CN204116702U - A kind of micro objective - Google Patents

A kind of micro objective Download PDF

Info

Publication number
CN204116702U
CN204116702U CN201420638896.1U CN201420638896U CN204116702U CN 204116702 U CN204116702 U CN 204116702U CN 201420638896 U CN201420638896 U CN 201420638896U CN 204116702 U CN204116702 U CN 204116702U
Authority
CN
China
Prior art keywords
lens
minute
minute surface
towards
convex surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201420638896.1U
Other languages
Chinese (zh)
Inventor
文里云
迪米特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NANJING HENGLEI OPTICAL TECHNOLOGY RESEARCH Co Ltd
Original Assignee
NANJING HENGLEI OPTICAL TECHNOLOGY RESEARCH Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NANJING HENGLEI OPTICAL TECHNOLOGY RESEARCH Co Ltd filed Critical NANJING HENGLEI OPTICAL TECHNOLOGY RESEARCH Co Ltd
Priority to CN201420638896.1U priority Critical patent/CN204116702U/en
Application granted granted Critical
Publication of CN204116702U publication Critical patent/CN204116702U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Lenses (AREA)

Abstract

The utility model discloses a kind of micro objective, belong to optical field.It comprises 14 spherical glass lens that same optical axis is arranged, and be arranged in order from object space to image space, wherein first, second, third lens are balsaming lens group, six, the 7th lens are balsaming lens group, eight, the 9th lens are balsaming lens group, ten, the 11 lens are balsaming lens group, the 13, the 14 lens are balsaming lens group.By selecting suitable lens arrangement parameter, micro objective of the present utility model can realize the imaging of high resolution, has the features such as numerical aperture is large, resolution is high, volume is little, processing technology is ripe, cost is low.

Description

A kind of micro objective
Technical field
The invention belongs to optical field, more particularly, relate to a kind of micro objective.
Background technology
Microscope has become the requisite high technology equipment of a lot of industry research, in some accurate miniature field widespread uses, has irreplaceable effect especially in medical treatment and scientific research etc.
Numerical aperture (NA) and other each optical parametric microscopical have substantial connection, and generally wish that it is the bigger the better, the size therefore improving numerical aperture (NA) is also the demand of development in science and technology; At present existing all kinds of micro objective in the world, but the numerical aperture (NA) that technically can reach at present generally remains on about 0.65, and what can reach more large-numerical aperture (NA) also only has minority; Along with the development of science and technology, at present a lot of field starts to increase the micro objective demand of more large-numerical aperture (NA), and the numerical aperture (NA) therefore improving micro objective has necessary meaning.
Application number is that the Chinese patent of CN201280008900.X discloses a kind of object lens and optical take-up apparatus, wherein said object lens are used for optical take-up apparatus, described optical take-up apparatus at least has the first light source and the object lens of the first light beam of injection first wave length λ 1 (390nm< λ 1<420nm), by described object lens by first beam condenser of described first wave length λ 1 from described first light source injection on the information recording surface of the first CD, carry out record and/or the regeneration of information thus, described object lens have: the first optical surface, it is formed at described first light source side, second optical surface, it is formed towards described first optical surface, and radius-of-curvature is greater than described first optical surface, end face, it is positioned at plane outside described second optical surface and substantially vertical with optical axis when optical axis direction is observed, and the image side numerical aperture (NA) of described object lens is more than 0.7, less than 0.9.Although increase for its numerical aperture of existing technology, its numerical aperture still can not meet the demand in some fields, and manufacturing cost is high simultaneously.
Application number is the i-line projection lens of lithography machine that the Chinese patent of CN201410076527.2 discloses a kind of Large visual angle high-NA, these object lens conjugate distance L=1500mm, and eyeglass is divided into four groups of independent design integrated optimization again.Although have employed the two heart, 25 4 groups of structures far away, which use 5 low order aspheric surfaces to balance aberration, the image space apparent field of object lens is 132 × 132mm, and image-side numerical aperture is 0.17.
Summary of the invention
For the multi-field micro objective demand to more large-numerical aperture (NA), the invention provides a kind of micro objective, high-NA (NA) can be realized, to meet the needs in current each field.
In order to solve the problem, the technical solution adopted in the present invention is as follows:
A kind of micro objective, comprise 14 spherical lenses that same optical axis is arranged, be arranged in order from object space to image space, the first lens, the second lens and the 3rd lens combination are the first balsaming lens group, and wherein the first lens face is plane to object space, are convex surface towards image space; Second lens face is concave surface to object space, is convex surface towards image space; 3rd lens face is concave surface to object space, is convex surface towards image space; The convex surface of described first lens and the concave surface of the second lens, the convex surface of the second lens and the concave glue of the 3rd lens are combined; 4th lens face is concave surface to object space, is convex surface towards image space; 5th lens face is convex surface to object space, is convex surface towards image space; 6th lens and the 7th lens combination are the second balsaming lens group, and wherein the 6th lens face is convex surface to object space, are concave surface towards image space; 7th lens face is convex surface to object space, is convex surface towards image space; The concave surface of described 6th lens and the convex surface of the 7th lens glued together; 8th lens and the 9th lens combination are the 3rd balsaming lens group, and wherein the 8th lens face is convex surface to object space, are concave surface towards image space; 9th lens face is convex surface to object space, is convex surface towards image space; The concave surface of described 8th lens and the convex surface of the 9th lens glued together; Tenth lens and the 11 lens combination are the 4th balsaming lens group, and wherein the tenth lens face is convex surface to object space, are plane towards image space; 11 lens face is plane to object space, is concave surface towards image space; The plane of described tenth lens and the plane of the 11 lens glued together; 12 lens face is concave surface to object space, is concave surface towards image space; 13 lens and the 14 lens combination are the 5th balsaming lens group, and wherein the 13 lens face is convex surface to object space, are convex surface towards image space; 14 lens face is concave surface to object space, is concave surface towards image space; The described convex surface of the 13 lens and the concave glue of the 14 lens are combined.
Above-mentioned 14 lens have 22 minute surfaces, first lens face is the first minute surface to the plane of object space, the cemented surface of the first lens and the second lens is the second minute surface, the cemented surface of the second lens and the 3rd lens is the 3rd minute surface, 3rd lens face is the 4th minute surface to the convex surface of image space, the concave surface of the 4th lens is the 5th minute surface, the convex surface of the 4th lens is the 6th minute surface, 5th lens face is the 7th minute surface to the convex surface of object space, 5th lens face is the 8th minute surface to the convex surface of image space, 6th lens face is the 9th minute surface to the convex surface of object space, the cemented surface of the 6th lens and the 7th lens is the tenth minute surface, 7th lens face is the 11 minute surface to the convex surface of image space, 8th lens face is the 12 minute surface to the convex surface of object space, the cemented surface of the 8th lens and the 9th lens is the 13 minute surface, 9th lens face is the 14 minute surface to the convex surface of image space, tenth lens face is the 15 minute surface to the convex surface of object space, the cemented surface of the tenth lens and the 11 lens is the 16 minute surface, 11 lens face is the 17 minute surface to the concave surface of image space, 12 lens face is the 18 minute surface to the concave surface of object space, 12 lens face is the 19 minute surface to the concave surface of image space, 13 lens face is the 20 minute surface to the convex surface of object space, the cemented surface of the 13 lens and the 14 lens is the 21 minute surface, 14 lens face is the 22 minute surface to the concave surface of image space, the structural parameters of 22 minute surfaces see the following form:
The structural parameters of table 1 22 minute surfaces
Wherein R1 is the radius-of-curvature of the first minute surface; D1 is the minute surface distance of the first minute surface; ψ 1 is effective clear aperature of the first minute surface, the implication of R2-R22, D2-D22 and ψ 2-ψ 22 the like, nd/vd is the refractive index/Abbe number of lens.
Preferably, described first lens, the balsaming lens group defocus distance 9.91mm of the second lens and the 3rd lens combination, the focal length of the 4th lens is 30.97mm, the focal length of the 5th lens is 28.23mm, the balsaming lens group focal length of the 6th lens and the 7th lens combination is 39.49mm, the balsaming lens group focal length of the 8th lens and the 9th lens combination is 137.25mm, the balsaming lens group focal length of the tenth lens and the 11 lens combination is 42.95mm, the focal length of the 12 lens is-5.63mm, the balsaming lens group focal length of the 13 lens and the 14 lens combination is 27.87mm.
Compared to prior art, beneficial effect of the present invention is:
(1) micro objective of the present invention, all adopts spheric glass, processes with characterization processes completely compatible, low cost of manufacture with existing optical mirror slip;
(2) can increase substantially the numerical aperture (NA) of micro objective under the structural parameters of 22 minute surface minute surfaces that the present invention provides, numerical aperture (NA) can reach 1.4;
(3) structure of the present invention is simple, reasonable in design, is easy to manufacture.
Accompanying drawing explanation
Fig. 1 is the structural representation of micro objective of the present invention;
Fig. 2 is under ZEMAX software simulation goes out embodiments of the invention 1 parameter, the parameter list of the visual field of micro objective;
Fig. 3 is that ZEMAX software simulation goes out under Fig. 2 numerical aperture (NA) imposes a condition, micro objective image quality design sketch.Wherein scheming (a) is optical path difference, and its horizontal ordinate is normalization aperture, and ordinate is the optical path difference of the reference chief ray in units of wave number; Figure (b) is for monochromatic based on the encircled energy of diffraction, and its horizontal ordinate is the radius of diffraction pattern, and ordinate is the number percent that energy in current radius accounts for gross energy; Figure (c) is polychromatic light optical transfer function, and its horizontal ordinate is spatial frequency, and ordinate is transfer function values; Figure (d) is ripple difference, and it is the optical path difference between actual corrugated and reference sphere.
Embodiment
Describe the present invention below in conjunction with concrete accompanying drawing.
Embodiment 1
As shown in Figure 1, the first lens L1, the second lens L2 and the 3rd lens L3 are combined as balsaming lens group, and wherein the first lens L1 is plane towards object space, are convex surface towards image space; Second lens L2 is concave surface towards object space, is convex surface towards image space; 3rd lens L3 is concave surface towards object space, be convex surface towards image space, first lens L1 is combined towards the convex surface of image space and the second lens L2 towards the concave glue of object space, and the second lens L2 is combined towards the convex surface of image space and the 3rd lens L3 towards the concave glue of object space; 4th lens L4 is concave surface towards object space, is convex surface towards image space; 5th lens L5 is convex surface towards object space, is convex surface towards image space; 6th lens L6 and the 7th lens L7 is combined as balsaming lens group, and wherein the 6th lens L6 is convex surface towards object space, is concave surface towards image space; 7th lens L7 is convex surface towards object space, is convex surface towards image space, the 6th lens L6 towards the concave surface of image space and the 7th lens L7 glued together towards the convex surface of object space; 8th lens L8 and the 9th lens L9 is combined as balsaming lens group, and wherein the 8th lens L8 is convex surface towards object space, is concave surface towards image space; 9th lens L9 is convex surface towards object space, is convex surface towards image space, the 8th lens L8 towards the concave surface of image space and the 9th lens L9 glued together towards the convex surface of object space; Tenth lens L10 and the 11 lens L11 is combined as balsaming lens group, and wherein the tenth lens L10 is convex surface towards object space, is plane towards image space; 11 lens L11 is plane towards object space, is concave surface towards image space, the tenth lens L10 towards the plane of image space and the 11 lens L11 glued together towards the plane of object space; 12 lens L12 is concave surface towards object space, is concave surface towards image space; 13 lens L13 and the 14 lens L14 is combined as balsaming lens group, and wherein the 13 lens L13 is convex surface towards object space, is convex surface towards image space; 14 lens L14 is concave surface towards object space, is concave surface towards image space, and the 13 lens L13 is combined towards the convex surface of image space and the 14 lens L14 towards the concave glue of object space.
The structural parameters of 22 minute surfaces of 14 lens formations are:
The structural parameters of 22 minute surfaces in table 2 embodiment 1
The balsaming lens group defocus distance 9.91mm of the first lens, the second lens and the 3rd lens combination, the focal length of the 4th lens is 30.97mm, the focal length of the 5th lens is 28.23mm, the balsaming lens group focal length of the 6th lens and the 7th lens combination is 39.49mm, the balsaming lens group focal length of the 8th lens and the 9th lens combination is 137.25mm, the balsaming lens group focal length of the tenth lens and the 11 lens combination is 42.95mm, the focal length of the 12 lens is-5.63mm, and the balsaming lens group focal length of the 13 lens and the 14 lens combination is 27.87mm.
Gone out the experimental result of above parameter by ZEMAX software simulation, as shown in Figure 2 and Figure 3, Fig. 2 is under ZEMAX software simulation goes out embodiments of the invention 1 parameter, the parameter list of the numerical aperture (NA) of micro objective.As can be seen from the parameter of Fig. 2, its numerical aperture (NA) is 1.4.Reach the numerical aperture (NA) significantly improving micro objective completely.
What (a) optical path difference in Fig. 3 was shown is under Large visual angle, the situation of dispersion, as can be seen from image, under different visual field, optical path difference relation under the pupil coordinate of its meridional component and sagitta of arc component, X, Y represent sagitta of arc component and meridional component respectively, and the maximum perpendicular ratio of image is ± 5.000 wavelength, , see figure from left to right from top to bottom, the first width image represents that visual field point is 0.0000mm, optical path difference curve map under the pupil coordinate of its meridional component and sagitta of arc component, and take abscissa axis as benchmark, it is 0.644 that each curve from the bottom to top represents wavelength respectively, 0.546, 0.436, the curve of 0.480, the second width image represents that visual field point is 0.0630mm, optical path difference curve map under the pupil coordinate of its meridional component and sagitta of arc component, and take abscissa axis as benchmark, it is 0.644 that each curve from the bottom to top represents wavelength respectively, 0.546, 0.436, the curve of 0.480, the 3rd width image represents that visual field point is 0.0880mm, and optical path difference curve map under the pupil coordinate of its meridional component and sagitta of arc component take abscissa axis as benchmark, and it is 0.644 that each curve from the bottom to top represents wavelength respectively, 0.546, 0.436, the curve of 0.480, the 4th width image represents that visual field point is 0.1080mm, and optical path difference curve map under the pupil coordinate of its meridional component and sagitta of arc component take abscissa axis as benchmark, and it is 0.644 that each curve from the bottom to top represents wavelength respectively, 0.546, 0.436, the curve of 0.480, the 5th width image represents that visual field point is 0.1250mm, and optical path difference curve map under the pupil coordinate of its meridional component and sagitta of arc component take abscissa axis as benchmark, and it is 0.644 that each curve from the bottom to top represents wavelength respectively, 0.546, 0.436, the curve of 0.480.Curve wherein in every secondary curve map is the closer to abscissa axis, and its optical path difference is better, and the dispersion that can be embodied whole visual field by image is better.
What (b) in Fig. 3 monochromatic encircled energy based on diffraction was shown is under Large visual angle, as can be seen from image, make a datum line, each curve is crossing with datum line from the bottom to top, its every bar curve represents that visual field point is 0.1250mm respectively, 0.1080mm, 0.0880mm, 0.0630mm, during 0.0000mm, relation between the energy percentage of visual field and spot radius, wherein go up most the relation that a curve is ideally energy percentage and spot radius, other curves therewith between ideal curve gap the smaller the better, the good capability set moderate in whole visual field can be embodied from image.
What (c) polychromatic light optical transfer function in Fig. 3 was shown is under Large visual angle, and as can be seen from image, in image, T is meridional component, and S is sagitta of arc component, make a datum line, each curve is crossing with datum line from the bottom to top, its Article 1 curve represents that visual field point is the transport function of the meridional component of 0.1250mm, Article 2 curve represents that visual field point is the transport function of the meridional component of 0.1080mm, Article 3 curve represents that visual field point is the transport function of the meridional component of 0.0880mm, Article 4 curve represents that visual field point is the transport function of the sagitta of arc component of 0.1250mm, Article 5 curve represents that visual field point is the transport function of the sagitta of arc component of 0.1080mm, Article 6 curve represents that visual field point is the transport function of the meridional component of 0.0630mm, Article 7 curve represents that visual field point is the transport function of the sagitta of arc component of 0.0880mm, Article 8 curve represents that visual field point is the transport function of the sagitta of arc component of 0.0630mm, Article 9 curve represents that visual field point is the transport function of the meridional component of 0.0000mm and the transport function of sagitta of arc component.Wherein Article 10 curve is transfer curve ideally, and other curves therewith ideal curve are better close to expression performance, can find out that its contrast of whole visual field is very good by image.
What (d) ripple difference in Fig. 3 was shown is under Large visual angle, and ripple difference and theoretical value are close to perfect.
Embodiment 2
With embodiment 1, difference is the structural parameters of 22 minute surfaces, specifically sees the following form:
The structural parameters of 22 minute surfaces in table 3 embodiment 2
It is 1.4 that its experimental result reaches numerical aperture (NA) equally, reaches the effect of the numerical aperture (NA) significantly improving micro objective completely.
Embodiment 3
With embodiment 1, difference is the structural parameters of 22 minute surfaces, specifically sees the following form:
The structural parameters of 22 minute surfaces in table 4 embodiment 3
It is 1.4 that its experimental result reaches numerical aperture (NA) equally, reaches the effect of the numerical aperture (NA) significantly improving micro objective completely.

Claims (5)

1. a micro objective, comprise 14 spherical lenses that same optical axis is arranged, be arranged in order from object space to image space, it is characterized in that: the first lens (L1), the second lens (L2) and the 3rd lens (L3) are combined as the first balsaming lens group, wherein the first lens (L1) are plane towards object space, are convex surface towards image space; Second lens (L2) are concave surface towards object space, are convex surface towards image space; 3rd lens (L3) are concave surface towards object space, are convex surface towards image space; The convex surface of described first lens (L1) and the concave surface of the second lens (L2), the convex surface of the second lens (L2) and the concave glue of the 3rd lens (L3) are combined;
4th lens (L4) are concave surface towards object space, are convex surface towards image space; 5th lens (L5) are convex surface towards object space, are convex surface towards image space;
6th lens (L6) and the 7th lens (L7) are combined as the second balsaming lens group, and wherein the 6th lens (L6) are convex surface towards object space, are concave surface towards image space; 7th lens (L7) are convex surface towards object space, are convex surface towards image space; The concave surface of described 6th lens (L6) and the convex surface of the 7th lens (L7) glued together;
8th lens (L8) and the 9th lens (L9) are combined as the 3rd balsaming lens group, and wherein the 8th lens (L8) are convex surface towards object space, are concave surface towards image space; 9th lens (L9) are convex surface towards object space, are convex surface towards image space; The concave surface of described 8th lens (L8) and the convex surface of the 9th lens (L9) glued together;
Tenth lens (L10) and the 11 lens (L11) are combined as the 4th balsaming lens group, and wherein the tenth lens (L10) are convex surface towards object space, are plane towards image space; 11 lens (L11) are plane towards object space, are concave surface towards image space; The plane of described tenth lens (L10) and the plane of the 11 lens (L11) glued together;
12 lens (L12) are concave surface towards object space, are concave surface towards image space;
13 lens (L13) and the 14 lens (L14) are combined as the 5th balsaming lens group, and wherein the 13 lens (L13) are convex surface towards object space, are convex surface towards image space; 14 lens (L14) are concave surface towards object space, are concave surface towards image space; The described convex surface of the 13 lens (L13) and the concave glue of the 14 lens (L14) are combined.
2. a kind of micro objective according to claim 1, it is characterized in that, described 14 lens have 22 minute surfaces, wherein the first lens (L1) are the first minute surface towards the plane of object space, the cemented surface of the first lens (L1) and the second lens (L2) is the second minute surface, the cemented surface of the second lens (L2) and the 3rd lens (L3) is the 3rd minute surface, 3rd lens (L3) are the 4th minute surface towards the convex surface of image space, the concave surface of the 4th lens (L4) is the 5th minute surface, the convex surface of the 4th lens (L4) is the 6th minute surface, 5th lens (L5) are the 7th minute surface towards the convex surface of object space, 5th lens (L5) are the 8th minute surface towards the convex surface of image space, 6th lens (L6) are the 9th minute surface towards the convex surface of object space, the cemented surface of the 6th lens (L6) and the 7th lens (L7) is the tenth minute surface, 7th lens (L7) are the 11 minute surface towards the convex surface of image space, 8th lens (L8) are the 12 minute surface towards the convex surface of object space, the cemented surface of the 8th lens (L8) and the 9th lens (L9) is the 13 minute surface, 9th lens (L9) are the 14 minute surface towards the convex surface of image space, tenth lens (L10) are the 15 minute surface towards the convex surface of object space, the cemented surface of the tenth lens (L10) and the 11 lens (L11) is the 16 minute surface, 11 lens (L11) are the 17 minute surface towards the concave surface of image space, 12 lens (L12) are the 18 minute surface towards the concave surface of object space, 12 lens (L12) are the 19 minute surface towards the concave surface of image space, 13 lens (L13) are the 20 minute surface towards the convex surface of object space, the cemented surface of the 13 lens (L13) and the 14 lens (L14) is the 21 minute surface, 14 lens (L14) are the 22 minute surface towards the concave surface of image space, the structural parameters of 22 minute surfaces are:
First minute surface is R1=∞, D1=0.475 ~ 0.513mm, ψ 1=0.727 ~ 0.780mm;
Second minute surface is R2=-1.337 ~-1.263mm, D2=2.765 ~ 2.860mm, ψ 2=0.923 ~ 0.982mm;
3rd minute surface is R3=-2.780 ~-2.639mm, D3=2.057 ~ 2.130mm, ψ 3=2.621 ~ 2.740mm;
4th minute surface is R4=-4.178 ~-4.009mm, D4=0.113 ~ 0.121mm, ψ 4=4.003 ~ 4.133mm;
5th minute surface is R5=-14.112 ~-13.687mm, D5=3.925 ~ 4.061mm, ψ 5=6.031 ~ 6.212mm;
6th minute surface is R6=-7.658 ~-7.351mm, D6=0.113 ~ 0.121mm, ψ 6=6.725 ~ 6.901mm;
7th minute surface is R7=33.359 ~ 34.037mm, D7=4.935 ~ 5.050mm, ψ 7=8.962 ~ 9.161mm;
8th minute surface is R8=-19.209 ~-18.635mm, D8=0.135 ~ 0.151mm, ψ 8=9.187 ~ 9.375mm;
9th minute surface is R9=26.143 ~ 26.675mm, D9=1.171 ~ 1.218mm, ψ 9=9.185 ~ 9.373mm;
Tenth minute surface is R10=12.152 ~ 12.529mm, D10=7.943 ~ 8.040mm, ψ 10=8.621 ~ 8.810mm;
11 minute surface is R11=-15.015 ~-14.560mm, D11=0.183 ~ 0.206mm, ψ 11=8.753 ~ 8.935mm;
12 minute surface is R12=17.726 ~ 18.272mm, D12=1.271 ~ 1.320mm, ψ 12=7.685 ~ 7.850mm;
13 minute surface is R13=7.922 ~ 8.335mm, D13=4.913 ~ 5.075mm, ψ 13=6.625 ~ 6.831mm;
14 minute surface is R14=-42.403 ~-41.555mm, D14=0.183 ~ 0.206mm, ψ 14=6.553 ~ 6.769mm;
15 minute surface is R15=5.808 ~ 6.111mm, D15=4.715 ~ 4.870mm, ψ 15=5.651 ~ 5.832mm;
16 minute surface is R16=∞, D16=1.059 ~ 1.121mm, ψ 16=5.362 ~ 5.530mm;
17 minute surface is R17=12.089 ~ 12.591mm, D17=2.937 ~ 3.045mm, ψ 17=4.415 ~ 4.541mm;
18 minute surface is R18=-18.947 ~-18.385mm, D18=0.972 ~ 1.020mm, ψ 18=3.259 ~ 3.375mm;
19 minute surface is R19=4.639 ~ 4.880mm, D19=0.972 ~ 1.020mm, ψ 19=2.775 ~ 2.895mm;
20 minute surface is R20=9.748 ~ 10.250mm, D20=3.727 ~ 3.855mm, ψ 20=2.858 ~ 2.980mm;
21 minute surface is R21=-4.841 ~-4.598mm, D21=0.972 ~ 1.020mm, ψ 21=2.707 ~ 2.820mm;
22 minute surface is R22=7.095 ~ 7.395mm, D22=147.389 ~ 149.076mm, ψ 22=2.422 ~ 2.531mm; Wherein R is radius-of-curvature, and D is minute surface distance, and ψ is effective clear aperature.
3. a kind of micro objective according to claim 1 and 2, it is characterized in that: described first lens, the balsaming lens group defocus distance 9.91mm of the second lens and the 3rd lens combination, the focal length of the 4th lens is 30.97mm, the focal length of the 5th lens is 28.23mm, the balsaming lens group focal length of the 6th lens and the 7th lens combination is 39.49mm, the balsaming lens group focal length of the 8th lens and the 9th lens combination is 137.25mm, the balsaming lens group focal length of the tenth lens and the 11 lens combination is 42.95mm, the focal length of the 12 lens is-5.63mm, the balsaming lens group focal length of the 13 lens and the 14 lens combination is 27.87mm.
4. a kind of micro objective according to claim 1 and 2, it is characterized in that: the refractive index/Abbe number of described first lens is 1.51680/64.17, refractive index/the Abbe number of the second lens is 1.91761/21.51, refractive index/Abbe number the 1.78800/47.49 of the 3rd lens, refractive index/the Abbe number of the 4th lens is 1.43335/94.52, refractive index/the Abbe number of the 5th lens is 1.43335/94.52, refractive index/the Abbe number of the 6th lens is 1.91761/21.51, refractive index/the Abbe number of the 7th lens is 1.43335/94.52, refractive index/the Abbe number of the 8th lens is 1.85544/36.59, refractive index/the Abbe number of the 9th lens is 1.43335/94.52, refractive index/the Abbe number of the tenth lens is 1.43335/94.52, refractive index/the Abbe number of the 11 lens is 1.85544/36.59, refractive index/the Abbe number of the 12 lens is 1.74400/44.90, refractive index/the Abbe number of the 13 lens is 1.91761/21.51, refractive index/the Abbe number of the 14 lens is 1.78800/47.49.
5. a kind of micro objective according to claim 1 and 2, is characterized in that: described micro objective maximum numerical aperture is 1.4.
CN201420638896.1U 2014-10-29 2014-10-29 A kind of micro objective Withdrawn - After Issue CN204116702U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420638896.1U CN204116702U (en) 2014-10-29 2014-10-29 A kind of micro objective

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420638896.1U CN204116702U (en) 2014-10-29 2014-10-29 A kind of micro objective

Publications (1)

Publication Number Publication Date
CN204116702U true CN204116702U (en) 2015-01-21

Family

ID=52333995

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420638896.1U Withdrawn - After Issue CN204116702U (en) 2014-10-29 2014-10-29 A kind of micro objective

Country Status (1)

Country Link
CN (1) CN204116702U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104280869A (en) * 2014-10-29 2015-01-14 南京恒磊光学技术研究有限公司 Microscope objective lens
CN110045492A (en) * 2019-04-26 2019-07-23 中国科学院长春光学精密机械与物理研究所 The microcobjective optical system of wide spectrum large-numerical aperture ultra-high throughput
WO2022165774A1 (en) * 2021-02-05 2022-08-11 长春长光华大智造测序设备有限公司 Optical system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104280869A (en) * 2014-10-29 2015-01-14 南京恒磊光学技术研究有限公司 Microscope objective lens
CN104280869B (en) * 2014-10-29 2016-08-17 南京恒磊光学技术研究有限公司 A kind of microscope objective
CN110045492A (en) * 2019-04-26 2019-07-23 中国科学院长春光学精密机械与物理研究所 The microcobjective optical system of wide spectrum large-numerical aperture ultra-high throughput
CN110045492B (en) * 2019-04-26 2024-03-15 中国科学院长春光学精密机械与物理研究所 Wide-spectrum large-numerical aperture ultrahigh-flux micro-objective optical system
WO2022165774A1 (en) * 2021-02-05 2022-08-11 长春长光华大智造测序设备有限公司 Optical system

Similar Documents

Publication Publication Date Title
CN204116702U (en) A kind of micro objective
GB2257266A (en) High zoom-ratio zoom lens system for use in a compact camera
CN207833090U (en) A kind of wide-angle machine visual lens
CN104280870B (en) A kind of microscope objective
CN107765416B (en) A kind of micro objective
CN104280869A (en) Microscope objective lens
CN108873288B (en) Microscope objective and microscope comprising same
CN109061861A (en) A kind of micro objective of no hemispherical
CN204116707U (en) A kind of micro objective
CN104267490A (en) Microscope objective
CN104297913A (en) Microscope objective lens
CN210376855U (en) Zoom projection lens for 0.47DMD chip
CN204116704U (en) A kind of micro objective
CN204116699U (en) A kind of micro objective
CN204116703U (en) A kind of micro objective
CN207380323U (en) Short focus high definition projection lens
CN104267491A (en) Microscope objective
CN207198445U (en) High zoom high definition is big as circle zoom projection lens
CN104280867B (en) A kind of microscope objective
CN205844614U (en) A kind of large-numerical aperture, the microscope objective of long reach
JPH10170825A (en) Compact zoom lens
CN204116701U (en) A kind of micro objective
WO2023056679A1 (en) Large-field of view, high-resolution broadband objective lens
CN204116705U (en) A kind of micro objective
CN204116706U (en) A kind of micro objective

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20150121

Effective date of abandoning: 20160817

C25 Abandonment of patent right or utility model to avoid double patenting