ratio of the minor axis is ⁇ 1.5.
  • the ratio of the major axis to the minor axis of the first ellipse trajectory and the fourth ellipse trajectory is large, which not only increases the stability of the compact sensor device, but also greatly reduces the volume of the reflection cavity and increases the optical path volume of the compact sensor device ratio.
  • the input end and the output end are arranged at the same position of the first reflector
  • the distance between the input end and the output end and the center of the first elliptical trajectory is L3, L3 ⁇ 0;
  • the input end and the output end are arranged at the same position of the second reflector
  • the distance between the input end and the output end and the center of the fourth elliptical trajectory is L3, L3 ⁇ 0.
  • L3 approaches zero.
  • the input end and the output end are preferably close to the center of the first ellipse track, and the input end and the output end are away from the first ellipse.
  • the second elliptical trajectory ⁇ the fourth elliptical trajectory
  • the ratio to the short axis is ⁇ 1.5.
  • the input end and the output end are preferably close to the center position of the fourth ellipse track, and the input end and the output end are away from the center of the fourth ellipse track
  • the sum of the major axes of the first ellipse to the third ellipse is The ratio of the minor axis is also larger, and the minor axis of the first ellipse trajectory ⁇ the third ellipse trajectory is also closer to the origin of the first optical axis, and the stability of the compact sensor device is better.
  • the major axis of the fourth ellipse trajectory and The ratio of the minor axis is ⁇ 1.5.
  • the ratio of the major axis to the minor axis of the first ellipse trajectory and the fourth ellipse trajectory is large, which not only increases the stability of the compact sensor device, but also greatly reduces the volume of the reflection cavity and increases the optical path volume of the compact sensor device ratio.
  • the first mirror, the second mirror, the first plane folding mirror and the second plane folding mirror are When the position and angle are slightly shifted, the path of the light input at the input end during multiple reflections in the reflecting cavity will change slightly, but the position of the light output from the output end is unchanged, that is, the output end of the light is output.
  • the light is insensitive to the position and angle deviation between the first mirror, the second mirror, the first plane folding mirror and the second plane folding mirror, and the compact sensor device has high stability.
  • the compact sensor device provided in the second embodiment makes the light trajectory on the reflective surface of each mirror an elliptical trajectory, which reduces the volume of the reflective cavity and has a high optical path-to-volume ratio; through the use of concave mirrors and flat mirrors ,
  • the first plane folding mirror and the second plane folding mirror form a four-mirror system, or two concave mirrors, the first plane folding mirror and the second plane folding mirror form a four-mirror system, which has a simple system structure ,
  • the system has high reliability and stability, and by introducing two flat folding mirrors, the number of reflections of light can be increased, thereby increasing the optical path.

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Abstract

一种紧凑型传感器件，涉及光学传感领域，通过采用一个凹面反射镜(501)和一个平面反射镜(502)构成的两镜系统或两个凹面反射镜(501，502)构成两镜系统，或者，在两镜系统基础上增加一对折叠反射镜(603，604)构成四镜系统，使得光线在各反射镜的反射面上的轨迹为椭圆轨迹，缩小了反射腔体的体积，光程体积比高，具有光学系统结构简单，成本低，装配容易的优点，当两个反射镜之间的相对位置和角度由于温度、振动、封装机械应力变化等因素产生小量变化时，输出光线的光斑位置和角度变化很小，系统可靠性和稳定性高。

Description

一种紧凑型传感器件 技术领域
本申请涉及光学传感领域，尤其涉及用于气体光学传感的紧凑型传感器件。
 背景技术
在有限体积内，实现光束的多次反射，使光束走过相对较长的光程，这样的光学器件在光学传感领域，特别是针对特种气体的传感和分析领域有重要的应用。
目前半导体可调激光吸收光谱分析（以下简称TDLAS）和傅里叶变换红外光谱分析（以下简称FTIR）是两个主流的技术路线，前者主要基于可调激光在近红外波段进行光谱分析，后者采用宽谱光源通过傅里叶变换在中远红外进行光谱分析。
为了达到足够的探测精度，无论TDLAS还是FTIR都需要一个长光程气室，以使光束在所需分析气体内传输足够的光程以增强吸收谱线，为了使探测仪器仪表的体积在可接受范围内，长光程气室需采用光程折叠器件的形式，以在有限体积内尽可能多次反射光束，以达到足够的光程。
针对TDLAS应用，由于激光束的发散角小，工业界普遍采用赫里奥特室结构（APPLIED OPTICS / Vol. 3, No. 4 / April 1964），如图1所示，赫里奥特室100采用两个具有相同焦距f的凹面反射镜103、104形成反射腔，当输入端101输入光束的入射方向和位置、两个凹面反射镜沿z方向的距离d满足一定条件时（一般取0<d<2f或 2f<d<4f的离焦配置），光束将在两个凹面反射镜来回多次反射，最后从输出端102输出。如图2所示，示例性的示出在两个凹面反射镜203、204上，反射点在x-y平面上形成圆形的光斑轨迹201。
针对FTIR应用，由于光源需要非相干的宽谱热光源，光束发散角大，赫里奥特室的性能不能满足要求，这是由于赫里奥特室必需的离焦配置特性导致，离焦系统多次反射后非相干光束发散角无法收敛，工业界则普遍采用传统的怀特室结构（White，J.U.“Long Optical Paths of Large Aperture”J.Opt.Soc.Am.,Vol.32,pp285-288,May 1942），如图3所示，怀特室300由三个具有相同曲率半径和焦距f的凹面反射镜组成，主反射镜301位于一侧，两个次反射镜302、303位于主反射镜相对一侧，输入光束304和输出光束305位于主反射镜两侧。两个次反射镜带有一定倾角，主反射镜与两个次反射镜的距离设置为2f，使光束在主反射镜和两个次反射镜来回多次反射成像，最后从主反射镜一侧输出。光斑在主反射镜上的轨迹如图4所示，通常输入光束位置404偏离主反射镜401轴心线402，使得光斑分布在两排轨迹403、406上，以获得最大的反射次数。输出光束位置405通常在与输入光束同排轨迹406的另一侧。
随着业界对气体探测精度要求的提升，对光程气室的要求也进一步提高，需要在有限的体积内实现更长的光程（20米以上，乃至100米以上），赫里奥特室和怀特室很难在一定体积内实现更多次的反射。基于赫里奥特室和怀特室有很多改进的设计，如赫里奥特本人提出的用像散透镜实现更多的反射次数（“Folded Optical Delay Lines”，Appl. Opt.,Vol.4,No.8,pp883-889,1965），但存在像散透镜很难加工的问题，虽然后续有通过旋转一个像散透镜以降低加工精度要求（美国专利5291365，1994），仍旧没有解决像散透镜高昂的加工成本问题；Joel.A.Silver等人提出用双柱面镜实现密集的光斑分布即更多的反射次数（美国专利7477377，2009），但由于双柱面的非旋转对称性质，光束在多次反射后不再具有与输入光束相同的光束特性，在需要光束特性（光束半径、发散半角等）保持的应用场景中无法应用。虽然也有一些基于怀特室的改进方案，如中国专利“折叠式倍光程多通气体池”（CN102053063B）在怀特室输出端采用一个角反射镜，反射输出光束使之沿原路返回（偏离一个小角度），光程得到加倍，但输入输出端过于靠近，需要更多的空间分离输入和输出光束；同时，怀特室使用了带角度的次反射镜，光束多次反射后，像差对输出光束特性的影响较大。
 技术问题
现有的长光程气室存在体积大、光程体积比不高、光程难以进一步拓展，以及像散透镜加工困难成本高昂、在需要光束特性（光束半径、发散半角等）保持的应用场景中无法应用等诸多问题。
 技术解决方案
本申请实施例第一方面提供一种紧凑型传感器件，包括：
一个第一反射镜，所述第一反射镜为凹面反射镜且具有焦距f1；
一个第二反射镜，具有焦距f2，当所述第二反射镜为凹面反射镜时，所述第二反射镜的焦平面平行于所述第一反射镜的焦平面、与所述第一反射镜的反射面相对设置且距离为f1+f2±Δf，Δf≠0；当所述第二反射镜为平面反射镜时，所述第二反射镜的反射面平行于所述第一反射镜的焦平面、与所述凹面反射镜的反射面相对设置且距离为f1±Δf，Δf≠0，f2=0；
一个输入端，用于输入光线；
一个输出端，用于输出光线；
其中，所述第一反射镜和所述第二反射镜组成一个反射腔体，所述反射腔体具有一个主光轴，所述主光轴与所述第一反射镜的反射面的交点为第一光轴原点，所述主光轴与所述第二反射镜的交点为第二光轴原点，所述输入端输入的光线在所述反射腔体内多次反射后从所述输出端输出，所述光线在所述第一反射镜的反射面形成以所述第一光轴原点为中心的第一椭圆轨迹、在所述第二反射镜的反射面形成以所述第二光轴原点为中心的第二椭圆轨迹。
在一个实施例中，所述输入端设置于所述第一反射镜或所述第二反射镜；
所述输出端设置于所述第一反射镜或所述第二反射镜。
在一个实施例中，所述输入端和所述输出端分离设置于所述第一反射镜的不同位置；
所述输入端与所述第一光轴原点的距离为L1，L1≠0；
所述输出端与所述第一光轴原点的距离为L2，L2≠0；
或者，所述输入端和所述输出端分离设置于所述第二反射镜的不同位置；
所述输入端与所述第二光轴原点的距离为L1，L1≠0；
所述输出端与所述第二光轴原点的距离为L2，L2≠0。
在一个实施例中，L1和L2趋近于0。
在一个实施例中，所述输入端为准直激光器，所述输出端为光探测器。
在一个实施例中，所述输入端和所述输出端设置于所述第一反射镜的相同位置；
所述输入端和所述输出端与所述第一光轴原点的距离为L3，L3≠0；
或者，所述输入端和所述输出端设置于所述第二反射镜的相同位置；
所述输入端和所述输出端与所述第二光轴原点的距离为L3，L3≠0。
在一个实施例中，L3趋近于0。
在一个实施例中，所述输入端和所述输出端为双尾光纤准直器，所述双尾光纤准直器包括用于输入光线的输入光纤、用于输出光线的输出光纤和一个准直透镜。
本申请实施例第二方面提供一种紧凑型传感器件，包括：
一个第一反射镜，所述第一反射镜为凹面反射镜且具有焦距f1；
一个第二反射镜，具有焦距f2，所述第二反射镜的反射面设置于所述第一反射镜的反射面的对侧，当所述第二反射镜为凹面反射镜时，所述第二反射镜的焦平面平行于所述第一反射镜的焦平面；当所述第二反射镜为平面反射镜时，所述第二反射镜的反射面平行于所述第一反射镜的焦平面且f2=0；
一个第一平面折叠反射镜，所述第一平面折叠反射镜的反射面与所述第一反射镜的反射面相对设置，当所述第二反射镜为凹面反射镜时，所述第一平面折叠反射镜的反射面与所述第二反射镜的焦平面之间的夹角为θ1；当所述第二反射镜为平面反射镜时，所述第一平面折叠反射镜的反射面与所述第二反射镜的反射面之间的夹角为θ1，θ1≠0；
一个第二平面折叠反射镜，所述第二平面折叠反射镜的反射面与所述第二反射镜的反射面相对设置且平行于所述第一平面折叠反射镜的反射面；
一个输入端，用于输入光线；
一个输出端，用于输出光线；
其中，所述第一反射镜、所述第二反射镜、所述第一平面折叠反射镜和所述第二平面折叠反射镜组成一个反射腔体，所述输入端输入的光线在所述反射腔体内多次反射后从所述输出端输出，所述光线在所述第一反射镜的反射面形成第一椭圆轨迹、在所述第一平面折叠反射镜的反射面形成n个第二椭圆轨迹、在所述第二平面折叠反射镜的反射面形成n个第三椭圆轨迹、在所述第二反射镜的反射面形成第四椭圆轨迹，n≥1且为整数，所述光线的路径为锯齿形且所述锯齿型路径的总路径距离为f1+f2±Δf，Δf≠0。
在一个实施例中，所述输入端设置于所述第一反射镜或所述第二反射镜；
所述输出端设置于所述第一反射镜或所述第二反射镜。
在一个实施例中，所述输入端和所述输出端分离设置于所述第一反射镜的不同位置；
所述输入端与所述第一椭圆轨迹的中心的距离为L1，L1≠0；
所述输出端与所述第一椭圆轨迹的中心的距离为L2，L2≠0；
或者，所述输入端和所述输出端分离设置于所述第二反射镜的不同位置；
所述输入端与所述第四椭圆轨迹的中心的距离为L1，L1≠0；
所述输出端与所述第四椭圆轨迹的中心的距离为L2，L2≠0。
在一个实施例中，L1和L2趋近于0。
在一个实施例中，所述输入端为准直激光器，所述输出端为光探测器。
在一个实施例中，所述输入端和所述输出端设置于所述第一反射镜的相同位置；
所述输入端和所述输出端与所述第一椭圆轨迹的中心的距离为L3，L3≠0；
或者，所述输入端和所述输出端设置于所述第二反射镜的相同位置；
所述输入端和所述输出端与所述第四椭圆轨迹的中心的距离为L3，L3≠0。
在一个实施例中，L3趋近于0。
在一个实施例中，所述输入端和所述输出端为双尾光纤准直器，所述双尾光纤准直器包括用于输入光线的输入光纤、用于输出光线的输出光纤和一个准直透镜。
 有益效果
本申请实施例提供的紧凑型传感器件，使得光线在各反射镜的反射面上的轨迹为椭圆轨迹，缩小了反射腔体的体积，光程体积比高；通过采用一个凹面反射镜和一个平面反射镜或两个凹面反射镜构成两镜系统，具有系统结构简单，成本低，装配容易的优点，当两个反射镜之间的相对位置和角度由于温度、振动、封装机械应力变化等因素产生小量变化时，输出光线的光斑位置和角度变化很小，系统可靠性和稳定性高；通过引入两个平面折叠反射镜，可以增加光线的反射次数，从而增加光程。
 附图说明
为了更清楚地说明本申请实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是现有技术中赫里奥特室的原理图；
图2是现有技术中赫里奥特室的反射点光斑轨迹图；
图3是现有技术中怀特室的结构原理图；
图4是现有技术中怀特室的光束反射点光斑轨迹图；
图5和图6是本申请实施例一提供的紧凑型传感器件的第一种原理图；
图7是本申请实施例一提供的紧凑型传感器件的第二种原理图；
图8是本申请实施例一提供的紧凑型传感器件的第三种原理图；
图9是本申请实施例一提供的紧凑型传感器件的第四种原理图；
图10是本申请实施例一提供的紧凑型传感器件的第五种原理图；
图11是本申请实施例一提供的紧凑型传感器件的第六种原理图；
图12是本申请实施例二提供的紧凑型传感器件的第一种原理图；
图13是本申请实施例二提供的紧凑型传感器件的第二种原理图；
图14是本申请实施例二提供的紧凑型传感器件的第三种原理图。
 本发明的实施方式
为了使本技术领域的人员更好地理解本申请，下面将结合本申请实施例中的附图，对本申请实施例中的技术方案进行清楚地描述，显然，所描述的实施例是本申请一部分的实施例，而不是全部的实施例。基于本申请中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都应当属于本申请保护的范围。
本申请的说明书和权利要求书及上述附图中的术语“包括”以及它们任何变形，意图在于覆盖不排他的包含。此外，术语“第一”和“第二”等是用于区别不同对象，而非用于描述特定顺序。
实施例一
如图5~图11任一附图所示，本申请的一个实施例提供一种紧凑型传感器件，包括：
一个第一反射镜501，所述第一反射镜501为凹面反射镜且具有焦距f1；
一个第二反射镜502，具有焦距f2，当所述第二反射镜502为凹面反射镜时，所述第二反射镜502的焦平面平行于所述第一反射镜501的焦平面、与所述第一反射镜501的反射面相对设置且距离为f1+f2±Δf，Δf≠0；当所述第二反射镜502为平面反射镜时，所述第二反射镜502的反射面平行于所述第一反射镜501的焦平面、与所述第一反射镜501的反射面相对设置且距离为f1±Δf，Δf≠0，f2=0；
一个输入端503，用于输入光线；
一个输出端504，用于输出光线；
其中，所述第一反射镜501和所述第二反射镜502组成一个反射腔体，所述反射腔体具有一个主光轴，所述主光轴与所述第一反射镜501的反射面的交点为第一光轴原点，所述主光轴与所述第二反射镜502的交点为第二光轴原点，所述输入端503输入的光线在所述反射腔体内多次反射后从所述输出端504输出，所述光线在所述第一反射镜501的反射面形成以所述第一光轴原点为中心的第一椭圆轨迹、在所述第二反射镜502的反射面形成以所述第二光轴原点为中心的第二椭圆轨迹。
在应用中，凹面反射镜可以根据实际需要设置为圆柱体、矩形体等规则形状，具体可以为矩形体。平面反射镜可以为平板型反射镜。第二反射镜为凹面反射镜时，第二反射镜的焦平面平行于第一反射镜的焦平面且与第一反射镜的反射面相对设置，第二反射镜的焦平面与第一反射镜的反射面之间的距离的设计值为f1+f2±Δf且Δf≠0，具体地，Δf可以取值为10%（f1+f2），也即第二反射镜的焦平面与第一反射镜的反射面之间的距离的取值范围为90%（f1+f2）~110%（f1+f2）；第二反射镜为平面反射镜时，第二反射镜的反射面平行于第一反射镜的焦平面且与第一反射镜的反射面相对设置，第二反射镜的反射面与第一反射镜的反射面之间的距离的设计值为f1±Δf且Δf≠0，f2=0，具体地，Δf可以取值为10%f1，也即第二反射镜的反射面与第一反射镜的反射面之间的距离的取值范围为90%f1~110%f1。
在一个实施例中，所述输入端设置于所述第一反射镜或所述第二反射镜；
所述输出端设置于所述第一反射镜或所述第二反射镜。
在应用中，输入端和输出端的相对位置关系包括以下六种情况：
1）输入端和输出端都设置于第一反射镜且二者分离设置于不同位置；
2）输入端和输出端都设置于第一反射镜且二者共同设置于相同位置；
3）输入端和输出端都设置于第二反射镜且二者分离设置于不同位置；
4）输入端和输出端都设置于第二反射镜且二者共同设置于相同位置；
5）输入端设置于第一反射镜、输出端设置于第二反射镜；
6）输入端设置于第二反射镜、输出端设置于第一反射镜。
在应用中，当输入端和输出端设置于不同位置时，输入端可以是在第一反射镜或第二反射镜上开设的通孔，也可以是嵌入式设置在第一反射镜或第二反射镜上开设的通孔中的准直激光器；输出端可以是在第一反射镜或第二反射镜上开设的通孔，也可以是嵌入式设置于第一反射镜或第二反射镜上开设的通孔中的光探测器。当输入端和输出端设置于相同位置时，输入端和输出端可以是在第一反射镜或第二反射镜上开设的通孔，也可以是嵌入式设置于第一反射镜或第二反射镜上开设的通孔中的双尾光纤准直器，双尾光纤准直器包括用于输入光线的输入光纤、用于输出光线的输出光纤和一个准直透镜。
图5和图6示例性的示出了输入端503和输出端504共同设置于第一反射镜501的相同位置，并且输入端503和输出端504是在第一反射镜501上开设的通孔时，紧凑型传感器件的原理图。
图7示例性的示出了输入端503和输出端504分离设置于第一反射镜501的不同位置，并且输入端503是在第一反射镜501上开设的通孔，输出端504是在第一反射镜501上开设的通孔时，紧凑型传感器件的原理图。
图8示例性的示出了第二反射镜502为平面反射镜时，输入端503和输出端504共同设置于第一反射镜501的相同位置，并且输入端503和输出端504是嵌入式设置于第一反射镜501上开设的通孔中的双尾光纤准直器时，紧凑型传感器件的原理图。
图9示例性的示出第二反射镜502为平面反射镜时，输入端503和输出端504分离设置于第一反射镜501的不同位置，并且输入端503是嵌入式设置在第一反射镜501上开设的通孔中的准直激光器，输出端504是嵌入式设置于第一反射镜501上开设的通孔中的光探测器时，紧凑型传感器件的原理图。
在一个实施例中，所述输入端和所述输出端分离设置于所述第一反射镜的不同位置；
所述输入端与所述第一光轴原点的距离为L1，L1≠0；
所述输出端与所述第一光轴原点的距离为L2，L2≠0；
或者，所述输入端和所述输出端分离设置于所述第二反射镜的不同位置；
所述输入端与所述第二光轴原点的距离为L1，L1≠0；
所述输出端与所述第二光轴原点的距离为L2，L2≠0。
在一个实施例中，L1和L2趋近于0。
在应用中，输入端和输出端都设置于第一反射镜且二者分离设置于不同位置时，输入端和输出端都优选靠近第一光轴原点的位置，输入端和输出端距离第一光轴原点越近，第一椭圆轨迹的长轴和短轴的比值越大，第一椭圆轨迹的短轴越接近第一光轴原点，对应的，第二椭圆轨迹的长轴和短轴的比值也越大，第二椭圆轨迹的短轴也越接近第二光轴原点，紧凑型传感器件的稳定性越好，具体的，第一椭圆轨迹的长轴和短轴的比值≥1.5。输入端和输出端都设置于第二反射镜且二者分离设置于不同位置时，输入端和输出端都优选靠近第二光轴原点的位置，输入端和输出端距离第二光轴原点越近，第二椭圆轨迹的长轴和短轴的比值越大，第二椭圆轨迹的短轴越接近第二光轴原点，对应的，第一椭圆轨迹的长轴和短轴的比值也越大，第一椭圆轨迹的短轴也越接近第一光轴原点，紧凑型传感器件的稳定性越好，具体的，第二椭圆轨迹的长轴和短轴的比值≥1.5。第一椭圆轨迹和第二椭圆轨迹的长轴和短轴的比值大，不仅增加了紧凑型传感器件的稳定性，还大大缩小了反射腔体的体积，提高了紧凑型传感器件的光程体积比。
在一个实施例中，所述输入端和所述输出端设置于所述第一反射镜的相同位置；
所述输入端和所述输出端与所述第一光轴原点的距离为L3，L3≠0；
或者，所述输入端和所述输出端设置于所述第二反射镜的相同位置；
所述输入端和所述输出端与所述第二光轴原点的距离为L3，L3≠0。
在一个实施例中，L3趋近于0。
在应用中，输入端和输出端都设置于第一反射镜且二者共同设置于相同位置时，输入端和输出端优选靠近第一光轴原点的位置，输入端和输出端距离第一光轴原点越近，第一椭圆轨迹的长轴和短轴的比值越大，第一椭圆轨迹的短轴越接近第一光轴原点，对应的，第二椭圆轨迹的长轴和短轴的比值也越大，第二椭圆轨迹的短轴也越接近第二光轴原点，紧凑型传感器件的稳定性越好，具体的，第一椭圆轨迹的长轴和短轴的比值≥1.5。输入端和输出端都设置于第二反射镜且二者共同设置于相同位置时，输入端和输出端都优选靠近第二光轴原点的位置，输入端和输出端距离第二光轴原点越近，第二椭圆轨迹的长轴和短轴的比值越大，第二椭圆轨迹的短轴越接近第二光轴原点，对应的，第一椭圆轨迹的长轴和短轴的比值也越大，第一椭圆轨迹的短轴也越接近第一光轴原点，紧凑型传感器件的稳定性越好，具体的，第二椭圆轨迹的长轴和短轴的比值≥1.5。第一椭圆轨迹和第二椭圆轨迹的长轴和短轴的比值大，不仅增加了紧凑型传感器件的稳定性，还大大缩小了反射腔体的体积，提高了紧凑型传感器件的光程体积比。
在应用中，当紧凑型传感器件受温度、振动、封装机械应力变化等因素的影响，使得第一反射镜和第二反射镜之间的位置和角度产生小量偏移时，输入端输入的光线在反射腔体内多次反射时的路径会有小量变化，但是光线从输出端输出的位置是不变的，也即输出端输出的光线对第一反射镜和第二反射镜之间的位置和角度偏差不敏感，紧凑型传感器件具有较高的稳定性。
图10在图6的基础上示例性的示出了第一反射镜501和第二反射镜502之间的位置和角度未产生偏移以及产生小量偏移时的光线路径51和52；其中，光线路径51和光线路径52并不完全重合，但是二者在输出端504的输出位置是重合的。
图11在图7的基础上示例性的示出了第一反射镜501和第二反射镜502之间的位置和角度未产生偏移以及产生小量偏移时的光线路径53和54；其中，光线路径53和光线路径54并不完全重合，但是二者在输出端504的输出位置是重合的。
实施例一中提供的紧凑型传感器件，使得光线在各反射镜的反射面上的轨迹为椭圆轨迹，缩小了反射腔体的体积，光程体积比高；通过采用一个凹面反射镜和一个平面反射镜构成的两镜系统或两个凹面反射镜构成两镜系统，具有系统结构简单，成本低，装配容易的优点，当两个反射镜之间的相对位置和角度由于温度、振动、封装机械应力变化等因素产生小量变化时，输出光线的光斑位置和角度变化很小，系统可靠性和稳定性高。
实施例二
如图12~图14任一附图所示，本申请的另一个实施例提供一种紧凑型传感器件，包括：
一个第一反射镜601，所述第一反射镜601为凹面反射镜且具有焦距f1；
一个第二反射镜602，具有焦距f2，所述第二反射镜602的反射面设置于所述第一反射镜601的反射面的对侧，当所述第二反射镜602为凹面反射镜时，所述第二反射镜602的焦平面平行于所述第一反射镜601的焦平面；当所述第二反射镜602为平面反射镜时，所述第二反射镜602的反射面平行于所述第一反射镜601的焦平面且f2=0；
一个第一平面折叠反射镜603，所述第一平面折叠反射镜的反射面与所述第一反射镜的反射面相对设置，当所述第二反射镜602为凹面反射镜时，所述第一平面折叠反射镜603的反射面与所述第二反射镜602的焦平面之间的夹角为θ1；当所述第二反射镜602为平面反射镜时，所述第一平面折叠反射镜603的反射面与所述第二反射镜602的反射面之间的夹角为θ1，θ1≠0；
一个第二平面折叠反射镜604，所述第二平面折叠反射镜的反射面与所述第二反射镜的反射面相对设置且平行于所述第一平面折叠反射镜的反射面；
一个输入端605，用于输入光线；
一个输出端606，用于输出光线；
其中，所述第一反射镜601、所述第二反射镜602、所述第一平面折叠反射镜603和所述第二平面折叠反射镜604组成一个反射腔体，所述输入端605输入的光线在所述反射腔体内多次反射后所述输出端606输出，所述光线在所述第一反射镜601的反射面形成第一椭圆轨迹、在所述第一平面折叠反射镜603的反射面形成n个第二椭圆轨迹、在所述第二平面折叠反射镜604的反射面形成n个第三椭圆轨迹、在所述第二反射镜602的反射面形成第四椭圆轨迹，n≥1且为整数，所述光线的路径为锯齿形且所述光线的总光程为f1+f2±Δf，Δf≠0。
在应用中，凹面反射镜可以根据实际需要设置为圆柱体、矩形体等规则形状，具体可以为矩形体。平面反射镜可以为平板型反射镜。第一平面折叠反射镜和第二平面折叠反射镜可以为尺寸完全相同的平板型反射镜。第一平面折叠反射镜的反射面平行于第二平面折叠反射镜的反射面，并且当第二反射镜为凹面反射镜时，第一平面折叠反射镜的反射面与第二反射镜的焦平面之间存在大小为θ1的夹角；当第二反射镜为平面反射镜时，第一平面折叠反射镜的反射面与第二反射镜的反射面之间存在大小为θ1的夹角，θ1可以根据实际需要设置为不等于0的任意较小值，例如，3°~15°之间的任意值。
在应用中，光线在第一平面折叠反射镜的反射面形成的第二椭圆轨迹和在第二平面折叠反射镜的反射面形成的第三椭圆轨迹的数量相同为n，n的大小与第一平面折叠反射镜和第二平面折叠反射镜在椭圆轨迹的短轴方向上的宽度正相关。可以通过拓展第一平面折叠反射镜和第二平面折叠反射镜在椭圆轨迹的短轴方向上的宽度，来增加光线在第一平面折叠反射镜的反射面和第二平面折叠反射镜的反射面的之间的反射次数以及光线在第一平面折叠反射镜的反射面形成的第二椭圆轨迹和在第二平面折叠反射镜的反射面形成的第三椭圆轨迹的数量，进而增加光线在反射腔体中传播的总光程。光线在反射腔体中传播的路径为锯齿形且锯齿型路径的总路径距离的设计值为f1+f2±Δf且Δf≠0，具体地，Δf可以取值为10%（f1+f2），也即总路径距离的取值范围为90%（f1+f2）~110%（f1+f2）。应理解的是，总路径距离并不等于总光程，当输入端位于第一反射镜时，总路径距离等于光线从输入端输入到其第一次达到第二反射镜时的光程；当输入端位于第二反射镜时，总路径距离等于光线从输入端输入到其第一次达到第一反射镜时的光程。
在一个实施例中，所述输入端设置于所述第一反射镜或所述第二反射镜；
所述输出端设置于所述第一反射镜或所述第二反射镜。
在应用中，输入端和输出端的相对位置关系包括以下六种情况：
1）输入端和输出端都设置于第一反射镜且二者分离设置于不同位置；
2）输入端和输出端都设置于第一反射镜且二者共同设置于相同位置；
3）输入端和输出端都设置于第二反射镜且二者分离设置于不同位置；
4）输入端和输出端都设置于第二反射镜且二者共同设置于相同位置；
5）输入端设置于第一反射镜、输出端设置于第二反射镜；
6）输入端设置于第二反射镜、输出端设置于第一反射镜。
在应用中，当输入端和输出端设置于不同位置时，输入端可以是在第一反射镜或第二反射镜上开设的通孔，也可以是嵌入式设置在第一反射镜或第二反射镜上开设的通孔中的准直激光器；输出端可以是在第一反射镜或第二反射镜上开设的通孔，也可以是嵌入式设置于第一反射镜或第二反射镜上开设的通孔中的光探测器。当输入端和输出端设置于相同位置时，输入端和输出端可以是在第一反射镜或第二反射镜上开设的通孔，也可以是嵌入式设置于第一反射镜或第二反射镜上开设的通孔中的双尾光纤准直器，双尾光纤准直器包括用于输入光线的输入光纤、用于输出光线的输出光纤和一个准直透镜。
图12示例性的示出了输入端605和输出端606分离设置于第一反射镜601的不同位置，输入端605是在第一反射镜601上开设的通孔，输出端606是在第一反射镜601上开设的通孔，并且第三椭圆轨迹和第四椭圆轨迹的数量为1，光线的路径为Z形时，紧凑型传感器件的原理图。
图13示例性的示出了第二反射镜602为平面反射镜时，输入端605和输出端606共同设置于第一反射镜601的相同位置，输入端605和输出端606是在第一反射镜601上开设的通孔中的双尾光纤准直器，并且第三椭圆轨迹和第四椭圆轨迹的数量为1，光线的路径为Z形时，紧凑型传感器件的原理图。
图14示例性的示出了第二反射镜602为平面反射镜时，输入端605和输出端606共同设置于第一反射镜601的相同位置，输入端605和输出端606是在第一反射镜601上开设的通孔中的双尾光纤准直器，并且第三椭圆轨迹和第四椭圆轨迹的数量为2，光线的路径为锯齿形时，紧凑型传感器件的原理图。
在一个实施例中，所述输入端和所述输出端分离设置于所述第一反射镜的不同位置；
所述输入端与所述第一椭圆轨迹的中心的距离为L1，L1≠0；
所述输出端与所述第一椭圆轨迹的中心的距离为L2，L2≠0；
或者，所述输入端和所述输出端分离设置于所述第二反射镜的不同位置；
所述输入端与所述第四椭圆轨迹的中心的距离为L1，L1≠0；
所述输出端与所述第四椭圆轨迹的中心的距离为L2，L2≠0。
在一个实施例中，L1和L2趋近于0。
在应用中，输入端和输出端都设置于第一反射镜且二者分离设置于不同位置时，输入端和输出端都优选靠近第一椭圆轨迹的中心位置，输入端和输出端距离第一椭圆轨迹的中心越近，第一椭圆轨迹的长轴和短轴的比值越大，第一椭圆轨迹的短轴越接近第一椭圆轨迹的中心，对应的，第二椭圆轨迹~第四椭圆轨迹的长轴和短轴的比值也越大，第二椭圆轨迹~第四椭圆轨迹的短轴也越接近各自的中心，紧凑型传感器件的稳定性越好，具体的，第一椭圆轨迹的长轴和短轴的比值≥1.5。输入端和输出端都设置于第二反射镜且二者分离设置于不同位置时，输入端和输出端都优选靠近第四椭圆轨迹的中心位置，输入端和输出端距离第四椭圆轨迹的中心越近，第四椭圆轨迹的长轴和短轴的比值越大，第四椭圆轨迹的短轴越接近第四椭圆轨迹的中心，对应的，第一椭圆轨迹~第三椭圆轨迹的长轴和短轴的比值也越大，第一椭圆轨迹~第三椭圆轨迹的短轴也越接近第一光轴原点，紧凑型传感器件的稳定性越好，具体的，第四椭圆轨迹的长轴和短轴的比值≥1.5。第一椭圆轨迹和第四椭圆轨迹的长轴和短轴的比值大，不仅增加了紧凑型传感器件的稳定性，还大大缩小了反射腔体的体积，提高了紧凑型传感器件的光程体积比。
在一个实施例中，所述输入端和所述输出端设置于所述第一反射镜的相同位置；
所述输入端和所述输出端与所述第一椭圆轨迹的中心的距离为L3，L3≠0；
或者，所述输入端和所述输出端设置于所述第二反射镜的相同位置；
所述输入端和所述输出端与所述第四椭圆轨迹的中心的距离为L3，L3≠0。
在一个实施例中，L3趋近于0。
在应用中，输入端和输出端都设置于第一反射镜且二者共同设置于相同位置时，输入端和输出端优选靠近第一椭圆轨迹的中心位置，输入端和输出端距离第一椭圆轨迹的中心越近，第一椭圆轨迹的长轴和短轴的比值越大，第一椭圆轨迹的短轴越接近第一椭圆轨迹的中心，对应的，第二椭圆轨迹~第四椭圆轨迹的长轴和短轴的比值也越大，第二椭圆轨迹~第四椭圆轨迹的短轴也越接近各自的中心，紧凑型传感器件的稳定性越好，具体的，第一椭圆轨迹的长轴和短轴的比值≥1.5。输入端和输出端都设置于第二反射镜且二者共同设置于相同位置时，输入端和输出端都优选靠近第四椭圆轨迹的中心位置，输入端和输出端距离第四椭圆轨迹的中心越近，第四椭圆轨迹的长轴和短轴的比值越大，第四椭圆轨迹的短轴越接近第四椭圆轨迹的中心，对应的，第一椭圆轨迹~第三椭圆轨迹的长轴和短轴的比值也越大，第一椭圆轨迹~第三椭圆轨迹的短轴也越接近第一光轴原点，紧凑型传感器件的稳定性越好，具体的，第四椭圆轨迹的长轴和短轴的比值≥1.5。第一椭圆轨迹和第四椭圆轨迹的长轴和短轴的比值大，不仅增加了紧凑型传感器件的稳定性，还大大缩小了反射腔体的体积，提高了紧凑型传感器件的光程体积比。
在应用中，当紧凑型传感器件受温度、振动、封装机械应力变化等因素的影响，使得第一反射镜、第二反射镜、第一平面折叠反射镜和第二平面折叠反射镜之间的位置和角度产生小量偏移时，输入端输入的光线在反射腔体内多次反射时的路径会有小量变化，但是光线从输出端输出的位置是不变的，也即输出端输出的光线对第一反射镜、第二反射镜、第一平面折叠反射镜和第二平面折叠反射镜之间的位置和角度偏差不敏感，紧凑型传感器件具有较高的稳定性。
实施例二中提供的紧凑型传感器件，使得光线在各反射镜的反射面上的轨迹为椭圆轨迹，缩小了反射腔体的体积，光程体积比高；通过采用凹面反射镜、平面反射镜、第一平面折叠反射镜和第二平面折叠反射镜构成四镜系统，或者，采用两个凹面反射镜、第一平面折叠反射镜和第二平面折叠反射镜构成四镜系统，具有系统结构简单，成本低，装配容易的优点，并且当四个反射镜之间的相对位置和角度由于温度、振动、封装机械应力变化等因素产生小量变化时，输出光线的光斑位置和角度变化很小，系统可靠性和稳定性高，并且通过引入两个平面折叠反射镜，可以增加光线的反射次数，从而增加光程。
以上所述仅为本申请的较佳实施例而已，并不用以限制本申请，凡在本申请的精神和原则之内所作的任何修改、等同替换和改进等，应包含在本申请的保护范围之内。

Claims (16)

  1. 一种紧凑型传感器件，其特征在于，包括：
    一个第一反射镜，所述第一反射镜为凹面反射镜且具有焦距f1；
    一个第二反射镜，具有焦距f2，当所述第二反射镜为凹面反射镜时，所述第二反射镜的焦平面平行于所述第一反射镜的焦平面、与所述第一反射镜的反射面相对设置且距离为f1+f2±Δf，Δf≠0；当所述第二反射镜为平面反射镜时，所述第二反射镜的反射面平行于所述第一反射镜的焦平面、与所述凹面反射镜的反射面相对设置且距离为f1±Δf，Δf≠0，f2=0；
    一个输入端，用于输入光线；
    一个输出端，用于输出光线；
    其中，所述第一反射镜和所述第二反射镜组成一个反射腔体，所述反射腔体具有一个主光轴，所述主光轴与所述第一反射镜的反射面的交点为第一光轴原点，所述主光轴与所述第二反射镜的交点为第二光轴原点，所述输入端输入的光线在所述反射腔体内多次反射后从所述输出端输出，所述光线在所述第一反射镜的反射面形成以所述第一光轴原点为中心的第一椭圆轨迹、在所述第二反射镜的反射面形成以所述第二光轴原点为中心的第二椭圆轨迹。
  2. 如权利要求1所述的紧凑型传感器件，其特征在于，所述输入端设置于所述第一反射镜或所述第二反射镜；
    所述输出端设置于所述第一反射镜或所述第二反射镜。
  3. 如权利要求2所述的紧凑型传感器件，其特征在于，所述输入端和所述输出端分离设置于所述第一反射镜的不同位置；
    所述输入端与所述第一光轴原点的距离为L1，L1≠0；
    所述输出端与所述第一光轴原点的距离为L2，L2≠0；
    或者，所述输入端和所述输出端分离设置于所述第二反射镜的不同位置；
    所述输入端与所述第二光轴原点的距离为L1，L1≠0；
    所述输出端与所述第二光轴原点的距离为L2，L2≠0。
  4. 如权利要求3所述的紧凑型传感器件，其特征在于，L1和L2趋近于0。
  5. 如权利要求3或4所述的紧凑型传感器件，其特征在于，所述输入端为准直激光器，所述输出端为光探测器。
  6. 如权利要求2所述的紧凑型传感器件，其特征在于，所述输入端和所述输出端设置于所述第一反射镜的相同位置；
    所述输入端和所述输出端与所述第一光轴原点的距离为L3，L3≠0；
    或者，所述输入端和所述输出端设置于所述第二反射镜的相同位置；
    所述输入端和所述输出端与所述第二光轴原点的距离为L3，L3≠0。
  7. 如权利要求6所述的紧凑型传感器件，其特征在于，L3趋近于0。
  8. 如权利要求6或7所述的紧凑型传感器件，其特征在于，所述输入端和所述输出端为双尾光纤准直器，所述双尾光纤准直器包括用于输入光线的输入光纤、用于输出光线的输出光纤和一个准直透镜。
  9. 一种紧凑型传感器件，其特征在于，包括：
    一个第一反射镜，所述第一反射镜为凹面反射镜且具有焦距f1；
    一个第二反射镜，具有焦距f2，所述第二反射镜的反射面设置于所述第一反射镜的反射面的对侧，当所述第二反射镜为凹面反射镜时，所述第二反射镜的焦平面平行于所述第一反射镜的焦平面；当所述第二反射镜为平面反射镜时，所述第二反射镜的反射面平行于所述第一反射镜的焦平面且f2=0；
    一个第一平面折叠反射镜，所述第一平面折叠反射镜的反射面与所述第一反射镜的反射面相对设置，当所述第二反射镜为凹面反射镜时，所述第一平面折叠反射镜的反射面与所述第二反射镜的焦平面之间的夹角为θ1；当所述第二反射镜为平面反射镜时，所述第一平面折叠反射镜的反射面与所述第二反射镜的反射面之间的夹角为θ1，θ1≠0；
    一个第二平面折叠反射镜，所述第二平面折叠反射镜的反射面与所述第二反射镜的反射面相对设置且平行于所述第一平面折叠反射镜的反射面；
    一个输入端，用于输入光线；
    一个输出端，用于输出光线；
    其中，所述第一反射镜、所述第二反射镜、所述第一平面折叠反射镜和所述第二平面折叠反射镜组成一个反射腔体，所述输入端输入的光线在所述反射腔体内多次反射后从所述输出端输出，所述光线在所述第一反射镜的反射面形成第一椭圆轨迹、在所述第一平面折叠反射镜的反射面形成n个第二椭圆轨迹、在所述第二平面折叠反射镜的反射面形成n个第三椭圆轨迹、在所述第二反射镜的反射面形成第四椭圆轨迹，n≥1且为整数，所述光线的路径为锯齿形且所述锯齿型路径的总路径距离为f1+f2±Δf，Δf≠0。
  10. 如权利要求9所述的紧凑型传感器件，其特征在于，所述输入端设置于所述第一反射镜或所述第二反射镜；
    所述输出端设置于所述第一反射镜或所述第二反射镜。
  11. 如权利要求10所述的紧凑型传感器件，其特征在于，所述输入端和所述输出端分离设置于所述第一反射镜的不同位置；
    所述输入端与所述第一椭圆轨迹的中心的距离为L1，L1≠0；
    所述输出端与所述第一椭圆轨迹的中心的距离为L2，L2≠0；
    或者，所述输入端和所述输出端分离设置于所述第二反射镜的不同位置；
    所述输入端与所述第四椭圆轨迹的中心的距离为L1，L1≠0；
    所述输出端与所述第四椭圆轨迹的中心的距离为L2，L2≠0。
  12. 如权利要求11所述的紧凑型传感器件，其特征在于，L1和L2趋近于0。
  13. 如权利要求11或12所述的紧凑型传感器件，其特征在于，所述输入端为准直激光器，所述输出端为光探测器。
  14. 如权利要求10所述的紧凑型传感器件，其特征在于，所述输入端和所述输出端设置于所述第一反射镜的相同位置；
    所述输入端和所述输出端与所述第一椭圆轨迹的中心的距离为L3，L3≠0；
    或者，所述输入端和所述输出端设置于所述第二反射镜的相同位置；
    所述输入端和所述输出端与所述第四椭圆轨迹的中心的距离为L3，L3≠0。
  15. 如权利要求14所述的紧凑型传感器件，其特征在于，L3趋近于0。
  16. 如权利要求14或15所述的紧凑型传感器件，其特征在于，所述输入端和所述输出端为双尾光纤准直器，所述双尾光纤准直器包括用于输入光线的输入光纤、用于输出光线的输出光纤和一个准直透镜。
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