WO2020175037A1 - Resin composition, electronic component, and method for producing resin film - Google Patents

Resin composition, electronic component, and method for producing resin film Download PDF

Info

Publication number
WO2020175037A1
WO2020175037A1 PCT/JP2020/004163 JP2020004163W WO2020175037A1 WO 2020175037 A1 WO2020175037 A1 WO 2020175037A1 JP 2020004163 W JP2020004163 W JP 2020004163W WO 2020175037 A1 WO2020175037 A1 WO 2020175037A1
Authority
WO
WIPO (PCT)
Prior art keywords
resin composition
group
polar group
polymer
resin
Prior art date
Application number
PCT/JP2020/004163
Other languages
French (fr)
Japanese (ja)
Inventor
誠 藤村
Original Assignee
日本ゼオン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本ゼオン株式会社 filed Critical 日本ゼオン株式会社
Priority to JP2021501827A priority Critical patent/JP7439817B2/en
Priority to KR1020217025192A priority patent/KR20210132027A/en
Priority to CN202080012831.4A priority patent/CN113396182B/en
Publication of WO2020175037A1 publication Critical patent/WO2020175037A1/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/16Nitrogen-containing compounds
    • C08K5/34Heterocyclic compounds having nitrogen in the ring
    • C08K5/3412Heterocyclic compounds having nitrogen in the ring having one nitrogen atom in the ring
    • C08K5/3415Five-membered rings
    • C08K5/3417Five-membered rings condensed with carbocyclic rings
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/04Oxygen-containing compounds
    • C08K5/15Heterocyclic compounds having oxygen in the ring
    • C08K5/151Heterocyclic compounds having oxygen in the ring having one oxygen atom in the ring
    • C08K5/1515Three-membered rings
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L45/00Compositions of homopolymers or copolymers of compounds having no unsaturated aliphatic radicals in side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic or in a heterocyclic ring system; Compositions of derivatives of such polymers
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors

Definitions

  • the present invention relates to a resin composition, an electronic component, and a method for producing a resin film.
  • the present invention relates to a resin composition that can be suitably used for forming an insulating film or the like used in an electronic component, an electronic component including a resin film made of the resin composition, and a manufacturing process for producing such a resin film. It is about the method.
  • Electronic components such as liquid crystal display devices, organic EL display devices, integrated circuit devices, and solid-state image pickup devices are provided with various resin films as a flattening film, a protective film, an insulating film, and the like.
  • Patent Document 1 a resin composition capable of forming an insulating film having excellent transparency is used, and a TO (Indium T in Oxide) film is formed on the surface of the insulating film.
  • a resin composition capable of lowering the resistance value of the ITO electrode obtained when forming a to TO electrode is disclosed.
  • the resin composition described in Patent Document 1 is a resin composition containing a cyclic olefin polymer having a protic polar group, a cross-linking agent, and an organic solvent. More specifically, in such a resin composition, the organic solvent contains diethylene glycol ethyl methyl ether, and the content of diethylene glycol dimethyl ether in the organic solvent is within a predetermined range.
  • Patent Document 2 discloses a resin composition which is excellent in warp suppressing property and smear removability, and at the same time obtains a cured product capable of forming a conductor layer having high peel strength on the surface.
  • the resin composition described in Patent Document 2 is a resin containing an epoxy resin satisfying a predetermined structure and one or more selected from a phenol-based curing agent, a cyanate ester-based curing agent, and an active ester-based curing agent. It is a composition.
  • Patent Document 1 International Publication No. 2 0 1 7/1 6 3 9 8 1
  • Patent Document 2 JP 20 16-7 9 3 6 6 Publication
  • the special film provided on the special electrode has no wrinkles or few wrinkles. If the film is wrinkled, the light transmittance of the laminated body may be deteriorated and the performance of the electrode may be deteriorated.
  • the resin film formed by using the conventional resin composition described above also has the performance of suppressing wrinkling on the surface of the obtained film when the film is formed on the surface. There was room for improvement.
  • the performance of "controlling the generation of wrinkles on the surface of the film” is referred to as "performance of suppressing wrinkles”.
  • an object of the present invention is to provide a resin composition capable of forming a resin film having excellent heat resistance and excellent anti-wrinkle property.
  • Another object of the present invention is to provide a high-performance electronic component including a resin film formed by using the resin composition of the present invention.
  • Still another object of the present invention is to provide a method for producing a resin film, which can efficiently produce the resin film of the present invention using the resin composition of the present invention.
  • the present inventor has conducted earnest studies for the purpose of solving the above problems. Then, the present inventor has established that a polymer () having a protic polar group and ⁇ 2020/175037
  • the inventors have found that a resin composition containing an agent (Mitsumi) makes it possible to form a resin film having excellent heat resistance and excellent crease suppression performance, and completed the present invention.
  • a resin composition of the present invention is a polymer having a protic polar group () 1) A cross-linking agent represented by 1), and a resin composition containing, wherein the polymer having a protic polar group is a cyclic olefin polymer having a protic polar group, and a protic polar group. It is characterized in that it contains at least one of a polyamidoimide resin having a group.
  • a plurality of 8 each independently represents an alkyl group having 1 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms; And are integers from 0 to 4, and 9 are integers from 0 to 5, respectively.
  • a polymer () having a protic polar group containing at least one of a cyclic olefin polymer having a protic polar group and a polyamide imide resin having a protic polar group By including a cross-linking agent (Mitsumi) that satisfies the structure, it becomes possible to form a resin film having excellent heat resistance and I-wrinkle suppressing performance.
  • the polymer () having a protic polar group is preferably a cyclic olefin polymer having a carboxyl group.
  • the resin composition contains a cyclic olefin polymer having a carboxyl group.
  • the presence of the resin can further improve the anti-wrinkle control performance of the obtained resin film.
  • the content of the cross-linking agent (M) is 5 parts by mass or more based on 100 parts by mass of the polymer having a protic polar group (). It is preferably less than or equal to parts by mass.
  • the content of the cross-linking agent (Mitsumi) is within the above-specified range, it is possible to further improve the anti-wrinkle suppressing performance of the obtained resin film.
  • the resin composition of the present invention preferably further contains at least one of a compound having two or more alkoxymethyl groups and a compound having two or more methylol groups. If the resin composition further contains at least one of a compound having two or more alkoxymethyl groups and a compound having two or more methylol groups, the performance of suppressing the wrinkles of the obtained resin film can be further enhanced.
  • the present invention has an object to advantageously solve the above problems, and an electronic component of the present invention is provided with a resin film made of any one of the above resin compositions. Characterize. Since the resin film formed by using the above-mentioned resin composition has excellent heat resistance and the ability to suppress wrinkles, the electronic component equipped with the resin film can sufficiently exhibit the intended function. , High performance.
  • the present invention has an object to advantageously solve the above problems, and a method for producing a resin film of the present invention provides a coating film formed by using a resin composition.
  • the method is characterized by including a step of heating at a temperature of at least °.
  • the resin composition of the present invention can be used for forming a resin film. Then, such a resin film can be suitably provided in an electronic component including a customary electrode.
  • the electronic component of the present invention includes a resin film obtained by using the resin composition of the present invention. Moreover, such a resin film can be efficiently produced by the method for producing a resin film of the present invention using the resin composition of the present invention.
  • the resin composition of the present invention is characterized by containing a polymer (eighth) having a predetermined protonic polar group described later and a cross-linking agent represented by the following formula (1). ..
  • a plurality of 8 each independently represents an alkyl group having 1 to 6 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms; And are integers from 0 to 4, and 9 are integers from 0 to 5, respectively.
  • the resin composition of the present invention may optionally further contain at least one of a compound having two or more alkoxymethyl groups and a compound having two or more methylol groups, and other additives.
  • the resin composition of the present invention is a polymer having a predetermined protonic polar group ( ⁇ 2020/175037 6 ⁇ (: 170? 2020 /004163
  • the polymer () having a protic polar group is a polymer in which a protonic polar group is bonded to a structure serving as a skeleton.
  • the “protic polar group” refers to a group including an atom in which hydrogen is directly bonded to an atom belonging to Group 15 or Group 16 of the periodic table.
  • the atom to which hydrogen is directly bonded is preferably an atom belonging to the second or third period of Group 15 or Group 16 of the periodic table, more preferably an oxygen atom, a nitrogen atom or a sulfur atom. , Particularly preferably oxygen atom.
  • a protic polar group examples include a polar group having an oxygen atom such as a hydroxyl group, a carboxyl group (hydroxycarbonyl group), a sulfonic acid group, and a phosphoric acid group; a primary amino group, Examples thereof include a polar group having a nitrogen atom such as a secondary amino group, a primary amide group, and a secondary amide group (imid group); a polar group having a sulfur atom such as a thiol group; Among these, those having an oxygen atom are preferable, and a carboxyl group is more preferable.
  • the number of protic polar groups bound to the polymer () having a protic polar group is not particularly limited, and different types of protic polar groups may be contained.
  • the skeleton of the polymer having a protic polar group () is (1) a polymer having in its main chain a cyclic structure (alicyclic or aromatic ring) derived from a cyclic reffin monomer, and (2) It is one of the polyamides. Note that even a polymer that has an amid bond and an imido bond in a repeating unit and can be referred to as a so-called “polyamide imido resin” has a cyclic structure derived from a cyclic olefin monomer in the main chain.
  • the polymer shall correspond to "a polymer having a cyclic structure (alicyclic or aromatic ring) derived from a cyclic olefin monomer in its main chain" described in (1) above. ⁇ 2020/175037 7 ⁇ (: 170? 2020 /004163
  • the polymer having a protonic polar group () has a skeleton of (1) a main chain and a cyclic olefin monomer. It is preferable that at least a polymer having a cyclic structure (alicyclic or aromatic ring) derived from is used, in other words, the polymer (8) having a protic polar group contains at least a cyclic olefin polymer.
  • a cyclic olefin polymer as a polymer () having a protonic polar group is referred to as a "cyclic olefin polymer (1...!", and a polyamidimide resin having a protic polar group is referred to as "Polamide resin (81 2)" is sometimes called.
  • the polymer () having a protic polar group one kind of polymer may be used alone, or a plurality of kinds of polymers may be used in combination.
  • the polymer () having a protic polar group one or more kinds of cyclic olefin polymers (_ 1) or one or more kinds of polyamidoimide resin (81 2) Each of them may be used, or one or more kinds of cyclic olefin polymers (1 ⁇ ! and one or more kinds of polyamidimide resin (81 2) may be used in combination.
  • the polymer () having a protonic polar group contains at least the cyclic olefin polymer (_1), and the polymer () having a protic polar group is a cyclic olefin polymer. It is more preferable that they are a combination (81).
  • the cyclic olefin polymer (_ 1) is a polymer of 1 or 2 or more cyclic olefin monomers, or 1 or 2 or more cyclic olefin monomers and a monomer copolymerizable therewith.
  • a monomer for forming the cyclic olefin polymer (8_1) at least a cyclic olefin monomer having a polar polar group (3) is used. It is preferable to use.
  • the cyclic olefin monomer (3) having a protic polar group (hereinafter sometimes simply referred to as “cyclic olefin monomer (3)”) is not particularly limited. Specifics of cyclic olefin monomer (3) having a protic polar group without being treated with 2020/175037 8 (: 170? 2020/004163) (hereinafter appropriately referred to as “monomer (3)”). Examples include 2-hydroxycarbonylbicyclo[2.2.1]hept-5-ene, 2-methyl-2-hydroxycarbonylbicyclo[2.2.1]hept-5-ene, 2-carboxymethyl-2-hydroxycarbonyl. Bicyclo [2.2.1] Heptow
  • cyclic olefin monomer (3) one kind or plural kinds of monomers can be used.
  • the content ratio of the units derived from the cyclic olefin monomer (3) is such that all repeating units constituting the cyclic olefin polymer (_ 1) are 100 mol. %, 10 mol% or more is preferable, 20 mol% or more is more preferable, 30 mol% or more is further preferable, 90 mol% or less is preferable, 80 mol% or less is more preferable, and 70 mol% or less is further preferable.
  • Good By setting the content ratio of the unit derived from the cyclic olefin monomer (3) within the above range, the performance of suppressing the wrinkles of the obtained resin film can be further improved.
  • the cyclic olefin polymer (1...!) used in the present invention comprises a cyclic olefin monomer (3) having a protic polar group, and a monomer (13) copolymerizable therewith. It may be a copolymer obtained by copolymerizing.
  • Such copolymerizable monomers include cyclic olefin monomers having polar groups other than protic polar groups (1), cyclic olefin monomers having no polar groups (2), and cyclic monomers.
  • the monomer other than the olefin (stain 3) (hereinafter, appropriately referred to as “monomer (131)”, “monomer (sl 2)”, and “monomer (sl 3) ”). ..
  • the monomers (distance 1) to (distance 3) can be used as long as the characteristics are not affected.
  • the cyclic olefin polymer (_!!) is preferably composed of the monomer ( 3 ) and the monomer (deposit 1).
  • Specific examples of the polar group other than the protic polar group contained in the cyclic olefin monomer (1) having a polar group other than the protic polar group include ester groups (alkoxycarbonyl groups and aryloxycarbonyl groups). ), 1 ⁇ ]_ substituted imide group, epoxy group, halogen atom, cyano group, carbonyloxycarbonyl group (an acid anhydride residue of dicarboxylic acid), alkoxy group, carbonyl group, Examples thereof include tertiary amino group, sulfone group and acryloyl group.
  • an ester group, a 1 ⁇ 1_ substituted imido group and a cyano group are preferable, and an ester group and a 1 ⁇ 1_ substituted imido group are more preferable.
  • the ⁇ 1_ substituted imide group is particularly preferred.
  • Specific examples of the monomer (distance 1) include the following cyclic olefins.
  • Examples of the cyclic olefin having an ester group include 5-acetoxybicyclo[2.2.1]hept-2-en, 5-methoxycarbonylbicyclo[2.2.1]hept-2-ene, 5-methyl-5-. Metoxycarbonylbicyclo [2. 2. 1] Hept-2-en, 9-acetoxytetracyclo [6. 2. 1. 1 3, 6 . ⁇ 2, 7 ] Dodeca 4-ene, 9- Metoxycarbonyl tet Lacyclo[6. 2. 1. 1 3, 6 ⁇ ⁇ 2, 7 ] Dodeca 4-ene, 9-Ethoxycarbonyl tetracyclo [6. 2. 1.
  • Dodeca 4-ene 9-n-propoxycarbonyltetracyclo [6. 2. 1. 1 3, 6 . ⁇ 2, 7 ]
  • Examples of the cyclic olefin having a substituted imido group include 1 ⁇ 1—phenylbicyclo[2.2.1]hept-5-ene-2,3-dicarboximide, 1 ⁇ 1_(2-ethylhexyl)_ 1 — Isopropyl-4-methylbicyclo[2.2.2]oct-5-ene-2,3-dicarboximide, 1 ⁇ 1-(2-ethylhexyl)-bicyclo[2.2.1]hept-5-ene-2,3 —Dicarboximide, 1 ⁇ !_ [(2-Ethylbutoxy)ethoxypropyl] — Bicyclo [2. 2. 1] Hept-5-ene-2,3-dicarboxyimide, — (Endobicyclo [2. 2.1 ]hept-5-ene-2,3-diyldicarbonyl) dimethyl aspartate and the like.
  • Examples of the cyclic olefin having a cyano group include 9-cyanotetracyclo [6. 2. 1. 13, 6_ ⁇ 2, 7] dodeca-4-ene and 9-methyl-9-cyanotetracyclo [6. 2. 1. 1 3, 6 ⁇ ⁇ 2, 7 ] Dodeca 4-ene, 5-cyanobicyclo [2. 2. 1] heptose 2-ene and the like.
  • Examples of the cyclic olefin having a halogen atom include 9-chlorotetracyclo [6. 2. 1. 13, 6. 02, 7] dodeca-4-ene, 9-methyl-9-chlorotetracyclo [6. 2. 1 . 13, 6. ⁇ 2, 7] Dodeca-4-en, etc.
  • cyclic olefin monomers having a polar group other than the protic polar group may be used alone or in combination of two or more kinds.
  • cyclic olefin monomer having no polar group examples include bicyclo [2.2.1] hept-2-ene (also referred to as "norbornene”) and 5-ethyl-bicyclo.
  • hept-2-ene also referred to as "norbornene”
  • 5-ethyl-bicyclo [2. 2. 1] Heptone 2-ene, 5-butyl bisic ⁇ 2020/175037 13 ⁇ (: 170? 2020 /004163
  • polar olefin monomers having no polar group may be used alone or in combination of two or more kinds.
  • chain olefins examples include ethylene, propylene,
  • 1-hexadecene 1-octadecene, 1-eicosene, etc. ⁇ 2 olefins having 2 to 20 carbon atoms; 1,4-hexadiene, 4-methyl-1,4-hexagen, 5-methyl-1,4 — Hexagen, and non-conjugated gens such as 1, 7-octagen.
  • the cyclic olefin polymer (_ 1) is obtained by combining the cyclic olefin monomer (3) with one or more kinds of monomers selected from the monomers (1 ⁇ 1) to (distance 3) if desired. It is obtained by overlapping.
  • the polymer obtained by the polymerization may be further hydrogenated.
  • a hydrogenated polymer is also included in the cyclic olefin resin having a protic polar group.
  • the cyclic olefin polymer (_ 1) is a cyclic olefin polymer having no protic polar group, in which a protic polar group is introduced using a known modifier, and hydrogenation is carried out as desired. It can also be obtained by the method. Here, hydrogenation may be performed on the polymer before the introduction of the protic polar group.
  • the cyclic olefin polymer (1...!) may be obtained by a method of further introducing a protic polar group into the cyclic olefin polymer having a protic polar group.
  • polyamidimide resin (_ 2) is a polymer having an amid bond and an imido bond in a repeating unit (that is, a polyamide resin). It is a polymer having a protic polar group.
  • the polyamide imide resin (_ 2) can also be obtained by a method of introducing a protic polar group into a polyamide imide having no protic polar group using a known modifier.
  • the polyamide imide resin (81 2) may be obtained by a method in which a protonic polar group is further introduced into a polyamide imide having a protic polar group. Therefore, among the various polyamidoimides listed below, those having a protic polar group are ⁇ 2020/175037 15 ⁇ (: 170? 2020/004163
  • it can be used by further modifying it to introduce a protonic polar group.
  • it is modified by using a known modifier to introduce a protonic polar group. It can then be used.
  • Examples of the polyamidimide resin (12) include a polyamidimide having a branched structure and a polyamidimide having a linear structure. Among them, polyamidimide having a branched structure is preferable as the polyamidimide.
  • the polyamidimide resin (81 2) is a polyamidimide having a branched structure, the chemical resistance of the resin composition can be improved.
  • Examples of the polyamidimide having a branched structure include a structural unit represented by the following formula (2) and a structural unit represented by the following formula (3), and ⁇ , compounds having at least one of the terminal structures represented by (13) and (a), compounds represented by the following formula (4), polyamidimide resin having a branched structure (mouth I ⁇ 3 Co., Ltd., Unidick 1 ⁇ /1 ⁇ -7 9 3), Polyamidimide resin with a branched structure (Mouth ⁇ Co., Ltd.: Unidick 1 1//1 ⁇ -10 15), And so on.
  • n is an integer of 2 or more and 200 or less.
  • a cyclic reffin polymer having a protic polar group and having a structure represented by the above formula (4) is, for example, an isophorone diisocyanate-isoisocyanurate body represented by the following formula (5): , And trimetic anhydride.
  • a polyfunctional polyol containing two or more hydroxyl groups may be added as a chain transfer agent to introduce a moiety having a urethane structure into the partial structure of the above formula (4).
  • the physical properties of the polyamide imide having a branched structure can be controlled.
  • the site having a urethane structure include the site represented by the following formula (6).
  • examples of the polyamide imide having a linear structure include a compound represented by the following formula (7):
  • n is an integer of 2 or more and 400 or less.
  • the compound represented by the above formula (7) can be obtained by reacting trimetic anhydride with isophorone diisocyanate.
  • the cross-linking agent (Mimi) is a compound that acts to enhance the heat resistance and the special wrinkle suppressing performance of the resin film by forming a cross-linking structure in the resin film.
  • the cross-linking agent (B) is a compound represented by the following formula (1). ⁇ 2020/175037 19 ⁇ (: 170? 2020/004163
  • a plurality of 8 each independently represents an alkyl group having 1 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms; And are integers from 0 to 4, and 9 are integers from 0 to 5, respectively.
  • the alkyl group having 1 to 6 carbon atoms that may be contained in is not particularly limited, and examples thereof include direct groups such as a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, and a hexyl group. Examples thereof include alkyl groups having a chain, branched chain or cyclic structure. Among these, as the alkyl group having 1 to 6 carbon atoms, a methyl group and an ethyl group are preferable, and a methyl group is more preferable.
  • the alkoxy group having 1 to 6 carbon atoms which may be contained in is not particularly limited, and examples thereof include a straight chain, a branched chain or a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentoxy group, a hexoxy group or the like. Examples thereof include an alkoxy group having a cyclic structure. Among these, as the alkoxy group having 1 to 6 carbon atoms, a methoxy group, an ethoxy group and a propoxy group are preferable, and a methoxy group is more preferable.
  • the compound represented by the formula (1) preferably has no substituent.
  • all hydrogen atoms are bonded to positions where “[3 ⁇ 4” can bond.
  • a cross-linking agent (Mitsumi) satisfying the formula (1) has no substituent, and has two glycidyl ether groups bonded at a predetermined position. ⁇ 2020/175037 20 boxes (: 170? 2020/004163
  • the content of the cross-linking agent (Mi) is preferably 5 parts by mass or more, and 10 parts by mass or more based on 100 parts by mass of the polymer () having a protic polar group. More preferably, it is more preferably 20 parts by mass or more, further preferably 200 parts by mass or less, more preferably 150 parts by mass or less, and 90 parts by mass or less. Is more preferable, it is particularly preferably 60 parts by mass or less, and particularly preferably 40 parts by mass or less.
  • the content of the cross-linking agent (Mitsumi) in the polymer () having a protic polar group is within the above range, the heat resistance and the performance of suppressing wrinkles of the obtained resin film can be further enhanced.
  • the compound having two or more alkoxymethyl groups and the compound having two or more methylol groups are components that can act so as to further enhance the proper wrinkle suppressing performance of the obtained resin film. Furthermore, the chemical resistance of the resin film can be enhanced by blending the resin composition with a compound having two or more alkoxymethyl groups and a compound having two or more methylol groups. From the viewpoint of exhibiting such effects more satisfactorily, it is preferable that the resin composition contains a compound having at least two alkoxymethyl groups. ⁇ 2020/175037 21 ⁇ (: 170? 2020/004163
  • Examples of the compound having two or more alkoxymethyl groups include a phenol compound in which two or more alkoxymethyl groups are directly bonded to an aromatic ring, and a melamine in which an amino group is substituted with two or more alkoxymethyl groups. Examples thereof include compounds and urea compounds substituted with two or more alkoxymethyl groups.
  • Examples of a phenol compound in which two or more alkoxymethyl groups are directly bonded to an aromatic ring include, for example, 2,6-dimethoxymethyl-4-I-butylphenol and 2,6-dimethoxymethyl-cresol. Dimethoxymethyl-substituted phenol compounds such as 3,3',5,5'-tetramethoxymethyl-4,
  • Examples of the melamine compound in which the amino group is substituted with two or more alkoxymethyl groups include, for example, 1 ⁇ 1, 1 ⁇ 1, and dimethoxymethylmelamine, 1 ⁇ 1, 1 ⁇ 1, ," Trimethoxymethylmelamine, 1 ⁇ 1 ,1 ⁇ 1 ,1 ⁇ 1, ,, 1 ⁇ !-Tetramethoxymethyl melamine, 1 ⁇ 1, 1 ⁇ 1 ,1 ⁇ 1', 1 ⁇ 1', 1 ⁇ 1" pentamethoxy Methyl melamine, 1 ⁇ 1, 1 ⁇ 1, 1 ⁇ 1, ,, 1 ⁇ 1, ", 1 ⁇ 1", 1 ⁇ 1"-hexamethoxymethyl melamine (For example, trade name "Nicarac Product name "Nikarak
  • Examples of the urea compound substituted with two or more alkoxymethyl groups include, for example, the trade name "Nicarac 1 ⁇ /1 ⁇ 270" and the trade name “Nicarac 1 ⁇ /1 ⁇ 280".
  • the product name is "Nicarac 1 ⁇ /1 ⁇ 290" (both manufactured by Sanwa Chemical Co., Ltd.).
  • Examples of the compound having two or more methylol groups include a phenol compound in which two or more methylol groups are directly bonded to an aromatic ring.
  • a compound having two or more alkoxymethyl groups as described above and a methylol group having two or more alkoxymethyl groups as described above and a methylol group
  • the compounds having two or more it is one of the compounds having two or more alkoxymethyl groups from the viewpoint of high reactivity, 1 ⁇ 1, 1 ⁇ 1, 1 ⁇ 1', 1 ⁇ 1', 1 ⁇ 1”,
  • the total content of these is a polymer having a protic polar group ( ) It is preferable that the amount is 1 part by mass or more and 1 part by mass or more and 100 parts by mass or less. If the total content of the compound having two or more alkoxymethyl groups and the compound having two or more methylol groups is within the above range, the performance of suppressing the wrinkles of the resin film can be further enhanced.
  • the total content of the compound having two or more alkoxymethyl groups and the compound having two or more methylol groups is less than or equal to the above upper limit, the reduction in the curing step under high temperature conditions of 200°C or more is performed.
  • the film can be suppressed, and the heat resistance of the resin film can be further enhanced.
  • the resin composition of the present invention may optionally contain other additives than the above.
  • other additives include a polyfunctional epoxy compound having a structure different from that of the above-mentioned crosslinking agent (Mitsumi), a silane coupling agent, a surfactant, an antioxidant, and a radiation-sensitive compound.
  • polyfunctional epoxy compound having a structure different from that of the cross-linking agent include, for example, an epoxy compound having dicyclopentadiene as a skeleton (trade name “1 to 1 ?-7200”, manufactured by 0I ⁇ Company), 1,2-Epoxy 4-(2-oxiranyl) cyclohexane adduct of 2,2-bis(hydroxymethyl) 1-butanol (15-functional alicyclic epoxy resin having cyclohexane skeleton and terminal epoxy group) , Trade name "Mimi! ⁇ 1?
  • 1,2:8,9-diepoxy limonene (trade name "CELOXIDE 3000", manufactured by Daicel) and other epoxy compounds having an alicyclic structure; and bisphenol 8-type epoxy compounds (trade name) "" Momi [3 ⁇ 4 827], "" Momi [3 ⁇ 4828], "" Momi [3 ⁇ 4 ⁇ !_ 980], Mitsubishi Chemical Co., Ltd., trade name "Mimi I ⁇ !_ ⁇ 840", “Mimi? 1 ⁇ !_” ⁇ 850”, 0 I ⁇ company, bisphenol type epoxy compound (trade name “”Mimi [3 ⁇ 4806”, “”Mami [3 ⁇ 4807”, “” Mimi Made by Mitsubishi Chemical Co., Ltd., product name “Mimi? 1 ⁇ !_ ⁇ 830”, ”Mimi ⁇ 2020/175037 24 ⁇ (: 170? 2020 /004163
  • Phenol novolac type polyfunctional epoxy compound (Product name ""Mimi [3 ⁇ 4 1 52"
  • Chain alkyl polyfunctional epoxy compound (trade name “3[3 ⁇ 4-D!!/1/1", manufactured by Sakamoto Yakuhin Kogyo Co., Ltd.), polyfunctional epoxy polybutadiene (trade name “Evolead Mitsu 3600") , Manufactured by Daicel Co., Ltd., (trade name “Evolead Minami 4700", manufactured by Daicel Co., Ltd.), glycidyl polyether compound of glycerin (trade name "3 , Sakamoto Yakuhin Kogyo Co., Ltd., diglycerin polyglycidyl ether compound (trade name " , Manufactured by Sakamoto Yakuhin Kogyo Co., Ltd., polyglycerin polyglycidyl ether compound (trade name “3[3 ⁇ 4_4 ⁇ !_”, manufactured by Sakamoto Yakuhin Kogyo Co., Ltd.); You can In addition, these can be used individually by 1 type or in combination of 2 or more types.
  • an epoxy compound having an alicyclic structure that is, an alicyclic epoxy compound is preferable.
  • an alicyclic epoxy compound By adding an alicyclic epoxy compound to the resin composition, the transparency of the obtained resin film can be increased. ⁇ 2020/175037 25 ⁇ (: 170? 2020 /004163
  • the content of the polyfunctional epoxide compound having a structure different from that of the cross-linking agent (Mitsumi) is 1 part by mass of the polymer having a protic polar group () 1 part by mass. It is preferable that the content is 000 parts by mass or less.
  • the content of the polyfunctional epoxy-containing compound having a different structure from that of the cross-linking agent (Mitsumi) is 100 parts by mass or less, the chemical resistance of the resin film can be efficiently increased.
  • the resin composition contains a polyfunctional epoxy compound having a structure different from that of the cross-linking agent (Mimi) in addition to the above-mentioned predetermined cross-linking agent (Mimi), the cross-linking agent (Mimi) and the cross-linking agent
  • the total content of polyfunctional epoxy compounds having a different structure from that of (Minami) is the polymer having a protic polar group (8) in the resin composition described above in the section of ⁇ Content of Crosslinking Agent (Minami)>>. ) It is preferable to satisfy the preferable range of the content of the cross-linking agent (Minami) with respect to 100 parts by mass.
  • the silane coupling agent functions to enhance the adhesion between the resin film obtained by using the resin composition of the present invention and the base material on which the resin film is formed.
  • the silane coupling agent is not particularly limited, and known ones can be used (see, for example, Japanese Patent Laid-Open No. 20515-94910). More specifically, alkoxysilanes such as glycidoxypropyltrimethoxysilane can be preferably used as the silane coupling agent.
  • the content of the silane coupling agent is usually 0.01 part by mass or more and 5 parts by mass or less per 100 parts by mass of the polymer () having a protic polar group.
  • the surfactant is a component that can improve the coatability of the resin composition of the present invention.
  • the surfactant is not particularly limited, and known silicone-based surfactants, fluorine-based surfactants, polyoxyalkylene-based surfactants, methacrylic acid copolymer-based surfactants, and acrylic acid surfactants are known. Polymeric surfactants and the like can be used (see, for example, International Publication No. WO 201/1763981). Among them, as the surfactant, a silicone-based surfactant such as an organosiloxane polymer can be preferably used. ⁇ 2020/175037 26 ⁇ (: 170? 2020/004163
  • the content of the surfactant is usually 0.01 part by mass or more and 1 part by mass or less per 100 parts by mass of the polymer (8) having a protic polar group.
  • the antioxidant is a component that can enhance the stability of the resin composition of the present invention.
  • the antioxidant is not particularly limited, and known antioxidants such as phenol-based antioxidants, phosphorus-based antioxidants, amine-based antioxidants, lactone-based antioxidants can be used. (See, for example, Japanese Patent Laid-Open No. 20 1 4-1 4 9 4 7 7).
  • the silane coupling agent, the surfactant, and the antioxidant may be used alone or in combination of two or more. Moreover, the amounts of the silane coupling agent, the surfactant, and the antioxidant to be blended in the resin composition can be adjusted arbitrarily.
  • a radiation sensitive compound is a compound capable of causing a chemical reaction when exposed to radiation.
  • the radiation is not particularly limited, and includes, for example, visible light; ultraviolet light; X-ray; light having a single wavelength such as 9-rays, rays, and gamma rays; ⁇ “excimer laser light, 8” excimer laser
  • the radiation-sensitive compound include acetophenone compounds, triarylsulfonium salts, and azide compounds, and laser beams such as light, particle beams such as electron beams, etc. are not particularly limited.
  • Azide compounds such as quinonediazide compounds can be preferably used.
  • the radiation-sensitive compounds can be used alone or in combination of two or more. The amount can be adjusted arbitrarily.
  • the solvent that the resin composition of the present invention can optionally contain is not particularly limited, and known solvents for the resin composition can be used.
  • solvents include linear ketones, alcohols, alcohol ethers, esters, cellosolve esters, propylene glycols, and diethylene glycols such as diethylene glycol ethyl methyl ether. ⁇ 2020/175037 27 ⁇ (: 170? 2020 /004163
  • solvents may be used alone or in combination of two or more.
  • the amount of the solvent in the resin composition is not particularly limited, and is preferably 10 parts by mass or more, and preferably 10 parts by mass with respect to 100 parts by mass of the polymer () having a protic polar group. It is at most 0,000 parts by mass, more preferably at most 500 parts by mass, still more preferably at most 100 parts by mass.
  • the resin composition of the present invention can be prepared by mixing the above components by a known method and optionally filtering.
  • a known mixer such as a stirrer, a ball mill, a sand mill, a bead mill, a pigment disperser, a crusher, an ultrasonic disperser, a homogenizer, a planetary mixer or a fill mix can be used for the mixing.
  • a general filtering method using a filter medium such as a filter can be adopted.
  • the resin film comprising the resin composition of the present invention comprises the resin of the present invention, which comprises a step (curing step) of heating the coating film formed by using the above-mentioned resin composition of the present invention at 200°C or higher. It can be produced by the method for producing a membrane.
  • the method for producing a resin film of the present invention may further include a step of forming a coating film using the resin composition of the present invention on a substrate for forming a resin film (coating film forming step).
  • the disposition of the coating film on the substrate for forming the resin film is not particularly limited, and it can be performed according to a known method such as a coating method or a film laminating method.
  • the coating film may be optionally patterned when the resin film is formed.
  • the patterning method a known patterning method involving an operation of exposing a coating film and developing it can be applied. In this case, used to form the resin film ⁇ 2020/175037 28 ⁇ (: 170? 2020 /004163
  • the resin composition according to the present invention may contain a radiation-sensitive compound.
  • the coating film can be formed by the coating method by coating the resin composition on the substrate and then heating and drying (pre-baking).
  • the method for applying the resin composition include spray coating method, spin coating method, mouth coating method, die coating method, doctor blade method, spin coating method, bar coating method, screen printing method, ink jet method, etc.
  • the heating and drying conditions vary depending on the type and blending ratio of the components contained in the resin composition, but the heating temperature is usually 30 to 150 ° ⁇ , preferably 60 to 120 °
  • the heating time is usually 0.5 to 90 minutes, preferably 1 to 60 minutes, and more preferably 1 to 30 minutes.
  • the coating film is formed by the film laminating method by coating the resin composition on a substrate for forming a stage film such as a resin film or a metal film, and heating and drying (prebaking) the stage film. After obtaining the above, this can be performed by laminating this stage film on a substrate.
  • the application of the resin composition onto the substrate for forming the stage film and the heat-drying of the resin composition can be performed in the same manner as the application and the heat-drying of the resin composition in the above-mentioned application method.
  • the lamination can be performed using a pressure laminator, a press, a vacuum laminator, a vacuum press, a mouth laminator, or other crimping machine.
  • the coating film is heated (post-baked) at a temperature of 200 ° C or higher to be hardened.
  • the heating of the coating film is not particularly limited, and can be performed using, for example, a hot plate or a talented one.
  • the heating may be carried out in an inert gas atmosphere if necessary.
  • the inert gas include nitrogen, argon, helium, neon, xenon, krypton and the like. Of these, nitrogen and argon are preferable, and nitrogen is particularly preferable. ⁇ 2020/175037 29 ⁇ (: 170? 2020 /004163
  • the temperature at which the coating film is heated in the curing step is 200 ° C or higher
  • the resin composition of the present invention is used, good film formation can be achieved even when the temperature at which the coating film is heated is as high as 200°C or higher. Furthermore, the upper limit of the temperature for heating the coating film in the curing step is not particularly limited, but it is preferably 400° C. or less.
  • the time for heating the coating film in the curing step can be appropriately selected depending on the area and thickness of the coating film, the equipment used for heating, etc., but is, for example, 10 to 120 minutes. can do.
  • the resin film that has undergone such a curing step has a transmittance of light of a wavelength of 400 n.
  • the "transmittance" can be measured according to the method described in Examples.
  • the electronic component of the present invention includes the resin film made of the resin composition of the present invention described above.
  • the electronic component of the present invention has a high performance because it is provided with the resin film formed from the resin composition of the present invention and having excellent heat resistance and I-wrinkle suppressing performance.
  • the type of electronic component of the present invention is not particularly limited.
  • the electronic component of the present invention since the resin film made of the resin composition of the present invention is excellent in heat resistance and the ability to suppress wrinkles, the electronic component of the present invention has a resin film made of the resin composition of the present invention. It may be an electronic component having an I-electrode, in which a film is arranged on the surface of the. Further, for example, the resin film of the present invention may be an interlayer insulating film of a rewiring layer provided in a semiconductor device.
  • the resin compositions obtained in Examples and Comparative Examples were applied onto a glass substrate (Corning 1737 manufactured by Corning Co., Ltd.) by a spin coating method, and dried by heating at 120°° C. for 2 minutes using a hot plate (pre-baked). To form a coating film. Then, using a heating oven, under a nitrogen atmosphere, increase the temperature from 30 ° ⁇ to 10 ° ⁇ /min to 300 ° ⁇ , and then perform post bake by heating at 300° ⁇ for 60 minutes. A resin film of 2 was formed. On this resin film, a transparent electrode with a transparent electrode (Shibaura Eletech Co., Ltd., * 3-4? 1_1_",
  • a film having a film thickness of 40 n was formed at a temperature of 30°.
  • the obtained glass substrate of the laminated body with a transparent electrode was cut into 1.50 squares to prepare a test piece.
  • the glass substrate side of the prepared test piece was placed on a hot plate heated at 270° ⁇ or 300° ⁇ for 5 minutes, and then cooled to room temperature.
  • the surface of the test piece on the transparent electrode side is observed with an optical microscope (100 times), and the ratio of the area of the wrinkle part to the total area of the resin film surface (1.5001X 1.500) is calculated.
  • the area of the wrinkle portion was extracted by binarizing the image obtained by an optical microscope.
  • Mimi There are wrinkles on the surface of the resin film, but the area of the wrinkles is less than 1/4 of the total area of the resin film surface.
  • There is wrinkling on the surface of the resin film, but the area of the wrinkled part is 1/4 or more and less than 1/2 of the total area of the resin film surface.
  • the surface of the resin film has wrinkles, and the wrinkled area is 1/2 or more of the total area of the resin film surface.
  • the silicon wafer was heated with a hot plate at 120 ° for 2 minutes (coating film forming step). Then, under a nitrogen atmosphere, the resin film is obtained by heating it from 30 ° C to 10 ° C/min to 300 ° C ° and then heat treating it at 300°C for 60 minutes. A laminate having a resin film of 10 on one side was obtained (curing step).
  • the resin film was removed from the silicon wafer by immersing the obtained laminate in a hydrochloric acid solution of 0.5 I/!_ and dissolving the aluminum thin film located between the silicon wafer and the resin film with the hydrochloric acid solution. Peeled off. Next, the peeled resin film was washed with water and dried. The dried resin film was measured with a differential thermogravimetric simultaneous measurement device (Seiko Instruments Co., Ltd., 0/00/620) under a nitrogen atmosphere at a heating rate of 10°/min. The mass of the sample at the time of reaching 300 °C and the mass of the sample at the end of the holding at 300 °1 when the temperature is reached to 300 °C and held at 300 °C for 1 hour. Each value was measured, and the value of heat loss: ( ⁇ — ⁇ / ⁇ X 1 ⁇ ⁇ (%)) was calculated and evaluated based on the following criteria: The smaller the heat loss, the more heat resistant the resin film becomes. Means superior.
  • the heating loss at 300° is less than 1%.
  • the heating loss at 300° ⁇ is 1% or more and less than 3%.
  • the heating weight loss at 300 °C is 3% or more.
  • the resin compositions obtained in Examples and Comparative Examples were applied onto a glass substrate (Corning 177 3 7 manufactured by Corning Co., Ltd.) by a spin coating method, and heat-dried for 2 minutes at 120°° using a hot plate. (Pre-baking) was performed to form a coating film having a film thickness of 2 (coating film forming step).
  • the light transmittance (%) of the resin film is based on the glass substrate without the resin film. ⁇ 2020/175037 32 ⁇ (: 170? 2020 /004163
  • the obtained polymerization reaction solution was put into an autoclave and stirred at 150 ° C and hydrogen pressure of 4 IV! 3 for 5 hours to carry out a hydrogenation reaction, and a cyclic olefin polymer having a protic polar group was added.
  • a polymer solution containing a hydrogenated polymer as a unit (_ 1) was obtained.
  • the polymerization conversion rate of the obtained cyclic olefin polymer (_ 1) was 99.7%.
  • the polystyrene reduced weight average molecular weight was 7, 150, the number average molecular weight was 4,690, the molecular weight distribution was 1.52, and the hydrogenation rate was 99.7%.
  • the solid content concentration of the obtained polymer solution of cyclic olefin polymer (1...!) is 34.
  • the hydrogenation reaction was carried out with stirring.
  • the hydrogenation reaction solution obtained as a result of the hydrogenation reaction was concentrated to obtain a solution (solid content concentration 55.5%) of a cyclic olefin polymer (_4) having no protic polar group.
  • the cyclic olefin polymer (_ 4) having no protonic polar group had a weight average molecular weight of 60,000, a number average molecular weight of 30,000 and a molecular weight distribution of 2.
  • the hydrogenation rate was 95%, and the content of repeating units having a carboxylic acid anhydride group was 30 mol%. Furthermore, the solid concentration of the solution of the cyclic olefin polymer (_4) having no protic polar group was 22%. [0085] (Example 1)
  • glycidoxypropyltrimethoxysilane (XI as a silane coupling agent 8 1 ⁇ /1, manufactured by Mitomisha Co., Ltd., product name " ⁇ 3-6040") 1 part, as an antioxidant, pentaerythritol tolutrix [3— (3, (3, Butyl 4-hydroxyphenyl) ⁇ 02020/175037 35 ⁇ (: 17 2020 /004163
  • Propionate] (Product name “I “931 ⁇ 0 x 1 01 ⁇ ”, manufactured by Minahachi 3 Co., Ltd.) 2.1 and diethylene glycol ethyl methyl ether as a solvent (manufactured by Toho Chemical Co., Ltd. /1-3") 27 parts were mixed and dissolved, and then filtered through a filter made of polytetrafluoroethylene having a pore size of 0.451 to prepare a resin composition.
  • a resin composition was prepared in the same manner as in Example 1 except that the compounding amount of the cross-linking agent (Mitsumi) and the compounding amount of diethylene glycol ethyl methyl ether as the solvent were changed as shown in Table 1.
  • the compounding amount of cross-linking agent (Mitsumi) was 25 parts, the compounding amount of diethylene glycol ethyl methyl ether as a solvent was 53 parts, and the compound having two or more alkoxymethyl groups was 1 ⁇ 1, 1 ⁇ 1, 1 ⁇ . 1, ,1 ⁇ 1, ,1 ⁇ 1", 1 ⁇ 1"-Hexamethoxymethylmelamine (Product name "Nicarac A resin composition was prepared in the same manner as in Example 1 except that 10 parts by weight was blended.
  • the compounding amount of the cross-linking agent (Mitsumi) was 25 parts, and the compounding amount of diethylene glycol ethyl methyl ether as the solvent was 71 parts.
  • Tetra (3,4-epoxycyclohexylmethyl) tetracarboxylate-modified caprolactone (manufactured by Daicel, product name "Evolead 0401") was added in the same manner as in Example 1 except that 20 parts were blended. The thing was prepared.
  • a solution of a cyclic olefin polymer (_ 1) having a protic polar group a mixed solution of a propylene glycol methyl ether acetate of a polyamidimide resin having a branched structure and _butanol 2 2 9 parts (0 ⁇ (3 Unidick Min 1//1--7 93, a branched polyamidimide resin having a carboxyl group (100 parts as 1) and a cross-linking agent having a predetermined structure (M)
  • a resin composition was prepared in the same manner as in Example 1 except that the compounding amount was changed to 30 parts and diethylene glycol ethyl methyl ether as a solvent was changed to 69 parts.
  • a solution of cyclic olefin polymer (_ 3) not having a protic polar group 180 parts ( The amount of the cross-linking agent (Mitsumi) having the specified structure was changed to 30 parts, and the solvent was changed to anisole 3 62 parts.
  • a resin composition was prepared in the same manner as in Example 1 except that the resin composition was changed.
  • a solution of the cyclic olefin polymer (_ 1) having a protic polar group a solution of the cyclic olefin polymer (_ 4) having no protic polar group 1 800 parts (having a protic polar group
  • the amount of the cross-linking agent (Mitsumi) having the specified structure was changed to 30 parts, and the solvent was changed to anisole 3 62 parts.
  • a resin composition was prepared in the same manner as in Example 1 except that the resin composition was changed.
  • the resin composition of the present invention it is possible to form a resin film having excellent heat resistance and excellent anti-wrinkle suppressing performance.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Materials For Photolithography (AREA)
  • Polymerisation Methods In General (AREA)
  • Graft Or Block Polymers (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)

Abstract

A resin composition containing a polymer (A) having a protic polar group and a crosslinking agent (B) represented by formula (1). Here, the polymer (A) having a protic polar group includes a cyclic olefin polymer having a protic polar group and/or a polyamide imide resin having a protic polar group. In formula (1), the multiple R each independently represent a C1-6 alkyl group or a C1-6 alkoxy group, m, n, and p represent integers of 0-4, and q represents an integer of 0-5.

Description

明 細 書 Specification
発明の名称 : 樹脂組成物、 電子部品、 及び、 樹脂膜の製造方法 技術分野 Title of invention: Resin composition, electronic component, and method for producing resin film Technical Field
[0001 ] 本発明は、 樹脂組成物、 電子部品、 及び、 樹脂膜の製造方法に関するもの である。 特に、 本発明は、 電子部品に用いられる絶縁膜などの形成に好適に 使用し得る樹脂組成物、 当該樹脂組成物からなる樹脂膜を備える電子部品、 及び、 かかる樹脂膜を製造するための製造方法に関するものである。 The present invention relates to a resin composition, an electronic component, and a method for producing a resin film. In particular, the present invention relates to a resin composition that can be suitably used for forming an insulating film or the like used in an electronic component, an electronic component including a resin film made of the resin composition, and a manufacturing process for producing such a resin film. It is about the method.
背景技術 Background technology
[0002] 液晶表示装置、 有機 E L表示装置、 集積回路素子、 固体撮像素子などの電 子部品には、 平坦化膜、 保護膜、 絶縁膜等として種々の樹脂膜が設けられて いる。 Electronic components such as liquid crystal display devices, organic EL display devices, integrated circuit devices, and solid-state image pickup devices are provided with various resin films as a flattening film, a protective film, an insulating film, and the like.
[0003] 具体的には、 例えば、 特許文献 1では、 透明性に優れる絶縁膜を形成可能 である樹脂組成物であって、 絶縁膜表面に 丨 T O (Ind i um T i n Ox i de) 膜を 形成して 丨 T O電極を得た際には、 得られる I T O電極の抵抗値を低くする ことができる、 樹脂組成物が開示されている。 特許文献 1 に記載された樹脂 組成物は、 プロトン性極性基を有する環状オレフィン重合体、 架橋剤、 及び 、 有機溶媒を含有する樹脂組成物である。 より具体的には、 かかる樹脂組成 物において、 有機溶媒がジエチレングリコールエチルメチルエーテルを含有 し、 且つ、 有機溶媒中におけるジエチレングリコールジメチルエーテルの含 有量が所定範囲内である。 [0003]Specifically, for example, in Patent Document 1, a resin composition capable of forming an insulating film having excellent transparency is used, and a TO (Indium T in Oxide) film is formed on the surface of the insulating film. There is disclosed a resin composition capable of lowering the resistance value of the ITO electrode obtained when forming a to TO electrode. The resin composition described in Patent Document 1 is a resin composition containing a cyclic olefin polymer having a protic polar group, a cross-linking agent, and an organic solvent. More specifically, in such a resin composition, the organic solvent contains diethylene glycol ethyl methyl ether, and the content of diethylene glycol dimethyl ether in the organic solvent is within a predetermined range.
[0004] また、 例えば、 特許文献 2では、 反り抑制性及びスミア除去性に優れると 共に、 表面への高ピール強度の導体層の形成が可能な硬化物が得られる樹脂 組成物が開示されている。 特許文献 2に記載された樹脂組成物は、 所定の構 造を満たすエポキシ樹脂と、 フエノール系硬化剤、 シアネートエステル系硬 化剤、 及び活性エステル系硬化剤から選択される一種以上とを含む樹脂組成 物である。 [0004] Further, for example, Patent Document 2 discloses a resin composition which is excellent in warp suppressing property and smear removability, and at the same time obtains a cured product capable of forming a conductor layer having high peel strength on the surface. There is. The resin composition described in Patent Document 2 is a resin containing an epoxy resin satisfying a predetermined structure and one or more selected from a phenol-based curing agent, a cyanate ester-based curing agent, and an active ester-based curing agent. It is a composition.
先行技術文献 \¥0 2020/175037 2 卩(:17 2020 /004163 特許文献 Prior art documents \¥0 2020/175037 2 (: 17 2020/004163 Patent Document
[0005] 特許文献 1 :国際公開第 2 0 1 7 / 1 6 3 9 8 1号 [0005] Patent Document 1: International Publication No. 2 0 1 7/1 6 3 9 8 1
特許文献 2 :特開 2 0 1 6 - 7 9 3 6 6号公報 Patent Document 2: JP 20 16-7 9 3 6 6 Publication
発明の概要 Summary of the invention
発明が解決しようとする課題 Problems to be Solved by the Invention
[0006] 近年、 丨 丁〇電極を形成する際における 丨 丁〇膜を形成する工程において 、 優れた性能を呈し得る 丨 丁〇膜を得る目的で、 I 丁〇膜を、 高温条件下で 、 成膜すること、 及び、 加熱することが検討されている。 しかし、 上記従来 の樹脂組成物を用いて形成した樹脂膜には、 高温条件下における減量を抑制 すること、 即ち、 耐熱性の点で改善の余地があった。 [0006] In recent years, in the process of forming a special-purpose film when forming a special-purpose electrode, in order to obtain a special-purpose film that can exhibit excellent performance, the I-special film is subjected to high temperature conditions, Film formation and heating have been studied. However, there is room for improvement in the resin film formed using the above conventional resin composition in terms of suppressing weight loss under high temperature conditions, that is, in terms of heat resistance.
[0007] さらに、 丨 丁〇電極の性能を向上させるためには、 丨 丁〇電極に備えられ た丨 丁〇膜にしわが無い又は少ないことが好ましい。 丨 丁〇膜にしわが寄れ ば、 積層体の光透過性が劣化し、 丨 丁〇電極の性能低下につながる虞がある 。 しかし、 上記従来の樹脂組成物を用いて形成した樹脂膜には、 表面に 丨 丁 〇膜を形成した場合に、 得られる 丨 丁〇膜の表面にしわが生じることを抑制 する、 という性能においても改善の余地があった。 以下、 本明細書において 、 「丨 丁〇膜の表面にしわが生じることを抑制する」 という性能を、 「丨 丁 〇しわ抑制性能」 と称する。 [0007] Further, in order to improve the performance of the special electrode, it is preferable that the special film provided on the special electrode has no wrinkles or few wrinkles. If the film is wrinkled, the light transmittance of the laminated body may be deteriorated and the performance of the electrode may be deteriorated. However, the resin film formed by using the conventional resin composition described above also has the performance of suppressing wrinkling on the surface of the obtained film when the film is formed on the surface. There was room for improvement. Hereinafter, in the present specification, the performance of "controlling the generation of wrinkles on the surface of the film" is referred to as "performance of suppressing wrinkles".
[0008] そこで、 本発明は、 耐熱性及び丨 丁 0しわ抑制性能に優れる樹脂膜を形成 可能な、 樹脂組成物を提供することを目的とする。 [0008]Therefore, an object of the present invention is to provide a resin composition capable of forming a resin film having excellent heat resistance and excellent anti-wrinkle property.
また、 本発明は、 本発明の樹脂組成物を用いて形成された樹脂膜を備える 高性能な電子部品を提供することを目的とする。 Another object of the present invention is to provide a high-performance electronic component including a resin film formed by using the resin composition of the present invention.
さらにまた、 本発明は、 本発明の樹脂組成物を用いて本発明の樹脂膜を効 率的に製造し得る樹脂膜の製造方法を提供することを目的とする。 Still another object of the present invention is to provide a method for producing a resin film, which can efficiently produce the resin film of the present invention using the resin composition of the present invention.
課題を解決するための手段 Means for solving the problem
[0009] 本発明者は、 上記課題を解決することを目的として鋭意検討を行った。 そ して、 本発明者は、 プロトン性極性基を有する重合体 ( ) と、 所定の架橋 〇 2020/175037 卩(:17 2020 /004163 [0009] The present inventor has conducted earnest studies for the purpose of solving the above problems. Then, the present inventor has established that a polymer () having a protic polar group and 〇 2020/175037
剤 (巳) とを含有する樹脂組成物によれば、 耐熱性及び丨 丁〇しわ抑制性能 に優れる樹脂膜を形成することが可能になることを見出し、 本発明を完成さ せた。 The inventors have found that a resin composition containing an agent (Mitsumi) makes it possible to form a resin film having excellent heat resistance and excellent crease suppression performance, and completed the present invention.
[001 0] 即ち、 この発明は、 上記課題を有利に解決することを目的とするものであ り、 本発明の樹脂組成物は、 プロトン性極性基を有する重合体 ( ) と、 下 式 (1) で表される架橋剤 (巳) と、 を含有する樹脂組成物であって、 前記 プロトン性極性基を有する重合体 ( ) は、 プロトン性極性基を有する環状 オレフイン重合体及びプロトン性極性基を有するポリアミ ドイミ ド樹脂の少 なくとも一方を含むことを特徴とする。 [001 0] That is, the present invention is intended to advantageously solve the above problems, and a resin composition of the present invention is a polymer having a protic polar group () 1) A cross-linking agent represented by 1), and a resin composition containing, wherein the polymer having a protic polar group is a cyclic olefin polymer having a protic polar group, and a protic polar group. It is characterized in that it contains at least one of a polyamidoimide resin having a group.
[化 1 ] [Chemical 1]
Figure imgf000005_0001
Figure imgf000005_0001
( 1 ) (1)
〔式 (1) 中、 複数の 8は、 それぞれ独立して、 炭素数 1〜 6のアルキル基 、 及び炭素数 1〜 6のアルコキシ基の何れかを示し、 〇1、
Figure imgf000005_0002
及び は〇〜 4の整数、 9は〇〜 5の整数をそれぞれ示す。 〕
[In the formula (1), a plurality of 8 each independently represents an alkyl group having 1 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms;
Figure imgf000005_0002
And are integers from 0 to 4, and 9 are integers from 0 to 5, respectively. ]
このように、 樹脂組成物に、 プロトン性極性基を有する環状オレフィン重 合体及びプロトン性極性基を有するポリアミ ドイミ ド樹脂の少なくとも一方 を含むプロトン性極性基を有する重合体 ( ) と、 上記所定の構造を満たす 架橋剤 (巳) とを含有させれば、 耐熱性及び I 丁〇しわ抑制性能に優れる樹 脂膜を形成することが可能となる。 Thus, in the resin composition, a polymer () having a protic polar group containing at least one of a cyclic olefin polymer having a protic polar group and a polyamide imide resin having a protic polar group, and By including a cross-linking agent (Mitsumi) that satisfies the structure, it becomes possible to form a resin film having excellent heat resistance and I-wrinkle suppressing performance.
[001 1 ] ここで、 本発明の樹脂組成物において、 前記プロトン性極性基を有する重 合体 ( ) が、 カルボキシル基を有する環状オレフィン重合体であることが 好ましい。 樹脂組成物にカルボキシル基を有する環状オレフイン重合体を含 〇 2020/175037 4 卩(:170? 2020 /004163 [001 1] Here, in the resin composition of the present invention, the polymer () having a protic polar group is preferably a cyclic olefin polymer having a carboxyl group. The resin composition contains a cyclic olefin polymer having a carboxyl group. 〇 2020/175037 4 卩 (: 170? 2020 /004163
有させることにより、 得られる樹脂膜の丨 丁〇しわ抑制性能を一層高めるこ とができる。 The presence of the resin can further improve the anti-wrinkle control performance of the obtained resin film.
[0012] また、 本発明の樹脂組成物において、 前記プロトン性極性基を有する重合 体 ( ) 1 0 0質量部に対する、 前記架橋剤 (巳) の含有量が、 5質量部以 上 2 0 0質量部以下であることが好ましい。 架橋剤 (巳) の含有量が上記所 定の範囲内であれば、 得られる樹脂膜の丨 丁〇しわ抑制性能を一層高めるこ とができる。 [0012] In the resin composition of the present invention, the content of the cross-linking agent (M) is 5 parts by mass or more based on 100 parts by mass of the polymer having a protic polar group (). It is preferably less than or equal to parts by mass. When the content of the cross-linking agent (Mitsumi) is within the above-specified range, it is possible to further improve the anti-wrinkle suppressing performance of the obtained resin film.
[0013] 更に、 本発明の樹脂組成物は、 アルコキシメチル基を 2つ以上有する化合 物及びメチロール基を 2つ以上有する化合物の少なくとも一方を更に含有す ることが好ましい。 樹脂組成物に、 アルコキシメチル基を 2つ以上有する化 合物及びメチロール基を 2つ以上有する化合物の少なくとも一方を更に含有 させれば、 得られる樹脂膜の丨 丁〇しわ抑制性能を一層高めることができる Further, the resin composition of the present invention preferably further contains at least one of a compound having two or more alkoxymethyl groups and a compound having two or more methylol groups. If the resin composition further contains at least one of a compound having two or more alkoxymethyl groups and a compound having two or more methylol groups, the performance of suppressing the wrinkles of the obtained resin film can be further enhanced. Can
[0014] また、 この発明は、 上記課題を有利に解決することを目的とするものであ り、 本発明の電子部品は、 上述した何れかの樹脂組成物からなる樹脂膜を備 えることを特徴とする。 上述した樹脂組成物を用いて形成される樹脂膜は、 耐熱性及び丨 丁 0しわ抑制性能に優れるため、 当該樹脂膜を備える電子部品 は、 所期の機能を十分に発揮することができるため、 高性能である。 Further, the present invention has an object to advantageously solve the above problems, and an electronic component of the present invention is provided with a resin film made of any one of the above resin compositions. Characterize. Since the resin film formed by using the above-mentioned resin composition has excellent heat resistance and the ability to suppress wrinkles, the electronic component equipped with the resin film can sufficiently exhibit the intended function. , High performance.
[0015] また、 この発明は、 上記課題を有利に解決することを目的とするものであ り、 本発明の樹脂膜の製造方法は、 樹脂組成物を用いて形成した塗膜を 2 0 0 °〇以上で加熱する工程を含むことを特徴とする。 上述した何れかの樹脂組 成物を用いて形成した塗膜を 2 0 0 °〇以上で加熱することにより、 効率的に 、 耐熱性及び丨 丁〇しわ抑制性能に優れる樹脂膜を製造することができる。 発明の効果 [0015] Further, the present invention has an object to advantageously solve the above problems, and a method for producing a resin film of the present invention provides a coating film formed by using a resin composition. The method is characterized by including a step of heating at a temperature of at least °. By efficiently heating a coating film formed using any of the resin compositions described above at 200°C or higher, a resin film with excellent heat resistance and excellent crease suppression performance can be produced. You can Effect of the invention
[0016] 本発明によれば、 耐熱性及び I 丁〇しわ抑制性能に優れる樹脂膜を形成可 能な、 樹脂組成物を提供することができる。 According to the present invention, it is possible to provide a resin composition capable of forming a resin film having excellent heat resistance and I-wrinkle suppressing performance.
また、 本発明によれば、 本発明の樹脂組成物を用いて形成された樹脂膜を 備える高性能な電子部品を提供することができる。 〇 2020/175037 5 卩(:170? 2020 /004163 Further, according to the present invention, it is possible to provide a high-performance electronic component including a resin film formed by using the resin composition of the present invention. 〇 2020/175037 5 卩 (: 170? 2020 /004163
さらにまた、 本発明によれば、 本発明の樹脂組成物を用いて本発明の樹脂 膜を効率的に製造し得る樹脂膜の製造方法を提供することができる。 Furthermore, according to the present invention, it is possible to provide a method for producing a resin film, which can efficiently produce the resin film of the present invention using the resin composition of the present invention.
発明を実施するための形態 MODE FOR CARRYING OUT THE INVENTION
[0017] 以下、 本発明の実施形態について詳細に説明する。 本発明の樹脂組成物は 、 樹脂膜の形成に用いることができる。 そして、 かかる樹脂膜は、 丨 丁〇電 極を備える電子部品に好適に備えられうる。 そして、 本発明の電子部品は、 本発明の樹脂組成物を用いて得られる樹脂膜を備えるものである。 また、 か かる樹脂膜は、 本発明の樹脂組成物を用いた本発明の樹脂膜の製造方法に従 つて効率的に製造することができる。 [0017] Hereinafter, embodiments of the present invention will be described in detail. The resin composition of the present invention can be used for forming a resin film. Then, such a resin film can be suitably provided in an electronic component including a customary electrode. The electronic component of the present invention includes a resin film obtained by using the resin composition of the present invention. Moreover, such a resin film can be efficiently produced by the method for producing a resin film of the present invention using the resin composition of the present invention.
[0018] (樹脂組成物) [0018] (Resin composition)
本発明の樹脂組成物は、 後述する所定のプロ トン性極性基を有する重合体 (八) と、 下式 ( 1 ) で表される架橋剤 (巳) と、 を含有することを特徴と する。 The resin composition of the present invention is characterized by containing a polymer (eighth) having a predetermined protonic polar group described later and a cross-linking agent represented by the following formula (1). ..
[化 2] [Chemical 2]
Figure imgf000007_0001
Figure imgf000007_0001
( 1 ) (1)
〔式 ( 1 ) 中、 複数の 8は、 それぞれ独立して、 炭素数 1 〜 6のアルキル基 、 及び炭素数 1 〜 6のアルコキシ基の何れかを示し、 〇1、
Figure imgf000007_0002
及び は〇〜 4の整数、 9は〇〜 5の整数をそれぞれ示す。 〕
[In the formula (1), a plurality of 8 each independently represents an alkyl group having 1 to 6 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms;
Figure imgf000007_0002
And are integers from 0 to 4, and 9 are integers from 0 to 5, respectively. ]
さらに、 本発明の樹脂組成物は、 任意で、 アルコキシメチル基を 2つ以上 有する化合物及びメチロール基を 2つ以上有する化合物の少なくとも何れか 、 並びに、 その他の添加剤を更に含有し得る。 Furthermore, the resin composition of the present invention may optionally further contain at least one of a compound having two or more alkoxymethyl groups and a compound having two or more methylol groups, and other additives.
[001 9] なお、 本発明の樹脂組成物は、 所定のプロ トン性極性基を有する重合体 ( 〇 2020/175037 6 卩(:170? 2020 /004163 [001 9] Note that the resin composition of the present invention is a polymer having a predetermined protonic polar group ( 〇 2020/175037 6 卩 (: 170? 2020 /004163
八) 、 及び、 上記所定の構造を満たす架橋剤 (巳) を含有しているので、 耐 熱性及び丨 丁〇しわ抑制性能に優れる。 これは、 重合体 ( ) のプロトン性 極性基が、 架橋剤 (巳) により架橋されることにより、 所望の性能を呈し得 る樹脂膜を形成することが可能となることに起因すると推察される。 8) and, and since it contains a cross-linking agent (Mimi) satisfying the above-mentioned predetermined structure, it is excellent in heat resistance and the ability to suppress wrinkles. It is speculated that this is because the protic polar group of the polymer () is cross-linked by the cross-linking agent (Mitsumi), which makes it possible to form a resin film capable of exhibiting desired performance. ..
[0020] <プロトン性極性基を有する重合体 ( ) > <Polymer having protic polar group ()>
プロトン性極性基を有する重合体 ( ) とは、 骨格となる構造に対してプ ロトン性極性基が結合してなる重合体である。 ここで、 「プロトン性極性基 」 とは、 周期律表の第 1 5族又は第 1 6族に属する原子に水素が直接結合し ている原子を含む基をいう。 水素が直接結合する原子は、 好ましくは周期律 表の第 1 5族又は第 1 6族の第 2周期若しくは第 3周期に属する原子であり 、 より好ましくは酸素原子、 窒素原子又は硫黄原子であり、 特に好ましくは 酸素原子である。 The polymer () having a protic polar group is a polymer in which a protonic polar group is bonded to a structure serving as a skeleton. Here, the “protic polar group” refers to a group including an atom in which hydrogen is directly bonded to an atom belonging to Group 15 or Group 16 of the periodic table. The atom to which hydrogen is directly bonded is preferably an atom belonging to the second or third period of Group 15 or Group 16 of the periodic table, more preferably an oxygen atom, a nitrogen atom or a sulfur atom. , Particularly preferably oxygen atom.
[0021 ] このようなプロトン性極性基の具体例としては、 水酸基、 カルボキシル基 (ヒドロキシカルボニル基) 、 スルホン酸基、 リン酸基等の酸素原子を有す る極性基;第一級アミノ基、 第二級アミノ基、 第一級アミ ド基、 第二級アミ ド基 (イミ ド基) 等の窒素原子を有する極性基;チオール基等の硫黄原子を 有する極性基;等が挙げられる。 これらの中でも、 酸素原子を有するものが 好ましく、 より好ましくはカルボキシル基である。 [0021] Specific examples of such a protic polar group include a polar group having an oxygen atom such as a hydroxyl group, a carboxyl group (hydroxycarbonyl group), a sulfonic acid group, and a phosphoric acid group; a primary amino group, Examples thereof include a polar group having a nitrogen atom such as a secondary amino group, a primary amide group, and a secondary amide group (imid group); a polar group having a sulfur atom such as a thiol group; Among these, those having an oxygen atom are preferable, and a carboxyl group is more preferable.
本発明において、 プロトン性極性基を有する重合体 ( ) に結合している プロトン性極性基の数に特に限定はなく、 また、 相異なる種類のプロトン性 極性基が含まれていてもよい。 In the present invention, the number of protic polar groups bound to the polymer () having a protic polar group is not particularly limited, and different types of protic polar groups may be contained.
[0022] プロトン性極性基を有する重合体 ( ) の骨格は、 (1) 主鎖に、 環状才 レフィン単量体に由来する環状構造 (脂環又は芳香環) を有する重合体、 及 び、 (2) ポリアミ ドイミ ドの何れかである。 なお、 繰り返し単位にアミ ド 結合及びイミ ド結合を有する、 所謂 「ポリアミ ドイミ ド樹脂」 と称されうる 重合体であっても、 主鎖に環状オレフィン単量体に由来する環状構造を有す る重合体は、 上記 (1) に記載した、 「主鎖に、 環状オレフィン単量体に由 来する環状構造 (脂環又は芳香環) を有する重合体」 に該当するものとする 〇 2020/175037 7 卩(:170? 2020 /004163 [0022] The skeleton of the polymer having a protic polar group () is (1) a polymer having in its main chain a cyclic structure (alicyclic or aromatic ring) derived from a cyclic reffin monomer, and (2) It is one of the polyamides. Note that even a polymer that has an amid bond and an imido bond in a repeating unit and can be referred to as a so-called “polyamide imido resin” has a cyclic structure derived from a cyclic olefin monomer in the main chain. The polymer shall correspond to "a polymer having a cyclic structure (alicyclic or aromatic ring) derived from a cyclic olefin monomer in its main chain" described in (1) above. 〇 2020/175037 7 卩 (: 170? 2020 /004163
[0023] さらに、 得られる樹脂膜の丨 丁〇しわ抑制性能を一層高める観点から、 プ ロトン性極性基を有する重合体 ( ) として、 骨格が、 (1) 主鎖に、 環状 オレフィン単量体に由来する環状構造 (脂環又は芳香環) を有する重合体を 少なくとも用いること、 換言すれば、 プロトン性極性基を有する重合体 (八 ) が、 環状オレフィン重合体を少なくとも含むことが好ましい。 以下、 プロ トン性極性基を有する重合体 ( ) としての、 環状オレフィン重合体を 「環 状オレフィン重合体 ( 一 ·!) 」 と称し、 プロトン性極性基を有するポリア ミ ドイミ ド樹脂を、 「ポリアミ ドイミ ド樹脂 (八一 2) 」 と称することがあ る。 なお、 プロトン性極性基を有する重合体 ( ) としては、 一種の重合体 を単独で用いても良いし、 複数種の重合体を組み合わせて用いても良い。 よ り具体的には、 プロトン性極性基を有する重合体 ( ) として、 一種若しく は複数種の環状オレフィン重合体 ( _ 1) 又は一種若しくは複数種のポリ アミ ドイミ ド樹脂 (八一2) をそれぞれ用いても良いし、 一種若しくは複数 種の環状オレフィン重合体 ( 一 ·!) と、 一種若しくは複数種のポリアミ ド イミ ド樹脂 (八一2) とを併用しても良い。 中でも、 上述のように、 プロト ン性極性基を有する重合体 ( ) が環状オレフィン重合体 ( _ 1) を少な くとも含むことが好ましく、 プロトン性極性基を有する重合体 ( ) が環状 オレフィン重合体 (八一 1) であることがより好ましい。 [0023] Further, from the viewpoint of further enhancing the property of suppressing wrinkles of the obtained resin film, the polymer having a protonic polar group () has a skeleton of (1) a main chain and a cyclic olefin monomer. It is preferable that at least a polymer having a cyclic structure (alicyclic or aromatic ring) derived from is used, in other words, the polymer (8) having a protic polar group contains at least a cyclic olefin polymer. Hereinafter, a cyclic olefin polymer as a polymer () having a protonic polar group is referred to as a "cyclic olefin polymer (1...!)", and a polyamidimide resin having a protic polar group is referred to as " Polyamide resin (81 2)" is sometimes called. As the polymer () having a protic polar group, one kind of polymer may be used alone, or a plurality of kinds of polymers may be used in combination. More specifically, as the polymer () having a protic polar group, one or more kinds of cyclic olefin polymers (_ 1) or one or more kinds of polyamidoimide resin (81 2) Each of them may be used, or one or more kinds of cyclic olefin polymers (1·!) and one or more kinds of polyamidimide resin (81 2) may be used in combination. Among them, as described above, it is preferable that the polymer () having a protonic polar group contains at least the cyclic olefin polymer (_1), and the polymer () having a protic polar group is a cyclic olefin polymer. It is more preferable that they are a combination (81).
[0024] «環状オレフィン重合体 ( _ 1) » [0024] «Cyclic olefin polymer (_ 1)»
環状オレフィン重合体 ( _ 1) としては、 1又は 2以上の環状オレフィ ン単量体の重合体、 又は、 1又は 2以上の環状オレフィン単量体と、 これと 共重合可能な単量体との共重合体が挙げられるが、 本発明においては、 環状 オレフィン重合体 (八_ 1) を形成するための単量体として、 少なくともプ ロトン性極性基を有する環状オレフィン単量体 (3) を用いることが好まし い。 The cyclic olefin polymer (_ 1) is a polymer of 1 or 2 or more cyclic olefin monomers, or 1 or 2 or more cyclic olefin monomers and a monomer copolymerizable therewith. In the present invention, as a monomer for forming the cyclic olefin polymer (8_1), at least a cyclic olefin monomer having a polar polar group (3) is used. It is preferable to use.
[0025] プロトン性極性基を有する環状オレフィン単量体 ( 3) (以下、 単に 「環 状オレフィン単量体 (3) 」 とも称することがある。 ) としては、 特に限定 〇 2020/175037 8 卩(:170? 2020 /004163 されることなく、 プロトン性極性基を有する環状オレフィン単量体 (3) ( 以下、 適宜、 「単量体 (3) 」 という。 ) の具体例としては、 2—ヒドロキ シカルボニルビシクロ [2. 2. 1 ] ヘプトー 5—エン、 2—メチルー 2— ヒドロキシカルボニルビシクロ [2. 2. 1 ] ヘプトー 5—エン、 2—カル ボキシメチルー 2—ヒドロキシカルボニルビシクロ [2. 2. 1 ] ヘプトー[0025] The cyclic olefin monomer (3) having a protic polar group (hereinafter sometimes simply referred to as "cyclic olefin monomer (3)") is not particularly limited. Specifics of cyclic olefin monomer (3) having a protic polar group without being treated with 2020/175037 8 (: 170? 2020/004163) (hereinafter appropriately referred to as “monomer (3)”). Examples include 2-hydroxycarbonylbicyclo[2.2.1]hept-5-ene, 2-methyl-2-hydroxycarbonylbicyclo[2.2.1]hept-5-ene, 2-carboxymethyl-2-hydroxycarbonyl. Bicyclo [2.2.1] Heptow
5—エン、 2, 3—ジヒドロキシカルボニルビシクロ [2. 2. 1 ] ヘプト5-ene, 2,3-dihydroxycarbonylbicyclo[2.2.1]hept
— 5—エン、 2—ヒドロキシカルボニルー 3—ヒドロキシカルボニルメチル ビシクロ [2. 2. 1 ] ヘプトー 5 -エン、 3 -メチルー 2 -ヒドロキシカ ルボニルビシクロ [2. 2. 1 ] ヘプトー 5—エン、 3—ヒドロキシメチル—5-Ene, 2-hydroxycarbonyl-3-hydroxycarbonylmethylbicyclo[2.2.1]hept-5-ene, 3-methyl-2-hydroxycarbonylbicyclo[2.2.1]hept-5-ene,3 — Hydroxymethyl
— 2—ヒドロキシカルボニルビシクロ [2. 2. 1 ] ヘプトー 5—エン、 2— 2-Hydroxycarbonylbicyclo [2. 2. 1] hept-5-ene, 2
-ヒドロキシカルボニルトリシクロ [5. 2. 1. 〇2, 6] デカー 3, 8 -ジ エン、 4—ヒドロキシカルボニルテトラシクロ [6. 2. 1. 13, 6. 〇2, 7 -Hydroxycarbonyltricyclo [5. 2. 1. ○ 2, 6 ] Deca 3, 8-diene, 4-hydroxycarbonyltetracyclo [6. 2. 1. 1 3, 6 .○ 2, 7
] ドデカー 9—エン、 4—メチルー 4—ヒドロキシカルボニルテトラシクロ] Dodeca 9-ene, 4-methyl-4-hydroxycarbonyltetracyclo
[6. 2. 1. 13, 6· 〇2, 7] ドデカー 9 -エン、 4, 5 -ジヒドロキシカ ルボニルテトラシクロ [6. 2. 1. 13, 6· 〇2, 7] ドデカー 9—エン、 4 —カルボキシメチルー 4—ヒドロキシカルボニルテトラシクロ [6. 2. 1 1 3, 6_ 〇 2, 7] ドデカ— 9—エン、
Figure imgf000010_0001
(ヒドロキシカルボニルメチル) ビシクロ [2. 2. 1 ] ヘプトー 5—エンー 2, 3—ジカルボキシイミ ド、 1\!— (ヒドロキシカルボニルエチル) ビシクロ [2. 2. 1 ] ヘプトー 5— エンー 2, 3—ジカルボキシイミ ド、 1\1_ (ヒドロキシカルボニルペンチル ) ビシクロ [2. 2. 1 ] ヘプトー 5—エンー 2, 3—ジカルボキシイミ ド 、 1\!_ (ジヒドロキシカルボニルエチル) ビシクロ [2. 2. 1 ] ヘプトー
[6. 2. 1. 1 3, 6 · ○ 2, 7 ] Dodeca 9-ene, 4,5-dihydroxycarbonyl tetracyclo [6. 2. 1. 1 3, 6 · ○ 2, 7 ] Dodeca 9 —Ene, 4-carboxymethyl-4-hydroxycarbonyltetracyclo [6. 2. 1 1 3, 6_ 〇 2, 7] dodeca-9-ene,
Figure imgf000010_0001
(Hydroxycarbonylmethyl)bicyclo[2.2.1]hept-5-ene-2,3-dicarboximide, 1\!— (Hydroxycarbonylethyl)bicyclo[2.2.1]hept-5-ene-2,3 —Dicarboximide, 1\1_ (hydroxycarbonylpentyl)bicyclo [2.2.1] Hept-5-ene-2,3-dicarboxyimide, 1\!_ (dihydroxycarbonylethyl)bicyclo [2. 2. 1] Heptow
5—エンー 2, 3—ジカルボキシイミ ド、 1\1— (ジヒドロキシカルボニルプ ロピル) ビシクロ [2. 2. 1 ] ヘプトー 5—エンー 2, 3—ジカルボキシ イミ ド、 1\1— (ヒドロキシカルボニルフエネチル) ビシクロ [2. 2. 1 ] ヘプトー 5—エンー 2, 3—ジカルボキシイミ ド、 1\1— (ヒドロキシカルボ ニルフエネチル) ビシクロ [2. 2. 1 ] ヘプトー 5—エンー 2, 3—ジカ ルボキシイミ ド、 !\1— (2— (4—ヒドロキシフエニル) 一 1 — (ヒドロキ 〇 2020/175037 9 卩(:170? 2020 /004163 5-en-2,3-dicarboximide, 1\1— (dihydroxycarbonylpropyl)bicyclo [2. 2. 1] Hept-5-ene-2,3-dicarboxyimide, 1\1— (hydroxycarbonyl (Phenethyl)bicyclo[2.2.1]hept-5-ene-2,3-dicarboxyimide, 1\1—(hydroxycarbonylphenylethyl)bicyclo[2.2.1]hept-5-ene-2,3— Dicarboximide,! \1— (2— (4-hydroxyphenyl) 1 1 — (hydroxy 〇 2020/175037 9 卩(: 170? 2020/004163
シカルボニル) ェチル) ビシクロ [2. 2. 1 ] ヘプトー 5—ェンー 2, 3 —ジカルボキシイミ ド、 1\1_ (ヒドロキシカルボニルフェニル) ビシクロ [ 2. 2. 1 ] ヘプトー 5—ェンー 2, 3—ジカルボキシイミ ド等のカルボキ シル基含有環状オレフィン; 2 - (4 -ヒドロキシフェニル) ビシクロ [2 . 2. 1 ] ヘプトー 5—ェン、 2—メチルー 2 _ (4—ヒドロキシフェニル ) ビシクロ [2. 2. 1 ] ヘプトー 5 -ェン、 4 - (4 -ヒドロキシフェニ ル) テトラシクロ [6. 2. 1. 13 6· 〇2 7] ドデカー 9 -ェン、 4 -メ チルー 4_ (4—ヒドロキシフェニル) テトラシクロ [6. 2. 1. 13, 6·Cycarbonyl) Ethyl) Bicyclo [2. 2. 1] Hept-5-en-2, 3 — Dicarboximide, 1\1_ (Hydroxycarbonylphenyl) bicyclo [2.2.1] Hept-5-en-2, 3— Carboxyl group-containing cyclic olefin such as dicarboximide; 2--(4-hydroxyphenyl)bicyclo[2.2.1]hept-5-ene, 2-methyl-2_(4-hydroxyphenyl)bicyclo[2. 2.1] Heptone 5-ene, 4-(4-hydroxyphenyl) tetracyclo [6. 2. 1. 1 3 ' 6 · ○ 2 ' 7 ] Dodeca 9-ene, 4-methyl 4_ (4 —Hydroxyphenyl) tetracyclo [6. 2. 1. 1 3, 6 ·
2, 7] ドデカー 9—ェン、 2—ヒドロキシビシクロ [2. 2. 1 ] ヘプトー 5—ェン、 2—ヒドロキシメチルビシクロ [2. 2. 1 ] ヘプトー 5—ェン 、 2—ヒドロキシェチルビシクロ [2. 2. 1 ] ヘプトー 5—ェン、 2—メ チルー 2—ヒドロキシメチルビシクロ [2. 2. 1 ] ヘプトー 5—ェン、 2 , 3—ジヒドロキシメチルビシクロ [2. 2. 1 ] ヘプトー 5—ェン、 2— (ヒドロキシェトキシカルボニル) ビシクロ [2. 2. 1 ] ヘプトー 5—ェ ン、 2—メチルー 2— (ヒドロキシェトキシカルボニル) ビシクロ [2. 22, 7 ] Dodeca 9-ene, 2-hydroxybicyclo [2. 2. 1] heptoe 5-ene, 2-hydroxymethylbicyclo [2. 2. 1] heptoe 5-ene, 2-hydroxye Cylbicyclo [2. 2. 1] Hepto-5-ene, 2-methyl 2-hydroxymethylbicyclo [2. 2. 1] Hepto-5-ene, 2, 3-dihydroxymethylbicyclo [2. 2. 1 ] Heptone-5-ene, 2-(Hydroxyethoxycarbonyl)bicyclo[2.2.1] Heptone-5-ene, 2-Methyl-2-(hydroxyethoxycarbonyl)bicyclo[2.2.2]
. 1 ] ヘプトー 5—ェン、 2— (1 —ヒドロキシー 1 —トリフルオロメチル — 2, 2, 2—トリフルオロェチル) ビシクロ [2. 2. 1 ] ヘプトー 5— ェン、 2 - (2—ヒドロキシ _ 2—トリフルオロメチルー 3, 3, 3—トリ フルオロプロピル) ビシクロ [2. 2. 1 ] ヘプトー 5—ェン、 3—ヒドロ キシトリシクロ [5. 2. 1. 〇2, 6] デカー 4, 8 -ジェン、 3 -ヒドロキ シメチルトリシクロ [5. 2. 1. 〇2, 6] デカー 4, 8 -ジェン、 4 -ヒド ロキシテトラシクロ [6. 2. 1. 13, 6. 02, 7] ドデカ- 9 -ェン、 4 - ヒドロキシメチルテトラシクロ [6. 2. 1. 13, 6. 02, 7] ドデカ- 9_ ェン、 4, 5—ジヒドロキシメチルテトラシクロ [6. 2. 1. 13, 6. 〇2 , 7] ドデカー 9 -ェン、 4 - (ヒドロキシェトキシカルボニル) テトラシクロ [6. 2. 1. 13 6· 〇2 7] ドデカー 9 -ェン、 4—メチルー 4— (ヒド ロキシェトキシカルボニル) テトラシクロ [6. 2. 1. 13, 6· 〇2, 7] ド デカー 9 -ェン、 !\1- (ヒドロキシェチル) ビシクロ [2. 2. 1 ] ヘプト 〇 2020/175037 10 卩(:170? 2020 /004163 .1] Heptone-5-ene, 2—(1—Hydroxy-1—trifluoromethyl-2,2,2-trifluoroethyl)bicyclo [2.2.1] Heptone-5-ene, 2-(2— hydroxy _ 2-trifluoromethyl-3, 3, 3-trifluoropropyl) bicyclo [2.2.1] Heputo 5 E emissions, 3- hydro Kishitorishikuro [5.2.2 1. 〇 2, 6] Deka 4, 8-Gen, 3-hydroxymethyltricyclo [5. 2. 1. ○ 2, 6 ] Deca 4, 8-gen, 4-hydroxytetracyclo [6. 2. 1. 13, 6. 02, 7 ] Dodeca- 9 -ene, 4 -hydroxymethyltetracyclo [6. 2. 1. 13, 6, 02, 7] Dodeca-9_ene, 4,5-dihydroxymethyltetracyclo [6. 2. 1. 1 3, 6 .○ 2 , 7 ] Dodeca 9-ene, 4-(Hydroxyethoxycarbonyl) tetracyclo [6. 2. 1. 1 3 ' 6 · ○ 2 ' 7 ] Dodeca 9-en, 4— Methyl-4— (hydroxetoxycarbonyl) tetracyclo [6. 2. 1. 1 3, 6 · ○ 2, 7 ] Dodeca 9-en,! \1-(Hydroxyethyl)bicyclo [2. 2. 1] hept 〇 2020/175037 10 boxes (: 170? 2020 /004163
— 5—エンー 2, 3—ジカルボキシイミ ド、 1\1— (ヒドロキシフエニル) ビ シクロ [2. 2. 1 ] ヘプトー 5—エンー 2, 3—ジカルボキシイミ ド、 等 の水酸基含有環状オレフィン等を挙げることができる。 中でも、 得られる樹 脂膜の I 丁〇しわ抑制性能を一層高める観点から、 カルボキシル基含有環状 オレフィンが好ましく、 4—ヒドロキシカルボニルテトラシクロ [6. 2.— 5-Ene-2,3-dicarboximide, 1\1— (hydroxyphenyl)bicyclo [2. 2. 1] Hept-5-ene-2,3-dicarboximide, etc. Etc. can be mentioned. Among them, a carboxyl group-containing cyclic olefin is preferable, and 4-hydroxycarbonyltetracyclo [6. 2.
1. 13, 6. 〇2, 7] ドデカー 9—エンが特に好ましい。 なお、 環状オレフィ ン単量体 (3) としては、 一種又は複数種の単量体を用いることができる。 1.1 3, 6 .0 2, 7 ]dodeca 9-ene is particularly preferred. As the cyclic olefin monomer (3), one kind or plural kinds of monomers can be used.
[0026] 環状オレフィン重合体 ( _ 1) 中における、 環状オレフィン単量体 (3 ) に由来する単位の含有割合は、 環状オレフィン重合体 ( _ 1) を構成す る全繰り返し単位を 1 00モル%として、 1 0モル%以上が好ましく、 20 モル%以上がより好ましく、 30モル%以上が更に好ましく、 90モル%以 下が好ましく、 80モル%以下がより好ましく、 70モル%以下が更に好ま しい。 環状オレフィン単量体 ( 3) に由来する単位の含有割合を上記範囲と することにより、 得られる樹脂膜の丨 丁〇しわ抑制性能を一層良好なものと することができる。 [0026] In the cyclic olefin polymer (_ 1), the content ratio of the units derived from the cyclic olefin monomer (3) is such that all repeating units constituting the cyclic olefin polymer (_ 1) are 100 mol. %, 10 mol% or more is preferable, 20 mol% or more is more preferable, 30 mol% or more is further preferable, 90 mol% or less is preferable, 80 mol% or less is more preferable, and 70 mol% or less is further preferable. Good By setting the content ratio of the unit derived from the cyclic olefin monomer (3) within the above range, the performance of suppressing the wrinkles of the obtained resin film can be further improved.
[0027] また、 本発明で用いる環状オレフィン重合体 ( 一 ·!) は、 プロトン性極 性基を有する環状オレフィン単量体 (3) と、 これと共重合可能な単量体 ( 13) とを共重合して得られる共重合体であってもよい。 このような共重合可 能な単量体としては、 プロトン性極性基以外の極性基を有する環状オレフィ ン単量体 ( 1) 、 極性基を持たない環状オレフィン単量体 ( 2) 、 及び 環状オレフィン以外の単量体 (匕 3) (以下、 適宜、 「単量体 ( 13 1) 」 、 「単量体 (匕 2) 」 、 「単量体 (匕 3) 」 という。 ) が挙げられる。 ここで 単量体 (匕 1) 〜 (匕 3) は、 特性に影響が無い範囲で使用可能である。 そ して、 環状オレフィン重合体 ( _ ·!) は、 単量体 (3) と、 単量体 (匕 1 ) とから構成されることが好ましい。 さらに、 下記に列挙する単量体 (匕 1 ) の中でも、 一置換イミ ド基を有する環状オレフィンである、 1^1— ( 2— エチルヘキシル) ービシクロ [2. 2. 1 ] ヘプトー 5—エンー 2 , 3—ジ カルボキシイミ ドを用いることが好ましい。 〇 2020/175037 11 卩(:170? 2020 /004163 [0027] Further, the cyclic olefin polymer (1...!) used in the present invention comprises a cyclic olefin monomer (3) having a protic polar group, and a monomer (13) copolymerizable therewith. It may be a copolymer obtained by copolymerizing. Such copolymerizable monomers include cyclic olefin monomers having polar groups other than protic polar groups (1), cyclic olefin monomers having no polar groups (2), and cyclic monomers. Examples of the monomer other than the olefin (stain 3) (hereinafter, appropriately referred to as “monomer (131)”, “monomer (sl 2)”, and “monomer (sl 3) ”). .. Here, the monomers (distance 1) to (distance 3) can be used as long as the characteristics are not affected. Then, the cyclic olefin polymer (_!!) is preferably composed of the monomer ( 3 ) and the monomer (deposit 1). Furthermore, among the monomers listed below (1), 1^1—(2-ethylhexyl)-bicyclo[2.2.1]hept-5-ene-2, which is a cyclic olefin having a mono-substituted imido group. Preference is given to using 3,3-dicarboximide. 〇 2020/175037 11 卩(: 170? 2020/004163
[0028] プロトン性極性基以外の極性基を有する環状オレフィン単量体 ( 1) が 有する、 プロトン性極性基以外の極性基の具体例としては、 エステル基 (ア ルコキシカルボニル基及びアリーロキシカルボニル基を総称していう。 ) 、 1\]_置換イミ ド基、 エポキシ基、 ハロゲン原子、 シアノ基、 カルボニルオキ シカルボニル基 (ジカルボン酸の酸無水物残基) 、 アルコキシ基、 カルボニ ル基、 第三級アミノ基、 スルホン基、 アクリロイル基等が挙げられる。 中で も、 プロトン性極性基以外の極性基としては、 エステル基、 1\1_置換イミ ド 基及びシアノ基が好ましく、 エステル基及び 1\1_置換イミ ド基がより好まし く、 1\1_置換イミ ド基が特に好ましい。 [0028] Specific examples of the polar group other than the protic polar group contained in the cyclic olefin monomer (1) having a polar group other than the protic polar group include ester groups (alkoxycarbonyl groups and aryloxycarbonyl groups). ), 1\]_ substituted imide group, epoxy group, halogen atom, cyano group, carbonyloxycarbonyl group (an acid anhydride residue of dicarboxylic acid), alkoxy group, carbonyl group, Examples thereof include tertiary amino group, sulfone group and acryloyl group. Among them, as the polar group other than the protic polar group, an ester group, a 1\1_ substituted imido group and a cyano group are preferable, and an ester group and a 1\1_ substituted imido group are more preferable. The \1_ substituted imide group is particularly preferred.
[0029] そして、 単量体 (匕 1) の具体例としては、 以下のような環状オレフィン が挙げられる。 [0029] Specific examples of the monomer (distance 1) include the following cyclic olefins.
エステル基を有する環状オレフィンとしては、 例えば、 5 -アセトキシビ シクロ [2. 2. 1 ] ヘプトー 2—エン、 5—メ トキシカルボニルビシクロ [2. 2. 1 ] ヘプトー 2—エン、 5—メチルー 5—メ トキシカルボニルビ シクロ [2. 2. 1 ] ヘプトー 2—エン、 9—アセトキシテトラシクロ [6 . 2. 1. 13, 6. 〇2, 7] ドデカー 4—エン、 9—メ トキシカルボニルテト ラシクロ [6. 2. 1. 13, 6· 〇2, 7] ドデカー 4—エン、 9—エトキシカ ルボニルテトラシクロ [6. 2. 1. 13, 6· 〇2, 7] ドデカー 4—エン、 9 — n—プロポキシカルボニルテトラシクロ [6. 2. 1. 13, 6. 〇2, 7] ド デカー 4—エン、 9—イソプロポキシカルボニルテトラシクロ [6. 2. 1 . 13, 6_ 〇2, 7] ドデカ— 4—エン、 9—门ーブトキシカルボニルテトラシ クロ [6. 2. 1. 13, 6_ 〇 2, 7] ドデカ— 4—エン、 9—メチルー9—メ トキシカルボニルテトラシクロ [6. 2. 1. 13, 6. 02, 7] ドデカ- 4- エン、 9—メチルー 9—エトキシカルボニルテトラシクロ [6. 2. 1. 13Examples of the cyclic olefin having an ester group include 5-acetoxybicyclo[2.2.1]hept-2-en, 5-methoxycarbonylbicyclo[2.2.1]hept-2-ene, 5-methyl-5-. Metoxycarbonylbicyclo [2. 2. 1] Hept-2-en, 9-acetoxytetracyclo [6. 2. 1. 1 3, 6 .○ 2, 7 ] Dodeca 4-ene, 9- Metoxycarbonyl tet Lacyclo[6. 2. 1. 1 3, 6 · ○ 2, 7 ] Dodeca 4-ene, 9-Ethoxycarbonyl tetracyclo [6. 2. 1. 1 3, 6 · ○ 2, 7 ] Dodeca 4-ene , 9-n-propoxycarbonyltetracyclo [6. 2. 1. 1 3, 6 .○ 2, 7 ] Dodeca 4-ene, 9-isopropoxycarbonyl tetracyclo [6. 2. 1. 13, 6_ 〇 2, 7] Dodeca- 4 -ene, 9-Butoxycarbonyltetracyclo [6. 2. 1. 13, 6_ ○ 2, 7] Dodeca-4-ene, 9-Methyl-9-methoxycarbonyltetracyclo [6. 2. 1. 13, 6. 02, 7] Dodeca-4-ene, 9-methyl-9-ethoxycarbonyltetracyclo [6. 2. 1. 13
6. 〇27] ドデカー 4—エン、
Figure imgf000013_0001
プロポキシカルボニル テトラシクロ [6. 2. 1. 13, 6. 02, 7] ドデカ- 4 -エン、 9 -メチル
, 6 .0 2 , 7 ] Dodeca 4-en,
Figure imgf000013_0001
Propoxycarbonyl tetracyclo [6. 2. 1. 13, 6. 02, 7] Dodeca-4-ene, 9-methyl
_ 9—イソプロポキシカルボニルテトラシクロ [6. 2. 1. 13, 6. 〇2, 7 ] ドデカー 4—エン、 9—メチルー 9—门ーブトキシカルボニルテトラシク 〇 2020/175037 12 卩(:170? 2020 /004163 _ 9-Isopropoxycarbonyltetracyclo [6. 2. 1. 1 3, 6 .〇 2, 7 ] Dodeca 4-ene, 9-Methyl-9-door Butoxycarbonyltetracyclyl 〇 2020/175037 12 卩 (: 170? 2020 /004163
口 [6. 2. 1. 13 · 6. 〇2 7] ドデカー 4 -エン、 9— (2, 2, 2 -卜 リフルオロエトキシカルボニル) テトラシクロ [6. 2. 1. 13, 6. 02, 7Mouth [6. 2. 1. 1 3 · 6 .〇 2 ' 7 ] Dodeca 4-ene, 9— (2, 2, 2--rifluoroethoxycarbonyl) tetracyclo [6. 2. 1. 13 , 6. 02 , 7
] ドデカー 4 -エン、 9 -メチルー 9 - (2, 2, 2 -トリフルオロエトキ シカルボニル) テトラシクロ [6. 2. 1. 13, 6. 02, 7] ドデカ— 4—エ ン等が挙げられる。 ] Dodeca 4-ene, 9-methyl-9-(2,2,2-trifluoroethoxycarbonyl)tetracyclo [6. 2. 1. 13, 6. 02, 7] Dodeca- 4 -en ..
置換イミ ド基を有する環状オレフィンとしては、 例えば、 1\1—フエニ ルビシクロ [2. 2. 1 ] ヘプトー 5—エンー 2, 3—ジカルボキシイミ ド 、 1\1_ (2—エチルヘキシル) _ 1 —イソプロピルー 4—メチルビシクロ [ 2. 2. 2] オクトー 5 -エンー 2, 3 -ジカルボキシイミ ド、 1\1- (2- エチルヘキシル) ービシクロ [2. 2. 1 ] ヘプトー 5—エンー 2 , 3—ジ カルボキシイミ ド、 1\!_ [ (2—エチルブトキシ) エトキシプロピル] —ビ シクロ [2. 2. 1 ] ヘプトー 5—エンー 2, 3—ジカルボキシイミ ド、 — (エンドービシクロ [2. 2. 1 ]ヘプトー 5—エンー 2, 3—ジイルジカ ルボニル) アスパラギン酸ジメチル等が挙げられる。 Examples of the cyclic olefin having a substituted imido group include 1\1—phenylbicyclo[2.2.1]hept-5-ene-2,3-dicarboximide, 1\1_(2-ethylhexyl)_ 1 — Isopropyl-4-methylbicyclo[2.2.2]oct-5-ene-2,3-dicarboximide, 1\1-(2-ethylhexyl)-bicyclo[2.2.1]hept-5-ene-2,3 —Dicarboximide, 1\!_ [(2-Ethylbutoxy)ethoxypropyl] — Bicyclo [2. 2. 1] Hept-5-ene-2,3-dicarboxyimide, — (Endobicyclo [2. 2.1 ]hept-5-ene-2,3-diyldicarbonyl) dimethyl aspartate and the like.
シアノ基を有する環状オレフィンとしては、 例えば、 9 -シアノテトラシ クロ [6. 2. 1. 13, 6_ 〇 2, 7] ドデカ— 4—エン、 9—メチルー9—シ アノテトラシクロ [6. 2. 1. 13, 6· 〇2, 7] ドデカー 4 -エン、 5 -シ アノビシクロ [2. 2. 1 ] ヘプトー 2 -エン等が挙げられる。 Examples of the cyclic olefin having a cyano group include 9-cyanotetracyclo [6. 2. 1. 13, 6_ ○ 2, 7] dodeca-4-ene and 9-methyl-9-cyanotetracyclo [6. 2. 1. 1 3, 6 · ○ 2, 7 ] Dodeca 4-ene, 5-cyanobicyclo [2. 2. 1] heptose 2-ene and the like.
ハロゲン原子を有する環状オレフィンとしては、 例えば、 9 -クロロテト ラシクロ [6. 2. 1. 13, 6. 02, 7] ドデカ- 4 -エン、 9 -メチルー 9 -クロロテトラシクロ [6. 2. 1. 13, 6. 〇2, 7] ドデカ- 4 -エン等が 挙げられる。 Examples of the cyclic olefin having a halogen atom include 9-chlorotetracyclo [6. 2. 1. 13, 6. 02, 7] dodeca-4-ene, 9-methyl-9-chlorotetracyclo [6. 2. 1 . 13, 6. ○ 2, 7] Dodeca-4-en, etc.
これらのプロトン性極性基以外の極性基を有する環状オレフィン単量体 ( 匕 1) は、 それぞれ単独で用いてもよく、 2種以上を組み合わせて用いても よい。 These cyclic olefin monomers having a polar group other than the protic polar group (distance 1) may be used alone or in combination of two or more kinds.
[0030] 極性基を持たない環状オレフィン単量体 (匕 2) の具体例としては、 ビシ クロ [2. 2. 1 ] ヘプトー 2—エン ( 「ノルボルネン」 ともいう。 ) 、 5 —エチルービシクロ [2. 2. 1 ] ヘプトー 2—エン、 5—ブチルービシク 〇 2020/175037 13 卩(:170? 2020 /004163 [0030] Specific examples of the cyclic olefin monomer having no polar group (chew 2) include bicyclo [2.2.1] hept-2-ene (also referred to as "norbornene") and 5-ethyl-bicyclo. [2. 2. 1] Heptone 2-ene, 5-butyl bisic 〇 2020/175037 13 卩 (: 170? 2020 /004163
口 [2. 2. 1 ] ヘプトー 2 -ェン、 5 -ェチリデンービシクロ [2. 2.Mouth [2. 2. 1] Heptone 2-en, 5-ethylidene bicyclo [2. 2.
1 ] ヘプトー 2 -ェン、 5 -メチリデンービシクロ [2. 2. 1 ] へプト_1] Heptone 2-en, 5-methylidene bicyclo [2. 2. 1] hept_
2 -ェン、 5 -ビニルービシクロ [2. 2. 1 ] ヘプトー 2 -ェン、 トリシ クロ [5. 2. 1. 〇2, 6] デカー 3, 8 -ジェン (慣用名 :ジシクロペンタ ジェン) 、 テトラシクロ [ 1 0. 2. 1. 02, 1 14, 9] ペンタデカ- 4, 6, 8, 1 3 -テトラェン、 テトラシクロ [6. 2. 1. 1 3, 6· 〇2, 7] ド デカー 4 -ェン ( 「テトラシクロドデセン」 ともいう。 ) 、 9 -メチルーテ トラシクロ [6. 2. 1. 13 6 · 〇2 7] ドデカー 4 -ェン、 9 -ェチルー テトラシクロ [6. 2. 1. 13 6 · 〇2 7] ドデカー 4 -ェン、 9 -メチリ デンーテトラシクロ [6. 2. 1. 13, 6 · 〇2, 7] ドデカー 4 -ェン、 9 - ェチリデンーテトラシクロ [6. 2. 1. 13 6 · 〇2 7] ドデカー 4 -ェン 、 9 -ビニルーテトラシクロ [6. 2. 1. 13, 6 · 〇2, 7] ドデカー 4 -ェ ン、 9 -プロべニルーテトラシクロ [6. 2. 1. 13, 6 · 〇2, 7] ドデカ_ 4 -ェン、 ペンタシクロ [9. 2. 1. 13, 9 02, 1〇] ペンタデカ- 52-en, 5-vinyl-bicyclo [2. 2. 1] heptoe 2-en, tricyclo [5. 2. 1. 〇 2, 6 ] Deca 3, 8-gen (common name: dicyclopentagen) , Tetracyclo [1 0. 2. 1. 0 2, 1 14, 9 ] pentadeca-4, 6, 8, 1 3 -tetraene, tetracyclo [6. 2. 1. 1 3, 6· ○ 2, 7 ] de Deka 4 - (also referred to as "tetracyclododecene".) E down, 9 - Mechirute Torashikuro [6.2.3 1.1 3 '6-〇 2' 7] Dodeka 4 - E emissions, 9 - Echiru tetracyclo [6. 2. 1. 1 3 ' 6 · ○ 2 ' 7 ] Dodeca 4-en, 9-methylidene-tetracyclo [6. 2. 1. 1 3, 6 · ○ 2, 7 ] Dodeca 4- En, 9-ethylidene-tetracyclo [6. 2. 1. 1 3 ' 6 · ○ 2 ' 7 ] Dodeca 4-en, 9-vinyl-tetracyclo [6. 2. 1. 1 3, 6-〇 2, 7] Dodeka 4 - E emissions, 9 - Purobe sulfonyl over tetracyclo [6.2.3 1.1 3, 6-〇 2, 7] dodeca _ 4 - E down, pentacyclo [9.2. 1. 13, 9 02, 1 〇] Pentadeca- 5 ,
1 2—ジェン、 シクロペンテン、 シクロペンタジェン、 9—フェニルーテト ラシクロ [6. 2. 1. 13 6 · 〇2 7] ドデカー 4 -ェン、 テトラシクロ [ 9. 2. 1. 〇2 1 0· 〇3 8] テトラデカー 3, 5, 7, 1 2 -テトラェン 、 ペンタシクロ [9. 2. 1. 13, 9· 〇2, 10] ペンタデカー 1 2—ェン等 が挙げられる。 1 2 -Gen, Cyclopentene, Cyclopentadiene, 9-Phenyl-tetracyclo [6. 2. 1. 1 3 ' 6 · 〇 2 ' 7 ] Dodeca 4-en, Tetracyclo [9 2. 1. 〇 2 ' 1 Examples include 0 · 〇 3 ' 8 ] tetradeca 3, 5, 7, 1 2 -tetraene, pentacyclo [9. 2. 1. 1 3, 9 · 〇 2, 10 ] pentadeca 12-ene.
これらの極性基を持たない環状オレフィン単量体 (匕 2) は、 それぞれ単 独で用いてもよく、 2種以上を組み合わせて用いてもよい。 These polar olefin monomers having no polar group (distance 2) may be used alone or in combination of two or more kinds.
[0031] 環状オレフィン以外の単量体 (匕 3) の具体例としては、 鎖状オレフィン が挙げられる。 鎖状オレフィンとしては、 例えば、 ェチレン、 プロピレン、 [0031] As a specific example of the monomer other than the cyclic olefin (the well 3), a chain olefin is mentioned. Examples of chain olefins include ethylene, propylene,
1 —ブテン、 1 —ペンテン、 1 —ヘキセン、 3—メチルー 1 —ブテン、 3 - メチルー 1 —ペンテン、 3—ェチルー 1 —ペンテン、 4—メチルー 1 —ペン テン、 4—メチルー 1 —ヘキセン、 4, 4—ジメチルー 1 —ヘキセン、 4,1-butene, 1-pentene, 1-hexene, 3-methyl-1-butene, 3-methyl-1-pentene, 3-ethyl-1-pentene, 4-methyl-1-pentene, 4-methyl-1-hexene, 4, 4-dimethyl-1-hexene, 4,
4—ジメチルー 1 —ペンテン、 4—ェチルー 1 —ヘキセン、 3—ェチルー 1 —ヘキセン、 1 —オクテン、 1 —デセン、 1 —ドデセン、 1 —テトラデセン 〇 2020/175037 14 卩(:170? 2020 /004163 4-dimethyl-1-pentene, 4-ethyl-1-hexene, 3-ethyl-1-hexene, 1-octene, 1-decene, 1-dodecene, 1-tetradecene 〇 2020/175037 14 卩 (: 170? 2020 /004163
、 1 -へキサデセン、 1 -オクタデセン、 1 -ェイコセン等の炭素数 2〜 2 0の《_オレフィン; 1 , 4—へキサジェン、 4—メチルー 1 , 4—へキサ ジェン、 5—メチルー 1 , 4—へキサジェン、 1 , 7—オクタジェン等の非 共役ジェン等が挙げられる。 , 1-hexadecene, 1-octadecene, 1-eicosene, etc. <<2 olefins having 2 to 20 carbon atoms; 1,4-hexadiene, 4-methyl-1,4-hexagen, 5-methyl-1,4 — Hexagen, and non-conjugated gens such as 1, 7-octagen.
これらの環状オレフィン以外の単量体 (匕 3) は、 それぞれ単独で、 又は 、 2種以上を組み合わせて用いることができる。 These monomers other than the cyclic olefin (the well 3) can be used alone or in combination of two or more kinds.
[0032] 環状オレフィン重合体 ( _ 1) は、 環状オレフィン単量体 (3) を、 所 望により単量体 (1^ 1) 〜 (匕 3) から選ばれる 1種以上の単量体と共に重 合することにより得られる。 重合により得られた重合体を更に水素化しても よい。 本発明では、 水素添加された重合体も、 プロトン性極性基を有する環 状オレフィン系樹脂に含まれる。 [0032] The cyclic olefin polymer (_ 1) is obtained by combining the cyclic olefin monomer (3) with one or more kinds of monomers selected from the monomers (1^1) to (distance 3) if desired. It is obtained by overlapping. The polymer obtained by the polymerization may be further hydrogenated. In the present invention, a hydrogenated polymer is also included in the cyclic olefin resin having a protic polar group.
[0033] 環状オレフィン重合体 ( _ 1) は、 プロトン性極性基を有しない環状才 レフィン重合体に、 公知の変性剤を利用してプロトン性極性基を導入し、 所 望により水素添加を行なう方法によっても得ることができる。 ここで、 水素 添加は、 プロトン性極性基導入前の重合体に対して行なってもよい。 [0033] The cyclic olefin polymer (_ 1) is a cyclic olefin polymer having no protic polar group, in which a protic polar group is introduced using a known modifier, and hydrogenation is carried out as desired. It can also be obtained by the method. Here, hydrogenation may be performed on the polymer before the introduction of the protic polar group.
また、 環状オレフィン重合体 ( 一 ·!) は、 プロトン性極性基を有する環 状オレフィン重合体に、 更にプロトン性極性基を導入する方法によって得て もよい。 The cyclic olefin polymer (1...!) may be obtained by a method of further introducing a protic polar group into the cyclic olefin polymer having a protic polar group.
[0034] «ポリアミ ドイミ ド樹脂 (八- 2) » [0034] «Polyamide imid resin (8-2)»
プロトン性極性基を有する重合体 ( ) としての、 「ポリアミ ドイミ ド樹 月旨 ( _ 2) 」 は、 繰り返し単位にアミ ド結合及びイミ ド結合を有する重合 体 (即ち、 ポリアミ ドイミ ド樹脂) であって、 プロトン性極性基を有する重 合体である。 なお、 ポリアミ ドイミ ド樹脂 ( _ 2) は、 プロトン性極性基 を有しないポリアミ ドイミ ドに、 公知の変性剤を利用してプロトン性極性基 を導入する方法によっても得ることができる。 また、 ポリアミ ドイミ ド樹脂 (八一 2) は、 プロトン性極性基を有するポリアミ ドイミ ドに、 更にプロト ン性極性基を導入する方法によって得てもよい。 よって、 下記列挙に係る各 種ポリアミ ドイミ ドのうち、 プロトン性極性基を有するものは、 そのまま、 〇 2020/175037 15 卩(:170? 2020 /004163 As a polymer () having a protic polar group, "polyamidimide resin (_ 2)" is a polymer having an amid bond and an imido bond in a repeating unit (that is, a polyamide resin). It is a polymer having a protic polar group. The polyamide imide resin (_ 2) can also be obtained by a method of introducing a protic polar group into a polyamide imide having no protic polar group using a known modifier. The polyamide imide resin (81 2) may be obtained by a method in which a protonic polar group is further introduced into a polyamide imide having a protic polar group. Therefore, among the various polyamidoimides listed below, those having a protic polar group are 〇 2020/175037 15 卩(: 170? 2020/004163
或いは更に変性してプロトン性極性基を導入して用いることができ、 プロト ン性極性基を有さないものは、 公知の変性剤を利用する等して変性してプロ トン性極性基を導入してから、 用いることができる。 Alternatively, it can be used by further modifying it to introduce a protonic polar group. For those not having a protonic polar group, it is modified by using a known modifier to introduce a protonic polar group. It can then be used.
[0035] ポリアミ ドイミ ド樹脂 ( 一 2) としては、 分岐型構造を有するポリアミ ドイミ ド及び直鎖型構造を有するポリアミ ドイミ ドが挙げられる。 中でも、 ポリアミ ドイミ ドとしては、 分岐型構造を有するポリアミ ドイミ ドが好まし い。 ポリアミ ドイミ ド樹脂 (八一 2) が分岐型構造を有するポリアミ ドイミ ドであれば、 樹脂組成物の耐薬品性を向上させることができる。 [0035] Examples of the polyamidimide resin (12) include a polyamidimide having a branched structure and a polyamidimide having a linear structure. Among them, polyamidimide having a branched structure is preferable as the polyamidimide. When the polyamidimide resin (81 2) is a polyamidimide having a branched structure, the chemical resistance of the resin composition can be improved.
[0036] 分岐型構造を有するポリアミ ドイミ ドとしては、 例えば、 下式 (2) で表 される構造単位と下式 (3) で表される構造単位を有し、 且つ、 下記構造式 (〇〇 、 (13) 及び (ァ) で表される末端構造のいずれか 1個以上を有する 化合物、 下式 (4) で表される化合物、 分岐型構造を有するポリアミ ドイミ ド樹脂 (口 I <3株式会社製、 ユニディック巳1\/1〇 - 7 9 3) 、 分岐型構造を 有するポリアミ ドイミ ド樹脂 (口 丨 〇株式会社製:ユニディック巳1\/1〇 - 1 0 1 5) 、 などが挙げられる。 Examples of the polyamidimide having a branched structure include a structural unit represented by the following formula (2) and a structural unit represented by the following formula (3), and 〇, compounds having at least one of the terminal structures represented by (13) and (a), compounds represented by the following formula (4), polyamidimide resin having a branched structure (mouth I <3 Co., Ltd., Unidick 1\/1 〇-7 9 3), Polyamidimide resin with a branched structure (Mouth 〇 Co., Ltd.: Unidick 1 1//1 〇-10 15), And so on.
[0037] [化 3] [0037] [Chemical Formula 3]
Figure imgf000017_0001
Figure imgf000017_0001
〔但し、 上記式 (2) 中、 1は灰素数 6〜 1 3の環式脂肪族構造を有する有 機基を表す。 〕 [However, in the above formula (2), 1 represents an organic group having a cycloaliphatic structure having an ash atom number of 6 to 13. ]
[0038] \¥02020/175037 16 卩(:17 2020 /004163 [0038] \\02020/175037 16 卩(: 17 2020/004163
[化 4] [Chemical 4]
Figure imgf000018_0001
Figure imgf000018_0001
〔但し、 上記式 (3) 中、
Figure imgf000018_0002
は炭素数 6〜 1 3の環式脂肪族構造を有する有 機基を表し、
Figure imgf000018_0003
2は数平均分子量が 700〜 4500の線状炭化水素構造を表 す。 〕
[However, in the above formula (3),
Figure imgf000018_0002
Represents an organic group having a cycloaliphatic structure having 6 to 13 carbon atoms,
Figure imgf000018_0003
2 represents a linear hydrocarbon structure with a number average molecular weight of 700-4500. ]
[0039] [化 5] [0039] [Chemical 5]
Figure imgf000018_0004
Figure imgf000018_0004
[0040] [化 6] [0040] [Chemical 6]
Figure imgf000018_0005
Figure imgf000018_0005
3 3
[0041] [化 7] [0041] [Chemical 7]
Figure imgf000018_0006
Figure imgf000018_0006
[0042] 〇 2020/175037 卩(:170? 2020 /004163 [0042] 〇 2020/175037 卩 (: 170? 2020 /004163
[化 8] [Chemical 8]
Figure imgf000019_0001
Figure imgf000019_0001
〔ただし、 式 (4) 中、 nは 2以上 2 0 0以下の整数である。 〕 [However, in the formula (4), n is an integer of 2 or more and 200 or less. ]
[0043] 上記式 (4) で表される構造を有する、 プロトン性極性基を有する環状才 レフィン重合体は、 例えば、 下式 (5) で表されるイソホロンジイソシアネ —トイソシアヌレート体と、 無水トリメッ ト酸とを反応させることにより得 ることができる。 [0043] A cyclic reffin polymer having a protic polar group and having a structure represented by the above formula (4) is, for example, an isophorone diisocyanate-isoisocyanurate body represented by the following formula (5): , And trimetic anhydride.
[化 9] [Chemical 9]
Figure imgf000019_0002
Figure imgf000019_0002
[0044] かかる反応において、 水酸基を 2個以上含有する多官能ポリオールを連鎖 移動剤として添加して、 上記式 (4) の一部構造にウレタン構造を有する部 位を導入してもよい。 ウレタン構造を有する部位を上記式 (4) の一部構造 に導入することにより、 分岐型構造を有するポリアミ ドイミ ドの物性をコン トロールすることができる。 ウレタン構造を有する部位としては、 例えば、 下式 (6) で表される部位が挙げられる。 In such a reaction, a polyfunctional polyol containing two or more hydroxyl groups may be added as a chain transfer agent to introduce a moiety having a urethane structure into the partial structure of the above formula (4). By introducing a part having a urethane structure into the partial structure of the above formula (4), the physical properties of the polyamide imide having a branched structure can be controlled. Examples of the site having a urethane structure include the site represented by the following formula (6).
[0045] \¥0 2020/175037 18 卩(:17 2020 /004163 [0045] \¥0 2020/175037 18 卩 (: 17 2020 /004163
[化 10] [Chemical 10]
Figure imgf000020_0001
Figure imgf000020_0001
〔但し、 上記式 (6) 中、
Figure imgf000020_0002
は炭素数 6〜 1 3の環式脂肪族構造を有する有 機基を表し、
Figure imgf000020_0003
2は数平均分子量が 7 0 0〜 4 5 0 0の線状炭化水素構造を表 す。 〕
[However, in the above formula (6),
Figure imgf000020_0002
Represents an organic group having a cycloaliphatic structure having 6 to 13 carbon atoms,
Figure imgf000020_0003
2 represents a linear hydrocarbon structure having a number average molecular weight of 700 to 450. ]
[0046] また、 直鎖型構造を有するポリアミ ドイミ ドとしては、 例えば、 下式 (7 ) で表される化合物、 などが挙げられる。 [0046] Further, examples of the polyamide imide having a linear structure include a compound represented by the following formula (7):
[0047] [化 1 1 ] [0047] [Chemical 1 1]
Figure imgf000020_0004
Figure imgf000020_0004
〔但し、 上記式 (7) 中、 nは 2以上 4 0 0以下の整数である。 〕 [However, in the above formula (7), n is an integer of 2 or more and 400 or less. ]
[0048] 前記上記式 ( 7) で表される化合物は、 無水トリメッ ト酸とイソホロンジ イソシアネートとを反応させることにより得られる。 The compound represented by the above formula (7) can be obtained by reacting trimetic anhydride with isophorone diisocyanate.
[0049] <架橋剤 (巳) > <Crosslinking agent (Mimi)>
架橋剤 (巳) は、 樹脂膜中に架橋構造を形成することにより、 樹脂膜の耐 熱性及び丨 丁〇しわ抑制性能を高めるように作用する化合物である。 架橋剤 (B) は下式 (1) で表される化合物である。 〇 2020/175037 19 卩(:170? 2020 /004163 The cross-linking agent (Mimi) is a compound that acts to enhance the heat resistance and the special wrinkle suppressing performance of the resin film by forming a cross-linking structure in the resin film. The cross-linking agent (B) is a compound represented by the following formula (1). 〇 2020/175037 19 卩(: 170? 2020/004163
[化 12] [Chemical 12]
Figure imgf000021_0001
Figure imgf000021_0001
( 1 ) (1)
〔式 (1) 中、 複数の 8は、 それぞれ独立して、 炭素数 1〜 6のアルキル基 、 及び炭素数 1〜 6のアルコキシ基の何れかを示し、 〇1、
Figure imgf000021_0002
及び は〇〜 4の整数、 9は〇〜 5の整数をそれぞれ示す。 〕
[In the formula (1), a plurality of 8 each independently represents an alkyl group having 1 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms;
Figure imgf000021_0002
And are integers from 0 to 4, and 9 are integers from 0 to 5, respectively. ]
[0050] ここで、 に含まれうる炭素数 1〜 6のアルキル基としては、 特に限定さ れないが、 例えば、 メチル基、 エチル基、 プロピル基、 プチル基、 ペンチル 基、 ヘキシル基等の直鎖、 分岐鎖又は環状構造を有するアルキル基が挙げら れる。 この中でも、 炭素数 1〜 6のアルキル基としては、 メチル基、 エチル 基が好ましく、 メチル基がより好ましい。 [0050] Here, the alkyl group having 1 to 6 carbon atoms that may be contained in is not particularly limited, and examples thereof include direct groups such as a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, and a hexyl group. Examples thereof include alkyl groups having a chain, branched chain or cyclic structure. Among these, as the alkyl group having 1 to 6 carbon atoms, a methyl group and an ethyl group are preferable, and a methyl group is more preferable.
また、
Figure imgf000021_0003
に含まれうる炭素数 1〜 6のアルコキシ基としては、 特に限定さ れないが、 例えば、 メ トキシ基、 エトキシ基、 プロポキシ基、 ブトキシ基、 ペントキシ基、 ヘキソキシ基等の直鎖、 分岐鎖又は環状構造を有するアルコ キシ基が挙げられる。 この中でも、 炭素数 1〜 6のアルコキシ基としては、 メ トキシ基、 エトキシ基、 プロポキシ基が好ましく、 メ トキシ基がより好ま しい。
Also,
Figure imgf000021_0003
The alkoxy group having 1 to 6 carbon atoms which may be contained in is not particularly limited, and examples thereof include a straight chain, a branched chain or a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentoxy group, a hexoxy group or the like. Examples thereof include an alkoxy group having a cyclic structure. Among these, as the alkoxy group having 1 to 6 carbon atoms, a methoxy group, an ethoxy group and a propoxy group are preferable, and a methoxy group is more preferable.
ここで、 得られる樹脂膜の耐熱性を一層高める観点から、 111 ,
Figure imgf000021_0004
, 、 及 び が全て 「0」 である、 還元すれば、 式 (1) で表される化合物が置換基 を有さないことが好ましい。 この場合、 上記式 (1) において 「[¾」 が結合 しうる位置に全て水素原子が結合している。
Here, from the viewpoint of further enhancing the heat resistance of the obtained resin film, 111,
Figure imgf000021_0004
,, and are all “0”. When reduced, the compound represented by the formula (1) preferably has no substituent. In this case, in the above formula (1), all hydrogen atoms are bonded to positions where “[¾” can bond.
[0051 ] さらに、 式 (1) を満たす架橋剤 (巳) が、 置換基を有さず、 且つ、 2つ のグリシジルエーテル基が所定の位置に結合してなる、 下記構造を有する化 〇 2020/175037 20 卩(:170? 2020 /004163 [0051] Furthermore, a cross-linking agent (Mitsumi) satisfying the formula (1) has no substituent, and has two glycidyl ether groups bonded at a predetermined position. 〇 2020/175037 20 boxes (: 170? 2020/004163
合物であることが好ましい。 かかる化合物は、 日本化薬社製、
Figure imgf000022_0001
- 9 9 1 3」 として市販されている。
It is preferably a compound. Such compounds are manufactured by Nippon Kayaku Co.,
Figure imgf000022_0001
-9 9 1 3" is commercially available.
[化 13] [Chemical 13]
Figure imgf000022_0002
Figure imgf000022_0002
[0052] «架橋剤 (巳) の含有量》 [0052] «Crosslinking Agent (Minami) Content»
そして、 樹脂組成物における、 プロトン性極性基を有する重合体 ( ) 1 0 0質量部に対する、 架橋剤 (巳) の含有量は、 5質量部以上であることが 好ましく、 1 0質量部以上であることがより好ましく、 2 0質量部以上であ ることが更に好ましく、 2 0 0質量部以下であることが好ましく、 1 5 0質 量部以下であることがより好ましく、 9 0質量部以下であることが更に好ま しく、 6 0質量部以下であることが特に好ましく、 4 0質量部以下であるこ とが更に特に好ましい。 プロトン性極性基を有する重合体 ( ) に対する架 橋剤 (巳) の含有量が上記範囲内であれば、 得られる樹脂膜の耐熱性及び丨 丁〇しわ抑制性能を一層高めることができる。 And, in the resin composition, the content of the cross-linking agent (Mi) is preferably 5 parts by mass or more, and 10 parts by mass or more based on 100 parts by mass of the polymer () having a protic polar group. More preferably, it is more preferably 20 parts by mass or more, further preferably 200 parts by mass or less, more preferably 150 parts by mass or less, and 90 parts by mass or less. Is more preferable, it is particularly preferably 60 parts by mass or less, and particularly preferably 40 parts by mass or less. When the content of the cross-linking agent (Mitsumi) in the polymer () having a protic polar group is within the above range, the heat resistance and the performance of suppressing wrinkles of the obtained resin film can be further enhanced.
[0053] <アルコキシメチル基を 2つ以上有する化合物及びメチロール基を 2つ以上 有する化合物> <Compound Having Two or More Alkoxymethyl Groups and Compound Having Two or More Methylol Groups>
アルコキシメチル基を 2つ以上有する化合物及びメチロール基を 2つ以上 有する化合物は、 得られる樹脂膜の丨 丁〇しわ抑制性能を一層高めるように 作用しうる成分である。 さらに、 樹脂組成物にアルコキシメチル基を 2つ以 上有する化合物及びメチロール基を 2つ以上有する化合物を配合することで 、 樹脂膜の耐薬品性を高め得る。 こういった効果を一層良好に発揮する観点 から、 樹脂組成物が、 少なくともアルコキシメチル基を 2つ以上有する化合 物を含有することが好ましい。 〇 2020/175037 21 卩(:170? 2020 /004163 The compound having two or more alkoxymethyl groups and the compound having two or more methylol groups are components that can act so as to further enhance the proper wrinkle suppressing performance of the obtained resin film. Furthermore, the chemical resistance of the resin film can be enhanced by blending the resin composition with a compound having two or more alkoxymethyl groups and a compound having two or more methylol groups. From the viewpoint of exhibiting such effects more satisfactorily, it is preferable that the resin composition contains a compound having at least two alkoxymethyl groups. 〇 2020/175037 21 卩(: 170? 2020/004163
[0054] «アルコキシメチル基を 2つ以上有する化合物» [0054] «Compound having two or more alkoxymethyl groups»
アルコキシメチル基を 2つ以上有する化合物としては、 例えば、 2つ以上 のアルコキシメチル基が芳香環に直接結合してなるフエノール化合物、 アミ ノ基が 2つ以上のアルコキシメチル基で置換されてなるメラミン化合物、 2 つ以上のアルコキシメチル基で置換されてなるウレア化合物が挙げられる。 Examples of the compound having two or more alkoxymethyl groups include a phenol compound in which two or more alkoxymethyl groups are directly bonded to an aromatic ring, and a melamine in which an amino group is substituted with two or more alkoxymethyl groups. Examples thereof include compounds and urea compounds substituted with two or more alkoxymethyl groups.
[0055] 2つ以上のアルコキシメチル基が芳香環に直接結合してなるフエノール化 合物としては、 例えば、 2 , 6 -ジメ トキシメチルー 4 - I -ブチルフエノ —ル、 2 , 6—ジメ トキシメチルー _クレゾールなどのジメ トキシメチル 置換フエノール化合物; 3 , 3’ , 5 , 5’ ーテトラメ トキシメチルー 4 , [0055] Examples of a phenol compound in which two or more alkoxymethyl groups are directly bonded to an aromatic ring include, for example, 2,6-dimethoxymethyl-4-I-butylphenol and 2,6-dimethoxymethyl-cresol. Dimethoxymethyl-substituted phenol compounds such as 3,3',5,5'-tetramethoxymethyl-4,
4, ー ジヒドロキシビフエニル (例えば、 商品名 「丁1\/1〇 IV!—巳 」 、 本州 化学工業社製) 、 1 , 1 -ビス [ 3 , 5 -ジ (メ トキシメチル) 一 4 -ヒド ロキシフエニル] — 1 —フエニルエタンなどのテトラメ トキシメチル置換ビ フエニル化合物; 4 , 4’ , 4” 一 (エチリデン) トリスフエノール (例えば 、 商品名 「1~1 1\/1〇1\/1 -丁? 1~1八?一〇巳」 、 本州化学工業社製) などのヘキ サメ トキシメチル置換トリフエニル化合物;が挙げられる。 4,-dihydroxybiphenyl (eg, trade name "Ding 1\/1〇IV!-Mimi", Honshu Chemical Industry Co., Ltd.), 1, 1-bis [3, 5-di (methoxymethyl)-1 4-hydr Roxyphenyl] — 1 — Tetramethoxymethyl-substituted biphenyl compounds such as phenylethane; 4, 4, 4′, 4” one (ethylidene) trisphenol (eg, trade name “1 ~ 1 1\/1〇1\/1-c? ~ 18-8?10", manufactured by Honshu Kagaku Kogyo Co., Ltd.) and the like.
[0056] アミノ基が 2つ以上のアルコキシメチル基で置換されてなるメラミン化合 物としては、 例えば、 1\1 , 1\1, ージメ トキシメチルメラミン、 1\1 , 1\1, , ” 一トリメ トキシメチルメラミン、 1\1 , 1\1 , 1\1, , 1\!” ーテトラメ トキシメ チルメラミン、 1\1 , 1\1 , 1\1’ , 1\1’ , 1\1” ーペンタメ トキシメチルメラミン 、 1\1 , 1\1 , 1\1, , 1\1, , 1\1” , 1\1” ーヘキサメ トキシメチルメラミン (例え ば、 商品名 「二カラック
Figure imgf000023_0002
商品名 「二カラック
Figure imgf000023_0001
[0056] Examples of the melamine compound in which the amino group is substituted with two or more alkoxymethyl groups include, for example, 1\1, 1\1, and dimethoxymethylmelamine, 1\1, 1\1, ," Trimethoxymethylmelamine, 1\1 ,1\1 ,1\1, ,, 1\!"-Tetramethoxymethyl melamine, 1\1, 1\1 ,1\1', 1\1', 1\1" pentamethoxy Methyl melamine, 1\1, 1\1, 1\1, ,, 1\1, ", 1\1", 1\1"-hexamethoxymethyl melamine (For example, trade name "Nicarac
Figure imgf000023_0002
Product name "Nikarak
Figure imgf000023_0001
0 0 、 何れも三和ケミカル社製) 、 あるいはこれらの重合体などが挙 げられる。 0, all manufactured by Sanwa Chemical Co., Ltd.), or polymers thereof.
[0057] 2つ以上のアルコキシメチル基で置換されてなるウレア化合物としては、 例えば、 商品名 「二カラック 1\/1乂2 7 0」 、 商品名 「二カラック 1\/1乂2 8 0 」 、 商品名 「二カラック 1\/1乂2 9 0」 (何れも三和ケミカル社製) が挙げら れる。 [0057] Examples of the urea compound substituted with two or more alkoxymethyl groups include, for example, the trade name "Nicarac 1\/1乂270" and the trade name "Nicarac 1\/1丂280". The product name is "Nicarac 1\/1乂290" (both manufactured by Sanwa Chemical Co., Ltd.).
[0058] «メチロール基を 2つ以上有する化合物» 〇 2020/175037 22 卩(:170? 2020 /004163 [0058] «Compound having two or more methylol groups» 〇 2020/175037 22 卩 (: 170? 2020 /004163
メチロール基を 2つ以上有する化合物としては、 例えば、 2つ以上のメチ 口ール基が芳香環に直接結合してなるフエノール化合物が挙げられる。 Examples of the compound having two or more methylol groups include a phenol compound in which two or more methylol groups are directly bonded to an aromatic ring.
そして、 2つ以上のメチロール基が芳香環に直接結合してなるフエノール 化合物としては、 2 , 4 -ジヒドロキシメチルー 6 -メチルフエノール、 2 , 6—ビス(ヒドロキシメチル)一 ークレゾール、 4—夕ーシャリーー2 , 6 —ビス (ヒドロキシメチル) フエノール、 ビス (2—ヒドロキシー3—ヒド ロキシメチルー 5—メチルフエニル) メタン (商品名 「0 1\/1 _巳 丨 P C - F 」 、 旭有機材社製) 、 ビス (4—ヒドロキシー 3—ヒドロキシメチルー 5— メチルフエニル) メタン (商品名 「0 1\/1 -巳 I 〇〇ー 」 、 旭有機材社製) And, as a phenol compound in which two or more methylol groups are directly bonded to an aromatic ring, 2,4-dihydroxymethyl-6-methylphenol, 2,6-bis(hydroxymethyl)-cresol, 4-evenishary 2, 6-bis(hydroxymethyl)phenol, bis(2-hydroxy-3-hydroxymethyl-5-methylphenyl) methane (Product name "0 1\/1 _Mimi PC-F", manufactured by Asahi Organic Materials Co., Ltd.), bis (4-hydroxy-3-hydroxymethyl-5-methylphenyl) methane (trade name "0 1\/1-M I I○○", manufactured by Asahi Organic Materials Co., Ltd.)
、 2 , 2—ビス (4—ヒドロキシー3 , 5—ジヒドロキシメチルフエニル) プ ロパン (商品名 「丁 1\/1 -巳 丨 一八」 、 旭有機材社製) などが挙げられる。 , 2,2-bis(4-hydroxy-3,5-dihydroxymethylphenyl)propan (trade name "Cho 1\/1-Mimi Ichihachi", manufactured by Asahi Organic Materials Co., Ltd.) and the like.
[0059] 上述したアルコキシメチル基を 2つ以上有する化合物及びメチロール基を [0059] A compound having two or more alkoxymethyl groups as described above and a methylol group
2つ以上有する化合物の中でも、 反応性が高いという点より、 アルコキシメ チル基を 2つ以上有する化合物の一種である、 1\1 , 1\1 , 1\1’ , 1\1’ , 1\1” , Among the compounds having two or more, it is one of the compounds having two or more alkoxymethyl groups from the viewpoint of high reactivity, 1\1, 1\1, 1\1', 1\1', 1 \1”,
|\1” ーヘキサメ トキシメチルメラミンが好ましい。 |\1”-Hexamethoxymethylmelamine is preferred.
[0060] [アルコキシメチル基を 2つ以上有する化合物及びメチロール基を 2つ以上 有する化合物の含有量] [Contents of Compound Having Two or More Alkoxymethyl Groups and Compound Having Two or More Methylol Groups]
樹脂組成物がアルコキシメチル基を 2つ以上有する化合物及びメチロール 基を 2つ以上有する化合物の双方又は何れか一方を含む場合における、 これ らの合計含有量は、 プロトン性極性基を有する重合体 ( ) 1 0 0質量部あ たり、 1質量部以上 1 〇〇質量部以下とすることが好ましい。 アルコキシメ チル基を 2つ以上有する化合物及びメチロール基を 2つ以上有する化合物の 合計含有量が上記範囲内であれば、 樹脂膜の丨 丁〇しわ抑制性能を一層高め ることができる。 特に、 アルコキシメチル基を 2つ以上有する化合物及びメ チロール基を 2つ以上有する化合物の合計含有量が上記上限値以下であれば 、 2 0 0 °〇以上といった高温条件下での硬化工程における減膜を抑制するこ とができ、 樹脂膜の耐熱性を一層高めることができる。 In the case where the resin composition contains both or one of the compound having two or more alkoxymethyl groups and the compound having two or more methylol groups, the total content of these is a polymer having a protic polar group ( ) It is preferable that the amount is 1 part by mass or more and 1 part by mass or more and 100 parts by mass or less. If the total content of the compound having two or more alkoxymethyl groups and the compound having two or more methylol groups is within the above range, the performance of suppressing the wrinkles of the resin film can be further enhanced. In particular, if the total content of the compound having two or more alkoxymethyl groups and the compound having two or more methylol groups is less than or equal to the above upper limit, the reduction in the curing step under high temperature conditions of 200°C or more is performed. The film can be suppressed, and the heat resistance of the resin film can be further enhanced.
[0061 ] <その他の添加剤> 〇 2020/175037 23 卩(:170? 2020 /004163 [0061] <Other additives> 〇 2020/175037 23 卩 (: 170? 2020 /004163
本発明の樹脂組成物は、 任意で、 上記以外のその他の添加剤を含有してい ても良い。 かかるその他の添加剤としては、 上述した架橋剤 (巳) とは構造 の異なる多官能エポキシ化合物、 シランカップリング剤、 界面活性剤、 酸化 防止剤、 及び、 感放射線化合物等が挙げられる。 The resin composition of the present invention may optionally contain other additives than the above. Examples of such other additives include a polyfunctional epoxy compound having a structure different from that of the above-mentioned crosslinking agent (Mitsumi), a silane coupling agent, a surfactant, an antioxidant, and a radiation-sensitive compound.
[0062] «架橋剤 (巳) とは構造の異なる多官能エポキシ化合物》 [0062] «Polyfunctional epoxy compound having a structure different from that of the crosslinking agent (Mitsumi)»
架橋剤 (巳) とは構造の異なる多官能エポキシ化合物の具体例としては、 例えば、 ジシクロペンタジエンを骨格とするエポキシ化合物 (商品名 「1~1 ? - 7200」 、 0 I 〇社製) 、 2, 2 -ビス (ヒドロキシメチル) 一 1 -ブ タノールの 1 , 2 -エポキシー4 - (2 -オキシラニル) シクロヘキサン付 加物 (シクロヘキサン骨格及び末端エポキシ基を有する 1 5官能性の脂環式 エポキシ樹脂、 商品名 「巳 !~1 ?巳 3 1 50」 、 ダイセル社製) 、 エポキシ化 3 -シクロヘキセンー 1 , 2 -ジカルボン酸ビス (3 -シクロヘキセニルメ チル) 修飾 カプロラクトン (脂肪族環状 3官能性のエポキシ樹脂、 商品 名 「エポリード◦丁 301」 、 ダイセル社製) 、 ブタンテトラカルボン酸テ トラ (3, 4 -エポキシシクロヘキシルメチル)修飾 カプロラクトン (脂 肪族環状 4官能性のエポキシ樹脂、 商品名 「エボリード〇丁401」 、 ダイ セル社製) 、 3, 4—エポキシシクロヘキセニルメチルー 3’ , 4’ ーエポ キシシクロヘキセンカルボキシレート (商品名 「セロキサイ ド 2021」 、 「セロキサイ ド 202 1 」 、 ダイセル社製) 、
Figure imgf000025_0001
カプロラクトン変性 3 ’ , 4’ ーエポキシシクロヘキシルメチルー 3 , 4—エポキシシクロへキサ ンカルボキシレート (商品名 「セロキサイ ド 2081」 、 ダイセル社製) 、
Specific examples of the polyfunctional epoxy compound having a structure different from that of the cross-linking agent (Mitsumi) include, for example, an epoxy compound having dicyclopentadiene as a skeleton (trade name “1 to 1 ?-7200”, manufactured by 0I 〇 Company), 1,2-Epoxy 4-(2-oxiranyl) cyclohexane adduct of 2,2-bis(hydroxymethyl) 1-butanol (15-functional alicyclic epoxy resin having cyclohexane skeleton and terminal epoxy group) , Trade name "Mimi! ~ 1? Mimi 3 1 50", manufactured by Daicel), epoxidized 3-cyclohexene-1,2-dicarboxylic acid bis(3-cyclohexenylmethyl) modified caprolactone (aliphatic cyclic trifunctional) Epoxy resin, trade name "Epolide ◦ Ding 301", manufactured by Daicel), butanetetracarboxylic acid tetra (3,4-epoxycyclohexylmethyl) modified caprolactone (aliphatic cyclic tetrafunctional epoxy resin, trade name " Evolead 〇Cho 401”, manufactured by Daicel), 3, 4-Epoxycyclohexenylmethyl-3', 4'-Epoxycyclohexenecarboxylate (Product name “Celoxide 2021”, “Ceroxide 2021”, manufactured by Daicel) ),
Figure imgf000025_0001
Caprolactone-modified 3', 4'-epoxycyclohexylmethyl-3, 4-epoxycyclohexancarboxylate (trade name "Celoxide 2081", manufactured by Daicel),
1 , 2 : 8, 9 -ジエポキシリモネン (商品名 「セロキサイ ド 3000」 、 ダイセル社製) 等の脂環構造を有するエポキシ化合物;及び、 ビスフエノー ル八型エポキシ化合物 (商品名
Figure imgf000025_0002
「」 巳[¾ 827」 、 「」 巳[¾828」 、 「」 巳[¾丫!_ 980」 、 三菱化学社製、 商品名 「巳 I 〇!_ 〇 840」 、 「巳? 1 〇!_〇 850」 、 0 I 〇社製) 、 ビスフエノール 型エポキシ化合物 (商品名 「」 巳[¾806」 、 「」 巳[¾807」 、 「」 巳
Figure imgf000025_0003
三菱化学社製、 商品名 「巳? 1 〇!_〇 830」 、 「巳 〇 2020/175037 24 卩(:170? 2020 /004163
1,2:8,9-diepoxy limonene (trade name "CELOXIDE 3000", manufactured by Daicel) and other epoxy compounds having an alicyclic structure; and bisphenol 8-type epoxy compounds (trade name)
Figure imgf000025_0002
"" Momi [¾ 827], "" Momi [¾828], "" Momi [¾丫!_ 980], Mitsubishi Chemical Co., Ltd., trade name "Mimi I 〇!_ 〇 840", "Mimi? 1 〇 !_" 〇 850”, 0 I 〇 company, bisphenol type epoxy compound (trade name “”Mimi [¾806”, “”Mami [¾807”, “” Mimi
Figure imgf000025_0003
Made by Mitsubishi Chemical Co., Ltd., product name “Mimi? 1 〇!_〇 830”, ”Mimi 〇 2020/175037 24 卩 (: 170? 2020 /004163
? 1 〇1_〇 835」 、 0 I 〇社製) 、 水添ビスフェノール八型ェポキシ化 合物 (商品名 「」 巳[¾丫乂8000」 、 「」 巳[¾丫乂8034」 三菱化学社 製、 商品名 「3丁一 3000」 新日鉄住金社製、 商品名 「リカレジン 1~1巳巳 — 1 00」 新日本理化社製、 商品名 「ェポライ ト 4000」 共栄化学社製)1 1 _ 0 835", 0 I 〇 company, hydrogenated bisphenol 8 type epoxy compound (trade name "" 跳 [¾丫乂8000], "" 跳 [¾丫乂 8034] Mitsubishi Chemical Corporation Made, product name "3 Chome 1 3000", manufactured by Nippon Steel & Sumikin Co., Ltd., product name "Rikaresin 1-1 ~ Mitsumi — 100", manufactured by Nippon Nippon Kaika Co., Ltd., product name "Eporite 4000" manufactured by Kyoei Chemical Co., Ltd.
、 長鎖ビスフェノール八型ェポキシ樹脂 (商品名 「巳乂八一481 6」 、 「 巳乂八-4850- 1 50」 、 「巳乂八-4850- 1 000」 口 I 〇社製 ) 、 巳〇変性ビスフェノール八型ェポキシ化合物 (商品名 「アデカレジン巳 一4000 !_」 、 「アデカレジン巳 一401 0 !_」 、 八〇巳 八社製)Long-chain bisphenol 8-type epoxy resin (Product name "Mimihachi 481 6", "Mimihachi-4850-1 50", "Mimihachi-4850-1 000" mouth I 〇 company), Mi 〇 Modified Bisphenol Epoxy Epoxy Compound (Product name "Adeka Resin Minichi 4000 !_", "Adeka Resin Minichi 401 0 !_", manufactured by 880 Mihasha)
、 フェノールノボラック型多官能ェポキシ化合物 (商品名 「」 巳[¾ 1 52」, Phenol novolac type polyfunctional epoxy compound (Product name ""Mimi [¾ 1 52"
、 三菱化学社製) 、 1 , 6—ビス (2, 3—ェポキシプロパンー 1 —イルオ キシ) ナフタレンなどのナフタレン骨格を有する多官能ェポキシ化合物 (商 品名 「1~1 ?-40320」 、 〇 I 〇社製) 、 ジシクロペンタジェンジメタノ —ルジグリシジルェーテル (商品名 「アデカレジン巳 一 4000 !_」 、 「 アデカレジン巳 一4088 !_」 、 八〇巳 八社製) 、 グリシジルアミン型 ェポキシ樹脂 (商品名 「商品名 「」 巳[¾ 630」 、 三菱化学社製、 商品名 「 丁巳丁[¾八0 -〇」 、 「丁巳丁[¾八0-乂」 、 三菱ガス化学社製) 、 鎖状ア ルキル多官能ェポキシ化合物 (商品名 「3[¾-丁!\/1?」 、 阪本薬品工業社製 ) 、 多官能ェポキシポリブタジェン (商品名 「ェボリード 巳 3600」 、 ダイセル社製) 、 (商品名 「ェボリード 巳 4700」 、 ダイセル社製) 、 グリセリンのグリシジルポリェーテル化合物 (商品名 「3
Figure imgf000026_0001
、 阪 本薬品工業社製) 、 ジグリセリンポリグリシジルェーテル化合物 (商品名 「
Figure imgf000026_0002
、 阪本薬品工業社製) 、 ポリグリセリンポリグリシジルェー テル化合物 (商品名 「3[¾_4〇!_」 、 阪本薬品工業社製) 等の脂環構造を 有さないェポキシ化合物;などを挙げることができる。 なお、 これらは、 一 種単独で、 或いは複数種を組み合わせて用いることができる。
, Mitsubishi Chemical Co., Ltd., 1, 6-bis (2, 3-epoxypropane-1-yloxy) polyfunctional epoxy compound having naphthalene skeleton such as naphthalene (trade name "1 ~ 1 ?-40320", 〇 Dicyclopentadiene dimethano-rudiglycidyl ether (trade name "Adeka Resin Minichi 4000 !_", "Adeka Resin Minichi 4088 !_", Made by 80 Mihasha Co., Ltd., glycidyl amine type Epoxy resin (Brand name "Brand name""Minami [¾ 630", manufactured by Mitsubishi Chemical Co., Ltd., trade name "Chomi Bing [¾8 0-〇", "Chomi Bing [¾8 0-乂], Mitsubishi Gas Chemical Co., Ltd. Chain alkyl polyfunctional epoxy compound (trade name "3[¾-D!!/1/1", manufactured by Sakamoto Yakuhin Kogyo Co., Ltd.), polyfunctional epoxy polybutadiene (trade name "Evolead Mitsu 3600") , Manufactured by Daicel Co., Ltd., (trade name "Evolead Minami 4700", manufactured by Daicel Co., Ltd.), glycidyl polyether compound of glycerin (trade name "3
Figure imgf000026_0001
, Sakamoto Yakuhin Kogyo Co., Ltd., diglycerin polyglycidyl ether compound (trade name "
Figure imgf000026_0002
, Manufactured by Sakamoto Yakuhin Kogyo Co., Ltd., polyglycerin polyglycidyl ether compound (trade name “3[¾_4〇!_”, manufactured by Sakamoto Yakuhin Kogyo Co., Ltd.); You can In addition, these can be used individually by 1 type or in combination of 2 or more types.
中でも、 脂環構造を有するェポキシ化合物、 すなわち、 脂環式ェポキシ化 合物が好ましい。 樹脂組成物に脂環式ェポキシ化合物を配合することで、 得 られる樹脂膜の透明性を高めることができる。 〇 2020/175037 25 卩(:170? 2020 /004163 Among them, an epoxy compound having an alicyclic structure, that is, an alicyclic epoxy compound is preferable. By adding an alicyclic epoxy compound to the resin composition, the transparency of the obtained resin film can be increased. 〇 2020/175037 25 卩 (: 170? 2020 /004163
[0063] 樹脂組成物中における、 架橋剤 (巳) とは構造の異なる多官能エポキシ化 合物の含有量は、 プロトン性極性基を有する重合体 ( ) 1 0 0質量部あた り、 1 〇〇質量部以下であることが好ましい。 架橋剤 (巳) とは構造の異な る多官能エポキシ含有化合物の含有量が 1 〇〇質量部以下であれば、 樹脂膜 の耐薬品性を効率的に高めることができる。 なお、 樹脂組成物が、 上述した 所定の架橋剤 (巳) に加えて、 架橋剤 (巳) とは構造の異なる多官能エポキ シ化合物を含有する場合には、 架橋剤 (巳) 及び架橋剤 (巳) とは構造の異 なる多官能エポキシ化合物の合計含有量が、 《架橋剤 (巳) の含有量》 の項目にて上述した、 樹脂組成物におけるプロトン性極性基を有する重合体 (八) 1 0 0質量部に対する架橋剤 (巳) の含有量の好適範囲を満たすこと が好ましい。 [0063] In the resin composition, the content of the polyfunctional epoxide compound having a structure different from that of the cross-linking agent (Mitsumi) is 1 part by mass of the polymer having a protic polar group () 1 part by mass. It is preferable that the content is 000 parts by mass or less. When the content of the polyfunctional epoxy-containing compound having a different structure from that of the cross-linking agent (Mitsumi) is 100 parts by mass or less, the chemical resistance of the resin film can be efficiently increased. When the resin composition contains a polyfunctional epoxy compound having a structure different from that of the cross-linking agent (Mimi) in addition to the above-mentioned predetermined cross-linking agent (Mimi), the cross-linking agent (Mimi) and the cross-linking agent The total content of polyfunctional epoxy compounds having a different structure from that of (Minami) is the polymer having a protic polar group (8) in the resin composition described above in the section of <<Content of Crosslinking Agent (Minami)>>. ) It is preferable to satisfy the preferable range of the content of the cross-linking agent (Minami) with respect to 100 parts by mass.
[0064] «シランカップリング剤、 界面活性剤、 及び酸化防止剤》 [0064] «Silane coupling agent, surfactant, and antioxidant»
シランカップリング剤は、 本発明の樹脂組成物を用いて得られる樹脂膜と 、 当該樹脂膜が形成された基材との間の密着性を高めるように機能する。 そ して、 シランカップリング剤としては、 特に限定されることなく、 公知のも のを用いることができる (例えば、 特開 2 0 1 5 - 9 4 9 1 〇号参照) 。 よ り具体的には、 シランカップリング剤としては、 グリシドキシプロピルトリ メ トキシシラン等のアルコキシシラン類を好適に用いることができる。 また、 シランカップリング剤の含有量は、 通常、 プロトン性極性基を有す る重合体 ( ) 1 0 0質量部あたり、 〇. 0 1質量部以上 5質量部以下であ る。 The silane coupling agent functions to enhance the adhesion between the resin film obtained by using the resin composition of the present invention and the base material on which the resin film is formed. The silane coupling agent is not particularly limited, and known ones can be used (see, for example, Japanese Patent Laid-Open No. 20515-94910). More specifically, alkoxysilanes such as glycidoxypropyltrimethoxysilane can be preferably used as the silane coupling agent. In addition, the content of the silane coupling agent is usually 0.01 part by mass or more and 5 parts by mass or less per 100 parts by mass of the polymer () having a protic polar group.
[0065] 界面活性剤は、 本発明の樹脂組成物の塗工性を向上させうる成分である。 The surfactant is a component that can improve the coatability of the resin composition of the present invention.
界面活性剤としては、 特に限定されることなく、 公知のシリコーン系界面活 性剤、 フッ素系界面活性剤、 ポリオキシアルキレン系界面活性剤、 メタクリ ル酸共重合体系界面活性剤、 及びアクリル酸共重合体系界面活性剤等を用い ることができる (例えば、 国際公開第 2 0 1 7 / 1 6 3 9 8 1号参照) 。 中 でも、 界面活性剤としては、 オルガノシロキサンポリマー等のシリコーン系 界面活性剤を好適に用いることができる。 〇 2020/175037 26 卩(:170? 2020 /004163 The surfactant is not particularly limited, and known silicone-based surfactants, fluorine-based surfactants, polyoxyalkylene-based surfactants, methacrylic acid copolymer-based surfactants, and acrylic acid surfactants are known. Polymeric surfactants and the like can be used (see, for example, International Publication No. WO 201/1763981). Among them, as the surfactant, a silicone-based surfactant such as an organosiloxane polymer can be preferably used. 〇 2020/175037 26 卩(: 170? 2020/004163
また、 界面活性剤の含有量は、 通常、 プロトン性極性基を有する重合体 ( 八) 1 0 0質量部あたり、 〇. 0 1質量部以上 1質量部以下である。 Further, the content of the surfactant is usually 0.01 part by mass or more and 1 part by mass or less per 100 parts by mass of the polymer (8) having a protic polar group.
[0066] 酸化防止剤は、 本発明の樹脂組成物の安定性を高め得る成分である。 酸化 防止剤としては、 特に限定されることなく、 フエノール系酸化防止剤、 リン 系酸化防止剤、 アミン系酸化防止剤、 ラクトン系酸化防止剤のような、 公知 の酸化防止剤を用いることができる (例えば、 特開 2 0 1 4 - 1 4 9 4 7 7 号参照) 。 [0066] The antioxidant is a component that can enhance the stability of the resin composition of the present invention. The antioxidant is not particularly limited, and known antioxidants such as phenol-based antioxidants, phosphorus-based antioxidants, amine-based antioxidants, lactone-based antioxidants can be used. (See, for example, Japanese Patent Laid-Open No. 20 1 4-1 4 9 4 7 7).
[0067] なお、 シランカップリング剤、 界面活性剤、 及び酸化防止剤は、 それぞれ 、 一種単独で、 或いは、 2種以上を組み合わせて用いることができる。 また 、 樹脂組成物に配合するシランカップリング剤、 界面活性剤、 及び酸化防止 剤の量は、 任意に調整し得る。 [0067] The silane coupling agent, the surfactant, and the antioxidant may be used alone or in combination of two or more. Moreover, the amounts of the silane coupling agent, the surfactant, and the antioxidant to be blended in the resin composition can be adjusted arbitrarily.
[0068] «感放射線化合物》 [0068] «Radiation-sensitive compound»
感放射線化合物は、 放射線が照射されると化学反応を引き起こすことがで きる化合物である。 ここで、 放射線としては、 特に限定されることなく、 例 えば、 可視光線;紫外線; X線; 9線、 線、 丨線等の単一波長の光線; < 「 エキシマレーザー光、 八 「 エキシマレーザー光等のレーザー光線;電 子線等の粒子線;などが挙げられる。 感放射線化合物としては、 特に限定さ れることなく、 アセトフエノン化合物、 トリアリールスルホニウム塩、 及び 、 アジド化合物を用いることができる。 中でも、 キノンジアジド化合物等の アジド化合物を好適に用いることができる。 感放射線化合物は、 一種を単独 で、 或いは、 2種以上を組み合わせて用いることができる。 また、 樹脂組成 物に配合する感放射線化合物の量は、 任意に調整し得る。 A radiation sensitive compound is a compound capable of causing a chemical reaction when exposed to radiation. Here, the radiation is not particularly limited, and includes, for example, visible light; ultraviolet light; X-ray; light having a single wavelength such as 9-rays, rays, and gamma rays; <“excimer laser light, 8” excimer laser Examples of the radiation-sensitive compound include acetophenone compounds, triarylsulfonium salts, and azide compounds, and laser beams such as light, particle beams such as electron beams, etc. are not particularly limited. Azide compounds such as quinonediazide compounds can be preferably used.The radiation-sensitive compounds can be used alone or in combination of two or more. The amount can be adjusted arbitrarily.
[0069] <溶剤> [0069] <Solvent>
本発明の樹脂組成物が任意に含有し得る溶剤としては、 特に限定されるこ となく、 樹脂組成物の溶剤として公知の溶剤を用いることができる。 そのよ うな溶剤としては、 例えば、 直鎖のケトン類、 アルコール類、 アルコールエ —テル類、 エステル類、 セロソルブエステル類、 プロピレングリコール類、 ジエチレングリコールエチルメチルエーテルなどのジエチレングリコール類 〇 2020/175037 27 卩(:170? 2020 /004163 The solvent that the resin composition of the present invention can optionally contain is not particularly limited, and known solvents for the resin composition can be used. Examples of such solvents include linear ketones, alcohols, alcohol ethers, esters, cellosolve esters, propylene glycols, and diethylene glycols such as diethylene glycol ethyl methyl ether. 〇 2020/175037 27 卩 (: 170? 2020 /004163
、 飽和· ラクトン類、 ハロゲン化炭化水素類、 芳香族炭化水素類、 並びに 、 ジメチルアセトアミ ド、 ジメチルホルムアミ ド及び 1\1 _メチルアセトアミ ドなどの極性溶媒などが挙げられる (例えば、 国際公開第 2 0 1 5 / 0 3 3 9 0 1号参照) 。 , Saturated lactones, halogenated hydrocarbons, aromatic hydrocarbons, and polar solvents such as dimethylacetamide, dimethylformamide and 1\1_methylacetamide (for example, international See Publication No. 2015/0333901).
なお、 これらの溶剤は、 一種単独で、 或いは、 2種以上を混合して用いる ことができる。 In addition, these solvents may be used alone or in combination of two or more.
そして、 樹脂組成物中の溶剤の量は、 特に限定されることなく、 プロトン 性極性基を有する重合体 ( ) 1 0 0質量部に対して、 好ましくは 1 0質量 部以上、 好ましくは 1 0 0 0 0質量部以下、 より好ましくは 5 0 0 0質量部 以下、 さらに好ましくは 1 0 0 0質量部以下である。 The amount of the solvent in the resin composition is not particularly limited, and is preferably 10 parts by mass or more, and preferably 10 parts by mass with respect to 100 parts by mass of the polymer () having a protic polar group. It is at most 0,000 parts by mass, more preferably at most 500 parts by mass, still more preferably at most 100 parts by mass.
[0070] (樹脂組成物の製造方法) (Method for producing resin composition)
本発明の樹脂組成物は、 上述した成分を既知の方法により混合し、 任意に ろ過することで、 調製することができる。 ここで、 混合には、 スターラー、 ボールミル、 サンドミル、 ビーズミル、 顔料分散機、 らい潰機、 超音波分散 機、 ホモジナイザー、 プラネタリーミキサー、 フィルミックスなどの既知の 混合機を用いることができる。 また、 混合物のろ過には、 フィルター等のろ 材を用いた一般的なろ過方法を採用することができる。 The resin composition of the present invention can be prepared by mixing the above components by a known method and optionally filtering. Here, a known mixer such as a stirrer, a ball mill, a sand mill, a bead mill, a pigment disperser, a crusher, an ultrasonic disperser, a homogenizer, a planetary mixer or a fill mix can be used for the mixing. For filtering the mixture, a general filtering method using a filter medium such as a filter can be adopted.
[0071 ] <樹脂膜の製造方法> <Method for producing resin film>
本発明の樹脂組成物からなる樹脂膜は、 上述した本発明の樹脂組成物を用 いて形成した塗膜を 2 0 0 °〇以上で加熱する工程 (硬化工程) を含む、 本発 明の樹脂膜の製造方法により、 製造することができる。 本発明の樹脂膜の製 造方法は、 さらに、 樹脂膜を形成する基板上に本発明の樹脂組成物を使用し て塗膜を形成する工程 (塗膜形成工程) を含んでいても良い。 The resin film comprising the resin composition of the present invention comprises the resin of the present invention, which comprises a step (curing step) of heating the coating film formed by using the above-mentioned resin composition of the present invention at 200°C or higher. It can be produced by the method for producing a membrane. The method for producing a resin film of the present invention may further include a step of forming a coating film using the resin composition of the present invention on a substrate for forming a resin film (coating film forming step).
また、 樹脂膜を形成する基板上への塗膜の配設は、 特に限定されることな く、 塗布法やフィルム積層法等の既知の方途に従って行うことができる。 な お、 任意で、 樹脂膜を形成する際に、 塗膜をパターニングしても良い。 バタ —ニング方法としては、 塗膜を露光し、 現像する操作を伴う既知のパターニ ング方法を適用することができる。 この場合、 樹脂膜を形成するために用い 〇 2020/175037 28 卩(:170? 2020 /004163 Further, the disposition of the coating film on the substrate for forming the resin film is not particularly limited, and it can be performed according to a known method such as a coating method or a film laminating method. However, the coating film may be optionally patterned when the resin film is formed. As the patterning method, a known patterning method involving an operation of exposing a coating film and developing it can be applied. In this case, used to form the resin film 〇 2020/175037 28 卩 (: 170? 2020 /004163
る樹脂組成物は、 感放射線化合物を含有しうる。 The resin composition according to the present invention may contain a radiation-sensitive compound.
[0072] «塗膜形成工程》 [0072] «Coating film forming step»
ここで、 塗布法による塗膜の形成は、 樹脂組成物を基板上に塗布した後、 加熱乾燥 (プリべーク) することにより行うことができる。 なお、 樹脂組成 物を塗布する方法としては、 例えば、 スプレーコート法、 スピンコート法、 口ールコート法、 ダイコート法、 ドクターブレード法、 回転塗布法、 バー塗 布法、 スクリーン印刷法、 インクジヱッ ト法等の各種の方法を採用すること ができる。 加熱乾燥条件は、 樹脂組成物に含まれている成分の種類や配合割 合に応じて異なるが、 加熱温度は、 通常、 3 0 ~ 1 5 0 °〇、 好ましくは 6 0 〜 1 2 0 °〇であり、 加熱時間は、 通常、 〇. 5〜 9 0分間、 好ましくは 1〜 6 0分間、 より好ましくは 1〜 3 0分間である。 Here, the coating film can be formed by the coating method by coating the resin composition on the substrate and then heating and drying (pre-baking). Examples of the method for applying the resin composition include spray coating method, spin coating method, mouth coating method, die coating method, doctor blade method, spin coating method, bar coating method, screen printing method, ink jet method, etc. Various methods of can be adopted. The heating and drying conditions vary depending on the type and blending ratio of the components contained in the resin composition, but the heating temperature is usually 30 to 150 ° 〇, preferably 60 to 120 ° The heating time is usually 0.5 to 90 minutes, preferably 1 to 60 minutes, and more preferably 1 to 30 minutes.
[0073] また、 フィルム積層法による塗膜の形成は、 樹脂組成物を樹脂フィルムや 金属フィルム等の巳ステージフィルム形成用基材上に塗布し、 加熱乾燥 (プ リベーク) することにより巳ステージフィルムを得た後、 次いで、 この巳ス テージフィルムを基板上に積層することにより行うことができる。 なお、 巳 ステージフィルム形成用基材上への樹脂組成物の塗布及び樹脂組成物の加熱 乾燥は、 上述した塗布法における樹脂組成物の塗布及び加熱乾燥と同様にし て行うことができる。 また、 積層は、 加圧ラミネータ、 プレス、 真空ラミネ —夕、 真空プレス、 口ールラミネータ等の圧着機を用いて行なうことができ る。 [0073] In addition, the coating film is formed by the film laminating method by coating the resin composition on a substrate for forming a stage film such as a resin film or a metal film, and heating and drying (prebaking) the stage film. After obtaining the above, this can be performed by laminating this stage film on a substrate. The application of the resin composition onto the substrate for forming the stage film and the heat-drying of the resin composition can be performed in the same manner as the application and the heat-drying of the resin composition in the above-mentioned application method. The lamination can be performed using a pressure laminator, a press, a vacuum laminator, a vacuum press, a mouth laminator, or other crimping machine.
[0074] «硬化工程》 [0074] «Curing step»
硬化工程では、 塗膜を 2 0 0 °〇以上の温度で加熱 (ポストべーク) して硬 化させる。 In the curing process, the coating film is heated (post-baked) at a temperature of 200 ° C or higher to be hardened.
[0075] 塗膜の加熱は、 特に限定されることなく、 例えば、 ホッ トプレート、 才一 ブン等を用いて行なうことができる。 なお、 加熱は、 必要に応じて不活性ガ ス雰囲気下で行ってもよい。 不活性ガスとしては、 例えば、 窒素、 アルゴン 、 ヘリウム、 ネオン、 キセノン、 クリプトン等が挙げられる。 これらの中で も窒素とアルゴンが好ましく、 特に窒素が好ましい。 〇 2020/175037 29 卩(:170? 2020 /004163 [0075] The heating of the coating film is not particularly limited, and can be performed using, for example, a hot plate or a talented one. The heating may be carried out in an inert gas atmosphere if necessary. Examples of the inert gas include nitrogen, argon, helium, neon, xenon, krypton and the like. Of these, nitrogen and argon are preferable, and nitrogen is particularly preferable. 〇 2020/175037 29 卩 (: 170? 2020 /004163
[0076] ここで、 硬化工程にて塗膜を加熱する際の温度は、 2 0 0 °〇以上であり、 [0076] Here, the temperature at which the coating film is heated in the curing step is 200 ° C or higher,
2 5 0 °〇以上であることが好ましい。 本発明の樹脂組成物を使用すれば、 塗 膜を加熱する際の温度が 2 0 0 °〇以上と高温である場合にも、 良好に成膜す ることができる。 さらに、 硬化工程にて塗膜を加熱する際の温度の上限は特 に限定されないが、 4 0 0 °〇以下であることが好ましい。 In is preferably 2 5 0 ° ● As. When the resin composition of the present invention is used, good film formation can be achieved even when the temperature at which the coating film is heated is as high as 200°C or higher. Furthermore, the upper limit of the temperature for heating the coating film in the curing step is not particularly limited, but it is preferably 400° C. or less.
なお、 硬化工程にて塗膜を加熱する時間は、 塗膜の面積や厚さ、 加熱に使 用する機器等に応じて適宜選択することができるが、 例えば、 1 0〜 1 2 0 分間とすることができる。 The time for heating the coating film in the curing step can be appropriately selected depending on the area and thickness of the coating film, the equipment used for heating, etc., but is, for example, 10 to 120 minutes. can do.
[0077] そして、 かかる硬化工程を経た樹脂膜は、 波長 4 0 0 n の光の透過率が [0077] The resin film that has undergone such a curing step has a transmittance of light of a wavelength of 400 n.
9 7 %以上であることが好ましい。 なお、 「透過率」 は、 実施例に記載した 方法に従って測定することができる。 It is preferably 97% or more. The "transmittance" can be measured according to the method described in Examples.
[0078] (電子部品) [0078] (Electronic parts)
本発明の電子部品は、 上述した本発明の樹脂組成物からなる樹脂膜を備え る。 そして、 本発明の電子部品は、 本発明の樹脂組成物から形成された、 耐 熱性及び I 丁〇しわ抑制性能に優れる樹脂膜を備えているため、 高性能であ る。 The electronic component of the present invention includes the resin film made of the resin composition of the present invention described above. The electronic component of the present invention has a high performance because it is provided with the resin film formed from the resin composition of the present invention and having excellent heat resistance and I-wrinkle suppressing performance.
[0079] <電子部品の種類> [0079] <Type of electronic component>
本発明の電子部品の種類は、 特に限定されない。 例えば、 本発明の樹脂組 成物からなる樹脂膜が、 耐熱性及び丨 丁〇しわ抑制性能に優れたものである ことから、 本発明の電子部品は、 本発明の樹脂組成物から成る樹脂膜の表面 上に 丨 丁〇膜が配置されてなる、 I 丁〇電極を備える電子部品でありうる。 また、 例えば、 本発明の樹脂膜は、 半導体デバイスに備えられる再配線層の 層間絶縁膜であっても良い。 The type of electronic component of the present invention is not particularly limited. For example, since the resin film made of the resin composition of the present invention is excellent in heat resistance and the ability to suppress wrinkles, the electronic component of the present invention has a resin film made of the resin composition of the present invention. It may be an electronic component having an I-electrode, in which a film is arranged on the surface of the. Further, for example, the resin film of the present invention may be an interlayer insulating film of a rewiring layer provided in a semiconductor device.
実施例 Example
[0080] 以下、 本発明について実施例に基づき具体的に説明するが、 本発明はこれ ら実施例に限定されるものではない。 なお、 以下の説明において、 量を表す 「%」 及び 「部」 は、 特に断らない限り、 質量基準である。 Hereinafter, the present invention will be specifically described based on Examples, but the present invention is not limited to these Examples. In the following description, "%" and "parts" representing amounts are based on mass unless otherwise specified.
実施例及び比較例において、 樹脂膜の丨 丁 0しわ抑制性能、 加熱減量、 及 〇 2020/175037 30 卩(:170? 2020 /004163 In the examples and the comparative examples, the resin film's performance of suppressing wrinkles, heat loss, and 〇 2020/175037 30 卩 (: 170? 2020 /004163
び透過率は、 それぞれ以下の方法を使用して評価した。 And the transmittance were evaluated using the following methods, respectively.
[0081] < I 丁〇しわ抑制性能> [0081] <I wrinkle suppression performance>
ガラス基板 (コーニング社製、 コーニング 1 737) 上に実施例、 比較例 で得た樹脂組成物をスピンコート法により塗布し、 ホッ トプレートを用いて 1 20°◦で 2分間加熱乾燥 (プリべーク) して、 塗膜を形成した。 次いで、 才ーブンを用いて、 窒素雰囲気下、 30°〇から 1 0°〇/分で 300°〇まで昇温 後、 300°〇で 60分間加熱するポストべークを行うことで、 膜厚 2 の 樹脂膜を形成した。 この樹脂膜上に、 丨 丁〇透明電極をスパッタリング装置 (芝浦エレテック社製、
Figure imgf000032_0001
〇 3-4巳?一1_ 1_」 、 ステ
The resin compositions obtained in Examples and Comparative Examples were applied onto a glass substrate (Corning 1737 manufactured by Corning Co., Ltd.) by a spin coating method, and dried by heating at 120°° C. for 2 minutes using a hot plate (pre-baked). To form a coating film. Then, using a heating oven, under a nitrogen atmosphere, increase the temperature from 30 ° 〇 to 10 ° 〇/min to 300 ° 〇, and then perform post bake by heating at 300° 〇 for 60 minutes. A resin film of 2 was formed. On this resin film, a transparent electrode with a transparent electrode (Shibaura Eletech Co., Ltd.,
Figure imgf000032_0001
* 3-4? 1_1_",
—ジ温度 30°〇 により 40 n の膜厚で形成した。 得られた丨 丁〇透明電 極付きの積層体のガラス基板を 1. 5〇 角に切断して試験片を作製した。 作製した試験片のガラス基板側を 270°〇又は 300°〇で加熱したホッ トプ レート上に 5分置いた後、 室温まで冷却した。 次いで、 試験片の丨 丁〇透明 電極側表面を光学顕微鏡 ( 1 00倍) で観察し、 しわ部分の面積の、 樹脂膜 表面の全面積 (1. 5001X 1. 5〇〇〇 に対する割合を算出し、 以下の基 準で評価した。 なお、 しわ部分の面積は、 光学顕微鏡で得られた画像を二値 化処理して抽出した。 — A film having a film thickness of 40 n was formed at a temperature of 30°. The obtained glass substrate of the laminated body with a transparent electrode was cut into 1.50 squares to prepare a test piece. The glass substrate side of the prepared test piece was placed on a hot plate heated at 270°○ or 300°○ for 5 minutes, and then cooled to room temperature. Next, the surface of the test piece on the transparent electrode side is observed with an optical microscope (100 times), and the ratio of the area of the wrinkle part to the total area of the resin film surface (1.5001X 1.500) is calculated. The area of the wrinkle portion was extracted by binarizing the image obtained by an optical microscope.
八 :樹脂膜の表面にしわの発生なし。 Eight: No wrinkles were formed on the surface of the resin film.
巳 :樹脂膜の表面にしわの発生はあるが、 しわ部分の面積が樹脂膜表面の 全面積の 1 /4未満。 Mimi: There are wrinkles on the surface of the resin film, but the area of the wrinkles is less than 1/4 of the total area of the resin film surface.
〇 :樹脂膜の表面にしわの発生はあるが、 しわ部分の面積が樹脂膜表面の 全面積の 1 /4以上 1 /2未満。 ◯: There is wrinkling on the surface of the resin film, but the area of the wrinkled part is 1/4 or more and less than 1/2 of the total area of the resin film surface.
〇 :樹脂膜の表面にしわの発生があり、 しわ部分の面積が樹脂膜表面の全 面積の 1 /2以上。 ○: The surface of the resin film has wrinkles, and the wrinkled area is 1/2 or more of the total area of the resin film surface.
<加熱減量> <Heating loss>
スパッタリング装置 (芝浦エレテック社製、 「丨 一1\/1 丨 丨 丨 6 「 〇 3 - 4巳 一 !_ !_」 ) を用いて、 アルミニウム薄膜が 1 00 n mの膜厚で形成さ れたシリコンウェハ上に、 実施例、 比較例で得た樹脂組成物をスビンコート 〇 2020/175037 31 卩(:170? 2020 /004163 An aluminum thin film was formed with a thickness of 100 nm using a sputtering device ("Shibaura Eletech Co., Ltd.," 丨ichi 1\/1 丨 丨 丨 6 "○ 3-4 Minichi !_ !_"). On the silicon wafer, spin coating the resin composition obtained in the examples and comparative examples. 〇 2020/175037 31 卩 (: 170? 2020 /004163
した後、 ホッ トプレートを用いてシリコンウェハを 1 2 0 °〇で 2分間加熱し た (塗膜形成工程) 。 次いで、 窒素雰囲気下、 3 0 °◦から 1 〇 /分で 3 0 0 °〇まで昇温後、 3 0 0 °〇で 6 0分間の条件で熱処理させることで樹脂膜を得 て、 膜厚 1 〇 の樹脂膜を片面に備える積層体を得た (硬化工程) 。 After that, the silicon wafer was heated with a hot plate at 120 ° for 2 minutes (coating film forming step). Then, under a nitrogen atmosphere, the resin film is obtained by heating it from 30 ° C to 10 ° C/min to 300 ° C ° and then heat treating it at 300°C for 60 minutes. A laminate having a resin film of 10 on one side was obtained (curing step).
得られた積層体を〇. 5 〇 I / !_の塩酸水溶液に浸潰し、 シリコンウェ ハと樹脂膜の間に位置するアルミニウム薄膜を塩酸水溶液にて溶解させるこ とで樹脂膜をシリコンウェハから剥離した。 次いで剥離した樹脂膜を水洗し 、 乾燥した。 乾燥後の樹脂膜を示差熱熱重量同時測定装置 (セイコーインス ツル社製、 丁〇/ 0丁 6 2 0 0) を用いて、 窒素雰囲気下、 昇温速度 1 0 °〇/分の条件で 3 0 0 °〇まで到達させ、 3 0 0 °〇で 1時間保持した際の、 3 0 0 °〇到達時の試料の質量 〇及び 3 0 0 °〇の保持終了時の試料の質量 1 をそれぞれ測定して、 それらの値から加熱減量の値: ( 〇— 〇 / 〇 X 1 〇〇 (%) を算出し、 以下の基準で評価した。 加熱減量が少ないほど、 樹脂膜が耐熱性に優れることを意味する。 The resin film was removed from the silicon wafer by immersing the obtained laminate in a hydrochloric acid solution of 0.5 I/!_ and dissolving the aluminum thin film located between the silicon wafer and the resin film with the hydrochloric acid solution. Peeled off. Next, the peeled resin film was washed with water and dried. The dried resin film was measured with a differential thermogravimetric simultaneous measurement device (Seiko Instruments Co., Ltd., 0/00/620) under a nitrogen atmosphere at a heating rate of 10°/min. The mass of the sample at the time of reaching 300 °C and the mass of the sample at the end of the holding at 300 °1 when the temperature is reached to 300 °C and held at 300 °C for 1 hour. Each value was measured, and the value of heat loss: (○ — 〇 / 〇 X 1 〇 〇 (%)) was calculated and evaluated based on the following criteria: The smaller the heat loss, the more heat resistant the resin film becomes. Means superior.
八 : 3 0 0 °〇における加熱減量が 1 %未満。 Eight: The heating loss at 300° is less than 1%.
巳 : 3 0 0 °〇における加熱減量が 1 %以上 3 %未満。 Min: The heating loss at 300° 〇 is 1% or more and less than 3%.
0 : 3 0 0 °〇における加熱減量が 3 %以上。 0: The heating weight loss at 300 °C is 3% or more.
<光線透過率> <Light transmittance>
ガラス基板 (コーニング社製、 コーニング 1 7 3 7) 上に実施例、 比較例 で得た樹脂組成物をスピンコート法により塗布し、 ホッ トプレートを用いて 1 2 0 °◦で 2分間加熱乾燥 (プリべーク) して、 膜厚 2 の塗膜を形成し た (塗膜形成工程) 。 次いで、 オーブンを用いて、 窒素雰囲気下、 3 0 °〇か ら 1 0 °〇/分で 3 0 0 °〇まで昇温後、 3 0 0 °〇で 6 0分間加熱するポストべ一 クを行うことで、 樹脂膜とガラス基板とからなる積層体を得た (硬化工程) 得られた積層体について、 分光光度計 V - 5 6 0 (日本分光社製) を用い て波長 4 0 0 n の光における光線透過率 (%) を測定した。 The resin compositions obtained in Examples and Comparative Examples were applied onto a glass substrate (Corning 177 3 7 manufactured by Corning Co., Ltd.) by a spin coating method, and heat-dried for 2 minutes at 120°° using a hot plate. (Pre-baking) was performed to form a coating film having a film thickness of 2 (coating film forming step). Then, using an oven, under a nitrogen atmosphere, 3 0 ° 〇 or al 1 0 ° 〇 / min at 3 0 0 ° was warmed up 〇, post base one click heating at 3 0 0 ° 〇 6 0 min By doing so, a laminate composed of the resin film and the glass substrate was obtained (curing step) The obtained laminate was measured with a spectrophotometer V-560 (manufactured by JASCO Corporation) at a wavelength of 400 n. The light transmittance (%) of the light was measured.
なお、 樹脂膜の光線透過率 (%) は、 樹脂膜が付いていないガラス基板を 〇 2020/175037 32 卩(:170? 2020 /004163 The light transmittance (%) of the resin film is based on the glass substrate without the resin film. 〇 2020/175037 32 卩 (: 170? 2020 /004163
ブランクとして、 樹脂膜の厚みを 2 とした場合の換算値で算出し、 以下 の基準で評価した。 As a blank, it was calculated by a conversion value when the thickness of the resin film was 2, and evaluated according to the following criteria.
八 :光線透過率が 97%以上。 Eight: Light transmittance of 97% or more.
巳 :光線透過率が 97%未満。 Mami: Light transmittance is less than 97%.
[0082] (合成例 1 : プロトン性極性基を有する環状オレフィン重合体 ( _ 1) の 合成) (Synthesis Example 1: Synthesis of Cyclic Olefin Polymer (_ 1) Having Protic Polar Group)
置換イミ ド基を有する環状オレフィンとしての 1\]— (2—エチルヘキ シル) ービシクロ [2. 2. 1 ] ヘプトー 5—エンー 2, 3—ジカルボキシ イミ ド 40モル%、 及びプロトン性極性基を有する環状オレフィンとしての 4 -ヒドロキシカルボニルテトラシクロ [6. 2. 1. 13, 6· 〇2, 7] ドデ 力一 9—エン 60モル%からなる単量体混合物 1 00部、 1 , 5—へキサジ エン 2部、 ( 1 , 3 -ジメシチルイミダゾリンー 2 -イリデン) (トリシク ロヘキシルホスフィン) ベンジリデンルテニウムジクロリ ド (〇 「 9. 1_ 6 第 1巻, 953頁, 1 999年 に記載された方法で合成した) 〇.1\]—(2-Ethylhexyl)-bicyclo[2.2.1]hept-5-ene-2,3-dicarboxyimide 40 mol% as a cyclic olefin having a substituted imido group, and a protic polar group 4-Hydroxycarbonyltetracyclo [6. 2. 1. 1 3, 6 · ○ 2, 7 ] as a cyclic olefin having a monomer mixture consisting of 60 mol% of 9-ene 100 parts 100 parts, 1, 5—Hexadiene 2 parts, (1, 3-dimesityl imidazoline-2-ylidene) (tricyclohexylphosphine) benzylidene ruthenium dichloride (〇 “9.1_6 Vol. 1, p. 953, 1 999) Synthesized by the method described in ).
02部、 及びジエチレングリコールエチルメチルエーテル 200部を、 窒素 置換したガラス製耐圧反応器に仕込み、 攪拌しつつ 80°〇にて 4時間反応さ せて重合反応液を得た。 02 parts and 200 parts of diethylene glycol ethyl methyl ether were charged into a nitrogen pressure-resistant glass pressure-resistant reactor, and reacted with stirring at 80 ° for 4 hours to obtain a polymerization reaction solution.
そして、 得られた重合反応液をオートクレープに入れて、 1 50°〇、 水素 圧 4 IV! 3で、 5時間攪拌して水素化反応を行い、 プロトン性極性基を有す る環状オレフィン重合体 ( _ 1) としての水添重合体を含む重合体溶液を 得た。 得られた環状オレフィン重合体 ( _ 1) の重合転化率は 99. 7%Then, the obtained polymerization reaction solution was put into an autoclave and stirred at 150 ° C and hydrogen pressure of 4 IV! 3 for 5 hours to carry out a hydrogenation reaction, and a cyclic olefin polymer having a protic polar group was added. A polymer solution containing a hydrogenated polymer as a unit (_ 1) was obtained. The polymerization conversion rate of the obtained cyclic olefin polymer (_ 1) was 99.7%.
、 ポリスチレン換算重量平均分子量は 7, 1 50、 数平均分子量は 4, 69 〇、 分子量分布は 1. 52、 水素添加率は、 99. 7%であった。 また、 得 られた環状オレフィン重合体 ( 一 ·!) の重合体溶液の固形分濃度は 34.The polystyrene reduced weight average molecular weight was 7, 150, the number average molecular weight was 4,690, the molecular weight distribution was 1.52, and the hydrogenation rate was 99.7%. The solid content concentration of the obtained polymer solution of cyclic olefin polymer (1...!) is 34.
4質量%であった。 It was 4% by mass.
[0083] (合成例 2 : プロトン性極性基を有さない環状オレフィン重合体 ( _3) の合成) (Synthesis Example 2: Synthesis of cyclic olefin polymer (_3) having no protic polar group)
テトラシクロ [6. 5. 〇. 1 2 5· 0 13] トリデカ- 3, 8, 1 0 〇 2020/175037 33 卩(:170? 2020 /004163 Tetracyclo [6. 5. 〇 .1 2 ' 5 · 0 13 ] Trideca- 3 , 8, 1 0 〇 2020/175037 33 卩 (: 170? 2020 /004163
, 1 2 -テトラエン (1\/1丁 ) 80モル咅1 1\1- (4 -フエニル) 一 (5- ノルボルネンー2, 3—ジカルボキシイミ ド) ( 巳 丨) 20モル部、 1 —ヘキセン 6モル部、 アニソール 590モル部及びルテニウム系重合触媒 として 4 -アセトキシベンジリデン (ジクロロ) (4, 5 -ジブロモー 1 ,, 1 2 -Tetraene (1\/1) 80 moles 1 1\1- (4-phenyl) 1 (5-norbornene-2,3-dicarboxyimide) (Mimi) 20 moles, 1 — hexene 6 parts by mol, 590 parts by mass of anisole and 4-acetoxybenzylidene (dichloro) (4,5-dibromo- 1, as a ruthenium-based polymerization catalyst)
3 -ジメシチルー 4 -イミダゾリンー 2 -イリデン) (トリシクロヘキシル ホスフィン) ルテニウム (〇 1 063、 和光純薬社製) 0. 01 5モル部を 、 窒素置換した耐圧ガラス反応器に仕込み、 攪拌下に 80°〇で 1時間の重合 反応を行って開環重合体の溶液を得た。 この溶液について、 ガスクロマトグ ラフィーを測定したところ、 実質的に単量体が残留していないことが確認さ れ、 重合転化率は 99%以上であった。 3-Dimesityl-4-imidazoline-2-ylidene) (Tricyclohexylphosphine) Ruthenium (〇 1063, manufactured by Wako Pure Chemical Industries, Ltd.) 0.015 5 parts by mol of a pressure-resistant glass reactor purged with nitrogen were charged, and the mixture was stirred at 80 ° A polymerization reaction was carried out for 1 hour at ◯ to obtain a solution of a ring-opening polymer. Gas chromatography of this solution was measured, and it was confirmed that substantially no monomer remained, and the polymerization conversion rate was 99% or more.
次いで、 窒素置換した攪拌機付きオートクレープに、 得られた開環重合体 の溶液を仕込み、 1 50°〇、 水素圧 71\/1 3で、 5時間攪拌させて水素添加 反応を行った。 得られた水素化反応溶液を濃縮して、 プロトン性極性基を有 さない環状オレフィン重合体 ( _3) の溶液 (固形分濃度 55. 5%) を 得た。 得られたプロトン性極性基を有さない環状オレフィン重合体 (八_3 ) の重量平均分子量は 50000、 数平均分子量は 20000、 水素添加率 は 97 %であった。 Then, equipped with a stirrer autoclave purged with nitrogen was charged with a solution of the resulting ring-opened polymer, 1 50 ° 〇, at a hydrogen pressure of 71 \ / 1 3, it was subjected to hydrogenation reaction allowed to stir 5 hours. The obtained hydrogenation reaction solution was concentrated to obtain a solution (solid content concentration 55.5%) of a cyclic olefin polymer (_3) having no protic polar group. The cyclic olefin polymer (8_3) having no protic polar group had a weight average molecular weight of 50,000, a number average molecular weight of 20,000 and a hydrogenation rate of 97%.
[0084] (合成例 3 : プロトン性極性基を有さない環状オレフィン重合体 ( _4) の合成) (Synthesis Example 3: Synthesis of cyclic olefin polymer (_4) having no protic polar group)
以下の通りの操作により、 プロトン性極性基に代えて、 カルボン酸無水物 基を有する環状オレフィン重合体 ( _4) を合成した。 By the following procedure, a cyclic olefin polymer (_4) having a carboxylic acid anhydride group instead of the protic polar group was synthesized.
重合 1段目として 5 -エチリデンービシクロ [2. 2. 1 ] ヘプトー 2- エン 35モル部、 1 —ヘキセン〇. 9モル部、 アニソール 340モル部及び ルテニウム系重合触媒として 4 -アセトキシベンジリデン (ジクロロ) (4 , 5—ジブロモー 1 , 3—ジメシチルー 4—イミダゾリンー 2—イリデン) (トリシクロヘキシルホスフィン) ルテニウム (〇 1 063、 和光純薬社製 ) 0. 005モル部を、 窒素置換した耐圧ガラス反応器に仕込み、 攪拌下に 80°〇で 30分間の重合反応を行ってノルボルネン系開環重合体の溶液を得 〇 2020/175037 34 卩(:170? 2020 /004163 As the first stage of polymerization, 35-mol part of 5-ethylidene-bicyclo[2.2.1]hept-2-ene, 0.9-mol part of 1-hexene, 340 mol part of anisole and 4-acetoxybenzylidene (dichloro) as ruthenium-based polymerization catalyst ) (4,5-dibromo-1,3-dimesityl-4-imidazoline-2-ylidene) (tricyclohexylphosphine) ruthenium (〇 1 063, manufactured by Wako Pure Chemical Industries, Ltd.) 0.0005 mol part of the pressure resistant glass reactor was replaced with nitrogen. The resulting mixture was stirred and the polymerization reaction was carried out at 80 ° for 30 minutes with stirring to obtain a solution of the norbornene ring-opening polymer. 〇 2020/175037 34 卩 (: 170? 2020 /004163
た。 It was
次いで、 重合 2段目として重合 1段目に得た溶液中にテトラシクロ [9. Then, in the solution obtained in the first stage of polymerization as the second stage of polymerization, tetracyclo [9.
2. 1 . 0
Figure imgf000036_0001
. 〇 3, 8] テトラデカー 3, 5, 7, 1 2 -テトラエン ( メタノテトラヒ ドロフルオレン) 35モル音1 ビシクロ [2. 2. 1 ] ヘプ 卜一 2 -エンー 5, 6 -ジカルボン酸無水物 30モル部、 アニソール 250 モル部、 及び(3 1 063 〇. 0 1 モル部を追加し、 攪拌下に 80°〇で 1 . 5 時間の重合反応を行ってノルボルネン系開環重合体の溶液を得た。 この溶液 について、 ガスクロマトグラフィーを測定したところ、 実質的に単量体が残 留していないことが確認され、 重合転化率は 99%以上であった。
2.1.0
Figure imgf000036_0001
. 〇 3, 8 ]Tetradeca 3, 5, 7, 1 2 -Tetraene (methanotetrahydrofluorene) 35 mol Tone 1 Bicyclo [2. 2. 1] Hep 2-one-5-dicarboxylic anhydride 30 mol Parts, anisole 250 mol parts, and (3 1 063 0. 0 1 mol parts) were added, and the polymerization reaction was carried out at 80° for 1.5 hours with stirring to obtain a norbornene ring-opening polymer solution. Gas chromatography measurement of this solution confirmed that substantially no monomer remained, and the polymerization conversion rate was 99% or more.
次いで、 窒素置換した攪拌機付きオートクレープに、 得られた開環重合体 の溶液を仕込み、 0 1 063 〇. 03モル部を追加し、 1 50°〇、 水素圧 7 IV! 3で、 5時間攪拌させて水素添加反応を行った。 かかる水素添加反応の 結果得られた水素化反応溶液を濃縮して、 プロ トン性極性基を有さない環状 オレフィン重合体 ( _4) の溶液 (固形分濃度 55. 5%) を得た。 プロ トン性極性基を有さない環状オレフィン重合体 ( _ 4) の重量平均分子量 は 60, 000、 数平均分子量は 30, 000、 分子量分布は 2であった。 また、 水素添加率は 95%であり、 カルボン酸無水物基を有する繰り返し単 位の含有率は 30モル%であった。 さらにまた、 プロ トン性極性基を有さな い環状オレフィン重合体 ( _4) の溶液の固形分濃度は 22%であった。 [0085] (実施例 1 ) Then, the autoclave equipped with a stirrer that had been replaced with nitrogen was charged with the solution of the obtained ring-opening polymer, 0 1 063 〇.03 parts by mol was added, and the mixture was heated at 150° 〇, hydrogen pressure 7 IV! The hydrogenation reaction was carried out with stirring. The hydrogenation reaction solution obtained as a result of the hydrogenation reaction was concentrated to obtain a solution (solid content concentration 55.5%) of a cyclic olefin polymer (_4) having no protic polar group. The cyclic olefin polymer (_ 4) having no protonic polar group had a weight average molecular weight of 60,000, a number average molecular weight of 30,000 and a molecular weight distribution of 2. The hydrogenation rate was 95%, and the content of repeating units having a carboxylic acid anhydride group was 30 mol%. Furthermore, the solid concentration of the solution of the cyclic olefin polymer (_4) having no protic polar group was 22%. [0085] (Example 1)
合成例 1 で得られたプロ トン性極性基を有する環状オレフィン重合体 (八 - 1 ) の溶液 29 1部 (環状オレフィン重合体 ( _ 1 ) として 1 00部) Solution of cyclic olefin polymer (8-1) having protonic polar group obtained in Synthesis Example 1 29 parts (100 parts as cyclic olefin polymer (_ 1 ))
、 下式を満たす架橋剤 (巳) としての化合物 (日本化薬社製、
Figure imgf000036_0002
9 1 3) 1 0部、 界面活性剤としてのオルガノシロキサンポリマー (信越化学 社製、 製品名 「< ?34 1 」 ) 〇. 1部、 シランカップリング剤としてのグ リシドキシプロピルトリメ トキシシラン (X I 八1\/1巳丁巳 社製、 製品名 「 〇 3? 6040」 ) 1部、 酸化防止剤として、 ペンタエリズリ トールーテト ラキス [3— (3,
Figure imgf000036_0003
ブチルー 4—ヒ ドロキシフエニル) \¥02020/175037 35 卩(:17 2020 /004163
, A compound as a cross-linking agent (Mimi) satisfying the following formula (manufactured by Nippon Kayaku Co.,
Figure imgf000036_0002
9 1 3) 10 parts, organosiloxane polymer as a surfactant (Shin-Etsu Chemical Co., Ltd., product name “<?34 1 ”) 0. 1 part, glycidoxypropyltrimethoxysilane (XI as a silane coupling agent 8 1\/1, manufactured by Mitomisha Co., Ltd., product name "〇3-6040") 1 part, as an antioxidant, pentaerythritol tolutrix [3— (3, (3,
Figure imgf000036_0003
Butyl 4-hydroxyphenyl) \¥02020/175037 35 卩 (: 17 2020 /004163
プロピオナート] (商品名 「 I 「 931^ 0 x 1 01 〇 」 、 巳八3 社製 ) 2. 1咅1 並びに、 溶剤としてのジエチレングリコールエチルメチルエー テル (東邦化学社製、 製品名 「巳 01\/1-3」 ) 27部を混合し、 溶解させた後 、 孔径〇. 45 〇1のポリテトラフルオロエチレン製フイルターでろ過して 、 樹脂組成物を調製した。 Propionate] (Product name “I “931^ 0 x 1 01 〇”, manufactured by Minahachi 3 Co., Ltd.) 2.1 and diethylene glycol ethyl methyl ether as a solvent (manufactured by Toho Chemical Co., Ltd. /1-3") 27 parts were mixed and dissolved, and then filtered through a filter made of polytetrafluoroethylene having a pore size of 0.451 to prepare a resin composition.
そして、 得られた樹脂組成物を用いて形成した塗膜の丨 丁〇しわ抑制性能 And, the wrinkle suppression performance of the coating film formed by using the obtained resin composition.
、 加熱減量、 及び光線透過率を評価した。 結果を表 1 に示す。 The heating loss, and the light transmittance were evaluated. The results are shown in Table 1.
[化 14] [Chemical 14]
Figure imgf000037_0001
Figure imgf000037_0001
[0086] (実施例 2〜 7) [0086] (Examples 2 to 7)
架橋剤 (巳) の配合量、 及び溶剤としてのジエチレングリコールエチルメ チルエーテルの配合量を表 1 に示す通りにそれぞれ変更した以外は実施例 1 と同様にして、 樹脂組成物を調製した。 A resin composition was prepared in the same manner as in Example 1 except that the compounding amount of the cross-linking agent (Mitsumi) and the compounding amount of diethylene glycol ethyl methyl ether as the solvent were changed as shown in Table 1.
そして、 得られた樹脂組成物を用いて、 実施例 1 と同様の評価を行った。 結果を表 1 に示す。 Then, the same evaluation as in Example 1 was performed using the obtained resin composition. The results are shown in Table 1.
[0087] (実施例 8) [0087] (Example 8)
架橋剤 (巳) の配合量を 25部とし、 溶剤としてのジエチレングリコール エチルメチルエーテルの配合量を 53部とし、 さらに、 アルコキシメチル基 を 2つ以上有する化合物として 1\1, 1\1, 1\1, , 1\1, , 1\1” , 1\1” ーヘキサメ トキシメチルメラミン (製品名 「二カラック
Figure imgf000037_0002
、 三和ケミ カル社製) 1 〇部を配合した以外は、 実施例 1 と同様にして、 樹脂組成物を 調製した。
The compounding amount of cross-linking agent (Mitsumi) was 25 parts, the compounding amount of diethylene glycol ethyl methyl ether as a solvent was 53 parts, and the compound having two or more alkoxymethyl groups was 1\1, 1\1, 1\. 1, ,1\1, ,1\1", 1\1"-Hexamethoxymethylmelamine (Product name "Nicarac
Figure imgf000037_0002
A resin composition was prepared in the same manner as in Example 1 except that 10 parts by weight was blended.
そして、 得られた樹脂組成物を用いて、 実施例 1 と同様の評価を行った。 〇 2020/175037 36 卩(:170? 2020 /004163 Then, the same evaluation as in Example 1 was performed using the obtained resin composition. 〇 2020/175037 36 卩 (: 170? 2020 /004163
結果を表 1 に示す。 The results are shown in Table 1.
[0088] (実施例 9) [0088] (Example 9)
架橋剤 (巳) の配合量を 2 5部とし、 溶剤としてのジエチレングリコール エチルメチルエーテルの配合量を 7 1部とし、 さらに、 架橋剤 (巳) とは構 造の異なる多官能エポキシ化合物として、 ブタンテトラカルボン酸テトラ ( 3 , 4 -エポキシシクロヘキシルメチル)修飾 カプロラクトン (ダイセル 社製、 製品名 「エボリード〇丁4 0 1」 ) 2 0部を配合した以外は、 実施例 1 と同様にして、 樹脂組成物を調製した。 The compounding amount of the cross-linking agent (Mitsumi) was 25 parts, and the compounding amount of diethylene glycol ethyl methyl ether as the solvent was 71 parts. Tetra (3,4-epoxycyclohexylmethyl) tetracarboxylate-modified caprolactone (manufactured by Daicel, product name "Evolead 0401") was added in the same manner as in Example 1 except that 20 parts were blended. The thing was prepared.
そして、 得られた樹脂組成物を用いて、 実施例 1 と同様の評価を行った。 結果を表 1 に示す。 Then, the same evaluation as in Example 1 was performed using the obtained resin composition. The results are shown in Table 1.
[0089] (実施例 1 0) (Example 10)
プロトン性極性基を有する環状オレフィン重合体 ( _ 1) の溶液に代え て、 分岐型構造を有するポリアミ ドイミ ド樹脂のプロピレングリコールメチ ルエーテルアセタート及び _ブタノール混合溶液 2 2 9部 (0 丨 (3社製、 ユニディック巳1\/1〇 - 7 9 3、 カルボキシル基を有する分岐型ポリアミ ドイ ミ ド樹脂 ( 一 2) として 1 0 0部) を用い、 所定の構造を有する架橋剤 ( 巳) の配合量を 3 0部に、 溶剤としてのジエチレングリコールエチルメチル エーテルを 6 9部に変更した以外は、 実施例 1 と同様にして、 樹脂組成物を 調製した。 Instead of a solution of a cyclic olefin polymer (_ 1) having a protic polar group, a mixed solution of a propylene glycol methyl ether acetate of a polyamidimide resin having a branched structure and _butanol 2 2 9 parts (0 侨 (3 Unidick Min 1//1--7 93, a branched polyamidimide resin having a carboxyl group (100 parts as 1) and a cross-linking agent having a predetermined structure (M) A resin composition was prepared in the same manner as in Example 1 except that the compounding amount was changed to 30 parts and diethylene glycol ethyl methyl ether as a solvent was changed to 69 parts.
そして、 得られた樹脂組成物を用いて、 実施例 1 と同様の評価を行った。 結果を表 1 に示す。 Then, the same evaluation as in Example 1 was performed using the obtained resin composition. The results are shown in Table 1.
[0090] (比較例 1) [0090] (Comparative Example 1)
架橋剤 (巳) を配合せず、 これに代えて、 架橋剤 (巳) とは構造の異なる 多官能エポキシ化合物である、 ブタンテトラカルボン酸テトラ (3 , 4 -エ ポキシシクロヘキシルメチル)修飾 カプロラクトン (ダイセル社製、 製品 名 「エボリード〇丁4 0 1」 ) 6 0部を配合し、 さらに、 溶剤としてのジエ チレングリコールエチルメチルエーテルの配合量を 9 7部に変更した以外は 、 実施例 1 と同様にして、 樹脂組成物を調製した。 〇 2020/175037 37 卩(:170? 2020 /004163 Instead of blending a cross-linking agent (Mimi), instead of this, a poly(functional epoxy compound) having a different structure from the cross-linking agent (Mimi), butane tetracarboxylic acid tetra (3,4-epoxycyclohexylmethyl)-modified caprolactone ( Daicel Co., Ltd., product name "Evolead 〇 401") 60 parts were blended, and the blending amount of diethyl glycol glycol ethyl methyl ether as a solvent was changed to 97 parts. A resin composition was prepared in the same manner. 〇 2020/175037 37 卩 (: 170? 2020 /004163
そして、 得られた樹脂組成物を用いて、 実施例 1 と同様の評価を行った。 結果を表 1 に示す。 Then, the same evaluation as in Example 1 was performed using the obtained resin composition. The results are shown in Table 1.
[0091 ] (比較例 2) [0091] (Comparative Example 2)
架橋剤 (巳) を配合せず、 これに代えて、 架橋剤 (巳) とは構造の異なる 多官能エポキシ化合物である、 ビスフエノール八型エポキシ化合物 (三菱ケ ミカル社製、 「8 2 8巳 !_」 ) 6 0部を配合し、 さらに、 溶剤としてのジエ チレングリコールエチルメチルエーテルの配合量を 9 7部に変更した以外は 、 実施例 1 と同様にして、 樹脂組成物を調製した。 Instead of blending the cross-linking agent (Mitsumi), instead of this, a polyfunctional epoxy compound having a different structure from the cross-linking agent (Mitsumi), a bisphenol 8-type epoxy compound (Mitsubishi Chemical Corp. !_”) 60 parts, and a resin composition was prepared in the same manner as in Example 1 except that the compounding amount of diethylenglycol ethyl methyl ether as a solvent was changed to 97 parts.
そして、 得られた樹脂組成物を用いて、 実施例 1 と同様の評価を行った。 結果を表 1 に示す。 Then, the same evaluation as in Example 1 was performed using the obtained resin composition. The results are shown in Table 1.
[0092] (比較例 3) [0092] (Comparative Example 3)
架橋剤 (巳) を配合せず、 これに代えて、 架橋剤 (巳) とは構造の異なる 多官能エポキシ化合物である、 イソシアヌル酸構造を有する 6官能液状エポ キシ化合物 (日産化学社製、 「丁巳 丨 〇 II〇」 ) 6 0部を配合し、 さら に、 溶剤としてのジエチレングリコールエチルメチルエーテルの配合量を 9 7部に変更した以外は、 実施例 1 と同様にして、 樹脂組成物を調製した。 そして、 得られた樹脂組成物を用いて、 実施例 1 と同様の評価を行った。 結果を表 1 に示す。 Instead of blending a cross-linking agent (Mimi), instead of this, a polyfunctional epoxy compound having a different structure from the cross-linking agent (Mimi), a 6-functional liquid epoxy compound having an isocyanuric acid structure (manufactured by Nissan Chemical Industries, Dyeing method was carried out in the same manner as in Example 1 except that 60 parts were mixed and the amount of diethylene glycol ethyl methyl ether as a solvent was changed to 97 parts. Prepared. Then, the same evaluation as in Example 1 was performed using the obtained resin composition. The results are shown in Table 1.
[0093] (比較例 4) (Comparative Example 4)
プロトン性極性基を有する環状オレフィン重合体 ( _ 1) の溶液に代え て、 プロトン性極性基を有さない環状オレフィン重合体 ( _ 3) の溶液 1 8 0部 (プロトン性極性基を有さない環状オレフィン重合体 ( _ 3) とし て 1 〇〇部) を用い、 所定の構造を有する架橋剤 (巳) の配合量を 3 0部に 変更し、 さらに、 溶剤をアニソール 3 6 2部に変更した以外は、 実施例 1 と 同様にして、 樹脂組成物を調製した。 Instead of the solution of cyclic olefin polymer (_ 1) having a protic polar group, a solution of cyclic olefin polymer (_ 3) not having a protic polar group 180 parts ( The amount of the cross-linking agent (Mitsumi) having the specified structure was changed to 30 parts, and the solvent was changed to anisole 3 62 parts. A resin composition was prepared in the same manner as in Example 1 except that the resin composition was changed.
そして、 得られた樹脂組成物を用いて、 実施例 1 と同様の評価を行った。 結果を表 1 に示す。 Then, the same evaluation as in Example 1 was performed using the obtained resin composition. The results are shown in Table 1.
[0094] (比較例 5) 〇 2020/175037 38 卩(:170? 2020 /004163 (Comparative Example 5) 〇 2020/175037 38 卩 (: 170? 2020 /004163
プロトン性極性基を有する環状オレフィン重合体 ( _ 1) の溶液に代え て、 プロトン性極性基を有さない環状オレフィン重合体 ( _ 4) の溶液 1 8 0部 (プロトン性極性基を有さない環状オレフィン重合体 ( _ 4) とし て 1 〇〇部) を用い、 所定の構造を有する架橋剤 (巳) の配合量を 3 0部に 変更し、 さらに、 溶剤をアニソール 3 6 2部に変更した以外は、 実施例 1 と 同様にして、 樹脂組成物を調製した。 Instead of the solution of the cyclic olefin polymer (_ 1) having a protic polar group, a solution of the cyclic olefin polymer (_ 4) having no protic polar group 1 800 parts (having a protic polar group The amount of the cross-linking agent (Mitsumi) having the specified structure was changed to 30 parts, and the solvent was changed to anisole 3 62 parts. A resin composition was prepared in the same manner as in Example 1 except that the resin composition was changed.
そして、 得られた樹脂組成物を用いて、 実施例 1 と同様の評価を行った。 結果を表 1 に示す。 Then, the same evaluation as in Example 1 was performed using the obtained resin composition. The results are shown in Table 1.
[0095] [0095]
Figure imgf000041_0001
Figure imgf000041_0001
Figure imgf000041_0002
Figure imgf000041_0002
〇 2020/175037 40 卩(:170? 2020 /004163 〇 2020/175037 40 卩 (: 170? 2020 /004163
[0096] 表 1 より、 所定のプロトン性極性基を有する重合体 ( ) と、 特定の構造 を満たす架橋剤 (巳) とを含有する実施例 1〜 1 0の樹脂組成物によれば、 加熱減量が少なく耐熱性優れると共に、 丨 丁〇しわ抑制性能に優れる樹脂膜 を形成することができたことが分かる。 また、 表 1 より、 特定の構造を満た す架橋剤 (巳) を含有しない樹脂組成物を用いた比較例 1〜 3の場合には、 耐熱性及び丨 丁〇しわ抑制性能の双方に優れる樹脂膜を形成することができ なかったことが分かる。 さらにまた、 表 1 より、 プロトン性極性基を有さな い環状オレフィン重合体を用いた比較例 4では、 得られた樹脂膜の耐熱性は 優れていたが、 丨 丁〇しわ抑制性能は低かったことが分かる。 そして、 表 1 より、 プロトン性極性基を有さないが、 カルボン酸無水物基は含有する環状 オレフィン重合体を用いた比較例 5でも、 得られた樹脂膜の耐熱性は優れて いたが、 丨 丁〇しわ抑制性能は低かったことが分かる。 [0096] From Table 1, according to the resin compositions of Examples 1 to 10 containing the polymer () having a predetermined protic polar group and the cross-linking agent (Mitsumi) satisfying the specific structure, It can be seen that it was possible to form a resin film with excellent heat resistance as well as a small amount of weight loss and excellent crease control performance. In addition, from Table 1, in the case of Comparative Examples 1 to 3 using a resin composition containing no cross-linking agent (Mitsumi) satisfying a specific structure, a resin that is excellent in both heat resistance and crease suppression performance It can be seen that the film could not be formed. Furthermore, from Table 1, in Comparative Example 4 using a cyclic olefin polymer having no protic polar group, the heat resistance of the obtained resin film was excellent, but the crease suppression performance was low. I understand that Further, from Table 1, even in Comparative Example 5 using a cyclic olefin polymer having no protic polar group, but having a carboxylic acid anhydride group, the heat resistance of the obtained resin film was excellent,丨 It can be seen that the wrinkle suppression performance was low.
産業上の利用可能性 Industrial availability
[0097] 本発明の樹脂組成物によれば、 耐熱性及び丨 丁〇しわ抑制性能に優れる樹 脂膜を形成することができる。 [0097] According to the resin composition of the present invention, it is possible to form a resin film having excellent heat resistance and excellent anti-wrinkle suppressing performance.
また、 本発明によれば、 本発明の樹脂組成物を用いて形成された樹脂膜を 備える高性能な電子部品を提供することができる。 Further, according to the present invention, it is possible to provide a high-performance electronic component including a resin film formed by using the resin composition of the present invention.
さらにまた、 本発明によれば、 本発明の樹脂組成物を用いて本発明の樹脂 膜を効率的に製造し得る樹脂膜の製造方法を提供することができる。 Furthermore, according to the present invention, it is possible to provide a method for producing a resin film, which can efficiently produce the resin film of the present invention using the resin composition of the present invention.

Claims

〇 2020/175037 41 卩(:170? 2020 /004163 請求の範囲 [請求項 1 ] プロトン性極性基を有する重合体 ( ) と、 下式 (1) で表される架橋剤 (巳) と、 を含有する樹脂組成物であ つて、 前記プロトン性極性基を有する重合体 ( ) は、 プロトン性極性基 を有する環状オレフイン重合体及びプロトン性極性基を有するポリア ミ ドイミ ド樹脂の少なくとも一方を含む、 樹脂組成物。 〇 2020/175037 41 Scope (: 170? 2020/004163 Claims [Claim 1] A polymer having a protic polar group (), and a cross-linking agent (Mi) represented by the following formula (1), In the resin composition containing, the polymer having a protic polar group () contains at least one of a cyclic olefin polymer having a protic polar group and a polyamideimide resin having a protic polar group, Resin composition.
[化 1 ] [Chemical 1]
Figure imgf000043_0001
Figure imgf000043_0001
〔式 (1) 中、 複数の 8は、 それぞれ独立して、 炭素数 1〜 6のアル キル基、 及び炭素数 1〜 6のアルコキシ基の何れかを示し、 〇1、
Figure imgf000043_0002
、 及び は〇〜 4の整数、 9は〇〜 5の整数をそれぞれ示す。 〕
[In the formula (1), a plurality of 8 each independently represents any of an alkyl group having 1 to 6 carbon atoms and an alkoxy group having 1 to 6 carbon atoms;
Figure imgf000043_0002
, And are integers from 0 to 4, and 9 is an integer from 0 to 5, respectively. ]
[請求項 2] 前記プロトン性極性基を有する重合体 ( ) が、 カルボキシル基を 有する環状オレフィン重合体である、 請求項 1 に記載の樹脂組成物。 2. The resin composition according to claim 1, wherein the polymer () having a protic polar group is a cyclic olefin polymer having a carboxyl group.
[請求項 3] 前記プロトン性極性基を有する重合体 ( ) 1 0 0質量部に対する 、 前記架橋剤 (巳) の含有量が、 5質量部以上 2 0 0質量部以下であ る、 請求項 1又は 2に記載の樹脂組成物。 [Claim 3] The content of the cross-linking agent (M) is 5 parts by mass or more and 200 parts by mass or less based on 100 parts by mass of the polymer () having a protic polar group. The resin composition according to 1 or 2.
[請求項 4] アルコキシメチル基を 2つ以上有する化合物及びメチロール基を 2 つ以上有する化合物の少なくとも一方を更に含有する、 請求項 1〜 3 の何れかに記載の樹脂組成物。 [Claim 4] The resin composition according to any one of claims 1 to 3, further comprising at least one of a compound having two or more alkoxymethyl groups and a compound having two or more methylol groups.
[請求項 5] 請求項 1〜 4の何れかに記載の樹脂組成物からなる樹脂膜を備える 、 電子部品。 \¥0 2020/175037 42 卩(:17 2020 /004163 [Claim 5] An electronic component, comprising a resin film comprising the resin composition according to any one of claims 1 to 4. \¥0 2020/1750 37 42 卩 (: 17 2020 /004163
[請求項 6] 請求項 1〜 4の何れかに記載の樹脂組成物を用いて形成した塗膜を [Claim 6] A coating film formed using the resin composition according to any one of claims 1 to 4.
2〇〇 以上で加熱する工程を含む、 樹脂膜の製造方法。 A method for manufacturing a resin film, which includes the step of heating at 200 or more.
PCT/JP2020/004163 2019-02-28 2020-02-04 Resin composition, electronic component, and method for producing resin film WO2020175037A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2021501827A JP7439817B2 (en) 2019-02-28 2020-02-04 Resin composition, electronic component, and method for producing resin film
KR1020217025192A KR20210132027A (en) 2019-02-28 2020-02-04 Resin composition, electronic component, and manufacturing method of resin film
CN202080012831.4A CN113396182B (en) 2019-02-28 2020-02-04 Resin composition, electronic component, and method for producing resin film

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-036024 2019-02-28
JP2019036024 2019-02-28

Publications (1)

Publication Number Publication Date
WO2020175037A1 true WO2020175037A1 (en) 2020-09-03

Family

ID=72239759

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2020/004163 WO2020175037A1 (en) 2019-02-28 2020-02-04 Resin composition, electronic component, and method for producing resin film

Country Status (5)

Country Link
JP (1) JP7439817B2 (en)
KR (1) KR20210132027A (en)
CN (1) CN113396182B (en)
TW (1) TWI816983B (en)
WO (1) WO2020175037A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024095777A1 (en) * 2022-10-31 2024-05-10 日本ゼオン株式会社 Resin composition

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4512131B1 (en) * 1967-03-10 1970-05-02
JP2008242007A (en) * 2007-03-27 2008-10-09 Nippon Zeon Co Ltd Radiation-sensitive composition
JP2009295374A (en) * 2008-06-04 2009-12-17 Nippon Zeon Co Ltd Resin composition, barrier rib, and organic electroluminescent element
WO2015037584A1 (en) * 2013-09-10 2015-03-19 日本化薬株式会社 Epoxy resin mixture, epoxy resin composition, cured product and semiconductor device
WO2018058116A1 (en) * 2016-09-26 2018-03-29 Sabic Global Technologies B.V. High heat and high toughness epoxy compositions, articles, and uses thereof

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4512131B2 (en) 2007-12-28 2010-07-28 株式会社日立製作所 Radiation imaging apparatus, nuclear medicine diagnosis apparatus, and position adjustment apparatus
KR102406577B1 (en) * 2013-11-28 2022-06-07 제온 코포레이션 Laminate
CN106536589A (en) * 2014-07-22 2017-03-22 沙特基础工业全球技术有限公司 High heat monomers and methods of use thereof
CN105542127B (en) * 2014-10-22 2020-04-10 味之素株式会社 Resin composition
JP6428147B2 (en) 2014-10-22 2018-11-28 味の素株式会社 Resin composition
WO2016147735A1 (en) * 2015-03-18 2016-09-22 三菱瓦斯化学株式会社 Resin composition, prepreg, metal foil-clad laminate, resin sheet, and printed wiring board
KR20170083284A (en) * 2016-01-08 2017-07-18 동우 화인켐 주식회사 Film Touch Sensor and Method for Fabricating the Same
KR102269563B1 (en) 2016-03-23 2021-06-24 니폰 제온 가부시키가이샤 Resin composition, resin film, and electronic component
KR102040296B1 (en) * 2016-12-19 2019-11-04 삼성에스디아이 주식회사 Film-type semiconductor encapsulation member, semiconductor package prepared by using the same and method for manufacturing thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4512131B1 (en) * 1967-03-10 1970-05-02
JP2008242007A (en) * 2007-03-27 2008-10-09 Nippon Zeon Co Ltd Radiation-sensitive composition
JP2009295374A (en) * 2008-06-04 2009-12-17 Nippon Zeon Co Ltd Resin composition, barrier rib, and organic electroluminescent element
WO2015037584A1 (en) * 2013-09-10 2015-03-19 日本化薬株式会社 Epoxy resin mixture, epoxy resin composition, cured product and semiconductor device
WO2018058116A1 (en) * 2016-09-26 2018-03-29 Sabic Global Technologies B.V. High heat and high toughness epoxy compositions, articles, and uses thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024095777A1 (en) * 2022-10-31 2024-05-10 日本ゼオン株式会社 Resin composition

Also Published As

Publication number Publication date
CN113396182A (en) 2021-09-14
JP7439817B2 (en) 2024-02-28
CN113396182B (en) 2023-01-13
TW202043349A (en) 2020-12-01
JPWO2020175037A1 (en) 2020-09-03
KR20210132027A (en) 2021-11-03
TWI816983B (en) 2023-10-01

Similar Documents

Publication Publication Date Title
TWI662363B (en) Radiation-sensitive resin composition and electronic component
TWI636883B (en) Laminated body
CN113840849B (en) Resin composition, electronic component, and method for producing resin film
JP2017050322A (en) Substrate processing method, semiconductor device and manufacturing method thereof
JP7088010B2 (en) Infrared LED
KR102329361B1 (en) Composition for forming interlayer insulating film, interlayer insulating film, method for forming interlayer insulating film pattern, and device
WO2020175037A1 (en) Resin composition, electronic component, and method for producing resin film
JP6386370B2 (en) Laminated structure, photocurable composition, and method for producing laminated structure
TW201716511A (en) Resin composition
TW201716318A (en) Resin composition
JP7192775B2 (en) Positive radiation-sensitive resin composition
JP7439818B2 (en) Resin compositions, resin films, and electronic components
KR20170113292A (en) Composition for forming interlayer insulating film, interlayer insulating film, method for forming interlayer insulating film pattern, and device
JP2010070616A (en) Resin composition, resin film, and electronic component
TW201807110A (en) Composition for forming release layer, laminate, and method for producing laminate
TWI715748B (en) Radiation-sensitive resin composition and electronic component
WO2022080195A1 (en) Radiation-sensitive resin composition
KR102669089B1 (en) Positive radiation sensitive resin composition
US20160237201A1 (en) Filling material for three-dimensional mounting of semiconductor element

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20762298

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2021501827

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20762298

Country of ref document: EP

Kind code of ref document: A1