WO2020248881A1 - 微流控基板、微流控芯片及微全分析系统 - Google Patents

微流控基板、微流控芯片及微全分析系统 Download PDF

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WO2020248881A1
WO2020248881A1 PCT/CN2020/094124 CN2020094124W WO2020248881A1 WO 2020248881 A1 WO2020248881 A1 WO 2020248881A1 CN 2020094124 W CN2020094124 W CN 2020094124W WO 2020248881 A1 WO2020248881 A1 WO 2020248881A1
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microfluidic
electrode
substrate
microfluidic substrate
layer
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PCT/CN2020/094124
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English (en)
French (fr)
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刘清召
董水浪
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京东方科技集团股份有限公司
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Priority to US17/256,077 priority Critical patent/US11938481B2/en
Publication of WO2020248881A1 publication Critical patent/WO2020248881A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
    • B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
    • B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
    • B01L3/502792—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics for moving individual droplets on a plate, e.g. by locally altering surface tension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0645—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/16—Surface properties and coatings
    • B01L2300/161—Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
    • B01L2400/0427—Electrowetting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
    • B01L2400/0439—Moving fluids with specific forces or mechanical means specific forces vibrational forces ultrasonic vibrations, vibrating piezo elements

Definitions

  • the present disclosure belongs to the technical field of microfluidics, and specifically relates to a microfluidic substrate, a microfluidic chip and a micrototal analysis system.
  • ⁇ TAS micro total analysis systems
  • the micro total analysis systems is through the miniaturization and integration of chemical analysis equipment, to maximize the transfer of the functions of the analysis laboratory to the portable analysis equipment, and even integrated into the square-inch chip.
  • the ultimate goal is to realize the "personalization” and "domesticization” of analytical laboratories, especially the important technical basis for the development of personalized medicine in systems medicine.
  • the present disclosure provides a microfluidic substrate, including: a substrate and an ultrasonic structure on the substrate; wherein,
  • the ultrasonic structure is used to generate ultrasonic waves during the separation of the liquid droplets, so as to vibrate the liquid droplets.
  • the ultrasonic structure includes: a first electrode layer and a material layer sequentially arranged along a direction away from the substrate; wherein,
  • the material layer is used to generate ultrasonic waves when a first voltage is applied to the first electrode layer.
  • the first electrode layer includes a plurality of first electrodes arranged at intervals.
  • the microfluidic substrate further includes: a second electrode layer on the base, the second electrode layer includes a plurality of second electrodes arranged at intervals, and the plurality of second electrodes are configured to be When the second voltage is applied, the droplets on the corresponding second electrode are controlled to separate.
  • the first electrode and the second electrode are arranged in the same layer, the material is the same, and the two are arranged alternately.
  • the second electrode layer is disposed between the first electrode layer and the substrate.
  • the material layer includes polytetrafluoroethylene.
  • the material layer includes vinylidene fluoride (VDF) homopolymer.
  • VDF vinylidene fluoride
  • the material layer includes a copolymer of vinylidene fluoride and a fluorine-containing vinyl monomer.
  • each of the second electrodes is connected to the first switching device.
  • the microfluidic substrate further includes: a detection device on the side of the second electrode layer close to the substrate and a second switch device connected to the detection device, and the detection device is used to detect The light of the droplet.
  • both the first switching device and the second switching device adopt oxide thin film transistors, and the film layers of the two are arranged in the same layer and have the same material.
  • the microfluidic substrate further includes a lyophobic layer on the side of the ultrasonic structure facing away from the substrate.
  • the second electrode is connected to the first signal line; the first electrode is connected to the second signal line; the first signal line and the second signal line are arranged in the same layer and have the same material.
  • the present disclosure provides a microfluidic chip, including the microfluidic substrate according to the embodiments of the present disclosure and a lower substrate, wherein,
  • the microfluidic substrate further includes an optical device for generating light directed toward the droplet;
  • the lower substrate includes a detection device that detects light passing through the droplet.
  • the present disclosure provides a microfluidic chip, including the microfluidic substrate and the upper substrate according to the embodiments of the present disclosure, wherein,
  • the upper substrate includes an optical device for generating light directed toward the droplet
  • the microfluidic substrate further includes a detection device that detects light passing through the droplet.
  • the present disclosure provides a micro-total analysis system including the microfluidic chip according to the embodiment of the present disclosure
  • Figure 1 is a schematic diagram of the droplet separation process
  • FIGS. 2 and 3 are schematic structural diagrams of a microfluidic substrate provided by embodiments of the disclosure.
  • FIG. 4 is a schematic structural diagram of another microfluidic substrate provided by an embodiment of the disclosure.
  • FIG. 5 is a schematic structural diagram of a microfluidic chip provided by an embodiment of the disclosure.
  • the droplet surface and the solid for example, the dielectric layer or the sparse The surface tension between the liquid layer, thereby changing the contact angle between the two, so as to achieve the operation and control of the droplet.
  • FIG. 1 is a schematic diagram of the droplet separation process.
  • FIG. 1(a) shows a plan view when the droplets are separated, FIG.
  • FIG. 1(b) shows a cross-sectional view taken along the line BB′ of FIG. 1(a), and FIG. 1(c) A cross-sectional view taken along the line AA′ of (a) of FIG. 1 is shown.
  • the switching devices connected to the driving electrodes are controlled to make The electrodes at both ends are charged, and the electrode in the middle is not charged (see Figure 1(c)).
  • the lyophilicity of the dielectric layer on the charged electrodes at both ends increases, resulting in a decrease in the contact angle of the droplet with the lower substrate, an increase in the radius of curvature of the droplet, and movement to the charged electrodes at both ends. Since the middle electrode is not charged and the volume of the droplet is constant during this process, the middle part of the droplet is stretched until it is pulled off, and finally the separation of the droplet is realized.
  • the current micro total analysis system controls the droplet separation voltage generally greater than 100 volts, and the drive electrodes often need to be connected to switching devices such as thin film transistors to achieve control.
  • microfluidic substrate, microfluidic chip, and micro total analysis system aim to solve the problem of excessively high droplet separation voltage in the prior art.
  • FIG. 2 is a schematic structural diagram of a microfluidic substrate provided by an embodiment of the disclosure.
  • the microfluidic substrate includes: a base 101 and 101 on the ultrasonic structure 102.
  • the ultrasonic structure 102 is used to generate ultrasonic waves during the separation of the liquid droplets to vibrate the liquid droplets.
  • the microfluidic substrate provided by the embodiment of the present disclosure generates ultrasonic waves at a designated position through the ultrasonic structure 102, and uses directional ultrasonic waves to increase the thermal motion of droplet molecules, so that the molecules on the surface of the droplet and the molecules inside are exchanged, to a certain extent Destroy the higher surface energy of the surface molecules of the droplet, so that the surface molecules of the droplet are in an unstable state. Therefore, the difficulty of separation of droplets can be reduced, so that the separation of droplets can be controlled without applying an excessively high voltage, thereby reducing the separation voltage of droplets, and at the same time saving energy consumption required for droplet separation.
  • the ultrasonic structure 102 includes: a first electrode layer 1021 and a material layer 1022 arranged in a direction away from the substrate 101; in an embodiment, the material layer 1022 is used to generate when a voltage is applied to the first electrode layer 1021 Ultrasound.
  • the material layer 1022 of the ultrasonic structure 102 is made of a piezoelectric material (for example, a piezoelectric film), and is bonded to the first electrode layer 1021.
  • a voltage is applied to the first electrode layer 1021, ultrasonic waves can be generated at the designated position of the material layer 1022, which makes the surface molecules and internal molecules of the droplet exchange, destroys the higher surface energy of the droplet surface, thereby reducing the difficulty of separation of the droplet , In order to promote the separation of droplets, thereby reducing the separation voltage of droplets.
  • the first electrode layer 1021 includes a plurality of first electrodes 1020 arranged at intervals. In an embodiment, a plurality of first electrodes 1020 may be disposed in the material layer 1022 and spaced apart from each other by the material layer 1022. In an embodiment, referring to FIG. 3, a portion of the first electrode layer 1021 that insulates the plurality of first electrodes 1020 from each other may include the same material as the material layer 1022.
  • the above-mentioned material layer 1022 is made of a piezoelectric material.
  • a voltage is applied to a certain position of the first electrode layer 1021 that is attached to the material layer 1022, the corresponding position of the material layer 1022 will be oriented.
  • Ultrasonic waves to vibrate the droplets to be separated, thereby promoting the separation of the droplets. Since during the droplet separation process, it is only necessary to generate ultrasonic waves at a certain designated position of the material layer 1022, it is not necessary to generate ultrasonic waves on the entire surface of the material layer 1022. Therefore, multiple first electrodes 1020 can be provided in the first electrode layer 1021 And the plurality of first electrodes 1020 are arranged at intervals.
  • the microfluidic substrate may be an upper substrate in a microfluidic chip.
  • the microfluidic substrate includes: a base 101, an ultrasonic structure 102 on the base, and a second electrode layer 103; the ultrasonic structure 102 may be
  • the above-mentioned ultrasonic structure includes a first electrode layer 1021 and a material layer 1022 disposed on the substrate 101; in particular, the first electrode layer 1021 includes a plurality of spaced apart first electrodes 1020, and the second electrode layer 103 includes a plurality of Two spaced apart second electrodes 1030; and the first electrode 1020 and the second electrode 1030 are arranged in the same layer, with the same material, and arranged alternately.
  • the second electrode 1030 may be used as a driving electrode for driving droplets to move and separate.
  • the second electrode 1030 may be a planar electrode or a strip electrode.
  • the first electrode 1020 in the above-mentioned first electrode layer 1021 is a strip electrode, and a plurality of first electrodes 1020 are arranged at intervals to accurately generate ultrasonic waves at designated positions.
  • the second electrode 1030 is also a strip electrode, and a plurality of second electrodes 1030 are also spaced apart And alternately arranged with the first electrode 1020.
  • the first electrode 1020 and the second electrode 1030 provided in the same layer can reduce the thickness of the microfluidic substrate.
  • the material of the second electrode 1030 and the first electrode 1020 are the same, and the two can be manufactured at the same time, which reduces the difficulty of the manufacturing process.
  • the term “same layer arrangement” refers to the relationship between layers formed at the same time in the same step.
  • the first electrode 1020 and the second electrode are formed as a result of one or more steps of the same patterning process performed in the same material layer, they are located in the same layer.
  • the first electrode 1020 and the second electrode 1030 may be formed in the same layer by simultaneously performing the step of forming the first electrode 1020 and the step of forming the second electrode 1030.
  • the first electrode 1020 and the second electrode 1030 are located at the same level and have the same thickness.
  • the first electrode 1020 in the first electrode layer 1021 and the second electrode 1030 in the second electrode layer 103 can also be provided in different layers. As shown in FIG. 3, the first electrode layer 1021 and the second electrode 1030 An insulating layer is provided between the second electrode layer 103. At this time, the first electrode 1020 in the first electrode layer 1021 may also be a planar electrode. It is understandable that the first electrode 1020 and the second electrode 1030 are arranged in different layers, which can avoid the problem of excessive wiring density caused by the arrangement of the second electrode 1030 and the first electrode 1020 in the same layer, thereby reducing wiring Difficulty.
  • the material of the material layer 1022 includes polytetrafluoroethylene.
  • the material of the material layer 1022 in the embodiment of the present disclosure is piezoelectric, and when a certain voltage is applied, ultrasonic waves can be generated to promote the separation of droplets.
  • the material of the material layer 1022 can be vinylidene fluoride (VDF) homopolymer, or vinylidene fluoride and other small amounts of fluorine-containing vinyl monomers (such as trifluoroethylene TrFE, chlorotrifluoroethylene CTFE or tetrafluoroethylene TFE) ⁇ copolymer.
  • VDF vinylidene fluoride
  • the material of the material layer 1022 in the embodiment of the present disclosure is polytetrafluoroethylene.
  • the material of the material layer 1022 can also be other materials mentioned above, which will not be described in detail here.
  • the microfluidic substrate may be the lower substrate of the microfluidic chip; the microfluidic substrate includes a base 101, The ultrasonic structure 102 and the second electrode layer 103 are provided on the substrate 101.
  • the ultrasonic structure 102 may adopt the aforementioned ultrasonic structure.
  • the second electrode layer 103 of the microfluidic substrate includes a plurality of second electrodes 1030 arranged at intervals; and each second electrode 1030 is connected to a corresponding first switching device 1031.
  • the second electrode 1030 may be a strip electrode, and some of the second electrodes 1030 can be energized while some of the second electrodes 1030 are not energized, thereby changing the gap between the droplet and the microfluidic substrate.
  • the contact angle is used to control the separation of droplets. For example, as shown in Fig. 1, for three adjacent second electrodes on which a droplet exists, the second electrode in the middle can be turned off while the second electrodes on both sides are energized to realize the separation of the droplet. .
  • the second electrodes 1030 in the microfluidic substrate provided by the embodiment of the present disclosure are arranged at intervals, and each second electrode 1030 is connected to a corresponding first switching device 1031.
  • the individual control of each second electrode 1030 can be achieved through the on-off of the first switching device 1031.
  • the microfluidic substrate not only includes the aforementioned base 101, ultrasonic structure 102, and second electrode layer 103, but also includes: a detection device 104 and a detection device on the side of the second electrode layer 103 close to the substrate 101 104 is connected to the second switching device 1041.
  • the detection device 104 can detect the light transmitted from the droplet at a specified position to realize the analysis of the position, chemical composition, and molecular composition of the droplet.
  • the detection device 104 is connected to the second switching device 1041, so that individual control of each detection device 104 can be realized to save energy consumption.
  • the detection device 104 may specifically be a PIN photosensitive device.
  • both the first switching device 1031 and the second switching device 1041 use oxide thin film transistors, and the film layers of the two are arranged in the same layer and the materials are the same.
  • both the first switching device 1031 and the second switching device 1041 use oxide thin film transistors, which have a high signal-to-noise ratio and avoid the interference of the switching device to the detection device 104. Since the generated ultrasonic waves are used to promote the separation of droplets in the embodiments of the present disclosure, the switching device does not have to have higher high-voltage resistance. The smaller the off-state current of the oxide thin-film transistor switching device is, the better the control of the gate is. Avoid unnecessary leakage current and save energy.
  • the respective film layers of the first switching device 1031 and the second switching device 1041 can be arranged in the same layer and have the same material, which can reduce the difficulty of the manufacturing process and can reduce the thickness of the microfluidic substrate. It should be noted that when the first switching device 1031 and the second switching device 1041 are arranged in the same layer, an insulating layer needs to be arranged between the two to avoid short circuits and leakage.
  • the microfluidic substrate not only includes the above-mentioned structure, but also includes a lyophobic layer 105 on the side of the ultrasonic structure 102 facing away from the substrate 101.
  • the droplets to be separated are arranged on the side of the lyophobic layer 105 away from the substrate 101.
  • the lyophobic layer 105 can prevent the droplets from directly contacting the second electrode layer 103, causing leakage or corrosion of the second electrode layer 103.
  • the material of the liquid repellent layer 105 may be polytetrafluoroethylene, that is, Teflon.
  • the second electrode 1030 is connected to the first signal line; the first electrode 120 is connected to the second signal line; the first signal line and the second signal line are arranged in the same layer and have the same material.
  • the first signal line can input a first electrical signal, and the first electrical signal is applied to the second electrode 1030, and the second electrode 1030 controls the lyophobic layer 105 by the first electrical signal applied to it. Liquidity to control droplet separation.
  • the second signal line can input a second electrical signal, the second electrical signal is applied to the first electrode 1020, and the first electrode 1020 controls the ultrasonic structure 102 to generate ultrasonic waves at a specified position through the second electrical signal applied thereon to promote The droplet separation reduces the separation voltage of the control droplet.
  • the first signal line and the second signal line can be arranged in the same layer and have the same material, and share a set of masks, which saves manufacturing costs.
  • the first signal line and the second signal line can also be arranged in different layers, and an insulating layer is arranged between the two. Due to the large number of the first signal line and the second signal line, the first signal line and the second signal line are not shown in the figure.
  • the upper substrate of the microfluidic chip has a relatively simple structure relative to the lower substrate, and the upper substrate includes fewer optical devices and electrical devices. Therefore, in the embodiment of the present disclosure, the solution that the ultrasonic structure 102 is disposed on the upper substrate of the microfluidic chip facilitates the integration of the ultrasonic structure 102 and reduces the difficulty of the manufacturing process.
  • FIG. 5 is a schematic structural diagram of a microfluidic chip provided by an embodiment of the disclosure.
  • the microfluidic chip includes an upper substrate 401 and a lower substrate 402.
  • the microfluidic substrate (as shown in FIGS. 2 and 3) according to the embodiment of the present disclosure can be used as the upper substrate 401.
  • the upper substrate 401 further includes The optical device of the light of the droplet
  • the lower substrate 402 includes the detection device 104.
  • a microfluidic substrate (as shown in FIG. 4) according to an embodiment of the present disclosure may be used as the lower substrate 402.
  • the upper substrate 401 may include optical devices for generating light directed toward the droplets.
  • a cavity 403 is formed between the upper substrate 401 and the lower substrate 402, and the cavity 403 is used to accommodate the droplets to be separated.
  • the sides of the upper substrate 401 and the lower substrate 402 close to the droplets are respectively provided with a liquid repellent layer.
  • the implementation principle of the microfluidic chip is similar to the implementation principle of the microfluidic substrate provided in any of the foregoing embodiments, and will not be repeated here.
  • the embodiments of the present disclosure provide a micro-total analysis system, which includes the microfluidic chip provided in the foregoing embodiments.
  • the micro total analysis system can realize the analysis of the position, chemical composition and molecular composition of the droplet.
  • the implementation principle of the micro total analysis system is similar to the implementation principle of the microfluidic substrate provided in any of the foregoing embodiments, and will not be repeated here.

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Abstract

本公开提供一种微流控基板、微流控芯片及微全分析系统。本公开的微流控基板包括：基底和位于基底上超声波结构；其中，超声波结构，用于在液滴分离的过程中产生超声波，以使液滴发生振动。

Description

微流控基板、微流控芯片及微全分析系统
相关申请的交叉引用
本申请要求于2019年6月10日提交的中国专利申请NO.201910497302.7的优先权，其公开内容以引用方式并入本文中。
技术领域
本公开属于微流体技术领域，具体涉及一种微流控基板、微流控芯片及微全分析系统。
背景技术
微全分析系统(micro total analysis systems，μTAS)是通过化学分析设备的微型化与集成化，最大限度地把分析实验室的功能转移到便携的分析设备中，甚至集成到方寸大小的芯片上。最终目标是实现分析实验室的"个人化"、"家用化"，尤其是系统医学的个性化医学等发展的重要技术基础。
发明内容
一方面，本公开提供一种微流控基板，包括：基底和位于所述基底上的超声波结构；其中，
所述超声波结构用于在液滴分离的过程中产生超声波，以使所述液滴发生振动。
在实施例中，所述超声波结构包括：沿背离所述基底方向依次设置的第一电极层和材料层；其中，
所述材料层，用于在所述第一电极层被施加第一电压时产生超声波。
在实施例中，所述第一电极层包括间隔设置的多个第一电极。
在实施例中，微流控基板还包括：位于所述基底上的第二电极层，所述第二电极层包括间隔设置的多个第二电极，所述多个第二电极被构造为被施加第二电压时控制相应第二电极上的液滴 分离。
在实施例中，所述第一电极和所述第二电极同层设置、材料相同，且二者交替设置。
在实施例中，所述第二电极层设置在所述第一电极层和所述基底之间。
在实施例中，所述材料层包括聚四氟乙烯。
在实施例中，所述材料层包括偏氟乙烯(VDF)均聚物。
在实施例中，所述材料层包括偏氟乙烯与含氟乙烯基单体的共聚物。
在实施例中，每个所述第二电极均连接第一开关器件。
在实施例中，微流控基板还包括：在所述第二电极层靠近所述基底一侧的检测器件和与所述检测器件连接的第二开关器件，所述检测器件用于检测穿过所述液滴的光。
在实施例中，所述第一开关器件和所述第二开关器件均采用氧化薄膜晶体管，且二者各膜层同层设置且材料相同。
在实施例中，微流控基板还包括在所述超声波结构背离所述基底的一侧的疏液层。
在实施例中，所述第二电极与第一信号线连接；所述第一电极与第二信号线连接；所述第一信号线和所述第二信号线同层设置且材料相同。
另一方面，本公开提供一种微流控芯片，包括根据本公开实施例所述的微流控基板以及下基板，其中，
所述微流控基板和所述下基板之间容纳所述液滴，
所述微流控基板还包括用于产生射向所述液滴的光的光学器件；并且
所述下基板包括检测穿过所述液滴的光的检测器件。
另一方面，本公开提供一种微流控芯片，包括根据本公开实施例所述的微流控基板以及上基板，其中，
所述微流控基板和所述上基板之间容纳所述液滴，
所述上基板包括用于产生射向所述液滴的光的光学器件；并 且
所述微流控基板还包括检测穿过所述液滴的光的检测器件。
另一方面，本公开提供一种微全分析系统，包括根据本公开实施例所述的微流控芯片
附图说明
图1为液滴分离过程的示意图；
图2、图3为本公开实施例提供的一种微流控基板的结构示意图；
图4为本公开实施例提供的另一种微流控基板的结构示意图；
图5为本公开实施例提供的一种微流控芯片的结构示意图。
具体实施方式
为使本领域技术人员更好地理解本公开的技术方案，下面结合附图和具体实施方式对本公开作进一步详细描述。
目前，利用介电润湿原理，通过调整微全分析系统中微流控芯片的上基板与下基板之间的电场，改变液滴表面与固体(例如，与液滴直接接触的介质层或疏液层)之间的表面张力，从而改变两者之间的接触角，从而实现液滴的操作与控制。
发明人发现现有技术中至少存在如下问题：微流控芯片控制液滴分离的电压往往过高，其电压一般大于100伏特，对微流控芯片中的开关器件的耐高压性能要求较高，增加了微流控芯片的制作工艺难度。
在微全分析系统中，通过调整微流控芯片的上基板与下基板之间的电场，从而改变液滴与上下基板的接触角，以控制液滴移动至指定的位置，或者对液滴进行分离。光源射向光波导的光可以通过光波导分离出不同波长的竖直光线，并从指定的位置出射。检测器件通过对在指定位置从液滴透射的光线进行检测，进而实现对液滴的位置、化学成分及分子构成等数据的分析。图1为液滴分离过程的示意图。图1的(a)示出了液滴分离时的平面图， 图1的(b)示出了沿着图1的(a)的线BB’截取的截面图，并且，图1的(c)示出了沿着图1的(a)的线AA’截取的截面图。参见图1，在液滴分离过程中，当液滴位于微流控芯片下基板的三个驱动电极(对应于实施例的第二电极)上时，通过控制与驱动电极连接的开关器件，使得两端电极带电，中间的电极不带电(参见图1的(c))。由于介电润湿效应，两端带电电极上的介质层亲液性增加，导致液滴与下基板的接触角减小，液滴的曲率半径增加，并且向两端的带电电极移动。由于中间电极不带电，而在这个过程中液滴的体积为常数，因此液滴中间部分被拉伸，直至被拉断，最终实现液滴的分离。目前的微全分析系统控制液滴分离的电压一般大于100伏特，驱动电极往往需要连接薄膜晶体管等开关器件实现控制，然而现有技术中的薄膜晶体管的耐高压能力一般不大于80伏特，不能满足100伏特的控制液滴分离电压，过高的分离电压成为了制约微全分析系统发展的重要因素。本公开实施例提供的微流控基板、微流控芯片及微全分析系统旨在解决现有技术中控制液滴分离电压过高的问题。
本公开实施例提供了一种微流控基板，图2为本公开实施例提供的一种微流控基板的结构示意图，如图2所示，该微流控基板包括：基底101和位于基底101上的超声波结构102。在实施例中，超声波结构102用于在液滴分离的过程中产生超声波，以使液滴发生振动。
本公开实施例提供的微流控该基板，通过超声波结构102在指定位置产生超声波，利用定向超声波增加液滴分子的热运动，使得液滴表面的分子和内部的分子产生交换，在一定程度上破坏液滴表面分子较高的表面能，以使得液滴表面分子处于不稳定的状态。因此，可以降低液滴分离难度，从而不必施加过高的电压即可控制液滴分离，进而降低液滴的分离电压，同时节约液滴分离所需的能耗。
在实施例中，该超声波结构102包括：沿背离基底101方向依次设置的第一电极层1021和材料层1022；在实施例中，材料层 1022用于在第一电极层1021被施加电压时产生超声波。
需要说明的是，该超声波结构102的材料层1022采用具有压电性的材料(例如，压电薄膜)制成，并与第一电极层1021贴合。当第一电极层1021施加电压时，可以在材料层1022指定的位置产生超声波，使得液滴的表面分子和内部分子发生交换，破坏液滴表面较高的表面能，从而降低液滴的分离难度，以促进液滴的分离，进而降低液滴的分离电压。
在实施例中，第一电极层1021包括间隔设置的多个第一电极1020。在实施例中，多个第一电极1020可以设置在材料层1022中并通过材料层1022彼此间隔开。在实施例中，参见图3，第一电极层1021中将多个第一电极1020彼此绝缘的部分可以包括与材料层1022相同的材料。
需要说明的是，上述的材料层1022采用具有压电性的材料制成，当在与材料层1022贴合的第一电极层1021的某一位置施加电压时，材料层1022的相应位置产生定向超声波，以使待分离的液滴发生振动，从而促进液滴的分离。由于在液滴分离过程中，只需要在材料层1022的某一指定位置产生超声波，不必整个材料层1022整面均产生超声波，因此，可以将第一电极层1021中设置多个第一电极1020，并且多个第一电极1020呈间隔排列。当需要产生定向超声波时，只需对其中的一个或几个第一电极1020施加电压即可，从而可以使得超声波产生的位置更为精确。同时，只对其中的一个或几个第一电极1020施加电压，可以避免对整个第一电极层1021施加电压而产生的能源浪费，从而实现节约能耗的效果。
在实施例中，该微流控基板可以为微流控芯片中的上基板，该微流控基板包括：基底101，位于基底上的超声波结构102和第二电极层103；超声波结构102可以采用上述的超声波结构，即包括设置在基底101上的第一电极层1021和材料层1022；特别的是，第一电极层1021包括多个间隔开的第一电极1020，第二电极层103包括多个间隔开的第二电极1030；且第一电极1020和第二电 极1030同层设置、材料相同、且交替设置。
在实施例中，第二电极1030可以用作驱动液滴移动、分离的驱动电极。
需要说明的是，第二电极1030可以为面状电极，也可以为条状电极。在本公开实施例中，上述的第一电极层1021中的第一电极1020为条状电极，多个第一电极1020间隔设置，可以在指定位置精确产生超声波。第一电极层1021中的第一电极1020可以与第二电极层103中的第二电极1030同层设置的情况下，第二电极1030同样为条状电极，多个第二电极1030也呈间隔设置，并且与第一电极1020交替设置。在这种情况下，同层设置的第一电极1020和第二电极1030可以降低微流控基板的厚度。并且，第二电极1030和第一电极1020的材料相同，且二者可以同时制成，降低了制作工艺难度。
如本文所用，术语“同层设置”指的是在相同步骤中同时形成的各层之间的关系。在一个示例中，当第一电极1020与第二电极作为在相同材料层中执行的相同构图工艺的一个或多个步骤的结果而形成时，它们位于相同层。在另一个示例中，可以通过同时执行形成第一电极1020的步骤和形成第二电极1030的步骤而将第一电极1020和第二电极1030形成在相同层。例如，第一电极1020和第二电极1030位于同一水平高度处且厚度相同。
在实施例中，第一电极层1021中的第一电极1020可以与第二电极层103中的第二电极1030也可以设置在不同层中，如图3所示，在第一电极层1021与第二电极层103之间设置绝缘层，此时第一电极层1021中的第一电极1020也可以采用面状电极。可以理解的是，第一电极1020和第二电极1030设置于不同层中，可以避免第二电极1030和第一电极1020同层设置而造成的走线密度过大的问题，从而减小了布线难度。
在实施例中，材料层1022的材料包括聚四氟乙烯。
需要说明的是，本公开实施例中的材料层1022的材料具有压电性，在施加一定的电压时，可以产生超声波，以促进液滴的分 离。材料层1022的材料可以为偏氟乙烯(VDF)均聚物，也可以为偏氟乙烯与其他少量含氟乙烯基单体(例如三氟乙烯TrFE，三氟氯乙烯CTFE或四氟乙烯TFE)的共聚物。在一个具体的例子中，本公开实施例中的材料层1022的材料为聚四氟乙烯。当然在实际应用中材料层1022的材料也可以为上述的其他材料，在此不再具体描述。
图4为本公开实施例提供的另一种微流控基板的结构示意图，如图3所示，该微流控基板可以为微流控芯片的下基板；该微流控基板包括基底101，设置在基底101上超声波结构102和第二电极层103。超声波结构102可以采用上述的超声波结构。该微流控基板的第二电极层103包括间隔设置的多个第二电极1030；且每个第二电极1030均连接与之对应的第一开关器件1031。
需要说明的是，第二电极1030可以为条状电极，可以使第二电极1030中的一些第二电极1030通电、一些第二电极1030不通电，从而改变液滴与微流控基板之间的接触角，实现控制液滴的分离。例如，如图1所示，对于其上存在一滴液滴的三个相邻的第二电极，可以使中间的第二电极不通电而两侧的第二电极通电，来实现该液滴的分离。
本公开实施例提供的微流控基板中的第二电极1030呈间隔设置，且每个第二电极1030与对应的一个第一开关器件1031连接。通过第一开关器件1031的通断可以实现对各个第二电极1030的单独控制。当液滴覆盖的两端的第二电极1030带电，中间的第二电极1030不带电时，由于介电润湿效应，两端带电电极上的介质层亲液性增加，导致液滴与下基板的接触角减小，液滴的曲率半径增加，并且向两端的带电电极移动。由于中间电极不带电，这个过程中液滴的体积为常数，因此液滴中间部分被拉伸，直至被拉断，最终实现液滴的分离。
如图4所示，该微流控基板除了包括上述的基底101、超声波结构102和第二电极层103，还包括：在第二电极层103靠近基底101一侧的检测器件104和与检测器件104连接的第二开关器 件1041。
需要说明的是，检测器件104可以通过对在指定位置从液滴透射的光线进行检测，实现对液滴的位置、化学成分及分子构成等数据的分析。检测器件104与第二开关器件1041连接，可以实现各个检测器件104的单独控制，以节约能耗。检测器件104具体可以是PIN光敏器件。
在实施例中，第一开关器件1031和第二开关器件1041均采用氧化薄膜晶体管，且二者各膜层同层设置且材料相同。
需要说明的是，第一开关器件1031和第二开关器件1041均采用氧化薄膜晶体管，具有较高的信噪比，避免开关器件对检测器件104的干扰。由于本公开实施例中采用产生的超声波促进液滴的分离，开关器件不必具有较高的耐高压性能，氧化物薄膜晶体管开关器件的关态电流越小，对栅极的控制力较好，可以避免不必要的漏电流，节约能耗。同时，第一开关器件1031和第二开关器件1041的各个膜层可以同层设置且材料相同，可以降低制作工艺难度，并且可以降低微流控基板的厚度。需要说明的是，第一开关器件1031和第二开关器件1041同层设置时，二者之间需要设置绝缘层，避免短路以及漏电。
本公开实施例中，该微流控基板除了包括上述的结构，还包括：在超声波结构102背离基底101的一侧的疏液层105。
需要说明的是，待分离的液滴布置在疏液层105背离基底101的一侧。疏液层105可以避免液滴直接接触第二电极层103，造成第二电极层103漏电或者腐蚀。疏液层105的材料可以为聚四氟乙烯，即特氟龙。
在实施例中，第二电极1030与第一信号线连接；第一电极120与第二信号线连接；第一信号线和第二信号线同层设置且材料相同。
需要说明的是，第一信号线可以输入第一电信号，所述第一电信号施加在第二电极1030上，第二电极1030通过其上施加的第一电信号来控制疏液层105疏液性，以控制液滴分离。第二信 号线可以输入第二电信号，所述第二电信号施加在第一电极1020上，第一电极1020通过其上施加的第二电信号控制超声波结构102在指定位置产生超声波，以促进液滴分离，降低控制液滴的分离电压。第一信号线和第二信号线可以同层设置且材料相同，共用一套掩膜板，节约制作成本。当然，若因走线密度过大问题，第一信号线和第二信号线也可以不同层设置，并在两者之间设置绝缘层。由于第一信号线和第二信号线的数量较多，第一信号线和第二信号线在图中未示出。
可以理解的是，通过图2、图3和图4可以看出，微流控芯片的上基板相对于下基板的结构较为简单，上基板中包括较少的光学器件和电学器件。因此，在本公开实施例中超声波结构102设置于微流控芯片的上基板的方案便于集成该超声波结构102，降低制作工艺难度。
本公开实施例提供一种微流控芯片。图5为本公开实施例提供的一种微流控芯片的结构示意图，如图5所示，该微流控芯片包括上基板401和下基板402。在实施例中，根据本公开的实施例所述的微流控基板(如图2和图3所示)可以用作上基板401，在该情况下，上基板401还包括用于产生射向液滴的光的光学器件，下基板402包括检测器件104。可替代地，根据本公开的实施例所述的微流控基板(如图4所示)可以用作下基板402。在这种情况下，上基板401可以包括用于产生射向液滴的光的光学器件。上基板401与下基板402之间形成空腔403，该空腔403用于容纳待分离的液滴。在实施例中，上基板401和下基板402的靠近液滴的一侧分别设置有疏液层。
该微流控芯片的实现原理与上述任一实施例提供的微流控基板的实现原理类似，在此不再赘述。
本公开实施例提供了一种微全分析系统，该微全分析系统包括上述实施例提供的微流控芯片。该微全分析系统可以实现对液滴的位置、化学成分及分子构成等数据的分析。该微全分析系统的实现原理与上述任一实施例提供的微流控基板的实现原理类似， 在此不再赘述。
可以理解的是，以上实施方式仅仅是为了说明本公开的原理而采用的示例性实施方式，然而本公开并不局限于此。对于本领域内的普通技术人员而言，在不脱离本公开的精神和实质的情况下，可以做出各种变型和改进，这些变型和改进也视为本公开的保护范围。

Claims (17)

  1. 一种微流控基板，包括：基底和位于所述基底上的超声波结构；其中，
    所述超声波结构用于在液滴分离的过程中产生超声波，以使所述液滴发生振动。
  2. 根据权利要求1所述的微流控基板，其中，所述超声波结构包括：沿背离所述基底方向依次设置的第一电极层和材料层；其中，
    所述材料层，用于在所述第一电极层被施加第一电压时产生超声波。
  3. 根据权利要求2所述的微流控基板，其中，所述第一电极层包括间隔设置的多个第一电极。
  4. 根据权利要求3所述的微流控基板，还包括：位于所述基底上的第二电极层，所述第二电极层包括间隔设置的多个第二电极，所述多个第二电极被构造为被施加第二电压时控制相应第二电极上的液滴分离。
  5. 根据权利要求4所述的微流控基板，其中，
    所述第一电极和所述第二电极同层设置、材料相同，且二者交替设置。
  6. 根据权利要求4所述的微流控基板，其中，
    所述第二电极层设置在所述第一电极层和所述基底之间。
  7. 根据权利要求2所述的微流控基板，其中，所述材料层包括聚四氟乙烯。
  8. 根据权利要求2所述的微流控基板，其中，所述材料层包括偏氟乙烯(VDF)均聚物。
  9. 根据权利要求2所述的微流控基板，其中，所述材料层包括偏氟乙烯与含氟乙烯基单体的共聚物。
  10. 根据权利要求6所述的微流控基板，每个所述第二电极均连接第一开关器件。
  11. 根据权利要求10所述的微流控基板，还包括：在所述第二电极层靠近所述基底一侧的检测器件和与所述检测器件连接的第二开关器件，所述检测器件用于检测穿过所述液滴的光。
  12. 根据权利要求11所述的微流控基板，其中，所述第一开关器件和所述第二开关器件均采用氧化薄膜晶体管，且二者各膜层同层设置且材料相同。
  13. 根据权利要求1所述的微流控基板，还包括在所述超声波结构背离所述基底的一侧的疏液层。
  14. 根据权利要求4所述的微流控基板，其中，所述第二电极与第一信号线连接；所述第一电极与第二信号线连接；所述第一信号线和所述第二信号线同层设置且材料相同。
  15. 一种微流控芯片，包括如权利要求1所述的微流控基板以及下基板，其中，
    所述微流控基板和所述下基板之间容纳所述液滴，
    所述微流控基板还包括用于产生射向所述液滴的光的光学器件；并且
    所述下基板包括检测穿过所述液滴的光的检测器件。
  16. 一种微流控芯片，包括如权利要求1所述的微流控基板以及上基板，其中，
    所述微流控基板和所述上基板之间容纳所述液滴，
    所述上基板包括用于产生射向所述液滴的光的光学器件；并且
    所述微流控基板还包括检测穿过所述液滴的光的检测器件。
  17. 一种微全分析系统，包括如权利要求15或16所述的微流控芯片。
PCT/CN2020/094124 2019-06-10 2020-06-03 微流控基板、微流控芯片及微全分析系统 WO2020248881A1 (zh)

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