WO2021013024A1 - 一种蝇眼透镜的制备方法 - Google Patents

一种蝇眼透镜的制备方法 Download PDF

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WO2021013024A1
WO2021013024A1 PCT/CN2020/102247 CN2020102247W WO2021013024A1 WO 2021013024 A1 WO2021013024 A1 WO 2021013024A1 CN 2020102247 W CN2020102247 W CN 2020102247W WO 2021013024 A1 WO2021013024 A1 WO 2021013024A1
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fly
eye
mold
base
preparing
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PCT/CN2020/102247
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English (en)
French (fr)
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戴博
张良
张大伟
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上海理工大学
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Priority to US17/422,171 priority Critical patent/US20220113454A1/en
Publication of WO2021013024A1 publication Critical patent/WO2021013024A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses

Definitions

  • the invention relates to a fly-eye lens, in particular to a method for preparing a fly-eye lens.
  • fly-eye lenses have a wide range of applications in three-dimensional imaging, medical equipment, intelligent robots and other fields. As a core optical element, fly-eye lens has played an important role in many applications, and some methods of making fly-eye lens have been proposed successively.
  • the paper "Dragonfly-Eye-Inspired Artificial Compound Eyes with Sophisticated Imaging” (vol.26(12), pp.1995-2001, Advanced Functional Materials, 2016) introduces a method of using thermal embossing on a ball to perform a flat lens array. Method of making fly-eye lens by imprinting.
  • the paper "Mining the Smartness of Insect Ultrastructures for Advanced Imaging and Illumination” (vol.28(24), pp.1705912, Advanced Functional Materials, 2018) introduces a method of using photoresist to make a flat lens array and using poly
  • the siloxane is inverted to make an elastic film, the elastic film is bent into a hemispherical shape, and a photolithography material is added for UV curing to make a fly-eye lens.
  • the purpose of the present invention is to provide a method for preparing a fly-eye lens in order to overcome the above-mentioned defects in the prior art.
  • a method for preparing a fly-eye lens includes the following steps:
  • the fly-eye mold is provided with a hemispherical recess that matches the fly-eye base, and the bottom of the hemispherical recess is provided with a plurality of concave surfaces distributed in an array;
  • the fly-eye base is a hemispherical structure with a spherical surface and a flat micro-pipe passing through the fly-eye base, and the opening of the micro-pipe on the spherical surface of the fly-eye base and the fly-eye mold The arrangement of the concave surface is consistent;
  • the fly-eye base is matched and installed in the fly-eye mold, and polydimethylsiloxane is injected through the micro-pipe of the fly-eye base, and the polydimethylsiloxane is cured, and the fly-eye The base is taken out from the fly-eye mold to obtain a fly-eye lens.
  • the preparation principle of the present invention is: a concave structure is processed on the fly-eye mold, and the fly-eye base is provided with a micropipe that matches the position and shape of the concave structure, so when the fly-eye base is installed in the fly-eye base, When, the opening on the spherical surface of the micro-pipe is exactly aligned with the concave surface inside the fly-eye base, the shape of the opening and the concave surface match, and then polydimethylsiloxane is injected into the micro-pipe of the fly-eye base, after curing Then, a convex spherical cap is processed at the opening of the micro-pipe on the spherical surface of the fly-eye base as a convex lens; the inside of the micro-pipe is fully filled with cured polydimethylsiloxane, which can be used as an optical waveguide, with a hemispherical top
  • the light collected by the convex lens can be transmitted to the bottom of the fly-eye
  • the method for preparing the fly-eye mold includes the following steps: taking an initial mold with a hemispherical pit on the surface, and a microhole with a central axis pointing to the center of the hemispherical pit is provided at the bottom of the pit Array; spin-coating photoresist on the surface of the initial mold, curing the photoresist with an ultraviolet lamp, and forming the concave surface at the opening of the spherical surface of the hemispherical pit in the microhole array.
  • the hemispherical fly-eye mold After spin-coating the photoresist, the hemispherical fly-eye mold is allowed to stand, and the photoresist remains in the micropores. Due to the capillary force, the liquid surface of the photoresist forms a concave spherical surface with the same curvature. After curing, , A concave surface is formed inside the fly-eye mold to match the micro-pipe; this fly-eye mold can be used multiple times to engrave the fly-eye lens. In addition, the concave structure processed by this method has a smooth surface and good curvature, and the processing method is relatively simple and easy.
  • the process of spin-coating photoresist on the surface of the initial mold specifically includes injecting the photoresist into the initial mold, and sequentially undergoing the first vacuum treatment, the first standing treatment, the leveling treatment, and the second standing. deal with.
  • the use of vacuuming and standing treatment is conducive to exhaust the gas in the eagle eye mold and is conducive to the injection of photoresist into the micropores.
  • the rotation speed of the homogenizer is 500-4000 rpm, and the homogenization time is 5-40s.
  • the time for the first standing treatment is 1-2 minutes, and the time for the second standing treatment is 2-5 minutes.
  • the initial mold is prepared by 3D printing technology.
  • the fly-eye base and the fly-eye mold are fixedly connected by a non-marking tape.
  • the bubbles in the polydimethylsiloxane are first removed, and then the matched fly-eye mold is poured and vacuumed.
  • the curing temperature of the polydimethylsiloxane is 60-85°C, and the curing time is 2-6 hours.
  • the fly-eye base is prepared by using 3D printing technology.
  • the present invention has the following advantages:
  • the preparation method of the present invention is suitable for the production of micron-level fly-eye lenses, and the manufactured fly-eye lens has a small overall size, a small size of a single lens, and a fine light guide structure;
  • the preparation method of the present invention has short production cycle, low cost, simple method, and the fly-eye mold can be used repeatedly.
  • Figure 1 is a schematic diagram of the top view of the initial mold in the present invention.
  • Figure 2 is a schematic side view of the structure of the initial mold in the present invention.
  • Figure 3 is a schematic top view of the fly-eye base of the present invention.
  • Figure 4 is a schematic side view of the fly-eye base of the present invention.
  • Fig. 5 is a schematic diagram of spin-coating photoresist on the initial mold of the present invention.
  • Figure 6 is a schematic side view of the fly-eye mold of the present invention.
  • Figure 7 is a schematic diagram of injection-molded polydimethylsiloxane in the present invention.
  • Fig. 8 is a schematic diagram of the structure of a fly-eye lens prepared by the present invention.
  • 1 is a fly-eye mold
  • 2 is a fly-eye base
  • 3 is a micropipe
  • 4 is a glue spreader
  • 5 is a photoresist
  • 6 is an initial mold.
  • a method for preparing a fly-eye lens includes the following steps:
  • the fly-eye mold 1 is provided with a hemispherical pit that matches the fly-eye base 2, and the bottom of the hemispherical pit is provided with a number of concave surfaces distributed in an array; the fly-eye base 2 is a hemispherical structure and is installed in the fly-eye mold. 1 in the hemispherical pit.
  • the preparation method of the fly-eye mold 1 is:
  • the initial mold 6 is processed and manufactured. As shown in Figures 1 and 2, the surface of the initial mold 6 is provided with hemispherical pits, and the bottom of the pits is provided with a micro-hole array. All points to the center of the hemispherical pit, and the initial mold 6 is cleaned in absolute ethanol. After cleaning, it is dried for use.
  • the photoresist 5 is spin-coated on the surface of the initial mold 6.
  • the specific process is to inject the SU-8 GN2005 photoresist 5 into the initial mold 6, and use a vacuum box for vacuum processing, so that the initial mold 6 is filled with SU-8 GN2005 light.
  • the speed of the homogenizer 4 is set to 500-4000rpm, and the homogenizer 4 is 5-40s.
  • the initial mold 6 After the glue is finished, put the initial mold 6 in a vacuum box for vacuum treatment. After processing, let it stand for 2-5 minutes. Because the liquid will appear capillary in the micropipe, the photoresist 5 will be in the micropore array. Concave surface appears. As shown in Figure 6, the initial mold 6 spin-coated with photoresist 5 is irradiated with an ultraviolet lamp to cure the photoresist 5, and the hemispherical pit bottom of the initial mold 6 forms an array of concave surfaces Structure, the fly-eye mold 1 is prepared, and the fly-eye mold 1 can be reused for replicating fly-eye lenses.
  • the hemispherical initial mold 6 is allowed to stand, and the photoresist 5 remains in the micropores. Due to the capillary force, the liquid surface of the photoresist 5 forms a concave spherical surface with the same curvature. After curing, a concave surface matching the micropipe 3 is formed inside the initial mold 6 to form a fly-eye mold 1; this fly-eye mold 1 can be used multiple times to engrave the fly-eye lens.
  • the concave structure processed by this method has a smooth surface and good curvature, and the processing method is relatively simple and easy.
  • the fly-eye base 2 has a hemispherical structure, and a micro-pipe 3 that penetrates the spherical surface of the fly-eye base 2 and a flat surface is provided inside, and the micro-pipe 3 has an opening on the spherical surface.
  • the arrangement is consistent with the arrangement of the concave surface in the fly-eye mold 1; and the opening of the micro-pipe 3 on the fly-eye base 2 on the spherical surface of the fly-eye base 2 matches the edge shape of the inner concave surface of the fly-eye mold 1.
  • the fly-eye base 2 with the corresponding structure is prepared by using 3D printing technology, and the fly-eye base 2 is cleaned in absolute ethanol, and dried after the cleaning, and is ready for use.
  • the fly-eye lens uses the fly-eye base 2 as a carrier, and the pipe mouth at the top of the hemisphere has a convex lens, and the pipe can be used as an optical waveguide.
  • the light collected by the hemispherical top lens can be transmitted to the bottom of the fly-eye base 2 through the optical waveguide.
  • the image information of the corresponding lens can be calculated, which is suitable for three-dimensional microscopic imaging, medical endoscopes and other fields.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Eyeglasses (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

一种蝇眼透镜的制备方法，包括以下步骤：准备蝇眼模具（1）和蝇眼基座（2）：蝇眼模具（1）上设有与蝇眼基座（2）匹配的半球状凹坑，半球状凹坑底部设有若干个阵列分布的凹面；蝇眼基座（2）为半球形结构，其内部设有贯穿蝇眼基座（2）的球形面和平面的微型管道（3），并且微型管道（3）在球形面上的开口排布与蝇眼模具（1）内凹面的排布一致；将蝇眼基座（2）配合安装于蝇眼模具（1）中，向蝇眼基座（2）的微型管道（3）中注塑聚二甲基硅氧烷，并使聚二甲基硅氧烷固化，将蝇眼基座（2）从蝇眼模具（1）中取出，得到蝇眼透镜。

Description

一种蝇眼透镜的制备方法 技术领域
本发明涉及一种蝇眼透镜，尤其是涉及一种蝇眼透镜的制备方法。
背景技术
蝇眼透镜在三维成像、医学器械、智能机器人等领域有着广泛的应用。蝇眼透镜作为一个核心光学元件，在众多应用中的都起到了重要的作用，已有一些蝇眼透镜制作的方法被先后提出。论文“Dragonfly-Eye-Inspired Artificial Compound Eyes with Sophisticated Imaging”(vol.26(12)，pp.1995-2001，Advanced Functional Materials，2016)介绍了一种利用热压印在球上对平面透镜阵列进行压印制作蝇眼透镜的方法。论文“Bioinspired Fabrication of High-Quality 3D Artificial Compound Eyes by Voxel-Modulation Femtosecond Laser Writing for Distortion-Free Wide-Field-of-View Imaging”(vol.2(8),pp.751-758,Advanced Functional Materials，2014)介绍了一种利用飞秒激光对球形材料进行刻蚀产生一系列曲面制作蝇眼透镜的方法。论文“Mining the Smartness of Insect Ultrastructures for Advanced Imaging and Illumination”(vol.28(24),pp.1705912,Advanced Functional Materials,2018)介绍了一种利用光刻胶制作平面透镜阵列后，利用聚二甲基硅氧烷倒模制作弹性膜，将弹性膜弯曲成半球状，加入光刻材料进行UV固化制作蝇眼透镜。然而，基于热压印对平面透镜进行压印制作蝇眼透镜的方法，以及利用PDMS制作弹性模再弯曲进行倒模制作蝇眼透镜的方法，操作过程复杂，蝇眼透镜变形大。基于飞秒激光刻蚀的制作蝇眼透镜的方法，只做过程复杂，耗时长，设备成本高。
发明内容
本发明的目的就是为了克服上述现有技术存在的缺陷而提供一种蝇眼透镜的制备方法。
本发明的目的可以通过以下技术方案来实现：
一种蝇眼透镜的制备方法，包括以下步骤：
准备蝇眼模具和蝇眼基座：所述蝇眼模具上设有与所述蝇眼基座匹配的半球状凹坑，所述半球状凹坑底部设有若干个阵列分布的凹面；所述蝇眼基座为半球形结构，其内部设有贯穿蝇眼基座的球形面和平面的微型管道，并且该微型管道在所述蝇眼基座的球形面上的开口与所述蝇眼模具内凹面的排布一致；
将所述蝇眼基座配合安装于所述蝇眼模具中，通过所述蝇眼基座的微型管道注塑聚二甲基硅氧烷，并使聚二甲基硅氧烷固化，将蝇眼基座从蝇眼模具中取出，得到蝇眼透镜。
本发明的制备原理为：在蝇眼模具上加工出凹面结构，蝇眼基座上设有与凹面结构位置匹配、形状匹配的微型管道，因此当蝇眼基座配套安装于蝇眼基座中时，微型管道的在球形面上的开口正好对准蝇眼基座内部的凹面，开口和凹面的形状匹配，再向蝇眼基座的微型管道中注入聚二甲基硅氧烷，固化后则在蝇眼基座的球形面的微型管道口处加工出凸出的球冠作为凸面透镜；微型管道内部充分填充了固化的聚二甲基硅氧烷，可以当作光波导，半球形顶部凸面透镜收集的光，可以经光波导传至蝇眼基座的底部，通过检测蝇眼基座底部管道口处的光强，可以推算出相应透镜所对的图像信息。
本发明中，所述蝇眼模具制备方法包括以下步骤：取表面设有半球状凹坑的初始模具，并且所述凹坑的底部设有中心轴指向所述半球状凹坑球心的微孔阵列；在所述初始模具的表面旋涂光刻胶，采用紫外灯对光刻胶固化，在所述微孔阵列位于所述半球状凹坑的球形面的开口处形成所述凹面。
旋涂光刻胶后，将半球状的蝇眼模具静置，光刻胶残留在微孔中，由于受到毛细力的作用，光刻胶的液面形成相同曲率的下凹球面，经过固化后，则在蝇眼模具内部形成与微型管道配合的凹面；这种蝇眼模具可以多次使用，复刻蝇眼透镜。并且这种方式加工出的凹面结构表面光滑、曲率好，加工方式也较为简单易行。
所述初始模具的表面旋涂光刻胶过程具体为将所述光刻胶注入初始模具中，依次经过第一次抽真空处理、第一次静置处理、匀胶处理和第二次静置处理。采用抽真空以及静置处理，有利于排出鹰眼模具中的气体，有利于光刻胶注入微孔中。
所述匀胶处理时，匀胶机的转速为500～4000rpm，匀胶时间为5～40s。
所述第一次静置处理的时间为1-2分钟，所述第二次静置处理的时间为2-5分 钟。
所述初始模具采用3D打印技术制备得到。
所述蝇眼基座和蝇眼模具采用无痕胶带配合固定连接。
注塑聚二甲基硅氧烷时，先去除聚二甲基硅氧烷中的气泡，然后对配合好的蝇眼模进行灌注，并进行抽真空处理。
所述聚二甲基硅氧烷的固化温度为60～85℃，固化时间为2～6小时。
所述蝇眼基座采用3D打印技术制备得到。
与现有技术相比，本发明具有以下优点：
(1)本发明的制备方法可适用于微米量级的蝇眼透镜制作，制作出的蝇眼透镜整体尺寸小，单个透镜尺寸小，导光结构细微；
(2)本发明的制备方法制作周期短、成本低、方法简单，并且蝇眼模具可以反复使用。
附图说明
图1为本发明中初始模具的俯视结构示意图；
图2为本发明中初始模具的侧视结构示意图；
图3为本发明中蝇眼基座的俯视结构示意图；
图4为本发明中蝇眼基座的侧视结构示意图；
图5为本发明中初始模具旋涂光刻胶的示意图；
图6为本发明中蝇眼模具的侧视结构示意图；
图7为本发明中注塑聚二甲基硅氧烷的示意图；
图8为本发明制备得到的蝇眼透镜的结构示意图；
图中，1为蝇眼模具、2为蝇眼基座、3为微型管道、4为匀胶机、5为光刻胶、6为初始模具。
具体实施方式
下面结合具体实施例对本发明进行详细说明。以下实施例将有助于本领域的技术人员进一步理解本发明，但不以任何形式限制本发明。应当指出的是，对本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进。这些都属于本发明的保护范围。
实施例
一种蝇眼透镜的制备方法，包括以下步骤：
(1)蝇眼模具1的制备
蝇眼模具1上设有与蝇眼基座2匹配的半球状凹坑，半球状凹坑底部设有若干个阵列分布的凹面；蝇眼基座2为半球形结构，配套安装于蝇眼模具1上的半球状凹坑中。
该蝇眼模具1的制备方法为：
采用3D打印技术，加工制作出初始模具6，如图1和图2所示，该初始模具6的表面设有半球状凹坑，并且凹坑的底部设有微孔阵列，所有微孔中心轴都指向半球状凹坑的球心，将初始模具6放入无水乙醇中清洗，清洗完毕后进行干燥处理，备用。
在初始模具6的表面旋涂光刻胶5，具体过程为将SU-8 GN2005光刻胶5注入初始模具6中，使用真空箱进行抽真空处理，使得初始模具6中充满SU-8 GN2005光刻胶5，抽完真空后，将初始模具6手动摆匀放置于匀胶机4的离心片托上，如图5所示，静置1-2分钟，根据温度和湿度设定转速、时间，温度影响光刻胶5粘稠度；湿度影响光刻胶5与衬底粘附力，一般设定匀胶机4转速为500～4000rpm，匀胶5～40s。胶结束后，将初始模具6放入真空箱中进行抽真空处理，处理完后静置2-5分钟，由于液体在微细管道中会出现毛细现象，光刻胶5在微孔阵列中将会出现凹液面，如图6所示，使用紫外线灯对旋涂有光刻胶5的初始模具6进行照射，使光刻胶5固化，则初始模具6的半球状凹坑底部则形成阵列分布的凹面结构，制备得到了蝇眼模具1，该蝇眼模具1可以重复使用，用于复刻蝇眼透镜。
旋涂光刻胶5后，将半球状的初始模具6静置，光刻胶5残留在微孔中，由于受到毛细力的作用，光刻胶5的液面形成相同曲率的下凹球面，经过固化后，则在初始模具6内部形成与微型管道3配合的凹面，形成了蝇眼模具1；这种蝇眼模具1可以多次使用，复刻蝇眼透镜。并且这种方式加工出的凹面结构表面光滑、曲率好，加工方式也较为简单易行。
(2)蝇眼基座2的制备
如图3和图4所示，蝇眼基座2为半球形结构，其内部设有贯穿蝇眼基座2的球形面和平面的微型管道3，并且该微型管道3在球形面上的开口排布与蝇眼模具1内的凹面的排布一致；并且蝇眼基座2上的微型管道3在蝇眼基座2的球形面 上的开口与蝇眼模具1内部凹面的边缘形状匹配。
采用3D打印技术制备得到具有相应结构的蝇眼基座2，对蝇眼基座2放入无水乙醇中清洗，清洗完毕后进行干燥处理，备用。
(3)蝇眼透镜的制备
将蝇眼基座2配合安装于蝇眼模具1中，并使用无痕胶带将二者固定；注塑聚二甲基硅氧烷，将聚二甲基硅氧烷调配好去除气泡后，向配合好的蝇眼基座2的微型管道3中注塑聚二甲基硅氧烷，如图7所示，并进行抽真空处理；将处理后的蝇眼基座2和蝇眼模具1放入烘箱内85℃进行烘烤，烘烤时间2小时，使聚二甲基硅氧烷固化，然后后将蝇眼模具1与蝇眼基座2脱离，脱离后的蝇眼基座2即为制备得到的蝇眼透镜，如图8所示。蝇眼透镜由蝇眼基座2作为载体，其半球形顶部的管道口处具有凸面透镜，管道可以当作光波导。半球形顶部透镜收集的光，可以经光波导传至蝇眼基座2的底部。通过检测蝇眼基座2底部管道口处的光强，可以推算出相应透镜所对的图像信息，适用于三维显微成像、医疗内窥镜等领域。
以上对本发明的具体实施例进行了描述。需要理解的是，本发明并不局限于上述特定实施方式，本领域技术人员可以在权利要求的范围内做出各种变形或修改，这并不影响本发明的实质内容。

Claims (10)

  1. 一种蝇眼透镜的制备方法，其特征在于，包括以下步骤：
    准备蝇眼模具和蝇眼基座：所述蝇眼模具上设有与所述蝇眼基座匹配的半球状凹坑，所述半球状凹坑底部设有若干个阵列分布的凹面；所述蝇眼基座为半球形结构，其内部设有贯穿蝇眼基座球形面和平面的微型管道，并且该微型管道在所述蝇眼基座的球形面上的开口与所述蝇眼模具内的凹面排布一致；
    将所述蝇眼基座配合安装于所述蝇眼模具中，通过所述蝇眼基座的微型管道注塑聚二甲基硅氧烷，并使聚二甲基硅氧烷固化，将蝇眼基座从蝇眼模具中取出，得到蝇眼透镜。
  2. 根据权利要求1所述的一种蝇眼透镜的制备方法，其特征在于，所述蝇眼模具制备方法包括以下步骤：取表面设有半球状凹坑的初始模具，并且所述凹坑的底部设有中心轴指向所述半球状凹坑球心的微孔阵列；在所述初始模具的表面旋涂光刻胶，采用紫外灯对光刻胶固化，在所述微孔阵列位于所述半球状凹坑的球形面的开口处形成所述凹面。
  3. 根据权利要求2所述的一种蝇眼透镜的制备方法，其特征在于，所述初始模具的表面旋涂光刻胶过程具体为将所述光刻胶注入初始模具中，依次经过第一次抽真空处理、第一次静置处理、匀胶处理和第二次静置处理。
  4. 根据权利要求3所述的一种蝇眼透镜的制备方法，其特征在于，所述匀胶处理时，匀胶机的转速为500～4000rpm，匀胶时间为4～40s。
  5. 根据权利要求3所述的一种蝇眼透镜的制备方法，其特征在于，所述第一次静置处理的时间为1-2分钟，所述第二次静置处理的时间为2-5分钟。
  6. 根据权利要求2所述的一种蝇眼透镜的制备方法，其特征在于，所述初始模具采用3D打印技术制备得到。
  7. 根据权利要求1所述的一种蝇眼透镜的制备方法，其特征在于，所述蝇眼基座和蝇眼模具采用无痕胶带配合固定连接。
  8. 根据权利要求1所述的一种蝇眼透镜的制备方法，其特征在于，注塑聚二甲基硅氧烷时，先去除聚二甲基硅氧烷中的气泡，然后对配合好的蝇眼模进行灌注，并进行抽真空处理。
  9. 根据权利要求1所述的一种蝇眼透镜的制备方法，其特征在于，所述聚二甲基硅氧烷的固化温度为60～85℃，固化时间为2～6小时。
  10. 根据权利要求1所述的一种蝇眼透镜的制备方法，其特征在于，所述蝇眼基座采用3D打印技术制备得到。
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