CN209619440U - Combined type target piece - Google Patents
Combined type target piece Download PDFInfo
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- CN209619440U CN209619440U CN201920364059.7U CN201920364059U CN209619440U CN 209619440 U CN209619440 U CN 209619440U CN 201920364059 U CN201920364059 U CN 201920364059U CN 209619440 U CN209619440 U CN 209619440U
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- gear
- target
- mounting rack
- slide bar
- driving
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Abstract
The utility model proposes a kind of combined type target piece, including target column and mounting rack, the mounting rack includes upper and lower spaced upper mounting rack and lower mounting rack, upper mounting rack includes the gear three and gear four for being spaced apart from each other setting, the hinge one of annular is connected on gear three and gear four, lower mounting rack includes the gear five and gear six for being spaced apart from each other setting, the hinge two of annular is connected on gear five and gear six, gear three is connected with gear five, it further include the driving device three for driving gear three to rotate, target column is arranged between upper mounting rack and lower mounting rack, the upper end of target column is connect with hinge one, the lower end of target column is connect with hinge two, target column is equipped with several, several target columns are evenly distributed in one circumferential direction of hinge；The target column includes that tubular target body, tubular supporting body and mounting post, supporting body are set in mounting post, and target body is arranged on the carrier, and the inside of the supporting body is equipped with cooling cavities.
Description
Technical field
The utility model relates to a kind of combined type target piece.
Background technique
Target is it is to be understood that indicate the material being sputtered in cathodic sputtering system.Most of sputtering target used in past
It is constructed to so-called flat target rounded or in rectangle.However flat target has the drawback that and constitutes the flat target
Material only about 30% to 40% is effectively sputtered, and effective rate of utilization is low, and service life is short.And target used at present is all
Single target body, and a large amount of sputtering source in order to obtain, can often optimize irradiation beam, but to the excellent of irradiation beam
Change is often related to high cost and highly difficult problem.
Utility model content
Aiming at the problem that pointing out in background technique, the utility model proposes a kind of combined type target piece, by multiple monomer targets
It is composed, and can be carried out multidirectional movement, and it is internal configured with cooling structure, acquisition that not only can be inexpensive is a large amount of
Sputtering source, and the utilization rate of target is improved, extend its service life.
The technical solution of the utility model is achieved in that
A kind of combined type target piece, including target column and mounting rack, the mounting rack include upper and lower spaced upper installation
Frame and lower mounting rack, upper mounting rack include the gear three and gear four for being spaced apart from each other setting, are connected on gear three and gear four
The hinge one of annular, lower mounting rack includes the gear five and gear six for being spaced apart from each other setting, is connected on gear five and gear six
The hinge two of annular, gear three are connected with gear five, further include the driving device three for driving gear three to rotate, the setting of target column
Between upper mounting rack and lower mounting rack, the upper end of target column is connect with hinge one, and the lower end of target column is connect with hinge two, and target column is set
There are several, several target columns are evenly distributed in one circumferential direction of hinge；
The target column includes that tubular target body, tubular supporting body and mounting post, supporting body are set in mounting post, target
Body is arranged on the carrier, and the inside of the supporting body is equipped with cooling cavities, and the supporting body is equipped with cooling liquid inlet
And cooling liquid outlet, cooling liquid inlet and cooling liquid outlet are connected to setting with cooling cavities respectively.
The utility model is further arranged to, and the target body can be rotated around center axis thereof.
The utility model is further arranged to, and the supporting body is fixedly connected with mounting post, is connected in mounting post
The driving device one for driving it to rotate.
The utility model is further arranged to, and it further includes one that the supporting body is rotatably connected with mounting post formation
Drive the driving mechanism of supporting body rotation.
The utility model is further arranged to, and the driving mechanism includes gear one, gear two, driving device two,
The gear one is coaxial with supporting body and linkage setting, gear two are engaged with gear one, and driving device two is connect with gear two
For driving gear two to rotate.
The utility model is further arranged to: the mounting rack energy front, back, left, right, up, down direction carries out position
It adjusts, the mounting rack can be rotated around center axis thereof.
The utility model is further arranged to, and further includes fixed plate, and the top of mounting rack is arranged in the fixed plate,
Gear three and gear four and fixed plate, which are formed, to be rotatablely connected, and gear three is connected with gear five by newel one, gear four
It is connected with gear six by newel two, the driving device three is arranged in fixed plate.
The utility model is further arranged to, and slide bar one, slide bar two, slide bar one and cunning are equipped with above the fixed plate
Bar two is arranged in a mutually vertical manner, and slide bar one is slidably matched with the formation of slide bar two, and slide bar two can be slided along one length direction of slide bar, slide bar
One is equipped with the mobile driving device four of driving slider two, and fixed plate is slidably connected with slide bar two, and fixed plate can be long along slide bar two
Direction movement is spent, slide bar two is equipped with the driving device five of the driving fixed plate sliding；It further include fixing seat, the cunning
Bar one is fixedly connected on the downside of fixing seat, and the driving device six of its rotation of driving is connected in fixing seat, is connected in fixing seat
There is the driving device seven for driving it to move up and down.
The utility model is further arranged to, and tubular target body is made of several pieces of target blocks, and several target blocks pass through high-strength
Degree wire concatenates the target body that is assembled.
The utility model has the beneficial effects that
Combination target piece provided by the utility model is composed of multiple monomer targets, and can be carried out multidirectional movement,
And its it is internal be configured with cooling structure, not only can low cost a large amount of sputtering source of acquisition, and improve the utilization rate of target, prolong
Its service life is grown.Single target rod structure be it is tubular, by carrying out rotation adjusting to tubular target when use, enable the surface of target
Etch effect more evenly is obtained, and the position etching area by adjusting target body can cover the surface of entire target substantially.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, before not making the creative labor property
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of the utility model；
Fig. 3 is the structural schematic diagram of the utility model；
Fig. 4 is the structural schematic diagram of the utility model；
Fig. 5 is the structural schematic diagram of the utility model target column；
Fig. 6 is the structural schematic diagram of the utility model target column；
Fig. 7 is the structural schematic diagram of the utility model target column；
Fig. 8 is the structural schematic diagram of the utility model；
Fig. 9 is the structural schematic diagram of the utility model target body.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts
Every other embodiment obtained, fall within the protection scope of the utility model.
It is illustrated as follows with reference to Fig. 1-9 pairs of the utility model:
As shown in Figs 1-4, a kind of combined type target piece, including target column 100 and mounting rack, the mounting rack include between the upper and lower
Every the upper mounting rack 101 and lower mounting rack 102 of setting, upper mounting rack 101 includes the gear 3 103 and gear for being spaced apart from each other setting
4 104, the hinge 1 of annular is connected on gear 3 103 and gear 4 104, lower mounting rack 102 includes being spaced apart from each other setting
Gear 5 106 and gear 6 107, the hinge 2 108 of annular, gear 3 103 are connected on gear 5 106 and gear 6 107
It is connected with gear 5 106, further includes the driving device three (motor) for driving gear 3 103 to rotate, target column 100 is arranged upper
Between mounting rack 101 and lower mounting rack 102, the upper end of target column 100 is connect with hinge 1, the lower end of target column 100 and hinge
2 108 connections, target column 100 are equipped with several, several target columns 100 are evenly distributed in one 105 circumferential direction of hinge.It is above-mentioned
In technical solution, motor-driven gear three is rotated, and gear three is rotated with moving gear five, so that hinge one and hinge two are moved
It is dynamic, while the target piece on hinge one and hinge two is shifted along, the combined type target piece of above structure, by several target column combinations
It forms, there is bigger sputter area, be able to satisfy the demand largely sputtered.
As shown in figure 5, the target column 100 includes tubular target body 1, tubular supporting body 2 and mounting post 3, supporting body
2 are set in mounting post 3, and target body 1 is set on supporting body 2, and the inside of the supporting body 2 is equipped with cooling cavities, described
Supporting body 2 is equipped with cooling liquid inlet 21 and cooling liquid outlet 22, cooling liquid inlet 21 and cooling liquid outlet 22 respectively with cooling
Cavity connection setting.
Wherein, the target body 1 can be rotated around center axis thereof.
As shown in fig. 6, the supporting body 2 is fixedly connected with mounting post 3, it is connected in mounting post 3 and drives its rotation
Driving device 1.
As shown in fig. 7, the supporting body 2 is rotatably connected with the formation of mounting post 3, it further include 2 turns of a driving supporting body
Dynamic driving mechanism.
Wherein, the driving mechanism includes gear 1, gear 26, driving device 27, the gear 1 with hold
Carrier 2 is coaxial and linkage setting, gear 26 are engaged with gear 1, and driving device 27 is connect for sliding tooth with gear 26
Take turns 26 rotations.
As shown in figure 8, the mounting rack energy front, back, left, right, up, down direction carries out position adjusting, the installation
Frame can be rotated around center axis thereof.So that combined type target piece can be carried out multidirectional movement, it is disclosed as follows and realizes shifting
A kind of dynamic embodiment
It wherein, further include fixed plate 200, the top of mounting rack, gear 3 103 and tooth is arranged in the fixed plate 200
It takes turns 4 104 and forms rotation connection with fixed plate 200, gear 3 103 is connected with gear 5 106 by newel 1, tooth
It takes turns 4 104 to be connected with gear 6 107 by newel 2 202, the driving device three is arranged in fixed plate 200.
Wherein, slide bar 1, slide bar 2 204, slide bar 1 and slide bar 2 204 are equipped with above the fixed plate 200
It is arranged in a mutually vertical manner, slide bar 1 is slidably matched with the formation of slide bar 2 204, and slide bar 2 204 can be along one 203 length direction of slide bar
Sliding, slide bar 1 are equipped with the mobile driving device four (cylinder) of driving slider 2 204, and above structure can realize front and back
To movement.
Fixed plate 200 is slidably connected with slide bar 2 204, and fixed plate 200 can be moved along 2 204 length direction of slide bar, slide bar
2 204 are equipped with the driving device five (cylinder) that the driving fixed plate 200 is slided, and above structure can realize left and right directions
It is mobile.
It further include fixing seat 205, the slide bar 1 is fixedly connected on the downside of fixing seat 205, in fixing seat 205
It is connected with the driving device 6 206 (motor) of its rotation of driving, driving dress for driving it to move up and down is connected in fixing seat 205
Set 7 207 (cylinders).
As shown in figure 9, tubular target body 1 is made of several pieces of target blocks 300, several target blocks 300 pass through high duty metal silk
301 concatenate the target body 1 that is assembled.
The target column that the irradiation beam of any angle directive combined type target piece of horizontal direction can all be combined in target piece stops completely.
The arrangement position of target column in combined type target piece is limited in above-mentioned technical proposal, the arranging density of target column must assure that the photograph of injection
Beam will not be penetrated from the gap between target column.
The utility model has the beneficial effects that
Combination target piece provided by the utility model is composed of multiple monomer targets, and can be carried out multidirectional movement,
And its it is internal be configured with cooling structure, not only can low cost a large amount of sputtering source of acquisition, and improve the utilization rate of target, prolong
Its service life is grown.Single 100 structure of target column be it is tubular, by carrying out rotation adjusting to tubular target when use, make the table of target
Face can obtain etch effect more evenly, and the position etching area by adjusting target body 1 can cover the surface of entire target substantially.
It is above-described be only the utility model preferred embodiment, be not intended to limit the utility model, it is all
Within the spirit and principles of the utility model, it is practical new to should be included in this for any modification, equivalent replacement, improvement and so on
Within the protection scope of type.
Claims (10)
1. a kind of combined type target piece, it is characterised in that: including target column and mounting rack, the mounting rack includes between the upper and lower every setting
Upper mounting rack and lower mounting rack, upper mounting rack includes the gear three and gear four for being spaced apart from each other setting, gear three and gear four
On be connected with annular hinge one, lower mounting rack includes the gear five and gear six for being spaced apart from each other setting, gear five and gear six
On be connected with the hinge two of annular, it further includes the driving device three for driving the rotation of gear three that gear three is connected with gear five,
Target column is arranged between upper mounting rack and lower mounting rack, and the upper end of target column is connect with hinge one, and the lower end of target column and hinge two connect
It connects, target column is equipped with several, several target columns are evenly distributed in one circumferential direction of hinge；
The target column includes that tubular target body, tubular supporting body and mounting post, supporting body are set in mounting post, target body set
If on the carrier, the inside of the supporting body is equipped with cooling cavities, the supporting body is equipped with cooling liquid inlet and cold
But liquid exports, and cooling liquid inlet and cooling liquid outlet are connected to setting with cooling cavities respectively.
2. a kind of combined type target piece according to claim 1, it is characterised in that: the target body can around center axis thereof into
Row rotation.
3. a kind of combined type target piece according to claim 2, it is characterised in that: the supporting body and mounting post is fixed to be connected
It connects, the driving device one of its rotation of driving is connected in mounting post.
4. a kind of combined type target piece according to claim 2, it is characterised in that: the supporting body and mounting post formation can
Rotation connection further includes the driving mechanism of driving supporting body rotation.
5. a kind of combined type target piece according to claim 4, it is characterised in that: the driving mechanism include gear one,
Gear two, driving device two, the gear one is coaxial with supporting body and linkage setting, gear two are engaged with gear one, drives
Device two is connect for driving gear two to rotate with gear two.
6. a kind of combined type target piece according to claim 1-5, it is characterised in that: before the mounting rack energy,
Afterwards, left and right, upper and lower direction carries out position adjusting, and the mounting rack can be rotated around center axis thereof.
7. a kind of combined type target piece according to claim 6, it is characterised in that: it further include fixed plate, the fixed plate
The top of mounting rack, gear three and gear four are set and fixed plate is formed and is rotatablely connected, gear three and gear five pass through center
Column one is connected, and gear four is connected with gear six by newel two, and the driving device three is arranged in fixed plate
On.
8. a kind of combined type target piece according to claim 7, it is characterised in that: be equipped with slide bar above the fixed plate
One, slide bar two, slide bar one are arranged in a mutually vertical manner with slide bar two, and slide bar one is slidably matched with the formation of slide bar two, and slide bar two can be along cunning
The sliding of one length direction of bar, slide bar one are equipped with the mobile driving device four of driving slider two, and fixed plate and the sliding of slide bar two connect
It connects, fixed plate can be moved along two length direction of slide bar, and slide bar two is equipped with the driving device five of the driving fixed plate sliding；
It further include fixing seat, the slide bar one is fixedly connected on the downside of fixing seat, and the drive of its rotation of driving is connected in fixing seat
Device six is moved, the driving device seven for driving it to move up and down is connected in fixing seat.
9. a kind of combined type target piece according to claim 6, it is characterised in that: tubular target body is by several pieces of target block groups
At several target blocks concatenate the target body that is assembled by high duty metal silk.
10. a kind of combined type target piece according to claim 8, it is characterised in that: tubular target body is by several pieces of target block groups
At several target blocks concatenate the target body that is assembled by high duty metal silk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920364059.7U CN209619440U (en) | 2019-03-21 | 2019-03-21 | Combined type target piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920364059.7U CN209619440U (en) | 2019-03-21 | 2019-03-21 | Combined type target piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209619440U true CN209619440U (en) | 2019-11-12 |
Family
ID=68457393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920364059.7U Active CN209619440U (en) | 2019-03-21 | 2019-03-21 | Combined type target piece |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209619440U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111719123A (en) * | 2019-03-21 | 2020-09-29 | 广东太微加速器有限公司 | Combined target |
-
2019
- 2019-03-21 CN CN201920364059.7U patent/CN209619440U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111719123A (en) * | 2019-03-21 | 2020-09-29 | 广东太微加速器有限公司 | Combined target |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200311 Address after: 523808 room 310, building 1, No. 8, South Industrial Road, Songshanhu Park, Dongguan City, Guangdong Province Patentee after: Guangdong Taiwei accelerator Co., Ltd Address before: 101149 Beijing Tongzhou Canal Core Area IV-07 Block Greenbelt Building, 22 Floors 21389 Patentee before: Beijing Zhongbaiyuan International Science and Technology Innovation Research Co., Ltd. |
|
| TR01 | Transfer of patent right |