WO2020241136A1 - レーザ加工装置及びそれを用いたレーザ加工方法 - Google Patents

レーザ加工装置及びそれを用いたレーザ加工方法 Download PDF

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Publication number
WO2020241136A1
WO2020241136A1 PCT/JP2020/017618 JP2020017618W WO2020241136A1 WO 2020241136 A1 WO2020241136 A1 WO 2020241136A1 JP 2020017618 W JP2020017618 W JP 2020017618W WO 2020241136 A1 WO2020241136 A1 WO 2020241136A1
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Prior art keywords
laser
laser beam
work
laser processing
laser light
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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PCT/JP2020/017618
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English (en)
French (fr)
Japanese (ja)
Inventor
静波 王
西尾　正敏
憲三 柴田
学 西原
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Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
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Priority to EP20815665.3A priority Critical patent/EP3978181A4/en
Priority to JP2021522716A priority patent/JP7382552B2/ja
Publication of WO2020241136A1 publication Critical patent/WO2020241136A1/ja
Priority to US17/527,453 priority patent/US12263540B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/384—Removing material by boring or cutting by boring of specially shaped holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/035—Aligning the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626—Energy control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/21—Bonding by welding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3524—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive
    • G02B6/3528—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive the optical element being a prism
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206—Optical features
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0071—Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction

Definitions

  • the present invention relates to a laser processing apparatus and a laser processing method using the laser processing apparatus.
  • Patent Document 1 discloses a laser system in which a laser beam is incident on a plurality of bundled optical fibers that can be optically coupled to the laser beam.
  • the laser system includes a reflector or condenser lens located on the optical path of the laser beam and a piezo actuator to move them.
  • the piezo actuator causes the laser beam to be incident on a selected optical fiber among the plurality of optical fibers by changing the incident position of the laser beam on the plurality of bundled optical fibers.
  • each optical fiber is made of a multi-clad fiber.
  • the piezo actuator changes the power distribution of the laser beam by adjusting the incident position of the laser beam in the optical fiber.
  • Patent Document 2 by moving the position of the condenser lens or inserting a wedge-shaped optical element on the optical path of the laser light, the incident position of the laser light on the incident end surface of the multi-clad fiber can be determined.
  • a variable configuration has been proposed.
  • Patent Document 1 since a reflector and a condenser lens, which are relatively large optical components, are moved by an actuator, there is a problem in their responsiveness, and the optical path of the laser beam is changed at high speed to obtain light. It was difficult to change the position of incidence on the fiber. For this reason, when the shape of the work changes, it is difficult to control the power distribution of the laser beam according to the change, and it is difficult to maintain the processing quality of the work.
  • the method of moving the position of the condensing lens to change the incident position of the laser beam requires that the condensing lens be linearly moved by the actuator, so that the position accuracy is improved. There was a problem in achieving both responsiveness. Further, if the optical element is moved while being inserted into the optical path of the laser beam during continuous oscillation, the laser beam is scattered in an unexpected direction by the edge portion of the optical element, which may cause a problem in laser processing. It was. In addition, the scattered laser beam may damage the inside of the laser cavity.
  • the present invention has been made in view of this point, and an object of the present invention is to provide a laser processing apparatus capable of changing the power distribution of laser light with a simple configuration and a laser processing method using the same.
  • the laser processing apparatus includes a laser oscillator for generating laser light, a core, a first clad provided coaxially with the core on the outer peripheral side of the core, and the first clad.
  • An optical fiber having at least a second clad provided coaxially with the core on the outer peripheral side of one clad and having an incident end face and an emission end opposite to the incident end face, and the laser oscillator provided with the laser oscillator.
  • the beam control is provided with at least a beam control mechanism that introduces a laser beam into the incident end face of the optical fiber and a laser beam emitting head that is attached to the emitting end of the optical fiber and irradiates the laser beam toward the work.
  • the mechanism is arranged on the optical path of the laser beam between the condensing lens that receives the laser beam and condenses it at a predetermined magnification, and the incident end face of the condensing lens and the optical fiber, and of the laser beam.
  • the beam control mechanism has at least an optical path changing and holding mechanism for changing and holding an optical path and a controller for controlling the operation of the optical path changing and holding mechanism, and the beam control mechanism is an incident position of the laser beam on an incident end surface of the optical fiber.
  • the power distribution of the laser beam emitted from the laser beam emitting head is controlled by changing the above.
  • the incident position of the laser light on the incident end face of the optical fiber can be easily changed, and the power distribution of the laser light emitted from the laser light emitting head can be easily controlled.
  • the laser processing method according to the present invention is a laser processing method using the laser processing apparatus, which is a first irradiation step of irradiating the laser beam having a first power distribution toward the work, and subsequently described above. It is characterized by including at least a second irradiation step of irradiating the laser beam having a second power distribution different from the first power distribution toward the work.
  • a molten pool and a keyhole can be surely formed in the work at the initial stage of welding, and the welding quality of the work can be improved.
  • the power distribution of the laser beam can be easily controlled.
  • the welding quality of the workpiece can be improved.
  • FIG. 5 is a schematic cross-sectional view of a welded portion of the work according to the first embodiment. It is a welding sequence of the work. This is a welding sequence of the work according to the second embodiment. It is sectional drawing of the weld part of a workpiece. It is a welding sequence of the work according to the modification.
  • FIG. 1 shows a schematic diagram of the configuration of the laser processing apparatus according to the present embodiment, and the laser processing apparatus 1000 includes a laser oscillator 10, a beam control mechanism 20, a controller 80, an optical fiber 90, a laser light emitting head 100, and a manipulator 110. And have. Further, FIG. 2 shows the cross-sectional structure and the refractive index distribution of the optical fiber 90.
  • the laser oscillator 10 is a laser light source that generates laser light LB by receiving electric power from a power source (not shown).
  • the laser oscillator 10 may be composed of a single laser light source or a plurality of laser modules. In the latter case, the laser light emitted from each of the plurality of laser modules is combined and emitted as the laser light LB.
  • the beam control mechanism 20 is provided in the laser oscillator 10 and introduces the laser light LB into the incident end surface of the optical fiber 90 and controls the power distribution of the laser light LB emitted from the exit end of the optical fiber 90.
  • the configuration and operation of the beam control mechanism 20 will be described later.
  • the optical fiber 90 is a so-called multi-clad fiber.
  • the optical fiber 90 includes a core 90a, a first clad 90b provided coaxially with the core 90a on the outer peripheral side of the core 90a, and a second clad 90c provided coaxially with the core 90a on the outer peripheral side of the first clad 90b.
  • the core 90a, the first clad 90b, and the second clad 90c are mainly composed of quartz, and as shown in FIG. 2, the core 90a has the highest refractive index, and the first clad 90b and the second clad 90c are refracted in this order. The rate is low.
  • the refractive index of the first clad 90b and the second clad 90c may be adjusted by doping different types or concentrations of substances that can both reduce the refractive index.
  • the index of refraction of the core 90a may also be adjusted by doping different types or concentrations of substances that can increase the index of refraction.
  • the laser beam LB incident on the core 90a at a predetermined angle can propagate in the core 90a without entering the first clad 90b.
  • the laser beam LB incident on the first clad 90b at the angle of can propagate in the first clad 90b without entering the second clad 90c.
  • the refractive indexes of the core 90a, the first clad 90b, and the second clad 90c are necessarily different. It is not necessary to have.
  • the core 90a, the first clad 90b, and the second clad 90c have the same refractive index N1, and between the core 90a and the first clad 90b, and between the first clad 90b and the second clad 90c.
  • a thin layer having a refractive index N2 (N2 ⁇ N1) may be provided.
  • the laser beam LB incident on the core 90a at a predetermined angle can propagate in the core 90a without entering the first clad 90b, but is incident on the first clad 90b at a predetermined angle.
  • the resulting laser beam LB can propagate in the first clad 90b without entering the second clad 90c.
  • the main component of the layer having a refractive index N2 is quartz, but a substance capable of lowering the refractive index may be doped.
  • the laser beam LB incident on the optical fiber 90 propagates through the core 90a and / or the first clad 90b and reaches the exit end of the optical fiber 90.
  • a film or a resin-based protective layer that mechanically protects the optical fiber 90 is provided on the outer peripheral surface of the second clad 90c.
  • the laser light emitting head 100 is attached to the emitting end of the optical fiber 90, and irradiates the laser light LB transmitted by the optical fiber 90 toward the work 200, and the work 200 is laser-processed.
  • An optical component (not shown) such as a collimator lens, a condenser lens, and a protective glass is arranged inside the laser light emitting head 100.
  • the controller 80 controls the laser oscillation of the laser oscillator 10. Specifically, laser oscillation control is performed by supplying control signals such as output current and on-time to a power source (not shown) connected to the laser oscillator 10.
  • the controller 80 controls the drive of the motor 70 (see FIGS. 4A and 4B) provided in the beam control mechanism 20 according to the content of the selected laser machining program. Further, the controller 80 controls the operation of the manipulator 110.
  • the laser machining program is stored in a storage unit (not shown). The storage unit may be provided inside the controller 80, or may be provided outside the controller 80 so that data can be exchanged with the controller 80.
  • the controller 80 constitutes a part of the beam control mechanism 20.
  • the manipulator 110 is connected to the controller 80, and the laser light emitting head 100 is moved so as to draw a predetermined trajectory according to the above-mentioned laser processing program.
  • a controller for controlling the operation of the manipulator 110 may be provided separately.
  • FIG. 3 is a schematic view of the beam control mechanism viewed from the X direction
  • FIG. 4A is a schematic view of the main part of the beam control mechanism viewed from the Y direction
  • FIG. 4B is a schematic view of the main part of the beam control mechanism in the Z direction.
  • the schematic diagram seen from each is shown.
  • the traveling direction of the laser beam LB until it is incident on the condenser lens 30 is the Z direction
  • the extending direction of the output shaft 70a of the motor 71 is the X direction
  • X The directions in which the directions and the Z directions are substantially orthogonal to each other may be referred to as the Y direction.
  • the Z direction is the same direction as the direction in which the optical axis of the laser beam LB extends.
  • the X direction is substantially orthogonal to the Z direction.
  • the axis of the output shaft 70a of the motor 70 may be referred to as an X axis (first axis).
  • substantially orthogonal means that the parts are orthogonal including the assembly tolerance, and does not require that they are strictly orthogonal.
  • substantially equal means that each part is equal including manufacturing tolerances and assembly tolerances, and does not require that the two to be strictly compared are equal.
  • substantially equal also means that the estimated value is equal with a predetermined accuracy in comparison with the estimated value, but does not strictly require that the estimated value and the comparison target are equal.
  • the beam control mechanism 20 includes a condenser lens 30, an optical member 50, and a motor 70. Further, as described above, the beam control mechanism 20 has a controller 80. As will be described later, the motor 70 and the optical member 50 function as an optical path change holding mechanism 40 that changes and holds the optical path of the laser beam LB after being focused by the condenser lens 30.
  • the laser beam LB is incident on the condenser lens 30 in a state of being converted into parallel light by an optical component (not shown), for example, a collimated lens or the like.
  • the condensing lens 30 condenses the laser beam LB at a predetermined magnification and causes it to be incident on the incident end surface 90d of the optical fiber 90.
  • the optical member 50 is a parallel flat plate-shaped member made of a material transparent to the laser beam LB.
  • the optical member 50 is made of, for example, quartz and has a refractive index greater than 1 with respect to the wavelength of the laser beam LB.
  • the optical member 50 may be provided with double-sided antireflection coating in order to reduce the reflectance of the incident laser beam LB as much as possible. It is desirable that the reflectance with the antireflection coating is much less than 1%.
  • the optical member 50 is arranged on the optical path of the laser beam LB between the condenser lens 30 and the incident end surface 90d of the optical fiber 90, and the laser beam LB after being focused by the condenser lens 30 is incident. The lens.
  • the motor 70 has an output shaft 70a and is connected to the optical member 50 via a holder 60. By driving the motor 70 and rotating the output shaft 70a around the X-axis, the optical member 50 rotates in the YZ plane around the connecting portion with the holder 60.
  • the motor 70 is configured to be rotatable not only in one direction (direction A shown in FIG. 3) but also in both forward and reverse directions (direction B shown in FIG. 3). Further, the rotation frequency is variable and can be changed in the range of several Hz to several kHz when welding is performed. Further, as will be described later, when the beam control mechanism 20 is operated, the motor 70 does not continuously rotate in one direction, but rotates in a predetermined angle range.
  • the optical member 50 tilts at a predetermined angle about the connecting portion with the holder 60.
  • the motor 70 can reciprocate the optical member 50 at a high speed within a set angle range. Further, the motor 70 is connected to the controller 80 and driven by a control signal from the controller 80.
  • the thickness of the optical member 50 in the Z direction is about 1 mm to several mm, but is not particularly limited to this, and the moving distance of the laser beam LB on the incident end surface 90d of the optical fiber 90 and the rotation angle of the motor 70 It can be changed to another value as appropriate depending on the relationship.
  • the thickness is about several mm, the required size is to be installed in a narrow position between the condenser lens 30 and the incident end surface 90d of the optical fiber 90 through which the focused laser light LB passes. Is small, and the motor 70 makes it easy to reciprocate at high speed, for example, at a rotation frequency of several kHz.
  • 5A and 5B show the state near the incident end of the optical fiber when the incident position of the laser beam is changed.
  • the optical member 50 When the output shaft 70a of the motor 70 is in the initial position, the optical member 50 is arranged so as to be substantially orthogonal to the optical axis of the laser beam LB. In this state, as shown in FIG. 5A, the laser beam LB is incident on the core 90a at the incident end surface 90d of the optical fiber 90.
  • the optical member 50 is YZ centered on the connecting portion with the holder 60 according to the rotation of the motor 70. Tilts in a plane at a predetermined angle. Depending on this angle, the angle between the light incident surface of the optical member 50 and the optical axis of the laser light LB changes, and the optical path of the laser light LB is changed inside the optical member 50.
  • the laser beam LB whose optical path has been changed is incident on the incident end surface 90d of the optical fiber 90, and the incident position thereof changes. For example, as shown in FIG. 5B, at the incident end surface 90d of the optical fiber 90, most of the laser beam LB is incident on the first clad 90b, but a small portion is also incident on the core 90a.
  • the incident position of the laser beam LB on the incident end surface 90d of the optical fiber 90 can be continuously changed. Further, by changing the incident position of the laser light LB, for example, the power ratio of the laser light LB transmitted to the core 90a and the laser light LB transmitted to the first clad 90b can be changed.
  • FIG. 6 shows the relationship between the incident position of the laser light on the incident end face of the optical fiber and the power ratio of the laser light transmitted inside the core
  • FIG. 7 shows the incident position of the laser light on the incident end surface of the optical fiber and the laser.
  • the relationship with the beam profile of the laser beam emitted from the light emitting head is shown.
  • the beam profile shown in FIG. 7 corresponds to the power distribution of the laser beam LB emitted from the laser beam emitting head 100 and imaged at the focal position.
  • the beam profile shown in FIG. 7 also corresponds to the power distribution of the laser beam LB emitted from the emission end of the optical fiber 90.
  • the laser light LB When the incident position of the laser light LB is I shown in FIG. 6, the laser light LB is 100% incident in the core 90a, and the beam profile of the laser light LB has a single peak shape with a narrow half-value width as shown in FIG. (Incident position of laser beam LB: I to II).
  • 100% of the laser beam LB is incident on the core 90a until the incident position of the laser beam LB approaches the position II shown in FIG. 6 from the core 90a, and the beam profile is single peak. Maintained in shape.
  • the beam profile changes so as to include a single peak-shaped portion and a terrace-shaped portion having a wide half-value width formed on both sides thereof (incident position of laser beam LB: ⁇ III). ).
  • the former corresponds to the laser beam LB incident in the core 90a
  • the latter corresponds to the laser beam LB incident in the first clad 90b.
  • the peak value of the single peak-shaped portion decreases.
  • the incident position of the laser light LB is the position III shown in FIG. 6, the power ratio of the laser light LB incident in the core 90a becomes equal to the power ratio of the laser light LB incident in the first clad 90b.
  • the cross-sectional area of the core 90a is equal to the cross-sectional area of the first clad 90b, the peak value of the single peak-shaped portion and the peak value of the terrace-shaped portion of the beam profile match, and are shown in FIG.
  • the beam profile of the entire laser beam LB has a single peak shape, its peak value is lower and the half-value width is larger than that in the case where the laser beam LB is incident only in the core 90a (laser beam). Incident position of LB: III).
  • the beam profile has a single-peaked portion and a terrace-like shape having a wide half width formed on both sides thereof, as shown in FIG.
  • the shape is such that the portion of the laser beam LB is included (incident position of the laser beam LB: ⁇ III).
  • the beam profile becomes bimodal as shown in FIG. 7 (incident position of the laser beam LB: ⁇ IV).
  • the incident position of the laser light LB moves away from the core 90a (between III and IV shown in FIG. 6), the power of the laser light LB incident in the core 90a decreases and is incident in the first clad 90b.
  • the power ratio of the laser beam LB to be generated becomes high.
  • the peak value of the portion of the beam profile corresponding to the component transmitted in the core 90a decreases, and the peak value of the portion corresponding to the component transmitted in the first clad 90b decreases.
  • the value increases and the beam profile becomes bimodal (incident position of laser beam LB: ⁇ IV).
  • the peak value in the bimodal beam profile is lower than the peak value in the monomodal beam profile obtained when the incident position of the laser beam LB is I shown in FIG.
  • the incident position of the laser is further separated from the core 90a (between IV and V shown in FIG. 6)
  • the power of the laser light LB incident in the core 90a becomes 0%
  • the laser The light LB is 100% incident in the first clad 90b.
  • the peak value of the portion of the beam profile corresponding to the component transmitted into the core 90a is reduced to 0%.
  • the peak value of the portion corresponding to the component transmitted in the first clad 90b becomes the maximum, and the beam profile becomes a bimodal shape having the highest peak value (incident position of the laser beam LB: in the case of V to VI).
  • the peak value in the bimodal beam profile is lower than the peak value in the monomodal beam profile obtained when the incident position of the laser beam LB is I shown in FIG.
  • the incident position of the laser beam LB on the incident end surface 90d of the optical fiber 90 can be changed. Further, by changing the incident position of the laser light LB, for example, the beam profile of the laser light LB emitted from the laser light emitting head 100, that is, the power distribution can be changed.
  • the processed shape of the work 200 for example, the welded shape can be made good. This will be described further.
  • FIG. 8 shows a schematic cross-sectional view of the welded portion of the work for comparison
  • FIG. 9 shows a schematic cross-sectional view of the welded portion of the work according to the present embodiment.
  • a portion irradiated with the laser beam LB is heated to cause melting, and a molten pool 210 is formed. Further, in the portion irradiated with the laser beam LB, the material constituting the work 200 evaporates on the surface, and the reaction force causes the keyhole 220 to be formed inside the work 200.
  • the laser light LB is transmitted only into the core 90a of the optical fiber 90 and is irradiated from the laser light emitting head 100 toward the work 200, and the power density of the laser light LB at the welded portion is high. Moreover, the spot diameter of the irradiated laser beam LB is small.
  • the work 200 is easily blended and the keyhole 220 is deepened, while the opening 221 of the keyhole 220 is not so widened, and as shown in FIG. 8, the constricted portion 222 inside the keyhole 220. May occur. Further, since the constricted portion 222 is closed, air bubbles 223 remain inside the work 200. Further, when the closed constricted portion 222 becomes the keyhole 220 again, if the molten metal suddenly ejects from the inside of the keyhole 220 toward the surface, spatter 212 adheres to the surface of the work 200 or the molten pool 210 The surface of the surface is rippling.
  • the molten pool 210 is rapidly cooled and solidified after passing through the laser beam LB, when such a wave is generated, the unevenness 211 (on the surface of the work 200 behind the molten pool 210 along the traveling direction of laser welding) The rear vibrating portion 211) is generated.
  • this wave is reflected and bounces off at the boundary between the molten pool 210 and the solidified part.
  • this reflected wave reaches the keyhole 220, it flows so as to fill the keyhole 220.
  • the molten metal that has flowed in is rapidly heated by the laser beam LB, and suddenly generates metal vapor, so that the columnar shape of the keyhole 220 may be disturbed.
  • the irregular shape of the keyhole 220, the generation of air bubbles 223, and the spatter 212 and unevenness 211 generated on the surface of the work 200 as described above have been factors that deteriorate the welding quality.
  • the power distribution of the laser beam LB emitted from the laser beam emitting head 100 toward the work 200 can be changed by using the beam control mechanism 20. Therefore, for example, by adjusting the tilt angle of the optical member 50 and changing the power ratio between the laser light LB transmitted in the core 90a and the laser light LB transmitted in the first clad 90b, the figure is shown.
  • a laser beam LB having a beam profile as shown in 9 can be irradiated toward the work 200.
  • the desired penetration depth D can be obtained by the laser beam LB emitted from the core 90a.
  • the laser beam LB emitted from the first clad 90b can widen the opening 221 of the keyhole 220 as compared with the case shown in FIG.
  • the inner wall surface of the keyhole 220 is also irradiated with the laser beam LB, and the laser beam LB is absorbed by the work 200 in the process of reaching the inside of the keyhole 220 by the multiple reflection.
  • the welding quality can be improved by switching the power distribution of the laser beam LB emitted from the laser beam emitting head 100 during laser welding.
  • FIG. 10 shows the welding sequence of the work, and the molten pool 210 is not formed in the work 200 immediately after the start of welding.
  • the controller 80 drives the motor 70 to inject the laser beam LB only into the core 90a.
  • the spot diameter of the laser beam LB irradiated to the work 200 is reduced, and the power density of the laser beam LB at the welded portion is increased (first irradiation step).
  • the molten pool 210 and the keyhole 220 it is desired to suppress the formation of the constricted portion 222 and the like as described above.
  • the controller 80 drives the motor 70 to incident the laser beam LB on the core 90a and the first clad 90b.
  • the opening 221 of the keyhole 220 is widened, and the desired penetration depth D is obtained (second irradiation step).
  • the molten pool 210 and the keyhole 220 can be reliably formed in the work 200, and the generation of air bubbles 223 and surface irregularities 211 inside the work 200 can be suppressed to achieve welding quality. Can be enhanced.
  • the power of the laser beam LB emitted from the laser beam emitting head 100 by operating the beam control mechanism 20 according to the material of the work 200 and / or the shape of the laser processing target portion in the work 200 is not limited to these.
  • the work 200 having various materials and shapes can be laser-machined, and the processing quality can be improved.
  • the laser oscillator 10 for generating the laser light LB, the core 90a, and the first clad 90b provided coaxially with the core 90a on the outer peripheral side of the core 90a.
  • a beam control mechanism 20 provided in the oscillator 10 to introduce the laser beam LB into the incident end surface 90d of the optical fiber 90, and a laser beam emitting head attached to the exit end of the optical fiber 90 to irradiate the laser beam LB toward the work 200. It has at least 100.
  • the beam control mechanism 20 receives the laser light LB generated by the laser oscillator 10 and condenses the laser light LB at a predetermined magnification, and the laser light LB between the condensing lens 30 and the incident end surface 90d of the optical fiber 90. It has an optical path change holding mechanism 40 that is arranged on the optical path of the laser beam LB and changes and holds the optical path of the laser beam LB, and a controller 80 that controls the operation of the optical path change holding mechanism 40.
  • the optical path change holding mechanism 40 includes a parallel flat plate-shaped optical member 50 and a motor 70 connected to the optical member 50. In this embodiment, the controller 80 controls the operation of the motor 70.
  • the beam control mechanism 20 controls the power distribution of the laser light LB emitted from the laser light emitting head 100 by changing the incident position of the laser light LB on the incident end surface 90d of the optical fiber 90.
  • the optical path change holding mechanism 40 on the optical path of the laser beam LB between the condenser lens 30 and the incident end surface 90d of the optical fiber 90, the optical path of the laser beam LB can be easily changed. ..
  • the optical member 50 is arranged in front of the condenser lens 30, the laser beam LB after passing through the condenser lens 30 is imaged at the focal position. The optical path cannot be changed.
  • the incident position of the laser light LB on the incident end surface 90d of the optical fiber 90 can be easily changed, and the laser light emitting head 100 can be easily changed.
  • the power distribution of the laser beam LB emitted from the laser beam LB can be easily controlled.
  • the laser beam LB is converted into parallel light before being incident on the condenser lens 30.
  • the optical path and the optical axis of the laser beam LB emitted from the condenser lens 30 become constant, so that the optical path of the laser beam LB can be easily changed by the optical path change holding mechanism 40.
  • the optical member 50 is provided so as to transmit the laser beam LB and to be tiltable around the X axis (first axis) intersecting the optical axis of the laser beam LB.
  • the controller 80 drives the motor 70 to tilt the optical member 50 around the X-axis, so that the beam control mechanism 20 changes the incident position of the laser beam LB on the incident end surface 90d of the optical fiber 90.
  • the optical path of the laser beam LB can be changed reliably and at high speed.
  • the power distribution of the laser light LB emitted from the laser light emitting head 100 can be changed at high speed.
  • the thickness of the optical member 50 is about 1 mm to several mm
  • the optical member 50 is optical at a narrow position between the condenser lens 30 and the incident end surface 90d of the optical fiber 90 through which the focused laser light LB passes. Since the member 50 is installed, its required size is small, and it becomes easy to tilt it at high speed by the motor 70. In addition, it becomes easy to reciprocate within a predetermined angle range.
  • the laser beam LB is not emitted inside the laser apparatus. As a result, damage to the laser apparatus can be suppressed, and the processing quality of laser processing can be maintained high.
  • the beam control mechanism 20 causes the laser beam LB to be incident on at least one of the core 90a and the first clad 90b.
  • the power distribution of the laser light LB emitted from the laser light emitting head 100 can be easily changed in multiple stages.
  • the beam control mechanism 20 controls the power distribution of the laser light LB emitted from the laser light emitting head 100 according to at least one of the material of the work 200 and the shape of the laser processing target portion in the work 200.
  • the work 200 having various materials and shapes can be laser-machined, and the processing quality can be improved. Further, when the laser processing apparatus 1000 according to the present embodiment is used for laser welding, a weld bead having a good appearance can be formed.
  • the beam control mechanism 20 is preferably configured to switch the power distribution of the laser beam LB emitted from the laser beam emitting head 100 during laser machining of the work 200.
  • the first irradiation step of irradiating the laser beam LB having the first power distribution toward the work 200 and subsequently the first power distribution toward the work 200 It includes at least a second irradiation step of irradiating the laser beam LB with a different second power distribution.
  • a molten pool 210 and a keyhole 220 are formed on the surface of the work 200, and in the second irradiation step, the opening 221 of the keyhole 220 is widened and the molten pool has a desired penetration depth D. Grow 210.
  • the power distribution of the laser beam LB irradiated to the work 200 can be narrowed, and the molten pool 210 and the keyhole 220 can be reliably formed at the initial stage of welding. Further, after the molten pool 210 and the keyhole 220 are formed, the power distribution of the laser beam LB irradiated to the work 200 is expanded so that the opening 221 of the keyhole 220 is expanded, thereby expanding the inside of the work 200. It is possible to suppress the generation of air bubbles 223, the formation of irregularities 211 and spatter 212 on the surface, and the disorder of the shape of the keyhole 220, and the welding quality can be improved. In addition, a weld bead having a good appearance can be formed.
  • FIG. 11 shows a welding sequence of the work according to the present embodiment
  • FIG. 12 shows a schematic cross-sectional view of the welded portion of the work.
  • the same parts as those in the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted.
  • the optical member 50 When the motor 70 is reciprocated within a predetermined angle range (direction B shown in FIG. 3), the optical member 50 also reciprocates within a predetermined angle range accordingly.
  • the rotation frequency is set to about several Hz to several kHz. That is, the beam control mechanism 20 is configured to switch the power distribution of the laser beam LB emitted from the laser beam emitting head 100 during laser machining of the work 200.
  • the power distribution of the laser light LB emitted from the emission end of the laser light emission head 100 changes periodically and continuously.
  • the beam profile having a single peak-like peak is continuously changed to a beam profile including a single peak-like portion and a terrace-like portion having a wide half-value width formed on both sides thereof, and the beam profile is continuously changed.
  • the change is repeated periodically.
  • the rotation frequency of the optical member 50 corresponds to the frequency at which the power distribution of the laser beam LB changes.
  • the molten pool 210 and the keyhole 220 are surely formed in the work 200, the keyhole 220 is prevented from becoming too narrow, and the generation of air bubbles 223 and spatter 212 is suppressed.
  • Laser welding can be performed.
  • the keyhole 220 In the process of sequentially forming the molten pool 210 along the direction of laser welding, the keyhole 220 also moves along the direction of laser welding. At this time, the keyhole 220 vibrates repeatedly in the radial direction and / or the depth direction at a natural vibration frequency (hereinafter, simply referred to as a natural vibration frequency).
  • the natural vibration frequency is a value determined by the size of the molten pool 210, the viscosity of the constituent metal of the molten work 200 at the time of melting, and the like, and is estimated to be about several Hz to several kHz in many cases.
  • the shape of the keyhole 220 is stabilized, and as shown in FIG. 12, the inside of the work 200 It is possible to suppress the generation of the constricted portion 222 and the generation of the bubble 223. Further, the unevenness 211 formed behind the molten pool 210 can be reduced.
  • the method of changing the power distribution of the laser beam LB periodically and continuously as described above is particularly effective for thick plate welding. This is because the thicker the plate, the deeper the required penetration, and the deeper the keyhole 220 to achieve it, so the probability that welding defects will occur due to the instability of the keyhole 220 (for example, constriction). This is because
  • FIG. 13 shows a welding sequence of the work according to the present modification, and the work 200 has a shape having a thin plate portion and a thick plate portion continuous thereto.
  • the thickness of the thick plate portion is thicker than that of the thin plate portion.
  • the work 200 is irradiated with the laser beam LB in the sequence shown in FIG.
  • the penetration depth D does not have to be too deep. Therefore, after the work 200 is irradiated with the laser beam LB with a beam profile having a single peak at the start of welding to form the molten pool 210 and the keyhole 220, the power distribution of the laser beam LB becomes broad. To prevent the formation of the constricted portion 222 in the keyhole 220.
  • the work 200 is irradiated with the laser beam LB in the sequence shown in FIG. That is, the laser beam LB is irradiated toward the work 200 while periodically changing the power distribution of the laser beam LB at the natural vibration frequency.
  • the thin plate portion may be welded while the power distribution of the laser beam LB is fixed so as to be broad from the beginning.
  • the multi-clad fiber having the structure shown in FIG. 2 has been described as an example, but other structures may be used.
  • one or more clads may be provided on the outer peripheral side of the second clad 90c.
  • the refractive index of the clad provided on the outside of the second clad 90c may be gradually lowered.
  • the clad to which the laser beam LB can be incident may be up to the clad excluding the outermost clad.
  • a film or a resin-based protective layer that mechanically protects the fiber is provided outside the outermost clad.
  • the output and wavelength of the laser beam LB can be appropriately changed depending on the material and shape of the work 200 or the processing content.
  • the optical member 50 is tilted around the X axis, but it may be tilted around the axis extending in the Y direction. In that case, the positions of the motor 70 and the holder 60 are changed so that the output shaft 70a of the motor 70 extends in the Y direction. Further, in order to tilt the optical member 50, an actuator other than the motor 70, for example, a piezoelectric actuator or the like may be used.
  • the so-called keyhole type laser welding in which the keyhole 220 is formed in the molten pool 210 has been described as an example, but the material and shape of the work 200, the required penetration depth and welding have been described.
  • the type of laser welding can be appropriately selected depending on the width of the bead and the like.
  • the above-mentioned laser processing apparatus 1000 and welding sequence can be applied not only to laser welding but also to laser cutting.
  • the laser processing apparatus of the present invention can control the power distribution of the laser light irradiating the work with a simple configuration, it is useful for processing a work having various materials or shapes.
  • Laser oscillator 20 Beam control mechanism 30 Condensing lens 40 Optical path change holding mechanism 50 Optical member 60 Holder 70 Motor 70a Output shaft 80 Controller 90 Optical fiber 90a Core 90b First clad 90c Second clad 90d Incident end face 100 Laser light emission head 110 Manipulator 200 Work 210 Melting Pond 220 Keyhole 221 Opening 1000 Laser Processing Equipment LB Laser Light

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PCT/JP2020/017618 2019-05-29 2020-04-24 レーザ加工装置及びそれを用いたレーザ加工方法 Ceased WO2020241136A1 (ja)

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JP2021522716A JP7382552B2 (ja) 2019-05-29 2020-04-24 レーザ加工装置及びそれを用いたレーザ加工方法
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