WO2020259004A1 - Thin-film encapsulation structure and manufacturing method therefor, component and encapsulation method therefor, and display panel and apparatus - Google Patents

Thin-film encapsulation structure and manufacturing method therefor, component and encapsulation method therefor, and display panel and apparatus Download PDF

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Publication number
WO2020259004A1
WO2020259004A1 PCT/CN2020/084611 CN2020084611W WO2020259004A1 WO 2020259004 A1 WO2020259004 A1 WO 2020259004A1 CN 2020084611 W CN2020084611 W CN 2020084611W WO 2020259004 A1 WO2020259004 A1 WO 2020259004A1
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thin film
film layer
phase change
organic
packaged
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PCT/CN2020/084611
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French (fr)
Chinese (zh)
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杜帅
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京东方科技集团股份有限公司
成都京东方光电科技有限公司
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Publication of WO2020259004A1 publication Critical patent/WO2020259004A1/en

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/844Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/87Arrangements for heating or cooling
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • the application relates to a thin film packaging structure and a manufacturing method thereof, components and packaging methods thereof, a display panel and a display device.
  • thin film packaging technology is widely used in some flexible devices, such as flexible organic light-emitting devices (OLED) or flexible organic solar cells.
  • the thin-film encapsulation layer obtained after thin-film encapsulation of the flexible device has the characteristics of light weight, thin thickness, and bendability.
  • the application provides a thin film packaging structure and a manufacturing method thereof, components and packaging methods thereof, a display panel and a display device, which can improve the heat dissipation performance of the thin film packaging layer.
  • embodiments of the present disclosure provide a thin film packaging structure, including: an organic thin film layer covering a packaged device, the organic thin film layer including an organic matrix and a phase change structure distributed in the organic matrix,
  • the phase change structure includes a phase change material, and undergoes a phase change according to the heat generated by the packaged device.
  • the phase change structure includes an inner core structure and an outer wall structure, the outer wall structure covers the inner core structure, and the material of the inner core structure is a solid-liquid phase change material.
  • the melting point of the core structure is lower than the temperature of the packaged device during normal operation.
  • the solubility of the inner core structure and the outer wall structure are opposite.
  • the surface tension of the inner core structure is greater than the surface tension of the outer wall structure.
  • the material of the core structure includes one or more of crystalline hydrated salt, eutectic hydrated salt, linear alkanes, paraffins, fatty acids, polyethylene glycols, n-hexadecane, and n-octadecane .
  • the material of the outer wall structure includes one or more of melamine resin, urea-formaldehyde resin, polypropylene resin, polyvinyl alcohol, epoxy resin, gelatin, gum arabic, polystyrene, and polymethyl methacrylate .
  • the material of the organic matrix includes epoxy resin.
  • the particle size of the phase change structure is 10 nm to 500 nm.
  • the film packaging structure further includes a first inorganic film layer and a second inorganic film layer;
  • the first inorganic film layer covers the packaged device and is located on the side of the organic film layer close to the packaged device;
  • the second inorganic film layer covers the packaged device and is located on the side of the organic film layer away from the packaged device.
  • the material of the first inorganic thin film layer and the second inorganic thin film layer includes one of Al 2 O 3 , MgF 2 , and SiOx.
  • the thickness of the organic thin film layer is between 2000 nm and 3000 nm.
  • the thickness of the first inorganic thin film layer and the second inorganic thin film layer is between 500 nm and 800 nm.
  • the embodiments of the present disclosure provide a component, including the thin film packaging structure provided in the first aspect and a device to be packaged, and the device to be packaged is covered with the thin film packaging structure.
  • the melting point of the core structure is lower than the temperature of the device to be packaged during normal operation.
  • the thin film packaging structure further includes a first inorganic thin film layer and a second inorganic thin film layer, wherein the first inorganic thin film layer covers the device to be packaged and is located on the organic thin film layer close to the device to be packaged.
  • the second inorganic film layer covers the device to be packaged, and is located on the side of the organic film layer away from the device to be packaged.
  • an embodiment of the present disclosure provides a display panel including the components provided in the second aspect.
  • an embodiment of the present disclosure provides a display device including the display panel provided in the third aspect.
  • embodiments of the present disclosure provide a method for manufacturing a thin film packaging structure, including:
  • the organic thin film layer is formed by using the organic mixed solution, wherein the organic mixed solution is fabricated on a packaged device, the phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
  • the mass ratio of the solution containing the phase change structure to the organic matrix solution is 5:95 to 20:80.
  • embodiments of the present disclosure provide a method for packaging components, including: mixing a solution containing a phase change structure with an organic matrix solution to form an organic mixed solution; and fabricating the organic mixed solution on the packaged device , Forming an organic thin film layer; wherein the phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
  • the packaging method further includes: forming a first inorganic thin film layer on the packaged device; After the solution is prepared on the packaged device and the organic thin film layer is formed, the packaging method further includes: forming a second inorganic thin film layer on the organic thin film layer.
  • the mass ratio of the solution containing the phase change structure to the organic matrix solution is 5:95 to 20:80.
  • FIG. 1 is a schematic structural diagram of a thin film packaging structure provided by an embodiment of the present application.
  • FIG. 2 is a schematic structural diagram of another thin-film packaging structure provided by an embodiment of the present application.
  • FIG. 3 is a flowchart of a manufacturing method of a thin film packaging structure provided by an embodiment of the present application.
  • a thin film packaging technology is a packaging method in which organic thin films or inorganic thin films are alternately deposited on the surface of the device by deposition technology.
  • the thin film packaging layer formed in this way has better water and oxygen insulation performance for flexible devices, it has better heat dissipation. Poor, which will affect the service life of the flexible device.
  • a thin film packaging structure provided by an embodiment of the present application includes an organic thin film layer 2 covering the packaged device 1; the organic thin film layer 2 includes an organic matrix 21 and phase change distributed in the organic matrix 21 The structure 22, the phase change structure includes a phase change material, and the phase change structure 22 undergoes a phase change according to the heat generated by the packaged device 1.
  • the thin film packaging structure provided by the embodiments of the present application includes an organic thin film layer 2, and the organic thin film layer 2 includes a phase change structure 22. Since the phase change structure 22 can undergo a phase change according to the heat generated by the packaged device 1, the phase change structure 22 can absorb The heat dissipation of the packaged device 1 during operation, and the absorbed heat is used to provide the phase change structure 22 to produce a phase change, so that the temperature of the packaged device 1 itself will not be too high; when the packaged device 1 no longer dissipates heat, the phase can be used The reverse phase change process of the variable structure 22 releases heat, thereby prolonging the heat dissipation time, and will not cause the temperature of the packaged device 1 to rise rapidly, which can effectively solve the problem of poor heat dissipation of the thin film package structure, thereby improving the use of the packaged device 1 life.
  • the phase change structure 22 includes an inner core structure and an outer wall structure, the outer wall structure covers the inner core structure, and the material of the inner core structure is a solid-liquid phase change material.
  • the phase change structure 22 is a composite particle with no fixed shape.
  • the material of the core structure can also be selected from solid-solid phase change materials, solid-gas phase change materials, liquid-gas phase change materials, etc.
  • the implementation of this application The example only takes the material of the core structure as a solid-liquid phase change material as an example.
  • the packaged device 1 when the packaged device 1 generates heat during operation, the heat will be absorbed by the solid-liquid phase change material, and the solid-liquid phase change material will produce a phase change process from solid to liquid after absorbing the heat, which will not cause the encapsulated
  • the temperature of the device 1 is too high; when the packaged device 1 stops working and no longer dissipates heat, the solid-liquid phase change material will undergo a phase change process from liquid to solid. This process will release heat, that is, the process can transform the packaged device 1 The generated heat is released into the external environment. In this way, the packaged device 1 uses the phase change process of the solid-liquid phase change material to extend the heat dissipation time, and will not cause the packaged device 1 to rise rapidly in a short period of time, thereby improving the packaged device 1 Service life.
  • the melting point of the core structure in the embodiment of the present application is lower than the temperature of the packaged device 1 during normal operation.
  • the material of the core structure is a solid-liquid phase change material
  • the melting point is the temperature at which a solid transforms its physical state from a solid to a liquid.
  • the melting point of the solid-liquid-phase change material is lower than the temperature of the packaged device 1 during normal operation. Therefore, when the packaged device 1 generates heat during operation, the heat will be absorbed by the solid-liquid-phase change material, and the solid-liquid-phase change material will change after absorption. It is the phase change process of liquid.
  • the surface tension of the inner core structure is greater than the surface tension of the outer wall structure, which can effectively prevent the phase change structure from cracking during the phase change process.
  • the embodiment of this application requires that the inner core structure and the outer wall structure do not react.
  • the solubility of the inner core structure and the outer wall structure in the embodiment of the present application is opposite. In this way, it can be ensured that the inner core structure and the outer wall structure do not react during the phase change process. The stability of the phase change structure.
  • the material of the core structure in the embodiments of the present application includes one of crystalline hydrated salt, eutectic hydrated salt, linear alkanes, paraffins, fatty acids, polyethylene glycols, n-hexadecane, and n-octadecane Or more;
  • the material of the outer wall structure includes one or more of melamine resin, urea-formaldehyde resin, polypropylene resin, polyvinyl alcohol, epoxy resin, gelatin, gum arabic, polystyrene, polymethyl methacrylate ;
  • the material of the organic matrix includes epoxy resin. Exemplary materials for the inner core structure, outer wall structure and organic matrix will be described in detail below in conjunction with exemplary embodiments.
  • the particle size of the phase change structure in the embodiment of the present application is 10 nm to 500 nm.
  • the organic thin film layer can be made into a nano-level film layer, which makes the thickness of the thin film packaging structure thinner, which is more conducive to actual production needs.
  • the thin film packaging structure provided by the embodiment of the present application further includes a first inorganic thin film layer 3 and a second inorganic thin film layer 4, and the first inorganic thin film layer 3 covers and is encapsulated
  • the device 1 is located on the side of the organic thin film layer 2 close to the packaged device 1;
  • the second inorganic thin film layer 4 covers the packaged device 1 and is located on the side of the organic thin film layer 2 away from the packaged device 1;
  • this thin film packaging structure Can play a good role in blocking water and oxygen.
  • Figure 2 only shows two inorganic thin film layers and one organic thin film layer.
  • the inorganic thin film layer and the organic thin film layer can be alternately designed for multiple layers, that is, the second inorganic thin film layer in Figure 2 4 can be provided with a layer of organic thin film layer 2 and another layer of inorganic thin film layer on the organic thin film layer 2.
  • the thickness of the thin film packaging structure and the packaging effect of the thin film packaging structure are taken into consideration.
  • the thin film packaging structure is designed as shown in FIG. 2.
  • the material of the first inorganic thin film layer and the second inorganic thin film layer includes one of Al 2 O 3 , MgF 2 , and SiOx.
  • the thickness of the organic thin film layer is between 2000 nm and 3000 nm.
  • the thickness of the first inorganic thin film layer and the second inorganic thin film layer is between 500 nm and 800 nm.
  • the thin film packaging structure includes a first inorganic thin film layer 3, an organic thin film layer 2, and a second inorganic thin film layer 4 sequentially covering the packaged device 1.
  • the first inorganic thin film layer 3 and The material of the second inorganic film layer 4 is aluminum oxide (Al 2 O 3 ) with a thickness of 800 nanometers (nm);
  • the material of the organic matrix included in the organic film layer 2 is epoxy resin, and
  • the organic film layer 2 includes
  • the material of the outer wall structure of the phase change structure is polystyrene, the material of the core structure of the phase change structure is n-octadecane, the particle size of the phase change structure is 120 nm, and the thickness of the organic thin film layer 2 is 2000 nm.
  • the thin film packaging structure includes a first inorganic thin film layer 3, an organic thin film layer 2, and a second inorganic thin film layer 4 sequentially covering the packaged device 1.
  • the first inorganic thin film layer 3 and The material of the second inorganic thin film layer 4 is magnesium fluoride (MgF 2 ) with a thickness of 500 nm;
  • the material of the organic matrix included in the organic thin film layer 2 is epoxy resin, and the outer wall structure of the phase change structure included in the organic thin film layer 2 is The material is polymethyl methacrylate, the material of the core structure of the phase change structure is n-hexadecane, the particle size of the phase change structure is 150 nm, and the thickness of the organic thin film layer 2 is 3000 nm.
  • the thin film packaging structure includes a first inorganic thin film layer 3, an organic thin film layer 2, and a second inorganic thin film layer 4 sequentially covering the packaged device 1.
  • the first inorganic thin film layer 3 and The material of the second inorganic thin film layer 4 is silicon oxide (SiO x ) with a thickness of 700 nm;
  • the organic matrix material included in the organic thin film layer 2 is epoxy resin, and
  • the organic thin film layer 2 includes a phase change structure outer wall structure material It is polystyrene, the material of the core structure of the phase change structure is paraffin, the particle size of the phase change structure is 200 nm, and the thickness of the organic thin film layer 2 is 2500 nm.
  • the embodiments of the present application also provide a component, including the above-mentioned thin-film packaging structure provided by the embodiments of the present application, and further including a device to be packaged, and the device to be packaged is covered with the thin-film packaging structure.
  • the melting point of the core structure is lower than the temperature of the device to be packaged during normal operation.
  • the thin film packaging structure further includes a first inorganic thin film layer and a second inorganic thin film layer, wherein the first inorganic thin film layer covers the device to be packaged and is located on the organic thin film layer close to the device to be packaged.
  • the second inorganic film layer covers the device to be packaged, and is located on the side of the organic film layer away from the device to be packaged.
  • the components include the above-mentioned thin-film packaging structure in the embodiments of the present application
  • the components provided in the embodiments of the present application have the same beneficial effects as the thin-film packaging structure, and will not be repeated here.
  • embodiments of the present application also provide a display panel, which includes the above-mentioned components provided in the embodiments of the present application. Since the display panel includes the above-mentioned components provided in the embodiments of the present application, the display panel provided in the embodiments of the present application has the same beneficial effects as the components, and will not be repeated here.
  • an embodiment of the present application further provides a display device, which includes the above-mentioned display panel provided by the embodiment of the present application. Since the display device includes the above-mentioned display panel provided in the embodiment of the present application, the display device provided in the embodiment of the present application has the same beneficial effects as the display panel, and will not be repeated here.
  • an embodiment of the present application also provides a manufacturing method of a thin film packaging structure, as shown in FIG. 3, the method includes:
  • the phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
  • the size and filling amount of the phase change structure in the solution containing the phase change structure can be adjusted according to actual needs to adapt to different products.
  • the mass ratio of the solution containing the phase change structure to the organic matrix solution can be adjusted from 5:95 to 20:80 to meet the needs of different products; for large-size products, after coating the organic mixed solution, the resulting The area of the organic thin film layer is relatively large. Therefore, when used for size products, the mass ratio of the solution containing the phase change structure to the organic matrix solution can be selected to be higher.
  • Embodiment 1 Manufacturing method of thin film packaging structure:
  • a layer of Al 2 O 3 with a thickness of 800 nm is deposited on the packaged device 1 by means of plasma enhanced chemical vapor deposition.
  • a polystyrene-coated n-octadecane phase change structure is produced, and the solution containing the phase change structure is mixed with the epoxy resin solution to form an organic mixed solution, for example, a solution containing the phase change structure and an organic matrix solution
  • an organic mixed solution for example, a solution containing the phase change structure and an organic matrix solution
  • the mass ratio of is 5:95 to 20:80; then the organic mixed solution is made on Al 2 O 3 by spin coating or inkjet printing to form an organic thin film layer 2, for example, an organic thin film with a thickness of 2000 nm can be produced Layer 2.
  • a layer of Al 2 O 3 with a thickness of 800 nm is deposited on the organic thin film layer 2 using a plasma enhanced chemical vapor deposition method.
  • Embodiment 2 Method for manufacturing thin film packaging structure:
  • a layer of MgF 2 with a thickness of 500 nm is deposited on the packaged device 1 using a plasma enhanced chemical vapor deposition method.
  • the phase change structure of polymethyl methacrylate coated n-hexadecane is made, and the solution containing the phase change structure is mixed with the epoxy resin solution to form an organic mixed solution, for example, the solution containing the phase change structure and The mass ratio of the organic matrix solution is 5:95 to 20:80; then the organic mixed solution is fabricated on the MgF 2 by spin coating or inkjet printing to form the organic thin film layer 2, for example, an organic film with a thickness of 3000 nm can be fabricated. ⁇ 2 ⁇ Film layer 2.
  • a layer of MgF 2 with a thickness of 500 nm is deposited on the organic thin film layer 2 using a plasma enhanced chemical vapor deposition method.
  • Embodiment 3 Manufacturing method of thin film packaging structure:
  • a layer of SiOx with a thickness of 700 nm is deposited on the packaged device 1 using a plasma enhanced chemical vapor deposition method.
  • the phase change structure of polystyrene coated paraffin wax and mix the solution containing the phase change structure with the epoxy resin solution to form an organic mixed solution, for example, the mass ratio of the solution containing the phase change structure to the organic matrix solution
  • an organic mixed solution for example, the mass ratio of the solution containing the phase change structure to the organic matrix solution
  • the range is from 5:95 to 20:80; then the organic mixed solution is fabricated on SiOx by spin coating or inkjet printing to form the organic thin film layer 2, which can be specifically fabricated to form an organic thin film layer 2 with a thickness of 2500 nm.
  • a layer of SiOx with a thickness of 700 nm is deposited on the organic thin film layer 2 using a plasma-enhanced chemical vapor deposition method.
  • the embodiment of the present disclosure also provides a method for packaging components, including: mixing a solution containing a phase change structure with an organic matrix solution to form an organic mixed solution; and fabricating the organic mixed solution on a packaged device to form an organic The film layer; the phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
  • the packaging method further includes: forming a first inorganic thin film layer on the packaged device; After the organic thin film layer is formed on the packaged device, the packaging method further includes: forming a second inorganic thin film layer on the organic thin film layer.
  • the mass ratio of the solution containing the phase change structure to the organic matrix solution is 5:95 to 20:80.
  • the film packaging structure provided by this application has the following beneficial effects:
  • the thin film packaging structure provided by the embodiments of the present application includes an organic thin film layer, and the organic thin film layer includes a phase change structure. Since the phase change structure can undergo phase change according to the heat generated by the packaged device, the phase change structure can absorb the encapsulated device during operation.
  • the absorbed heat is used to provide phase change to the phase change structure, and will not cause the packaged device itself to become too hot; when the packaged device no longer dissipates heat, the phase change process of the phase change structure can be used to release heat, thereby The heat dissipation time is prolonged, and the temperature of the packaged device itself is not caused to rise rapidly, which can effectively solve the problem of poor heat dissipation of the thin film package structure in the prior art, thereby increasing the service life of the packaged device.

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Abstract

Provided are a thin-film encapsulation structure and a manufacturing method therefor, a component and an encapsulation method therefor, and a display panel and a display apparatus. The thin-film encapsulation structure comprises an organic thin film layer (2) covering an encapsulated device (1), wherein the organic thin film layer (2) comprises an organic matrix (21), and a phase change structure (22) distributed in the organic matrix (21), and the phase change structure (22) comprises a phase change material and performs a phase change according to heat generated by the encapsulated device (1). By using the thin-film encapsulation structure comprising the phase change structure (22), the temperature of the encapsulated device (1) does not rise rapidly, thereby effectively eliminating the problem of poor heat dissipation of the thin-film encapsulation structure and improving the service life of the encapsulated device (1).

Description

薄膜封装结构及其制作方法、元器件及其封装方法、显示面板和装置Film packaging structure and manufacturing method thereof, components and packaging method thereof, display panel and device 技术领域Technical field
本申请涉及一种薄膜封装结构及其制作方法、元器件及其封装方法、显示面板和显示装置。The application relates to a thin film packaging structure and a manufacturing method thereof, components and packaging methods thereof, a display panel and a display device.
背景技术Background technique
目前,薄膜封装技术广泛应用于一些柔性器件,如:柔性有机电致发光器件(Organic Light-Emitting Device,OLED)或者柔性有机太阳能电池等。At present, thin film packaging technology is widely used in some flexible devices, such as flexible organic light-emitting devices (OLED) or flexible organic solar cells.
对柔性器件实施薄膜封装之后获得的薄膜封装层具有质量轻、厚度薄、以及可弯折的特性。The thin-film encapsulation layer obtained after thin-film encapsulation of the flexible device has the characteristics of light weight, thin thickness, and bendability.
发明内容Summary of the invention
本申请提供一种薄膜封装结构及其制作方法、元器件及其封装方法、显示面板和显示装置,能够提升薄膜封装层的散热性能。The application provides a thin film packaging structure and a manufacturing method thereof, components and packaging methods thereof, a display panel and a display device, which can improve the heat dissipation performance of the thin film packaging layer.
第一方面,本公开的实施例提供一种薄膜封装结构,包括:有机薄膜层,覆盖在被封装器件上,所述有机薄膜层包括有机基体和分布在所述有机基体内的相变结构,所述相变结构包括相变材料,且根据所述被封装器件产生的热量进行相变。In a first aspect, embodiments of the present disclosure provide a thin film packaging structure, including: an organic thin film layer covering a packaged device, the organic thin film layer including an organic matrix and a phase change structure distributed in the organic matrix, The phase change structure includes a phase change material, and undergoes a phase change according to the heat generated by the packaged device.
可选地,相变结构包括内核结构和外壁结构,外壁结构包覆内核结构,内核结构的材料为固液相变材料。Optionally, the phase change structure includes an inner core structure and an outer wall structure, the outer wall structure covers the inner core structure, and the material of the inner core structure is a solid-liquid phase change material.
可选地,内核结构的熔点低于被封装器件正常工作时的温度。Optionally, the melting point of the core structure is lower than the temperature of the packaged device during normal operation.
可选地,内核结构与外壁结构的溶解性相反。Optionally, the solubility of the inner core structure and the outer wall structure are opposite.
可选地,内核结构的表面张力大于外壁结构的表面张力。Optionally, the surface tension of the inner core structure is greater than the surface tension of the outer wall structure.
可选地,内核结构的材料包括结晶水合盐、共晶水合盐、直链烷烃、石蜡类、脂肪酸类、聚乙二醇类、正十六烷、正十八烷中的一种或多种。Optionally, the material of the core structure includes one or more of crystalline hydrated salt, eutectic hydrated salt, linear alkanes, paraffins, fatty acids, polyethylene glycols, n-hexadecane, and n-octadecane .
可选地,外壁结构的材料包括蜜胺树脂、脲醛树脂、聚丙烯树脂、聚乙烯醇、环氧树脂、明胶、阿拉伯胶、聚苯乙烯、聚甲基丙烯酸甲酯中的一种或多种。Optionally, the material of the outer wall structure includes one or more of melamine resin, urea-formaldehyde resin, polypropylene resin, polyvinyl alcohol, epoxy resin, gelatin, gum arabic, polystyrene, and polymethyl methacrylate .
可选地,有机基体的材料包括环氧树脂。Optionally, the material of the organic matrix includes epoxy resin.
可选地,相变结构的粒径尺寸为10纳米到500纳米。Optionally, the particle size of the phase change structure is 10 nm to 500 nm.
可选地,薄膜封装结构还包括第一无机薄膜层和第二无机薄膜层;Optionally, the film packaging structure further includes a first inorganic film layer and a second inorganic film layer;
第一无机薄膜层覆盖被封装器件,且位于有机薄膜层靠近被封装器件的一侧;The first inorganic film layer covers the packaged device and is located on the side of the organic film layer close to the packaged device;
第二无机薄膜层覆盖被封装器件,且位于有机薄膜层远离被封装器件的一侧。The second inorganic film layer covers the packaged device and is located on the side of the organic film layer away from the packaged device.
可选地,所述第一无机薄膜层和第二无机薄膜层的材料包括Al 2O 3、MgF 2、SiOx中的一种。 Optionally, the material of the first inorganic thin film layer and the second inorganic thin film layer includes one of Al 2 O 3 , MgF 2 , and SiOx.
可选地,所述有机薄膜层的厚度在2000nm-3000nm之间。Optionally, the thickness of the organic thin film layer is between 2000 nm and 3000 nm.
可选地,所述第一无机薄膜层和第二无机薄膜层的厚度在500nm-800nm之间。Optionally, the thickness of the first inorganic thin film layer and the second inorganic thin film layer is between 500 nm and 800 nm.
第二方面,本公开的实施例提供一种元器件,包括第一方面提供的薄膜封装结构以及待封装器件,该待封装器件包覆有所述薄膜封装结构。In a second aspect, the embodiments of the present disclosure provide a component, including the thin film packaging structure provided in the first aspect and a device to be packaged, and the device to be packaged is covered with the thin film packaging structure.
可选地,所述内核结构的熔点低于所述待封装器件正常工作时的温度。Optionally, the melting point of the core structure is lower than the temperature of the device to be packaged during normal operation.
可选地,所述薄膜封装结构还包括第一无机薄膜层和第二无机薄膜层,其中所述第一无机薄膜层覆盖所述待封装器件,且位于所述有机薄膜层靠近所述待封装器件的一侧;所述第二无机薄膜层覆盖所述待封装器件,且位于所述有机薄膜层远离所述待封装器件的一侧。Optionally, the thin film packaging structure further includes a first inorganic thin film layer and a second inorganic thin film layer, wherein the first inorganic thin film layer covers the device to be packaged and is located on the organic thin film layer close to the device to be packaged. One side of the device; the second inorganic film layer covers the device to be packaged, and is located on the side of the organic film layer away from the device to be packaged.
第三方面,本公开的实施例提供一种显示面板,包括第二方面提供的元器件。In a third aspect, an embodiment of the present disclosure provides a display panel including the components provided in the second aspect.
第四方面,本公开的实施例提供一种显示装置,包括第三方面提供的显示面板。In a fourth aspect, an embodiment of the present disclosure provides a display device including the display panel provided in the third aspect.
第五方面,本公开的实施例提供一种薄膜封装结构的制作方法,包括:In a fifth aspect, embodiments of the present disclosure provide a method for manufacturing a thin film packaging structure, including:
将包含相变结构的溶液与有机基体溶液混合,形成有机混合溶液;Mixing the solution containing the phase change structure with the organic matrix solution to form an organic mixed solution;
利用所述有机混合溶液形成有机薄膜层,其中所述有机混合溶液制作在被封装器件上,所述相变结构包括相变材料,且根据所述被封装器件产生的热量进行相变。The organic thin film layer is formed by using the organic mixed solution, wherein the organic mixed solution is fabricated on a packaged device, the phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
可选地,包含相变结构的溶液与有机基体溶液的质量比为5:95到20:80。Optionally, the mass ratio of the solution containing the phase change structure to the organic matrix solution is 5:95 to 20:80.
第六方面,本公开的实施例提供一种元器件的封装方法,包括:将包含相变结构的溶液与有机基体溶液混合,形成有机混合溶液;将所述有机混合溶液制作在被封装器件上,形成有机薄膜层;其中所述相变结构包括相变材料,且根据所述被封装器件产生的热量进行相变。In a sixth aspect, embodiments of the present disclosure provide a method for packaging components, including: mixing a solution containing a phase change structure with an organic matrix solution to form an organic mixed solution; and fabricating the organic mixed solution on the packaged device , Forming an organic thin film layer; wherein the phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
可选地,在所述有机混合溶液制作在被封装器件上,形成有机薄膜层之前,所述封装方法还包括:在所述被封装器件上形成第一无机薄膜层;在在所述有机混合溶液制作在被封装器件上,形成有机薄膜层之后,所述封装方法还包括:在所述有机薄膜层上形成第二无机薄膜层。Optionally, before the organic mixed solution is prepared on the packaged device to form an organic thin film layer, the packaging method further includes: forming a first inorganic thin film layer on the packaged device; After the solution is prepared on the packaged device and the organic thin film layer is formed, the packaging method further includes: forming a second inorganic thin film layer on the organic thin film layer.
可选地,所述包含相变结构的溶液与所述有机基体溶液的质量比为5:95到20:80。Optionally, the mass ratio of the solution containing the phase change structure to the organic matrix solution is 5:95 to 20:80.
附图说明Description of the drawings
本申请上述的和/或附加的方面和优点从下面结合附图对实施例的描述中将变得明显和容易理解,其中:The above and/or additional aspects and advantages of the present application will become obvious and easy to understand from the following description of the embodiments in conjunction with the accompanying drawings, in which:
图1是本申请实施例提供的一种薄膜封装结构的结构示意图;FIG. 1 is a schematic structural diagram of a thin film packaging structure provided by an embodiment of the present application;
图2是本申请实施例提供的另一薄膜封装结构的结构示意图;2 is a schematic structural diagram of another thin-film packaging structure provided by an embodiment of the present application;
图3是本申请实施例提供的一种薄膜封装结构的制作方法流程图。FIG. 3 is a flowchart of a manufacturing method of a thin film packaging structure provided by an embodiment of the present application.
附图标记说明:Description of reference signs:
1-被封装器件;2-有机薄膜层;21-有机基体;22-相变结构;1- encapsulated device; 2- organic film layer; 21- organic matrix; 22- phase change structure;
3-第一无机薄膜层;4-第二无机薄膜层。3-The first inorganic film layer; 4-The second inorganic film layer.
具体实施方式Detailed ways
为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本公开实施例的附图,对本公开实施例的技术方案进行清楚、完整地描述。显然,所描述的实施例是本公开的一部分实施例,而不是全部的实施例。基于所描述的本公开的实施例,本领域普通技术人员在无需创造性劳动的前提下所获得的所有其他实施例,都属于本公开保护的范围。In order to make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present disclosure will be described clearly and completely in conjunction with the accompanying drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative labor are within the protection scope of the present disclosure.
除非另外定义,本公开使用的技术术语或者科学术语应当为本公开所属领域内具有一般技能的人士所理解的通常意义。本公开中使用的“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性,而只是用来区分不同的组成部分。“包括”或者“包含”等类似的词语意指出现该词前面的元件或者物件涵盖出现在该词后面列举的元件或者物件及其等同,而不排除其他元件或者物件。“连接”或者“相连”等类似的词语并非限定于物理的或者机械的连接,而是可以包括电性的连接,不管是直接的还是间接的。“上”、“下”、“左”、“右”等仅用于表示相对位置关系,当被描述对象的绝对位置 改变后,则该相对位置关系也可能相应地改变。Unless otherwise defined, the technical terms or scientific terms used in the present disclosure shall have the usual meanings understood by those with ordinary skills in the field to which this disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity, or importance, but are only used to distinguish different components. "Include" or "include" and other similar words mean that the element or item appearing before the word encompasses the element or item listed after the word and its equivalents, but does not exclude other elements or items. Similar words such as "connected" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "Down", "Left", "Right", etc. are only used to indicate the relative position relationship. When the absolute position of the described object changes, the relative position relationship may also change accordingly.
本技术领域技术人员可以理解,除非另外定义,这里使用的所有术语(包括技术术语和科学术语),具有与本申请所属领域中的普通技术人员的一般理解相同的意义。还应该理解的是,诸如通用字典中定义的那些术语,应该被理解为具有与现有技术的上下文中的意义一致的意义,并且除非像这里一样被特定定义,否则不会用理想化或过于正式的含义来解释。Those skilled in the art can understand that, unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meaning as those commonly understood by those of ordinary skill in the art to which this application belongs. It should also be understood that terms such as those defined in general dictionaries should be understood to have a meaning consistent with the meaning in the context of the prior art, and unless specifically defined as here, they will not be idealized or overly Explain the formal meaning.
一种薄膜封装技术是通过沉积技术在器件表面进行有机薄膜或者无机薄膜交替沉积等形式进行的封装方式,这样形成的薄膜封装层虽然对柔性器件具有较佳的隔绝水氧性能,但散热性较差,进而会影响柔性器件的使用寿命。A thin film packaging technology is a packaging method in which organic thin films or inorganic thin films are alternately deposited on the surface of the device by deposition technology. Although the thin film packaging layer formed in this way has better water and oxygen insulation performance for flexible devices, it has better heat dissipation. Poor, which will affect the service life of the flexible device.
下面结合附图介绍本申请实施例的示例性技术方案。The following describes exemplary technical solutions of the embodiments of the present application in conjunction with the drawings.
如图1所示,本申请实施例提供的一种薄膜封装结构,包括覆盖在被封装器件1上的有机薄膜层2;有机薄膜层2包括有机基体21和分布在有机基体21内的相变结构22,所述相变结构包括相变材料,相变结构22根据被封装器件1产生的热量进行相变。As shown in Figure 1, a thin film packaging structure provided by an embodiment of the present application includes an organic thin film layer 2 covering the packaged device 1; the organic thin film layer 2 includes an organic matrix 21 and phase change distributed in the organic matrix 21 The structure 22, the phase change structure includes a phase change material, and the phase change structure 22 undergoes a phase change according to the heat generated by the packaged device 1.
本申请实施例提供的薄膜封装结构包括有机薄膜层2,有机薄膜层2包括相变结构22,由于相变结构22能够根据被封装器件1产生的热量进行相变,因此相变结构22能够吸收被封装器件1在工作时的散热,吸收的热量用来提供给相变结构22产生相变,不会使被封装器件1本身温度过高;当被封装器件1不再散热,则可以利用相变结构22的相反相变过程释放热量,从而延长了散热时间,不会引起被封装器件1本身温度迅速上升,能够有效解决薄膜封装结构散热性较差的问题,进而提升被封装器件1的使用寿命。The thin film packaging structure provided by the embodiments of the present application includes an organic thin film layer 2, and the organic thin film layer 2 includes a phase change structure 22. Since the phase change structure 22 can undergo a phase change according to the heat generated by the packaged device 1, the phase change structure 22 can absorb The heat dissipation of the packaged device 1 during operation, and the absorbed heat is used to provide the phase change structure 22 to produce a phase change, so that the temperature of the packaged device 1 itself will not be too high; when the packaged device 1 no longer dissipates heat, the phase can be used The reverse phase change process of the variable structure 22 releases heat, thereby prolonging the heat dissipation time, and will not cause the temperature of the packaged device 1 to rise rapidly, which can effectively solve the problem of poor heat dissipation of the thin film package structure, thereby improving the use of the packaged device 1 life.
在一种可选的实施方式中,相变结构22包括内核结构和外壁结构,外壁结构包覆内核结构,内核结构的材料为固液相变材料。例如,相变结构22是一种复合颗粒,无固定形状,当然,在实际选材时,内核结构的材料也可以选择固固相变材料、固气相变材料、液气相变材料等,本申请实施例仅以内核结构的材料为固液相变材料为例说明。In an alternative embodiment, the phase change structure 22 includes an inner core structure and an outer wall structure, the outer wall structure covers the inner core structure, and the material of the inner core structure is a solid-liquid phase change material. For example, the phase change structure 22 is a composite particle with no fixed shape. Of course, in the actual selection of materials, the material of the core structure can also be selected from solid-solid phase change materials, solid-gas phase change materials, liquid-gas phase change materials, etc. The implementation of this application The example only takes the material of the core structure as a solid-liquid phase change material as an example.
例如,当被封装器件1在工作过程中产生散热时,热量会被固液相变材料吸收,固液相变材料吸收热量后会产生从固态变为液体的相变过程,不会使被封装器件1本身温度过高;当被封装器件1停止工作不再散热时,固液相变材料会发生从液态到固态的相变过程,该过程会释放热量,即该过程能够将被封装器件1产生的散热释放到外界环境中,这样,被封装器件1利用 固液相变材料的相变过程延长散热时间,不会引起被封装器件1短时间内温度迅速上升,进而提升被封装器件1的使用寿命。For example, when the packaged device 1 generates heat during operation, the heat will be absorbed by the solid-liquid phase change material, and the solid-liquid phase change material will produce a phase change process from solid to liquid after absorbing the heat, which will not cause the encapsulated The temperature of the device 1 is too high; when the packaged device 1 stops working and no longer dissipates heat, the solid-liquid phase change material will undergo a phase change process from liquid to solid. This process will release heat, that is, the process can transform the packaged device 1 The generated heat is released into the external environment. In this way, the packaged device 1 uses the phase change process of the solid-liquid phase change material to extend the heat dissipation time, and will not cause the packaged device 1 to rise rapidly in a short period of time, thereby improving the packaged device 1 Service life.
本申请实施例中内核结构的熔点低于被封装器件1正常工作时的温度,例如,内核结构的材料为固液相变材料,熔点是固体将其物态由固态转变为液态的温度,由于固液相变材料的熔点低于被封装器件1正常工作时的温度,因此,当被封装器件1在工作过程中产生散热时,热量会被固液相变材料吸收,吸收后产生从固态变为液体的相变过程。The melting point of the core structure in the embodiment of the present application is lower than the temperature of the packaged device 1 during normal operation. For example, the material of the core structure is a solid-liquid phase change material, and the melting point is the temperature at which a solid transforms its physical state from a solid to a liquid. The melting point of the solid-liquid-phase change material is lower than the temperature of the packaged device 1 during normal operation. Therefore, when the packaged device 1 generates heat during operation, the heat will be absorbed by the solid-liquid-phase change material, and the solid-liquid-phase change material will change after absorption. It is the phase change process of liquid.
例如,本申请实施例中内核结构的表面张力大于外壁结构的表面张力,这样,能够有效防止在相变过程中相变结构产生破裂。For example, in the embodiment of the present application, the surface tension of the inner core structure is greater than the surface tension of the outer wall structure, which can effectively prevent the phase change structure from cracking during the phase change process.
本申请实施例要求内核结构与外壁结构不发生反应,例如,本申请实施例中内核结构与外壁结构的溶解性相反,这样,能够保证在相变过程中内核结构与外壁结构不发生反应,保证相变结构的稳定性。The embodiment of this application requires that the inner core structure and the outer wall structure do not react. For example, the solubility of the inner core structure and the outer wall structure in the embodiment of the present application is opposite. In this way, it can be ensured that the inner core structure and the outer wall structure do not react during the phase change process. The stability of the phase change structure.
例如,本申请实施例中内核结构的材料包括结晶水合盐、共晶水合盐、直链烷烃、石蜡类、脂肪酸类、聚乙二醇类、正十六烷、正十八烷中的一种或多种;外壁结构的材料包括蜜胺树脂、脲醛树脂、聚丙烯树脂、聚乙烯醇、环氧树脂、明胶、阿拉伯胶、聚苯乙烯、聚甲基丙烯酸甲酯中的一种或多种;有机基体的材料包括环氧树脂。内核结构、外壁结构以及有机基体的示例性选材将在下面结合示例性实施例进行详细说明。For example, the material of the core structure in the embodiments of the present application includes one of crystalline hydrated salt, eutectic hydrated salt, linear alkanes, paraffins, fatty acids, polyethylene glycols, n-hexadecane, and n-octadecane Or more; the material of the outer wall structure includes one or more of melamine resin, urea-formaldehyde resin, polypropylene resin, polyvinyl alcohol, epoxy resin, gelatin, gum arabic, polystyrene, polymethyl methacrylate ; The material of the organic matrix includes epoxy resin. Exemplary materials for the inner core structure, outer wall structure and organic matrix will be described in detail below in conjunction with exemplary embodiments.
例如,本申请实施例中相变结构的粒径尺寸为10纳米到500纳米,这样,有机薄膜层能够做成纳米级别的膜层,使得薄膜封装结构厚度较薄,更利于实际生产的需要。For example, the particle size of the phase change structure in the embodiment of the present application is 10 nm to 500 nm. In this way, the organic thin film layer can be made into a nano-level film layer, which makes the thickness of the thin film packaging structure thinner, which is more conducive to actual production needs.
在一种可选的实施方式中,如图2所示,本申请实施例提供的薄膜封装结构还包括第一无机薄膜层3和第二无机薄膜层4,第一无机薄膜层3覆盖被封装器件1,且位于有机薄膜层2靠近被封装器件1的一侧;第二无机薄膜层4覆盖被封装器件1,且位于有机薄膜层2远离被封装器件1的一侧;这种薄膜封装结构能够起到很好的阻隔水氧的作用。In an alternative embodiment, as shown in FIG. 2, the thin film packaging structure provided by the embodiment of the present application further includes a first inorganic thin film layer 3 and a second inorganic thin film layer 4, and the first inorganic thin film layer 3 covers and is encapsulated The device 1 is located on the side of the organic thin film layer 2 close to the packaged device 1; the second inorganic thin film layer 4 covers the packaged device 1 and is located on the side of the organic thin film layer 2 away from the packaged device 1; this thin film packaging structure Can play a good role in blocking water and oxygen.
例如,图2中仅示出了两层无机薄膜层和一层有机薄膜层,实际设计时,无机薄膜层和有机薄膜层可以交替的设计多层,即在图2中的第二无机薄膜层4上可以再设置一层有机薄膜层2,在有机薄膜层2上再设置一层无机薄膜层等;当然,在实际设计时,考虑到薄膜封装结构的厚度,以及薄膜封装结构的封装效果,一般将薄膜封装结构设计为图2所示的结构。For example, Figure 2 only shows two inorganic thin film layers and one organic thin film layer. In actual design, the inorganic thin film layer and the organic thin film layer can be alternately designed for multiple layers, that is, the second inorganic thin film layer in Figure 2 4 can be provided with a layer of organic thin film layer 2 and another layer of inorganic thin film layer on the organic thin film layer 2. Of course, in the actual design, the thickness of the thin film packaging structure and the packaging effect of the thin film packaging structure are taken into consideration. Generally, the thin film packaging structure is designed as shown in FIG. 2.
例如,所述第一无机薄膜层和第二无机薄膜层的材料包括Al 2O 3、MgF 2、SiOx中的一种。 For example, the material of the first inorganic thin film layer and the second inorganic thin film layer includes one of Al 2 O 3 , MgF 2 , and SiOx.
例如,所述有机薄膜层的厚度在2000nm-3000nm之间。For example, the thickness of the organic thin film layer is between 2000 nm and 3000 nm.
例如,所述第一无机薄膜层和第二无机薄膜层的厚度在500nm-800nm之间。For example, the thickness of the first inorganic thin film layer and the second inorganic thin film layer is between 500 nm and 800 nm.
下面给出三个示例性实施例,详细说明一下本申请实施例提供的一种薄膜封装结构。Three exemplary embodiments are given below to describe in detail a thin film packaging structure provided by the embodiments of the present application.
实施例一:Example one:
如图2所示,薄膜封装结构包括依次覆盖在被封装器件1上的第一无机薄膜层3、有机薄膜层2和第二无机薄膜层4;该实施例中,第一无机薄膜层3和第二无机薄膜层4的材料为三氧化二铝(Al 2O 3),厚度均为800纳米(nm);有机薄膜层2包括的有机基体的材料为环氧树脂,有机薄膜层2包括的相变结构的外壁结构的材料为聚苯乙烯,相变结构的内核结构的材料为正十八烷,相变结构的粒径尺寸为120nm,有机薄膜层2的厚度为2000nm。 As shown in FIG. 2, the thin film packaging structure includes a first inorganic thin film layer 3, an organic thin film layer 2, and a second inorganic thin film layer 4 sequentially covering the packaged device 1. In this embodiment, the first inorganic thin film layer 3 and The material of the second inorganic film layer 4 is aluminum oxide (Al 2 O 3 ) with a thickness of 800 nanometers (nm); the material of the organic matrix included in the organic film layer 2 is epoxy resin, and the organic film layer 2 includes The material of the outer wall structure of the phase change structure is polystyrene, the material of the core structure of the phase change structure is n-octadecane, the particle size of the phase change structure is 120 nm, and the thickness of the organic thin film layer 2 is 2000 nm.
实施例二:Embodiment two:
如图2所示,薄膜封装结构包括依次覆盖在被封装器件1上的第一无机薄膜层3、有机薄膜层2和第二无机薄膜层4;该实施例中,第一无机薄膜层3和第二无机薄膜层4的材料为氟化镁(MgF 2),厚度均为500nm;有机薄膜层2包括的有机基体的材料为环氧树脂,有机薄膜层2包括的相变结构的外壁结构的材料为聚甲基丙烯酸甲酯,相变结构的内核结构的材料为正十六烷,相变结构的粒径尺寸为150nm,有机薄膜层2的厚度为3000nm。 As shown in FIG. 2, the thin film packaging structure includes a first inorganic thin film layer 3, an organic thin film layer 2, and a second inorganic thin film layer 4 sequentially covering the packaged device 1. In this embodiment, the first inorganic thin film layer 3 and The material of the second inorganic thin film layer 4 is magnesium fluoride (MgF 2 ) with a thickness of 500 nm; the material of the organic matrix included in the organic thin film layer 2 is epoxy resin, and the outer wall structure of the phase change structure included in the organic thin film layer 2 is The material is polymethyl methacrylate, the material of the core structure of the phase change structure is n-hexadecane, the particle size of the phase change structure is 150 nm, and the thickness of the organic thin film layer 2 is 3000 nm.
实施例三:Example three:
如图2所示,薄膜封装结构包括依次覆盖在被封装器件1上的第一无机薄膜层3、有机薄膜层2和第二无机薄膜层4;该实施例中,第一无机薄膜层3和第二无机薄膜层4的材料为氧化硅(SiO x),厚度均为700nm;有机薄膜层2包括的有机基体的材料为环氧树脂,有机薄膜层2包括的相变结构的外壁结构的材料为聚苯乙烯,相变结构的内核结构的材料为石蜡,相变结构的粒径尺寸为200nm,有机薄膜层2的厚度为2500nm。 As shown in FIG. 2, the thin film packaging structure includes a first inorganic thin film layer 3, an organic thin film layer 2, and a second inorganic thin film layer 4 sequentially covering the packaged device 1. In this embodiment, the first inorganic thin film layer 3 and The material of the second inorganic thin film layer 4 is silicon oxide (SiO x ) with a thickness of 700 nm; the organic matrix material included in the organic thin film layer 2 is epoxy resin, and the organic thin film layer 2 includes a phase change structure outer wall structure material It is polystyrene, the material of the core structure of the phase change structure is paraffin, the particle size of the phase change structure is 200 nm, and the thickness of the organic thin film layer 2 is 2500 nm.
基于同一发明构思,本申请实施例还提供了一种元器件,包括本申请实施例提供的上述薄膜封装结构,还包括待封装器件,该待封装器件包覆有所 述薄膜封装结构。Based on the same inventive concept, the embodiments of the present application also provide a component, including the above-mentioned thin-film packaging structure provided by the embodiments of the present application, and further including a device to be packaged, and the device to be packaged is covered with the thin-film packaging structure.
例如,所述内核结构的熔点低于所述待封装器件正常工作时的温度。For example, the melting point of the core structure is lower than the temperature of the device to be packaged during normal operation.
例如,所述薄膜封装结构还包括第一无机薄膜层和第二无机薄膜层,其中所述第一无机薄膜层覆盖所述待封装器件,且位于所述有机薄膜层靠近所述待封装器件的一侧;所述第二无机薄膜层覆盖所述待封装器件,且位于所述有机薄膜层远离所述待封装器件的一侧。For example, the thin film packaging structure further includes a first inorganic thin film layer and a second inorganic thin film layer, wherein the first inorganic thin film layer covers the device to be packaged and is located on the organic thin film layer close to the device to be packaged. One side; the second inorganic film layer covers the device to be packaged, and is located on the side of the organic film layer away from the device to be packaged.
由于元器件包括本申请实施例上述的薄膜封装结构,因此本申请实施例提供的元器件具有与薄膜封装结构相同的有益效果,这里不再赘述。Since the components include the above-mentioned thin-film packaging structure in the embodiments of the present application, the components provided in the embodiments of the present application have the same beneficial effects as the thin-film packaging structure, and will not be repeated here.
基于同一发明构思,本申请实施例还提供了一种显示面板,该显示面板包括本申请实施例提供的上述元器件。由于显示面板包括本申请实施例提供的上述元器件,因此本申请实施例提供的显示面板具有与元器件相同的有益效果,这里不再赘述。Based on the same inventive concept, embodiments of the present application also provide a display panel, which includes the above-mentioned components provided in the embodiments of the present application. Since the display panel includes the above-mentioned components provided in the embodiments of the present application, the display panel provided in the embodiments of the present application has the same beneficial effects as the components, and will not be repeated here.
基于同一发明构思,本申请实施例还提供了一种显示装置,该显示装置包括本申请实施例提供的上述显示面板。由于显示装置包括本申请实施例提供的上述显示面板,因此本申请实施例提供的显示装置具有与显示面板相同的有益效果,这里不再赘述。Based on the same inventive concept, an embodiment of the present application further provides a display device, which includes the above-mentioned display panel provided by the embodiment of the present application. Since the display device includes the above-mentioned display panel provided in the embodiment of the present application, the display device provided in the embodiment of the present application has the same beneficial effects as the display panel, and will not be repeated here.
基于同一发明构思,本申请实施例还提供了一种薄膜封装结构的制作方法,如图3所示,该方法包括:Based on the same inventive concept, an embodiment of the present application also provides a manufacturing method of a thin film packaging structure, as shown in FIG. 3, the method includes:
S301、将包含相变结构的溶液与有机基体溶液混合,形成有机混合溶液;S301, mixing the solution containing the phase change structure with the organic matrix solution to form an organic mixed solution;
S302、利用所述有机混合溶液形成有机薄膜层,其中所述有机混合溶液制作在被封装器件上,S302. Using the organic mixed solution to form an organic thin film layer, wherein the organic mixed solution is fabricated on the packaged device,
其中所述相变结构包括相变材料,且根据所述被封装器件产生的热量进行相变。The phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
本申请实施例可以根据实际需求调整包含相变结构的溶液中,相变结构的尺寸和填充量,以适应不同产品。例如,可以通过调整包含相变结构的溶液与有机基体溶液的质量比为5:95到20:80,以适应不同产品的需求;对于大尺寸的产品,在涂覆有机混合溶液后,形成的有机薄膜层的面积较大,因此,在用于尺寸的产品时,可将包含相变结构的溶液与有机基体溶液的质量比选择的较高。In the embodiments of the present application, the size and filling amount of the phase change structure in the solution containing the phase change structure can be adjusted according to actual needs to adapt to different products. For example, the mass ratio of the solution containing the phase change structure to the organic matrix solution can be adjusted from 5:95 to 20:80 to meet the needs of different products; for large-size products, after coating the organic mixed solution, the resulting The area of the organic thin film layer is relatively large. Therefore, when used for size products, the mass ratio of the solution containing the phase change structure to the organic matrix solution can be selected to be higher.
下面详细说明一下上面描述的实施例一到实施例三的薄膜封装结构的制作方法。The manufacturing method of the thin film packaging structure of the first to third embodiments described above will be described in detail below.
实施例一薄膜封装结构的制作方法: Embodiment 1 Manufacturing method of thin film packaging structure:
首先,在被封装器件1上采用等离子增强化学气相沉积的方法沉积一层厚度为800nm的Al 2O 3First, a layer of Al 2 O 3 with a thickness of 800 nm is deposited on the packaged device 1 by means of plasma enhanced chemical vapor deposition.
然后,制作聚苯乙烯包覆正十八烷的相变结构,并将包含该相变结构的溶液与环氧树脂溶液混合,形成有机混合溶液,例如,包含相变结构的溶液与有机基体溶液的质量比为5:95到20:80;之后将有机混合溶液采用旋涂或喷墨打印的方法制作在Al 2O 3上,形成有机薄膜层2,例如可制作形成厚度为2000nm的有机薄膜层2。 Then, a polystyrene-coated n-octadecane phase change structure is produced, and the solution containing the phase change structure is mixed with the epoxy resin solution to form an organic mixed solution, for example, a solution containing the phase change structure and an organic matrix solution The mass ratio of is 5:95 to 20:80; then the organic mixed solution is made on Al 2 O 3 by spin coating or inkjet printing to form an organic thin film layer 2, for example, an organic thin film with a thickness of 2000 nm can be produced Layer 2.
最后,在有机薄膜层2上采用等离子增强化学气相沉积的方法沉积一层厚度为800nm的Al 2O 3Finally, a layer of Al 2 O 3 with a thickness of 800 nm is deposited on the organic thin film layer 2 using a plasma enhanced chemical vapor deposition method.
实施例二薄膜封装结构的制作方法: Embodiment 2 Method for manufacturing thin film packaging structure:
首先,在被封装器件1上采用等离子增强化学气相沉积的方法沉积一层厚度为500nm的MgF 2First, a layer of MgF 2 with a thickness of 500 nm is deposited on the packaged device 1 using a plasma enhanced chemical vapor deposition method.
然后,制作聚甲基丙烯酸甲酯包覆正十六烷的相变结构,并将包含该相变结构的溶液与环氧树脂溶液混合,形成有机混合溶液,例如,包含相变结构的溶液与有机基体溶液的质量比为5:95到20:80;之后将有机混合溶液采用旋涂或喷墨打印的方法制作在MgF 2上,形成有机薄膜层2,例如可制作形成厚度为3000nm的有机薄膜层2。 Then, the phase change structure of polymethyl methacrylate coated n-hexadecane is made, and the solution containing the phase change structure is mixed with the epoxy resin solution to form an organic mixed solution, for example, the solution containing the phase change structure and The mass ratio of the organic matrix solution is 5:95 to 20:80; then the organic mixed solution is fabricated on the MgF 2 by spin coating or inkjet printing to form the organic thin film layer 2, for example, an organic film with a thickness of 3000 nm can be fabricated.膜层2。 Film layer 2.
最后,在有机薄膜层2上采用等离子增强化学气相沉积的方法沉积一层厚度为500nm的MgF 2Finally, a layer of MgF 2 with a thickness of 500 nm is deposited on the organic thin film layer 2 using a plasma enhanced chemical vapor deposition method.
实施例三薄膜封装结构的制作方法: Embodiment 3 Manufacturing method of thin film packaging structure:
首先,在被封装器件1上采用等离子增强化学气相沉积的方法沉积一层厚度为700nm的SiOx。First, a layer of SiOx with a thickness of 700 nm is deposited on the packaged device 1 using a plasma enhanced chemical vapor deposition method.
然后,制作聚苯乙烯包覆石蜡的相变结构,并将包含该相变结构的溶液与环氧树脂溶液混合,形成有机混合溶液,例如,包含相变结构的溶液与有机基体溶液的质量比为5:95到20:80;之后将有机混合溶液采用旋涂或喷墨打印的方法制作在SiOx上,形成有机薄膜层2,具体可制作形成厚度为2500nm的有机薄膜层2。Then, make the phase change structure of polystyrene coated paraffin wax, and mix the solution containing the phase change structure with the epoxy resin solution to form an organic mixed solution, for example, the mass ratio of the solution containing the phase change structure to the organic matrix solution The range is from 5:95 to 20:80; then the organic mixed solution is fabricated on SiOx by spin coating or inkjet printing to form the organic thin film layer 2, which can be specifically fabricated to form an organic thin film layer 2 with a thickness of 2500 nm.
最后,在有机薄膜层2上采用等离子增强化学气相沉积的方法沉积一层厚度为700nm的SiOx。Finally, a layer of SiOx with a thickness of 700 nm is deposited on the organic thin film layer 2 using a plasma-enhanced chemical vapor deposition method.
本公开的实施例还提供一种元器件的封装方法,包括:将包含相变结 构的溶液与有机基体溶液混合,形成有机混合溶液;将所述有机混合溶液制作在被封装器件上,形成有机薄膜层;所述相变结构包括相变材料,且根据所述被封装器件产生的热量进行相变。The embodiment of the present disclosure also provides a method for packaging components, including: mixing a solution containing a phase change structure with an organic matrix solution to form an organic mixed solution; and fabricating the organic mixed solution on a packaged device to form an organic The film layer; the phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
例如,在所述有机混合溶液制作在被封装器件上,形成有机薄膜层之前,所述封装方法还包括:在所述被封装器件上形成第一无机薄膜层;在在所述有机混合溶液制作在被封装器件上,形成有机薄膜层之后,所述封装方法还包括:在所述有机薄膜层上形成第二无机薄膜层。For example, before the organic mixed solution is prepared on the packaged device to form an organic thin film layer, the packaging method further includes: forming a first inorganic thin film layer on the packaged device; After the organic thin film layer is formed on the packaged device, the packaging method further includes: forming a second inorganic thin film layer on the organic thin film layer.
例如,所述包含相变结构的溶液与所述有机基体溶液的质量比为5:95到20:80。For example, the mass ratio of the solution containing the phase change structure to the organic matrix solution is 5:95 to 20:80.
综上所述,本申请提供的薄膜封装结构,具有如下有益效果:In summary, the film packaging structure provided by this application has the following beneficial effects:
本申请实施例提供的薄膜封装结构包括有机薄膜层,有机薄膜层包括相变结构,由于相变结构能够根据被封装器件产生的热量进行相变,因此相变结构能够吸收被封装器件在工作时的散热,吸收的热量用来提供给相变结构产生相变,不会使被封装器件本身温度过高;当被封装器件不再散热,则可以利用相变结构的相变过程释放热量,从而延长了散热时间,不会引起被封装器件本身温度迅速上升,能够有效解决现有技术薄膜封装结构散热性较差的问题,进而提升被封装器件的使用寿命。The thin film packaging structure provided by the embodiments of the present application includes an organic thin film layer, and the organic thin film layer includes a phase change structure. Since the phase change structure can undergo phase change according to the heat generated by the packaged device, the phase change structure can absorb the encapsulated device during operation. Heat dissipation, the absorbed heat is used to provide phase change to the phase change structure, and will not cause the packaged device itself to become too hot; when the packaged device no longer dissipates heat, the phase change process of the phase change structure can be used to release heat, thereby The heat dissipation time is prolonged, and the temperature of the packaged device itself is not caused to rise rapidly, which can effectively solve the problem of poor heat dissipation of the thin film package structure in the prior art, thereby increasing the service life of the packaged device.
以上所述仅是本申请的部分实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本申请原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本申请的保护范围。The above are only part of the implementation of this application. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of this application, several improvements and modifications can be made, and these improvements and modifications are also Should be regarded as the scope of protection of this application.
本申请要求于2019年6月25日提交的中国专利申请第201910555402.0的优先权,该中国专利申请的全文通过引用的方式结合于此以作为本申请的一部分。This application claims the priority of Chinese patent application No. 201910555402.0 filed on June 25, 2019, and the full text of the Chinese patent application is incorporated herein by reference as a part of this application.

Claims (23)

  1. 一种薄膜封装结构,包括:A thin film packaging structure, including:
    有机薄膜层,覆盖在被封装器件上,Organic film layer, covering the packaged device,
    其中所述有机薄膜层包括有机基体和分布在所述有机基体内的相变结构,所述相变结构包括相变材料,且根据所述被封装器件产生的热量进行相变。The organic thin film layer includes an organic matrix and a phase change structure distributed in the organic matrix. The phase change structure includes a phase change material and undergoes a phase change according to the heat generated by the packaged device.
  2. 根据权利要求1所述的薄膜封装结构,其中所述相变结构包括内核结构和外壁结构,所述外壁结构包覆所述内核结构,所述内核结构的材料为固液相变材料。The thin film packaging structure according to claim 1, wherein the phase change structure comprises an inner core structure and an outer wall structure, the outer wall structure encapsulates the inner core structure, and a material of the inner core structure is a solid-liquid phase change material.
  3. 根据权利要求2所述的薄膜封装结构,其中所述内核结构的熔点低于所述被封装器件正常工作时的温度。4. The thin film packaging structure of claim 2, wherein the melting point of the core structure is lower than the temperature of the packaged device during normal operation.
  4. 根据权利要求2所述的薄膜封装结构,其中所述内核结构与所述外壁结构的溶解性相反。4. The thin film packaging structure of claim 2, wherein the core structure and the outer wall structure have opposite solubility.
  5. 根据权利要求2所述的薄膜封装结构,其中所述内核结构的表面张力大于所述外壁结构的表面张力。3. The film packaging structure of claim 2, wherein the surface tension of the core structure is greater than the surface tension of the outer wall structure.
  6. 根据权利要求2-5中任一项所述的薄膜封装结构,其中所述内核结构的材料包括结晶水合盐、共晶水合盐、直链烷烃、石蜡类、脂肪酸类、聚乙二醇类、正十六烷、正十八烷中的一种或多种。The film packaging structure according to any one of claims 2-5, wherein the material of the core structure includes crystalline hydrated salt, eutectic hydrated salt, linear alkanes, paraffins, fatty acids, polyethylene glycols, One or more of n-hexadecane and n-octadecane.
  7. 根据权利要求2-5中任一项所述的薄膜封装结构,其中所述外壁结构的材料包括蜜胺树脂、脲醛树脂、聚丙烯树脂、聚乙烯醇、环氧树脂、明胶、阿拉伯胶、聚苯乙烯、聚甲基丙烯酸甲酯中的一种或多种。The film packaging structure according to any one of claims 2-5, wherein the material of the outer wall structure comprises melamine resin, urea resin, polypropylene resin, polyvinyl alcohol, epoxy resin, gelatin, gum arabic, poly One or more of styrene and polymethyl methacrylate.
  8. 根据权利要求1所述的薄膜封装结构,其中所述有机基体的材料包括环氧树脂。The thin film packaging structure according to claim 1, wherein the material of the organic matrix includes epoxy resin.
  9. 根据权利要求1所述的薄膜封装结构,其中所述相变结构的粒径尺寸为10纳米到500纳米。The thin film packaging structure according to claim 1, wherein the particle size of the phase change structure is 10 nm to 500 nm.
  10. 根据权利要求1-5、8-9中任一项所述的薄膜封装结构,还包括第一无机薄膜层和第二无机薄膜层;The thin film packaging structure according to any one of claims 1-5 and 8-9, further comprising a first inorganic thin film layer and a second inorganic thin film layer;
    所述第一无机薄膜层覆盖所述被封装器件,且位于所述有机薄膜层靠近所述被封装器件的一侧;The first inorganic thin film layer covers the packaged device and is located on the side of the organic thin film layer close to the packaged device;
    所述第二无机薄膜层覆盖所述被封装器件,且位于所述有机薄膜层远离所述被封装器件的一侧。The second inorganic thin film layer covers the packaged device and is located on the side of the organic thin film layer away from the packaged device.
  11. 根据权利要求10所述的薄膜封装结构,其中所述第一无机薄膜层和第二无机薄膜层的材料包括Al 2O 3、MgF 2、SiOx中的一种。 10. The thin film packaging structure according to claim 10, wherein the material of the first inorganic thin film layer and the second inorganic thin film layer includes one of Al 2 O 3 , MgF 2 , and SiOx.
  12. 根据权利要求1-11中任一项所述的薄膜封装结构,其中所述有机薄膜层的厚度在2000nm-3000nm之间。The thin film packaging structure according to any one of claims 1-11, wherein the thickness of the organic thin film layer is between 2000 nm and 3000 nm.
  13. 根据权利要求11所述的薄膜封装结构,其中所述第一无机薄膜层和第二无机薄膜层的厚度在500nm-800nm之间。11. The thin film packaging structure according to claim 11, wherein the thickness of the first inorganic thin film layer and the second inorganic thin film layer is between 500 nm and 800 nm.
  14. 一种元器件,包括:A component including:
    如权利要求1-13中任一项所述的薄膜封装结构;5. The film packaging structure according to any one of claims 1-13;
    待封装器件,包覆有所述薄膜封装结构。The device to be packaged is covered with the film package structure.
  15. 根据权利要求14所述的元器件,其中所述内核结构的熔点低于所述待封装器件正常工作时的温度。The component according to claim 14, wherein the melting point of the core structure is lower than the temperature of the device to be packaged during normal operation.
  16. 根据权利要求14或15所述的元器件,其中所述薄膜封装结构还包括第一无机薄膜层和第二无机薄膜层,The component according to claim 14 or 15, wherein the film packaging structure further comprises a first inorganic film layer and a second inorganic film layer,
    其中所述第一无机薄膜层覆盖所述待封装器件,且位于所述有机薄膜层靠近所述待封装器件的一侧;The first inorganic film layer covers the device to be packaged and is located on the side of the organic film layer close to the device to be packaged;
    所述第二无机薄膜层覆盖所述待封装器件,且位于所述有机薄膜层远离所述待封装器件的一侧。The second inorganic thin film layer covers the device to be packaged and is located on the side of the organic thin film layer away from the device to be packaged.
  17. 一种显示面板,包括权利要求14-16中任一项所述的元器件。A display panel comprising the components according to any one of claims 14-16.
  18. 一种显示装置,包括权利要求17所述的显示面板。A display device, comprising the display panel of claim 17.
  19. 一种薄膜封装结构的制作方法,包括:A manufacturing method of a thin film packaging structure includes:
    将包含相变结构的溶液与有机基体溶液混合,形成有机混合溶液;Mixing the solution containing the phase change structure with the organic matrix solution to form an organic mixed solution;
    利用所述有机混合溶液形成有机薄膜层,其中所述有机混合溶液制作在被封装器件上;Using the organic mixed solution to form an organic thin film layer, wherein the organic mixed solution is fabricated on the packaged device;
    其中所述相变结构包括相变材料,且根据所述被封装器件产生的热量进行相变。The phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
  20. 根据权利要求19所述的制作方法,其中所述包含相变结构的溶液与所述有机基体溶液的质量比为5:95到20:80。The manufacturing method according to claim 19, wherein the mass ratio of the solution containing the phase change structure to the organic matrix solution is 5:95 to 20:80.
  21. 一种元器件的封装方法,包括:A method for packaging components, including:
    将包含相变结构的溶液与有机基体溶液混合,形成有机混合溶液;Mixing the solution containing the phase change structure with the organic matrix solution to form an organic mixed solution;
    将所述有机混合溶液制作在被封装器件上,形成有机薄膜层;Fabricating the organic mixed solution on the packaged device to form an organic thin film layer;
    其中所述相变结构包括相变材料,且根据所述被封装器件产生的热量进行相变。The phase change structure includes a phase change material, and the phase change is performed according to the heat generated by the packaged device.
  22. 根据权利要求21所述的封装方法,在所述有机混合溶液制作在被封装器件上,形成有机薄膜层之前,还包括:22. The packaging method of claim 21, before the organic mixed solution is fabricated on the packaged device to form an organic thin film layer, further comprising:
    在所述被封装器件上形成第一无机薄膜层;Forming a first inorganic thin film layer on the packaged device;
    在在所述有机混合溶液制作在被封装器件上,形成有机薄膜层之后,所述封装方法还包括:After the organic mixed solution is fabricated on the packaged device to form an organic thin film layer, the packaging method further includes:
    在所述有机薄膜层上形成第二无机薄膜层。A second inorganic thin film layer is formed on the organic thin film layer.
  23. 根据权利要求21所述的封装方法,其中所述包含相变结构的溶液与所述有机基体溶液的质量比为5:95到20:80。22. The packaging method according to claim 21, wherein the mass ratio of the solution containing the phase change structure to the organic matrix solution is 5:95 to 20:80.
PCT/CN2020/084611 2019-06-25 2020-04-14 Thin-film encapsulation structure and manufacturing method therefor, component and encapsulation method therefor, and display panel and apparatus WO2020259004A1 (en)

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