WO2021088476A1 - Method for improving power capacity of bulk acoustic wave filter, and filtering element - Google Patents

Method for improving power capacity of bulk acoustic wave filter, and filtering element Download PDF

Info

Publication number
WO2021088476A1
WO2021088476A1 PCT/CN2020/111347 CN2020111347W WO2021088476A1 WO 2021088476 A1 WO2021088476 A1 WO 2021088476A1 CN 2020111347 W CN2020111347 W CN 2020111347W WO 2021088476 A1 WO2021088476 A1 WO 2021088476A1
Authority
WO
WIPO (PCT)
Prior art keywords
filter
value
impedance
acoustic wave
bulk acoustic
Prior art date
Application number
PCT/CN2020/111347
Other languages
French (fr)
Chinese (zh)
Inventor
庞慰
徐利军
Original Assignee
天津大学
诺思(天津)微系统有限责任公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 天津大学, 诺思(天津)微系统有限责任公司 filed Critical 天津大学
Publication of WO2021088476A1 publication Critical patent/WO2021088476A1/en

Links

Images

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

The present invention relates to the technical field of filters, in particular to a method for improving the power capacity of a bulk acoustic wave filter and a filtering element. The method comprises the following steps: step S1: increasing the area of resonators in a current filter, making the power density of the resonators reach a preset value, and recording the current value of a port impedance value of the filter; and step S2: in the cases where the current value is less than a specified value, determining an impedance transformation network according to the current value and the specified value, the impedance transformation network being used for being connected in series to an input end and an output end of the filter so as to form a series body, and making the port impedance of the series body reach the specified value. The present invention does not deteriorate the insertion loss of the filter, and improves the power capacity on the premise of ensuring the performance of the bulk acoustic wave filter.

Description

提高体声波滤波器功率容量的方法及滤波元件Method for improving power capacity of bulk acoustic wave filter and filter element 技术领域Technical field
本发明涉及滤波器技术领域,特别地涉及一种提高体声波滤波器功率容量的方法及滤波元件。The present invention relates to the field of filter technology, in particular to a method and filter element for increasing the power capacity of a bulk acoustic wave filter.
背景技术Background technique
体声波滤波器利用压电晶体的压电效应产生谐振,由于谐振由机械波产生,而非电磁波作为谐振来源,机械波的波长比电磁波波长短很多。因此,体声波滤波器及其组成的谐振器体积相对传统的电磁滤波器尺寸大幅度减小。另一方面,由于压电晶体的晶向生长目前能够良好控制,谐振器的损耗极小,品质因数高,能够应对陡峭过渡带和低插入损耗等复杂设计要求。由于体声波滤波器具有的尺寸小、高滚降、低插损等特性,以此为核心的滤波器在通讯系统中得到了广泛的应用。Bulk acoustic wave filters use the piezoelectric effect of piezoelectric crystals to generate resonance. Because resonance is generated by mechanical waves instead of electromagnetic waves as the source of resonance, the wavelength of mechanical waves is much shorter than that of electromagnetic waves. Therefore, the volume of the bulk acoustic wave filter and its resonator is greatly reduced compared with the traditional electromagnetic filter. On the other hand, since the crystal orientation growth of the piezoelectric crystal can be well controlled at present, the loss of the resonator is extremely small, the quality factor is high, and it can cope with complex design requirements such as steep transition band and low insertion loss. Due to the small size, high roll-off, and low insertion loss of the bulk acoustic wave filter, the filter with this as the core has been widely used in communication systems.
体声波滤波器具备上述优点,但其存在功率容量较小的缺点,其能承受的平均功率一般在1W左右。目前,针对体声波滤波器提升其功率容量的方法主要为,拆分谐振器,降低谐振器的密度。如图1所示,谐振器S11、S12及P11均进行了拆分,拆分为两个串联的谐振器,每个谐振器的面积为原来的2倍,这样的拆分理论上使得原来功率密度高的谐振器的功率密度进一步降低,从而提升滤波器的功率容量;但是,如图2所示,单个谐振器A1拆分为两个谐振器B1和B2的连接关系,图中C1为谐振器B1和B2之间的连接部分,这个连接路径会引入额外的损耗,从而恶化滤波器插损,对提升功率容量也是不利的。The bulk acoustic wave filter has the above advantages, but it has the disadvantage of small power capacity, and the average power it can withstand is generally about 1W. At present, the main method for increasing the power capacity of the bulk acoustic wave filter is to split the resonator and reduce the density of the resonator. As shown in Figure 1, the resonators S11, S12, and P11 are all split into two series-connected resonators. The area of each resonator is twice as large as the original. This split theoretically makes the original power The power density of the high-density resonator is further reduced, thereby increasing the power capacity of the filter; however, as shown in Figure 2, a single resonator A1 is split into the connection relationship of two resonators B1 and B2, and C1 is the resonance in the figure. The connection part between the B1 and B2, this connection path will introduce additional loss, thereby deteriorating the filter insertion loss, and it is also unfavorable for increasing the power capacity.
因此,在不恶化体声波滤波器插损的前提下,如何提高体声波滤波器的功率容量,仍是待解决的技术问题。Therefore, how to increase the power capacity of the BAW filter without deteriorating the insertion loss of the BAW filter is still a technical problem to be solved.
发明内容Summary of the invention
有鉴于此,本发明的主要目的是提供一种提高体声波滤波器功率容量的方法及滤波元件,在不恶化体声波滤波器性能的前提下,提高其功率容量。In view of this, the main purpose of the present invention is to provide a method and filter element for increasing the power capacity of a bulk acoustic wave filter, so as to increase the power capacity of the bulk acoustic wave filter without deteriorating the performance of the bulk acoustic wave filter.
为实现上述目的,根据本发明的一个方面,提供了一种提高体声波滤波器的功率容量的方法,包括如下步骤:步骤S1:增大当前滤波器中的各个谐振器的面积;使这些谐振器的功率密度达到预设值,并且记录所述滤波器端口阻抗值的当前值;步骤S2:在当前值小于指定值的情况下,根据所述当前值与所述指定值确定阻抗变换网络,该阻抗变换网络用于串联在滤波器的输入端和输出端从而形成串联体,并使该串联体的端口阻抗达到所述指定值。In order to achieve the above objective, according to one aspect of the present invention, a method for increasing the power capacity of a bulk acoustic wave filter is provided, which includes the following steps: Step S1: Increase the area of each resonator in the current filter; The power density of the filter reaches the preset value, and the current value of the impedance value of the filter port is recorded; Step S2: In the case that the current value is less than the specified value, determine the impedance transformation network according to the current value and the specified value, The impedance transformation network is used to connect the input end and the output end of the filter in series to form a series body, and make the port impedance of the series body reach the specified value.
可选地,所述方法还包括:在当前值等于指定值的情况下,将步骤S1中得到的滤波器作为提高体声波滤波器的功率容量的结果。Optionally, the method further includes: when the current value is equal to a specified value, using the filter obtained in step S1 as a result of increasing the power capacity of the bulk acoustic wave filter.
可选地,所述增大当前滤波器中的各个谐振器的面积的步骤包括:根据滤波器端口阻抗值的当前设定值调整当前所述滤波器中的各个谐振器的面积,该当前设定值小于所述指定值。Optionally, the step of increasing the area of each resonator in the current filter includes: adjusting the area of each resonator in the current filter according to the current setting value of the filter port impedance value, and the current setting The fixed value is less than the specified value.
可选地,所述阻抗变换网络包含变压器,或者包含由电感及电容构成的阻抗电路。Optionally, the impedance transformation network includes a transformer, or includes an impedance circuit composed of an inductor and a capacitor.
本发明还提供一种提高体声波滤波器的功率容量的方法,包括如下步骤:步骤S1:多个并联的滤波器中,增大当前每个滤波器中的各个谐振器的面积,使这些谐振器的功率密度达到预设值,并且记录所述滤波器端口阻抗值的当前值;步骤S2:在当前值小于指定值的情况下,根据所述当前值与所述指定值确定阻抗变换网络,该阻抗变换网络用于串联在滤波器的输入端和输出端从而成串联体,并使该串联体的端口阻抗达到所述指定值。The present invention also provides a method for increasing the power capacity of a bulk acoustic wave filter, which includes the following steps: Step S1: Among a plurality of filters connected in parallel, the area of each resonator in each current filter is increased to make these resonators The power density of the filter reaches the preset value, and the current value of the impedance value of the filter port is recorded; Step S2: In the case that the current value is less than the specified value, determine the impedance transformation network according to the current value and the specified value, The impedance transformation network is used to connect the input end and the output end of the filter in series to form a series body, and make the port impedance of the series body reach the specified value.
可选地,所述方法还包括:在当前值等于指定值的情况下,将步骤S1中得到的滤波器作为提高体声波滤波器的功率容量的结果。Optionally, the method further includes: when the current value is equal to a specified value, using the filter obtained in step S1 as a result of increasing the power capacity of the bulk acoustic wave filter.
可选地,所述增大当前滤波器中的各个谐振器的面积的步骤包括:根据滤波器端口阻抗值的当前设定值调整当前所述滤波器中的各个谐振器的面积,该当前设定值小于所述指定值。Optionally, the step of increasing the area of each resonator in the current filter includes: adjusting the area of each resonator in the current filter according to the current setting value of the filter port impedance value, and the current setting The fixed value is less than the specified value.
可选地,所述阻抗变换网络包含变压器,或者包含由电感及电容构成的阻抗电路。Optionally, the impedance transformation network includes a transformer, or includes an impedance circuit composed of an inductor and a capacitor.
可选地,所述步骤S1中,多个并联的滤波器中,相邻的滤波器有限定宽度的间隔。Optionally, in the step S1, among the multiple filters connected in parallel, adjacent filters have an interval of a limited width.
根据本发明的另一发面,提供一种滤波元件,包括基板,所述基板上设有1个体声波滤波器,所述体声波滤波器的输入端和输出端分别串联阻抗变换网络。According to another aspect of the present invention, a filter element is provided, which includes a substrate on which an individual acoustic wave filter is provided, and the input end and output end of the bulk acoustic wave filter are respectively connected in series with impedance transformation networks.
可选地,所述阻抗变换网络包含变压器,或者包含由电感及电容构成的阻抗电路。Optionally, the impedance transformation network includes a transformer, or includes an impedance circuit composed of an inductor and a capacitor.
本发明还提供一种滤波元件,包括基板,所述基板上设有多个并联的体声波滤波器,所述多个并联的体声波滤波器的输入端和输出端分别串联阻抗变换网络。The present invention also provides a filter element, including a substrate on which a plurality of parallel BAW filters are arranged, and the input and output ends of the plurality of parallel BAW filters are respectively connected in series with impedance transformation networks.
可选地,所述阻抗变换网络包含变压器,或者包含由电感及电容构成的阻抗电路。Optionally, the impedance transformation network includes a transformer, or includes an impedance circuit composed of an inductor and a capacitor.
可选地,相邻的所述体声波滤波器之间在所述基板上具有限定宽度的间隔。Optionally, there is a space with a defined width on the substrate between the adjacent BAW filters.
根据本发明的技术方案,通过增大谐振器的面积,减小其功率密度,以提高滤波器的功率容量;其中,上述操作会使滤波器的端口阻抗减小,为了使体声波滤波器端口阻抗能够达到指定值,在其输入/输出端分别串联阻抗变换网络形成串联体,使串联体端口阻抗达到指定值。According to the technical solution of the present invention, the power density of the filter is increased by increasing the area of the resonator and reducing its power density; wherein, the above operation will reduce the port impedance of the filter, in order to make the port of the bulk acoustic wave filter The impedance can reach the specified value, and the impedance transformation network is connected in series with the input/output terminals to form a series body, so that the port impedance of the series body can reach the specified value.
该提高体声波滤波器功率容量的方法及滤波元件,无需对谐振器进行拆分,进而不会恶化滤波器的插损,在保证体声波滤波器性能的前提下,提高了功率容量。The method and filter element for increasing the power capacity of the bulk acoustic wave filter do not need to split the resonator, thereby not deteriorating the insertion loss of the filter, and improving the power capacity under the premise of ensuring the performance of the bulk acoustic wave filter.
附图说明Description of the drawings
为了说明而非限制的目的,现在将根据本发明的优选实施例、特别是参考附图来描述本发明,其中:For the purpose of illustration and not limitation, the present invention will now be described according to preferred embodiments of the present invention, particularly with reference to the accompanying drawings, in which:
图1是现有技术中拆分谐振器提高功率容量的滤波器的电路图;FIG. 1 is a circuit diagram of a filter that splits a resonator to increase power capacity in the prior art;
图2是现有技术中拆分谐振器的示意图;Figure 2 is a schematic diagram of a split resonator in the prior art;
图3是本发明实施例一提供的方法的流程框图;FIG. 3 is a flowchart of a method provided in Embodiment 1 of the present invention;
图4是本发明实施例三提供的滤波元件的电路图;Fig. 4 is a circuit diagram of a filter element provided in the third embodiment of the present invention;
图5A-图5F是本发明实施例三提供的阻抗变化网络的电路图;5A-5F are circuit diagrams of the impedance change network provided by the third embodiment of the present invention;
图6是本发明实施例四提供的滤波元件的电路图;Fig. 6 is a circuit diagram of a filter element provided in the fourth embodiment of the present invention;
图7是本发明实施例四提供的滤波元件的电路图;Fig. 7 is a circuit diagram of a filter element provided in the fourth embodiment of the present invention;
图8是两个体声波滤波器并联时的组装结构示意图;FIG. 8 is a schematic diagram of the assembled structure when two bulk acoustic wave filters are connected in parallel;
图9是四个体声波滤波器并联时的组装结构示意图。Fig. 9 is a schematic diagram of the assembled structure when four bulk acoustic wave filters are connected in parallel.
具体实施方式Detailed ways
实施例一Example one
图3是本发明实施例提供的提高体声波滤波器的功率容量的方法的流程框图。该方法可采用计算机软件来实现,即应用计算机进行辅助设计。如图3所示,该方法包括如下步骤:Fig. 3 is a flowchart of a method for increasing the power capacity of a bulk acoustic wave filter provided by an embodiment of the present invention. This method can be realized by using computer software, that is, using a computer for aided design. As shown in Figure 3, the method includes the following steps:
步骤S1:增大当前滤波器中的各个谐振器的面积;使这些谐振器 的功率密度达到预设值,并且记录所述滤波器端口阻抗值的当前值;Step S1: Increase the area of each resonator in the current filter; make the power density of these resonators reach a preset value, and record the current value of the filter port impedance value;
步骤S2:在当前值小于指定值的情况下,根据所述当前值与所述指定值确定阻抗变换网络,该阻抗变换网络用于串联在滤波器的输入端和输出端从而形成串联体,并使该串联体的端口阻抗达到所述指定值。Step S2: In the case that the current value is less than the specified value, determine an impedance transformation network according to the current value and the specified value, and the impedance transformation network is used to connect the input end and the output end of the filter in series to form a series body, and Make the port impedance of the series body reach the specified value.
以下对于上述方法再作进一步说明。The above method will be further explained below.
根据本实施例提供的方法,通过减小谐振器的功率密度来提高滤波器的功率容量。具体操作时,将滤波器中的各谐振器的面积增大,输入功率不变的情况下,该滤波器的功率密度即得以减小。但此时滤波器端口阻抗也会相应减小从而可能无法达到某些指定值,例如作为行业内常用的50欧姆。对于这种情况,在本发明实施方式中,向滤波器的输入端和输出端分别连接阻抗变换网络,使器件整体,即滤波器及其两端的阻抗变换网络,的端口阻抗得以提高到至指定值。这里的阻抗变换网络可以基于变压器实现,也可以是采用电感及电容构成阻抗电路。如,采用四分之一传输线或电压比为N:1的变压器或由LC实现的π型阻抗变换网络、T型阻抗变换网络、L型阻抗变换网络等。According to the method provided in this embodiment, the power capacity of the filter is improved by reducing the power density of the resonator. During specific operation, the area of each resonator in the filter is increased, and the power density of the filter is reduced when the input power remains unchanged. But at this time, the filter port impedance will also be correspondingly reduced and may not reach certain specified values, such as 50 ohms commonly used in the industry. In this case, in the embodiment of the present invention, the input end and the output end of the filter are respectively connected to the impedance transformation network, so that the port impedance of the entire device, that is, the filter and the impedance transformation network at both ends, can be increased to the specified value. value. The impedance transformation network here can be implemented based on a transformer, or an impedance circuit can be formed by using inductors and capacitors. For example, a quarter transmission line or a transformer with a voltage ratio of N:1 or a π-type impedance transformation network, a T-type impedance transformation network, and an L-type impedance transformation network implemented by LC are used.
在计算机辅助设计时,应用现有的计算机设计工具,可以先指定一个滤波器端口阻抗,根据该端口阻抗得出滤波器中各谐振器的面积。根据该方式,若需增大滤波器中各谐振器的面积,可指定一个较小的滤波器端口阻抗,可以上述指定值为基础,指定滤波器端口阻抗为该指定值的例如60%,那么计算得出的滤波器中各谐振器的面积就会大于端口阻抗为该指定值的滤波器中的各谐振器的面积,也就是实现了将滤波器中的各谐振器的面积增大,此时滤波器的功率密度得以减小,功率容量提高。如果此时功率容量仍不满足要求,可以继续增大滤波器中各谐振器的面积,即继续指定一个更小的滤波器端口阻抗值,从而计算出更大的谐振器面积,直至功率容量满足要求为止。功率容量满足要求之后,滤波器端口阻抗已经不满足要求,此时再如上所述,设计合适的阻抗变换网络加以纠正。In computer-aided design, using existing computer design tools, you can first specify a filter port impedance, and get the area of each resonator in the filter based on the port impedance. According to this method, if the area of each resonator in the filter needs to be increased, a smaller filter port impedance can be specified. Based on the above specified value, the specified filter port impedance is for example 60% of the specified value, then The calculated area of each resonator in the filter will be larger than the area of each resonator in the filter whose port impedance is the specified value, which means that the area of each resonator in the filter is increased. When the power density of the filter is reduced, the power capacity is improved. If the power capacity still does not meet the requirements at this time, you can continue to increase the area of each resonator in the filter, that is, continue to specify a smaller filter port impedance value, so as to calculate a larger resonator area until the power capacity meets So far. After the power capacity meets the requirements, the filter port impedance has not met the requirements. At this time, as described above, design a suitable impedance transformation network to correct it.
实施例二Example two
本发明实施例提供一种提高体声波滤波器的功率容量的方法,包括如下步骤:The embodiment of the present invention provides a method for increasing the power capacity of a bulk acoustic wave filter, which includes the following steps:
步骤S1:多个并联的滤波器中,增大当前每个滤波器中的各个谐振器的面积,使这些谐振器的功率密度达到预设值,并且记录所述滤波器端口阻抗值的当前值;Step S1: Among multiple filters connected in parallel, increase the area of each resonator in each filter so that the power density of these resonators reaches a preset value, and record the current value of the filter port impedance value ;
步骤S2:在当前值小于指定值的情况下,根据所述当前值与所述指定值确定阻抗变换网络,该阻抗变换网络用于串联在滤波器的输入端和输出端从而成串联体,并使该串联体的端口阻抗达到所述指定值。Step S2: When the current value is less than the specified value, determine an impedance transformation network according to the current value and the specified value. The impedance transformation network is used to connect the input end and the output end of the filter in series to form a series body, and Make the port impedance of the series body reach the specified value.
本实施例中,包括多个并联的滤波器,在调整谐振器的面积时,需对每个滤波器中的各个谐振器的面积进行调整,各个滤波器的当前设定值相同。采用此方式,可以将输入能量一分为N,N为并联的滤波器的数量,其中,结构方面相邻的滤波器之间具有限定宽度的间隔,间隔越大对滤波器性能影响越小;多个滤波器采用并联的形式在每一路滤波器达到极限功率的情况下,可以把整体网络的功率容量提升N倍,此方式更利于提高滤波器的功率容量,可满足5G基站的建设需求。In this embodiment, multiple parallel filters are included. When adjusting the area of the resonator, the area of each resonator in each filter needs to be adjusted, and the current setting value of each filter is the same. In this way, the input energy can be divided into N, where N is the number of filters connected in parallel. In terms of structure, adjacent filters have an interval of a limited width, and the larger the interval, the smaller the impact on the performance of the filter; Multiple filters are connected in parallel. When each filter reaches the limit power, the power capacity of the overall network can be increased by N times. This method is more conducive to increasing the power capacity of the filter and can meet the construction requirements of 5G base stations.
实施例三Example three
如图4所示,本实施例提供一种滤波元件,包括基板,基板上设有1个体声波滤波器41,以及第一阻抗变换网络42和第二阻抗变换网络43,体声波滤波器41的输入端与第一阻抗变换网络42串联、输出端与第二阻抗变换网络43串联。As shown in FIG. 4, this embodiment provides a filter element, including a substrate, on which an individual acoustic wave filter 41, a first impedance transformation network 42 and a second impedance transformation network 43, and the bulk acoustic wave filter 41 are provided The input terminal is connected in series with the first impedance transformation network 42, and the output terminal is connected in series with the second impedance transformation network 43.
体声波滤波器41与现有的滤波器结构相同,为非拆分结构,包括一条串联支路和3条并联支路,串联支路由谐振器S21、S22、S23、S24依次连接组成,3个并联支路分别一端接于相邻串联谐振器之间,另一端接地,其中,第1并联支路由谐振器P21和电感L21组成,第2并联支路由谐振器P22和电感L22组成,第3并联支路由谐振器P31 和电感L31组成,并联谐振器P21、P22和P23需要加质量负载,使得其谐振频率都低于串联谐振器的谐振频率。The bulk acoustic wave filter 41 has the same structure as the existing filter. It is a non-split structure, including one series branch and three parallel branches. The series branch is composed of resonators S21, S22, S23, and S24 connected in sequence. One end of the parallel branch is connected between adjacent series resonators, and the other end is grounded. Among them, the first parallel branch is composed of resonator P21 and inductor L21, the second parallel branch is composed of resonator P22 and inductor L22, and the third parallel branch is composed of resonator P22 and inductor L22. The branch is composed of a resonator P31 and an inductor L31. The parallel resonators P21, P22, and P23 need to be loaded with a mass load so that their resonant frequencies are all lower than the resonant frequencies of the series resonators.
体声波滤波器41的输入端和输出端分别连接阻抗变换网络,由于体声波滤波器41中的谐振器的面积增大,降低了谐振器的删除功率密度,提高了其功率容量,但是,可能存在的一种情况是体声波滤波器41输入端和输出端的端口阻抗降低,因此,需要串联端口阻抗网络,对端口阻抗进行变换,其中,阻抗变换网络的阻抗值根据实施例一的方法计算得出。还可能存在的一种情况是体声波滤波器41输入端和输出端的端口阻抗值不变,此时,输入端和输出端无阻抗变换网络。The input and output ends of the BAW filter 41 are respectively connected to the impedance transformation network. As the area of the resonator in the BAW filter 41 increases, the deletion power density of the resonator is reduced, and its power capacity is increased. However, it is possible There is a situation in which the port impedances of the input and output ends of the bulk acoustic wave filter 41 are reduced. Therefore, it is necessary to connect a port impedance network in series to transform the port impedance, wherein the impedance value of the impedance transformation network is calculated according to the method of the first embodiment. Out. There may also be a situation where the port impedance values of the input end and the output end of the bulk acoustic wave filter 41 do not change. At this time, there is no impedance transformation network at the input and output ends.
以体声波滤波器41的端口阻抗值的指定值为50欧姆为例,体声波滤波器41的端口阻抗值的当前值小于50欧姆时,端口阻抗值减小,增大了谐振器的面积,使其功率密度减小,从而提高了功率容量。而体声波滤波器41在使用时还需要满足端口阻抗值为50欧姆的要求,因此,利用在体声波滤波器41输入端和输出端设置的第一阻抗变换网络42和第二阻抗变换网络43提升端口阻抗,将其由小于50欧姆变换为50欧姆。其中,阻抗变换网络为包含变压器,或者包含由电感及电容构成的阻抗电路。例如,可以采用如图5A所示的四分之一传输线,或者如图5B所示的电压比为N:1的变压器;或者如图5C和5D所示由LC实现的π型阻抗变换网络;或者如图5E和5F所示的由LC实现的T型阻抗变换网络;或者为由LC实现的L型阻抗变换网络(图中未示出)等。Taking the specified value of the port impedance value of the bulk acoustic wave filter 41 as 50 ohms as an example, when the current value of the port impedance value of the bulk acoustic wave filter 41 is less than 50 ohms, the port impedance value decreases, increasing the area of the resonator. The power density is reduced, thereby increasing the power capacity. The bulk acoustic wave filter 41 also needs to meet the requirement of a port impedance of 50 ohms when in use. Therefore, the first impedance transformation network 42 and the second impedance transformation network 43 provided at the input and output ends of the bulk acoustic wave filter 41 are used. Increase the port impedance and transform it from less than 50 ohms to 50 ohms. Among them, the impedance transformation network includes a transformer, or an impedance circuit composed of inductors and capacitors. For example, it is possible to use a quarter transmission line as shown in FIG. 5A, or a transformer with a voltage ratio of N:1 as shown in FIG. 5B; or a π-type impedance transformation network implemented by LC as shown in FIGS. 5C and 5D; Or the T-type impedance transformation network implemented by LC as shown in FIGS. 5E and 5F; or the L-type impedance transformation network implemented by LC (not shown in the figure), etc.
实施例四Example four
如图6所示,本实施例提供另一种滤波元件,包括基板,基板上设有滤波器组61,滤波器组61为2个并联的体声波滤波器,分别为体声波滤波器611和体声波滤波器612,以及分别串联在滤波器组61的输入端和输出端的第三阻抗变换网络62和第四阻抗变换网络63。在结构方面与实施例三相比,体声波滤波器变为2个,且并联设置;而阻 抗变换网络的阻抗值根据实施例二的方法计算得出。采用此方式,可以将输入能量一份为2,在每一路滤波器达到极限功率的情况下,可以把整体网络的功率容量成倍提升,图6中两个体声波滤波器并联可将功率容量提升2倍。As shown in FIG. 6, this embodiment provides another filter element, including a substrate, and a filter group 61 is provided on the substrate. The filter group 61 is two parallel-connected bulk acoustic wave filters, namely the bulk acoustic wave filter 611 and A bulk acoustic wave filter 612, and a third impedance transformation network 62 and a fourth impedance transformation network 63 connected in series to the input end and the output end of the filter bank 61, respectively. Compared with the third embodiment in terms of structure, the bulk acoustic wave filter becomes two, and they are arranged in parallel; and the impedance value of the impedance transformation network is calculated according to the method of the second embodiment. In this way, the input energy can be divided into 2. When each filter reaches the limit power, the power capacity of the overall network can be doubled. The parallel connection of two BAW filters in Figure 6 can increase the power capacity. 2 times.
如图7所示,基板上设有滤波器组71包括N个并联的体声波滤波器,分别为体声波滤波器711、体声波滤波器712…体声波滤波器71N,滤波器组71的输入端和输出端分别串联第五阻抗变换网络72和第六阻抗变换网络73;其中,与实施例三中的结构相比,N个体声波滤波器并联,可将功率容量提升N倍。As shown in Fig. 7, a filter bank 71 is provided on the substrate and includes N parallel BAW filters, namely BAW filter 711, BAW filter 712... BAW filter 71N, the input of filter bank 71 The fifth impedance transformation network 72 and the sixth impedance transformation network 73 are respectively connected in series with the output terminal and the output terminal; wherein, compared with the structure in the third embodiment, N individual acoustic wave filters are connected in parallel, which can increase the power capacity by N times.
其中,当设置多个并联的体声波滤波器时,在结构方面,需要尽可能增大各体声波滤波器之间的距离,减少彼此之间电磁和热耦合。Among them, when multiple parallel BAW filters are provided, in terms of structure, it is necessary to increase the distance between the BAW filters as much as possible to reduce the electromagnetic and thermal coupling between each other.
如图8所示,包括体声波滤波器611和体声波滤波器612,两颗滤波器611和612平行焊接在基板610上,基板610为多层基板,其介质材料可以为陶瓷或者环氧树脂,为了提高散热能力,优先选用陶瓷基板;另外,基板610每层尽可能的铺面积较大的金属,提高基板610水平方向散热能力,并且每层金属用过孔628垂直连接,提升垂直方向的散热能力。两颗体声波滤波器611和612的正下方621、631为金属层,通过过孔628连接到底层地,两颗体声波滤波器通过焊接固定在基板的金属层621、631上。体声波滤波器611的输入端通过键合线625和金属焊盘622连接,并通过传输线641、626连接到基板输入端627,体声波滤波器611的输出端通过键合线624和金属焊盘623连接,并通过传输线642、636连接到基板输出端637。同样,体声波滤波器612的输入端通过键合线634和金属焊盘632连接,并通过传输线643、626连接到基板输入端627,体声波滤波器612的输出端通过键合线635和金属焊盘633连接,并通过传输线644、636连接到基板输出端637。需要说明的是传输线641、642、643、644、626和636可以用微带线或者带状线实现,并且传输线641和643等长,传输线642和644等长。As shown in FIG. 8, it includes a bulk acoustic wave filter 611 and a bulk acoustic wave filter 612. Two filters 611 and 612 are soldered in parallel on a substrate 610. The substrate 610 is a multilayer substrate, and the dielectric material can be ceramic or epoxy resin. In order to improve the heat dissipation capacity, ceramic substrates are preferred; in addition, each layer of the substrate 610 should be covered with a larger metal area to improve the horizontal heat dissipation capacity of the substrate 610, and each layer of metal is connected vertically with vias 628 to improve the vertical direction. Heat dissipation capacity. 621 and 631 directly below the two BAW filters 611 and 612 are metal layers, which are connected to the ground through a via 628, and the two BAW filters are fixed on the metal layers 621 and 631 of the substrate by welding. The input end of the bulk acoustic wave filter 611 is connected through the bonding wire 625 and the metal pad 622, and is connected to the substrate input end 627 through the transmission lines 641 and 626, and the output end of the bulk acoustic wave filter 611 is connected through the bonding wire 624 and the metal pad. 623 is connected and connected to the substrate output terminal 637 through transmission lines 642 and 636. Similarly, the input end of the bulk acoustic wave filter 612 is connected through a bonding wire 634 and the metal pad 632, and is connected to the substrate input end 627 through the transmission lines 643 and 626, and the output end of the bulk acoustic wave filter 612 is connected through a bonding wire 635 and the metal pad. The pad 633 is connected, and is connected to the substrate output terminal 637 through the transmission lines 644 and 636. It should be noted that the transmission lines 641, 642, 643, 644, 626, and 636 can be implemented by microstrip lines or strip lines, and the transmission lines 641 and 643 are the same length, and the transmission lines 642 and 644 are the same length.
如图9所示,N个体声波滤波器并联时(以4颗体声波滤波器为例),4颗体声波滤波器711、712、713和714焊接在基板710的四个角上,基板710为多层基板,其介质材料可以为陶瓷或者环氧树脂,为了提高散热能力,优先选用陶瓷基板,另外,基板710每层尽可能的铺面积比较大的金属,提高基板水平方向散热能力,并且每层金属用过孔720垂直连接,提升垂直方向的散热能力。4颗体声波滤波器711、712、713和714的正下方721、731、741和751为金属层,通过过孔720连接到底层地,这4颗体声波滤波器通过焊接固定在基板的表层金属721、731、741和751上。体声波滤波器711、713的输入端分别通过键合线722、742和传输线724、744的一端焊盘连接,传输线724、744的另一端连接到传输线761的一端。体声波滤波器712、714的输入端分别通过键合线732、752和传输线734、754的一端焊盘连接,传输线734、754的另一端连接到传输线761的另一端,从传输线761中间引出一条传输线762到基板输入端765。同样的,体声波滤波器711、713的输出端分别通过键合线723、743和传输线725、745的一端焊盘连接,传输线725、745的另一端连接到传输线763的一端,体声波滤波器712、714的输出端分别通过键合线733、753和传输线735、755的一端焊盘连接,传输线735、755的另一端连接到传输线763的另一端,从传输线763中间引出一条传输线764到基板输出端766。需要说明的是本实施例所用的传输线可以用微带线或者带状线实现,并且传输线724、734、744和754的长度相等,传输线725、735、745和755的长度相等,另外,如图9所示,传输线761和745会有部分线交叠,为了减少他们之间的电磁耦合,传输线745的部分走线通过过孔720转到另外一层走线,另外在这两层走线之间添加一个屏蔽层767,起到电磁隔离作用,同样传输线763和734会有部分线交叠,为了减少他们之间的电磁耦合,传输线734的部分走线通过过孔720转到另外一层走线,另外在这两层走线之间添加一个屏蔽层768,起到电磁隔离作用。As shown in Figure 9, when N individual acoustic wave filters are connected in parallel (take 4 BAW filters as an example), 4 BAW filters 711, 712, 713, and 714 are welded on the four corners of the base plate 710. The base plate 710 It is a multi-layer substrate, and its dielectric material can be ceramic or epoxy resin. In order to improve the heat dissipation capacity, the ceramic substrate is preferred. In addition, each layer of the substrate 710 should be covered with a relatively large metal area to improve the horizontal heat dissipation capacity of the substrate, and Each layer of metal is connected vertically with vias 720 to improve the heat dissipation capacity in the vertical direction. 721, 731, 741 and 751 directly below the 4 BAW filters 711, 712, 713 and 714 are metal layers, which are connected to the bottom ground through vias 720. The 4 BAW filters are fixed on the surface of the substrate by welding. On metal 721, 731, 741 and 751. The input ends of the bulk acoustic wave filters 711 and 713 are respectively connected through bonding wires 722 and 742 and one end of the transmission lines 724 and 744 through pads, and the other end of the transmission lines 724 and 744 is connected to one end of the transmission line 761. The input ends of the bulk acoustic wave filters 712 and 714 are connected through bonding wires 732 and 752 and one end of the transmission lines 734 and 754, respectively. The other ends of the transmission lines 734 and 754 are connected to the other end of the transmission line 761, and one is drawn from the middle of the transmission line 761. The transmission line 762 to the substrate input terminal 765. Similarly, the output ends of the BAW filters 711 and 713 are connected through bonding wires 723 and 743 and one end of the transmission lines 725 and 745, respectively. The other ends of the transmission lines 725 and 745 are connected to one end of the transmission line 763. The output terminals of 712 and 714 are respectively connected by bonding wires 733, 753 and one end of the transmission lines 735, 755 with pads. The other end of the transmission lines 735 and 755 is connected to the other end of the transmission line 763. A transmission line 764 is drawn from the middle of the transmission line 763 to the substrate. The output terminal 766. It should be noted that the transmission line used in this embodiment can be realized by a microstrip line or a strip line, and the lengths of the transmission lines 724, 734, 744, and 754 are equal, and the lengths of the transmission lines 725, 735, 745, and 755 are equal. In addition, as shown in the figure As shown in 9, transmission lines 761 and 745 will have some overlapping lines. In order to reduce the electromagnetic coupling between them, part of the transmission line 745 is transferred to another layer of wiring through the via 720. In addition, the wiring of the two layers is Add a shielding layer 767 between them to achieve electromagnetic isolation. Similarly, transmission lines 763 and 734 will have some overlapping lines. In order to reduce the electromagnetic coupling between them, part of the transmission line 734 is transferred to another layer through the via 720. In addition, a shielding layer 768 is added between the two layers of wiring, which plays a role of electromagnetic isolation.
本实施例中的滤波元件,通过并联设置体声波滤波器,更利于提高体声波滤波器的功率容量,可满足5G基站的建设需求。The filter element in this embodiment is more conducive to increasing the power capacity of the bulk acoustic wave filter by arranging the bulk acoustic wave filter in parallel, which can meet the construction requirements of 5G base stations.
上述具体实施方式,并不构成对本发明保护范围的限制。本领域技术人员应该明白的是,取决于设计要求和其他因素,可以发生各种各样的修改、组合、子组合和替代。任何在本发明的精神和原则之内所作的修改、等同替换和改进等,均应包含在本发明保护范围之内。The foregoing specific implementations do not constitute a limitation on the protection scope of the present invention. Those skilled in the art should understand that, depending on design requirements and other factors, various modifications, combinations, sub-combinations, and substitutions can occur. Any modification, equivalent replacement and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (14)

  1. 一种提高体声波滤波器的功率容量的方法,其特征在于,包括如下步骤:A method for increasing the power capacity of a bulk acoustic wave filter is characterized in that it includes the following steps:
    步骤S1:增大当前滤波器中的各个谐振器的面积;使这些谐振器的功率密度达到预设值,并且记录所述滤波器端口阻抗值的当前值;Step S1: Increase the area of each resonator in the current filter; make the power density of these resonators reach a preset value, and record the current value of the filter port impedance value;
    步骤S2:在当前值小于指定值的情况下,根据所述当前值与所述指定值确定阻抗变换网络,该阻抗变换网络用于串联在滤波器的输入端和输出端从而形成串联体,并使该串联体的端口阻抗达到所述指定值。Step S2: In the case that the current value is less than the specified value, determine an impedance transformation network according to the current value and the specified value, and the impedance transformation network is used to connect the input end and the output end of the filter in series to form a series body, and Make the port impedance of the series body reach the specified value.
  2. 根据权利要求1所述的方法,其特征在于,所述方法还包括:在当前值等于所述指定值的情况下,将步骤S1中得到的滤波器作为提高体声波滤波器的功率容量的结果。The method according to claim 1, characterized in that the method further comprises: when the current value is equal to the specified value, using the filter obtained in step S1 as a result of increasing the power capacity of the bulk acoustic wave filter .
  3. 根据权利要求1所述的方法,其特征在于,所述增大当前滤波器中的各个谐振器的面积的步骤包括:根据滤波器端口阻抗值的当前设定值调整当前所述滤波器中的各个谐振器的面积,该当前设定值小于所述指定值。The method according to claim 1, wherein the step of increasing the area of each resonator in the current filter comprises: adjusting the current filter in the filter according to the current set value of the filter port impedance value The area of each resonator, the current set value is less than the specified value.
  4. 根据权利要求1所述的方法,其特征在于,所述阻抗变换网络包含变压器,或者包含由电感及电容构成的阻抗电路。The method according to claim 1, wherein the impedance transformation network includes a transformer, or an impedance circuit composed of an inductor and a capacitor.
  5. 一种提高体声波滤波器的功率容量的方法,其特征在于,包括如下步骤:A method for increasing the power capacity of a bulk acoustic wave filter is characterized in that it includes the following steps:
    步骤S1:多个并联的滤波器中,增大当前每个滤波器中的各个谐振器的面积,使这些谐振器的功率密度达到预设值,并且记录所述滤波器端口阻抗值的当前值;Step S1: Among multiple filters connected in parallel, increase the area of each resonator in each filter so that the power density of these resonators reaches a preset value, and record the current value of the filter port impedance value ;
    步骤S2:在当前值小于指定值的情况下,根据所述当前值与所述指定值确定阻抗变换网络,该阻抗变换网络用于串联在滤波器的输入 端和输出端从而成串联体,并使该串联体的端口阻抗达到所述指定值。Step S2: When the current value is less than the specified value, determine an impedance transformation network according to the current value and the specified value. The impedance transformation network is used to connect the input end and the output end of the filter in series to form a series body, and Make the port impedance of the series body reach the specified value.
  6. 根据权利要求5所述的方法,其特征在于,所述方法还包括:在当前值等于指定值的情况下,将步骤S1中得到的滤波器作为提高体声波滤波器的功率容量的结果。The method according to claim 5, wherein the method further comprises: when the current value is equal to the specified value, using the filter obtained in step S1 as a result of increasing the power capacity of the bulk acoustic wave filter.
  7. 根据权利要求5所述的方法,其特征在于,所述增大当前滤波器中的各个谐振器的面积的步骤包括:根据滤波器端口阻抗值的当前设定值调整当前所述滤波器中的各个谐振器的面积,该当前设定值小于所述指定值。The method according to claim 5, wherein the step of increasing the area of each resonator in the current filter comprises: adjusting the current filter in the filter according to the current set value of the filter port impedance value The area of each resonator, the current set value is less than the specified value.
  8. 根据权利要求5所述的方法,其特征在于,所述阻抗变换网络包含变压器,或者包含由电感及电容构成的阻抗电路。The method according to claim 5, wherein the impedance transformation network includes a transformer, or an impedance circuit composed of an inductor and a capacitor.
  9. 根据权利要求5所述的方法,其特征在于,所述步骤S1中,多个并联的滤波器中,相邻的滤波器有限定宽度的间隔。The method according to claim 5, wherein, in the step S1, among the multiple filters connected in parallel, adjacent filters have an interval of a limited width.
  10. 一种滤波元件,其特征在于,包括基板,所述基板上设有1个体声波滤波器,所述体声波滤波器的输入端和输出端分别串联阻抗变换网络。A filter element is characterized by comprising a substrate, an individual acoustic wave filter is arranged on the substrate, and the input end and the output end of the bulk acoustic wave filter are respectively connected in series with an impedance transformation network.
  11. 根据权利要求10所述的滤波元件,其特征在于,所述阻抗变换网络包含变压器,或者包含由电感及电容构成的阻抗电路。The filter element according to claim 10, wherein the impedance transformation network includes a transformer, or an impedance circuit composed of an inductor and a capacitor.
  12. 一种滤波元件,其特征在于,包括基板,所述基板上设有多个并联的体声波滤波器,所述多个并联的体声波滤波器的输入端和输出端分别串联阻抗变换网络。A filter element is characterized by comprising a substrate on which a plurality of bulk acoustic wave filters are arranged in parallel, and the input and output ends of the plurality of parallel bulk acoustic wave filters are respectively connected in series with impedance transformation networks.
  13. 根据权利要求12所述的滤波元件,其特征在于,所述阻抗变换网络包含变压器,或者包含由电感及电容构成的阻抗电路。The filter element according to claim 12, wherein the impedance transformation network includes a transformer, or an impedance circuit composed of an inductor and a capacitor.
  14. 根据权利要求12所述的滤波元件,其特征在于,相邻的所述体声波滤波器之间在所述基板上具有限定宽度的间隔。The filter element according to claim 12, wherein the adjacent BAW filters have a space with a defined width on the substrate.
PCT/CN2020/111347 2019-11-04 2020-08-26 Method for improving power capacity of bulk acoustic wave filter, and filtering element WO2021088476A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201911066952.2 2019-11-04
CN201911066952.2A CN110971209B (en) 2019-11-04 2019-11-04 Method for improving power capacity of bulk acoustic wave filter and filter element

Publications (1)

Publication Number Publication Date
WO2021088476A1 true WO2021088476A1 (en) 2021-05-14

Family

ID=70030087

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2020/111347 WO2021088476A1 (en) 2019-11-04 2020-08-26 Method for improving power capacity of bulk acoustic wave filter, and filtering element

Country Status (2)

Country Link
CN (1) CN110971209B (en)
WO (1) WO2021088476A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110971209B (en) * 2019-11-04 2023-10-20 天津大学 Method for improving power capacity of bulk acoustic wave filter and filter element
CN111865255B (en) * 2020-07-31 2021-06-01 诺思(天津)微系统有限责任公司 Radio frequency module design method, radio frequency module and communication equipment
CN113411069A (en) * 2021-06-03 2021-09-17 成都频岢微电子有限公司 Bulk acoustic wave filter device and method for improving out-of-band rejection

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1672326A (en) * 2002-07-30 2005-09-21 因芬尼昂技术股份公司 Filter circuit
CN1739237A (en) * 2003-01-20 2006-02-22 皇家飞利浦电子股份有限公司 Resonator filter structure having equal resonance frequencies
CN102006029A (en) * 2010-12-01 2011-04-06 浙江大学 Thin film bulk acoustic resonator (FBAR) filter and components thereof
US20160191015A1 (en) * 2014-12-27 2016-06-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Split current bulk acoustic wave (baw) resonators
CN110971209A (en) * 2019-11-04 2020-04-07 天津大学 Method for improving power capacity of bulk acoustic wave filter and filter element

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0014630D0 (en) * 2000-06-16 2000-08-09 Koninkl Philips Electronics Nv Bulk accoustic wave filter
WO2011147469A1 (en) * 2010-05-28 2011-12-01 Verigy (Singapore) Pte. Ltd. Electrical filter structure
US8600330B2 (en) * 2011-10-05 2013-12-03 Kathrein-Werke Kg Filter arrangement
CN102545827B (en) * 2012-01-04 2015-09-09 华为技术有限公司 Thin film bulk acoustic resonator, communication device and radio-frequency module
CN109936344A (en) * 2018-12-29 2019-06-25 天津大学 A kind of fractionation structure resonator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1672326A (en) * 2002-07-30 2005-09-21 因芬尼昂技术股份公司 Filter circuit
CN1739237A (en) * 2003-01-20 2006-02-22 皇家飞利浦电子股份有限公司 Resonator filter structure having equal resonance frequencies
CN102006029A (en) * 2010-12-01 2011-04-06 浙江大学 Thin film bulk acoustic resonator (FBAR) filter and components thereof
US20160191015A1 (en) * 2014-12-27 2016-06-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Split current bulk acoustic wave (baw) resonators
CN110971209A (en) * 2019-11-04 2020-04-07 天津大学 Method for improving power capacity of bulk acoustic wave filter and filter element

Also Published As

Publication number Publication date
CN110971209A (en) 2020-04-07
CN110971209B (en) 2023-10-20

Similar Documents

Publication Publication Date Title
WO2021088476A1 (en) Method for improving power capacity of bulk acoustic wave filter, and filtering element
CN110492864B (en) Packaging structure of bulk acoustic wave filter and manufacturing method of filter
CN106253877B (en) Ladder-type acoustic wave filter and notch diplexer
US10944375B2 (en) Multilayer band pass filter
US20060091977A1 (en) Duplexer
JP4270206B2 (en) Surface acoustic wave duplexer
US2199921A (en) Wave filter
CN102422533B (en) Common mode filter
CN107070428A (en) Electronic unit
JP2004200941A (en) Splitter and communication device
WO2021068669A1 (en) Filter circuit, method for improving performance of filter circuit, and signal processing device
JP6556668B2 (en) Filters and multiplexers
CN111211752B (en) Filter, method of manufacturing the same, multiplexer, and communication apparatus
JP2017526307A (en) Filter with improved linearity
CN112350684B (en) Acoustic wave filter, multiplexer and communication equipment
JPWO2006080172A1 (en) Two-port nonreciprocal circuit device and communication device
Gu et al. An N41-band bandpass BAW filter chip for mobile communications based on FBARs
CN111510107B (en) Filter element, multiplexer, and communication device
CN111464147B (en) Filter and method for improving power capacity thereof, multiplexer and communication equipment
JP5123937B2 (en) How to ground a filter on a flat substrate
WO2020125341A1 (en) Filter unit having coupling inductor, filter, and electronic device
CN111988013A (en) Temperature compensation filter optimization method, temperature compensation filter, multiplexer and communication equipment
CN207320281U (en) Wave filter
JP5637150B2 (en) Multilayer bandpass filter
CN112886945A (en) Notch filter and multi-frequency notch filter

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20884849

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20884849

Country of ref document: EP

Kind code of ref document: A1