WO2020179855A1 - Conduction diffusion bonding device - Google Patents

Conduction diffusion bonding device Download PDF

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Publication number
WO2020179855A1
WO2020179855A1 PCT/JP2020/009289 JP2020009289W WO2020179855A1 WO 2020179855 A1 WO2020179855 A1 WO 2020179855A1 JP 2020009289 W JP2020009289 W JP 2020009289W WO 2020179855 A1 WO2020179855 A1 WO 2020179855A1
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temperature information
joined
members
temperature
output
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PCT/JP2020/009289
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French (fr)
Japanese (ja)
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水野芳伸
中村武
伊藤誠
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Eco-A株式会社
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Priority to JP2021503640A priority Critical patent/JPWO2020179855A1/ja
Priority to CN202080018581.5A priority patent/CN113543919A/en
Publication of WO2020179855A1 publication Critical patent/WO2020179855A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating

Definitions

  • the present invention relates to a current diffusion bonding device for bonding members to be bonded together.
  • a member to be joined is sandwiched between electrodes, and a current (direct current or pulse) is passed between the electrodes while pressure is applied to the joining surface via the electrodes by a pressure mechanism. To heat. Then, in the solid phase temperature range equal to or lower than the melting temperature of the member to be joined, the joint surface is brought into close contact due to softening and deformation of the material, and the joint is joined by the solid phase diffusion phenomenon.
  • Patent Document 1 also describes measures against thermal expansion of the member to be joined. However, in ON/OFF temperature control, since stress is repeatedly applied to the members to be joined, these measures alone are insufficient.
  • an object of the present invention is to provide an energization diffusion joining device capable of controlling the output of a power source more precisely and enabling precise temperature control of a member to be joined.
  • the energization diffusion joining device of the present invention energizes and joins a plurality of abutted members to be joined, and conducts electricity to the plurality of members to be joined.
  • a plurality of electrodes for making the electrodes a power source capable of continuously changing the output applied to the plurality of electrodes, a temperature information providing unit that provides temperature information of the member to be joined or the electrodes, and the temperature information providing unit.
  • an output control unit that controls the output of the power supply with an up-slope based on the temperature information from.
  • a voltage drop detecting means capable of detecting a voltage drop on the joint surface by supplying a constant current to the jointed member may be provided. Further, the output control unit may control the output of the power source based on the voltage drop detected by the voltage drop detection means.
  • the temperature information providing unit may be a temperature sensor that detects the temperature information of the member to be joined or the electrode, or the temperature information storage in which the temperature information of the member to be joined or the electrode is stored. It may be a department.
  • the current diffusion bonding apparatus of the present invention includes a pressurizing unit for applying pressure to the bonding surface of the members to be bonded.
  • the energization diffusion joining device of the present invention can control a more precise power supply, enable precise temperature control or pressure control of the member to be joined, and can perform joining with strong joining strength and small variation.
  • the electric diffusion bonding apparatus 10 of the present invention will be described with reference to FIGS. 1 to 3.
  • the energization diffusion joining device 10 of the present invention energizes and joins a plurality of members 1 to be joined with the joining surface S, and includes an electrode 2, a power source 3, a temperature information providing unit 4, and the like. It is mainly configured with the output control unit 5.
  • the member 1 to be joined is a member to be joined on the joint surface S, and any material, shape, etc. may be used as long as it can be energized.
  • Materials include steel materials such as stainless steel, non-ferrous metals such as copper, aluminum and zinc, metal materials such as various alloys including aluminum, nickel, chromium, titanium and copper, as well as ceramics having high temperature conductivity. , Semiconductors, non-ferrous materials such as single crystal materials.
  • the member 1 to be joined may be made of the same material or a different material.
  • examples of the shape include a pipe shape, a bulk shape, a thick plate shape, and a thin plate shape, and arbitrary processing such as groove processing and hole forming processing may be performed.
  • the joining surface S is preferably flat, but may be a curved surface, for example, a curved surface having the same curvature, as long as no gap is formed. Further, the joint surface S is preferably a mirror surface, but may be a rough surface.
  • the electrode 2 is for conducting electricity output from the power source 3 to the plurality of members 1 to be joined.
  • the energization diffusion joining device 10 may be provided with at least two electrodes 2 in order to conduct electricity to the member 1 to be joined, and is provided, for example, at a portion of the member 1 to be joined that faces the joint surface S. ..
  • three or more electrodes 2 may be provided depending on the material and shape of the member to be joined 1.
  • the electrode 2 may be made of any material as long as electricity can be conducted through the member 1 to be joined, and for example, copper, molybdenum, tungsten, or the like can be used. Further, the electrode 2 is connected to the power source 3 via the cable 31.
  • the power supply 3 is for outputting electric power to a plurality of electrodes 2.
  • the power supply 3 may be any power source 3 as long as the outputs applied to the plurality of electrodes 2 can be continuously changed, and for example, a known inverter power supply can be used.
  • the temperature information providing unit 4 is for providing the output control unit 5 with the temperature information of the member to be joined 1 or the electrode 2.
  • the temperature information means information on the temperature of the member 1 to be joined or the electrode 2, and may be the information as it is, or is converted from the temperature by calculation, for example, a voltage value that determines the voltage of the power supply 3. It may be information.
  • a temperature sensor that detects the temperature of the member to be joined 1 or the electrode 2 can be used.
  • the temperature sensor may be any one as long as it can detect the temperature of the joining member or the electrode 2.
  • a non-contact type sensor that detects the temperature in a non-contact manner such as an infrared radiation thermometer, or the joining member 1 or A contact type sensor such as a thermocouple that contacts the electrode 2 to detect the temperature may be used. It is also possible to use a non-contact type and a contact type together.
  • the output control unit 5 is for controlling the output of the power supply 3 with an upslope based on the temperature information from the temperature information providing unit 4.
  • a constant current is supplied for a fixed time, or a constant current is supplied by ON/OFF control, so that the temperature at a location where the current is concentrated may rise rapidly.
  • the bonding state of the bonding surface S becomes non-uniform, for example, the bonding state at the relevant portion becomes a liquid phase bond, which leads to variations in the bonding state.
  • the up-slope control the current is gradually increased, so that sudden current concentration is suppressed and the temperature of the joint surface can be made uniform.
  • the output control unit 5 can continuously control the output of the power supply 3 in real time with an upslope based on the temperature information detected by the temperature sensor, and can enable precise temperature control of the member 1 to be joined. Therefore, it is possible to perform joining with high joining strength on the joining surface S between the joining members and with little variation. Further, since such continuous control can maintain the thermal expansion constant as compared with the ON / OFF control, the influence of the pressure fluctuation due to the thermal expansion can be reduced.
  • the output control unit 5 may be any as long as the output of the power supply 3 can be controlled by an upslope based on the temperature information from the temperature information providing unit 4, but for example, the CPU, ROM, RAM, I / O.
  • the operation unit 51 and the display unit 52 that are electrically connected to each other can be used. Specifically, a known PID temperature controller such as a high speed sampling temperature controller can be used. It should be noted that the operation unit 51 is composed of various operation switches such as a start switch and a start switch, an input panel including a touch panel, and the like. The information input from the operation unit 51 is transmitted to the output control unit 5.
  • the display unit 52 receives information from the output control unit 5 based on the input to the output control unit 5 or the calculation result of the output control unit 5, and displays the information.
  • the display unit 52 is composed of a digital display panel, a lamp, and the like.
  • the temperature information providing unit 4 described above acquires the temperature of the member 1 or the electrode 2 to be joined in real time using a temperature sensor and provides the output control unit 5 with the temperature information of the member 1 or the electrode 2 to be joined.
  • the members 1 to be joined of the same material are joined in the same environment using the current-carrying diffusion joining device 10 of the present invention, the relationship between the elapsed time and the temperature of the members 1 to be joined or the electrode 2 has the same result. Therefore, if temperature information indicating the relationship between the elapsed time and the temperature of the member 1 or the electrode 2 is acquired in advance, the temperature information can be provided without using the temperature sensor.
  • the temperature information providing unit 4 may be a temperature information storage unit that stores temperature information indicating the relationship between the elapsed time of the member to be joined 1 or the electrode 2 and the temperature of the member to be joined 1 or the electrode 2. Accordingly, the output control unit 5 can control the output of the power supply 3 based on the temperature information stored in the temperature information storage unit.
  • the temperature information storage may be of any type as long as the temperature information for determining the relationship between the elapsed time and the output of the power supply 3 can be stored. For example, a known memory or the like may be used.
  • the current-carrying diffusion bonding apparatus 10 of the present invention may be provided with a voltage drop detecting means 53 that can supply a constant current to the members to be bonded 1 and can detect the voltage drop on the bonding surface S.
  • the output control unit 5 can also control the output of the power supply 3 based on the voltage drop detected by the voltage drop detecting means 53. As a result, it is possible to further precisely control the temperature of the member 1 to be joined. Therefore, it is possible to perform joining with high joining strength on the joining surface S between the joining members and with little variation.
  • the current diffusion bonding apparatus 10 includes a pressure unit 8 for applying pressure to the bonding surface S of the members 1 to be bonded.
  • the structure of the pressurizing portion 8 may be any as long as pressure can be applied to the joint surface S of the member 1 to be joined.
  • the pressurizing member 81 to which the electrode 2 is fixed and the pressurizing member 81 are driven.
  • a ball screw mechanism 83 that transmits the driving force of the driving source 82 and moves the pressing member 81 up and down.
  • the pressing member 81 is formed in a substantially columnar shape so as to have versatility, but may be formed in conformity with the shape of the member to be joined 1 or in conformity with the shape of the member to be joined 1. An intermediate member may be sandwiched between them.
  • the material of the pressure member 81 may be any material as long as it has rigidity against pressure, and for example, a metal such as stainless steel, copper, molybdenum, or tungsten may be used. ..
  • the pressing member 81 may have a cooling unit for cooling the bonded member 1. Any cooling means may be used as long as it can cool the members 1 to be joined.
  • a cooling fluid such as tap water may be circulated in the flow path.
  • the flow path may be provided in the pressurizing member 81 itself, or the cooling block in which the flow path is formed may be arranged in close contact with the pressurizing member 81. ..
  • a servomotor with a speed reducer can be used as the drive source 82.
  • An encoder 74 is attached to the servo motor, and is arranged on a mount (not shown). ..
  • the ball screw mechanism 83 is composed of a screw shaft extending in the vertical direction and having a thread groove formed on the outer peripheral surface, a nut having a thread groove formed on the inner peripheral surface, and a plurality of balls accommodated between the thread grooves. It is configured.
  • the nut is fixed to the upper part of the pressing member 81 via an insulator made of Bakelite or the like and the pressure sensor 73.
  • the screw shaft is connected to the rotating shaft of the servomotor via a speed reducer.
  • the pressurizing unit 8 regulates the displacement of the member 1 to be joined and applies pressure to the joining surface S. ..
  • the pressurizing unit 8 may include a pressure sensor 73 that detects the pressure of the joint surface S.
  • the pressure sensor 73 is, for example, a uniaxial load cell that measures vertical pressure, but a multiaxial pressure sensor may be used.
  • the pressure sensor 73 can indirectly detect the pressure applied to the joint surface S between the members 1 to be joined. ..
  • the pressurizing portion 8 may further include an elastic force urging means 84 for urging the joint surfaces S of the members to be joined 1 with an elastic force.
  • the elastic force urging means 84 is arranged between the base member 6 on which the pressure member 81 is arranged and the base 9 of the current-carrying diffusion joining device 10.
  • the elastic force urging means 84 is composed of, for example, a spring 84a and a block body 84b for restricting the spring 84a to a preset length shorter than the free length between the spring 84a and the base member 6.
  • the pressure exerted on the joined member 1 from the base member 6 pushed up by the elastic force urging means 84 varies depending on the material and shape of the joined member 1, but is, for example, 5 to 100N. This pressure can then be changed by replacing the spring 84a. With this configuration, even if the member 1 to be joined undergoes thermal expansion or contraction, a sudden change in pressure acting on the joint surface S can be alleviated. ..
  • the pressurizing unit 8 may have any other configuration as long as it presses the members 1 to be welded with the joint surface S.
  • the energization heating joining device 10 of the present invention may further include a pressure control unit 7 for controlling the pressure applied to the joining surface S.
  • the pressure control unit 7 is composed of, for example, a CPU, a ROM, a RAM, an I / O, and the like, and the operation unit 71 and the display unit 72 are electrically connected to each other.
  • the operation unit 71 is composed of a start switch, various operation switches such as a start switch, and an input panel including a touch panel.
  • the information input from the operation unit 71 is transmitted to the pressure control unit 7.
  • the display unit 72 receives information from the pressure control unit 7 based on the input to the pressure control unit 7 or the calculation result of the pressure control unit 7, and displays the information.
  • the display unit 72 is composed of a digital display panel, a lamp, and the like.
  • the pressure control unit 7 may be the same as the output control unit 5 described above. ..
  • detection signals are input to the pressure control unit 7 from the encoder 74, the pressure sensor 73, and the temperature sensor.
  • the pressure control unit 7 is based on these detection signals, information input from the operation unit 71, and control information such as set pressure Ps, lower limit set pressure Ps1, set temperature Ts, and set holding time Hs stored in the storage unit.
  • a control signal is output to the power supply 3 and the servomotor.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)

Abstract

The purpose of the present invention is to provide a conduction diffusion bonding device enabling fine control of a power source output and making it possible to finely manage the temperature of a member to be bonded. A conduction diffusion bonding device 10 for bonding a plurality of members 1 to be bonded, which abut at bonding surfaces S, by energizing the members, wherein the current diffusion bonding device 10 is provided with: a plurality of electrodes 2 for energizing the plurality of members 1 to be bonded; a power source 3 that can continuously modify the output applied to the plurality of electrodes 2; a temperature information provision unit 4 for providing temperature information about the members 1 to be bonded or the electrodes 2; and an output control unit 5 for controlling the output of the power source 3 with an upslope on the basis of the temperature information from the temperature information provision unit 4.

Description

通電拡散接合装置Energization diffusion joining device
 本発明は、被接合部材同士を接合するための通電拡散接合装置に関するものである。 The present invention relates to a current diffusion bonding device for bonding members to be bonded together.
 従来、金属部材を固相温度範囲で加熱して原子の拡散現象により接合を行う通電拡散接合が知られている(例えば、特許文献1参照)。通電拡散接合は、難溶接性金属材料からなる同種材又は異種材の接合に好適である。 Conventionally, there is known an energization diffusion bonding in which a metal member is heated in a solid phase temperature range and bonded by an atomic diffusion phenomenon (see, for example, Patent Document 1). The electric current diffusion bonding is suitable for bonding the same kind of material or different kinds of material made of a hard-to-weld metal material.
 通電拡散接合では、電極の間に被接合部材が挟まれ、加圧機構により電極を介して接合面に圧力が付与された状態で、電極間に電流(直流またはパルス)を流して被接合部材を加熱させる。そして、被接合部材の溶融温度以下の固相温度範囲で、材料の軟化、変形による接合面の密着と固相拡散現象により接合する。 In current diffusion bonding, a member to be joined is sandwiched between electrodes, and a current (direct current or pulse) is passed between the electrodes while pressure is applied to the joining surface via the electrodes by a pressure mechanism. To heat. Then, in the solid phase temperature range equal to or lower than the melting temperature of the member to be joined, the joint surface is brought into close contact due to softening and deformation of the material, and the joint is joined by the solid phase diffusion phenomenon.
特開2012-6068JP 2012-6068
 ここで、通電拡散接合では、被接合部材の接合面に流れる電流密度を均一化し、接合面の温度を一様にする必要がある。しかし従来のパルスステップ応答では電流値をある程度小さく絞っても、電流の集中する箇所が不特定に発生する。電流の集中した箇所の温度は急激に上昇するため、その箇所の接合状態は急速に液相結合となり、接合界面の接合状態は不均一な状態となり接合強度のばらつきに繋がる。通電拡散接合では、固相領域で原子の移動を即す観点から、最適な接合温度条件を一定時間維持する必要がある。よって、通電拡散接合では被接合部材の温度管理が非常に重要で、被接合部材で熱に変換される電力エネルギーの管理が重要になる。 Here, in the current diffusion bonding, it is necessary to make the current density flowing through the bonding surface of the member to be bonded uniform and the temperature of the bonding surface uniform. However, in the conventional pulse step response, even if the current value is narrowed down to some extent, the location where the current is concentrated occurs unspecified. Since the temperature at the location where the current is concentrated rises sharply, the bonding state at that location rapidly becomes a liquid phase bond, and the bonding state at the bonding interface becomes non-uniform, leading to variations in bonding strength. In current diffusion bonding, it is necessary to maintain the optimum bonding temperature condition for a certain time from the viewpoint of accelerating the movement of atoms in the solid phase region. Therefore, in the current diffusion bonding, the temperature control of the member to be joined is very important, and the control of the electric power energy converted into heat by the member to be joined is important.
 しかしながら、一般的な抵抗溶接などでは、温度は供給した電力量(電流×時間)による二次的な要素であり、一次的に制御されることは殆どない。従来の方法は、電流を一定時間通電する、若しくは制御する場合でもON/OFF制御など緻密な制御ではないため、接合強度のバラツキが大きくなるなどの問題点があった。 However, in general resistance welding, temperature is a secondary factor depending on the amount of electric power supplied (current x time), and is rarely controlled primary. The conventional method has a problem in that the variation in the bonding strength is large because ON/OFF control is not a precise control even when the current is supplied or controlled for a certain period of time.
 また、通電拡散接合では、接合面に印加される荷重も接合強度の重要な要素となり、荷重を一定に保つためには発熱時の被接合部材の熱膨張に対する対策も必要になる。これについては、特許文献1においても、被接合部材の熱膨張に対する対策が述べられている。しかし、ON/OFF温度制御においては、被接合部材に繰り返し応力が印加されるため、これらの対応だけでは不足である。 In addition, in the current diffusion bonding, the load applied to the bonding surface is also an important factor of the bonding strength, and in order to keep the load constant, it is necessary to take measures against the thermal expansion of the members to be bonded during heat generation. Regarding this, Patent Document 1 also describes measures against thermal expansion of the member to be joined. However, in ON/OFF temperature control, since stress is repeatedly applied to the members to be joined, these measures alone are insufficient.
 そこで、本発明では、より緻密に電源の出力を制御することができ、被接合部材の緻密な温度管理を可能とする通電拡散接合装置を提供することを目的とする。 Therefore, an object of the present invention is to provide an energization diffusion joining device capable of controlling the output of a power source more precisely and enabling precise temperature control of a member to be joined.
 上記目的を達成するために、本発明の通電拡散接合装置は、接合面を当接された複数の被接合部材に通電して接合するものであって、前記複数の被接合部材に電気を導通させるための複数の電極と、前記複数の電極に付与する出力を連続的に変更可能な電源と、前記被接合部材又は前記電極の温度情報を提供する温度情報提供部と、前記温度情報提供部からの温度情報に基づいて前記電源の出力をアップスロープで制御する出力制御部と、を具備することを特徴とする。 In order to achieve the above object, the energization diffusion joining device of the present invention energizes and joins a plurality of abutted members to be joined, and conducts electricity to the plurality of members to be joined. A plurality of electrodes for making the electrodes, a power source capable of continuously changing the output applied to the plurality of electrodes, a temperature information providing unit that provides temperature information of the member to be joined or the electrodes, and the temperature information providing unit. And an output control unit that controls the output of the power supply with an up-slope based on the temperature information from.
  この場合、前記被接合部材に一定の電流を供給し、前記接合面の電圧降下を検出可能な電圧降下検出手段を具備しても良い。また、前記出力制御部は、前記電圧降下検出手段が検出した電圧降下に基づいて前記電源の出力を制御するものであっても良い。 In this case, a voltage drop detecting means capable of detecting a voltage drop on the joint surface by supplying a constant current to the jointed member may be provided. Further, the output control unit may control the output of the power source based on the voltage drop detected by the voltage drop detection means.
 また、前記温度情報提供部は、前記被接合部材又は前記電極の温度情報を検出する温度センサであっても良いし、また、前記被接合部材又は前記電極の温度情報が格納された温度情報格納部であっても良い。 Further, the temperature information providing unit may be a temperature sensor that detects the temperature information of the member to be joined or the electrode, or the temperature information storage in which the temperature information of the member to be joined or the electrode is stored. It may be a department.
  また、本発明の通電拡散接合装置は、前記被接合部材の前記接合面に圧力を付与するための加圧部を備える。 Further, the current diffusion bonding apparatus of the present invention includes a pressurizing unit for applying pressure to the bonding surface of the members to be bonded.
 本発明の通電拡散接合装置は、より緻密な電力供給をコントロールでき、被接合部材の緻密な温度管理、または圧力管理を可能とし、接合強度が強くバラツキが小さい接合を行う事ができる。 The energization diffusion joining device of the present invention can control a more precise power supply, enable precise temperature control or pressure control of the member to be joined, and can perform joining with strong joining strength and small variation.
本発明の通電拡散接合装置を示す一部断面図である。It is a partial cross section figure which shows the electrical diffusion bonding apparatus of this invention. 本発明に係る出力制御部を説明するためのブロック図である。It is a block diagram for explaining an output control unit according to the present invention. 本発明に係る圧力制御部を説明するためのブロック図である。It is a block diagram for explaining a pressure control part concerning the present invention.
 本発明の通電拡散接合装置10について、図1から図3を用いて説明する。本発明の通電拡散接合装置10は、接合面Sを当接された複数の被接合部材1に通電して接合するものであって、電極2と、電源3と、温度情報提供部4と、出力制御部5とで主に構成される。 The electric diffusion bonding apparatus 10 of the present invention will be described with reference to FIGS. 1 to 3. The energization diffusion joining device 10 of the present invention energizes and joins a plurality of members 1 to be joined with the joining surface S, and includes an electrode 2, a power source 3, a temperature information providing unit 4, and the like. It is mainly configured with the output control unit 5.
 ここで被接合部材1とは、接合面Sで接合させたい部材のことであり、通電可能であれば、その材質や形状等はどのようなものでもよい。材質としては、例えば、ステンレス鋼などの鉄鋼材料、銅、アルミニウム、亜鉛などの非鉄金属、アルミニウム、ニッケル、クロム、チタン、銅等を含む各種合金などの金属材料のほか、高温導電性を有するセラミック、半導体、単結晶材などの非金属材料が挙げられる。また、被接合部材1は、同じ材質のものであっても、異なる材質のものであってもよい。また、形状としては、例えば、パイプ状、バルク状、厚板状、薄板状が挙げられ、溝加工、穴開け加工など任意の加工が施されていてもよい。接合面Sは、平坦であることが好ましいが、隙間が形成されなければ曲面、例えば同じ曲率の曲面であってもよい。また、接合面Sは、鏡面であることが好ましいが、粗面であってもよい。 Here, the member 1 to be joined is a member to be joined on the joint surface S, and any material, shape, etc. may be used as long as it can be energized. Materials include steel materials such as stainless steel, non-ferrous metals such as copper, aluminum and zinc, metal materials such as various alloys including aluminum, nickel, chromium, titanium and copper, as well as ceramics having high temperature conductivity. , Semiconductors, non-ferrous materials such as single crystal materials. Further, the member 1 to be joined may be made of the same material or a different material. Further, examples of the shape include a pipe shape, a bulk shape, a thick plate shape, and a thin plate shape, and arbitrary processing such as groove processing and hole forming processing may be performed. The joining surface S is preferably flat, but may be a curved surface, for example, a curved surface having the same curvature, as long as no gap is formed. Further, the joint surface S is preferably a mirror surface, but may be a rough surface.
 電極2は、複数の被接合部材1に電源3から出力された電気を導通させるためのものである。通電拡散接合装置10には、被接合部材1に電気を導通させるために少なくとも2つの電極2を備えていればよく、例えば、被接合部材1の接合面Sを挟んで対向する部分に設けられる。もちろん、被接合部材1の材質や形状等によっては3以上の電極2を備えていてもよい。電極2の材質としては、被接合部材1に電気を導通させることができればどのような材質でも良く、例えば、銅、モリブデン、タングステン等を用いることができる。また、電極2はケーブル31を介して電源3と接続される。 The electrode 2 is for conducting electricity output from the power source 3 to the plurality of members 1 to be joined. The energization diffusion joining device 10 may be provided with at least two electrodes 2 in order to conduct electricity to the member 1 to be joined, and is provided, for example, at a portion of the member 1 to be joined that faces the joint surface S. .. Of course, three or more electrodes 2 may be provided depending on the material and shape of the member to be joined 1. The electrode 2 may be made of any material as long as electricity can be conducted through the member 1 to be joined, and for example, copper, molybdenum, tungsten, or the like can be used. Further, the electrode 2 is connected to the power source 3 via the cable 31.
 電源3は複数の電極2に電力を出力するためのものである。当該電源3としては、複数の電極2に付与する出力を連続的に変更可能であればどのようなものでもよいが、例えば、公知のインバータ電源を用いることができる。 The power supply 3 is for outputting electric power to a plurality of electrodes 2. The power supply 3 may be any power source 3 as long as the outputs applied to the plurality of electrodes 2 can be continuously changed, and for example, a known inverter power supply can be used.
 温度情報提供部4は、出力制御部5に被接合部材1又は電極2の温度情報を提供するためのものである。なお、温度情報とは、被接合部材1又は電極2の温度に関する情報を意味し、温度そのままの情報であってもよいし、例えば電源3の電圧を決める電圧値等、温度から計算によって変換された情報であってもよい。温度情報提供部4としては、例えば、被接合部材1又は電極2の温度を検出する温度センサを用いることができる。温度センサは、接合部材又は電極2の温度を検出できればどのようなものでもよいが、例えば、赤外線放射温度計等のように非接触で温度を検出する非接触式センサや、被接合部材1又は電極2に接触させて温度を検出する熱電対等の接触式センサを用いればよい。また、非接触式のものと接触式のものを併用することも可能である。 The temperature information providing unit 4 is for providing the output control unit 5 with the temperature information of the member to be joined 1 or the electrode 2. The temperature information means information on the temperature of the member 1 to be joined or the electrode 2, and may be the information as it is, or is converted from the temperature by calculation, for example, a voltage value that determines the voltage of the power supply 3. It may be information. As the temperature information providing unit 4, for example, a temperature sensor that detects the temperature of the member to be joined 1 or the electrode 2 can be used. The temperature sensor may be any one as long as it can detect the temperature of the joining member or the electrode 2. For example, a non-contact type sensor that detects the temperature in a non-contact manner such as an infrared radiation thermometer, or the joining member 1 or A contact type sensor such as a thermocouple that contacts the electrode 2 to detect the temperature may be used. It is also possible to use a non-contact type and a contact type together.
 出力制御部5は、温度情報提供部4からの温度情報に基づいて電源3の出力をアップスロープで制御するためのものである。従来は一定の電流を一定時間通電するか、あるいは一定の電流をON/OFF制御で通電していたため、電流の集中した箇所の温度が急激に上昇することがあった。この場合、当該箇所の接合状態が液相結合になる等、接合面Sの接合状態が不均一になり接合状態のばらつきにつながる。これに対しアップスロープ制御では、電流を徐々に上げていくため急激な電流集中が抑制され接合面の温度を均一にすることができる。したがって、接合面Sに均一な拡散層を成長させることが可能となり、強度の均一化を図ることができる。また、出力制御部5は、温度センサで検出した温度情報に基づいてリアルタイムで電源3の出力をアップスロープで連続制御し、被接合部材1の緻密な温度管理を可能とすることができる。したがって、接合部材同士の接合面Sにおける接合強度が高く、ばらつきの小さい接合を行うことができる。更に、このような連続制御は、ON/OFF制御と比べて熱膨張を一定に維持することができるため、熱膨張による圧力変動の影響を低減することができる。 The output control unit 5 is for controlling the output of the power supply 3 with an upslope based on the temperature information from the temperature information providing unit 4. Conventionally, a constant current is supplied for a fixed time, or a constant current is supplied by ON/OFF control, so that the temperature at a location where the current is concentrated may rise rapidly. In this case, the bonding state of the bonding surface S becomes non-uniform, for example, the bonding state at the relevant portion becomes a liquid phase bond, which leads to variations in the bonding state. On the other hand, in the up-slope control, the current is gradually increased, so that sudden current concentration is suppressed and the temperature of the joint surface can be made uniform. Therefore, it becomes possible to grow a uniform diffusion layer on the bonding surface S, and the strength can be made uniform. Further, the output control unit 5 can continuously control the output of the power supply 3 in real time with an upslope based on the temperature information detected by the temperature sensor, and can enable precise temperature control of the member 1 to be joined. Therefore, it is possible to perform joining with high joining strength on the joining surface S between the joining members and with little variation. Further, since such continuous control can maintain the thermal expansion constant as compared with the ON / OFF control, the influence of the pressure fluctuation due to the thermal expansion can be reduced.
 出力制御部5としては、温度情報提供部4からの温度情報に基づいて電源3の出力をアップスロープで制御することができればどのようなものでもよいが、例えば、CPU、ROM、RAM、I/O等から構成され、操作部51及び表示部52が電気的に接続されているものを用いることができる。具体的には、高速サンプリング温度調節計のような公知のPID温度制御装置を用いることができる。なお、操作部51は、ここでは、起動スイッチ、スタートスイッチ等の各種の操作スイッチ、タッチパネル等からなる入力盤などから構成されている。操作部51から入力された情報は、出力制御部5に送信される。また、表示部52は、出力制御部5への入力、又は出力制御部5での演算結果に基づく情報を出力制御部5から受信し、その情報を表示する。表示部52は、ここでは、デジタル表示パネル、ランプなどから構成されている。 The output control unit 5 may be any as long as the output of the power supply 3 can be controlled by an upslope based on the temperature information from the temperature information providing unit 4, but for example, the CPU, ROM, RAM, I / O. The operation unit 51 and the display unit 52 that are electrically connected to each other can be used. Specifically, a known PID temperature controller such as a high speed sampling temperature controller can be used. It should be noted that the operation unit 51 is composed of various operation switches such as a start switch and a start switch, an input panel including a touch panel, and the like. The information input from the operation unit 51 is transmitted to the output control unit 5. Further, the display unit 52 receives information from the output control unit 5 based on the input to the output control unit 5 or the calculation result of the output control unit 5, and displays the information. Here, the display unit 52 is composed of a digital display panel, a lamp, and the like.
 なお、上述した温度情報提供部4では、温度センサを用いて被接合部材1又は電極2の温度をリアルタイムで取得し、出力制御部5に被接合部材1又は電極2の温度情報を提供する場合について説明した。しかし、本発明の通電拡散接合装置10を使って同じ材料の被接合部材1を同一環境で接合する場合、経過時間と被接合部材1又は電極2の温度の関係は同様の結果となる。そのため、予め経過時間と被接合部材1又は電極2の温度の関係を示す温度情報を取得しておけば、温度センサを用いなくても当該温度情報を提供することが可能となる。したがって、温度情報提供部4は、被接合部材1又は電極2の経過時間と被接合部材1又は電極2の温度の関係を示す温度情報が格納された温度情報格納部であってもよい。これにより、出力制御部5は、温度情報格納部に格納された温度情報に基づいて電源3の出力を制御することができる。温度情報格納部は経過時間と電源3の出力の関係を決定するための温度情報が格納できればどのようなものでもよいが、例えば、公知のメモリ等を用いればよい。 When the temperature information providing unit 4 described above acquires the temperature of the member 1 or the electrode 2 to be joined in real time using a temperature sensor and provides the output control unit 5 with the temperature information of the member 1 or the electrode 2 to be joined. Was explained. However, when the members 1 to be joined of the same material are joined in the same environment using the current-carrying diffusion joining device 10 of the present invention, the relationship between the elapsed time and the temperature of the members 1 to be joined or the electrode 2 has the same result. Therefore, if temperature information indicating the relationship between the elapsed time and the temperature of the member 1 or the electrode 2 is acquired in advance, the temperature information can be provided without using the temperature sensor. Therefore, the temperature information providing unit 4 may be a temperature information storage unit that stores temperature information indicating the relationship between the elapsed time of the member to be joined 1 or the electrode 2 and the temperature of the member to be joined 1 or the electrode 2. Accordingly, the output control unit 5 can control the output of the power supply 3 based on the temperature information stored in the temperature information storage unit. The temperature information storage may be of any type as long as the temperature information for determining the relationship between the elapsed time and the output of the power supply 3 can be stored. For example, a known memory or the like may be used.
 また、通電拡散接合においては、被接合部材1同士の加圧方向の軸線の合わせ込みや荷重の管理が非常に重要である。ここで、本発明者は、鋭意研究した結果、当該管理状態は接合界面の接触抵抗の値に反映されることがわかった。したがって、当該接触抵抗値を監視すれば、軸線の合わせ込みや荷重の管理が初期状態を維持できているか否か判断することができる。また、当該接触抵抗値の変化の度合いにより、被接合部材1を通電拡散接合装置10にセットするための治工具のメンテナンス時期を明らかにすることができる。そこで、本発明の通電拡散接合装置10は、被接合部材1に一定の電流を供給し、接合面Sの電圧降下を検出可能な電圧降下検出手段53を備えていてもよい。なお、出力制御部5は、当該電圧降下検出手段53が検出した電圧降下に基づいて電源3の出力を制御することも可能である。これにより、更に被接合部材1の緻密な温度管理を可能とすることができる。したがって、接合部材同士の接合面Sにおける接合強度が高く、ばらつきの小さい接合を行うことができる。 Further, in energization diffusion joining, it is very important to align the axes of the members to be joined in the pressurizing direction and to manage the load. Here, as a result of diligent research, the present inventor has found that the control state is reflected in the value of the contact resistance at the bonding interface. Therefore, by monitoring the contact resistance value, it is possible to determine whether or not the alignment of the axis lines and the management of the load can maintain the initial state. Further, depending on the degree of change in the contact resistance value, it is possible to clarify the maintenance time of the jig and tool for setting the member 1 to be joined in the energization diffusion joining device 10. Therefore, the current-carrying diffusion bonding apparatus 10 of the present invention may be provided with a voltage drop detecting means 53 that can supply a constant current to the members to be bonded 1 and can detect the voltage drop on the bonding surface S. The output control unit 5 can also control the output of the power supply 3 based on the voltage drop detected by the voltage drop detecting means 53. As a result, it is possible to further precisely control the temperature of the member 1 to be joined. Therefore, it is possible to perform joining with high joining strength on the joining surface S between the joining members and with little variation.
 次に、通電拡散接合装置10のその他の構成について説明する。通電拡散接合装置10は、被接合部材1の接合面Sに圧力を付与するための加圧部8を備える。加圧部8の構成は、被接合部材1の接合面Sに圧力を付与できればどのようなものでもよいが、例えば、電極2が固定された加圧部材81と、加圧部材81を駆動させるための駆動源82と、駆動源82の駆動力を伝達し、加圧部材81を上下動させるボールねじ機構83とで構成すればよい。 Next, other configurations of the electric diffusion welding device 10 will be described. The current diffusion bonding apparatus 10 includes a pressure unit 8 for applying pressure to the bonding surface S of the members 1 to be bonded. The structure of the pressurizing portion 8 may be any as long as pressure can be applied to the joint surface S of the member 1 to be joined. For example, the pressurizing member 81 to which the electrode 2 is fixed and the pressurizing member 81 are driven. And a ball screw mechanism 83 that transmits the driving force of the driving source 82 and moves the pressing member 81 up and down.
加圧部材81は、ここでは、汎用性を持たせるために略円柱状に形成されているが、被接合部材1の形状に合わせて形成してもよいし、被接合部材1の形状に合わせた中間部材を間に挟んでもよい。加圧部材81の材質としては、加圧力に対する剛性があればどのようなものでもよいが、例えば、ステンレス、銅、モリブデン、タングステンなどの金属を用いればよい。  Here, the pressing member 81 is formed in a substantially columnar shape so as to have versatility, but may be formed in conformity with the shape of the member to be joined 1 or in conformity with the shape of the member to be joined 1. An intermediate member may be sandwiched between them. The material of the pressure member 81 may be any material as long as it has rigidity against pressure, and for example, a metal such as stainless steel, copper, molybdenum, or tungsten may be used. ‥
なお、図示しないが、加圧部材81は、被接合部材1を冷却するための冷却手段を有していてもよい。冷却手段としては、被接合部材1を冷却可能なものであればどのようなものでもよいが、例えば、流路に水道水等の冷却流体を循環させる構成とすることができる。当該流路は、加圧部材81自体に設けてもよいし、流路が形成された冷却ブロックを加圧部材81に密接して配置してもよい。  Although not shown, the pressing member 81 may have a cooling unit for cooling the bonded member 1. Any cooling means may be used as long as it can cool the members 1 to be joined. For example, a cooling fluid such as tap water may be circulated in the flow path. The flow path may be provided in the pressurizing member 81 itself, or the cooling block in which the flow path is formed may be arranged in close contact with the pressurizing member 81. ‥
駆動源82は、例えば減速機付きのサーボモータを用いることができる。サーボモータには、エンコーダ74が付設されており、図示しない架台に配置されている。  As the drive source 82, for example, a servomotor with a speed reducer can be used. An encoder 74 is attached to the servo motor, and is arranged on a mount (not shown). ‥
ボールねじ機構83は、上下方向に延び外周面にねじ溝が形成されたねじ軸と、内周面にねじ溝が形成されたナットと、これらのねじ溝間に収容された複数のボールとから構成されている。ナットは、加圧部材81の上部にベークライト等からなる絶縁体及び圧力センサ73を介して固定されている。ねじ軸は、サーボモータの回転軸に減速機を介して接続されている。サーボモータが回転駆動することにより、ねじ軸が回転して、ナット、ひいては加圧部材81がねじ軸に対して相対的に上下移動する。また、サーボモータの駆動を停止させると、加圧部材81の位置が維持される。このとき、加圧部8は、被接合部材1の変位を規制して接合面Sに圧力を付与することになる。  The ball screw mechanism 83 is composed of a screw shaft extending in the vertical direction and having a thread groove formed on the outer peripheral surface, a nut having a thread groove formed on the inner peripheral surface, and a plurality of balls accommodated between the thread grooves. It is configured. The nut is fixed to the upper part of the pressing member 81 via an insulator made of Bakelite or the like and the pressure sensor 73. The screw shaft is connected to the rotating shaft of the servomotor via a speed reducer. When the servomotor is rotationally driven, the screw shaft rotates, and the nut, and by extension, the pressure member 81 moves up and down relatively with respect to the screw shaft. Further, when the driving of the servomotor is stopped, the position of the pressurizing member 81 is maintained. At this time, the pressurizing unit 8 regulates the displacement of the member 1 to be joined and applies pressure to the joining surface S. ‥
また、加圧部8は、接合面Sの圧力を検出する圧力センサ73を有していてもよい。圧力センサ73は、例えば、上下方向の圧力を測定する一軸のロードセルであるが、多軸の圧力センサを用いてもよい。圧力センサ73により、被接合部材1同士の接合面Sに付与される圧力を間接的に検知することができる。  Further, the pressurizing unit 8 may include a pressure sensor 73 that detects the pressure of the joint surface S. The pressure sensor 73 is, for example, a uniaxial load cell that measures vertical pressure, but a multiaxial pressure sensor may be used. The pressure sensor 73 can indirectly detect the pressure applied to the joint surface S between the members 1 to be joined. ‥
また、加圧部8は、被接合部材1同士の接合面Sに弾性力を付勢する弾性力付勢手段84を更に備えていてもよい。例えば、加圧部材81が配置されるベース部材6と通電拡散接合装置10の基台9との間に弾性力付勢手段84を配置する。弾性力付勢手段84としては、例えば、ばね84aと、ばね84aをベース部材6との間で自由長より短い予め設定された長さに規制するためのブロック体84bとから構成されている。なお、弾性力付勢手段84によって押し上げられるベース部材6から被接合部材1に作用する圧力は、被接合部材1の材質や形状に応じて異なるが、例えば5~100Nである。そして、この圧力は、ばね84aを交換することによって変更可能である。このように構成することにより、被接合部材1に熱膨張や熱収縮が生じても、接合面Sに作用する圧力の急激な変化を緩和することができる。  Further, the pressurizing portion 8 may further include an elastic force urging means 84 for urging the joint surfaces S of the members to be joined 1 with an elastic force. For example, the elastic force urging means 84 is arranged between the base member 6 on which the pressure member 81 is arranged and the base 9 of the current-carrying diffusion joining device 10. The elastic force urging means 84 is composed of, for example, a spring 84a and a block body 84b for restricting the spring 84a to a preset length shorter than the free length between the spring 84a and the base member 6. The pressure exerted on the joined member 1 from the base member 6 pushed up by the elastic force urging means 84 varies depending on the material and shape of the joined member 1, but is, for example, 5 to 100N. This pressure can then be changed by replacing the spring 84a. With this configuration, even if the member 1 to be joined undergoes thermal expansion or contraction, a sudden change in pressure acting on the joint surface S can be alleviated. ‥
なお、加圧部8として上記のような構成について説明したが、加圧部8は、被接合部材1同士を接合面Sで押圧するためのものであれば他の構成でも構わない。例えば、単に、被接合部材1の上に錘を乗せて、被接合部材1同士を押圧するものを用いることも可能である。  Although the above-described configuration has been described as the pressurizing unit 8, the pressurizing unit 8 may have any other configuration as long as it presses the members 1 to be welded with the joint surface S. For example, it is possible to simply use a member in which a weight is placed on the members 1 to be joined and the members 1 to be joined are pressed against each other. ‥
また、本発明の通電加熱接合装置10は、更に接合面Sに付与する圧力を制御するための圧力制御部7を有していてもよい。圧力制御部7は、例えば、CPU、ROM、RAM、I/O等から構成されており、操作部71及び表示部72が電気的に接続されている。操作部71は、ここでは、起動スイッチ、スタートスイッチ等の各種の操作スイッチ、タッチパネル等からなる入力盤などから構成されている。操作部71から入力された情報は、圧力制御部7に送信される。また、表示部72は、圧力制御部7への入力、又は圧力制御部7での演算結果に基づく情報を圧力制御部7から受信し、その情報を表示する。表示部72は、ここでは、デジタル表示パネル、ランプなどから構成されている。なお、当該圧力制御部7は、上述した出力制御部5と共通のものを用いることも可能である。  Further, the energization heating joining device 10 of the present invention may further include a pressure control unit 7 for controlling the pressure applied to the joining surface S. The pressure control unit 7 is composed of, for example, a CPU, a ROM, a RAM, an I / O, and the like, and the operation unit 71 and the display unit 72 are electrically connected to each other. The operation unit 71 is composed of a start switch, various operation switches such as a start switch, and an input panel including a touch panel. The information input from the operation unit 71 is transmitted to the pressure control unit 7. Further, the display unit 72 receives information from the pressure control unit 7 based on the input to the pressure control unit 7 or the calculation result of the pressure control unit 7, and displays the information. Here, the display unit 72 is composed of a digital display panel, a lamp, and the like. The pressure control unit 7 may be the same as the output control unit 5 described above. ‥
また、圧力制御部7には、エンコーダ74、圧力センサ73及び温度センサから検知信号が入力される。圧力制御部7は、これら検知信号、操作部71から入力された情報及びその記憶部に格納された設定圧力Ps、下限設定圧力Ps1、設定温度Ts、設定保持時間Hsなどの制御情報に基づき、電源3及びサーボモータに制御信号を出力する。 Further, detection signals are input to the pressure control unit 7 from the encoder 74, the pressure sensor 73, and the temperature sensor. The pressure control unit 7 is based on these detection signals, information input from the operation unit 71, and control information such as set pressure Ps, lower limit set pressure Ps1, set temperature Ts, and set holding time Hs stored in the storage unit. A control signal is output to the power supply 3 and the servomotor.
1:被接合部材
2:電極
3:電源
4:温度情報提供部
5:出力制御部
6:ベース部材
7:圧力制御部
8:加圧部
9:基台
10:通電拡散接合装置
51:操作部
52:表示部
53:電圧降下検出手段
71:操作部
72:表示部
73:圧力センサ
74:エンコーダ
81:加圧部材
82:駆動源
83:ボールねじ機構
84:弾性力付勢手段
84a:ばね
84b:ブロック体
S:接合面
1: Joined member 2: Electrode 3: Power supply 4: Temperature information providing unit 5: Output control unit 6: Base member 7: Pressure control unit 8: Pressurizing unit 9: Base
10: Energization diffusion joining device
51: Operation unit
52: Display
53: Voltage drop detecting means
71: Operation unit
72: Display
73: Pressure sensor
74: Encoder
81: Pressurizing member
82: Drive source
83: Ball screw mechanism
84: Elastic force urging means
84a: Spring
84b: Block body S: Joining surface

Claims (6)

  1.  接合面を当接された複数の被接合部材に通電して接合する通電拡散接合装置であって、
     前記複数の被接合部材に電気を導通させるための複数の電極と、
     前記複数の電極に付与する出力を連続的に変更可能な電源と、
     前記被接合部材又は前記電極の温度情報を提供する温度情報提供部と、
     前記温度情報提供部からの温度情報に基づいて前記電源の出力をアップスロープで制御する出力制御部と、
    を具備することを特徴とする通電拡散接合装置。
    It is an energization diffusion joining device that energizes and joins a plurality of members to be joined with the joint surface abutted.
    A plurality of electrodes for conducting electricity to the plurality of members to be joined,
    A power supply capable of continuously changing the output applied to the plurality of electrodes,
    A temperature information providing unit that provides temperature information of the member to be joined or the electrode,
    An output control unit that controls the output of the power supply with an upslope based on the temperature information from the temperature information providing unit.
    An electric current diffusion bonding apparatus comprising:
  2.  前記被接合部材に一定の電流を供給し、前記接合面の電圧降下を検出可能な電圧降下検出手段を具備することを特徴とする請求項1記載の通電拡散接合装置。 The energization diffusion bonding device according to claim 1, further comprising a voltage drop detecting means capable of supplying a constant current to the bonded member and detecting a voltage drop on the bonding surface.
  3.  前記出力制御部は、前記電圧降下検出手段が検出した電圧降下に基づいて前記電源の出力を制御するものであることを特徴とする請求項2記載の通電拡散接合装置。 The current spreading/bonding device according to claim 2, wherein the output control unit controls the output of the power source based on the voltage drop detected by the voltage drop detection means.
  4.  前記温度情報提供部は、前記被接合部材又は前記電極の温度情報を検出する温度センサであることを特徴とする請求項1ないし3のいずれかに記載の通電拡散接合装置。 The energization diffusion bonding device according to any one of claims 1 to 3, wherein the temperature information providing unit is a temperature sensor that detects temperature information of the member to be bonded or the electrode.
  5.  前記温度情報提供部は、前記被接合部材又は前記電極の温度情報が格納された温度情報格納部であることを特徴とする請求項1ないし3のいずれかに記載の通電拡散接合装置。 The current diffusion providing device according to any one of claims 1 to 3, wherein the temperature information providing unit is a temperature information storage unit that stores temperature information of the member to be joined or the electrode.
  6.  前記被接合部材の前記接合面に圧力を付与するための加圧部を具備することを特徴とする請求項1ないし5のいずれかに記載の通電拡散接合装置。 The current-carrying diffusion bonding apparatus according to any one of claims 1 to 5, further comprising a pressurizing unit for applying pressure to the bonding surface of the members to be bonded.
PCT/JP2020/009289 2019-03-05 2020-03-05 Conduction diffusion bonding device WO2020179855A1 (en)

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