WO2021075270A1 - Détecteur de pression capacitif - Google Patents

Détecteur de pression capacitif Download PDF

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Publication number
WO2021075270A1
WO2021075270A1 PCT/JP2020/037392 JP2020037392W WO2021075270A1 WO 2021075270 A1 WO2021075270 A1 WO 2021075270A1 JP 2020037392 W JP2020037392 W JP 2020037392W WO 2021075270 A1 WO2021075270 A1 WO 2021075270A1
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WO
WIPO (PCT)
Prior art keywords
panel electrode
separator
dielectric sheet
type pressure
capacitance type
Prior art date
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PCT/JP2020/037392
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English (en)
Japanese (ja)
Inventor
細田　哲郎
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株式会社細田
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Filing date
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Publication of WO2021075270A1 publication Critical patent/WO2021075270A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/08—Gripping heads and other end effectors having finger members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes

Definitions

  • the present invention relates to a capacitance type pressure sensor, and more particularly to a capacitance type pressure sensor applicable to the fingertips of an industrial robot hand, the sole of a walking / traveling robot, and the like.
  • the structure of the conventional capacitance type pressure sensor is arranged between the outer skin cover, the pair of panel electrodes provided inside the outer skin cover, and the panel electrodes, for example, as described in Patent Document 1 below. It is configured to include a dielectric, a frame spacer provided on the periphery of the panel electrodes, a plurality of columnar spacers provided between the panel electrodes, and an air layer between the panel electrodes.
  • the capacitance type pressure sensor Since the capacitance type pressure sensor has a simple structure and excellent durability, its application to the tactile sensor of a robot, an industrial robot hand, the sole of a walking / traveling robot, etc. is being studied. There is.
  • the performance required for pressure-sensitive sensors used in robot hands, soles, etc. is 1) flexibility to compress and deform uniformly even with a slight force (uniform sensitivity), and 2) resilience to quickly restore after pressure release. (Rapid response), 3) compression resistance (durability) that does not easily break even when a large force is repeatedly applied, and 4) wide range of measurable ability that can measure from a small force to a large force are required.
  • the conventional capacitance type pressure sensor described above a plurality of spacers are arranged between the opposing electrodes, and a predetermined air layer according to the sensitivity is formed based on the occupancy of the spacers between the electrodes.
  • a small capacitance type pressure sensitive sensor there is a problem that it is extremely difficult to form a desired air layer by a spacer having a small area.
  • the small capacitance type pressure sensor having a conventional structure has a problem that the spacer is worn out (not sufficiently durable) due to repeated loading. Further, there is a problem that it takes a long time to restore after releasing the load (lack of quick response) due to the sagging of the spacer.
  • the capacitance type pressure sensor having a conventional structure cannot be used as a sensor for detecting the pressure applied to the robot's hand (fingertip), sole, etc. Therefore, at present, there is no small capacitive pressure sensor that can be used for robot hands and the like.
  • the subject of the present invention has been made in view of such circumstances, and the flexibility of uniformly compressing and deforming even with a slight force (uniform sensitivity) and the resilience of quick restoration after pressure release (quick response). ), Provides a compact capacitive pressure sensor with compression resistance (durability) that does not easily break even when a large force is repeatedly applied, and a wide range of measurable performance that can measure from a small force to a large force. That is the issue.
  • the first aspect of the present invention for solving the above problems is a panel electrode E having at least one side of a conductor, a panel electrode S having at least one side of a conductor, and the panel electrode E and / or the panel electrode S. It is provided with at least one dielectric sheet inserted between the two, and an elastic separator containing bubbles inserted so as to directly or indirectly cover the panel electrode E or the panel electrode S. It is a capacitive pressure-sensitive sensor, which is a feature.
  • the separator may be inserted indirectly through the dielectric sheet so as to cover the panel electrode E and the panel electrode S, or may be inserted so as to directly cover the panel electrode E and the panel electrode S without the dielectric sheet. You may insert it.
  • One dielectric sheet may be used, or two or more dielectric sheets may be inserted. By inserting two dielectric sheets, the separator can indirectly cover both the panel electrode E and the panel electrode S via the dielectric sheet.
  • This capacitive pressure sensor can ensure quick response due to the repulsive force of the bubbles contained in the separator.
  • by providing a sealing layer that seals the separator so that it does not leak to the outside when it is compressed the air bubbles contained in the separator are more completely sealed, and compression resistance (durability) and resilience (quick). Responsiveness) can be ensured.
  • the second aspect of the present invention is at least inserted between the panel electrode E having at least one side of the conductor, the panel electrode S having at least one side of the conductor, and the panel electrode E and / or the panel electrode S. It is characterized by comprising one dielectric sheet and an elastic separator having an opening of a predetermined shape inserted so as to directly or indirectly cover the panel electrode E or the panel electrode S. It is a capacitance type pressure sensitive sensor.
  • the separator may or may not be inserted through the dielectric sheet.
  • the separator is provided with an opening having a predetermined shape.
  • the opening becomes a gas layer (a layer of air, an inert gas, etc.), and by sealing the gas in the opening, the repulsive force of the gas in the opening can be used more effectively.
  • compression resistance (durability) and resilience (quick response) can be ensured.
  • a separator made of a material containing air bubbles to seal not only the gas at the opening but also the air bubbles contained in the separator, more compression resistance (durability) and resilience (quick response) can be achieved. Can be secured.
  • the third aspect of the present invention is a capacitance type pressure sensitive sensor that measures a compressive force by a change in capacitance between electrodes separated by a separator via a gas layer.
  • a second dielectric sheet formed on the second separator and a second panel electrode E formed on the second dielectric sheet are provided.
  • the first separator has a first gas layer that separates the first panel electrode S and the first dielectric sheet.
  • the second separator is a capacitance type pressure-sensitive sensor characterized by having a second gas layer that separates the second panel electrode S and the second dielectric sheet layer.
  • the present invention is a multi-pole capacitive pressure-sensitive sensor in which a separator, a dielectric sheet, and a panel electrode E are laminated above and below a panel electrode S laminated on an insulator.
  • the multi-pole structure makes it a more sensitive pressure sensor.
  • the structure is such that a dielectric sheet is formed on the panel electrode E and a separator is formed on the dielectric sheet.
  • a separator is formed on the panel electrode E and a dielectric sheet is formed on the separator. It may be a structure to be used.
  • the order of forming (stacking) the dielectric sheet and the separator on the panel electrode may be such that the first separator is formed on the panel electrode E and the first dielectric sheet is formed on the first separator. ..
  • the second dielectric sheet may be formed on the second panel electrode S, and the second separator may be formed on the second dielectric sheet. Further, they may be configured to be combined. It is preferable that the dielectric sheet in these inventions is fixed to the separator in a tensioned state. Since the dielectric sheet in the tensioned state (tensioned state) exerts a trampoline effect with the peripheral edge of the opening of the separator as a fulcrum, it is necessary to ensure quick resilience (quick response) after pressure release. Can be done.
  • the fourth aspect of the present invention is at least inserted between the panel electrode E having at least one side of the conductor, the panel electrode S having at least one side of the conductor, and the panel electrode E and / or the panel electrode S. It is characterized by comprising one dielectric sheet and an elastic separator having an opening of a predetermined shape inserted so as to directly or indirectly cover the panel electrode E or the panel electrode S.
  • a capacitive pressure-sensitive sensor for a robot used for sensing the pressure applied to the fingertips of a robot hand and / or the soles of a traveling robot.
  • the present invention provides a compact capacitive pressure-sensitive sensor capable of sensing the pressure applied to the hands (fingertips) and soles of a robot, which could not be manufactured by a conventional capacitive sensor. ..
  • the present invention it is possible to sensor (sense) the pressure applied to the sole of the robot, etc., the flexibility to compress and deform uniformly even with a slight force (uniform sensitivity), and the resilience to quickly restore after pressure release. (Rapid response), compression resistance (durability) that does not easily break even when a large force is repeatedly applied, and a small capacitance type pressure sensor with a wide range of measurable performance that can measure from a small force to a large force A sensor can be provided.
  • FIG. 1 is a diagram showing a flat surface of the capacitance type pressure sensor 1 according to the first embodiment of the present invention and a laminated state of members constituting the plane.
  • the capacitance type pressure sensor 1 is a small capacitance type pressure sensor having a shape like a fingertip as shown in FIG. 1 (a).
  • the periphery is covered with an outer skin cover 16 and has a waterproof structure including an insulator 10 and the like inside.
  • the lead wire 20e and the lead wire 20s are drawn out from the internal panel electrode E (panel electrode 11e) and the panel electrode S (panel electrode 11s), and are connected to an external measuring instrument (not shown).
  • the capacitance type pressure sensor 1 of the first embodiment has dielectric sheets 12 laminated on the upper and lower sides so as to sandwich the separator 14.
  • the material of the separator 14 used in this example is a polyurethane foam having the property of low compression residual strain, which is one of the polymer elastic bodies containing bubbles, and the bubbles and the resin form a uniform cell structure. (Urethane foam).
  • the air bubbles contained in the separator 14 are sealed by bringing the dielectric sheet 12 and the separator 14 into close contact with each other with an adhesive. As a result, even if the separator 14 is compressed, the air bubbles contained therein do not leak from the inside to the outside due to the seal, and the repulsive force can be utilized.
  • the separator which is a member that separates the panel electrodes, refers to an integral member that is inserted so as to cover the panel electrodes.
  • the spacer refers to a member that separates the panel electrodes, for example, a frame spacer provided on the periphery of the capacitance type pressure-sensitive sensor, or a columnar member provided scattered between the panel electrodes.
  • FIG. 2 is a diagram showing a laminated state of the capacitance type pressure sensor 1a and the members constituting the capacitance type pressure sensor 1b, which is the second embodiment of the present invention.
  • the difference between the capacitance type pressure sensor 1 and 1a and 1b shown in FIG. 1 is that the separator 14 has an opening 15 and the seal layer 13 is laminated so as to cover the opening 15. It is in.
  • the capacitive pressure-sensitive sensors 1a and 1b of the second embodiment seal the gas at the opening of the separator 14, so that the repulsive force is not required even if the polymer elastic body contains bubbles such as urethane foam. It is in a place where it can be used as a high separator. This is because the sealed gas replaces the function of the bubbles.
  • an opening may be provided in the polymer elastic body containing bubbles, and the bubbles and the gas in the openings may be used as a repulsive force.
  • the separator 14 and the dielectric sheet 12 are brought into close contact with each other by using double-sided tape.
  • the separator 14 is covered with a film and then brought into close contact with the dielectric sheet 12 with an adhesive or the like to form a seal layer.
  • FIG. 2B shows a capacitance type pressure sensor 1b.
  • the difference between the capacitance type pressure sensor 1b and the capacitance type pressure sensor 1a is that the capacitance type pressure sensor 1a has a seal layer 13 laminated on one surface of the dielectric sheet 12. ..
  • the seal layer 13 is laminated on the other surface of the dielectric sheet 12 in addition to the capacitance type pressure sensor 1b. This is because by laminating a plurality of seal layers, it is possible to more completely prevent the leakage of air bubbles contained in the separator 14.
  • Examples of the polymer elastic body used as the material of the separator 14 include urethane foam, silicone elastomer, styrene-based thermoplastic elastomer, natural rubber, nitrile rubber, acrylic rubber, urethane rubber, urea rubber, and fluororubber.
  • FIG. 3A is a plan view of the separator 14 made of a polymer elastic body containing bubbles.
  • 3 (b) and 3 (c) are plan views of the separators 14a and 14b having an opening formed in the center of the separator. In the separator shown in FIG. 4A, the openings are evenly distributed along the shape of the separator to ensure the uniformity of the openings.
  • FIG. 4B is a diagram showing the shape of a separator arranged symmetrically with an opening in both the vertical and horizontal directions.
  • the material of the separator is not limited to the polymer elastic body containing bubbles.
  • FIG. 5 is a cross-sectional view of a capacitance type pressure sensitive sensor 1c incorporating a separator having an opening 15.
  • the seal layer 13, the dielectric sheet 12, the panel electrode 11e and the panel electrode 11s, the insulator 10, and the outer skin cover 16 are laminated with the separator 14a having the opening 15 interposed therebetween.
  • Lead wires 20e and 20s are drawn out from the ends of the panel electrode E and the panel electrode S, respectively, and are connected to an external measuring instrument (not shown).
  • the opening 15 is filled with an inert gas (gas) such as air or nitrogen, and in the present specification, the opening is also referred to as a gas layer.
  • gas inert gas
  • the separator 14a having the opening 15 includes a panel electrode 11s, a lower panel electrode 11e (lower panel electrode 11e shown in FIG. 6), and a panel electrode 11s. Two are inserted between the upper panel electrode 11e and the upper panel electrode 11e (upper panel electrode 11 shown in FIG. 6).
  • a seal layer 13, a dielectric sheet 12, a panel electrode 11e, an insulator 10, and an outer skin cover 16 are laminated on the separator 14a, respectively.
  • Lead wires 20e and 20s are drawn out from the ends of the panel electrode E and the panel electrode S, respectively, and are connected to an external measuring instrument (not shown).
  • the panel electrode E of the capacitance type pressure sensor 1d a polycarbonate sheet (thickness 0.1 mm to 0.3 mm) coated with a conductor on one side was used. Further, in order to seal the air in the opening, the dielectric sheet 12 and the separator 14a, the separator 14a and the panel electrode 11s, the panel electrode 11s and the separator 14a, and the separator 14a and the dielectric sheet 12 were laminated and integrally formed by double-sided tape.
  • the material of the separator urethane foam having a density (JIS K6401) of 480 kg / m 3 , a residual strain of 5.9%, and a thickness of 0.8 mm was used. Examples of the formation of the seal layer for sealing the air in the opening of the separator 14a include a double-sided tape and an adhesive.
  • FIG. 7 is a view showing a cross section of the multi-pole capacitance type pressure sensor 1D.
  • the multi-pole capacitive pressure sensor 1D has basically the same configuration as the multi-polar capacitive pressure sensor shown in FIG. 6, but the seal layer 13 is below the separator 14a1. , The difference is that they are provided on the upper side of the separator 14a2. The position of the seal layer 13 does not matter as long as it can seal (seal) the gas at the opening of the separator 14.
  • the separator 14 instead of forming the dielectric sheet 12 on the panel electrode 11e and forming the separator 14 on the panel electrode 11e, the separator 14 may be formed on the panel electrode 11e and the dielectric sheet 12 may be formed on the separator 14. good. Further, the dielectric sheet 12 may be formed on the panel electrode 11s, and the separator 14 may be formed on the dielectric sheet 12.
  • FIG. 8 shows the change in the capacitance value when a compressive load of 30 kg is applied to each of the multipolar capacitive pressure-sensitive sensors 1d incorporating the four types of separators shown in FIG. 6 described above, and the reference value. It is a figure which showed the magnification with respect to (the change value of the capacitance of the multi-pole type capacitance type pressure sensor 1d which incorporated the separator without an opening).
  • the separator S has an opening in the central portion, the surface area except for the opening 352 mm 2 (the opening surface area 45 mm 2), the separator P is the separator It has an opening along the shape, the surface area excluding the opening is 316.5 mm 2 (opening surface area 80.5 mm 2 ), and the separator T has openings in the vertical and horizontal directions, and the surface area excluding the opening. Is 313 mm 2 (opening surface area 84 mm 2 ).
  • the capacitance value of the capacitance type pressure sensor 1d using the separator N at no load is 15.2PF. When this was loaded with a compressive load of 30 kg, the capacitance value showed 69.3 PF. The amount of change in capacitance is 54.1 PF.
  • the capacitance value of the capacitance type pressure sensor 1d using the separator S was 15.3PF when no load was applied, but the capacitance value was 76.5PF when a compressive load of 30 kg was applied. ..
  • the amount of change in capacitance is 61.2PF.
  • the changed magnification is 1.131 times.
  • the capacitance value of the capacitance type pressure sensor 1d using the separator P was 14.4 PF when no load was applied, but the capacitance value was 86.4 PF when a compressive load of 30 kg was applied. ..
  • the amount of change in capacitance is 72 PF.
  • the changed magnification is 1.33 times.
  • the capacitance value of the capacitance type pressure sensor 1d using the separator T was 16.1 PF when no load was applied, but the capacitance value was 95.6 PF when a compressive load of 30 kg was applied. ..
  • the amount of change in capacitance is 79.5 PF.
  • the changed magnification is 1.469 times.
  • the separator N was incorporated into the unipolar capacitive pressure sensor shown in FIG. 2B, and an experiment was conducted under the same conditions to measure the amount of change.
  • the capacitance value at no load was 8.4 PF, but it showed 30.1 PF by applying a compressive load of 30 kg.
  • the amount of change in capacitance was 21.7 PF, and the magnification changed with respect to the reference value was 0.401 times.
  • the sensitivity can be improved by using a multi-pole capacitive pressure sensor. Further, the sensitivity can be changed by changing the shape of the opening provided in the separator and the area occupied by the opening. Furthermore, it was confirmed in the experiment that the compression resistance was improved and the resilience after the load was released was remarkably improved by sealing the air bubbles and / or the gas at the opening contained in the separator.
  • FIG. 9 is a diagram showing a laminated state of the capacitance type pressure sensor 1e and the members constituting the capacitance type pressure sensor 1f, which are the third embodiment of the present invention.
  • the feature of the capacitance type pressure-sensitive sensors 1e and 1f shown in FIG. 9 is that the dielectric sheet 12-1 is tightly fixed to the separator 14-1 or the separator 14 in a tensioned state (tensioned state). Where you are.
  • the dielectric sheet 12-1 of the capacitance type pressure sensor 1c shown in FIG. 9A is in a tension state, and its end portion is fixed to the separator 14-1. Therefore, when a load is applied to the dielectric sheet 12-1 in the tension state, the dielectric sheet 12-1 supports the peripheral end portion of the separator 14-1 together with the gas in the opening of the separator 14-1. It bends as a point, and when the load is removed, it quickly recovers due to its repulsive force. Such an effect is similar to the repulsive force obtained from the structure of the trampoline that supports the flexible sheet in the tension state at the elastic body support point.
  • this effect is referred to as a trampoline effect, but by adopting a structure that exerts a trampoline effect, a capacitance type pressure-sensitive sensor having high durability, quick resilience, etc., which could not be achieved by a conventional structure, can be obtained. It can be realized.
  • Examples of the member of the dielectric sheet 12-1 for obtaining the trampoline effect include elastic bodies such as silicone elastomer, styrene-based thermoplastic elastomer, natural rubber, nitrile rubber, acrylic rubber, urethane rubber, urea rubber, and fluororubber, and rubber elasticity.
  • the body can be raised.
  • a flexible material may be used.
  • the dielectric sheet 12-1 of the capacitance type pressure sensor 1f shown in FIG. 9B is in a tension state and is fixed to the separator 14.
  • the two dielectric sheets 12-1 are bent together with the gas in the separator 14 with the peripheral edge of the opening of the separator 14 as a support point. Restore to.
  • FIG. 10 is a plan view of the tension jig 100 that applies tension to the dielectric sheet 12-1.
  • FIG. 11 (a) is a cross-sectional view of the tension jig 100 before applying tension to the dielectric sheet 12-1, and
  • FIG. 11 (b) shows tension in a state where a tensile force is applied to the dielectric sheet 12-1. It is sectional drawing of the jig 100.
  • the tension jig 100 When the tension is applied by the tension jig 100, the tightening bolt 121 of the tension portion 124 is loosened, and the dielectric sheet is sandwiched between the top plate 122 and the bottom plate 123 (FIG. 11 (a)). Next, the dielectric sheet is fixed to the tension portion 124 by tightening the tightening bolts 121 on the four sides, and the nuts on the four sides are rotated evenly. 1 is obtained. The tension is adjusted by the number of rotations of the nut, and the dielectric sheet 12-1 in the tensioned state is fixed to the peripheral end of the opening of the separator.
  • FIG. 12 shows the measurement results of the capacitance type pressure sensor 1c.
  • the capacitance of 4.4 pf before the load became 20.6 pf by the load of 15 kg, and returned to the capacitance of 4.4 pf before the load 0.087 seconds after the load was removed.
  • the change in capacitance before and after the load was 16.2 pf.
  • FIG. 13 is a measurement result of the capacitance type sensor 1f.
  • the capacitance of the capacitance type sensor 1f before loading becomes 47.7 pf due to the load of 15 kg, and returns to the capacitance of 5.3 pf before load 0.093 seconds after the load is removed. It was.
  • the change in capacitance before and after the load was 42.4 pf.
  • FIG. 14 is a measurement result of the capacitance type pressure sensor 1e (no tensile force is applied to the dielectric sheet) for verification of the trampoline effect.
  • the capacitance of 5 pf before the load became 31.9 pf by the load of 15 kg, and became stable at the capacitance of 5.6 pf 0.14 seconds after the load was removed.
  • the change in capacitance before and after the load was 26.9 pf.
  • a dielectric sheet in a tensioned state As a constituent member in the above comparative experiment, it can be used for the hands, soles, etc. of robots, and has flexibility (uniform sensitivity) to uniformly compress and deform even with a slight force, and pressure release. Hands with recoverability (quick response) that restores quickly later, compression resistance (durability) that does not easily break even when a large force is repeatedly applied, and wide measurable performance that can measure from small force to large force It has become clear that a small capacitive pressure sensor can be provided.
  • Capacitive sensing sensor 10 Insulator 11 11e 11s Panel electrode 12 Dielectric sheet 13 Seal layer 14 Separator 15 Opening (gas layer) 16 Outer cover 20 Lead wire 100 Pulling jig 110 Nut 111 Rod 112 Jig frame 113 Bottom plate 120 Fixing part 121 Tightening bolt 122 Top plate 123 Bottom plate 124 Pulling part

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

Le problème à résoudre par la présente invention est de fournir un petit détecteur de pression capacitif pour robots qui peut détecter une pression appliquée à une main de robot ou à une semelle d'un robot mobile. La solution selon l'invention concerne un détecteur de pression capacitif qui comprend : une électrode de panneau E dont au moins un côté est un conducteur ; une électrode de panneau S dont au moins un côté est un conducteur ; au moins une feuille diélectrique insérée entre les électrodes de panneau E et/ou l'électrode de panneau S ; et un séparateur élastique contenant des bulles d'air qui est inséré pour recouvrir directement ou indirectement l'électrode de panneau E ou l'électrode de panneau S.
PCT/JP2020/037392 2019-10-14 2020-10-01 Détecteur de pression capacitif WO2021075270A1 (fr)

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CN114724777B (zh) * 2022-05-06 2023-04-11 苏州久鋐电子有限公司 一种整体式绝缘性能好的隔离减震泡棉生产工艺

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8598893B2 (en) * 2009-06-05 2013-12-03 Hill-Rom Industries Sa Pressure sensor comprising a capacitive cell and support device comprising said sensor
JP6378001B2 (ja) * 2014-08-25 2018-08-22 株式会社細田 静電容量式重量センサー及びこれを用いた呼吸・体動センサー

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JP3778148B2 (ja) 2002-07-26 2006-05-24 哲郎 細田 静電容量重量センサ
JP4069256B2 (ja) 2003-06-25 2008-04-02 哲郎 細田 静電容量重量センサ
JP2019124506A (ja) 2018-01-15 2019-07-25 住友理工株式会社 静電容量型センサ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8598893B2 (en) * 2009-06-05 2013-12-03 Hill-Rom Industries Sa Pressure sensor comprising a capacitive cell and support device comprising said sensor
JP6378001B2 (ja) * 2014-08-25 2018-08-22 株式会社細田 静電容量式重量センサー及びこれを用いた呼吸・体動センサー

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