WO2021064901A1 - Système de circuit quantique - Google Patents

Système de circuit quantique Download PDF

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Publication number
WO2021064901A1
WO2021064901A1 PCT/JP2019/038936 JP2019038936W WO2021064901A1 WO 2021064901 A1 WO2021064901 A1 WO 2021064901A1 JP 2019038936 W JP2019038936 W JP 2019038936W WO 2021064901 A1 WO2021064901 A1 WO 2021064901A1
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WIPO (PCT)
Prior art keywords
quantum circuit
waveguide
quantum
shield
circuit
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Application number
PCT/JP2019/038936
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English (en)
Japanese (ja)
Inventor
大輔 才田
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Ｍｄｒ株式会社
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Priority to PCT/JP2019/038936 priority Critical patent/WO2021064901A1/fr
Priority to JP2020538738A priority patent/JP6986788B2/ja
Publication of WO2021064901A1 publication Critical patent/WO2021064901A1/fr

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/10—Junction-based devices

Definitions

  • the present invention relates to a quantum circuit system.
  • Transmon is highly resistant to electrical noise and has a relatively long relaxation time.
  • Patent Document 1 describes a quantum information processing system including a waveguide having an aperture, a nonlinear quantum circuit arranged in the waveguide, and an electromagnetic field source coupled to the aperture.
  • Patent Document 2 describes an uninterrupted elongated thin film due to Josephson junction and a superconducting quantum interference device (SQUID) in electrical contact with the proximal end of the elongated thin film, with less than three Josephsons.
  • a superconducting quantum interference device (SQUID) with junctions and a ground plane that is coplanar with the elongated thin film and is in electrical contact with the distal end of the elongated thin film, the thin film, SQUID and ground plane are designed.
  • Quantum bit devices are described that include materials that are superconducting at the given operating temperature.
  • the quantum state of a quantum circuit such as Transmon may be manipulated by propagating high-frequency power to a waveguide connected to the quantum circuit. At this time, the electromagnetic field propagating in the waveguide may leak and power may propagate to other waveguides, and the quantum state of the quantum circuit connected to the other waveguide may change unintentionally. is there.
  • the present invention provides a quantum circuit system that can prevent unintended changes in the quantum state.
  • the quantum circuit system includes a first quantum circuit and a second quantum circuit capable of representing at least two quantum states, and a first waveguide and a first waveguide electromagnetically connected to the first quantum circuit.
  • the second waveguide electromagnetically connected to the two quantum circuits and the first waveguide in the normal direction of the main surface composed of a dielectric or a metal and forming the first quantum circuit and the second quantum circuit.
  • a shield that is higher than the height of the second waveguide.
  • the shield may extend along the first waveguide and the second waveguide.
  • the electromagnetic field spreading around the extending direction of the waveguide can be shielded more efficiently.
  • the first waveguide and the second waveguide include a ground line and a signal line, respectively, and the shield may be provided on the ground line.
  • the height of the shield can be made sufficiently higher than the signal line, and the electromagnetic field leaking from the signal line can be shielded.
  • the first waveguide and the second waveguide extend in a direction intersecting the main surface on which the first quantum circuit and the second quantum circuit are formed, and the shield is the first quantum circuit and the second quantum. It may be provided on the main surface on which the circuit is formed.
  • the first waveguide and the second waveguide extend in a direction intersecting the main surface on which the first quantum circuit and the second quantum circuit are formed, and the shield is the first quantum circuit and the second quantum. It may be provided on a surface separated from the main surface on which the circuit is formed.
  • the shield is provided at a position higher than the first coupling line in the normal direction of the main surface so as to cover the first coupling line that electromagnetically connects the first quantum circuit and the second quantum circuit. It may have been.
  • the shield is more than the second coupling line in the normal direction of the main surface so as to cover the second coupling line that electromagnetically connects the first quantum circuit, the second quantum circuit, and the reading circuit. It may be provided at a high position.
  • FIG. 1 is a diagram showing a network configuration of the quantum computing system 100 according to the first embodiment of the present invention.
  • the quantum computing system 100 includes a quantum circuit system 10 and a user terminal 20.
  • the quantum circuit system 10 and the user terminal 20 are communicably connected to each other via a communication network N such as the Internet, a local network, and a wired cable.
  • the user of the quantum calculation system 100 inputs data to the quantum circuit system 10 by using the user terminal 20 composed of a general-purpose classical computer, and acquires the result of the quantum calculation performed by the quantum circuit system 10. ..
  • FIG. 2 is a diagram showing an example of the configuration of the quantum circuit system 10 according to the present embodiment.
  • the quantum circuit system 10 includes a first quantum circuit 11a and a second quantum circuit 11b capable of representing at least two quantum states, and a first waveguide 12a and a second quantum electromagnetically connected to the first quantum circuit 11a.
  • a second waveguide 12b which is electromagnetically connected to the circuit 11b, is provided.
  • the quantum circuit system 10 propagates the high frequency power to the first waveguide 12a and propagates the high frequency power to the first high frequency power supply 13a and the second waveguide 12b that change the first quantum circuit 11a into a predetermined quantum state.
  • a second high frequency power supply 13b that changes the second quantum circuit 11b into a predetermined quantum state is provided.
  • the quantum circuit system 10 is composed of a dielectric or a metal, and has a first waveguide 12a and a second waveguide 12a in the normal direction of the main surface on which the first quantum circuit 11a and the second quantum circuit 11b are formed. It includes a first shield 15a and a second shield 15b that are higher than the height of 12b.
  • FIG. 2 shows a case where the first shield 15a and the second shield 15b are made of metal and are grounded.
  • the first shield 15a and the second shield 15b may be made of metal and formed on the ground plane, or may be made of a dielectric.
  • the first shield 15a and The second shield 15b is formed at a position higher than the upper surfaces (the surface extending along the main surface and exposed) of the first waveguide 12a and the second waveguide 12b in the normal direction of the main surface. It's okay.
  • the first shield 15a and the second shield 15a and the second are formed.
  • the shield 15b may be formed at a position higher than the upper surface (the surface extending along the main surface and exposed) of the first waveguide 12a and the second waveguide 12b in the normal direction of the main surface. ..
  • the quantum circuit system 10 has a third quantum circuit 11c and a fourth quantum circuit 11d that can represent at least two quantum states, and a third waveguide 12c and a third that are electromagnetically connected to the third quantum circuit 11c.
  • a fourth waveguide 12d which is electromagnetically connected to the four quantum circuits 11d, is provided.
  • the quantum circuit system 10 propagates the high frequency power to the third high frequency power supply 13c and the fourth waveguide 12d that propagate the high frequency power to the third waveguide 12c to change the third quantum circuit 11c to a predetermined quantum state.
  • a fourth high-frequency power source 13d that changes the fourth quantum circuit 11d into a predetermined quantum state is provided.
  • the quantum circuit system 10 is composed of a dielectric or a metal, and in the normal direction of the main surface on which the third quantum circuit 11c and the fourth quantum circuit 11d are formed, the third waveguide 12c and the fourth waveguide are formed. It includes a second shield 15b and a third shield 15c that are higher than the height of 12d. In this example, the case where the second shield 15b and the third shield 15c are made of metal and are grounded is shown. However, the second shield 15b and the third shield 15c may be made of metal and formed on the ground plane, or may be made of a dielectric.
  • the second shield 15b and The third shield 15c is formed at a position higher than the upper surfaces (the surface extending along the main surface and exposed) of the third waveguide 12c and the fourth waveguide 12d in the normal direction of the main surface. It's okay.
  • the second shield 15b and the third shield 15b and the third are formed.
  • the shield 15c may be formed at a position higher than the upper surface (the surface extending along the main surface and exposed) of the third waveguide 12c and the fourth waveguide 12d in the normal direction of the main surface. ..
  • the first quantum circuit 11a, the second quantum circuit 11b, the third quantum circuit 11c, and the fourth quantum circuit 11d may each have the same configuration, and may be, for example, a quantum circuit containing Transmon.
  • the first waveguide 12a, the second waveguide 12b, the third waveguide 12c, and the fourth waveguide 12d may each have the same configuration, and are, for example, a waveguide including a coplanar line, a microstrip line, and the like. Good.
  • the first high-frequency power supply 13a, the second high-frequency power supply 13b, the third high-frequency power supply 13c, and the fourth high-frequency power supply 13d may each have the same configuration, and may include, for example, a power supply that outputs a high-frequency pulse of several GHz.
  • a plurality of quantum circuits including the first quantum circuit 11a, the second quantum circuit 11b, the third quantum circuit 11c, and the fourth quantum circuit 11d are simply referred to as quantum circuits 11.
  • a plurality of waveguides including the first waveguide 12a, the second waveguide 12b, the third waveguide 12c, and the fourth waveguide 12d are simply referred to as the waveguide 12, and the first high frequency power supply 13a and the second high frequency power supply 13b.
  • a plurality of high-frequency power supplies including the third high-frequency power supply 13c and the fourth high-frequency power supply 13d are simply referred to as high-frequency power supplies 13.
  • a plurality of shields including the first shield 15a, the second shield 15b, and the third shield 15c are simply referred to as the shield 15.
  • the quantum circuit system 10 is provided with a shield 15 having a height higher than the height of the waveguide 12, so that the leaked electromagnetic field can be shielded and an unintended change in the quantum state of the quantum circuit 11 is prevented. be able to.
  • the first shield 15a, the second shield 15b, and the third shield 15c extend along the first waveguide 12a, the second waveguide 12b, the third waveguide 12c, and the fourth waveguide 12d, respectively. doing. As a result, the electromagnetic field spreading around the extending direction of the waveguide 12 can be shielded more efficiently.
  • FIG. 2 illustrates a quantum circuit system 10 including four quantum circuits 11, four waveguides 12, four high-frequency power supplies 13, and three shields 15, but the quantum circuit 11 and the waveguide 12 are illustrated.
  • the number of the high frequency power supply 13 and the shield 15 is arbitrary.
  • the number of high-frequency power supplies 13 may be smaller than the number of quantum circuits 11, and the structure may be connected to the quantum circuits 11 via a demultiplexer or the like.
  • FIG. 3 is an example of a circuit diagram of the quantum circuit 11 according to the present embodiment.
  • Quantum circuit 11 includes a Toranzumon 111 including Josephson junction JJ and capacitor C B, a resonator 112 includes an inductor L r and a capacitor C r.
  • the high frequency power supply 13 is connected to one end of the input capacitor C in , and the high frequency pulse output from the high frequency power supply 13 is input to the transmon 111 via the gate capacitor C g to change the quantum state of the transmon 111.
  • the number of Josephson junction JJs is not limited to one, and when two Josephson junction JJs are connected in parallel to form a dc-SQUID configuration, or when Josephson junction JJs of different sizes are connected in parallel (Flux qubit, etc.), There may be cases where multiple Josephson-joined JJs of different sizes are connected (Fluxonium, etc.). In this way, the energy potential of the system may be adjusted according to the purpose depending on the number and size of the Josephson junction JJ.
  • FIG. 4a is a diagram showing the first step of the manufacturing process of the quantum circuit 11 according to the present embodiment.
  • resists 41, 42, and 43 are patterned on the metal layer 30.
  • FIG. 4b is a diagram showing a second step of the manufacturing process of the quantum circuit 11 according to the present embodiment.
  • the metal layer 30 is etched by ion beam etching, reactive ion etching, chemical etching, or the like to obtain the first ground wire 31, the signal wire 32, and the second ground wire 33. It is formed and the resists 41, 42, and 43 are removed.
  • FIG. 4c is a diagram showing a third step of the manufacturing process of the quantum circuit 11 according to the present embodiment.
  • a metal such as aluminum is vapor-deposited on the signal line 32 by diagonal vapor deposition using the mask 60.
  • FIG. 4d is a diagram showing a fourth step of the manufacturing process of the quantum circuit 11 according to the present embodiment.
  • the obliquely vapor-deposited aluminum layer 50 is naturally oxidized to form the aluminum oxide layer 51.
  • the aluminum oxide layer 51 is an insulating layer.
  • FIG. 4e is a diagram showing a fifth step of the manufacturing process of the quantum circuit 11 according to the present embodiment.
  • a metal such as aluminum is vapor-deposited on the aluminum oxide layer 51 and the signal line 32 by diagonal vapor deposition using the mask 61.
  • FIG. 4f is a diagram showing a sixth step of the manufacturing process of the quantum circuit 11 according to the present embodiment.
  • the aluminum layer 52 is formed on the aluminum oxide layer 51 to form a Josephson junction.
  • FIG. 4g is a diagram showing the seventh step of the manufacturing process of the quantum circuit 11 according to the present embodiment.
  • an insulating layer or a metal layer is deposited on the first ground wire 31 and the second ground wire 33 by a sputtering method or the like using a mask 62, and the first shield 15a is deposited.
  • the second shield 15b is formed.
  • a chemical vapor deposition method or the like may be used.
  • the waveguide 12 includes the ground lines 31 and 33 and the signal line 32, respectively, and the shield 15 may be provided on the ground lines 31 and 33, respectively.
  • the shield 15 By providing the shield 15 on the ground lines 31 and 33, the height of the shield 15 can be made sufficiently higher than the signal line 32, and the electromagnetic field leaking from the signal line 32 can be shielded.
  • the width of the signal line 32 is expressed as s and the distance between the signal line 32 and the ground line 31 (distance between the signal line 32 and the ground line 33) is expressed as g, the width of the ground lines 31 and 33 is s + g or more. Therefore, by providing the shield 15 on the ground wires 31 and 33, the electromagnetic field can be shielded more efficiently.
  • the electromagnetic field can be shielded more efficiently.
  • FIG. 5a is a perspective view showing an example of the configuration of the quantum circuit system 10a according to the second embodiment of the present invention. Further, FIG. 5b is a diagram showing details of the configuration of the quantum circuit system 10a according to the present embodiment.
  • the quantum circuit system 10a according to the present embodiment includes a first quantum circuit 11a, a second quantum circuit 11b, a third quantum circuit 11c, and a fourth quantum circuit 11d. Further, the quantum circuit system 10a includes a read circuit 14 for reading the quantum states of the first quantum circuit 11a, the second quantum circuit 11b, the third quantum circuit 11c, and the fourth quantum circuit 11d.
  • the quantum circuit system 10a includes a first coaxial cable 113a electrically connected to the first quantum circuit 11a and a read coaxial cable 14a electrically connected to the read circuit 14. Similarly, the quantum circuit system 10a is electrically connected to the second coaxial cable electrically connected to the second quantum circuit 11b, the third coaxial cable electrically connected to the third quantum circuit 11c, and the fourth quantum circuit 11d. A fourth coaxial cable is provided (not shown).
  • the first coaxial cable 113a is electrically connected to a first high-frequency power source that propagates high-frequency power to change the first quantum circuit 11a into a predetermined quantum state.
  • the second coaxial cable, the third coaxial cable, and the fourth coaxial cable propagate high-frequency power to change the second quantum circuit 11b, the third quantum circuit 11c, and the fourth quantum circuit 11d into predetermined quantum states, respectively. It is electrically connected to the second high frequency power supply, the third high frequency power supply, and the fourth high frequency power supply.
  • the first coaxial cable 113a, the second coaxial cable, the third coaxial cable, and the fourth coaxial cable are used in the first waveguide, the second waveguide, the third waveguide, and the fourth coaxial cable of the present invention.
  • the first waveguide and the second waveguide extend in a direction intersecting the main surface on which the first quantum circuit 11a and the second quantum circuit 11b are formed. More specifically, the first waveguide and the second waveguide extend in a direction substantially orthogonal to the main surface on which the first quantum circuit 11a and the second quantum circuit 11b are formed.
  • the quantum circuit system 10a includes a first shield 15a and a second shield provided on the main surface on which the first quantum circuit 11a, the second quantum circuit 11b, the third quantum circuit 11c, and the fourth quantum circuit 11d are formed.
  • the object 15b, the third shield 15c, and the fourth shield 15d are provided. With such a configuration, it is possible to suppress the interference of a plurality of lines when reading the quantum state of the quantum circuit 11, and to suppress the interference of the interaction between the quantum circuits 11.
  • the first shield 15a, the second shield 15b, the third shield 15c, and the fourth shield 15d may be provided in the arrangement shown by the broken line instead of the arrangement shown by the solid line in FIG. 5a, or the solid line. It may be provided in both the arrangement shown by and the arrangement shown by the broken line.
  • FIG. 6a is a top view showing an example of the configuration of the quantum circuit system 10b according to the third embodiment of the present invention. Further, FIG. 6b is a top view showing the configuration of the quantum circuit system 10b according to the present embodiment, and FIG. 6c is a cross-sectional view showing the configuration of the quantum circuit system 10b according to the present embodiment. Note that FIG. 6a does not show the third metal layer 153, but shows the first coupling line 17 and the second coupling line 18 covered by the third metal layer 153. Further, FIG. 6c is a cross-sectional view taken along the line VIc-VIc shown in FIG. 6b.
  • the quantum circuit system 10a includes a first quantum circuit 11a, a second quantum circuit 11b, a third quantum circuit 11c, and a fourth quantum circuit 11d. Further, the quantum circuit system 10a includes a read circuit 14 for reading the quantum states of the first quantum circuit 11a, the second quantum circuit 11b, the third quantum circuit 11c, and the fourth quantum circuit 11d.
  • the quantum circuit system 10a includes a first coaxial cable electrically connected to the first quantum circuit 11a and a read coaxial cable electrically connected to the read circuit 14 (not shown). Similarly, the quantum circuit system 10a is electrically connected to the second coaxial cable electrically connected to the second quantum circuit 11b, the third coaxial cable electrically connected to the third quantum circuit 11c, and the fourth quantum circuit 11d. A fourth coaxial cable is provided (not shown).
  • the first coaxial cable is electrically connected to a first high-frequency power source that propagates high-frequency power to change the first quantum circuit 11a into a predetermined quantum state.
  • the second coaxial cable, the third coaxial cable, and the fourth coaxial cable propagate high-frequency power to change the second quantum circuit 11b, the third quantum circuit 11c, and the fourth quantum circuit 11d into predetermined quantum states, respectively. It is electrically connected to the second high frequency power supply, the third high frequency power supply, and the fourth high frequency power supply.
  • the first coaxial cable, the second coaxial cable, the third coaxial cable, and the fourth coaxial cable correspond to the first waveguide, the second waveguide, the third waveguide, and the fourth coaxial cable of the present invention.
  • the first waveguide and the second waveguide extend in a direction intersecting the main surface on which the first quantum circuit 11a and the second quantum circuit 11b are formed. More specifically, the first waveguide and the second waveguide extend in a direction substantially orthogonal to the main surface on which the first quantum circuit 11a and the second quantum circuit 11b are formed.
  • the quantum circuit system 10b includes a shield provided on a surface separated from the main surface on which the first quantum circuit 11a, the second quantum circuit 11b, the third quantum circuit 11c, and the fourth quantum circuit 11d are formed. .. More specifically, the quantum circuit system 10b includes a third metal layer 153 provided on a surface separated from the main surface on which the quantum circuit 11 is formed. With such a configuration, it is possible to shield the leaking electromagnetic field generated on the main surface on which the quantum circuit 11 is formed and prevent interference.
  • the shield covers the first coupling line 17 that electromagnetically connects the first quantum circuit 11a and the second quantum circuit 11b so as to cover the first coupling line 17 in the normal direction of the main surface. It is provided at a position higher than 17.
  • the first coupling line 17 includes the first quantum circuit 11a and the second quantum circuit 11b, the second quantum circuit 11b and the third quantum circuit 11c, and the third quantum circuit 11c and the fourth quantum circuit 11d.
  • the fourth quantum circuit 11d and the first quantum circuit 11a are electrically connected to each other.
  • the third metal layer 153 which is a shield, is provided so as to cover the first coupling line 17. With such a configuration, it is possible to shield the leaking electromagnetic field generated in the first coupling line 17 and prevent interference with other circuits.
  • the shield covers the second coupling line 18 that electromagnetically connects the first quantum circuit 11a and the second quantum circuit 11b and the reading circuit 14, in the normal direction of the main surface. , Is provided at a position higher than the second coupling line 18.
  • the second coupling line 18 includes a first quantum circuit 11a and a read circuit 14, a second quantum circuit 11b and a read circuit 14, a third quantum circuit 11c and a read circuit 14, and a fourth quantum circuit 11d.
  • the read circuit 14 are electromagnetically connected to each other.
  • the third metal layer 153 which is a shield, is provided so as to cover the second coupling line 18. With such a configuration, it is possible to shield the leaking electromagnetic field generated in the second coupling line 18 and prevent interference with other circuits.
  • the shield of the present embodiment includes the first metal layer 151, the second metal layer 152, and the third metal layer 153.
  • the first metal layer 151 is formed in a rectangular shape so as to surround the first quantum circuit 11a, the second quantum circuit 11b, the third quantum circuit 11c, and the fourth quantum circuit 11d.
  • the second metal layer 152 is formed in a triangular shape in a triangular region formed by the two quantum circuits 11 and the read circuit 14.
  • the third metal layer 153 includes a portion that straddles the first metal layer 151 and the second metal layer 152, and a portion that straddles the second metal layer 152. The portion of the third metal layer 153 that straddles the first metal layer 151 and the second metal layer 152 covers the first coupling line 17.
  • the second metal layer 152 may be provided in an arrangement shown by a broken line instead of the arrangement shown by the solid line in FIG. 6a, or may be provided in both the arrangement shown by the solid line and the arrangement shown by the broken line.
  • 10 ... Quantum circuit system 10a ... Quantum circuit system according to the second embodiment, 10b ... Quantum circuit system according to the third embodiment, 11a ... First quantum circuit, 11b ... Second quantum circuit, 11c ... Third quantum circuit , 11d ... 4th quantum circuit, 12a ... 1st waveguide, 12b ... 2nd waveguide, 12c ... 3rd waveguide, 12d ... 4th waveguide, 14 ... Read circuit, 14a ... Read coaxial cable, 13a ... 1 high frequency power supply, 13b ... second high frequency power supply, 13c ... third high frequency power supply, 13d ... fourth high frequency power supply, 14 ... reading circuit, 15a ... first shield, 15b ... second shield, 15c ...
  • third shield 17 ... 1st coupling line, 18 ... 2nd coupling line, 20 ... user terminal, 30 ... metal layer, 31 ... 1st ground line, 32 ... signal line, 33 ... 2nd ground line, 41, 42, 43 ... Resist, 50, 52 ... Aluminum layer, 51 ... Aluminum oxide layer, 60, 61, 62 ... Mask, 100 ... Quantum computing system, 111 ... Transmon, 112 ... Resonator, 113a ... First coaxial cable, 151 ... First metal Layer, 152 ... 2nd metal layer, 153 ... 3rd metal layer

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Abstract

L'invention concerne un système de circuit quantique capable d'empêcher un changement involontaire de l'état quantique. Un système de circuit quantique 10 comprend : un premier circuit quantique 11a et un second circuit quantique 11b qui sont aptes à représenter au moins deux états quantiques ; un premier guide d'ondes 12a connecté électromagnétiquement au premier circuit quantique 11 et un second guide d'ondes 12b connecté de manière électromagnétique au second circuit quantique 11b ; et un blindage 15 qui est composé d'un diélectrique ou d'un métal, et qui est supérieur aux hauteurs du premier guide d'ondes 12a et du second guide d'ondes 12b dans une direction perpendiculaire à une surface principale sur laquelle le premier circuit quantique 11 et le second circuit quantique 11b sont formés.
PCT/JP2019/038936 2019-10-02 2019-10-02 Système de circuit quantique WO2021064901A1 (fr)

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PCT/JP2019/038936 WO2021064901A1 (fr) 2019-10-02 2019-10-02 Système de circuit quantique
JP2020538738A JP6986788B2 (ja) 2019-10-02 2019-10-02 量子回路システム

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Citations (4)

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Publication number Priority date Publication date Assignee Title
JP2016509800A (ja) * 2013-01-18 2016-03-31 イェール ユニバーシティーＹａｌｅ Ｕｎｉｖｅｒｓｉｔｙ 少なくとも１つの囲いを有する超伝導デバイス
US20160292586A1 (en) * 2014-02-28 2016-10-06 Rigetti & Co., Inc. Operating a multi-dimensional array of qubit devices
US20180232653A1 (en) * 2016-03-11 2018-08-16 Rigetti & Co., Inc. Impedance-Matched Microwave Quantum Circuit Systems
US20180247974A1 (en) * 2015-07-23 2018-08-30 Massachusetts Institute Of Technology Superconducting Integrated Circuit

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016509800A (ja) * 2013-01-18 2016-03-31 イェール ユニバーシティーＹａｌｅ Ｕｎｉｖｅｒｓｉｔｙ 少なくとも１つの囲いを有する超伝導デバイス
US20160292586A1 (en) * 2014-02-28 2016-10-06 Rigetti & Co., Inc. Operating a multi-dimensional array of qubit devices
US20180247974A1 (en) * 2015-07-23 2018-08-30 Massachusetts Institute Of Technology Superconducting Integrated Circuit
US20180232653A1 (en) * 2016-03-11 2018-08-16 Rigetti & Co., Inc. Impedance-Matched Microwave Quantum Circuit Systems

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