CN104280869B - A kind of microscope objective - Google Patents

A kind of microscope objective Download PDF

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Publication number
CN104280869B
CN104280869B CN201410599024.3A CN201410599024A CN104280869B CN 104280869 B CN104280869 B CN 104280869B CN 201410599024 A CN201410599024 A CN 201410599024A CN 104280869 B CN104280869 B CN 104280869B
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lens
minute surface
minute
towards
thing side
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CN104280869A (en
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文里云
迪米特
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NANJING HENGLEI OPTICAL TECHNOLOGY RESEARCH Co Ltd
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NANJING HENGLEI OPTICAL TECHNOLOGY RESEARCH Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/02Objectives

Abstract

The invention discloses a kind of microscope objective, belong to optical field.It includes 14 spherical glass lens that same optical axis is arranged, and be arranged in order to image space from thing side, wherein first, second, third lens are balsaming lens group, six, the 7th lens are balsaming lens group, eight, the 9th lens are balsaming lens group, ten, the 11st lens are balsaming lens group, the 13rd, the 14th lens be balsaming lens group.By selecting suitable lens arrangement parameter, the microscope objective of the present invention can realize the imaging of high resolution, has the features such as numerical aperture is big, resolution is high, volume is little, processing technique is ripe, low cost.

Description

A kind of microscope objective
Technical field
The invention belongs to optical field, more particularly, it relates to a kind of microscope objective.
Background technology
Microscope has become the requisite high technology equipment of a lot of industry research, extensively should in some accurate miniature fields With, in medical treatment and scientific research etc., there is irreplaceable effect especially.
Numerical aperture (NA) and other each optical parametric microscopical have substantial connection, it is generally desirable to it the biggest more Good, the size therefore improving numerical aperture (NA) is also the demand of development in science and technology;The most existing all kinds of microscope objectives, But the numerical aperture (NA) that technically can reach at present is generally kept in about 0.65, it is possible to reach more large-numerical aperture (NA) Also only have minority;Along with the development of science and technology, the most a lot of fields start the microscope objective to more large-numerical aperture (NA) to be needed Asking increase, the numerical aperture (NA) therefore improving microscope objective has the meaning of necessity.
The Chinese patent of Application No. CN201280008900.X discloses a kind of object lens and optical take-up apparatus, wherein said Object lens for optical take-up apparatus, described optical take-up apparatus at least has the of injection first wave length λ 1 (390nm < λ 1 < 420nm) First light source of one light beam and object lens, by described object lens by first of described first wave length λ 1 from described first light source injection Beam condenser, on the information recording surface of the first CD, thus carries out record and/or the regeneration of information, and described object lens have: the One optical surface, it is formed at described first light source side;Second optical surface, it is formed towards described first optical surface, and curvature Radius is more than described first optical surface;End face, its be positioned at when optical axis direction is observed outside described second optical surface and with light The plane that axle is substantially vertical, the image side numerical aperture (NA) of described object lens is more than 0.7, less than 0.9.Although for existing skill Its numerical aperture of art increases, but its numerical aperture still can not meet the demand in some fields, is simultaneously fabricated into high.
The Chinese patent of Application No. CN201410076527.2 discloses the i-line of a kind of big visual field high-NA Projection lens of lithography machine, this object lens conjugate distance L=1500mm, eyeglass is divided into four groups of independent design integrated optimizations again.Although with Doubly telecentric, 25 4 groups of structures, which use 5 low order aspheric surfaces to balance aberration, but the image space available field of view of object lens be 132 × 132mm, image-side numerical aperture is 0.17.
Summary of the invention
For the multi-field microscope objective demand to more large-numerical aperture (NA), the present invention provides a kind of microscope thing Mirror, can realize high-NA (NA), to meet the needs in current each field.
In order to solve the problems referred to above, the technical solution adopted in the present invention is as follows:
A kind of microscope objective, 14 spherical lenss arranged including same optical axis, it is arranged in order to image space from thing side, the One lens, the second lens and the 3rd lens combination are the first balsaming lens group, and wherein the first lens are plane towards thing side, towards Image space is convex surface;Second lens are concave surface towards thing side, are convex surface towards image space;3rd lens are concave surface towards thing side, towards Image space is convex surface;The convex surface of described first lens and the concave surface of the second lens, the convex surface of the second lens and the concave surface of the 3rd lens Glued together;4th lens are concave surface towards thing side, are convex surface towards image space;5th lens are convex surface towards thing side, towards Image space is convex surface;6th lens and the 7th lens combination are the second balsaming lens group, and wherein the 6th lens are convex surface towards thing side, It is concave surface towards image space;7th lens are convex surface towards thing side, are convex surface towards image space;The concave surface and the 7th of described 6th lens The convex surface of lens is glued together;8th lens and the 9th lens combination are the 3rd balsaming lens group, wherein the 8th lens towards Thing side is convex surface, is concave surface towards image space;9th lens are convex surface towards thing side, are convex surface towards image space;Described 8th lens Concave surface and the convex surface of the 9th lens glued together;Tenth lens and the 11st lens combination are the 4th balsaming lens group, its In the tenth lens be convex surface towards thing side, be plane towards image space;11st lens are plane towards thing side, are recessed towards image space Face;The plane of described tenth lens is glued together with the plane of the 11st lens;12nd lens are concave surface towards thing side, face It is concave surface to image space;13rd lens and the 14th lens combination are the 5th balsaming lens group, and wherein the 13rd lens are towards thing Side is convex surface, is convex surface towards image space;14th lens are concave surface towards thing side, are concave surface towards image space;Described 13rd saturating The convex surface of mirror and the concave glue of the 14th lens are combined.
Above-mentioned 14 lens have 22 minute surfaces, and the first lens are the first minute surface towards the plane of thing side, and first The cemented surface of lens and the second lens is the second minute surface, and the cemented surface of the second lens and the 3rd lens is the 3rd minute surface, and the 3rd is saturating Minute surface is the 4th minute surface to the convex surface of image space, and the concave surface of the 4th lens is the 5th minute surface, and the convex surface of the 4th lens is the 6th minute surface, 5th lens are the 7th minute surface towards the convex surface of thing side, and the 5th lens are the 8th minute surface towards the convex surface of image space, the 6th lens face Being the 9th minute surface to the convex surface of thing side, the cemented surface of the 6th lens and the 7th lens is the tenth minute surface, and the 7th lens are towards image space Convex surface be the 11st minute surface, the 8th lens are the 12nd minute surface towards the convex surface of thing side, the 8th lens and the glue of the 9th lens Conjunction face is the 13rd minute surface, and the 9th lens are the 14th minute surface towards the convex surface of image space, and the tenth lens towards the convex surface of thing side are 15th minute surface, the cemented surface of the tenth lens and the 11st lens is the 16th minute surface, and the 11st lens are towards the concave surface of image space Being the 17th minute surface, the 12nd lens are the 18th minute surface towards the concave surface of thing side, and the 12nd lens towards the concave surface of image space are 19th minute surface, the 13rd lens are the 20th minute surface towards the convex surface of thing side, the 13rd lens and the gluing of the 14th lens Face is the 21st minute surface, and the 14th lens are the 22nd minute surface towards the concave surface of image space;The structure ginseng of 22 minute surfaces Number see table:
The structural parameters of 1 two ten two minute surfaces of table
Wherein R1 is the radius of curvature of the first minute surface;D1 is the minute surface distance of the first minute surface;ψ 1 is the effective of the first minute surface Clear aperature, the implication of R2-R22, D2-D22 and ψ 2-ψ 22 the like, nd/vd is the refractive index/Abbe number of lens.
Preferably, the balsaming lens group defocus distance 9.91mm of described first lens, the second lens and the 3rd lens combination, the The focal length of four lens is 30.97mm, and the focal length of the 5th lens is 28.23mm, and the gluing of the 6th lens and the 7th lens combination is thoroughly Mirror group focal length is 39.49mm, and the balsaming lens group focal length of the 8th lens and the 9th lens combination is 137.25mm, the tenth lens with The balsaming lens group focal length of the 11st lens combination is 42.95mm, and the focal length of the 12nd lens is-5.63mm, the 13rd lens It is 27.87mm with the balsaming lens group focal length of the 14th lens combination.
Compared to prior art, the invention have the benefit that
(1) microscope objective of the present invention, all uses spherical lens, complete with characterization processes with the processing of existing optical glass Complete compatible, low cost of manufacture;
(2) microscope objective can be increased substantially under the structural parameters of 22 minute surface minute surfaces that the present invention provides Numerical aperture (NA), numerical aperture (NA) can reach 1.4;
(3) present configuration is simple, reasonable in design, it is easy to manufacture.
Accompanying drawing explanation
Fig. 1 is the structural representation of the microscope objective of the present invention;
Fig. 2 is that ZEMAX software simulates under embodiments of the invention 1 parameter, the parameter list of the visual field of microscope objective;
Fig. 3 is that ZEMAX software simulates under Fig. 2 numerical aperture (NA) imposes a condition, and microscope objective image quality is imitated Fruit figure.Wherein figure (a) is optical path difference, and its abscissa is normalization aperture, and vertical coordinate is the reference chief ray in units of wave number Optical path difference;Figure (b) is monochromatic encircled energy based on diffraction, and its abscissa is the radius of diffraction pattern, vertical coordinate The percentage ratio of gross energy is accounted for for the energy in current radius;Figure (c) is polychromatic light optical transfer function, and its abscissa is space frequency Rate, vertical coordinate is transfer function values;Figure (d) is ripple difference, and it is the optical path difference between actual corrugated and reference sphere.
Detailed description of the invention
Describe the present invention below in conjunction with concrete accompanying drawing.
Embodiment 1
As it is shown in figure 1, the first lens L1, the second lens L2 and the 3rd lens L3 are combined as balsaming lens group, wherein first Lens L1 is plane towards thing side, is convex surface towards image space;Second lens L2 is concave surface towards thing side, is convex surface towards image space; 3rd lens L3 is concave surface towards thing side, is convex surface towards image space, and the first lens L1 is towards the convex surface of image space and the second lens L2 Concave glue towards thing side is combined, and the second lens L2 is towards the convex surface of image space and the 3rd lens L3 towards the concave glue of thing side It is combined;4th lens L4 is concave surface towards thing side, is convex surface towards image space;5th lens L5 is convex surface towards thing side, face It is convex surface to image space;6th lens L6 and the 7th lens L7 is combined as balsaming lens group, and wherein the 6th lens L6 towards thing side is Convex surface, is concave surface towards image space;7th lens L7 is convex surface towards thing side, is convex surface towards image space, and the 6th lens L6 is towards picture Concave surface and the 7th lens L7 of side are glued together towards the convex surface of thing side;8th lens L8 and the 9th lens L9 is combined as gluing Battery of lens, wherein the 8th lens L8 is convex surface towards thing side, is concave surface towards image space;9th lens L9 is convex surface towards thing side, Being convex surface towards image space, the 8th lens L8 is glued together towards the convex surface of thing side towards concave surface and the 9th lens L9 of image space; Tenth lens L10 and the 11st lens L11 is combined as balsaming lens group, and wherein the tenth lens L10 is convex surface towards thing side, towards Image space is plane;11st lens L11 is plane towards thing side, is concave surface towards image space, the tenth lens L10 putting down towards image space Face is glued together towards the plane of thing side with the 11st lens L11;12nd lens L12 is concave surface towards thing side, towards picture Side is concave surface;13rd lens L13 and the 14th lens L14 is combined as balsaming lens group, and wherein the 13rd lens L13 is towards thing Side is convex surface, is convex surface towards image space;14th lens L14 is concave surface towards thing side, is concave surface towards image space, the 13rd lens L13 is combined towards the convex surface of image space and the 14th lens L14 towards the concave glue of thing side.
The structural parameters of 22 minute surfaces of 14 lens compositions are:
The structural parameters of 22 minute surfaces in table 2 embodiment 1
The balsaming lens group defocus distance 9.91mm of the first lens, the second lens and the 3rd lens combination, Jiao of the 4th lens Away from for 30.97mm, the focal length of the 5th lens is 28.23mm, and the balsaming lens group focal length of the 6th lens and the 7th lens combination is 39.49mm, the balsaming lens group focal length of the 8th lens and the 9th lens combination is 137.25mm, the tenth lens and the 11st lens The balsaming lens group focal length of combination is 42.95mm, and the focal length of the 12nd lens is-5.63mm, the 13rd lens and the 14th saturating The balsaming lens group focal length of mirror combination is 27.87mm.
Simulated the experimental result of above parameter by ZEMAX software, as shown in Figure 2 and Figure 3, Fig. 2 is ZEMAX software mould Draw up under embodiments of the invention 1 parameter, the parameter list of the numerical aperture (NA) of microscope objective.Can be seen by the parameter of Fig. 2 Going out, its numerical aperture (NA) is 1.4.It is fully achieved the numerical aperture (NA) that microscope objective is greatly improved.
What (a) optical path difference in Fig. 3 was shown is under big visual field, the situation of dispersion;By image it can be seen that in difference Under visual field, optical path difference relation under the pupil coordinate of its meridional component and sagitta of arc component, X, Y represent that sagitta of arc component and meridian divide respectively Amount, the maximum perpendicular ratio of image is ± 5.000 wavelength;From top to bottom, figure, the first width graphical representation visual field point are seen from left to right For 0.0000mm, optical path difference curve chart under the pupil coordinate of its meridional component and sagitta of arc component, on the basis of axis of abscissas, by under Supreme each curve represents the curve that wavelength is 0.644,0.546,0.436,0.480, the second width graphical representation visual field point respectively For 0.0630mm, optical path difference curve chart under the pupil coordinate of its meridional component and sagitta of arc component, on the basis of axis of abscissas, by under Supreme each curve represents the curve that wavelength is 0.644,0.546,0.436,0.480, the 3rd width graphical representation visual field point respectively For 0.0880mm, optical path difference curve chart under the pupil coordinate of its meridional component and sagitta of arc component, on the basis of axis of abscissas, by under Supreme each curve represents the curve that wavelength is 0.644,0.546,0.436,0.480, the 4th width graphical representation visual field point respectively For 0.1080mm, optical path difference curve chart under the pupil coordinate of its meridional component and sagitta of arc component, on the basis of axis of abscissas, by under Supreme each curve represents the curve that wavelength is 0.644,0.546,0.436,0.480, the 5th width graphical representation visual field point respectively For 0.1250mm, optical path difference curve chart under the pupil coordinate of its meridional component and sagitta of arc component, on the basis of axis of abscissas, by under Supreme each curve represents the curve that wavelength is 0.644,0.546,0.436,0.480 respectively.The wherein song in every secondary curve chart Line is the closer to axis of abscissas, and its optical path difference is the best, image the dispersion that can embody whole visual field is preferable.
What the monochromatic encircled energy based on diffraction of (b) in Fig. 3 was shown is under big visual field, can from image To find out, making a datum line, each curve intersects from the bottom to top with datum line, and its every curve represents that visual field point is respectively When 0.1250mm, 0.1080mm, 0.0880mm, 0.0630mm, 0.0000mm, between energy percentage and the spot radius of visual field Relation, go up most the relation that curve is ideally energy percentage and spot radius, other curves are managed with this Think that between curve, gap is the smaller the better, whole visual field preferable capability set moderate can be embodied from image.
What (c) polychromatic light optical transfer function in Fig. 3 was shown is under big visual field, it can be seen that scheme from image In Xiang, T is meridional component, and S is sagitta of arc component;Making a datum line, each curve intersects from the bottom to top with datum line, and its Article 1 is bent Line represents the transmission function of the meridional component that visual field point is 0.1250mm, and Article 2 curve represents that visual field point is the son of 0.1080mm The transmission function of noon component, Article 3 curve represents the transmission function of the meridional component that visual field point is 0.0880mm, and Article 4 is bent Line represents the transmission function of the sagitta of arc component that visual field point is 0.1250mm, and Article 5 curve represents that visual field point is the arc of 0.1080mm Vowing the transmission function of component, Article 6 curve represents the transmission function of the meridional component that visual field point is 0.0630mm, and Article 7 is bent Line represents the transmission function of the sagitta of arc component that visual field point is 0.0880mm, and Article 8 curve represents that visual field point is the arc of 0.0630mm Vowing the transmission function of component, Article 9 curve represents transmission function and the sagitta of arc component of the meridional component that visual field point is 0.0000mm Transmission function.Wherein Article 10 curve is transfer curve ideally, and other curves more connect with this ideal curve Nearly expression performance is the best, image can be seen that its contrast of whole visual field is the best.
What (d) ripple difference in Fig. 3 was shown is under big visual field, and ripple difference and theoretical value are close to perfect.
Embodiment 2
With embodiment 1, except that the structural parameters of 22 minute surfaces, it is specifically shown in following table:
The structural parameters of 22 minute surfaces in table 3 embodiment 2
It is 1.4 that its experimental result reaches numerical aperture (NA) equally, is fully achieved the numerical value that microscope objective is greatly improved The effect in aperture (NA).
Embodiment 3
With embodiment 1, except that the structural parameters of 22 minute surfaces, it is specifically shown in following table:
The structural parameters of 22 minute surfaces in table 4 embodiment 3
It is 1.4 that its experimental result reaches numerical aperture (NA) equally, is fully achieved the numerical value that microscope objective is greatly improved The effect in aperture (NA).

Claims (5)

1. a microscope objective, 14 spherical lenss arranged including same optical axis, it is arranged in order from thing side to image space, it is special Levy and be: the first lens (L1), the second lens (L2) and the 3rd lens (L3) are combined as the first balsaming lens group, and wherein first is saturating Mirror (L1) is plane towards thing side, is convex surface towards image space;Second lens (L2) are concave surface towards thing side, are convex towards image space Face;3rd lens (L3) are concave surface towards thing side, are convex surface towards image space;The convex surface of described first lens (L1) and the second lens (L2) concave glue of concave surface, the convex surface of the second lens (L2) and the 3rd lens (L3) is combined;
4th lens (L4) are concave surface towards thing side, are convex surface towards image space;5th lens (L5) are convex surface towards thing side, towards Image space is convex surface;
6th lens (L6) and the 7th lens (L7) are combined as the second balsaming lens group, and wherein the 6th lens (L6) towards thing side are Convex surface, is concave surface towards image space;7th lens (L7) are convex surface towards thing side, are convex surface towards image space;Described 6th lens (L6) concave surface and the 7th lens (L7) are glued together towards the convex surface of thing side;
8th lens (L8) and the 9th lens (L9) are combined as the 3rd balsaming lens group, and wherein the 8th lens (L8) towards thing side are Convex surface, is concave surface towards image space;9th lens (L9) are convex surface towards thing side, are convex surface towards image space;Described 8th lens (L8) concave surface and the 9th lens (L9) are glued together towards the convex surface of thing side;
Tenth lens (L10) and the 11st lens (L11) are combined as the 4th balsaming lens group, wherein the tenth lens (L10) towards Thing side is convex surface, is plane towards image space;11st lens (L11) are plane towards thing side, are concave surface towards image space;Described The plane of ten lens (L10) is glued together with the plane of the 11st lens (L11);
12nd lens (L12) are concave surface towards thing side, are concave surface towards image space;
13rd lens (L13) and the 14th lens (L14) are combined as the 5th balsaming lens group, wherein the 13rd lens (L13) It is convex surface towards thing side, is convex surface towards image space;14th lens (L14) are concave surface towards thing side, are concave surface towards image space;Institute State the 13rd lens (L13) to be combined towards the convex surface of image space and the 14th lens (L14) towards the concave glue of thing side.
A kind of microscope objective the most according to claim 1, it is characterised in that described 14 spherical lenss have 20 Two minute surfaces, wherein the first lens (L1) are the first minute surface towards the plane of thing side, the first lens (L1) and the second lens (L2) Cemented surface be the second minute surface, the cemented surface of the second lens (L2) and the 3rd lens (L3) is the 3rd minute surface, the 3rd lens (L3) Convex surface towards image space is the 4th minute surface, and the concave surface of the 4th lens (L4) is the 5th minute surface, and the convex surface of the 4th lens (L4) is Six minute surfaces, the 5th lens (L5) are the 7th minute surface towards the convex surface of thing side, and the 5th lens (L5) are the 8th towards the convex surface of image space Minute surface, the 6th lens (L6) are the 9th minute surface towards the convex surface of thing side, the 6th lens (L6) and the cemented surface of the 7th lens (L7) Being the tenth minute surface, the 7th lens (L7) are the 11st minute surface towards the convex surface of image space, and the 8th lens (L8) are towards the convex surface of thing side Being the 12nd minute surface, the cemented surface of the 8th lens (L8) and the 9th lens (L9) is the 13rd minute surface, the 9th lens (L9) towards The convex surface of image space is the 14th minute surface, and the tenth lens (L10) are the 15th minute surface towards the convex surface of thing side, the tenth lens (L10) Being the 16th minute surface with the cemented surface of the 11st lens (L11), the 11st lens (L11) are the 17th mirror towards the concave surface of image space Face, the 12nd lens (L12) are the 18th minute surface towards the concave surface of thing side, and the 12nd lens (L12) towards the concave surface of image space are 19th minute surface, the 13rd lens (L13) are the 20th minute surface towards the convex surface of thing side, the 13rd lens (L13) and the 14th The cemented surface of lens (L14) is the 21st minute surface, and the 14th lens (L14) are the 22nd minute surface towards the concave surface of image space; The structural parameters of 22 minute surfaces are:
First minute surface is R1=∞, D1=0.475~0.513mm, ψ 1=0.727~0.780mm;
Second minute surface is R2=-1.337~-1.263mm, D2=2.765~2.860mm, ψ 2=0.923~0.982mm;
3rd minute surface is R3=-2.780~-2.639mm, D3=2.057~2.130mm, ψ 3=2.621~2.740mm;
4th minute surface is R4=-4.178~-4.009mm, D4=0.113~0.121mm, ψ 4=4.003~4.133mm;
5th minute surface is R5=-14.112~-13.687mm, D5=3.925~4.061mm, ψ 5=6.031~6.212mm;
6th minute surface is R6=-7.658~-7.351mm, D6=0.113~0.121mm, ψ 6=6.725~6.901mm;
7th minute surface is R7=33.359~34.037mm, D7=4.935~5.050mm, ψ 7=8.962~9.161mm;
8th minute surface is R8=-19.209~-18.635mm, D8=0.135~0.151mm, ψ 8=9.187~9.375mm;
9th minute surface is R9=26.143~26.675mm, D9=1.171~1.218mm, ψ 9=9.185~9.373mm;
Tenth minute surface is R10=12.152~12.529mm, D10=7.943~8.040mm, ψ 10=8.621~8.810mm;
11st minute surface is R11=-15.015~-14.560mm, D11=0.183~0.206mm, ψ 11=8.753~ 8.935mm;
12nd minute surface is R12=17.726~18.272mm, D12=1.271~1.320mm, ψ 12=7.685~ 7.850mm;
13rd minute surface is R13=7.922~8.335mm, D13=4.913~5.075mm, ψ 13=6.625~6.831mm;
14th minute surface is R14=-42.403~-41.555mm, D14=0.183~0.206mm, ψ 14=6.553~ 6.769mm;
15th minute surface is R15=5.808~6.111mm, D15=4.715~4.870mm, ψ 15=5.651~5.832mm;
16th minute surface is R16=∞, D16=1.059~1.121mm, ψ 16=5.362~5.530mm;
17th minute surface is R17=12.089~12.591mm, D17=2.937~3.045mm, ψ 17=4.415~ 4.541mm;
18th minute surface is R18=-18.947~-18.385mm, D18=0.972~1.020mm, ψ 18=3.259~ 3.375mm;
19th minute surface is R19=4.639~4.880mm, D19=0.972~1.020mm, ψ 19=2.775~2.895mm;
20th minute surface is R20=9.748~10.250mm, D20=3.727~3.855mm, ψ 20=2.858~2.980mm;
21st minute surface is R21=-4.841~-4.598mm, D21=0.972~1.020mm, ψ 21=2.707~ 2.820mm;
22nd minute surface is R22=7.095~7.395mm, D22=147.389~149.076mm, ψ 22=2.422~ 2.531mm;Wherein R1 is the radius of curvature of the first minute surface, and D1 is first minute surface distance to the second minute surface, and ψ 1 is the first minute surface Effective clear aperature;R2 is the radius of curvature of the second minute surface, and D2 is second minute surface distance to the 3rd minute surface, and ψ 2 is the second mirror Effective clear aperature in face;R3 is the radius of curvature of the 3rd minute surface, and D3 is the distance of the 3rd minute surface to the 4th minute surface, and ψ 3 is the 3rd Effective clear aperature of minute surface;R4 is the radius of curvature of the 4th minute surface, and D4 is the distance of the 4th minute surface to the 5th minute surface, and ψ 4 is Effective clear aperature of four minute surfaces;R5 is the radius of curvature of the 5th minute surface, and D5 is the distance of the 5th minute surface to the 6th minute surface, ψ 5 It it is effective clear aperature of the 5th minute surface;R6 is the radius of curvature of the 6th minute surface, and D6 is the distance of the 6th minute surface to the 7th minute surface, ψ 6 is effective clear aperature of the 6th minute surface;R7 is the radius of curvature of the 7th minute surface, D7 be the 7th minute surface to the 8th minute surface away from From, ψ 7 is effective clear aperature of the 7th minute surface;R8 is the radius of curvature of the 8th minute surface, and D8 is that the 8th minute surface is to the 9th minute surface Distance, ψ 8 is effective clear aperature of the 8th minute surface;R9 is the radius of curvature of the 9th minute surface, and D9 is that the 9th minute surface is to the tenth minute surface Distance, ψ 9 is effective clear aperature of the 9th minute surface;R10 is the radius of curvature of the tenth minute surface, and D10 is that the tenth minute surface is to the tenth The distance of one minute surface, ψ 10 is effective clear aperature of the tenth minute surface;R11 is the radius of curvature of the 11st minute surface, and D11 is the tenth One minute surface is to the distance of the 12nd minute surface, and ψ 11 is effective clear aperature of the 11st minute surface;R12 is the curvature of the 12nd minute surface Radius, D12 is the distance of the 12nd minute surface to the 13rd minute surface, and ψ 12 is effective clear aperature of the 12nd minute surface;R13 is The radius of curvature of 13 minute surfaces, D13 is the distance of the 13rd minute surface to the 14th minute surface, and ψ 13 is the most logical of the 13rd minute surface Light aperture;R14 is the radius of curvature of the 14th minute surface, and D14 is the distance of the 14th minute surface to the 15th minute surface, and ψ 14 is the tenth Effective clear aperature of four minute surfaces;R15 is the radius of curvature of the 15th minute surface, and D15 is that the 15th minute surface is to the 16th minute surface Distance, ψ 15 is effective clear aperature of the 15th minute surface;R16 is the radius of curvature of the 16th minute surface, and D16 is the 16th minute surface To the distance of the 17th minute surface, ψ 16 is effective clear aperature of the 16th minute surface;R17 is the radius of curvature of the 17th minute surface, D17 is the distance of the 17th minute surface to the 18th minute surface, and ψ 17 is effective clear aperature of the 17th minute surface;R18 is the 18th mirror The radius of curvature in face, D18 is the distance of the 18th minute surface to the 19th minute surface, and ψ 18 is effective clear aperature of the 18th minute surface; R19 is the radius of curvature of the 19th minute surface, and D19 is the distance of the 19th minute surface to the 20th minute surface, and ψ 19 is the 19th minute surface Effectively clear aperature;R20 is the radius of curvature of the 20th minute surface, and D20 is the distance of the 20th minute surface to the 21st minute surface, ψ 20 is effective clear aperature of the 20th minute surface;R21 is the radius of curvature of the 21st minute surface, and D21 is that the 21st minute surface arrives The distance of the 22nd minute surface, ψ 21 is effective clear aperature of the 21st minute surface;R22 is the curvature half of the 22nd minute surface Footpath, D22 is the 22nd minute surface distance to object lens image planes, and ψ 22 is effective clear aperature of the 22nd minute surface.
A kind of microscope objective the most according to claim 1 and 2, it is characterised in that: described first lens, the second lens and First balsaming lens group focal length of the 3rd lens combination is 9.91mm, and the focal length of the 4th lens is 30.97mm, Jiao of the 5th lens It is 39.49mm away from the second balsaming lens group focal length for 28.23mm, the 6th lens and the 7th lens combination, the 8th lens and 3rd balsaming lens group focal length of nine lens combinations is 137.25mm, the tenth lens and the 4th gluing of the 11st lens combination Battery of lens focal length is 42.95mm, and the focal length of the 12nd lens is-5.63mm, the 13rd lens and the of the 14th lens combination Five balsaming lens group focal lengths are 27.87mm.
A kind of microscope objective the most according to claim 1 and 2, it is characterised in that: the refractive index of described first lens/Ah Shellfish coefficient is 1.51680/64.17, and the refractive index/Abbe number of the second lens is 1.91761/21.51, the refraction of the 3rd lens Rate/Abbe number is 1.78800/47.49, and the refractive index/Abbe number of the 4th lens is 1.43335/94.52, the 5th lens Refractive index/Abbe number be 1.43335/94.52, the refractive index/Abbe number of the 6th lens is 1.91761/21.51, Refractive index/the Abbe number of seven lens is 1.43335/94.52, and the refractive index/Abbe number of the 8th lens is 1.85544/ 36.59, the refractive index/Abbe number of the 9th lens is 1.43335/94.52, and the refractive index/Abbe number of the tenth lens is 1.43335/94.52, the refractive index/Abbe number of the 11st lens is 1.85544/36.59, the refractive index of the 12nd lens/ Abbe number is 1.74400/44.90, and the refractive index/Abbe number of the 13rd lens is 1.91761/21.51, the 14th lens Refractive index/Abbe number be 1.78800/47.49.
A kind of microscope objective the most according to claim 1 and 2, it is characterised in that: described microscope objective greatest measure Aperture is 1.4.
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CN109061861B (en) * 2018-08-27 2020-11-13 中国科学院苏州生物医学工程技术研究所 Microscope objective lens without hyper-hemisphere
CN111856736B (en) * 2020-07-10 2022-06-03 宁波永新光学股份有限公司 Objective lens of microscope
CN114967094B (en) * 2022-04-27 2023-06-02 华中科技大学 Telecentric living cell phase contrast microscope lens

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CN1576943A (en) * 2003-07-07 2005-02-09 莱卡股份有限公司 Optical arrangement for high power microobjective
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