WO2021006450A1 - 반도체 발광 소자를 이용한 디스플레이 장치 및 이의 제조방법 - Google Patents

반도체 발광 소자를 이용한 디스플레이 장치 및 이의 제조방법 Download PDF

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WO2021006450A1
WO2021006450A1 PCT/KR2020/002453 KR2020002453W WO2021006450A1 WO 2021006450 A1 WO2021006450 A1 WO 2021006450A1 KR 2020002453 W KR2020002453 W KR 2020002453W WO 2021006450 A1 WO2021006450 A1 WO 2021006450A1
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Prior art keywords
light emitting
semiconductor light
substrate
electrode
emitting device
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PCT/KR2020/002453
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English (en)
French (fr)
Korean (ko)
Inventor
강은정
이병준
Original Assignee
엘지전자 주식회사
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Application filed by 엘지전자 주식회사 filed Critical 엘지전자 주식회사
Priority to EP20824051.5A priority Critical patent/EP3813120A4/en
Priority to US17/254,683 priority patent/US20220190220A1/en
Priority to CN202080004745.9A priority patent/CN112655091B/zh
Publication of WO2021006450A1 publication Critical patent/WO2021006450A1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
    • H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
    • H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
    • H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10—Bump connectors ; Manufacturing methods related thereto
    • H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L24/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/16—Constructional details or arrangements
    • G06F1/1613—Constructional details or arrangements for portable computers
    • G06F1/1633—Constructional details or arrangements of portable computers not specific to the type of enclosures covered by groups G06F1/1615 - G06F1/1626
    • G06F1/1637—Details related to the display arrangement, including those related to the mounting of the display in the housing
    • G06F1/1652—Details related to the display arrangement, including those related to the mounting of the display in the housing the display being flexible, e.g. mimicking a sheet of paper, or rollable
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008—Processes
    • H01L2933/0033—Processes relating to semiconductor body packages
    • H01L2933/005—Processes relating to semiconductor body packages relating to encapsulations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008—Processes
    • H01L2933/0033—Processes relating to semiconductor body packages
    • H01L2933/0066—Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005—Processes
    • H01L33/0093—Wafer bonding; Removal of the growth substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/52—Encapsulations
    • H01L33/54—Encapsulations having a particular shape

Definitions

  • the present invention relates to a display device and a method of manufacturing the same, and more particularly, to a flexible display device using a semiconductor light emitting device.
  • LCD Liguid Crystal Display
  • AMOLED Active Matrix Organic Light Emitting Diodes
  • LED Light Emitting Diode
  • GaAsP compound semiconductors in 1962, information along with GaP:N series green LEDs It has been used as a light source for display images in electronic devices including communication devices. Accordingly, a method for solving the above problem may be proposed by implementing a flexible display using the semiconductor light emitting device.
  • the semiconductor light emitting device is transferred onto the substrate in various ways.
  • a transfer method using an anisotropic conductive layer is used as one of the transfer methods of semiconductor light emitting devices.
  • the use of an anisotropic conductive layer has the advantage that it is possible to electrically connect the semiconductor light emitting device and the wiring electrode only by thermal compression, but there is a problem that contact failure between the semiconductor light emitting device and the wiring electrode occurs when the area of the wiring board is increased.
  • An object of the present invention is to provide a structure and manufacturing method for preventing the occurrence of contact failure between the semiconductor light emitting device and the wiring electrode when a semiconductor light emitting device is compressed to a wiring electrode using an anisotropic conductive layer.
  • the present invention provides a substrate, a wiring electrode disposed on the substrate, a plurality of semiconductor light emitting devices electrically connected to the wiring electrode, disposed between the semiconductor light emitting devices, and insulating conductive particles.
  • An anisotropic conductive layer made of a mixture of materials and a light-transmitting layer formed between the semiconductor light emitting devices, the anisotropic conductive layer is also formed between the wiring electrodes, and the light-transmitting layer is anisotropic formed between the wiring electrodes It is formed on the conductive layer.
  • the anisotropic conductive layer may include a first region formed on the wiring electrode and a second region formed between the wiring electrodes.
  • the average thickness of the second region may be smaller than the thickness of the wiring electrode.
  • the light-transmitting layer may be formed to surround a side surface of the semiconductor light emitting device.
  • a part of the light transmitting layer may protrude through the wiring electrodes.
  • the present invention provides a method of manufacturing a display device by transferring a plurality of semiconductor light emitting devices to a substrate on which a wiring electrode is formed.
  • the present invention includes coating and curing a resin including conductive particles on the substrate, aligning a transfer substrate on which a plurality of semiconductor light emitting devices are disposed on the substrate, and placing the transfer substrate on the substrate.
  • a method of manufacturing a display device including compressing an image, injecting and curing a light-transmitting resin into an empty space formed between the transfer substrate and the substrate, and removing the transfer substrate.
  • the step of coating and curing the resin including the conductive particles on the substrate may be performed so that the coating layer is formed to have a thickness smaller than that of the wiring electrode.
  • the step of injecting and curing a light-transmitting resin into an empty space formed between the transfer substrate and the substrate may be performed after forming a sealing layer on the edge of the substrate.
  • the present invention since the flow of the anisotropic conductive layer is minimized when the semiconductor light emitting device is pressed onto the wiring board, it is possible to prevent the conductive particles from being separated between the semiconductor light emitting device and the wiring electrode. Through this, the present invention prevents the occurrence of contact failure between the semiconductor light emitting device and the wiring electrode.
  • the buffer unit maintains a constant distance between the semiconductor light emitting device and the wiring electrode, even if the wiring board is widened, the semiconductor light emitting device is uniformly applied. You can force it to be applied.
  • FIG. 1 is a conceptual diagram showing an embodiment of a display device using a semiconductor light emitting device of the present invention.
  • FIG. 2 is a partial enlarged view of portion A of FIG. 1, and FIGS. 3A and 3B are cross-sectional views taken along lines B-B and C-C of FIG. 2.
  • FIG. 4 is a conceptual diagram illustrating the flip chip type semiconductor light emitting device of FIG. 3.
  • 5A to 5C are conceptual diagrams illustrating various forms of implementing colors in relation to a flip chip type semiconductor light emitting device.
  • FIG. 6 is a cross-sectional view showing a method of manufacturing a display device using the semiconductor light emitting device of the present invention.
  • FIG. 7 is a perspective view showing another embodiment of a display device using the semiconductor light emitting device of the present invention.
  • FIG. 8 is a cross-sectional view taken along the line D-D of FIG. 7.
  • FIG. 9 is a conceptual diagram illustrating the vertical semiconductor light emitting device of FIG. 8.
  • 10 and 11 are conceptual diagrams illustrating a problem occurring during compression described in FIG. 6.
  • 12 to 15 are conceptual diagrams showing a method of manufacturing a display device according to the present invention.
  • 16 is a cross-sectional view of a display device according to the present invention.
  • an element such as a layer, region or substrate is referred to as being “on” another component, it will be understood that it may exist directly on the other element or there may be intermediate elements between them. There will be.
  • Display devices described herein include a mobile phone, a smart phone, a laptop computer, a digital broadcasting terminal, a personal digital assistant (PDA), a portable multimedia player (PMP), a navigation system, and a Slate PC. , Tablet PC, Ultra Book, digital TV, desktop computer, etc.
  • PDA personal digital assistant
  • PMP portable multimedia player
  • Slate PC Tablet PC, Ultra Book, digital TV, desktop computer, etc.
  • FIG. 1 is a conceptual diagram showing an embodiment of a display device using a semiconductor light emitting device of the present invention.
  • information processed by the controller of the display apparatus 100 may be displayed using a flexible display.
  • Flexible displays include displays that can be bent, bent, twistable, foldable, and rollable by external force.
  • the flexible display may be a display manufactured on a thin and flexible substrate that can be bent, bent, foldable or rolled like paper while maintaining the display characteristics of a conventional flat panel display.
  • the display area of the flexible display becomes a flat surface.
  • the display area may be a curved surface.
  • the information displayed in the second state may be visual information output on a curved surface. This visual information is implemented by independently controlling light emission of sub-pixels arranged in a matrix form.
  • the unit pixel means a minimum unit for implementing one color.
  • the unit pixel of the flexible display may be implemented by a semiconductor light emitting device.
  • a light emitting diode LED
  • the light emitting diode is formed in a small size, and through this, it can serve as a unit pixel even in the second state.
  • FIG. 2 is a partially enlarged view of part A of FIG. 1
  • FIGS. 3A and 3B are cross-sectional views taken along lines BB and CC of FIG. 2
  • FIG. 4 is a conceptual diagram illustrating the flip chip type semiconductor light emitting device of FIG. 3A
  • 5A to 5C are conceptual diagrams illustrating various forms of implementing colors in relation to a flip chip type semiconductor light emitting device.
  • a display device 100 using a passive matrix (PM) type semiconductor light emitting device is illustrated as a display device 100 using a semiconductor light emitting device.
  • PM passive matrix
  • AM active matrix
  • the display device 100 includes a substrate 110, a first electrode 120, a conductive adhesive layer 130, a second electrode 140, and a plurality of semiconductor light emitting devices 150.
  • the substrate 110 may be a flexible substrate.
  • the substrate 110 may include glass or polyimide (PI).
  • PI polyimide
  • any material such as polyethylene naphthalate (PEN) and polyethylene terephthalate (PET) may be used as long as it has insulation and is flexible.
  • the substrate 110 may be a transparent material or an opaque material.
  • the substrate 110 may be a wiring board on which the first electrode 120 is disposed, and thus the first electrode 120 may be positioned on the substrate 110.
  • the insulating layer 160 may be disposed on the substrate 110 on which the first electrode 120 is located, and the auxiliary electrode 170 may be disposed on the insulating layer 160.
  • a state in which the insulating layer 160 is stacked on the substrate 110 may be a single wiring board.
  • the insulating layer 160 is made of an insulating and flexible material such as polyimide (PI), PET, and PEN, and may be formed integrally with the substrate 110 to form a single substrate.
  • the auxiliary electrode 170 is an electrode that electrically connects the first electrode 120 and the semiconductor light emitting device 150, and is positioned on the insulating layer 160 and is disposed corresponding to the position of the first electrode 120.
  • the auxiliary electrode 170 has a dot shape and may be electrically connected to the first electrode 120 through an electrode hole 171 penetrating through the insulating layer 160.
  • the electrode hole 171 may be formed by filling a via hole with a conductive material.
  • a conductive adhesive layer 130 is formed on one surface of the insulating layer 160, but the present invention is not limited thereto.
  • a layer performing a specific function is formed between the insulating layer 160 and the conductive adhesive layer 130, or a structure in which the conductive adhesive layer 130 is disposed on the substrate 110 without the insulating layer 160 It is also possible.
  • the conductive adhesive layer 130 may serve as an insulating layer.
  • the conductive adhesive layer 130 may be a layer having adhesiveness and conductivity, and for this purpose, a material having conductivity and a material having adhesiveness may be mixed in the conductive adhesive layer 130.
  • the conductive adhesive layer 130 has ductility, thereby enabling a flexible function in the display device.
  • the conductive adhesive layer 130 may be an anisotropic conductive film (ACF), an anisotropic conductive paste, a solution containing conductive particles, or the like.
  • ACF anisotropic conductive film
  • the conductive adhesive layer 130 allows electrical interconnection in the Z direction passing through the thickness, but may be configured as a layer having electrical insulation in the horizontal X-Y direction. Therefore, the conductive adhesive layer 130 may be referred to as a Z-axis conductive layer (however, hereinafter referred to as a'conductive adhesive layer').
  • the anisotropic conductive film is a film in which an anisotropic conductive medium is mixed with an insulating base member, and when heat and pressure are applied, only a specific portion becomes conductive by the anisotropic conductive medium.
  • heat and pressure are applied to the anisotropic conductive film, but other methods are also possible in order for the anisotropic conductive film to partially have conductivity. This method may be, for example, only one of the above heat and pressure is applied or UV curing or the like.
  • the anisotropic conductive medium may be, for example, conductive balls or conductive particles.
  • the anisotropic conductive film is a film in which conductive balls are mixed with an insulating base member, and when heat and pressure are applied, only a specific portion becomes conductive by the conductive balls.
  • a core of a conductive material may contain a plurality of particles covered by an insulating film made of a polymer material, and in this case, a portion to which heat and pressure is applied is destroyed by the insulating film and becomes conductive by the core. .
  • the shape of the core may be deformed to form a layer in contact with each other in the thickness direction of the film.
  • heat and pressure are applied to the anisotropic conductive film as a whole, and an electrical connection in the Z-axis direction is partially formed due to a height difference of a counterpart adhered by the anisotropic conductive film.
  • the anisotropic conductive film may contain a plurality of particles coated with a conductive material in an insulating core.
  • the part to which heat and pressure are applied is deformed (pressed together) to have conductivity in the thickness direction of the film.
  • a form in which the conductive material penetrates the insulating base member in the Z-axis direction and has conductivity in the thickness direction of the film is also possible.
  • the conductive material may have a pointed end.
  • the anisotropic conductive film may be a fixed array anisotropic conductive film (ACF) in which conductive balls are inserted into one surface of an insulating base member.
  • ACF fixed array anisotropic conductive film
  • the insulating base member is formed of an adhesive material, and the conductive ball is intensively disposed on the bottom of the insulating base member, and when heat and pressure are applied from the base member, it is deformed together with the conductive ball. Accordingly, it has conductivity in the vertical direction.
  • the anisotropic conductive film has a form in which conductive balls are randomly mixed in an insulating base member, or consists of a plurality of layers, and a form in which conductive balls are disposed in one layer (double- ACF) etc. are all possible.
  • the anisotropic conductive paste is a combination of a paste and a conductive ball, and may be a paste in which conductive balls are mixed with an insulating and adhesive base material.
  • the solution containing conductive particles may be a solution containing conductive particles or nano particles.
  • the second electrode 140 is positioned on the insulating layer 160 to be spaced apart from the auxiliary electrode 170. That is, the conductive adhesive layer 130 is disposed on the insulating layer 160 on which the auxiliary electrode 170 and the second electrode 140 are located.
  • the semiconductor light emitting device 150 After forming the conductive adhesive layer 130 with the auxiliary electrode 170 and the second electrode 140 positioned on the insulating layer 160, the semiconductor light emitting device 150 is connected in a flip chip form by applying heat and pressure. Then, the semiconductor light emitting device 150 is electrically connected to the first electrode 120 and the second electrode 140.
  • the semiconductor light emitting device may be a flip chip type light emitting device.
  • the semiconductor light emitting device includes a p-type electrode 156, a p-type semiconductor layer 155 on which the p-type electrode 156 is formed, an active layer 154 formed on the p-type semiconductor layer 155, and an active layer ( And an n-type semiconductor layer 153 formed on 154) and an n-type electrode 152 disposed horizontally apart from the p-type electrode 156 on the n-type semiconductor layer 153.
  • the p-type electrode 156 may be electrically connected to the auxiliary electrode 170 and the conductive adhesive layer 130
  • the n-type electrode 152 may be electrically connected to the second electrode 140.
  • the auxiliary electrode 170 is formed to be elongated in one direction, so that one auxiliary electrode may be electrically connected to the plurality of semiconductor light emitting devices 150.
  • one auxiliary electrode may be electrically connected to the plurality of semiconductor light emitting devices 150.
  • p-type electrodes of the left and right semiconductor light emitting devices with the auxiliary electrode at the center may be electrically connected to one auxiliary electrode.
  • the semiconductor light emitting device 150 is pressed into the conductive adhesive layer 130 by heat and pressure, and through this, between the p-type electrode 156 and the auxiliary electrode 170 of the semiconductor light emitting device 150 Only a portion and a portion between the n-type electrode 152 and the second electrode 140 of the semiconductor light emitting device 150 have conductivity, and the remaining portion does not have conductivity because there is no press-fitting of the semiconductor light emitting device.
  • the conductive adhesive layer 130 not only mutually couples the semiconductor light emitting device 150 and the auxiliary electrode 170 and between the semiconductor light emitting device 150 and the second electrode 140, but also forms an electrical connection.
  • the plurality of semiconductor light emitting devices 150 constitute a light emitting device array, and a phosphor layer 180 is formed in the light emitting device array.
  • the light emitting device array may include a plurality of semiconductor light emitting devices having different self-luminance values.
  • Each semiconductor light emitting device 150 constitutes a unit pixel, and is electrically connected to the first electrode 120.
  • the first electrode 120 may be plural, the semiconductor light emitting elements are arranged in rows, for example, and the semiconductor light emitting elements of each row may be electrically connected to any one of the plurality of first electrodes.
  • semiconductor light emitting devices are connected in a flip chip form, semiconductor light emitting devices grown on a transparent dielectric substrate can be used. Further, the semiconductor light emitting devices may be, for example, nitride semiconductor light emitting devices. Since the semiconductor light emitting device 150 has excellent luminance, individual unit pixels can be configured with a small size.
  • a partition wall 190 may be formed between the semiconductor light emitting devices 150.
  • the partition wall 190 may serve to separate individual unit pixels from each other, and may be integrally formed with the conductive adhesive layer 130.
  • the base member of the anisotropic conductive film may form the partition wall.
  • the partition wall 190 may have reflective properties and increase contrast even without a separate black insulator.
  • a reflective partition wall may be separately provided as the partition wall 190.
  • the partition wall 190 may include a black or white insulator depending on the purpose of the display device. When a partition wall of a white insulator is used, it is possible to increase reflectivity, and when a partition wall of a black insulator is used, it is possible to increase the contrast while having reflective characteristics.
  • the phosphor layer 180 may be located on the outer surface of the semiconductor light emitting device 150.
  • the semiconductor light emitting device 150 is a blue semiconductor light emitting device emitting blue (B) light
  • the phosphor layer 180 performs a function of converting the blue (B) light into a color of a unit pixel.
  • the phosphor layer 180 may be a red phosphor 181 or a green phosphor 182 constituting individual pixels.
  • a red phosphor 181 capable of converting blue light into red (R) light may be stacked on the blue semiconductor light emitting device 151, and a position forming the green unit pixel
  • a green phosphor 182 capable of converting blue light into green (G) light may be stacked on the blue semiconductor light emitting device 151.
  • only the blue semiconductor light emitting device 151 may be used alone in a portion constituting the blue unit pixel.
  • unit pixels of red (R), green (G), and blue (B) may form one pixel.
  • a phosphor of one color may be stacked along each line of the first electrode 120. Accordingly, one line of the first electrode 120 may be an electrode that controls one color. That is, along the second electrode 140, red (R), green (G), and blue (B) may be sequentially disposed, and a unit pixel may be implemented through this.
  • unit pixels of red (R), green (G), and blue (B) can be implemented by combining the semiconductor light emitting device 150 and the quantum dot (QD) instead of the phosphor. have.
  • a black matrix 191 may be disposed between each of the phosphor layers in order to improve contrast. That is, the black matrix 191 may improve contrast of the contrast.
  • the present invention is not necessarily limited thereto, and other structures for implementing blue, red, and green colors may be applied.
  • each semiconductor light emitting device 150 mainly uses gallium nitride (GaN), and indium (In) and/or aluminum (Al) are added together to emit a variety of light including blue. It can be implemented as a device.
  • GaN gallium nitride
  • Al aluminum
  • the semiconductor light emitting device 150 may be a red, green, and blue semiconductor light emitting device to form a sub-pixel, respectively.
  • red, green, and blue semiconductor light emitting devices R, G, B
  • R, G, B red, green, and blue semiconductor light emitting devices
  • unit pixels of red, green, and blue by red, green, and blue semiconductor light emitting devices They form one pixel, through which a full color display can be implemented.
  • the semiconductor light emitting device may include a white light emitting device W in which a yellow phosphor layer is provided for each individual device.
  • a red phosphor layer 181, a green phosphor layer 182, and a blue phosphor layer 183 may be provided on the white light emitting device W.
  • a unit pixel may be formed by using a color filter in which red, green, and blue are repeated on the white light emitting device W.
  • a structure in which a red phosphor layer 181, a green phosphor layer 182, and a blue phosphor layer 183 are provided on the ultraviolet light emitting device UV is also possible.
  • the semiconductor light emitting device can be used not only for visible light but also for ultraviolet (UV) light, and the ultraviolet (UV) can be extended in the form of a semiconductor light emitting device that can be used as an excitation source of the upper phosphor. .
  • the semiconductor light emitting device 150 is positioned on the conductive adhesive layer 130 to constitute a unit pixel in the display device. Since the semiconductor light emitting device 150 has excellent luminance, individual unit pixels can be configured with a small size.
  • the individual semiconductor light emitting device 150 may have a side length of 80 ⁇ m or less, and may be a rectangular or square device. In the case of a rectangle, the size may be 20X80 ⁇ m or less.
  • the square semiconductor light emitting device 150 having a side length of 10 ⁇ m is used as a unit pixel, sufficient brightness to form a display device is exhibited. Accordingly, for example, when the size of the unit pixel is a rectangular pixel having one side of 600 ⁇ m and the other side of 300 ⁇ m, the distance between the semiconductor light emitting elements is relatively large enough. Therefore, in this case, it is possible to implement a flexible display device having HD image quality.
  • the display device using the semiconductor light emitting device described above can be manufactured by a new type of manufacturing method. Hereinafter, the manufacturing method will be described with reference to FIG. 6.
  • FIG. 6 is a cross-sectional view showing a method of manufacturing a display device using the semiconductor light emitting device of the present invention.
  • a conductive adhesive layer 130 is formed on the insulating layer 160 on which the auxiliary electrode 170 and the second electrode 140 are positioned.
  • An insulating layer 160 is stacked on the first substrate 110 to form one substrate (or wiring board), and the first electrode 120, the auxiliary electrode 170, and the second electrode 140 are formed on the wiring board. Is placed.
  • the first electrode 120 and the second electrode 140 may be disposed in a mutually orthogonal direction.
  • the first substrate 110 and the insulating layer 160 may each include glass or polyimide (PI).
  • the conductive adhesive layer 130 may be implemented by, for example, an anisotropic conductive film, and for this purpose, an anisotropic conductive film may be applied to a substrate on which the insulating layer 160 is positioned.
  • the second substrate 112 corresponding to the positions of the auxiliary electrodes 170 and the second electrodes 140 and on which the plurality of semiconductor light emitting elements 150 constituting individual pixels are positioned is formed. ) Is disposed to face the auxiliary electrode 170 and the second electrode 140.
  • the second substrate 112 is a growth substrate on which the semiconductor light emitting device 150 is grown, and may be a spire substrate or a silicon substrate.
  • the semiconductor light emitting device When the semiconductor light emitting device is formed in units of a wafer, it can be effectively used in a display device by having a gap and a size capable of forming a display device.
  • the wiring board and the second board 112 are thermally compressed.
  • the wiring board and the second board 112 may be thermocompressed by applying an ACF press head.
  • the wiring board and the second board 112 are bonded by the thermal compression bonding. Due to the property of the anisotropic conductive film having conductivity by thermocompression bonding, only the portion between the semiconductor light emitting device 150 and the auxiliary electrode 170 and the second electrode 140 has conductivity, through which electrodes and semiconductor light emission The device 150 may be electrically connected. In this case, the semiconductor light emitting device 150 is inserted into the anisotropic conductive film, and a partition wall may be formed between the semiconductor light emitting devices 150 through this.
  • the second substrate 112 is removed.
  • the second substrate 112 may be removed using a laser lift-off method (LLO) or a chemical lift-off method (CLO).
  • LLO laser lift-off method
  • CLO chemical lift-off method
  • a transparent insulating layer (not shown) may be formed by coating silicon oxide (SiOx) or the like on the wiring board to which the semiconductor light emitting device 150 is bonded.
  • the semiconductor light-emitting device 150 is a blue semiconductor light-emitting device that emits blue (B) light, and a red or green phosphor for converting the blue (B) light into the color of a unit pixel is used to emit the blue semiconductor light.
  • a layer can be formed on one side of the device.
  • the manufacturing method or structure of a display device using the semiconductor light emitting device described above may be modified in various forms.
  • a vertical semiconductor light emitting device may also be applied to the display device described above.
  • a vertical structure will be described with reference to FIGS. 5 and 6.
  • FIG. 7 is a perspective view showing another embodiment of a display device using the semiconductor light emitting device of the present invention
  • FIG. 8 is a cross-sectional view taken along line DD of FIG. 7
  • FIG. 9 is a conceptual diagram showing the vertical semiconductor light emitting device of FIG. to be.
  • the display device may be a display device using a passive matrix (PM) type vertical semiconductor light emitting device.
  • PM passive matrix
  • the display device includes a substrate 210, a first electrode 220, a conductive adhesive layer 230, a second electrode 240, and a plurality of semiconductor light emitting devices 250.
  • the substrate 210 is a wiring board on which the first electrode 220 is disposed, and may include polyimide (PI) to implement a flexible display device.
  • PI polyimide
  • any material that has insulation and is flexible may be used.
  • the first electrode 220 is positioned on the substrate 210 and may be formed as an electrode having a long bar shape in one direction.
  • the first electrode 220 may be formed to serve as a data electrode.
  • the conductive adhesive layer 230 is formed on the substrate 210 on which the first electrode 220 is located.
  • the conductive adhesive layer 230 is a solution containing an anisotropic conductive film (ACF), an anisotropic conductive paste, and conductive particles. ), etc.
  • ACF anisotropic conductive film
  • anisotropic conductive paste an anisotropic conductive paste
  • conductive particles conductive particles.
  • the semiconductor light emitting element 250 is connected by applying heat and pressure to the semiconductor light emitting element 250. It is electrically connected to the electrode 220.
  • the semiconductor light emitting device 250 is preferably disposed to be positioned on the first electrode 220.
  • the electrical connection is created because the anisotropic conductive film partially has conductivity in the thickness direction when heat and pressure are applied. Accordingly, in the anisotropic conductive film, it is divided into a conductive portion and a non-conductive portion in the thickness direction.
  • the conductive adhesive layer 230 implements electrical connection as well as mechanical coupling between the semiconductor light emitting device 250 and the first electrode 220.
  • the semiconductor light emitting device 250 is positioned on the conductive adhesive layer 230, thereby configuring individual pixels in the display device. Since the semiconductor light emitting device 250 has excellent luminance, individual unit pixels can be configured with a small size.
  • the individual semiconductor light emitting device 250 may have a side length of 80 ⁇ m or less, and may be a rectangular or square device. In the case of a rectangle, the size may be 20X80 ⁇ m or less.
  • the semiconductor light emitting device 250 may have a vertical structure.
  • a plurality of second electrodes 240 are disposed between the vertical semiconductor light emitting devices in a direction crossing the length direction of the first electrode 220 and electrically connected to the vertical semiconductor light emitting device 250.
  • such a vertical semiconductor light emitting device includes a p-type electrode 256, a p-type semiconductor layer 255 formed on the p-type electrode 256, and an active layer 254 formed on the p-type semiconductor layer 255. ), an n-type semiconductor layer 253 formed on the active layer 254 and an n-type electrode 252 formed on the n-type semiconductor layer 253.
  • the p-type electrode 256 located at the bottom may be electrically connected by the first electrode 220 and the conductive adhesive layer 230, and the n-type electrode 252 located at the top is a second electrode 240 to be described later. ) And can be electrically connected.
  • the vertical semiconductor light emitting device 250 has a great advantage of reducing a chip size since electrodes can be arranged up and down.
  • a phosphor layer 280 may be formed on one surface of the semiconductor light emitting device 250.
  • the semiconductor light emitting device 250 is a blue semiconductor light emitting device 251 that emits blue (B) light, and a phosphor layer 280 for converting the blue (B) light into a color of a unit pixel is provided.
  • the phosphor layer 280 may be a red phosphor 281 and a green phosphor 282 constituting individual pixels.
  • a red phosphor 281 capable of converting blue light into red (R) light may be stacked on the blue semiconductor light emitting device 251, and a position forming the green unit pixel
  • a green phosphor 282 capable of converting blue light into green (G) light may be stacked on the blue semiconductor light emitting device 251.
  • only the blue semiconductor light emitting device 251 may be used alone in a portion constituting the blue unit pixel. In this case, unit pixels of red (R), green (G), and blue (B) may form one pixel.
  • the present invention is not necessarily limited thereto, and other structures for implementing blue, red, and green colors may be applied as described above in a display device to which a flip chip type light emitting device is applied.
  • the second electrode 240 is positioned between the semiconductor light emitting devices 250 and is electrically connected to the semiconductor light emitting devices 250.
  • the semiconductor light emitting devices 250 may be arranged in a plurality of rows, and the second electrode 240 may be located between the rows of the semiconductor light emitting devices 250.
  • the second electrode 240 may be positioned between the semiconductor light emitting devices 250.
  • the second electrode 240 may be formed as a long bar-shaped electrode in one direction, and may be disposed in a direction perpendicular to the first electrode.
  • the second electrode 240 and the semiconductor light emitting device 250 may be electrically connected by a connection electrode protruding from the second electrode 240.
  • the connection electrode may be an n-type electrode of the semiconductor light emitting device 250.
  • the n-type electrode is formed as an ohmic electrode for ohmic contact, and the second electrode covers at least a portion of the ohmic electrode by printing or vapor deposition. Through this, the second electrode 240 and the n-type electrode of the semiconductor light emitting device 250 may be electrically connected.
  • the second electrode 240 may be positioned on the conductive adhesive layer 230.
  • a transparent insulating layer (not shown) including silicon oxide (SiOx) or the like may be formed on the substrate 210 on which the semiconductor light emitting device 250 is formed.
  • SiOx silicon oxide
  • the second electrode 240 is positioned after the transparent insulating layer is formed, the second electrode 240 is positioned on the transparent insulating layer.
  • the second electrode 240 may be formed to be spaced apart from the conductive adhesive layer 230 or the transparent insulating layer.
  • a transparent electrode such as ITO Indium Tin Oxide
  • the ITO material has poor adhesion to the n-type semiconductor layer. have. Accordingly, according to the present invention, by placing the second electrode 240 between the semiconductor light emitting devices 250, there is an advantage in that a transparent electrode such as ITO is not required. Accordingly, the light extraction efficiency can be improved by using the n-type semiconductor layer and a conductive material having good adhesion as a horizontal electrode without being restricted by the selection of a transparent material.
  • a partition wall 290 may be positioned between the semiconductor light emitting devices 250. That is, a partition wall 290 may be disposed between the vertical semiconductor light emitting devices 250 to isolate the semiconductor light emitting devices 250 constituting individual pixels. In this case, the partition wall 290 may serve to separate individual unit pixels from each other, and may be integrally formed with the conductive adhesive layer 230. For example, by inserting the semiconductor light emitting device 250 into the anisotropic conductive film, the base member of the anisotropic conductive film may form the partition wall.
  • the partition wall 290 may have reflective properties and a contrast ratio may be increased even without a separate black insulator.
  • a reflective partition wall may be separately provided.
  • the partition wall 290 may include a black or white insulator depending on the purpose of the display device.
  • the partition wall 290 is between the vertical semiconductor light emitting element 250 and the second electrode 240. It can be located between. Accordingly, individual unit pixels can be configured with a small size using the semiconductor light emitting device 250, and the distance between the semiconductor light emitting device 250 is relatively large enough, so that the second electrode 240 is connected to the semiconductor light emitting device 250. ), there is an effect of implementing a flexible display device having HD image quality.
  • a black matrix 291 may be disposed between each phosphor to improve contrast. That is, the black matrix 291 can improve contrast of light and dark.
  • the semiconductor light emitting device 250 is positioned on the conductive adhesive layer 230, thereby configuring individual pixels in the display device. Since the semiconductor light emitting device 250 has excellent luminance, individual unit pixels can be configured with a small size. Accordingly, a full color display in which red (R), green (G), and blue (B) unit pixels form one pixel may be implemented by the semiconductor light emitting device.
  • anisotropic conductive film (hereinafter, anisotropic conductive layer) is used in the display device described above.
  • the anisotropic conductive film (hereinafter, anisotropic conductive layer) is made of a mixture of conductive balls (hereinafter, conductive particles) and an insulating material. As described with reference to FIG. 6, when the substrate on which the semiconductor light emitting element is formed is thermally compressed to the wiring substrate coated with the anisotropic conductive layer, the wiring electrode and the semiconductor light emitting element are electrically connected by conductive particles.
  • the conductive particles are compressed between the semiconductor light emitting device and the wiring electrode to electrically connect the semiconductor light emitting device and the wiring electrode.
  • a certain level of pressure or more must be applied to the conductive particles.
  • a contact failure between the semiconductor light emitting device 350 and the wiring electrode 320 may occur due to the fluidity of the anisotropic conductive layer 330.
  • the conductive particles 331 should be located between the semiconductor light emitting device 350 and the wiring electrode 320, but due to external pressure, the conductive particles 331 are formed between the semiconductor light emitting device 350 and the wiring electrode. 320) can move without staying in between. In this case, the semiconductor light emitting device 350 and the wiring electrode 320 are incompletely electrically connected.
  • the pressure applied to each area of the wiring board 110 during thermal compression becomes non-uniform. Specifically, when the area of the wiring board is large, a relatively high pressure is applied to the edge area of the wiring board, and a relatively low pressure is applied to the central area of the wiring board. Due to this, the conductive particles are completely pressed against the wiring electrode and the semiconductor light emitting device in the edge area of the wiring board, but insufficient pressure is applied to the conductive particles in the central area of the wiring board, resulting in poor contact between the wiring electrode and the semiconductor light emitting device. .
  • the present invention provides a structure and a manufacturing method that prevents conductive particles from being separated between a semiconductor light emitting device and a wiring electrode during the above-described thermal compression, and uniform pressure is applied to the entire wiring board.
  • 12 to 15 are conceptual diagrams showing a method of manufacturing a display device according to the present invention.
  • a step of curing after coating a resin including the conductive particles 331 on the substrate 310 is performed.
  • the step of coating the resin including the conductive particles may be performed in a roll pressing method (R), but is not limited thereto.
  • the coating method may be performed by bar coating, beta coating, or the like.
  • the coating method may vary depending on the distance between wiring electrodes, the type of conductive particles, and the shape density.
  • an anisotropic conductive layer is formed between the wiring electrode and the wiring electrode.
  • the anisotropic conductive layer is divided into a first region formed on the wiring electrode and a second region formed between the wiring electrodes.
  • the thickness of the anisotropic conductive layer 330 is minimized to the extent that conductive particles are formed in only one layer. Specifically, it is preferable that the average thickness of the second region is smaller than the thickness of the wiring electrode.
  • the thickness of the anisotropic conductive layer 330 may be formed within 3 ⁇ m. However, the thickness of the anisotropic conductive layer 330 may vary depending on the size of the conductive particles.
  • the present invention minimizes a phenomenon in which conductive particles are separated from the area between the semiconductor light emitting device and the wiring electrode when the transfer substrate is pressed.
  • the step of compressing the top is in progress.
  • the wafer itself may be the transfer board W.
  • the intermediate substrate becomes a transfer substrate.
  • the anisotropic conductive layer 330 Since the anisotropic conductive layer 330 according to the present invention is formed to have a very thin thickness, the anisotropic conductive layer 330 does not flow much during the pressing process. In the pressing step, part of the anisotropic conductive layer 330 may flow, but since most of the space between the semiconductor light emitting devices 350 and the wiring electrode 320 is an empty space 360, the anisotropic conductive layer 330 ) Flows into the empty space. Through this, the present invention allows the pressure to be uniformly applied to the entire area of the substrate 310 during the pressing process.
  • the conductive particles 331 are compressed to electrically connect the semiconductor light emitting device 350 and the wiring electrode 320. According to the present invention, since the flow of the anisotropic conductive layer 330 is minimized, it is highly possible that the conductive particles 331 deviate from the position between the semiconductor light emitting device 350 and the wiring electrode 320 in the pressing step. Lowers.
  • a step of injecting and curing a light-transmitting resin into an empty space 360 formed between the transfer substrate W and the substrate 310 is performed.
  • an empty space 360 is formed between the transfer substrate W and the substrate 310.
  • a light-transmitting resin is put into the empty space 360.
  • the light-transmitting resin 370 supplements the fixing ability of the anisotropic conductive layer 330 which is reduced by decreasing the thickness of the anisotropic conductive layer 330.
  • the anisotropic conductive layer 330 having a reduced thickness may not sufficiently fix the semiconductor light emitting device 350 compressed to the wiring electrode.
  • the light-transmitting resin 370 serves to strongly fix the semiconductor light-emitting device 350 to the substrate 310 from the side of the semiconductor light-emitting device 350. Through this, the present invention prevents the semiconductor light emitting device from being separated from the substrate 310 even if the thickness of the anisotropic conductive layer 330 is reduced.
  • a sealing layer 390 may be formed on the edge of the substrate to prevent the resin from leaking to the outside.
  • the sealing layer 390 is disposed between the substrate 310 and the transfer substrate W, and prevents resin from leaking to the outside from the edge of the substrate 310.
  • the transfer substrate W limits the height of the light-transmitting resin layer 370 to a certain level. Accordingly, the height of the semiconductor light emitting device 350 becomes the same as the height of the light-transmitting resin layer 370. For this reason, the present invention does not require a separate planarization process after transfer of the semiconductor light emitting device.
  • the transfer substrate may be removed by a laser lift-off method (LLO), but is not limited thereto.
  • LLO laser lift-off method
  • 16 is a cross-sectional view of a display device according to the present invention.
  • conductive particles 331 positioned between the semiconductor light emitting device 350 and the wiring electrode 320 electrically connect the semiconductor light emitting device 350 and the wiring electrode 320 in a compressed state.
  • the light transmission layer 370 is formed on the anisotropic conductive layer 330 formed between the wiring electrodes 320. That is, the light transmitting layer 370 is formed on the second region of the anisotropic conductive layer 330.
  • the average thickness of the second region may be smaller than the thickness of the wiring electrode 320.
  • the light-transmitting layer 370 may be formed not only to surround a side surface of the semiconductor light emitting device, but also to partially protrude through the wiring electrodes.
  • the display device using the semiconductor light emitting device described above is not limited to the configuration and method of the above-described embodiments, and the above embodiments are configured by selectively combining all or part of each of the embodiments so that various modifications can be made. May be.

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PCT/KR2020/002453 2018-07-11 2020-02-20 반도체 발광 소자를 이용한 디스플레이 장치 및 이의 제조방법 WO2021006450A1 (ko)

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EP20824051.5A EP3813120A4 (en) 2018-07-11 2020-02-20 DISPLAY DEVICE USING LIGHT-emitting semiconductor elements and method of manufacturing the same
US17/254,683 US20220190220A1 (en) 2018-07-11 2020-02-20 Display device using a semiconductor light emitting device and manufacturing method thereof
CN202080004745.9A CN112655091B (zh) 2018-07-11 2020-02-20 使用半导体发光元件的显示装置及其制造方法

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KR1020190084033A KR20200006952A (ko) 2018-07-11 2019-07-11 반도체 발광 소자를 이용한 디스플레이 장치 및 이의 제조방법
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US20230178686A1 (en) * 2020-05-14 2023-06-08 Lg Electronics Inc. Semiconductor light-emitting element and display device including same

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EP3813120A4 (en) 2022-03-30
US20220190220A1 (en) 2022-06-16
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CN112655091A (zh) 2021-04-13
EP3813120A1 (en) 2021-04-28

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