WO2021103109A1 - Packaging structure for biometric identification chip - Google Patents

Packaging structure for biometric identification chip Download PDF

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Publication number
WO2021103109A1
WO2021103109A1 PCT/CN2019/123633 CN2019123633W WO2021103109A1 WO 2021103109 A1 WO2021103109 A1 WO 2021103109A1 CN 2019123633 W CN2019123633 W CN 2019123633W WO 2021103109 A1 WO2021103109 A1 WO 2021103109A1
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WO
WIPO (PCT)
Prior art keywords
light
transmitting layer
identification chip
biometric identification
biometric
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PCT/CN2019/123633
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French (fr)
Chinese (zh)
Inventor
王凯厚
杨剑宏
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苏州晶方半导体科技股份有限公司
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Publication of WO2021103109A1 publication Critical patent/WO2021103109A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/1462Coatings
    • H01L27/14623Optical shielding
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • G06V40/13Sensors therefor
    • G06V40/1318Sensors therefor using electro-optical elements or layers, e.g. electroluminescent sensing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14618Containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14625Optical elements or arrangements associated with the device
    • H01L27/14627Microlenses

Definitions

  • This application relates to the field of packaging technology, for example, to a packaging structure of a biometric identification chip.
  • biometric identification technology has become more and more widely used in personal identification and personal information security due to its high security, high reliability, and simple and convenient use.
  • the relevant biometric identification device extracts the user's biometrics and converts the user's finger biometrics into signal output to obtain the user's biometrics information.
  • Optical biometric identification chip is a commonly used biometric identification chip in related biometric identification devices.
  • light is irradiated to the user’s biometric surface and reflected to the photosensitive pixel.
  • the photosensitive pixel converts the biometric light signal into The electrical signal is output to obtain the user's biometric information, but the related biometric recognition chip has the problem of low recognition accuracy.
  • the present application provides a packaging structure of a biometric identification chip, which solves the problem of low recognition accuracy of the biometric identification chip in related technologies.
  • the embodiment of the present application provides a packaging structure of a biometric identification chip, including:
  • a biometric recognition chip having a first surface and a second surface disposed opposite to the first surface, the first surface of the biometric recognition chip is provided with a photosensitive area and surrounding the photosensitive area Non-photosensitive area, the photosensitive area is provided with a plurality of photosensitive pixels arranged in an array, and the non-photosensitive area is provided with a plurality of pads, which are electrically connected to the photosensitive pixels;
  • the first light-transmitting layer is located on the first surface of the biometric recognition chip.
  • the first light-transmitting layer has a third surface and a fourth surface opposite to the third surface.
  • the third surface In order to be close to the surface of the first surface of the biometric recognition chip, the third surface of the first light-transmitting layer is provided with a plurality of grooves, and the grooves are filled with light-shielding material, and any two adjacent grooves are arranged in the grooves.
  • the gap between the grooves exposes a part or all of the photosensitive pixel, and the ratio of the depth of the groove to the thickness of the first light-transmitting layer is greater than or equal to 2/3.
  • the ratio of the depth of the groove to the thickness of the first transparent layer is less than or equal to 3/4.
  • the prism layer includes a plurality of prisms arranged in an array, and the prisms are arranged in a one-to-one correspondence with the photosensitive pixels.
  • It also includes a transparent cover plate, which is located on the surface of the prism layer away from the first light-transmitting layer.
  • It also includes a second light-transmitting layer located between the biometric identification chip and the first light-transmitting layer.
  • It also includes a light filter layer located between the first light transmitting layer and the second light transmitting layer, and/or between the first light transmitting layer and the prism layer.
  • the light-shielding material includes chromium or black organic matter.
  • the light transmittance of the first light-transmitting layer is greater than or equal to 92%.
  • the light transmittance of the second light-transmitting layer is greater than or equal to 92%.
  • the biometric recognition chip includes one or more of an optical fingerprint recognition chip, an iris recognition chip, or a face recognition chip.
  • the packaging structure of a biometric identification chip provided in the present application, light is irradiated to the user’s biometric surface and reflected to the photosensitive pixel through the gap between any two adjacent grooves of the first light-transmitting layer.
  • the ratio of the depth of the groove to the thickness of the first light-transmitting layer is greater than or equal to 2/3, and the groove is filled with light-shielding material.
  • a light-transmitting layer whose thickness ratio is greater than or equal to 2/3 is filled with light-shielding material in the groove, which can absorb and block light whose propagation direction is not perpendicular to the first surface, so as to reflect the light whose propagation direction is perpendicular to the first surface.
  • To the photosensitive pixel to avoid the light whose propagation direction is not perpendicular to the first surface is reflected to the photosensitive pixel, that is, the adjustment and control of the light path to the photosensitive pixel is completed, so that the light of a specific incident angle illuminates the corresponding photosensitive pixel to avoid different photosensitive pixels.
  • the problem of crosstalk between pixels improves the recognition accuracy of the optical biometric recognition chip.
  • FIG. 1 is a schematic structural diagram of a packaging structure of a biometric identification chip provided by an embodiment of the application;
  • FIG. 2 is a schematic structural diagram of another package structure of a biometric identification chip provided by an embodiment of the application;
  • FIG. 3 is a schematic structural diagram of another packaging structure of a biometric identification chip provided by an embodiment of the application.
  • FIG. 4 is a schematic structural diagram of yet another biometric identification chip packaging structure provided by an embodiment of the application.
  • FIG. 5 is a schematic flowchart of a method for packaging a biometric identification chip according to an embodiment of the application
  • FIGS. 6-7 are cross-sectional views corresponding to the steps of a method for packaging a biometric identification chip according to an embodiment of the application;
  • FIG. 8 is a schematic flowchart of another method for packaging a biometric identification chip according to an embodiment of the application.
  • 9-12 are cross-sectional views corresponding to the steps of another method for packaging a biometric identification chip according to an embodiment of the application.
  • FIG. 13 is a schematic flowchart of yet another method for packaging a biometric identification chip according to an embodiment of the application.
  • 14-16 are cross-sectional views corresponding to each step of another method for packaging a biometric identification chip provided by an embodiment of the application;
  • FIG. 17 is a schematic flowchart of yet another method for packaging a biometric chip according to an embodiment of the application.
  • FIG. 1 is a schematic structural diagram of a package structure of a biometric identification chip provided by an embodiment of the application.
  • the package structure of the biometric recognition chip includes: a biometric recognition chip 10, the biometric recognition chip 10 has a first surface 100 and a second surface 101 disposed opposite to the first surface 100, the biometric recognition chip 10
  • the first surface 100 is provided with a photosensitive area A1 and a non-photosensitive area A2 surrounding the photosensitive area A1.
  • the photosensitive area A1 is provided with a plurality of photosensitive pixels 11 arranged in an array, and the non-photosensitive area A2 is provided with a plurality of pads 12 and photosensitive pixels.
  • the first light-transmitting layer 20 is located on the first surface 100 of the biometric identification chip 10, the first light-transmitting layer 20 has a third surface 200 and a fourth surface 201 opposite to the third surface 200,
  • the third surface 200 is a surface close to the first surface 100 of the biometric identification chip 10, and the third surface 200 of the first light-transmitting layer 20 is provided with a plurality of grooves 21, and the grooves 21 are filled with light-shielding materials 22.
  • the gap between two adjacent grooves 21 exposes part or all of a photosensitive pixel 11, and the ratio of the depth L1 of the groove 21 to the thickness L2 of the first transparent layer 20 is greater than or equal to 2/3.
  • the relevant biometric identification device extracts the user's biometrics and converts the user's finger biometrics into signal output to obtain the user's biometrics information.
  • Optical biometric identification chip is a commonly used biometric identification chip in related biometric identification devices. When performing biometric identification, light irradiates the user's biometric surface and is reflected to the photosensitive pixel. The photosensitive pixel converts the biometric light signal The electrical signal is output via the pad.
  • light is irradiated to the user’s biological feature surface and is reflected to the photosensitive pixel 11 through the gap between any two adjacent grooves 21 of the first light-transmitting layer 20.
  • the ratio of the depth L1 of the groove 21 to the thickness L2 of the first light-transmitting layer 20 is greater than or equal to 2/3
  • the groove 21 is filled with light-shielding material 22 .
  • the ratio of the depth L1 to the thickness L2 of the first light-transmitting layer 20 is greater than or equal to 2/3
  • the light-shielding material 22 filled in the groove 21 can absorb and block the light whose propagation direction is not perpendicular to the first surface, so as to spread
  • the light whose direction is perpendicular to the first surface is reflected to the photosensitive pixel 11 to prevent the light whose propagation direction is not perpendicular to the first surface
  • the adjustment control of the light path to the photosensitive pixel 11 is completed, so that the specific incidence is The angle of light irradiates the corresponding photosensitive pixel 11 to avoid the problem of crosstalk between different photosensitive pixels 11 and improve the recognition accuracy of the optical biometric identification chip.
  • the ratio of the depth L1 of the groove 21 to the thickness L2 of the first light-transmitting layer 20 is less than 2/3, the effect of absorbing and blocking the light whose propagation direction is not perpendicular to the first surface is poor.
  • the ratio of the depth L1 of the groove 21 to the thickness L2 of the first light-transmitting layer 20 is less than or equal to 3/4.
  • the packaging structure of the biometric identification chip further includes: a prism layer 30 located on the fourth surface 201 of the first light-transmitting layer 20.
  • the prism layer 30 functions to change the propagation direction of light.
  • the prism layer 30 includes a plurality of prisms 31 arranged in an array, and the prisms 31 are arranged in a one-to-one correspondence with the photosensitive pixels 11.
  • the prism 31 and the photosensitive pixels 11 are arranged in a one-to-one correspondence, precisely for each photosensitive pixel 11, changing the direction of light propagation, improving the recognition accuracy of the optical biometric recognition chip, reducing the production cost, and reducing the weight of the packaging structure .
  • FIG. 3 it further includes a transparent cover plate 40 located on the surface of the prism layer 30 away from the first light-transmitting layer 20.
  • the transparent cover plate 40 functions to protect the prism layer 30.
  • the packaging structure of the biometric identification chip further includes a second light-transmitting layer 50 located between the biometric identification chip 10 and the first light-transmitting layer 20.
  • the second light-transmitting layer 50 can play a role in protecting the photosensitive pixels 11 on the first surface of the biometric identification chip 10.
  • the packaging structure of the biometric identification chip further includes a filter layer 60 located between the first light-transmitting layer 20 and the second light-transmitting layer 50, and/ Or, it is located between the first light-transmitting layer 20 and the prism layer 30.
  • FIG. 4 only shows the filter layer 60, the structure between the first light-transmitting layer 20 and the second light-transmitting layer 50, and the structure between the first light-transmitting layer 20 and the prism layer 30.
  • the photosensitive pixel 11 can convert light of a specific wavelength band into an electrical signal, and the filter layer 60 only transmits the light of the specific wavelength band.
  • the light-shielding material 22 includes chromium or black organic matter. Chromium or black organic matter can absorb and block the light irradiated on it.
  • the light transmittance of the first light-transmitting layer 20 is greater than or equal to 92%.
  • the light transmittance of the first light-transmitting layer 20 is greater than or equal to 92%, so that the light irradiates the user's biological feature surface and reflects through the gap between any two adjacent grooves 21 of the first light-transmitting layer 20 to the photosensitive Pixel 11.
  • the light transmittance of the second light-transmitting layer 50 is greater than or equal to 92%.
  • the light transmittance of the second light-transmitting layer 50 is greater than or equal to 92%, so that the light irradiates the biological feature surface of the user and passes through the gap between any two adjacent grooves 21 of the first light-transmitting layer 20 and the second The light-transmitting layer 50 is reflected on the photosensitive pixel 11.
  • the biometric identification chip includes one or more of an optical fingerprint identification chip, an iris identification chip, or a face identification chip.
  • the biometric identification chip includes an optical fingerprint identification chip
  • the light irradiates the user's fingerprint surface and is reflected to the photosensitive pixel
  • the photosensitive pixel converts the optical signal of the fingerprint into an electrical signal for output.
  • the biometric recognition chip includes an iris recognition chip
  • the light irradiates the iris in the user's eye and is reflected to the photosensitive pixel, and the photosensitive pixel converts the light signal of the iris into an electrical signal for output.
  • the biometric recognition chip includes a face recognition chip
  • the light irradiates the user's face and is reflected to the photosensitive pixel
  • the photosensitive pixel converts the light signal of the human face into an electrical signal for output.
  • FIG. 5 is a flowchart of a method for packaging a biometric identification chip according to an embodiment of the present invention.
  • the packaging method of the biometric identification chip includes:
  • Step 110 Provide a biometric recognition chip.
  • the biometric recognition chip has a first surface and a second surface opposite to the first surface.
  • the first surface of the biometric recognition chip is provided with a photosensitive area and a non-sensitive area surrounding the photosensitive area.
  • the photosensitive area is provided with a plurality of photosensitive pixels arranged in an array, and the non-photosensitive area is provided with a plurality of pads, which are electrically connected to the photosensitive pixels.
  • a biometric identification chip 10 is provided.
  • the biometric identification chip 10 has a first surface 100 and a second surface 101 opposite to the first surface 100.
  • the first surface 100 of the biometric identification chip 10 is provided with a photosensitive area A1.
  • the photosensitive area A1 is provided with a plurality of photosensitive pixels 11 arranged in an array, and the non-photosensitive area A2 is provided with a plurality of pads 12 which are electrically connected to the photosensitive pixels 11.
  • Step 120 A first light-transmitting layer is formed on the first surface of the biometric recognition chip.
  • the first light-transmitting layer has a third surface and a fourth surface opposite to the third surface.
  • the third surface is close to the biometric recognition.
  • the surface of the first surface of the chip and the third surface of the first light-transmitting layer are provided with a plurality of grooves, and the grooves are filled with light-shielding material.
  • the gap between any two adjacent grooves exposes a photosensitive pixel In part or all of the area, the ratio of the depth of the groove to the thickness of the first light-transmitting layer is greater than or equal to 2/3.
  • a first light-transmitting layer 20 is formed on the first surface 100 of the biometric recognition chip 10.
  • the first light-transmitting layer 20 has a third surface 200 and a fourth surface 201 disposed opposite to the third surface 200.
  • the third surface 200 is a surface close to the first surface 100 of the biometric identification chip 10, and the third surface 200 of the first light-transmitting layer 20 is provided with a plurality of grooves 21, and the grooves 21 are filled with light-shielding materials 22.
  • the gap between two adjacent grooves 21 exposes part or all of a photosensitive pixel 11, and the ratio of the depth L1 of the groove 21 to the thickness L2 of the first transparent layer 20 is greater than or equal to 2/3.
  • the ratio of the depth of the groove to the thickness of the first light-transmitting layer is greater than or equal to 2/3, and the groove is filled with light-shielding material.
  • the light-shielding material filled in the groove with a ratio greater than or equal to 2/3 can absorb and block the light whose propagation direction is not perpendicular to the first surface, so as to reflect the light whose propagation direction is perpendicular to the first surface to the photosensitive pixel and avoid propagation
  • the light whose direction is not perpendicular to the first surface is reflected to the photosensitive pixel, that is, the adjustment control of the light path to the photosensitive pixel is completed, so that the light of a specific incident angle illuminates the corresponding photosensitive pixel, avoiding crosstalk between different photosensitive pixels , Improve the recognition accuracy of the optical biometric recognition chip.
  • step 120 forming a first light-transmitting layer on the first surface of the biometric recognition chip includes:
  • Step 1201 Provide a first light-transmitting layer.
  • the first light-transmitting layer has a third surface and a fourth surface opposite to the third surface.
  • a first light-transmitting layer 20 is provided.
  • the first light-transmitting layer 20 has a third surface 200 and a fourth surface 201 opposite to the third surface 200.
  • the light transmittance of the first light-transmitting layer 20 is greater than or equal to 92%.
  • the light transmittance of the first light-transmitting layer 20 is greater than or equal to 92%, so that the light irradiates the user's biological feature surface and reflects through the gap between any two adjacent grooves 21 of the first light-transmitting layer 20 to the photosensitive Pixel 11.
  • Step 1202 forming a plurality of grooves on the third surface of the first light-transmitting layer, the ratio of the depth of the grooves to the thickness of the first light-transmitting layer is greater than or equal to 2/3.
  • a plurality of grooves 21 are formed on the third surface 200 of the first transparent layer 20, and the ratio of the depth of the grooves 21 to the thickness of the first transparent layer 20 is greater than or equal to 2/3.
  • the ratio of the depth L1 of the groove 21 to the thickness L2 of the first light-transmitting layer 20 is less than 2/3, the effect of absorbing and blocking the light whose propagation direction is not perpendicular to the first surface is poor.
  • the ratio of the depth L1 of the groove 21 to the thickness L2 of the first light-transmitting layer 20 is less than or equal to 3/4.
  • Step 1203 Fill the groove with light-shielding material.
  • the recess 21 is filled with a light-shielding material 22.
  • the light-shielding material includes chromium or black organic matter. Chromium or black organic matter can absorb and block the light irradiated on it.
  • Step 1204 forming a first light-transmitting layer on the first surface of the biometric identification chip.
  • the first light-transmitting layer 20 is formed on the first surface 100 of the biometric identification chip 10.
  • the first light-transmitting layer 20 can be attached to the first surface 100 of the biometric recognition chip 10.
  • step 1202 forming a plurality of grooves on the third surface of the first light-transmitting layer includes: forming a plurality of grooves on the third surface of the first light-transmitting layer through an etching process.
  • the etching process may be dry etching or wet etching.
  • step 120 further includes after forming the first light-transmitting layer on the first surface of the biometric recognition chip:
  • Step 130 forming a prism layer on the fourth surface of the first transparent layer.
  • a prism layer 30 is formed on the fourth surface 201 of the first light-transmitting layer 20.
  • the prism layer 30 functions to change the propagation direction of light.
  • step 130 forming a prism layer on the fourth surface of the first light-transmitting layer includes: forming a plurality of prisms arranged in an array on the fourth surface of the first light-transmitting layer, The prism and the photosensitive pixel are arranged in one-to-one correspondence.
  • a plurality of prisms 31 arranged in an array are formed on the fourth surface 201 of the first light-transmitting layer 20, and the prisms 31 are arranged in a one-to-one correspondence with the photosensitive pixels 11.
  • the prism 31 and the photosensitive pixels 11 are arranged in a one-to-one correspondence, precisely for each photosensitive pixel 11, changing the direction of light propagation, improving the recognition accuracy of the optical biometric recognition chip, reducing the production cost, and reducing the weight of the packaging structure .
  • step 130 after forming a prism layer on the fourth surface of the first light-transmitting layer further includes:
  • Step 140 forming a transparent cover plate on the surface of the prism layer on the side away from the first light-transmitting layer.
  • a transparent cover plate 40 is formed on the surface of the prism layer 30 away from the first light-transmitting layer 20.
  • the transparent cover plate 40 functions to protect the prism layer 30.
  • step 120 before forming the first light-transmitting layer on the first surface of the biometric recognition chip further includes:
  • Step 1101 forming a second light-transmitting layer on the first surface of the biometric identification chip.
  • a second light-transmitting layer 50 is formed on the first surface 100 of the biometric identification chip 10.
  • the light transmittance of the second light-transmitting layer 50 is greater than or equal to 92%.
  • the light transmittance of the second light-transmitting layer 50 is greater than or equal to 92%, so that the light irradiates the biological feature surface of the user and passes through the gap between any two adjacent grooves 21 of the first light-transmitting layer 20 and the second The light-transmitting layer 50 is reflected on the photosensitive pixel 11.
  • step 120 further includes before forming the first light-transmitting layer on the surface of the second light-transmitting layer on the side far from the biometric recognition chip:
  • Step 1102 Form a light filter layer on the surface of the second light-transmitting layer that is away from the biometric identification chip.
  • a filter layer 60 is formed on the surface of the second light-transmitting layer 50 away from the biometric identification chip 10.
  • a filter layer 60 is attached to the surface of the second light-transmitting layer 50 away from the biometric identification chip 10.
  • step 130 before forming the prism layer on the fourth surface of the first light-transmitting layer further includes: forming a light filter layer on the fourth surface of the first light-transmitting layer.
  • a filter layer 60 is formed on the fourth surface 201 of the first light-transmitting layer 20.
  • a filter layer 60 is attached to the fourth surface 201 of the first transparent layer 20.
  • the photosensitive pixel 11 can convert light of a specific wavelength band into an electrical signal, and the filter layer 60 only transmits the light of the specific wavelength band.

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Abstract

A packaging structure for a biometric identification chip (10). The packaging structure comprises: a biometric identification chip (10), the biometric identification chip (10) having a first surface (100) and a second surface (101) provided opposite to the first surface (100), the first surface (100) of the biometric identification chip (10) being provided with a photosensitive region (A1), the photosensitive region (A1) being provided with a plurality of photosensitive pixels (11) arranged in an array; and a first light-transmitting layer (20) located on the first surface (100) of the biometric identification chip (10), a third surface (200) of the first light-transmitting layer (20) being provided with a plurality of grooves (21), the grooves (21) being filled with a light-shielding material (22), a part or all region of one photosensitive pixel (11) being exposed in a gap between any two adjacent grooves (21), and a ratio of the depth (L1) of the grooves (21) to the thickness (L2) of the first light-transmitting layer (20) being greater than or equal to 2/3.

Description

生物特征识别芯片的封装结构Package structure of biometric identification chip
本公开要求在2019年11月28日提交中国专利局、申请号为201911189393.4的中国专利申请的优先权,以上申请的全部内容通过引用结合在本公开中。This disclosure claims the priority of a Chinese patent application filed with the Chinese Patent Office with an application number of 201911189393.4 on November 28, 2019, and the entire content of the above application is incorporated into this disclosure by reference.
技术领域Technical field
本申请涉及封装技术领域,例如涉及一种生物特征识别芯片的封装结构。This application relates to the field of packaging technology, for example, to a packaging structure of a biometric identification chip.
背景技术Background technique
随着科技的进步,生物特征识别技术因具有安全性好、可靠性高、使用简单方便的特点在个人身份识别以及个人信息安全方面的应用越来越广泛。With the advancement of science and technology, biometric identification technology has become more and more widely used in personal identification and personal information security due to its high security, high reliability, and simple and convenient use.
相关的生物特征识别器件通过提取用户的生物特征,并将用户的指生物特征转换为信号输出,从而获取用户的生物特征信息。The relevant biometric identification device extracts the user's biometrics and converts the user's finger biometrics into signal output to obtain the user's biometrics information.
光学生物特征识别芯片是相关生物特征识别器件中常用的生物特征识别芯片,进行生物特征识别时,光线照射至使用者的生物特征面并反射至感光像素,感光像素将生物特征的光信号转换为电信号输出,来获取用户的生物特征信息,但是相关的生物特征识别芯片存在识别精度不高的问题。Optical biometric identification chip is a commonly used biometric identification chip in related biometric identification devices. When performing biometric identification, light is irradiated to the user’s biometric surface and reflected to the photosensitive pixel. The photosensitive pixel converts the biometric light signal into The electrical signal is output to obtain the user's biometric information, but the related biometric recognition chip has the problem of low recognition accuracy.
发明内容Summary of the invention
有鉴于此,本申请提供了一种生物特征识别芯片的封装结构,解决了相关技术中生物特征识别芯片存在识别精度不高的问题。In view of this, the present application provides a packaging structure of a biometric identification chip, which solves the problem of low recognition accuracy of the biometric identification chip in related technologies.
本申请实施例提供了一种生物特征识别芯片的封装结构,包括:The embodiment of the present application provides a packaging structure of a biometric identification chip, including:
生物特征识别芯片,所述生物特征识别芯片具有第一表面以及与所述第一表面相对设置的第二表面,所述生物特征识别芯片的第一表面设置有感光区以及包围所述感光区的非感光区,所述感光区设置有多个阵列排布的感光像素,所述非感光区设置有多个焊盘,与所述感光像素电连接;A biometric recognition chip, the biometric recognition chip having a first surface and a second surface disposed opposite to the first surface, the first surface of the biometric recognition chip is provided with a photosensitive area and surrounding the photosensitive area Non-photosensitive area, the photosensitive area is provided with a plurality of photosensitive pixels arranged in an array, and the non-photosensitive area is provided with a plurality of pads, which are electrically connected to the photosensitive pixels;
第一透光层,位于所述生物特征识别芯片的第一表面之上,所述第一透光层具有第三表面以及与所述第三表面相对设置的第四表面,所述第三表面为靠近所述生物特征识别芯片的第一表面的表面,所述第一透光层的第三表面设置有多个凹槽,在所述凹槽内充满有遮光材料,任意相邻两个凹槽之间的间隙暴露 出一个所述感光像素的部分或全部区域,所述凹槽的深度与所述第一透光层的厚度的比值大于或等于2/3。The first light-transmitting layer is located on the first surface of the biometric recognition chip. The first light-transmitting layer has a third surface and a fourth surface opposite to the third surface. The third surface In order to be close to the surface of the first surface of the biometric recognition chip, the third surface of the first light-transmitting layer is provided with a plurality of grooves, and the grooves are filled with light-shielding material, and any two adjacent grooves are arranged in the grooves. The gap between the grooves exposes a part or all of the photosensitive pixel, and the ratio of the depth of the groove to the thickness of the first light-transmitting layer is greater than or equal to 2/3.
所述凹槽的深度与所述第一透光层的厚度的比值小于或等于3/4。The ratio of the depth of the groove to the thickness of the first transparent layer is less than or equal to 3/4.
还包括棱镜层,位于所述第一透光层的第四表面之上。It also includes a prism layer located on the fourth surface of the first light-transmitting layer.
所述棱镜层包括多个阵列排布的棱镜,所述棱镜与所述感光像素一一对应设置。The prism layer includes a plurality of prisms arranged in an array, and the prisms are arranged in a one-to-one correspondence with the photosensitive pixels.
还包括透明盖板,位于所述棱镜层远离所述第一透光层一侧的表面。It also includes a transparent cover plate, which is located on the surface of the prism layer away from the first light-transmitting layer.
还包括第二透光层,位于所述生物特征识别芯片和所述第一透光层之间。It also includes a second light-transmitting layer located between the biometric identification chip and the first light-transmitting layer.
还包括滤光层,位于所述第一透光层和所述第二透光层之间,和/或,位于所述第一透光层和所述棱镜层之间。It also includes a light filter layer located between the first light transmitting layer and the second light transmitting layer, and/or between the first light transmitting layer and the prism layer.
所述遮光材料包括铬或者黑色有机物。The light-shielding material includes chromium or black organic matter.
所述第一透光层的光透过率大于或等于92%。The light transmittance of the first light-transmitting layer is greater than or equal to 92%.
所述第二透光层的光透过率大于或等于92%。The light transmittance of the second light-transmitting layer is greater than or equal to 92%.
所述生物特征识别芯片包括光学指纹识别芯片、虹膜识别芯片或者人脸识别芯片中的一种或多种。The biometric recognition chip includes one or more of an optical fingerprint recognition chip, an iris recognition chip, or a face recognition chip.
本申请提供的一种生物特征识别芯片的封装结构,光线照射至使用者的生物特征面并经过第一透光层任意相邻两个凹槽之间的间隙反射至感光像素,在光线照射至使用者的生物特征面并经过第一透光层反射的过程中,凹槽的深度与第一透光层的厚度的比值大于或等于2/3,且凹槽内充满遮光材料,深度与第一透光层的厚度的比值大于或等于2/3的凹槽内充满的遮光材料,可以吸收和遮挡传播方向不垂直于第一表面的光,以便将传播方向垂直于第一表面的光反射至感光像素,避免传播方向不垂直于第一表面的光反射至感光像素,即完成了照射到感光像素的光的路径的调节控制,使得特定入射角度的光线照射对应的感光像素,避免不同感光像素之间的串扰问题,提高了光学生物特征识别芯片的识别精度。In the packaging structure of a biometric identification chip provided in the present application, light is irradiated to the user’s biometric surface and reflected to the photosensitive pixel through the gap between any two adjacent grooves of the first light-transmitting layer. When the user’s biological feature surface is reflected by the first light-transmitting layer, the ratio of the depth of the groove to the thickness of the first light-transmitting layer is greater than or equal to 2/3, and the groove is filled with light-shielding material. A light-transmitting layer whose thickness ratio is greater than or equal to 2/3 is filled with light-shielding material in the groove, which can absorb and block light whose propagation direction is not perpendicular to the first surface, so as to reflect the light whose propagation direction is perpendicular to the first surface. To the photosensitive pixel, to avoid the light whose propagation direction is not perpendicular to the first surface is reflected to the photosensitive pixel, that is, the adjustment and control of the light path to the photosensitive pixel is completed, so that the light of a specific incident angle illuminates the corresponding photosensitive pixel to avoid different photosensitive pixels. The problem of crosstalk between pixels improves the recognition accuracy of the optical biometric recognition chip.
附图说明Description of the drawings
图1为本申请实施例提供的一种生物特征识别芯片的封装结构的结构示意图;FIG. 1 is a schematic structural diagram of a packaging structure of a biometric identification chip provided by an embodiment of the application;
图2为本申请实施例提供的另一种生物特征识别芯片的封装结构的结构示意图;2 is a schematic structural diagram of another package structure of a biometric identification chip provided by an embodiment of the application;
图3为本申请实施例提供的又一种生物特征识别芯片的封装结构的结构示意图;FIG. 3 is a schematic structural diagram of another packaging structure of a biometric identification chip provided by an embodiment of the application;
图4为本申请实施例提供的又一种生物特征识别芯片的封装结构的结构示意图;4 is a schematic structural diagram of yet another biometric identification chip packaging structure provided by an embodiment of the application;
图5为本申请实施例提供的一种生物特征识别芯片的封装方法的流程示意图;FIG. 5 is a schematic flowchart of a method for packaging a biometric identification chip according to an embodiment of the application;
图6-图7为本申请实施例提供的一种生物特征识别芯片的封装方法的各步骤对应的剖面图;FIGS. 6-7 are cross-sectional views corresponding to the steps of a method for packaging a biometric identification chip according to an embodiment of the application;
图8为本申请实施例提供的另一种生物特征识别芯片的封装方法的流程示意图;FIG. 8 is a schematic flowchart of another method for packaging a biometric identification chip according to an embodiment of the application;
图9-图12为本申请实施例提供的另一种生物特征识别芯片的封装方法的各步骤对应的剖面图;9-12 are cross-sectional views corresponding to the steps of another method for packaging a biometric identification chip according to an embodiment of the application;
图13为本申请实施例提供的又一种生物特征识别芯片的封装方法的流程示意图;FIG. 13 is a schematic flowchart of yet another method for packaging a biometric identification chip according to an embodiment of the application;
图14-图16为本申请实施例提供的又一种生物特征识别芯片的封装方法的各步骤对应的剖面图;14-16 are cross-sectional views corresponding to each step of another method for packaging a biometric identification chip provided by an embodiment of the application;
图17为本申请实施例提供的又一种生物特征识别芯片的封装方法的流程示意图。FIG. 17 is a schematic flowchart of yet another method for packaging a biometric chip according to an embodiment of the application.
具体实施方式Detailed ways
下面结合附图和实施例对本申请作进一步的详细说明。图1为本申请实施例提供的一种生物特征识别芯片的封装结构的结构示意图。参见图1,该生物特征识别芯片的封装结构包括:生物特征识别芯片10,生物特征识别芯片10具有第一表面100以及与第一表面100相对设置的第二表面101,生物特征识别芯片10的第一表面100设置有感光区A1以及包围感光区A1的非感光区A2,感光区A1设置有多个阵列排布的感光像素11,非感光区A2设置有多个焊盘12,与感光像素11电连接;第一透光层20,位于生物特征识别芯片10的第一表面100之上,第一透光层20具有第三表面200以及与第三表面200相对设置的第四表 面201,第三表面200为靠近生物特征识别芯片10的第一表面100的表面,第一透光层20的第三表面200设置有多个凹槽21,在凹槽21内充满有遮光材料22,任意相邻两个凹槽21之间的间隙暴露出一个感光像素11的部分或全部区域,凹槽21的深度L1与第一透光层20的厚度L2的比值大于或等于2/3。The application will be further described in detail below with reference to the drawings and embodiments. FIG. 1 is a schematic structural diagram of a package structure of a biometric identification chip provided by an embodiment of the application. 1, the package structure of the biometric recognition chip includes: a biometric recognition chip 10, the biometric recognition chip 10 has a first surface 100 and a second surface 101 disposed opposite to the first surface 100, the biometric recognition chip 10 The first surface 100 is provided with a photosensitive area A1 and a non-photosensitive area A2 surrounding the photosensitive area A1. The photosensitive area A1 is provided with a plurality of photosensitive pixels 11 arranged in an array, and the non-photosensitive area A2 is provided with a plurality of pads 12 and photosensitive pixels. 11 is electrically connected; the first light-transmitting layer 20 is located on the first surface 100 of the biometric identification chip 10, the first light-transmitting layer 20 has a third surface 200 and a fourth surface 201 opposite to the third surface 200, The third surface 200 is a surface close to the first surface 100 of the biometric identification chip 10, and the third surface 200 of the first light-transmitting layer 20 is provided with a plurality of grooves 21, and the grooves 21 are filled with light-shielding materials 22. The gap between two adjacent grooves 21 exposes part or all of a photosensitive pixel 11, and the ratio of the depth L1 of the groove 21 to the thickness L2 of the first transparent layer 20 is greater than or equal to 2/3.
相关的生物特征识别器件通过提取用户的生物特征,并将用户的指生物特征转换为信号输出,从而获取用户的生物特征信息。光学生物特征识别芯片是相关生物特征识别器件中常用的生物特征识别芯片,进行生物特征识别时,光线照射至使用者的生物特征面并经过反射至感光像素,感光像素将生物特征的光信号转换为电信号经由焊盘输出。The relevant biometric identification device extracts the user's biometrics and converts the user's finger biometrics into signal output to obtain the user's biometrics information. Optical biometric identification chip is a commonly used biometric identification chip in related biometric identification devices. When performing biometric identification, light irradiates the user's biometric surface and is reflected to the photosensitive pixel. The photosensitive pixel converts the biometric light signal The electrical signal is output via the pad.
目前光学生物特征识别芯片的封装结构,不同感光像素之间存在光学串扰的问题,从而导致相关的光学生物特征识别芯片存在识别精度不高的问题。In the current packaging structure of the optical biometric recognition chip, there is a problem of optical crosstalk between different photosensitive pixels, which leads to the problem of low recognition accuracy in the related optical biometric recognition chip.
本实施例提供的技术方案,光线照射至使用者的生物特征面并经过第一透光层20任意相邻两个凹槽21之间的间隙反射至感光像素11,在光线照射至使用者的生物特征面并经过第一透光层20反射的过程中,凹槽21的深度L1与第一透光层20的厚度L2的比值大于或等于2/3,且凹槽21内充满遮光材料22,深度L1与第一透光层20的厚度L2的比值大于或等于2/3的凹槽21内充满的遮光材料22,可以吸收和遮挡传播方向不垂直于第一表面的光,以便将传播方向垂直于第一表面的光反射至感光像素11,避免传播方向不垂直于第一表面的光反射至感光像素11,即完成了照射到感光像素11的光的路径的调节控制,使得特定入射角度的光线照射对应的感光像素11,避免不同感光像素11之间的串扰问题,提高了光学生物特征识别芯片的识别精度。In the technical solution provided by this embodiment, light is irradiated to the user’s biological feature surface and is reflected to the photosensitive pixel 11 through the gap between any two adjacent grooves 21 of the first light-transmitting layer 20. When the light is irradiated to the user’s When the biological feature surface is reflected by the first light-transmitting layer 20, the ratio of the depth L1 of the groove 21 to the thickness L2 of the first light-transmitting layer 20 is greater than or equal to 2/3, and the groove 21 is filled with light-shielding material 22 , The ratio of the depth L1 to the thickness L2 of the first light-transmitting layer 20 is greater than or equal to 2/3, and the light-shielding material 22 filled in the groove 21 can absorb and block the light whose propagation direction is not perpendicular to the first surface, so as to spread The light whose direction is perpendicular to the first surface is reflected to the photosensitive pixel 11 to prevent the light whose propagation direction is not perpendicular to the first surface from being reflected to the photosensitive pixel 11. That is, the adjustment control of the light path to the photosensitive pixel 11 is completed, so that the specific incidence is The angle of light irradiates the corresponding photosensitive pixel 11 to avoid the problem of crosstalk between different photosensitive pixels 11 and improve the recognition accuracy of the optical biometric identification chip.
其中,凹槽21的深度L1与第一透光层20的厚度L2的比值小于2/3时,吸收和遮挡传播方向不垂直于第一表面的光的效果较差。Wherein, when the ratio of the depth L1 of the groove 21 to the thickness L2 of the first light-transmitting layer 20 is less than 2/3, the effect of absorbing and blocking the light whose propagation direction is not perpendicular to the first surface is poor.
可选地,在上述技术方案的基础上,参见图1,凹槽21的深度L1与第一透光层20的厚度L2的比值小于或等于3/4。凹槽21的深度L1与第一透光层20的厚度L2的比值越大,吸收和遮挡传播方向不垂直于第一表面的光的效果越好,但是当大于3/4时,刻蚀的时间和成本也会增加。Optionally, on the basis of the above technical solution, referring to FIG. 1, the ratio of the depth L1 of the groove 21 to the thickness L2 of the first light-transmitting layer 20 is less than or equal to 3/4. The greater the ratio of the depth L1 of the groove 21 to the thickness L2 of the first light-transmitting layer 20, the better the effect of absorbing and blocking the light whose propagation direction is not perpendicular to the first surface, but when it is greater than 3/4, the etching Time and cost will also increase.
可选地,在上述技术方案的基础上,参见图2,该生物特征识别芯片的封装结构还包括:棱镜层30,位于第一透光层20的第四表面201之上。棱镜层30 起到改变光的传播方向的作用。Optionally, based on the above technical solution, referring to FIG. 2, the packaging structure of the biometric identification chip further includes: a prism layer 30 located on the fourth surface 201 of the first light-transmitting layer 20. The prism layer 30 functions to change the propagation direction of light.
可选地,在上述技术方案的基础上,参见图3,棱镜层30包括多个阵列排布的棱镜31,棱镜31与感光像素11一一对应设置。棱镜31与感光像素11一一对应设置,精准的针对每个感光像素11,改变光的传播方向的作用,提高了光学生物特征识别芯片的识别精度,减少了生产成本,减轻了封装结构的重量。Optionally, based on the above technical solution, referring to FIG. 3, the prism layer 30 includes a plurality of prisms 31 arranged in an array, and the prisms 31 are arranged in a one-to-one correspondence with the photosensitive pixels 11. The prism 31 and the photosensitive pixels 11 are arranged in a one-to-one correspondence, precisely for each photosensitive pixel 11, changing the direction of light propagation, improving the recognition accuracy of the optical biometric recognition chip, reducing the production cost, and reducing the weight of the packaging structure .
可选地,在上述技术方案的基础上,参见图3,还包括透明盖板40,位于棱镜层30远离第一透光层20一侧的表面。透明盖板40起到保护棱镜层30的作用。Optionally, on the basis of the above technical solution, referring to FIG. 3, it further includes a transparent cover plate 40 located on the surface of the prism layer 30 away from the first light-transmitting layer 20. The transparent cover plate 40 functions to protect the prism layer 30.
可选地,在上述技术方案的基础上,参见图4,该生物特征识别芯片的封装结构还包括第二透光层50,位于生物特征识别芯片10和第一透光层20之间。第二透光层50可以起到对生物特征识别芯片10第一表面的感光像素11保护的作用。Optionally, on the basis of the above technical solution, referring to FIG. 4, the packaging structure of the biometric identification chip further includes a second light-transmitting layer 50 located between the biometric identification chip 10 and the first light-transmitting layer 20. The second light-transmitting layer 50 can play a role in protecting the photosensitive pixels 11 on the first surface of the biometric identification chip 10.
可选地,在上述技术方案的基础上,参见图4,该生物特征识别芯片的封装结构还包括滤光层60,位于第一透光层20和第二透光层50之间,和/或,位于第一透光层20和棱镜层30之间。需要说明的是,图4仅示出了滤光层60,位于第一透光层20和第二透光层50之间的结构以及,位于第一透光层20和棱镜层30之间的情况。感光像素11可以将特定波段的光转换为电信号,滤光层60仅透过该特定波段的光。Optionally, on the basis of the above technical solution, referring to FIG. 4, the packaging structure of the biometric identification chip further includes a filter layer 60 located between the first light-transmitting layer 20 and the second light-transmitting layer 50, and/ Or, it is located between the first light-transmitting layer 20 and the prism layer 30. It should be noted that FIG. 4 only shows the filter layer 60, the structure between the first light-transmitting layer 20 and the second light-transmitting layer 50, and the structure between the first light-transmitting layer 20 and the prism layer 30. Happening. The photosensitive pixel 11 can convert light of a specific wavelength band into an electrical signal, and the filter layer 60 only transmits the light of the specific wavelength band.
可选地,在上述技术方案的基础上,遮光材料22包括铬或者黑色有机物。铬或者黑色有机物,可以起到吸收和遮挡照射到其上的光的作用。Optionally, based on the above technical solution, the light-shielding material 22 includes chromium or black organic matter. Chromium or black organic matter can absorb and block the light irradiated on it.
可选地,在上述技术方案的基础上,第一透光层20的光透过率大于或等于92%。第一透光层20的光透过率大于或等于92%,使得光线照射至使用者的生物特征面并经过第一透光层20任意相邻两个凹槽21之间的间隙反射至感光像素11上。Optionally, based on the above technical solution, the light transmittance of the first light-transmitting layer 20 is greater than or equal to 92%. The light transmittance of the first light-transmitting layer 20 is greater than or equal to 92%, so that the light irradiates the user's biological feature surface and reflects through the gap between any two adjacent grooves 21 of the first light-transmitting layer 20 to the photosensitive Pixel 11.
可选地,在上述技术方案的基础上,第二透光层50的光透过率大于或等于92%。第二透光层50的光透过率大于或等于92%,使得光线照射至使用者的生物特征面并经过第一透光层20任意相邻两个凹槽21之间的间隙以及第二透光层50反射至感光像素11上。Optionally, based on the above technical solution, the light transmittance of the second light-transmitting layer 50 is greater than or equal to 92%. The light transmittance of the second light-transmitting layer 50 is greater than or equal to 92%, so that the light irradiates the biological feature surface of the user and passes through the gap between any two adjacent grooves 21 of the first light-transmitting layer 20 and the second The light-transmitting layer 50 is reflected on the photosensitive pixel 11.
可选地,在上述技术方案的基础上,生物特征识别芯片包括光学指纹识别芯片、虹膜识别芯片或者人脸识别芯片中的一种或多种。Optionally, on the basis of the foregoing technical solution, the biometric identification chip includes one or more of an optical fingerprint identification chip, an iris identification chip, or a face identification chip.
生物特征识别芯片包括光学指纹识别芯片时,光线照射至使用者的指纹面并反射至感光像素,感光像素将指纹的光信号转换为电信号输出。When the biometric identification chip includes an optical fingerprint identification chip, the light irradiates the user's fingerprint surface and is reflected to the photosensitive pixel, and the photosensitive pixel converts the optical signal of the fingerprint into an electrical signal for output.
生物特征识别芯片包括虹膜识别芯片时,光线照射至使用者的眼睛中的虹膜并反射至感光像素,感光像素将虹膜的光信号转换为电信号输出。When the biometric recognition chip includes an iris recognition chip, the light irradiates the iris in the user's eye and is reflected to the photosensitive pixel, and the photosensitive pixel converts the light signal of the iris into an electrical signal for output.
生物特征识别芯片包括人脸识别芯片时,光线照射至使用者的面部并反射至感光像素,感光像素将人脸的光信号转换为电信号输出。When the biometric recognition chip includes a face recognition chip, the light irradiates the user's face and is reflected to the photosensitive pixel, and the photosensitive pixel converts the light signal of the human face into an electrical signal for output.
基于同一发明构思,本发明实施例还提供了一种生物特征识别芯片的封装方法,图5为本发明实施例提供的一种生物特征识别芯片的封装方法流程图。参见图5,该生物特征识别芯片的封装方法包括:Based on the same inventive concept, an embodiment of the present invention also provides a method for packaging a biometric identification chip. FIG. 5 is a flowchart of a method for packaging a biometric identification chip according to an embodiment of the present invention. Referring to FIG. 5, the packaging method of the biometric identification chip includes:
步骤110、提供生物特征识别芯片,生物特征识别芯片具有第一表面以及与第一表面相对设置的第二表面,生物特征识别芯片的第一表面设置有感光区以及包围感光区的非感光区,感光区设置有多个阵列排布的感光像素,非感光区设置有多个焊盘,与感光像素电连接。Step 110: Provide a biometric recognition chip. The biometric recognition chip has a first surface and a second surface opposite to the first surface. The first surface of the biometric recognition chip is provided with a photosensitive area and a non-sensitive area surrounding the photosensitive area. The photosensitive area is provided with a plurality of photosensitive pixels arranged in an array, and the non-photosensitive area is provided with a plurality of pads, which are electrically connected to the photosensitive pixels.
参见图6、提供生物特征识别芯片10,生物特征识别芯片10具有第一表面100以及与第一表面100相对设置的第二表面101,生物特征识别芯片10的第一表面100设置有感光区A1以及包围感光区A1的非感光区A2,感光区A1设置有多个阵列排布的感光像素11,非感光区A2设置有多个焊盘12,与感光像素11电连接。Referring to FIG. 6, a biometric identification chip 10 is provided. The biometric identification chip 10 has a first surface 100 and a second surface 101 opposite to the first surface 100. The first surface 100 of the biometric identification chip 10 is provided with a photosensitive area A1. As well as the non-photosensitive area A2 surrounding the photosensitive area A1, the photosensitive area A1 is provided with a plurality of photosensitive pixels 11 arranged in an array, and the non-photosensitive area A2 is provided with a plurality of pads 12 which are electrically connected to the photosensitive pixels 11.
步骤120、在生物特征识别芯片的第一表面之上形成第一透光层,第一透光层具有第三表面以及与第三表面相对设置的第四表面,第三表面为靠近生物特征识别芯片的第一表面的表面,第一透光层的第三表面设置有多个凹槽,在凹槽内充满有遮光材料,任意相邻两个凹槽之间的间隙暴露出一个感光像素的部分或全部区域,凹槽的深度与第一透光层的厚度的比值大于或等于2/3。Step 120: A first light-transmitting layer is formed on the first surface of the biometric recognition chip. The first light-transmitting layer has a third surface and a fourth surface opposite to the third surface. The third surface is close to the biometric recognition. The surface of the first surface of the chip and the third surface of the first light-transmitting layer are provided with a plurality of grooves, and the grooves are filled with light-shielding material. The gap between any two adjacent grooves exposes a photosensitive pixel In part or all of the area, the ratio of the depth of the groove to the thickness of the first light-transmitting layer is greater than or equal to 2/3.
参见图7,在生物特征识别芯片10的第一表面100之上形成第一透光层20,第一透光层20具有第三表面200以及与第三表面200相对设置的第四表面201,第三表面200为靠近生物特征识别芯片10的第一表面100的表面,第一透光层 20的第三表面200设置有多个凹槽21,在凹槽21内充满有遮光材料22,任意相邻两个凹槽21之间的间隙暴露出一个感光像素11的部分或全部区域,凹槽21的深度L1与第一透光层20的厚度L2的比值大于或等于2/3。Referring to FIG. 7, a first light-transmitting layer 20 is formed on the first surface 100 of the biometric recognition chip 10. The first light-transmitting layer 20 has a third surface 200 and a fourth surface 201 disposed opposite to the third surface 200. The third surface 200 is a surface close to the first surface 100 of the biometric identification chip 10, and the third surface 200 of the first light-transmitting layer 20 is provided with a plurality of grooves 21, and the grooves 21 are filled with light-shielding materials 22. The gap between two adjacent grooves 21 exposes part or all of a photosensitive pixel 11, and the ratio of the depth L1 of the groove 21 to the thickness L2 of the first transparent layer 20 is greater than or equal to 2/3.
本实施例提供的技术方案,光线照射至使用者的生物特征面并经过第一透光层任意相邻两个凹槽之间的间隙反射至感光像素,在光线照射至使用者的生物特征面并经过第一透光层反射的过程中,凹槽的深度与第一透光层的厚度的比值大于或等于2/3,且凹槽内充满遮光材料,深度与第一透光层的厚度的比值大于或等于2/3的凹槽内充满的遮光材料,可以吸收和遮挡传播方向不垂直于第一表面的光,以便将传播方向垂直于第一表面的光反射至感光像素,避免传播方向不垂直于第一表面的光反射至感光像素,即完成了照射到感光像素的光的路径的调节控制,使得特定入射角度的光线照射对应的感光像素,避免不同感光像素之间的串扰问题,提高了光学生物特征识别芯片的识别精度。In the technical solution provided by this embodiment, light is irradiated to the user's biological feature surface and reflected to the photosensitive pixel through the gap between any two adjacent grooves of the first light-transmitting layer, and the light is irradiated to the user's biological feature surface. And during the reflection process of the first light-transmitting layer, the ratio of the depth of the groove to the thickness of the first light-transmitting layer is greater than or equal to 2/3, and the groove is filled with light-shielding material. The light-shielding material filled in the groove with a ratio greater than or equal to 2/3 can absorb and block the light whose propagation direction is not perpendicular to the first surface, so as to reflect the light whose propagation direction is perpendicular to the first surface to the photosensitive pixel and avoid propagation The light whose direction is not perpendicular to the first surface is reflected to the photosensitive pixel, that is, the adjustment control of the light path to the photosensitive pixel is completed, so that the light of a specific incident angle illuminates the corresponding photosensitive pixel, avoiding crosstalk between different photosensitive pixels , Improve the recognition accuracy of the optical biometric recognition chip.
可选地,在上述技术方案的基础上,参见图8,步骤120在生物特征识别芯片的第一表面之上形成第一透光层包括:Optionally, on the basis of the foregoing technical solution, referring to FIG. 8, step 120 forming a first light-transmitting layer on the first surface of the biometric recognition chip includes:
步骤1201、提供第一透光层,第一透光层具有第三表面以及与第三表面相对设置的第四表面。Step 1201: Provide a first light-transmitting layer. The first light-transmitting layer has a third surface and a fourth surface opposite to the third surface.
参见图9、提供第一透光层20,第一透光层20具有第三表面200以及与第三表面200相对设置的第四表面201。其中,可选地,第一透光层20的光透过率大于或等于92%。第一透光层20的光透过率大于或等于92%,使得光线照射至使用者的生物特征面并经过第一透光层20任意相邻两个凹槽21之间的间隙反射至感光像素11上。Referring to FIG. 9, a first light-transmitting layer 20 is provided. The first light-transmitting layer 20 has a third surface 200 and a fourth surface 201 opposite to the third surface 200. Wherein, optionally, the light transmittance of the first light-transmitting layer 20 is greater than or equal to 92%. The light transmittance of the first light-transmitting layer 20 is greater than or equal to 92%, so that the light irradiates the user's biological feature surface and reflects through the gap between any two adjacent grooves 21 of the first light-transmitting layer 20 to the photosensitive Pixel 11.
步骤1202、在第一透光层的第三表面形成多个凹槽,凹槽的深度与第一透光层的厚度的比值大于或等于2/3。 Step 1202, forming a plurality of grooves on the third surface of the first light-transmitting layer, the ratio of the depth of the grooves to the thickness of the first light-transmitting layer is greater than or equal to 2/3.
参见图10、在第一透光层20的第三表面200形成多个凹槽21,凹槽21的深度与第一透光层20的厚度的比值大于或等于2/3。其中,凹槽21的深度L1与第一透光层20的厚度L2的比值小于2/3时,吸收和遮挡传播方向不垂直于第一表面的光的效果较差。可选地,凹槽21的深度L1与第一透光层20的厚度L2的比值小于或等于3/4。凹槽21的深度L1与第一透光层20的厚度L2的比值越大,吸收和遮挡传播方向不垂直于第一表面的光的效果越好,但是当大于 3/4时,刻蚀的时间和成本也会增加。Referring to FIG. 10, a plurality of grooves 21 are formed on the third surface 200 of the first transparent layer 20, and the ratio of the depth of the grooves 21 to the thickness of the first transparent layer 20 is greater than or equal to 2/3. Wherein, when the ratio of the depth L1 of the groove 21 to the thickness L2 of the first light-transmitting layer 20 is less than 2/3, the effect of absorbing and blocking the light whose propagation direction is not perpendicular to the first surface is poor. Optionally, the ratio of the depth L1 of the groove 21 to the thickness L2 of the first light-transmitting layer 20 is less than or equal to 3/4. The greater the ratio of the depth L1 of the groove 21 to the thickness L2 of the first light-transmitting layer 20, the better the effect of absorbing and blocking the light whose propagation direction is not perpendicular to the first surface, but when it is greater than 3/4, the etching Time and cost will also increase.
步骤1203、在凹槽内充满有遮光材料。Step 1203: Fill the groove with light-shielding material.
参见图11,在凹槽21内充满有遮光材料22。遮光材料示例性的包括铬或者黑色有机物。铬或者黑色有机物,可以起到吸收和遮挡照射到其上的光的作用。Referring to FIG. 11, the recess 21 is filled with a light-shielding material 22. The light-shielding material includes chromium or black organic matter. Chromium or black organic matter can absorb and block the light irradiated on it.
步骤1204、将第一透光层形成在在生物特征识别芯片的第一表面。 Step 1204, forming a first light-transmitting layer on the first surface of the biometric identification chip.
参见图12,将第一透光层20形成在在生物特征识别芯片10的第一表面100。可选地,可以将第一透光层20贴合在在生物特征识别芯片10的第一表面100。Referring to FIG. 12, the first light-transmitting layer 20 is formed on the first surface 100 of the biometric identification chip 10. Optionally, the first light-transmitting layer 20 can be attached to the first surface 100 of the biometric recognition chip 10.
可选地,在上述技术方案的基础上,步骤1202在第一透光层的第三表面形成多个凹槽包括:通过刻蚀工艺在在第一透光层的第三表面形成多个凹槽。刻蚀工艺可以是干法刻蚀也可以是湿法刻蚀。Optionally, on the basis of the above technical solution, step 1202 forming a plurality of grooves on the third surface of the first light-transmitting layer includes: forming a plurality of grooves on the third surface of the first light-transmitting layer through an etching process. groove. The etching process may be dry etching or wet etching.
可选地,在上述技术方案的基础上,参见图13,步骤120在生物特征识别芯片的第一表面形成第一透光层之后还包括:Optionally, on the basis of the above technical solution, referring to FIG. 13, step 120 further includes after forming the first light-transmitting layer on the first surface of the biometric recognition chip:
步骤130、在第一透光层的第四表面之上形成棱镜层。 Step 130, forming a prism layer on the fourth surface of the first transparent layer.
参见图14,在第一透光层20的第四表面201之上形成棱镜层30。Referring to FIG. 14, a prism layer 30 is formed on the fourth surface 201 of the first light-transmitting layer 20.
棱镜层30起到改变光的传播方向的作用。The prism layer 30 functions to change the propagation direction of light.
可选地,在上述技术方案的基础上,步骤130在第一透光层的第四表面之上形成棱镜层包括:在第一透光层的第四表面形成多个阵列排布的棱镜,棱镜与感光像素一一对应设置。Optionally, on the basis of the foregoing technical solution, step 130 forming a prism layer on the fourth surface of the first light-transmitting layer includes: forming a plurality of prisms arranged in an array on the fourth surface of the first light-transmitting layer, The prism and the photosensitive pixel are arranged in one-to-one correspondence.
参见图15,在第一透光层20的第四表面201形成多个阵列排布的棱镜31,棱镜31与感光像素11一一对应设置。棱镜31与感光像素11一一对应设置,精准的针对每个感光像素11,改变光的传播方向的作用,提高了光学生物特征识别芯片的识别精度,减少了生产成本,减轻了封装结构的重量。Referring to FIG. 15, a plurality of prisms 31 arranged in an array are formed on the fourth surface 201 of the first light-transmitting layer 20, and the prisms 31 are arranged in a one-to-one correspondence with the photosensitive pixels 11. The prism 31 and the photosensitive pixels 11 are arranged in a one-to-one correspondence, precisely for each photosensitive pixel 11, changing the direction of light propagation, improving the recognition accuracy of the optical biometric recognition chip, reducing the production cost, and reducing the weight of the packaging structure .
可选地,在上述技术方案的基础上,参见图13,步骤130在第一透光层的第四表面之上形成棱镜层之后还包括:Optionally, on the basis of the foregoing technical solution, referring to FIG. 13, step 130 after forming a prism layer on the fourth surface of the first light-transmitting layer further includes:
步骤140、在棱镜层远离第一透光层一侧的表面形成透明盖板。 Step 140, forming a transparent cover plate on the surface of the prism layer on the side away from the first light-transmitting layer.
参见图16,在棱镜层30远离第一透光层20一侧的表面形成透明盖板40。 透明盖板40起到保护棱镜层30的作用。Referring to FIG. 16, a transparent cover plate 40 is formed on the surface of the prism layer 30 away from the first light-transmitting layer 20. The transparent cover plate 40 functions to protect the prism layer 30.
可选地,在上述技术方案的基础上,参见图17,步骤120在生物特征识别芯片的第一表面之上形成第一透光层之前还包括:Optionally, on the basis of the foregoing technical solution, referring to FIG. 17, step 120 before forming the first light-transmitting layer on the first surface of the biometric recognition chip further includes:
步骤1101、在生物特征识别芯片的第一表面之上形成第二透光层。 Step 1101, forming a second light-transmitting layer on the first surface of the biometric identification chip.
以图4为例进行说明,在生物特征识别芯片10的第一表面100之上形成第二透光层50。第二透光层50的光透过率大于或等于92%。第二透光层50的光透过率大于或等于92%,使得光线照射至使用者的生物特征面并经过第一透光层20任意相邻两个凹槽21之间的间隙以及第二透光层50反射至感光像素11上。Taking FIG. 4 as an example for description, a second light-transmitting layer 50 is formed on the first surface 100 of the biometric identification chip 10. The light transmittance of the second light-transmitting layer 50 is greater than or equal to 92%. The light transmittance of the second light-transmitting layer 50 is greater than or equal to 92%, so that the light irradiates the biological feature surface of the user and passes through the gap between any two adjacent grooves 21 of the first light-transmitting layer 20 and the second The light-transmitting layer 50 is reflected on the photosensitive pixel 11.
可选地,在上述技术方案的基础上,步骤120在第二透光层远离生物特征识别芯片的一侧的表面形成第一透光层之前还包括:Optionally, on the basis of the foregoing technical solution, step 120 further includes before forming the first light-transmitting layer on the surface of the second light-transmitting layer on the side far from the biometric recognition chip:
步骤1102、在第二透光层远离生物特征识别芯片的一侧的表面形成滤光层。Step 1102: Form a light filter layer on the surface of the second light-transmitting layer that is away from the biometric identification chip.
以图4为例进行说明,在第二透光层50远离生物特征识别芯片10的一侧的表面形成滤光层60。可选地,在第二透光层50远离生物特征识别芯片10的一侧的表面贴合滤光层60。Taking FIG. 4 as an example for description, a filter layer 60 is formed on the surface of the second light-transmitting layer 50 away from the biometric identification chip 10. Optionally, a filter layer 60 is attached to the surface of the second light-transmitting layer 50 away from the biometric identification chip 10.
可选地,在上述技术方案的基础上,步骤130在第一透光层的第四表面之上形成棱镜层之前还包括:在第一透光层的第四表面形成滤光层。Optionally, on the basis of the foregoing technical solution, step 130 before forming the prism layer on the fourth surface of the first light-transmitting layer further includes: forming a light filter layer on the fourth surface of the first light-transmitting layer.
以图4为例进行说明,在第一透光层20的第四表面201形成滤光层60。可选地,在第一透光层20的第四表面201贴合滤光层60。Taking FIG. 4 as an example for description, a filter layer 60 is formed on the fourth surface 201 of the first light-transmitting layer 20. Optionally, a filter layer 60 is attached to the fourth surface 201 of the first transparent layer 20.
感光像素11可以将特定波段的光转换为电信号,滤光层60仅透过该特定波段的光。The photosensitive pixel 11 can convert light of a specific wavelength band into an electrical signal, and the filter layer 60 only transmits the light of the specific wavelength band.

Claims (11)

  1. 一种生物特征识别芯片的封装结构,包括:A packaging structure of a biometric identification chip, including:
    生物特征识别芯片,所述生物特征识别芯片具有第一表面以及与所述第一表面相对设置的第二表面,所述生物特征识别芯片的第一表面设置有感光区以及包围所述感光区的非感光区,所述感光区设置有多个阵列排布的感光像素,所述非感光区设置有多个焊盘,与所述感光像素电连接;A biometric recognition chip, the biometric recognition chip having a first surface and a second surface disposed opposite to the first surface, and the first surface of the biometric recognition chip is provided with a photosensitive area and surrounding the photosensitive area Non-photosensitive area, the photosensitive area is provided with a plurality of photosensitive pixels arranged in an array, and the non-photosensitive area is provided with a plurality of pads, which are electrically connected to the photosensitive pixels;
    第一透光层,位于所述生物特征识别芯片的第一表面之上,所述第一透光层具有第三表面以及与所述第三表面相对设置的第四表面,所述第三表面为靠近所述生物特征识别芯片的第一表面的表面,所述第一透光层的第三表面设置有多个凹槽,在所述凹槽内充满有遮光材料,任意相邻两个凹槽之间的间隙暴露出一个所述感光像素的部分或全部区域,所述凹槽的深度与所述第一透光层的厚度的比值大于或等于2/3。The first light-transmitting layer is located on the first surface of the biometric recognition chip. The first light-transmitting layer has a third surface and a fourth surface opposite to the third surface. The third surface In order to be close to the surface of the first surface of the biometric recognition chip, the third surface of the first light-transmitting layer is provided with a plurality of grooves, and the grooves are filled with light-shielding material, and any two adjacent grooves The gap between the grooves exposes a part or all of the photosensitive pixel, and the ratio of the depth of the groove to the thickness of the first light-transmitting layer is greater than or equal to 2/3.
  2. 根据权利要求1所述的生物特征识别芯片的封装结构,其中,所述凹槽的深度与所述第一透光层的厚度的比值小于或等于3/4。The biometric identification chip packaging structure according to claim 1, wherein the ratio of the depth of the groove to the thickness of the first light-transmitting layer is less than or equal to 3/4.
  3. 根据权利要求1所述的生物特征识别芯片的封装结构,还包括棱镜层,位于所述第一透光层的第四表面之上。The biometric identification chip packaging structure according to claim 1, further comprising a prism layer located on the fourth surface of the first light-transmitting layer.
  4. 根据权利要求3所述的生物特征识别芯片的封装结构,其中,所述棱镜层包括多个阵列排布的棱镜,所述棱镜与所述感光像素一一对应设置。3. The biometric identification chip packaging structure according to claim 3, wherein the prism layer comprises a plurality of prisms arranged in an array, and the prisms are arranged in a one-to-one correspondence with the photosensitive pixels.
  5. 根据权利要求3所述的生物特征识别芯片的封装结构,还包括透明盖板,位于所述棱镜层远离所述第一透光层一侧的表面。3. The biometric identification chip packaging structure according to claim 3, further comprising a transparent cover plate located on the surface of the prism layer away from the first light-transmitting layer.
  6. 根据权利要求3所述的生物特征识别芯片的封装结构,还包括第二透光层,位于所述生物特征识别芯片和所述第一透光层之间。The biometric identification chip packaging structure according to claim 3, further comprising a second light-transmitting layer located between the biometric identification chip and the first light-transmitting layer.
  7. 根据权利要求6所述的生物特征识别芯片的封装结构,还包括滤光层,位于所述第一透光层和所述第二透光层之间,和/或,位于所述第一透光层和所述棱镜层之间。The biometric identification chip packaging structure according to claim 6, further comprising a filter layer, located between the first light transmitting layer and the second light transmitting layer, and/or, located on the first light transmitting layer Between the optical layer and the prism layer.
  8. 根据权利要求1所述的生物特征识别芯片的封装结构,其中,所述遮光材料包括铬或者黑色有机物。The package structure of the biometric identification chip according to claim 1, wherein the light-shielding material includes chromium or black organic matter.
  9. 根据权利要求1所述的生物特征识别芯片的封装结构,其中,所述第一透光层的光透过率大于或等于92%。The biometric identification chip packaging structure according to claim 1, wherein the light transmittance of the first light-transmitting layer is greater than or equal to 92%.
  10. 根据权利要求6所述的生物特征识别芯片的封装结构,其中,所述第 二透光层的光透过率大于或等于92%。The biometric identification chip packaging structure according to claim 6, wherein the light transmittance of the second light-transmitting layer is greater than or equal to 92%.
  11. 根据权利要求1所述的生物特征识别芯片的封装结构,其中,所述生物特征识别芯片包括光学指纹识别芯片、虹膜识别芯片或者人脸识别芯片中的一种或多种。The biometric identification chip packaging structure according to claim 1, wherein the biometric identification chip comprises one or more of an optical fingerprint identification chip, an iris identification chip, or a face identification chip.
PCT/CN2019/123633 2019-11-28 2019-12-06 Packaging structure for biometric identification chip WO2021103109A1 (en)

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