WO2020215867A1 - Microscope objective optical system having wide spectrum, large numerical aperture, and ultra-high flux - Google Patents

Abstract

A microscope objective optical system that has a wide spectrum, a large numerical aperture and ultra-high flux, successively comprising along the optical axis direction from an object plane to an image plane: a first lens group, a second lens group, a third lens group, and a fourth lens group, which are 20 lenses in total, wherein the first lens group is a catadioptric lens group, and light emitted from the object plane is imaged to a primary image plane (23) by means of folding a light path twice. The first lens group has positive focal power; the second lens group and the third lens group image the light that traverses the primary image plane (23) to a secondary image plane (24), and the second lens group and the third lens group both have positive focal power; and the fourth lens group images the light that traverses the secondary image plane (24) to the image plane. The present optical system has a small size while having a wide imaging spectrum and a large field angle.

Description

Wide-spectrum, large numerical aperture, ultra-high-throughput microscope objective optical system Technical field

This application belongs to the technical field of microscopic objective optical systems, and particularly relates to a wide-spectrum, large numerical aperture, and ultra-high-throughput microscopic objective optical system.

Background technique

As the intersection of the three major technologies of nanotechnology, biology and information, gene sequencing equipment intensively reflects the use of the most advanced science and technology to explore life information, and has become an important guarantee for the sustainable development of today's economy and national security and stability. Gene sequencing is an emerging industry and is in a stage of rapid development. Among them, the key technology, ultra-high-throughput microscope objectives, has become a bottleneck technology that limits the localization of gene sequencers (sequencing throughput refers to the amount of data output obtained by gene sequencing equipment in a certain period of time, and is one of the important indicators for evaluating the advancement of sequencing technology. 1. Higher sequencing throughput also means lower sequencing costs), the microscopic objective required in the ultra-high-throughput gene sequencer puts forward higher requirements in terms of planar spatial scale and spatial resolution, which requires display The micro objective lens needs to have a large field of view while taking into account high resolution. In the design of optical systems, wide-field and high-resolution are trade-offs. Wide is not precise, and precise is not wide. This is the biggest difficulty encountered by ultra-high-throughput microscope objectives.

As the core optical element of a high-throughput gene sequencer, the objective lens is the key to achieving high-throughput and even ultra-high-throughput gene sequencing. At the same time, the current popular high-throughput gene sequencing, brain neuron detection, cancer cell development in the biomedical field Monitoring and other research directions all have an urgent need for wide-field, high-resolution optical systems.

At present, there are many immersion-type large numerical aperture gene sequencing lenses that are similar to the structure of this patent can be inquired internationally: Patent US20080247036, see Figure 1 for details. This optical lens has only 7 lenses, using BK7 and Caf2 two lens materials to correct chromatic aberration, imaging in the visible light 480nm-660nm spectrum, the system numerical aperture is 1.2, but the imaging field of view is only 0.25mm.

Patent US7180658, see Figure 2 for details. This patented optical lens contains 14 lenses, using fused silica and calcium fluoride materials, imaging in the ultraviolet band 297nm-313nm, the system numerical aperture is about 0.9, the imaging field of view is only 0.28mm; the exit pupil of the system is in the system Internally, the larger size of the rear tube lens leads to a larger size of the entire system structure.

The biggest disadvantage of the prior art is that the overall length of the optical system is too long, and multiple optical materials are used to correct the chromatic aberration of the system, which is not only difficult to design, but also difficult to control the consistency of multiple materials in the mass production stage; at the same time, the current objective lens imaging spectrum is narrow , The imaging angle of view is small.

Summary of the invention

This application provides a wide-spectrum, large-numerical-aperture, and ultra-high-throughput microscope objective optical system, which aims to solve the problem that the overall length of the existing optical system is too long, and a variety of optical materials are used to correct the chromatic aberration of the system. The design is difficult, and the objective lens The imaging spectrum is narrow and the imaging field angle is small.

In order to solve the above-mentioned problems, this application provides the following technical solutions:

A wide-spectrum, large-numerical-aperture, and ultra-high-throughput microscope objective optical system. The optical system sequentially includes a first lens group, a second lens group, and a third lens group along the optical axis from the object plane to the image plane , The fourth lens group, a total of 20 lenses;

The first lens group is a catadioptric lens group, which images light emitted from the object plane to a primary image plane by folding the light path twice, and the first lens group has a positive refractive power;

The second lens group and the third lens group image light passing through the primary image plane to the secondary image plane, and the second lens group and the third lens group both have negative refractive power;

The fourth lens group images light passing through the secondary image plane to the image plane.

The technical solution adopted in the embodiments of the present application further includes: the first lens group includes three lenses, and from the object plane to the image plane along the optical axis, the first plano-convex positive lens and the first meniscus are convex to the image plane. Negative lens, second meniscus negative lens.

The technical solution adopted in the embodiment of the present application further includes: the second lens group includes four lenses, which are a first positive meniscus lens, a second plano-convex positive lens convex to the image plane, a second positive meniscus lens, The third positive meniscus lens.

The technical solution adopted in the embodiments of the application further includes: the third lens group includes five lenses, and from the object plane to the image plane along the optical axis are the first double convex positive lens, the third negative meniscus lens, and the second Double convex positive lens, third plano-convex positive lens convex to the object plane, fourth negative meniscus lens.

The technical solution adopted by the embodiment of the application further includes: the fourth lens group includes eight lenses, and from the object plane to the image plane along the optical axis are the fourth positive meniscus lens, the fifth positive meniscus lens, and the sixth lens. Meniscus positive lens, double concave negative lens, seventh meniscus positive lens, eighth meniscus positive lens, ninth meniscus positive lens, and fourth plano-convex positive lens convex to the object plane.

The technical solution adopted in the embodiment of the present application further includes: setting a diaphragm between the second lens group and the third lens group.

The technical solution adopted in the embodiment of the present application further includes: the object plane position of the optical system adopts a liquid immersion method.

The technical solution adopted in the embodiment of the present application further includes: the numerical aperture of the optical system is less than or equal to 1.0, and the field of view of the imaging line is less than or equal to 2.8 mm.

The technical solution adopted in the embodiment of the application further includes: the imaging spectrum band of the optical system is 300 nm-800 nm.

The technical solution adopted in the embodiment of the application further includes: the optical system is made of the same material, and the material of the optical system is fused silica material.

Compared with the prior art, the beneficial effects produced by the embodiments of the present application are:

(1) The optical system of the microscopic objective lens of the present application adopts a catadioptric optical solution, folding the optical path, placing the exit pupil of the system outside the system, and reducing the size of the rear tube lens system;

(2) The existing optical solutions need to use multiple optical materials to correct the chromatic aberration of the system; however, this application uses one optical material to facilitate correction.

(3) Under the condition that the numerical aperture of the system of the present application is 1.0, the field of view of the imaging line is increased to 2.8 mm, and all indicators are better than the prior art solutions.

Description of the drawings

FIG. 1 is a schematic diagram of the structure of the optical lens of Patent 1 in the background technology of this application;

2 is a schematic diagram of the structure of the patent 2 optical lens in the background technology of the application;

FIG. 3 is a schematic diagram of the optical system structure of the microscope objective lens according to an embodiment of the present application.

1. The first plano-convex positive lens; 2. The first meniscus negative lens; 3. The second meniscus negative lens;

4. The first positive meniscus lens; 5. The second plano-convex positive lens; 6. The second positive meniscus lens;

7. The third positive meniscus lens; 8. The first double convex positive lens; 9. The third negative meniscus lens;

10. The second double convex positive lens; 11. The third plano-convex positive lens; 12. The fourth negative meniscus lens;

13. The fourth positive meniscus lens; 14. The fifth positive meniscus lens; 15. The sixth positive meniscus lens;

16. Double concave negative lens; 17. Seventh meniscus positive lens; 18. Eighth meniscus positive lens;

19. Ninth meniscus positive lens; 20. Fourth plano-convex positive lens;

21. Diaphragm; 22. Exit pupil; 23. Primary image surface; 24. Secondary image surface.

Detailed ways

In order to make the purpose, technical solutions, and advantages of this application clearer, the following further describes this application in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the application, and not used to limit the application.

Referring to Fig. 3, the present application provides a wide-spectrum, large-numerical-aperture, and ultra-high-throughput microscope objective optical system. The optical system includes a first lens group, a second lens group, and a lens group along the optical axis from the object plane to the image plane. The third lens group, the fourth lens group, a total of twenty lenses;

The first lens group is a catadioptric lens group, which images the light emitted from the object plane to a primary image plane by folding the light path twice, and the first lens group has a positive refractive power;

The second lens group and the third lens group images light passing through the primary image plane to the secondary image plane, and the second lens group and the third lens group both have negative refractive power;

The fourth lens group images the light passing through the secondary image plane to the image plane.

The first lens group includes three lenses, the first plano-convex positive lens 1, the first negative meniscus lens 2, and the second negative meniscus lens 3 along the optical axis direction from the object plane to the image plane.

The second lens group includes four lenses. Along the optical axis from the object plane to the image plane, the first positive meniscus lens 4, the second plano-convex positive lens 5, the second positive meniscus lens 6, and the The third positive meniscus lens 7.

The third lens group includes five lenses, from the object plane to the image plane along the optical axis, the first double convex positive lens 8, the third negative meniscus lens 9, the second double convex positive lens 10, convex to the object plane The third plano-convex positive lens 11 and the fourth meniscus negative lens 12.

The fourth lens group includes eight lenses, from the object plane to the image plane along the optical axis, the fourth positive meniscus lens 13, the fifth positive meniscus lens 14, the sixth positive meniscus lens 15, and the double concave negative lens 16. , The seventh positive meniscus lens 17, the eighth positive meniscus lens 18, the ninth positive meniscus lens 19, and the fourth plano-convex positive lens 20 convex to the object plane.

A diaphragm 21 is provided between the second lens group and the third lens group.

The numerical aperture of the optical system is less than or equal to 1.0, and the field of view of the imaging line is less than or equal to 2.8mm.

The imaging spectrum of the optical system is 300nm-800nm.

The optical system is made of the same material, and the material of the optical system is fused silica.

This application adopts the form of catadioptric optical system, using the double-folding optical path to move the exit pupil of the system outside the system, and effectively correct the high-level spherical aberration of the system, and control the astigmatism, field curvature and primary high-level coma related to the field of view. The total length of the optical system is less than 230mm. The entire optical system uses the same optical material. The imaging spectrum can reach 300nm-800nm. Combined with the back end immersion liquid, the system numerical aperture can reach 1.0 and the system imaging line field of view can reach 2.8mm .

According to the design of the positive light path, the object plane adopts the liquid immersion method to increase the numerical aperture of the system; the image is formed through the first lens to the position of the primary image surface 23, effectively reducing the center obstruction of the first negative meniscus lens 2; after the second lens group It forms an image with the third lens to the position of the secondary image plane 24, and the system aperture stop is between the third lens group and the second lens group; the function of the fourth lens group is to collimate the light from the secondary image plane into parallel light Emitted to the outside of the system, the overall lens aperture of the second lens group and the third lens group is reduced, and the exit pupil of the system is moved outward. The exit pupil 22 of the optical system is on the left of the plano-convex positive lens 20 in the convex object plane of the fourth lens group. At 27.3mm on the side, it effectively reduces the overall optical size of the subsequent optical system.

Table 1 shows the basic parameters of the optical system in the embodiment of the present application. Please refer to Table 1 for specific parameters.

Working band	300nm-800nm
Numerical aperture	1.0
Field of view	2.8mm

Fused silica refractive index	1.4585
Refractive index of immersion liquid	1.3652

Table 2 shows the specific parameters of each lens of the optical system in the embodiment of the present application. For specific parameters, please refer to Table 2. The surface numbers in Table 2 are counted from the object plane to the exit pupil. For example, the surface of the first plano-convex positive lens 1 of the first lens group facing the object plane is number 1, and the surface facing the exit pupil is number 2, and the first The surface of the negative meniscus lens 2 facing the object plane is number 3, the surface facing the exit pupil is number 4, and the numbers of other mirror surfaces are deduced by analogy.

Surface number	radius	thickness	material	Half caliber
object	infinite	0.2	1.3652	1.4
1	infinite	20.481	1.4585	3.9
2	-88.503	11.522	To	21.6
3	-38.858	8.073	1.4585	27.3
4	-50.248	0.907	To	35.1
5	22.838	2.37	1.4585	4.1
6	4.811	5.56	To	3.0
7	-11.222	3.94	1.4585	3.9
8	-6.122	1	To	5.1
9	infinite	3.838	1.4585	6.5
10	-13.237	0.403	To	6.9
11	12.683	11.695	1.4585	7.3
12	13.246	4.72	To	5.6
13	11.471	2.475	1.4585	5.5

14	12.294	3.8	To	5.0
15	18.008	9.45	1.4585	6.5
16	-19.286	0.5	To	7.2
17	23.116	3.41	1.4585	7.2
18	10.568	3.637	To	6.7
19	34.929	3.659	1.4585	7.3
20	-31.329	0.5	To	7.5
twenty one	16.467	3.879	1.4585	7.7
twenty two	infinite	0.5	To	7.5
twenty three	6.951	2.986	1.4585	6.5
twenty four	5.671	15.649	To	5.3
25	-80.976	7.806	1.4585	6.7
26	-17.788	10.404	To	8.4
27	-88.624	2.497	1.4585	10.5
28	-54.825	9.324	To	10.9
29	27.352	4.432	1.4585	12.9
30	107.595	5.25	To	12.7
31	-32.866	5.0	1.4585	12.6
32	41.623	7.298	To	13.5
33	-49.382	5.0	1.4585	14.5
34	-33.967	0.5	To	15.6
35	-82.140	4.040	1.4585	16.1

36	-39.234	0.5	To	16.5
37	-89.425	4.398	1.4585	16.8
38	-38.456	0.5	To	17.1
39	117.495	6.0	1.4585	17.1
40	To	27.3	To	16.8

In the description of this application, it should be understood that the terms "center", "vertical", "horizontal", "upper", "lower", "front", "rear", "left", "right", " The orientation or positional relationship indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", and "circumferential" are based on the drawings The orientation or positional relationship of is only for the convenience of describing the application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the application .

In this application, unless expressly stipulated and defined otherwise, the “on” or “under” of the first feature on the second feature may be in direct contact with the first and second features, or indirectly through an intermediary. contact. Moreover, the "above", "above" and "above" of the first feature on the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the level of the first feature is higher than the second feature. The “below”, “below” and “below” of the second feature of the first feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the level of the first feature is smaller than the second feature.

Although the embodiments of the present application have been shown and described above, it can be understood that the above-mentioned embodiments are exemplary and should not be construed as limiting the present application. A person of ordinary skill in the art can comment on the foregoing within the scope of the present application. The embodiment undergoes changes, modifications, substitutions and modifications.

The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use this application. Various modifications to these embodiments will be obvious to those skilled in the art, and the general principles defined in this document can be implemented in other embodiments without departing from the spirit or scope of the application. Therefore, this application will not be limited to the embodiments shown in this document, but should conform to the widest scope consistent with the principles and novel features disclosed in this document.

Claims (10)

1. A wide-spectrum, large-numerical-aperture, and ultra-high-throughput microscope objective optical system is characterized in that the optical system includes a first lens group, a second lens group, and a third lens group in order from the object plane to the image plane along its optical axis. Lens group, fourth lens group, a total of 20 lenses;

   The first lens group is a catadioptric lens group, which images light emitted from the object plane to a primary image plane by folding the light path twice, and the first lens group has a positive refractive power;

   The second lens group and the third lens group image light passing through the primary image plane to the secondary image plane, and the second lens group and the third lens group both have negative refractive power;

   The fourth lens group images light passing through the secondary image plane to the image plane.
2. The wide-spectrum, large-numerical-aperture, and ultra-high-throughput microscope objective optical system according to claim 1, wherein the first lens group includes three lenses, from the object plane to the image plane in sequence along the optical axis. It is a first plano-convex positive lens (1), a first meniscus negative lens (2), and a second meniscus negative lens (3) convex to the image plane.
3. The wide-spectrum and large-numerical-aperture microscope objective optical system according to claim 1, wherein the second lens group includes four lenses, and the first bend is from the object plane to the image plane along the optical axis. A positive meniscus lens (4), a second plano-convex positive lens (5) convex to the image plane, a second positive meniscus lens (6), and a third positive meniscus lens (7).
4. The wide-spectrum, large-numerical-aperture, and ultra-high-throughput microscope objective optical system according to claim 1, wherein the third lens group includes five lenses, from the object plane to the image plane in sequence along the optical axis. It is the first double convex positive lens (8), the third negative meniscus lens (9), the second double convex positive lens (10), the third plano-convex positive lens (11) convex to the object plane, and the fourth meniscus Negative lens (12).
5. The wide-spectrum, large-numerical-aperture, ultra-high-throughput microscope objective optical system according to claim 1, wherein the fourth lens group includes eight lenses, which are arranged in order from the object plane to the image plane along the optical axis. It is the fourth positive meniscus lens (13), the fifth positive meniscus lens (14), the sixth positive meniscus lens (15), the double concave negative lens (16), the seventh positive meniscus lens (17), and the Eight meniscus positive lens (18), ninth meniscus positive lens (19), and fourth plano-convex positive lens (20) convex to the object plane.
6. The wide-spectrum, large-numerical-aperture, and ultra-high-throughput microscope objective optical system according to claim 1, wherein a diaphragm (21) is provided between the second lens group and the third lens group.
7. The wide-spectrum, large-numerical-aperture, and ultra-high-throughput microscope objective optical system of claim 1, wherein the position of the object plane of the optical system adopts a liquid immersion method.
8. The wide-spectrum, large-numerical-aperture, ultra-high-throughput microscope objective optical system according to claim 1, wherein the numerical aperture of the optical system is less than or equal to 1.0, and the imaging line field of view is less than or equal to 2.8 mm.
9. The wide-spectrum, large-numerical-aperture, and ultra-high-throughput microscope objective optical system according to claim 1, wherein the imaging spectrum of the optical system is 300 nm-800 nm.
10. The wide-spectrum, large-numerical-aperture, ultra-high-throughput microscope objective optical system of claim 1, wherein the optical system is made of the same material, and the material of the optical system is fused silica.

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