WO2020241490A1 - Dispositif de chauffage et procédé de chauffage - Google Patents

Dispositif de chauffage et procédé de chauffage Download PDF

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Publication number
WO2020241490A1
WO2020241490A1 PCT/JP2020/020286 JP2020020286W WO2020241490A1 WO 2020241490 A1 WO2020241490 A1 WO 2020241490A1 JP 2020020286 W JP2020020286 W JP 2020020286W WO 2020241490 A1 WO2020241490 A1 WO 2020241490A1
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WO
WIPO (PCT)
Prior art keywords
heating
heating device
heated
heat
opening
Prior art date
Application number
PCT/JP2020/020286
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English (en)
Japanese (ja)
Inventor
利彰 神吉
貴大 木邊
Original Assignee
株式会社九州日昌
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社九州日昌 filed Critical 株式会社九州日昌
Priority to JP2021522313A priority Critical patent/JP7079044B2/ja
Publication of WO2020241490A1 publication Critical patent/WO2020241490A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/02—Ohmic resistance heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/12—Travelling or movable supports or containers for the charge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens, or the like for the charge within the furnace

Definitions

  • the present invention relates to a heating device and a heating method.
  • Patent Document 1 uses a heated gas circulation type clean oven that heat-treats a plate-like object such as a glass substrate which is a constituent member of a liquid crystal display panel or the like (see, for example, Patent Document 1).
  • a heated gas circulation type clean oven it is easy to adopt a structure that accommodates objects to be heated such as a glass substrate in multiple stages, so it is excellent in space efficiency, but it is difficult to make the heating temperature distribution uniform. There is a high possibility that the cleanliness will decrease due to the stirring of the heated gas. Further, when the object to be heated is relatively lightweight, the object to be heated may move from a predetermined position due to circulating convection of the heated gas.
  • Patent Document 2 comprises a double-sided heating type far-infrared panel heater in which a thin layer of far-infrared radiation ceramics is coated on both sides of a heat-dissipating plate having a heating element inside, and far-infrared rays are radiated from both sides by heating the heat-dissipating plate.
  • a heating furnace is disclosed in which a large number of shelf-shaped heaters are arranged in a plurality of stages in the furnace body at regular intervals in the vertical direction, and each space formed between these shelf-shaped heaters is used as a drying chamber.
  • Japanese Unexamined Patent Publication No. 2001-56141 Japanese Unexamined Patent Publication No. 2001-317872 Japanese Unexamined Patent Publication No. 2013-200077 Japanese Unexamined Patent Publication No. 2005-352306 Japanese Unexamined Patent Publication No. 2005-055152
  • Patent Document 3-5 discloses a heating device for improving the uniformity and cleanliness of the temperature distribution. In the past, there has been a demand for further improvement in temperature distribution uniformity and cleanliness.
  • An object to be solved by the present invention is to provide a heating device and a heating method having excellent uniformity of temperature distribution and cleanliness.
  • the heating device of the present invention includes a plurality of heating walls arranged to face each other at a distance from each other.
  • a plurality of heat generating means provided in each of the plurality of heating walls, and
  • a plurality of metal heat radiating members which are arranged in a shelf shape at a distance in the vertical direction in the facing regions of the plurality of heating walls and conduct heat from the heating walls, are provided.
  • the plurality of heating walls and the plurality of heat radiating members define a plurality of accommodating spaces for accommodating objects to be heated in the vertical direction.
  • the plurality of accommodation spaces have openings on the front side and the back side defined by the heating wall body and the heat radiating member, and the openings on the back side are closed by the closing member.
  • a metal pull-out mechanism having a closing portion that closes the opening on the front surface side and an insertion portion that is inserted into the accommodation space and directly contacts the heating wall body or the heat radiating member. Further have.
  • the insertion portion is formed so that an object to be heated can be mounted.
  • the object to be heated is heated using the above heating device.
  • a heating device having excellent uniformity of temperature distribution and cleanliness and a heating method using this heating device are provided.
  • FIG. 7 Top view of the heating device according to the fourth embodiment of the present invention.
  • FIG. 9 is a side view of the heating device of FIG. Top view of the heating device according to the fifth embodiment of the present invention.
  • FIG. 11 is a side view of the heating device of FIG.
  • the heating device 100 includes a plurality of heating wall bodies 10 (10A to 10C) arranged to face each other at a distance, and a plurality of coils which are heat generating means provided on the heating wall body 10.
  • a storage space 14 for the object to be heated W provided between them, a heat insulating material 23 provided so as to cover the outer wall surfaces of the left side heating wall 10A and the right side heating wall 10C arranged at both ends, and the left side.
  • a plurality of protruding members 50 (50A, 50B) provided on the outer wall surface of the heating wall body 10A and the right side heating wall body 10C via the heat insulating material 23 are provided.
  • the upper end side and the lower end side of the heating wall body 10 are connected by the top plate 16 and the bottom plate 17, respectively, and the lower surface of the bottom plate 17 is supported by the gantry unit 30.
  • the heating wall body 10 is a structural member formed of a metal such as an aluminum alloy or stainless steel and forming a partition wall on both side surfaces and a center of the box-shaped main heating device 100, and is a member that serves as a heat source for the heating device. is there.
  • the left side heating wall body 10A, the central heating wall body 10B, and the right side heating wall body 10C are composed of three pieces.
  • a plurality of through holes 24 are formed in each heating wall body 10 in the horizontal direction from the front side to the back side, and coiled heaters 11 are detachably inserted into the through holes 24.
  • the coiled heater 11 has a structure in which a heating wire 11w wound in a coil shape is housed inside a metal tube (sheath) 11s.
  • the heating wire 11w wound in a coil reciprocates from the right end to the left end, and two lead wires extend from the right end.
  • an insulating layer made of powdered magnesium oxide is insulated.
  • the coiled heater 11 is formed so that the winding pitch of the heating wire 11w is small at both ends W1 and W1 and large at the central portion W2, and the amount of heat generated at both ends is larger than the amount of heat generated at the central portion. ing.
  • the arrangement of the coiled heaters 11 in each heating wall 10 is inserted into all the through holes 24 in which the intervals are narrow at the lower part and wide at the upper part.
  • the amount of heat generated is large in the lower part where the arrangement interval of the coil heater 11 is small, so that the temperature of the lower part, which tends to be low, is raised.
  • the amount of heat generated at both ends in the depth direction, where the temperature tends to decrease, is increased so that the temperature distribution becomes uniform.
  • each heating wall body 10 is provided with a plurality of other through holes 25 in the horizontal direction from the front side, and the temperature sensor 15 is inserted therein.
  • the calorific value of each of the plurality of coiled heaters 11 provided on each heating wall 10 is independently controlled by the temperature controlling means (not shown) so that the detected temperature of the temperature sensor 15 follows the target temperature. Has been done.
  • a plurality of coiled heaters 11 are grouped into a plurality of groups, and the amount of heat generated is independently controlled for each group.
  • the configuration and arrangement of the coiled heater 11 described above are for realizing uniform temperature of the heating wall body 10 when the heat generating means is controlled by the temperature controlling means. In other words, it is difficult to make the temperature of the heating wall 10 uniform only by the temperature control means due to disturbance or the like. Therefore, by devising the configuration and arrangement of the coil heater 11, the heating wall 10 can be made uniform. Achieves temperature uniformity.
  • the heat radiating member 12 is a member that is arranged in a shelf shape at a distance in the vertical direction in the facing region of the heating wall body 10 to conduct heat from the heating wall body 10.
  • the heating walls 10 on both sides are fitted into the grooves formed in the walls 10 and arranged in a shelf shape.
  • Each heat radiating member 12 is formed of an aluminum plate whose surface is plated with black, so that an excellent heat radiating function can be obtained.
  • Each storage space 14 is a space defined by the heating walls 10 on both sides and the upper and lower heat radiating members 12, and accommodates one object to be heated one by one and radiates heat from the upper and lower heat radiating members 12. It is designed to be heat-treated with.
  • the heating wall body 10 grooves 10t extending in the depth directions B1 and B2 of the accommodation space are formed at positions corresponding to each other on the side walls facing each accommodation space 14, and the lower side of the groove 10t.
  • the inner surface is a support surface for receiving the back surface of each side edge portion in the width direction of the flat plate-shaped object W to be heated.
  • the object to be heated can be carried in so that both ends in the left-right direction thereof enter the grooves 10t, and can be placed on the support surface. If both side edges of the object W to be heated are thermally opened, the temperature of the object W to be heated tends to be non-uniform at both edge portions. Therefore, the temperature of the object W to be heated is made uniform by directly transferring heat to both side edges of the object W to be heated through the support surface of the groove 10t.
  • An opening 14a is formed on the front side of each storage space 14.
  • the opening 14b on the back side of each storage space 14 is closed by a back wall member 26 as a closing member. That is, each accommodation space 14 is opened only at the opening 14a on the front side.
  • the opening 14a on the front side By providing the opening 14a on the front side, the air heated and expanded inside the accommodation space can escape to the outside. Since the opening 14b on the back side is closed, even if the air or gas heated and expanded inside the accommodation space escapes to the outside, the structure is such that the air does not easily flow into the accommodation space 14 from the outside. There is.
  • the gantry unit 30 is arranged on the floor on which the heating device 100 is installed, and mounts the bottom plate 17 and the heating device main body on the bottom plate 17. It has a heat insulating function that prevents the heat of the heating device 100 from being transmitted to the floor surface, a vibration isolating function that prevents the vibration of the floor surface from being transmitted to the heating device main body, and the like.
  • the heat insulating material 23 is provided to minimize thermal disturbance to the left heating wall body 10A and the right side heating wall body 10C from the outside air, and is formed of a heat insulating material such as glass fiber. ing.
  • each object to be heated is carried into each storage space 14 through the opening 14a on the front side of each storage space 14 by using a predetermined transfer device. If the coiled heater 11 is energized, the heat treatment can be performed according to a predetermined program.
  • a temperature control means (not shown), the calorific value of the plurality of coiled heaters 11 is controlled individually or independently for each group so that the detected temperature of each temperature sensor 15 becomes the target temperature.
  • heating walls 10 are arranged on the left and right sides of each accommodation space 14 and heat radiating members 12 are arranged above and below each accommodation space 14, the left and right heating walls 10 that have been heated by the heat of the coiled heater 11 are arranged. It is heated by the heat radiated from the heat radiating member 12 and the heat radiated up and down from the heat radiating member 12 that generates heat by heat conduction from these heating walls. Since each heating wall body 10 is heated to a target temperature and each heat radiating member 12 is also heated to the same temperature as the heating wall body 10, the temperature uniformity between the accommodation spaces 14 is high.
  • the winding pitch of the heating wire 11w is small at both ends and large at the center, so that the temperature tends to decrease in the depth direction of the heating wall 10 in the depth directions B1 and B2.
  • the amount of heat generated at both ends of the coil is large, and the temperature distribution is uniform. Therefore, the temperature distribution in the depth direction in each accommodation space 14 is also made uniform. Therefore, the inside of each accommodation space 14 is heated evenly and evenly, and the uniformity of the temperature distribution in the entire heating device 100 is also good.
  • each accommodation space 14 the heat accumulation phenomenon and the overheating phenomenon in the upper space due to the rise of hot air do not occur due to the above configuration. Further, since the heated gas is not agitated or circulated by the fan, the cleanliness is excellent and the object to be heated does not move due to the gas flow.
  • the heating device 100 described above exemplifies the heating device according to the present invention, and the present invention is not limited to the heating device 100.
  • the heat generating means is not limited to the coiled heater, and other heaters or heat pipes may be used.
  • FIGS. 5 and 6 show a heating device according to the second embodiment.
  • the heating device 100A shown in FIGS. 5 and 6 has the same configuration as that of the first embodiment except that the drawing mechanism 80 is provided.
  • the pull-out mechanism 80 has a closing portion 81 formed of a metal plate and closing the opening 14a on the front surface side, and a plate-shaped insertion portion 82 inserted into the accommodation space 14.
  • the closing portion 81 forms a predetermined gap Gp between the upper end portion of the closing portion 81 and the upper end side of the opening 14a, as shown in FIGS. 5 and 6. It is formed to be.
  • the insertion portion 82 is placed so as to be in direct contact with the heat radiating member 12.
  • the object to be heated W may be mounted in the groove 10t described above, or may be mounted directly on the insertion portion 82 of the drawer mechanism 80 or mounted via a jig. Since the insertion portion 82 is in direct contact with the heat radiating member 12, it is heated to the same temperature as the heat radiating member 12 and the heating wall body 10. Therefore, the object to be heated W placed on the insertion portion 82 is also heated to the same temperature as the heat radiating member 12 and the heating wall body 10.
  • the predetermined gap Gp of the closing portion 81 is covered with a large amount of air flowing into the accommodation space 14 from the outside when the opening 14a is opened. It may reduce the temperature uniformity of the heated material W. Therefore, when the opening 14a is closed by the closing portion 81, it is possible to prevent a large amount of air from flowing into the accommodation space 14 from the outside.
  • the predetermined gap Gp is provided so that the heated and expanded air can escape to the outside of the accommodation space 14. It is considered that if the gap Gp is too small, the air flow to the outside becomes faster and the temperature uniformity of the object W to be heated in the vicinity of the gap Gp decreases.
  • the accommodation space 14 when the accommodation space 14 is completely sealed, a flow of heated air is generated in the accommodation space 14, so that the air circulation is lowered, the heat transfer is weakened, and a long heating time is required. That is, by optimizing the opening area of the opening 14a with a predetermined gap Gp, the temperature uniformity of the object W to be heated can be kept good and the heating time can be optimized. Further, by providing a predetermined gap Gp, it is also effective for discharging the outer gas emitted from the object to be heated W. A configuration that does not form a predetermined gap Gp can also be adopted.
  • FIGS. 7 and 8 show a heating device according to the third embodiment.
  • the heating device 100B shown in FIGS. 7 and 8 has the same configuration as that of the first embodiment except that the drawing mechanism 180 is provided.
  • the pull-out mechanism 180 includes a closing portion 181 and an insertion portion 182 like the above-mentioned pull-out mechanism 80, but the insertion portion 182 is different from the above-mentioned insertion portion 82 in that it is mounted in the groove 10t.
  • the object to be heated W is placed directly on the insertion portion 182 or via a jig.
  • a predetermined gap Gp is formed between the closing portion 181 and the opening 14a as described above.
  • the heating wall body 10 and the insertion portion 182 come into direct contact with each other, and the insertion portion 182 is maintained at the same temperature as the heating wall body 10. Therefore, the temperature uniformity of the object W to be heated can be kept good, and the heating time can be optimized.
  • FIGS. 9 and 10 show a heating device according to the fourth embodiment.
  • the heating device 100C shown in FIGS. 9 and 10 has the same configuration as that of the first embodiment except that the heating device 100C includes a drawer mechanism 280. Further, the structure of the drawer mechanism 280 is basically the same as that of the drawer mechanism 80 described above. However, the pull-out mechanism 280 is provided with a plurality of holding members 283 for mounting the object to be heated W made of a three-dimensional structure on the insertion portion 282. By providing the holding member 283, it is possible to heat the object to be heated W made of a three-dimensional structure while maintaining the posture.
  • FIGS. 11 and 12 show a heating device according to a fifth embodiment.
  • the drawer mechanism 380 shown in FIGS. 11 and 12 has a closing portion 381 that closes the opening 14a and an insertion portion 382 that is mounted in the groove 10t.
  • a predetermined gap Gp is formed between the lower end side of the closing portion 381 and the lower end side of the opening 14a.
  • a plurality of notch portions 384 for setting the object to be heated W of the three-dimensional structure are arranged in a row. By fitting a part of the object to be heated W into the notch portion 384, the object to be heated W is set in the insertion portion 382.
  • Gas discharge holes 383 are arranged on both sides of the notch portions 384 formed in a row.
  • the outer gas when the object to be heated W set in the notch portion 384 is heated and the outer gas is released, the outer gas is heavier than normal air, so that the back surface side of the insertion portion 382 is passed through the gas discharge hole 383. Is discharged to.
  • the outer gas discharged to the back surface side of the insertion portion 382 is discharged to the outside through a predetermined gap Gp formed at the lower end portion of the opening 14a.
  • a predetermined gap Gp is formed between the opening 14a and the closing portion 381, but the present invention is not limited to this, and an opening can be provided in the closing portion 381.
  • the heating wall body 10, the top plate 16, and the bottom plate 17 are made of stainless steel, and the heat radiating member 12 is made of an aluminum plate whose surface is plated with black.
  • the material is not limited to these materials, and the heating walls 10A to 10C, the top plate 16, the bottom plate 17, and the like are made of aluminum or an aluminum alloy (or an aluminum or aluminum alloy that has been subjected to a matte surface treatment to suppress the dissipation of radiant heat. ) Can also be formed.
  • the surface treatment of the heat radiating member 12 is not limited to black plating, and a surface treatment capable of suppressing the emission of radiant heat, for example, a surface treatment having a matte surface treatment can be adopted.
  • the heating device according to the present invention is widely used in an industrial field for heat-treating all objects to be heated, including various plate-shaped members such as glass substrates, semiconductor lead frames, other metal plates and synthetic resin plates, and three-dimensional objects. Can be done.
  • Heating wall body 10A Left side heating wall body 10B: Central heating wall body 10C: Right side heating wall body 10t: Groove 11: Coiled heater 11s: Metal tube 11w: Heating wire 12: Heat radiating member 14: Accommodation space 14a: Opening 14b: Back surface 15: Temperature sensor 16: Top plate 17: Bottom plate 20B: Insulation space 20T: Insulation space 23: Insulation material 24: Through hole 25: Through hole 26: Back wall member 30: Mount unit 50 : Protruding member 80: Drawer mechanism 81: Closing part 82: Inserting part 100: Heating device 100A: Heating device 100B: Heating device 100C: Heating device 180: Drawer mechanism 181: Closing part 182: Inserting part 280: Drawer mechanism 282: Insert Part 283: Holding member 380: Pull-out mechanism 381: Closing part 382: Inserting part 383: Gas discharge hole 384: Notch part Gp: Gap W: Heated object W1: End part W2: Central part

Abstract

Le problème décrit par la présente invention est de fournir un dispositif de chauffage et un procédé de chauffage permettant d'obtenir une excellente propreté et uniformité de distribution de température. La solution selon l'invention porte sur un dispositif de chauffage (100) qui comprend : une pluralité de corps de parois chauffantes (10) disposés les uns en face des autres et séparés d'une certaine distance ; une pluralité de moyens de génération de chaleur (11) disposés respectivement sur la pluralité de corps de parois chauffantes (10) ; et une pluralité d'éléments métalliques à rayonnement de chaleur (12) disposés espacés d'une manière étagée verticalement dans des régions situées entre les corps de parois chauffantes opposés (10), et qui conduisent la chaleur depuis les corps de parois chauffantes (10). La pluralité de corps de parois chauffantes (10) et la pluralité d'éléments à rayonnement de chaleur (12) délimitent, dans le sens vertical, une pluralité d'espaces de réception (14) pour recevoir respectivement des objets à chauffer. La pluralité d'espaces de réception (14) présentent, sur un côté de surface avant et un côté de surface arrière, des ouvertures délimitées par les corps de parois chauffantes (10) et les éléments à rayonnement de chaleur (12), et une ouverture (14b) sur le côté de surface arrière est fermée par un élément de fermeture (26).
PCT/JP2020/020286 2019-05-31 2020-05-22 Dispositif de chauffage et procédé de chauffage WO2020241490A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021522313A JP7079044B2 (ja) 2019-05-31 2020-05-22 加熱装置および加熱方法

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Application Number Priority Date Filing Date Title
JP2019-102739 2019-05-31
JP2019102739 2019-05-31

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WO2020241490A1 true WO2020241490A1 (fr) 2020-12-03

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS488653B1 (fr) * 1969-05-31 1973-03-16
JP2003245591A (ja) * 2001-12-03 2003-09-02 Tokyo Ohka Kogyo Co Ltd 被膜形成装置、被膜形成方法および基板用トレイ
JP2009115425A (ja) * 2007-11-09 2009-05-28 Kyushu Nissho:Kk 熱処理装置
JP2011528501A (ja) * 2008-07-16 2011-11-17 株式会社テラセミコン バッチ式熱処理装置及び該装置に適用されるヒータ
JP6388041B2 (ja) * 2017-01-27 2018-09-12 株式会社九州日昌 加熱装置および加熱方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS488653B1 (fr) * 1969-05-31 1973-03-16
JP2003245591A (ja) * 2001-12-03 2003-09-02 Tokyo Ohka Kogyo Co Ltd 被膜形成装置、被膜形成方法および基板用トレイ
JP2009115425A (ja) * 2007-11-09 2009-05-28 Kyushu Nissho:Kk 熱処理装置
JP2011528501A (ja) * 2008-07-16 2011-11-17 株式会社テラセミコン バッチ式熱処理装置及び該装置に適用されるヒータ
JP6388041B2 (ja) * 2017-01-27 2018-09-12 株式会社九州日昌 加熱装置および加熱方法

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JP7079044B2 (ja) 2022-06-01
TW202107032A (zh) 2021-02-16
JPWO2020241490A1 (fr) 2020-12-03

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