WO2020259004A1 - Thin-film encapsulation structure and manufacturing method therefor, component and encapsulation method therefor, and display panel and apparatus - Google Patents
Thin-film encapsulation structure and manufacturing method therefor, component and encapsulation method therefor, and display panel and apparatus Download PDFInfo
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- WO2020259004A1 WO2020259004A1 PCT/CN2020/084611 CN2020084611W WO2020259004A1 WO 2020259004 A1 WO2020259004 A1 WO 2020259004A1 CN 2020084611 W CN2020084611 W CN 2020084611W WO 2020259004 A1 WO2020259004 A1 WO 2020259004A1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/87—Arrangements for heating or cooling
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- the application relates to a thin film packaging structure and a manufacturing method thereof, components and packaging methods thereof, a display panel and a display device.
- thin film packaging technology is widely used in some flexible devices, such as flexible organic light-emitting devices (OLED) or flexible organic solar cells.
- the thin-film encapsulation layer obtained after thin-film encapsulation of the flexible device has the characteristics of light weight, thin thickness, and bendability.
- the application provides a thin film packaging structure and a manufacturing method thereof, components and packaging methods thereof, a display panel and a display device, which can improve the heat dissipation performance of the thin film packaging layer.
- embodiments of the present disclosure provide a thin film packaging structure, including: an organic thin film layer covering a packaged device, the organic thin film layer including an organic matrix and a phase change structure distributed in the organic matrix,
- the phase change structure includes a phase change material, and undergoes a phase change according to the heat generated by the packaged device.
- the phase change structure includes an inner core structure and an outer wall structure, the outer wall structure covers the inner core structure, and the material of the inner core structure is a solid-liquid phase change material.
- the melting point of the core structure is lower than the temperature of the packaged device during normal operation.
- the solubility of the inner core structure and the outer wall structure are opposite.
- the surface tension of the inner core structure is greater than the surface tension of the outer wall structure.
- the material of the core structure includes one or more of crystalline hydrated salt, eutectic hydrated salt, linear alkanes, paraffins, fatty acids, polyethylene glycols, n-hexadecane, and n-octadecane .
- the material of the outer wall structure includes one or more of melamine resin, urea-formaldehyde resin, polypropylene resin, polyvinyl alcohol, epoxy resin, gelatin, gum arabic, polystyrene, and polymethyl methacrylate .
- the material of the organic matrix includes epoxy resin.
- the particle size of the phase change structure is 10 nm to 500 nm.
- the film packaging structure further includes a first inorganic film layer and a second inorganic film layer;
- the first inorganic film layer covers the packaged device and is located on the side of the organic film layer close to the packaged device;
- the second inorganic film layer covers the packaged device and is located on the side of the organic film layer away from the packaged device.
- the material of the first inorganic thin film layer and the second inorganic thin film layer includes one of Al 2 O 3 , MgF 2 , and SiOx.
- the thickness of the organic thin film layer is between 2000 nm and 3000 nm.
- the thickness of the first inorganic thin film layer and the second inorganic thin film layer is between 500 nm and 800 nm.
- the embodiments of the present disclosure provide a component, including the thin film packaging structure provided in the first aspect and a device to be packaged, and the device to be packaged is covered with the thin film packaging structure.
- the melting point of the core structure is lower than the temperature of the device to be packaged during normal operation.
- the thin film packaging structure further includes a first inorganic thin film layer and a second inorganic thin film layer, wherein the first inorganic thin film layer covers the device to be packaged and is located on the organic thin film layer close to the device to be packaged.
- the second inorganic film layer covers the device to be packaged, and is located on the side of the organic film layer away from the device to be packaged.
- an embodiment of the present disclosure provides a display panel including the components provided in the second aspect.
- an embodiment of the present disclosure provides a display device including the display panel provided in the third aspect.
- embodiments of the present disclosure provide a method for manufacturing a thin film packaging structure, including:
- the organic thin film layer is formed by using the organic mixed solution, wherein the organic mixed solution is fabricated on a packaged device, the phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
- the mass ratio of the solution containing the phase change structure to the organic matrix solution is 5:95 to 20:80.
- embodiments of the present disclosure provide a method for packaging components, including: mixing a solution containing a phase change structure with an organic matrix solution to form an organic mixed solution; and fabricating the organic mixed solution on the packaged device , Forming an organic thin film layer; wherein the phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
- the packaging method further includes: forming a first inorganic thin film layer on the packaged device; After the solution is prepared on the packaged device and the organic thin film layer is formed, the packaging method further includes: forming a second inorganic thin film layer on the organic thin film layer.
- the mass ratio of the solution containing the phase change structure to the organic matrix solution is 5:95 to 20:80.
- FIG. 1 is a schematic structural diagram of a thin film packaging structure provided by an embodiment of the present application.
- FIG. 2 is a schematic structural diagram of another thin-film packaging structure provided by an embodiment of the present application.
- FIG. 3 is a flowchart of a manufacturing method of a thin film packaging structure provided by an embodiment of the present application.
- a thin film packaging technology is a packaging method in which organic thin films or inorganic thin films are alternately deposited on the surface of the device by deposition technology.
- the thin film packaging layer formed in this way has better water and oxygen insulation performance for flexible devices, it has better heat dissipation. Poor, which will affect the service life of the flexible device.
- a thin film packaging structure provided by an embodiment of the present application includes an organic thin film layer 2 covering the packaged device 1; the organic thin film layer 2 includes an organic matrix 21 and phase change distributed in the organic matrix 21 The structure 22, the phase change structure includes a phase change material, and the phase change structure 22 undergoes a phase change according to the heat generated by the packaged device 1.
- the thin film packaging structure provided by the embodiments of the present application includes an organic thin film layer 2, and the organic thin film layer 2 includes a phase change structure 22. Since the phase change structure 22 can undergo a phase change according to the heat generated by the packaged device 1, the phase change structure 22 can absorb The heat dissipation of the packaged device 1 during operation, and the absorbed heat is used to provide the phase change structure 22 to produce a phase change, so that the temperature of the packaged device 1 itself will not be too high; when the packaged device 1 no longer dissipates heat, the phase can be used The reverse phase change process of the variable structure 22 releases heat, thereby prolonging the heat dissipation time, and will not cause the temperature of the packaged device 1 to rise rapidly, which can effectively solve the problem of poor heat dissipation of the thin film package structure, thereby improving the use of the packaged device 1 life.
- the phase change structure 22 includes an inner core structure and an outer wall structure, the outer wall structure covers the inner core structure, and the material of the inner core structure is a solid-liquid phase change material.
- the phase change structure 22 is a composite particle with no fixed shape.
- the material of the core structure can also be selected from solid-solid phase change materials, solid-gas phase change materials, liquid-gas phase change materials, etc.
- the implementation of this application The example only takes the material of the core structure as a solid-liquid phase change material as an example.
- the packaged device 1 when the packaged device 1 generates heat during operation, the heat will be absorbed by the solid-liquid phase change material, and the solid-liquid phase change material will produce a phase change process from solid to liquid after absorbing the heat, which will not cause the encapsulated
- the temperature of the device 1 is too high; when the packaged device 1 stops working and no longer dissipates heat, the solid-liquid phase change material will undergo a phase change process from liquid to solid. This process will release heat, that is, the process can transform the packaged device 1 The generated heat is released into the external environment. In this way, the packaged device 1 uses the phase change process of the solid-liquid phase change material to extend the heat dissipation time, and will not cause the packaged device 1 to rise rapidly in a short period of time, thereby improving the packaged device 1 Service life.
- the melting point of the core structure in the embodiment of the present application is lower than the temperature of the packaged device 1 during normal operation.
- the material of the core structure is a solid-liquid phase change material
- the melting point is the temperature at which a solid transforms its physical state from a solid to a liquid.
- the melting point of the solid-liquid-phase change material is lower than the temperature of the packaged device 1 during normal operation. Therefore, when the packaged device 1 generates heat during operation, the heat will be absorbed by the solid-liquid-phase change material, and the solid-liquid-phase change material will change after absorption. It is the phase change process of liquid.
- the surface tension of the inner core structure is greater than the surface tension of the outer wall structure, which can effectively prevent the phase change structure from cracking during the phase change process.
- the embodiment of this application requires that the inner core structure and the outer wall structure do not react.
- the solubility of the inner core structure and the outer wall structure in the embodiment of the present application is opposite. In this way, it can be ensured that the inner core structure and the outer wall structure do not react during the phase change process. The stability of the phase change structure.
- the material of the core structure in the embodiments of the present application includes one of crystalline hydrated salt, eutectic hydrated salt, linear alkanes, paraffins, fatty acids, polyethylene glycols, n-hexadecane, and n-octadecane Or more;
- the material of the outer wall structure includes one or more of melamine resin, urea-formaldehyde resin, polypropylene resin, polyvinyl alcohol, epoxy resin, gelatin, gum arabic, polystyrene, polymethyl methacrylate ;
- the material of the organic matrix includes epoxy resin. Exemplary materials for the inner core structure, outer wall structure and organic matrix will be described in detail below in conjunction with exemplary embodiments.
- the particle size of the phase change structure in the embodiment of the present application is 10 nm to 500 nm.
- the organic thin film layer can be made into a nano-level film layer, which makes the thickness of the thin film packaging structure thinner, which is more conducive to actual production needs.
- the thin film packaging structure provided by the embodiment of the present application further includes a first inorganic thin film layer 3 and a second inorganic thin film layer 4, and the first inorganic thin film layer 3 covers and is encapsulated
- the device 1 is located on the side of the organic thin film layer 2 close to the packaged device 1;
- the second inorganic thin film layer 4 covers the packaged device 1 and is located on the side of the organic thin film layer 2 away from the packaged device 1;
- this thin film packaging structure Can play a good role in blocking water and oxygen.
- Figure 2 only shows two inorganic thin film layers and one organic thin film layer.
- the inorganic thin film layer and the organic thin film layer can be alternately designed for multiple layers, that is, the second inorganic thin film layer in Figure 2 4 can be provided with a layer of organic thin film layer 2 and another layer of inorganic thin film layer on the organic thin film layer 2.
- the thickness of the thin film packaging structure and the packaging effect of the thin film packaging structure are taken into consideration.
- the thin film packaging structure is designed as shown in FIG. 2.
- the material of the first inorganic thin film layer and the second inorganic thin film layer includes one of Al 2 O 3 , MgF 2 , and SiOx.
- the thickness of the organic thin film layer is between 2000 nm and 3000 nm.
- the thickness of the first inorganic thin film layer and the second inorganic thin film layer is between 500 nm and 800 nm.
- the thin film packaging structure includes a first inorganic thin film layer 3, an organic thin film layer 2, and a second inorganic thin film layer 4 sequentially covering the packaged device 1.
- the first inorganic thin film layer 3 and The material of the second inorganic film layer 4 is aluminum oxide (Al 2 O 3 ) with a thickness of 800 nanometers (nm);
- the material of the organic matrix included in the organic film layer 2 is epoxy resin, and
- the organic film layer 2 includes
- the material of the outer wall structure of the phase change structure is polystyrene, the material of the core structure of the phase change structure is n-octadecane, the particle size of the phase change structure is 120 nm, and the thickness of the organic thin film layer 2 is 2000 nm.
- the thin film packaging structure includes a first inorganic thin film layer 3, an organic thin film layer 2, and a second inorganic thin film layer 4 sequentially covering the packaged device 1.
- the first inorganic thin film layer 3 and The material of the second inorganic thin film layer 4 is magnesium fluoride (MgF 2 ) with a thickness of 500 nm;
- the material of the organic matrix included in the organic thin film layer 2 is epoxy resin, and the outer wall structure of the phase change structure included in the organic thin film layer 2 is The material is polymethyl methacrylate, the material of the core structure of the phase change structure is n-hexadecane, the particle size of the phase change structure is 150 nm, and the thickness of the organic thin film layer 2 is 3000 nm.
- the thin film packaging structure includes a first inorganic thin film layer 3, an organic thin film layer 2, and a second inorganic thin film layer 4 sequentially covering the packaged device 1.
- the first inorganic thin film layer 3 and The material of the second inorganic thin film layer 4 is silicon oxide (SiO x ) with a thickness of 700 nm;
- the organic matrix material included in the organic thin film layer 2 is epoxy resin, and
- the organic thin film layer 2 includes a phase change structure outer wall structure material It is polystyrene, the material of the core structure of the phase change structure is paraffin, the particle size of the phase change structure is 200 nm, and the thickness of the organic thin film layer 2 is 2500 nm.
- the embodiments of the present application also provide a component, including the above-mentioned thin-film packaging structure provided by the embodiments of the present application, and further including a device to be packaged, and the device to be packaged is covered with the thin-film packaging structure.
- the melting point of the core structure is lower than the temperature of the device to be packaged during normal operation.
- the thin film packaging structure further includes a first inorganic thin film layer and a second inorganic thin film layer, wherein the first inorganic thin film layer covers the device to be packaged and is located on the organic thin film layer close to the device to be packaged.
- the second inorganic film layer covers the device to be packaged, and is located on the side of the organic film layer away from the device to be packaged.
- the components include the above-mentioned thin-film packaging structure in the embodiments of the present application
- the components provided in the embodiments of the present application have the same beneficial effects as the thin-film packaging structure, and will not be repeated here.
- embodiments of the present application also provide a display panel, which includes the above-mentioned components provided in the embodiments of the present application. Since the display panel includes the above-mentioned components provided in the embodiments of the present application, the display panel provided in the embodiments of the present application has the same beneficial effects as the components, and will not be repeated here.
- an embodiment of the present application further provides a display device, which includes the above-mentioned display panel provided by the embodiment of the present application. Since the display device includes the above-mentioned display panel provided in the embodiment of the present application, the display device provided in the embodiment of the present application has the same beneficial effects as the display panel, and will not be repeated here.
- an embodiment of the present application also provides a manufacturing method of a thin film packaging structure, as shown in FIG. 3, the method includes:
- the phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
- the size and filling amount of the phase change structure in the solution containing the phase change structure can be adjusted according to actual needs to adapt to different products.
- the mass ratio of the solution containing the phase change structure to the organic matrix solution can be adjusted from 5:95 to 20:80 to meet the needs of different products; for large-size products, after coating the organic mixed solution, the resulting The area of the organic thin film layer is relatively large. Therefore, when used for size products, the mass ratio of the solution containing the phase change structure to the organic matrix solution can be selected to be higher.
- Embodiment 1 Manufacturing method of thin film packaging structure:
- a layer of Al 2 O 3 with a thickness of 800 nm is deposited on the packaged device 1 by means of plasma enhanced chemical vapor deposition.
- a polystyrene-coated n-octadecane phase change structure is produced, and the solution containing the phase change structure is mixed with the epoxy resin solution to form an organic mixed solution, for example, a solution containing the phase change structure and an organic matrix solution
- an organic mixed solution for example, a solution containing the phase change structure and an organic matrix solution
- the mass ratio of is 5:95 to 20:80; then the organic mixed solution is made on Al 2 O 3 by spin coating or inkjet printing to form an organic thin film layer 2, for example, an organic thin film with a thickness of 2000 nm can be produced Layer 2.
- a layer of Al 2 O 3 with a thickness of 800 nm is deposited on the organic thin film layer 2 using a plasma enhanced chemical vapor deposition method.
- Embodiment 2 Method for manufacturing thin film packaging structure:
- a layer of MgF 2 with a thickness of 500 nm is deposited on the packaged device 1 using a plasma enhanced chemical vapor deposition method.
- the phase change structure of polymethyl methacrylate coated n-hexadecane is made, and the solution containing the phase change structure is mixed with the epoxy resin solution to form an organic mixed solution, for example, the solution containing the phase change structure and The mass ratio of the organic matrix solution is 5:95 to 20:80; then the organic mixed solution is fabricated on the MgF 2 by spin coating or inkjet printing to form the organic thin film layer 2, for example, an organic film with a thickness of 3000 nm can be fabricated. ⁇ 2 ⁇ Film layer 2.
- a layer of MgF 2 with a thickness of 500 nm is deposited on the organic thin film layer 2 using a plasma enhanced chemical vapor deposition method.
- Embodiment 3 Manufacturing method of thin film packaging structure:
- a layer of SiOx with a thickness of 700 nm is deposited on the packaged device 1 using a plasma enhanced chemical vapor deposition method.
- the phase change structure of polystyrene coated paraffin wax and mix the solution containing the phase change structure with the epoxy resin solution to form an organic mixed solution, for example, the mass ratio of the solution containing the phase change structure to the organic matrix solution
- an organic mixed solution for example, the mass ratio of the solution containing the phase change structure to the organic matrix solution
- the range is from 5:95 to 20:80; then the organic mixed solution is fabricated on SiOx by spin coating or inkjet printing to form the organic thin film layer 2, which can be specifically fabricated to form an organic thin film layer 2 with a thickness of 2500 nm.
- a layer of SiOx with a thickness of 700 nm is deposited on the organic thin film layer 2 using a plasma-enhanced chemical vapor deposition method.
- the embodiment of the present disclosure also provides a method for packaging components, including: mixing a solution containing a phase change structure with an organic matrix solution to form an organic mixed solution; and fabricating the organic mixed solution on a packaged device to form an organic The film layer; the phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
- the packaging method further includes: forming a first inorganic thin film layer on the packaged device; After the organic thin film layer is formed on the packaged device, the packaging method further includes: forming a second inorganic thin film layer on the organic thin film layer.
- the mass ratio of the solution containing the phase change structure to the organic matrix solution is 5:95 to 20:80.
- the film packaging structure provided by this application has the following beneficial effects:
- the thin film packaging structure provided by the embodiments of the present application includes an organic thin film layer, and the organic thin film layer includes a phase change structure. Since the phase change structure can undergo phase change according to the heat generated by the packaged device, the phase change structure can absorb the encapsulated device during operation.
- the absorbed heat is used to provide phase change to the phase change structure, and will not cause the packaged device itself to become too hot; when the packaged device no longer dissipates heat, the phase change process of the phase change structure can be used to release heat, thereby The heat dissipation time is prolonged, and the temperature of the packaged device itself is not caused to rise rapidly, which can effectively solve the problem of poor heat dissipation of the thin film package structure in the prior art, thereby increasing the service life of the packaged device.
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Claims (23)
- 一种薄膜封装结构,包括:A thin film packaging structure, including:有机薄膜层,覆盖在被封装器件上,Organic film layer, covering the packaged device,其中所述有机薄膜层包括有机基体和分布在所述有机基体内的相变结构,所述相变结构包括相变材料,且根据所述被封装器件产生的热量进行相变。The organic thin film layer includes an organic matrix and a phase change structure distributed in the organic matrix. The phase change structure includes a phase change material and undergoes a phase change according to the heat generated by the packaged device.
- 根据权利要求1所述的薄膜封装结构,其中所述相变结构包括内核结构和外壁结构,所述外壁结构包覆所述内核结构,所述内核结构的材料为固液相变材料。The thin film packaging structure according to claim 1, wherein the phase change structure comprises an inner core structure and an outer wall structure, the outer wall structure encapsulates the inner core structure, and a material of the inner core structure is a solid-liquid phase change material.
- 根据权利要求2所述的薄膜封装结构,其中所述内核结构的熔点低于所述被封装器件正常工作时的温度。4. The thin film packaging structure of claim 2, wherein the melting point of the core structure is lower than the temperature of the packaged device during normal operation.
- 根据权利要求2所述的薄膜封装结构,其中所述内核结构与所述外壁结构的溶解性相反。4. The thin film packaging structure of claim 2, wherein the core structure and the outer wall structure have opposite solubility.
- 根据权利要求2所述的薄膜封装结构,其中所述内核结构的表面张力大于所述外壁结构的表面张力。3. The film packaging structure of claim 2, wherein the surface tension of the core structure is greater than the surface tension of the outer wall structure.
- 根据权利要求2-5中任一项所述的薄膜封装结构,其中所述内核结构的材料包括结晶水合盐、共晶水合盐、直链烷烃、石蜡类、脂肪酸类、聚乙二醇类、正十六烷、正十八烷中的一种或多种。The film packaging structure according to any one of claims 2-5, wherein the material of the core structure includes crystalline hydrated salt, eutectic hydrated salt, linear alkanes, paraffins, fatty acids, polyethylene glycols, One or more of n-hexadecane and n-octadecane.
- 根据权利要求2-5中任一项所述的薄膜封装结构,其中所述外壁结构的材料包括蜜胺树脂、脲醛树脂、聚丙烯树脂、聚乙烯醇、环氧树脂、明胶、阿拉伯胶、聚苯乙烯、聚甲基丙烯酸甲酯中的一种或多种。The film packaging structure according to any one of claims 2-5, wherein the material of the outer wall structure comprises melamine resin, urea resin, polypropylene resin, polyvinyl alcohol, epoxy resin, gelatin, gum arabic, poly One or more of styrene and polymethyl methacrylate.
- 根据权利要求1所述的薄膜封装结构,其中所述有机基体的材料包括环氧树脂。The thin film packaging structure according to claim 1, wherein the material of the organic matrix includes epoxy resin.
- 根据权利要求1所述的薄膜封装结构,其中所述相变结构的粒径尺寸为10纳米到500纳米。The thin film packaging structure according to claim 1, wherein the particle size of the phase change structure is 10 nm to 500 nm.
- 根据权利要求1-5、8-9中任一项所述的薄膜封装结构,还包括第一无机薄膜层和第二无机薄膜层;The thin film packaging structure according to any one of claims 1-5 and 8-9, further comprising a first inorganic thin film layer and a second inorganic thin film layer;所述第一无机薄膜层覆盖所述被封装器件,且位于所述有机薄膜层靠近所述被封装器件的一侧;The first inorganic thin film layer covers the packaged device and is located on the side of the organic thin film layer close to the packaged device;所述第二无机薄膜层覆盖所述被封装器件,且位于所述有机薄膜层远离所述被封装器件的一侧。The second inorganic thin film layer covers the packaged device and is located on the side of the organic thin film layer away from the packaged device.
- 根据权利要求10所述的薄膜封装结构,其中所述第一无机薄膜层和第二无机薄膜层的材料包括Al 2O 3、MgF 2、SiOx中的一种。 10. The thin film packaging structure according to claim 10, wherein the material of the first inorganic thin film layer and the second inorganic thin film layer includes one of Al 2 O 3 , MgF 2 , and SiOx.
- 根据权利要求1-11中任一项所述的薄膜封装结构,其中所述有机薄膜层的厚度在2000nm-3000nm之间。The thin film packaging structure according to any one of claims 1-11, wherein the thickness of the organic thin film layer is between 2000 nm and 3000 nm.
- 根据权利要求11所述的薄膜封装结构,其中所述第一无机薄膜层和第二无机薄膜层的厚度在500nm-800nm之间。11. The thin film packaging structure according to claim 11, wherein the thickness of the first inorganic thin film layer and the second inorganic thin film layer is between 500 nm and 800 nm.
- 一种元器件,包括:A component including:如权利要求1-13中任一项所述的薄膜封装结构;5. The film packaging structure according to any one of claims 1-13;待封装器件,包覆有所述薄膜封装结构。The device to be packaged is covered with the film package structure.
- 根据权利要求14所述的元器件,其中所述内核结构的熔点低于所述待封装器件正常工作时的温度。The component according to claim 14, wherein the melting point of the core structure is lower than the temperature of the device to be packaged during normal operation.
- 根据权利要求14或15所述的元器件,其中所述薄膜封装结构还包括第一无机薄膜层和第二无机薄膜层,The component according to claim 14 or 15, wherein the film packaging structure further comprises a first inorganic film layer and a second inorganic film layer,其中所述第一无机薄膜层覆盖所述待封装器件,且位于所述有机薄膜层靠近所述待封装器件的一侧;The first inorganic film layer covers the device to be packaged and is located on the side of the organic film layer close to the device to be packaged;所述第二无机薄膜层覆盖所述待封装器件,且位于所述有机薄膜层远离所述待封装器件的一侧。The second inorganic thin film layer covers the device to be packaged and is located on the side of the organic thin film layer away from the device to be packaged.
- 一种显示面板,包括权利要求14-16中任一项所述的元器件。A display panel comprising the components according to any one of claims 14-16.
- 一种显示装置,包括权利要求17所述的显示面板。A display device, comprising the display panel of claim 17.
- 一种薄膜封装结构的制作方法,包括:A manufacturing method of a thin film packaging structure includes:将包含相变结构的溶液与有机基体溶液混合,形成有机混合溶液;Mixing the solution containing the phase change structure with the organic matrix solution to form an organic mixed solution;利用所述有机混合溶液形成有机薄膜层,其中所述有机混合溶液制作在被封装器件上;Using the organic mixed solution to form an organic thin film layer, wherein the organic mixed solution is fabricated on the packaged device;其中所述相变结构包括相变材料,且根据所述被封装器件产生的热量进行相变。The phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
- 根据权利要求19所述的制作方法,其中所述包含相变结构的溶液与所述有机基体溶液的质量比为5:95到20:80。The manufacturing method according to claim 19, wherein the mass ratio of the solution containing the phase change structure to the organic matrix solution is 5:95 to 20:80.
- 一种元器件的封装方法,包括:A method for packaging components, including:将包含相变结构的溶液与有机基体溶液混合,形成有机混合溶液;Mixing the solution containing the phase change structure with the organic matrix solution to form an organic mixed solution;将所述有机混合溶液制作在被封装器件上,形成有机薄膜层;Fabricating the organic mixed solution on the packaged device to form an organic thin film layer;其中所述相变结构包括相变材料,且根据所述被封装器件产生的热量进行相变。The phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
- 根据权利要求21所述的封装方法,在所述有机混合溶液制作在被封装器件上,形成有机薄膜层之前,还包括:22. The packaging method of claim 21, before the organic mixed solution is fabricated on the packaged device to form an organic thin film layer, further comprising:在所述被封装器件上形成第一无机薄膜层;Forming a first inorganic thin film layer on the packaged device;在在所述有机混合溶液制作在被封装器件上,形成有机薄膜层之后,所述封装方法还包括:After the organic mixed solution is fabricated on the packaged device to form an organic thin film layer, the packaging method further includes:在所述有机薄膜层上形成第二无机薄膜层。A second inorganic thin film layer is formed on the organic thin film layer.
- 根据权利要求21所述的封装方法,其中所述包含相变结构的溶液与所述有机基体溶液的质量比为5:95到20:80。22. The packaging method according to claim 21, wherein the mass ratio of the solution containing the phase change structure to the organic matrix solution is 5:95 to 20:80.
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