WO2021109159A1 - 采用激光增材制备电子显微镜光阑的方法 - Google Patents

采用激光增材制备电子显微镜光阑的方法 Download PDF

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WO2021109159A1
WO2021109159A1 PCT/CN2019/123881 CN2019123881W WO2021109159A1 WO 2021109159 A1 WO2021109159 A1 WO 2021109159A1 CN 2019123881 W CN2019123881 W CN 2019123881W WO 2021109159 A1 WO2021109159 A1 WO 2021109159A1
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inner hole
electron microscope
laser additive
copper powder
diaphragm
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PCT/CN2019/123881
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English (en)
French (fr)
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姚莉
顾斌宾
朱玉宝
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苏州优波光电科技有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20—Direct sintering or melting
    • B22F10/25—Direct deposition of metal particles, e.g. direct metal deposition [DMD] or laser engineered net shaping [LENS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/30—Platforms or substrates
    • B22F12/37—Rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y70/00—Materials specially adapted for additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30—Process control
    • B22F10/36—Process control of energy beam parameters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/60—Treatment of workpieces or articles after build-up
    • B22F10/66—Treatment of workpieces or articles after build-up by mechanical means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Definitions

  • the invention relates to the field of laser additive manufacturing, in particular to a method for preparing an electron microscope diaphragm by using laser additive.
  • the diaphragm is an important part of the scanning electron microscope.
  • the diaphragm can block the paraxial electrons and reduce the influence of lens aberrations such as spherical aberration and chromatic aberration on the beam spot radius of the electron beam.
  • lens aberrations such as spherical aberration and chromatic aberration on the beam spot radius of the electron beam.
  • the beam current density of the electron beam can be effectively controlled, and it can be switched between large beam current analysis type (such as X-ray energy spectrum analysis) and low current high-resolution type.
  • the diameter of the circular hole on the diaphragm is usually required to be between 10 microns and 300 microns, and it is required to be a perfect circle.
  • the SEM diaphragm is usually formed by mechanically cutting micro-holes from metal.
  • the entire manufacturing process needs to be formed through the process of film opening, casting or forging, cutting, etc. The process is complicated, the processing is difficult, the material is lost, and the processing accuracy is low. It is difficult to guarantee the quality of the diaphragm, which in turn affects the imaging quality of the scanning electron microscope.
  • a method for preparing an electron microscope diaphragm by using laser additive includes the following steps:
  • the laser additive manufacturing system prints the copper powder along the edge of the inner hole of the platinum sheet toward the center of the inner hole, so that a ring-shaped copper powder layer is formed on the edge of the inner hole until the inner hole is reduced to
  • the aperture of the micro-hole with the preset value is used to obtain the diaphragm of the electron microscope.
  • the above method of using laser additive to prepare the electron microscope diaphragm using the laser additive manufacturing technology to prepare the electron microscope diaphragm, that is, using the laser additive manufacturing system to print copper powder along the edge of the inner hole of the platinum sheet to the center of the inner hole to make the inner hole A ring-shaped copper powder layer is formed on the edge of the hole until the inner hole is reduced to a micro-hole with a predetermined diameter.
  • the preparation process is small and simple, easy to process, less material loss, and the prepared micro-hole precision of the electron microscope diaphragm is high. Effectively ensure the quality of the electron microscope diaphragm, which is beneficial to improve the imaging quality of the scanning electron microscope.
  • a numerical control punching machine is used to process the inner hole of the platinum substrate.
  • the inner hole diameter of the platinum sheet is 1 mm-2 mm.
  • the laser additive manufacturing system is a 3D metal printer.
  • the laser power of the laser additive manufacturing system is 450W-550W
  • the copper powder feeding speed is 5g/min-10g/min
  • the scanning speed is 1mm/s-5mm/s.
  • the pore diameter of the micropores is 10um-30um.
  • the pore size of the micropores is 10um, 30um, 50um, 100um, 200um or 300um.
  • the laser additive manufacturing system prints the copper powder along the edge of the inner hole of the platinum sheet toward the center of the inner hole, so that a ring-shaped copper powder layer is formed on the edge of the inner hole , Until the inner hole is reduced to a micro-hole with a predetermined aperture, and before the step of obtaining an electron microscope diaphragm, the method further includes:
  • the edge of the inner hole of the platinum sheet is polished and polished.
  • the platinum sheet is arranged in a circular shape.
  • the ring-shaped copper powder layer of the electron microscope diaphragm and the platinum sheet are arranged concentrically.
  • Figures 1 to 3 are flow charts of the method for preparing an electron microscope diaphragm by laser additive according to the present invention.
  • the platinum substrate 10 The platinum substrate 10, the platinum sheet 20, the inner hole 21, the micro hole 22, the ring-shaped copper powder layer 30, and the electron microscope diaphragm 40.
  • Fig. 1 to Fig. 3 are a method for preparing an electron microscope diaphragm by laser additive according to an embodiment of the present invention, which includes the following steps:
  • Step S10 please refer to Figure 1 to provide a platinum substrate 10, copper powder and a laser additive manufacturing system
  • the platinum substrate is circular.
  • Step S20 referring to FIG. 2, the platinum substrate 10 is processed with an inner hole 21 to obtain a platinum sheet 20 with an inner hole 21.
  • a CNC punching machine is used to process the inner hole of the platinum substrate, the platinum sheet 20 is circular, the inner hole 21 of the platinum sheet 20 is a round hole, and the diameter of the inner hole 21 of the platinum sheet 20 is 1mm-2mm; In this embodiment, the diameter of the inner hole 21 of the platinum sheet 20 is 1 mm.
  • Step S30 please refer to FIG. 3, the laser additive manufacturing system prints copper powder along the edge of the inner hole 21 of the platinum sheet 20 toward the center of the inner hole 21, so that a ring-shaped copper powder layer 30 is formed on the edge of the inner hole 21 until the inner hole 21 is reduced to
  • the aperture of the micro-hole 22 with the preset value is obtained by the aperture 40 of the electron microscope.
  • the annular copper powder layer 30 of the electron microscope diaphragm 40 and the platinum sheet 20 are arranged concentrically.
  • the pore size of the micropore 22 is 10um-30um; specifically, in this embodiment, the pore diameter of the micropore 22 is 10um, 30um, 50um, 100um, 200um, or 300um.
  • the laser additive manufacturing system is a 3D metal printer.
  • the 3D metal printer includes a spray gun, a scanner, a laser, a controller, and a fixture.
  • the spray gun, scanner, and laser are all located above the fixture.
  • the spray gun is used to contain and spray copper powder, and the laser is used to The laser beam is emitted, the scanner is used to scan the inner hole 21 on the platinum sheet 20, the controller is electrically connected to the laser, spray gun and the scanner, and the controller is used to control the electrical connection of the laser, spray gun and scanner.
  • the fixture is used for positioning Platinum sheet 20.
  • the platinum sheet 20 is fixed on the fixture, the scanner scans the position of the inner hole 21 of the platinum sheet on the fixture, the spray gun sprays copper powder, and the laser emits a laser beam to spray the spray gun.
  • the copper powder melts to a preset position on the edge of the inner hole 21.
  • the fixture drives the platinum plate 20 to rotate horizontally, and the laser moves a preset distance toward the center of the inner hole 21 of the platinum plate 20 after a preset time; understandably, the laser moves toward the edge of the inner hole 21 After melting the copper powder, the jig drives the platinum plate 20 to rotate one circle horizontally, the laser moves to the center of the inner hole 21 of the platinum plate 20 by a preset distance, and continues to melt the copper powder along the edge of the annular copper powder layer on the inner hole 21 to achieve 3D
  • the metal printer can print copper powder along the edge of the inner hole 21 of the platinum sheet 20 to the center of the inner hole 21.
  • the laser power of the laser additive manufacturing system is 450W-550W
  • the copper powder feeding speed is 5g/min-10g/min
  • the scanning speed is 1mm/s-5mm/s; specifically in this embodiment, the laser additive
  • the laser power of the manufacturing system is 500W
  • the copper powder feeding speed is 9g/min
  • the scanning speed is 3mm/s.
  • Step S30 specifically includes the following steps:
  • Step S31 the laser additive manufacturing system prints a concentric circular copper layer of a preset thickness along the edge of the inner hole 21 of the platinum sheet 20 to the center of the inner hole 21, and the thickness of the concentric circular copper layer is less than the thickness of the platinum sheet 20;
  • step S32 step S31 is repeated until the thickness of the ring-shaped copper powder layer 30 is equal to the thickness of the platinum sheet 20, and the opposite sides of the ring-shaped copper powder layer are flush with the opposite sides of the platinum sheet 20, respectively.
  • the thickness of the platinum sheet 20 is 1mm, and the laser additive manufacturing system prints a copper layer of concentric circular rings with a thickness of 50um 20 times along the edge of the inner hole 21 of the platinum sheet 20 to the center of the inner hole 21 to make the ring shape
  • the thickness of the copper powder layer 30 is the same as the thickness of the platinum sheet 20.
  • step S30 it also includes the following steps:
  • the edge of the inner hole 21 of the platinum sheet 20 is polished to improve the edge accuracy of the inner hole 21 and effectively improve the accuracy of printing the ring-shaped copper powder layer 30 to the edge of the inner hole 21.
  • the method of the present invention for preparing an electron microscope diaphragm by using laser additive uses laser additive manufacturing technology to prepare the diaphragm, that is, using a laser additive manufacturing system to print copper powder along the edge of the inner hole of the platinum sheet to the center of the inner hole to make the inner A ring-shaped copper powder layer is formed on the edge of the hole until the inner hole is reduced to a micro-hole with a predetermined diameter.
  • the preparation process is small and simple, easy to process, less material loss, and the prepared micro-hole precision of the electron microscope diaphragm is high. Effectively guarantee the quality of the diaphragm of the electron microscope, which is conducive to improving the imaging quality of the scanning electron microscope.
  • the present invention also provides an electron microscope diaphragm 40 for scanning electron microscopes, the center of the electron microscope diaphragm 40 is provided with a micro hole 22, the electron microscope diaphragm 40 includes a ring-shaped platinum plate 20 and a device
  • the annular copper powder layer 30 is arranged in the platinum sheet 20 and concentric with the platinum sheet 20, and the micro hole 22 is provided in the center of the annular copper powder layer 30.
  • the pore size of the micropore 22 is 10um-30um; specifically, in this embodiment, the pore diameter of the micropore 22 is 10um, 30um, 50um, 100um, 200um, or 300um.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Powder Metallurgy (AREA)

Abstract

一种采用激光增材制备电子显微镜光阑（40）的方法，包括如下步骤：提供铂金基片（10）、铜粉及激光增材制造系统；将铂金基片（10）进行加工内孔（21），得到具有内孔（21）的铂片（20）；激光增材制造系统沿铂片（20）的内孔（21）边缘向内孔（21）中心打印铜粉，以使内孔（21）边缘形成环形铜粉层（30），直至内孔（21）缩小成孔径为预设值的微孔（22），得到电子显微镜光阑（40）。

Description

采用激光增材制备电子显微镜光阑的方法 技术领域
本发明涉及激光增材制造领域，特别是涉及一种采用激光增材制备电子显微镜光阑的方法。
背景技术
光阑是扫描电子显微镜的重要组成部分。利用光阑，可以阻挡旁轴电子，减少球差、色差等透镜像差对电子束生成束斑半径的影响。同时，通过使用不同直径大小的扫描电镜光阑，可以有效的控制电子束的束流密度，在大束流分析型(如X射线能谱分析)以及小电流高分辨率型工作状态下切换。
光阑上的圆孔直径范围通常要求在10微米-300微米之间，且要求为正圆形。在传统工艺中，扫描电镜光阑通常由金属通过机械切割微孔形成，整个制造流程需要经过开膜具、铸造或锻造、切割等过程成型，过程复杂，加工困难，材料损耗，加工精度低，难以保证光阑质量，进而影响扫描电子显微镜的成像质量。
发明内容
基于此，有必要针对目前传统技术的问题，提供一种采用激光增材制备电子显微镜光阑的方法。
一种采用激光增材制备电子显微镜光阑的方法，包括如下步骤：
提供铂金基片、铜粉及激光增材制造系统；
将所述铂金基片进行加工内孔，得到具有所述内孔的铂片；
所述激光增材制造系统沿所述铂片的所述内孔边缘向所述内孔中心打印所述铜粉，以使所述内孔边缘形成环形铜粉层，直至所述内孔缩小成孔径为预设值的微孔，得到电子显微镜光阑。
上述采用激光增材制备电子显微镜光阑的方法，采用激光增材制技术制备电子显微镜光阑，即采用激光增材制造系统向沿铂片的内孔边缘向内孔中心打印铜粉以使内孔边缘形成环形铜粉层，直至内孔缩小成孔径为预设值的微孔，制备工艺流程少且简单，加工容易，材料损耗少，且制备出的电子显微镜光阑的微孔精度高，有效保证电子显微光阑质量，有利于提高扫描电子显微镜的成像质量。
在其中一个实施例中，在将所述铂金基片进行加工内孔，得到具有所述内孔的铂片的步骤中，采用数控冲孔机对所述铂金基片加工内孔。
在其中一个实施例中，所述铂片的所述内孔孔径为1mm-2mm。
在其中一个实施例中，所述激光增材制造系统为3D金属打印机。
在其中一个实施例中，所述激光增材制造系统的激光功率为450W-550W，送铜粉速度为5g/min-10g/min，扫描速度为1mm/s-5mm/s。
在其中一个实施例中，所述微孔孔径为10um-30um。
在其中一个实施例中，所述微孔孔径为10um、30um、50um、100um、200um或300um。
在其中一个实施例中，在所述激光增材制造系统沿所述铂片的所述内孔边缘向所述内孔中心打印所述铜粉，以使所述内孔边缘形成环形铜粉层，直至所述内孔缩小成孔径为预设值的微孔，得到电子显微镜光阑的步骤之前，还包括：
对所述铂片的所述内孔边缘进行打磨抛光处理。
在其中一个实施例中，所述铂片为圆形设置。
在其中一个实施例中，所述电子显微镜光阑的所述环形铜粉层与所述铂片同心设置。
附图说明
图1至图3为本发明的采用激光增材制备电子显微镜光阑的方法的流程图。
附图中各标号的含义为：
铂金基片10，铂片20，内孔21，微孔22，环形铜粉层30，电子显微镜光阑40。
具体实施方式
为了便于理解本发明，下面将对本发明进行更全面的描述。但是，本发明可以以许多不同的形式来实现，并不限于本文所描述的实施例。相反地，提供这些实施例的目的是使对本发明的公开内容的理解更加透彻全面。
除非另有定义，本文所使用的所有的技术和科学术语与属于本发明的技术领域的技术人员通常理解的含义相同。本文中在本发明的说明书中所使用的术语只是为了描述具体的实施例的目的，不是旨在于限制本发明。
需要说明的是，当元件被称为“固定于”另一个元件，它可以直接在另一个元件上或者也可以存在居中的元件。当一个元件被认为是“连接”另一个元件，它可以是直接连接到另一个元件或者可能同时存在居中元件。相反，当元件被称作“直接在”另一元件“上”时，不存在中间元件。本文所使用的术语“垂直的”、“水平的”、“左”、“右”以及类似的表述只是为了说明的目的。
请参考图1至图3，为本发明一实施方式的采用激光增材制备电子显微镜光 阑的方法，包括如下步骤：
步骤S10，请参考图1，提供铂金基片10、铜粉及激光增材制造系统；
在本实施例中，铂金基片为圆形。
步骤S20，请参考图2，将铂金基片10进行加工内孔21，得到具有内孔21的铂片20。
具体地，采用数控冲孔机对铂金基片加工内孔，铂片20为圆形设置，铂片20的内孔21为圆孔，且铂片20的内孔21孔径为1mm-2mm；具体到本实施例中，铂片20的内孔21孔径为1mm。
步骤S30，请参考图3，激光增材制造系统沿铂片20的内孔21边缘向内孔21中心打印铜粉，以使内孔21边缘形成环形铜粉层30，直至内孔21缩小成孔径为预设值的微孔22，得到电子显微镜光阑40。
电子显微镜光阑40的环形铜粉层30与铂片20同心设置。
微孔22孔径为10um-30um；具体到本实施例中，微孔22孔径为10um、30um、50um、100um、200um或300um。
激光增材制造系统为3D金属打印机。具体地，3D金属打印机包括喷枪、扫描器、激光器、控制器及治具，喷枪、扫描器及激光器均设于治具的上方，喷枪用于容装铜粉并用于喷射铜粉，激光器用于发射激光束，扫描器用于扫描铂片20上的内孔21，控制器电性连接激光器、喷枪及扫描器，控制用于控制电性连接激光器、喷枪及扫描器的工作，治具用于定位铂片20。可以理解地，3D金属打印机工作时，将铂片20固定在治具上，扫描器扫描治具上的铂片的内孔21位置，喷枪喷出铜粉，激光器发出激光束将喷枪喷出的铜粉融化至内孔21边缘的预设位置上。进一步地，3D金属打印机工作时，治具带动铂片20水平旋转，激光器每隔预设时间后朝铂片20的内孔21中心移动预设的距离；可以理解地， 激光器向内孔21边缘融化铜粉，治具带动铂片20水平旋转一周后，激光器朝铂片20的内孔21中心移动预设距离，沿内孔21上的环形铜粉层的边缘继续融化铜粉，以实现3D金属打印机能够沿铂片20的内孔21边缘向内孔21中心打印铜粉。
进一步地，激光增材制造系统的激光功率为450W-550W，送铜粉速度为5g/min-10g/min，扫描速度为1mm/s-5mm/s；具体到本实施例中，激光增材制造系统的激光功率为500W，送铜粉速度为9g/min，扫描速度为3mm/s。
步骤S30具体包括如下步骤：
步骤S31:激光增材制造系统沿铂片20的内孔21边缘向内孔21中心打印预设厚度的同心圆环铜层，同心圆环铜层的厚度小于铂片20的厚度；
步骤S32，循环步骤S31，直至环形铜粉层30的厚度等于铂片20的厚度，且环形铜粉层的相对两侧面分别与铂片20的相对两侧面平齐。
在本实施例中，铂片20的厚度为1mm，激光增材制造系统沿铂片20的内孔21边缘向内孔21中心循环打印20次厚度为50um的同心圆环铜层，以使环形铜粉层30的厚度与铂片20的厚度平齐。
在步骤S30之前，还包括步骤：
对铂片20的内孔21边缘进行打磨抛光处理，以提高内孔21的边缘精度，有效提高向内孔21边缘打印环形铜粉层30的精度。
本发明的采用激光增材制备电子显微镜光阑的方法，采用激光增材制技术制备光阑，即采用激光增材制造系统向沿铂片的内孔边缘向内孔中心打印铜粉以使内孔边缘形成环形铜粉层，直至内孔缩小成孔径为预设值的微孔，制备工艺流程少且简单，加工容易，材料损耗少，且制备出的电子显微镜光阑的微孔精度高，有效保证电子显微镜光阑质量，有利于提高扫描电子显微镜的成像质 量。
请参考图3，本发明还提供一种电子显微镜光阑40，用于扫描电子显微镜，电子显微镜光阑40中心的设有微孔22，电子显微镜光阑40包括环形状的铂片20及设于铂片20内并与铂片20同心设置的环形铜粉层30，微孔22设于环形铜粉层30的中心。
微孔22孔径为10um-30um；具体到本实施例中，微孔22孔径为10um、30um、50um、100um、200um或300um。
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本发明的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。因此，本发明专利的保护范围应以所附权利要求为准。

Claims (10)

  1. 一种采用激光增材制备电子显微镜光阑的方法，其特征在于，包括如下步骤：
    提供铂金基片、铜粉及激光增材制造系统；
    将所述铂金基片进行加工内孔，得到具有所述内孔的铂片；
    所述激光增材制造系统沿所述铂片的所述内孔边缘向所述内孔中心打印所述铜粉，以使所述内孔边缘形成环形铜粉层，直至所述内孔缩小成孔径为预设值的微孔，得到电子显微镜光阑。
  2. 根据权利要求1所述的采用激光增材制备电子显微镜光阑的方法，其特征在于，在将所述铂金基片进行加工内孔，得到具有所述内孔的铂片的步骤中，采用数控冲孔机对所述铂金基片加工内孔。
  3. 根据权利要求1所述的采用激光增材制备电子显微镜光阑的方法，其特征在于，所述铂片的所述内孔孔径为1mm-2mm。
  4. 根据权利要求1所述的采用激光增材制备电子显微镜光阑的方法，其特征在于，所述激光增材制造系统为3D金属打印机。
  5. 根据权利要求1所述的采用激光增材制备电子显微镜光阑的方法，其特征在于，所述激光增材制造系统的激光功率为450W-550W，送铜粉速度为5g/min-10g/min，扫描速度为1mm/s-5mm/s。
  6. 根据权利要求1所述的采用激光增材制备电子显微镜光阑的方法，其特征在于，所述微孔孔径为10um-30um。
  7. 根据权利要求6所述的采用激光增材制备电子显微镜光阑的方法，其特征在于，所述微孔孔径为10um、30um、50um、100um、200um或300um。
  8. 根据权利要求1所述的采用激光增材制备电子显微镜光阑的方法，其特 征在于，在所述激光增材制造系统沿所述铂片的所述内孔边缘向所述内孔中心打印所述铜粉，以使所述内孔边缘形成环形铜粉层，直至所述内孔缩小成孔径为预设值的微孔，得到电子显微镜光阑的步骤之前，还包括：
    对所述铂片的所述内孔边缘进行打磨抛光处理。
  9. 根据权利要求1所述的采用激光增材制备电子显微镜光阑的方法，其特征在于，所述铂片为圆形设置。
  10. 根据权利要求1所述的采用激光增材制备电子显微镜光阑的方法，其特征在于，所述电子显微镜光阑的所述环形铜粉层与所述铂片同心设置。
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101799567A (zh) * 2010-04-06 2010-08-11 西安交通大学 强激光石墨光阑及其制造方法
CN104599927A (zh) * 2014-12-24 2015-05-06 西安理工大学 一种多孔光阑的制备方法
CN106001574A (zh) * 2016-07-11 2016-10-12 上海航天设备制造总厂 采用模具的表面镂空薄壁零件激光熔覆沉积成形方法
US20180085995A1 (en) * 2013-01-04 2018-03-29 New York University 3d manufacturing using multiple material deposition and/or fusion sources simultaneously with single or multi-flute helical build surfaces
CN108480629A (zh) * 2018-03-23 2018-09-04 山东矿机集团股份有限公司 一种汽轮机空心叶片的激光增材制造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101131470A (zh) * 2007-09-21 2008-02-27 北京工业大学 扫描电子显微镜用光阑的紫外激光微加工系统及方法
US9931695B2 (en) * 2014-09-25 2018-04-03 General Electric Company Article and method for making an article
CN109261965A (zh) * 2018-11-09 2019-01-25 成都青石激光科技有限公司 一种燃气轮机涡轮动叶片盖板顶孔的封堵工艺
CN109797411A (zh) * 2019-03-06 2019-05-24 肇庆市华师大光电产业研究院 一种规则微孔膜及其制备方法和应用

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101799567A (zh) * 2010-04-06 2010-08-11 西安交通大学 强激光石墨光阑及其制造方法
US20180085995A1 (en) * 2013-01-04 2018-03-29 New York University 3d manufacturing using multiple material deposition and/or fusion sources simultaneously with single or multi-flute helical build surfaces
CN104599927A (zh) * 2014-12-24 2015-05-06 西安理工大学 一种多孔光阑的制备方法
CN106001574A (zh) * 2016-07-11 2016-10-12 上海航天设备制造总厂 采用模具的表面镂空薄壁零件激光熔覆沉积成形方法
CN108480629A (zh) * 2018-03-23 2018-09-04 山东矿机集团股份有限公司 一种汽轮机空心叶片的激光增材制造方法

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