CN204116699U - A kind of micro objective - Google Patents

Abstract

The utility model discloses a kind of micro objective, comprise 13 spherical glass lens that same optical axis is arranged, be arranged in order to image space from object space: first, second, third lens are balsaming lens group; 4th lens face is concave surface to object space, is convex surface towards image space; 5th lens face is convex surface to object space, is convex surface towards image space; Six, the 7th lens are balsaming lens group; Eight, the 9th lens are balsaming lens group; Ten, the 11 lens are balsaming lens group; 12, the 13 lens are balsaming lens group.Micro objective of the present utility model, all adopts spheric glass, processes with characterization processes completely compatible, low cost of manufacture with existing optical mirror slip; Micro objective can realize the imaging of high resolution, has the features such as numerical aperture is large, resolution is high, volume is little, processing technology is ripe, cost is low.

Description

A kind of micro objective

Technical field

The invention belongs to optical field, more particularly, relate to a kind of micro objective.

Background technology

Microscope has become the requisite high technology equipment of a lot of industry research, in some accurate miniature field widespread uses, has irreplaceable effect especially in medical treatment and scientific research etc.

Numerical aperture (NA) and other each optical parametric microscopical have substantial connection, and generally wish that it is the bigger the better, the size therefore improving numerical aperture (NA) is also the demand of development in science and technology; At present existing all kinds of micro objective in the world, but the numerical aperture (NA) that technically can reach at present generally remains on about 0.65, and what can reach more large-numerical aperture (NA) also only has minority; Along with the development of science and technology, at present a lot of field starts to increase the micro objective demand of more large-numerical aperture (NA), and the numerical aperture (NA) therefore improving micro objective has necessary meaning.

Chinese Patent Application No.: 201280008900.X, disclose the patent that a name is called object lens and optical take-up apparatus, wherein said object lens are used for light pickup, described optical take-up apparatus at least has the first light source and the object lens of the first light beam of injection first wave length λ 1 (390nm< λ 1<420nm), by described object lens by first beam condenser of described first wave length λ 1 from described first light source injection on the information recording surface of the first CD, carry out record and/or the regeneration of information thus, described object lens have: the first optical surface, it is formed at described first light source side, second optical surface, it is formed towards described first optical surface, and radius-of-curvature is greater than described first optical surface, end face, it is positioned at plane outside described second optical surface and substantially vertical with optical axis when optical axis direction is observed, and the image side numerical aperture (NA) of described object lens is more than 0.7, less than 0.9.Although increase for its numerical aperture of existing technology existing, its numerical aperture still can not meet the demand in some fields, and manufacturing cost is high simultaneously.

China Patent No.: 201410076527.2, patent name is: a kind of i-line projection lens of lithography machine of Large visual angle high-NA, these object lens conjugate distance L=1500mm, and eyeglass is divided into four groups of independent design integrated optimization again; From incident direction, be disposed with the first lens combination, numbering G1, eyeglass numbering L1 ~ L8, totally 8 pieces of eyeglasses, wherein the 5th piece of eyeglass is 14 rank aspheric surfaces towards the plane of incidence of object space; Second lens combination numbering G2, eyeglass numbering L9 ~ L12, totally 4 pieces of eyeglasses, Guang Lan (STOP), wherein the 2nd piece of eyeglass is 14 rank aspheric surfaces towards the plane of incidence of object space; 3rd lens combination numbering G3, eyeglass numbering L13 ~ L17, totally 5 pieces of eyeglasses; Wherein the 3rd piece and the 5th piece of eyeglass are 14 rank aspheric surfaces towards the plane of incidence of object space; And the 4th lens combination numbering G4, eyeglass numbering L18 ~ L25, totally 8 pieces of eyeglasses; Wherein the 8th piece of plane of incidence towards object space is 14 rank aspheric surfaces; Four lens combination altogether 25 pieces of eyeglasses form a two telecentric beam path about light hurdle symmetry, wherein have 5 faces to have employed low order aspheric surface to balance aberration; Four arrangement of mirrors head groups become double telecentric structure, and multiple aspheric use can reduce number of lenses and effectively correct multiple aberration, the distortion especially under Large visual angle and the curvature of field.Although have employed the two heart, 25 4 groups of structures far away, which use 5 low order aspheric surfaces to balance aberration, the image space apparent field of object lens is 132 × 132mm, and image-side numerical aperture is 0.17.Therefore the multi-field micro objective demand to more large-numerical aperture (NA), the numerical aperture (NA) improving micro objective has necessary meaning.

Summary of the invention

The object of the invention is, for the multi-field micro objective demand to more large-numerical aperture (NA), to provide one can realize high-NA (NA) to meet the micro objective of current each field needs.

In order to solve the problem, the technical solution adopted in the present invention is as follows: a kind of micro objective, comprise: 13 spherical lenses arranged with optical axis, be arranged in order to image space from object space, be respectively from object space to 13 of image space spherical lenses: the first lens, the second lens, the 3rd lens, the 4th lens, the 5th lens, the 6th lens, the 7th lens, the 8th lens, the 9th lens, the tenth lens, the 11 lens, the 12 lens and the 13 lens;

First lens, the second lens and the 3rd lens combination are balsaming lens group, and wherein the first lens face is plane to object space, are convex surface towards image space; Second lens face is concave surface to object space, is convex surface towards image space; 3rd lens face is concave surface to object space, is convex surface towards image space, and the first lens face is combined to the convex surface of image space and the second lens face to the concave glue of object space, and the second lens face is combined to the convex surface of image space and the 3rd lens face to the concave glue of object space;

4th lens face is concave surface to object space, is convex surface towards image space;

5th lens face is convex surface to object space, is convex surface towards image space;

6th lens and the 7th lens combination are balsaming lens group, and wherein the 6th lens face is plane to object space, are concave surface towards image space; 7th lens face is convex surface to object space, is convex surface towards image space, the 6th lens face to the concave surface of image space and the 7th lens face glued together to the convex surface of object space;

8th lens and the 9th lens combination are balsaming lens group, and wherein the 8th lens face is convex surface to object space, are convex surface towards image space; 9th lens face is concave surface to object space, is plane towards image space, and the 8th lens face is combined to the convex surface of image space and the 9th lens face to the concave glue of object space;

Tenth lens, the 11 lens combination are balsaming lens group, and wherein the tenth lens face is convex surface to object space, are convex surface towards image space; 11 lens face is concave surface to object space, is concave surface towards image space, and the tenth lens face is combined to the convex surface of image space and the 11 lens face to the concave glue of object space;

12 lens and the 13 lens combination are balsaming lens group, and wherein the 12 lens face is convex surface to object space, are convex surface towards image space; 13 lens face is concave surface to object space, is concave surface towards image space, and the 12 lens face is combined to the convex surface of image space and the 13 lens face to the concave glue of object space.

Described 13 spherical lenses have 20 minute surfaces, first lens face is the first minute surface to the plane of object space, the cemented surface of the first lens and the second lens is the second minute surface, the cemented surface of the second lens and the 3rd lens is the 3rd minute surface, 3rd lens face is the 4th minute surface to the convex surface of image space, the concave surface of the 4th lens is the 5th minute surface, the convex surface of the 4th lens is the 6th minute surface, 5th lens face is the 7th minute surface to the convex surface of object space, 5th lens face is the 8th minute surface to the convex surface of image space, 6th lens face is the 9th minute surface to the plane of object space, the cemented surface of the 6th lens and the 7th lens is the tenth minute surface, 7th lens face is the 11 minute surface to the convex surface of image space, 8th lens face is the 12 minute surface to the convex surface of object space, the cemented surface of the 8th lens and the 9th lens is the 13 minute surface, 9th lens face is the 14 minute surface to the plane of image space, tenth lens face is the 15 minute surface to the convex surface of object space, the cemented surface of the tenth lens and the 11 lens is the 16 minute surface, 11 lens face is the 17 minute surface to the concave surface of image space, 12 lens face is the 18 minute surface to the convex surface of object space, the cemented surface of the 12 lens and the 13 lens is the 19 minute surface, 13 lens face is the 20 minute surface to the concave surface of image space,

The structural parameters of 20 minute surfaces are:

First minute surface is R1=∞, D1=0.479 ~ 0.512mm, ψ 1=0.473 ~ 0.505mm;

Second minute surface is R2=-1.085 ~-1.025mm, D2=2.962 ~ 3.030mm, ψ 2=0.675 ~ 0.710mm;

3rd minute surface is R3=-3.221 ~-3.055mm, D3=3.159 ~ 3.232mm, ψ 3=2.437 ~ 2.525mm;

4th minute surface is R4=-4.845 ~-4.601mm, D4=0.292 ~ 0.321mm, ψ 4=4.049 ~ 4.185mm;

5th minute surface is R5=-16.451 ~-15.955mm, D5=3.549 ~ 3.635mm, ψ 5=5.052 ~ 5.165mm;

6th minute surface is R6=-8.219 ~-7.890mm, D6=0.287 ~ 0.308mm, ψ 6=5.883 ~ 6.005mm;

7th minute surface is R7=436.102 ~ 440.490mm, D7=3.955 ~ 4.040mm, ψ 7=6.609 ~ 6.750mm;

8th minute surface is R8=-12.950 ~-12.559mm, D8=0.287 ~ 0.308mm, ψ 8=6.949 ~ 7.028mm;

9th minute surface is R9=∞, D9=1.175 ~ 1.215mm, ψ 9=6.881 ~ 6.960mm;

Tenth minute surface is R10=12.559 ~ 12.950mm, D10=4.939 ~ 5.050mm, ψ 10=6.881 ~ 6.970mm;

11 minute surface is R11=-22.621 ~-21.945mm, D11=0.287 ~ 0.308mm, ψ 11=7.163 ~ 7.245mm;

12 minute surface is R12=12.817 ~ 13.352mm, D12=5.536 ~ 5.655mm, ψ 12=7.475 ~ 7.560mm;

13 minute surface is R13=-21.313 ~-20.675mm, D13=1.256 ~ 1.333mm, ψ 13=7.187 ~ 7.260mm;

14 minute surface is R14=∞, D14=0.287 ~ 0.308mm, ψ 14=7.005 ~ 7.085mm;

15 minute surface is R15=7.387 ~ 7.702mm, D15=5.931 ~ 6.060mm, ψ 15=6.527 ~ 6.599mm;

16 minute surface is R16=-177.601 ~-175.825mm, D16=1.353 ~ 1.435mm, ψ 16=5.478 ~ 5.595mm;

17 minute surface is R17=5.347 ~ 5.632mm, D17=1.749 ~ 1.835mm, ψ 17=4.172 ~ 4.260mm;

18 minute surface is R18=7.087 ~ 7.389mm, D18=5.931 ~ 6.060mm, ψ 18=4.408 ~ 4.502mm;

19 minute surface is R19=-10.295 ~-9.978mm, D19=1.555 ~ 1.632mm, ψ 19=3.499 ~ 3.610mm;

20 minute surface is R20=4.965 ~ 5.230mm, D20=147.489 ~ 149.107mm, ψ 20=2.737 ~ 2.855mm.

The balsaming lens group focal length of described object lens first lens, the second lens and the 3rd lens combination is 17.12mm, the focal length of the 4th lens is 32.56mm, the focal length of the 5th lens is 28.71mm, the balsaming lens group focal length of the 6th lens and the 7th lens combination is-229.15mm, the balsaming lens group focal length of the 8th lens and the 9th lens combination is 44.63mm, the balsaming lens group focal length of the tenth lens and the 11 lens combination is-23.11mm, and the balsaming lens group focal length of the 12 lens and the 13 lens combination is 39.16mm.

Refractive index/the Abbe number of described first lens is 1.51680/64.17, refractive index/the Abbe number of the second lens is 1.75520/27.53, refractive index/Abbe number the 1.48746/70.04 of the 3rd lens, refractive index/the Abbe number of the 4th lens is 1.43335/94.52, refractive index/the Abbe number of the 5th lens is 1.43335/94.52, refractive index/the Abbe number of the 6th lens is 1.75520/27.53, refractive index/the Abbe number of the 7th lens is 1.43335/94.52, refractive index/the Abbe number of the 8th lens is 1.43335/94.52, refractive index/the Abbe number of the 9th lens is 1.69211/54.54, refractive index/the Abbe number of the tenth lens is 1.43335/94.52, refractive index/the Abbe number of the 11 lens is 1.74693/50.95, refractive index/the Abbe number of the 12 lens is 1.75520/27.53, refractive index/the Abbe number of the 13 lens is 1.74693/50.95.

Described micro objective maximum numerical aperture is 1.

Compared to prior art, beneficial effect of the present invention is:

(1) micro objective of the present invention, all adopts spheric glass, processes with characterization processes completely compatible, low cost of manufacture with existing optical mirror slip;

(2) numerical aperture (NA) improving micro objective can be realized under the structural parameters of 20 minute surface minute surfaces that the present invention provides, the numerical aperture (NA) of micro objective can reach 1, reaches the numerical aperture (NA) increasing substantially micro objective completely;

(3) structure of the present invention is simple, reasonable in design, is easy to manufacture.

Accompanying drawing explanation

Fig. 1 is the structural representation of micro objective of the present invention.

Fig. 2 is under ZEMAX software simulation goes out embodiments of the invention 1 parameter, the parameter list of the visual field of micro objective.

Fig. 3, Fig. 4, Fig. 5 and Fig. 6 are that ZEMAX software simulation goes out under Fig. 2 numerical aperture (NA) imposes a condition, micro objective image quality design sketch.Wherein Fig. 3 is optical path difference, and its horizontal ordinate is normalization aperture, and ordinate is the optical path difference of the reference chief ray in units of wave number; Fig. 4 is the monochromatic encircled energy based on diffraction, and its horizontal ordinate is the radius of diffraction pattern, and ordinate is the number percent that energy in current radius accounts for gross energy; Fig. 5 is polychromatic light optical transfer function, and its horizontal ordinate is spatial frequency, and ordinate is transfer function values; Fig. 6 is ripple difference, and it is the optical path difference between actual corrugated and reference sphere.

Reference numeral: L1-first lens; L2-second lens; L3-the 3rd lens; L4-the 4th lens; L5-the 5th lens; L6-the 6th lens; L7-the 7th lens; L8-the 8th lens; L9-the 9th lens; L10-the tenth lens; L11-the 11 lens; L12-the 12 lens; L13-the 13 lens.

Embodiment

Describe the present invention below in conjunction with the drawings and specific embodiments.

As shown in Figure 1, a kind of micro objective, comprise 13 spherical lenses that same optical axis is arranged, be arranged in order to image space from object space, be respectively from object space to 13 of image space spherical lenses: the first lens L1, the second lens L2, the 3rd lens L3, the 4th lens L4, the 5th lens L5, the 6th lens L6, the 7th lens L7, the 8th lens L8, the 9th lens L9, the tenth lens L10, the 11 lens L11, the 12 lens L12 and the 13 lens L13.

First lens L1, the second lens L2 and the 3rd lens L3 are combined as balsaming lens group, and wherein the first lens L1 is plane towards object space, are convex surface towards image space; Second lens L2 is concave surface towards object space, is convex surface towards image space; 3rd lens L3 is concave surface towards object space, is convex surface towards image space.First lens L1 is combined towards the convex surface of image space and the second lens L2 towards the concave glue of object space, and the second lens L2 is combined towards the convex surface of image space and the 3rd lens L3 towards the concave glue of object space.

4th lens L4 is concave surface towards object space, is convex surface towards image space.

5th lens L5 is convex surface towards object space, is convex surface towards image space.

6th lens L6 and the 7th lens L7 is combined as balsaming lens group, and wherein the 6th lens L6 is plane towards object space, is concave surface towards image space; 7th lens L7 is convex surface towards object space, is convex surface towards image space.6th lens L6 towards the concave surface of image space and the 7th lens L7 glued together towards the convex surface of object space.

8th lens L8 and the 9th lens L9 is combined as balsaming lens group, and wherein the 8th lens L8 is convex surface towards object space, is convex surface towards image space; 9th lens L9 is concave surface towards object space, is plane towards image space.8th lens L8 is combined towards the convex surface of image space and the 9th lens L9 towards the concave glue of object space;

Tenth lens L10, the 11 lens L11 are combined as balsaming lens group, and wherein the tenth lens L10 is convex surface towards object space, are convex surface towards image space; 11 lens L11 is concave surface towards object space, is concave surface towards image space; Tenth lens L10 is combined towards the convex surface of image space and the 11 lens L11 towards the concave glue of object space.

12 lens L12 and the 13 lens L13 is combined as balsaming lens group, and wherein the 12 lens L12 is convex surface towards object space, is convex surface towards image space; 13 lens L13 is concave surface towards object space, is concave surface towards image space.12 lens L12 is combined towards the convex surface of image space and the 13 lens L13 towards the concave glue of object space.

Above-mentioned 13 lens have 20 minute surfaces, first lens L1 is the first minute surface towards the plane of object space, the cemented surface of the first lens L1 and the second lens L2 is the second minute surface, the cemented surface of the second lens L2 and the 3rd lens L3 is the 3rd minute surface, 3rd lens L3 is the 4th minute surface towards the convex surface of image space, the concave surface of the 4th lens L4 is the 5th minute surface, the convex surface of the 4th lens L4 is the 6th minute surface, 5th lens L5 is the 7th minute surface towards the convex surface of object space, 5th lens L5 is the 8th minute surface towards the convex surface of image space, 6th lens L6 is the 9th minute surface towards the plane of object space, the cemented surface of the 6th lens L6 and the 7th lens L7 is the tenth minute surface, 7th lens L7 is the 11 minute surface towards the convex surface of image space, 8th lens L8 is the 12 minute surface towards the convex surface of object space, the cemented surface of the 8th lens L8 and the 9th lens (L9) is the 13 minute surface, 9th lens L9 is the 14 minute surface towards the plane of image space, tenth lens L10 is the 15 minute surface towards the convex surface of object space, the cemented surface of the tenth lens L10 and the 11 lens L11 is the 16 minute surface, 11 lens L11 is the 17 minute surface towards the concave surface of image space, 12 lens L12 is the 18 minute surface towards the convex surface of object space, the cemented surface of the 12 lens L12 and the 13 lens L13 is the 19 minute surface, 13 lens (L13) are the 20 minute surface towards the concave surface of image space, the structural parameters scope of 20 minute surfaces is in table 1.Wherein R1 is the radius-of-curvature of the first minute surface; D1 is the minute surface distance of the first minute surface; ψ 1 is effective clear aperature of the first minute surface, the implication of R2-R20, D2-D20 and ψ 2-ψ 20 the like.

The structural parameters scope of table 1 20 minute surfaces

Preferably, the balsaming lens group focal length of described object lens first lens, the second lens and the 3rd lens combination is 17.12mm, the focal length of the 4th lens is 32.56mm, the focal length of the 5th lens is 28.71mm, the balsaming lens group focal length of the 6th lens and the 7th lens combination is-229.15mm, the balsaming lens group focal length 44.63mm of the 8th lens and the 9th lens combination, the balsaming lens group focal length of the tenth lens and the 11 lens combination is-23.11mm, and the balsaming lens group focal length of the 12 lens and the 13 lens combination is 39.16mm.

Preferably, refractive index/the Abbe number of the first lens L1 is 1.51680/64.17, refractive index/the Abbe number of the second lens L2 is 1.75520/27.53, refractive index/Abbe number the 1.48746/70.04 of the 3rd lens L3, refractive index/the Abbe number of the 4th lens L4 is 1.43335/94.52, refractive index/the Abbe number of the 5th lens L5 is 1.43335/94.52, refractive index/the Abbe number of the 6th lens L6 is 1.75520/27.53, refractive index/the Abbe number of the 7th lens L7 is 1.43335/94.52, refractive index/the Abbe number of the 8th lens L8 is 1.43335/94.52, refractive index/the Abbe number of the 9th lens L9 is 1.69211/54.54, refractive index/the Abbe number of the tenth lens L10 is 1.43335/94.52, refractive index/the Abbe number of the 11 lens L11 is 1.74693/50.95, refractive index/the Abbe number of the 12 lens L12 is 1.75520/27.53, refractive index/the Abbe number of the 13 lens L13 is 1.74693/50.95.

Micro objective of the present invention, whole employing spheric glass, process with characterization processes completely compatible with existing optical mirror slip, low cost of manufacture, and under the structural parameters of 20 minute surfaces provided in the present invention, can realize the numerical aperture (NA) improving micro objective, the numerical aperture (NA) of micro objective can reach 1, reaches the numerical aperture (NA) increasing substantially micro objective completely.

Embodiment 1

The structural parameters of 20 minute surfaces are in table 2.

The structural parameters of 20 minute surfaces of table 2 embodiment 1

Described object lens first lens L1, the balsaming lens group focal length that second lens L2 and the 3rd lens L3 combines is 17.12mm, the focal length of the 4th lens L4 is 32.56mm, the focal length of the 5th lens L5 is 28.71mm, the balsaming lens group focal length that 6th lens L6 and the 7th lens L7 combines is-229.15mm, the balsaming lens group focal length 44.63mm that 8th lens L8 and the 9th lens L9 combines, the balsaming lens group focal length that tenth lens L10 and the 11 lens L11 combines is-23.11mm, the balsaming lens group focal length that 12 lens L12 and the 13 lens L13 combines is 39.16mm.

Refractive index/the Abbe number of the first lens is 1.51680/64.17, refractive index/the Abbe number of the second lens is 1.75520/27.53, refractive index/Abbe number the 1.48746/70.04 of the 3rd lens, refractive index/the Abbe number of the 4th lens is 1.43335/94.52, refractive index/the Abbe number of the 5th lens is 1.43335/94.52, refractive index/the Abbe number of the 6th lens is 1.75520/27.53, refractive index/the Abbe number of the 7th lens is 1.43335/94.52, refractive index/the Abbe number of the 8th lens is 1.43335/94.52, refractive index/the Abbe number of the 9th lens is 1.69211/54.54, refractive index/the Abbe number of the tenth lens is 1.43335/94.52, refractive index/the Abbe number of the 11 lens is 1.74693/50.95, refractive index/the Abbe number of the 12 lens is 1.75520/27.53, refractive index/the Abbe number of the 13 lens is 1.74693/50.95.

The experimental result of above parameter is gone out, as shown in Fig. 2, Fig. 3, Fig. 4, Fig. 5 and Fig. 6 by ZEMAX software simulation.

Fig. 2 is under ZEMAX software simulation goes out embodiments of the invention 1 parameter, the parameter list of the numerical aperture (NA) of micro objective.As can be seen from the parameter of Fig. 2, its numerical aperture (NA) is 1, reaches the numerical aperture (NA) significantly improving micro objective completely.

What Fig. 3 optical path difference was shown is under Large visual angle, the situation of dispersion, as can be seen from image, under different visual field, optical path difference relation under the pupil coordinate of its meridional component and sagitta of arc component, X, Y represent sagitta of arc component and meridional component respectively, and the maximum perpendicular ratio of image is ± 2.000 wavelength, , see figure from left to right from top to bottom, the first width image represents that visual field point is 0.0000mm, optical path difference curve map under the pupil coordinate of its meridional component and sagitta of arc component, and take abscissa axis as benchmark, it is 0.644 that each curve from the bottom to top represents wavelength respectively, 0.436, 0.546, the curve of 0.480, the second width image represents that visual field point is 0.1040mm, optical path difference curve map under the pupil coordinate of its meridional component and sagitta of arc component, and take abscissa axis as benchmark, it is 0.644 that each curve from the bottom to top represents wavelength respectively, 0.436, 0.546, the curve of 0.480, the 3rd width image represents that visual field point is 0.1470mm, and optical path difference curve map under the pupil coordinate of its meridional component and sagitta of arc component take abscissa axis as benchmark, and it is 0.644 that each curve from the bottom to top represents wavelength respectively, 0.436, 0.546, the curve of 0.480, the 4th width image represents that visual field point is 0.1800mm, and optical path difference curve map under the pupil coordinate of its meridional component and sagitta of arc component take abscissa axis as benchmark, and it is 0.644 that each curve from the bottom to top represents wavelength respectively, 0.436, 0.546, the curve of 0.480, the 5th width image represents that visual field point is 0.2080mm, and optical path difference curve map under the pupil coordinate of its meridional component and sagitta of arc component take abscissa axis as benchmark, and it is 0.644 that each curve from the bottom to top represents wavelength respectively, 0.436, 0.546, the curve of 0.480.Curve wherein in every secondary curve map is the closer to abscissa axis, and its optical path difference is better, and the dispersion that can be embodied whole visual field by image is better.

Make a datum line in the diagram, each curve is crossing with datum line from the bottom to top, when its every bar curve represents that visual field point is 0.2080mm, 0.1.800mm, 0.1470mm, 0.1040mm, 0.0000mm respectively, relation between the energy percentage of visual field and spot radius, wherein go up most the relation that a curve is ideally energy percentage and spot radius, other curves therewith between ideal curve gap the smaller the better, the good capability set moderate in whole visual field can be embodied from image.

Fig. 5 is polychromatic light optical transfer function, and in image, T is meridional component, and S is sagitta of arc component, make a datum line, each curve is crossing with datum line from the bottom to top, its Article 1 curve represents that visual field point is the transport function of the meridional component of 0.2080mm, Article 2 curve represents that visual field point is the transport function of the meridional component of 0.1800mm, Article 3 curve represents that visual field point is the transport function of the meridional component of 0.1470mm, Article 4 curve represents that visual field point is the transport function of the sagitta of arc component of 0.2080mm, Article 5 curve represents that visual field point is the transport function of the meridional component of 0.1040mm, Article 6 curve represents that visual field point is the transport function of the sagitta of arc component of 0.1800mm, Article 7 curve represents that visual field point is the transport function of the sagitta of arc component of 0.1470mm, Article 8 curve represents that visual field point is the transport function of the sagitta of arc component of 0.1040mm, Article 9 curve represents that visual field point is the transport function of the meridional component of 0.0000mm and the transport function of sagitta of arc component.Wherein Article 10 curve is transfer curve ideally, and other curves therewith ideal curve are better close to expression performance, can find out that its contrast of whole visual field is very good by image.

What Fig. 6 ripple difference was shown is under Large visual angle, and ripple difference and theoretical value are close to perfect.

Embodiment 2

The structural parameters of 20 minute surfaces, specifically in table 3.

The structural parameters of 20 minute surfaces of table 3 embodiment 2

It is 1 that its experimental result reaches numerical aperture (NA) equally, reaches the numerical aperture (NA) significantly improving micro objective completely.

Embodiment 3

The structural parameters of 20 minute surfaces, specifically in table 4.

The structural parameters of 20 minute surfaces of table 4 embodiment 3

It is 1 that its experimental result reaches numerical aperture (NA) equally, reaches the numerical aperture (NA) significantly improving micro objective completely.

Claims (5)

1. a micro objective, it is characterized in that: comprise 13 spherical lenses that same optical axis is arranged, be arranged in order from object space to image space, be respectively from object space to 13 of image space spherical lenses: the first lens (L1), second lens (L2), 3rd lens (L3), 4th lens (L4), 5th lens (L5), 6th lens (L6), 7th lens (L7), 8th lens (L8), 9th lens (L9), tenth lens (L10), 11 lens (L11), 12 lens (L12) and the 13 lens (L13),

First lens (L1), the second lens (L2) and the 3rd lens (L3) are combined as balsaming lens group, and wherein the first lens (L1) are plane towards object space, are convex surface towards image space; Second lens (L2) are concave surface towards object space, are convex surface towards image space; 3rd lens (L3) are concave surface towards object space, are convex surface towards image space,

First lens (L1) are combined towards the convex surface of image space and the second lens (L2) towards the concave glue of object space,

Second lens (L2) are combined towards the convex surface of image space and the 3rd lens (L3) towards the concave glue of object space;

4th lens (L4) are concave surface towards object space, are convex surface towards image space;

5th lens (L5) are convex surface towards object space, are convex surface towards image space;

6th lens (L6) and the 7th lens (L7) are combined as balsaming lens group, and wherein the 6th lens (L6) are plane towards object space, are concave surface towards image space; 7th lens (L7) are convex surface towards object space, are convex surface towards image space, the 6th lens (L6) towards the concave surface of image space and the 7th lens (L7) glued together towards the convex surface of object space;

8th lens (L8) and the 9th lens (L9) are combined as balsaming lens group, and wherein the 8th lens (L8) are convex surface towards object space, are convex surface towards image space; 9th lens (L9) are concave surface towards object space, are plane towards image space, and the 8th lens (L8) are combined towards the convex surface of image space and the 9th lens (L9) towards the concave glue of object space;

Tenth lens (L10), the 11 lens (L11) are combined as balsaming lens group, and wherein the tenth lens (L10) are convex surface towards object space, are convex surface towards image space; 11 lens (L11) are concave surface towards object space, are concave surface towards image space, and the tenth lens (L10) are combined towards the convex surface of image space and the 11 lens (L11) towards the concave glue of object space;

12 lens (L12) and the 13 lens (L13) are combined as balsaming lens group, and wherein the 12 lens (L12) are convex surface towards object space, are convex surface towards image space; 13 lens (L13) are concave surface towards object space, are concave surface towards image space, and the 12 lens (L12) are combined towards the convex surface of image space and the 13 lens (L13) towards the concave glue of object space.

2. micro objective according to claim 1, it is characterized in that: described 13 spherical lenses have 20 minute surfaces, first lens (L1) are the first minute surface towards the plane of object space, the cemented surface of the first lens (L1) and the second lens (L2) is the second minute surface, the cemented surface of the second lens (L2) and the 3rd lens (L3) is the 3rd minute surface, 3rd lens (L3) are the 4th minute surface towards the convex surface of image space, the concave surface of the 4th lens (L4) is the 5th minute surface, the convex surface of the 4th lens (L4) is the 6th minute surface, 5th lens (L5) are the 7th minute surface towards the convex surface of object space, 5th lens (L5) are the 8th minute surface towards the convex surface of image space, 6th lens (L6) are the 9th minute surface towards the plane of object space, the cemented surface of the 6th lens (L6) and the 7th lens (L7) is the tenth minute surface, 7th lens (L7) are the 11 minute surface towards the convex surface of image space, 8th lens (L8) are the 12 minute surface towards the convex surface of object space, the cemented surface of the 8th lens (L8) and the 9th lens (L9) is the 13 minute surface, 9th lens (L9) are the 14 minute surface towards the plane of image space, tenth lens (L10) are the 15 minute surface towards the convex surface of object space, the cemented surface of the tenth lens (L10) and the 11 lens (L11) is the 16 minute surface, 11 lens (L11) are the 17 minute surface towards the concave surface of image space, 12 lens (L12) are the 18 minute surface towards the convex surface of object space, the cemented surface of the 12 lens (L12) and the 13 lens (L13) is the 19 minute surface, 13 lens (L13) are the 20 minute surface towards the concave surface of image space,

The structural parameters of 20 minute surfaces are:

First minute surface is R1=∞, D1=0.479 ~ 0.512mm, ψ 1=0.473 ~ 0.505mm;

Second minute surface is R2=-1.085 ~-1.025mm, D2=2.962 ~ 3.030mm, ψ 2=0.675 ~ 0.710mm;

3rd minute surface is R3=-3.221 ~-3.055mm, D3=3.159 ~ 3.232mm, ψ 3=2.437 ~ 2.525mm;

4th minute surface is R4=-4.845 ~-4.601mm, D4=0.292 ~ 0.321mm, ψ 4=4.049 ~ 4.185mm;

5th minute surface is R5=-16.451 ~-15.955mm, D5=3.549 ~ 3.635mm, ψ 5=5.052 ~ 5.165mm;

6th minute surface is R6=-8.219 ~-7.890mm, D6=0.287 ~ 0.308mm, ψ 6=5.883 ~ 6.005mm;

7th minute surface is R7=436.102 ~ 440.490mm, D7=3.955 ~ 4.040mm, ψ 7=6.609 ~ 6.750mm;

8th minute surface is R8=-12.950 ~-12.559mm, D8=0.287 ~ 0.308mm, ψ 8=6.949 ~ 7.028mm;

9th minute surface is R9=∞, D9=1.175 ~ 1.215mm, ψ 9=6.881 ~ 6.960mm;

Tenth minute surface is R10=12.559 ~ 12.950mm, D10=4.939 ~ 5.050mm, ψ 10=6.881 ~ 6.970mm;

11 minute surface is R11=-22.621 ~-21.945mm, D11=0.287 ~ 0.308mm, ψ 11=7.163 ~ 7.245mm;

12 minute surface is R12=12.817 ~ 13.352mm, D12=5.536 ~ 5.655mm, ψ 12=7.475 ~ 7.560mm;

13 minute surface is R13=-21.313 ~-20.675mm, D13=1.256 ~ 1.333mm, ψ 13=7.187 ~ 7.260mm;

14 minute surface is R14=∞, D14=0.287 ~ 0.308mm, ψ 14=7.005 ~ 7.085mm;

15 minute surface is R15=7.387 ~ 7.702mm, D15=5.931 ~ 6.060mm, ψ 15=6.527 ~ 6.599mm;

16 minute surface is R16=-177.601 ~-175.825mm, D16=1.353 ~ 1.435mm, ψ 16=5.478 ~ 5.595mm;

17 minute surface is R17=5.347 ~ 5.632mm, D17=1.749 ~ 1.835mm, ψ 17=4.172 ~ 4.260mm;

18 minute surface is R18=7.087 ~ 7.389mm, D18=5.931 ~ 6.060mm, ψ 18=4.408 ~ 4.502mm;

19 minute surface is R19=-10.295 ~-9.978mm, D19=1.555 ~ 1.632mm, ψ 19=3.499 ~ 3.610mm;

20 minute surface is R20=4.965 ~ 5.230mm, D20=147.489 ~ 149.107mm, ψ 20=2.737 ~ 2.855mm.

3. a kind of micro objective according to claim 2, it is characterized in that: described object lens first lens (L1), the balsaming lens group focal length that second lens (L2) and the 3rd lens (L3) combine is 17.12mm, the focal length of the 4th lens (L4) is 32.56mm, the focal length of the 5th lens (L5) is 28.71mm, the balsaming lens group focal length that 6th lens (L6) and the 7th lens (L7) combine is-229.15mm, the balsaming lens group focal length that 8th lens (L8) and the 9th lens (L9) combine is 44.63mm, the balsaming lens group focal length that tenth lens (L10) and the 11 lens (L11) combine is-23.11mm, the balsaming lens group focal length that 12 lens (L12) and the 13 lens (L13) combine is 39.16mm.

4. a kind of micro objective according to claim 1, it is characterized in that: the refractive index/Abbe number of described first lens (L1) is 1.51680/64.17, refractive index/the Abbe number of the second lens (L2) is 1.75520/27.53, refractive index/Abbe number the 1.48746/70.04 of the 3rd lens (L3), refractive index/the Abbe number of the 4th lens (L4) is 1.43335/94.52, refractive index/the Abbe number of the 5th lens (L5) is 1.43335/94.52, refractive index/the Abbe number of the 6th lens (L6) is 1.75520/27.53, refractive index/the Abbe number of the 7th lens (L7) is 1.43335/94.52, refractive index/the Abbe number of the 8th lens (L8) is 1.43335/94.52, refractive index/the Abbe number of the 9th lens (L9) is 1.69211/54.54, refractive index/the Abbe number of the tenth lens (L10) is 1.43335/94.52, refractive index/the Abbe number of the 11 lens (L11) is 1.74693/50.95, refractive index/the Abbe number of the 12 lens (L12) is 1.75520/27.53, refractive index/the Abbe number of the 13 lens (L13) is 1.74693/50.95.

5. a kind of micro objective as claimed in any of claims 1 to 4, is characterized in that: described micro objective maximum numerical aperture is 1.