WO2020258484A1

WO2020258484A1 - Array substrate and preparation method therefor

Info

Publication number: WO2020258484A1
Application number: PCT/CN2019/102516
Authority: WO
Inventors: 聂诚磊
Original assignee: 深圳市华星光电半导体显示技术有限公司
Priority date: 2019-06-24
Filing date: 2019-08-26
Publication date: 2020-12-30
Also published as: CN110212008B; CN110212008A

Abstract

The present application provides an array substrate, comprising: a plurality of pixel units; an organic photoresist layer covering the pixel units; a plurality of electrode layers disposed on the organic photoresist layer and spaced apart from each other; a columnar layer disposed on the organic photoresist layer and located between adjacent ones of the electrode layers, wherein the columnar layer and the electrode layers have different film thicknesses and heights; and an organic light-emitting device layer disposed on the columnar layer and the electrode layers, wherein the organic light-emitting device layer on the columnar layer is separated from the organic light-emitting device layer on the electrode layers.

Description

Array substrate and preparation method thereof

Technical field

This application relates to the field of display technology, in particular to an array substrate and a preparation method thereof.

Background technique

Current organic light emitting diode (Organic Light Emitting Diode, OLED for short) displays are classified into red, green and blue (RGB) evaporation, white light OLED, and ink jet printing (IJP) technologies according to the coating method of the OLED display.

Among them, the white light OLED display has the advantages of lower cost and less manufacturing difficulty. However, it still has some problems, that is, when a sub-pixel is lit, due to the existence of the OLED lateral leakage current, charge crosstalk (crosstalk) is formed. phenomenon.

In summary, the prior art display panel has the phenomenon of charge crosstalk.

technical problem

The present application provides an array substrate and a preparation method thereof to solve the problem of charge crosstalk in a display panel.

Technical solutions

In order to solve the above-mentioned problem, an embodiment of the present application provides an array substrate, which includes:

Multiple pixel units;

The organic photoresist layer covers the pixel unit;

A plurality of electrode layers are arranged on the organic photoresist layer and arranged at intervals;

The columnar layer is arranged on the organic photoresist layer and is located between the adjacent electrode layers, the columnar layer and the electrode layer have different film thicknesses, and the longitudinal cross-sectional shape of the columnar layer includes an inverted trapezoid or a rectangle ；

The organic light emitting device layer is arranged on the columnar layer and the electrode layer, and the organic light emitting device layer on the columnar layer and the organic light emitting device layer on the electrode layer are in a fractured state;

A cathode layer, the cathode layer is disposed on the organic light emitting device layer, and the cathode layer on the columnar layer and the cathode layer on the electrode layer are in a broken state.

Wherein, the longitudinal cross-sectional shape of the cathode layer includes any one of a regular trapezoid, a triangle, or a rectangle.

Wherein, along the longitudinal section direction of the array substrate, the width of the electrode layer is greater than the width of the organic light emitting device layer on the electrode layer, and the width of the organic light emitting device layer is greater than that of the cathode layer on the organic light emitting device layer. width.

Wherein, the height of the columnar layer is greater than the height of the electrode layer, or the height of the columnar layer is greater than the total height of the electrode layer, the organic light emitting device layer and the cathode layer.

Wherein, the material of the columnar layer includes one or more combinations of lithium oxide, copper phthalocyanide, and manganese oxide; the material of the electrode layer includes graphene or indium tin oxide.

Wherein, the organic photoresist layer includes a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer which are stacked in sequence.

Multiple pixel units;

The organic photoresist layer covers the pixel unit;

A columnar layer disposed on the organic photoresist layer and located between the adjacent electrode layers, the columnar layer and the electrode layer have different film thicknesses;

The organic light emitting device layer is arranged on the columnar layer and the electrode layer, and the organic light emitting device layer on the columnar layer and the organic light emitting device layer on the electrode layer are in a broken state.

Wherein, the longitudinal cross-sectional shape of the columnar layer includes an inverted trapezoid or a rectangle.

Wherein, the array substrate further includes a cathode layer, the cathode layer is disposed on the organic light emitting device layer, and the cathode layer on the columnar layer and the cathode layer on the electrode layer are in a broken state.

The present application also provides a method for manufacturing an array substrate, the method including:

Forming multiple pixel units;

Forming an organic photoresist layer on the plurality of thin film transistors;

A plurality of electrode layers arranged at intervals are vapor-deposited on the organic photoresist layer;

A columnar layer is vapor-deposited on the organic photoresist layer, the columnar layer is located between adjacent electrode layers, and the columnar layer and the electrode layer have different film thicknesses;

An organic light emitting device layer is vapor-deposited on the organic photoresist layer and the electrode layer, and the organic light emitting device layer on the columnar layer and the organic light emitting device layer on the electrode layer are in a broken state.

Wherein, after the organic light-emitting device layer is vapor-deposited on the organic photoresist layer and the electrode layer, the preparation method further includes:

A cathode layer is evaporated on the organic light emitting device layer, and the evaporation angle of the cathode layer is larger than the evaporation angle of the electrode layer and smaller than the evaporation angle of the organic light emitting device layer.

Beneficial effect

The beneficial effect of the present application is that by disposing a columnar layer above the organic photoresist layer, the organic photoresist layer and the electrode layer above the electrode layer are broken, thereby reducing the lateral propagation path of the array substrate and reducing the phenomenon of charge crosstalk.

Description of the drawings

In order to explain the embodiments or the technical solutions in the prior art more clearly, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are merely inventions For some embodiments, those of ordinary skill in the art can obtain other drawings based on these drawings without creative work.

FIG. 1 is a schematic top view of an array substrate provided by an embodiment of the application.

FIG. 2 is a schematic cross-sectional view of an array substrate provided by an embodiment of the application.

3 is a schematic longitudinal cross-sectional view of an array substrate provided by an embodiment of the application.

FIG. 4 is a flowchart of a method of an array substrate provided by an embodiment of the application.

FIG. 5 is a schematic diagram of the vapor deposition angle of the array substrate provided by the embodiment of the application.

Embodiments of the invention

The embodiments of the present invention provide an array substrate, a liquid crystal display panel, and a display device, which are used to improve or eliminate the influence of feedthrough voltage, thereby improving the flicker problem of the display screen and improving the display quality of the liquid crystal display panel.

The description of the following embodiments refers to the attached drawings to illustrate specific embodiments that can be implemented in this application. The directional terms mentioned in this application, such as [Up], [Down], [Front], [Back], [Left], [Right], [Inner], [Outer], [Side], etc., are for reference only The direction of the additional schema. Therefore, the directional terms used are used to illustrate and understand the application, rather than to limit the application. In the figure, units with similar structures are indicated by the same reference numerals.

It should be noted that the thickness and shape of each layer in the drawings of the present invention do not reflect the true ratio, and the purpose is only to schematically illustrate the content of the embodiments of the present application.

Please refer to FIG. 1, which is a schematic top view of an array substrate provided by an embodiment of the application. In FIG. 1, the pixel includes a plurality of pixel units 101, and the pixel unit 101 may be a pixel unit of any color of red/green/blue/white. In FIG. 1, the pixel unit 101 includes a red color. Pixel unit 1011, green pixel unit 1012, blue pixel unit 1013, and white pixel unit 1014. The pixel units 101 of the four colors cooperate with each other, so that the display panel including the array substrate presents a color image. The pixel unit 101 is placed on the organic photoresist layer 102 of the array substrate, and one side of the organic photoresist layer 102 is provided with a columnar layer 104. The height of the columnar layer 104 is much higher than the height of the pixel unit 101, thereby reducing the lateral propagation path of the cathode layer (not shown in the figure) in the array substrate, thereby reducing the phenomenon of charge crosstalk.

In Figure 1, A-A' represents the cross-cut line of the array substrate, B-B' represents the cross-cut line of the array substrate, the following is a cross-sectional view formed by cutting along A-A' and along B-B' Cut to form a longitudinal section for specific analysis.

Please refer to FIG. 2, which is a cross section of an array substrate provided by an embodiment of the application. The array substrate includes: a plurality of pixel units 101;

The organic photoresist layer 102 covers the pixel unit 101;

A plurality of electrode layers 103 are arranged on the organic photoresist layer 102 and arranged at intervals;

The columnar layer 104 is disposed on the organic photoresist layer 102 and is located between the adjacent electrode layers 103, and the columnar layer 104 and the electrode layer 103 have different film thicknesses;

The organic light emitting device layer 105 is disposed on the columnar layer 104 and the electrode layer 103, and the organic light emitting device layer 105 on the columnar layer 105 and the organic light emitting device layer 105 on the electrode layer 103 are broken status.

The material of the columnar layer 104 includes one or more combinations of lithium oxide (Li2O), copper phthalocyanide (CuPc), and manganese oxide (OMOx); the material of the electrode layer 103 includes graphene or indium tin oxide ( Indium tin oxide, ITO).

Further, the longitudinal cross-sectional shape of the columnar layer 104 includes an inverted trapezoid or a rectangle. In this embodiment, the shape of the columnar layer 104 is approximately an inverted trapezoid. Taking FIG. 2 as an example, the two sides of the lower end of the columnar layer 104 are embedded between the organic photoresist layer 102 and the electrode layer 103, making the columnar The layer 104 and the electrode layer 103 have a partial overlap area to ensure that when the array substrate lights up a single pixel unit, current will pass from the columnar layer 104 to another pixel unit. In addition, the inverted trapezoidal shape of the columnar layer 104 increases the distance between the two electrode layers 103, thereby improving the light leakage phenomenon caused by the excessively large gap between the two electrode layers 103 to a certain extent.

In addition, the array substrate also includes a cathode layer 106, the cathode layer 106 is disposed on the organic light emitting device layer 105, the cathode layer 106 on the columnar layer 104 and the electrode layer 103 The cathode layer 106 is in a broken state.

Further, the material of the cathode layer 106 may be the same as the material of the electrode layer 103, and the material of the cathode layer 106 includes graphene or indium tin oxide (Indium tin oxide). tin oxide, ITO).

It should be pointed out that the longitudinal cross-sectional shape of the columnar layer 104 described above includes an inverted trapezoid or a rectangle. To enable the columnar layer 104 to be embedded in the array substrate, the longitudinal cross-sectional shape of the cathode layer 106 includes a regular trapezoid, a triangle, or Any of the rectangles. In this embodiment, the cathode layer 106 includes the cathode layer above the columnar layer 104 or includes the cathode layer 104 above the electrode layer 103. For example, when the shape of the cathode layer 106 is a regular trapezoid and the shape of the columnar layer 104 is an inverted trapezoid, the slope of the slit formed between the columnar layer 104 and the cathode layer is parallel, because the slit is small. , Thereby improving the light leakage phenomenon of the array substrate.

Further, in the embodiments of the present application, especially in the process flow of the array substrate, to prevent short circuit between the cathode layer 106 and the electrode layer 103 in the array substrate, it is necessary to adjust when the cathode layer 106 and the electrode layer 103 are evaporated. The vapor deposition angle of the two layers. That is, along the longitudinal section direction of the array substrate, the width of the electrode layer 103 is greater than the width of the organic light emitting device layer 105 on the electrode layer 103, and the width of the organic light emitting device layer 105 is greater than that of the organic light emitting device layer 105 The width of the upper cathode layer 106. This structure makes the electrode layer 103, the organic light-emitting device layer 102 and the cathode layer 106 on the pixel unit form a slope similar to "mountain", so that the electrode layer 103 at the lower end of the slope is in contact with the columnar layer 104 while the The cathode layer 106 does not contact the columnar layer 104 and the organic light emitting device 105 above the columnar layer 104 and the cathode layer 106, thereby preventing a short circuit between the cathode layer 106 and the electrode layer 103, and intercepting the organic light emitting device layer in the array substrate. The transverse current propagation path between 105 can effectively reduce the phenomenon of charge crosstalk.

Further, the height of the columnar layer 104 is greater than the height of the electrode layer 103, or the height of the columnar layer 104 is greater than the height of the electrode layer 104, the organic light emitting device layer 105, and the cathode layer 106 sum.

For example, when the height of the columnar layer 104 is greater than the height of the electrode layer 103, the cathode layer 106 on the columnar layer 104 and the cathode layer 106 on the electrode layer 103 are not on the same horizontal plane, thereby blocking the array substrate. The lateral current propagation path between the organic light emitting device layers 105. For example, when the height of the columnar layer 104 is greater than the sum of the heights of the electrode layer 104, the organic light-emitting device layer 105 and the cathode layer 106, that is, in FIG. 2, the cathode layer 106 above the columnar layer 104 The cathode layer 106, which is much higher than the electrode layer 103, cuts off the lateral current propagation path between the organic light emitting device layers 105 in the array substrate and reduces the phenomenon of charge crosstalk.

In some embodiments, the material of the organic photoresist layer 102 may specifically include a hole injection layer (Hole Inject Layer, HIL), Hole Transport Layer (HTL), Organic Emitting Material Layer (EML), Electron Transport Layer (Electron Transport Layer, EHL) and electron injection layer (Electron Inject Layer, EIL).

Please refer to FIG. 3, which is a schematic longitudinal cross-sectional view of an array substrate provided by an embodiment of the application. The array substrate includes: a plurality of pixel units 101;

The organic photoresist layer 102 covers the pixel unit 101;

A plurality of electrode layers 103 are arranged on the organic photoresist layer 102 and arranged at intervals. In FIG. 3, the number of electrode layers 103 is one;

The organic light emitting device layer 105 is disposed on the electrode layer 103.

The cathode layer 106 is disposed on the organic light emitting device layer 105.

It should be pointed out that the columnar layer 104 is not shown in the figure, which is disposed on the organic photoresist layer 102 and is located between the adjacent electrode layers 103. The columnar layer 104 and the electrode layer 103 have different films. Thick height, as can be seen from Fig. 1, cutting along BB', the columnar layer 104 does not appear in the longitudinal section, and the columnar layer is placed in front or behind the longitudinal section.

Further, in FIG. 3, the electrode layer 103 serves as the anode in the array substrate, and the cathode layer 106 serves as the cathode in the array substrate. The organic light emitting device layer 105 is disposed between the electrode layer 103 and the cathode layer 106. In the manufacturing process of the array substrate, due to the low process temperature of the organic light-emitting device, the anode material is generally indium tin oxide (ITO). When the array substrate is under the action of an electric field, the electrons and holes of the organic light-emitting device layer 105 are injected from the cathode layer 106 and the electrode layer 103 into the organic photoresist layer 102 next to the electrode layer 103. Carrier injection is the passage of carriers The process of entering the electrode layer 103/organic light emitting device 106 interface from the electrode layer 103 to the organic light emitting device layer 105. This process has a direct impact on the turn-on voltage, luminous efficiency, and working efficiency of the organic light-emitting device layer 105, which converts electrical energy into light energy, thereby causing the array substrate to emit light.

It can be seen from FIG. 3 that the columnar layer 104 is added to the array substrate, and the vertical current in the array substrate still works normally, which solves the charge crosstalk phenomenon of the lateral current without changing the height of the array substrate.

The present application also provides a method for manufacturing an array substrate, please refer to FIG. 4, the manufacturing method includes:

S10, forming a plurality of pixel units;

S20, forming an organic photoresist layer on the plurality of thin film transistors;

S30, evaporating a plurality of electrode layers arranged at intervals on the organic photoresist layer;

S40. A columnar layer is vapor-deposited on the organic photoresist layer, the columnar layer is located between the adjacent electrode layers, and the columnar layer and the electrode layer have different film thicknesses;

S50. Evaporate an organic light emitting device layer on the organic photoresist layer and the electrode layer, and the organic light emitting device layer on the columnar layer and the organic light emitting device layer on the electrode layer are in a fractured state .

Further, after step S50, it further includes:

Please refer to Fig. 5 for a schematic diagram of the evaporation angle. In Fig. 5, the α angle is the evaporation angle of the organic light-emitting device layer, and the β angle is the evaporation angle of the cathode layer; the α angle must be greater than the β angle; this process The process in FIG. 2 is: along the longitudinal section of the array substrate, the width of the electrode layer 103 is greater than the width of the organic light-emitting device layer 105 on the electrode layer 103, and the width of the organic light-emitting device layer 105 is greater than that of the The width of the cathode layer 106 on the organic light emitting device layer 105.

In some embodiments, the material of the columnar layer includes one or more combinations of lithium oxide (Li2O), copper phthalocyanide (CuPc), and manganese oxide (OMOx); the material of the electrode layer 103 includes graphene or Indium tin oxide (ITO); the material of the cathode layer includes graphene or indium tin oxide (Indium tin oxide) tin oxide, ITO); the material of the organic photoresist layer may specifically include a hole injection layer (Hole Inject Layer, HIL), Hole Transport Layer (Hole Transport Layer, HTL), organic light emitting layer (Emitting Material Layer, EML), electron transport layer (Electron Transport Layer, EHL) and electron injection layer (Electron Inject Layer, EIL).

Based on the same application concept, an embodiment of the present application also provides a display panel, including the array substrate provided by any embodiment of the present invention.

Based on the same application concept, an embodiment of the present application provides a display device, including: the liquid crystal display panel provided by any embodiment of the present invention. The display device can be any product or component with a display function, such as a mobile phone, a tablet computer, a television, a monitor, a notebook computer, a digital photo frame, a navigator, etc.

The beneficial effect is that by disposing a columnar layer above the organic photoresist layer, the organic photoresist layer and the electrode layer above the electrode layer are broken, thereby reducing the lateral propagation path of the array substrate and reducing the phenomenon of charge crosstalk.

In addition to the foregoing implementation exceptions, this application may also have other implementation manners. All technical solutions formed by equivalent replacements or equivalent replacements fall within the protection scope claimed by this application.

In summary, although the preferred embodiments of this application have been disclosed as above, the preferred embodiments described above are not intended to limit the application. Those of ordinary skill in the art can make various decisions without departing from the spirit and scope of the application. Such changes and modifications, so the protection scope of this application is subject to the scope defined by the claims.

Claims

An array substrate, which includes:

Multiple pixel units;

The organic photoresist layer covers the pixel unit;

A plurality of electrode layers are arranged on the organic photoresist layer and arranged at intervals;

The columnar layer is arranged on the organic photoresist layer and is located between the adjacent electrode layers, the columnar layer and the electrode layer have different film thicknesses, and the longitudinal cross-sectional shape of the columnar layer includes an inverted trapezoid or a rectangle ；

The organic light emitting device layer is arranged on the columnar layer and the electrode layer, and the organic light emitting device layer on the columnar layer and the organic light emitting device layer on the electrode layer are in a fractured state;

A cathode layer, the cathode layer is disposed on the organic light emitting device layer, and the cathode layer on the columnar layer and the cathode layer on the electrode layer are in a broken state.
The array substrate according to claim 1, wherein the longitudinal cross-sectional shape of the cathode layer includes any one of a regular trapezoid, a triangle, or a rectangle.
The array substrate according to claim 1, wherein, along the longitudinal section of the array substrate, the width of the electrode layer is greater than the width of the organic light emitting device layer on the electrode layer, and the width of the organic light emitting device layer is greater than the width of the organic light emitting device layer. The width of the cathode layer on the organic light emitting device layer.
The array substrate according to claim 1, wherein the height of the columnar layer is greater than the height of the electrode layer, or the height of the columnar layer is greater than the electrode layer, the organic light emitting device layer and the cathode The total height of the layer.
The array substrate according to claim 1, wherein the material of the columnar layer includes one or more combinations of lithium oxide, copper phthalocyanide, and manganese oxide; and the material of the electrode layer includes graphene or indium tin oxide .
8. The array substrate according to claim 1, wherein the organic photoresist layer comprises a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer which are sequentially stacked.
An array substrate, which includes:

Multiple pixel units;

The organic photoresist layer covers the pixel unit;

A plurality of electrode layers are arranged on the organic photoresist layer and arranged at intervals;

A columnar layer disposed on the organic photoresist layer and located between the adjacent electrode layers, the columnar layer and the electrode layer have different film thicknesses;

The organic light emitting device layer is arranged on the columnar layer and the electrode layer, and the organic light emitting device layer on the columnar layer and the organic light emitting device layer on the electrode layer are in a broken state.
8. The array substrate according to claim 7, wherein the longitudinal cross-sectional shape of the columnar layer comprises an inverted trapezoid or a rectangle.
8. The array substrate according to claim 7, wherein the array substrate further comprises a cathode layer disposed on the organic light emitting device layer, and the cathode layer and the electrode layer on the columnar layer The upper cathode layer is in a broken state.
9. The array substrate according to claim 9, wherein the longitudinal cross-sectional shape of the cathode layer includes any one of a regular trapezoid, a triangle, or a rectangle.
9. The array substrate according to claim 9, wherein, along the longitudinal section direction of the array substrate, the width of the electrode layer is greater than the width of the organic light emitting device layer on the electrode layer, and the width of the organic light emitting device layer is greater than the width of the organic light emitting device layer. The width of the cathode layer on the organic light emitting device layer.
The array substrate according to claim 9, wherein the height of the columnar layer is greater than the height of the electrode layer, or the height of the columnar layer is greater than the electrode layer, the organic light emitting device layer and the cathode The total height of the layer.
8. The array substrate according to claim 7, wherein the material of the columnar layer includes one or more combinations of lithium oxide, copper phthalocyanide, and manganese oxide; and the material of the electrode layer includes graphene or indium tin oxide .
8. The array substrate according to claim 7, wherein the organic photoresist layer comprises a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer which are sequentially stacked.
A preparation method of an array substrate includes:

Forming multiple pixel units;

Forming an organic photoresist layer on the plurality of thin film transistors;

A plurality of electrode layers arranged at intervals are vapor-deposited on the organic photoresist layer;

A columnar layer is vapor-deposited on the organic photoresist layer, the columnar layer is located between adjacent electrode layers, and the columnar layer and the electrode layer have different film thicknesses;

An organic light emitting device layer is vapor-deposited on the organic photoresist layer and the electrode layer, and the organic light emitting device layer on the columnar layer and the organic light emitting device layer on the electrode layer are in a broken state.
15. The manufacturing method of the array substrate according to claim 15, wherein after the organic light-emitting device layer is evaporated on the organic photoresist layer and the electrode layer, the manufacturing method further comprises:

A cathode layer is evaporated on the organic light emitting device layer, and the evaporation angle of the cathode layer is larger than the evaporation angle of the electrode layer and smaller than the evaporation angle of the organic light emitting device layer.