WO2020186558A1

WO2020186558A1 - Combined target member

Info

Publication number: WO2020186558A1
Application number: PCT/CN2019/081188
Authority: WO
Inventors: 钱铁威
Original assignee: 北京中百源国际科技创新研究有限公司
Priority date: 2019-03-21
Filing date: 2019-04-03
Publication date: 2020-09-24
Also published as: CN111719123A

Abstract

Disclosed is a combined target member, comprising target columns (100) and a mounting frame. The mounting frame comprises an upper mounting frame (101) and a lower mounting frame (102), vertically arranged at an interval, wherein the upper mounting frame (101) comprises a gear III (103) and a gear IV (104) arranged spaced apart from each other, and an annular hinge I (105) is connected on the gear III (103) and the gear IV (104); the lower mounting frame (102) comprises a gear V (106) and a gear VI (107) arranged spaced apart from each other, and an annular hinge II (108) is connected on the gear V (106) and the gear VI (107); and the gear III (103) and the gear V (106) are connected in a linked manner. A driving device III for driving the gear III (103) to rotate is further comprised. The target columns (100) are provided between the upper mounting frame (101) and the lower mounting frame (102), wherein an upper end of each of the target columns (100) is connected to the hinge I (105), and a lower end of each of the target columns (100) is connected to the hinge II (108); several target columns (100) are provided, and the several target columns (100) are uniformly arranged in a circumferential direction of the hinge I (105); each of the target columns (100) comprises a tubular target body (1), a tubular bearing body (2), and a mounting column (3); the bearing body (2) is sheathed on the mounting column (3), and the target body (1) is sheathed on the bearing body (2); and a cooling cavity is provided inside the bearing body (2).

Description

Combined target

Technical field

The invention relates to a combined target.

Background technique

The target can be understood to mean the material being sputtered in the cathode sputtering system. Most of the sputtering targets used in the past are so-called flat targets that are configured in a circular or rectangular shape. However, the flat target has the following disadvantages: only about 30% to 40% of the material constituting the flat target is effectively sputtered, its effective utilization rate is low, and the service life is short. In addition, the currently used targets are all single targets, and in order to obtain a large number of sputtering sources, the irradiation beam is often optimized. However, the optimization of the irradiation beam often involves high cost and difficult problems.

Summary of the invention

In view of the problems pointed out in the background art, the present invention proposes a combined target, which is composed of multiple single targets and can move in multiple directions, and is equipped with a cooling structure inside, which can not only be low-cost A large number of sputtering sources are obtained, and the utilization rate of the target is improved, and its service life is prolonged.

The technical scheme of the present invention is realized as follows:

A combined target includes a target post and a mounting frame. The mounting frame includes an upper mounting frame and a lower mounting frame spaced up and down. The upper mounting frame includes gear three and gear four, gear three and gear spaced apart from each other. A ring-shaped hinge 1 is connected to the four, and the lower mounting frame includes a gear 5 and a gear 6 spaced apart from each other. A ring-shaped hinge 2 is connected to the gear 5 and the gear 6, and the gear 3 is linked to the gear 5 and also includes a driving gear 3 to rotate. The driving device three of the target column is set between the upper mounting frame and the lower mounting frame, the upper end of the target column is connected with hinge one, the lower end of the target column is connected with hinge two, and the target column is provided with several target columns. The hinges are evenly arranged in the circumferential direction;

The target column includes a tubular target body, a tubular carrier body and a mounting column. The carrier body is sleeved on the installation column, the target body is sleeved on the carrier body, and the carrier body is provided with a cooling cavity inside. The carrier body is provided with a cooling liquid inlet and a cooling liquid outlet, and the cooling liquid inlet and the cooling liquid outlet are respectively communicated with the cooling cavity.

The present invention is further provided that the target body can be rotated around its central axis.

The present invention is further provided that the carrier body is fixedly connected with the mounting column, and the mounting column is connected with a driving device 1 for driving the rotation.

The present invention is further provided that the bearing body is rotatably connected with the mounting post, and further includes a driving mechanism for driving the bearing body to rotate.

The present invention is further provided as follows: the driving mechanism includes a gear one, a gear two, and a driving device two. The gear one is coaxial with the carrier and arranged in linkage, the gear two meshes with the gear one, and the driving device two and the gear two The connection is used to drive the two gears to rotate.

The present invention is further provided that: the mounting frame can be adjusted in the front, back, left, right, up and down directions, and the mounting frame can be rotated around its central axis.

The present invention is further configured to further include a fixed plate, the fixed plate is arranged above the mounting frame, the gear 3 and the gear 4 form a rotational connection with the fixed plate, the gear 3 and the gear 5 are linked by a central column, and the gear 4 It is linked with gear six through central column two, and the driving device three is arranged on the fixed plate.

The present invention is further provided that a sliding rod one and two sliding rods are arranged above the fixed plate, the sliding rod one and the sliding rod two are arranged perpendicular to each other, the sliding rod one and the sliding rod two form a sliding fit, and the two sliding rods can move along Slide bar 1 slides in the length direction, slide bar 1 is provided with driving device 4 for driving slide bar 2 to move, fixed plate and slide bar 2 are slidably connected, fixed plate can move along the length of slide bar 2, and slide bar 2 is provided with a drive The driving device for sliding the fixed plate five; further includes a fixed seat, the sliding rod is fixedly connected to the lower side of the fixed seat, the fixed seat is connected with a driving device that drives its rotation, and the fixed seat is connected with a drive The driving device that moves up and down seven.

The present invention is further provided that the tubular target body is composed of a plurality of target blocks, and the plurality of target blocks are assembled in series by high-strength metal wires to form the target body.

The beneficial effects of the present invention:

The combined target provided by the present invention is composed of a plurality of single targets and can move in multiple directions, and is equipped with a cooling structure inside, which not only can obtain a large number of sputtering sources at low cost, but also improves The utilization rate of the target extends its service life. The structure of a single target column is tubular. When the tubular target is used, the rotation of the tubular target can be adjusted so that the surface of the target can obtain a more uniform etching effect, and the etching area can basically cover the entire target surface by adjusting the position of the target body.

Description of the drawings

In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative labor.

Figure 1 is a schematic diagram of the structure of the present invention;

Figure 2 is a schematic diagram of the structure of the present invention;

Figure 3 is a schematic structural diagram of the present invention;

Figure 4 is a schematic diagram of the structure of the present invention;

Figure 5 is a schematic diagram of the structure of the target column of the present invention;

Figure 6 is a schematic diagram of the structure of the target column of the present invention;

Figure 7 is a schematic diagram of the structure of the target column of the present invention;

Figure 8 is a schematic structural diagram of the present invention;

Figure 9 is a schematic diagram of the structure of the target body of the present invention.

detailed description

The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

The present invention will be described with reference to Figures 1-9 as follows:

As shown in Figures 1-4, a combined target includes a target post 100 and a mounting frame. The mounting frame includes an upper mounting frame 101 and a lower mounting frame 102 that are spaced up and down. The upper mounting frame 101 includes a mutual space. Gear three 103 and gear four 104 are set. Gear three 103 and gear four 104 are connected with an annular hinge 105. The lower mounting frame 102 includes gear five 106 and gear six 107, and gear five 106 and gear six 107, which are spaced apart from each other. A ring-shaped hinge 108 is connected to the upper part, and the third gear 103 is linked to the fifth gear 106. It also includes a driving device three (motor) that drives the rotation of the third gear 103. The target post 100 is arranged between the upper mounting frame 101 and the lower mounting frame 102. The upper end of the target post 100 is connected with hinge one 105, and the lower end of the target post 100 is connected with hinge two 108. There are several target posts 100, and the several target posts 100 are evenly arranged in the circumferential direction of hinge one 105. In the above technical solution, the motor drives the gear three to rotate, and the gear three drives the gear five to rotate, so that hinge one and hinge two move, and the targets on hinge one and hinge two also move with it. The combined target of the above structure, It is composed of several target columns and has a larger sputtering area, which can meet the needs of a large number of sputtering.

As shown in FIG. 5, the target column 100 includes a tubular target body 1, a tubular carrier body 2 and a mounting column 3. The carrier body 2 is sleeved on the installation column 3, and the target body 1 is sleeved on the carrier body. 2, the inside of the carrier 2 is provided with a cooling cavity, the carrier 2 is provided with a cooling liquid inlet 21 and a cooling liquid outlet 22, the cooling liquid inlet 21 and the cooling liquid outlet 22 are respectively connected to the cooling cavity Connectivity settings.

Wherein, the target body 1 can be rotated around its central axis.

As shown in Fig. 6, the carrier 2 is fixedly connected to the mounting column 3, and the mounting column 3 is connected with a driving device 4 for driving it to rotate.

As shown in FIG. 7, the carrying body 2 and the mounting post 3 are rotatably connected, and further includes a driving mechanism for driving the carrying body 2 to rotate.

Wherein, the driving mechanism includes gear one 5, gear two 6, and driving device two 7. The gear one 5 is coaxially arranged with the carrier 2 and arranged in linkage, the gear two 6 meshes with the gear one 5, and the drive device two 7 It is connected with the second gear 6 for driving the second gear 6 to rotate.

As shown in Figure 8, the mounting frame can be adjusted in the front, back, left, right, up and down directions, and the mounting frame can be rotated around its central axis. The combined target can be moved in multiple directions. An implementation of its movement is disclosed as follows

Among them, it also includes a fixed plate 200, the fixed plate 200 is arranged above the mounting frame, the gear three 103 and the gear four 104 form a rotating connection with the fixed plate 200, and the gear three 103 and the gear five 106 are linked by a central column one 201. , The gear four 104 and the gear six 107 are linked through the central column two 202, and the driving device three is arranged on the fixed plate 200.

Wherein, a sliding rod 203 and a sliding rod 204 are arranged above the fixed plate 200. The sliding rod 203 and the sliding rod 204 are arranged perpendicular to each other, and the sliding rod 203 and the sliding rod 204 form a sliding fit. The 204 can slide along the length of the sliding rod one 203, and the sliding rod 203 is provided with a driving device four (air cylinder) that drives the sliding rod two 204 to move. The above structure can realize the movement in the front and rear directions.

The fixed plate 200 is slidably connected to the second sliding rod 204. The fixed plate 200 can move along the length of the second sliding rod 204. The second sliding rod 204 is provided with a driving device five (air cylinder) that drives the fixed plate 200 to slide. Achieve movement in the left and right directions.

It also includes a fixed seat 205, the sliding rod 203 is fixedly connected to the lower side of the fixed seat 205, the fixed seat 205 is connected with a driving device 206 (motor) that drives it to rotate, and the fixed seat 205 is connected to drive it up and down. Moving drive device seven 207 (air cylinder).

As shown in FIG. 9, the tubular target body 1 is composed of a plurality of target blocks 300, and the target blocks 300 are assembled by connecting high-strength wires 301 in series to form the target body 1.

The radiation beam directed at the combined target at any angle in the horizontal direction will be completely blocked by the target column in the combined target. The above technical solution restricts the arrangement position of the target pillars in the combined target, and the arrangement density of the target pillars must ensure that the incident radiation beam will not penetrate through the gap between the target pillars.

The beneficial effects of the present invention:

The combined target provided by the present invention is composed of a plurality of single targets and can move in multiple directions, and is equipped with a cooling structure inside, which not only can obtain a large number of sputtering sources at low cost, but also improves The utilization rate of the target extends its service life. The structure of a single target column 100 is tubular. When the tubular target is used, the rotation of the tubular target can be adjusted to obtain a more uniform etching effect on the surface of the target, and the etching area can basically cover the entire target surface by adjusting the position of the target body 1.

The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modification, equivalent replacement, improvement, etc. within the spirit and principle of the present invention shall be included in the present invention Within the scope of protection.

Claims

A combined target, which is characterized in that it comprises a target column and a mounting frame. The mounting frame includes an upper mounting frame and a lower mounting frame spaced up and down, and the upper mounting frame includes gear three and gear four spaced apart from each other. Gear 3 and gear 4 are connected with an annular hinge 1. The lower mounting frame includes gear 5 and gear 6 spaced apart from each other. Gear 5 and gear 6 are connected with an annular hinge 2. Gear 3 and gear 5 are linked together. Drive gear three rotating drive device three, the target column is arranged between the upper mounting frame and the lower mounting frame, the upper end of the target column is connected with hinge one, the lower end of the target column is connected with hinge two, the target column is provided with several The target posts are evenly arranged in the circumferential direction of the hinge;

The target column includes a tubular target body, a tubular carrier body and a mounting column. The carrier body is sleeved on the installation column, the target body is sleeved on the carrier body, and the carrier body is provided with a cooling cavity inside. The carrier body is provided with a cooling liquid inlet and a cooling liquid outlet, and the cooling liquid inlet and the cooling liquid outlet are respectively communicated with the cooling cavity.
A combined target according to claim 1, wherein the target body can rotate around its central axis.
The combined target according to claim 2, characterized in that: the carrier is fixedly connected with the mounting post, and the mounting post is connected with a driving device one for driving the rotation.
A combined target according to claim 2, characterized in that: the supporting body is rotatably connected with the mounting post, and further comprising a driving mechanism for driving the supporting body to rotate.
A combined target according to claim 4, characterized in that: the driving mechanism comprises a gear one, a gear two, and a driving device two, the gear one is coaxial with the carrier and arranged in linkage, and the gear two It meshes with the gear one, and the driving device two is connected with the gear two for driving the gear two to rotate.
A combined target according to any one of claims 1-5, characterized in that: the mounting frame can be adjusted in the front, back, left, right, up and down directions, and the mounting frame It can rotate around its central axis.
A combined target according to claim 6, characterized in that it further comprises a fixed plate, said fixed plate is arranged above the mounting frame, gear three and gear four are in rotational connection with the fixed plate, and gear three is connected to the fixed plate. Gear five is linked through a central column one, gear four and gear six are linked through a central column two, and the driving device three is arranged on the fixed plate.
The combined target according to claim 7, characterized in that: a sliding rod one and two sliding rods are arranged above the fixed plate, the sliding rod one and the sliding rod two are arranged perpendicular to each other, and the sliding rod one and the sliding rod The second rod forms a sliding fit, the second slide rod can slide along the length of the first slide rod, the first slide rod is provided with a driving device four that drives the second slide rod to move, the fixed plate is slidably connected to the second slide rod, and the fixed plate can move along the second slide rod. Moving in the longitudinal direction, the second sliding rod is provided with a driving device 5 that drives the fixed plate to slide; it also includes a fixed seat, and the first sliding rod is fixedly connected to the lower side of the fixed seat, and the fixed seat is connected to drive it to rotate The drive device six of the fixed seat is connected with the drive device seven that drives it to move up and down.
The combined target according to claim 6, wherein the tubular target body is composed of a plurality of target blocks, and the plurality of target blocks are assembled by high-strength metal wires in series to form the target body.
The combined target according to claim 8, wherein the tubular target body is composed of a plurality of target blocks, and the plurality of target blocks are assembled by high-strength metal wires in series to form the target body.