WO2021007961A1 - 喷淋装置 - Google Patents

喷淋装置 Download PDF

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Publication number
WO2021007961A1
WO2021007961A1 PCT/CN2019/110067 CN2019110067W WO2021007961A1 WO 2021007961 A1 WO2021007961 A1 WO 2021007961A1 CN 2019110067 W CN2019110067 W CN 2019110067W WO 2021007961 A1 WO2021007961 A1 WO 2021007961A1
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WO
WIPO (PCT)
Prior art keywords
upper frame
eccentric wheel
frame
spray device
spraying
Prior art date
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PCT/CN2019/110067
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English (en)
French (fr)
Inventor
陈建锋
Original Assignee
武汉华星光电半导体显示技术有限公司
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Application filed by 武汉华星光电半导体显示技术有限公司 filed Critical 武汉华星光电半导体显示技术有限公司
Priority to US16/630,440 priority Critical patent/US20210162432A1/en
Publication of WO2021007961A1 publication Critical patent/WO2021007961A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B3/00—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements
    • B05B3/14—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with oscillating elements; with intermittent operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/024—Cleaning by means of spray elements moving over the surface to be cleaned
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133792—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by etching

Definitions

  • the invention relates to the technical field of microelectronic processing equipment, in particular to a spray device used in the production process of liquid crystal displays.
  • LCD Liquid Crystal Display
  • OLED Organic Light Emitting Diode
  • CRT cathode Ray Tube
  • the LCD display device is formed by bonding a thin film transistor array substrate (TFT Array Substrate) and a color filter (CF) substrate, and is filled between the TFT substrate and the CF substrate.
  • TFT Array Substrate thin film transistor array substrate
  • CF color filter
  • the liquid crystal controls the direction of the liquid crystal molecules to change direction by energizing or not, and refract the light from the backlight module to produce images.
  • ITO Indium Tin Oxide, indium tin oxide
  • ITO Indium Tin Oxide, indium tin oxide
  • ITO transparent display electrodes In the process of making ITO transparent display electrodes, first an ITO film is formed by magnetron sputtering, then a photoresist pattern is formed by photolithography, and finally the ITO film is patterned by wet etching to form the final transparent display electrode.
  • FIG. 1 it is a flow chart of the prior art for spray etching of ITO thin films.
  • the substrate covered with the ITO film on the surface enters the inlet unit (IN CV), removes the organic matter on the surface in the cleaning chamber (EUV), and then enters the etching chamber (ETCH).
  • the ITO film that does not need to be retained on the substrate that is, the ITO film that is not covered by the photoresist pattern
  • the substrate is then sent out, cleaned by a water washing unit (SWR) to remove the residual etching liquid on the substrate surface, and finally dried and sent out of the spray device by the transfer unit (NT) and the outlet unit (OUT CV).
  • SWR water washing unit
  • the cleaning chamber (EUV), the etching chamber (ETCH) and the water washing unit (SWR) all use a fixedly installed spray device to spray the substrate, because the cleaning chamber (EUV) and the water washing unit (SWR) will wash When impurities are removed, the etching solution will crystallize in the etching chamber (ETCH). Therefore, the nozzle on the spray device will be blocked during the production process, or other reasons may cause spray deviation, which will result in uneven substrate spraying and ultimately lead to product failure.
  • the present invention provides a spray device that drives the spray frame to perform reciprocating spraying, thereby ensuring uniform substrate spraying, reducing spray deviation, making substrate spraying uniform, and improving production efficiency and products quality.
  • the present invention provides a spray device, which can be used in the production process of liquid crystal displays, is arranged in the spray chamber, and includes an upper frame, a connecting frame, an eccentric wheel and a motor.
  • the upper frame can be movably installed on the top of the spraying chamber; a plurality of nozzles are evenly arranged under the upper frame; the connection is erected on one side of the upper frame, through a shaking
  • the rod is rotatably connected with the eccentric wheel; the motor drives the eccentric wheel to rotate; wherein the eccentric wheel includes a central hole, a plurality of eccentric holes and a connecting rod; the central hole is fixedly connected with the eccentric wheel;
  • the eccentric hole is arranged on the eccentric wheel; the connecting rod is fixedly installed on the eccentric hole, the rocker is sleeved on the connecting rod to realize a rotatable connection, and the connecting rod follows the eccentric The rotation of the wheel drives the rocker to realize the reciprocating movement of the upper frame.
  • a gear box is further included between the eccentric wheel and the motor, one end of the gear box is rotatably connected to the central shaft of the eccentric wheel through a first gear, and the other end of the gear box is rotatably connected to the center shaft of the eccentric wheel through a second gear.
  • the motor can be rotatably connected.
  • the spray device further includes a lower frame, and a plurality of nozzles are evenly arranged on the upper surface of the lower frame; the lower frame is fixedly connected to the upper frame; the lower frame and The upper frame synchronously reciprocates and sprays the substrate located between the two.
  • the upper frame further includes a plurality of ducts and a collecting duct, the ducts are connected to the liquid inlet of the nozzle in a one-to-one correspondence, and the other ends of the plurality of ducts of the collecting duct are all connected to the collecting duct. catheter.
  • the upper frame further includes at least one roller set on the surface of the upper frame, so that the upper frame can slide in a reciprocating direction relative to the top of the spray chamber.
  • rollers are located on the lower surface of the upper frame and are distributed on both sides of the upper frame in the reciprocating direction.
  • rollers are located on the upper surface of the upper frame and are distributed at the center of the upper frame in the reciprocating direction, and the rollers can be slidably installed on the top of the spray chamber.
  • the upper frame further includes a hinge rod, one end of the hinge rod is rotatably arranged on the upper surface of the upper frame, and the other end of the hinge rod is rotatably arranged on the top of the spray chamber to achieve The frame reciprocates relative to the top of the spray chamber.
  • the hinge rod is rotatably arranged at the center line of the upper surface of the upper frame, and the center line is consistent with the direction of reciprocating motion.
  • the nozzle sprays pure water or etching liquid.
  • the beneficial effect of the present invention is to provide a spray device.
  • the spray frame By driving the spray frame to perform reciprocating spraying, the spray frame can swing at 30°-60° with different amplitudes, and can effectively avoid the blockage of individual nozzles. This results in uneven spraying of the substrate, thereby ensuring uniform spraying of the substrate, reducing spray deviation, making the substrate spraying uniform, and improving production efficiency and product quality.
  • Figure 1 is a flow chart of the prior art used for spray etching of ITO thin films
  • Figure 2 is a top view of the spray device according to the first embodiment of the present invention.
  • Figure 3 is a front view of the spray device according to the first embodiment of the present invention.
  • Figure 4 is a right side view of the spray device according to the first embodiment of the present invention.
  • FIG. 5 is a schematic diagram of the structure of the eccentric wheel according to the first embodiment of the present invention.
  • Fig. 6 is a schematic diagram of the oscillation principle of the eccentric according to the first embodiment of the present invention.
  • Fig. 7 is a right side view of the spray device according to the second embodiment of the present invention.
  • first and second are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined with “first” and “second” may explicitly or implicitly include one or more of the features. In the description of the present invention, “plurality” means two or more than two, unless specifically defined otherwise.
  • the terms “installed”, “connected”, “connected”, “fixed” and other terms should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. , Or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two components or the interaction relationship between two components.
  • installed can be a fixed connection or a detachable connection. , Or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two components or the interaction relationship between two components.
  • the substrate covered with the ITO film on the surface enters the inlet unit (IN CV), removes the organic matter on the surface in the cleaning chamber (EUV), and then enters the etching chamber (ETCH).
  • the ITO film that does not need to be retained on the substrate that is, the ITO film that is not covered by the photoresist pattern
  • the substrate is then sent out, cleaned by a water washing unit (SWR) to remove the residual etching liquid on the substrate surface, and finally dried and sent out of the spray device by the transfer unit (NT) and the outlet unit (OUT CV).
  • SWR water washing unit
  • the present invention provides a spray device 10, which can be used in the production process of liquid crystal displays, which is arranged in a spray chamber 20 (that is, an etching chamber or a water washing unit).
  • 10 includes an upper frame 1, a connecting frame 2, an eccentric wheel 3 and a motor 4.
  • the upper frame 1 can be movably installed on the top of the spray chamber 20; a plurality of nozzles 11 are evenly arranged under the upper frame 1; the connecting frame 2 is installed on the upper frame
  • One side of 1 is rotatably connected with the eccentric wheel 3 through a rocker 5; the motor 4 drives the central shaft 31 of the eccentric wheel 3 to rotate.
  • the eccentric wheel 3 is provided with a central hole 32, a plurality of eccentric holes 33 and a connecting rod 34.
  • the central hole 32 is arranged in the center of the eccentric wheel 3, the central shaft 31 penetrates the central hole 32 and is fixedly connected with the eccentric wheel 3; the distance between each eccentric hole 33 and the central hole 32 is different Different, the connecting rod 34 is fixedly installed on the eccentric hole 33, the rocker 5 is sleeved on the connecting rod 34 to realize a rotatable connection, and the connecting rod 34 is driven by the rotation of the eccentric wheel 3
  • the rocker 5 realizes the reciprocating movement of the upper frame 1.
  • the connecting rod 34 is installed in different eccentric holes 33 with different distances from the center hole, the upper frame 1 can realize the reciprocating movement of different amplitudes.
  • the motor 4 drives the eccentric wheel 3 to rotate, and the upper frame 1 is driven to reciprocate through the connecting rod 34 and the connecting frame 2, and the connecting rod 34 selects and After the eccentric holes 33 with different center hole distances are assembled, the upper frame 1 can swing at different amplitudes, that is, the upper frame 1 can reciprocate, and the vertical swing angle range of the upper frame 1 It is 30°-60°, preferably 30°, 45° or 60°. Please refer to FIG. 6, the relevant factors affecting the size of the swing angle ⁇ of the vertical line (dotted line in FIG.
  • the distance R1 between the eccentric hole 33 and the central hole 32 The length L of the rocker 5 and the radius R2 of the circle where the swing arc of the upper frame 1 is located.
  • the swing distance of the reciprocating motion of the upper frame 1 is The swing distance of the reciprocating motion of the upper frame 1 is the arc length corresponding to the swing angle ⁇ , which can be known from the arc length formula The angle value of ⁇ can be calculated.
  • the eccentric hole 33 is preferably arranged in a straight line to facilitate installation and beautiful appearance.
  • the provision of multiple eccentric holes 33 in this way can facilitate the adjustment of the deflection angle of the reciprocating movement of the upper frame 1, that is, the amplitude of the reciprocating movement of the upper frame 1, so that the base plate 30 located under the upper frame 1 can be removed from It can receive uniform spray, so the water receiving area per unit time increases, and the spray speed and uniformity are greatly improved.
  • a gear box 6 is further included between the eccentric wheel 3 and the motor 4, and one end of the gear box 6 is connected to the eccentric wheel 3 through a first gear 61.
  • the central shaft 31 is rotatably connected, and its other end is rotatably connected to the motor 4 through a second gear 62.
  • the spray device 10 further includes a lower frame 7, and a plurality of nozzles 11 are evenly arranged on the upper surface of the lower frame 7; 7 is fixedly connected to the upper frame 1; the lower frame 7 and the upper frame 1 reciprocate synchronously, spraying the substrate 30 between the two.
  • the upper frame 1 further includes a plurality of ducts 12 and a collective duct 15.
  • the pipe 12 is connected to the liquid inlet of the nozzle 11 in a one-to-one correspondence.
  • the other ends of the plurality of ducts 12 are all connected to the collecting duct 15 on the upper frame 1, which is convenient for simplifying the structure. All the ducts can be realized only by providing the collecting duct 15 with a spray liquid with a certain pressure. 12's spray.
  • the upper frame 1 further includes at least one roller 13, which is arranged on the surface of the upper frame 1, so that the upper frame 1 is relatively The top of the spray chamber 20 slides in the reciprocating direction.
  • the rollers 13 are located on the lower surface of the upper frame 1 and are distributed on both sides of the upper frame 1 in the reciprocating direction. In other embodiments, the roller 13 is located on the upper surface of the upper frame 1 and distributed in the center position of the upper frame 1 in the reciprocating direction, and the roller 13 can be slidably mounted on the upper frame 1 The top of the spray chamber 20.
  • the upper frame 1 further includes a hinge rod 14.
  • One end of the hinge rod 14 is rotatably arranged on the upper surface of the upper frame 1, and the hinge
  • the rod 14 is preferably located at the center line of the upper surface of the upper frame 1, and the center line is parallel to the direction of reciprocating motion.
  • the frame 1 reciprocates relative to the top of the spray chamber 20.
  • the hinge rod 14 can be rotatably arranged at the center line of the upper surface of the upper frame 1, and the center line is substantially parallel to the direction of reciprocating motion, that is, the center line and the reciprocating motion The direction is the same.
  • the nozzle 11 sprays pure water (ie, deionized water) or etching solution.
  • the spray device 10 of the present invention can be used as a cleaning device.
  • the spray chamber 20 is a water washing unit; when the nozzle 11 sprays etching liquid, the spray device 10 of the present invention It can be used as an etching device.
  • the spray chamber 20 is an etching chamber.
  • the beneficial effect of the present invention is to provide a spray device.
  • the spray frame By driving the spray frame to perform reciprocating spraying, the spray frame can swing at 30°-60° with different amplitudes, and can effectively avoid the blockage of individual nozzles. This results in uneven spraying of the substrate, thereby ensuring uniform spraying of the substrate, reducing spray deviation, making the substrate spraying uniform, and improving production efficiency and product quality.

Abstract

一种喷淋装置，能够用于液晶显示器的生产过程，设置于喷淋室内，其包括上机架（1）、连接架（2）、偏心轮（3）和马达（4）。偏心轮（3）包括中心孔（32）、多个偏心孔（33）和连杆（34）；中心孔（32）与偏心轮（3）固定连接；偏心孔（33）设置于偏心轮（3）上；连杆（34）固定安装于偏心孔（33）上，摇杆（5）套设于连杆（34）上实现可转动连接，马达（4）带动偏心轮（3）转动，连杆（34）随偏心轮（3）转动带动摇杆（5）实现上机架（1）做往复运动。通过该设置，喷淋装置通过带动喷淋机架进行往复运动喷淋，可实现喷淋机架进行30°-60°不同幅度的摆动，可有效避免因个别喷嘴堵塞造成对基板喷淋不均匀现象，从而保证基板喷淋均匀，减少喷淋偏差，提高生产效率和产品质量。

Description

喷淋装置 技术领域
本发明涉及微电子加工设备技术领域，尤其涉及一种用在液晶显示器生产过程中的喷淋装置。
背景技术
在显示技术领域，液晶显示器件(Liquid Crystal Display，LCD)与有机发光二极管显示器件(Organic Light Emitting Diode，OLED)等平板显示器件已经逐步取代阴极射线管(Cathode Ray Tube，CRT)显示器。
LCD显示器件是由一片薄膜晶体管阵列基板(Thin Film Transistor Array Substrate，TFT Array Substrate)与一片彩色滤光片(Color Filter，CF)基板贴合而成，且在TFT基板与CF基板之间灌入液晶，通过通电与否来控制液晶分子改变方向，将背光模组的光线折射出来产生画面。在TFT-LCD制造工艺中，ITO(Indium Tin Oxide，氧化铟锡)凭借其自身优良的特性，被广泛用于制作透明显示电极。在ITO透明显示电极制作过程中，首先通过磁控溅射形成ITO薄膜，再经过光刻形成光刻胶图形，最后通过湿法刻蚀将ITO薄膜图案化，形成最终的透明显示电极。
如图1所示，为现有技术用于ITO薄膜喷涂蚀刻的流程图。请参照图1，表面覆盖ITO薄膜的基板由入口单元(IN CV)进入，在清洗腔(EUV)中去除表面的有机物，而后进入刻蚀腔(ETCH)。在刻蚀腔中，通过刻蚀液将基板上不需要保留的ITO薄膜(即未被光刻胶图形覆盖的ITO薄膜)去除。而后基板被送出，经由水洗单元(SWR)进行清洗，去除基板表面残留的刻蚀液，最后经干燥并由传送单元(NT)和出口单元(OUT CV)被传送出喷淋装置。
但是，在清洗腔(EUV)、刻蚀腔(ETCH)和水洗单元(SWR)均使用固定安装的喷淋装置对基板进行喷淋，由于在清洗腔(EUV)和水洗单元(SWR)会冲洗除去杂质，在刻蚀腔(ETCH)会产生蚀刻液结晶，因此喷淋装置上的喷嘴在生产过程中会产生堵塞，或者其他原因导致喷洒偏差，从而基板喷淋不均匀，最终造成产品不良。
技术问题
鉴于上述技术问题，本发明提供了一种喷淋装置，通过带动喷淋机架进行往复运动喷淋，从而保证基板喷淋均匀，减少喷淋偏差，使得基板喷淋均匀，提高生产效率和产品质量。
技术解决方案
为了解决上述问题，本发明提供一种喷淋装置，能够用于液晶显示器的生产过程，设置于喷淋室内，其包括上机架、连接架、偏心轮和马达。具体地，所述上机架可活动安装于所述喷淋室顶部；所述上机架的下方均匀排布多个喷嘴；所述连接架设于所述上机架的一侧，通过一摇杆与所述偏心轮可转动连接；所述马达带动所述偏心轮转动；其中，所述偏心轮包括中心孔、多个偏心孔和连杆；所述中心孔与所述偏心轮固定连接；所述偏心孔设置于所述偏心轮上；所述连杆固定安装于所述偏心孔上，所述摇杆套设于所述连杆上实现可转动连接，所述连杆随所述偏心轮转动带动所述摇杆实现所述上机架做往复运动。
进一步的，其中所述偏心轮和所述马达之间还包括齿轮箱，所述齿轮箱的一端通过第一齿轮与所述偏心轮的中心轴可转动连接，其另一端通过第二齿轮与所述马达可转动连接。
进一步的，其中所述喷淋装置还包括下机架，所述下机架的上表面均匀排布多个喷嘴；所述下机架与所述上机架固定连接；所述下机架与所述上机架同步往复运动，对位于两者之间的基板进行喷淋。
进一步的，其中所述上机架还包括多个导管和汇总导管，所述导管与所述喷嘴的进液口一一对应连接，所述汇总导管所述多个导管的另一端均连接于汇总导管。
进一步的，其中所述上机架还包括至少一辊轮，设置于所述上机架的表面，可实现所述上机架相对于所述喷淋室顶部在往复运动方向上滑动。
进一步的，其中所述辊轮位于所述上机架的下表面，且分布在往复运动方向上的所述上机架的两侧。
进一步的，其中所述辊轮位于所述上机架的上表面，且分布在往复运动方向上的所述上机架的中心位置，所述辊轮可滑动安装于所述喷淋室顶部。
进一步的，其中所述上机架还包括铰接杆，所述铰接杆的一端可转动设置于所述上机架的上表面，其另一端可转动设置于所述喷淋室顶部，可实现所述上机架相对于所述喷淋室顶部往复运动。
进一步的，其中所述铰接杆可转动设置于所述上机架上表面的中心线处，所述中心线与往复运动的方向一致。
进一步的，其中所述喷嘴喷射纯水或蚀刻液。
有益效果
本发明的有益效果在于，提供一种喷淋装置，通过带动喷淋机架进行往复运动喷淋，可实现喷淋机架进行30°-60°不同幅度的摆动，可有效避免因个别喷嘴堵塞造成对基板喷淋不均匀现象，从而保证基板喷淋均匀，减少喷淋偏差，使得基板喷淋均匀，提高生产效率和产品质量。
附图说明
图1为现有技术用于ITO薄膜喷涂蚀刻的流程图；
图2为本发明第一实施例所述喷淋装置的俯视图；
图3为本发明第一实施例所述喷淋装置的主视图；
图4为本发明第一实施例所述喷淋装置的右视图；
图5为本发明第一实施例所述偏心轮的结构示意图；
图6为本发明第一实施例所述偏心轮的摆动原理示意图；
图7为本发明第二实施例所述喷淋装置的右视图。
图中部件标识如下：
1、上机架，2、连接架，3、偏心轮，4、马达，5、摇杆，6、齿轮箱，
7、下机架，10、喷淋装置，11、喷嘴，12、导管，13、辊轮，
14、铰接杆，15、汇总导管，20、喷淋室，30、基板，31、中心轴，
32、中心孔，33、偏心孔，34、连杆，61、第一齿轮，62、第二齿轮。
本发明的实施方式
在本发明的描述中，需要理解的是，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个所述特征。在本发明的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。
在本发明中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本发明中的具体含义。
请参照图1，表面覆盖ITO薄膜的基板由入口单元(IN CV)进入，在清洗腔(EUV)中去除表面的有机物，而后进入刻蚀腔(ETCH)。在刻蚀腔中，通过刻蚀液将基板上不需要保留的ITO薄膜(即未被光刻胶图形覆盖的ITO薄膜)去除。而后基板被送出，经由水洗单元(SWR)进行清洗，去除基板表面残留的刻蚀液，最后经干燥并由传送单元(NT)和出口单元(OUT CV)被传送出喷淋装置。
请参阅图2-图4，本发明提供一种喷淋装置10，能够用于液晶显示器的生产过程，其设置于喷淋室20(亦即刻蚀腔或水洗单元)内，所述喷淋装置10包括上机架1、连接架2、偏心轮3和马达4。具体地讲，所述上机架1可活动安装于所述喷淋室20顶部；所述上机架1的下方均匀排布多个喷嘴11；所述连接架2设于所述上机架1的一侧，通过一摇杆5与所述偏心轮3可转动连接；所述马达4带动所述偏心轮3的中心轴31转动。
请参阅图5所示，所述偏心轮3设有中心孔32、多个偏心孔33和连杆34。所述中心孔32设置于所述偏心轮3的中心，所述中心轴31贯穿中心孔32并与所述偏心轮3固定连接；所述每一偏心孔33与所述中心孔32的距离各不相同，所述连杆34固定安装于所述偏心孔33上，所述摇杆5套设于所述连杆34上实现可转动连接，所述连杆34随所述偏心轮3转动带动所述摇杆5实现所述上机架1做往复运动，当连杆34选择与中心孔距离不同的不同偏心孔33安装时，可实现所述上机架1不同幅度的往复运动。
更具体的，在工作中，所述马达4带动所述偏心轮3转动，通过所述连杆34和所述连接架2带动所述上机架1做往复运动，所述连杆34选择与中心孔距离不同的偏心孔33组装后可以实现所述上机架1进行不同幅度的摆动，亦即实现所述上机架1进行往复运动，所述上机架1的中垂线摆动角度范围为30°-60°，优选30°、45°或60°。请参阅图6所示，影响所述上机架1的中垂线(图6中的虚线)摆动角度θ的大小的相关因素有：所述偏心孔33和所述中心孔32的距离R1、所述摇杆5的长度L、所述上机架1的摆动圆弧所在圆的半径大小R2。所述上机架1往复运动的摆动距离为
Figure PCTCN2019110067-appb-000001
所述上机架1往复运动的摆动距离为摆动角度θ对应的弧长，根据弧长公式可知
Figure PCTCN2019110067-appb-000002
可求出θ的角度值。
第一实施例中，所述偏心孔33优选呈一条直线设置，以便于安装和美观。这样设置多个偏心孔33可便于调整所述上机架1做往复运动的偏转角度，即所述上机架1往复运动的幅度，可使得位于所述上机架1下方的基板30除了在可接收到均匀的喷淋，从而单位时间内的受水面积增加，喷淋的速度和均匀度得到极大提升。
请参阅图2所示，在第一实施例中，所述偏心轮3和所述马达4之间还包括齿轮箱6，所述齿轮箱6的一端通过第一齿轮61与所述偏心轮3的中心轴31可转动连接，其另一端通过第二齿轮62与所述马达4可转动连接。通过调节所述第一齿轮61和所述第二齿轮62的外径可实现变速，既可加速也可用于减速。
请参阅图3到图6，在第一实施例中，所述喷淋装置10还包括下机架7，所述下机架7的上表面均匀排布多个喷嘴11；所述下机架7与所述上机架1固定连接；所述下机架7与所述上机架1同步做往复运动，对位于两者之间的基板30进行喷淋。
请参阅图3、图4所示，在第一实施例中，所述上机架1还包括多个导管12和汇总导 管15。所述导管12与所述喷嘴11的进液口一一对应连接。所述多个导管12的另一端均连接于所述上机架1上的汇总导管15，便于简化结构，仅通过给所述汇总导管15提供一定压强的喷淋液便可实现所有所述导管12的喷淋。
请参阅图4所示，在第一实施例中，所述上机架1还包括至少一辊轮13，设置于所述上机架1的表面，可实现所述上机架1相对于所述喷淋室20顶部在往复运动方向上滑动。
在第一实施例中，所述辊轮13位于所述上机架1的下表面，且分布在往复运动方向上的所述上机架1的两侧。在其他实施例中，所述辊轮13位于所述上机架1的上表面，且分布在往复运动方向上的所述上机架1的中心位置，所述辊轮13可滑动安装于所述喷淋室20顶部。
请参阅图7所示，在第二实施例中，所述上机架1还包括铰接杆14，所述铰接杆14的一端可转动设置于所述上机架1的上表面，所述铰接杆14优选位于所述上机架1的上表面的中心线处，所述中心线平行与往复运动的方向，其另一端可转动设置于所述喷淋室20顶部，可实现所述上机架1相对于所述喷淋室20顶部往复运动。
在第二实施例中，所述铰接杆14可转动设置于所述上机架1上表面的中心线处，所述中心线基本平行于往复运动的方向，即所述中心线与往复运动的方向一致。
在第一实施例和第二实施例中，所述喷嘴11喷射纯水(即去离子水)或蚀刻液。当所述喷嘴11喷射纯水时，本发明喷淋装置10可作为清洗装置使用，此时所述喷淋室20为水洗单元；当所述喷嘴11喷射蚀刻液时，本发明喷淋装置10可作为蚀刻装置使用，此时所述喷淋室20为刻蚀腔。
本发明的有益效果在于，提供一种喷淋装置，通过带动喷淋机架进行往复运动喷淋，可实现喷淋机架进行30°-60°不同幅度的摆动，可有效避免因个别喷嘴堵塞造成对基板喷淋不均匀现象，从而保证基板喷淋均匀，减少喷淋偏差，使得基板喷淋均匀，提高生产效率和产品质量。
以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。

Claims (10)

  1. 一种喷淋装置，能够用于液晶显示器的生产过程，设置于喷淋室内，其中，所述喷淋装置包括上机架、连接架、偏心轮和马达；
    所述上机架可活动安装于所述喷淋室顶部；所述上机架的下方均匀排布多个喷嘴；
    所述连接架设于所述上机架的一侧，通过一摇杆与所述偏心轮可转动连接；
    所述马达带动所述偏心轮转动；
    其中，所述偏心轮包括：
    中心孔，设置于所述偏心轮的中心，所述中心轴贯穿中心孔与所述偏心轮固定连接；
    多个偏心孔，设置于所述偏心轮上；以及
    连杆，固定安装于所述偏心孔上，所述摇杆套设于所述连杆上实现可转动连接，所述连杆随所述偏心轮转动带动所述摇杆实现所述上机架做往复运动。
  2. 根据权利要求1所述的喷淋装置，其中，
    所述偏心轮和所述马达之间还包括：
    齿轮箱，其一端通过第一齿轮与所述偏心轮的中心轴可转动连接，其另一端通过第二齿轮与所述马达可转动连接。
  3. 根据权利要求1所述的喷淋装置，其中，还包括：
    下机架，所述下机架的上表面均匀排布多个喷嘴；所述下机架与所述上机架固定连接；所述下机架与所述上机架同步往复运动，对位于两 者之间的基板进行喷淋。
  4. 根据权利要求1所述的喷淋装置，其中，所述上机架还包括：
    多个导管，所述导管的一端与所述喷嘴的进液口一一对应连接；以及汇总导管，所述多个导管的另一端均连接于汇总导管。
  5. 根据权利要求1所述的喷淋装置，其中，所述上机架还包括：
    至少一辊轮，设置于所述上机架的表面，可实现所述上机架相对于所述喷淋室顶部在往复运动方向上滑动。
  6. 根据权利要求5所述的喷淋装置，其中，
    所述辊轮位于所述上机架的下表面，且分布在往复运动方向上的所述上机架的两侧。
  7. 根据权利要求5所述的喷淋装置，其中，
    所述辊轮位于所述上机架的上表面，且分布在往复运动方向上的所述上机架的中心位置，所述辊轮可滑动安装于所述喷淋室顶部。
  8. 根据权利要求1所述的喷淋装置，其中，所述上机架还包括：
    铰接杆，其一端可转动设置于所述上机架的上表面，其另一端可转动设置于所述喷淋室顶部，可实现所述上机架相对于所述喷淋室顶部往复运动。
  9. 根据权利要求1所述的喷淋装置，其中，所述上机架还包括：
    铰接杆，可转动设置于所述上机架上表面的中心线处，所述中心线平行于往复运动的方向。
  10. 根据权利要求1所述的喷淋装置，其中，所述喷嘴喷射纯水或蚀刻液。
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